TW202017757A - Vibration device, vibration method, screen printing device, vibration transfer device, and material handling device - Google Patents

Abstract

This vibration device (100) is provided with: a base (10) that fixes a plate (20) and the periphery of the plate (20); a vibration unit (40) that causes a plurality of sides of the plate (20) to vibrate; and a controller (80) that controls the vibration of the vibration unit (40). The vibration unit (40) causes sides (23) of the plate (20) to vibrate up and down, generates traveling waves in the sides (23) of the plate (20) at the same amplitude, the same wavelength, and the same frequency, and causes the plate (20) to vibrate as a stationary wave.

Description

Vibration device, vibration method, screen printing device, vibration pressure feeding device and material handling device

The invention relates to a vibration device, a screen printing device, a vibration pressure feeding device and a material conveying device that vibrate a flat plate.

It is known that there is a processing device that vibrates a flat plate and processes a workpiece. In addition, there is a screen printing apparatus that vibrates a paste or a blade and prints to a work.

[Prior Technical Literature] [Patent Literature]

Patent Literature 1: Japanese Patent Laid-Open No. 2017-94264

Patent Document 2: Japanese Patent Laid-Open No. 08-197709

Patent Document 3: Japanese Patent Laid-Open No. 09-283910

Patent Document 4: Japanese Patent Laid-Open No. 10-058647

Patent Literature 5: Japanese Patent Laid-Open No. 2010-149301

Patent Document 6: Japanese Patent Laid-Open No. 2003-220530

Patent Document 7: Japanese Patent Laid-Open No. 2007-216372

Patent Document 8: Japanese Patent No. 5746637

Conventional processing devices also include those that cause the plate to vibrate in the up-down direction. However, vibrations in the up-down direction may also generate vibrations in the front-back, left-right direction. In addition, in the screen printing device, when performing hole-filling printing, there is a possibility that the amount of paste entering the hole is uneven, and the hole may not be filled with a fixed amount of paste.

An object of an embodiment of the present invention is to provide a vibration device that vibrates a flat plate in the up-down direction without vibrating in the front-back, left-right direction. In addition, an object of an embodiment of the present invention is to provide a vibration device that vibrates a flat plate in any directions of up, down, left, and right.

The structure of the vibration device of the present invention is characterized by the following four components, namely: ‧plate; ‧base, which fixes the periphery of the above plate; ‧vibration unit, which vibrates a plurality of sides of the above plate; and ‧controller , Which controls the vibration of the above vibration unit.

According to the present invention, in a state where the periphery of the flat plate is fixed to the base, the vibration unit applies traveling waves of the same frequency to the flat plate from a plurality of sides of the flat plate, whereby the flat plate vibrates by the standing wave. The flat plate vibrates in the up-down direction due to the vibration of the standing wave but not in the front-rear, left-right direction.

10‧‧‧ base

11‧‧‧Upper surface

12‧‧‧Bottom

13‧‧‧ Wall

14‧‧‧Space

20‧‧‧ Tablet

21‧‧‧Surface

22‧‧‧Back

23‧‧‧Side

24‧‧‧Screw hole

25‧‧‧screw

26‧‧‧ Fulcrum

27‧‧‧corner

29‧‧‧recess

40‧‧‧Vibration unit

41, 42, 43, 44, 45‧‧‧ Vibrator

46‧‧‧Frame

47‧‧‧Distributor

48‧‧‧ Level

49‧‧‧Vertical Department

50‧‧‧ spacer

51‧‧‧ Pillar

52‧‧‧slot

53‧‧‧slot

60‧‧‧ Traveling wave

70‧‧‧ standing wave

80‧‧‧Controller

81‧‧‧Air compressor

82‧‧‧Snorkel

83‧‧‧ Regulator

84‧‧‧ processor

100‧‧‧Vibration device

200‧‧‧ Screen printing device

201‧‧‧Web version

202‧‧‧ Wire Mesh

203‧‧‧scraper

204‧‧‧Slurry

205‧‧‧Through hole

206‧‧‧Suction tube

207‧‧‧Vacuum pump

300‧‧‧Shearing device

301‧‧‧Blade

400‧‧‧Opening device

401‧‧‧Drill

500‧‧‧Vibration pressure feeding device

900‧‧‧Workpiece

901‧‧‧Parts

X‧‧‧Fore and aft direction

Y‧‧‧left and right direction

Z‧‧‧Up and down direction

Fig. 1 is a perspective view of a vibration device 100 according to the first embodiment.

2 is an A-A cross-sectional view of the vibration device 100 of FIG. 1 according to Embodiment 1. FIG.

3(a) to (f) are explanatory diagrams of the vibration method of the first embodiment.

FIG. 4 is a diagram showing the configuration of vibration measurement.

FIG. 5 is a distribution diagram of the upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.2 MPa.

FIG. 6 is a distribution diagram of upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.3 MPa.

FIG. 7 is a distribution diagram of upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.4 MPa.

FIG. 8 is a distribution diagram of the upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.5 MPa.

Fig. 9 is a distribution diagram of vibration in the horizontal direction.

10 is a diagram showing a comparative example of one-sided vibration.

Fig. 11 is a distribution diagram of one-side vibration.

Fig. 12 is a diagram showing a comparative example of lateral vibration.

Fig. 13 is a distribution diagram of upper and lower vibrations of lateral vibrations.

14 is a diagram showing a modification of the vibration device 100 according to the first embodiment.

15 is a diagram showing a modification of the vibration device 100 according to the first embodiment.

FIG. 16 is a diagram showing a modification of the vibration device 100 of the first embodiment.

17(a) to (c) are diagrams showing modified examples of the vibration device 100 of the first embodiment.

18(a) and (b) are diagrams showing modified examples of the vibration device 100 according to the first embodiment.

FIG. 19 is a diagram showing a modification of the vibration device 100 of the first embodiment.

FIG. 20 is a diagram showing a modification of the vibration device 100 of the first embodiment.

21 is a diagram showing a screen printing apparatus 200 according to Embodiment 2.

Fig. 22 is a diagram showing a cutting device 300 according to the third embodiment.

Fig. 23 is a diagram showing a perforating device 400 according to the fourth embodiment.

Fig. 24 is a diagram showing a vibratory pressure-feeding device 500 according to the fifth embodiment.

25(a) and (b) are illustrations of the vibration of the vibratory pressure-feeding device 500 of Embodiment 5. Figure.

FIG. 26 is a diagram showing a modification of the vibration pressure feed device 500 according to the fifth embodiment.

FIG. 27 is a diagram showing a modified example of the vibration pressure feed device 500 according to the fifth embodiment.

28(a) and (b) are diagrams showing a modification of the vibration pressure feed device 500 according to the fifth embodiment.

FIGS. 29(a) and (b) are diagrams showing a modification of the vibratory pressure-feeding device 500 according to the fifth embodiment.

30(a) and (b) are diagrams showing a modification of the vibration pressure feed device 500 according to the fifth embodiment.

31(a) and (b) are diagrams showing a distributor 47 according to the sixth embodiment.

32(a) to (c) are diagrams showing the flat plate 20 and the vibration unit 40 of the seventh embodiment.

33(a) to (d) are diagrams showing the planar shape of the flat plate 20 of the seventh embodiment.

34(a) to (i) are diagrams showing the cross-sectional shape taken along the line A-A of FIG. 1 of the flat plate 20 of the seventh embodiment.

Embodiment 1.

Fig. 1 is a perspective view of a vibration device 100 according to the first embodiment. 2 is an A-A cross-sectional view of the vibration device 100 of FIG. 1 according to Embodiment 1. FIG. In FIG. 1, X represents the front-rear direction. In FIGS. 1 and 2, Y represents the left-right direction, and Z represents the up-down direction.

<<<Structure of Vibration Device 100>>>

The vibration device 100 has a base 10, a flat plate 20, a vibration unit 40, and a controller 80.

<<<Description of Base 10>>>

The base 10 has a box shape with an upper opening. The base 10 has an upper surface 11, a bottom surface 12 and a wall 13. The base 10 has a space 14 in the center. The upper surface 11 is formed by the top surface of the wall 13 and has a rectangular shape with an opening in the center. The bottom surface 12 has a rectangular shape. The wall 13 is a side wall of the base 10 erected from around the bottom surface 12. The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<<Description of Tablet 20>>>

The flat plate 20 is preferably a material that easily passes sound waves, and is preferably metal. The material of the flat plate 20 is more preferably aluminum, titanium, or stainless steel. More preferably, it is aluminum and titanium, and the best is aluminum. The flat plate 20 is preferably rectangular, preferably square. The flat plate 20 has a front surface 21, a rear surface 22, and four side surfaces 23. The front surface 21 and the back surface 22 are parallel rectangular planes of the same shape. The side surface 23 is a surface between the front surface 21 and the rear surface 22 of the flat plate 20. The side surface 23 is a plane orthogonal to the front surface 21 and the rear surface 22 of the flat plate 20. The flat plate 20 has a plurality of screw holes 24 around it. Eight screw holes 24 are provided at the corners of the flat plate 20 and the center of each side. The plate 20 is firmly fixed to the base 10 by screws 25 inserted into the screw holes 24. Hereinafter, the position of the screw hole 24 is referred to as a fixed portion.

The flat plate 20 is fixed to the base 10 at a fixed portion provided around the flat plate 20.

<<<Description of Vibration Unit 40>>>

The vibration unit 40 has a plurality of vibrators, and causes the plurality of side surfaces 23 of the flat plate 20 to vibrate at the same frequency. The vibration unit 40 vibrates the opposite side of the flat plate 20 up and down. The vibration unit 40 has two vibrators, vibrator 41 and vibrator 42. The vibration unit 40 vibrates the outer side of the fixed part having the screw holes 24 up and down. Two vibrations of vibrator 41 and vibrator 42 The actuator is a vibrator of the same specification. The two vibrators 41 and 42 are vibrators driven by air pressure.

As a vibrator driven by air pressure, the following vibrators can be used. (1) Turbo vibrator (2) Roller vibrator (3) Spherical vibrator (4) Piston vibrator

The vibrators of (1), (2) and (3) mentioned above have less noise and can operate at high speed. Especially, the turbo vibrator with stable operation is the best. The piston vibrator has the problems of high noise and slow motion.

The vibration unit 40 has a distributor 47. The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the side surface 23 of the flat plate 20. The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side surface 23 of the flat plate 20. The distributor 47 is a metal piece bent into an L shape. The distributor 47 has a horizontal portion 48 and a vertical portion 49. The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42. The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 reverse each other. In FIG. 2, the vibrator 41 rotates counterclockwise, and the vibrator 42 rotates clockwise. The vertical portion 49 has an upper and lower width of the side surface 23 and a lower and upper width, and is fixed to the side surface 23.

The distributor 47 has a front-rear width that is greater than the width of the top surface of the vibrator 41 and the top surface of the vibrator 42 in the front-back direction. The width of the distributor 47 in the front-rear direction may be more than twice the width of the front-rear direction of the top surfaces of the vibrator 41 and the vibrator 42 and less than 10 times, more preferably 5 times. The distributor 47 has a width less than one-half of the width of the flat plate 20 in the front-rear direction and greater than one-eighth of the width, preferably one-fifth. The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to a wider range of the side surface 23 of the flat plate 20.

<<<Explanation of Controller 80>>>

The controller 80 controls the vibration of the vibration unit 40. The controller 80 makes the vibrator at 10 Hz Vibration above and below 800Hz. The controller 80 causes a plurality of vibrators to vibrate at the same frequency. The controller 80 has an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

The air compressor 81 generates compressed air. The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow. The trachea 82 is branched in a Y shape in the middle, and is connected to the vibrator 41 and the vibrator 42.

The regulator 83 is a control device that controls the pressure of compressed air. The regulator 83 determines the vibration frequency of the vibrator 41 and the vibrator 42 by controlling the pressure of compressed air.

The processor 84 has a central processing device and a program. The processor 84 can be realized by an integrated circuit, a circuit board, or the like. The processor 84 controls the operation of the vibration device 100. The processor 84 is connected to the air compressor 81 and controls the opening and closing operation and operation time of the air compressor 81.

<<<Explanation of vibration method>>>

The vibration method of the vibration device 100 will be described.

<Initial setting procedure>

In a state where the plate 20 is fixed to the base 10 by screws 25, the operator turns on the power switch of the vibration device 100. The operator has a correspondence table between the compressed air pressure and the vibration frequency of the vibrator 41 and the vibrator 42. The operator refers to the correspondence table and sets the pressure of the compressed air corresponding to the vibration frequency of the vibrator 41 and the vibrator 42 by the regulator 83. The operator sets the pressure corresponding to any audible area frequency above 10 Hz and below 800 Hz.

<Procedure of Traveling Wave Generation>

The air pipe 82 has a Y-shaped branch and is connected to the vibrator 41 and the vibrator 42. Therefore, air of the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency. The vibration frequency of the vibrator 41 and the vibrator 42 is preferably an audible area frequency. The vibrator 41 and the vibrator 42 are fixed to the left and right side surfaces 23 of the flat plate 20, and a sine wave traveling wave 60 is applied to the left and right side surfaces 23 of the flat plate 20. The vibrator 41 and the vibrator 42 simultaneously generate traveling waves 60 having the same amplitude, the same wavelength, and the same frequency.

<Standing wave generation step>

If the traveling waves 60 are simultaneously generated with the same amplitude, the same wavelength, and the same frequency in the opposite direction, the traveling waves 60 from the left and right in the flat plate 20 overlap to generate a standing wave 70. Standing wave refers to a wave whose position does not move even if time passes. The flat plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70.

<synchronization step>

That is, it is convenient to start the vibration in the asynchronous state where the phase of the vibrator 41 and the vibrator 42 are staggered. Due to the synchronization phenomenon, the phases of the vibrator 41 and the vibrator 42 are coincided in a short time, and the vibrations of the vibrator 41 and the vibrator 42 become synchronized The state immediately transfers to the vibration of the standing wave.

<Up and down vibration steps>

Hereinafter, the vertical vibration by the vibration method will be described using FIG. 3. FIG. 3 is a view showing the up-and-down vibration viewed from the front-back direction of the left-right direction of the tablet 20 intention. In FIG. 3, the fulcrum 26 refers to the center point of the flat plate 20 in the up-down direction and refers to the center point of the screw hole 24. (a) When a downward force is applied to the side surface 23 of the flat plate 20 by the vibrator 41 and the vibrator 42, an upward force is generated at the center of the flat plate 20 through the fulcrum 26. (b) When a greater downward force is applied to the side surface 23 of the flat plate 20 by the vibrator 41 and the vibrator 42, the center of the flat plate 20 rises. (c) When the downward force of the side surface 23 of the flat plate 20 caused by the vibrator 41 and the vibrator 42 becomes weak, the center of the flat plate 20 drops. (d) When an upward force is applied to the side surface 23 of the flat plate 20 by the vibrator 41 and the vibrator 42, a downward force is generated at the center of the flat plate 20 through the fulcrum 26. (e) When a greater upward force is applied to the side surface 23 of the flat plate 20 by the vibrator 41 and the vibrator 42, the center of the flat plate 20 descends. (f) When the upward force of the side surface 23 of the flat plate 20 caused by the vibrator 41 and the vibrator 42 becomes weak, the center of the flat plate 20 rises.

<Flapping Phenomenon>

Taking (a) to (f) as one cycle, by repeating the actions of (a) to (f), the plate 20 vibrates up and down at the same frequency as the vibration frequency of the vibrator 41 and the vibrator 42. The left and right sides of the flat plate 20 between the fulcrums 26 vibrate like flapping wings. Therefore, this phenomenon is hereinafter referred to as a fluttering phenomenon. The flutter phenomenon is a phenomenon in which the flat plate 20 vibrates up and down around the fulcrum 26 by supplying air to the vibrators fixed to the left and right sides of the flat plate 20. In order to easily cause the flutter phenomenon, it is desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are on a straight line. That is, it is preferable that a plurality of vibrators exist on the extension of the line connecting the opposite fixed portions of the opposite sides of the flat plate 20. Even if the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are not on a straight line and are located at staggered positions, if the flat plate 20 is securely fixed to the base 10, a flutter phenomenon may occur. If the thickness of the wall 13 is increased, the fluttering phenomenon may be hindered. Therefore, the thickness of the wall 13 is preferably thin, empty The opening of room 14 is preferably larger. The thickness of the wall 13 is preferably larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<<Specific example>>>

Hereinafter, specific examples will be described. As the flat plate 20, a square aluminum plate having a side of approximately 0.5 m is used. Set the speed of sound V of aluminum to 6320 [m/s]. Among them, the temperature of aluminum is fixed, and the change of sound speed due to temperature is not considered. As the vibrator 41 and the vibrator 42, an air vibrator manufactured by EXEN Corporation with the following specifications was used. Preferably, when the air pressure is 0.2 or more and 0.6 MPa or less, the vibration frequency f is 119 Hz or more and 414 Hz or less. Alternatively, a pneumatic vibrator with a vibration frequency f of 110 Hz or more and 290 Hz or less is preferable when the air pressure is 0.3 or more and 0.6 MPa or less.

Here, an air vibrator whose vibration frequency f is the following value when the air pressure is the following is used.

Vibration frequency f when the air pressure is 0.5MPa: 216.5Hz

Vibration frequency f when the air pressure is 0.4MPa: 206.6Hz

Vibration frequency f when the air pressure is 0.3MPa: 177.3Hz

Vibration frequency f when the air pressure is 0.2MPa: 133.0Hz

The wavelength can be calculated by the following formula.

Wavelength λ[m]=sonic velocity V[m/s]/vibration frequency f[Hz]

The wavelength of the traveling wave 60 is calculated as follows.

When the air pressure is 0.5MPa: wavelength λ[m]=6320[m/s]/216.5[Hz]=29.19m

When the air pressure is 0.4MPa: Wavelength λ[m]=6320[m/s]/206.6[Hz]=30.59m

When the air pressure is 0.3MPa: wavelength λ[m]=6320[m/s]/177.3[Hz]=35.65m

When the air pressure is 0.2MPa: wavelength λ[m]=6320[m/s]/133.0[Hz]=47.52m

The traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following formula.

R(y,t)=A*sin2π((t/T)-(y/λ))

L(y,t)=A*sin2π((t/T)+(y/λ))

y[m]: position of the tablet in the Y direction

t[s]: moment

R(y,t): Displacement of traveling wave 60 in Z direction at position y[m], time t[s] [m]

L(y,t): displacement of the traveling wave 60 in the Z direction at position y[m] and time t[s] [m]

A: Amplitude of traveling wave 60 [m]

T: period of traveling wave 60 [s]

λ: wavelength of traveling wave 60 [m]

The standing wave 70 generated by the overlapping of the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following formula representing a sine standing wave.

z(y,t) =R(y,t)+L(y,t) =2A*sin(2π(t/T))*cos(2π(y/λ))

y[m]: position of the tablet in the Y direction

t[s]: moment

z(y,t): Z-direction displacement [m] of the standing wave 70 at position y[m] and time t[s]

A: Amplitude of traveling wave 60 [m]

T: period of traveling wave 60 [s]

λ: wavelength of traveling wave 60 [m]

cos(2π(y/λ)) represents the amplitude of the standing wave 70. The position y where the amplitude of the standing wave 70 is 0, that is, the position y where cos(2 π(y/λ)) is 0 is called a "node". The position y at which the amplitude of the standing wave 70 is the largest, that is, the position y at which the absolute value of cos(2 π(y/λ)) is 1, is called "belly".

In order to vibrate the flat plate 20 up and down, it is only necessary that no node of the standing wave is generated at any position y in the left-right direction between the fulcrums 26. Since the node of the standing wave is generated at every half wavelength, if the distance between the fulcrums 26 is set to be less than half the wavelength of the standing wave, it can be made that it does not exist at any position y in the left-right direction of the tablet 20 Standing wave festival. If the position of the "knot" of the standing wave 70 is used as a fixed part, and the fixed part is held (screwed), the "knot" becomes the fulcrum of the fluttering wing.

If the distance between the fulcrums 26 is greater than half the wavelength of the standing wave, a knot occurs in the plate 20. Therefore, the distance between the fixed parts of the flat plate 20 in the left-right direction must be less than the following length.

Half wavelength when the air pressure is 0.5MPa: wavelength λ[m]/2=14.56m

Half wavelength when the air pressure is 0.4MPa: wavelength λ[m]/2=15.29m

Half wavelength when the air pressure is 0.3MPa: wavelength λ[m]/2=17.82m

Half wavelength when the air pressure is 0.2MPa: wavelength λ[m]/2=23.766m

As described above, the frequency and wavelength of the standing wave are determined by the air pressure of the vibrator 41 and the vibrator 42, and the maximum length of the plate 20 is determined.

<<<Vibration Measurement Results>>>

A square aluminum plate with a side of approximately 0.5 m was used as the flat plate 20, and the vibration of the flat plate 20 was measured. As shown in FIG. 4, the base 10 is detached from the vibration device 100 of FIG. 1, the flat plate 20 is placed on an air cushion, the periphery of the flat plate 20 is free to vibrate the flat plate 20, and the amplitude of the vibration is measured.

5 to 8 are graphs showing the measurement results of the vibration at 49 points in the upper and lower directions of the lower half of the plate 20. FIGS. 5 to 8 show the displacement in the Z direction when the flat plate 20 is flat, and the displacement in the Z direction (displacement in the upward direction) in the case of FIG. 3(b). The vibration of the upper half region of the flat plate 20 shown in FIGS. 5 to 8 is considered to vibrate symmetrically with the lower half region of the flat plate 20, so the measurement is not performed. FIG. 5 is a distribution diagram of the upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.2 MPa. FIG. 6 is a distribution diagram of upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.3 MPa. FIG. 7 is a distribution diagram of upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.4 MPa. FIG. 8 is a distribution diagram of the upper and lower vibrations of the flat plate 20 caused by the air pressure of 0.5 MPa.

Observe the first line of Figure 5, the amplitude of the vertical vibration becomes 14.8μm>12.6μm>9.60μm>7.68μm<8.00μm<10.5μm<15.0μm, compared with the central part of the plate 20, the vibration amplitude at the end is larger . That is, uneven vibration occurs in the central portion of the flat plate 20. The reason for this is considered to be that the pressure at 0.2 MPa is weak and the vibrator 41 and the vibrator 42 cannot be vibrated stably. Observe the first line of Figure 6, the amplitude of the vertical vibration becomes 5.28μm<9.53μm<12.2μm<13.2μm>13.1μm>11.0μm>8.40μm, the vibration amplitude of the central part of the plate 20 is larger than the end . That is, it can be considered that the abdomen is formed in the central portion of the tablet 20. This is also the case in FIG. 7 and FIG. 8, and the vibration amplitude of the central portion of the plate 20 is larger than the end. That is, it can be considered that the abdomen is formed in the central portion of the tablet 20. Therefore, under an air pressure of 0.2 MPa, the flat plate 20 cannot be reliably vibrated in the vertical direction. On the other hand, under an air pressure of 0.3 MPa or more and 0.5 MPa or less, the flat plate 20 can be reliably vibrated in the vertical direction.

The measurement results of the vibration in the front-rear, left-right direction will be described using FIG. 9. FIG. 9 is a table showing the measurement results of the horizontal vibration of the measurement points 1 to 12 on the two sides of the flat plate 20 in FIGS. 5 to 8. At an air pressure of 0.2 MPa, the value at measurement point 1 and measurement point 2 exceeds 2 microns. Under an air pressure of 0.3 MPa or more and 0.5 MPa or less, the value is less than 2 microns in all points. Under an air pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of the vibration in the front-rear and left-right directions is less than 10% or less than 15% of the amplitude of the vibration in the up-and-down direction, and it can be regarded as having no vibration in the horizontal direction.

The above measurement results are based on the measurement results when the plate 20 is freely vibrated. As shown in FIG. 1, since the periphery of the flat plate 20 of the vibration device 100 is fixed to the base 10 by screws 25, in fact, the periphery of the flat plate 20 (particularly the portion of the screw hole 24) is restricted from vibrating up and down. When the periphery of the tablet 20 is free and the tablet 20 is vibrated, the tablet 20 vibrates up and down with the center as the abdomen. Therefore, even when the periphery of the tablet 20 is fixed at a fixed location and the tablet 20 is vibrated, the tablet 20 wants to vibrate up and down with the center as the abdomen. As a result, as shown in FIG. 3, it may be considered that the wing point phenomenon is generated with the fulcrum 26 as the center of the wing wings. Then, it can be considered that the vibration in the lateral direction is further reduced in the case where the periphery of the tablet 20 is fixed to the base 10 and the tablet 20 is vibrated compared to the case where the periphery of the tablet 20 is free and the tablet 20 is vibrated. Furthermore, observing the above measurement results, it can be considered that if the distance between the fixed parts of the flat plate 20 in the left-right direction is less than half a wavelength, even if the position of the "node" of the standing wave 70 is not set as the fixed part, the fixed part will become vibrating. The fulcrum of the wing. For example, when the air pressure is 0.4 MPa, the half-wavelength is 15 m, but even if the distance between the fixed parts of the flat plate 20 in the left-right direction is about 0.5 m, the "knot" does not appear. As a result, it can be considered that even in the case where the distance of the fixed portion is 10 m, 5 m, or 1 m, the fixed portion will become the fulcrum of the vibrating wing.

<<<Explanation of Comparative Examples>>> <one side vibration>

FIG. 10 shows the vibrator 42 and the distributor 47 removed from the configuration of FIG. 4. The flat plate 20 is vibrated only by the vibrator 41 on one side. The traveling wave 60 generated from the vibrator 41 on one side 23 of the flat plate 20 is reflected on the other side 23 to generate a reflected wave. The traveling wave 60 overlaps with the reflected wave and becomes a standing wave. In the configuration of FIG. 10, as shown in FIG. 11, it was confirmed that noisy vibration unevenness occurred on the right side of the center of the flat plate 20. In addition, as shown in FIG. 11, at the above 12 points, a portion where the amplitude of the vibration in the horizontal direction exceeds 9 μm is generated. It is considered that the reason is that the plate 20 generates elliptical vibration. Therefore, when the tablet 20 is vibrated from one side, the tablet 20 cannot be reliably vibrated.

<horizontal vibration on both sides>

FIG. 12 is a structure fixed from the structure of FIG. 4 in such a manner that the fixed directions of the vibrator 41 and the vibrator 42 are rotated 90 degrees, and the directions of rotation of the vibrator 41 and the vibrator 42 are reversed. In the configuration of FIG. 12, as shown in FIG. 13, it was confirmed that noisy vibration unevenness occurred in the central portion of the flat plate 20. Therefore, when the rotation directions of the vibrator 41 and the vibrator 42 are kept in the opposite direction, the horizontal plane cannot reliably vibrate the flat plate 20. Similarly, it can be considered that when the vibrator 41 and the vibrator 42 have the same rotation direction and the horizontal direction, the flat plate 20 cannot be reliably vibrated.

<horizontal unilateral vibration>

Although not shown in the figure, it is confirmed that even if the vibrator 42 and the distributor 47 are detached from the configuration of FIG. 12, the vibration unevenness occurs in the central portion of the flat plate 20. Therefore, in one side In the case of vibration, the tablet 20 cannot be reliably vibrated.

<<<Summary>>>

The vibration device 100 of the present embodiment generates a traveling wave 60 with the same amplitude, the same wavelength, and the same frequency from the left and right of the flat plate 20 by the audible area frequency vibration source, that is, the vibrator 41 and the vibrator 42. As a result, in the flat plate 20, standing waves are generated by the overlapping of the reverse traveling waves.

The vibration generating process of the vibration device 100 of the present embodiment in the up and down direction is from the audible area frequency vibration source to the plate 20, and the plate 20 generates the traveling wave 60 at the same frequency from left to right. The plate 20 vibrates by the standing wave, but due to the vibration of the standing wave, it vibrates only in the up and down directions. Also, it does not vibrate in the front-rear, left-right direction. The vibration device 100 uses this vibration only in the vertical direction.

The vibration device 100 can change the frequency of the audible area by the controller 80 during vibration. The audible area frequency refers to a range of 10 Hz or more and 20,000 Hz or less, but the audible area frequency used in this embodiment is set to a range of 10 Hz or more and 800 Hz or less. The vibration unit 40 may also have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as a vibration source. The vibration unit 40 can appropriately replace the vibration sources such as the vibrator 41 and the vibrator 42 with other sound wave vibration sources, that is, a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source, etc., according to the required frequency range. The controller 80 may also have an arbitrary waveform generator or a bipolar power supply as a control part. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, a bipolar power source, or the like as a control component corresponding to the sonic vibration source.

The vibration unit 40 causes the vibrators mounted on the outer sides of the opposite sides of the flat plate 20 to vibrate the flat plate 20 up and down in pairs. The vibration unit 40 is installed on the flat plate 20 A pair of vibrators outside the center of the two opposite sides simultaneously generate traveling waves of the same amplitude, the same wavelength, and the same frequency, and the standing wave is used to vibrate the plate 20. The vibration device 100 of this embodiment fixes the vibrator 41 and the vibrator 42 to the outer side of the flat plate 20. That is, in plan view, the vibrator 41 and the vibrator 42 do not overlap the flat plate 20. Therefore, the vibrator 41 and the vibrator 42 do not prevent the flat plate 20 from vibrating up and down.

The vibration device 100 of this embodiment fixes the vibrator 41 and the vibrator 42 to the side surface 23 of the flat plate 20. The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the rear surface 22 of the flat plate 20. Therefore, the traveling wave 60 is generated from both ends of the tablet 20 in the left-right direction, and the entire area of the tablet 20 in the left-right direction vibrates up and down.

The vibration device 100 of the present embodiment is not intended to make the entire flat plate 20 vibrate up and down uniformly. The amplitude of the central portion of the tablet 20 is the largest, and the amplitude decreases from the central portion of the tablet 20 to the periphery in the left-right direction. The reason why the amplitude decreases in the left and right directions is that the left and right ends of the flat plate 20 are fixed, and a standing wave is generated on the flat plate 20. In addition, the amplitude of the central portion of the tablet 20 is the largest, and the amplitude decreases from the central portion of the tablet 20 to the periphery in the front-rear direction. The reason why the amplitude decreases in the front-back direction is because the front and rear ends of the plate 20 are fixed. It is also possible to make the front and rear ends of the tablet 20 free ends that can freely vibrate up and down. If the front and back ends of the tablet 20 are free ends, the amplitude of the front and back directions of the tablet 20 becomes uniform. Alternatively, the amplitude of the flat plate 20 in the front-back direction is nearly uniform.

In the vibration device 100 of this embodiment, the vibrator 41 and the vibrator 42 and two fixing parts (screw holes 24) are arranged on a straight line. The vibrator 41 and the vibrator 42 are located outside the two fixing parts (screw holes 24). The vibrator 41 and the vibrator 42 are not located inside the two fixing parts (screw holes 24). The flat plate 20 vibrates up and down by the fin vibration phenomenon centering between two fixed parts (fulcrum 26).

<<<Effect of Embodiment 1>>>

According to the present embodiment, the vibrator 41 and the vibrator 42 generate traveling waves 60 at the same frequency from the left and right of the flat plate 20 at the same time, thereby generating standing waves, and the flat plate 20 vibrates only in the vertical direction. Even in the case of vibration in the forward, backward, left, and right directions, it can be ignored compared with the vibration in the vertical direction. Since the workpiece is placed on the flat plate 20 of the vibration device 100, the workpiece can be vibrated only in the vertical direction.

<<<Change example>>> Change example 1.

The vibration device 100 shown in FIG. 14 removes the distributor 47 from the configuration of FIG. 1 and directly fixes the vibrator 41 and the vibrator 42 of the vibration unit 40 to the side surface 23 of the flat plate 20.

Change example 2.

The vibration device 100 shown in FIG. 15 has a size in which the flat plate 20 is larger than the base 10 in plan view, and directly fixes the vibrator 41 and the vibrator 42 of the vibration unit 40 to the outer edge of the back surface 22 of the flat plate 20.

Modification example 3.

The vibrating device 100 shown in FIG. 16 is one in which a vibrator 41 and a vibrator 42 are fixed by sandwiching a distributor 47 between the base 10 and the flat plate 20. The distributor 47 may also be a flat plate.

Modification example 4.

In FIG. 2, the vibrator 41 may be rotated clockwise, and the vibrator 42 may be rotated counterclockwise. In FIG. 2, compared to making the vibrator 41 and the vibrator 42 the same The direction of rotation is more preferably to make the vibrator 41 and the vibrator 42 rotate in opposite directions. That is, when it is convenient to reverse the rotation directions of the vibrator 41 and the vibrator 42, it is desirable to rotate the vibrator 41 counterclockwise and the vibrator 42 clockwise as shown in FIG. 2.

Change example 5.

The vibration unit 40 may also have more than two even plural audible area frequency vibration sources. As shown in FIG. 17, the vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 may be attached to the flat plate 20. In (a), the vibrator 41 faces the vibrator 42 and the vibrator 43 faces the vibrator 44. The vibrator 41 and the vibrator 43 are fixed to the same side 23, and the vibrator 42 and the vibrator 44 are fixed to the other side 23. Standing waves are generated in parallel. In (b), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other. The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the side surfaces 23, respectively. The standing wave is generated orthogonally. In (c), the vibrator 41 faces the vibrator 44 and the vibrator 42 faces the vibrator 43. The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the corners of the flat plate 20, respectively. The standing wave is generated orthogonally. Although not shown, the shape of the flat plate 20 may be circular, elliptical, or other shapes in plan view.

Modification 6.

The shape of the flat plate 20 only needs to be polygonal in plan view. The vibration unit 40 may also have an odd number of audible area frequency vibration sources. As shown in FIG. 18, the flat plate 20 may also be a triangular or hexagonal flat plate 20. (a) shows a triangular flat plate 20. The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the side surfaces 23, respectively. (b) shows a hexagonal flat plate 20. The vibrator 41, the vibrator 42 and the vibrator 43 are fixed to the side surfaces 23 at intervals. Although not shown, the vibrator may be fixed on all sides 23 of the hexagonal flat plate 20. Although not shown, However, the shape of the flat plate 20 may be circular, elliptical, or other shapes when viewed from above. The vibration unit 40 only needs to have one or a plurality of pneumatic vibrators fixed to one side or a plurality of sides of the flat plate 20. Specifically, the vibration unit 40 may also be configured with a pneumatic vibrator as follows.

Only one pneumatic vibrator is arranged on the outside of one side of the plate 20

A plurality of pneumatic vibrators are only arranged on the outside of one side of the plate 20

A pneumatic vibrator is arranged on each side of a part of the plural sides of the flat plate 20 (Fig. 18(b))

A plurality of pneumatic vibrators are arranged outside each side of a part of the plurality of sides of the flat plate 20 (FIG. 17(a))

One pneumatic vibrator is arranged on each side of all sides of the plate 20 (Fig. 17(b) and Fig. 18(a))

A plurality of pneumatic vibrators are arranged on the outside of all sides of the plate 20

The controller 80 causes all pneumatic vibrators to vibrate at the same frequency. Other forms of vibrators can also be used instead of pneumatic vibrators.

Modification 7.

The vibration unit 40 may also have one audible area frequency vibration source. The vibrating device 100 of FIG. 19 has one vibrator 45 and frame 46. The frame 46 is a U-shaped metal part. The frame 46 fixes the vibrator 45 to the center of the bottom, and the upper parts of both front ends are fixed to the distributor 47. The vibrator 45 vibrates up and down. The vibration of the vibrator 45 is transmitted to the two distributors 47, and the two distributors 47 vibrate up and down. In this way, there is no need to install a plurality of vibrators on both sides of the plate 20, as long as the vibration unit 40 has a mechanism that simultaneously generates traveling waves 60 of the same amplitude, the same wavelength, and the same frequency from the plurality of sides of the plate 20 .

Modification 8.

The vibration device 100 of FIG. 20 has a spacer 50 between the flat plate 20 and the distributor 47. The spacer 50 is a metal rod of a square pillar fixed between the side surface 23 of the flat plate 20 and the vertical portion 49 of the distributor 47 and fixed. The spacer 50 is a component that keeps the generation position of the traveling wave 60 away from the fulcrum 26 of the flutter phenomenon. By changing the length of the spacer 50 in the left-right direction, the distance between the frequency vibration source and the fixed part in the audible area can be changed. Even if the traveling wave 60 has the same amplitude, the same wavelength, and the same frequency, the greater the length of the spacer 50 in the left-right direction, the stronger the flutter phenomenon. The amplitude of the vertical vibration of the flat plate 20 can be adjusted by the spacer 50.

Modification example 9.

In order to fix the base 10 and the flat plate 20, other fixing metal pieces or other fixing mechanisms may be used instead of the screw holes 24 and the screws 25.

Embodiment 2.

In the second embodiment, differences from the first embodiment will be described.

<<<Description of Composition>>>

21 is a configuration diagram of a screen printing apparatus 200 according to Embodiment 2. The screen printing apparatus 200 includes the vibration apparatus 100 described in the first embodiment. The screen printing device 200 is a device that prints on the workpiece 900. The workpiece 900 is a substrate of an electronic device or a circuit.

The screen printing apparatus 200 has a screen 201 in which a screen 202 is stretched on a frame. The wire mesh 202 is a hole screen, metal mesh or other wire mesh. The wire mesh 202 has electricity Printed patterns for terminals, electrodes, wiring, etc. There is a slurry 204 on the surface of the screen 202.

The screen printing apparatus 200 has a doctor blade 203.

The squeegee 203 moves on the surface of the screen 202 and prints electrode terminals, electrodes, wiring, etc. on the workpiece 900 by the paste 204.

The flat plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed. The flat plate 20 functions as a suction plate that suctions the workpiece 900. The flat plate 20 has a plurality of through holes 205 penetrating up and down. The base 10 functions as a suction box for sucking air.

The screen printing apparatus 200 has a suction pipe 206 and a vacuum pump 207.

The suction pipe 206 is connected to the base 10 and the vacuum pump 207 and sucks air from the space 14. As shown in FIG. 21, it is preferable that the vibrator 41 and the vibrator 42 are arranged in the same direction as the printing direction of the doctor blade 203. That is, it is preferable that the printing direction of the blade 203 and the generation direction of the standing wave coincide.

<<<Description of Action>>>

The processor 84 of the screen printing apparatus 200 operates the vibration device 100 to vibrate the plate 20 during printing. The vibration of the plate 20 is transmitted to the workpiece 900 and the screen 201 to vibrate the slurry 204. By vibrating the paste 204, the paste 204 easily passes through the printed pattern of the screen 202. In the case of performing hole-filling printing in which the slurry is filled in the hole or groove of the workpiece 900, the slurry 204 is easily filled in the hole or groove of the workpiece 900 due to the vibration of the workpiece 900. In the case of hole-filling printing, the processor 84 also operates the vibration device 100 after the printing to vibrate the plate 20. After printing, the plate 20 is also vibrated, whereby the bottom of the hole or groove can be filled with the paste 204.

<<<Effect of Embodiment 2>>>

According to this embodiment, the vibration device 100 can be used for the screen printing device 200. According to this embodiment, when filling holes in screen printing, the uneven filling amount of the slurry entering the holes can be reduced. Especially when the hard paste is used for hole filling printing, the filling amount is increased. According to this embodiment, since the flat plate 20 vibrates only in the vertical direction and does not vibrate in the front-rear, left-right direction, the workpiece 900 and the screen 201 are not staggered in the front-rear, left-right direction. Therefore, the printed pattern of the workpiece 900 will not be blurred.

Embodiment 3.

In Embodiment 3, differences from Embodiment 1 will be described. Fig. 22 is a perspective view of a cutting device 300 according to the third embodiment. The shearing device 300 has the vibration device 100 described in the first embodiment. The cutting device 300 is a device for cutting the workpiece 900. The cutting device 300 has a blade 301 that cuts a workpiece 900. The flat plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed.

The processor 84 of the shearing device 300 operates the vibration device 100 to vibrate the tablet 20 in the up-down direction during operation. The vibration of the flat plate 20 is transmitted to the workpiece 900 to cause the workpiece 900 to vibrate. By vibrating the workpiece 900 in the up and down directions, the pressure from the blade 301 to the workpiece 900 becomes intermittent.

<<<Effect of Embodiment 3>>>

According to this embodiment, the vibration device 100 can be used for the shearing device 300. According to this embodiment, since the pressure from the blade 301 to the workpiece 900 becomes intermittent, the durability time of the blade 301 is extended.

Embodiment 4.

In the fourth embodiment, differences from the first embodiment will be described. Fig. 23 is a perspective view of a hole-opening device 400 according to the fourth embodiment. The hole opening device 400 includes the vibration device 100 described in the first embodiment. The hole-opening device 400 is a device for forming holes in the workpiece 900. The hole-opening device 400 has a drill 401 that forms a hole in the workpiece 900. The flat plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed.

The processor 84 of the hole-opening device 400 operates the vibration device 100 to vibrate the tablet 20 in the up-down direction during operation. The vibration of the flat plate 20 is transmitted to the workpiece 900 to cause the workpiece 900 to vibrate. By vibrating the workpiece 900 in the up-down direction, the pressure from the drill 401 to the workpiece 900 becomes intermittent.

<<<Effect of Embodiment 4>>>

According to this embodiment, the vibration device 100 can be used for the hole drilling device 400. According to this embodiment, since the pressure from the drill 401 to the workpiece 900 becomes intermittent, the endurance time of the drill 401 is extended.

Embodiment 5.

In the fifth embodiment, differences from the first embodiment will be described.

<<<Structure of Vibration Pressure Feeding Device 500>>>

Fig. 24 is a perspective view of a vibratory pressure feed device 500 according to the fifth embodiment. The vibration pressure feeding device 500 is a device that inserts a plurality of parts into a plurality of recesses by vibration. The tablet 20 is a square tablet. A plurality of recesses 29 are arranged on the flat plate 20. Plural parts 901 are randomly placed on the tablet 20. Although not shown, there is a frame around the outside of the flat plate 20 that will not allow the parts 901 to be scattered from the flat plate 20.

The vibratory pressure-feeding device 500 has a flat substrate 10, a flat plate 20, and a vibration unit 40. The flat plate 20 is fixed to the base 10 via four vibrators. The side surface 23 of the flat plate 20 is not fixed and becomes a free end. The vibration unit 40 has a plurality of vibrators fixed to the outside of the four corners of the plate 20. The vibration unit 40 of FIG. 24 has four vibrators and four distributors 47. The four vibrators are inclined at 45 degrees with respect to the front-rear direction and the left-right direction and fixed to the base 10 of the flat plate. The four vibrators are fixed to the flat plate 20 respectively 4 corners 27 outside. The vibrator is arranged on the extension of the diagonal of the flat plate 20. The vibrator 41 and the vibrator 44 are oppositely fixed to two corners located at the ends of one diagonal line of the flat plate 20. The vibrator 43 and the vibrator 42 are oppositely fixed to the two corners of the other diagonal end of the plate 20.

The distributor 47 is a rectangular plate. The distributor 47 fixes the corner 27 of the flat plate 20 to the upper surface. The distributor 47 fixes the upper surface of the vibrator to the lower surface.

The four corners 27 of the flat plate 20 are fixed to the distributor 47 by screws inserted into the screw holes 24. The four corners 27 of the tablet 20 become the four fixed parts of the tablet 20. In a plan view, the vibrator is fixed outside the corner 27 of the flat plate 20. That is, in plan view, the four vibrators do not overlap with the flat plate 20.

The four vibrators used in the vibration pressure feeding device 500 are preferably electromagnetic vibration sources such as electromagnetic vibrators. Electromagnetic vibration source can control frequency more finely than pneumatic vibrator.

<<<Action of Vibration Pressure Feeding Device 500>>

The controller 80 causes the two vibrators fixed at the two corners of the diagonal end of the plate 20 to vibrate at the same frequency. The four vibrators are connected to the processor 84, and the vibration of the four vibrators is controlled by the processor 84. The traveling waves from the four vibrators travel from the 4th corner of the tablet 20 to the central bank of the tablet 20. Vibrator 41 and vibrator 44 make the traveling wave at the same time The amplitude, the same wavelength, and the same frequency are generated in a diagonal direction, so that the traveling waves overlap. The vibrator 43 and the vibrator 42 cause the traveling waves to be generated at the same amplitude, the same wavelength, and the same frequency in the other diagonal direction at the same time, and the four orthogonal traveling waves overlap, so that the standing waves overlap above and below the flat plate vibration.

The processor 84 can change the vibration generated on the panel 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves. In particular, the processor 84 uses traveling waves of the same amplitude, the same wavelength, and the same frequency to generate a standing wave formed by overlapping four traveling waves that only change the phase on the plate, and by vibrating the standing wave up and down, the parts can be made 901 rotates on the tablet 20, or moves or jumps back and forth to the left and right. The processor 84 may shift the phase by only 90 degrees, 180 degrees, 270 degrees, or any angle to generate 4 traveling waves.

Hereinafter, the vibration pressure feeding device 500 will be described as vibrating up and down using FIG. 25. FIG. 25 shows the vibration state of the flat plate 20 when the traveling waves with the same phase, amplitude, wavelength, and frequency overlap and the standing waves overlap. FIG. 25(a) is a schematic view of the center of the left-right direction of the tablet 20 oscillating up and down. FIG. 25(b) is a schematic diagram of a diagonal line connecting corner 27 of the flat plate 20 vibrating up and down. Since the side surface 23 is a free end, as shown in FIG. 25(a), the side surface 23 is moved up and down while the flat plate 20 is vibrated. On the other hand, since the corner 27 is fixed and the corner 27 becomes the fulcrum 26, as shown in FIG. 25(b), the flat plate 20 is vibrated while keeping the corner 27 without moving up and down.

The processor 84 vibrates the tablet 20 up and down. The vibration of the flat plate 20 is transmitted to the part 901 to cause the part 901 to vibrate. The part 901 moves on the surface of the flat plate 20 by vibrating up and down, and is embedded in the recess 29.

Change example 1.

The vibration pressure feeding device 500 of FIG. 26 cuts the corner 27 of the flat plate 20 and fixes the vibrator Those who plan to cut the surface. The vibration pressure feed device 500 of FIG. 26 does not require the distributor 47. In a plan view, the vibrator is fixed outside the corner 27 of the flat plate 20. That is, in plan view, the four vibrators do not overlap with the flat plate 20.

Change example 2.

The vibration device 100 of the above embodiment can also be used for the vibration pressure feed device 500. It is preferable to use a vibration device that can generate four standing waves by orthogonalizing four traveling waves or crossing a plurality of traveling waves in the vibration pressure feeding device 500. In addition, when the vibration device crosses the traveling waves, it is more desirable to make the traveling waves overlap by generating equal standing angles of the traveling waves, thereby generating stable standing waves.

Modification example 3.

The vibration pressure feeding device 500 of FIG. 27 is provided with a pillar 51 at a corner 27 of the flat plate 20, and the flat plate 20 is fixed to the base 10 by four pillars 51. The pillar 51 fixes the flat plate 20 by screws inserted into the screw holes 24. The vibrator is only fixed to the cutting surface of the corner 27 of the flat plate 20, and the vibrator is mounted on the flat plate 20 in a suspended state. In the case of FIG. 27, the fixed part located in the screw hole 24 is used as a fulcrum, and the flat plate 20 is vibrated by the above-described vibration effect. In the case of FIG. 27, the flat plate 20 is fixed by four pillars 51. However, since the pillars 51 are thin pillars, the flat plate 20 can vibrate not only up and down but also back and forth, left and right.

Modification example 4.

The shape of the flat plate 20 only needs to be polygonal in plan view. As shown in FIG. 28, the flat plate 20 may also be a triangular or hexagonal flat plate 20. (a) shows a triangular flat plate 20. The vibrator 41, the vibrator 42 and the vibrator 43 are fixed to the corners 27, respectively. (b) indicates a flat hexagon Board 20. The vibrators are fixed to each corner 27 respectively. Although not shown, the shape of the flat plate 20 may be circular, elliptical, or other shapes in plan view.

Change example 5.

As shown in FIG. 29, the vibrator may not be located at all corners. (a) shows a case where the vibrator is arranged on one diagonal line of the quadrangular flat plate 20. The vibrator 41 and the vibrator 42 are fixed to the corner 27 at intervals. (b) shows a case where the vibrator is arranged on two diagonal lines of the hexagonal flat plate 20. Although not shown, the shape of the flat plate 20 may be circular, elliptical, or other shapes in plan view.

Modification 6.

As shown in FIG. 30, the vibrator may have a plurality of corners. (a) shows a case where two vibrators are arranged in each of the four corners of the quadrilateral flat plate 20. (b) shows a case where two vibrators are arranged in each of the four corners of the quadrangular flat plate 20, and further, a vibrator is arranged outside the center of the opposite side surface. Although not shown, the shape of the flat plate 20 may be an octagon, decagon, and other polygons when viewed from above.

The vibration unit 40 only needs to have one or a plurality of pneumatic vibrators fixed to one corner or a plurality of corners of the flat plate 20. Specifically, the vibration unit 40 may also be configured with a pneumatic vibrator as follows. A pneumatic vibrator is arranged on the outside of only one corner of the flat plate 20

A pneumatic vibrator is arranged on the outside of each of the corners of one of the corners of the flat plate 20 (Figure 29 (a) and (b))

A pneumatic vibrator is arranged on the outer side of each corner of all the corners of the flat plate 20 (Figure 28 (a) and (b))

Place 2 airs on the outside of all corners of all corners of tablet 20 Dynamic vibrator ((a) and (b) in Figure 30)

The controller 80 causes all pneumatic vibrators to vibrate at the same frequency. Other forms of vibrators can also be used instead of pneumatic vibrators.

Embodiment 6.

In the sixth embodiment, differences from the first embodiment will be described.

<<<Structure of Distributor 47>>>

FIG. 31 is a diagram showing the distributor 47. FIG. The distributor 47 of FIG. 31 is fixed to the flat plate 20 with the front surface 21 and the back surface 22 of the flat plate 20 interposed. (a) shows the case where the vibrator is arranged outside the center of one side of the quadrangular flat plate 20. The distributor 47 has a U-shaped groove 52 viewed from the front-back direction on the side, and the central outer edge of the flat plate 20 is inserted into the groove 52. The flat plate 20 has three screw holes 24 as fixing parts on two sides to which the vibrator is fixed. The plate 20 fixes the distributor 47 by screws in the central screw hole. The flat plate 20 does not have screw holes 24 on the side where the vibrator is not fixed. As shown in (a), it is not necessary to install the fixed part on all sides, or only on the two opposite sides.

(b) shows the case where the vibrator is arranged in the four corners of the quadrangular flat plate 20. The distributor 47 has a V-shaped groove 53 viewed from above and below, and the corners of the flat plate 20 are inserted into the groove 53. The straight running bottom of the V-shaped groove 53 is in contact with the two end faces orthogonal to the two side faces. The triangular side surface of the V-shaped groove 53 is in contact with the surface and back surface of the corner 27. The flat plate 20 has screw holes 24 on the outer edge of the corner. The plate 20 fixes the distributor 47 by screws in screw holes.

<<<Effect of Distributor 47>>>

Since the distributor 47 is fixed to the flat plate 20 with the flat plate 20 in between, the vibration of the vibrator can be transmitted from the side of the flat plate 20 even when the flat plate 20 is thin and the height of the side surface is small.

Modification 1.

The shape of the distributor 47 may be any shape that can transmit the vibration of the vibrator to the side surface of the flat plate 20. The distributor 47 may be fixed only to the side or corner of the flat plate 20, but the distributor 47 may also be fixed to the following parts.

The side and surface of the tablet 20

Side and back of tablet 20

The side, surface and back of the tablet 20

Only the surface of the side surface of the tablet 20

Only the back of the side of the tablet 20

The surface and back of the side of the tablet 20

Corner and surface of tablet 20

Corner and back of tablet 20

Corner, surface and back of tablet 20

Only the surface of the corner of the tablet 20

Only the back of the corner of tablet 20

The surface and back of the corner of tablet 20

In any of the above cases, the same effect as the case where the distributor 47 is fixed only to the side or corner of the flat plate 20 can be obtained. In any of the above cases, it can also be said that the side of the flat plate is vibrated.

Embodiment 7.

In Embodiment 7, differences from Embodiment 1 will be described.

<<<Structure of Flat Plate 20 and Vibration Unit 40>>>

FIG. 32 is a diagram showing the flat plate 20 and the vibration unit 40. FIG. 32 shows a vibration unit 40 that vibrates a plurality of parts of the outer periphery of the tablet 20 from the outer side of the tablet 20. The outer periphery of the tablet 20 refers to the profile when looking down on the tablet 20. The outer side of the tablet 20 refers to the outer side of the outline of the tablet 20. The vibration unit 40 simultaneously generates traveling waves of the same wavelength from the center of the outer circumferential plate of the plate 20. (a) shows the case where the vibrator 41 is arranged at the corner 27 of the triangular flat plate 20, and the vibrator 42 is arranged outside the center of the side surface 23 opposite to the corner 27. (b) shows the case where the vibrator 41 is arranged at the corner 27 of the pentagonal flat plate 20, and the vibrator 42 is arranged outside the center of the side surface 23 opposite to the corner 27.

The vibration unit 40 vibrates a plurality of parts of the tablet 20. As described in the first embodiment, the plural positions may be plural positions including only the plural side faces 23 of the flat plate 20. As described in the fifth embodiment, the plural positions may be plural positions including only plural corners 27 of the flat plate 20. The plurality of parts may be a plurality of parts including the side surface 23 and the corner 27 of the flat plate 20 as illustrated in (a) and (b) of FIG. 32. In the case of including a plurality of sides 23 and corners 27, it may be any one of the following.

1 side 23 and 1 corner

Plural sides 23 and 1 corner

1 side 23 and multiple corners

The plural sides 23 and the plural corners

A typical example of plural sides 23 and plural corners is all sides 23 and all corners corner. It is preferable that a plurality of parts are arranged in pairs on a straight line passing through the center or the center of gravity of the diagonal or diameter of the flat plate 20.

The side 23 need not be flat. (c) shows a case where the vibrator 41 and the vibrator 42 are arranged in the diameter direction of the circular flat plate 20, and the vibrator 43 and the vibrator 44 are arranged in the orthogonal diameter direction. The case of (c) shows the case where the side surface 23 is the outer peripheral curved surface of the cylinder. The side surface 23 may be other curved surfaces, or a combination of curved surfaces and flat surfaces. In (c), the vibrator 43 and the vibrator 44 may not be present. In (c), the number of vibrators can also be increased.

<<<Plane Shape of Plane 20>>>

33 is a diagram showing the planar shape of the flat plate 20. FIG. The planar shape of the flat plate 20 is not limited to a regular polygon or a circle. (a) shows a case where the planar shape of the flat plate 20 is a cross. (b) shows the case where the planar shape of the flat plate 20 is a star. (c) shows the case where the flat shape of the flat plate 20 is a long rectangular with rounded corners. (d) shows the case where the planar shape of the flat plate 20 is an ellipse. Although not shown, the planar shape of the tablet 20 may also be trapezoidal, cloud-shaped, mountain-shaped, irregular or other shapes.

<<<Sectional Shape of Flat Plate 20>>>

FIG. 34 is a diagram showing the cross-sectional shape of the flat plate 20 of FIG. 1 taken along line A-A. The cross-sectional shape of the flat plate 20 is not limited to a rectangle. (a), (c), and (e) show the case where the central lower portion of the flat plate 20 is recessed upward. (a) indicates a concave depression. (b) shows the case of V-shaped depression. (c) shows the arc-shaped depression. (b), (d), and (f) show the situation where the upper central portion of the flat plate 20 swells downward. (b) shows a convex swell. (d) shows a swell in a V shape. (f) shows the swell in an arc shape.

(g) a concave shape in which the central portion of the flat plate 20 is recessed toward the upper side and the lower side Situation. (h) shows a convex shape in which the central portion of the flat plate 20 swells upward and downward. Although not shown, the cross-sectional shape of the flat plate 20 may be concave-convex, corrugated, or other shapes. (i) shows that the side surface 23 is inclined. When the side surface 23 is inclined, it is only necessary to provide the inclined surface of the distributor 47 to install the vibrator 41 and the vibrator 42. The distributor 47 has a triangular cross section. The inclined surface of the distributor 47 and the side surface 23 have the same inclination angle. The vibrator 41 and the vibrator 42 can vibrate the outer periphery of the flat plate 20 up and down via the distributor 47.

Embodiment 8.

The vibration device 100 can be used for devices that are not suitable for horizontal vibration. The vibrating device 100 can be used for a workpiece processing device. The vibration device 100 can be used in a processing device, a conveying device, a screening device, an assembling device, a manufacturing device, a vibratory pressure-feeding device, or other material handling devices. Materials refer to substances, materials, raw materials, materials, materials, utensils, utensils, or tools. The shape, material, nature and number of materials are not limited. The material can be a block, a plate, or granules or powder. The material can be solid, liquid, or elastomer.

***Supplementary description of the implementation form***

The above-mentioned embodiments are examples of desired forms, and are not intended to limit the technical scope of the present invention. The embodiment may be partially implemented, or may be implemented in combination with other embodiments. Furthermore, the above-described embodiments may be combined.

10‧‧‧ base

20‧‧‧ Tablet

24‧‧‧Screw hole

26‧‧‧ Fulcrum

40‧‧‧Vibration unit

41‧‧‧Vibrator

42‧‧‧Vibrator

47‧‧‧Distributor

80‧‧‧Controller

81‧‧‧Air compressor

82‧‧‧Snorkel

83‧‧‧ Regulator

84‧‧‧ processor

100‧‧‧Vibration device

X‧‧‧Fore and aft direction

Y‧‧‧left and right direction

Z‧‧‧Up and down direction

Claims (11)

A vibration device includes: a plate; a vibration unit that vibrates a plurality of parts of the outer periphery of the plate from the outside of the plate; and a controller that controls the vibration of the vibration unit. The vibration device according to claim 1, wherein the vibration unit vibrates the outer periphery of the flat plate up and down at the same frequency by a traveling wave from the outer side of the flat plate. The vibration device according to claim 1 or 2, wherein the vibration unit generates a traveling wave at the same wavelength at the outer periphery of the flat plate at the same time. The vibration device according to claim 3, wherein the vibration unit generates the traveling wave at the same amplitude and vibrates the plate using a standing wave. The vibration device according to any one of claims 1 to 4, wherein the plurality of parts where the vibration unit vibrates the plate is any one of the following parts, that is, only a plurality of parts including a plurality of sides of the plate ; Only includes the plural parts of the corners of the above-mentioned tablet; and includes the plural sides of the sides and corners of the above-mentioned tablet. The vibration device according to any one of claims 1 to 5, wherein the vibration unit has a vibrator, and the controller vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less. The vibration device according to any one of claims 1 to 5, wherein the vibration unit has a pneumatic vibrator driven by air pressure or a vibrator driven by a voice coil motor. A screen printing device provided with the vibration device according to any one of claims 1 to 7. A vibratory pressure-feeding device provided with the vibrating device of any one of claims 1 to 7. A material handling device equipped with a vibration device according to any one of claims 1 to 7. A vibration method in which a plurality of parts on the outer periphery of a flat plate are vibrated up and down at the same frequency from the outer side of the flat plate by a vibration unit, and the flat plate is vibrated by a standing wave.

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