ATE494260T1 - Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen - Google Patents

Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Info

Publication number
ATE494260T1
ATE494260T1 AT06301197T AT06301197T ATE494260T1 AT E494260 T1 ATE494260 T1 AT E494260T1 AT 06301197 T AT06301197 T AT 06301197T AT 06301197 T AT06301197 T AT 06301197T AT E494260 T1 ATE494260 T1 AT E494260T1
Authority
AT
Austria
Prior art keywords
frit
devices
consolidated
substrates
hole
Prior art date
Application number
AT06301197T
Other languages
English (en)
Inventor
Tanguy Ronan
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of ATE494260T1 publication Critical patent/ATE494260T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00831—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT06301197T 2006-11-30 2006-11-30 Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen ATE494260T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06301197A EP1927576B1 (de) 2006-11-30 2006-11-30 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Publications (1)

Publication Number Publication Date
ATE494260T1 true ATE494260T1 (de) 2011-01-15

Family

ID=38169684

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06301197T ATE494260T1 (de) 2006-11-30 2006-11-30 Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Country Status (10)

Country Link
US (1) US20100068107A1 (de)
EP (2) EP1927576B1 (de)
JP (1) JP5144675B2 (de)
KR (1) KR20090096491A (de)
CN (1) CN101636345B (de)
AT (1) ATE494260T1 (de)
DE (1) DE602006019452D1 (de)
ES (1) ES2359427T3 (de)
TW (1) TW200846277A (de)
WO (1) WO2008066796A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen
EP2377607B1 (de) 2010-04-19 2018-05-30 Corning Incorporated Flüssigkeitsverbinder für mikroreaktormodule
EP2422874A1 (de) * 2010-08-31 2012-02-29 Corning Incorporated Fluidische Module mit verbesserten thermischen Eigenschaften
CN104144745B (zh) * 2011-11-30 2017-03-08 康宁股份有限公司 流体模块永久堆叠件组件和方法
CN111213074B (zh) * 2017-10-13 2022-06-17 康宁股份有限公司 形成具有形状的制品的方法和设备，具有形状的制品，制造液体透镜的方法和液体透镜
US11780769B2 (en) 2017-10-13 2023-10-10 Corning Incorporated Methods and apparatus for forming shaped articles, shaped articles, methods for manufacturing liquid lenses, and liquid lenses
WO2019209776A1 (en) 2018-04-27 2019-10-31 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices
US20210291172A1 (en) * 2018-08-06 2021-09-23 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE470347B (sv) * 1990-05-10 1994-01-31 Pharmacia Lkb Biotech Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system
JPH05152743A (ja) * 1991-11-28 1993-06-18 Taiyo Yuden Co Ltd スルーホール形成方法
JPH05217419A (ja) * 1992-02-06 1993-08-27 Mitsubishi Materials Corp 厚膜回路基板用銅・ガラスフリット組成物
JPH0866911A (ja) * 1994-08-29 1996-03-12 Taiyo Yuden Co Ltd セラミック積層型電子部品の製造方法
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication
EP1415706B1 (de) * 2002-10-29 2017-07-12 Corning Incorporated Beschichtete Mikrostruktur und deren Herstellungsverfahren
US7943393B2 (en) * 2003-07-14 2011-05-17 Phynexus, Inc. Method and device for extracting an analyte
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Also Published As

Publication number Publication date
ES2359427T3 (es) 2011-05-23
EP1927576A1 (de) 2008-06-04
JP2010522641A (ja) 2010-07-08
KR20090096491A (ko) 2009-09-10
CN101636345B (zh) 2012-01-04
WO2008066796A1 (en) 2008-06-05
TW200846277A (en) 2008-12-01
US20100068107A1 (en) 2010-03-18
DE602006019452D1 (de) 2011-02-17
EP2099708A1 (de) 2009-09-16
JP5144675B2 (ja) 2013-02-13
EP1927576B1 (de) 2011-01-05
CN101636345A (zh) 2010-01-27

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