DE69940566D1 - Poliervorrichtung mit Antriebsvorrichtungen zum Führen des Schleifwerkzeugs entlang einer Präzessionsbahn und Verfahren zu deren Verwendung - Google Patents
Poliervorrichtung mit Antriebsvorrichtungen zum Führen des Schleifwerkzeugs entlang einer Präzessionsbahn und Verfahren zu deren VerwendungInfo
- Publication number
- DE69940566D1 DE69940566D1 DE69940566T DE69940566T DE69940566D1 DE 69940566 D1 DE69940566 D1 DE 69940566D1 DE 69940566 T DE69940566 T DE 69940566T DE 69940566 T DE69940566 T DE 69940566T DE 69940566 D1 DE69940566 D1 DE 69940566D1
- Authority
- DE
- Germany
- Prior art keywords
- rotation axis
- head
- head member
- guiding
- methods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B17/00—Special adaptations of machines or devices for grinding controlled by patterns, drawings, magnetic tapes or the like; Accessories therefor
- B24B17/10—Special adaptations of machines or devices for grinding controlled by patterns, drawings, magnetic tapes or the like; Accessories therefor involving electrical transmission means only, e.g. controlled by magnetic tape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/241—Methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
- B24D13/147—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face comprising assemblies of felted or spongy material; comprising pads surrounded by a flexible material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/20—Mountings for the wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
- B24D9/04—Rigid drums for carrying flexible material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S451/00—Abrading
- Y10S451/90—Gear abrader
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9826369.2A GB9826369D0 (en) | 1998-12-01 | 1998-12-01 | A polishing machine and method |
GBGB9826371.8A GB9826371D0 (en) | 1998-12-01 | 1998-12-01 | A tool and an abrasive cup for fitment thereto for polishing or abrading a workpiece |
GBGB9826372.6A GB9826372D0 (en) | 1998-12-01 | 1998-12-01 | A polishing machine and method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69940566D1 true DE69940566D1 (de) | 2009-04-23 |
Family
ID=27269568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69940566T Expired - Lifetime DE69940566D1 (de) | 1998-12-01 | 1999-12-01 | Poliervorrichtung mit Antriebsvorrichtungen zum Führen des Schleifwerkzeugs entlang einer Präzessionsbahn und Verfahren zu deren Verwendung |
Country Status (10)
Country | Link |
---|---|
US (1) | US6796877B1 (de) |
EP (2) | EP1384553B1 (de) |
JP (1) | JP2002535151A (de) |
KR (1) | KR100644144B1 (de) |
CN (1) | CN100372648C (de) |
AT (1) | ATE424968T1 (de) |
AU (1) | AU1399600A (de) |
DE (1) | DE69940566D1 (de) |
HK (1) | HK1063026A1 (de) |
WO (1) | WO2000032353A2 (de) |
Families Citing this family (79)
Publication number | Priority date | Publication date | Assignee | Title |
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US6645059B1 (en) * | 1999-12-01 | 2003-11-11 | Gerber Coburn Optical Inc. | Device for retaining abrasive pad on lap in eyeglass lens making apparatus |
JP4945771B2 (ja) * | 2000-02-03 | 2012-06-06 | カール ツァイス ヴィジョン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 研磨機用の研磨ヘッド |
KR20020072453A (ko) | 2001-03-10 | 2002-09-16 | 삼성전자 주식회사 | 재생장치 및 부가정보 서비스 서버 시스템 |
ATE433826T1 (de) | 2002-01-09 | 2009-07-15 | Hoya Corp | Schleifwerkzeug |
DE10207379A1 (de) * | 2002-02-21 | 2003-09-04 | Asphericon Gmbh | Verfahren zum Schleifen und Polieren von Freiformflächen, insbesondere von rotationssymmetrischen asphärischen optischen Linsen |
DE10218039A1 (de) * | 2002-04-23 | 2003-11-13 | Zeiss Carl | Bearbeitungskopf zur Oberflächenbearbeitung |
JP2004216477A (ja) * | 2003-01-10 | 2004-08-05 | Olympus Corp | ポリッシャー、研磨加工装置、研磨加工方法、研磨加工をコンピュータに実行させる制御プログラムおよび記録媒体 |
JP2004261954A (ja) * | 2003-02-14 | 2004-09-24 | Seiko Epson Corp | 研磨方法 |
US20050202754A1 (en) * | 2003-05-16 | 2005-09-15 | Bechtold Mike J. | Method, apparatus, and tools for precision polishing of lenses and lens molds |
DE102004047563A1 (de) * | 2004-09-30 | 2006-04-06 | Asphericon Gmbh | Verfahren zum Polieren |
US7264538B2 (en) * | 2005-08-12 | 2007-09-04 | United Technologies Corporation | Method of removing a coating |
US7390242B2 (en) * | 2005-08-29 | 2008-06-24 | Edge Technologies, Inc. | Diamond tool blade with circular cutting edge |
JP2007111283A (ja) * | 2005-10-21 | 2007-05-10 | Timothy Tamio Nemoto | 歯冠研磨装置 |
US7312154B2 (en) * | 2005-12-20 | 2007-12-25 | Corning Incorporated | Method of polishing a semiconductor-on-insulator structure |
US7662024B2 (en) * | 2006-05-03 | 2010-02-16 | V.I. Mfg. Inc. | Method and apparatus for precision polishing of optical components |
DE102006022831A1 (de) * | 2006-05-16 | 2007-11-22 | Siemens Ag | Verfahren zum Steuern einer Schleifmaschine und numerisch gesteuerte Schleifmaschine |
FI121654B (sv) * | 2006-07-10 | 2011-02-28 | Kwh Mirka Ab Oy | Förfarande för tillverkning av en flexibel sliprondell och en flexibel sliprondell |
CN101541475B (zh) * | 2006-11-30 | 2011-03-16 | 康宁股份有限公司 | 工件表面的精密研磨加工 |
GB2452091B (en) * | 2007-08-24 | 2013-01-02 | Zeeko Ltd | Computer controlled work tool apparatus and method |
US7645180B2 (en) * | 2007-10-18 | 2010-01-12 | Thielenhaus Microfinish Corporation | Method for finishing a workpiece |
US11225727B2 (en) | 2008-11-07 | 2022-01-18 | Lam Research Corporation | Control of current density in an electroplating apparatus |
US10011917B2 (en) | 2008-11-07 | 2018-07-03 | Lam Research Corporation | Control of current density in an electroplating apparatus |
DE102009004787A1 (de) | 2009-01-13 | 2010-07-15 | Schneider Gmbh & Co. Kg | Vorrichtung und Verfahren zum Polieren von Linsen |
JP5402391B2 (ja) * | 2009-01-27 | 2014-01-29 | 信越化学工業株式会社 | 半導体用合成石英ガラス基板の加工方法 |
US20100242283A1 (en) * | 2009-03-30 | 2010-09-30 | Gm Global Technology Operations, Inc. | Method for finishing a gear surface |
DE102010019491B4 (de) * | 2010-04-30 | 2015-07-09 | Carl Zeiss Vision International Gmbh | Polierwerkzeug zur Bearbeitung von optischen Flächen, insbesondere Freiformflächen |
US20110275280A1 (en) * | 2010-05-07 | 2011-11-10 | National Formosa University | Method of auto scanning and scraping a work piece for a hard rail |
US9385035B2 (en) | 2010-05-24 | 2016-07-05 | Novellus Systems, Inc. | Current ramping and current pulsing entry of substrates for electroplating |
US8747188B2 (en) * | 2011-02-24 | 2014-06-10 | Apple Inc. | Smart automation of robotic surface finishing |
DE102011014230A1 (de) * | 2011-03-17 | 2012-09-20 | Satisloh Ag | Vorrichtung zur Feinbearbeitung von optisch wirksamen Flächen an insbesondere Brillengläsern |
DE202011004912U1 (de) * | 2011-04-06 | 2011-08-10 | Deckel Maho Seebach Gmbh | Polierwerkzeug |
US9028666B2 (en) | 2011-05-17 | 2015-05-12 | Novellus Systems, Inc. | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath |
DE102011084118A1 (de) * | 2011-10-07 | 2013-04-11 | Carl Zeiss Smt Gmbh | Glättungswerkzeug und Glättungsvorrichtung zur automatisierten Bearbeitung eines optischen Elements und entsprechende Verfahren hierzu |
US20130225050A1 (en) * | 2012-02-24 | 2013-08-29 | Apple Inc. | Localized spot lapping on a larger work surface area |
CN102873628B (zh) * | 2012-09-26 | 2015-02-18 | 清华大学 | 一种用于数控小工具抛光的螺旋线式加工路径的生成方法 |
US9971339B2 (en) | 2012-09-26 | 2018-05-15 | Apple Inc. | Contact patch simulation |
CN103111934B (zh) * | 2013-03-04 | 2016-05-11 | 江苏民生特种设备集团有限公司 | 一种钢瓶封头的抛光方法 |
TWI589404B (zh) * | 2013-06-28 | 2017-07-01 | 聖高拜磨料有限公司 | 基於向日葵圖案之經塗佈的研磨製品 |
CN103894916B (zh) * | 2014-03-06 | 2016-04-13 | 浙江工业大学 | 一种圆锥抛光装置 |
DE102014114172A1 (de) * | 2014-09-30 | 2016-03-31 | Carl Zeiss Jena Gmbh | Verfahren und Vorrichtungen zum Bearbeiten optischer Werkstücke |
EP3200954B1 (de) * | 2014-10-03 | 2020-12-09 | Zeeko Innovations Limited | Werkzeug und verfahren zum formen und fertigstellen eines werkstückes |
DE102014222848B4 (de) * | 2014-11-10 | 2021-03-04 | Supfina Grieshaber Gmbh & Co. Kg | Finishvorrichtung |
CN104385080B (zh) * | 2014-11-24 | 2017-03-15 | 成都精密光学工程研究中心 | 抛光模面形修改装置 |
CN105458867A (zh) * | 2015-11-16 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | 一种控制非旋转对称误差光学元件抛光用夹具 |
CN105479318B (zh) * | 2015-11-25 | 2018-05-18 | 赣州澳克泰工具技术有限公司 | 硬质合金涂层刀具的后处理方法和硬质合金涂层刀具 |
CN105478784B (zh) * | 2015-12-04 | 2017-11-14 | 河源富马硬质合金股份有限公司 | 一种降低圆片刀偏心的刮料成型方法 |
ITUA20162674A1 (it) * | 2016-04-18 | 2017-10-18 | Bmr S P A | Macchina squadratrice |
DE102016006741A1 (de) * | 2016-06-06 | 2017-12-07 | Schneider Gmbh & Co. Kg | Werkzeug, Vorrichtung und Verfahren zum Polieren von Linsen |
KR101870701B1 (ko) | 2016-08-01 | 2018-06-25 | 에스케이실트론 주식회사 | 폴리싱 측정 장치 및 그의 연마 시간 제어 방법, 및 그를 포함한 폴리싱 제어 시스템 |
JP6888476B2 (ja) | 2016-08-23 | 2021-06-16 | 信越化学工業株式会社 | 基板の製造方法 |
CN108237468B (zh) * | 2016-12-26 | 2021-08-03 | 台湾积体电路制造股份有限公司 | 厚度缩减装置及厚度缩减方法 |
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-
1999
- 1999-12-01 KR KR1020017006900A patent/KR100644144B1/ko active IP Right Grant
- 1999-12-01 JP JP2000585029A patent/JP2002535151A/ja active Pending
- 1999-12-01 EP EP03078101A patent/EP1384553B1/de not_active Expired - Lifetime
- 1999-12-01 DE DE69940566T patent/DE69940566D1/de not_active Expired - Lifetime
- 1999-12-01 CN CNB998159859A patent/CN100372648C/zh not_active Expired - Fee Related
- 1999-12-01 AU AU13996/00A patent/AU1399600A/en not_active Abandoned
- 1999-12-01 US US09/857,291 patent/US6796877B1/en not_active Expired - Lifetime
- 1999-12-01 AT AT03078101T patent/ATE424968T1/de not_active IP Right Cessation
- 1999-12-01 WO PCT/GB1999/004014 patent/WO2000032353A2/en active IP Right Grant
- 1999-12-01 EP EP99972958A patent/EP1154877A2/de not_active Withdrawn
-
2004
- 2004-07-27 HK HK04105544.6A patent/HK1063026A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1154877A2 (de) | 2001-11-21 |
WO2000032353A3 (en) | 2000-08-10 |
EP1384553B1 (de) | 2009-03-11 |
JP2002535151A (ja) | 2002-10-22 |
KR20010108000A (ko) | 2001-12-07 |
ATE424968T1 (de) | 2009-03-15 |
EP1384553A3 (de) | 2004-02-04 |
WO2000032353A2 (en) | 2000-06-08 |
EP1384553A2 (de) | 2004-01-28 |
CN100372648C (zh) | 2008-03-05 |
HK1063026A1 (en) | 2004-12-10 |
AU1399600A (en) | 2000-06-19 |
US6796877B1 (en) | 2004-09-28 |
CN1335799A (zh) | 2002-02-13 |
KR100644144B1 (ko) | 2006-11-10 |
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