WO2023010893A1 - 支撑条及张网方法 - Google Patents

支撑条及张网方法 Download PDF

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Publication number
WO2023010893A1
WO2023010893A1 PCT/CN2022/088129 CN2022088129W WO2023010893A1 WO 2023010893 A1 WO2023010893 A1 WO 2023010893A1 CN 2022088129 W CN2022088129 W CN 2022088129W WO 2023010893 A1 WO2023010893 A1 WO 2023010893A1
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WO
WIPO (PCT)
Prior art keywords
support
support bar
length direction
cut
offset compensation
Prior art date
Application number
PCT/CN2022/088129
Other languages
English (en)
French (fr)
Inventor
赵丁凡
刘明星
赵晶晶
付佳
Original Assignee
昆山国显光电有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昆山国显光电有限公司 filed Critical 昆山国显光电有限公司
Priority to KR1020237024955A priority Critical patent/KR20230117459A/ko
Priority to JP2023544161A priority patent/JP2024505640A/ja
Publication of WO2023010893A1 publication Critical patent/WO2023010893A1/zh
Priority to US18/358,445 priority patent/US20230366076A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D43/00—Feeding, positioning or storing devices combined with, or arranged in, or specially adapted for use in connection with, apparatus for working or processing sheet metal, metal tubes or metal profiles; Associations therewith of cutting devices
    • B21D43/02—Advancing work in relation to the stroke of the die or tool
    • B21D43/04—Advancing work in relation to the stroke of the die or tool by means in mechanical engagement with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D43/00—Feeding, positioning or storing devices combined with, or arranged in, or specially adapted for use in connection with, apparatus for working or processing sheet metal, metal tubes or metal profiles; Associations therewith of cutting devices
    • B21D43/28—Associations of cutting devices therewith
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K33/00—Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby
    • B23K33/004—Filling of continuous seams
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D25/00—Working sheet metal of limited length by stretching, e.g. for straightening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
    • Y02A40/80—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in fisheries management
    • Y02A40/81—Aquaculture, e.g. of fish

Definitions

  • the present application relates to the technical field of evaporation equipment, in particular to a support bar and a method for stretching a net.
  • evaporation is a commonly used process method. During the evaporation process, the evaporation material is generally evaporated onto the substrate to be evaporated through the mask plate.
  • a special support bar is used to shield a part of the area to be evaporated on the substrate to be evaporated and at the same time support the mask bar.
  • the above-mentioned special support bars are prone to non-stretch deviation during the stretching process, which causes problems such as abnormal evaporation and low evaporation precision in the functional integration area, which affects the overall display effect of the display panel.
  • the purpose of the present application is to provide a support bar and a net stretching method, at least to solve the problem that the support bar used for evaporation is prone to non-stretch deviation during the net stretching process.
  • the first aspect of the embodiment of the present application provides a support bar.
  • the support bar includes a support section and a pre-cut section. In the length direction of the support bar, both ends of the support section are respectively connected to a pre-cut section; the support section includes a support body and a pre-cut section.
  • the support body extends lengthwise, the cover portion is located on a first side of the support body, and in a width direction perpendicular to the length direction, a second side of the support body is opposite to the first side;
  • the pre-cut section includes offset compensation The first side of the offset compensation part extends along the length direction, and the second side of the offset compensation part is inclined from the second side to the first side, so that at least part of the width of the offset compensation part extends from the supporting body to the free end decrease.
  • the support bar for the mask plate provided by the first aspect of the embodiment of the present application is provided with an offset compensation part on the pre-cut section of the support bar, so that the non-stretching direction offset value is reduced, and the stretching of the support bar is further improved.
  • Accuracy to ensure the alignment accuracy between the cover part and the preset functional integration area on the substrate to be evaporated, improve the evaporation accuracy, avoid deposition of evaporation materials in the functional integration area, and improve the overall display effect of the display panel.
  • the second aspect of the embodiment of the present application provides a netting method for performing netting processing on the support bar of the first aspect of the present application, including:
  • the support bar after welding the stretched net is on the mask frame
  • the stretching method provided in the second aspect of the embodiment of the present application reduces the non-stretching deviation of the support strips after stretching, improves the stretching accuracy of the support strips on the mask plate after stretching, and further improves the coverage of the covering part.
  • the shading accuracy of the function integration area improves the display effect of the display panel.
  • Fig. 1 is a schematic diagram of a general support bar comprising a covering part in a netting state
  • Fig. 2 is a schematic structural diagram of a support bar in an embodiment of the first aspect of the present application
  • Fig. 3 is a structural schematic diagram of a support bar in another embodiment of the first aspect of the present application.
  • Fig. 4 is a structural schematic diagram of a support bar in another embodiment of the first aspect of the present application.
  • Fig. 5 is a structural schematic diagram of a support bar in yet another embodiment of the first aspect of the present application.
  • Fig. 6 is a structural schematic diagram of a support bar in yet another embodiment of the first aspect of the present application.
  • Fig. 7 is a schematic diagram of the supporting bar in an embodiment of the first aspect of the present application in a state of stretching
  • Fig. 8 is a structural schematic diagram of a support bar in yet another embodiment of the first aspect of the present application.
  • Fig. 9 is a structural schematic diagram of a support bar in yet another embodiment of the first aspect of the present application.
  • Fig. 10 is a schematic structural diagram of a support bar in yet another embodiment of the first aspect of the present application.
  • Figure 10a is an enlarged schematic view of part A in Figure 10;
  • Figure 10b is an enlarged schematic view of part B in Figure 10;
  • Fig. 11 is a schematic diagram of the support bar in an embodiment of the first aspect of the present application in a state of stretching
  • Fig. 12 is a flow chart of a netting method in the second aspect of the present application.
  • evaporation is a commonly used process in the process of manufacturing OLED display panels.
  • the evaporation material is generally evaporated onto the substrate to be evaporated through the mask plate.
  • a special support bar is used to shield a part of the area to be evaporated on the substrate to be evaporated and at the same time support the mask bar.
  • One side of a general special support bar is provided with a covering part.
  • the covering part is used for shielding the evaporation material, so that no evaporation material is deposited in the predetermined functional integration area on the substrate to be evaporated, so that the function integration area of the display panel does not perform luminous display after the preparation is completed.
  • the functional integration area is generally integrated with cameras, face recognition sensors and other functional modules, and the functional integration area cannot deposit evaporation materials.
  • the support bar provided with the covering part When preparing the mask plate, it is necessary to stretch the support bar provided with the covering part along its own length direction, so that the support bar is stretched and then welded to the mask frame.
  • the covering part is generally arranged on one side of the supporting bar in a concentrated manner, the side and the other side of the supporting bar on which the covering part is set under the tension of the netting (the other side is in the same position as the side where the covering part is set)
  • the width direction of the support bar is opposite) all shrink and deform inwardly.
  • shrinking and deforming since the covering part on the side where the covering part is provided shrinks under the tension of the netting, a superimposed shrinkage effect occurs on the side where the covering part is provided on the support bar.
  • the pressing effect of the side on which the covering part is set on the other side is greater than that of the other side on the side where the covering part is set, and finally the whole supporting bar A convex deformation towards the other side is produced, resulting in a non-stretch bias.
  • the inventors also found that, generally, when the non-stretching direction of the support bar deviates, the value of the non-stretching direction deviation at the middle part of the support bar is greater than that at both sides of the support bar.
  • the non-stretching direction offset value h is defined as the distance from any part of the support bar to the straight line where the stretching direction is located in the width direction perpendicular to the stretching direction (the length direction of the support bar).
  • the first aspect of the embodiment of the present application provides a support strip 1 for a mask plate.
  • the support strip 1 includes a support section 11 and a pre-cut section 12. In the length direction X of the support strip 1, the support Both ends of the segment 11 are respectively connected with a pre-cut segment 12;
  • the support section 11 includes a support body 111 and at least one cover portion 112, the support body 111 extends along the length direction X of the support bar 1, and at least one cover portion 112 is located on the first side 111a of the support body 111, in the longitudinal direction of the support bar 1 In the width direction Y perpendicular to X, the second side 111b of the supporting body 111 is opposite to the first side 111a of the supporting body 111 .
  • the pre-cut section 12 includes an offset compensating portion 121 , and a first side 122 of the offset compensating portion 121 extends along the length direction X.
  • the second side 123 of the offset compensation part 121 is inclined from the second side 111b of the support body 111 to the first side 111a of the support body 111, so that at least part of the width of the offset compensation part 121 decreases gradually from the support body 111 to the free end .
  • the free end of the pre-cut segment 12 is the end of the pre-cut segment 12 away from the support segment 11 .
  • an offset compensation part 121 is provided on the pre-cut section 12 of the support bar 1 .
  • the net stretching mechanism clamps the offset compensation part 121 of the support bar 1, and stretches the support bar 1 along the length direction X of the support bar 1. Since the width of at least part of the offset compensating portion 121 decreases from the support body 111 to the free end, and decreases toward the first side 111a of the support body 111 , the clamping centerline of the clamping mechanism deviates toward the first side 111a.
  • the offset of the clamping center line makes the stretching tension effect also shift towards the first side 111a, which reduces the impact of the covering part 112 on the first side 111a of the support body 111 towards the second side 111b of the support body 111 during the stretching process.
  • the extrusion effect reduces the non-stretching deflection value of the support bar 1 towards the second side 111b of the support body 111 .
  • the offset value in the non-stretching direction is reduced, which further improves the stretching accuracy of the support bar 1, ensures the alignment accuracy between the covering part 112 and the preset functional integration area on the substrate to be evaporated, improves the evaporation accuracy, and avoids deposition and evaporation of the functional integration area.
  • the support main body 111 and the pre-cut section 12 of the support section 11 in the support strip 1 are full-thickness structures, that is, no thinning treatment such as etching is performed, so as to facilitate the support function of the support main body 111 and the realization of pre-cutting.
  • Section 12 maintains clamping stability during the stretching process.
  • the covering part 112 is half-etched to reduce the overall weight load of the first side 111a of the supporting body 111 while ensuring the covering effect of the covering part 112 on the preset functional integration area, further avoiding the occurrence of non-stretch orientation. offset.
  • the supporting body 111 of the supporting section 11 is further provided with a shielding strip matching portion 113 .
  • a shading strip matching portion 113 is arranged between two adjacent covering portions 112, and the shading strip matching portion 113 is a half-etched structure, so as to facilitate the overlapping of the supporting strip 1 and the shading strip matching portion in the process of forming the mask plate. The cooperation between 113.
  • the number of the covering parts 112 is greater than two, the number of the matching parts 113 for the shielding strip can be multiple, and the matching parts 113 for the shielding strip are arranged at intervals.
  • the shielding strip matching portion 113 extends in the width direction Y, and the width of the shielding strip fitting portion 113 is greater than the width of the supporting body 111 , and the connection between the shielding strip fitting portion 113 and the supporting body 111 is rounded.
  • the second side 123 is a straight side and the entire second side 123 is a straight side on the same horizontal line, and the second side 123 has no bending point. 2 and 3, in some examples, the second side 123 is inclined from the second side 111b of the supporting body 11 to the first side 111a, and the second side 123 starts from the second side 111b of the supporting body 111. extending to the free end of the offset compensating portion 121 .
  • the second side 123 is a straight side and the second side 123 is a multi-segment bent straight side composed of at least two straight segments.
  • the second side 123 includes a first straight segment 123a and a second straight segment 123b.
  • the first straight section 123a extends obliquely from the second side 111b of the supporting body 11 to the first side 111a, and the first straight section 123a extends to the middle of the offset compensating portion 121 to adjoin the second straight section 123b.
  • the second straight section 123b extends to the free end of the offset compensating portion 121 and the second straight section 123b is relatively parallel to the first side 122 .
  • the second side 123 is an arc-shaped side.
  • the maximum width L1 of the offset compensation part 121 and the minimum width L2 of the offset compensation part 121 satisfy the following relational expression 1:
  • the maximum width of the offset compensating portion 121 is the width of the supporting body 111 .
  • the maximum non-stretching deflection value of the support bar 1 with the covering part 112 is approximately between 330 ⁇ m and 340 ⁇ m.
  • the inventor found that when the maximum width L1 of the offset compensation part 121 and the minimum width L2 of the offset compensation part 121 satisfy the above relational expression 1, the non-stretching direction of the support bar 1 in the process of stretching the support bar 1 is biased. The shift value decreased obviously, and the maximum non-stretching shift value dropped to between 60 ⁇ m and 100 ⁇ m.
  • the maximum width L1 of the offset compensation part 121 and the minimum width L2 of the offset compensation part 121 satisfy the following relational expression 2:
  • the support segment 11 in the length direction X, is adjacent to the pre-cut segment 12, and there is a pre-cut line q between the support segment 11 and the pre-cut segment 12, and the support is divided by the pre-cut line q Segment 11 and pre-cut segment 12.
  • the support segment 11 and the pre-cut segment 12 are integrally formed from the same material. In the process of preparing the precision mask plate, after the support bar is netted, the support section 11 is welded on the mask plate frame, and then the pre-cut section 12 is cut and removed along the pre-cut line q.
  • a plurality of covering parts 112 are distributed at intervals along the length direction X on the first side 111a of the supporting body 111, and the supporting body 111 further includes a welding groove 114, and the welding groove 114 is located at the covering part 112 closest to the pre-cut section 12 Between and pre-cutting line q.
  • the welding groove 114 is aligned with the mask frame, and the support segment 11 is fixedly connected to the mask frame by welding the welding groove 114 to the mask frame.
  • the support bar 1 includes the pre-cutting line q and the welding groove 114 , which are not fully shown in the drawings corresponding to the following embodiments for brief illustration.
  • the pre-cut segment 12 further includes a buffer portion 125, the buffer portion 125 is located between the support segment 11 and the offset compensation portion 121, and the buffer portion 125 also includes a transition side 124
  • the transition side 124 extends linearly from the second side 111 b of the supporting body 111 to the second side 123 , and the extension direction of the first side 122 and the extension direction of the transition side 124 are parallel to each other.
  • the buffer portion 125 protects the supporting section 11 from being disturbed during the process of stretching the mesh and subsequent welding and cutting to remove the pre-cut section 12 , so as to improve the quality of the mask plate and improve the evaporation precision.
  • the length of the transition side 124 ranges from 20 mm to 25 mm.
  • the length of the transition side 124 ranges from 24 mm to 25 mm.
  • Fig. 8 is a state diagram of the support bar 1 with the offset compensating part 121 during the stretching process in an example. As shown in FIG. 8 , the inventors further found that the maximum non-stretching offset value of the support bar 1 with the offset compensating portion 121 is significantly reduced during the stretching process. However, the support section 11 of the support bar 1 forms three sections A, B and C in Fig. 8, the sections A and C are close to the pre-cut section 12, and the non-stretching offset values of the sections A and C are between 60 ⁇ m and 80 ⁇ m Between them, the non-stretching direction deviates to a greater degree, and tends to deviate toward the first side 111 a of the supporting body 111 .
  • Section B is located in the middle of the support section 11, and the non-stretching offset of section B is less than or equal to 5 ⁇ m.
  • setting the offset compensating part 121 has a good effect on reducing the offset value of the support bar 1 as a whole in the non-stretching direction, especially for the middle part of the support section 11 .
  • a new counterweight design is added to the general support bar 1 .
  • Figure 10a and Figure 10b in order to further reduce the non-stretching offset compensation value of the part of the support section 11 close to the pre-cut section 12, there is an offset compensation part 121 On the basis of the support bar 1, a counterweight portion 126 is set.
  • a weight portion 126 is added to the pre-cut section 12 of the support bar 1 .
  • the counterweight portion 126 is disposed on the same side as the cover portion 112 , and the counterweight portion 126 is protruded from the first side 122 .
  • the shape of the weight portion 126 is the same as that of the cover portion 112 , and the size of the weight portion 126 and the size of the cover portion 112 may be different.
  • the size of the weight portion 126 is greater than the size of the cover portion 112 .
  • the weight portion 126 is a rectangular sheet structure, and the weight portion 126 is a sheet structure extending from the first side 111 a of the supporting body 111 to the second side 111 b away from the supporting body 111 .
  • the connection between the weight portion 126 and the first side 122 is rounded, and the corners of the weight portion 126 are rounded.
  • the counterweight portion 126 is a full-thickness structure and does not use a half-etching process.
  • the full thickness structure of the counterweight part 126 can increase the counterweight of the first side 111a of the pre-cut section 12 (the same side as the first side 111a of the support body 111), and further reduce the weight of the part near the pre-cut section 12 in the support section 11.
  • Non-stretch offset offset value is a rectangular sheet structure, and the weight portion 126 is a sheet structure extending from the first side 111 a of the supporting body 111 to the second side 111 b away from the supporting body 111 .
  • the pre-cut section 12 further includes a buffer portion 125 including a transition side 124 self-supporting from the second side 111b of the main body 111 Extending straight to the second side 123 , the extension direction of the first side 122 and the extension direction of the transition side 124 are parallel to each other.
  • the counterweight portion 126 is disposed corresponding to part of the transition side 124 and part of the second side 123 .
  • the part of the pre-cut segment 12 corresponding to the transition side 124 is located between the support segment 11 and the offset compensation part 121 .
  • the part of the protective support section 11 corresponding to the transition side 124 will not be disturbed during the process of stretching the net and subsequent welding, cutting and removing the pre-cut section 12, which improves the quality of the mask plate and improves the evaporation precision.
  • the size of the weight portion 126 is greater than the size of the cover portion 112 .
  • the weight portion 126 is a rectangular sheet structure, and the weight portion 126 is a sheet structure extending from the first side 111 a of the supporting body 111 to the second side 111 b away from the supporting body 111 .
  • Rounded corners are formed at the connection between the counterweight portion 126 and the first side 122 .
  • the value range of the radius R 1 of the rounded corner is 2.0 mm to 2.5 mm. Further, the radius R 1 of the rounded corners ranges from 2.1mm to 2.2mm.
  • the corners of the counterweight portion 126 are rounded, and the radius R 2 of the corners ranges from 1.0 mm to 1.5 mm.
  • the radius R 2 of the corner ranges from 1.1 mm to 1.2 mm.
  • the weight portion 126 includes straight sides parallel to the width direction Y. Straight edges lie between the aforementioned rounds and corners.
  • the value range of the length L of the straight side is 1.0mm ⁇ 1.2mm. Further, the value range of the length L of the straight side is 1.10mm ⁇ 1.15mm.
  • the shortest distance d 2 between the pre-cutting line q and the weight portion 126 ranges from 4 mm to 5 mm. In these embodiments, the shortest distance between the pre-cut line q and the counterweight portion 126 is also the shortest distance between the support segment 11 and the counterweight portion 126 .
  • the ratio of the shortest distance d 2 between the pre-cut line q and the weight portion 126 to the length of the transition side 124 is 1:6 ⁇ 1:5.
  • the length d 1 of the transition side 124 is the shortest distance from the offset compensating portion 121 to the supporting section 11 .
  • the ratio of the shortest distance d2 between the pre-cutting line q and the counterweight part 126 and the shortest distance from the offset compensation part 121 to the support section 11 is 1:6 to 1:5.
  • the stretch offset compensation value is reduced to the allowable range, it is also ensured that the non-stretch offset compensation value of the support segment 11 close to the pre-cut segment 12 is reduced to the allowable range, and the non-stretch offset compensation value of the support segment 11 middle part
  • the gap between the non-stretching offset compensation value of the part of the support section 11 close to the pre-cut section 12 is narrowed, which improves the accuracy of the netting, thereby ensuring the evaporation accuracy of the functional integration area and improving the display effect of the display panel.
  • a counterweight portion 126 is provided on the basis of the support bar 1 with the offset compensation portion 121 .
  • the second side 123 of the offset compensating portion 121 is a straight side.
  • the maximum width L 1 of the offset compensation portion 121 and the minimum width L 2 of the offset compensation portion 121 satisfy the above relational expression 2.
  • the support segment 11 is adjacent to the pre-cut segment 12 , and there is a pre-cut line q between the support segment 11 and the pre-cut segment 12 .
  • the pre-cut section 12 also includes a buffer portion 125, the buffer portion 125 includes a transition side 124, the transition side 124 extends straight from the second side 111b of the support body 111 to the second side 123, and the extending direction of the first side 122 is the same as that of the second side 123.
  • the extension directions of the transition sides 124 are parallel to each other.
  • the counterweight portion 126 is disposed corresponding to part of the transition side 124 and part of the second side 123 .
  • the supporting body 111 also includes a welding groove 114, the welding groove 114 is located between the cover portion 112 closest to the pre-cut section 12 and the pre-cut line q, and the welding groove 114 is also located near the shielding strip matching portion 113 of the pre-cut section 12 and between pre-cut lines q.
  • the weight portion 126 is a rectangular sheet structure, and the weight portion 126 is a sheet structure extending from the first side 111 a of the supporting body 111 to the second side 111 b away from the supporting body 111 . Rounded corners are formed at the connection between the counterweight portion 126 and the first side 122 .
  • the value range of the radius R 1 of the rounded corner is 2.1mm-2.2mm.
  • the corners of the counterweight portion 126 are rounded, and the radius R 2 of the corners ranges from 1.1 mm to 1.2 mm.
  • the weight portion 126 includes straight sides parallel to the width direction Y.
  • the value range of the length L of the straight side is 1.10mm-1.15mm.
  • the shortest distance d 2 between the pre-cutting line q and the weight portion 126 ranges from 4 mm to 5 mm.
  • the ratio of the shortest distance d 2 between the pre-cutting line q and the weight portion 126 to the length d 1 of the transition side 124 is 1:6 ⁇ 1:5. .
  • the stretching experiment was carried out on the above-mentioned embodiment, and the non-stretching deviation value in the middle part (B section) of the supporting section 11 was obtained to be less than or equal to 4 ⁇ m, and the two sections close to the pre-cut section 12 in the supporting section 11
  • the non-stretched direction offset compensation value of (sections A and B) is also less than or equal to 4 ⁇ m.
  • the covering part 112 shields the precision of the preset functional integration area, thereby improving the evaporation precision near the preset functional integration area of the substrate to be evaporated, and optimizing the display effect of the display panel.
  • the second aspect of the embodiment of the present application provides a netting method for performing netting processing on the support bars in the first aspect of the embodiment of the present application, including:
  • the clamping component clamps at least part of the offset compensating portion, so that the clamping center line is offset toward the first side of the support segment.
  • the stretching mechanism stretches the two offset compensation parts opposite to each other in the length direction of the support bar along the length direction of the support bar, so that the support bar is stretched in the length direction of the support bar to form a stretched support bar .
  • the stretching method provided in the second aspect of the embodiment of the present application reduces the non-stretching deviation of the support strips after stretching, improves the stretching accuracy of the support strips on the mask plate after stretching, and further improves the coverage of the covering part.
  • the shading accuracy of the function integration area improves the display effect of the display panel.

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Abstract

本申请实施例提供一种支撑条及张网方法。本申请实施例第一方面提供一种支撑条，支撑条包括支撑段和预切割段，预切割段在支撑条的长度方向上与支撑段的两端连接；支撑段包括支撑主体和遮盖部，支撑主体沿长度方向延伸，遮盖部位于支撑主体的第一侧，在与长度方向相垂直的宽度方向上，支撑主体的第二侧与第一侧相对；预切割段包括偏移补偿部，偏移补偿部的第一侧边自第一侧向预切割段的自由端直线延伸，偏移补偿部的第二侧边自第二侧向第一侧倾斜，以使至少部分偏移补偿部的宽度自支撑主体向自由端递减。

Description

支撑条及张网方法
相关申请的交叉引用
本申请要求享有于2021年08月06日提交的名称为“支撑条及张网方法”的中国专利申请202110903244.0的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请涉及蒸镀设备技术领域，具体涉及一种支撑条及张网方法。
背景技术
在有机发光二极管(Organic Light-Emitting Diode；OLED)显示面板制备过程中，蒸镀为常用的工艺方法。在蒸镀过程中一般使得蒸镀材料通过掩膜板蒸镀到待蒸镀基板上。在制备具有功能集成区的显示面板时，采用特制的支撑条对待蒸镀基板的部分待蒸镀区域进行遮挡的同时对掩膜条进行支撑。上述特制的支撑条在张网过程中容易产生非拉伸向偏位，使得功能集成区存在蒸镀异常，蒸镀精度低等问题，影响显示面板的整体显示效果。
发明内容
本申请旨在提供一种支撑条及张网方法，至少解决蒸镀使用的支撑条在张网过程中容易产生非拉伸向偏位的问题。
本申请实施例第一方面提供一种支撑条，支撑条包括支撑段和预切割段，在支撑条的长度方向上，支撑段的两端分别与一个预切割段连接；支撑段包括支撑主体和遮盖部，支撑主体沿长度方向延伸，遮盖部位于支撑主体的第一侧，在与长度方向相垂直的宽度方向上，支撑主体的第二侧与第一侧相对；预切割段包括偏移补偿部，偏移补偿部的第一侧边沿长度方向延伸，偏移补偿部的第二侧边自第二侧向第一侧倾斜，以使至少部分偏 移补偿部的宽度自支撑主体向自由端递减。
本申请实施例第一方面提供的用于掩膜板的支撑条，在支撑条的预切割段设置有偏移补偿部，使得非拉伸向偏移值降低，进一步提高了支撑条的张网精度，确保遮盖部与待蒸镀基板上预设功能集成区对位精度，提高蒸镀精度，避免功能集成区沉积蒸镀材料，提升显示面板整体显示效果。
本申请实施例第二方面提供一种张网方法，用于对本申请第一方面的支撑条进行张网处理，包括：
对长度方向上相对的两个偏移补偿部沿长度方向进行拉伸处理，以获得张网后的支撑条；
焊接张网后的支撑条在掩膜板框架上；
将预切割段去除。
本申请实施例第二方面提供的张网方法，使得张网后的支撑条非拉伸向偏移减少，提升张网后掩膜板上支撑条的张网精度，进而提升遮盖部对预设功能集成区的遮挡精度，提高显示面板的显示效果。
附图说明
图1是一般的包含遮盖部的支撑条处于张网状态示意图；
图2是本申请第一方面一实施例中的支撑条结构示意图；
图3是本申请第一方面另一实施例中的支撑条结构示意图；
图4是本申请第一方面还一实施例中的支撑条结构示意图；
图5是本申请第一方面又一实施例中的支撑条结构示意图；
图6是本申请第一方面再一实施例中的支撑条结构示意图；
图7是本申请第一方面一实施例中的支撑条处于张网状态示意图；
图8是本申请第一方面再一实施例中的支撑条结构示意图；
图9是本申请第一方面再一实施例中的支撑条结构示意图；
图10是本申请第一方面再一实施例中的支撑条结构示意图；
图10a是图10中局部A的放大示意图；
图10b是图10中局部B的放大示意图；
图11是本申请第一方面一实施例中的支撑条处于张网状态示意图；
图12是本申请第二方面中一种张网方法的流程图。
具体实施方式
下面将详细描述本申请的各个方面的特征和示例性实施例，为了使本申请的目的、技术方案及优点更加清楚明白，以下结合附图及具体实施例，对本申请进行进一步详细描述。应理解，此处所描述的具体实施例仅被配置为解释本申请，并不被配置为限定本申请。对于本领域技术人员来说，本申请可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本申请的示例来提供对本申请更好的理解。
需要说明的是，在本申请中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
发明人在长期深入研究发现，在OLED显示面板制备过程中，蒸镀为常用的工艺方法。在蒸镀过程中一般使得蒸镀材料通过掩膜板蒸镀到待蒸镀基板上。在制备具有功能集成区的显示面板时，采用特制的支撑条对待蒸镀基板的部分待蒸镀区域进行遮挡的同时对掩膜条进行支撑。一般的特制的支撑条的一侧设置有遮盖部。遮盖部用于遮挡蒸镀材料，使得待蒸镀基板上的预设功能集成区中不沉积有蒸镀材料，从而使得制备完成后显示面板的功能集成区不进行发光显示。功能集成区一般集成有摄像头，人脸识别传感器以及其他功能模组，该功能集成区不能沉积蒸镀材料。
在制备掩膜板时，需要对设置有遮盖部的支撑条沿其自身长度方向拉伸，以对支撑条进行张网处理后再焊接到掩膜框架上。往往在张网过程中，由于遮盖部一般集中设置在支撑条的一侧，张网拉力作用下支撑条设置遮 盖部的一侧与另一侧(该另一侧与设置遮盖部的一侧在支撑条的宽度方向上相对)均向内收缩变形。在收缩变形时，由于设置遮盖部的一侧中遮盖部在张网拉力作用下收缩，在支撑条设置遮盖部的一侧产生了叠加的收缩效应。
如图1所示，因此，支撑条张网过程中设置遮盖部的一侧对另一侧的挤压作用大于该另一侧对设置遮盖部的一侧的挤压作用，最终使得整个支撑条产生出朝向另一侧的凸起变形，形成非拉伸向偏位。发明人还发现，一般支撑条发生非拉伸向偏位时，位于支撑条中间部分的非拉伸向偏移值大于支撑条两侧的非拉伸向偏移值。本申请实施例中，非拉伸向偏移值h的定义为，在垂直于拉伸方向(支撑条的长度方向)的宽度方向上，支撑条中任一部分到拉伸方向所在直线的距离。
鉴于对上述问题的发现与分析，提出本申请。
如图2所示，本申请实施例第一方面提供一种用于掩膜板的支撑条1，支撑条1包括支撑段11和预切割段12，在支撑条1的长度方向X上，支撑段11的两端分别与一个预切割段12连接；
支撑段11包括支撑主体111和至少一个遮盖部112，支撑主体111沿支撑条1的长度方向X延伸，至少一个遮盖部112位于支撑主体111的第一侧111a，在与支撑条1的长度方向X相垂直的宽度方向Y上，支撑主体111的第二侧111b与支撑主体111的第一侧111a相对。
预切割段12包括偏移补偿部121，偏移补偿部121的第一侧边122沿长度方向X延伸。偏移补偿部121的第二侧边123自支撑主体111的第二侧111b向支撑主体111的第一侧111a倾斜，以使至少部分偏移补偿部121的宽度自支撑主体111向自由端递减。在支撑条1的长度方向X上，预切割段12的自由端为预切割段12远离支撑段11的一端。
在一些实施例中，遮盖部112的数量为多个，多个遮盖部112在支撑主体111的第一侧111a沿支撑条1的长度方向X间隔分布。
本申请实施例第一方面提供的用于掩膜板的支撑条1，在支撑条1的预切割段12设置有偏移补偿部121。在对支撑条1张网过程中，张网机构夹持支撑条1偏移补偿部121，并沿支撑条1的长度方向X对支撑条1进 行张网拉伸处理。由于至少部分偏移补偿部121的宽度自支撑主体111向自由端递减，且朝向支撑主体111的第一侧111a递减，使得夹持机构的夹持中心线朝向第一侧111a偏移。夹持中心线的偏移使得张网拉力作用也朝向第一侧111a偏移，减少了张网过程中位于支撑主体111第一侧111a的遮盖部112对朝向支撑主体111的第二侧111b的挤压作用，从而使得支撑条1朝向支撑主体111的第二侧111b的非拉伸向偏移值降低。非拉伸向偏移值降低，进一步提高了支撑条1的张网精度，确保遮盖部112与待蒸镀基板上预设功能集成区对位精度，提高蒸镀精度，避免功能集成区沉积蒸镀材料，提升显示面板整体显示效果。
在一些实施例中，支撑条1中支撑段11的支撑主体111以及预切割段12为全厚结构，即不再进行刻蚀等减薄处理，以利于支撑主体111实现支撑作用以及实现预切割段12在张网过程中保持夹持稳固性。而遮盖部112采用半刻蚀处理，以在保证遮盖部112对预设功能集成区的遮盖作用的同时，减轻支撑主体111的第一侧111a的整体重量负荷，进一步地避免出现非拉伸向偏移。
如图3所示，在一些实施例中，支撑段11的支撑主体111上还设有遮挡条配合部113。两个相邻的遮盖部112之间设置有遮挡条配合部113，遮挡条配合部113为半刻蚀结构，以利于形成掩膜板过程中相互交叠设置的支撑条1和遮挡条配合部113之间的配合。在遮盖部112的数量大于两个的情况下，遮挡条配合部113的数量可以为多个，多个遮挡条配合部113间隔设置。在宽度方向Y上，遮挡条配合部113在宽度方向Y上延伸，且遮挡条配合部113的宽度大于支撑主体111的宽度，遮挡条配合部113与支撑主体111的连接处倒圆角。
在一些可选的实施例中，第二侧边123为直线型侧边且第二侧边123全段为处于同一水平线的直线型侧边，第二侧边123无弯折点。还请参照图2及图3，在一些示例中，第二侧边123自支撑主体11的第二侧111b向第一侧111a倾斜，第二侧边123自支撑主体111的第二侧111b开始延伸至偏移补偿部121的自由端。
如图4所示，在一些示例中，第二侧边123为直线型侧边且第二侧边 123由至少两段直线段组成的多段弯折直线型侧边。在这些示例中，第二侧边123包括第一直线段123a和第二直线段123b。第一直线段123a自支撑主体11的第二侧111b向第一侧111a倾斜延伸，第一直线段123a延伸至偏移补偿部121的中部与第二直线段123b临接。第二直线段123b延伸至偏移补偿部121的自由端且第二直线段123b与第一侧边122相对平行设置。
如图5所示，在一些实施例中，第二侧边123为弧线型侧边。
如图6所示，在一些可选的实施例中，偏移补偿部121的最大宽度L 1与偏移补偿部121最小宽度L 2满足以下关系式1：
Figure PCTCN2022088129-appb-000001
在一些示例中，偏移补偿部121的最大的宽度为支撑主体111的宽度。在实验过程中，一般的带有遮盖部112的支撑条1的最大非拉伸向偏移值约在330μm～340μm之间。发明人发现当偏移补偿部121的最大宽度L 1与偏移补偿部121最小宽度L 2满足以上关系式1时，在对支撑条1张网过程中的支撑条1的非拉伸向偏移值有明显的下降，最大非拉伸向偏移值下降到了60μm～100μm之间。
进一步的，在一些可选的实施例中，偏移补偿部121的最大宽度L 1与偏移补偿部121最小宽度L 2满足以下关系式2：
Figure PCTCN2022088129-appb-000002
在这些实施例中，当偏移补偿部121的最大宽度L 1与偏移补偿部121最小宽度L 2满足以上关系式2时，在对支撑条1张网过程中的支撑条1的非拉伸向偏移值有进一步的明显下降，最大非拉伸向偏移值下降到了60μm～80μm之间。
在一些可选的实施例中，在长度方向X上，支撑段11与预切割段12相邻设置，支撑段11与预切割段12之间具有预切割线q，经由预切割线q划分支撑段11和预切割段12。在一些示例中，支撑段11与预切割段12采用同一材料一体形成。在制备精密掩膜板的过程中，在对支撑条1张网 后，将支撑段11焊接在掩膜板框架上，继而沿预切割线q对预切割段12进行切割去除。
在一些实施例中，多个遮盖部112在支撑主体111的第一侧111a沿长度方向X间隔分布，支撑主体111还包括焊接槽114，焊接槽114位于最靠近预切割段12的遮盖部112与预切割线q之间。在焊接过程中，将焊接槽114与掩膜板框架对位，通过将焊接槽114焊接到掩膜板框架上以实现支撑段11与掩膜板框架的固定连接。
在本申请实施例中，支撑条1包括预切割线q和焊接槽114，为简要示意在以下实施例对应的附图中未完整示出预切割线q和焊接槽114。
如图7所示，在一些可选的实施例中，预切割段12还包括缓冲部125，缓冲部125位于支撑段11与偏移补偿部121之间，缓冲部125还包括过渡侧边124，过渡侧边124自支撑主体111的第二侧111b向第二侧边123直线延伸，第一侧边122的延伸方向与过渡侧边124的延伸方向相互平行。
在这些实施例中，缓冲部125保护支撑段11在张网及后续焊接、切割去除预切割段12的过程不受干扰，提高制成掩膜板的质量，以提升蒸镀精度。
在一些实施例中，在长度方向X上，过渡侧边124的长度的取值范围是20mm～25mm。
在一些实施例中，在长度方向X上，过渡侧边124的长度的取值范围是24mm～25mm。
图8为一示例中具有偏移补偿部121的支撑条1在张网过程中的形态图。如图8所示，发明人进一步发现具有偏移补偿部121的支撑条1在张网过程中最大非拉伸向偏移值有明显的降低。但是，支撑条1的支撑段11形成了图8中A、B及C三段，A段和C段靠近预切割段12，A段和C段的非拉伸向偏移值在60μm～80μm之间，非拉伸向偏移程度较大，且有朝向支撑主体111的第一侧111a偏移的趋势。B段位于支撑段11的中部，B段的非拉伸向偏移值小于等于5μm。经上述实验分析，设置偏移补偿部121对支撑条1整体的非拉伸向偏移值的降低有较好的效果，对于支撑段11的中部尤其有利。在设置偏移补偿部121的基础上还需要进一步对支撑 条1的结构进行优化，以进一步减小支撑段11中靠近预切割段12的两段(A段和B段)的非拉伸向偏移补偿值。
如图9所示，在一些实施例中，为了进一步减小支撑段11中靠近预切割段12部分的非拉伸向偏移补偿值，在一般的支撑条1中增添新的配重设计。如图10、图10a和图10b所示，在一些实施例中，为了进一减小支撑段11中靠近预切割段12部分的非拉伸向偏移补偿值，在具有偏移补偿部121的支撑条1的基础上再设置配重部126。
在一些实施例中，在支撑条1的预切割段12增设一配重部126。配重部126与遮盖部112同侧设置，且配重部126凸起设置于第一侧边122。在一些实施例中，配重部126的形状与遮盖部112的形状相同，配重部126的尺寸与遮盖部112的尺寸可不同。在一些实施例中，配重部126的尺寸大于遮盖部112的尺寸。配重部126为类矩形片状结构，配重部126为自支撑主体111的第一侧111a向背离支撑主体111的第二侧111b方向延伸的片状结构。配重部126与第一侧边122连接处形成有倒圆角，配重部126的拐角为圆角。在一些实施例中，配重部126为全厚结构，不采用半刻蚀工艺处理。配重部126的全厚结构可以增加预切割段12的第一侧111a(与支撑主体111的第一侧111a同侧)的配重，进一步减小支撑段11中靠近预切割段12部分的非拉伸向偏移补偿值。
在一些实施例中，如图10、图10a和图10b所示，预切割段12还包括缓冲部125，缓冲部125包括过渡侧边124，过渡侧边124自支撑主体111的第二侧111b向第二侧边123直线延伸，第一侧边122的延伸方向与过渡侧边124的延伸方向相互平行。在长度方向X上，配重部126对应部分的过渡侧边124及部分的第二侧边123设置。在长度方向X上，预切割段12中过渡侧边124对应的部分位于支撑段11与偏移补偿部121之间。过渡侧边124对应的部分保护支撑段11在张网及后续焊接、切割去除预切割段12的过程不受干扰，提高制成掩膜板的质量，以提升蒸镀精度。
在一些实施例中，配重部126的尺寸大于遮盖部112的尺寸。配重部126为类矩形片状结构，配重部126自支撑主体111的第一侧111a向背离支撑主体111的第二侧111b方向延伸的片状结构。配重部126与第一侧边 122连接处形成有倒圆角。倒圆角的半径R 1的取值范围在2.0mm～2.5mm。进一步的，倒圆角的半径R 1的取值范围在2.1mm～2.2mm。配重部126的拐角为圆角，该拐角的半径R 2的取值范围在1.0mm～1.5mm。进一步的，该拐角的半径R 2的取值范围在1.1mm～1.2mm。在宽度方向Y上，配重部126包括与宽度方向Y平行的直边。直边位于上述的倒圆角以及拐角之间。直边的长度L的取值范围是1.0mm～1.2mm。进一步的，直边的长度L的取值范围是1.10mm～1.15mm。
在一些可选的实施例中，在长度方向X上，预切割线q与配重部126之间的最短距离d 2的取值范围是4mm～5mm。在这些实施例中，预切割线q与配重部126之间的最短距离也为支撑段11与配重部126之间的最短距离。
在一些实施例中，在长度方向X上，预切割线q与配重部126之间的最短距离d 2和过渡侧边124的长度之比为1:6～1：5。在一些实施例中，过渡侧边124的长度d 1为偏移补偿部121到支撑段11的最短距离。预切割线q与配重部126之间的最短距离d 2和偏移补偿部121到支撑段11的最短距离与之比为1:6～1：5，在保证支撑段11中部的非拉伸偏移补偿值减少到许可范围的同时，也确保支撑段11靠近预切割段12的部分的非拉伸偏移补偿值减少到许可范围，且支撑段11中部的非拉伸偏移补偿值与支撑段11靠近预切割段12的部分的非拉伸偏移补偿值之间的差距缩小，提高了张网精度，进而保证功能集成区蒸镀精度，提高显示面板的显示效果。
在一些实施例中，具有偏移补偿部121的支撑条1的基础上再设置配重部126。偏移补偿部121的第二侧边123为直线型侧边。偏移补偿部121的最大宽度L 1与所述偏移补偿部121最小宽度L 2满足上述关系式2。长度方向X上，支撑段11与预切割段12相邻设置，支撑段11与预切割段12之间具有预切割线q。预切割段12还包括缓冲部125，缓冲部125包括过渡侧边124，过渡侧边124自支撑主体111的第二侧111b向第二侧边123直线延伸，第一侧边122的延伸方向与过渡侧边124的延伸方向相互平行。在长度方向X上，配重部126对应部分的过渡侧边124及部分的第 二侧边123设置。支撑主体111还包括焊接槽114，焊接槽114位于最靠近预切割段12的遮盖部112与预切割线q之间，且该焊接槽114还位于靠近预切割段12的遮挡条配合部113与预切割线q之间。配重部126为类矩形片状结构，配重部126为自支撑主体111的第一侧111a向背离支撑主体111的第二侧111b方向延伸的片状结构。配重部126与第一侧边122连接处形成有倒圆角。倒圆角的半径R 1的取值范围在2.1mm～2.2mm。配重部126的拐角为圆角，该拐角的半径R 2的取值范围在1.1mm～1.2mm。在宽度方向Y上，配重部126包括与宽度方向Y平行的直边。直边的长度L的取值范围是1.10mm～1.15mm。在长度方向X上，预切割线q与配重部126之间的最短距离d 2的取值范围是4mm～5mm。在长度方向X上，预切割线q与配重部126之间的最短距离d 2和过渡侧边124的长度d 1之比为1:6～1:5。。
如图11所示，对上述实施例进行张网实验，得到在支撑段11中部(B段)的非拉伸向偏位值小于或等于4μm，支撑段11中靠近预切割段12的两段(A段和B段)的非拉伸向偏移补偿值也小于或等于4μm。根据实验结果可知，在同时对支撑条1设置偏移补偿部121和配重部126可以大大减小支撑段11整体的非拉伸向偏位程度，保证支撑条1的张网精度的同时提高遮盖部112对预设功能集成区遮挡精度，进而提高待蒸镀基板的预设功能集成区附近的蒸镀精度，优化显示面板的显示效果。
如图12所示，本申请实施例第二方面提供一种张网方法，用于对本申请实施例第一方面中的支撑条进行张网处理，包括：
S10，对长度方向上相对的两个偏移补偿部沿支撑条的长度方向进行拉伸处理，以获得张网后的支撑条；
S20，焊接张网后的支撑条在掩膜板框架上；
S30，将预切割段去除。
在一些可选的实施例中，采用张网机构对支撑条张网时，加持部件夹持至少部分的偏移补偿部，使得夹持中心线朝向支撑段的第一侧偏移。张网机构对支撑条的长度方向上相对的两个偏移补偿部沿支撑条的长度方向进行拉伸处理，使得支撑条在支撑条的长度方向上被拉伸，形成张网后的 支撑条。
本申请实施例第二方面提供的张网方法，使得张网后的支撑条非拉伸向偏移减少，提升张网后掩膜板上支撑条的张网精度，进而提升遮盖部对预设功能集成区的遮挡精度，提高显示面板的显示效果。
依照本申请如上文所述的实施例，这些实施例并没有详尽叙述所有的细节，也不限制该发明仅为所述的具体实施例。显然，根据以上描述，可作很多的修改和变化。本说明书选取并具体描述这些实施例，是为了更好地解释本申请的原理和实际应用，从而使所属技术领域技术人员能很好地利用本申请以及在本申请基础上的修改使用。本申请仅受权利要求书及其全部范围和等效物的限制。

Claims (20)

  1. 一种支撑条，包括：
    支撑段，所述支撑段包括支撑主体和至少一个遮盖部，所述支撑主体沿所述长度方向延伸，所述至少一个遮盖部位于所述支撑主体的第一侧，在与所述长度方向相垂直的宽度方向上，所述支撑主体的第二侧与所述第一侧相对；
    预切割段，所述预切割段包括偏移补偿部，所述偏移补偿部的第一侧边沿着所述长度方向延伸，所述偏移补偿部的第二侧边自所述第二侧向所述第一侧倾斜，以使至少部分所述偏移补偿部的宽度自所述支撑主体向所述自由端递减；其中，在所述支撑条的长度方向上，所述支撑段的两端分别与一个所述预切割段连接。
  2. 根据权利要求1所述的支撑条，其中，所述第二侧边为直线型侧边；或者，
    所述第二侧边为弧线型侧边。
  3. 根据权利要求1所述的支撑条，其中，所述第二侧边包括至少两段直线段。
  4. 根据权利要求1所述的支撑条，其中，所述偏移补偿部的最大宽度L 1与所述偏移补偿部最小宽度L 2满足以下关系式1：
    Figure PCTCN2022088129-appb-100001
  5. 根据权利要求4所述的支撑条，其中，所述偏移补偿部的最大宽度L 1与所述偏移补偿部最小宽度L 2满足以下关系式2：
    Figure PCTCN2022088129-appb-100002
  6. 根据权利要求1所述的支撑条，其中，在所述长度方向上，所述支撑段与所述预切割段相邻设置，所述支撑段与所述预切割段之间具有预切割线，经由所述预切割线划分所述支撑段和所述预切割段。
  7. 根据权利要求6所述的支撑条，其中，所述遮盖部的数量为多个，多个所述遮盖部在所述支撑主体的第一侧沿所述长度方向间隔分布，所述支撑主体还包括焊接槽，所述焊接槽位于所述预切割线与最靠近所述预切 割段的所述遮盖部之间。
  8. 根据权利要求6所述的支撑条，其中，在所述长度方向上，所述预切割段还包括：
    缓冲部，位于所述支撑段与所述偏移补偿部之间，所述缓冲部包括过渡侧边，所述过渡侧边自所述支撑主体的第二侧向所述第二侧边直线延伸，所述第一侧边的延伸方向与所述过渡侧边的延伸方向相互平行。
  9. 根据权利要求8所述的支撑条，其中，在所述长度方向上，所述过渡侧边的长度的取值范围是20mm～25mm。
  10. 根据权利要求1至9任意一项所述的支撑条，其中，所述预切割段还包括：
    配重部，与所述遮盖部同侧设置，且所述配重部凸起设置于所述第一侧边。
  11. 根据权利要求10所述的支撑条，其中，所述配重部的形状与所述遮盖部的形状相同。
  12. 根据权利要求11所述的支撑条，其中，所述配重部为类矩形片状结构，所述配重部与所述第一侧边连接处形成有倒圆角，所述配重部的拐角为圆角。
  13. 根据权利要求12所述的支撑条，其中，所述倒圆角的半径R 1的取值范围在2.0mm～2.5mm；
    所述拐角的半径R 2的取值范围在1.0mm～1.5mm。
  14. 根据权利要求12所述的支撑条，其中，在所述宽度方向上，所述配重部包括与所述宽度方向平行的直边，所述直边位于所述倒圆角以及所述拐角之间。
  15. 根据权利要求14所述的支撑条，其中，所述直边的长度L的取值范围是1.0mm～1.2mm。
  16. 根据权利要求10所述的支撑条，其中，在所述长度方向上，所述预切割线与所述配重部之间的最短距离d 2的取值范围是4mm～5mm。
  17. 根据权利要求10所述的支撑条，其中，在所述长度方向上，所述过渡侧边的长度d 1和所述预切割线与所述配重部之间的最短距离d 2之 比为1:6～1:5。
  18. 根据权利要求1至9任意一项所述的支撑条，其中，所述支撑段的支撑主体上还设置有遮挡条配合部，所述遮挡条配合部设置在相邻两个所述遮盖部之间。
  19. 根据权利要求18所述的支撑条，其中，所述遮挡条配合部在所述宽度方向上延伸，且所述遮挡条配合部的宽度大于所述支撑主体的宽度。
  20. 一种张网方法，其中，用于对如权利要求1至19任意一项所述的支撑条进行张网处理，包括：
    对所述长度方向上相对的两个所述偏移补偿部沿所述长度方向进行拉伸处理，以获得张网后的所述支撑条；
    焊接所述张网后的支撑条在掩膜板框架上；
    将所述预切割段去除。
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