JP2009096687A - Method and apparatus for scribing hard brittle plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scribing method and an apparatus thereof relating to a technique for forming a vertical crack in the inside of a glass plate along the movement trajectory of a cutter with a sharp point; capable of offering a cutter or a cutter head at a low cost; capable of being vibrated according to the properties of a rigid brittle plate to be cleaved, not only in the longitudinal direction but also in the direction of progressing of the cutter or in the lateral direction orthogonal thereto; and having the cutter easily changeable when the cutter is worn. <P>SOLUTION: A chip-like fixed cutter 3, being fixed directly on a horn 2 of a piezoelectric transducer 1 capable of generating vibration in the two-dimensional direction or three-dimensional direction, is fixed by attaching directly to the front edge of the horn 2 of the piezoelectric transducer 1 or by attaching to a pedestal 4 fixed on the front edge of the horn 2 with a screw, etc. The piezoelectric transducer 1 is equipped with plural piezoelectric elements and therefore can generate vibration not only in the longitudinal direction but also in the direction of progressing of the cutter or in the longitudinal direction orthogonal thereto. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technique for cleaving (breaking and cutting) a glass substrate or other hard brittle plate of a liquid crystal display panel along a predetermined cutting line, and by moving the pointed cutter while pressing it against the work surface. Further, the present invention relates to a technique for generating a vertical crack in the workpiece along the movement trajectory.

  As a method of cutting a hard and brittle plate such as a glass plate, a cleaving method called scribe break is well known. Scribe is a process of forming engraved lines (scribe lines) on the surface of a glass plate with a cutter such as a pointed diamond tip. Breaks are local stresses that occur in the areas where engraved lines are formed when bending or impact is applied ( It is a step of breaking the glass plate along the score line by concentrated stress). In scribing, if a deep vertical crack along the score line can be formed inside the glass plate, it is possible to cleave the glass plate only in the scribing process without the break process. However, if deep vertical cracks are to be formed, horizontal cracks in the surface direction also increase, and cleaving defects such as transverse cracks and chips are likely to occur.

  In order to form deep vertical cracks along the scribe line, it has been found effective to apply vibrations in the vertical direction to the cutter, that is, in the direction perpendicular to the surface of the glass plate to be cut. For scribing a glass substrate such as a liquid crystal display panel, a rotary cutter having a shape like an abacus ball having a sharp ridgeline formed on the periphery is often used. As a means of generating longitudinal vibration when scribing using a rotating cutter, a rotating cutter called a penet that has a perforated crack with a peripheral edge of the rotating cutter and a perforated crack is used. Techniques have been proposed for generating vertical vibrations by rotating against a glass surface.

  Also known is an apparatus that applies longitudinal vibration to a cutter by pivotally supporting the rotary cutter via an ultrasonic vibrator (piezoelectric actuator) using a piezoelectric element. As shown in FIG. 4, this type of apparatus supports a lifting platform 6 with a linear guide 21 or the like on a moving platform 5 that runs along the surface of a glass plate 8 to be cut. A piezoelectric vibrator 1 that vibrates in a direction (perpendicular to the surface of the glass 8) is mounted, and a holder 22 is fixed to the tip of a horn (a member that amplifies the amplitude) 2 of the piezoelectric vibrator. It has a structure in which the shaft 23 is rotatably mounted. A pressure applying device (for pressing and rotating the rotary cutter 23 against the surface of the glass plate 8 with a predetermined force between the elevating table 6 and the movable table 5 and the glass plate 8). Generally, an air cylinder) 7 is provided.

  In the following Patent Document 1, in a vibration scribe that applies high-frequency vibration while pressing a cutter with a sharp tip, the vertical force is obliquely inclined by inclining the pressing force and the direction of vibration with respect to the normal of the workpiece surface. A forming technique is disclosed.

  Patent Document 2 discloses a scribe method in which a scribe line is formed by performing relative movement while pressing a rotary cutter against the surface of a brittle material for the purpose of cutting only a scribe process without a break process. There is provided a scribing method in which two vibrators, a piezoelectric vibrator that vibrates in a vertical direction and a piezoelectric vibrator that vibrates in a horizontal direction, are provided, and a rotary cutter is periodically vibrated in a vertical direction and a traveling direction with respect to a brittle material. Proposed.

Further, in Patent Document 3, a rotary cutter is pressed against the surface of a hard brittle plate by air pressure, and a table on which the hard brittle plate is placed is fixed to a base or a moving table via a vibration device equipped with a piezoelectric vibrator. Thus, there has been proposed a scribing device that applies vibrations in the substantially same direction as the pressing direction of the rotary cutter to the table.
JP-A-11-263632 JP 2000-119031 A Japanese Patent Application Laid-Open No. 2004-224592

  A scribing device having a structure in which the rotating cutter rolls on the surface of the glass plate and inserts a scribe line as described above has a center hole and a center of rotation of the rotating cutter. There is a problem that the wear of the mandrel 24 is large, the exchanging frequency of the mandrel 24 and the rotary cutter 23 due to the wear increases, and the maintenance cost of the machine becomes high. In particular, a rotary cutter having jagged edges is troublesome to manufacture, and the rotary cutter itself is expensive.

  Moreover, what applies a vibration with the rotary cutter which made the periphery jagged has the direction of the vibration added to a glass plate limited to a vertical direction. Moreover, what applies a vibration to a rotating cutter using a piezoelectric vibrator, and what applies only a vertical vibration to a rotating cutter are common. In the above-mentioned Patent Document 2, a scribing method for simultaneously applying a vertical vibration and a traveling vibration to a rotating cutter has been proposed. However, a piezoelectric vibrator that vibrates in a vertical direction and a rotating cutter vibrates in the traveling direction. Since the two piezoelectric vibrators, ie, the piezoelectric vibrator, are used, there is a problem that the structure of the cutter head that supports the rotary cutter is complicated and expensive.

  The present invention can provide a cutter and a cutter head at low cost, depending on the nature of the hard brittle plate to be cleaved, not only in the vertical direction, but also in the direction of movement of the cutter and in the horizontal direction perpendicular thereto. It is an object of the present invention to provide a scribing device that can be easily replaced and can be easily replaced when the cutter is worn.

  The scribing device of the present invention has two-dimensional vibration (vibration in the first direction and a second direction intersecting with the first vibration) or three-dimensional vibration (first direction and the second direction intersecting with the first direction). And fixing the chip (small piece) -like fixed cutter 3 directly to the horn 2 of the piezoelectric vibrator 1 that can generate the vibration in the third direction crossing them) Yes. A chip-like fixed cutter (indenter or cutter chip) 3 is fixed directly on the tip of the horn 2 of the piezoelectric vibrator 1 or on a base 4 fixed to the tip of the horn 2 with a screw or the like. The piezoelectric vibrator 1 is a single piezoelectric vibrator that is provided with a plurality of piezoelectric elements so that vibrations can be generated not only in the vertical direction but also in the advancing direction of the cutter and in the horizontal direction perpendicular thereto. .

  As shown in FIG. 5 (a), the piezoelectric vibrator 1 includes a longitudinal vibration type (FIG. 6 (a)) piezoelectric element 11a clamped between two horns 2a and 2c, and the piezoelectric vibrator 11a in the tightening direction. A structure called a longitudinal vibration type that generates a vibration t in the same direction as the tightening direction by applying a potential difference e is generally used. However, a piezoelectric element called a transverse vibration type that expands and contracts in a direction orthogonal to the direction of the potential difference e (FIG. 6B) and a piezoelectric element called a sliding vibration type that vibrates in a shearing direction (FIG. 6C) are also available. is there. Further, as shown in FIG. 5B, two piezoelectric elements 11b and 11c are arranged side by side between the two horns 2a and 2c, and potential differences of 180 degrees in phase are given to the two piezoelectric elements. By vibrating in the vertical direction, a vibrator called a flexural vibration type that vibrates the tip of the horn 2 in the flexing direction indicated by an arrow t, or a lateral vibration type in which two pieces are combined as shown in FIG. A vibrator called a bimorph type is also provided in which a potential difference e is applied to the piezoelectric elements 11d and 11d of FIG. Furthermore, a piezoelectric vibrator (FIG. 5D) is also provided as a stator of an ultrasonic motor that vibrates so that the tip of the horn 2 sandwiched between two piezoelectric elements 11e and 11e draws an ellipse.

  For example, as shown in FIG. 2, the present invention uses a piezoelectric vibrator 1 in which a longitudinal vibration type 11a and flexural vibration types 11b and 11c are coupled in series, or two piezoelectric elements of a flexural vibration type piezoelectric vibrator. 11b, 11c and the two piezoelectric elements 11d, 11d of the bimorph type piezoelectric vibrator are given different potentials with different sizes and periods so that the tip of the horn 2 is vibrated in a two-dimensional direction and further in a three-dimensional direction. Thus, the cutter 3 is vibrated in a two-dimensional direction or a three-dimensional direction by directly fixing the cutter 3 that does not rotate to the tip of the horn 2 with screws or other fixing means.

  The scribing method for a hard brittle plate according to the invention of claim 1 of the present application is a scribing method for a hard brittle plate in which a cutter is run while pressing the glass surface and a vertical crack is formed in the glass along the running line. The small piece cutter 3 that does not rotate is fixed to the tip of the horn 2 of the piezoelectric vibrator 1, and a plurality of AC power supplies 15 (15a to 15c) are connected to the piezoelectric elements 11 (11a to 11e) of the piezoelectric vibrator. The scribing method is characterized in that the horn tip is vibrated in a first direction and a second direction crossing the first direction.

  The hard brittle plate scribing apparatus according to claim 2 of the present application includes a table 9 on which the hard brittle plate is placed, a movable table 5 that runs parallel to the table surface above the table, and this movement. A piezoelectric vibrator 1 mounted on a table 5 by being urged downward by a pressure device 7, a small piece cutter 3 fixed to the tip of a horn 2 of the piezoelectric vibrator, and a horn of the piezoelectric vibrator A scribing apparatus comprising a plurality of AC power supplies 15 (15a to 15c) that vibrate the tip in a first direction and a second direction crossing the first direction.

  In the scribing method and apparatus according to the present invention, since the chip-shaped cutter 3 is directly attached to the piezoelectric vibrator 1, the replacement when the cutter is consumed can be facilitated, and the scribing head can be provided at low cost.

  In addition, by changing the mounting direction of the piezoelectric vibrator 1, not only vibration in the direction perpendicular to the surface of the hard brittle plate 8, but also vibration can be applied in the traveling direction and further in the left-right direction orthogonal to the traveling direction. Therefore, it is possible to select an optimum vibration mode according to the properties and thickness of the hard brittle plate to be cleaved.

  Further, by changing the phase and frequency of a plurality of AC voltages applied to the piezoelectric vibrator, various forms of vibration including a circle and an ellipse can be applied to the cutter, and the hard brittleness which attempts to cleave the cutter 3 It is possible to minimize the horizontal cracks generated during scribing and maximize the vertical cracks inside the hard plate by the action of digging into or pushing into the plate. In addition, by changing the frequency, it is possible to adjust the biting pitch of the cutter with respect to the hard brittle plate in conjunction with the feed speed of the cutter. Further, the cutting depth can be changed by changing the amplitude.

  Furthermore, by changing the amplitude, phase, and frequency along the movement path of the cutter, the amount of cutter biting at the cutter entry and exit at the end of the hard brittle plate can be adjusted, and scribe lines can be engraved vertically and horizontally. When the cross scribing is performed, it is possible to adjust the amount of biting of the cutter at the position of crossing with the scribe line previously engraved.

  Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the scribing device of the present invention includes a chip-like cutter 3 fixed to the tip of a horn 2 of a piezoelectric vibrator 1. In the illustrated example, the cutter 3 is fixed to the base 4 with an adhesive, and the base 4 is fixed to the tip of the horn 2 of the piezoelectric vibrator with a screw. The piezoelectric vibrator 1 has a structure similar to that of the conventional structure and is fixedly attached to a lifting platform 6 provided on a movable platform 5 so as to be movable up and down by screws or the like. A pressure applying device 7 such as an air cylinder is provided between the lift 6 and the moving table 5, and the pressing force of the pressure applying device presses the cutter 3 against the surface of the glass plate 8 to be cut.

  2 and 3 are schematic views showing an example of the structure of the piezoelectric vibrator 1. The structure of FIG. 2 is a structure in which a longitudinal vibration type 11a and flexural vibration types 11b and 11c are connected in series, and includes three horns 2a, 2b, and 2c, and vibrates between the fixed horn 2a and the intermediate horn 2b. In this structure, one piezoelectric element 11a is provided, and two piezoelectric elements 11b and 11c to which a potential difference of opposite phases is applied between the intermediate horn 2b and the vibrating horn 2c are provided side by side. The longitudinal vibration type piezoelectric element 11a and the flexural vibration type piezoelectric elements 11b and 11c are applied with AC voltages 15a and 15b whose amplitude, phase and frequency can be independently adjusted. By generating an AC voltage of the same period in the longitudinal vibration power source 15a and the flexural vibration power source 15b with this structure, the tip of the vibration side horn 2c, and thus the cutter 3 fixed to the tip can be caused to vibrate in a circle or an ellipse. . Further, by making the frequencies of the longitudinal vibration power supply 15a and the flexural vibration power supply 15b different from each other, it is possible to give a complicated vibration to the cutter 3, for example, performing two flexural vibrations during one longitudinal vibration. it can.

  FIG. 3 shows a structure in which a potential difference is supplied from two different AC power sources 15b and 15c to the two piezoelectric elements 11b and 11c of the flexural vibration type piezoelectric vibrator. If the periods and phases of the AC power supplies 15b and 15c are made equal, the vibration-side horn 2c vibrates longitudinally, and if the periods are made equal and the phase is reversed 180 degrees, the vibration-side horn 2c bends and vibrates. By making the periods of the power supplies 15b and 15c equal to make the potential difference and phase different, circular or elliptical vibration can be applied to the tip of the vibration side horn 2c, and thus to the cutter 3 fixed to the tip. Furthermore, complicated vibrations can be applied to the cutter 3 by changing the periods of the power supplies 15b and 15c.

  If the piezoelectric vibrator 1 having the above structure is mounted so that the direction in which the bending vibration type piezoelectric elements 11 b and 11 c are aligned is the traveling direction of the cutter 3, the cutter 3 has a direction perpendicular to the surface of the glass plate 8 and the cutter. The two-dimensional vibration occurs in a plane including the three traveling directions. Further, if the arrangement direction of the two piezoelectric elements 11 b and 11 c is set to a direction orthogonal to the moving direction of the cutter 3, the cutter 3 is orthogonal to the direction of the glass plate 8 and the moving direction of the cutter 3. Two-dimensional vibration in a plane including the direction. Further, the bending-side piezoelectric elements 11b and 11c are also arranged in the direction perpendicular to the paper surface of FIGS. 3 and 4, so that the tip of the vibration-side horn 2c, and thus the cutter 3 fixed to the tip, is perpendicular to the surface of the glass plate 8. It is possible to vibrate in the three-dimensional direction of the vertical direction, the traveling direction of the cutter 3 and the left-right direction perpendicular to both directions.

  The worn cutter can be replaced by removing only the pedestal 4 and the cutter 3 at the fixed portion between the piezoelectric vibrator 1 and the pedestal 4, or at the fixed portion between the lifting platform 6 and the piezoelectric vibrator 1. 1 can also be exchanged with the cutter 3. When the piezoelectric vibrator 1 can be manufactured at a low cost, the latter structure is excellent in workability for replacement work, and the cutter 3 can be fixed to the horn tip of the piezoelectric vibrator 1 by welding or bonding. Therefore, there is an advantage that the structure of the scribe head can be further simplified.

Typical side view which shows the principal part of the scribing apparatus of this invention Schematic side view showing a first example of a piezoelectric vibrator Schematic side view showing a second example of a piezoelectric vibrator Schematic side view of the main part showing an example of a conventional scribe device The figure which shows the example of the piezoelectric vibrator of the conventional structure The figure which shows the various vibration modes of the piezoelectric element

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2 Piezoelectric vibrator horn 3 Cutter 5 Moving table 6 Lifting table 7 Pressure device 9 Table
11 (11a to 11e) Piezoelectric element
15 (15a-15c) AC power supply

Claims (2)

  In the scribing method of a hard brittle plate that runs while pressing the cutter against the glass surface and forms vertical cracks inside the glass along the running line, the non-rotating small piece cutter (3) is a piezoelectric vibrator (1) The horn (2) is fixed to the tip, and a plurality of AC power sources (15) are connected to the piezoelectric element (11) of the piezoelectric vibrator so that the horn tip intersects the first direction and the second direction. A scribing method for a hard and brittle plate, characterized in that it is vibrated.   A table (9) on which a hard and brittle plate is placed, a moving table (5) that runs parallel to the table surface above this table, and a pressing device (7) that biases the moving table (5) downward The piezoelectric vibrator (1) mounted in this way, a small piece cutter (3) fixed to the tip of the horn (2) of this piezoelectric vibrator, and the horn tip of the piezoelectric vibrator in the first direction And a plurality of alternating current power sources (15) that vibrate in the second direction crossing this, and a scribing device for a hard brittle plate.

Images