ATE427560T1 - Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtung - Google Patents

Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtung

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Publication number
ATE427560T1
ATE427560T1 AT04736684T AT04736684T ATE427560T1 AT E427560 T1 ATE427560 T1 AT E427560T1 AT 04736684 T AT04736684 T AT 04736684T AT 04736684 T AT04736684 T AT 04736684T AT E427560 T1 ATE427560 T1 AT E427560T1
Authority
AT
Austria
Prior art keywords
electronic device
producing
arrangement
substrate
vertical
Prior art date
Application number
AT04736684T
Other languages
English (en)
Inventor
Freddy Roozeboom
Adrianus Buijsman
Patrice Gamand
Antonius Kemmeren
Gerardus Hubert
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE427560T1 publication Critical patent/ATE427560T1/de

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    • HELECTRICITY
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    • H01L23/64Impedance arrangements
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    • H01L28/82Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
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    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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    • H01L21/76898Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
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AT04736684T 2003-06-20 2004-06-11 Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtung ATE427560T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03300035 2003-06-20
EP04300132 2004-03-10

Publications (1)

Publication Number Publication Date
ATE427560T1 true ATE427560T1 (de) 2009-04-15

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US20170170131A1 (en) 2017-06-15
JP2007516589A (ja) 2007-06-21
DE602004020344D1 (de) 2009-05-14
US20060131691A1 (en) 2006-06-22
JP5058597B2 (ja) 2012-10-24
KR101086520B1 (ko) 2011-11-23
WO2004114397A1 (en) 2004-12-29
KR20060033866A (ko) 2006-04-20
US9530857B2 (en) 2016-12-27
EP1639634A1 (de) 2006-03-29

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