WO2023027360A1 - 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물 - Google Patents
패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물 Download PDFInfo
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 64
- 239000000203 mixture Substances 0.000 title claims abstract description 62
- 239000002253 acid Substances 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 45
- 239000000654 additive Substances 0.000 claims abstract description 31
- 239000000178 monomer Substances 0.000 claims abstract description 31
- 230000000996 additive effect Effects 0.000 claims abstract description 27
- 239000002952 polymeric resin Substances 0.000 claims abstract description 23
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 23
- 239000002904 solvent Substances 0.000 claims abstract description 17
- 238000009792 diffusion process Methods 0.000 claims abstract description 16
- 239000003112 inhibitor Substances 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims abstract description 14
- 229920001577 copolymer Polymers 0.000 claims description 16
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 14
- 230000006872 improvement Effects 0.000 claims description 11
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 claims description 10
- 239000012953 triphenylsulfonium Substances 0.000 claims description 10
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 9
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims description 9
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 claims description 6
- OTJFQRMIRKXXRS-UHFFFAOYSA-N (hydroxymethylamino)methanol Chemical compound OCNCO OTJFQRMIRKXXRS-UHFFFAOYSA-N 0.000 claims description 4
- VLLPVDKADBYKLM-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate;triphenylsulfanium Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 VLLPVDKADBYKLM-UHFFFAOYSA-M 0.000 claims description 3
- SSDIHNAZJDCUQV-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctane-1-sulfonate;triphenylsulfanium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1.[O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F SSDIHNAZJDCUQV-UHFFFAOYSA-M 0.000 claims description 3
- BFIAIMMAHAIVFT-UHFFFAOYSA-N 1-[bis(2-hydroxybutyl)amino]butan-2-ol Chemical compound CCC(O)CN(CC(O)CC)CC(O)CC BFIAIMMAHAIVFT-UHFFFAOYSA-N 0.000 claims description 3
- BWEHWMULPCRPOA-UHFFFAOYSA-M S(=O)(=O)([O-])C(F)(F)C(F)(F)C(F)(F)C(F)(F)F.C(C)(C)(C)C=1C(=C(C=CC1)[I+]C1=CC=CC=C1)C(C)(C)C Chemical compound S(=O)(=O)([O-])C(F)(F)C(F)(F)C(F)(F)C(F)(F)F.C(C)(C)(C)C=1C(=C(C=CC1)[I+]C1=CC=CC=C1)C(C)(C)C BWEHWMULPCRPOA-UHFFFAOYSA-M 0.000 claims description 3
- ITBPIKUGMIZTJR-UHFFFAOYSA-N [bis(hydroxymethyl)amino]methanol Chemical compound OCN(CO)CO ITBPIKUGMIZTJR-UHFFFAOYSA-N 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims description 3
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 3
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 3
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 claims description 3
- ORPDKMPYOLFUBA-UHFFFAOYSA-M diphenyliodanium;1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1.[O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ORPDKMPYOLFUBA-UHFFFAOYSA-M 0.000 claims description 3
- SBQIJPBUMNWUKN-UHFFFAOYSA-M diphenyliodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C=1C=CC=CC=1[I+]C1=CC=CC=C1 SBQIJPBUMNWUKN-UHFFFAOYSA-M 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N protonated dimethyl amine Natural products CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 claims description 3
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical group [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 claims description 3
- BYMHDFAVNIHUSW-UHFFFAOYSA-M (2-methoxyphenyl)-phenyliodanium;1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound COC1=CC=CC=C1[I+]C1=CC=CC=C1.[O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F BYMHDFAVNIHUSW-UHFFFAOYSA-M 0.000 claims description 2
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 claims description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 claims 2
- WLGDAKIJYPIYLR-UHFFFAOYSA-M octane-1-sulfonate Chemical compound CCCCCCCCS([O-])(=O)=O WLGDAKIJYPIYLR-UHFFFAOYSA-M 0.000 claims 1
- 229940079877 pyrogallol Drugs 0.000 claims 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 35
- 230000035945 sensitivity Effects 0.000 abstract description 15
- 230000000052 comparative effect Effects 0.000 description 17
- 238000011161 development Methods 0.000 description 15
- 230000018109 developmental process Effects 0.000 description 15
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 9
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000007334 copolymerization reaction Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 230000007261 regionalization Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- QHNYJSVVPJVSJH-UHFFFAOYSA-M (2-methoxyphenyl)-phenyliodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.COC1=CC=CC=C1[I+]C1=CC=CC=C1 QHNYJSVVPJVSJH-UHFFFAOYSA-M 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- VZPPHXVFMVZRTE-UHFFFAOYSA-N [Kr]F Chemical compound [Kr]F VZPPHXVFMVZRTE-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VZGUKKHVUMSOSL-UHFFFAOYSA-M (2,3-ditert-butylphenyl)-phenyliodanium trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C(C)(C)(C)C=1C(=C(C=CC1)[I+]C1=CC=CC=C1)C(C)(C)C VZGUKKHVUMSOSL-UHFFFAOYSA-M 0.000 description 1
- YFSUTJLHUFNCNZ-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctane-1-sulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YFSUTJLHUFNCNZ-UHFFFAOYSA-M 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- SLPRCRXKVZNQSR-UHFFFAOYSA-N heptan-4-one Chemical compound CCCC(=O)CCC.CCCC(=O)CCC SLPRCRXKVZNQSR-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- BFVRWGTVFTWBHI-UHFFFAOYSA-N methoxy(phenyl)iodanium Chemical compound CO[I+]C1=CC=CC=C1 BFVRWGTVFTWBHI-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Definitions
- the present invention relates to a chemically amplified positive photoresist composition for improving pattern profile and resolution.
- a photoresist is used in a photolithography process for forming various patterns.
- a photoresist means a photosensitive resin capable of obtaining an image corresponding to an exposure pattern by changing its solubility in a developing solution by the action of light.
- the photoresist pattern forming method includes using a negative tone developer (NTD, Positive Tone Development) and using a positive tone developer (PTD, Positive Tone Development).
- NTD negative tone developer
- PTD Positive Tone Development
- the pattern formation method using the negative tone developer forms a pattern by selectively dissolving and removing the unexposed area with a negative tone developer, and the pattern formation method using the positive tone developer selectively dissolves and removes the exposed area with a positive tone developer. to form a pattern.
- the pattern formation method using the negative tone developer implements a reversed pattern even in a contact hole pattern or trench pattern, which is difficult to form due to insufficient exposure, so that the same pattern is formed when the pattern is formed. Since this is easy and an organic solvent is used as a developing solution for removing unexposed portions, a photoresist pattern can be formed more effectively.
- a photolithography process using a photoresist composition is a process of coating a photoresist on a wafer, a soft baking process of heating the coated photoresist to evaporate a solvent, a process of imaging by a light source passing through a photomask, It consists of a process of forming a pattern by the difference in solubility of the exposed part and the non-exposed part using a developer, and a process of completing a circuit by etching it.
- the photoresist composition is composed of a photoacid generator generating acid by excimer laser irradiation, a base resin, and other additives.
- a base resin a polystyrene polymer with a hydroxyl group in a phenolic structure is basically used, and as a photosensitizer, any photosensitizer that can generate acid (H + ) at a specific wavelength is possible, mainly sulfonium salts, sulfonyldiazos, Benzosulfonyl, iodine, chlorine, carboxylic acid and the like are mainly used.
- the light source mainly used in the above process is a wavelength range of 365 nm to 193 nm using I-ray, KrF excimer laser, and ArF excimer laser light source, and the shorter the wavelength, the finer the pattern can be formed. It is known to be able to
- KrF laser (243 nm) photoresist has been continuously researched and developed to pursue optical microprocessing even though ArF laser (193 nm) system was developed later.
- the reason for this is that although the development of the next-generation ArF photoresist is still unsatisfactory, if the KrF photoresist is used as it is, the cost reduction effect in mass production of semiconductors can be great.
- the performance of KrF photoresists should also be improved. For example, since the thickness of photoresists is gradually reduced due to high integration, the development of photoresists with enhanced dry etching resistance is urgently required. Other required characteristics include high resolution, wide depth of focus (DOF) margin, defect-free thin film formation, adhesion to substrates, high contrast, fast sensitivity, and chemical stability.
- DOF wide depth of focus
- Korean Patent Registration No. 10-1204915 “Photoresist Polymer, Photoresist Composition Containing the Same, and Method for Forming a Photoresist Pattern Using the Same”
- Korean Patent Registration No. 10 -0273108 ⁇ Copolymer for preparing photoresist and chemically amplified positive photoresist composition containing the same ⁇ Korean Patent Registration No.
- KrF photoresists mainly use polyhydroxystyrene and polystyrene polymers having good transmittance of 248 nm wavelength as basic polymers in order to improve resolution and sensitivity.
- Positive photoresists based on these polyhydroxystyrene and polystyrene polymers are difficult to use in a process based on a 248nm light source due to a sloped pattern shape or a footing phenomenon. , As the thickness of photoresist increases, the resolution that can be realized decreases, making it difficult to proceed with the process.
- Patent Document 1 Korean Patent Publication No. 10-2010-0047038
- Patent Document 2 Korean Patent Registration No. 10-1363842
- Patent Document 3 Korean Patent Registration No. 10-1204915
- Patent Document 4 Korean Patent Registration No. 10-0273108
- Patent Document 5 Korean Patent Registration No. 10-1655947
- Patent Document 6 Korean Patent Registration No. 10-1977886
- An object of the present invention is to provide a photoresist composition for a KrF light source capable of improving resolution compared to conventional KrF positive photoresists by introducing and adding an appropriate amount of an acid generating auxiliary under the pattern that is effective in improving pattern profile and resolution.
- the present invention is at least one selected from the group represented by the following Chemical Formulas 1 to 3 and has a weight average molecular weight of 100 to 500 Chemically amplified resist pattern lower acid generating auxiliary monomer additive (Monomer) additive It provides a positive photoresist composition for a KrF laser comprising a.
- R1 to R3 are structures selected from the structures of Formulas A to E below, and R represents a binding site.
- the monomer additive for assisting in acid generation under the pattern for resist represented by the above chemical formula and a similar structure are commercially available from a number of domestic/foreign suppliers.
- the acid generating auxiliary monomer additive under the pattern for resist represented by the above formula has a weight average molecular weight of 100 to 500.
- the acid generating auxiliary monomer additive under the resist pattern is 5 to 60% by weight of the polymer resin, 1 selected from the group represented by Formulas 1 to 3, based on the total weight of the composition 0.1 to 5% by weight of an acid generating auxiliary monomer additive under a pattern of at least one species, 0.05 to 10% by weight of a photoacid generator, and 0.01 to 5% by weight of an acid diffusion inhibitor, and the remainder is a solvent.
- the polymer resin may be any commonly used photoresist resin, and is at least one selected from the group consisting of hydroxyl group-containing phenol polymer resins of Formulas 4 to 8 do.
- the phenol polymer resin is characterized in that at least one selected from the group consisting of the following hydroxyl group-containing phenol polymer resin Formulas 4 to 8.
- the photoacid generator is triphenylsulfonium triflate, triphenylsulfonium antimonate, diphenyliodonium triflate, diphenyliodonium antimonate.
- the acid diffusion inhibitor is dimethylamine, diethylamine, trimethylamine, triethylamine, tributhylamine, dimethanolamine It is characterized in that it comprises at least one selected from the group consisting of (Dimethanolamine), diethanolamine, trimethanolamine, triethanolamine and tributanolamine.
- the chemically amplified positive photoresist composition for improving the pattern profile and resolution including the acid generating auxiliary monomer additive under the pattern according to the present invention can obtain a vertical profile according to exposure energy, sensitivity and resolution Since it has an improvement effect and also has a residual scum removal effect under the pattern, it is possible to improve the process margin compared to the existing KrF positive photoresist.
- the “acid generating auxiliary monomer additive” under the pattern proposed in the present invention means that it is decomposed by heat in the PEB (Post Exposed Bake) process that proceeds after the process of exposure to krypton fluoride (KrF) of a 248nm light source. It means an additive that generates acid (H+).
- PEB Post Exposed Bake
- KrF krypton fluoride
- 'Photoresist' is a mixture of a polymer and a photosensitizer, and its chemical properties are changed by light, so that its solubility in a specific solvent changes when exposed to light of a certain wavelength. This means that the dissolution rate of the exposed portion and the non-exposed portion differ, and after a certain amount of dissolution time, undissolved portions remain and form patterns.
- the 'photolithographic process' refers to a mask in which a semiconductor design drawing is engraved using the properties of the photoresist as described above, is inserted between the light source and the photoresist film coated on the silicon wafer, and the light source Turning on means that the circuit engraved on the mask is transferred to the photoresist as it is.
- 'KrF laser' means a krypton fluoride (KrF) laser having a wavelength of 248 nm.
- One embodiment of the present invention is a chemically amplified type for pattern profile and resolution improvement, characterized in that it comprises at least one type of acid generating auxiliary monomer additive selected from the group represented by the following formulas 1 to 3 To provide a positive photoresist composition.
- R1 to R3 are structures selected from the structures of Formulas A to E below, and R represents a binding site.
- the positive photoresist composition for pattern profile and resolution improvement including an acid generating auxiliary monomer additive under the pattern according to the present invention is 5 to 60% by weight of a polymer resin, represented by Chemical Formulas 1 to 3, based on the total weight of the composition.
- a polymer resin represented by Chemical Formulas 1 to 3, based on the total weight of the composition.
- 0.1 to 5% by weight of one or more types of acid generating auxiliary monomer additives selected from the group consisting of 0.1 to 5% by weight of a photoacid generator, 0.01 to 5% by weight of an acid diffusion inhibitor, and the rest may be composed of a solvent. there is.
- the polymer resin may be any photoresist resin that is commonly used, and is characterized in that at least one selected from the group consisting of the following hydroxyl group-containing phenol polymer resins of Chemical Formulas 4 to 8.
- the phenol polymer resin is characterized in that at least one selected from the group consisting of the following hydroxyl group-containing phenol polymer resin Formulas 4 to 8.
- the polymer resin preferably comprises 5 to 60% by weight of the polymer resin based on the total weight of the composition. If the polymer resin is used in less than 5% by weight, there are problems such as poor profile, scum, poor etch resistance, etc., and if it is used in excess of 60% by weight, there is a problem of patterning failure due to lack of development. There may be.
- the photoacid generator is triphenylsulfonium triflate, triphenylsulfoniumantimonate, diphenyliodoniumtriflate, diphenyliodoniumantimonate, methoxydiphenyliodonium Triflate (Methoxydiphenyliodoniumtriflate), Di-t-butyldiphenyliodoniumtriflate (Di-t-buthyldiphenyliodoniumtriflate), Norbornenedicarboxyimidetriflate (Triphenylsulfoniumnonaflate), Diphenyliodonium Nonaflate, Methoxydiphenyliodoniumnonaflate, Di-t-butyldiphenyliodonium nonaflate, N-hydroxysuccinimidenonaflate , Norbornenedicarboxyimidenonaflate, Triphenylsulfoniumperfluorooctanesulfonate
- the photoacid generator preferably contains 0.05 to 10% by weight of the photoacid generator based on the total weight of the composition. If the amount of the photoacid generator is less than 0.05% by weight, the pattern slope becomes severe due to insufficient acid, and if the amount exceeds 10% by weight, the photoacid generator absorbs the light from the exposure light source and reduces the transmittance. By reducing it, pattern defect problems such as not being able to define may occur.
- the acid diffusion inhibitor is dimethylamine, diethylamine, trimethylamine, triethylamine, tributhylamine, dimethanolamine, diethanolamine ), trimethanolamine, triethanolamine, and tributanolamine.
- the acid diffusion inhibitor preferably contains 0.01 to 5% by weight of the acid diffusion inhibitor based on the total weight of the composition. If the acid diffusion inhibitor is used in an amount of less than 0.01% by weight, problems such as poor patterns (LWR, LER) on the wall or corner of the pattern may occur due to excessive acid generation, and if the content exceeds 5% by weight In the case of doing so, there is a problem that may occur when pattern formation becomes impossible.
- LWR poor patterns
- the thickness of the chemically amplified positive photoresist composition for pattern profile and resolution improvement including the acid generating auxiliary monomer additive under the pattern of the present invention is 2,000 ⁇ to 200,000 ⁇ depending on the type and amount of solvent used. This is possible, and can be used after melting at 10 to 90% by weight relative to the weight of the solvent.
- the solvent examples include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolveacetate, ethyl cellosolveacetate, diethylene glycol monomethyl ether, Diethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol methyl ether acetate, propylene glycol propyl ether acetate, diethylene glycol dimethyl ether, ethyl lactate ( Ethyllactate), Toluene, Xylene, Methylethylketone, Cyclohexanone, 2-heptanone, 3-heptanone, 4- Heptanone (4-heptanone) can be used, and it can be used alone or in combination.
- the chemically amplified positive photoresist composition for improving the pattern profile and resolution including the acid generating auxiliary monomer additive under the pattern of the present invention provided from the present invention is in the group represented by Formulas 1 to 3
- a vertical profile can be obtained according to the exposure energy by adding one or more selected acid generating auxiliary monomers under the pattern, and resolution improvement and residual scum removal under the pattern are also effective, compared to the existing KrF PR process margin can be provided.
- Phenol polymer resin having a weight average molecular weight of 15,000 as a base resin (in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, j are 7, 2, and 1, respectively) 100 g, weight average molecular weight Used in the composition of 1.00 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor.
- auxiliary monomer additive a structure in which R1 is formula d in Formula 1
- triphenylsulfonium nonaplate as a photoacid generator
- triethanolamine as an acid diffusion inhibitor.
- a positive type photoresist composition for a KrF excimer laser was prepared using a mixture of 105 g of propylene glycol monomethyl ether and 105 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process PEB was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- Phenol polymer resin having a weight average molecular weight of 15,000 as a base resin (in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, j are 7, 2, and 1, respectively) 100 g, weight average molecular weight Used in the composition of 10.00 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor.
- auxiliary monomer additive a structure in which R1 is formula d in Formula 1
- triphenylsulfonium nonaplate as a photoacid generator
- triethanolamine as an acid diffusion inhibitor.
- a positive photoresist composition for a KrF excimer laser was prepared using a mixture of 114 g of propylene glycol monomethyl ether and 114 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- Phenol polymer resin having a weight average molecular weight of 15,000 as a base resin (in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, j are 7, 2, and 1, respectively) 100 g, weight average molecular weight Used in the composition of 15.00 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor.
- auxiliary monomer additive a structure in which R1 is formula d in Formula 1
- triphenylsulfonium nonaplate as a photoacid generator
- triethanolamine as an acid diffusion inhibitor.
- a positive type photoresist composition for a KrF excimer laser was prepared using a mixture of 119 g of propylene glycol monomethyl ether and 119 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process PEB was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- Example 2 The experiment was conducted in the same manner as in Example 1, except that the acid generating auxiliary monomer additive under the pattern was not added and a mixture of 104 g of propylene glycol monomethyl ether and 104 g of propylene glycol methyl ether acetate was used as the solvent.
- 100 g of a phenolic polymer resin having a weight average molecular weight of 15,000 as a base resin (in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, and j are 7, 2, and 1 respectively) 100 g, Composition of 0 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor.
- a phenolic polymer resin having a weight average molecular weight of 15,000 as a base resin in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, and j are 7, 2, and 1 respectively
- Composition of 0 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4
- a positive photoresist composition for a KrF excimer laser was prepared using a mixture of 104 g of propylene glycol monomethyl ether and 104 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process PEB was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- a phenolic polymer resin having a weight average molecular weight of 15,000 as a base resin in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, and j are 7, 2, and 1 respectively
- 100 g, 0.25 g of an acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor
- a positive photoresist composition for a KrF excimer laser was prepared using a mixture of 104 g of propylene glycol monomethyl ether and 104 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process PEB was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- a phenolic polymer resin having a weight average molecular weight of 15,000 as a base resin in Formula 7, R8 is Formula a, R9 is Formula c, and the copolymerization molar ratios h, i, and j are 7, 2, and 1 respectively
- 100 g, 30.00 g of acid generating auxiliary monomer additive (a structure in which R1 is formula d in Formula 1), 4 g of triphenylsulfonium nonaplate as a photoacid generator, and 0.6 g of triethanolamine as an acid diffusion inhibitor
- a positive photoresist composition for a KrF excimer laser was prepared using a mixture of 133 g of propylene glycol monomethyl ether and 133 g of propylene glycol methyl ether acetate as a solvent.
- the prepared composition was coated on a silicon wafer using a spin coater, soft baked at 140° C. for 90 seconds, and a target thickness of 10 ⁇ m was confirmed.
- a baking process PEB
- PEB was performed at 110° C. for 80 seconds, and then a development process was performed with 2.38% tetramethylammonium hydroxide to form a pattern.
- a positive slope pattern with a sensitivity of 83mJ/cm 2 and a pattern slope inclination angle of 87.3 degrees with a line/space reference resolution of 1.8 ⁇ m was confirmed, and no residual scum was identified at the bottom of the pattern.
- the resolution and Rseidue scum under the pattern were measured using a critical dimension-scanning microscope (CD-SEM) that can observe the line width (Critical Dimension) of the pattern, and based on L/S (Line, Space), the minimum line width ( resolution) was observed and confirmed.
- the sensitivity was measured as the energy (Energy) that can confirm the minimum line width (resolution).
- Comparative Example 2 has an improvement in resolution and vertical pattern slope compared to Comparative Example 1, but is extremely insignificant compared to Examples 1 to 3 and cannot be adopted.
- Comparative Example 3 compared to Comparative Example 1, although sensitivity, minimum line width resolution, and vertical pattern slope are improved, it is confirmed that fatal pattern collapse occurs in some areas, so it can be adopted. It is impossible.
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Abstract
Description
감도 (mJ/cm2) | 해상도 (㎛) | Pattern Angle (도) | Residue, Scum | |
실시예 1 | 96 | 2.5 | 82.7 | Free |
실시예 2 | 92 | 2.2 | 84.3 | Free |
실시예 3 | 88 | 2.0 | 86.5 | Free |
비교예 1 | 110 | 3.5 | 74.5 | Scum, Residue |
비교예 2 | 100 | 3.0 | 79.6 | Scum, Residue |
비교예 3 | 83 | 1.8 | 87.3 | Free, Pattern Collapse |
Claims (5)
- 248nm 파장의 광원으로 노광이 가능한 포토레지스트의 조성물은, 하기 화학식 1 내지 화학식 3으로 표시되는 패턴하부 산 발생 보조 모노머(Monomer) 첨가제를 0.1 내지 5 중량%로 포함하는 것을 특징으로 하는 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물.[화학식 1][화학식 2][화학식 3](상기 화학식 1 내지 화학식 3에서 R1 내지 R3은 아래 화학식 A 내지 화학식 E 구조 중에서 선택이 되는 구조이며 R은 결합부위를 표시하는 것이다.)<화학식 A><화학식 B><화학식 C><화학식 D><화학식 E>
- 제1항에 있어서, 상기 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물은, 조성물 총 중량에 대하여, 중합체 수지 5 내지 60 중량%, 화학식 1 내지 화학식 3으로 표시되는 패턴하부 산 발생 보조 모노머(Monomer) 첨가제 0.1 내지 5 중량%, 광산발생제 0.05 내지 10 중량%, 산확산방지제 0.01 내지 5 중량% 및 나머지는 용매로 구성되는 것을 특징으로 하는 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물.
- 제1항에 있어서, 상기 중합체 수지는, 하기 화학식 4 내지 화학식 8로 표시되는 군에서 선택되는 1종 이상인 수산기가 포함된 페놀 중합체 수지인 것을 특징으로 하는 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물.[화학식 4](상기 화학식 4에서, a, b는 공중합체를 이루는 반복 단위의 몰비로 각각 1 내지 10인 것이고, a+b=10인 것이고, R4는 아래 화학식 a 내지 화학식 p 구조 중에서 선택이 되는 하나의 구조이며 R은 결합부위를 표시하는 것이다.)<화학식 a><화학식 b><화학식 c><화학식 d><화학식 e><화학식 f><화학식 g><화학식 h><화학식 i><화학식 j><화학식 k><화학식 l><화학식 m><화학식 n><화학식 o><화학식 p>[화학식 5](상기 화학식 5에서, c, d는 공중합체를 이루는 반복 단위의 몰비로 각각 1 내지 10인 것이고, c+d=10인 것이고, R5는 R4와 동일한 것으로서 상기 화학식 a 내지 화학식 p 구조 중에서 선택이 되는 하나의 구조이며 R은 결합부위를 표시하는 것이다.)[화학식 6](상기 화학식 6에서, e, f, g는 공중합체를 이루는 반복 단위의 몰비로 각각 1 내지 10인 것이고, e+f+g=10인 것이고, R6, R7은 R4와 동일한 것으로서 상기 화학식 a 내지 화학식 p 구조 중에서 선택이 되는 하나의 구조이며 R은 결합부위를 표시하는 것이다.)[화학식 7](상기 화학식 7에서, h, i, j는 공중합체를 이루는 반복 단위의 몰비로 각각 1 내지 10인 것이고, h+i+j=10인 것이고, R8, R9은 R4와 동일한 것으로서 상기 화학식 a 내지 화학식 p 구조 중에서 선택이 되는 하나의 구조이며 R은 결합부위를 표시하는 것이다.)[화학식 8](상기 화학식 8에서, k, l, m, n은 공중합체를 이루는 반복 단위의 몰비로 각각 1 내지 10인 것이고, k+l+m+n=10인 것이고, R10, R11, R12는 R4와 동일한 것으로서 상기 화학식 a 내지 화학식 p 구조 중에서 선택이 되는 하나의 구조이며 R은 결합부위를 표시하는 것이다.)
- 제1항에 있어서, 상기 광산발생제는 트리페닐술포늄트리플레이트(Triphenylsulfoniumtriflate), 트리페닐술포늄안티몬산염(Triphenylsulfoniumantimonate), 디페닐요도늄트리플레이트(Diphenyliodoniumtriflate), 디페닐요도늄안티몬산염(Diphenyliodoniumantimonate), 메톡시디페닐요도늄트리플레이트(Methoxydiphenyliodoniumtriflate), 디-t-부틸디페닐요도늄트리플레이트(Di-t-buthyldiphenyliodoniumtriflate), 2,6-디니트로벤질술포네이트(2,6-dinitrobenzylsulponate), 피로갈롤트리스알킬술포네이트(Pyrogalloltrisalkylsulfonate), 노르보넨디카르복시이미드트리플레이트(Norbornenedicarboxyimidetriflate), 트리페닐술포늄노나플레이트(Triphenylsulfoniumnonaflate), 디페닐요도늄노나플레이트(Diphenyliodoniumnonaflate), 메톡시디페닐요도늄노나플레이트(Methoxydiphenyliodoniumnonaflate), 디-t-부틸디페닐요도늄노나플레이트(Di-t-buthyldiphenyliodoniumnonaflate), N-히드록시숙신이미드노나플레이트(N-hydroxysuccinimidenonaflate), 노르보넨디카르복시이미드노나플레이트(Norbornenedicarboxyimidenonaflate), 트리페닐술포늄퍼플루오르옥탄술포네이트(Triphenylsulfoniumperfluorooctanesulfonate), 디페닐요도눔퍼플루오르옥탄술포네이트(Diphenyliodoniumperfluorooctanesulfonate), 메톡시페닐요도늄퍼플루오르옥탄술포네이트(Methoxydiphenyliodoniumperfluorooctanesulfonate), 디-t-부틸디페닐요도늄퍼플루오르옥탄술포네이트(Methoxydiphenyliodoniumperfluorooctanesulfonate), N-히드록시숙신이미드퍼플루오르옥탄술포네이트(N-hydroxysuccinimideperfluorooctanesulfonate) 및 노르보넨디카르복시이미드퍼플루오르옥탄술포네이트(Norbornenedicarboxyimideperfluorooctanesulfonate)으로 이루어진 군으로부터 선택되는 1종 이상인 것을 포함하는 것을 특징으로 하는 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물.
- 제1항에 있어서, 상기 산확산방지제는 디메틸아민(Dimethylamine), 디에틸아민(Diethylamine), 트리메틸아민(Trimethylamine), 트리에틸아민(Triethylamine), 트리부틸아민(Tributhylamine), 디메탄올아민(Dimethanolamine), 디에탄올아민(Diethanolamine), 트리메탄올아민(Trimethanolamine), 트리에탄올아민(Triethanolamine) 및 트리부탄올아민(Tributhanolamine)으로 이루어진 군으로부터 선택되는 1종 이상인 것을 포함하는 것을 특징으로 하는 패턴 프로파일 및 해상도 개선용 화학증폭형 포지티브 포토레지스트 조성물.
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