ATE324230T1 - Greifmechanismus, -vorrichtung und -verfahren - Google Patents

Greifmechanismus, -vorrichtung und -verfahren

Info

Publication number
ATE324230T1
ATE324230T1 AT02725033T AT02725033T ATE324230T1 AT E324230 T1 ATE324230 T1 AT E324230T1 AT 02725033 T AT02725033 T AT 02725033T AT 02725033 T AT02725033 T AT 02725033T AT E324230 T1 ATE324230 T1 AT E324230T1
Authority
AT
Austria
Prior art keywords
gripper mechanism
gripper apparatus
grasping mechanism
grasping
height adjusting
Prior art date
Application number
AT02725033T
Other languages
English (en)
Inventor
Robert Charles Downs
Mark Richard Weselak
James Kevin Mainquist
Original Assignee
Irm Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irm Llc filed Critical Irm Llc
Application granted granted Critical
Publication of ATE324230T1 publication Critical patent/ATE324230T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00—Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/02—Delivering or advancing articles from machines; Advancing articles to or into piles by mechanical grippers engaging the leading edge only of the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2555/00—Actuating means
    • B65H2555/30—Multi-axis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S294/00—Handling: hand and hoist-line implements
    • Y10S294/902—Gripping element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Coating Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Making Paper Articles (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Confectionery (AREA)
AT02725033T 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren ATE324230T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/793,254 US6592324B2 (en) 2001-02-26 2001-02-26 Gripper mechanism

Publications (1)

Publication Number Publication Date
ATE324230T1 true ATE324230T1 (de) 2006-05-15

Family

ID=25159484

Family Applications (2)

Application Number Title Priority Date Filing Date
AT06008469T ATE415249T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren
AT02725033T ATE324230T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT06008469T ATE415249T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren

Country Status (8)

Country Link
US (4) US6592324B2 (de)
EP (2) EP1381495B1 (de)
JP (1) JP2005502479A (de)
AT (2) ATE415249T1 (de)
AU (1) AU2002255622B2 (de)
CA (1) CA2438789A1 (de)
DE (2) DE60230077D1 (de)
WO (1) WO2002068157A2 (de)

Families Citing this family (133)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7175214B2 (en) * 2000-03-16 2007-02-13 Ade Corporation Wafer gripping fingers to minimize distortion
EP1325459A4 (de) * 2000-10-13 2010-09-01 Irm Llc Verarbeitungssystem mit hohem durchsatz und gebrauchsverfahren
US6592324B2 (en) 2001-02-26 2003-07-15 Irm, Llc Gripper mechanism
US6869792B2 (en) 2001-03-16 2005-03-22 Irm, Llc Method and apparatus for performing multiple processing steps on a sample in a single vessel
US6659142B2 (en) 2001-03-27 2003-12-09 Irm, Llc Apparatus and method for preparing fluid mixtures
JP4622175B2 (ja) * 2001-07-04 2011-02-02 株式会社デンソー 乾燥ハニカム構造体の把持方法
JP2004535681A (ja) * 2001-07-14 2004-11-25 ブルックス オートメーション インコーポレイテッド 統合マッピングセンサを備えた中心位置決め用両側エッジグリップ・エンドエフェクタ
CN1291473C (zh) * 2001-12-04 2006-12-20 日商乐华股份有限公司 容器的暂时搬入、留置和搬出装置
JP2004155434A (ja) * 2002-11-01 2004-06-03 Toyo Seikan Kaisha Ltd 容器グリッパ装置
DE10258633A1 (de) * 2002-12-16 2004-07-08 Kuka Roboter Gmbh Verfahren und Vorrichtung zum Positionieren von zusammenzufügenden Bauteilen
US7578647B2 (en) * 2003-01-27 2009-08-25 Applied Materials, Inc. Load port configurations for small lot size substrate carriers
US7611318B2 (en) * 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
US20040187445A1 (en) * 2003-03-28 2004-09-30 Hildebrand John Joseph Gripping arm assembly for loading a filled inner container into an outer container
US20070001472A1 (en) * 2003-03-28 2007-01-04 Hildebrand John J Jr Gripping arm assembly for loading a filled inner container into an outer container
JP3876234B2 (ja) * 2003-06-17 2007-01-31 ファナック株式会社 コネクタ把持装置、同装置を備えたコネクタ検査システム及びコネクタ接続システム
WO2005047856A2 (en) * 2003-11-07 2005-05-26 Kent John H Automated mineral processing systems and methods
KR20070089042A (ko) * 2003-12-04 2007-08-30 아이알엠 엘엘씨 재료 이송 장치, 컴퓨터 프로그램 제품 및 방법
DE102004020590A1 (de) * 2004-04-27 2005-11-17 Carl Zeiss Jena Gmbh Greifvorrichtung
JP4041837B2 (ja) * 2004-07-13 2008-02-06 松下電器産業株式会社 物品保持システム、ロボット及びロボット制御方法
CN101035622A (zh) * 2004-08-04 2007-09-12 Irm有限公司 多井容器处理系统、系统部件和相关方法
US20060028802A1 (en) * 2004-08-04 2006-02-09 Irm, Llc Object storage devices, systems, and related methods
US7993093B2 (en) * 2004-09-15 2011-08-09 Applied Materials, Inc. Systems and methods for wafer translation
EP1869476A2 (de) * 2005-03-22 2007-12-26 Irm Llc Vorrichtungen, systeme und dazugehörige verfahren zur profilierung von verbindungen
US20060263270A1 (en) * 2005-05-18 2006-11-23 Beckman Coulter, Inc. Robotic grip and twist assembly
US20060270027A1 (en) * 2005-05-27 2006-11-30 Irm Llc High throughput incubation devices and systems
KR100949502B1 (ko) * 2005-06-20 2010-03-24 엘지디스플레이 주식회사 액정표시장치 제조 공정용 기판 반송장치
US7338249B1 (en) * 2005-06-30 2008-03-04 Thermo Finnigan Llc Sample plate gripping mechanism
US7980612B2 (en) * 2005-07-12 2011-07-19 Schlumberger Technology Corporation Clamping assembly
WO2007047163A2 (en) * 2005-10-04 2007-04-26 Applied Materials, Inc. Methods and apparatus for drying a substrate
US20070107193A1 (en) * 2005-10-28 2007-05-17 Milojevic Dragoslav K Positioning device for moveable portion of workpiece
US20070258858A1 (en) * 2006-05-03 2007-11-08 Brian Rasnow Robotic gripper for transporting multiple object types
WO2007138701A1 (ja) * 2006-05-31 2007-12-06 Ibiden Co., Ltd. 把持装置、及び、ハニカム構造体の製造方法
US7896602B2 (en) * 2006-06-09 2011-03-01 Lutz Rebstock Workpiece stocker with circular configuration
US7530564B2 (en) * 2006-07-10 2009-05-12 Goss International Americas, Inc. Opposing link gripper
US7670555B2 (en) * 2006-09-08 2010-03-02 Rex A. Hoover Parallel gripper for handling multiwell plate
JP2008110284A (ja) * 2006-10-30 2008-05-15 Seiko Epson Corp 物品保持装置及び物品搬送装置
US20080112787A1 (en) 2006-11-15 2008-05-15 Dynamic Micro Systems Removable compartments for workpiece stocker
US8376428B2 (en) 2006-11-15 2013-02-19 Dynamic Micro System Semiconductor Equipment GmbH Integrated gripper for workpiece transfer
US20100069410A1 (en) * 2006-12-01 2010-03-18 Emisphere Technologies Inc. acyclovir formulations
US7789443B2 (en) * 2007-03-16 2010-09-07 Axcelis Technologies, Inc. Workpiece gripping device
US8657550B2 (en) * 2007-04-12 2014-02-25 Leco Corporation Crucible shuttle assembly with linearly moving carriage
US8323565B2 (en) 2007-04-12 2012-12-04 Leco Corporation Crucible shuttle assembly and method of operation
DE102007021494B4 (de) * 2007-05-08 2010-06-10 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Erfassen und Abstellen von stoßempfindlichen Platten
US8226142B2 (en) * 2007-08-09 2012-07-24 Axcelis Technologies, Inc. Workpiece gripping integrity sensor
WO2009029696A1 (en) * 2007-08-28 2009-03-05 Irm Llc Grippers and related systems and methods providing a certain degree of play along the vertical axis
DE102007058718A1 (de) * 2007-12-06 2009-06-10 Erweka Gmbh Vorrichtung und Verfahren zur automatischen Freisetzung und Messung von Wirkstoffen aus einer Arzneizubereitung
JP4511605B2 (ja) * 2008-02-27 2010-07-28 タツモ株式会社 搬送ロボット
FR2932273B1 (fr) * 2008-06-06 2011-10-07 Noviloire Sa Pince adaptee pour saisir un support d'echantillons biologiques, ensemble d'un support echantillons biologiques et d'une pince adaptee pour le saisir, et automate de traitement et/ou d'analyse d'echantillons biologiques
FR2932272B1 (fr) * 2008-06-09 2011-02-25 Stago Diagnostica Dispositif de prehension d'une cuvette de reaction
US8286320B2 (en) * 2008-09-18 2012-10-16 Automatic Handling International Apparatus and method for the robotic plugging/unplugging of rolls
US7948576B2 (en) * 2008-09-25 2011-05-24 Apple Inc. P-chassis arrangement for positioning a display stack
JP5373560B2 (ja) * 2008-11-17 2013-12-18 シスメックス株式会社 搬送装置及びこれを用いた検体分析装置
JP2010169497A (ja) * 2009-01-22 2010-08-05 Wako Pure Chem Ind Ltd マイクロプレートの処理装置
EP2251453B1 (de) * 2009-05-13 2013-12-11 SiO2 Medical Products, Inc. Behälterhalterung
US8911987B2 (en) * 2009-05-15 2014-12-16 Biomerieux, Inc System for rapid identification and/or characterization of a microbial agent in a sample
CA2760978C (en) 2009-05-15 2019-10-29 Biomerieux, Inc. Automated loading mechanism for microbial detection apparatus
EP2256703B1 (de) * 2009-05-29 2015-07-15 JVM Co., Ltd. Automatische Medizinspeicherung und Medizineinführungs- bzw. -abgabeverwaltungssystem
JP5346694B2 (ja) * 2009-06-05 2013-11-20 株式会社森精機製作所 工作機械
CN101920499B (zh) * 2009-06-12 2014-08-13 鸿富锦精密工业（深圳）有限公司 夹持装置
JP5202557B2 (ja) * 2010-03-05 2013-06-05 信越化学工業株式会社 ペリクルハンドリング治具
US8235437B2 (en) 2010-04-07 2012-08-07 Delaware Capital Formation, Inc. Electric gripper drive with a torsional compliance device
DE102010018966A1 (de) * 2010-04-28 2011-11-03 IPR-Intelligente Peripherien für Roboter GmbH Robotergreifer und Handhabungsroboter
US9131807B2 (en) * 2010-06-04 2015-09-15 Shambhu Nath Roy Robotic kitchen top cooking apparatus and method for preparation of dishes using computer recipies
JP5682810B2 (ja) * 2010-09-15 2015-03-11 セイコーエプソン株式会社 ロボット
JP5895337B2 (ja) 2010-09-15 2016-03-30 セイコーエプソン株式会社 ロボット
US9505504B2 (en) 2011-02-18 2016-11-29 Pouch Pac Innovations, Llc Apparatus for the two stage filling of flexible pouches
US9944037B2 (en) * 2011-05-12 2018-04-17 Pouch Pac Innovations, Llc Apparatus for simultaneously separating a plurality of pouches, transferring the pouches and method of same
JP5408186B2 (ja) * 2011-05-12 2014-02-05 株式会社安川電機 ハンドおよびロボット
DE102011110250B4 (de) 2011-05-13 2019-05-16 Leica Biosystems Nussloch Gmbh Greifvorrichtung zum Transportieren von Racks
TWI564988B (zh) 2011-06-03 2017-01-01 Ｔｅｌ Ｎｅｘｘ公司 平行且單一的基板處理系統
CN105702601B (zh) * 2011-06-23 2020-02-07 布鲁克斯Ccs有限公司 清洁系统和方法
JP5582313B2 (ja) * 2011-06-28 2014-09-03 株式会社安川電機 ロボットシステム
EP2728363B1 (de) * 2011-06-28 2021-06-02 Kabushiki Kaisha Yaskawa Denki Roboterhand und roboter
CN102873679B (zh) * 2011-07-13 2016-04-20 富泰华工业（深圳）有限公司 定位机构
US9431282B2 (en) * 2011-12-27 2016-08-30 Rudolph Technologies, Inc. Wafer inversion mechanism
JP2013180366A (ja) * 2012-03-01 2013-09-12 Seiko Epson Corp ロボット及びロボットハンド
US8935001B2 (en) * 2012-03-29 2015-01-13 bioMeriéux, Inc. System and method for establishing and/or maintaining proper alignment of a robotic transfer mechanism
CN103568016B (zh) * 2012-08-10 2015-11-25 鸿富锦精密工业（深圳）有限公司 夹装装置
KR101383722B1 (ko) * 2012-12-17 2014-04-08 현대자동차(주) 로봇의 양팔제어방법
US20140209434A1 (en) * 2013-01-31 2014-07-31 Honda Motor Co., Ltd. Apparatus for use with fixture assembly and workpiece
US9545724B2 (en) * 2013-03-14 2017-01-17 Brooks Automation, Inc. Tray engine with slide attached to an end effector base
EP2991808B1 (de) * 2013-04-29 2019-09-25 Versabuilt, Inc. System und verfahren zum speichern und verarbeiten von verschiedenen teilformen unter verwendung von robotischer beschickung
JP6619928B2 (ja) * 2013-11-06 2019-12-11 日立化成ダイアグノスティックス・システムズ株式会社 把持装置、搬送装置、及び分析装置
JP6196919B2 (ja) * 2014-03-05 2017-09-13 株式会社安川電機 ロボットシステム、液体移送制御装置、液体移送制御方法、及び薬剤製造方法
JP6171984B2 (ja) * 2014-03-07 2017-08-02 株式会社ダイフク 物品支持装置
JP6191544B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置
JP6191543B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置
JP6522608B2 (ja) * 2014-06-26 2019-05-29 株式会社日立ハイテクノロジーズ 検体検査自動化システムおよび検体チェックモジュール
CN105398635B (zh) * 2014-08-12 2017-10-24 上银科技股份有限公司 外壳自动定位的方法
CN104138868A (zh) * 2014-08-27 2014-11-12 吴中区横泾博尔机械厂 一种显示屏发光板全自动清洗机
CN104148325A (zh) * 2014-08-27 2014-11-19 吴中区横泾博尔机械厂 一种显示屏发光板全自动清洗机的发光板平行夹爪
DE102014113039B4 (de) * 2014-09-10 2018-05-17 Hiwin Technologies Corp. Automatisches Positionierverfahren für Gehäuse und die dazu notwendige Vorrichtung
WO2016061471A1 (en) * 2014-10-17 2016-04-21 Hitachi High Technologies America, Inc. Interactive laboratory robotic system
JP6327124B2 (ja) * 2014-11-12 2018-05-23 株式会社ダイフク 物品搬送車
US9296326B1 (en) * 2015-01-02 2016-03-29 Tim Young System and method for collecting recycling materials
US9352471B1 (en) * 2015-01-21 2016-05-31 Applied Materials, Inc. Substrate gripper apparatus and methods
JP6472698B2 (ja) * 2015-03-30 2019-02-20 テルモ株式会社 保持具ハンド、保持具移載装置、及び保持具の移載方法
WO2016187075A1 (en) * 2015-05-19 2016-11-24 Verselus, Llc Paddle assembly for holding an object
DE102015211698B4 (de) * 2015-06-24 2017-01-05 HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH System zum Transportieren, Öffnen sowie Schließen einer Transportbox sowie zum Einsetzen und Entnehmen eines in der Transportbox anordenbaren Behälters
JP6701007B2 (ja) * 2016-06-27 2020-05-27 川崎重工業株式会社 ワーク保持機構
WO2018067979A1 (en) * 2016-10-07 2018-04-12 Perky Jerky, Llc System and method for preparing meat products
CN206998968U (zh) * 2017-08-02 2018-02-13 京东方科技集团股份有限公司 机器人手臂及搬运机器人
CN107564845B (zh) * 2017-08-24 2019-12-27 京东方科技集团股份有限公司 一种机械手
WO2019071049A1 (en) 2017-10-04 2019-04-11 Leica Biosystems Imaging, Inc. INVENTORY AND REINTEGRATION SYSTEM OF BLADES
US11597612B2 (en) 2017-11-30 2023-03-07 Leica Biosystems Imaging, Inc. Slide rack gripper apparatus
AT521039B1 (de) * 2018-04-04 2019-10-15 Trumpf Maschinen Austria Gmbh & Co Kg Vorrichtung und Verfahren zur Überwachung von Relativbewegungen
US10639800B2 (en) * 2018-07-11 2020-05-05 Amazon Technologies, Inc. Robotic-arm end effector configured to engage a plurality of storage containers, and method of using the same
CN108748236A (zh) * 2018-08-13 2018-11-06 南京皓焜自动化科技有限公司 一种用于抓取钢材的机械抓手
JP6841804B2 (ja) * 2018-09-28 2021-03-10 ファナック株式会社 ロボットハンド
CN111254067B (zh) * 2018-12-03 2023-07-25 长春长光华大智造测序设备有限公司 一种生物芯片的装夹定位装置
US11167423B1 (en) * 2019-02-18 2021-11-09 Amazon Technologies, Inc. End of arm tool capable of ejecting totes
JP7547352B2 (ja) 2019-02-28 2024-09-09 エーエスエムエル ネザーランズ ビー．ブイ． レチクルアセンブリのアセンブリのための装置
CN110406873B (zh) * 2019-07-08 2024-07-09 广西科技大学 一种基于物联网技术的智联化立体仓库装置
CN110638601B (zh) * 2019-10-10 2021-11-23 南方医科大学第五附属医院 一种耳鼻喉综合诊疗台
US20230133493A1 (en) * 2020-02-12 2023-05-04 Jabil Inc. Apparatus, system and method for providing a flipper for in-process substrates
US11305436B2 (en) * 2020-02-24 2022-04-19 Tctm (Hong Kong) Limited Lateral gripper
CN113232032A (zh) 2020-04-28 2021-08-10 台湾积体电路制造股份有限公司 用于移动晶片载具及包装材的机械夹爪及其操作方法
US11685055B2 (en) * 2020-04-28 2023-06-27 Taiwan Semiconductor Manufacturing Company Ltd. Robot gripper for moving wafer carriers and packing materials and method of operating the same
CN213010392U (zh) * 2020-06-18 2021-04-20 三赢科技（深圳）有限公司 供料装置
JP7341431B2 (ja) * 2020-08-05 2023-09-11 リョーエイ株式会社 段積みされた箱のハンドリング方法及び装置
US11904476B2 (en) 2020-09-10 2024-02-20 Kitchen Robotics Ltd Method of automated cookware handling in robotic systems, and in different handling environments
JP2022091689A (ja) * 2020-11-18 2022-06-21 ザ・ボーイング・カンパニー 対応付け装置及び対応付け方法
JP2022101474A (ja) * 2020-11-18 2022-07-06 ザ・ボーイング・カンパニー 対応付け装置及び対応付け方法
US12115658B2 (en) 2020-11-18 2024-10-15 The Boeing Company Indexing apparatus and method of indexing
CN112777102A (zh) * 2021-01-22 2021-05-11 中国科学院苏州生物医学工程技术研究所 Pcr芯片托盘转移及存储机构
CN112919256B (zh) * 2021-01-22 2022-08-30 武汉裕大华纺织有限公司 抓筒机光电检测装置
US20220234215A1 (en) * 2021-01-28 2022-07-28 Ford Global Technologies, Llc Integrated robotic end effectors having end of arm tool grippers
US11745956B2 (en) 2021-03-29 2023-09-05 Dexterity, Inc. Tray handling autonomous robot
WO2022221089A2 (en) * 2021-04-16 2022-10-20 Dexterity, Inc. Robotic tray gripper
CN113682703B (zh) * 2021-08-24 2022-08-12 湖南一块医药科技有限公司 智慧仓储及智能装货系统
US11733255B1 (en) * 2022-09-30 2023-08-22 United Arab Emirates University Industrial inspection system with interlock
EP4368994A1 (de) 2022-11-08 2024-05-15 Roche Diagnostics GmbH Greifvorrichtung zum greifen eines objektträger
IT202200023454A1 (it) * 2022-11-14 2024-05-14 Meridionale Impianti S P A Pinza manipolatrice di scatole di contenimento di wafer di semiconduttore

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824674A (en) * 1972-07-19 1974-07-23 Hitachi Ltd Automatic assembly control method and device therefor
JPS5466382U (de) * 1977-10-18 1979-05-11
JPS5466382A (en) 1977-11-04 1979-05-28 Sumitomo Chem Co Ltd Reverse osmotic membrane made of hollow fiber of acrylonitrile series polymer and production thereof
US4465416A (en) * 1982-05-17 1984-08-14 The Perkin-Elmer Corporation Wafer handling mechanism
JPS59183383U (ja) * 1983-05-20 1984-12-06 三菱電機株式会社 産業用ロボツトのハンド装置
US4662811A (en) * 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
GB8505746D0 (en) * 1985-03-06 1985-04-11 Universal Machine Intelligence Robotic wrist & gripper
US4616414A (en) * 1985-03-13 1986-10-14 At&T Technologies, Inc. Method and apparatus for gripping multilead articles
US4715637A (en) * 1985-04-17 1987-12-29 Hitachi, Ltd. Grip device for sheet-like objects
US4975484A (en) * 1985-05-10 1990-12-04 E. I. Du Pont De Nemours And Company Acrylic copolymer composition and adhesive coatings therefrom
GB2185458A (en) * 1986-01-13 1987-07-22 Mars Inc Gripper mechanism
US4714865A (en) * 1986-06-12 1987-12-22 Barry Wright Corporation Overload protection device
US4900078A (en) * 1986-12-23 1990-02-13 The Boeing Company Gripping device utilizing a shape memory alloy
JP2508540B2 (ja) * 1987-11-02 1996-06-19 三菱マテリアル株式会社 ウェ―ハの位置検出装置
JPH0617295Y2 (ja) * 1987-11-27 1994-05-02 大日本スクリーン製造株式会社 基板受け渡し装置
JPH0613787Y2 (ja) 1987-12-10 1994-04-13 日産自動車株式会社 ワーク位置決め装置
US4952115A (en) * 1988-02-29 1990-08-28 Tel Sagami Limited Wafer support device
US4894103A (en) * 1988-05-26 1990-01-16 The Uniroyal Goodrich Tire Company Robot for tire building machine and method of operation
US5061144A (en) * 1988-11-30 1991-10-29 Tokyo Electron Limited Resist process apparatus
US5022695A (en) * 1989-01-30 1991-06-11 Texas Instruments Incorporated Semiconductor slice holder
DE3915038A1 (de) 1989-05-08 1990-11-22 Balzers Hochvakuum Halte- und transportvorrichtung fuer eine scheibe
US5162047A (en) * 1989-08-28 1992-11-10 Tokyo Electron Sagami Limited Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers
US5062756A (en) * 1990-05-01 1991-11-05 John Harrel Device for positioning and stabbing casing from a remote selectively variable location
US5192106A (en) * 1990-06-04 1993-03-09 I.A.F. Enterprises, Inc. Compact disc handling device
US5172951A (en) * 1990-08-06 1992-12-22 University Of Utah Research Foundation Robotic grasping apparatus
FR2672834B1 (fr) * 1991-02-18 1993-05-21 Essilor Int Organe de serrage et de prehension.
US5308222A (en) * 1991-05-17 1994-05-03 Kensington Laboratories, Inc. Noncentering specimen prealigner
US5482180A (en) * 1991-07-10 1996-01-09 The Heil Company Gripping apparatus for omnifarious containers
JPH0574790A (ja) 1991-09-12 1993-03-26 Fujitsu Ltd 半導体装置及びその製造方法
JPH0574790U (ja) * 1992-03-23 1993-10-12 カルソニック株式会社 ロボットハンド
US5445486A (en) * 1992-03-29 1995-08-29 Tokyo Electron Sagami Limited Substrate transferring apparatus
US5253911A (en) 1992-04-03 1993-10-19 Storage Technology Corporation Gripper apparatus for use in a robotics system
FR2711125B1 (fr) * 1993-10-13 1996-01-26 Dubuit Mach Chargeur pour machine d'impression pour objets présentés en pile.
US5541485A (en) 1994-05-06 1996-07-30 New York University Reactive robotic gripper
US5863086A (en) * 1994-11-21 1999-01-26 Mcneilus Truck And Manufacturing, Inc. Container holding and lifting device
KR0152324B1 (ko) * 1994-12-06 1998-12-01 양승택 웨이퍼 측면파지 이송 반도체 제조장치
US5543022A (en) * 1995-01-17 1996-08-06 Hmt Technology Corporation Disc-handling apparatus
US5697480A (en) * 1995-03-22 1997-12-16 Syron Engineering & Manufacturing Corporation Breakaway mount for robot arm
US5700046A (en) * 1995-09-13 1997-12-23 Silicon Valley Group, Inc. Wafer gripper
US5871248A (en) 1995-09-26 1999-02-16 University Of South Florida Robot gripper
GB2322821B (en) * 1995-11-07 2000-05-03 Eckel Mfg Co Hydraulic backup tong
US5669644A (en) * 1995-11-13 1997-09-23 Kokusai Electric Co., Ltd. Wafer transfer plate
US5780488A (en) * 1996-04-03 1998-07-14 Merck & Co., Inc. Inhibitors of farnesyl-protein transferase
US5870488A (en) * 1996-05-07 1999-02-09 Fortrend Engineering Corporation Method and apparatus for prealigning wafers in a wafer sorting system
US6322119B1 (en) * 1999-07-09 2001-11-27 Semitool, Inc. Robots for microelectronic workpiece handling
US5944476A (en) * 1997-03-26 1999-08-31 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism
US6116848A (en) * 1997-11-26 2000-09-12 Brooks Automation, Inc. Apparatus and method for high-speed transfer and centering of wafer substrates
US6015174A (en) * 1998-06-04 2000-01-18 Eastman Kodak Company Universal end effector for robotic applications
JP2000040728A (ja) * 1998-07-22 2000-02-08 Nippon Asm Kk ウェハ搬送機構
US5945798A (en) 1998-08-27 1999-08-31 Eastman Kodak Company System for determining part presence and grip pressure for a robotic gripping device
US6474712B1 (en) * 1999-05-15 2002-11-05 Applied Materials, Inc. Gripper for supporting substrate in a vertical orientation
US6467827B1 (en) * 1999-10-30 2002-10-22 Frank J. Ardezzone IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors
US6409241B1 (en) * 2000-09-12 2002-06-25 Nortel Networks Limited Apparatus for gripping ceramic substrates
US6578893B2 (en) * 2000-10-02 2003-06-17 Ajs Automation, Inc. Apparatus and methods for handling semiconductor wafers
US6592324B2 (en) 2001-02-26 2003-07-15 Irm, Llc Gripper mechanism
US7140655B2 (en) * 2001-09-04 2006-11-28 Multimetrixs Llc Precision soft-touch gripping mechanism for flat objects
US7014235B1 (en) * 2002-09-18 2006-03-21 Storage Technology Corporation Inertia actuation for robotic gripper mechanism

Also Published As

Publication number Publication date
CA2438789A1 (en) 2002-09-06
JP2005502479A (ja) 2005-01-27
US7422411B2 (en) 2008-09-09
WO2002068157A2 (en) 2002-09-06
EP1693166A3 (de) 2006-09-06
EP1381495A4 (de) 2004-04-21
EP1693166B1 (de) 2008-11-26
DE60210946D1 (de) 2006-06-01
DE60230077D1 (de) 2009-01-08
US20050232743A1 (en) 2005-10-20
EP1381495B1 (de) 2006-04-26
AU2002255622B2 (en) 2008-07-17
DE60210946T2 (de) 2007-01-04
US20040086368A1 (en) 2004-05-06
US20070005182A1 (en) 2007-01-04
ATE415249T1 (de) 2008-12-15
WO2002068157A3 (en) 2003-04-24
EP1693166A2 (de) 2006-08-23
US20020117380A1 (en) 2002-08-29
US6592324B2 (en) 2003-07-15
US6932557B2 (en) 2005-08-23
EP1381495A2 (de) 2004-01-21

Similar Documents

Publication Publication Date Title
ATE324230T1 (de) Greifmechanismus, -vorrichtung und -verfahren
ATE311557T1 (de) Nockenvorrichtung
DE60142842D1 (de) Robotersteuergerät
NO20023658L (no) Toveis gripemekanisme for et stort omfang boringsstörrelser
EP1351619A4 (de) Chirurgischer manipulator
DE10196103T1 (de) Robotersteuereinrichtung
DE60225717D1 (de) Zweibeinige bewegungsvorrichtung und vorrichtung uigen bewegungsvorrichtung
ITMI20020956A0 (it) Manipolatore per fucinati
AU2002333542A1 (en) Biarylamino purine antiproliferative agents
ES2174778T3 (es) Procedimiento de crioconservacion de esperma de pez cebra.
FR2819172B3 (fr) Implant cotyloidien dit "de reprise"
DE60201326D1 (de) Vorrichtung zur Übertragung von Objeckten zwischen zwei Positionen
ITTO20010754A0 (it) Dispositivo di regolazione della posizione di un pedale.
TW545355U (en) Robotic arm with parallel four links
ATE354460T1 (de) Vorrichtung zum greifen und ablegen von gegenständen
FR2826947B1 (fr) Entrainement d'un ascenseur par le contrepoids
FR2831087B1 (fr) Dispositif de prehension d'une piece, et procede pour sa fabrication
DE50009448D1 (de) Formgebungsvorrichtung zum Umformen eines Spielbausteins
GB0100159D0 (en) Mechanism for realizing an opposable thumb
GB0104178D0 (en) Opposable thumb
TW534530U (en) Multi-axis synchronous feedback apparatus of actuator
AU2002249035A1 (en) Cartesian parallel manipulators
ITMI20021888A1 (it) Dispositivo per la generazione o l'ulteriore lavorazione
SE0100267D0 (sv) Handtag till enlitersburkar
AU2002310731A1 (en) Device for improving the manoevrability of a trolley

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties