ATE329677T1 - Flussigkeitsgekühlte kühlfalle - Google Patents

Flussigkeitsgekühlte kühlfalle

Info

Publication number
ATE329677T1
ATE329677T1 AT97907580T AT97907580T ATE329677T1 AT E329677 T1 ATE329677 T1 AT E329677T1 AT 97907580 T AT97907580 T AT 97907580T AT 97907580 T AT97907580 T AT 97907580T AT E329677 T1 ATE329677 T1 AT E329677T1
Authority
AT
Austria
Prior art keywords
trap
stage
heat exchanger
condensable vapor
condensation
Prior art date
Application number
AT97907580T
Other languages
English (en)
Inventor
Youfan Gu
Dana S Hauschultz
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of ATE329677T1 publication Critical patent/ATE329677T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
    • B01D5/0006—Coils or serpentines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0033—Other features
    • B01D5/0036—Multiple-effect condensation; Fractional condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D7/00—Sublimation
    • B01D7/02—Crystallisation directly from the vapour phase
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/15—Cold traps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Glass Compositions (AREA)
AT97907580T 1996-02-09 1997-02-07 Flussigkeitsgekühlte kühlfalle ATE329677T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/599,622 US5820641A (en) 1996-02-09 1996-02-09 Fluid cooled trap

Publications (1)

Publication Number Publication Date
ATE329677T1 true ATE329677T1 (de) 2006-07-15

Family

ID=24400379

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97907580T ATE329677T1 (de) 1996-02-09 1997-02-07 Flussigkeitsgekühlte kühlfalle

Country Status (7)

Country Link
US (1) US5820641A (de)
EP (2) EP1716899B1 (de)
JP (2) JP4316011B2 (de)
KR (1) KR100316796B1 (de)
AT (1) ATE329677T1 (de)
DE (1) DE69736124T2 (de)
WO (1) WO1997028886A1 (de)

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Also Published As

Publication number Publication date
KR100316796B1 (ko) 2002-01-16
JP5302034B2 (ja) 2013-10-02
DE69736124T2 (de) 2007-01-04
JP2009101361A (ja) 2009-05-14
EP1716899A3 (de) 2007-09-05
DE69736124D1 (de) 2006-07-27
EP1716899A2 (de) 2006-11-02
EP0956142A1 (de) 1999-11-17
EP0956142B1 (de) 2006-06-14
KR19990082397A (ko) 1999-11-25
JP4316011B2 (ja) 2009-08-19
EP0956142A4 (de) 1999-11-24
US5820641A (en) 1998-10-13
WO1997028886A1 (en) 1997-08-14
JP2001519709A (ja) 2001-10-23
EP1716899B1 (de) 2012-10-10

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