KR102345274B1 - Vibration Device, Vibration Method and Screen Printing Device - Google Patents

Abstract

The vibration device 100 includes a screen plate 201 , a vibration unit 40 for vibrating a plurality of sides facing the outside of the screen plate 201 , and a controller for controlling the vibration of the vibration unit 40 . (80) is provided. The vibrating unit 40 generates a traveling wave at the end of the screen plate 201 at the same time at the same amplitude and at the same wavelength and at the same frequency, and by the traveling wave from the outside of the screen plate 201, The end of 201 is vibrated up and down, and the screen plate 201 is vibrated by a standing wave.

Description

Vibration Device, Vibration Method and Screen Printing Device

The present invention relates to a vibrating device for vibrating a screen and a screen printing device.

BACKGROUND ART Conventionally, there is a screen printing apparatus for printing a work by vibrating a screen.

Japanese Patent Laid-Open No. 63-199643 Japanese Patent Laid-Open No. 2005-238723 Japanese Patent Laid-Open No. 2010-221409 Japanese Patent Laid-Open No. 2009-126114

In the screen printing apparatus, even when the screen is vibrated, the amount of paste entering the hole of the screen varies during hole plugging printing, and there is a possibility that the paste may not fill the hole with a certain amount.

In an embodiment of the present invention, an object of the present invention is to provide a vibration device in which the amount of paste entering the hole of the screen does not fluctuate.

The vibration device of the present invention,

screen plate,

a vibration unit for vibrating a plurality of sides opposite to the outside of the screen plate;

It is characterized in that provided with a controller for controlling the vibration of the vibration unit.

According to the present invention, the screen plate vibrates stably by the vibrating unit imparting vibrations from a plurality of opposite sides on the outside of the screen plate.

1 : is a perspective view of the vibration apparatus 100 of Embodiment 1. As shown in FIG.
FIG. 2 is an AA cross-sectional view of the vibration device 100 of FIG. 1 of the first embodiment.
It is explanatory drawing of the vibration method of Embodiment 1. FIG.
It is a figure which shows the structure of a vibration measurement.
5 is a distribution diagram of vertical vibration of the plate 20 by an air pressure of 0.2 MPa.
6 is a distribution diagram of vertical vibration of the plate 20 by the pneumatic pressure of 0.3 MPa.
7 is a distribution diagram of vertical vibration of the plate 20 by an air pressure of 0.4 MPa.
8 is a distribution diagram of vertical vibration of the plate 20 by an air pressure of 0.5 MPa.
9 is a vibration distribution diagram in a horizontal direction.
It is a figure which shows the comparative example of one-sided vibration.
11 is a distribution diagram of unilateral vibration.
Fig. 12 is a diagram showing a comparative example of both lateral vibrations.
13 is a distribution diagram of vertical vibrations of both sides of the lateral vibration.
14 : is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. As shown in FIG.
15 : is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG.
16 : is a figure which shows the modified example of the vibration apparatus 100 of Embodiment 1. As shown in FIG.
17 : is a figure which shows the modified example of the vibration apparatus 100 of Embodiment 1. As shown in FIG.
18 : is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG.
19 : is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG.
20 : is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG.
Fig. 21 is a diagram showing a screen printing apparatus 200 according to the second embodiment.
22 is a diagram showing a shearing device 300 according to the third embodiment.
23 : is a figure which shows the punching apparatus 400 of Embodiment 4. FIG.
24 : is a figure which shows the vibration input apparatus 500 of Embodiment 5. As shown in FIG.
25 : is vibration explanatory drawing of the vibration input apparatus 500 of Embodiment 5. FIG.
26 : is a figure which shows the modified example of the vibration input apparatus 500 of Embodiment 5. As shown in FIG.
27 : is a figure which shows the modified example of the vibration input apparatus 500 of Embodiment 5. As shown in FIG.
28 : is a figure which shows the modified example of the vibration input apparatus 500 of Embodiment 5.
29 : is a figure which shows the modified example of the vibration input apparatus 500 of Embodiment 5. As shown in FIG.
30 : is a figure which shows the modified example of the vibration input apparatus 500 of Embodiment 5. As shown in FIG.
Fig. 31 is a diagram showing a distributor 47 according to the sixth embodiment.
32 : is a figure which shows the plate 20 and the vibration unit 40 of Embodiment 7. FIG.
33 : is a figure which shows the planar shape of the plate 20 of Embodiment 7. FIG.
Fig. 34 is a diagram showing a cross-sectional shape taken along line AA in Fig. 1 of the plate 20 according to the seventh embodiment.
Fig. 35 is a third side view of the printing unit 600 of the screen printing apparatus according to the ninth embodiment.
Fig. 36 is a perspective view of the vibration device 100 according to the ninth embodiment.
Fig. 37 is a front view of the printing tool 260 of the ninth embodiment.
38 is a side view of the printing tool 260 of the ninth embodiment.
Fig. 39 is a plan view of the printing tool 260 of the ninth embodiment.
40 is a side view of the printing tool 260 of Embodiment 9.
It is a figure which shows the vibration measurement result of Embodiment 9. FIG.
Fig. 42 is a diagram showing vibration measurement results of the ninth embodiment.
43 is a side view of the printing tool 260 of the ninth embodiment.
It is a figure which shows the vibration measurement result of Embodiment 9. FIG.
It is a figure which shows the vibration measurement result of Embodiment 9. FIG.
46 is a 5 side view of the printing tool 260 of the ninth embodiment.
47 is a 5 side view of the printing tool 260 of the tenth embodiment.
48 is a third side view of the printing tool 260 of the tenth embodiment.
49 is a third side view of the printing tool 260 of the tenth embodiment.
50 is a 5 side view of the printing tool 260 of the tenth embodiment.
51 is a diagram showing a modified example of the printing tool 260 according to the ninth and tenth embodiments.
52 is a diagram showing a screen printing apparatus 200 according to the eleventh embodiment.
53 is a perspective view of the vibration device 100 according to the eleventh embodiment.
54 is a perspective view of the vibration device 100 according to the eleventh embodiment.
Fig. 55 is a perspective view of the vibration device 100 according to the eleventh embodiment.
Fig. 56 is a perspective view of the vibration device 100 according to the eleventh embodiment.
57 is a diagram showing a modified example of the vibration device 100 according to the eleventh embodiment.
58 is a diagram showing a modified example of the screen printing apparatus 200 according to the eleventh embodiment.

Embodiment 1.

1 : is a perspective view of the vibration apparatus 100 of Embodiment 1. As shown in FIG.

FIG. 2 is a cross-sectional view taken along line A-A of the vibration device 100 of FIG. 1 of the first embodiment.

In FIG. 1, X has shown the front-back direction.

1 and 2, Y represents the left-right direction, and Z represents the up-down direction.

<<<Configuration of the vibration device 100>>>

The vibration device 100 includes a base 10 , a plate 20 , a vibration unit 40 , and a controller 80 .

<<<Description of the base 10 >>>

The base 10 has comprised the box-shaped shape with the upper part opened.

The base 10 has an upper surface 11 , a lower surface 12 , and a wall 13 .

The base 10 has a space 14 in the center.

The upper surface 11 is comprised by the ceiling surface of the wall 13, and has comprised the rectangular shape which has an opening in the center.

The bottom face 12 has a rectangular shape.

The wall 13 is a side wall of the base 10 erected from the periphery of the bottom surface 12 .

The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13 .

<<<Description of the plate 20 >>>

The plate 20 is preferably made of a material that allows sound waves to pass therethrough, and metal is suitable.

The material of the plate 20 is preferably aluminum, titanium, or stainless steel.

Also, aluminum and titanium are suitable, and aluminum is most suitable.

It is preferable that the plate 20 is rectangular, and a square shape is suitable.

The plate 20 has a front surface 21 , a back surface 22 , and four sides 23 .

The front surface 21 and the back surface 22 are parallel rectangular planes of the same shape.

The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20 .

The side 23 is a plane orthogonal to the front surface 21 and the back surface 22 of the plate 20 .

The plate 20 has a plurality of screw holes 24 around it.

A total of eight screw holes 24 are provided at the corners of the plate 20 and at the center of each side.

The plate 20 is firmly fixed to the base 10 by screws 25 inserted into the screw holes 24 .

Hereinafter, the position of the screw hole 24 is called a fixed location.

The plate 20 is being fixed to the base 10 at a fixed location provided around the plate 20 .

<<<Description of the vibration unit 40 >>>

The vibration unit 40 has a plurality of vibrators, and vibrates the plurality of sides 23 of the plate 20 at the same frequency.

The vibration unit 40 vibrates the side which the plate 20 opposes up and down.

The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42 .

The vibration unit 40 vibrates the outside of the fixed location with the screw hole 24 up and down.

The two vibrators of the vibrator 41 and the vibrator 42 are vibrators with the same specification.

The two vibrators of the vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

As a vibrator driven by air pressure, the following vibrators can be used.

(1) turbine vibrator

(2) roller vibrator

(3) ball vibrator

(4) piston vibrator

The vibrator of (1), (2), and (3) has little noise and can operate at high speed.

In particular, a turbine vibrator with stable operation is optimal.

A piston vibrator has the problem that a noise is large and an operation|movement is slow.

The vibration unit 40 has a distributor 47 .

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side 23 of the plate 20 .

The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the plate 20 .

The distributor 47 is a metal member bent into an L-shape.

The distributor 47 has a horizontal portion 48 and a vertical portion 49 .

The horizontal portion 48 is fixing the top surface of the vibrator 41 or the vibrator 42 .

The horizontal part 48 is fixing the vibrator 41 or the vibrator 42 so that rotation of the vibrator 41 and the vibrator 42 may mutually reverse.

In FIG. 2 , the vibrator 41 rotates counterclockwise, and the vibrator 42 rotates clockwise.

The vertical portion 49 has a vertical width equal to or less than the vertical width of the side 23 , and is fixed to the side 23 .

The distributor 47 has a front-back width larger than the front-back direction width of the ceiling surface of the vibrator 41 and the vibrator 42 .

The width in the front-back direction of the distributor 47 may be more than 2 times and less than 10 times the width of the front-back direction of the ceiling surface of the vibrator 41 and the vibrator 42, and 5 times are preferable.

The distributor 47 has a front-rear width smaller than 1/2 of the width in the front-rear direction of the plate 20 and larger than one-eighth, preferably one-fifth.

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to a wide range of the side 23 of the plate 20 .

<<<Description of the controller 80 >>>

The controller 80 controls the vibration of the vibration unit 40 .

The controller 80 vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less.

The controller 80 vibrates a plurality of vibrators at the same frequency.

The controller 80 includes an air compressor 81 , an air pipe 82 , a regulator 83 , and a processor 84 .

The air compressor 81 generates compressed air.

The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow.

The air pipe 82 is connected to the vibrator 41 and the vibrator 42 by branching in a Y-shape on the way.

The regulator 83 is a control device that controls the pressure of the compressed air.

The regulator 83 determines the vibration frequencies of the vibrator 41 and the vibrator 42 by controlling the pressure of the compressed air.

The processor 84 has a central processing unit and a program.

The processor 84 can be realized by an integrated circuit, a circuit board, or the like.

The processor 84 controls the operation of the vibration device 100 .

The processor 84 is connected to the air compressor 81 , and controls the on-off operation and operation time of the air compressor 81 .

<<<Description of the vibration method>>>

A vibration method of the vibration apparatus 100 will be described.

<Initial setting step>

In a state where the periphery of the plate 20 is fixed to the base 10 by the screws 25 , the operator turns on the power switch of the vibration device 100 .

The worker has a table of correspondence between the pressure of the compressed air and the vibration frequencies of the vibrator 41 and the vibrator 42 .

An operator sets the pressure of the compressed air corresponding to the vibration frequency of the vibrator 41 and the vibrator 42 by the regulator 83 with reference to a correspondence table.

The worker sets the pressure corresponding to any audible range frequency of 10 Hz or more and 800 Hz or less.

<Step of generating a traveling wave>

Since the air pipe 82 branches in a Y-shape and is connected to the vibrator 41 and the vibrator 42 , air of the same pressure is supplied to the vibrator 41 and the vibrator 42 . As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency.

As for the vibration frequency of the vibrator 41 and the vibrator 42, an audible range frequency is suitable.

The vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20 , and apply the traveling wave 60 of a sine wave to the left and right sides 23 of the plate 20 .

The vibrator 41 and the vibrator 42 simultaneously generate the traveling wave 60 with the same amplitude, the same wavelength, and the same frequency.

<Standing Wave Generation Step>

When the traveling waves 60 are simultaneously generated with the same amplitude, the same wavelength, and the same frequency, in the reverse direction, the traveling waves 60 from the left and right are superimposed on the plate 20 to generate the standing wave 70 .

A standing wave is a wave whose phase does not shift even when time passes.

The plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70 .

<Synchronization step>

For example, even if vibration is started in an asynchronous state where the phases of the vibrator 41 and the vibrator 42 are shifted, the phases of the vibrator 41 and the vibrator 42 coincide in a short time due to the synchronization phenomenon, and the vibrator 41 and the vibrator The oscillation of (42) becomes a synchronous state and immediately shifts to the oscillation of a standing wave.

<Up-and-down vibration step>

Hereinafter, vertical vibration by the vibration method will be described with reference to FIG. 3 .

3 : is a schematic diagram of the vertical vibration seen in the front-back direction of the center of the left-right direction of the plate 20. As shown in FIG.

In FIG. 3 , the fulcrum 26 refers to a point that is the center of the plate 20 in the vertical direction and the center of the screw hole 24 .

(a) When a downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, an upward force is generated in the center of the plate 20 through the support point 26 do.

(b) When a greater downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 rises.

(c) When the downward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 descend|falls.

(d) When an upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 , a downward force is generated in the center of the plate 20 through the support point 26 . do.

(e) When a greater upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 is lowered.

(f) When the upward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 rises.

<Flapping phenomenon>

With (a) to (f) as one cycle, the operations of (a) to (f) are repeated, so that the plate 20 vibrates up and down at the same frequency as the vibration frequencies of the vibrator 41 and the vibrator 42 . do.

Since the plate 20 vibrates so as to be flapping on the left and right between the supporting points 26, this phenomenon is hereinafter referred to as a flapping phenomenon.

The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the support points 26 by supplying air to the vibrator fixed to the left and right sides of the plate 20 .

In order to facilitate the flapping phenomenon, it is preferable that the fixing positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are on a straight line. That is, it is preferable that the plurality of vibrators exist in an extension line of a line connecting opposite fixed portions of opposite sides of the plate 20 .

Even if the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are not on a straight line and are in a deviated position, if the plate 20 is securely fixed to the base 10, the The wrapping phenomenon occurs.

If the thickness of the wall 13 is increased, there is a possibility that the flapping phenomenon is prevented. Therefore, the thickness of the wall 13 is preferably thin and the opening of the space 14 is preferably wide. The thickness of the wall 13 is preferably larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24 .

<<<specific example>>>

Hereinafter, a specific example is demonstrated.

As the plate 20, a square aluminum plate having a side of about 0.5 m is used.

Let the speed of sound V of aluminum be 6320 [m/s]. However, since the temperature of aluminum is considered constant, the change in the speed of sound due to temperature is not considered.

As the vibrator 41 and the vibrator 42, an air vibrator manufactured by Exen Corporation of the following specifications is used.

When an air pressure is 0.2 or more and 0.6 MPa or less, the air vibrator whose vibration frequency f is 119 Hz or more and 414 Hz or less is preferable. Alternatively, an air vibrator having a vibration frequency f of 110 Hz or more and 290 Hz or less is preferable when the air pressure is 0.3 or more and 0.6 MPa or less.

Here, the vibration frequency f shall use the air vibrator whose value is the following when an air pressure is below.

Vibration frequency when air pressure is 0.5 MPa f: 216.5 Hz

Vibration frequency f when the air pressure is 0.4 MPa: 206.6 ㎐

Vibration frequency when air pressure is 0.3 MPa f: 177.3 ㎐

Vibration frequency when air pressure is 0.2 MPa f: 133.0 ㎐

The wavelength can be calculated by the following formula.

Wavelength λ[m] = speed of sound V[m/s]/oscillation frequency f[Hz]

The wavelength of the traveling wave 60 is calculated as follows.

When the air pressure is 0.5 MPa:

Wavelength λ[m] = 6320 [m/s]/216.5 [Hz] = 29.19m

When the air pressure is 0.4 MPa:

Wavelength λ[m]=6320[m/s]/206.6[Hz]=30.59m

When the air pressure is 0.3 MPa:

Wavelength λ [m] = 6320 [m/s]/177.3 [Hz] = 35.65 m

When the air pressure is 0.2 MPa:

Wavelength λ[m]=6320[m/s]/133.0[Hz]=47.52m

The traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following formula.

R(y,t)=A*sin2π((t/T)-(y/λ))

L(y,t)=A*sin2π((t/T)+(y/λ))

y[m]: the place in the Y direction of the plate

t[s]: time

R(y,t): Displacement [m] of the traveling wave 60 in the Z direction at location y[m] and time t[s]

L(y,t): Displacement [m] of the traveling wave 60 in the Z direction at place y[m], time t[s]

A: Amplitude [m] of the traveling wave 60

T: Period of the traveling wave 60 [s]

λ: wavelength [m] of the traveling wave 60

The standing wave 70 generated by the superposition of the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following sine standing wave.

z(y,t)

= R(y,t)+L(y,t)

= 2A*sin(2π(t/T))*cos(2π(y/λ))

y[m]: the place in the Y direction of the plate

t[s]: time

z(y,t): displacement [m] in the Z direction of the standing wave 70 at location y[m] and time t[s]

A: Amplitude [m] of the traveling wave 60

T: Period of the traveling wave 60 [s]

λ: wavelength [m] of the traveling wave 60

cos(2π(y/λ)) represents the amplitude of the standing wave 70 .

A place where the amplitude of the standing wave 70 is 0, that is, a place y where cos(2π(y/λ)) is 0 is called a "node".

A place where the amplitude of the standing wave 70 is maximum, that is, a place y where the absolute value of cos(2π(y/λ)) is 1, is called "double".

In order to vibrate the plate 20 up and down, what is necessary is just to prevent the node of a standing wave from being generated in any place y in the left-right direction between the support points 26. As shown in FIG.

Since the nodes of the standing wave are generated for every half wavelength, if the distance between the supporting points 26 is less than half the wavelength of the standing wave, it is possible to prevent the nodes of the standing wave from being present in any place y in the left and right direction of the plate 20. have.

If the position of the "knot" of the standing wave 70 is set as a fixed position, and the fixed position is maintained (screwed), the "knot" becomes the fulcrum of the flapping.

If the distance between the supporting points 26 is larger than the half-wavelength of the standing wave, nodule is generated in the plate 20 .

Accordingly, the distance between the fixing points in the left and right directions of the plate 20 should be less than the following length.

Half-wavelength when air pressure is 0.5 MPa: Wavelength λ[m]/2=14.56m

Half-wavelength when air pressure is 0.4 MPa: Wavelength λ[m]/2=15.29m

Half-wavelength when air pressure is 0.3 MPa: Wavelength λ[m]/2=17.82m

Half-wavelength when air pressure is 0.2 MPa: Wavelength λ[m]/2=23.766m

As described above, the frequency and wavelength of the standing wave are determined by the air pressure of the vibrator 41 and the vibrator 42 , and the maximum length of the plate 20 is determined.

<<<Vibration measurement result>>>

Using a square aluminum plate having a side of about 0.5 m as the plate 20, the vibration of the plate 20 was measured.

As shown in FIG. 4 , the base 10 is removed from the vibration device 100 of FIG. 1 , the plate 20 is mounted on an air mat, the periphery of the plate 20 is made free, and the plate 20 is ) was vibrated, and the amplitude of the vibration was measured.

5 to 8 are diagrams showing results of measurement of vibration in the vertical direction at 49 points in the region of the lower half of the plate 20 .

5 to 8 show the displacement in the Z direction (displacement in the upward direction) in the case of FIG. 3B by setting the displacement in the Z direction when the plate 20 is flat to zero.

The vibration in the region of the upper half of the plate 20 shown in FIGS. 5 to 8 was not measured because it can be considered that the region is symmetrically vibrating with the region of the lower half of the plate 20 .

5 : is a distribution diagram of the up-and-down vibration of the plate 20 by the pneumatic pressure of 0.2 MPa.

6 : is a distribution diagram of the up-and-down vibration of the plate 20 by the pneumatic pressure of 0.3 MPa.

7 : is a distribution diagram of the up-and-down vibration of the plate 20 by the pneumatic pressure of 0.4 MPa.

8 is a distribution diagram of vertical vibration of the plate 20 by an air pressure of 0.5 MPa.

5, the amplitude of the vertical vibration is 14.8 µm>12.6 µm>9.60 µm>7.68 µm<8.00 µm<10.5 µm<15.0 µm, and the end part of the plate 20 oscillates more closely than the central part the amplitude of is large. That is, in the central portion of the plate 20, vibration non-uniformity such as a knuckle is generated.

As the reason, the pressure is weak with the pneumatic pressure of 0.2 MPa, and it is thought that it may be because the vibrator 41 and the vibrator 42 cannot be vibrated stably.

6, the amplitude of the vertical vibration is 5.28 µm <9.53 µm <12.2 µm <13.2 µm> 13.1 µm> 11.0 µm> 8.40 µm, and the central portion of the plate 20 is larger than the end portion. The amplitude of the vibration is large. That is, it is considered that a ship has occurred in the central portion of the plate 20 .

7 and 8, the amplitude of vibration is larger at the center of the plate 20 than at the end. That is, it is considered that a ship is generated in the central portion of the plate 20 .

Therefore, at a pneumatic pressure of 0.2 MPa, the plate 20 cannot be accurately vibrated in the vertical direction.

On the other hand, at an air pressure of 0.3 MPa or more and 0.5 MPa or less, the plate 20 can be accurately vibrated in the vertical direction.

The measurement result of the vibration in the front-back, left-right direction is demonstrated using FIG.

9 : is a table|surface which shows the measurement result of the vibration in the horizontal direction in the measurement points 1-12 of the two sides of the plate 20 in FIGS. 5-8.

In the pneumatic pressure of 0.2 MPa, the value of more than 2 micrometers is shown in the measurement point 1 and the measurement point 2.

In the pneumatic pressure of 0.3 Mpa or more and 0.5 Mpa or less, the value of less than 2 micrometers is shown at all points.

At a pneumatic pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of the oscillation in the front-rear, left-right direction is less than about 10% or less than 15% of the amplitude of the oscillation in the vertical direction, and it can be considered that there is no vibration in the horizontal direction.

The above measurement results are measurement results when the plate 20 is vibrated with the periphery of the plate 20 free.

As shown in Fig. 1, since the periphery of the plate 20 of the vibrating device 100 is fixed to the base 10 by screws 25, in reality, the periphery of the plate 20 (in particular, screws The part of the hole 24) has limited vertical vibration.

When the periphery of the plate 20 is made free and the plate 20 is vibrated, the plate 20 vibrates up and down with the center doubling. Therefore, even when the plate 20 is vibrated by fixing the periphery of the plate 20 at a fixed location, the plate 20 tries to vibrate up and down with the center doubling. As a result, as shown in FIG. 3 , it can be considered that the flapping phenomenon occurs with the center of the flapping between the supporting points 26 .

And, when the periphery of the plate 20 is fixed to the base 10 and the plate 20 is vibrated, compared to the case where the periphery of the plate 20 is freed and the plate 20 is vibrated, the Vibration can be considered to be further reduced.

In addition, from the above measurement results, if the distance between the fixed points in the left and right direction of the plate 20 is less than half a wavelength, even if the position of the "node" of the standing wave 70 is not set as the fixed location, the fixed point is the flapping position. This can be considered as a support point.

For example, when the air pressure is 0.4 MPa, the half-wavelength is 15 m, but even when the distance between the fixed point in the left-right direction of the plate 20 is about 0.5 m, "nodule" does not appear.

As a result, even when the distance of the fixed point is 10 m, 5 m, 1 m, or the like, it can be considered that the fixed point serves as a support point for flapping.

<<<Explanation of comparative example>>>

<One-sided vibration>

FIG. 10 shows that the vibrator 42 and the distributor 47 are removed from the configuration of FIG. 4 .

The plate 20 vibrates only by the vibrator 41 on one side.

The traveling wave 60 generated from the vibrator 41 on one side 23 of the plate 20 is reflected by the other side 23 to generate a reflected wave.

The traveling wave 60 and the reflected wave overlap to form a standing wave.

In the structure of FIG. 10, as shown in FIG. 11, it was confirmed that the vibration nonuniformity like a knuckle generate|occur|produces in the center right side of the plate 20. As shown in FIG.

Moreover, as shown in FIG. 11, in the 12 points mentioned above, the location where the amplitude of the vibration in a horizontal direction exceeded 9 micrometers generate|occur|produced. As the reason, it is considered that the elliptical vibration generate|occur|produced in the plate 20.

Therefore, when vibrating the plate 20 from one side, the plate 20 cannot be vibrated correctly.

<Vibration on both sides in the lateral direction>

FIG. 12 is fixed by rotating the fixing directions of the vibrator 41 and the vibrator 42 by 90 degrees from the configuration of FIG. 4 so that the rotation directions of the vibrator 41 and the vibrator 42 are reversed.

In the structure of FIG. 12, as shown in FIG. 13, it was confirmed that the vibration nonuniformity like a knuckle generate|occur|produces in the center part of the plate 20. As shown in FIG.

Therefore, when the rotation direction of the vibrator 41 and the vibrator 42 is set to the lateral direction while being reversed, the plate 20 cannot be vibrated correctly.

Similarly, it is thought that the plate 20 cannot be vibrated correctly even when the rotation direction of the vibrator 41 and the vibrator 42 is made the same and it is made into a horizontal direction.

<Vibration on one side in the lateral direction>

Although not shown, it was confirmed from the structure of FIG. 12 that even when the vibrator 42 and the distributor 47 were removed, vibration nonuniformity like a knuckle would generate|occur|produce in the center part of the plate 20. As shown in FIG.

Therefore, in the case of unilateral vibration in the lateral direction, the plate 20 cannot be vibrated accurately.

<<<Summary>>>

The vibrating device 100 of the present embodiment generates traveling waves 60 from the left and right of the plate 20 at the same time at the same amplitude, at the same wavelength and at the same frequency by the vibrator 41 and the vibrator 42, which are audible frequency vibration sources. make it As a result, in the plate 20, a standing wave is generated by superposition of traveling waves in the reverse direction.

In the vibration generating process in the vertical direction of the vibration apparatus 100 of the present embodiment, traveling waves 60 from the left and right to the plate 20 from the audible frequency vibration source are simultaneously generated to the plate 20 at the same frequency. The plate 20 vibrates by a standing wave, but vibrates only in the vertical direction by the vibrating action of the standing wave. And it does not vibrate in the front-back, left-right direction. The vibration apparatus 100 uses only this vibration in an up-down direction.

The vibration device 100 may change the audible frequency frequency during excitation by the controller 80 . The audible range frequency is the range of 10 Hz or more and 20000 Hz or less, but the audible range frequency used in the present embodiment is set in the range of 10 Hz or more and 800 Hz or less.

The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic vibration source, or a piezoelectric vibration source as a vibration source.

The vibration unit 40 converts the vibration sources such as the vibrator 41 and the vibrator 42 appropriately according to the required frequency range, a voice coil motor type vibration source which is another sound wave vibration source, an electromagnetic vibration source, or a piezoelectric vibration source. It can be replaced with a type vibration source, etc.

The controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control component. In order to vibrate the vibration source at an arbitrary frequency, the controller 80 can be replaced with an arbitrary waveform generator, a bipolar power supply, or the like as a control component corresponding to the acoustic vibration source.

The vibrating unit 40 vibrates the plate 20 up and down by pairing the vibrators provided outside the center of the two facing sides of the plate 20 as a pair.

The vibrating unit 40 generates traveling waves with the same amplitude, the same wavelength, and the same frequency at the same time by means of a pair of vibrators provided outside the center of the two facing sides of the plate 20, and vibrates the plate 20 as a standing wave. make it

The vibrator 100 of this embodiment is fixing the vibrator 41 and the vibrator 42 to the outer side of the plate 20. As shown in FIG.

That is, in a plan view, the vibrator 41 and the vibrator 42 do not overlap the plate 20 .

Accordingly, the vibrator 41 and the vibrator 42 do not inhibit the vertical vibration of the plate 20 .

The vibrator 100 of this embodiment is fixing the vibrator 41 and the vibrator 42 to the side 23 of the plate 20. As shown in FIG.

The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the back surface 22 of the plate 20 .

Accordingly, the traveling wave 60 is generated from both ends of the plate 20 in the left and right direction, and the entire area of the plate 20 in the left and right direction vibrates up and down.

The vibration apparatus 100 of this embodiment does not vibrate the whole plate 20 up and down uniformly.

The central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the left-right direction.

The reason why the amplitude decreases toward the periphery in the left-right direction is that the left and right ends of the plate 20 are fixed and that a standing wave is generated in the plate 20 .

Further, the central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the front-rear direction.

The reason the amplitude decreases toward the periphery in the front-rear direction is that the front and rear ends of the plate 20 are fixed.

It is good also considering the front-back both ends of the plate 20 as free ends which can make up-and-down vibration freely.

If the front and rear both ends of the plate 20 are free ends, the amplitude in the front and rear direction of the plate 20 becomes uniform. Alternatively, the amplitude of the plate 20 in the front-rear direction approaches uniformity.

The vibrator 100 of this embodiment has arrange|positioned the vibrator 41, the vibrator 42, and two fixed places (screw hole 24) on a straight line.

The vibrator 41 and the vibrator 42 are located outside the two fixing points (screw hole 24).

The vibrator 41 and the vibrator 42 are not inside the two fixing points (screw hole 24).

The plate 20 vibrates up and down by a flapping phenomenon centered between two fixed points (support points 26).

<<<Effect of Embodiment 1 >>>

According to the present embodiment, by generating traveling waves 60 from the left and right of the plate 20 at the same frequency at the same time by the vibrator 41 and the vibrator 42, a standing wave is generated, and the plate 20 moves only in the vertical direction. vibrate

For example, even in the case of oscillation in the front-rear, left-right directions, compared with the vibration in the vertical direction, it becomes negligible.

By loading the work on the plate 20 of the vibrating device 100, it is possible to vibrate the work only in the vertical direction.

<<<change example >>>

Modification example 1.

The vibration apparatus 100 shown in FIG. 14 removes the distributor 47 from the structure of FIG. 1, and adds the vibrator 41 and the vibrator 42 of the vibration unit 40, and the side 23 of the plate 20. ) is directly fixed to the

Modification example 2.

In the vibrating device 100 shown in FIG. 15 , the plate 20 has a size larger than the base 10 in plan view, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are connected to the plate 20 ) is directly fixed to the outer edge of the back surface (22).

Modification example 3.

The vibrator 100 shown in FIG. 16 fixed the vibrator 41 and the vibrator 42 with the distributor 47 interposed between the base 10 and the plate 20.

The distributor 47 may be a flat plate.

Modification 4.

In FIG. 2, you may provide so that the vibrator 41 may be rotated clockwise and the vibrator 42 may be rotated counterclockwise.

In FIG. 2, it is preferable to reverse the rotation direction of the vibrator 41 and the vibrator 42 rather than to rotate the vibrator 41 and the vibrator 42 in the same direction.

Also in the case of reversing the rotation direction of the vibrator 41 and the vibrator 42, as shown in FIG. 2, it is preferable to rotate the vibrator 41 counterclockwise, and to rotate the vibrator 42 clockwise.

Modification 5.

The vibration unit 40 may have more than two even number of audible range frequency vibration sources.

As shown in FIG. 17 , a vibrator 41 , a vibrator 42 , a vibrator 43 , and a vibrator 44 may be provided on the plate 20 .

In (a), the vibrator 41 and the vibrator 42 are opposing, and the vibrator 43 and the vibrator 44 are opposing.

The vibrator 41 and the vibrator 43 are being fixed to the same side 23 , and the vibrator 42 and the vibrator 44 are being fixed to the other side 23 .

Standing waves are generated in parallel.

In (b), the vibrator 41 and the vibrator 42 are opposing, and the vibrator 43 and the vibrator 44 are opposing.

The vibrator 41 , the vibrator 42 , the vibrator 43 , and the vibrator 44 are respectively fixed to the respective side 23 .

Standing waves are generated orthogonally.

In (c), the vibrator 41 and the vibrator 44 are opposing, and the vibrator 42 and the vibrator 43 are opposing.

A vibrator 41 , a vibrator 42 , a vibrator 43 , and a vibrator 44 are fixed to each corner of the plate 20 , respectively.

Standing waves are generated orthogonally.

Although not shown, the shape of the plate 20 may be circular, elliptical, and other shapes in planar view.

Modification 6.

The shape of the plate 20 should just be polygonal in planar view.

The vibration unit 40 may have an odd number of audible frequency vibration sources.

As shown in FIG. 18 , the plate 20 may be a triangular or hexagonal plate 20 .

(a) has shown the triangular plate 20. As shown in FIG.

The vibrator 41 , the vibrator 42 , and the vibrator 43 are respectively being fixed to the individual side 23 .

(b) has shown the hexagonal plate 20. As shown in FIG.

The vibrator 41, the vibrator 42, and the vibrator 43 are being fixed to the individual side 23 for every every other, respectively.

Although not shown, you may fix a vibrator to all the sides 23 of the hexagonal plate 20. As shown in FIG.

Although not shown, the shape of the plate 20 may be circular, elliptical, and other shapes in planar view.

The vibration unit 40 may have one or a plurality of air vibrators fixed to the plate 20 on one side or on the outside of a plurality of sides.

Specifically, the vibration unit 40 may arrange|position an air vibrator as follows.

Only one side of the plate 20, one air vibrator on the outside of the side

Only one side of the plate 20, a plurality of air vibrators on the outside of the side

One air vibrator on the outside of each side of the side of some of the plurality of sides of the plate 20 (FIG. 18(b))

A plurality of air vibrators on the outside of each side of the side of some of the plurality of sides of the plate 20 (FIG. 17(a))

One air vibrator on the outside of each side of the front side of the plate 20 (FIGS. 17(b) and 18(a))

A plurality of air vibrators on the outside of each side of the front side of the plate 20

The controller 80 vibrates all the air vibrators at the same frequency.

Instead of the air vibrator, another type of vibrator may be used.

Modification 7.

The vibration unit 40 may have one audible frequency vibration source.

The vibration apparatus 100 of FIG. 19 has one vibrator 45 and the frame 46. As shown in FIG.

The frame 46 is a U-shaped metal part.

In the frame 46 , the vibrator 45 is fixed to the center of the bottom, and the upper portions of both ends are fixed to the distributor 47 .

The vibrator 45 vibrates up and down.

The vibration of the vibrator 45 is transmitted to the two distributors 47, and makes the two distributors 47 vibrate up and down.

In this way, it is not essential to provide a plurality of vibrators on both sides of the plate 20, and the vibration unit 40 simultaneously transmits traveling waves 60 from a plurality of sides of the plate 20 with the same amplitude, the same wavelength, and There should be a mechanism that generates the same frequency.

Modification 8.

The vibration device 100 of FIG. 20 has a spacer 50 between the plate 20 and the distributor 47 .

The spacer 50 is a metal rod of a square pillar that is fitted and fixed between the side 23 of the plate 20 and the vertical portion 49 of the distributor 47 .

The spacer 50 is a component that moves the generating position of the traveling wave 60 away from the supporting point 26 of the flapping phenomenon.

By changing the length of the spacer 50 in the left-right direction, the distance between the audible frequency vibration source and the fixed point can be changed.

Even if the traveling waves 60 have the same amplitude, the same wavelength, and the same frequency, the longer the length of the spacer 50 in the left and right direction, the stronger the flapping phenomenon appears.

With the spacer 50 , the amplitude of the vertical vibration of the plate 20 can be adjusted.

Modification 9.

In order to fix the base 10 and the plate 20, instead of the screw hole 24 and the screw 25, other fixing metal members or other fixing mechanisms may be used.

Embodiment 2.

In Embodiment 2, the point different from Embodiment 1 is demonstrated.

<<<Description of configuration>>>

21 is a block diagram of a screen printing apparatus 200 according to the second embodiment.

The screen printing apparatus 200 includes the vibration apparatus 100 described in the first embodiment.

The screen printing apparatus 200 is an apparatus that prints on the work 900 .

The work 900 is a substrate of an electronic device or a substrate of a circuit.

The screen printing apparatus 200 has a screen plate 201 with a screen 202 attached to a frame.

Screen 202 is a mesh screen, metal screen, or other screen.

The screen 202 has a printed pattern such as electrode terminals, electrodes, and wiring.

A paste 204 is present on the surface of the screen 202 .

The screen printing apparatus 200 has a squeegee 203 .

The squeegee 203 moves the surface of the screen 202 to print electrode terminals, electrodes, wiring, etc. on the work 900 with the paste 204 .

The plate 20 of the vibration apparatus 100 is a table on which the work 900 is mounted.

The plate 20 functions as a suction plate for adsorbing the work 900 .

The plate 20 has a plurality of through-holes 205 penetrating vertically.

The base 10 functions as a suction box that sucks air.

The screen printing apparatus 200 has a suction pipe 206 and a vacuum pump 207 .

The suction pipe 206 is connected to the base 10 and the vacuum pump 207 , and sucks air from the space 14 .

As shown in FIG. 21 , the vibrator 41 and the vibrator 42 are preferably arranged in the same direction as the printing direction of the squeegee 203 . That is, it is preferable that the printing direction of the squeegee 203 coincide with the generation direction of the standing wave.

<<<Description of the action>>>

The processor 84 of the screen printing apparatus 200 operates the vibration apparatus 100 to vibrate the plate 20 during printing.

The vibration of the plate 20 is transmitted to the work 900 and the screen plate 201 to vibrate the paste 204 .

As the paste 204 vibrates, the paste 204 tends to pass through the printed pattern of the screen 202 .

In the case of hole plugging printing in which the holes or grooves of the work 900 are filled with paste, the work 900 vibrates, so that the paste 204 is easily filled in the holes or grooves of the work 900 .

In the case of hole plugging printing, the processor 84 operates the vibration device 100 to vibrate the plate 20 even after printing. By vibrating the plate 20 even after printing, the paste 204 can be filled to the bottom of the hole or groove.

<<<Effect of Embodiment 2 >>>

According to this embodiment, the vibration apparatus 100 can be used for the screen printing apparatus 200 .

According to this embodiment, the fluctuation|variation in the filling amount of the paste which enters into a hole at the time of hole plugging in screen printing can be made small.

In particular, in the case of hole plugging printing using a hard paste, the filling amount is improved.

According to this embodiment, since the plate 20 vibrates only in the vertical direction and does not vibrate in the front-rear, left-right directions, the workpiece 900 and the screen plate 201 do not shift in the front-rear, left-right directions. Therefore, the print pattern of the work 900 is not blurred.

Embodiment 3.

In Embodiment 3, the point different from Embodiment 1 is demonstrated.

22 is a perspective view of a shearing device 300 according to the third embodiment.

The front end device 300 includes the vibration device 100 described in the first embodiment.

The shearing device 300 is a device for cutting the work 900 .

The shearing device 300 has a blade 301 for cutting the work 900 .

The plate 20 of the vibration apparatus 100 is a table on which the work 900 is mounted.

During operation, the processor 84 of the shearing device 300 operates the vibrating device 100 to vibrate the plate 20 in the vertical direction.

The vibration of the plate 20 is transmitted to the work 900 and vibrates the work 900 .

As the work 900 vibrates in the vertical direction, the pressure from the blade 301 to the work 900 is intermittent.

<<<Effect of Embodiment 3 >>>

According to this embodiment, the vibration device 100 can be used for the shearing device 300 .

According to this embodiment, since the pressure from the blade 301 to the work 900 is intermittent, the durability time of the blade 301 is extended.

Embodiment 4.

In Embodiment 4, the point different from Embodiment 1 is demonstrated.

23 is a perspective view of the punching device 400 according to the fourth embodiment.

The punching apparatus 400 has the vibration apparatus 100 demonstrated in Embodiment 1. FIG.

The punching device 400 is a device for forming a hole in the work 900 .

The punching device 400 has a drill 401 for forming a hole in the work 900 .

The plate 20 of the vibration apparatus 100 is a table on which the work 900 is mounted.

During operation, the processor 84 of the punching device 400 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.

The vibration of the plate 20 is transmitted to the work 900 and vibrates the work 900 .

When the work 900 vibrates in the vertical direction, the pressure from the drill 401 to the work 900 is intermittent.

<<<Effect of Embodiment 4 >>>

According to this embodiment, the vibration apparatus 100 can be used for the punching apparatus 400 .

According to this embodiment, since the pressure from the drill 401 to the work 900 becomes intermittent, the durability time of the drill 401 is extended.

Embodiment 5.

In Embodiment 5, the point different from Embodiment 1 is demonstrated.

<<<Configuration of the vibrating input device 500>>>

24 is a perspective view of the vibration input device 500 according to the fifth embodiment.

The vibration input device 500 is a device for inserting a plurality of components into a plurality of recesses by vibration.

The plate 20 is a square flat plate.

A plurality of concave portions 29 are arranged in the plate 20 .

A plurality of components 901 are randomly put into the plate 20 .

Although not shown, on the outer periphery of the plate 20 , there is a frame that prevents the component 901 from flowing away from the plate 20 .

The vibration input device 500 has a flat base 10 , a plate 20 , and a vibration unit 40 .

The plate 20 is fixed to the base 10 via four vibrators.

The side 23 of the plate 20 is not fixed and has a free end.

The vibration unit 40 has a plurality of vibrators fixed to the outside of the four corners of the plate 20 .

The vibration unit 40 of FIG. 24 has four vibrators and four distributors 47. As shown in FIG.

The four vibrators are fixed to the base 10 of a flat plate at 45 degrees with respect to the front-back direction and the left-right direction.

The four vibrators are fixed to the outside of the four corners 27 of the plate 20, respectively.

The vibrator is arranged on a diagonal extension line of the plate 20 .

The vibrator 41 and the vibrator 44 are fixed opposite to the two corners at the edge part of one diagonal of the plate 20. As shown in FIG.

The vibrator 43 and the vibrator 42 are fixed opposite to two corners at the other diagonal ends of the plate 20 .

Distributor 47 is a rectangular plate.

The distributor 47 is fixing the corner 27 of the plate 20 to the upper surface.

The distributor 47 is fixing the upper surface of the vibrator to the lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted into screw holes 24 .

The four corners 27 of the plate 20 serve as four fixed positions of the plate 20 .

In plan view, the vibrator is secured to the outside of the corner 27 of the plate 20 . That is, in plan view, the four vibrators do not overlap the plate 20 .

As for the four vibrators used for the vibration input apparatus 500, electromagnetic vibration sources, such as an electromagnetic vibrator, are suitable. An electromagnetic vibration source can control a frequency more finely than an air vibrator.

<<<Operation of the vibration input device 500>>>

The controller 80 vibrates the two vibrators fixed at the two corners at the diagonal ends of the plate 20 at the same frequency.

The four vibrators are connected to the processor 84 , and the vibrations of the four vibrators are controlled by the processor 84 .

The traveling waves from the four vibrators travel from the four corners of the plate 20 toward the center of the plate 20 .

The vibrator 41 and the vibrator 44 generate traveling waves simultaneously with the same amplitude, the same wavelength, and the same frequency in one diagonal direction, and the traveling waves overlap.

The vibrator 43 and the vibrator 42 generate traveling waves at the same time in separate diagonal directions with the same amplitude, the same wavelength, and the same frequency, so that four orthogonal traveling waves are superimposed on the plate, and the standing waves are superimposed up and down vibrate

The processor 84 may change the vibration generated in the plate 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves.

In particular, the processor 84 generates, on the plate, a standing wave in which four traveling waves having only changed phases are superimposed on a traveling wave having the same amplitude, the same wavelength, and the same frequency, and the component is placed on the plate 20 by vertical vibration of the standing wave. (901) can be rotated, moved left and right back and forth, or jumped.

The processor 84 may generate the four traveling waves by shifting the phases by 90 degrees, 180 degrees, 270 degrees, or an arbitrary angle.

Hereinafter, the vertical vibration of the vibration input apparatus 500 is demonstrated using FIG.

Fig. 25 shows a state of vertical vibration of the plate 20 when traveling waves having the same phase, amplitude, wavelength, and frequency are superimposed and standing waves are superimposed on each other.

Fig. 25(a) is a schematic diagram of vertical vibration in the front-rear direction of the center of the plate 20 in the left-right direction.

Fig. 25(b) is a schematic diagram of vertical vibration of one diagonal line connecting the corners 27 of the plate 20. As shown in Figs.

Since the side 23 is a free end, as shown in Fig. 25A, the plate 20 vibrates while the side 23 moves up and down.

On the other hand, since the corner 27 is fixed and the corner 27 serves as the supporting point 26, as shown in Fig. 25(b), the corner 27 does not move up and down, and the plate 20 is vibrating

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the component 901 , which causes the component 901 to vibrate.

The component 901 moves the surface of the plate 20 by vibrating up and down, and is fitted into the recessed portion 29 .

Modification example 1.

The vibration input device 500 of FIG. 26 cuts the corner 27 of the plate 20, and fixed the vibrator to the cut surface.

In the vibration input apparatus 500 of FIG. 26, the distributor 47 becomes unnecessary.

In plan view, the vibrator is secured to the outside of the corner 27 of the plate 20 . That is, in plan view, the four vibrators do not overlap the plate 20 .

Modification example 2.

You may use the vibration apparatus 100 of embodiment mentioned above for the vibration input apparatus 500.

For the vibration input device 500 , it is preferable to use a vibration device capable of generating a standing wave by orthogonally crossing four traveling waves or crossing a plurality of traveling waves. In addition, when the vibration device intersects traveling waves, it is preferable to make all the crossing angles of the traveling waves equal, thereby superimposing the traveling waves to generate a stable standing wave.

Modification example 3.

In the vibration input device 500 of FIG. 27 , the struts 51 are provided at the corners 27 of the plate 20 , and the plate 20 is fixed to the base 10 by four struts 51 .

The post 51 is fixing the plate 20 with screws inserted into the screw holes 24 .

The vibrator is fixed only to the cut surface of the corner 27 of the plate 20 , and the vibrator is installed on the plate 20 in a suspended state in the air.

In the case of Fig. 27, the plate 20 vibrates due to the flapping phenomenon described above by using the fixing point in the screw hole 24 as a fulcrum.

In the case of FIG. 27 , the plate 20 is fixed by four posts 51 , but since the posts 51 are thin posts, the plate 20 can vibrate not only up and down but also forward and backward, left and right.

Modification 4.

The shape of the plate 20 should just be polygonal in planar view.

As shown in FIG. 28 , the plate 20 may be a triangular or hexagonal plate 20 .

(a) has shown the triangular plate 20. As shown in FIG.

The vibrator 41 , the vibrator 42 , and the vibrator 43 are each fixed to a respective corner 27 .

(b) has shown the hexagonal plate 20. As shown in FIG.

The vibrators are each fixed to a respective corner 27 .

Although not shown, the shape of the plate 20 may be circular, elliptical, and other shapes in planar view.

Modification 5.

As shown in Figure 29, vibrators do not have to be in every corner.

(a) has shown the case where the vibrator is arrange|positioned on one diagonal of the square plate 20. As shown in FIG.

The vibrator 41 and the vibrator 42 are fixed to every other corner 27 .

(b) has shown the case where the vibrator is arrange|positioned on two diagonal lines of the hexagonal plate 20. As shown in FIG.

Although not shown, the shape of the plate 20 may be circular, elliptical, and other shapes in planar view.

Modification 6.

As shown in Fig. 30, a plurality of vibrators may be provided at a corner.

(a) has shown the case where two vibrators are arrange|positioned at each corner of the four corners of the rectangular plate 20 by two.

(b) has shown the case where two vibrators are arrange|positioned at each corner of the four corners of the square plate 20, and the vibrator is arrange|positioned in the center outer side of the side which opposes.

Although not illustrated, the shape of the plate 20 may be an octagon, a decagon, or other polygons in plan view.

The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one corner or a plurality of corners of the plate 20 .

Specifically, the vibration unit 40 may arrange|position an air vibrator as follows.

One air vibrator on the outside of only one corner of the plate (20)

One air vibrator on the outside of each corner of some corners of the plurality of corners of the plate 20 (FIGS. 29(a) and (b))

One air vibrator on the outside of each corner of all corners of the plurality of corners of the plate 20 (FIGS. 28(a) and (b))

Two air vibrators outside each corner of all corners of the plurality of corners of the plate 20 (FIGS. 30(a) and (b))

The controller 80 vibrates all the air vibrators at the same frequency.

Instead of the air vibrator, another type of vibrator may be used.

Embodiment 6.

In Embodiment 6, the point different from Embodiment 1 is demonstrated.

<<<Configuration of distributor (47)>>>

FIG. 31 is a diagram showing the distributor 47 .

The distributor 47 of FIG. 31 is being fixed to the plate 20 with the front surface 21 and the back surface 22 of the plate 20 interposed therebetween.

(a) has shown the case where the vibrator is arrange|positioned outside the center of one side of the square plate 20. As shown in FIG.

The distributor 47 has a U-shaped groove 52 on the side when viewed from the front-rear direction, and the center outer edge of the plate 20 is fitted into the groove 52 .

The plate 20 has three screw holes 24 used as fixed locations on the two sides to which the vibrator was fixed.

The plate 20 fixes the distributor 47 with the screw of the screw hole in the center.

The plate 20 does not have the screw hole 24 on the side to which the vibrator is not fixed.

Like (a), it is not necessary to provide a fixed location in all the sides, and you may provide only in the two sides which oppose.

(b) has shown the case where the vibrator is arrange|positioned at the four corners of the square plate 20. As shown in FIG.

The distributor 47 has a V-shaped groove 53 on the side as viewed from the up-down direction, and the corner of the plate 20 is fitted into the groove 53 .

The bottom portion where the V-shaped groove 53 runs in a straight line is in surface contact with the two orthogonal ends of the two sides.

The triangular side surface of the V-shaped groove 53 is in surface contact with the front surface and the back surface of the corner 27 .

The plate 20 has a screw hole 24 in the outer periphery of the corner.

The plate 20 fixes the distributor 47 with the screw of the screw hole.

<<<Effect of Distributor (47)>>>

Since the distributor 47 is fixed to the plate 20 with the plate 20 interposed therebetween, the vibration of the vibrator from the side of the plate 20 even when the plate 20 is thin and the side height in the vertical direction is small. can convey

Variant 1.

The shape of the distributor 47 should just be a shape which can transmit the vibration of a vibrator to the side of the plate 20.

Although the distributor 47 may be fixed only to the side or only a corner of the plate 20, you may fix the distributor 47 to the following locations.

Side and surface of plate (20)

Side and back side of plate 20

The side and the surface and the back surface of the plate 20

Only the side surface of the plate (20)

Only the side back side of the plate (20)

The side surface and the back surface of the plate 20

Corners and surfaces of plate 20

Corner and back side of plate 20

Corner and surface and back side of plate 20

Only the surface of the corner of the plate 20

Only the back side of the corner of the plate 20

The front and back surfaces of the corners of the plate 20

In either case, the same effect as when the distributor 47 is fixed only to the side or corner of the plate 20 can be obtained, and in either case, it can be said that the side of the plate vibrates.

Embodiment 7.

In Embodiment 7, the point different from Embodiment 1 is demonstrated.

<<<Configuration of the plate 20 and the vibration unit 40 >>>

32 : is a figure which shows the plate 20 and the vibration unit 40. As shown in FIG.

32 : has shown the vibration unit 40 which vibrates several locations of the outer periphery of the plate 20 from the outside of the plate 20. As shown in FIG.

The outer periphery of the plate 20 refers to an outline when the plate 20 is viewed in a plane.

The outside of the plate 20 means the outside of the outline of the plate 20 .

The vibration unit 40 simultaneously generates traveling waves at the same wavelength from the outer periphery of the plate 20 toward the center of the plate.

(a) shows the case where the vibrator 41 is arranged at the corner 27 of the triangular plate 20, and the vibrator 42 is arranged outside the center of the side 23 opposite the corner 27. are doing

(b) shows a case where the vibrator 41 is arranged at the corner 27 of the pentagonal plate 20, and the vibrator 42 is arranged outside the center of the side 23 opposite the corner 27. are doing

The vibration unit 40 vibrates a plurality of places of the plate 20 .

The plurality of locations may be a plurality of locations composed of only the plurality of sides 23 of the plate 20, as described in the first embodiment.

As described in Embodiment 5, the plurality of locations may be a plurality of locations consisting only of the plurality of corners 27 of the plate 20 .

The plurality of locations may be a plurality of locations including the side 23 and the corner 27 of the plate 20 as described with reference to FIGS. 32A and 32B .

In the case of a plurality of locations comprising the side 23 and the corner 27, any of the following may be sufficient.

1 side (23) and 1 corner

Multiple sides (23) and one corner

1 side (23) and multiple corners

A plurality of sides 23 and a plurality of corners

Typical examples of the plurality of sides 23 and the plurality of corners are all the sides 23 and all the corners.

It is preferable that a plurality of places be arranged in pairs on a straight line passing through the center or center of gravity of the plate 20 such as a diagonal or a diameter of the plate 20 .

The side 23 need not be flat.

(c) shows a case in which the vibrator 41 and the vibrator 42 are arranged in the radial direction of the circular plate 20, and the vibrator 43 and the vibrator 44 are arranged in the orthogonal radial direction. .

In the case of (c), the case where the side 23 is a cylindrical outer peripheral curved surface is shown.

Other curved surfaces may be sufficient as the side 23, and the combination of a curved surface and a flat surface may be sufficient as it.

In (c), the vibrator 43 and the vibrator 44 may not be needed.

In (c), you may increase the number of vibrators.

<<<Plane shape of plate 20 >>>

33 : is a figure which shows the planar shape of the plate 20. As shown in FIG.

The planar shape of the plate 20 is not limited to a regular polygon or a circle.

(a) has shown the case where the planar shape of the plate 20 is a cross shape.

(b) has shown the case where the planar shape of the plate 20 is a star shape.

(c) has shown the case where the planar shape of the plate 20 is an elongate rectangle with rounded corners.

(d) has shown the case where the planar shape of the plate 20 is elliptical.

Although not shown, the planar shape of the plate 20 may be a trapezoidal shape, a cloud shape, a mountain shape, an irregular shape, or other shapes.

<<<Cross-sectional shape of plate 20 >>>

34 : is a figure which shows the A-A cross-sectional shape in FIG. 1 of the plate 20. As shown in FIG.

The cross-sectional shape of the plate 20 is not limited to a rectangle.

(a), (c) and (e) have shown the case where the center lower part of the plate 20 is concave upward.

(a) shows the case where it is concave in a concave shape.

(b) has shown the case where it is concave in a V shape.

(c) shows the case where the arc is concave.

(b), (d) and (f) have shown the case where the center upper part of the plate 20 bulges downward.

(b) has shown the case where it bulges in a convex shape.

(d) has shown the case where it bulges in a V shape.

(f) shows the case of arc-shaped bulge.

(g) has shown the case where the central part of the plate 20 has a concave shape in which the upper and lower sides are concave.

(h) has shown the case where the center part of the plate 20 is convex shape which bulges upward and downward.

Although not shown, the cross-sectional shape of the plate 20 may be an uneven shape, a wave shape, or other shapes.

(i) has shown the case where the side 23 is inclined.

What is necessary is just to provide the inclined surface of the distributor 47, and to provide the vibrator 41 and the vibrator 42, when the side 23 inclines.

A cross section of the distributor 47 has a triangular shape.

The inclined surface of the distributor 47 and the side 23 have the same inclination angle.

The vibrator 41 and the vibrator 42 can vibrate the outer periphery of the plate 20 up and down through the distributor 47 .

Embodiment 8.

The vibration device 100 can be used for a device that avoids vibration in the horizontal direction.

The vibration apparatus 100 can be used for the processing apparatus of a workpiece|work.

The vibration apparatus 100 can be used for a processing apparatus, a conveying apparatus, a sorting apparatus, a granulation apparatus, a manufacturing apparatus, a vibration input apparatus, or other material handling apparatus.

A material refers to a substance, a material, a raw material, a cloth, a material, a tool, a tool, or a tool.

The shape, material, property, and number of materials are not considered.

A material may be a lump, a board may be sufficient as it, or particle|grains or powder may be sufficient as it.

A material may be a solid, a liquid may be sufficient as it, and an elastic body may be sufficient as it.

Embodiment 9.

In Embodiment 9, points different from the embodiment described above will be described.

<<<Description of the configuration of the printing unit 600 >>>

Fig. 35 is a third side view of the printing unit 600 of the screen printing apparatus 200 according to the ninth embodiment.

The printing unit 600 is moved in the printing direction P by a driving mechanism (not shown) of the screen printing apparatus 200 .

The printing unit 600 has a fixing mechanism 620 , and the printing tool 260 of the vibration apparatus 100 is fixed by the fixing mechanism 620 .

The printing unit 600 has a lifting mechanism 610 .

The raising/lowering mechanism 610 raises/lowers the printing tool 260 of the vibration apparatus 100, and produces the downward pressure during printing.

As shown in FIG. 35 , the printing tool 260 is tilted and fixed to the printing unit 600 , and moves in the printing direction P while being tilted during printing.

<<<Description of the configuration of the vibration device 100>>>

Fig. 36 is a perspective view of the vibration device 100 according to the ninth embodiment.

Fig. 37 is a front view of the printing tool 260 according to the ninth embodiment.

38 is a side view of the printing tool 260 according to the ninth embodiment.

Fig. 39 is a plan view of the printing tool 260 according to the ninth embodiment.

In FIG. 36, X has shown the front-back direction.

The printing direction P coincides with the forward direction of the front-back direction X.

36 and 37, Y indicates the left-right direction, and Z indicates the vertical direction.

As shown in FIG. 35 , the printing tool 260 is tilted during printing. Hereinafter, for convenience of description, the Z direction shown in FIGS. 36 and 37 will be referred to as the vertical direction Z.

The vibration apparatus 100 includes a printing tool 260 , a vibration unit 40 , and a controller 80 .

The printing tool 260 is used for printing by a screen printing apparatus.

The printing tool 260 prints on the work by printing pressure.

The vibrating unit 40 vibrates a plurality of sides facing the outside of the printing tool 260 .

The controller 80 controls the vibration of the vibration unit 40 .

<<Description of the printing tool 260>>

The printing tool 260 has a holder 210 and a squeegee 203 installed in the holder 210 .

As shown in Fig. 39, the printing tool 260 (holder 210) has a long side W in a direction orthogonal to the printing direction P, and a short side V in the same direction as the printing direction P.

<<Description of the holder 210>>

The holder 210 is made of metal such as aluminum.

35 , the holder 210 has a base 211 and a pressing plate 212 .

The holder 210 is fixed to the lifting mechanism 610 of the printing unit 600 by the fixing mechanism 620 of the printing unit 600 .

The squeegee 203 is fitted and fixed to the base 211 and the pressing plate 212 by the fastening screws 213 .

The base 211 has screw holes for fixing the vibrator 41 and the vibrator 42 to the upper portions of both ends.

A central upper portion of the base 211 has a fixing portion 214 .

The fixing part 214 is arrange|positioned inside the screw hole which fixes the vibrator 41 and the vibrator 42 of the base part 211.

The fixing part 214 is fixed by the fixing mechanism 620 .

<<Description of the squeegee 203>>

The squeegee 203 includes a support part 220 and a squeegee part 230 .

The squeegee part 230 is created using urethane rubber or an elastic body.

The support part 220 is created using the glass epoxy resin containing glass fiber (glass fiber).

The support part 220 is provided with the roughing part on both surfaces, and the urethane rubber is welded and fixed to the roughing part of both surfaces of a glass epoxy resin.

<<<Description of the vibration unit 40 >>>

The vibration unit 40 has a plurality of vibrators, and vibrates the plurality of sides 23 of the holder 210 at the same frequency.

The vibration unit 40 vibrates the side surface in the left-right direction of the holder 210 on the side 23 opposite to the holder 210 up and down.

The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42 .

The vibration unit 40 vibrates the outside of the fixing point (support point 26) where the screw hole 24 of the holder 210 is up and down.

The vibrator 41 and the vibrator 42 are vibrators with the same specification.

The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of Distributor (47)>>

The vibration unit 40 has a distributor 47 .

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side 23 of the holder 210 or its vicinity.

The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the holder 210 .

The distributor 47 has a screw hole 24 at an end thereof, and is fixed to both end portions of the holder 210 by screws.

The distributor 47 is a rectangular metal plate.

The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the side of the holder 210 on the side 23 .

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side or the vicinity of the side that forms the short side V of the holder 210 .

The distributor 47 increases the flapping of the vibrator 41 and the vibrator 42 .

By increasing the length of the left-right direction Y of the distributor 47, the vibrator 41 and the vibrator 42 away from the side surface on the side of the holder 210, by the elastic force of the distributor 47, the distributor 47 ) is curved, and the flapping becomes large.

As the thickness of the distributor 47 in the vertical direction Z is made thinner, the distributor 47 is curved by the elastic force of the distributor 47, and the flapping increases.

<<Description of the vibrator 41 and the vibrator 42>>

The vibrator 41 and the vibrator 42 are provided outside the side 23 of the holder 210 like a blade.

The vibrator 41 and the vibrator 42 are provided in parallel with the holder 210 .

The vibrator 41 and the vibrator 42 are provided so that an air supply port may become inside.

The rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the front-back direction X.

The rotation surface K of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

<<<Description of the operation of the vibration unit 40 >>>

The controller 80 vibrates the vibrator 41 and the vibrator 42 at a frequency of 10 Hz or more and 800 Hz or less.

The vibrating unit 40 vibrates the printing tool 260 by flapping on both sides of the fulcrum 26 .

The vibration unit 40 vibrates two places on both sides of the long side W of the printing tool 260 .

The vibration unit 40 vibrates the plurality of opposite sides 23 on the outside of the printing tool 260 at the same amplitude and at the same wavelength and at the same frequency, thereby vibrating the printing tool 260 as a standing wave.

The vibration unit 40 generates traveling waves at the end of the printing tool 260 at the same time at the same amplitude and at the same wavelength and at the same frequency.

The vibration unit 40 vibrates the end of the printing tool 260 up and down by a traveling wave from the outside of the printing tool 260 , and vibrates the printing tool 260 by a standing wave.

The vibration unit 40 vibrates the holder 210 in the vertical direction by the flapping phenomenon described in the above-described embodiment.

<<<Vibration measurement result>>>

The vibration measurement result is shown below.

At the time of vibration measurement, the controller 80 supplies each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa and 0.5 MPa to the vibrator 41 and the vibrator 42, and vibrates at the same amplitude and at the same wavelength and at the same frequency made it

<<Measurement result 1>>

The vibration of the printing tool 260 shown in FIG. 40 was measured using the holder 210 made of aluminum.

The printing tool 260 shown in FIG. 40 is the same as the printing tool 260 of FIG. 37 except that the adjustment jig 240 is attached to the support 220 and the squeegee 203 is fixed to the holder 210. is the composition

The adjustment jig 240 is a rectangular metal plate, is made of stainless steel, and is formed of a metal harder than the holder 210 .

The adjustment jig 240 is sandwiched between the support 220 and the base 211 .

The printing tool 260 shown in Fig. 40 was placed horizontally on an air mat, the circumference of the printing tool 260 was set free, the holder 210 was vibrated, and the amplitude of the vibration was measured.

The vibrator 41 and the vibrator 42 have the same specifications as those of the first embodiment.

The rotation direction of the vibrator 41 and the vibrator 42 was made into rotation from the inside to the outside, as shown by the arrow of FIG. That is, as shown in FIG. 37 , the rotation direction of the vibrator 41 is clockwise, and the rotation direction of the vibrator 42 is counterclockwise.

The length of the left-right direction Y of the squeegee 203 is 185 mm.

The measurement points are the measurement points 1 to 17 of the bottom surface of the squeegee part 230 and the left surface and the right surface, as shown in FIG. 37 .

Measurement points 1 to 17 are at intervals of 10 mm.

FIG. 41 is a diagram showing measurement results of vibrations in the vertical direction Z of the bottom surface of the squeegee portion 230 of the holder 210 and the horizontal direction Y of the side surface.

42 is a diagram showing the measurement result of the vibration in the front-rear direction X of the bottom surface of the squeegee portion 230 of the holder 210 .

The vertical axis represents the vibration distance. "P-P" means "Peak to Peak" and means a vibration distance.

The horizontal axis shows the measurement points 1 to 17 and the right surface of the left surface and the bottom surface of the squeegee part 230 as shown in FIG. 37 .

As shown in Fig. 41, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distances in the vertical direction Z of the measurement points 1 to 17 of the bottom surface of the squeegee part 230 are substantially equal.

As shown in Fig. 41, at each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distances in the left and right directions of the squeegee part 230 in the left and right directions Y are almost zero. In particular, when the air pressure is 0.4 Mpa and 0.5 Mpa, the oscillation distance in the left-right direction Y is zero, suitable for printing.

42, in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distances in the front-back direction X of the measurement points 1 to 17 of the bottom surface of the squeegee part 230 are substantially equal.

Therefore, the printing tool 260 as a whole vibrates up and down, back and forth, and does not vibrate left and right.

<<Measurement result 2>>

Furthermore, the vibration of the printing tool 260 shown in FIG. 43 was measured.

The printing tool 260 shown in FIG. 43 has the same configuration as the printing tool 260 shown in FIG. 40 except that the support part 220 has a thin plate part 221 and a thick plate part 222 . The thickness of the thick plate part 222 is the thickness of the support part 220 , and the thin plate part 221 is a part made thin by cutting the surface of the support part 220 .

As shown in Fig. 44, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distances in the vertical direction Z of the measurement points 1 to 17 of the bottom surface of the squeegee part 230 are substantially equal.

As shown in Fig. 44, at each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distance in the left-right direction Y of the left side surface and the right side surface of the squeegee part 230 is almost zero. In particular, when the air pressure is 0.4 Mpa and 0.5 Mpa, the oscillation distance in the left-right direction Y is zero, suitable for printing.

As shown in FIG. 45, in each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distance in the front-back direction X of the measuring points 1-17 of the bottom surface of the squeegee part 230 is substantially equal.

Therefore, the printing tool 260 as a whole vibrates up and down, back and forth, and does not vibrate left and right.

<Comparison of measurement result 1 and measurement result 2>

The direction in which the support part 220 has the thin plate part 221 and the thick plate part 222 increased the oscillation distance of the front-back direction X, and there existed nonuniformity. The reason why the vibration distance in the front-back direction X becomes large is considered to be because the thin plate part 221 exists.

Screen printing WHEREIN: When it is desired to use the vibration of the front-back direction X, it is suitable to use the support part 220 with the thin plate part 221.

<<Measurement result 3>>

The vibration of the printing tool 260 shown in FIG. 37 was measured using the holder 210 made of aluminum and without using the adjustment jig 240. As shown in FIG.

Although not shown, in each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa and 0.5 MPa, the oscillation distance in the vertical direction Z of the measurement points 1 to 17 of the bottom surface of the squeegee part 230 becomes almost equal, and The oscillation distance in the left-right direction Y became almost zero.

At each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the oscillation distance in the front-rear direction X of the measurement points 1 to 17 of the bottom surface of the squeegee part 230 is not equal, and the central portion has a greater oscillation distance than the end portion .

In the case of screen printing, since the distance that can be moved up and down increases as the center of the screen of the screen plate increases, it can be used even when the central portion of the bottom of the squeegee 230 has a larger vibration distance than the end.

<<Measurement result 4>>

In the configuration of FIG. 37, the air supply port of the vibrator 41 and the vibrator 42 is installed so that the air supply port is outward, and the rotation direction of the vibrator 41 and the vibrator 42 is opposite to the arrow in FIG. Although the oscillation in the left and right direction Y occurred somewhat, the oscillation distance in the up-down direction Z was almost equal.

<<Measurement result 5>>

In the configuration of FIG. 37 , when both the vibrator 41 and the vibrator 42 rotate in the same direction, the vibration distance in the vertical direction Z and the vibration distance in the front-back direction X were not uniform. The vibration in the left-right direction Y occurred to the same extent as the vibration distance in the vertical direction Z.

In screen printing, it is effective when you want to use the left-right direction Y vibration.

<<Measurement result 6>>

In the configuration of Figure 37, when the thickness of the distributor 47 in the vertical direction X is measured as 10.9 mm and 1.9 mm, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa and 0.5 MPa, the vertical direction Z The vibration distance was almost the same, or the thickness of the distributor 47 decreased somewhat.

Moreover, the direction where the thickness of the distributor 47 is thicker is each pneumatic pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. WHEREIN: The oscillation distance of the front-back direction X became about half.

<<Measurement result 7>>

Further, the vibration of the printing tool 260 shown in FIG. 46 was measured.

The printing tool 260 shown in FIG. 46 has the same configuration as the printing tool 260 of FIG. 37 except that vibrators 43 and 44 are added.

As shown in FIG. 46, the vibrators 43 and 44 are arrange|positioned on the front side of the printing direction P. As shown in FIG.

The rotation axes J of the vibrators 43 and 44 are coaxial.

The rotation axis J of the vibrators 43 and 44 is parallel to the left-right direction Y.

As a result of the measurement, since there are vibrators 43 and 44, the vibration of the left-right direction Y generate|occur|produced.

The printing tool 260 shown in Fig. 46 is effective when it is desired to use vibration in the left-right direction Y in screen printing.

<<Comparative example>>

In the configuration of FIG. 37 , when only the vibrator 41 or only the vibrator 42 was used, the vibration distance in the vertical direction Z and the vibration distance in the front-back direction X were not uniform.

In the structure of FIG. 37, when the rotation axis J of only the vibrator 42 was made parallel to the left-right direction Y, the oscillation distance of the up-down direction Z was not made uniform. Further, vibrations in the left-right direction Y occurred.

37, both the vibrator 41 and the rotation axis J of the vibrator 42 are parallel to the left-right direction Y, and the vibrator 41 and the vibrator 42 are both on the front side of the printing direction P or the printing direction P When arranged on the side of , the oscillation distance in the vertical direction Z and the oscillation distance in the front-rear direction X were not uniform.

<<Considerations based on vibration measurement>>

Since the holder 210 is a metal mass having a thickness in the vertical direction X, even if a traveling wave is inputted from both sides 23 of the holder 210 and a standing wave is generated inside the holder 210, the holder 210 is not curved. Accordingly, when a standing wave is generated inside the holder 210 , it can be considered that the entire holder 210 vibrates uniformly and stably without a left-right difference. Accordingly, the bottom surface of the squeegee 203 will also vibrate uniformly and stably without a left-right difference.

Moreover, when there is no vibration in the left-right direction Y, it can be considered that the vibration is generate|occur|produced by a standing wave.

As shown in Fig. 37, when the rotating surfaces K of the two vibrators are installed parallel to the squeegee and the air supply port is inside, it can be considered that a standing wave is generated inside the holder 210, and the squeegee 203 ), the vibration of the bottom surface was most stable, and the vibration in the left and right direction Y was also suppressed.

When vibrating with only one vibrator, a traveling wave is generated and reflected from the other side to generate a reflected wave. The generated reflected wave overlaps with the traveling wave to become a standing wave.

In one vibrator, the vibration of the squeegee bottom surface was unstable, and the vibration to the left-right direction Y also generate|occur|produced. It was confirmed that nodes were generated in the standing wave superimposed by the traveling wave and the reflected wave.

A standing wave from a reflected wave that is knurled in one vibrator is not practical.

The printing tool 260 is used under an environment different from the measurement state in which it was mounted on an air mat and vibrated with the surroundings free.

Specifically, the printing tool 260 is fixed to the elevating mechanism 610 by the fixing mechanism 620 , and is used while being pressed against the work during printing.

At the time of vibration measurement, although it vibrates so as to flap on the left and right between the supporting points 26 shown in FIG. 37, even when the printing tool 260 is fixed to the lifting mechanism 610 by the fixing mechanism 620, the distributor ( 47), it is possible to vibrate to flap in the left and right between the supporting points 26.

In this way, even when the use environment is different, a standing wave is generated in the printing tool 260 .

<<<Effect of embodiment >>>

According to this embodiment, since the entire printing tool 260 vibrates uniformly in the vertical direction Z and does not vibrate left and right, it is effective for hole plugging printing.

According to this embodiment, since the whole printing tool 260 vibrates uniformly in the front-back direction X, it is more effective for hole plugging printing. In particular, since the printing tool 260 is tilted during printing, vibrating in both the vertical direction Z and the front-back direction X is suitable for hole plugging printing.

According to this embodiment, by changing the rotational direction or adding a vibration source, the printing tool 260 can also vibrate in the left-right direction Y, which is effective for screen printing using the vibration in the left-right direction.

<<<change example >>>

Modification example 1.

The vibration frequency of a vibrator can be changed with air pressure, and the vibration frequency of the audible frequency range of 10 Hz or more and 800 Hz or less is effective.

When the wavelength λ[m] = the speed of sound V [m/s]/the vibration frequency f [Hz], f = 800 Hz,

Wavelength λ [m] = 6320 [m/s]/800 [Hz] = 7.9 m

Half wavelength λ/2 [m] = 7.9 m/2 = 3.95 m

Therefore, if it is 800 Hz or less, it can be considered as a practical numerical value which does not generate|occur|produce a node.

Modification example 2.

The material of the squeegee part 230 may not be urethane, but may be rubber or an elastic body containing silicone.

The raw material of the squeegee part 230 may be a metal or a single object may be sufficient as it.

The squeegee 203 may not have the support part 220 and may be comprised only with the squeegee part 230.

In addition, the squeegee 203 may be a metal squeegee.

Modification example 3.

The adjustment jig 240 may be sandwiched not between the support 220 and the base 211 but between the support 220 and the pressing plate 212 .

Two adjustment jigs 240 may be prepared and sandwiched between the support part 220 and the base 211 and between the support part 220 and the pressure plate 212 .

The support part 220 may be made of metal. At that time, the support 220 is formed of a harder metal than the holder 210 .

Modification 4.

The vibration unit 40 may be an air vibrator driven by air pressure, a vibrator driven by a voice coil motor, or a vibrator described in the above-described embodiment.

Embodiment 10.

In Embodiment 10, points different from the embodiment described above will be described.

In Embodiment 10, the printing tool 260 using the squeegee 203 as the roller 250 is demonstrated.

Fig. 47 is a 5 side view of the printing tool 260 of the vibration apparatus 100 according to the tenth embodiment.

In FIG. 47, the squeegee 203 of FIG. 36 is changed to the roller 250. As shown in FIG.

The roller 250 is provided in the holder 210 .

The roller 250 is made of metal and rotates about the roller shaft 251 of the left-right direction Y. As shown in FIG.

The vibration unit 40 vibrates two places on both sides 231 of the short side V of the printing tool 260 .

The printing tool 260 of FIG. 47 is installed so that the rotation surface K of the vibrator 41 and the vibrator 42 may be parallel with respect to the roller 250, and the air supply port may become inside.

The printing tool 260 of FIG. 48 is provided in the center of the left-right direction Y of the holder 210, with the rotation axes J of the vibrator 41 and the vibrator 42 parallel to the left-right direction Y.

In the printing tool 260 , the vibrator 42 is provided on the front side of the printing direction P, and the vibrator 41 is provided on the rear side of the printing direction P.

The rotation direction of the vibrator 41 is, as indicated by the arrow in FIG. 48, rotation from the rear side to the front side in the printing direction P.

The rotation direction of the vibrator 42 is, as indicated by the arrow in FIG. 48, rotation from the front side to the rear side in the printing direction P.

In the printing tool 260 of FIG. 49, the rotation direction of the vibrator 42 of the printing tool 260 of FIG. 47 is rotation from the rear side to the front side.

<<<Considerations based on vibration measurement>>>

As in the ninth embodiment, vibration measurement was performed.

As in the ninth embodiment, at the time of vibration measurement, the controller 80 supplied each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa to the vibrator, and vibrated at the same amplitude and at the same wavelength and at the same frequency.

As in the printing tool 260 of FIG. 47 , when the rotation surface K of the vibrator is installed parallel to the roller 250 and the air supply port is inside, the vibration of the bottom surface of the squeegee is stable, and Vibration was also suppressed.

The printing tool 260 shown in Fig. 47 has a standing wave pressing effect that the vibration for pressing against the work becomes constant, and suppresses the vibration in the left and right direction Y, and is suitable for printing.

As shown in Fig. 48, when the rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y and installed in the center of the left-right direction Y of the holder 210, two vibration sources are the holder 210. Since traveling waves are input from the front side 231 and the rear side 231 of

The printing tool 260 of Fig. 48 has a standing wave pressing effect that the vibration to be pressed against the work becomes constant, and the vibration in the left and right direction Y is suppressed, so that it is suitable for printing.

49, also when the rotation direction of the vibrator 41 and the vibrator 42 is the same, since there are two vibration sources, it becomes a standing wave vibration.

49, the vibrator 41 and the vibrator 42 are air vibrators of a rotational vibration method, and since the rotational directions are the same, the vibrations in the rotational direction of the vibrator 41 and the vibrator 42 are applied, and they are circular vibrations. and, in the front-rear direction X, vibration in the same direction as the printing direction P serving as an aid to the pressing of the roller 250 is applied.

<<Comparative example>>

In Fig. 48, when vibrating with only one vibrator, a traveling wave is generated and a reflected wave is generated when it arrives at the side and reflects. The generated reflected wave overlaps with the traveling wave and becomes a standing wave.

In one vibrator, the vibration of the squeegee bottom surface was unstable, and the vibration to the left-right direction Y also generate|occur|produced. It was confirmed that nodes were generated in the standing wave superimposed by the traveling wave and the reflected wave.

A standing wave from a reflected wave that is knurled in one vibrator is not practical.

<<<Effect of embodiment >>>

According to this embodiment, even when the printing tool 260 has the rollers 250, the same effects as those of the ninth embodiment can be obtained, and vibration is generated with respect to the roller 250 in the vertical direction Z and the front-rear direction X. can apply

According to this embodiment, the vibration in the same direction as the printing direction P serving as an aid to the pressing of the roller 250 can be applied.

<<<change example >>>

Modification example 1.

The printing tool 260 can be used as a printing tool of a screen printing apparatus.

The printing tool 260 using the roller 250 can be used also as a pressing tool, and can be used for the rolling apparatus in which a product is stretched|stretched.

When the lifting mechanism 610 installs the printing tool 260 at an angle to the product, the roller 250 rubs against the product.

Modification example 2.

The raw material of the roller 250 may not be a metal, and may be rubber, urethane, or an elastic body containing silicone.

Resin may be sufficient as the raw material of the roller 250, and what is necessary is just an individual object.

Modification example 3.

In the printing tool 260 shown in FIG. 50 , vibrators 43 and 44 are added to the printing tool 260 shown in FIG. 47 .

The rotation axis J of the vibrators 43 and 44 was parallel to the left-right direction Y, and the vibrators 43 and 44 were arranged on the rear side of the printing direction P.

The printing tool 260 shown in FIG. 50 is effective when it is desired to use the left-right direction Y vibration.

<<<Other Configurations>>>.

FIG. 51 is a diagram showing a modified example of the printing tool 260 according to the ninth and tenth embodiments.

51 shows the vibrator 41 and the vibrator 42 in which the installation method or installation position is changed.

(a) sets the installation positions of the vibrator 41 and the vibrator 42 to the center of the up-down direction Z of the holder 210. The holder 210 has a slit in the upper and lower centers of the side 23 , and the distributor 47 is inserted into and fixed in the upper and lower center slits of the side 23 of the holder 210 .

In (b), the distributor 47 is L-shaped, and the distributor 47 is fixed to the entire vertical direction Z of the side 23 of the holder 210 .

(c) has shown the case where the installation position of the vibrator 41 and the vibrator 42 was made into the side 23 of the support part 220 of the squeegee 203 instead of the holder 210. FIG.

Vibration of the vibrator 41 and the vibrator 42 is easily transmitted to the squeegee 203 .

(d) has shown the case where the installation position of the vibrator 41 and the vibrator 42 was made into the side 23 of the squeegee part 230 of the squeegee 203 instead of the holder 210. As shown in FIG.

The squeegee 203 does not have the support part 220 and is comprised only with the squeegee part 230.

(e) has shown the case where the installation position of the vibrator 41 and the vibrator 42 was made into the side 23 of the roller shaft 251. FIG.

The distributor 47 is usually fixed to the roller shaft 251 .

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the roller shaft 251 .

(f) shows the case where the vibrator 41 and the vibrator 42 are directly fixed to the side 23 of both ends of the holder 210 without the distributor 47.

Although not shown, you may install the vibrator 41 and the vibrator 42 by overlapping both ends of the holder 210 in part. For example, the vibrator 41 and half of the lower surface of the vibrator 42 may be fixed to the upper surfaces of both ends of the holder 210 without the distributor 47 .

Embodiment 11.

In the eleventh embodiment, points different from the above-described embodiment will be described.

In Embodiment 11, a case in which the screen plate 201 of the screen printing apparatus 200 is vibrated will be described.

<<<Description of the configuration of the vibration device 100>>>

Fig. 52 is a diagram showing the screen printing apparatus 200 according to the eleventh embodiment.

53 is a perspective view of the vibration device 100 according to the eleventh embodiment.

52 and 53, X has shown the front-back direction.

The printing direction P coincides with the forward direction of the front-back direction X.

52 and 53, Y represents the left-right direction, and Z represents the up-down direction.

The vibration device 100 includes a screen plate 201 , a vibration unit 40 , and a controller 80 .

The screen plate 201 is used for printing by the screen printing apparatus 200 .

The screen plate 201 is printed on the work 900 by the printing pressure of the squeegee 203 .

The vibration unit 40 vibrates a plurality of sides facing the outside of the screen plate 201 .

The controller 80 controls the vibration of the vibration unit 40 .

<<Description of the screen plate 201>>

The screen plate 201 has a screen 202 and a screen frame 208 on which the screen 202 is provided.

53 , the screen plate 201 has a rectangular screen frame 208 .

<<Description of screen 202>>

The screen 202 is a thin film in which a printing pattern is formed in the center.

The screen 202 is attached to the screen frame 208 with tension.

The screen 202 is a metal mask screen, a mesh screen, or the like.

<<Screen Frame (208)>>

The screen frame 208 is a rectangular frame composed of four straight frames.

The screen frame 208 is made of metal such as aluminum, stainless steel, iron, or an alloy, and has rigidity that does not deform.

The screen frame 208 has a screen 202 attached to the frame.

The screen frame 208 has two parallel front and rear frames 2081 in a direction perpendicular to the printing direction P, and has two parallel side frames 2082 in the same direction as the printing direction P.

The two front and rear frames 2081 are opposite frames of the screen plate 201 .

The two side frames 2082 are opposite frames of the screen plate 201 .

The screen frame 208 has a plurality of screw holes 209 around it.

The screw holes 209 are at the corners of the screen frame 208 .

The screw holes 209 are provided at both ends of each frame of the two front and rear frames 2081 and the two side frames 2082, and a total of eight are provided.

The screen frame 208 is firmly fixed to the plate frame fixing portion 270 of the screen printing apparatus 200 by screws inserted into the screw holes 209 .

The screen printing apparatus 200 is fixing the plate frame fixing part 270 to the housing.

Hereinafter, the position of the screw hole 209 is called a fixed location.

The screen frame 208 is fixed to the plate frame fixing part 270 at a fixing location provided around the screen frame 208 .

The fixing method of the fixing part to which the screen frame 208 is fixed may not be the screw fixing method using the screw hole 209 and a screw, but a clamp method etc. may be sufficient as it.

<<<Description of the vibration unit 40 >>>

The vibrating unit 40 has a plurality of vibrators, and vibrates the opposing frames of the screen frame 208 at the same frequency.

The vibrating unit 40 vibrates the opposing frame of the screen frame 208 up and down.

The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42 .

The vibrator 41 and the vibrator 42 are outside the fixed location, and are outside the frame.

The vibration unit 40 vibrates only the front and rear frames 2081 of the screen frame 208 up and down.

The vibrator 41 and the vibrator 42 are vibrators with the same specification.

The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of Distributor (47)>>

The vibration unit 40 has a distributor 47 .

The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the front and rear frames 2081 of the screen frame 208 .

The distributor 47 fixes the vibrator 41 and the vibrator 42 to the upper surface of the front and rear frame 2081 of the screen frame 208 .

The distributor 47 has a screw hole at an end thereof, and is fixed to the front and rear frames 2081 of the screen frame 208 with screws.

The distributor 47 is a rectangular metal plate.

The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the screen frame 208 .

The distributor 47 increases the flapping of the vibrator 41 and the vibrator 42 .

By lengthening the length of the front-back direction X of the distributor 47, the vibrator 41 and the vibrator 42 are farther than the screen frame 208, by the elastic force of the distributor 47, the distributor 47 is curved, Flapping increases.

As the thickness of the distributor 47 in the vertical direction Z is made thinner, the distributor 47 is curved by the elastic force of the distributor 47, and the flapping increases.

<<Description of the vibrator 41 and the vibrator 42>>

The vibrator 41 and the vibrator 42 are provided like blades outside the side 23 of the screen frame 208 .

The vibrator 41 and the vibrator 42 are provided orthogonally to the frame.

The vibrator 41 and the vibrator 42 are provided in the center part of a frame.

The vibrator 41 and the vibrator 42 are located on a straight line extending from the center of the front and rear frames 2081 , and are provided at symmetrical locations on the outer periphery of the screen frame 208 .

The vibrator 41 and the vibrator 42 are provided so that an air supply port may become inside.

The rotation axis of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

The rotation surfaces of the vibrator 41 and the vibrator 42 are parallel to the front-back direction X.

<<<Description of the operation of the vibration unit 40 >>>

The controller 80 vibrates the vibrator 41 and the vibrator 42 at a frequency of 10 Hz or more and 800 Hz or less.

The vibration unit 40 vibrates the screen plate 201 by flapping on both sides of the front and rear frames 2081 during printing.

The vibration unit 40 vibrates the front and rear frames 2081 of the screen plate 201 .

The vibrating unit 40 vibrates the plurality of opposing frames of the screen plate 201 with the same amplitude and with the same wavelength and with the same frequency to vibrate the screen 202 with a standing wave.

The vibrating unit 40 generates traveling waves at the end of the screen 202 through the frame at the same time at the same amplitude and at the same wavelength and at the same frequency.

The vibration unit 40 vibrates the end of the screen 202 up and down with a traveling wave from the outside of the screen plate 201, and vibrates the screen 202 with a standing wave.

The vibration unit 40 vibrates the screen 202 only in the vertical direction by the flapping phenomenon described in the above-described embodiment.

The fixing positions of the vibrator 41 and the vibrator 42 are at the center of the two screw holes 209 , but the screen frame 208 has rigidity, and the screen plate 201 is fixed to the plate frame fixing part 270 . Since it is securely fixed to the , a flapping phenomenon occurs.

<<<Characteristics of the embodiment >>>

The vibration unit 40 of the vibration apparatus 100 of the present embodiment generates traveling waves at the same amplitude at the same wavelength and at the same frequency from a symmetrical location on the outer periphery of the screen frame 208 .

A traveling wave from a symmetrical point on the outer periphery of the screen frame 208 is changed to a standing wave, and when the screen frame 208 vibrates only up and down, the screen 202 in the screen frame also vibrates only up and down.

<<<Effect of embodiment >>>

According to this embodiment, the screen 202 as a whole vibrates uniformly in the up-down direction Z, and does not vibrate back-and-forth, left and right, so it is effective for hole plugging printing.

According to this embodiment, the traveling wave can advance in the same direction as the printing direction P of the squeegee 203 .

<<<change example >>>

Modification example 1.

As shown in FIG. 54 , two vibration units 40 may be provided at both ends of each frame of the front and rear frames 2081 .

The vibration unit 40 is being fixed to the side or the vicinity of the two screw holes 209 of the front-back frame 2081.

In order to facilitate the flapping phenomenon, it is preferable that the fixing positions of the vibrator 41 and the vibrator 42 and the positions (fixing positions) of the two screw holes 209 are on a straight line. That is, it is preferable that the plurality of vibrators exist in an extension line of a line connecting the opposite fixed portions of the plate 20 with opposite sides thereof.

In the case of FIG. 54, since the screw hole 209 is used by the plate frame fixing part 270, so as not to overlap the plate frame fixing part 270, there are two vibration units inside the two screw holes 209. (40) is installed.

Modification example 2.

As shown in FIG. 55 , one or two or more vibration units 40 may be installed in all four frames.

In FIG. 55 , the vibrator 43 and the vibrator 44 are orthogonal to the side frame 2082 and are provided in the central portion of the side frame 2082 .

Although not shown, when the screen frame 208 is a pentagon, a hexagon, an octagon, or another polygon, a vibrator may be provided in each frame.

Although not shown, when the screen frame 208 is circular or elliptical, you may provide a vibrator at the position opposite to the frame.

Although not shown, a vibrator may be provided only in the side frame 2082 without providing a vibrator in the front-back frame 2081.

Modification example 3.

As shown in Fig. 56, the distributor 47 may have a T-shape.

The distributor 47 is present from the upper surface of the front and rear frame 2081 to the front of the screw hole 209 .

In FIG. 56 , the vibrations of the vibrator 41 and the vibrator 42 are transmitted over substantially the entire length of the front and rear frames 2081 .

Although not shown, if the distributor 47 is a configuration that transmits vibration to the frame with a width greater than the width of the vibrator, the shape of the distributor 47 may not be T-shaped, triangular, trapezoidal, mountain, semicircular, etc. Other shapes may be sufficient.

Modification 4.

As shown in Fig. 57, the fixing position of the vibrator with respect to the frame may be the lower surface of the frame as in (a), or the outer surface of the frame as in (b).

In either case, the vibrator is outside the fixed location and is outside the frame, and vibrates a plurality of opposing frames of the screen frame 208 at the same amplitude, at the same wavelength and at the same frequency, and the screen The end of the screen 202 is vibrated up and down by a traveling wave from the outside of the 202, and the screen 202 is vibrated by a standing wave.

Although not shown, the fixing position of the vibrator with respect to a frame may be an inner side surface of a frame.

*** Supplementary explanation of embodiment ***

The above-mentioned embodiment is an illustration of a preferable form, and is not intended to limit the technical scope of this invention.

Embodiment may be implemented partially and may be implemented in combination with another aspect.

Moreover, you may combine the above-mentioned embodiment.

For example, FIG. 58 has shown the case where the vibrator is provided in the plate 20, the squeegee 203, and the screen plate 201, respectively.

Although not illustrated, a vibrator may be provided in any two of the plate 20 , the squeegee 203 , and the screen plate 201 .

100: vibration device
10: base
11: top
12: bottom
13: wall
14: space
20: plate
21: surface
22: back side
23: side
24: screw hole
25: screw
26: support point
27: Corner
29: recess
40: vibration unit
41, 42, 43, 44, 45: vibrator
46: frame
47: Distributor
48: horizontal part
49: vertical part
50: spacer
51: holding
52: home
53: home
60: traveling wave
70: standing wave
80: controller
81: air compressor
82: air pipe
83: regulator
84: processor
200: screen printing device
201: screen plate
202: screen
203: squeegee
204: paste
205: through hole
206: suction pipe
207: vacuum pump
208: screen frame
2081: front and rear frames
2082: side frame
209: screw hole
210: holder
211: Donate
212: press plate
213: fastening screw
214: fixed part
220: support
221: thin plate
222: plate part
230: squeegee unit
231: side
240: adjustment jig
250: roller
251: roller shaft
260: printing tool
270: plate frame fixing part
300: shear device
301: blade
400: punching device
401: drill
500: vibration input device
600: printing unit
610: elevating mechanism
620: fixing mechanism
900: work
901: parts

Claims (13)

a screen plate having a screen;
a vibrating unit for vibrating a plurality of opposing frames of the screen plate;
A controller that controls the vibration of the vibration unit
to provide
The vibrating unit has a plurality of vibrators respectively provided outside the plurality of frames, and by the plurality of vibrators, a plurality of frames facing the screen plate from a position outside the plurality of frames, the same amplitude vibrating up and down at the same wavelength and at the same frequency to vibrate the screen with a standing wave generated by superposition of a plurality of traveling waves;
A plurality of distributors fixed to the outside of a plurality of frames facing each other of the screen plate and provided with the plurality of vibrators,
Each of the plurality of vibrators vibrates a plurality of opposing frames of the screen plate through the plurality of distributors, a vibrating device. The vibration unit according to claim 1, wherein the vibrating unit generates traveling waves at the end of the screen of the screen plate at the same amplitude and at the same wavelength and at the same frequency at the same time, and the end of the screen by the traveling wave from the outside of the screen A vibrating device that vibrates up and down and vibrates the screen with a standing wave. The screen plate according to claim 1 or 2, wherein the screen plate has a screen frame on which the screen is installed,
The vibration unit vibrates the screen frame, a vibration device. The method according to claim 3, wherein the screen frame has front and rear frames in a direction orthogonal to the printing direction,
The vibrating unit vibrates the central portion or both ends of the front and rear frames of the screen plate, vibrating device. According to claim 3, wherein the screen frame has a side frame in the same direction as the printing direction,
The vibration unit vibrates the central portion or both ends of the side frame of the screen plate, a vibration device. The method according to claim 1 or 2, wherein the vibration unit has a vibrator,
The controller vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less, a vibration device. The vibration device according to claim 1 or 2, wherein the vibration unit has an air vibrator driven by air pressure, or a vibrator driven by a voice coil motor. A screen printing apparatus provided with the vibration apparatus of Claim 1 or 2. By means of a vibrating unit having a plurality of vibrators each provided on the outside of a plurality of opposing frames of the screen plate, the plurality of opposing frames of the screen plate from a position outside of the opposing plurality of frames of the screen plate are set to the same vibrating up and down in amplitude and at the same wavelength and at the same frequency to vibrate the screen into a standing wave generated by the superposition of a plurality of traveling waves;
Each of the plurality of vibrators, through a plurality of distributors fixed to the outside of the plurality of frames opposed to the screen plate, vibrating the plurality of frames opposed to the screen plate, vibrating method. delete The vibration device according to claim 1 or 2, wherein the vibration unit vibrates the screen by using the fixing positions of the plurality of vibrators to the plurality of frames as a supporting point. delete The vibration method according to claim 9, wherein the vibration unit vibrates the screen by using the fixing positions of the plurality of vibrators to the plurality of frames as a supporting point.

Images