DE602006019452D1 - Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen - Google Patents

Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Info

Publication number
DE602006019452D1
DE602006019452D1 DE602006019452T DE602006019452T DE602006019452D1 DE 602006019452 D1 DE602006019452 D1 DE 602006019452D1 DE 602006019452 T DE602006019452 T DE 602006019452T DE 602006019452 T DE602006019452 T DE 602006019452T DE 602006019452 D1 DE602006019452 D1 DE 602006019452D1
Authority
DE
Germany
Prior art keywords
frit
consolidated
substrates
hole
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006019452T
Other languages
English (en)
Inventor
Tanguy Ronan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE602006019452D1 publication Critical patent/DE602006019452D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00831—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
DE602006019452T 2006-11-30 2006-11-30 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen Active DE602006019452D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06301197A EP1927576B1 (de) 2006-11-30 2006-11-30 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Publications (1)

Publication Number Publication Date
DE602006019452D1 true DE602006019452D1 (de) 2011-02-17

Family

ID=38169684

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006019452T Active DE602006019452D1 (de) 2006-11-30 2006-11-30 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Country Status (10)

Country Link
US (1) US20100068107A1 (de)
EP (2) EP1927576B1 (de)
JP (1) JP5144675B2 (de)
KR (1) KR20090096491A (de)
CN (1) CN101636345B (de)
AT (1) ATE494260T1 (de)
DE (1) DE602006019452D1 (de)
ES (1) ES2359427T3 (de)
TW (1) TW200846277A (de)
WO (1) WO2008066796A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602006019452D1 (de) * 2006-11-30 2011-02-17 Corning Inc Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen
EP2377607B1 (de) 2010-04-19 2018-05-30 Corning Incorporated Flüssigkeitsverbinder für mikroreaktormodule
EP2422874A1 (de) * 2010-08-31 2012-02-29 Corning Incorporated Fluidische Module mit verbesserten thermischen Eigenschaften
US9446378B2 (en) 2011-11-30 2016-09-20 Corning Incorporated Fluidic module permanent stack assemblies and methods
KR20200057067A (ko) 2017-10-13 2020-05-25 코닝 인코포레이티드 성형된(shaped) 제품을 형성하기 위한 방법 및 장치, 성형된 제품, 액체 렌즈를 제조하기 위한 방법, 및 액체 렌즈
WO2019075334A1 (en) * 2017-10-13 2019-04-18 Corning Incorporated METHODS AND APPARATUS FOR FORMING PROFILE ARTICLES, PROFILE ARTICLES, METHODS OF MAKING LIQUID LENSES, AND LIQUID LENSES
US11752500B2 (en) 2018-04-27 2023-09-12 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices
US20210291172A1 (en) * 2018-08-06 2021-09-23 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE470347B (sv) * 1990-05-10 1994-01-31 Pharmacia Lkb Biotech Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system
JPH05152743A (ja) * 1991-11-28 1993-06-18 Taiyo Yuden Co Ltd スルーホール形成方法
JPH05217419A (ja) * 1992-02-06 1993-08-27 Mitsubishi Materials Corp 厚膜回路基板用銅・ガラスフリット組成物
JPH0866911A (ja) * 1994-08-29 1996-03-12 Taiyo Yuden Co Ltd セラミック積層型電子部品の製造方法
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication
EP1415706B1 (de) * 2002-10-29 2017-07-12 Corning Incorporated Beschichtete Mikrostruktur und deren Herstellungsverfahren
US7943393B2 (en) * 2003-07-14 2011-05-17 Phynexus, Inc. Method and device for extracting an analyte
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
DE602006019452D1 (de) * 2006-11-30 2011-02-17 Corning Inc Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Also Published As

Publication number Publication date
EP1927576B1 (de) 2011-01-05
CN101636345A (zh) 2010-01-27
JP5144675B2 (ja) 2013-02-13
ES2359427T3 (es) 2011-05-23
WO2008066796A1 (en) 2008-06-05
ATE494260T1 (de) 2011-01-15
US20100068107A1 (en) 2010-03-18
EP2099708A1 (de) 2009-09-16
EP1927576A1 (de) 2008-06-04
KR20090096491A (ko) 2009-09-10
JP2010522641A (ja) 2010-07-08
TW200846277A (en) 2008-12-01
CN101636345B (zh) 2012-01-04

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