ATE342608T1 - Herstellungsverfahren einer hybriden integrierten schaltung mit einem halbleiterbauelement und einem piezoelektrischen filter - Google Patents

Herstellungsverfahren einer hybriden integrierten schaltung mit einem halbleiterbauelement und einem piezoelektrischen filter

Info

Publication number
ATE342608T1
ATE342608T1 AT01915222T AT01915222T ATE342608T1 AT E342608 T1 ATE342608 T1 AT E342608T1 AT 01915222 T AT01915222 T AT 01915222T AT 01915222 T AT01915222 T AT 01915222T AT E342608 T1 ATE342608 T1 AT E342608T1
Authority
AT
Austria
Prior art keywords
layer
electrode
piezoelectric
situated
acoustic reflector
Prior art date
Application number
AT01915222T
Other languages
English (en)
Inventor
Ronald Dekker
Wilhelmus M C Dolmans
Lukas Leyten
Henricus G R Maas
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE342608T1 publication Critical patent/ATE342608T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Networks Using Active Elements (AREA)
AT01915222T 2000-02-22 2001-02-09 Herstellungsverfahren einer hybriden integrierten schaltung mit einem halbleiterbauelement und einem piezoelektrischen filter ATE342608T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00200614 2000-02-22

Publications (1)

Publication Number Publication Date
ATE342608T1 true ATE342608T1 (de) 2006-11-15

Family

ID=8171061

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01915222T ATE342608T1 (de) 2000-02-22 2001-02-09 Herstellungsverfahren einer hybriden integrierten schaltung mit einem halbleiterbauelement und einem piezoelektrischen filter

Country Status (8)

Country Link
US (1) US6379987B1 (de)
EP (1) EP1175727B1 (de)
JP (1) JP4843175B2 (de)
KR (1) KR100791657B1 (de)
AT (1) ATE342608T1 (de)
DE (1) DE60123709T2 (de)
TW (1) TW533609B (de)
WO (1) WO2001063758A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020029882A (ko) * 2002-03-02 2002-04-20 주식회사 에이엔티 엘시엠피 공정법에 의한 탄성파소자의 제작방법
FR2890490A1 (fr) * 2005-09-05 2007-03-09 St Microelectronics Sa Support de resonateur acoustique et circuit integre correspondant
KR100934957B1 (ko) * 2008-02-22 2010-01-06 한국과학기술연구원 압전 폴리머 기판을 이용한 하이브리드 전기소자와 그제조방법
US20120163131A1 (en) * 2010-12-22 2012-06-28 Sondex Limited Mono-directional Ultrasound Transducer for Borehole Imaging
DE102017130924B3 (de) * 2017-12-21 2019-05-16 RF360 Europe GmbH Hybridfilter
DE102017130926A1 (de) * 2017-12-21 2019-06-27 RF360 Europe GmbH Waferanordnung, Verfahren zur Fertigung von derselben und Hybridfilter
EA035222B1 (ru) * 2018-10-09 2020-05-18 Открытое акционерное общество "Межгосударственная Корпорация Развития" Монолитный пьезоэлектрический фильтр

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3414832A (en) * 1964-12-04 1968-12-03 Westinghouse Electric Corp Acoustically resonant device
JPS58137317A (ja) * 1982-02-09 1983-08-15 Nec Corp 圧電薄膜複合振動子
JPS6175614A (ja) * 1984-09-21 1986-04-18 Nec Corp 薄膜圧電振動子の製造方法
JPH04184985A (ja) * 1990-11-20 1992-07-01 Canon Inc 圧電体変位素子の製造方法
US5646583A (en) * 1996-01-04 1997-07-08 Rockwell International Corporation Acoustic isolator having a high impedance layer of hafnium oxide
JP3809712B2 (ja) * 1996-08-27 2006-08-16 セイコーエプソン株式会社 薄膜デバイスの転写方法
EP0890978B1 (de) * 1997-07-10 2005-09-28 STMicroelectronics S.r.l. Verfahren zur Herstellung von hochempfindlichen, kapazitiven und resonierenden integrierten Sensoren, insbesondere Beschleunigungsmesser und Kreisel, und damit hergestellte Sensoren
EP0895090B1 (de) * 1997-07-31 2003-12-10 STMicroelectronics S.r.l. Verfahren zum Herstellen hochempfindlicher integrierter Beschleunigungs- und Gyroskopsensoren und Sensoren, die derartig hergestellt werden
KR100316383B1 (ko) * 1998-10-30 2002-02-19 윤덕용 모노리딕직접회로위에박막또는후막단결정압전소자를집적한단일칩라디오구조및그제조방법
EP1177623B1 (de) * 2000-02-22 2009-08-05 Nxp B.V. Verfahren zur herstellung eines auf einem trägersubstrat geformten piezoelektrischen filters mit einem akustischen resonator auf einer akustischen reflektorschicht

Also Published As

Publication number Publication date
TW533609B (en) 2003-05-21
EP1175727B1 (de) 2006-10-11
DE60123709T2 (de) 2007-09-20
JP2003524902A (ja) 2003-08-19
KR100791657B1 (ko) 2008-01-03
JP4843175B2 (ja) 2011-12-21
WO2001063758A1 (en) 2001-08-30
DE60123709D1 (de) 2006-11-23
EP1175727A1 (de) 2002-01-30
US20020031855A1 (en) 2002-03-14
KR20020000631A (ko) 2002-01-05
US6379987B1 (en) 2002-04-30

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