ATE216436T1 - Molybdän-wolfram-material zum verdrahten, molybdän-wolfram-target zum verdrahten, verfahren zu deren herstellung und dünne molybdän-wolfram verdrahtung - Google Patents
Molybdän-wolfram-material zum verdrahten, molybdän-wolfram-target zum verdrahten, verfahren zu deren herstellung und dünne molybdän-wolfram verdrahtungInfo
- Publication number
- ATE216436T1 ATE216436T1 AT95902950T AT95902950T ATE216436T1 AT E216436 T1 ATE216436 T1 AT E216436T1 AT 95902950 T AT95902950 T AT 95902950T AT 95902950 T AT95902950 T AT 95902950T AT E216436 T1 ATE216436 T1 AT E216436T1
- Authority
- AT
- Austria
- Prior art keywords
- wiring
- molybdenum tungsten
- wirings
- molybdenum
- tungsten
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 7
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 title 3
- 238000004519 manufacturing process Methods 0.000 title 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 229910052750 molybdenum Inorganic materials 0.000 abstract 2
- 239000011733 molybdenum Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 2
- 229910052721 tungsten Inorganic materials 0.000 abstract 2
- 239000010937 tungsten Substances 0.000 abstract 2
- 238000003723 Smelting Methods 0.000 abstract 1
- 229910001080 W alloy Inorganic materials 0.000 abstract 1
- 238000013329 compounding Methods 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- 238000004663 powder metallurgy Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/09—Mixtures of metallic powders
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53257—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a refractory metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12826—Group VIB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12826—Group VIB metal-base component
- Y10T428/1284—W-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2933—Coated or with bond, impregnation or core
- Y10T428/294—Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
- Y10T428/2951—Metal with weld modifying or stabilizing coating [e.g., flux, slag, producer, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31293693 | 1993-12-14 | ||
PCT/JP1994/002095 WO1995016797A1 (en) | 1993-12-14 | 1994-12-14 | Molybdenum-tungsten material for wiring, molybdenum-tungsten target for wiring, process for producing the same, and molybdenum-tungsten wiring thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE216436T1 true ATE216436T1 (de) | 2002-05-15 |
Family
ID=18035262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT95902950T ATE216436T1 (de) | 1993-12-14 | 1994-12-14 | Molybdän-wolfram-material zum verdrahten, molybdän-wolfram-target zum verdrahten, verfahren zu deren herstellung und dünne molybdän-wolfram verdrahtung |
Country Status (8)
Country | Link |
---|---|
US (3) | US5913100A (de) |
EP (2) | EP0947593A3 (de) |
JP (1) | JP3445276B2 (de) |
KR (1) | KR100210525B1 (de) |
AT (1) | ATE216436T1 (de) |
DE (1) | DE69430439T2 (de) |
TW (1) | TW360926B (de) |
WO (1) | WO1995016797A1 (de) |
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US6445004B1 (en) | 1998-02-26 | 2002-09-03 | Samsung Electronics Co., Ltd. | Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof |
KR100471773B1 (ko) * | 1997-09-19 | 2005-07-07 | 삼성전자주식회사 | 몰리브덴또는몰리브덴합금을이용한배선의제조방법및이를이용한박막트랜지스터의제조방법 |
KR100508036B1 (ko) * | 1997-02-26 | 2005-11-21 | 삼성전자주식회사 | 몰리브덴또는몰리브덴합금을이용한반도체장치의제조방법 |
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US6614083B1 (en) | 1999-03-17 | 2003-09-02 | Semiconductor Energy Laboratory Co., Ltd. | Wiring material and a semiconductor device having wiring using the material, and the manufacturing method |
JP4527069B2 (ja) * | 1999-04-12 | 2010-08-18 | 株式会社半導体エネルギー研究所 | 表示装置 |
TW444257B (en) | 1999-04-12 | 2001-07-01 | Semiconductor Energy Lab | Semiconductor device and method for fabricating the same |
US7245018B1 (en) | 1999-06-22 | 2007-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Wiring material, semiconductor device provided with a wiring using the wiring material and method of manufacturing thereof |
US6661096B1 (en) * | 1999-06-29 | 2003-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Wiring material semiconductor device provided with a wiring using the wiring material and method of manufacturing thereof |
JP4627843B2 (ja) * | 1999-07-22 | 2011-02-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP3721014B2 (ja) * | 1999-09-28 | 2005-11-30 | 株式会社日鉱マテリアルズ | スッパタリング用タングステンターゲットの製造方法 |
JP2001295035A (ja) * | 2000-04-11 | 2001-10-26 | Toshiba Corp | スパッタリングターゲットおよびその製造方法 |
US7718117B2 (en) * | 2000-09-07 | 2010-05-18 | Kabushiki Kaisha Toshiba | Tungsten sputtering target and method of manufacturing the target |
JP4905618B2 (ja) * | 2001-05-31 | 2012-03-28 | 株式会社東芝 | 配線形成用材料、配線形成用スパッタリングターゲット、配線薄膜及び電子部品 |
JP4574949B2 (ja) * | 2003-01-14 | 2010-11-04 | 株式会社東芝 | スパッタリングターゲットとその製造方法 |
JP2004356616A (ja) * | 2003-05-28 | 2004-12-16 | Samsung Electronics Co Ltd | 配線用エッチング液及びこれを利用した薄膜トランジスタ表示板の製造方法 |
JP4110533B2 (ja) * | 2004-02-27 | 2008-07-02 | 日立金属株式会社 | Mo系ターゲット材の製造方法 |
US20050230244A1 (en) | 2004-03-31 | 2005-10-20 | Hitachi Metals, Ltd | Sputter target material and method of producing the same |
US20070243095A1 (en) * | 2004-06-15 | 2007-10-18 | Tosoh Smd, Inc. | High Purity Target Manufacturing Methods |
JP4492877B2 (ja) * | 2005-09-27 | 2010-06-30 | 日本新金属株式会社 | スパッタリングターゲット用原料粉末として用いられる高純度モリブデン−タングステン合金粉末の製造方法 |
AT8697U1 (de) | 2005-10-14 | 2006-11-15 | Plansee Se | Rohrtarget |
DE102005050424B4 (de) * | 2005-10-19 | 2009-10-22 | W.C. Heraeus Gmbh | Sputtertarget aus mehrkomponentigen Legierungen |
US20080170959A1 (en) * | 2007-01-11 | 2008-07-17 | Heraeus Incorporated | Full density Co-W magnetic sputter targets |
CN101611165B (zh) * | 2007-01-12 | 2012-03-21 | 新日铁高新材料 | Mo系溅射靶板及其制造方法 |
JP4919162B2 (ja) * | 2007-04-10 | 2012-04-18 | 日立金属株式会社 | Fe−Co系合金スパッタリングターゲット材およびFe−Co系合金スパッタリングターゲット材の製造方法 |
US8016705B2 (en) | 2007-04-19 | 2011-09-13 | Shimano Inc. | Bicycle component positioning device |
AT10578U1 (de) * | 2007-12-18 | 2009-06-15 | Plansee Metall Gmbh | Dunnschichtsolarzelle mit molybdan-haltiger ruckelektrodenschicht |
WO2009119804A1 (ja) * | 2008-03-28 | 2009-10-01 | 日立金属株式会社 | 電子部品用薄膜配線および薄膜配線形成用スパッタリングターゲット材 |
KR20170016024A (ko) | 2011-05-10 | 2017-02-10 | 에이치. 씨. 스타아크 아이앤씨 | 멀티-블록 스퍼터링 타겟 및 이에 관한 제조방법 및 물품 |
JP6677875B2 (ja) * | 2015-03-23 | 2020-04-08 | 三菱マテリアル株式会社 | 多結晶タングステン及びタングステン合金焼結体並びにその製造方法 |
KR101995377B1 (ko) | 2017-11-29 | 2019-07-02 | 엔에이티엠 주식회사 | 텅스텐-몰리브덴 합금 제조방법 |
JP2020047702A (ja) * | 2018-09-18 | 2020-03-26 | キオクシア株式会社 | 半導体装置およびその製造方法 |
KR20230067339A (ko) * | 2021-11-09 | 2023-05-16 | 삼성전자주식회사 | 집적회로 소자 |
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JPH05194064A (ja) * | 1992-01-21 | 1993-08-03 | Nisshin Steel Co Ltd | 金属コーティングしたセラミックス粒及びその製造方法 |
JP3573778B2 (ja) | 1993-03-12 | 2004-10-06 | 株式会社東芝 | 液晶表示装置 |
US5738948A (en) * | 1994-09-29 | 1998-04-14 | Kabushiki Kaisha Toshiba | Electrode-wiring material and electrode-wiring substrate using the same |
JP3072714B2 (ja) * | 1995-09-04 | 2000-08-07 | 株式会社デンソー | 減速機構付スタータ |
US5835177A (en) * | 1995-10-05 | 1998-11-10 | Kabushiki Kaisha Toshiba | Array substrate with bus lines takeout/terminal sections having multiple conductive layers |
-
1994
- 1994-12-14 DE DE69430439T patent/DE69430439T2/de not_active Expired - Lifetime
- 1994-12-14 WO PCT/JP1994/002095 patent/WO1995016797A1/ja active IP Right Grant
- 1994-12-14 EP EP99201616A patent/EP0947593A3/de not_active Withdrawn
- 1994-12-14 JP JP51666095A patent/JP3445276B2/ja not_active Expired - Lifetime
- 1994-12-14 EP EP95902950A patent/EP0735152B1/de not_active Expired - Lifetime
- 1994-12-14 AT AT95902950T patent/ATE216436T1/de active
- 1994-12-14 US US08/663,251 patent/US5913100A/en not_active Expired - Lifetime
- 1994-12-14 KR KR1019960703145A patent/KR100210525B1/ko not_active IP Right Cessation
- 1994-12-23 TW TW083112117A patent/TW360926B/zh not_active IP Right Cessation
-
1998
- 1998-10-06 US US09/165,743 patent/US7153589B1/en not_active Expired - Fee Related
- 1998-12-01 US US09/203,678 patent/US6200694B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW360926B (en) | 1999-06-11 |
KR100210525B1 (ko) | 1999-07-15 |
EP0947593A2 (de) | 1999-10-06 |
US7153589B1 (en) | 2006-12-26 |
DE69430439D1 (de) | 2002-05-23 |
EP0735152B1 (de) | 2002-04-17 |
EP0735152A1 (de) | 1996-10-02 |
EP0947593A3 (de) | 1999-12-15 |
JP3445276B2 (ja) | 2003-09-08 |
DE69430439T2 (de) | 2003-02-06 |
EP0735152A4 (de) | 1997-02-26 |
WO1995016797A1 (en) | 1995-06-22 |
US6200694B1 (en) | 2001-03-13 |
US5913100A (en) | 1999-06-15 |
KR960706570A (ko) | 1996-12-09 |
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