ATE443922T1 - Elektronenoptische anordnung, verfahren zur herstellung derselben, ladungsträgerteilchenstrahl-belichtungsgerät und verfahren zur herstellung der zugehörigen vorrichtung - Google Patents

Elektronenoptische anordnung, verfahren zur herstellung derselben, ladungsträgerteilchenstrahl-belichtungsgerät und verfahren zur herstellung der zugehörigen vorrichtung

Info

Publication number
ATE443922T1
ATE443922T1 AT01303029T AT01303029T ATE443922T1 AT E443922 T1 ATE443922 T1 AT E443922T1 AT 01303029 T AT01303029 T AT 01303029T AT 01303029 T AT01303029 T AT 01303029T AT E443922 T1 ATE443922 T1 AT E443922T1
Authority
AT
Austria
Prior art keywords
producing
electron
exposure apparatus
charged particle
particle beam
Prior art date
Application number
AT01303029T
Other languages
English (en)
Inventor
Yasuhiro Shimada
Takayuki Yagi
Haruhito Ono
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE443922T1 publication Critical patent/ATE443922T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1205—Microlenses
AT01303029T 2000-03-31 2001-03-30 Elektronenoptische anordnung, verfahren zur herstellung derselben, ladungsträgerteilchenstrahl-belichtungsgerät und verfahren zur herstellung der zugehörigen vorrichtung ATE443922T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000097067 2000-03-31
JP2001074736A JP4947841B2 (ja) 2000-03-31 2001-03-15 荷電粒子線露光装置

Publications (1)

Publication Number Publication Date
ATE443922T1 true ATE443922T1 (de) 2009-10-15

Family

ID=26589082

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01303029T ATE443922T1 (de) 2000-03-31 2001-03-30 Elektronenoptische anordnung, verfahren zur herstellung derselben, ladungsträgerteilchenstrahl-belichtungsgerät und verfahren zur herstellung der zugehörigen vorrichtung

Country Status (5)

Country Link
US (1) US6872950B2 (de)
EP (1) EP1139384B1 (de)
JP (1) JP4947841B2 (de)
AT (1) ATE443922T1 (de)
DE (1) DE60139968D1 (de)

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Also Published As

Publication number Publication date
EP1139384B1 (de) 2009-09-23
US6872950B2 (en) 2005-03-29
US20010054690A1 (en) 2001-12-27
JP2001345260A (ja) 2001-12-14
EP1139384A2 (de) 2001-10-04
DE60139968D1 (de) 2009-11-05
EP1139384A3 (de) 2007-08-29
JP4947841B2 (ja) 2012-06-06

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