DE602004020344D1 - Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtung - Google Patents
Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtungInfo
- Publication number
- DE602004020344D1 DE602004020344D1 DE602004020344T DE602004020344T DE602004020344D1 DE 602004020344 D1 DE602004020344 D1 DE 602004020344D1 DE 602004020344 T DE602004020344 T DE 602004020344T DE 602004020344 T DE602004020344 T DE 602004020344T DE 602004020344 D1 DE602004020344 D1 DE 602004020344D1
- Authority
- DE
- Germany
- Prior art keywords
- electronic device
- arrangement
- manufacturing
- substrate
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 239000003990 capacitor Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000011282 treatment Methods 0.000 abstract 1
Classifications
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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EP03300035 | 2003-06-20 | ||
EP04300132 | 2004-03-10 | ||
PCT/IB2004/050887 WO2004114397A1 (en) | 2003-06-20 | 2004-06-11 | Electronic device, assembly and methods of manufacturing an electronic device |
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DE602004020344D1 true DE602004020344D1 (de) | 2009-05-14 |
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DE602004020344T Active DE602004020344D1 (de) | 2003-06-20 | 2004-06-11 | Elektronische vorrichtung, anordnung und verfahren zum herstellen einer elektronischen vorrichtung |
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US (2) | US9530857B2 (de) |
EP (1) | EP1639634B1 (de) |
JP (1) | JP5058597B2 (de) |
KR (1) | KR101086520B1 (de) |
AT (1) | ATE427560T1 (de) |
DE (1) | DE602004020344D1 (de) |
WO (1) | WO2004114397A1 (de) |
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-
2004
- 2004-06-11 EP EP04736684A patent/EP1639634B1/de active Active
- 2004-06-11 AT AT04736684T patent/ATE427560T1/de not_active IP Right Cessation
- 2004-06-11 DE DE602004020344T patent/DE602004020344D1/de active Active
- 2004-06-11 KR KR1020057024459A patent/KR101086520B1/ko active IP Right Grant
- 2004-06-11 JP JP2006516678A patent/JP5058597B2/ja active Active
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- 2004-06-11 US US10/560,717 patent/US9530857B2/en active Active
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- 2016-12-21 US US15/387,035 patent/US20170170131A1/en not_active Abandoned
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KR101086520B1 (ko) | 2011-11-23 |
US20170170131A1 (en) | 2017-06-15 |
JP2007516589A (ja) | 2007-06-21 |
WO2004114397A1 (en) | 2004-12-29 |
US20060131691A1 (en) | 2006-06-22 |
EP1639634A1 (de) | 2006-03-29 |
ATE427560T1 (de) | 2009-04-15 |
KR20060033866A (ko) | 2006-04-20 |
US9530857B2 (en) | 2016-12-27 |
JP5058597B2 (ja) | 2012-10-24 |
EP1639634B1 (de) | 2009-04-01 |
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