ATE175916T1 - Polierverfahren, hierzu bestimmte vorrichtung und schwabbel-/polierscheibe - Google Patents

Polierverfahren, hierzu bestimmte vorrichtung und schwabbel-/polierscheibe

Info

Publication number
ATE175916T1
ATE175916T1 AT93923661T AT93923661T ATE175916T1 AT E175916 T1 ATE175916 T1 AT E175916T1 AT 93923661 T AT93923661 T AT 93923661T AT 93923661 T AT93923661 T AT 93923661T AT E175916 T1 ATE175916 T1 AT E175916T1
Authority
AT
Austria
Prior art keywords
polishing
bubbing
work
disc
buff wheel
Prior art date
Application number
AT93923661T
Other languages
English (en)
Inventor
Shuji Kawasaki
Original Assignee
Bbf Yamate Corp
Asahi Tec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4315644A external-priority patent/JPH0752053A/ja
Priority claimed from JP4315643A external-priority patent/JPH06198556A/ja
Priority claimed from JP4359981A external-priority patent/JPH06198559A/ja
Priority claimed from JP4359980A external-priority patent/JPH06198558A/ja
Priority claimed from JP05215179A external-priority patent/JP3094355B2/ja
Application filed by Bbf Yamate Corp, Asahi Tec Corp filed Critical Bbf Yamate Corp
Application granted granted Critical
Publication of ATE175916T1 publication Critical patent/ATE175916T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT93923661T 1992-10-30 1993-10-29 Polierverfahren, hierzu bestimmte vorrichtung und schwabbel-/polierscheibe ATE175916T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP4315644A JPH0752053A (ja) 1992-10-30 1992-10-30 湿式研磨用バフホイール
JP4315643A JPH06198556A (ja) 1992-10-30 1992-10-30 湿式研磨方法およびその装置
JP4359981A JPH06198559A (ja) 1992-12-31 1992-12-31 湿式研磨方法およびその装置
JP4359980A JPH06198558A (ja) 1992-12-31 1992-12-31 研磨装置
JP05215179A JP3094355B2 (ja) 1993-08-05 1993-08-05 湿式研磨方法およびその装置

Publications (1)

Publication Number Publication Date
ATE175916T1 true ATE175916T1 (de) 1999-02-15

Family

ID=27529597

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93923661T ATE175916T1 (de) 1992-10-30 1993-10-29 Polierverfahren, hierzu bestimmte vorrichtung und schwabbel-/polierscheibe

Country Status (9)

Country Link
US (1) US5516327A (de)
EP (1) EP0624432B1 (de)
KR (1) KR0167000B1 (de)
AT (1) ATE175916T1 (de)
AU (1) AU672653B2 (de)
CA (1) CA2127098C (de)
DE (1) DE69323178T2 (de)
ES (1) ES2127838T3 (de)
WO (1) WO1994009945A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2882458B2 (ja) * 1994-11-28 1999-04-12 株式会社東京精密 ウェーハ面取り機
JP3438383B2 (ja) * 1995-03-03 2003-08-18 ソニー株式会社 研磨方法およびこれに用いる研磨装置
US5954566A (en) * 1995-04-03 1999-09-21 Bauer; Jason Method and apparatus for reconditioning digital recording discs
US5593343A (en) * 1995-04-03 1997-01-14 Bauer; Jason Apparatus for reconditioning digital recording discs
JPH0985737A (ja) * 1995-09-22 1997-03-31 Toray Eng Co Ltd ワイヤ式切断装置
US5954570A (en) * 1996-05-31 1999-09-21 Kabushiki Kaisha Toshiba Conditioner for a polishing tool
US5957759A (en) * 1997-04-17 1999-09-28 Advanced Micro Devices, Inc. Slurry distribution system that continuously circulates slurry through a distribution loop
DE69940566D1 (de) * 1998-12-01 2009-04-23 Univ London Poliervorrichtung mit Antriebsvorrichtungen zum Führen des Schleifwerkzeugs entlang einer Präzessionsbahn und Verfahren zu deren Verwendung
US6488565B1 (en) * 2000-08-29 2002-12-03 Applied Materials, Inc. Apparatus for chemical mechanical planarization having nested load cups
KR101583521B1 (ko) * 2015-07-31 2016-01-08 (주) 엘림비엠에스 내오염, 내마모 성능과 시공 작업성 및 광도 성능이 개선된 피브이씨 타일 바닥의 코팅방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930797B1 (de) * 1964-05-06 1974-08-15
US3568371A (en) * 1969-03-12 1971-03-09 Spitfire Tool & Machine Co Inc Lapping and polishing machine
US3631634A (en) * 1970-01-26 1972-01-04 John L Weber Polishing machine
US3651604A (en) * 1970-11-25 1972-03-28 Mill Polishing Corp Process for improving surface finish on clad aluminum sheets
FR2350924A1 (fr) * 1976-05-14 1977-12-09 Shc Machine pour le polissage de la surface interieure d'un moule
DE2813091C2 (de) * 1978-03-25 1980-02-07 Prontor-Werk Alfred Gauthier Gmbh, 7547 Wildbad Einrichtung zum Zuführen von Kühl- und/oder Polierflüssigkeit, insbesondere zur Verwendung an Maschinen zum Schleifen und/oder Polieren von optischen Linsen
US4268999A (en) * 1978-05-17 1981-05-26 Hitachi, Ltd. Automatic polishing apparatus
JPS5630024A (en) * 1979-08-21 1981-03-26 Mitsui Petrochem Ind Ltd Surface treating method for aluminum sheet body
US4450652A (en) * 1981-09-04 1984-05-29 Monsanto Company Temperature control for wafer polishing
JPS58114857A (ja) * 1981-12-26 1983-07-08 Inoue Japax Res Inc 表面研磨方法
EP0100648A3 (de) * 1982-07-29 1985-08-07 Yoshiaki Nagaura Befestigen eines Werkstücks
JPS59182057A (ja) * 1983-03-29 1984-10-16 Mitsubishi Rayon Co Ltd 平面板の研摩方法
JPS6374563A (ja) * 1986-09-16 1988-04-05 Kobe Steel Ltd 鏡面加工方法
JPS63196223U (de) * 1987-06-09 1988-12-16
US4910155A (en) * 1988-10-28 1990-03-20 International Business Machines Corporation Wafer flood polishing
US4951420A (en) * 1989-05-16 1990-08-28 Sorg Volkmar R Polishing apparatus
US5203121A (en) * 1991-05-09 1993-04-20 Metzger George L Method for filtering and cooling surface finishing compounds
JP3073261B2 (ja) * 1991-06-03 2000-08-07 株式会社ジェイエスイー 石材表面の加工処理方法とその装置
US5216843A (en) * 1992-09-24 1993-06-08 Intel Corporation Polishing pad conditioning apparatus for wafer planarization process

Also Published As

Publication number Publication date
CA2127098A1 (en) 1994-05-11
AU672653B2 (en) 1996-10-10
EP0624432A1 (de) 1994-11-17
WO1994009945A1 (fr) 1994-05-11
AU5344894A (en) 1994-05-24
US5516327A (en) 1996-05-14
KR940703729A (ko) 1994-12-12
CA2127098C (en) 1998-06-16
EP0624432B1 (de) 1999-01-20
ES2127838T3 (es) 1999-05-01
DE69323178T2 (de) 1999-09-02
EP0624432A4 (de) 1995-04-19
DE69323178D1 (de) 1999-03-04
KR0167000B1 (ko) 1999-02-01

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Legal Events

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