WO2020090135A1

WO2020090135A1 - Vibration device, vibration method, and screen printing device

Info

Publication number: WO2020090135A1
Application number: PCT/JP2019/014741
Authority: WO
Inventors: 昌人古畑; 小倉　順一; 祥世渡邊
Original assignee: マイクロ・テック株式会社
Priority date: 2018-10-31
Filing date: 2019-04-03
Publication date: 2020-05-07
Also published as: CN111386156A; TWI714114B; JP6864782B2; CN111386198A; KR102406310B1; JP2022042021A; KR20210134084A; KR102345276B1; JPWO2020090135A1; JPWO2020090404A1; KR102345274B1; KR20200072528A; TW202017758A; CN111386156B; KR20200072527A; WO2020090404A1; KR20200072529A; JP6989984B2; CN111405984B; TW202017757A

Abstract

This vibration device (100) is provided with: a printing implement (260); a vibration unit (40) that causes a plurality of outward facing sides of the printing implement (260) to vibrate; and a controller (40) that controls the vibration of the vibration unit (40). The vibration unit (40) generates traveling waves at the same time, the same amplitude, the same wavelength, and the same frequency at end parts of the printing implement (260), causes the end parts of the printing implement (260) to vibrate up and down with traveling waves from outer sides of the printing implement (260), and causes the printing implement (260) to vibrate by means of a stationary wave.

Description

Vibration device, vibration method, and screen printing device

The present invention relates to a vibration device that vibrates a printing tool such as a squeegee, and a screen printing device.

Conventionally, there is a screen printing device that vibrates a squeegee and prints on a work.

JP-A-63-199643 JP, 2005-238723, A JP, 2010-221409, A

Even if the squeegee is vibrated in the screen printing device, there is a possibility that the amount of paste that goes into the holes will vary during the hole filling printing, and the holes will not be filled with a certain amount of paste.

An object of the embodiment of the present invention is to provide a vibration device in which the amount of paste entering a hole does not vary during hole filling printing.

The vibration device of the present invention is
Printing tools,
A vibration unit for vibrating a plurality of opposite sides of the printing tool,
And a controller for controlling the vibration of the vibration unit.

According to the present invention, the vibration unit gives vibrations from a plurality of opposite sides of the printing tool, so that the printing tool vibrates stably.

FIG. 3 is a perspective view of the vibration device 100 according to the first embodiment. FIG. 3 is a cross-sectional view taken along the line AA of the vibration device 100 of FIG. 1 according to the first embodiment. 4 is an explanatory diagram of a vibration method according to the first embodiment. FIG. It is a figure which shows the structure of a vibration measurement. FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to air pressure of 0.2 MPa. FIG. 6 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa. FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to air pressure of 0.4 MPa. FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa. It is a distribution diagram of vibration in the horizontal direction. It is a figure which shows the comparative example of one-sided vibration. It is a distribution diagram of one-sided vibration. It is a figure which shows the comparative example of a lateral bilateral vibration. It is a distribution diagram of the up-and-down vibration of the lateral bilateral vibration. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a modified example of the vibration device 100 according to the first embodiment. FIG. 7 is a diagram showing a screen printing device 200 according to a second embodiment. It is a figure which shows the shearing device 300 of Embodiment 3. It is a figure which shows the punching apparatus 400 of Embodiment 4. It is a figure which shows the vibration transfer apparatus 500 of Embodiment 5. It is explanatory drawing of the vibration of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer apparatus 500 of Embodiment 5. It is a figure which shows the distributor 47 of Embodiment 6. It is a figure which shows the plate 20 and vibration unit 40 of Embodiment 7. It is a figure which shows the planar shape of the plate 20 of Embodiment 7. FIG. 19 is a diagram showing a cross section of the plate 20 of the seventh embodiment taken along the line AA of FIG. 1. FIG. 27 is a three-sided view of a printing unit 600 of the screen printing apparatus according to the ninth embodiment. FIG. 20 is a perspective view of the vibration device 100 according to the ninth embodiment. FIG. 16 is a front view of a printing tool 260 according to a ninth embodiment. It is a side view of the printing tool 260 of Embodiment 9. FIG. 16 is a plan view of a printing tool 260 according to a ninth embodiment. It is a side view of the printing tool 260 of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a side view of the printing tool 260 of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. FIG. 14 is a five-sided view of a printing tool 260 according to a ninth embodiment. FIG. 16 is a five-sided view of a printing tool 260 according to the tenth embodiment. FIG. 16 is a three-sided view of a printing tool 260 according to the tenth embodiment. FIG. 16 is a three-sided view of a printing tool 260 according to the tenth embodiment. FIG. 16 is a five-sided view of a printing tool 260 according to the tenth embodiment. It is a figure which shows the modification of the printing tool 260 of

Embodiment

9,10.

Embodiment 1.
FIG. 1 is a perspective view of the vibration device 100 according to the first embodiment.
2 is a cross-sectional view of the vibration device 100 of FIG. 1 according to the first embodiment, taken along the line AA.
In FIG. 1, X indicates the front-back direction.
1 and 2, Y indicates the left-right direction and Z indicates the up-down direction.

<<< Configuration of Vibration Device 100 >>>
The vibration device 100 includes a base 10, a plate 20, a vibration unit 40, and a controller 80.

<<< Description of Base 10 >>
The base 10 has a box shape with an open top.
The base 10 has a top surface 11, a bottom surface 12 and a wall 13.
The base 10 has a space 14 in the center.
The upper surface 11 is constituted by the top surface of the wall 13, and has a rectangular shape having an opening in the center.
The bottom surface 12 has a rectangular shape.
The wall 13 is a side wall of the base 10 which is erected from the periphery of the bottom surface 12.
The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<< Description of plate 20 >>
The plate 20 is preferably made of a material that allows sound waves to easily pass through, and is preferably made of metal.
The plate 20 is preferably made of aluminum, titanium, or stainless steel.
Further, aluminum and titanium are preferable, and aluminum is the best.
The plate 20 is preferably rectangular, preferably square.
The plate 20 has a front surface 21, a back surface 22, and four sides 23.
The front surface 21 and the back surface 22 are parallel rectangular flat surfaces having the same shape.
The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20.
The side 23 is a plane orthogonal to the front surface 21 and the back surface 22 of the plate 20.
The plate 20 has a plurality of screw holes 24 on the periphery.
Eight screw holes 24 are provided in the corner of the plate 20 and in the center of each side.
The plate 20 is firmly fixed to the base 10 by screws 25 inserted in the screw holes 24.
Hereinafter, the position of the screw hole 24 will be referred to as a fixing point.
The plate 20 is fixed to the base 10 at fixing points provided around the plate 20.

<<< Description of the vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the plate 20 at the same frequency.
The vibration unit 40 vertically vibrates the opposite sides of the plate 20.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vertically vibrates the outside of the fixed portion where the screw hole 24 is located.
The two

vibrators

41 and 42 are vibrators having the same specifications.
The two

vibrators

41 and 42 are vibrators driven by air pressure.

The following vibrators can be used as vibrators driven by air pressure.
(1) Turbine vibrator (2) Roller vibrator (3) Ball vibrator (4) Piston vibrator

The vibrators (1), (2), and (3) are low in noise and can operate at high speed.
In particular, a turbine vibrator that is stable in operation is optimal.
The piston vibrator has a problem that it is noisy and operates slowly.

The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 is a metal fitting bent in an L shape.
The distributor 47 has a horizontal portion 48 and a vertical portion 49.
The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42.
The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 are opposite to each other.
In FIG. 2, the vibrator 41 rotates counterclockwise and the vibrator 42 rotates clockwise.
The vertical portion 49 has a vertical width equal to or smaller than the vertical width of the side 23 and is fixed to the side 23.

The distributor 47 has a front-rear width larger than the front-rear width of the top surfaces of the vibrator 41 and the vibrator 42.
The width of the distributor 47 in the front-rear direction is preferably more than 2 times and less than 10 times the width in the front-rear direction of the top surfaces of the vibrator 41 and the vibrator 42, and preferably 5 times.
The distributor 47 has a front-rear width smaller than ½ and larger than ⅛ of the width of the plate 20 in the front-rear direction, preferably ⅕.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to a wide range of the side 23 of the plate 20.

<<< Description of Controller 80 >>
The controller 80 controls the vibration of the vibration unit 40.
The controller 80 vibrates the vibrator at a frequency of 10 Hz or higher and 800 Hz or lower.
The controller 80 vibrates a plurality of vibrators at the same frequency.
The controller 80 has an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

The air compressor 81 generates compressed air.
The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow.
The air pipe 82 branches in a Y shape in the middle and is connected to the vibrator 41 and the vibrator 42.

The regulator 83 is a control device that controls the pressure of compressed air.
The regulator 83 determines the vibration frequencies of the vibrator 41 and the vibrator 42 by controlling the pressure of the compressed air.

The processor 84 has a central processing unit and a program.
The processor 84 can be realized by an integrated circuit, a circuit board, or the like.
The processor 84 controls the operation of the vibration device 100.
The processor 84 is connected to the air compressor 81 and controls the on / off operation and operation time of the air compressor 81.

<<< Description of vibration method >>>
A vibration method of the vibration device 100 will be described.

<Initial setting step>
The operator turns on the power switch of the vibration device 100 while the periphery of the plate 20 is fixed to the base 10 by the screw 25. The operator detects the pressure of the compressed air and the vibration frequency of the vibrator 41 and the vibrator 42. It has a correspondence table of.
The worker refers to the correspondence table and sets the pressure of the compressed air corresponding to the vibration frequency of the vibrator 41 and the vibrator 42 by the regulator 83.
The worker sets a pressure corresponding to any audible frequency range of 10 Hz to 800 Hz.

<Progressive wave generation step>
The air pipe 82 branches in a Y shape and is connected to the vibrator 41 and the vibrator 42, so that the same pressure of air is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate vertically at the same frequency.
The vibration frequency of the vibrator 41 and the vibrator 42 is preferably an audible frequency.
The vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20, and apply a sinusoidal traveling wave 60 to the left and right sides 23 of the plate 20.
The vibrator 41 and the vibrator 42 simultaneously generate the traveling wave 60 with the same amplitude, the same wavelength, and the same frequency.

<Standing wave generation step>
When the traveling waves 60 are simultaneously generated with the same amplitude, the same wavelength, and the same frequency in the opposite directions, the traveling waves 60 from the left and right overlap each other on the plate 20, and a standing wave 70 is generated.
A standing wave is a wave that does not move in position over time.
The plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70.

<Synchronization step>
Even if vibration is started in an asynchronous state where the phases of the vibrator 41 and the vibrator 42 are out of phase, the phases of the vibrator 41 and the vibrator 42 coincide with each other in a short time due to the synchronization phenomenon, and the vibration of the vibrator 41 and the vibrator 42 is It becomes a synchronized state and immediately shifts to standing wave oscillation.

<Vertical vibration step>
Hereinafter, the vertical vibration due to the vibration method will be described with reference to FIG.
FIG. 3 is a schematic diagram of vertical vibration viewed from the front-back direction of the center of the plate 20 in the left-right direction.
In FIG. 3, the fulcrum 26 is the center of the plate 20 in the vertical direction and the center of the screw hole 24.
(A) When a downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, an upward force is generated in the center of the plate 20 via the fulcrum 26.
(B) When a larger downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 rises.
(C) When the downward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 moves down.
(D) When an upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, a downward force is generated at the center of the plate 20 via the fulcrum 26.
(E) When a larger upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 descends.
(F) When the upward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 rises.

<Flapping phenomenon>
By repeating the operations of (a) to (f) with (a) to (f) as one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequency of the vibrator 41 and the vibrator 42.
Since the plate 20 vibrates like flapping on the left and right between the fulcrums 26, this phenomenon is hereinafter referred to as a flapping phenomenon.
The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the fulcrums 26 by supplying air to vibrators fixed to the left and right sides of the plate 20.
In order to easily cause the flapping phenomenon, it is desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 be on a straight line. That is, it is desirable that the plurality of vibrators be present on the extension lines of the lines connecting the opposite fixing points on the opposite sides of the plate 20.
Even if the fixing positions of the vibrator 41 and the vibrator 42 are not aligned with the positions of the two screw holes 24 on a straight line, if the plate 20 is securely fixed to the base 10, the flapping phenomenon occurs. ..
Since the flapping phenomenon may be hindered if the thickness of the wall 13 increases, the thickness of the wall 13 is preferably thin, and the opening of the space 14 is preferably wide. The thickness of the wall 13 is preferably larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<< Specific example >>>
Hereinafter, a specific example will be described.
As the plate 20, a square aluminum plate having a side of about 0.5 m is used.
The sound velocity V of aluminum is 6320 [m / s]. However, the temperature of aluminum is kept constant and the change in sound velocity due to temperature is not considered.
As the vibrator 41 and the vibrator 42, an air vibrator manufactured by Exen Co., Ltd. having the following specifications is used.
An air vibrator having a vibration frequency f of 119 Hz or more and 414 Hz or less when the air pressure is 0.2 or more and 0.6 MPa or less is desirable. Alternatively, an air vibrator having a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less is desirable.

Here, it is assumed that an air vibrator having a vibration frequency f having the following value when the air pressure is as follows is used.
Vibration frequency f when air pressure is 0.5 MPa: 216.5 Hz
Vibration frequency f when air pressure is 0.4 MPa: 206.6 Hz
Vibration frequency f when air pressure is 0.3 MPa: 177.3 Hz
Vibration frequency f when air pressure is 0.2 MPa: 133.0 Hz

The wavelength can be calculated by the following formula.
Wavelength λ [m] = sound velocity V [m / s] / vibration frequency f [Hz]
The wavelength of the traveling wave 60 is calculated as follows.
When the air pressure is 0.5 MPa:
Wavelength λ [m] = 6320 [m / s] /216.5 [Hz] = 29.19 m
When the air pressure is 0.4 MPa:
Wavelength λ [m] = 6320 [m / s] /206.6 [Hz] = 30.59 m
When the air pressure is 0.3 MPa:
Wavelength λ [m] = 6320 [m / s] /177.3 [Hz] = 35.65 m
When the air pressure is 0.2 MPa:
Wavelength λ [m] = 6320 [m / s] /133.0 [Hz] = 47.52 m

The traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following equation.
R (y, t) = A * sin2π ((t / T)-(y / λ))
L (y, t) = A * sin2π ((t / T) + (y / λ))
y [m]: location of plate in Y direction t [s]: time R (y, t): location y [m], displacement [m] of traveling wave 60 in Z direction at time t [s].
L (y, t): Displacement [m] of traveling wave 60 in the Z direction at location y [m] and time t [s]
A: Amplitude [m] of traveling wave 60
T: Period [s] of traveling wave 60
λ: Wavelength of traveling wave 60 [m]

The standing wave 70 generated by superimposing the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following equation representing a sine standing wave.
z (y, t)
= R (y, t) + L (y, t)
= 2A * sin (2π (t / T)) * cos (2π (y / λ))
y [m]: location of plate in Y direction t [s]: time z (y, t): location y [m], displacement [m] of standing wave 70 in Z direction at time t [s].
A: Amplitude [m] of traveling wave 60
T: Period [s] of traveling wave 60
λ: Wavelength of traveling wave 60 [m]

cos (2π (y / λ)) indicates the amplitude of the standing wave 70.
A place where the amplitude of the standing wave 70 is 0, that is, a place y where cos (2π (y / λ)) is 0 is called a “node”.
A place where the amplitude of the standing wave 70 is maximum, that is, a place y where the absolute value of cos (2π (y / λ)) is 1 is called “antinode”.

In order to vibrate the plate 20 up and down, it is sufficient that no node of the standing wave is generated at any position y in the left-right direction between the fulcrums 26.
The node of the standing wave is generated for each half wavelength. Therefore, if the distance between the fulcrums 26 is less than the half wavelength of the standing wave, the node of the standing wave should not exist at any position y in the left-right direction of the plate 20. You can
If the position of the “node” of the standing wave 70 is set as a fixed portion and the fixed portion is held (screwed), the “node” becomes a fulcrum of flapping.

If the distance between the fulcrums 26 is larger than the half wavelength of the standing wave, a node will be generated in the plate 20.
Therefore, the distance between the right and left fixed portions of the plate 20 must be less than the following length.
Half wavelength when air pressure is 0.5 MPa: wavelength λ [m] /2=14.56 m
Half wavelength when air pressure is 0.4 MPa: wavelength λ [m] / 2 = 15.29 m
Half wavelength when air pressure is 0.3 MPa: wavelength λ [m] /2=17.82 m
Half wavelength when air pressure is 0.2 MPa: wavelength λ [m] /2=23.766 m
As described above, the air pressure of the vibrator 41 and the vibrator 42 determines the frequency and the wavelength of the standing wave, and the maximum length of the plate 20.

<<< vibration measurement result >>>
The vibration of the plate 20 was measured using a square aluminum plate having a side of about 0.5 m as the plate 20.
As shown in FIG. 4, the base 10 was removed from the vibration device 100 of FIG. 1, the plate 20 was placed on an air mat, the periphery of the plate 20 was made free, the plate 20 was vibrated, and the amplitude of vibration was measured.

5 to 8 are diagrams showing measurement results of vertical vibrations at 49 points in the lower half region of the plate 20.
5 to 8 show the displacement in the Z direction (upward displacement) in the case of FIG. 3B, where the displacement in the Z direction when the plate 20 is a plane is 0.
The vibrations in the upper half region of the plate 20 shown in FIGS. 5 to 8 are not measured because it can be considered that they vibrate symmetrically with the lower half region of the plate 20.
FIG. 5 is a distribution diagram of vertical vibration of the plate 20 due to air pressure of 0.2 MPa.
FIG. 6 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa.
FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to air pressure of 0.4 MPa.
FIG. 8 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa.

Looking at the first line in FIG. 5, the amplitude of vertical vibration is 14.8 μm> 12.6 μm> 9.60 μm> 7.68 μm <8.00 μm <10.5 μm <15.0 μm, and the plate 20 The amplitude of the vibration is larger at the end than at the center. That is, vibration unevenness like a node occurs in the central portion of the plate 20.
It is considered that the reason is that the air pressure of 0.2 MPa is so weak that the vibrator 41 and the vibrator 42 cannot be stably vibrated.
Looking at the first line of FIG. 6, the amplitude of vertical vibration is 5.28 μm <9.53 μm <12.2 μm <13.2 μm> 13.1 μm> 11.0 μm> 8.40 μm, and the plate 20 The vibration amplitude is larger in the central part than in the end part. That is, it is considered that the belly is generated in the central portion of the plate 20.
In the cases of FIGS. 7 and 8 as well, the central portion of the plate 20 has a larger vibration amplitude than the end portions. That is, it is considered that the belly is generated in the central portion of the plate 20.
Therefore, with the air pressure of 0.2 MPa, the plate 20 cannot be accurately vibrated in the vertical direction.
On the other hand, with an air pressure of 0.3 MPa or more and 0.5 MPa or less, the plate 20 can be accurately vibrated in the vertical direction.

The measurement result of the vibration in the front-rear and left-right directions will be described with reference to FIG.
FIG. 9 is a table showing measurement results of horizontal vibrations at measurement points 1 to 12 on two sides of the plate 20 in FIGS. 5 to 8.
At an air pressure of 0.2 MPa,

measurement points

1 and 2 show values of more than 2 micrometers.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, all points show values of less than 2 micrometers.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of vibration in the front-rear and left-right directions is less than about 10% or less than 15% of the amplitude of vibration in the up-down direction, and it is considered that there is no horizontal vibration. be able to.

The above measurement results are measurement results when the periphery of the plate 20 is free and the plate 20 is vibrated.
As shown in FIG. 1, since the periphery of the plate 20 of the vibration device 100 is fixed to the base 10 by the screw 25, the upper and lower vibrations are actually limited around the plate 20 (particularly the screw hole 24 portion). Has been done.
When the plate 20 is vibrated with the periphery of the plate 20 free, the plate 20 vibrates up and down with the center as an antinode. Therefore, even when the periphery of the plate 20 is fixed at a fixed position and the plate 20 is vibrated, the plate 20 tries to vibrate vertically with the center as an antinode. As a result, as shown in FIG. 3, it can be considered that a flapping phenomenon occurs with the fulcrum 26 as the center of flapping.
When the periphery of the plate 20 is fixed to the base 10 and the plate 20 is vibrated, the vibration in the lateral direction is further reduced as compared with the case where the periphery of the plate 20 is free and the plate 20 is vibrated. Can be considered.
Further, looking at the above measurement results, if the distance between the fixed points in the left-right direction of the plate 20 is smaller than a half wavelength, the fixed points serve as flapping fulcrums even if the "nodes" of the standing wave 70 are not fixed. Can be thought of as
For example, the half-wavelength is 15 m when the air pressure is 0.4 MPa, but no “node” appears even when the distance between the left and right fixed portions of the plate 20 is about 0.5 m.
As a result, even when the distance between the fixed portions is 10 m, 5 m, or 1 m, it can be considered that the fixed portion serves as the fulcrum of flapping.

<<< Description of Comparative Example >>>
<One-sided vibration>
FIG. 10 shows the configuration of FIG. 4 with the vibrator 42 and the distributor 47 removed.
The plate 20 vibrates only by the vibrator 41 on one side.
The traveling wave 60 generated from the vibrator 41 on one side 23 of the plate 20 is reflected on the other side 23 to generate a reflected wave.
The traveling wave 60 and the reflected wave overlap with each other to form a standing wave.
In the configuration of FIG. 10, as shown in FIG. 11, it was confirmed that vibration unevenness like a node occurs on the right side of the center of the plate 20.
Further, as shown in FIG. 11, at the above-mentioned 12 points, there were locations where the amplitude of horizontal vibration exceeded 9 micrometers. It is considered that the reason is that elliptical vibration occurs in the plate 20.
Therefore, when vibrating the plate 20 from one side, the plate 20 cannot be vibrated accurately.

<Horizontal vibration on both sides>
In FIG. 12, the fixing directions of the vibrator 41 and the vibrator 42 are rotated by 90 degrees from the configuration of FIG. 4 and fixed so that the rotating directions of the vibrator 41 and the vibrator 42 are opposite to each other.
With the configuration of FIG. 12, as shown in FIG. 13, it was confirmed that vibration unevenness like a node occurs in the central portion of the plate 20.
Therefore, if the vibrator 41 and the vibrator 42 are turned sideways while the rotation directions thereof are opposite to each other, the plate 20 cannot be accurately vibrated.
Similarly, it is considered that the plate 20 cannot be accurately vibrated even when the vibrator 41 and the vibrator 42 are set in the same rotation direction so as to be laterally oriented.

<Horizontal one-sided vibration>
Although not shown, it was confirmed from the configuration of FIG. 12 that even when the vibrator 42 and the distributor 47 are removed, vibration unevenness like nodes occurs in the central portion of the plate 20.
Therefore, in the case of lateral one-sided vibration, the plate 20 cannot be accurately vibrated.

<<< Summary >>>
In the vibration device 100 of the present embodiment, the traveling wave 60 is simultaneously generated from the left and right of the plate 20 with the same amplitude, the same wavelength and the same frequency by the vibrator 41 and the vibrator 42 which are audible frequency vibration sources. As a result, in the plate 20, a standing wave is generated by superposition of traveling waves in opposite directions.

In the vibration generation process in the vertical direction of the vibration device 100 according to the present embodiment, the traveling wave 60 is simultaneously generated from the left and right of the audible frequency vibration source on the plate 20 at the same frequency on the plate 20. The plate 20 vibrates with a standing wave, but vibrates in the vertical direction only due to the vibrating action of the standing wave. And, it does not vibrate in the front, rear, left and right directions. The vibration device 100 uses this vertical vibration only.

The vibration device 100 can change the audible range frequency at the time of vibration by the controller 80. The audible range frequency is in the range of 10 Hz to 20000 Hz, but the audible range frequency used in the present embodiment is set in the range of 10 Hz to 800 Hz.
The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as a vibration source.
The vibration unit 40 appropriately sets the vibration sources such as the vibrator 41 and the vibrator 42 according to the required frequency range, that is, a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source that is another sound wave vibration source. It can be replaced with a vibration source.
The controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control component. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, a bipolar power source, or the like as a control component corresponding to the sound wave vibration source.

The vibration unit 40 vibrates the plate 20 up and down by a pair of vibrators attached outside the center of two opposite sides of the plate 20.
The vibration unit 40 simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency by a pair of vibrators attached outside the center of two opposite sides of the plate 20, and vibrates the plate 20 with a standing wave.
The vibration device 100 according to the present embodiment fixes the vibrator 41 and the vibrator 42 to the outside of the plate 20.
That is, the vibrator 41 and the vibrator 42 do not overlap the plate 20 in a plan view.
Therefore, the vibrator 41 and the vibrator 42 do not hinder the vertical vibration of the plate 20.

In the vibration device 100 according to the present embodiment, the vibrator 41 and the vibrator 42 are fixed to the side 23 of the plate 20.
The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the rear surface 22 of the plate 20.
Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left-right direction, and the entire region of the plate 20 in the left-right direction vibrates vertically.

The vibration device 100 of the present embodiment does not uniformly vibrate the entire plate 20 up and down.
The central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the left and right sides.
The reason why the amplitude decreases toward the periphery in the left-right direction is that the left and right ends of the plate 20 are fixed and that a stationary wave is generated in the plate 20.
Further, the central part of the plate 20 has the largest amplitude, and the amplitude decreases from the central part of the plate 20 toward the front-rear direction.
The reason why the amplitude decreases toward the periphery in the front-rear direction is that the front and rear ends of the plate 20 are fixed.
Both front and rear ends of the plate 20 may be free ends that can freely vibrate vertically.
If both the front and rear ends of the plate 20 are free ends, the amplitude of the plate 20 in the front-rear direction becomes uniform. Alternatively, the amplitude of the plate 20 in the front-rear direction approaches uniform.

In the vibration device 100 according to the present embodiment, the vibrator 41, the vibrator 42, and the two fixing points (screw holes 24) are arranged on a straight line.
The vibrator 41 and the vibrator 42 are outside the two fixing points (screw holes 24).
The vibrator 41 and the vibrator 42 are not inside the two fixing points (the screw holes 24).
The plate 20 vibrates up and down due to a flapping phenomenon centered between two fixed points (fulcrum 26).

<<< Effect of Embodiment 1 >>>
According to the present embodiment, the traveling wave 60 is simultaneously generated at the same frequency from the left and right of the plate 20 by the vibrator 41 and the vibrator 42, so that a standing wave is generated and the plate 20 vibrates only in the vertical direction.
Even if it vibrates in the front-back and left-right directions, it becomes negligible compared with the vibration in the up-down direction.
By placing the work on the plate 20 of the vibration device 100, the work can be vibrated only in the vertical direction.

<<< Example of change >>>
Modification example 1.
The vibration device 100 shown in FIG. 14 is obtained by removing the distributor 47 from the configuration of FIG. 1 and fixing the vibrator 41 and the vibrator 42 of the vibration unit 40 directly to the side 23 of the plate 20.

Modification example 2.
In the vibration device 100 shown in FIG. 15, the plate 20 has a larger size than the base 10 in a plan view, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the outer edge of the back surface 22 of the plate 20. is there.

Modification example 3.
The vibration device 100 shown in FIG. 16 includes a distributor 41 sandwiched between a base 10 and a plate 20, and a vibrator 41 and a vibrator 42 fixed to each other.
The distributor 47 may be a flat plate.

Modification example 4.
In FIG. 2, the vibrator 41 may be mounted so as to rotate clockwise and the vibrator 42 to rotate counterclockwise.
In FIG. 2, it is more desirable to reverse the rotation directions of the vibrator 41 and the vibrator 42 than to rotate the vibrator 41 and the vibrator 42 in the same direction.
Even when the rotating directions of the vibrator 41 and the vibrator 42 are reversed, it is desirable to rotate the vibrator 41 counterclockwise and rotate the vibrator 42 clockwise as shown in FIG.

Modification example 5.
The vibration unit 40 may have an even number of audible frequency vibration sources greater than two.
As shown in FIG. 17, a vibrator 41, a vibrator 42, a vibrator 43, and a vibrator 44 may be attached to the plate 20.
In (a), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41 and the vibrator 43 are fixed to the same side 23, and the vibrator 42 and the vibrator 44 are fixed to another side 23.
Standing waves are generated in parallel.
In (b), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the individual sides 23, respectively.
Standing waves are generated orthogonally.
In (c), the vibrator 41 and the vibrator 44 face each other, and the vibrator 42 and the vibrator 43 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the respective corners of the plate 20.
Standing waves are generated orthogonally.
Although not shown, the shape of the plate 20 may be circular, elliptical, or any other shape in plan view.

Modification example 6.
The plate 20 may have a polygonal shape in plan view.
The vibration unit 40 may have an odd number of audible frequency vibration sources.
As shown in FIG. 18, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows the triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the individual sides 23, respectively.
(B) shows a hexagonal plate 20.
Every other one of the vibrator 41, the vibrator 42, and the vibrator 43 is fixed to the individual side 23.
Although not shown, the vibrator may be fixed to all the sides 23 of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or any other shape in plan view.
The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one side or a plurality of sides of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
Only one side of the plate 20, one air vibrator outside the side Only one side of the plate 20, a plurality of air vibrators outside the side One outside each side of some of the plurality of sides of the plate 20 Individual air vibrators ((b) of FIG. 18)
A plurality of air vibrators (a in FIG. 17A) outside each side of a part of the plurality of sides of the plate 20.
One air vibrator outside each side of the plate 20 (FIG. 17 (b) and FIG. 18 (a)).
A plurality of air vibrator controllers 80 outside each side of the plate 20 vibrate all the air vibrators at the same frequency.
Instead of an air vibrator, other types of vibrators may be used.

Modification example 7.
The vibration unit 40 may have one audible circumferential vibration source.
The vibration device 100 of FIG. 19 includes one vibrator 45 and a frame 46.
The frame 46 is a U-shaped metal part.
In the frame 46, the vibrator 45 is fixed to the center of the bottom, and the upper ends of both ends are fixed to the distributor 47.
The vibrator 45 vibrates vertically.
The vibration of the vibrator 45 is transmitted to the two distributors 47 and vibrates the two distributors 47 up and down.
As described above, it is not essential to attach a plurality of vibrators on both sides of the plate 20, and the vibration wave of the traveling unit 60 from the plurality of sides of the plate 20 at the same amplitude, the same wavelength, and the same frequency is not necessary in the vibration unit 40. It only needs to have a mechanism to generate it.

Modification Example 8.
The vibration device 100 of FIG. 20 has a spacer 50 between the plate 20 and the distributor 47.
The spacer 50 is a square rod-shaped metal rod that is fixed by being sandwiched between the side 23 of the plate 20 and the vertical portion 49 of the distributor 47.
The spacer 50 is a component that separates the position where the traveling wave 60 is generated from the fulcrum 26 of the flapping phenomenon.
By changing the length of the spacer 50 in the left-right direction, the distance between the audible circumferential vibration source and the fixed portion can be changed.
Even if the traveling waves 60 have the same amplitude, the same wavelength, and the same frequency, the flapping phenomenon appears more strongly as the length of the spacer 50 in the left-right direction increases.
The spacer 50 can adjust the amplitude of vertical vibration of the plate 20.

Modification Example 9.
Instead of the screw holes 24 and the screws 25, other fixing fittings or other fixing mechanisms may be used for fixing the base 10 and the plate 20.

Embodiment 2.
In the second embodiment, points different from the first embodiment will be described.

<<< Description of configuration >>>
FIG. 21 is a configuration diagram of the screen printing apparatus 200 according to the second embodiment.
The screen printing device 200 has the vibration device 100 described in the first embodiment.
The screen printing device 200 is a device that prints on the work 900.
The work 900 is a substrate of an electronic device or a substrate of a circuit.

The screen printing apparatus 200 has a screen plate 201 in which a screen 202 is stretched in a frame.
The screen 202 is a mesh screen, a metal screen, or another screen.
The screen 202 has a printed pattern of electrode terminals, electrodes, wirings, and the like.
The paste 204 is present on the surface of the screen 202.
The screen printing device 200 has a squeegee 203.

The squeegee 203 moves on the surface of the screen 202 and prints electrode terminals, electrodes, wiring, etc. on the work 900 with the paste 204.

The plate 20 of the vibration device 100 is a table on which the work 900 is placed.
The plate 20 functions as a suction plate that sucks the work 900.
The plate 20 has a plurality of through holes 205 penetrating vertically.
The base 10 functions as a suction box that sucks air.

The screen printing device 200 has a suction pipe 206 and a vacuum pump 207.
The suction pipe 206 is connected to the base 10 and the vacuum pump 207 and sucks air from the space 14.
As shown in FIG. 21, it is desirable that the vibrator 41 and the vibrator 42 be arranged in the same direction as the printing direction of the squeegee 203. That is, it is desirable that the printing direction of the squeegee 203 and the generation direction of the standing wave match.

<<< Description of operation >>>
The processor 84 of the screen printing device 200 operates the vibration device 100 to vibrate the plate 20 during printing.
The vibration of the plate 20 is transmitted to the work 900 and the screen plate 201 and vibrates the paste 204.
The vibration of the paste 204 makes it easier for the paste 204 to pass through the print pattern of the screen 202.
When performing hole filling printing in which the holes or grooves of the work 900 are filled with the paste, since the work 900 is vibrating, the paste 204 is likely to be filled in the holes or grooves of the work 900.
In the case of the fill-in printing, the processor 84 operates the vibration device 100 and vibrates the plate 20 even after printing. By vibrating the plate 20 after printing, the paste 204 can be filled up to the bottom of the hole or groove.

<<< Effects of Second Embodiment >>>
According to this embodiment, the vibration device 100 can be used for the screen printing device 200.
According to the present embodiment, it is possible to reduce variations in the filling amount of the paste that fills the holes when filling the holes in screen printing.
In particular, the filling amount is improved when hole filling printing is performed using a hard paste.
According to the present embodiment, the plate 20 vibrates only in the vertical direction and does not vibrate in the front-rear, left-right directions, so that the work 900 and the screen plate 201 do not deviate in the front-rear, left-right directions. Therefore, the print pattern of the work 900 is not blurred.

Embodiment 3.
In the third embodiment, points different from the first embodiment will be described.
FIG. 22 is a perspective view of the shearing device 300 according to the third embodiment.
The shearing device 300 has the vibration device 100 described in the first embodiment.
The shearing device 300 is a device for cutting the work 900.
The shearing device 300 has a blade 301 that cuts the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

During operation, the processor 84 of the shearing device 300 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and vibrates the work 900.
As the work 900 vibrates in the vertical direction, the pressure from the blade 301 to the work 900 becomes intermittent.

<<< Effect of Third Embodiment >>>
According to this embodiment, the vibration device 100 can be used for the shearing device 300.
According to the present embodiment, the pressure applied from the blade 301 to the work 900 is intermittent, so that the durability time of the blade 301 is extended.

Fourth Embodiment
In the fourth embodiment, points different from the first embodiment will be described.
FIG. 23 is a perspective view of the punching device 400 according to the fourth embodiment.
The punching device 400 has the vibration device 100 described in the first embodiment.
The punching device 400 is a device for forming a hole in the work 900.
The drilling device 400 has a drill 401 that forms a hole in the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

During operation, the processor 84 of the punching device 400 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and vibrates the work 900.
As the work 900 vibrates in the vertical direction, the pressure from the drill 401 to the work 900 becomes intermittent.

<<< Effects of Fourth Embodiment >>>
According to the present embodiment, vibration device 100 can be used in perforation device 400.
According to the present embodiment, the pressure applied from the drill 401 to the work 900 is intermittent, so the durability time of the drill 401 is extended.

Embodiment 5.
In the fifth embodiment, points different from the first embodiment will be described.

<<< Structure of Vibration Transfer Device 500 >>>
FIG. 24 is a perspective view of the vibration transfer device 500 according to the fifth embodiment.
The vibration transfer device 500 is a device that inserts a plurality of components into a plurality of depressions by vibration.
The plate 20 is a square flat plate.
A plurality of recesses 29 are arranged on the plate 20.
A plurality of components 901 are randomly placed on the plate 20.
Although not shown, the outer periphery of the plate 20 has a frame that prevents the component 901 from falling off the plate 20.

The vibration transfer device 500 includes a flat plate base 10, a plate 20, and a vibration unit 40.
The plate 20 is fixed to the base 10 via four vibrators.
The side 23 of the plate 20 is not fixed and is a free end.
The vibration unit 40 has a plurality of vibrators fixed outside the four corners of the plate 20.
The vibration unit 40 of FIG. 24 has four vibrators and four distributors 47.
The four vibrators are fixed to the flat plate base 10 with a tilt of 45 degrees with respect to the front-rear direction and the left-right direction.
The four vibrators are fixed outside the four corners 27 of the plate 20, respectively.
The vibrator is arranged on a diagonal extension of the plate 20.
The vibrator 41 and the vibrator 44 are fixed so as to face two corners at one diagonal end of the plate 20.
The vibrator 43 and the vibrator 42 are fixed so as to face two corners at the other diagonal ends of the plate 20.

The distributor 47 is a rectangular plate.
The distributor 47 has the corner 27 of the plate 20 fixed to the upper surface.
The distributor 47 fixes the upper surface of the vibrator to the lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted in the screw holes 24.
The four corners 27 of the plate 20 are four fixing points of the plate 20.
The vibrator is fixed to the outside of the corner 27 of the plate 20 in a plan view. That is, the four vibrators do not overlap the plate 20 in a plan view.

An electromagnetic vibration source such as an electromagnetic vibrator is suitable for the four vibrators used in the vibration transfer device 500. The electromagnetic vibration source can control the frequency more finely than the air vibrator.

<<< Operation of Vibration Transfer Device 500 >>>
The controller 80 vibrates the two vibrators fixed to the two corners at the diagonal ends of the plate 20 at the same frequency.
The four vibrators are connected to the processor 84, and the processor 84 controls the vibrations of the four vibrators.
The traveling waves from the four vibrators travel from the four corners of the plate 20 toward the center of the plate 20.
The vibrator 41 and the vibrator 44 simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency in one diagonal direction, and the traveling waves are superimposed.
The vibrator 43 and the vibrator 42 generate traveling waves at the same amplitude, at the same wavelength, and at the same frequency in different diagonal directions at the same time, and four traveling waves orthogonal to each other are overlapped with each other so that a standing wave is superposed on the plate. Vibrate vertically.

The processor 84 can change the vibration generated in the plate 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves.
In particular, the processor 84 generates a standing wave having the same amplitude, the same wavelength, and the same frequency as the traveling wave of which four traveling waves having different phases are overlapped on each other on the plate, and the vertical vibration of the standing wave causes the plate 84 to vibrate. The component 901 can be rotated, moved to the left, right, back and forth, and jumped on the 20.
The processor 84 can generate the phases of the four traveling waves by shifting by 90 degrees, 180 degrees, 270 degrees, or any angle.

Hereinafter, the vertical vibration of the vibration transfer device 500 will be described with reference to FIG. 25.
FIG. 25 shows a vertical vibration state of the plate 20 in the case where traveling waves having the same phase, amplitude, wavelength, and frequency are overlapped with each other and standing waves are superimposed.
FIG. 25A is a schematic diagram of vertical vibration in the front-rear direction about the center of the plate 20 in the left-right direction.
FIG. 25B is a schematic diagram of vertical vibration of one diagonal line connecting the corners 27 of the plate 20.
Since the side 23 is a free end, the plate 20 vibrates as the side 23 moves up and down as shown in FIG.
On the other hand, since the corner 27 is fixed and the corner 27 serves as the fulcrum 26, the plate 20 vibrates without moving the corner 27 up and down as shown in FIG.

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the component 901 and vibrates the component 901.
By vibrating vertically, the component 901 moves on the surface of the plate 20 and fits into the recess 29.

Modification example 1.
In the vibration transfer device 500 of FIG. 26, the corner 27 of the plate 20 is cut, and the vibrator is fixed to the cut surface.
The vibration transfer device 500 of FIG. 26 does not require the distributor 47.
The vibrator is fixed to the outside of the corner 27 of the plate 20 in a plan view. That is, the four vibrators do not overlap the plate 20 in a plan view.

Modification example 2.
The vibration device 100 of the above-described embodiment may be used for the vibration transfer device 500.
As the vibration transfer device 500, it is desirable to use a vibration device capable of generating a standing wave by making four traveling waves orthogonal to each other or by intersecting a plurality of traveling waves. Further, when the vibration device crosses the traveling waves, it is desirable that the traveling waves are superposed to generate a stable standing wave by equalizing all the intersecting angles of the traveling waves.

Modification example 3.
In the vibration transfer device 500 of FIG. 27, columns 51 are provided on the corners 27 of the plate 20, and the plate 20 is fixed to the base 10 by the four columns 51.
The support column 51 fixes the plate 20 with a screw inserted in the screw hole 24.
The vibrator is fixed only to the cut surface of the corner 27 of the plate 20, and the vibrator is attached to the plate 20 in a suspended state.
In the case of FIG. 27, the plate 20 vibrates due to the fluttering phenomenon described above with the fixing point in the screw hole 24 as a fulcrum.
In the case of FIG. 27, the plate 20 is fixed by four pillars 51, but since the pillars 51 are thin pillars, the plate 20 can vibrate not only vertically but also front and rear and left and right.

Modification example 4.
The plate 20 may have a polygonal shape in plan view.
As shown in FIG. 28, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows the triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the respective corners 27.
(B) shows a hexagonal plate 20.
The vibrators are fixed to the respective corners 27.
Although not shown, the shape of the plate 20 may be circular, elliptical, or any other shape in plan view.

Modification example 5.
As shown in FIG. 29, the vibrator may not be provided at all corners.
(A) shows the case where the vibrator is arranged on one diagonal of the square plate 20.
The vibrator 41 and the vibrator 42 are fixed to every other corner 27.
(B) shows a case where vibrators are arranged on two diagonal lines of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or any other shape in plan view.

Modification example 6.
As shown in FIG. 30, there may be a plurality of vibrators at the corners.
(A) shows a case where two vibrators are arranged at each of the four corners of the rectangular plate 20.
(B) shows a case where two vibrators are arranged in each of the four corners of the rectangular plate 20, and further a vibrator is arranged outside the center of the opposite sides.
Although not shown, the shape of the plate 20 may be an octagon, a decagon, or another polygon in a plan view.

The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one corner or a plurality of corners of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
One air vibrator outside only one corner of the plate 20 One air vibrator outside each corner of some corners of the plurality of corners of the plate 20 ((a) and (b) of FIG. 29)
One air vibrator ((a) and (b) in FIG. 28) outside each corner of all the corners of the plate 20.
Two air vibrators ((a) and (b) in FIG. 30) outside each corner of all the corners of the plate 20.
The controller 80 vibrates all the air vibrators at the same frequency.
Instead of an air vibrator, other types of vibrators may be used.

Sixth embodiment.
In the sixth embodiment, points different from the first embodiment will be described.

<<< Distributor 47 Configuration >>>
FIG. 31 is a diagram showing the distributor 47.
The distributor 47 in FIG. 31 is fixed to the plate 20 with the front surface 21 and the back surface 22 of the plate 20 sandwiched therebetween.
(A) shows the case where a vibrator is arranged outside the center of one side of the rectangular plate 20.
The distributor 47 has a U-shaped groove 52 on the side when viewed from the front-rear direction, and the center outer edge of the plate 20 is fitted into the groove 52.
The plate 20 has three screw holes 24 as fixing points on two sides where the vibrator is fixed.
The plate 20 fixes the distributor 47 with the screw of the central screw hole.
The plate 20 does not have the screw hole 24 on the side where the vibrator is not fixed.
As in the case of (a), it is not necessary to provide the fixing portions on all sides, but they may be provided only on two opposite sides.

(B) shows a case where vibrators are arranged at four corners of the rectangular plate 20.
The distributor 47 has a V-shaped groove 53 on the side when viewed from above and below, and the corner of the plate 20 is fitted into the groove 53.
The orthogonal bottom of the V-shaped groove 53 is in surface contact with two orthogonal ends of the two sides.
The triangular side surfaces of the V-shaped groove 53 are in surface contact with the front surface and the back surface of the corner 27.
The plate 20 has a screw hole 24 at the outer edge of the corner.
The plate 20 fixes the distributor 47 with the screw of the screw hole.

<<< Effect of Distributor 47 >>>
Since the distributor 47 is fixed to the plate 20 with the plate 20 interposed therebetween, even when the plate 20 is thin and the height of the side in the vertical direction is small, the vibration of the vibrator can be transmitted from the side of the plate 20.

Modification 1.
The distributor 47 may have any shape as long as it can transmit the vibration of the vibrator to the side of the plate 20.
The distributor 47 may be fixed only to the side of the plate 20 or only to the corner, but the distributor 47 may be fixed to the following locations.
Side and front side of plate 20 Side and back side of plate 20 Side and front side of plate 20 Side only of side of plate 20 Back side only of side of plate 20 Side and back side of plate 20 Corner and front side of plate 20 Corner and back side of plate 20 Corner and front side and back side of plate 20 Corner front side only of plate 20 Corner back side of plate 20 It is possible to obtain the same effect as in the case where the plate is fixed only, and in any of the above cases, it can be said that the side of the plate is vibrated.

Embodiment 7.
In the seventh embodiment, points different from the first embodiment will be described.

<<< Configuration of Plate 20 and Vibration Unit 40 >>>
FIG. 32 is a diagram showing the plate 20 and the vibration unit 40.
FIG. 32 shows a vibration unit 40 that vibrates a plurality of places on the outer periphery of the plate 20 from the outside of the plate 20.
The outer periphery of the plate 20 refers to the contour of the plate 20 when seen in a plan view.
The outside of the plate 20 refers to the outside of the contour of the plate 20.
The vibration unit 40 simultaneously generates traveling waves with the same wavelength from the outer periphery of the plate 20 toward the center of the plate.
(A) shows the case where the vibrator 41 is arranged in the corner 27 of the triangular plate 20, and the vibrator 42 is arranged outside the center of the side 23 facing the corner 27.
(B) shows a case where the vibrator 41 is arranged in the corner 27 of the pentagonal plate 20 and the vibrator 42 is arranged outside the center of the side 23 facing the corner 27.

The vibration unit 40 vibrates a plurality of places of the plate 20.
As described in the first embodiment, the plurality of locations may be a plurality of locations including only the plurality of sides 23 of the plate 20.
As described in the fifth embodiment, the plurality of locations may be a plurality of locations including only the plurality of corners 27 of the plate 20.
The plurality of locations may be a plurality of locations including the side 23 of the plate 20 and the corner 27, as described in FIGS. 32 (a) and 32 (b).
In the case of a plurality of places including the side 23 and the corner 27, any one of the following may be used.
One side 23 and one corner Multiple side 23 and one corner One side 23 and multiple corners Multiple side 23 and multiple corners Typical examples of multiple side 23 and multiple corners are Side 23 and all corners.
It is desirable that the plurality of places are arranged in pairs on a straight line passing through the center or the center of gravity of the plate 20 such as the diagonal line or the diameter of the plate 20.

The side 23 need not be flat.
(C) shows the case where the vibrator 41 and the vibrator 42 are arranged in the diameter direction of the circular plate 20, and the vibrator 43 and the vibrator 44 are arranged in the diameter direction orthogonal to each other.
In the case of (c), the side 23 has a cylindrical outer peripheral curved surface.
The side 23 may be another curved surface or a combination of a curved surface and a flat surface.
In (c), the vibrator 43 and the vibrator 44 may be omitted.
In (c), the number of vibrators may be increased.

<<< planar shape of plate 20 >>
FIG. 33 is a diagram showing a planar shape of the plate 20.
The planar shape of the plate 20 is not limited to a regular polygon or a circle.
(A) has shown the case where the planar shape of the plate 20 is a cross shape.
(B) shows the case where the planar shape of the plate 20 is a star shape.
(C) shows the case where the planar shape of the plate 20 is an elongated quadrangle with rounded corners.
(D) has shown the case where the planar shape of the plate 20 is an ellipse.
Although not shown, the planar shape of the plate 20 may be trapezoidal, cloud-shaped, chevron-shaped, irregularly shaped, or any other shape.

<<< cross-sectional shape of plate 20 >>>
FIG. 34 is a view showing a cross-sectional shape of the plate 20 taken along the line AA in FIG.
The sectional shape of the plate 20 is not limited to a rectangle.
(A), (c), and (e) have shown the case where the lower center part of the plate 20 is depressed upward.
(A) shows the case where it is recessed.
(B) shows the case where it is depressed in a V shape.
(C) has shown the case where it dented in an arc shape.
(B), (d) and (f) show the case where the central upper part of the plate 20 bulges downward.
(B) shows the case where it bulges into a convex shape.
(D) has shown the case where it bulges in V shape.
(F) has shown the case where it bulges in an arc shape.

(G) shows the case where the central portion of the plate 20 has a concave shape that is recessed upward and downward.
(H) shows the case where the central portion of the plate 20 has a convex shape that bulges upward and downward.
Although not shown, the cross-sectional shape of the plate 20 may be an uneven shape, a corrugated shape, or another shape.
(I) shows the case where the side 23 is inclined.
When the side 23 is inclined, the slope of the distributor 47 may be provided and the vibrator 41 and the vibrator 42 may be attached.
The cross section of the distributor 47 has a triangular shape.
The slope of the distributor 47 and the side 23 have the same inclination angle.
The vibrator 41 and the vibrator 42 can vibrate the outer periphery of the plate 20 vertically via the distributor 47.

Eighth embodiment.
The vibration device 100 can be used in a device that dislikes horizontal vibration.
The vibration device 100 can be used as a work processing device.
The vibration device 100 can be used for a processing device, a conveying device, a sorting device, an assembling device, a manufacturing device, a vibration transfer device, or other material handling device.
The material means a substance, a material, a raw material, a cloth, a raw material, a tool, an instrument, a tool, or the like.
The shape, material, property, and number of materials do not matter.
The material may be lumps, plates, or grains or powder.
The material may be a solid, a liquid, or an elastic body.

Ninth Embodiment
In the ninth embodiment, points different from the above-described embodiments will be described.

<<< Description of Configuration of Printing Unit 600 >>>
FIG. 35 is a trihedral view of the printing unit 600 of the screen printing apparatus 200 according to the ninth embodiment.
The printing unit 600 moves in the printing direction P by a drive mechanism (not shown) of the screen printing apparatus 200.
The printing unit 600 has a fixing mechanism 620, and fixes the printing tool 260 of the vibration device 100 by the fixing mechanism 620.
The printing unit 600 has an elevating mechanism 610.
The elevating mechanism 610 elevates and lowers the printing tool 260 of the vibration device 100, and also generates a downward printing pressure during printing.
As shown in FIG. 35, the printing tool 260 is tilted and fixed to the printing unit 600, and moves in the printing direction P while being tilted during printing.

<<< Description of Configuration of Vibration Device 100 >>>
FIG. 36 is a perspective view of the vibration device 100 according to the ninth embodiment.
FIG. 37 is a front view of the printing tool 260 according to the ninth embodiment.
FIG. 38 is a side view of the printing tool 260 according to the ninth embodiment.
FIG. 39 is a plan view of the printing tool 260 according to the ninth embodiment.
In FIG. 36, X indicates the front-back direction.
The printing direction P matches the front direction of the front-back direction X.
36 and 37, Y indicates the left-right direction and Z indicates the up-down direction.
As shown in FIG. 35, the printing tool 260 is used while being inclined at the time of printing, but hereinafter, for convenience of description, the Z direction shown in FIGS. 36 and 37 is referred to as a vertical direction Z.

The vibration device 100 includes a printing tool 260, a vibration unit 40, and a controller 80.
The printing tool 260 is used for printing by a screen printing device.
The printing tool 260 prints on a work by printing pressure.
The vibration unit 40 vibrates the plurality of opposite sides of the printing tool 260.
The controller 80 controls the vibration of the vibration unit 40.

<< Explanation of Printing Tool 260 >>
The printing tool 260 has a holder 210 and a squeegee 203 attached to the holder 210.
As shown in FIG. 39, the printing tool 260 (holder 210) has a long side W in a direction orthogonal to the printing direction P and a short side V in the same direction as the printing direction P.

<< Explanation of Holder 210 >>
The holder 210 is made of metal such as aluminum.
As shown in FIG. 35, the holder 210 has a base portion 211 and a push plate 212.
The holder 210 is fixed to the elevating mechanism 610 of the printing unit 600 by the fixing mechanism 620 of the printing unit 600.
The squeegee 203 is fixed by being clamped by the tightening screw 213 between the base portion 211 and the push plate 212.
The base portion 211 has screw holes for fixing the vibrator 41 and the vibrator 42 at the upper ends of both ends.
The upper center part of the base part 211 has a fixing part 241.
The fixing portion 241 is arranged inside the screw hole that fixes the vibrator 41 and the vibrator 42 of the base portion 211.
The fixing portion 241 is fixed by the fixing mechanism 620.

<< Explanation of squeegee 203 >>
The squeegee 203 has a support 220 and a squeegee 230.
The squeegee portion 230 is made of urethane rubber or an elastic body.
The support portion 220 is made of a glass epoxy resin containing glass fiber (glass fiber).
The support portion 220 has rough cut portions on both sides, and the urethane rubber is welded and fixed to the rough cut portions on both sides of the glass epoxy resin.

<<< Description of the vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the holder 210 at the same frequency.
The vibration unit 40 vertically vibrates the side surfaces of the holder 210 on the opposite sides 23 of the holder 210 in the left-right direction.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vertically vibrates the outside of a fixed portion (fulcrum 26) where the screw hole 24 of the holder 210 is provided.
The vibrator 41 and the vibrator 42 are vibrators having the same specifications.
The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<< Description of distributor 47 >>
The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side 23 of the holder 210 or the vicinity thereof.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the holder 210.
The distributor 47 has a screw hole 24 at its end, and is fixed to both ends of the holder 210 with screws.
The distributor 47 is a rectangular metal plate.
The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the side surface on the side 23 of the holder 210.
The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the side surface forming the short side V of the holder 210 or in the vicinity of the side surface.
The distributor 47 extends the flapping of the vibrator 41 and the vibrator 42.
As the length of the distributor 47 in the left-right direction Y is increased so that the vibrator 41 and the vibrator 42 are farther from the side surface on the side of the holder 210, the elastic force of the distributor 47 causes the distributor 47 to curve and flapping to increase.
As the thickness of the distributor 47 in the vertical direction Z is reduced, the elastic force of the distributor 47 causes the distributor 47 to bend and the flapping increases.

<< Description of Vibrator 41 and Vibrator 42 >>
The vibrator 41 and the vibrator 42 are attached to the outside of the side 23 of the holder 210 like wings.
The vibrator 41 and the vibrator 42 are attached in parallel to the holder 210.
The vibrator 41 and the vibrator 42 are attached so that the air supply port is inside.
A rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the front-rear direction X.
The rotation surface K of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

<<< Description of operation of vibration unit 40 >>>

The controller 80 vibrates the vibrator 41 and the vibrator 42 at a frequency of 10 Hz or more and 800 Hz or less.
The vibration unit 40 flaps on both sides of the fulcrum 26 to vibrate the printing tool 260.
The vibration unit 40 vibrates two places on both sides of the long side W of the printing tool 260.
The vibration unit 40 vibrates the plurality of opposite sides 23 on the outer side of the printing tool 260 at the same amplitude, at the same wavelength, and at the same frequency to vibrate the printing tool 260 with a standing wave.
The vibration unit 40 simultaneously generates traveling waves at the ends of the printing tool 260 with the same amplitude, the same wavelength, and the same frequency.
The vibration unit 40 vertically vibrates the end portion of the printing tool 260 from the outside of the printing tool 260 with a traveling wave, and vibrates the printing tool 260 with a standing wave.
The vibration unit 40 vibrates the holder 210 in the vertical direction by the flapping phenomenon described in the above embodiment.

<<< vibration measurement result >>>
The vibration measurement results are shown below.
At the time of vibration measurement, the controller 80 supplies air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa to the vibrator 41 and the vibrator 42, respectively, at the same amplitude and at the same wavelength. Vibrated at the same frequency.

<< Measurement result 1 >>
The holder 210 made of aluminum was used to measure the vibration of the printing tool 260 shown in FIG.
The printing tool 260 shown in FIG. 40 has the same configuration as the printing tool 260 of FIG. 37, except that the adjustment jig 240 is mounted on the support portion 220 and the squeegee 203 is fixed to the holder 210.
The adjustment jig 240 is a rectangular metal plate, made of stainless steel, and made of a metal harder than the holder 210.
The adjustment jig 240 is sandwiched between the support 220 and the base 211.
The printing tool 260 shown in FIG. 40 was placed sideways on an air mat, the periphery of the printing tool 260 was set free, the holder 210 was vibrated, and the vibration amplitude was measured.
The vibrator 41 and the vibrator 42 have the same specifications as those of the first embodiment.
The rotation directions of the vibrator 41 and the vibrator 42 are from the inside to the outside, as indicated by the arrows in FIG. That is, as shown in FIG. 37, the rotation direction of the vibrator 41 is clockwise and the rotation direction of the vibrator 42 is counterclockwise.
The length of the squeegee 203 in the left-right direction Y is 185 mm.
As shown in FIG. 37, the measurement points are measurement points 1 to 17, the left side surface, and the right side surface of the bottom surface of the squeegee portion 230.
The measurement points 1 to 17 are at 10 mm intervals.

FIG. 41 is a diagram showing measurement results of vibration in the vertical direction Z of the bottom surface of the squeegee portion 230 of the holder 210 and the lateral direction Y of the side surface.
42: is a figure which shows the measurement result of the vibration of the bottom surface of the squeegee part 230 of the holder 210 in the front-back direction X. FIG.
The vertical axis represents the vibration distance. "P-P" means "Peak to Peak" and means a vibration distance.
As shown in FIG. 37, the horizontal axis indicates the left side surface, the measurement points 1 to 17 on the bottom surface, and the right side surface of the squeegee portion 230.
As shown in FIG. 41, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially equal. It has become.
As shown in FIG. 41, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the left-right direction Y between the left side surface and the right side surface of the squeegee portion 230 becomes almost zero. Is becoming In particular, when the air pressure is 0.4 Mpa and 0.5 Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 42, at the air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the front-rear direction X of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially equal. It has become.
Therefore, the entire printing tool 260 vibrates up and down and back and forth, but does not vibrate left and right.

<< Measurement result 2 >>
Further, the vibration of the printing tool 260 shown in FIG. 43 was measured.
The printing tool 260 shown in FIG. 43 has the same configuration as the printing tool 260 of FIG. 40 except that the support portion 220 has a thin plate portion 221 and a thick plate portion 222. The thickness of the thick plate portion 222 is the thickness of the support portion 220, and the thin plate portion 221 is a portion where the surface of the support portion 220 is shaved and thinned.

As shown in FIG. 44, at the air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially equal. It has become.
As shown in FIG. 44, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the left-right direction Y between the left side surface and the right side surface of the squeegee portion 230 becomes almost zero. Is becoming In particular, when the air pressure is 0.4 Mpa and 0.5 Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 45, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the front-rear direction X of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially equal. It has become.
Therefore, the entire printing tool 260 vibrates up and down and back and forth, but does not vibrate left and right.

<Comparison between measurement result 1 and measurement result 2>
When the support part 220 has the thin plate part 221 and the thick plate part 222, the vibration distance in the front-rear direction X becomes large and there is unevenness. It is considered that the reason why the vibration distance in the front-rear direction X becomes large is that the thin plate portion 221 exists.
In screen printing, when it is desired to use the vibration in the front-rear direction X, it is preferable to use the support portion 220 having the thin plate portion 221.

<< Measurement result 3 >>
The holder 210 made of aluminum was used, and the vibration of the printing tool 260 shown in FIG. 37 was measured without using the adjustment jig 240.
Although not shown, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 become substantially equal, The vibration distance in the left-right direction Y between the left side surface and the right side surface became almost zero.
At each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the front-rear direction X of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are not uniform, and the central portion is an end. The vibration distance is larger than the part.
In the case of screen printing, the vertically movable distance increases toward the center of the screen of the screen plate, so that it can be used even when the central portion of the bottom surface of the squeegee portion 230 has a larger vibration distance than the end portions.

<< Measurement result 4 >>
In the configuration of FIG. 37, when the vibrator 41 and the vibrator 42 are attached so that the air supply ports are on the outside and the rotation directions of the vibrator 41 and the vibrator 42 are opposite to the arrows in FIG. Although some vibration occurred, the vibration distance in the vertical direction Z was almost uniform.

<< Measurement result 5 >>
In the configuration of FIG. 37, when the vibrator 41 and the vibrator 42 both rotate in the same direction, the vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X are not uniform. The vibration in the left-right direction Y occurred to the same extent as the vibration distance in the up-down direction Z.
This is effective when it is desired to use the vibration in the left-right direction Y in screen printing.

<< Measurement result 6 >>
In the configuration of FIG. 37, when the thickness of the distributor 47 in the up-down direction X is set to 10.9 mm and 1.9 mm, it is measured at air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. The vibration distance in the up-and-down direction Z is almost the same, or the thickness of the distributor 47 is slightly reduced.
Further, when the thickness of the distributor 47 is thicker, the vibration distance in the front-rear direction X becomes about half at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa.

<< Measurement result 7 >>
Further, the vibration of the printing tool 260 shown in FIG. 46 was measured.
The printing tool 260 shown in FIG. 46 has the same configuration as the printing tool 260 of FIG. 37 except that the

vibrators

43 and 44 are added.
As shown in FIG. 46, the

vibrators

43 and 44 are arranged on the front side in the printing direction P.
The rotation axes J of the

vibrators

43 and 44 are the same axis.
The rotation axes J of the

vibrators

43 and 44 are parallel to the left-right direction Y.
As a result of the measurement, vibrations in the left-right direction Y were generated because of the

vibrators

43 and 44.
The printing tool 260 shown in FIG. 46 is effective when it is desired to use vibration in the left-right direction Y in screen printing.

<< Comparative example >>
In the configuration of FIG. 37, when only the vibrator 41 or only the vibrator 42 is used, the vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X are not uniform.
In the configuration of FIG. 37, when the rotation axis J of only the vibrator 42 is parallel to the left-right direction Y, the vibration distance in the up-down direction Z is not uniform. Further, vibration in the left-right direction Y occurred.
In the configuration of FIG. 37, when the rotation axes J of the vibrator 41 and the vibrator 42 are both parallel to the left-right direction Y, and both the vibrator 41 and the vibrator 42 are arranged on the front side of the printing direction P or the printing direction P side, The vibration distance in the vertical direction Z and the vibration distance in the front-back direction X were not uniform.

<< Consideration based on vibration measurement >>
Since the holder 210 is a metal block having a thickness in the vertical direction X, even if a traveling wave is input from both sides 23 of the holder 210 to generate a standing wave inside the holder 210, the holder 210 will not bend. Absent. Therefore, when a standing wave is generated inside the holder 210, it can be considered that the entire holder 210 vibrates uniformly with no left-right difference. Therefore, the bottom surface of the squeegee 203 should also vibrate uniformly with no left-right difference.
Further, when there is no vibration in the left-right direction Y, it can be considered that the vibration is generated by the standing wave.

As shown in FIG. 37, when the rotating surfaces K of the two vibrators are attached parallel to the squeegee and the air supply ports are inside, a stationary wave is generated inside the holder 210. As can be considered, the vibration of the bottom surface of the squeegee 203 was the most stable, and the vibration in the left-right direction Y was suppressed.

When vibrating with only one vibrator, a traveling wave is generated and reflected on the other side to generate a reflected wave. The generated reflected wave overlaps with the traveling wave to become a standing wave.
With one vibrator, the vibration of the bottom surface of the squeegee was unstable, and the vibration in the left-right direction Y also occurred. It was confirmed that nodes were generated in the standing wave that was overlapped by the traveling wave and the reflected wave.
A standing wave from a reflected wave that has a node with one vibrator is not practical.

The printing tool 260 is used in an environment different from the measurement state in which the printing tool 260 is placed on an air mat and the surroundings are freed and vibrated.
Specifically, the printing tool 260 is fixed to the elevating mechanism 610 by the fixing mechanism 620 and is used while being pressed against the work during printing.
At the time of vibration measurement, it vibrates like flapping on the left and right between the fulcrums 26 shown in FIG. It is possible to oscillate like flapping on the left and right between the 26.
In this way, a standing wave is generated in the printing tool 260 even when the usage environment is different.

<<< Effects of the embodiment >>>
According to the present embodiment, the entire printing tool 260 vibrates uniformly in the vertical direction Z and does not vibrate left and right, which is effective for hole-filling printing.
According to the present embodiment, the entire printing tool 260 vibrates uniformly in the front-rear direction X, which is more effective for fill-in-fill printing. In particular, since the printing tool 260 is used while being inclined at the time of printing, vibrating in both the up-down direction Z and the front-back direction X is suitable for hole-filling printing.
According to the present embodiment, the printing tool 260 can be vibrated in the left-right direction Y by changing the rotation direction or adding the vibration source, which is effective for screen printing using the vibration in the left-right direction Y. ..

<<< Example of change >>>
Modification example 1.
The vibration frequency of the vibrator can be changed by air pressure, and the vibration frequency in the audible frequency range of 10 Hz or more and 800 Hz or less is effective.
Wavelength λ [m] = sound velocity V [m / s] / vibration frequency f [Hz], and when f = 800 Hz,
Wavelength λ [m] = 6320 [m / s] / 800 [Hz] = 7.9 m
Half wavelength λ / 2 [m] = 7.9 m / 2 = 3.95 m
Therefore, if it is 800 Hz or less, it can be considered that it is a practical value with no nodes.

Modification example 2.
The material of the squeegee portion 230 need not be urethane, but may be an elastic body containing rubber or silicon.
The material of the squeegee portion 230 may be metal or any solid material.
The squeegee 203 does not need to have the support part 220, and may be composed of only the squeegee part 230.
Further, the squeegee 203 may be a metal squeegee.

Modification example 3.
The adjustment jig 240 may be sandwiched between the support 220 and the push plate 212 instead of the support 220 and the base 211.
Two adjustment jigs 240 may be prepared and sandwiched between the support 220 and the base 211 and between the support 220 and the push plate 212.
The support portion 220 may be made of metal. At this time, the supporting part 220 is made of a metal harder than the holder 210.

Modification example 4.
The vibration unit 40 may be an air vibrator driven by air pressure, a vibrator driven by a voice coil motor, or the vibrator described in the above embodiment.

Embodiment 10.
In the tenth embodiment, points different from the above-described embodiments will be described.
In the tenth embodiment, a printing tool 260 in which the squeegee 203 is a roller 250 will be described.

FIG. 47 is a five-sided view of the printing tool 260 of the vibration device 100 according to the tenth embodiment.
In FIG. 47, the squeegee 203 of FIG. 36 is replaced with a roller 250.
The roller 250 is attached to the holder 210.
The roller 250 is made of metal and rotates about a roller shaft 251 in the left-right direction Y.
The vibration unit 40 vibrates two places on both sides 231 of the short side V of the printing tool 260.
The printing tool 260 of FIG. 47 is mounted such that the rotation surface K of the vibrator 41 and the vibrator 42 is parallel to the roller 250 and the air supply port is on the inside.

The printing tool 260 of FIG. 48 is attached to the center of the holder 210 in the left-right direction Y with the rotation axis J of the vibrator 41 and the vibrator 42 parallel to the left-right direction Y.
In the printing tool 260, the vibrator 42 is attached to the front side in the printing direction P, and the vibrator 41 is attached to the rear side in the printing direction P.
The rotation direction of the vibrator 41 is from the rear side to the front side of the printing direction P as shown by the arrow in FIG.
The rotation direction of the vibrator 42 is from the front side to the rear side in the printing direction P as shown by the arrow in FIG.

The printing tool 260 of FIG. 49 is configured such that the vibrator 42 of the printing tool 260 of FIG. 47 is rotated from the rear side to the front side.

<<< Consideration based on vibration measurement >>>
Vibration measurement was performed in the same manner as in the ninth embodiment.
Similar to the ninth embodiment, during vibration measurement, the controller 80 supplies the vibrators with air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, respectively, and has the same amplitude and the same wavelength. And at the same frequency.

When the rotating surface K of the vibrator is attached in parallel to the roller 250 and the air supply port is on the inside, as in the printing tool 260 of FIG. 47, the vibration of the bottom surface of the squeegee is stable, Vibration to the left and right was also suppressed.
The printing tool 260 of FIG. 47 is suitable for printing because it has the effect of pressing a stationary wave in which the vibration to be pressed against the work becomes constant and the vibration in the left-right direction Y is suppressed.

As shown in FIG. 48, when the rotation axes J of the vibrator 41 and the vibrator 42 are set parallel to the left-right direction Y and attached to the center of the holder 210 in the left-right direction Y, the two vibration sources are the front sides 231 of the holder 210. Since a traveling wave is input from the rear side 231, a standing wave is generated, and standing wave vibration occurs.
The printing tool 260 of FIG. 48 is suitable for printing because it has the effect of pressing a stationary wave in which the vibration to be pressed against the work becomes constant, and the vibration in the left-right direction Y is suppressed.

As shown in FIG. 49, even when the vibration directions of the vibrator 41 and the vibrator 42 are the same, since there are two vibration sources, a standing wave vibration occurs.
In the case of FIG. 49, the vibrator 41 and the vibrator 42 are rotary vibration type air vibrators, and since the rotation directions are the same, vibrations in the rotation direction of the vibrator 41 and the vibrator 42 are added, and the vibrations become circular vibrations. At, the vibration in the same direction as the printing direction P, which assists the pressing of the roller 250, is applied.

<< Comparative example >>
In FIG. 48, when vibrating with only one vibrator, a traveling wave is generated, and when it reaches the side and is reflected, a reflected wave is generated. The generated reflected wave overlaps with the traveling wave and becomes a standing wave.
With one vibrator, the vibration of the bottom surface of the squeegee was unstable, and the vibration in the left-right direction Y also occurred. It was confirmed that nodes were generated in the standing wave that was overlapped by the traveling wave and the reflected wave.
A standing wave from a reflected wave that has a node with one vibrator is not practical.

<<< Effects of the embodiment >>>
According to the present embodiment, even when the printing tool 260 has the roller 250, it is possible to obtain the same effect as that of the ninth embodiment, and to the roller 250 in the vertical direction Z and the front-back direction X. Vibration can be applied.
According to the present embodiment, it is possible to apply vibration in the same direction as the printing direction P that assists the pressing of the roller 250.

<<< Example of change >>>
Modification example 1.
The printing tool 260 can be used as a printing tool of a screen printing device.
The printing tool 260 using the roller 250 can also be used as a pressing tool, and can be used in a rolling device for stretching a product.
When the elevating mechanism 610 attaches the printing tool 260 at an angle to the product, the roller 250 makes a motion of rubbing against the product.

Modification example 2.
The material of the roller 250 does not have to be metal, and may be an elastic body containing rubber, urethane, or silicon.
The material of the roller 250 may be resin or any solid material.

Modification example 3.
The printing tool 260 shown in FIG. 50 has

vibrators

43 and 44 added to the printing tool 260 shown in FIG.
The rotation axes J of the

vibrators

43 and 44 are parallel to the left-right direction Y, and the

vibrators

43 and 44 are arranged behind the printing direction P.
The printing tool 260 shown in FIG. 50 is effective when it is desired to use the vibration in the left-right direction Y.

<<< other configurations >>>.
FIG. 51 is a diagram showing a modification of the printing tool 260 according to the ninth and tenth embodiments.
In FIG. 51, the attachment method or attachment position of the vibrator 41 and the vibrator 42 is changed.

In (a), the mounting position of the vibrator 41 and the vibrator 42 is located at the center of the holder 210 in the vertical direction Z. The holder 210 has a slit at the upper and lower center of the side 23, and the distributor 47 is inserted and fixed in the slit at the upper and lower center of the side 23 of the holder 210.

(B) shows that the distributor 47 is L-shaped, and the distributor 47 is fixed to the entire side 23 of the holder 210 in the vertical direction Z.

(C) shows the case where the mounting position of the vibrator 41 and the vibrator 42 is not on the holder 210 but on the side 23 of the support portion 220 of the squeegee 203.
Vibrations of the vibrator 41 and the vibrator 42 are easily transmitted to the squeegee 203.

(D) shows a case where the mounting positions of the vibrator 41 and the vibrator 42 are not on the holder 210 but on the side 23 of the squeegee portion 230 of the squeegee 203.
The squeegee 203 is composed of only the squeegee portion 230 without the support portion 220.
(E) shows the case where the mounting positions of the vibrator 41 and the vibrator 42 are on the side 23 of the roller shaft 251.
The distributor 47 has a tubular shape and is fixed to the roller shaft 251.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the roller shaft 251.

(F) shows a case where the vibrator 41 and the vibrator 42 are directly fixed to the sides 23 at both ends of the holder 210 without the distributor 47.
Although not shown, the vibrator 41 and the vibrator 42 may be attached so as to partially overlap both ends of the holder 210. For example, half of the lower surfaces of the vibrator 41 and the vibrator 42 may be fixed to the upper surfaces of both ends of the holder 210 without the distributor 47.

*** Supplementary explanation of the embodiments *****
The embodiment described above is an example of a desirable mode and is not intended to limit the technical scope of the present invention.
The embodiment may be partially implemented or may be implemented in combination with other embodiments.
Further, the above-described embodiments may be combined.

100 vibration device, 10 base, 11 top surface, 12 bottom surface, 13 wall, 14 space, 20 plate, 21 front surface, 22 back surface, 23 side, 24 screw hole, 25 screw, 26 fulcrum, 27 corner, 29 recess, 40 vibration unit , 41, 42, 43, 44, 45 vibrator, 46 frame, 47 distributor, 48 horizontal part, 49 vertical part, 50 spacer, 51 strut, 52 groove, 53 groove, 60 traveling wave, 70 standing wave, 80 controller, 81 air Compressor, 82 air pipe, 83 regulator, 84 processor, 200 screen printing device, 201 screen plate, 202 screen, 203 squeegee, 204 paste, 205 through hole, 206 Suction pipe, 207 vacuum pump, 210 holder, 211 base, 212 pushing plate, 213 tightening screw, 214 fixing part, 220 supporting part, 221 thin plate part, 222 thick plate part, 230 squeegee part, 231 side, 240 adjusting jig, 250 rollers, 251, roller shafts, 260 printing tools, 300 shearing devices, 301 blades, 400 drilling devices, 401 drills, 500 vibration transfer devices, 600 printing units, 610 lifting mechanisms, 620 fixing mechanisms, 900 workpieces, 901 parts.

Claims

Printing tools,
A vibration unit for vibrating a plurality of opposite sides of the printing tool,
A vibration device comprising a controller for controlling vibration of the vibration unit.
The vibration unit generates a traveling wave at the same end at the same amplitude and at the same wavelength and at the same frequency at the end of the printing tool, and moves the end of the printing tool up and down from the outside of the printing tool by the traveling wave. The vibration device according to claim 1, wherein the vibration is caused to vibrate, and the printing tool is vibrated by a standing wave.
The printing tool is
A holder,
A squeegee or roller attached to the holder,
Have
The vibration device according to claim 1, wherein the vibration unit vibrates the holder.
The printing tool has a long side in a direction orthogonal to the printing direction,
The vibration unit according to any one of claims 1 to 3, wherein the vibration unit vibrates both sides of a long side of the printing tool.
The printing tool has a short side in the same direction as the printing direction,
The vibration device according to claim 1, wherein the vibration unit vibrates both sides of a short side of the printing tool.
The vibration unit has a vibrator,
The vibration device according to any one of claims 1 to 5, wherein the controller vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less.
The vibration device according to any one of claims 1 to 5, wherein the vibration unit has an air vibrator driven by air pressure or a vibrator driven by a voice coil motor.
A screen printing device equipped with the vibration device according to any one of claims 1 to 7.
A vibration method in which a plurality of opposite sides of the printing tool are vibrated at the same amplitude, at the same wavelength, and at the same frequency by a vibration unit to vibrate the printing tool with a standing wave.