WO2022075002A1 - 不揮発性メモリ - Google Patents
不揮発性メモリ Download PDFInfo
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- WO2022075002A1 WO2022075002A1 PCT/JP2021/033152 JP2021033152W WO2022075002A1 WO 2022075002 A1 WO2022075002 A1 WO 2022075002A1 JP 2021033152 W JP2021033152 W JP 2021033152W WO 2022075002 A1 WO2022075002 A1 WO 2022075002A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/409—Read-write [R-W] circuits
- G11C11/4096—Input/output [I/O] data management or control circuits, e.g. reading or writing circuits, I/O drivers or bit-line switches
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- G—PHYSICS
- G11—INFORMATION STORAGE
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- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
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- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/4074—Power supply or voltage generation circuits, e.g. bias voltage generators, substrate voltage generators, back-up power, power control circuits
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- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/409—Read-write [R-W] circuits
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/18—Auxiliary circuits, e.g. for writing into memory
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- G—PHYSICS
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- G11C16/02—Erasable programmable read-only memories electrically programmable
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Definitions
- This disclosure relates to non-volatile memory.
- non-volatile memory that uses hot carrier injection into a transistor.
- This type of non-volatile memory includes first and second transistors having the same characteristics in the initial state as memory elements, and hot carriers are injected into only one of the transistors to change the characteristics of the transistors.
- "0" data is stored or "1" data is stored based on the magnitude relationship of the drain current when a common gate voltage is supplied to the first and second transistors. Read if it is. For example, a state in which the drain current of the first transistor is smaller (a state in which the characteristics of the first transistor are changed) corresponds to a state in which "0" data is stored, and the drain current of the second transistor is smaller. The state (the state in which the characteristic of the second transistor is changed) corresponds to the state in which the data of "1" is stored.
- the stored data (stored value) in the initial state is undefined. In this case, it is necessary to perform processing for dealing with the indefinite storage data in another peripheral circuit, which may be inconvenient from the viewpoint of circuit scale and the like.
- a non-volatile memory configured so that a larger drain current flows through the second transistor among the first and second transistors in the initial state so that the stored data in the initial state is not indefinite has also been proposed.
- the stored data can be fixed to "0" in the initial state, and the stored data can be set to "1" after hot carrier injection into the second transistor.
- the present disclosure aims to provide a non-volatile memory that is less susceptible to mismatches.
- the non-volatile memory according to the present disclosure includes a first transistor, a second transistor, a third transistor having a gate commonly connected to the gate of the second transistor, and a gate commonly connected to the gate of the first transistor.
- a fourth transistor having a And the read operation is performed in the lead current supply state in which the drain current of the fourth transistor is supplied by the supply circuit and the drain current larger than the drain current of the fourth transistor is supplied to the third transistor.
- the signal output circuit executes the signal associated with the first value or the signal associated with the second value based on the drain currents of the first and second transistors in the read operation. Configured to output.
- Is a block diagram of the storage circuit according to the embodiment of the present disclosure Is a diagram showing a lead current supply state in a storage circuit according to an embodiment of the present disclosure. Is a diagram showing the characteristics of the transistor before and after the program operation according to the embodiment of the present disclosure. Is a diagram showing a configuration of a storage circuit according to the first embodiment belonging to the embodiment of the present disclosure. Is a diagram showing a configuration of a storage circuit according to the first embodiment belonging to the embodiment of the present disclosure. Is a diagram showing the structure of the MOSFET. Is a timing chart of the read operation before the program operation according to the first embodiment belonging to the embodiment of the present disclosure.
- a line refers to a wiring to which an electric signal is propagated or applied.
- the ground refers to a reference conductive portion having a reference potential of 0 V (zero volt) or refers to the potential of 0 V itself.
- the reference conductive portion is formed of a conductor such as metal.
- the potential of 0V may be referred to as a ground potential.
- the voltage shown without any particular reference represents the potential seen from ground.
- Level refers to the level of potential, where a high level has a higher potential than a low level for any signal or voltage of interest.
- a signal or voltage at a high level means that the signal or voltage level is at a high level
- a signal or voltage at a low level means that the signal or voltage level is at a low level. It means being at a low level.
- a level for a signal is sometimes referred to as a signal level
- a level for a voltage is sometimes referred to as a voltage level.
- the on state refers to the state in which the drain and source of the transistor are conducting, and the off state means the drain and source of the transistor. Refers to a state in which the interval is non-conducting (blocked state).
- MOSFETs are understood to be enhancement-type MOSFETs.
- MOSFET is an abbreviation for "metal-oxide-semiconductor field-effect transistor".
- the electrical characteristics of the MOSFET include the gate threshold voltage.
- the gate potential of the transistor is higher than the source potential of the transistor, and the gate-source voltage of the transistor (gate potential seen from the source potential).
- the transistor is turned on, and when not, the transistor is turned off.
- the gate potential of the transistor is lower than the source potential of the transistor, and the gate-source voltage of the transistor (gate potential seen from the source potential).
- the transistor is turned on, and when not, the transistor is turned off.
- Any switch can be configured with one or more FETs (Field Effect Transistors), and when a switch is on, both ends of the switch conduct, while when a switch is off, the switch There is no conduction between both ends.
- FETs Field Effect Transistors
- the on state and the off state may be simply expressed as on and off.
- the period when the level of the signal becomes high level is called the high level period
- the period when the level of the signal becomes low level is called the low level period.
- the same is true for any voltage that has a high or low level voltage level.
- FIG. 1 is a block diagram of a main part of the storage circuit 1 according to the embodiment of the present disclosure.
- the storage circuit 1 is a non-volatile memory that stores 1-bit data, and includes a memory unit 10, a gate voltage generation unit 12, a current / voltage supply circuit 20, a signal output circuit 30, and a program circuit 40.
- the storage circuit 1 may be configured by a semiconductor integrated circuit.
- the memory unit 10 includes memory elements M1 and M2, and stores "0" data or "1" data in the memory unit 10.
- the gate voltage generation unit 12 includes a memory M4 equivalent to the memory element M1 and a memory element M3 equivalent to the memory element M2.
- Each of the memory elements M1 to M4 is a transistor. Therefore, the memory elements M1 to M4 are also referred to as transistors M1 to M4 (first, second, third, fourth transistors).
- Each of the transistors M1 to M4 is configured as an N-channel type MOSFET.
- the gate voltage of the transistor M2 is generated by the transistor M3 according to the drain current of the transistor M3.
- the transistor M4 generates a gate voltage of the transistor M1 according to the drain current of the transistor M4.
- the gates of the transistors M2 and M3 are commonly connected to each other.
- the gates of the transistors M1 and M4 are commonly connected to each other.
- Each source of the transistors M1 to M4 is connected to a common line.
- the common line may basically have a ground potential of 0 V, but may have a potential different from the ground potential when the program operation described later is executed.
- the drains of the transistors M1 and M2 are connected to the signal output circuit 30 via different lines.
- the drains of the transistors M3 and M4 are connected to the supply circuit 20 via different lines. In the configuration of FIG. 1, the gate and drain of the transistor M3 are short-circuited. However, another element such as a switch may be interposed between the gate of the transistor M3 and the drain of the transistor M3.
- the gate and drain of the transistor M4 are short-circuited.
- another element such as a switch may be interposed between the gate of the transistor M4 and the drain of the transistor M4.
- the drain currents of the transistors M1, M2, M3, and M4 may be referred to by the symbols “ ID1 ”, “ ID2 ”, “ ID3 ”, and “ ID4 ”, respectively.
- the transistors M2 and M3 have the same structure as each other, and have the same electrical characteristics as each other before the execution of the program operation by the program circuit 40.
- the transistor to be programmed is the transistor M2. Therefore, before the program operation by the program circuit 40 is executed, the transistors M2 and M3 have the same gate threshold voltage.
- the transistors M2 and M3 form a first current mirror circuit in which the transistor M3 is a current input side transistor and the transistor M2 is a current output side transistor, and the drain current I D3 of the transistor M3 is formed.
- the ratio of the transistor M2 to the drain current I D2 is 1: 1 (however, the error is ignored).
- the transistors M1 and M4 have the same structure as each other, and have the same electrical characteristics before and after the execution of the program operation by the program circuit 40. Therefore, the transistors M1 and M4 have the same gate threshold voltage before and after the execution of the program operation by the program circuit 40. Execution of the program operation does not affect the electrical characteristics of the transistors M1 and M4. Before and after the execution of the program operation, the transistors M1 and M4 form a second current mirror circuit in which the transistor M4 is a current input side transistor and the transistor M1 is a current output side transistor, and the transistor M4 is formed. The ratio of the drain current I D4 to the drain current I D1 of the transistor M1 is 1: 1 (however, the error is ignored).
- the structure is a concept including the size of the transistor, and therefore, for any plurality of transistors, the same structure means that the sizes of the plurality of transistors are also the same. means.
- the electrical characteristics (gate threshold) of the plurality of transistors are not performed. (Including voltage etc.) are also the same as each other.
- the same structural or electrical characteristics means that they are the same in design and may actually include an error (ie,).
- the same is understood to be a concept that includes errors).
- the same applies to the ratio of currents. For example, a ratio of one current to another current of 1: 1 means that the ratio is 1: 1 by design, and actually causes an error. Can include.
- a read operation for reading the data stored in the memory unit 10 and a program operation (write operation) for rewriting the data stored in the memory unit 10 from “0" to "1" can be executed.
- the expression “before the execution of the program operation” and the expression “before the program operation” have the same meaning
- the expression “after the execution of the program operation” and the expression “after the program operation” have the same meaning.
- the ratio of the drain current I D4 to the drain current I D1 is 1: 1 regardless of before and after the program operation, and before the program operation, the drain current I D3 and the drain current I D2
- the program operation is realized by the program circuit 40.
- the program circuit 40 changes the electrical characteristics of the transistor M2 by injecting hot carriers into the transistor M2 in the program operation. Due to this change, the gate threshold voltage of the transistor M2 increases (rises). See FIG. In FIG. 3, the solid line waveform 800M2 INI represents the gate-source voltage dependence of the drain current of the transistor M2 before the execution of the program operation (that is, in the initial state of the storage circuit 1), and the solid line waveform 800M2 PRG is It represents the gate-source voltage dependence of the drain current of the transistor M2 after the execution of the program operation.
- the signal output circuit 30 outputs a signal D OUT corresponding to the value of the data stored in the memory unit 10 based on the magnitude relationship of the drain currents of the transistors M1 and M2 in the read operation.
- the state in which the drain current I D2 is larger than the drain current I D1 corresponds to the state in which the data of "0" is stored in the memory unit 10. Therefore, in the read operation, when the drain current I D2 is larger than the drain current I D1 , the signal output circuit 30 outputs a signal D OUT (for example, a low level signal D OUT ) corresponding to the data of “0”. do.
- the gate threshold voltage of the transistor M2 increases.
- the gate threshold voltage of the transistor M2 may be higher than the gate-source voltage of the transistor M3 in the lead current supply state, and in this case, the drain of the transistor M2 in the read operation in the lead current supply state.
- the current I D2 is substantially zero.
- the drain current ID1 becomes larger than the drain current ID2 in the read current supply state after the program operation.
- the state in which the drain current I D1 is larger than the drain current I D2 corresponds to the state in which the data of "1" is stored in the memory unit 10. Therefore, in the read operation, when the drain current I D1 is larger than the drain current I D2 , the signal output circuit 30 outputs a signal D OUT (for example, a high level signal D OUT ) corresponding to the data of “1”. do.
- the ratio of drain currents I D1 to I D4 can be expressed as follows. That is, in the read operation (lead operation in the lead current supply state) executed before the program operation, the ratio of the drain current I D3 to the drain current I D4 (n: 1) and the drain current I to the drain current I D1 .
- the above configuration it is possible to configure a storage circuit that is not easily affected by the above mismatch, and it is possible to perform an optimum design to eliminate the influence of the mismatch. That is, for example, if it is expected that a difference of up to 10 mV will occur in the gate threshold voltage of the transistors M1 and M2 before the program operation due to a manufacturing error, correct data will be read from the memory unit 10 even if there is a mismatch of 10 mV.
- the value of "n” may be determined as follows. There is a merit that the value of "n” can be freely designed according to the assumed mismatch. Further, if the configuration of the storage circuit 1 is adopted, the margin inspection can be easily realized. Margin inspection will be described later.
- connection relationship of each element shown in FIG. 1 represents the connection relationship when the read operation is executed, and the source and drain of the transistor M2 may be exchanged when the program operation is executed (however, this is the case). Not required). That is, of the first and second electrodes of the transistor M2, the electrode on the high potential side functions as a drain and the electrode on the low potential side functions as a source, but the first electrode and the second electrode of the transistor M2 have. Of the electrodes, each circuit is connected using a switch or the like (not shown in FIG. 1) so that the electrode connected to the ground in the lead operation (the electrode that functions as a source) functions as a drain when the program operation is executed. The relationship may be changed (detailed circuit examples to achieve this will be described later).
- FIG. 4 shows the configuration of the storage circuit 1A according to the first embodiment.
- the storage circuit 1A is an example of the storage circuit 1 of FIG.
- the storage circuit 1A includes transistors M1 to M5, M11 to M15, M21 to M25, switches SW1 to SW6, SW7a, SW7b, SW8 to SW13, inverters INV1 to INV4, and a control circuit 60.
- the storage circuit 1A may be configured by a semiconductor integrated circuit.
- the control circuit 60 can control the on / off of the switches SW1 to SW6, SW7a, SW7b, and SW8 to SW13, and can also control the gate voltage of the transistors M23 to M25.
- Transistors M1 to M5 and M11 to M15 are N-channel MOSFETs, and transistors M21 to M25 are P-channel MOSFETs.
- switches SW1 to SW6, SW7a, SW7b, and SW8 to SW13 are controlled based on the signals output from the control circuit 60 including the signals XRST and PRG, but it is assumed that all the switches are in the off state in FIG. The state when this is done is shown (the same applies to FIG. 5 described later). However, the switch SW13 may be fixed to ON.
- a positive power supply voltage VDD is applied to the power supply line LN VDD .
- the power supply voltage VDD has a predetermined positive DC voltage value.
- the ground line LN GND has a ground potential of 0 V.
- Each source of the transistors M21 to M25 and one end of each of the switches SW3 and SW4 are connected to the power supply line LN VDD .
- the other end of the switch SW3 is connected to the gate of the transistor M21, and the other end of the switch SW4 is connected to the gate of the transistor M22.
- the wiring connected to the gate of the transistor M21 is referred to as a line LN2, and the voltage applied to the line LN2 is referred to as a voltage V2.
- the wiring connected to the gate of the transistor M22 is referred to as a line LN1, and the voltage applied to the line LN1 is referred to as a voltage V1.
- the drain of the transistor M21 is connected to the line LN1, and the drain of the transistor M22 is connected to the line LN2.
- the input terminal of the inverter INV1 is connected to the line LN1.
- the output terminal of the inverter INV1 is connected to the input terminal of the inverter INV2.
- the output terminal of the inverter INV2 is connected to the input terminal of the inverter INV3.
- the input terminal of the inverter INV4 is connected to the line LN2.
- One end of the switch SW5 is connected to the line LN1, and the other end of the switch SW5 is connected to one end of the switch SW1.
- the other end of the switch SW1 is connected to the ground line LN GND .
- One end of the switch SW6 is connected to the line LN2, and the other end of the switch SW6 is connected to one end of the switch SW2.
- the other end of the switch SW2 is connected to the ground line LN GND .
- Each gate of the transistors M11 to M15 and the drain of the transistor M15 are commonly connected to the gate line LN IG .
- the voltage applied to the gate line LN IG is called the gate voltage V IG .
- the transistor M1 is composed of a series circuit of the transistors M1a and M1b.
- the transistors M1a and M1b are N-channel MOSFETs having the same structure as each other.
- the source of the transistor M1a is connected to the drain of the transistor M1b, and the gates of the transistors M1a and M1b are connected to each other. Therefore, the drain of the transistor M1a functions as the drain of the transistor M1, the source of the transistor M1b functions as the source of the transistor M1, and the gates of the transistors M1a and M1b function as the gate of the transistor M1.
- the transistor M4 is composed of a series circuit of the transistors M4a and M4b.
- the transistors M4a and M4b are N-channel MOSFETs having the same structure as each other.
- the source of the transistor M4a is connected to the drain of the transistor M4b, and the gates of the transistors M4a and M4b are connected to each other. Therefore, the drain of the transistor M4a functions as the drain of the transistor M4, the source of the transistor M4b functions as the source of the transistor M4, and the gates of the transistors M4a and M4b function as the gate of the transistor M4.
- Each gate of the transistors M2 and M3 is commonly connected to the gate line LN OTPG0 .
- the voltage applied to the gate line LN OTPG0 is referred to as a gate voltage V OTPG0 .
- Each gate of the transistors M1 and M4 (hence each gate of the transistors M1a, M1b, M4a and M4b) is commonly connected to the gate line LN OTPG1 .
- the voltage applied to the gate line LN OTPG1 is referred to as a gate voltage V OTPG1 .
- the drain of the transistor M11 is connected to the line LN1 and the source of the transistor M11 is connected to the drain of the transistor M1 (hence the drain of the transistor M1a).
- the source of the transistor M1 (hence the source of the transistor M1b) is connected to the line LN COM .
- the drain of the transistor M12 is connected to the line LN2, and the source of the transistor M12 is connected to the electrode E1 of the transistor M2.
- a switch SW9 is inserted in series between the electrode E1 of the transistor M2 and the ground line LN GND .
- the electrode E2 of the transistor M2 is connected to the line LN COM , and the switch SW10 is inserted in series between the line LN COM and the ground line LN GND .
- the switch SW11 is inserted in series between the line LN COM and the power supply line LN VDD .
- the electrode on the high potential side functions as a drain and the electrode on the low potential side functions as a source.
- the switches SW9, SW10, and SW11 are turned off, on, and off, respectively, so that the electrode E1 functions as a drain, and in the program operation, the switch SW9, When SW10 and SW11 are turned on, off, and on, respectively, the electrode E2 functions as a drain.
- a switch SW12 is inserted in series between the gate line LN OTPG0 and the drain of the transistor M13.
- the source of the transistor M13 is connected to the drain of the transistor M3.
- a switch SW13 is inserted in series between the gate line LN OTPG1 and the drain of the transistor M14.
- the source of the transistor M14 is connected to the drain of the transistor M4 (hence the drain of the transistor M4a).
- the source of the transistor M3 and the source of the transistor M4 are commonly connected to the line LN COM .
- the switch SW7a is inserted in series between the gate line LN OTPG0 and the ground line LN GND .
- the switch SW7b is inserted in series between the gate line LN OTPG1 and the ground line LN GND .
- a switch SW8 is inserted in series between the gate line LN IG and the ground line LN GND .
- the drain of the transistor M15 is connected to the gate line LN IG , and the source of the transistor M15 is connected to the drain of the transistor M5.
- the gate and drain of the transistor M5 are connected to each other.
- the source of the transistor M5 is connected to the ground line LN GND .
- the drains of the transistors M23, M24, and M25 are connected to the gate lines LN OTPG0 , LN OTPG1 , and LN IG , respectively.
- the gates of the transistors M23 to M25 are connected to each other.
- the control circuit 60 can supply a common gate voltage to each gate of the transistors M23 to M25.
- the inverter which is any of the inverters INV1 to INV4, outputs an inverted signal of the input signal to its own input terminal from its own output terminal. Specifically, when the input voltage to its input terminal is less than a predetermined threshold voltage, the inverter outputs a high-level signal sufficiently higher than the threshold voltage from its output terminal to its own input terminal. When the input voltage of is equal to or higher than a predetermined threshold voltage, a low-level signal sufficiently lower than the threshold voltage is output from its own output terminal.
- the inverters INV1 to INV4 are driven based on the power supply voltage VDD, and the threshold voltage of each inverter is approximately half of the power supply voltage VDD.
- the output signal of the inverter INV3 is the output signal D OUT of the storage circuit 1A.
- a signal corresponding to the value of the data stored in the memory unit 10 composed of the transistors M1 and M2 is output as an output signal D OUT through a read operation.
- the control terminal of the switch SW5 is connected to the output terminal of the inverter INV1.
- the switch SW5 is turned on and off, respectively, when the output signal of the inverter INV1 is high level and low level.
- the control terminal of the switch SW6 is connected to the output terminal of the inverter INV4.
- the switch SW6 is turned on and off, respectively, when the output signal of the inverter INV4 is high level and low level.
- the currents flowing from the power supply line LN VDD to the gate lines LN OTPG0 , LN OTPG1 , and LN IG through the transistors M23, M24, and M25 are referred to by the currents OTPG0, OTPG1, and IG, respectively.
- Each circuit element of the storage circuit 1 (storage circuit 1A in this embodiment) is integrated and formed on a semiconductor substrate, and the structure of any transistor formed as a MOSFET on the semiconductor substrate has a gate width W and a gate length L. Characterized by.
- FIG. 6 schematically shows the structure of the MOSFET. Any transistor formed as a MOSFET is provided with a gate electrode GG that functions as a gate.
- the gate width W and the gate length L represent the size of the gate electrode GG in the direction parallel to the surface (front surface and back surface) of the semiconductor substrate.
- the gate length L represents the distance between the drain and the source of the transistor (the length of the gate electrode GG in the direction connecting the drain and the source).
- the gate width W is in a direction orthogonal to the direction in which the gate length L is defined (the direction connecting the drain and the source) and also to the normal direction of the semiconductor substrate (the direction orthogonal to the front surface and the back surface of the semiconductor substrate). Represents the length of the gate electrode GG.
- the drain current increases as the gate width W increases under certain conditions, and the drain current is approximately proportional to the gate width W when the gate length L is reasonably large.
- transistors M1 to M4, M11 to M24, and M23 to M25 are configured as follows (see FIG. 5).
- Each of the transistors M1a, M1b, M4a and M4b is composed of one first unit MOSFET, and each of the transistors M2 and M3 is composed of a parallel circuit of two first unit MOSFETs.
- the gate width W of the first unit MOSFET has a length of “ WA ”.
- Each of the transistors M11 and M14 is composed of one second unit MOSFET, and the gate width W of the second unit MOSFET has a length of " WA ".
- the second unit MOSFET may be a MOSFET having the same structure as the first unit MOSFET.
- the gate length L may be different between the first and second unit MOSFETs.
- Each of the transistors M12 and M13 is composed of a parallel circuit of two third unit MOSFETs, and the gate width W of the third unit MOSFET has a length of " WB ".
- the transistor M24 is composed of one 4th unit MOSFET, and the gate width W of the 4th unit MOSFET has a length of “ WA ”.
- the transistor M23 is composed of a parallel circuit of two fifth unit MOSFETs, and the transistor M25 is composed of a parallel circuit of three fifth unit MOSFETs.
- the gate width W of the fifth unit MOSFET has a length of “ WB ”.
- the gate length L of the fourth and fifth unit MOSFETs forming the transistors M23 to M25 is considerably larger than the gate length L of each first unit MOSFET forming the transistors M1 to M4. This is to obtain the current ratio of the current mirror circuit by the transistors M23 to M25 (the ratio of the drain currents of the transistors M23 to M25) in a stable manner as designed, and to reduce the size of the transistors M1 to M4 (particularly, the transistors M1 and M2). This is to plan.
- WB is set to twice or substantially twice WA, and as a result, the transistor M23 is in a state where the switches SW7a , SW7b, and SW8 are off and the switches SW12 and SW13 are on.
- the ratio of the current OTPG1 to the current OTPG0 is "1: 4"
- the ratio of the current OTPG0 to the current IG is "2: 3".
- Read operation before program operation RD INI the read operation executed before the program operation may be referred to as a read operation RD INI
- the read operation executed after the program operation may be referred to as a read operation RD PRG .
- a read operation it refers to a read operation before or after the execution of the program operation.
- FIG. 7 is a timing chart of the read operation RD INI .
- the low level period of the signal XRST is referred to as a precharge period, and the period in which both the switches SW5 and SW6 are in the off state among the high level periods of the signal XRST is referred to as a read period.
- the read operation is realized in the read period after the precharge period has passed.
- the signal PRG is maintained at a low level during the period when no program operation is performed (including the precharge period and the read period). Assuming that the signal PRG is at low level, the signal XRST is switched from low level to high level to transition from the precharge period to the read period, and the signal corresponding to the data stored in the memory unit 10 is generated. After the read period, it is output as an output signal D OUT .
- the switches SW3, SW4, SW7a, SW7b and SW8 are turned on while the switches SW1 and SW2 are turned off as shown in FIG. 8 based on the low level signals XRST and PRG.
- the gate voltage of the transistors M23 to M25 is set to the power supply voltage VDD by the control circuit 60, and the transistors M23 to M25 are turned off.
- the switches SW9 and SW11 are turned off and the switch SW10 is turned on. Therefore, in the period in which the program operation is not performed (including the precharge period and the read period), the electrode E1 functions as a drain and the electrode E2 functions as a source in the transistor M2.
- the switches SW12 and SW13 are fixed to ON during the precharge period and the read period, and the switches SW12 and SW13 remain ON even after the read period.
- the dashed line waveform INI V1 represents the waveform of the voltage V1 in the lead operation RD INI
- the solid line waveform INI V2 represents the waveform of the voltage V2 in the lead operation RD INI .
- the waveforms INI V1 and INI V2 overlap each other.
- the specific voltage values of the gate voltages VOTPG0 and VOTPG1 are different from each other, but the behavior of those voltages is the same with respect to the read operation.
- the waveform of any one of the gate voltages VOTPG0 and VOTPG1 is shown as a representative (the same applies to FIG. 11 described later).
- the voltages V IG , VOTPG0 and VOTPG1 are 0V, and therefore the transistors M1 to M5 and M11 to M15 are all in the off state.
- the signal XRST switches from the low level to the high level to transition from the precharge period to the read period.
- the switches SW1 and SW2 are turned on while the switches SW3, SW4, SW7a, SW7b and SW8 are turned off, as shown in FIG. ..
- the control circuit 60 sets the gate voltage of the transistors M23 to M25 to a low level (a voltage even lower when viewed from a voltage lower than the power supply voltage VDD by each gate threshold voltage of the transistors M23 to M25). Then, a drain current flows through the transistors M23 to M25.
- the gate voltages V IG , VOTPG0 , and VOTPG1 increase due to the currents IG, OTPG0, and OTPG1.
- the gate voltage V IG rises faster than the gate voltages VOTPG0 and VOTPG1 , and the gate voltage VOTPG0 becomes the gate threshold of the transistors M2 and M3.
- the transistors M11 to M14 can be left on before the voltage is reached and before the gate voltage VOTPG1 reaches the gate threshold voltage of the transistors M1 and M4.
- the transistors M5 and M11 to M15 are turned on as the gate voltages VIG, VOTPG0 and VOTPG1 increase, and a drain current flows through the transistors M1 to M4.
- the drain currents flowing through the transistors M1, M2, M3, and M4 during the read period are referred to by the symbols “ ID1 ", “ ID2 ", “ ID3 “, and “ ID4 “, respectively (see FIG. 9). ..
- the current OTPG0 flows as the drain current ID3 of the transistor M3 and the current OTPG1 flows as the drain current ID4 of the transistor M4, and as described above, the ratio of the current OTPG1 to the current OTPG0 is “1: n”.
- the ratio of the drain current I D1 to the drain current I D2 is also “1: 4” (that is, if the error is ignored, the drain current I D2 is drained. 4 times the current I D1 ).
- the voltage V2 drops faster than the voltage V1.
- the drain current flows through the transistor M21 in the process of lowering the voltage V2, the lowering of the voltage V1 stops at the stage where the voltage V2 drops to some extent, and the voltage V1 rises to the level of the power supply voltage VDD.
- the signal END is a logical sum signal of the output signal of the inverter INV1 and the output signal of the inverter INV4. Therefore, when at least one of the output signals of the inverters INV1 and INV4 becomes a high level, the signal END Will be at a high level.
- the signal END may be understood as an internal signal generated in the control circuit 60.
- the control circuit 60 sets the gate voltage of the transistors M23 to M25 to the power supply voltage VDD and turns off the transistors M23 to M25. Further, in response to the signal END becoming high level, the control circuit 60 reduces the gate voltage VOTPG0 , VOTPG1 and VIG to 0V by switching the switches SW7a , SW7b and SW8 from off to on. ..
- the signal D OUT after the signal END becomes high level in the read operation is particularly referred to as a read confirmation signal D OUT .
- the read confirmation signal D OUT represents the value of the data stored in the memory unit 10 (the value of the data read from the memory unit 10), and the low level of the read confirmation signal D OUT indicates that the data is at a low level. It means that the value is "0", and that the read confirmation signal D OUT is at a high level means that the value of the data is "1".
- the read confirmation signal D OUT In the read operation RD INI , since the output signal of the inverter INV1 is maintained at a low level, the read confirmation signal D OUT also becomes a low level, and “0” data (that is, initial value data) is read out.
- the read confirmation signal D OUT representing the data of “0” continues to be output after the signal END becomes high level in the read operation RD INI , it is not necessary to provide a latch circuit in the subsequent stage, and the read confirmation signal D OUT is required.
- the read confirmation signal D OUT can be directly supplied to the circuit (for example, a trimming switch that is turned on / off according to the stored data of the memory unit 10).
- FIG. 11 is a timing chart of the read operation RD PRG (that is, the read operation performed after the execution of the program operation).
- the broken line waveform PRG V1 represents the waveform of the voltage V1 in the lead operation RD PRG
- the solid line waveform PRG V2 represents the waveform of the voltage V2 in the lead operation RD PRG . From the precharge period to the first half of the read period, the waveforms PRG V1 and PRG V2 overlap each other.
- the control circuit 60 sets the gate voltage of the transistors M23 to M25 to the power supply voltage VDD and turns off the transistors M23 to M25. Further, in response to the signal END becoming high level, the control circuit 60 reduces the gate voltage VOTPG0 , VOTPG1 and VIG to 0V by switching the switches SW7a , SW7b and SW8 from off to on. ..
- the signal D OUT after the signal END becomes high level in the read operation is particularly referred to as a read confirmation signal D OUT as described above.
- the read confirmation signal D OUT becomes high level and represents the data of “1”. Since the read confirmation signal D OUT representing the data of “1” continues to be output after the signal END becomes high level in the read operation RD PRG , it is not necessary to provide a latch circuit in the subsequent stage, and the read confirmation signal D OUT is required.
- the read confirmation signal D OUT can be directly supplied to the circuit (for example, a trimming switch that is turned on / off according to the stored data of the memory unit 10).
- the state in which the drain current ID 2 is larger than the drain current ID 1 in the read operation (read period) corresponds to the state in which the data of “0” is stored in the memory unit 10, and FIG.
- the read confirmation signal D OUT (here, the low level signal D OUT ) corresponding to the data of “0” is output. ..
- the state in which the drain current I D1 is larger than the drain current I D2 in the read operation (read period) corresponds to the state in which the data of "1” is stored in the memory unit 10, and is corresponding to the state in which the data of "1” is stored in FIG.
- the read confirmation signal D OUT since the drain current I D1 is larger than the drain current I D2 , the read confirmation signal D OUT (here, the high level signal D OUT ) corresponding to the data of “1” is output.
- the program operation that causes the change from the read operation RD INI of FIG. 7 to the read operation RD PRG of FIG. 11 is realized as follows.
- FIG. 12 shows the state of each switch in the storage circuit 1A during the period in which the program operation is executed (hereinafter referred to as the program period).
- the signal XRST is set to low level and the signal PRG is set to high level, and the switches SW1, SW2, SW7a, SW7b, SW10 and SW12 are turned off based on those signals XRST and PRG, while the switches SW3 and SW4 are turned off. , SW8, SW9 and SW11 are turned on.
- the switch SW13 may be fixed on regardless of the signals XRST and PRG.
- the gate voltage of the transistors M23 to M25 is set to a low level by the control circuit 60 (a voltage further lower than the power supply voltage VDD when viewed from a voltage lower by each gate threshold voltage of the transistors M23 to M25). Therefore, the power supply voltage VDD is applied to the electrode E2 of the transistor M2 through the switch SW11, and the power supply voltage VDD is applied to the gate of the transistor M2 through the transistor M23. Further, the potential of the electrode E1 of the transistor M2 becomes 0V. Further, when the switch SW8 is turned on, all the transistors M11 to M15 are turned off.
- the electrode E2 functions as a drain of the transistor M2 and the electrode E1 functions as a source of the transistor M2, and a current flows from the electrode E2 toward the electrode E1.
- a current flowing hot carriers are injected into the transistor M2, the characteristics of the transistor M2 change, and the gate threshold voltage of the transistor M2 increases.
- the program operation is completed by switching the signal PRG from the high level to the low level.
- the above-mentioned program operation may be modified as follows. That is, by inserting a switch (not shown) between the power supply line LN VDD and the gate of the transistor M2 and turning the switch on only during the program period, the power supply voltage VDD is sent to the gate of the transistor M2 during the program period. Supply.
- the transistors M23 to M25 may be turned off by applying the power supply voltage VDD to the gates of the transistors M23 to M25 during the program period.
- any circuit modification may be performed during the program period as long as the gate threshold voltage of the transistor M2 can be increased by hot carrier injection into the transistor M2.
- a non-volatile memory having a plurality of memory units 10 can be configured, and in the non-volatile memory having a plurality of memory units 10, the above-mentioned description is performed only on the transistor M2 of the memory unit 10 to which the data of "1" is to be written.
- the hot carrier is injected by the program operation, and the hot carrier is not injected into the transistor M2 of the memory unit 10 (the memory unit 10 that keeps the stored data at “0”) otherwise.
- FIG. 13 shows the configuration of the storage circuit 1B according to the second embodiment.
- the storage circuit 1B is an example of the storage circuit 1 of FIG.
- the storage circuit 1B is obtained by adding an additional circuit (current distribution circuit) 70 to the storage circuit 1A according to the first embodiment.
- the transistors M32 and M33 provided in the storage circuit 1B correspond to the switches SW12 and SW13 in FIG. 4, respectively, and the control circuit 60 supplies the gate signal MARG to the gate of the switch SW32. Except for these points, the configuration of the storage circuit 1B in FIG. 13 is the same as the configuration of the storage circuit 1A in FIG.
- the transistors M32 and M33 are N-channel MOSFETs.
- the drain is connected to the line LN OTPG0
- the source is connected to the drain of the transistor M13
- the gate signal MARG is received at the gate.
- the drain is connected to the line LN OTPG1 and the source is connected to the drain of the transistor M14.
- the gate of the transistor M33 is connected to the power supply line LN VDD . Therefore, the transistor M33 is always on.
- the on / off of the switches SW1 to SW6, SW7a, SW7b, SW8 to SW11 and SW71 is controlled based on the signal output from the control circuit 60 including the signals XRST and PRG, but all the switches are in the off state in FIG. The situation when assuming that is shown.
- the switch SW71 is kept on during the period (program period) in which the program operation according to the switch state shown in FIG. 12 is executed.
- the additional circuit 70 includes transistors M71 to M74 and a switch SW71.
- the transistor M71 is a P-channel type MOSFET, and the transistors M72 to M74 are N-channel type MOSFETs.
- the source of the transistor M71 is connected to the power supply line LN VDD .
- the gate of the transistor M71 is commonly connected to each gate of the transistors M23 to M25.
- the drain of the transistor M71, the drain and the gate of the transistor M73, and the gate of the transistor M74 are connected to each other.
- Each source of the transistors M73 and M74 is connected to the ground line LN GND .
- the drain is connected to the line LN OTPG0 and the gate is connected to the line LN IG .
- the source of the transistor M72 and the drain of the transistor M74 are connected to each other.
- One end of the switch SW71 is connected to the gates of the transistors M73 and M74, and the other end of the switch SW71 is connected to the ground line LN GND .
- the transistor M71 has the same structure as the transistor M24. That is, the transistor M71 is composed of one fourth unit MOSFET like the transistor M24, and the gate width W of the fourth unit MOSFET has a length of “ WA ” as described above (see FIG. 5). A current mirror circuit is formed by the transistors M23 to M25 and M71.
- the gate length of the 4th unit MOSFET constituting the transistor M24 is equivalent to the gate length L of each 1st unit MOSFET forming the transistors M1 to M4, like the 4th and 5th unit MOSFETs forming the transistors M23 to M25. Is big.
- the current having the same current value as the current OTPG1 is the transistor M73.
- the non-volatile memory including the storage circuit 1 may operate in any of a plurality of operation modes including a normal mode (first mode) and an inspection mode (second mode).
- the control circuit 60 is provided with an operation mode setting unit (not shown) for setting the operation mode of the non-volatile memory.
- the control circuit 60 sets the operation mode of the non-volatile memory to the normal mode in principle, but a predetermined inspection signal is sent to the non-volatile memory.
- the control circuit 60 exceptionally sets the operation mode of the non-volatile memory to the inspection mode.
- the inspection signal may be input to the non-volatile memory from an external inspection device (not shown).
- the inspection mode is an operation mode mainly used in the shipping inspection of the non-volatile memory, and the control circuit 60 can execute the first or second margin processing in the inspection mode.
- the first or second margin processing may be performed at any stage other than the shipping inspection.
- Margin inspection can be performed by the first or second margin processing.
- the additional circuit 70 is a circuit that functions significantly in the first margin processing.
- the second margin processing will be described in another embodiment described later, and the first margin processing will be described here.
- the first margin process is a process for inspecting whether or not a value of "0" can be read from the memory unit 10 with a margin in the normal mode in which the program operation is not executed in the memory unit 10. Therefore, the first margin process is executed only for the memory unit 10 in which the program operation is not executed, or functions significantly only for the memory unit 10 in which the program operation is not executed. Therefore, when the non-volatile memory includes a plurality of memory units 10, it is sufficient to perform the first margin processing only on the memory unit 10 for which the program operation has not been executed. Here, attention is paid to one memory unit 10 in which the program operation is not executed.
- the read operation executed before the program operation is particularly referred to as the read operation RD INI .
- the read operation RD INI in the normal mode is as described in the first embodiment.
- the read operation RD INI is performed with the switch SW71 turned off. That is, in the read operation RD INI by the first margin processing (in other words, in the read operation RD INI in the inspection mode), the switch SW71 is turned off during the read period.
- the read operation RD INI in the inspection mode is the same as the read operation RD INI in the normal mode, except that the switch SW71 is turned off during the read period.
- the current OTPG0 is divided into a current flowing on the transistor M3 side and a current (I 70 ) flowing on the transistor M74 side.
- the ratio of the drain current of the transistor M4 to the drain current of the transistor M3 during the read period is represented by “1: n A ".
- the ratio of the drain current of the transistor M1 to the drain current of the transistor M2 also becomes “1: n A ” during the read period.
- the ratio of the drain current of the transistor M4 to the drain current of the transistor M3 during the read period is represented by “1: n B ".
- n A and n B are “n” in the normal mode and “n” in the inspection mode, both of which are larger than 1.
- the drain current of the transistor M3 is reduced by 70 minutes of the current I as compared with the normal mode. Therefore, "n A > n B ".
- the read operation RD INI is executed with the switch SW71 turned off, and it is confirmed whether or not the value of the data read from the memory unit 10 by the read operation RD INI is "0". This confirmation is performed based on the level of the read confirmation signal D OUT described above. Then, if the value of the data read from the memory unit 10 in the first margin processing is "0", the first margin normal signal is output, and if not, the first margin defective signal is output.
- the above-mentioned confirmation operation and output operation of the first margin normal signal or the first margin defective signal may be performed in a circuit in the non-volatile memory (not shown) or in a circuit outside the non-volatile memory (not shown). It may be done.
- the first margin normal signal means that the value of "0" can be read out from the memory unit 10 with a margin in the normal mode in which the program operation is not executed in the memory unit 10. (N A ⁇ n B ) corresponds to the margin.
- the first margin failure signal means that the value of "0" cannot be read from the memory unit 10 with a margin in the normal mode in which the program operation is not executed in the memory unit 10. For example, it is possible to take measures such as excluding the non-volatile memory from which the first margin defective signal is obtained as a defective product from the shipping target.
- the ratio of the drain current of the transistor M3 to the drain current of the transistor M4 is set to the first ratio (n A : 1) during the read period, and the first margin processing is performed.
- the ratio of the drain current of the transistor M3 to the drain current of the transistor M4 is set to the second ratio (n B : 1) during the read period.
- both the value of the first ratio (n A ) and the value of the second ratio (n B ) are set to be larger than 1, and the value of the second ratio (n B ) is set to the value of the first ratio. Set smaller than the value (n A ).
- the non-volatile memory including the storage circuit 1 can operate in any of a plurality of operation modes including the normal mode and the inspection mode, and the second embodiment with respect to the normal mode and the inspection mode.
- the matters described in the example also apply to the third embodiment.
- the second margin processing that can be executed in the inspection mode will be described.
- the second margin process is a process of checking whether the value of "1" can be read from the memory unit 10 with a margin in the normal mode after the program operation is executed in the memory unit 10. Therefore, the second margin process is executed only for the memory unit 10 after the program operation is executed, or functions significantly only for the memory unit 10 after the program operation is executed. Therefore, when the non-volatile memory includes a plurality of memory units 10, it is sufficient to perform the second margin processing only on the memory unit 10 after the program operation is executed. Here, attention is paid to one memory unit 10 after the program operation is executed.
- the second margin processing can be executed in any of the configuration of the storage circuit 1A according to the first embodiment and the configuration of the storage circuit 1B according to the second embodiment. However, here, refer to FIG. It is considered that the second margin processing is executed for the configuration of the storage circuit 1A (it may be considered that the illustration of the additional circuit 70 is simply omitted in FIG. 14).
- the read operation executed after the program operation is particularly referred to as the read operation RD PRG .
- the read operation RD PRG in the normal mode is as described in the first embodiment.
- the switch SW12 is turned on during the read period.
- the read operation RD PRG is performed with the switch SW12 turned off. That is, in the read operation RD PRG by the second margin processing (in other words, in the read operation RD PRG in the inspection mode), as shown in FIG. 14, the switch SW12 is turned off during the read period.
- the read operation RD PRG in the inspection mode is the same as the read operation RD PRG in the normal mode, except that the switch SW12 is turned off during the read period.
- the gate voltage of the transistor M2 during the read period is higher in the read operation RD PRG in the inspection mode than in the read operation RD PRG in the normal mode.
- the drain current of the transistor M2 during the read period tends to be larger or larger in the read operation RD PRG in the inspection mode than in the read operation RD PRG in the normal mode.
- the gate threshold voltage of the transistor M2 is sufficiently high due to the program operation, the drain current of the transistor M2 during the read period becomes substantially zero even in the read operation RD PRG in the inspection mode.
- the read operation RD PRG is executed with the switch SW12 turned off, and it is confirmed whether or not the value of the data read from the memory unit 10 by the read operation RD PRG is "1". This confirmation is performed based on the level of the read confirmation signal D OUT described above. Then, if the value of the data read from the memory unit 10 in the second margin processing is "1", the second margin normal signal is output, and if not, the second margin defective signal is output.
- the above-mentioned confirmation operation and output operation of the second margin normal signal or the second margin defective signal may be performed in a circuit in the non-volatile memory (not shown) or in a circuit outside the non-volatile memory (not shown). It may be done.
- the second margin normal signal means that the value of "1" can be read out from the memory unit 10 with a margin in the normal mode after the program operation is executed in the memory unit 10.
- the second margin failure signal means that the value of "1" cannot be read from the memory unit 10 with a margin in the normal mode after the program operation is executed in the memory unit 10. For example, it is possible to take measures such as excluding the non-volatile memory from which the second margin defective signal is obtained as a defective product from the shipping target. Alternatively, when the second margin defective signal is obtained, it is possible to execute the program operation again for the corresponding memory unit 10.
- the drain current ID4 (drain current having the same current value as the drain current ID4 in the normal mode) is applied only to the transistor M4 among the transistors M3 and M4 during the read period. While supplying, a predetermined voltage is supplied to the gate of the transistor M2.
- the predetermined voltage is set higher than the gate voltage of the transistor M2 in the lead current supply state (that is, the voltage VTPG0 during the read period in the read operation RD PRG in the normal mode).
- the power supply voltage VDD is used as the predetermined voltage, but the predetermined voltage may be different from the power supply voltage VDD.
- the second margin processing is it possible to read the value of "1" from the memory unit 10 that should hold the value of "1" with a margin (that is, is there a sufficient margin for holding the value of "1"? ) Can be easily confirmed.
- the second margin process may be modified as follows.
- the modified second margin processing will be described.
- the switch SW12 is fixed on as described in the first embodiment.
- a first additional circuit (not shown) that reduces the drain current of the transistor M4 during the read period in the read operation RD PRG in the inspection mode compared to the normal mode, or during the read period in the read operation RD PRG .
- a second additional circuit (not shown) that increases the drain current of the transistor M3 in the inspection mode as compared with the normal mode is added to the storage circuit 1A.
- it is the first additional circuit it can be realized by the same circuit configuration as the additional circuit 70 of FIG.
- n A the ratio of the drain current of the transistor M4 to the drain current of the transistor M3 during the read period.
- the ratio of the drain current of the transistor M4 to the drain current of the transistor M3 during the read period is represented by “1: n B ". Both n A and n B are greater than 1.
- the ratio of the drain current of the transistor M3 to the drain current of the transistor M4 is set to the first ratio (n A : 1) during the read period, and the first ratio is modified.
- the ratio of the drain current of the transistor M3 to the drain current of the transistor M4 is set to the second ratio (n B : 1) during the read period.
- both the value of the first ratio (n A ) and the value of the second ratio (n B ) are set to be larger than 1, and the value of the second ratio (n B ) is set to the value of the first ratio.
- FIG. 1 A fourth embodiment relating to the storage circuit 1 will be described.
- the description of the correspondence between the storage circuit 1 of FIG. 1 and the storage circuit 1A of FIG. 4 or the storage circuit 1B of FIG. 13 is supplemented. Since the storage circuit 1B of FIG. 13 is merely a storage circuit 1A to which an additional circuit 70 is added, the relationship between the storage circuits 1 and 1A will be described.
- the memory unit 10 is composed of the transistors M1 and M2.
- the voltage / current supply circuit 20 of FIG. 1 is mainly composed of transistors M23 and M24 in the storage circuit 1A of FIG. Further, when the optional additional circuit (additional circuit 70 in FIG. 13) described in the second or third embodiment is provided in the storage circuit 1, the additional circuit is also included in the components of the supply circuit 20.
- the value of the ratio ( ID3 : ID4 ), that is, the value of n, is set by the supply circuit 20 in cooperation with the transistors M3 and M4.
- the above-mentioned first ratio value (n A ) and second ratio value (n B ) are examples of ratio ( ID3 : ID4 ) values.
- a power supply circuit (not shown) that generates and outputs a power supply voltage VDD is also included in the components of the supply circuit 20. The same applies to the signal output circuit 30 and the program circuit 40.
- the storage circuit 1A of FIG. 4 is provided with a drain current control circuit for permitting or cutting off the supply of drain currents ( ID1 to ID4 ) to the transistors M1 to M4, and the drain current control thereof.
- the circuit includes transistors M5, M11 to M15 and M25, and a switch SW8.
- the signal output circuit 30 of FIG. 1 is mainly composed of transistors M21 and M22, switches SW1 to SW6, and inverters INV1 to INV4 in the storage circuit 1A of FIG.
- the program circuit 40 of FIG. 1 includes switches SW9 to SW12 in the storage circuit 1A of FIG.
- control circuit 60 of FIG. 4 is a circuit that controls the operation of the supply circuit 20, the signal output circuit 30, and the program circuit 40 (furthermore, a circuit that controls the operation of the drain current control circuit described above). ..
- control circuit 60 is a circuit that is also used as the circuits 20, 30 and 40 for realizing the read operation and the program operation as each part of the circuits 20, 30 and 40. be.
- the storage circuits 1, 1A or 1B shown in FIGS. 1, 4 or 13 are first non-volatile memories for storing one bit of data, but include a plurality of storage circuits 1, 1A or 1B as unit cells. It is also possible to configure a second non-volatile memory for storing data for a plurality of bits.
- a unit cell may be configured by a set of the memory unit 10 and the signal output circuit 30, and a third non-volatile memory provided with a plurality of the unit cells may be configured.
- the gate In the third non-volatile memory, the gate may be formed.
- the voltage generation unit 12, the supply circuit 20, and the program circuit 40 are shared among a plurality of unit cells. That is, for example, in the third non-volatile memory, a shared circuit including transistors M3 to M5, M13 to M15 and M23 to M25 shown in FIG. 4, and a set of switches SW7a, SW7b, SW8 and SW10 to SW13 is provided.
- One shared circuit is shared by a plurality of unit cells.
- the gate of the single transistor M3 in the shared circuit is connected to the gate of each transistor M2 in the plurality of unit cells, and the gate of the single transistor M4 in the shared circuit becomes the gate of each transistor M1 in the plurality of unit cells.
- the gate voltage VOTPG0 applied to the gate of the single transistor M3 is commonly supplied to the gate of each transistor M2 of the plurality of unit cells and the gate voltage VOTPG1 applied to the gate of the single transistor M4. Is commonly supplied to the gate of each transistor M1 of the plurality of unit cells.
- the transistors M11 and M12 and the switch SW9 are provided for each unit cell.
- the program circuit 40 in the third non-volatile memory injects hot carriers only into the transistor M2 of the unit cell to which "1" should be written among the plurality of unit cells.
- the number of bits of the stored data is arbitrary as long as it is 1 or more, and the memory unit 10 is provided for the number of bits of the stored data.
- ⁇ 6th Example A sixth embodiment relating to the storage circuit 1 will be described.
- the non-volatile memory according to the present disclosure can be incorporated into any circuit or device that realizes a predetermined functional operation.
- the circuit or device When a power supply voltage is supplied to a circuit or device in which the non-volatile memory is incorporated and the circuit or device is started, the circuit or device reads out the data stored in the non-volatile memory by a read operation. A predetermined functional operation is realized according to the read data.
- a non-volatile memory is incorporated in an amplifier circuit (not shown) that can change the amplification factor according to the trimming data, and one or more data stored in the non-volatile memory is supplied to the amplifier circuit as trimming data. It is possible to optimally adjust the amplification factor of the amplifier circuit.
- non-volatile memory can be incorporated into a semiconductor integrated circuit for various purposes such as a semiconductor integrated circuit for a DC / DC converter and a semiconductor integrated circuit for a motor driver.
- the amplifier circuit is an example of a circuit provided in these semiconductor integrated circuits.
- the types of FET (field effect transistors) channels shown in each embodiment are examples, so that the N-channel type FET is changed to a P-channel type FET, or the P-channel type FET is an N-channel.
- the configuration of the circuit containing the FET can be modified so that it is changed to a type FET.
- the above-mentioned arbitrary transistor may be any kind of transistor as long as no inconvenience occurs.
- any transistor described above as a MOSFET can be replaced with a junction FET, an IGBT (Insulated Gate Bipolar Transistor) or a bipolar transistor as long as no inconvenience occurs.
- Any transistor has a first electrode, a second electrode and a control electrode.
- the FET one of the first and second electrodes is a drain, the other is a source, and the control electrode is a gate.
- the IGBT one of the first and second electrodes is a collector, the other is an emitter, and the control electrode is a gate.
- a bipolar transistor that does not belong to an IGBT one of the first and second electrodes is a collector, the other is an emitter, and the control electrode is a base.
- the non-volatile memory according to the present disclosure includes a first transistor, a second transistor, a third transistor having a gate commonly connected to the gate of the second transistor, and a gate commonly connected to the gate of the first transistor.
- a fourth transistor having a And the read operation is performed in the lead current supply state in which the drain current of the fourth transistor is supplied by the supply circuit and the drain current larger than the drain current of the fourth transistor is supplied to the third transistor.
- the signal output circuit executes the signal associated with the first value or the signal associated with the second value based on the drain currents of the first and second transistors in the read operation. It is a configuration (first configuration) configured to output.
- the signal output circuit corresponds to the first value when the drain current of the second transistor is larger than the drain current of the first transistor in the read operation.
- a configuration configured to output a signal associated with the second value when the drain current of the first transistor is larger than the drain current of the second transistor so as to output the attached signal (second). 2) may be used.
- the non-volatile memory according to the second configuration it is possible to execute a program operation for increasing the gate threshold voltage of the second transistor by injecting a hot carrier into the second transistor, and the program operation is executed before the program operation.
- the drain current of the second transistor is larger than the drain current of the first transistor, and in the read operation executed after the program operation, the gate threshold of the second transistor due to the program operation.
- the drain current of the first transistor may be larger than the drain current of the second transistor (third configuration).
- the ratio of the drain current of the third transistor to the drain current of the fourth transistor and the drain of the first transistor in the read operation executed before the program operation, the ratio of the drain current of the third transistor to the drain current of the fourth transistor and the drain of the first transistor.
- the ratio of the drain current of the second transistor to the current matches, and the value of the latter ratio may be reduced to less than 1 in the read operation through the program operation (fourth configuration).
- the second and third transistors have the same structure as each other, and the first and fourth transistors have the same structure as each other, and the program operation. Before and after, the first and fourth transistors have the same gate threshold voltage as each other, and before the program operation, the second and third transistors have the same gate threshold voltage as each other (fifth configuration). There may be.
- the non-volatile memory can be operated in the first mode or the second mode, and the supply circuit is the first before the program operation.
- the ratio of the drain current of the third transistor to the drain current of the fourth transistor is set to the first ratio
- the drain of the fourth transistor is set.
- the ratio of the drain current of the third transistor to the current is set to the second ratio, the value of the first ratio and the value of the second ratio are both larger than 1, and the value of the second ratio is the above.
- the configuration may be smaller than the value of the first ratio (sixth configuration).
- the non-volatile mode can be operated in the first mode or the second mode, and the supply circuit is the first after the program operation.
- the lead current supply state is realized, and in the read operation of the second mode, the drain current is supplied only to the fourth transistor among the third and fourth transistors.
- a predetermined voltage may be supplied to the gate of the second transistor, and the predetermined voltage may be higher than the gate voltage of the second transistor in the lead current supply state (seventh configuration). ..
- the non-volatile mode can be operated in the first mode or the second mode, and the supply circuit is the first after the program operation.
- the ratio of the drain current of the third transistor to the drain current of the fourth transistor is set to the first ratio
- the drain of the fourth transistor is set.
- the ratio of the drain current of the third transistor to the current is set to the second ratio, the value of the first ratio and the value of the second ratio are both larger than 1, and the value of the second ratio is the above.
- the configuration may be larger than the value of the first ratio (eighth configuration).
- the other non-volatile memory according to the present disclosure is commonly connected to the first transistor, the second transistor, the third transistor having a gate commonly connected to the gate of the second transistor, and the gate of the first transistor.
- a fourth transistor having a gate, a line to which each source of the first to fourth transistors is commonly connected, a supply circuit configured to be able to supply a drain current to the third and fourth transistors, and a signal output.
- the supply circuit comprises a circuit, and the drain current of the fourth transistor is supplied by the supply circuit and a drain current larger than the drain current of the fourth transistor is supplied to the third transistor.
- the signal output circuit is configured to be operable, and when the read operation is executed, the signal output circuit is associated with a first value based on the drain currents of the first and second transistors in the read operation. It is a configuration (nineth configuration) configured to be able to output a signal or a signal associated with a second value.
- Storage circuit 10 Memory unit 20 Read voltage supply circuit 30 Signal output circuit 40 Program circuit
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Abstract
Description
記憶回路1に関わる第1実施例を説明する。図4に第1実施例に係る記憶回路1Aの構成を示す。記憶回路1Aは図1の記憶回路1の例である。記憶回路1Aは、トランジスタM1~M5、M11~M15及びM21~M25と、スイッチSW1~SW6、SW7a、SW7b、SW8~SW13と、インバータINV1~INV4と、制御回路60と、を備える。記憶回路1Aは半導体集積回路にて構成されて良い。制御回路60はスイッチSW1~SW6、SW7a、SW7b、SW8~SW13のオン/オフを制御できる他、トランジスタM23~M25のゲート電圧も制御できる。
トランジスタM1a、M1b、M4a及びM4bの夫々は1つの第1単位MOSFETにて構成され、トランジスタM2及びM3の夫々は2つの第1単位MOSFETの並列回路にて構成される。第1単位MOSFETのゲート幅Wは“WA”の長さを持つ。
トランジスタM11及びM14の夫々は1つの第2単位MOSFETにて構成され、第2単位MOSFETのゲート幅Wは“WA”の長さを持つ。第2単位MOSFETは第1単位MOSFETと同じ構造を持つMOSFETであって良い。但し、第1及び第2単位MOSFET間でゲート長Lが互いに異なっていても良い。
トランジスタM12及びM13の夫々は2つの第3単位MOSFETの並列回路にて構成され、第3単位MOSFETのゲート幅Wは“WB”の長さを持つ。
トランジスタM24は1つの第4単位MOSFETにて構成され、第4単位MOSFETのゲート幅Wは“WA”の長さを持つ。
トランジスタM23は2つの第5単位MOSFETの並列回路にて構成され、トランジスタM25は3つの第5単位MOSFETの並列回路にて構成される。第5単位MOSFETのゲート幅Wは“WB”の長さを持つ。
以下、説明の便宜上、プログラム動作前に実行されるリード動作を特にリード動作RDINIと称することがあり、プログラム動作後に実行されるリード動作をリード動作RDPRGと称することがある。単にリード動作と述べた場合、それは、プログラム動作の実行前又は実行後のリード動作を指す。尚、後の実施例においてマージン処理が実施される検査モードが説明されるが、本実施例(第1実施例)ではマージン処理の存在を無視し、マージン処理が実施されない通常モードでのリード動作を説明する。
図11は、リード動作RDPRG(即ちプログラム動作の実行後に行われるリード動作)のタイミングチャートである。図11において、破線波形PRGV1はリード動作RDPRGにおける電圧V1の波形を表し、実線波形PRGV2はリード動作RDPRGにおける電圧V2の波形を表す。プリチャージ期間からリード期間の前半にかけて波形PRGV1及びPRGV2は互いに重なり合っている。
このように、リード動作(リード期間)においてドレイン電流ID2の方がドレイン電流ID1よりも大きい状態は、メモリ部10にて“0”のデータが記憶されている状態に相当し、図7のリード動作RDINIでは、ドレイン電流ID2の方がドレイン電流ID1よりも大きくなるため“0”のデータに対応するリード確定信号DOUT(ここではローレベルの信号DOUT)が出力される。逆に、リード動作(リード期間)においてドレイン電流ID1の方がドレイン電流ID2よりも大きい状態は、メモリ部10にて“1”のデータが記憶されている状態に相当し、図11のリード動作RDPRGでは、ドレイン電流ID1の方がドレイン電流ID2よりも大きくなるため“1”のデータに対応するリード確定信号DOUT(ここではハイレベルの信号DOUT)が出力される。
記憶回路1に関わる第2実施例を説明する。図13に第2実施例に係る記憶回路1Bの構成を示す。記憶回路1Bは図1の記憶回路1の例である。記憶回路1Bは、第1実施例に係る記憶回路1Aに対して追加回路(分流回路)70を付加したものである。記憶回路1Bに設けられたトランジスタM32及びM33は夫々図4のスイッチSW12及びSW13に相当し、制御回路60はスイッチSW32のゲートに対してゲート信号MARGを供給する。これらの点を除き、図13の記憶回路1Bの構成は図4の記憶回路1Aの構成と同じである。
記憶回路1に関わる第3実施例を説明する。第2実施例で述べたように、記憶回路1を含む不揮発性メモリは、通常モード及び検査モードを含む複数の動作モードの何れかで動作することができ、通常モード及び検査モードに関して第2実施例で述べた事項は第3実施例にも適用される。第3実施例では、検査モードで実行可能な第2マージン処理を説明する。
記憶回路1に関わる第4実施例を説明する。第4実施例では、図1の記憶回路1と図4の記憶回路1A又は図13の記憶回路1Bとの対応関係について説明を補足する。図13の記憶回路1Bは記憶回路1Aに追加回路70を付加したものに過ぎないので、記憶回路1及び1A間の関係を説明する。まず、トランジスタM1及びM2によりメモリ部10が構成されることは、記憶回路1及び1A間で共通である。
記憶回路1に関わる第5実施例を説明する。図1、図4又は図13に示される記憶回路1、1A又は1Bは1ビット分のデータを記憶する第1の不揮発性メモリであるが、記憶回路1、1A又は1Bを単位セルとして複数備えて複数ビット分のデータを記憶する第2の不揮発性メモリを構成することもできる。
記憶回路1に関わる第6実施例を説明する。本開示に係る不揮発性メモリを、所定の機能動作を実現する任意の回路又は装置に組み込むことができる。
本開示の実施形態は、特許請求の範囲に示された技術的思想の範囲内において、適宜、種々の変更が可能である。以上の実施形態は、あくまでも、本開示の実施形態の例であって、本開示ないし各構成要件の用語の意義は、以上の実施形態に記載されたものに制限されるものではない。上述の説明文中に示した具体的な数値は、単なる例示であって、当然の如く、それらを様々な数値に変更することができる。
上述の実施形態にて具体化された技術的思想について考察する。
10 メモリ部
20 リード用電圧供給回路
30 信号出力回路
40 プログラム回路
Claims (9)
- 第1トランジスタと、
第2トランジスタと、
前記第2トランジスタのゲートに共通接続されたゲートを有する第3トランジスタと、
前記第1トランジスタのゲートに共通接続されたゲートを有する第4トランジスタと、
前記第1~第4トランジスタの各ソースが共通接続されるラインと、
前記第3及び第4トランジスタにドレイン電流を供給可能に構成される供給回路と、
信号出力回路と、を備え、
前記供給回路により前記第4トランジスタのドレイン電流が供給され且つ前記第4トランジスタのドレイン電流よりも大きなドレイン電流が前記第3トランジスタに供給されるリード用電流供給状態において、リード動作を実行し、
前記信号出力回路は、前記リード動作において、前記第1及び第2トランジスタの各ドレイン電流に基づき、第1の値に対応付けられた信号又は第2の値に対応付けられた信号を出力するよう構成される
、不揮発性メモリ。 - 前記信号出力回路は、前記リード動作において、前記第2トランジスタのドレイン電流が前記第1トランジスタのドレイン電流よりも大きいとき、前記第1の値に対応付けられた信号を出力するよう、前記第1トランジスタのドレイン電流が前記第2トランジスタのドレイン電流よりも大きいとき、前記第2の値に対応付けられた信号を出力するよう構成される
、請求項1に記載の不揮発性メモリ。 - 前記第2トランジスタにホットキャリアを注入することで前記第2トランジスタのゲート閾電圧を増大させるプログラム動作を実行可能であり、
前記プログラム動作前に実行される前記リード動作においては、前記第2トランジスタのドレイン電流が前記第1トランジスタのドレイン電流よりも大きく、
前記プログラム動作後に実行される前記リード動作においては、前記プログラム動作による前記第2トランジスタのゲート閾電圧の増大に伴い、前記第1トランジスタのドレイン電流が前記第2トランジスタのドレイン電流よりも大きい
、請求項2に記載の不揮発性メモリ。 - 前記プログラム動作前に実行される前記リード動作において、前記第4トランジスタのドレイン電流に対する前記第3トランジスタのドレイン電流の比と、前記第1トランジスタのドレイン電流に対する前記第2トランジスタのドレイン電流の比と、が一致し、後者の比の値は前記プログラム動作を経た前記リード動作において1未満に低下する
、請求項3に記載の不揮発性メモリ。 - 前記第2及び第3トランジスタは互いに同じ構造を有し、且つ、前記第1及び第4トランジスタは互いに同じ構造を有し、
前記プログラム動作前及び後において、前記第1及び第4トランジスタは互いに同じゲート閾電圧を持ち、
前記プログラム動作前において、前記第2及び第3トランジスタは互いに同じゲート閾電圧を持つ
、請求項3又は4に記載の不揮発性メモリ。 - 当該不揮発性メモリは、第1モード又は第2モードで動作可能であり、
前記供給回路は、前記プログラム動作前において、
前記第1モードの前記リード動作では、前記第4トランジスタのドレイン電流に対する前記第3トランジスタのドレイン電流の比を第1の比に設定し、
前記第2モードの前記リード動作では、前記第4トランジスタのドレイン電流に対する前記第3トランジスタのドレイン電流の比を第2の比に設定し、
前記第1の比の値及び前記第2の比の値は共に1より大きく、
前記第2の比の値は前記第1の比の値よりも小さい
、請求項3~5の何れかに記載の不揮発性メモリ。 - 当該不揮発性モードは、第1モード又は第2モードで動作可能であり、
前記供給回路は、前記プログラム動作後において、
前記第1モードの前記リード動作では、前記リード用電流供給状態を実現し、
前記第2モードの前記リード動作では、前記第3及び第4トランジスタの内、前記第4トランジスタにのみドレイン電流を供給しつつ、前記第2トランジスタのゲートに対し所定電圧を供給し、
前記所定電圧は、前記リード用電流供給状態での前記第2トランジスタのゲート電圧よりも高い
、請求項3~5の何れかに記載の不揮発性メモリ。 - 当該不揮発性モードは、第1モード又は第2モードで動作可能であり、
前記供給回路は、前記プログラム動作後において、
前記第1モードの前記リード動作では、前記第4トランジスタのドレイン電流に対する前記第3トランジスタのドレイン電流の比を第1の比に設定し、
前記第2モードの前記リード動作では、前記第4トランジスタのドレイン電流に対する前記第3トランジスタのドレイン電流の比を第2の比に設定し、
前記第1の比の値及び前記第2の比の値は共に1より大きく、
前記第2の比の値は前記第1の比の値よりも大きい
、請求項3~5の何れかに記載の不揮発性メモリ。 - 第1トランジスタと、
第2トランジスタと、
前記第2トランジスタのゲートに共通接続されたゲートを有する第3トランジスタと、
前記第1トランジスタのゲートに共通接続されたゲートを有する第4トランジスタと、
前記第1~第4トランジスタの各ソースが共通接続されるラインと、
前記第3及び第4トランジスタにドレイン電流を供給可能に構成される供給回路と、
信号出力回路と、を備え、
前記供給回路により前記第4トランジスタのドレイン電流が供給され且つ前記第4トランジスタのドレイン電流よりも大きなドレイン電流が前記第3トランジスタに供給されるリード用電流供給状態において、リード動作を実行可能に構成され、
前記信号出力回路は、前記リード動作が実行される場合、当該リード動作において、前記第1及び第2トランジスタの各ドレイン電流に基づき、第1の値に対応付けられた信号又は第2の値に対応付けられた信号を出力可能に構成される
、不揮発性メモリ。
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JP2008210467A (ja) * | 2007-02-27 | 2008-09-11 | Nec Electronics Corp | 不揮発性半導体メモリ及びそのテスト方法 |
JP2010211894A (ja) * | 2009-03-12 | 2010-09-24 | Renesas Electronics Corp | 差動センスアンプ |
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JPWO2022075002A1 (ja) | 2022-04-14 |
DE112021004209T5 (de) | 2023-06-01 |
CN116324997A (zh) | 2023-06-23 |
US20240005981A1 (en) | 2024-01-04 |
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