ATE415249T1 - Greifmechanismus, -vorrichtung und -verfahren - Google Patents

Greifmechanismus, -vorrichtung und -verfahren

Info

Publication number
ATE415249T1
ATE415249T1 AT06008469T AT06008469T ATE415249T1 AT E415249 T1 ATE415249 T1 AT E415249T1 AT 06008469 T AT06008469 T AT 06008469T AT 06008469 T AT06008469 T AT 06008469T AT E415249 T1 ATE415249 T1 AT E415249T1
Authority
AT
Austria
Prior art keywords
gripper mechanism
gripper apparatus
grasping mechanism
grasping
height adjusting
Prior art date
Application number
AT06008469T
Other languages
English (en)
Inventor
Robert Charles Downs
Mark Weselak
James Mainquist
Original Assignee
Irm Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irm Llc filed Critical Irm Llc
Application granted granted Critical
Publication of ATE415249T1 publication Critical patent/ATE415249T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00—Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/02—Delivering or advancing articles from machines; Advancing articles to or into piles by mechanical grippers engaging the leading edge only of the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2555/00—Actuating means
    • B65H2555/30—Multi-axis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S294/00—Handling: hand and hoist-line implements
    • Y10S294/902—Gripping element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Coating Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Making Paper Articles (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Confectionery (AREA)
AT06008469T 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren ATE415249T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/793,254 US6592324B2 (en) 2001-02-26 2001-02-26 Gripper mechanism

Publications (1)

Publication Number Publication Date
ATE415249T1 true ATE415249T1 (de) 2008-12-15

Family

ID=25159484

Family Applications (2)

Application Number Title Priority Date Filing Date
AT02725033T ATE324230T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren
AT06008469T ATE415249T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT02725033T ATE324230T1 (de) 2001-02-26 2002-02-26 Greifmechanismus, -vorrichtung und -verfahren

Country Status (8)

Country Link
US (4) US6592324B2 (de)
EP (2) EP1693166B1 (de)
JP (1) JP2005502479A (de)
AT (2) ATE324230T1 (de)
AU (1) AU2002255622B2 (de)
CA (1) CA2438789A1 (de)
DE (2) DE60210946T2 (de)
WO (1) WO2002068157A2 (de)

Families Citing this family (150)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7175214B2 (en) * 2000-03-16 2007-02-13 Ade Corporation Wafer gripping fingers to minimize distortion
US7390458B2 (en) * 2000-10-13 2008-06-24 Irm Llc High throughput processing system and method of using
US6592324B2 (en) * 2001-02-26 2003-07-15 Irm, Llc Gripper mechanism
US6869792B2 (en) 2001-03-16 2005-03-22 Irm, Llc Method and apparatus for performing multiple processing steps on a sample in a single vessel
US6659142B2 (en) 2001-03-27 2003-12-09 Irm, Llc Apparatus and method for preparing fluid mixtures
JP4622175B2 (ja) * 2001-07-04 2011-02-02 株式会社デンソー 乾燥ハニカム構造体の把持方法
US20030035711A1 (en) * 2001-07-14 2003-02-20 Ulysses Gilchrist Centering double side edge grip end effector with integrated mapping sensor
US7695234B2 (en) * 2001-12-04 2010-04-13 Rorze Corporation Device for temporarily loading, storing and unloading a container
JP2004155434A (ja) * 2002-11-01 2004-06-03 Toyo Seikan Kaisha Ltd 容器グリッパ装置
DE10258633A1 (de) * 2002-12-16 2004-07-08 Kuka Roboter Gmbh Verfahren und Vorrichtung zum Positionieren von zusammenzufügenden Bauteilen
US7611318B2 (en) 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
US7578647B2 (en) * 2003-01-27 2009-08-25 Applied Materials, Inc. Load port configurations for small lot size substrate carriers
USD496378S1 (en) 2003-03-04 2004-09-21 Wemo Automation Ab Gripping means for robots
US20040187445A1 (en) * 2003-03-28 2004-09-30 Hildebrand John Joseph Gripping arm assembly for loading a filled inner container into an outer container
US20070001472A1 (en) * 2003-03-28 2007-01-04 Hildebrand John J Jr Gripping arm assembly for loading a filled inner container into an outer container
JP3876234B2 (ja) * 2003-06-17 2007-01-31 ファナック株式会社 コネクタ把持装置、同装置を備えたコネクタ検査システム及びコネクタ接続システム
US7146248B2 (en) * 2003-11-07 2006-12-05 Lent John H Automated mineral processing systems and methods
JP2007523284A (ja) * 2003-12-04 2007-08-16 アイアールエム エルエルシー 材料移送システム、コンピュータプログラムプロダクト及び方法
DE102004020590A1 (de) * 2004-04-27 2005-11-17 Carl Zeiss Jena Gmbh Greifvorrichtung
CN101890720B (zh) * 2004-07-13 2012-01-11 松下电器产业株式会社 物品保持系统、机器人以及机器人控制方法
JP2008512645A (ja) * 2004-08-04 2008-04-24 アイアールエム エルエルシー マルチウェル容器処理システム、システムコンポーネント、及び関連方法
CA2575186A1 (en) * 2004-08-04 2006-02-16 Irm, Llc Object storage devices, systems, and related methods
US7993093B2 (en) * 2004-09-15 2011-08-09 Applied Materials, Inc. Systems and methods for wafer translation
US20060257999A1 (en) * 2005-03-22 2006-11-16 Chang Jim Y Compound profiling devices, systems, and related methods
US20060263270A1 (en) * 2005-05-18 2006-11-23 Beckman Coulter, Inc. Robotic grip and twist assembly
US20060270027A1 (en) * 2005-05-27 2006-11-30 Irm Llc High throughput incubation devices and systems
KR100949502B1 (ko) * 2005-06-20 2010-03-24 엘지디스플레이 주식회사 액정표시장치 제조 공정용 기판 반송장치
US7338249B1 (en) * 2005-06-30 2008-03-04 Thermo Finnigan Llc Sample plate gripping mechanism
US7980612B2 (en) * 2005-07-12 2011-07-19 Schlumberger Technology Corporation Clamping assembly
JP5043021B2 (ja) * 2005-10-04 2012-10-10 アプライド マテリアルズ インコーポレイテッド 基板を乾燥するための方法及び装置
US20070107193A1 (en) * 2005-10-28 2007-05-17 Milojevic Dragoslav K Positioning device for moveable portion of workpiece
US20070258858A1 (en) * 2006-05-03 2007-11-08 Brian Rasnow Robotic gripper for transporting multiple object types
WO2007138701A1 (ja) * 2006-05-31 2007-12-06 Ibiden Co., Ltd. 把持装置、及び、ハニカム構造体の製造方法
US7896602B2 (en) 2006-06-09 2011-03-01 Lutz Rebstock Workpiece stocker with circular configuration
US7530564B2 (en) * 2006-07-10 2009-05-12 Goss International Americas, Inc. Opposing link gripper
US7670555B2 (en) * 2006-09-08 2010-03-02 Rex A. Hoover Parallel gripper for handling multiwell plate
JP2008110284A (ja) * 2006-10-30 2008-05-15 Seiko Epson Corp 物品保持装置及び物品搬送装置
US20080112787A1 (en) 2006-11-15 2008-05-15 Dynamic Micro Systems Removable compartments for workpiece stocker
US8376428B2 (en) 2006-11-15 2013-02-19 Dynamic Micro System Semiconductor Equipment GmbH Integrated gripper for workpiece transfer
US20100069410A1 (en) * 2006-12-01 2010-03-18 Emisphere Technologies Inc. acyclovir formulations
US7789443B2 (en) * 2007-03-16 2010-09-07 Axcelis Technologies, Inc. Workpiece gripping device
US8323565B2 (en) 2007-04-12 2012-12-04 Leco Corporation Crucible shuttle assembly and method of operation
US8657550B2 (en) * 2007-04-12 2014-02-25 Leco Corporation Crucible shuttle assembly with linearly moving carriage
DE102007021494B4 (de) * 2007-05-08 2010-06-10 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Erfassen und Abstellen von stoßempfindlichen Platten
US8226142B2 (en) * 2007-08-09 2012-07-24 Axcelis Technologies, Inc. Workpiece gripping integrity sensor
WO2009029696A1 (en) * 2007-08-28 2009-03-05 Irm Llc Grippers and related systems and methods providing a certain degree of play along the vertical axis
DE102007058718A1 (de) * 2007-12-06 2009-06-10 Erweka Gmbh Vorrichtung und Verfahren zur automatischen Freisetzung und Messung von Wirkstoffen aus einer Arzneizubereitung
JP4511605B2 (ja) * 2008-02-27 2010-07-28 タツモ株式会社 搬送ロボット
FR2932273B1 (fr) * 2008-06-06 2011-10-07 Noviloire Sa Pince adaptee pour saisir un support d'echantillons biologiques, ensemble d'un support echantillons biologiques et d'une pince adaptee pour le saisir, et automate de traitement et/ou d'analyse d'echantillons biologiques
FR2932272B1 (fr) * 2008-06-09 2011-02-25 Stago Diagnostica Dispositif de prehension d'une cuvette de reaction
US8286320B2 (en) * 2008-09-18 2012-10-16 Automatic Handling International Apparatus and method for the robotic plugging/unplugging of rolls
US7948576B2 (en) * 2008-09-25 2011-05-24 Apple Inc. P-chassis arrangement for positioning a display stack
JP5373560B2 (ja) * 2008-11-17 2013-12-18 シスメックス株式会社 搬送装置及びこれを用いた検体分析装置
JP2010169497A (ja) * 2009-01-22 2010-08-05 Wako Pure Chem Ind Ltd マイクロプレートの処理装置
EP2251455B1 (de) * 2009-05-13 2017-09-06 SiO2 Medical Products, Inc. PECVD-Beschichtung mittels siliciumorganischem Vorläufer
KR102052096B1 (ko) 2009-05-15 2019-12-04 바이오메리욱스, 인코포레이티드. 자동 미생물 탐지 장치
JP2012526996A (ja) * 2009-05-15 2012-11-01 ビオメリュー・インコーポレイテッド 試料内の微生物因子の迅速な同定および／または特徴付けのためのシステムおよび方法
EP2256703B1 (de) * 2009-05-29 2015-07-15 JVM Co., Ltd. Automatische Medizinspeicherung und Medizineinführungs- bzw. -abgabeverwaltungssystem
JP5346694B2 (ja) * 2009-06-05 2013-11-20 株式会社森精機製作所 工作機械
CN101920499B (zh) * 2009-06-12 2014-08-13 鸿富锦精密工业（深圳）有限公司 夹持装置
JP5202557B2 (ja) * 2010-03-05 2013-06-05 信越化学工業株式会社 ペリクルハンドリング治具
US8235437B2 (en) 2010-04-07 2012-08-07 Delaware Capital Formation, Inc. Electric gripper drive with a torsional compliance device
DE102010018966A1 (de) * 2010-04-28 2011-11-03 IPR-Intelligente Peripherien für Roboter GmbH Robotergreifer und Handhabungsroboter
US9131807B2 (en) * 2010-06-04 2015-09-15 Shambhu Nath Roy Robotic kitchen top cooking apparatus and method for preparation of dishes using computer recipies
JP5895337B2 (ja) 2010-09-15 2016-03-30 セイコーエプソン株式会社 ロボット
JP5682810B2 (ja) * 2010-09-15 2015-03-11 セイコーエプソン株式会社 ロボット
US9505504B2 (en) 2011-02-18 2016-11-29 Pouch Pac Innovations, Llc Apparatus for the two stage filling of flexible pouches
US9944037B2 (en) * 2011-05-12 2018-04-17 Pouch Pac Innovations, Llc Apparatus for simultaneously separating a plurality of pouches, transferring the pouches and method of same
JP5408186B2 (ja) * 2011-05-12 2014-02-05 株式会社安川電機 ハンドおよびロボット
DE102011110250B4 (de) 2011-05-13 2019-05-16 Leica Biosystems Nussloch Gmbh Greifvorrichtung zum Transportieren von Racks
US20120305192A1 (en) 2011-06-03 2012-12-06 Arthur Keigler Parallel single substrate processing fluid jet module
KR102030690B1 (ko) * 2011-06-23 2019-10-10 다이나믹 마이크로시스템즈 세미컨덕터 이큅먼트 게엠베하 반도체 클리너 시스템들 및 방법들
JP5582313B2 (ja) * 2011-06-28 2014-09-03 株式会社安川電機 ロボットシステム
CN104647391B (zh) 2011-06-28 2016-06-08 株式会社安川电机 机器人手和机器人
CN102873679B (zh) * 2011-07-13 2016-04-20 富泰华工业（深圳）有限公司 定位机构
US9431282B2 (en) * 2011-12-27 2016-08-30 Rudolph Technologies, Inc. Wafer inversion mechanism
JP2013180366A (ja) * 2012-03-01 2013-09-12 Seiko Epson Corp ロボット及びロボットハンド
US8935001B2 (en) * 2012-03-29 2015-01-13 bioMeriéux, Inc. System and method for establishing and/or maintaining proper alignment of a robotic transfer mechanism
CN103568016B (zh) * 2012-08-10 2015-11-25 鸿富锦精密工业（深圳）有限公司 夹装装置
KR101383722B1 (ko) * 2012-12-17 2014-04-08 현대자동차(주) 로봇의 양팔제어방법
US20140209434A1 (en) * 2013-01-31 2014-07-31 Honda Motor Co., Ltd. Apparatus for use with fixture assembly and workpiece
US9545724B2 (en) * 2013-03-14 2017-01-17 Brooks Automation, Inc. Tray engine with slide attached to an end effector base
KR20160004304A (ko) 2013-04-29 2016-01-12 레클루즈 모터 스포츠, 아이엔씨. 로봇 텐딩을 사용한 다양한 부품 형상 저장과 처리를 위한 시스템 및 방법
JP6619928B2 (ja) * 2013-11-06 2019-12-11 日立化成ダイアグノスティックス・システムズ株式会社 把持装置、搬送装置、及び分析装置
JP6196919B2 (ja) * 2014-03-05 2017-09-13 株式会社安川電機 ロボットシステム、液体移送制御装置、液体移送制御方法、及び薬剤製造方法
JP6171984B2 (ja) * 2014-03-07 2017-08-02 株式会社ダイフク 物品支持装置
JP6191544B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置
JP6191543B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置
JP6522608B2 (ja) * 2014-06-26 2019-05-29 株式会社日立ハイテクノロジーズ 検体検査自動化システムおよび検体チェックモジュール
CN105398635B (zh) * 2014-08-12 2017-10-24 上银科技股份有限公司 外壳自动定位的方法
CN104148325A (zh) * 2014-08-27 2014-11-19 吴中区横泾博尔机械厂 一种显示屏发光板全自动清洗机的发光板平行夹爪
CN104138868A (zh) * 2014-08-27 2014-11-12 吴中区横泾博尔机械厂 一种显示屏发光板全自动清洗机
DE102014113039B4 (de) * 2014-09-10 2018-05-17 Hiwin Technologies Corp. Automatisches Positionierverfahren für Gehäuse und die dazu notwendige Vorrichtung
WO2016061471A1 (en) * 2014-10-17 2016-04-21 Hitachi High Technologies America, Inc. Interactive laboratory robotic system
JP6327124B2 (ja) * 2014-11-12 2018-05-23 株式会社ダイフク 物品搬送車
US9296326B1 (en) * 2015-01-02 2016-03-29 Tim Young System and method for collecting recycling materials
US9352471B1 (en) * 2015-01-21 2016-05-31 Applied Materials, Inc. Substrate gripper apparatus and methods
JP6472698B2 (ja) * 2015-03-30 2019-02-20 テルモ株式会社 保持具ハンド、保持具移載装置、及び保持具の移載方法
WO2016187075A1 (en) * 2015-05-19 2016-11-24 Verselus, Llc Paddle assembly for holding an object
DE102015211698B4 (de) * 2015-06-24 2017-01-05 HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH System zum Transportieren, Öffnen sowie Schließen einer Transportbox sowie zum Einsetzen und Entnehmen eines in der Transportbox anordenbaren Behälters
CN109073664B (zh) * 2016-04-22 2022-12-06 贝克顿·迪金森公司 自动诊断分析仪及其操作方法
JP7111622B2 (ja) 2016-04-22 2022-08-02 ベクトン・ディキンソン・アンド・カンパニー 自動化された診断アナライザおよびその動作のための方法
JP6701007B2 (ja) * 2016-06-27 2020-05-27 川崎重工業株式会社 ワーク保持機構
US10674737B2 (en) * 2016-10-07 2020-06-09 Perky Jerky, Llc System and method for preparing meat products
CN206998968U (zh) * 2017-08-02 2018-02-13 京东方科技集团股份有限公司 机器人手臂及搬运机器人
CN107564845B (zh) * 2017-08-24 2019-12-27 京东方科技集团股份有限公司 一种机械手
EP3625572B1 (de) 2017-10-04 2025-01-22 Leica Biosystems Imaging, Inc. Objektträgerinventar- und wiedereinsetzungssystem
AU2018374379B2 (en) 2017-11-30 2021-03-04 Leica Biosystems Imaging, Inc. Slide rack gripper apparatus
AT521039B1 (de) 2018-04-04 2019-10-15 Trumpf Maschinen Austria Gmbh & Co Kg Vorrichtung und Verfahren zur Überwachung von Relativbewegungen
US10639800B2 (en) * 2018-07-11 2020-05-05 Amazon Technologies, Inc. Robotic-arm end effector configured to engage a plurality of storage containers, and method of using the same
CN108748236A (zh) * 2018-08-13 2018-11-06 南京皓焜自动化科技有限公司 一种用于抓取钢材的机械抓手
JP6841804B2 (ja) * 2018-09-28 2021-03-10 ファナック株式会社 ロボットハンド
CN111254067B (zh) * 2018-12-03 2023-07-25 长春长光华大智造测序设备有限公司 一种生物芯片的装夹定位装置
US11167423B1 (en) * 2019-02-18 2021-11-09 Amazon Technologies, Inc. End of arm tool capable of ejecting totes
WO2020173892A2 (en) * 2019-02-28 2020-09-03 Asml Netherlands B.V. Apparatus for assembly of a reticle assembly
US12145246B1 (en) 2019-04-12 2024-11-19 Kurt Manufacturing Company, Inc. Workpiece processing system
CN110406873B (zh) * 2019-07-08 2024-07-09 广西科技大学 一种基于物联网技术的智联化立体仓库装置
CN110638601B (zh) * 2019-10-10 2021-11-23 南方医科大学第五附属医院 一种耳鼻喉综合诊疗台
JP7293102B2 (ja) * 2019-12-17 2023-06-19 ミネベアミツミ株式会社 把持装置
WO2021163553A1 (en) 2020-02-12 2021-08-19 Jabil Inc. Apparatus, system and method for providing a flipper for in-process substrates
US11305436B2 (en) * 2020-02-24 2022-04-19 Tctm (Hong Kong) Limited Lateral gripper
US11685055B2 (en) * 2020-04-28 2023-06-27 Taiwan Semiconductor Manufacturing Company Ltd. Robot gripper for moving wafer carriers and packing materials and method of operating the same
TWI856239B (zh) 2020-04-28 2024-09-21 台灣積體電路製造股份有限公司 用於移動晶圓載具及包裝材的機械夾爪及其操作方法
CN213010392U (zh) * 2020-06-18 2021-04-20 三赢科技（深圳）有限公司 供料装置
JP7341431B2 (ja) * 2020-08-05 2023-09-11 リョーエイ株式会社 段積みされた箱のハンドリング方法及び装置
US11904476B2 (en) 2020-09-10 2024-02-20 Kitchen Robotics Ltd Method of automated cookware handling in robotic systems, and in different handling environments
JP7499677B2 (ja) * 2020-10-29 2024-06-14 川崎重工業株式会社 ロボットハンド
US12197193B2 (en) 2020-11-18 2025-01-14 The Boeing Company Continuous flow manufacturing system and apparatus and method for controlling process data of a continuous flow manufacturing process
US11666996B2 (en) * 2020-11-18 2023-06-06 The Boeing Company Indexing apparatus and method of indexing
US12115658B2 (en) 2020-11-18 2024-10-15 The Boeing Company Indexing apparatus and method of indexing
JP7851709B2 (ja) * 2020-11-18 2026-04-27 ザ・ボーイング・カンパニー 対応付け装置及び対応付け方法
CN112919256B (zh) * 2021-01-22 2022-08-30 武汉裕大华纺织有限公司 抓筒机光电检测装置
CN112777102A (zh) * 2021-01-22 2021-05-11 中国科学院苏州生物医学工程技术研究所 Pcr芯片托盘转移及存储机构
US20220234215A1 (en) * 2021-01-28 2022-07-28 Ford Global Technologies, Llc Integrated robotic end effectors having end of arm tool grippers
US11745956B2 (en) 2021-03-29 2023-09-05 Dexterity, Inc. Tray handling autonomous robot
JP2022162318A (ja) * 2021-04-12 2022-10-24 住友重機械工業株式会社 把持装置、ロボットアーム
WO2022221089A2 (en) 2021-04-16 2022-10-20 Dexterity, Inc. Robotic tray gripper
US20240286297A1 (en) * 2021-07-06 2024-08-29 Hitachi High-Tech Corporation Glass slide transport device
CN113682703B (zh) * 2021-08-24 2022-08-12 湖南一块医药科技有限公司 智慧仓储及智能装货系统
US12384053B2 (en) * 2021-09-09 2025-08-12 Ford Global Technologies, Llc Robotic gripper apparatus
WO2023182345A1 (ja) * 2022-03-23 2023-09-28 株式会社東芝 ハンドリングシステム、情報処理システム、情報処理方法、プログラム、及び記憶媒体
US20250189548A1 (en) * 2022-04-14 2025-06-12 Trilobio, Inc. System and apparatus for gripping biological processing plates
US20230417786A1 (en) * 2022-06-24 2023-12-28 Clear Labs, Inc. Fully automated sample processing platform from extraction to sequencing
DE102022121160A1 (de) * 2022-08-22 2024-02-22 Aesculap Ag Handhabungswerkzeug für medizinische Gerätschaften
US11733255B1 (en) * 2022-09-30 2023-08-22 United Arab Emirates University Industrial inspection system with interlock
EP4368994A1 (de) 2022-11-08 2024-05-15 Roche Diagnostics GmbH Greifvorrichtung zum greifen eines objektträger
IT202200023454A1 (it) * 2022-11-14 2024-05-14 Meridionale Impianti S P A Pinza manipolatrice di scatole di contenimento di wafer di semiconduttore
US20240343217A1 (en) * 2023-04-11 2024-10-17 The University Of British Columbia Energy-efficient collision detection and motion planning
CN122029010A (zh) * 2023-08-28 2026-05-12 美国西门子医学诊断股份有限公司 用于抓取诊断实验室系统中的容器的系统和方法
WO2025135536A1 (ko) * 2023-12-22 2025-06-26 주식회사 씨젠 튜브 이송용 그립 공구

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824674A (en) * 1972-07-19 1974-07-23 Hitachi Ltd Automatic assembly control method and device therefor
JPS5466382U (de) * 1977-10-18 1979-05-11
JPS5466382A (en) 1977-11-04 1979-05-28 Sumitomo Chem Co Ltd Reverse osmotic membrane made of hollow fiber of acrylonitrile series polymer and production thereof
US4465416A (en) * 1982-05-17 1984-08-14 The Perkin-Elmer Corporation Wafer handling mechanism
JPS59183383U (ja) * 1983-05-20 1984-12-06 三菱電機株式会社 産業用ロボツトのハンド装置
US4662811A (en) * 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
GB8505746D0 (en) * 1985-03-06 1985-04-11 Universal Machine Intelligence Robotic wrist & gripper
US4616414A (en) * 1985-03-13 1986-10-14 At&T Technologies, Inc. Method and apparatus for gripping multilead articles
DE3685835T2 (de) * 1985-04-17 1993-02-18 Hitachi Ltd Greiferwerkzeug.
US4975484A (en) * 1985-05-10 1990-12-04 E. I. Du Pont De Nemours And Company Acrylic copolymer composition and adhesive coatings therefrom
GB2185458A (en) * 1986-01-13 1987-07-22 Mars Inc Gripper mechanism
US4714865A (en) * 1986-06-12 1987-12-22 Barry Wright Corporation Overload protection device
US4900078A (en) * 1986-12-23 1990-02-13 The Boeing Company Gripping device utilizing a shape memory alloy
JP2508540B2 (ja) * 1987-11-02 1996-06-19 三菱マテリアル株式会社 ウェ―ハの位置検出装置
JPH0617295Y2 (ja) * 1987-11-27 1994-05-02 大日本スクリーン製造株式会社 基板受け渡し装置
JPH0613787Y2 (ja) 1987-12-10 1994-04-13 日産自動車株式会社 ワーク位置決め装置
KR970011658B1 (ko) * 1988-02-29 1997-07-12 도오교오 에레구토론 사가미 가부시끼가이샤 웨이퍼 지지장치
US4894103A (en) * 1988-05-26 1990-01-16 The Uniroyal Goodrich Tire Company Robot for tire building machine and method of operation
US5061144A (en) * 1988-11-30 1991-10-29 Tokyo Electron Limited Resist process apparatus
US5022695A (en) * 1989-01-30 1991-06-11 Texas Instruments Incorporated Semiconductor slice holder
DE3915038A1 (de) 1989-05-08 1990-11-22 Balzers Hochvakuum Halte- und transportvorrichtung fuer eine scheibe
US5162047A (en) * 1989-08-28 1992-11-10 Tokyo Electron Sagami Limited Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers
US5062756A (en) * 1990-05-01 1991-11-05 John Harrel Device for positioning and stabbing casing from a remote selectively variable location
US5192106A (en) * 1990-06-04 1993-03-09 I.A.F. Enterprises, Inc. Compact disc handling device
US5172951A (en) * 1990-08-06 1992-12-22 University Of Utah Research Foundation Robotic grasping apparatus
FR2672834B1 (fr) * 1991-02-18 1993-05-21 Essilor Int Organe de serrage et de prehension.
US5308222A (en) * 1991-05-17 1994-05-03 Kensington Laboratories, Inc. Noncentering specimen prealigner
US5482180A (en) * 1991-07-10 1996-01-09 The Heil Company Gripping apparatus for omnifarious containers
JPH0574790A (ja) 1991-09-12 1993-03-26 Fujitsu Ltd 半導体装置及びその製造方法
JPH0574790U (ja) * 1992-03-23 1993-10-12 カルソニック株式会社 ロボットハンド
US5445486A (en) * 1992-03-29 1995-08-29 Tokyo Electron Sagami Limited Substrate transferring apparatus
US5253911A (en) 1992-04-03 1993-10-19 Storage Technology Corporation Gripper apparatus for use in a robotics system
FR2711125B1 (fr) * 1993-10-13 1996-01-26 Dubuit Mach Chargeur pour machine d'impression pour objets présentés en pile.
US5541485A (en) 1994-05-06 1996-07-30 New York University Reactive robotic gripper
US5863086A (en) * 1994-11-21 1999-01-26 Mcneilus Truck And Manufacturing, Inc. Container holding and lifting device
KR0152324B1 (ko) * 1994-12-06 1998-12-01 양승택 웨이퍼 측면파지 이송 반도체 제조장치
US5543022A (en) * 1995-01-17 1996-08-06 Hmt Technology Corporation Disc-handling apparatus
US5697480A (en) * 1995-03-22 1997-12-16 Syron Engineering & Manufacturing Corporation Breakaway mount for robot arm
US5700046A (en) * 1995-09-13 1997-12-23 Silicon Valley Group, Inc. Wafer gripper
US5871248A (en) 1995-09-26 1999-02-16 University Of South Florida Robot gripper
DE19681623C2 (de) * 1995-11-07 2003-04-10 Eckel Mfg Co Angetriebene Abfangzange zum Sichern eines Rohres gegen Drehung um seine Achse
US5669644A (en) * 1995-11-13 1997-09-23 Kokusai Electric Co., Ltd. Wafer transfer plate
US5780488A (en) * 1996-04-03 1998-07-14 Merck & Co., Inc. Inhibitors of farnesyl-protein transferase
US5870488A (en) * 1996-05-07 1999-02-09 Fortrend Engineering Corporation Method and apparatus for prealigning wafers in a wafer sorting system
US6322119B1 (en) * 1999-07-09 2001-11-27 Semitool, Inc. Robots for microelectronic workpiece handling
US5944476A (en) * 1997-03-26 1999-08-31 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism
US6116848A (en) * 1997-11-26 2000-09-12 Brooks Automation, Inc. Apparatus and method for high-speed transfer and centering of wafer substrates
US6015174A (en) * 1998-06-04 2000-01-18 Eastman Kodak Company Universal end effector for robotic applications
JP2000040728A (ja) * 1998-07-22 2000-02-08 Nippon Asm Kk ウェハ搬送機構
US5945798A (en) 1998-08-27 1999-08-31 Eastman Kodak Company System for determining part presence and grip pressure for a robotic gripping device
US6474712B1 (en) * 1999-05-15 2002-11-05 Applied Materials, Inc. Gripper for supporting substrate in a vertical orientation
US6467827B1 (en) * 1999-10-30 2002-10-22 Frank J. Ardezzone IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors
US6409241B1 (en) * 2000-09-12 2002-06-25 Nortel Networks Limited Apparatus for gripping ceramic substrates
US6578893B2 (en) * 2000-10-02 2003-06-17 Ajs Automation, Inc. Apparatus and methods for handling semiconductor wafers
US6592324B2 (en) 2001-02-26 2003-07-15 Irm, Llc Gripper mechanism
US7140655B2 (en) * 2001-09-04 2006-11-28 Multimetrixs Llc Precision soft-touch gripping mechanism for flat objects
US7014235B1 (en) * 2002-09-18 2006-03-21 Storage Technology Corporation Inertia actuation for robotic gripper mechanism

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CA2438789A1 (en) 2002-09-06
US20050232743A1 (en) 2005-10-20
US6932557B2 (en) 2005-08-23
US20020117380A1 (en) 2002-08-29
DE60210946D1 (de) 2006-06-01
ATE324230T1 (de) 2006-05-15
EP1381495A2 (de) 2004-01-21
US20070005182A1 (en) 2007-01-04
US20040086368A1 (en) 2004-05-06
EP1693166A2 (de) 2006-08-23
JP2005502479A (ja) 2005-01-27
EP1693166A3 (de) 2006-09-06
EP1381495B1 (de) 2006-04-26
EP1381495A4 (de) 2004-04-21
AU2002255622B2 (en) 2008-07-17
WO2002068157A2 (en) 2002-09-06
DE60230077D1 (de) 2009-01-08
EP1693166B1 (de) 2008-11-26
US7422411B2 (en) 2008-09-09
DE60210946T2 (de) 2007-01-04
US6592324B2 (en) 2003-07-15
WO2002068157A3 (en) 2003-04-24

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