JP7368862B2 - Vibration device, vibration method, and vibration transfer device - Google Patents

Description

The present invention relates to a vibration device that makes parts jump, and a vibration transfer device.

Conventionally, there have been vibration devices that cause parts to jump on a plate.

Japanese Unexamined Patent Publication No. 199643/1983 Japanese Patent Application Publication No. 2005-238723 Japanese Patent Application Publication No. 2010-221409 Japanese Patent Application Publication No. 2009-126114

A vibration device that makes parts jump on a plate is required to make the parts jump as uniformly as possible.

Embodiments of the present invention aim to provide a vibration device that allows parts to jump uniformly.

The vibration device of the present invention includes:
a plate having a flat plate and a frame provided around the outer periphery of the flat plate;
a vibration unit having a plurality of vibrators that vibrate multiple locations on the outer periphery of the plate from positions outside the plate;
and a controller that controls vibration of the vibration unit,
The method is characterized in that parts are made to jump on the plate.

According to the present invention, the plate stably vibrates by causing the vibration unit to vibrate multiple locations on the outer periphery of the plate from positions outside the plate.

1 is a perspective view of a vibration device 100 of Embodiment 1. FIG. FIG. 2 is a sectional view taken along line AA of the vibration device 100 of FIG. 1 according to the first embodiment. FIG. 3 is an explanatory diagram of a vibration method according to the first embodiment. FIG. 3 is a diagram showing the configuration of vibration measurement. FIG. 2 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.2 MPa. FIG. 3 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa. FIG. 3 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.4 MPa. FIG. 4 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa. FIG. 3 is a distribution diagram of horizontal vibrations. It is a figure which shows the comparative example of one-sided vibration. It is a distribution diagram of one-sided vibration. It is a figure which shows the comparative example of lateral both-side vibration. FIG. 4 is a distribution diagram of vertical vibration of horizontal bilateral vibration. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. 7 is a diagram showing a modification of the vibration device 100 of the first embodiment. FIG. FIG. 2 is a diagram showing a screen printing apparatus 200 according to a second embodiment. FIG. 7 is a diagram showing a shearing device 300 according to a third embodiment. FIG. 4 is a diagram showing a drilling device 400 according to a fourth embodiment. It is a figure showing vibration transfer device 500 of Embodiment 5. It is an explanatory view of vibration of vibration transfer device 500 of Embodiment 5. It is a figure showing a modification of vibration transfer device 500 of Embodiment 5. It is a figure showing a modification of vibration transfer device 500 of Embodiment 5. It is a figure showing a modification of vibration transfer device 500 of Embodiment 5. It is a figure showing a modification of vibration transfer device 500 of Embodiment 5. It is a figure showing a modification of vibration transfer device 500 of Embodiment 5. FIG. 7 is a diagram showing a distributor 47 according to a sixth embodiment. 7 is a diagram showing a plate 20 and a vibration unit 40 according to a seventh embodiment. FIG. 7 is a diagram showing a planar shape of a plate 20 according to a seventh embodiment. FIG. 2 is a diagram showing a cross-sectional shape of the plate 20 of Embodiment 7 taken along the line AA in FIG. 1. FIG. FIG. 7 is a three-sided view of a printing section 600 of a screen printing apparatus according to a ninth embodiment. FIG. 9 is a perspective view of a vibration device 100 according to a ninth embodiment. FIG. 7 is a front view of a printing tool 260 according to a ninth embodiment. FIG. 7 is a side view of a printing tool 260 according to a ninth embodiment. FIG. 7 is a plan view of a printing tool 260 according to a ninth embodiment. FIG. 7 is a side view of a printing tool 260 according to a ninth embodiment. FIG. 12 is a diagram showing vibration measurement results in Embodiment 9. FIG. 12 is a diagram showing vibration measurement results in Embodiment 9. FIG. 7 is a side view of a printing tool 260 according to a ninth embodiment. FIG. 12 is a diagram showing vibration measurement results in Embodiment 9. FIG. 12 is a diagram showing vibration measurement results in Embodiment 9. FIG. 5 is a five-sided view of a printing tool 260 according to a ninth embodiment. 5 is a five-sided view of a printing tool 260 according to a tenth embodiment. FIG. FIG. 3 is a three-sided view of a printing tool 260 according to a tenth embodiment. FIG. 3 is a three-sided view of a printing tool 260 according to a tenth embodiment. 5 is a five-sided view of a printing tool 260 according to a tenth embodiment. FIG. It is a figure which shows the modification of the printing implement 260 of Embodiment 9 and 10. 11 is a diagram showing a screen printing apparatus 200 according to an eleventh embodiment. FIG. FIG. 7 is a perspective view of a vibration device 100 according to an eleventh embodiment. FIG. 7 is a perspective view of a vibration device 100 according to an eleventh embodiment. FIG. 7 is a perspective view of a vibration device 100 according to an eleventh embodiment. FIG. 7 is a perspective view of a vibration device 100 according to an eleventh embodiment. It is a figure which shows the modification of the vibration device 100 of Embodiment 11. It is a figure showing a modification of screen printing device 200 of Embodiment 11.

Embodiment 1.
FIG. 1 is a perspective view of a vibration device 100 according to the first embodiment.
FIG. 2 is a sectional view taken along line AA of the vibration device 100 of FIG. 1 according to the first embodiment.
In FIG. 1, X indicates the front-rear direction.
In FIGS. 1 and 2, Y indicates the horizontal direction, and Z indicates the vertical direction.

<<<Configuration of vibration device 100>>>
The vibration device 100 includes a base 10, a plate 20, a vibration unit 40, and a controller 80.

<<<Base 10 Description>>>
The base 10 has a box shape with an open top.
The base 10 has a top surface 11, a bottom surface 12, and a wall 13.
The base 10 has a space 14 in the center.
The upper surface 11 is constituted by the top surface of the wall 13 and has a rectangular shape with an opening in the center.
The bottom surface 12 has a rectangular shape.
The wall 13 is a side wall of the base 10 that stands up from the periphery of the bottom surface 12.
The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<<Description of plate 20>>>
The plate 20 is desirably made of a material that allows sound waves to pass through easily, and metal is preferred.
The material of the plate 20 is preferably aluminum, titanium, or stainless steel.
Furthermore, aluminum and titanium are preferred, with aluminum being the best.
The plate 20 is preferably rectangular, preferably square.
The plate 20 has a front surface 21, a back surface 22, and four sides 23.
The front surface 21 and the back surface 22 are parallel rectangular planes having the same shape.
The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20.
The side 23 is a plane perpendicular to the front surface 21 and the back surface 22 of the plate 20.
The plate 20 has a plurality of screw holes 24 around its periphery.
A total of eight screw holes 24 are provided at the corners of the plate 20 and at the center of each side.
The plate 20 is firmly fixed to the base 10 by screws 25 inserted into screw holes 24.
Hereinafter, the position of the screw hole 24 will be referred to as a fixed location.
The plate 20 is fixed to the base 10 at fixed points provided around the plate 20.

<<<Description of vibration unit 40>>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the plate 20 at the same frequency.
The vibration unit 40 vibrates the opposing sides of the plate 20 up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vibrates the outside of the fixed location where the screw hole 24 is located up and down.
The two vibrators, vibrator 41 and vibrator 42, have the same specifications.
The two vibrators, vibrator 41 and vibrator 42, are vibrators driven by air pressure.

As a vibrator driven by air pressure, the following vibrators can be used.
(1) Turbine vibrator (2) Roller vibrator (3) Ball vibrator (4) Piston vibrator

The vibrators (1), (2), and (3) above generate less noise and can operate at high speed.
In particular, a turbine vibrator is most suitable because of its stable operation.
Piston vibrators have problems in that they are noisy and operate slowly.

The vibration unit 40 has a distributor 47.
Distributor 47 transmits the vibrations of vibrator 41 and vibrator 42 to side 23 of plate 20.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 is a metal fitting bent into an L shape.
Distributor 47 has a horizontal portion 48 and a vertical portion 49.
The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42.
The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 are reversed.
In FIG. 2, vibrator 41 rotates counterclockwise and vibrator 42 rotates clockwise.
The vertical portion 49 has a vertical width less than or equal to the vertical width of the side 23 and is fixed to the side 23.

The distributor 47 has a longitudinal width larger than the width of the top surfaces of the vibrators 41 and 42 in the longitudinal direction.
The width of the distributor 47 in the front-rear direction is preferably more than 2 times and less than 10 times, and preferably 5 times, the width of the top surfaces of the vibrators 41 and 42 in the front-rear direction.
The distributor 47 has a longitudinal width smaller than one-half and larger than one-eighth of the width of the plate 20 in the longitudinal direction, preferably one-fifth.
The distributor 47 transmits the vibrations of the vibrators 41 and 42 to a wide range of the side 23 of the plate 20.

<<<Description of controller 80>>>
Controller 80 controls vibration of vibration unit 40.
The controller 80 causes the vibrator to vibrate at a frequency of 10 Hz or more and 800 Hz or less.
The controller 80 causes the plurality of vibrators to vibrate at the same frequency.
The controller 80 includes an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

Air compressor 81 generates compressed air.
The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow therethrough.
The air pipe 82 branches into a Y-shape in the middle and is connected to the vibrator 41 and the vibrator 42.

Regulator 83 is a control device that controls the pressure of compressed air.
The regulator 83 determines the vibration frequency of the vibrator 41 and the vibrator 42 by controlling the pressure of compressed air.

Processor 84 has a central processing unit and a program.
The processor 84 can be implemented as an integrated circuit, a circuit board, or the like.
Processor 84 controls the operation of vibration device 100.
The processor 84 is connected to the air compressor 81 and controls the on/off operation and operating time of the air compressor 81.

<<<Explanation of vibration method>>>
The vibration method of the vibration device 100 will be explained.

<Initial setting step>
With the periphery of the plate 20 fixed to the base 10 with the screws 25, the operator turns on the power switch of the vibration device 100.
The operator has a correspondence table between the pressure of compressed air and the vibration frequencies of the vibrators 41 and 42.
The operator refers to the correspondence table and sets the compressed air pressure corresponding to the vibration frequencies of the vibrators 41 and 42 using the regulator 83.
The worker sets the pressure corresponding to any audible frequency between 10 Hz and 800 Hz.

<Travelling wave generation step>
Since the air pipe 82 is branched into a Y-shape and connected to the vibrator 41 and the vibrator 42, air of the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency.
The vibration frequencies of the vibrators 41 and 42 are preferably in the audible range.
The vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20, and give a traveling sine wave 60 to the left and right sides 23 of the plate 20.
The vibrator 41 and the vibrator 42 simultaneously generate traveling waves 60 with the same amplitude, the same wavelength, and the same frequency.

<Standing wave generation step>
When the traveling waves 60 are simultaneously generated with the same amplitude, the same wavelength, and the same frequency in opposite directions, the traveling waves 60 from the left and right sides overlap on the plate 20, and a standing wave 70 is generated.
A standing wave is a wave that does not change position over time.
The plate 20 vibrates up and down by the standing wave 70 at the same vibration frequency as the vibrators 41 and 42.

<Synchronization step>
Even if vibration starts in an asynchronous state in which the vibrator 41 and the vibrator 42 are out of phase, the synchronization phenomenon causes the phases of the vibrator 41 and the vibrator 42 to match in a short time, and the vibration of the vibrator 41 and the vibrator 42 is stopped. It becomes synchronized and immediately shifts to standing wave vibration.

<Vertical vibration step>
Hereinafter, vertical vibration by the vibration method will be explained using FIG. 3.
FIG. 3 is a schematic diagram of vertical vibration seen from the front and back direction of the center of the plate 20 in the left and right direction.
In FIG. 3, the fulcrum 26 is the vertical center of the plate 20 and the center of the screw hole 24.
(a) When a downward force is applied to the side 23 of the plate 20 by the vibrators 41 and 42, an upward force is generated at the center of the plate 20 via the fulcrum 26.
(b) When a larger downward force is applied to the side 23 of the plate 20 by the vibrators 41 and 42, the center of the plate 20 rises.
(c) When the downward force of the sides 23 of the plate 20 by the vibrators 41 and 42 weakens, the center of the plate 20 descends.
(d) When an upward force is applied to the side 23 of the plate 20 by the vibrators 41 and 42, a downward force is generated at the center of the plate 20 via the fulcrum 26.
(e) When a larger upward force is applied to the side 23 of the plate 20 by the vibrators 41 and 42, the center of the plate 20 descends.
(f) When the upward force of the side 23 of the plate 20 by the vibrators 41 and 42 becomes weaker, the center of the plate 20 rises.

<Flapping phenomenon>
By repeating the operations from (a) to (f), with (a) to (f) as one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequency of the vibrator 41 and the vibrator 42.
Since the plate 20 vibrates as if it were flapping from side to side between the fulcrums 26, this phenomenon is hereinafter referred to as a flapping phenomenon.
The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down between the fulcrums 26 by supplying air to vibrators fixed to the left and right sides of the plate 20.
In order to facilitate the flapping phenomenon, it is desirable that the fixing positions of the vibrators 41 and 42 and the positions of the two screw holes 24 are on a straight line. That is, it is desirable that the plurality of vibrators exist on an extension line of a line connecting opposing fixing points on opposing sides of the plate 20, respectively.
Even if the fixed positions of the vibrators 41 and 42 and the positions of the two screw holes 24 are not on a straight line and are not aligned, the flapping phenomenon will occur as long as the plate 20 is securely fixed to the base 10. .
Since an increase in the thickness of the wall 13 may impede the flapping phenomenon, the thickness of the wall 13 should be thinner, and the opening of the space 14 should be wider. The thickness of the wall 13 is preferably larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<<Specific example>>>
A specific example will be explained below.
As the plate 20, a square aluminum plate with each side of about 0.5 m is used.
The sound velocity V of aluminum is assumed to be 6320 [m/s]. However, assuming that the temperature of the aluminum is constant, changes in the speed of sound due to temperature are not considered.
As the vibrator 41 and the vibrator 42, air vibrators manufactured by Exen Co., Ltd. having the following specifications are used.
An air vibrator with a vibration frequency f of 119 Hz or more and 414 Hz or less is desirable when the air pressure is 0.2 or more and 0.6 MPa or less. Alternatively, it is desirable to use an air vibrator with a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less.

Here, it is assumed that when the air pressure is below, an air vibrator whose vibration frequency f is below is used.
Vibration frequency f when air pressure is 0.5MPa: 216.5Hz
Vibration frequency f when air pressure is 0.4MPa: 206.6Hz
Vibration frequency f when air pressure is 0.3MPa: 177.3Hz
Vibration frequency f when air pressure is 0.2MPa: 133.0Hz

The wavelength can be calculated using the following formula.
Wavelength λ [m] = Sound velocity V [m/s] / Vibration frequency f [Hz]
The wavelength of the traveling wave 60 is calculated as follows.
When air pressure is 0.5MPa:
Wavelength λ [m] = 6320 [m/s] / 216.5 [Hz] = 29.19 m
When air pressure is 0.4MPa:
Wavelength λ [m] = 6320 [m/s] / 206.6 [Hz] = 30.59 m
When air pressure is 0.3MPa:
Wavelength λ [m] = 6320 [m/s] / 177.3 [Hz] = 35.65 m
When air pressure is 0.2MPa:
Wavelength λ [m] = 6320 [m/s] / 133.0 [Hz] = 47.52 m

The traveling wave 60 generated by the vibrator 41 and the vibrator 42 can be expressed by the following equation.
R(y,t)=A*sin2π((t/T)-(y/λ))
L(y,t)=A*sin2π((t/T)+(y/λ))
y[m]: Location of the plate in the Y direction t[s]: Time R(y, t): Displacement [m] of the traveling wave 60 in the Z direction at location y[m] and time t[s]
L (y, t): Displacement [m] of the traveling wave 60 in the Z direction at location y [m] and time t [s]
A: Amplitude of traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

A standing wave 70 generated by the superposition of the traveling waves 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following equation representing a sine standing wave.
z(y,t)
=R(y,t)+L(y,t)
=2A*sin(2π(t/T))*cos(2π(y/λ))
y[m]: Location of the plate in the Y direction t[s]: Time z(y, t): Displacement in the Z direction of the standing wave 70 at location y[m] and time t[s] [m]
A: Amplitude of traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

cos(2π(y/λ)) indicates the amplitude of the standing wave 70.
A location y where the amplitude of the standing wave 70 is 0, that is, a location y where cos(2π(y/λ)) is 0, is called a "node."
The location where the amplitude of the standing wave 70 is maximum, that is, the location y where the absolute value of cos(2π(y/λ)) is 1 is called an "antinode".

In order to vibrate the plate 20 up and down, it is sufficient to avoid generating nodes of standing waves at any location y in the left and right direction between the fulcrums 26.
Since a node of a standing wave occurs every half wavelength, by making the distance between the supporting points 26 less than a half wavelength of the standing wave, it is possible to prevent a node of a standing wave from existing at any location y in the left and right direction of the plate 20. I can do it.
If the position of the "node" of the standing wave 70 is set as a fixed location and the fixed location is held (screwed), the "node" becomes the fulcrum of flapping.

If the distance between the supporting points 26 is larger than a half wavelength of the standing wave, knots will occur in the plate 20.
Therefore, the distance between the fixing points of the plate 20 in the left-right direction must be less than the following length.
Half wavelength when air pressure is 0.5 MPa: wavelength λ [m]/2 = 14.56 m
Half wavelength when air pressure is 0.4 MPa: wavelength λ [m]/2 = 15.29 m
Half wavelength when air pressure is 0.3 MPa: wavelength λ [m]/2 = 17.82 m
Half wavelength when air pressure is 0.2 MPa: wavelength λ [m]/2 = 23.766 m
As described above, the frequency and wavelength of the standing wave are determined by the air pressure of the vibrator 41 and the vibrator 42, and the maximum length of the plate 20 is determined.

<<<Vibration measurement results>>>
The vibration of the plate 20 was measured using a square aluminum plate having a side of approximately 0.5 m.
As shown in FIG. 4, the base 10 was removed from the vibration device 100 of FIG. 1, the plate 20 was placed on an air mat, the area around the plate 20 was left free, the plate 20 was vibrated, and the amplitude of the vibration was measured.

5 to 8 are diagrams showing measurement results of vertical vibrations at 49 points in the lower half region of the plate 20. FIG.
5 to 8 show the displacement in the Z direction (upward displacement) in the case of FIG. 3(b), with the displacement in the Z direction when the plate 20 is flat as 0.
The vibration in the upper half region of the plate 20 shown in FIGS. 5 to 8 was not measured because it can be considered that the vibration is symmetrical to the lower half region of the plate 20.
FIG. 5 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.2 MPa.
FIG. 6 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa.
FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.4 MPa.
FIG. 8 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa.

Looking at the first line of FIG. The amplitude of vibration is larger at the edges than at the center. That is, knot-like vibration unevenness occurs in the central portion of the plate 20.
The reason for this is thought to be that the air pressure of 0.2 MPa is too weak to vibrate the vibrators 41 and 42 stably.
Looking at the first line of FIG. 6, the amplitude of the vertical vibration is 5.28 μm<9.53 μm<12.2 μm<13.2 μm>13.1 μm>11.0 μm>8.40 μm, and the plate 20 The amplitude of the vibration is larger at the center than at the edges. That is, it is considered that an antinode is generated in the central portion of the plate 20.
In the cases of FIGS. 7 and 8 as well, the amplitude of vibration is larger in the central portion of the plate 20 than in the end portions. That is, it is considered that an antinode is generated in the central portion of the plate 20.
Therefore, the plate 20 cannot be accurately vibrated in the vertical direction with an air pressure of 0.2 MPa.
On the other hand, at an air pressure of 0.3 MPa or more and 0.5 MPa or less, the plate 20 can be accurately vibrated in the vertical direction.

The measurement results of vibrations in the longitudinal and lateral directions will be explained using FIG. 9 .
FIG. 9 is a table showing the measurement results of horizontal vibration at measurement points 1 to 12 on the two sides of the plate 20 in FIGS. 5 to 8.
At an air pressure of 0.2 MPa, measurement points 1 and 2 show values exceeding 2 micrometers.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, values of less than 2 micrometers are shown at all points.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of vibration in the longitudinal and lateral directions is less than about 10% or less than 15% of the amplitude of vibration in the vertical direction, and it is assumed that there is no vibration in the horizontal direction. be able to.

The above measurement results were obtained when the plate 20 was vibrated with the surrounding area free.
As shown in FIG. 1, the circumference of the plate 20 of the vibration device 100 is fixed to the base 10 by screws 25, so in reality, vertical vibration is limited around the plate 20 (particularly at the screw holes 24). has been done.
When the plate 20 is vibrated with the periphery of the plate 20 free, the plate 20 vibrates up and down with the center as an antinode. Therefore, even when the periphery of the plate 20 is fixed at a fixed location and the plate 20 is vibrated, the plate 20 tends to vibrate up and down with the center as the belly. As a result, as shown in FIG. 3, it can be considered that a flapping phenomenon occurs with the flapping center between the fulcrums 26.
When the plate 20 is vibrated with the periphery of the plate 20 fixed to the base 10, the vibration in the lateral direction is further reduced compared to when the plate 20 is vibrated with the periphery of the plate 20 free. You can think about it.
Furthermore, looking at the above measurement results, if the distance between the fixed points in the left and right direction of the plate 20 is smaller than half a wavelength, the fixed point can be used as the fulcrum of flapping even if the position of the "node" of the standing wave 70 is not fixed. It can be considered that
For example, when the air pressure is 0.4 MPa, the half wavelength is 15 m, but even when the distance between the fixing points of the plate 20 in the left and right direction is about 0.5 m, no "knots" appear.
As a result, even if the distance between the fixed points is 10 m, 5 m, or 1 m, the fixed points can be considered to be the fulcrum of flapping.

<<<Description of comparative example>>>
<One-sided vibration>
FIG. 10 shows the configuration of FIG. 4 with the vibrator 42 and distributor 47 removed.
The plate 20 is vibrated only by a vibrator 41 on one side.
A traveling wave 60 generated from the vibrator 41 on one side 23 of the plate 20 is reflected on the other side 23 to generate a reflected wave.
The traveling wave 60 and the reflected wave overlap to form a standing wave.
In the configuration of FIG. 10, as shown in FIG. 11, it was confirmed that knot-like vibration unevenness occurred on the right side of the center of the plate 20.
Furthermore, as shown in FIG. 11, at the 12 points mentioned above, there were places where the amplitude of horizontal vibration exceeded 9 micrometers. The reason for this is thought to be that elliptical vibration occurred in the plate 20.
Therefore, when the plate 20 is vibrated from one side, the plate 20 cannot be vibrated accurately.

<Sideward bilateral vibration>
In FIG. 12, the fixing direction of the vibrator 41 and the vibrator 42 is rotated by 90 degrees from the configuration shown in FIG. 4, and the vibrator 41 and the vibrator 42 are fixed so that the rotation direction is reversed.
In the configuration shown in FIG. 12, it was confirmed that knot-like vibration unevenness occurred in the central portion of the plate 20, as shown in FIG.
Therefore, if the vibrator 41 and the vibrator 42 are placed sideways with their rotating directions reversed, the plate 20 cannot be vibrated accurately.
Similarly, if the vibrator 41 and the vibrator 42 are rotated in the same direction and are placed sideways, it is considered that the plate 20 cannot be vibrated accurately.

<Horizontal one-sided vibration>
Although not shown, it has been confirmed that even in the structure shown in FIG. 12 with the vibrator 42 and distributor 47 removed, knot-like vibration unevenness occurs in the central portion of the plate 20.
Therefore, in the case of sideways one-sided vibration, the plate 20 cannot be vibrated accurately.

<<<Summary>>>
The vibration device 100 of this embodiment simultaneously generates traveling waves 60 from the left and right sides of the plate 20 with the same amplitude, the same wavelength, and the same frequency using the vibrators 41 and 42, which are audible frequency vibration sources. As a result, a standing wave is generated in the plate 20 due to the superposition of traveling waves in opposite directions.

In the vertical vibration generation process of the vibration device 100 of this embodiment, traveling waves 60 are simultaneously generated from the audible frequency vibration source to the plate 20 from the left and right sides at the same frequency. The plate 20 vibrates due to the standing waves, but only in the vertical direction due to the vibration action of the standing waves. And it does not vibrate in the front, back, left or right directions. The vibration device 100 uses this vibration only in the vertical direction.

The vibration device 100 can change the audible frequency during vibration by the controller 80. The audible range frequency is a range from 10 Hz to 20,000 Hz, and the audible frequency used in this embodiment is set to a range from 10 Hz to 800 Hz.
The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as a vibration source.
The vibration unit 40 may use a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type as the vibration source such as the vibrator 41 and the vibrator 42 as appropriate depending on the required frequency range. It can be replaced with a vibration source, etc.
The controller 80 may include an arbitrary waveform generator or a bipolar power supply as a control component. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, a bipolar power supply, or the like as a control component corresponding to the sonic vibration source.

The vibration unit 40 vibrates the plate 20 up and down using a pair of vibrators attached to the center outer sides of two opposing sides of the plate 20.
The vibration unit 40 uses a pair of vibrators attached to the outer center of two opposing sides of the plate 20 to simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency, thereby vibrating the plate 20 with a standing wave.
In the vibration device 100 of this embodiment, a vibrator 41 and a vibrator 42 are fixed to the outside of the plate 20.
That is, the vibrators 41 and 42 do not overlap with the plate 20 in plan view.
Therefore, the vibrators 41 and 42 do not inhibit the vertical vibration of the plate 20.

In the vibration device 100 of this embodiment, a vibrator 41 and a vibrator 42 are fixed to the side 23 of the plate 20.
The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and back surface 22 of the plate 20.
Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left and right direction, and the entire area of the plate 20 in the left and right direction vibrates up and down.

The vibration device 100 of this embodiment does not uniformly vibrate the entire plate 20 up and down.
The amplitude is largest at the center of the plate 20, and decreases from the center of the plate 20 toward the periphery in the left and right direction.
The reason why the amplitude decreases toward the periphery in the left and right direction is that both the left and right ends of the plate 20 are fixed and that standing waves are generated in the plate 20.
Further, the amplitude is the largest in the central portion of the plate 20, and decreases from the central portion of the plate 20 toward the periphery in the front-rear direction.
The reason why the amplitude decreases toward the periphery in the front-rear direction is that both front and rear ends of the plate 20 are fixed.
Both front and rear ends of the plate 20 may be free ends that can freely vibrate vertically.
If both the front and rear ends of the plate 20 are free ends, the amplitude of the plate 20 in the front and rear direction becomes uniform. Alternatively, the amplitude of the plate 20 in the front-rear direction approaches uniformity.

In the vibration device 100 of this embodiment, the vibrator 41, the vibrator 42, and two fixing locations (screw holes 24) are arranged on a straight line.
The vibrator 41 and the vibrator 42 are located outside the two fixing locations (screw holes 24).
The vibrator 41 and the vibrator 42 are not inside the two fixing locations (screw holes 24).
The plate 20 vibrates up and down due to the flapping phenomenon centered between two fixed points (fulcrums 26).

<<<Effects of Embodiment 1>>>
According to this embodiment, by simultaneously generating the traveling waves 60 from the left and right sides of the plate 20 at the same frequency using the vibrators 41 and 42, a standing wave is generated, and the plate 20 vibrates only in the vertical direction.
Even if it vibrates in the front, back, left and right directions, it can be ignored compared to the vibration in the up and down direction.
By placing a workpiece on the plate 20 of the vibration device 100, the workpiece can be vibrated only in the vertical direction.

<<<Example of change>>>
Change example 1.
A vibration device 100 shown in FIG. 14 has the distributor 47 removed from the configuration shown in FIG. 1, and the vibrators 41 and 42 of the vibration unit 40 are directly fixed to the side 23 of the plate 20.

Change example 2.
In the vibration device 100 shown in FIG. 15, the plate 20 has a larger size than the base 10 in plan view, and the vibrators 41 and 42 of the vibration unit 40 are directly fixed to the outer edge of the back surface 22 of the plate 20. be.

Change example 3.
A vibration device 100 shown in FIG. 16 has a vibrator 41 and a vibrator 42 fixed to each other with a distributor 47 sandwiched between a base 10 and a plate 20.
Distributor 47 may be a flat plate.

Change example 4.
In FIG. 2, the vibrator 41 may be mounted to rotate clockwise and the vibrator 42 may be rotated counterclockwise.
In FIG. 2, it is preferable that the rotation directions of the vibrator 41 and the vibrator 42 be reversed, rather than the vibrator 41 and the vibrator 42 being rotated in the same direction.
Even when the rotational directions of the vibrator 41 and the vibrator 42 are reversed, it is preferable to rotate the vibrator 41 counterclockwise and the vibrator 42 clockwise, as shown in FIG.

Change example 5.
The vibration unit 40 may have an even number of more than two audio frequency vibration sources.
As shown in FIG. 17, a vibrator 41, a vibrator 42, a vibrator 43, and a vibrator 44 may be attached to the plate 20.
In (a), a vibrator 41 and a vibrator 42 are facing each other, and a vibrator 43 and a vibrator 44 are facing each other.
Vibrator 41 and vibrator 43 are fixed to the same side 23, and vibrator 42 and vibrator 44 are fixed to another side 23.
Standing waves are generated in parallel.
In (b), a vibrator 41 and a vibrator 42 are facing each other, and a vibrator 43 and a vibrator 44 are facing each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are each fixed to an individual side 23.
Standing waves are generated orthogonally.
In (c), the vibrator 41 and the vibrator 44 are facing each other, and the vibrator 42 and the vibrator 43 are facing each other.
A vibrator 41, a vibrator 42, a vibrator 43, and a vibrator 44 are fixed to each corner of the plate 20, respectively.
Standing waves are generated orthogonally.
Although not shown, the shape of the plate 20 may be circular, oval, or other shapes in plan view.

Change example 6.
The shape of the plate 20 may be polygonal in plan view.
The vibration unit 40 may have an odd number of audible frequency vibration sources.
As shown in FIG. 18, the plate 20 may be a triangular or hexagonal plate 20.
(a) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are each fixed to an individual side 23.
(b) shows a hexagonal plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are each fixed to an individual side 23 at every other place.
Although not shown, vibrators may be fixed to all sides 23 of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, oval, or other shapes in plan view.
The vibration unit 40 may include one or more air vibrators fixed to the outside of one or more sides of the plate 20.
Specifically, the vibration unit 40 may have air vibrators arranged as follows.
Only one side of the plate 20, one air vibrator on the outside of the side. Only one side of the plate 20, multiple air vibrators on the outside of the side. One air vibrator on the outside of each side of some of the plurality of sides of the plate 20. air vibrators (Fig. 18(b))
A plurality of air vibrators are installed outside each side of some of the sides of the plate 20 ((a) in FIG. 17).
One air vibrator is placed on the outside of each side of the plate 20 (FIG. 17(b) and FIG. 18(a)).
A plurality of air vibrators are placed outside each side of the plate 20. The controller 80 causes all the air vibrators to vibrate at the same frequency.
Instead of an air vibrator, other types of vibrators may be used.

Modification example 7.
The vibration unit 40 may include one audio frequency vibration source.
The vibration device 100 in FIG. 19 includes one vibrator 45 and a frame 46.
The frame 46 is a U-shaped metal component.
The frame 46 fixes the vibrator 45 at the center of the bottom, and the tops of both ends are fixed to the distributor 47.
The vibrator 45 vibrates up and down.
The vibration of the vibrator 45 is transmitted to the two distributors 47, causing the two distributors 47 to vibrate up and down.
In this way, it is not essential to attach a plurality of vibrators to both sides of the plate 20, and the vibration unit 40 can simultaneously transmit the traveling waves 60 from a plurality of sides of the plate 20 with the same amplitude, the same wavelength, and the same frequency. All it takes is a mechanism to generate it.

Change example 8.
The vibration device 100 in FIG. 20 has a spacer 50 between the plate 20 and the distributor 47.
The spacer 50 is a square prism metal rod that is sandwiched and fixed between the side 23 of the plate 20 and the vertical portion 49 of the distributor 47.
The spacer 50 is a component that moves the generation position of the traveling wave 60 away from the fulcrum 26 of the flapping phenomenon.
By changing the length of the spacer 50 in the left-right direction, the distance between the audio frequency vibration source and the fixed location can be changed.
Even if the traveling waves 60 have the same amplitude, the same wavelength, and the same frequency, the flapping phenomenon appears more strongly as the length of the spacer 50 in the left-right direction increases.
The spacer 50 allows the amplitude of vertical vibration of the plate 20 to be adjusted.

Modification example 9.
In order to fix the base 10 and the plate 20, other fixing fittings or other fixing mechanisms may be used instead of the screw holes 24 and screws 25.

Embodiment 2.
In the second embodiment, differences from the first embodiment will be explained.

<<<Explanation of configuration>>>
FIG. 21 is a configuration diagram of a screen printing apparatus 200 according to the second embodiment.
Screen printing device 200 includes vibration device 100 described in Embodiment 1.
The screen printing device 200 is a device that prints on the workpiece 900.
The workpiece 900 is a substrate of an electronic device or a substrate of a circuit.

The screen printing device 200 has a screen plate 201 with a screen 202 stretched over a frame.
Screen 202 is a mesh screen, metal screen, or other screen.
The screen 202 has a printed pattern of electrode terminals, electrodes, wiring, etc.
Paste 204 is present on the surface of screen 202 .
The screen printing device 200 has a squeegee 203.

The squeegee 203 moves on the surface of the screen 202 and prints electrode terminals, electrodes, wiring, etc. on the workpiece 900 using the paste 204.

Plate 20 of vibration device 100 is a table on which workpiece 900 is placed.
The plate 20 functions as a suction plate that suctions the workpiece 900.
The plate 20 has a plurality of through holes 205 passing through it vertically.
The base 10 functions as a suction box that sucks air.

The screen printing device 200 has a suction pipe 206 and a vacuum pump 207.
Suction pipe 206 is connected to base 10 and vacuum pump 207 and sucks air from space 14 .
As shown in FIG. 21, it is desirable that the vibrator 41 and the vibrator 42 be arranged in the same direction as the printing direction of the squeegee 203. That is, it is desirable that the printing direction of the squeegee 203 and the direction in which the standing waves are generated match.

<<<Explanation of operation>>>
The processor 84 of the screen printing device 200 operates the vibration device 100 to vibrate the plate 20 during printing.
The vibration of the plate 20 is transmitted to the workpiece 900 and the screen plate 201, causing the paste 204 to vibrate.
The vibration of the paste 204 makes it easier for the paste 204 to pass through the printed pattern on the screen 202.
When performing hole-filling printing in which the holes or grooves of the workpiece 900 are filled with paste, the paste 204 is likely to be filled into the holes or grooves of the workpiece 900 because the workpiece 900 is vibrating.
In the case of fill-in-hole printing, the processor 84 operates the vibration device 100 to vibrate the plate 20 even after printing. By vibrating the plate 20 even after printing, the paste 204 can be filled to the bottom of the hole or groove.

<<<Effects of Embodiment 2>>>
According to this embodiment, the vibration device 100 can be used in the screen printing device 200.
According to this embodiment, when filling holes in screen printing, it is possible to reduce variations in the amount of paste filling the holes.
In particular, when performing hole-filling printing using hard paste, the amount of filling is improved.
According to this embodiment, the plate 20 vibrates only in the vertical direction and does not vibrate in the front, rear, left and right directions, so the workpiece 900 and the screen plate 201 do not shift in the front, rear, left and right directions. Therefore, the print pattern on the workpiece 900 will not become blurred.

Embodiment 3.
In the third embodiment, differences from the first embodiment will be explained.
FIG. 22 is a perspective view of the shearing device 300 according to the third embodiment.
Shearing device 300 includes vibration device 100 described in Embodiment 1.
The shearing device 300 is a device that cuts the workpiece 900.
The shearing device 300 has a blade 301 that cuts the workpiece 900.
Plate 20 of vibration device 100 is a table on which workpiece 900 is placed.

During operation, the processor 84 of the shearing device 300 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the workpiece 900, causing the workpiece 900 to vibrate.
As the workpiece 900 vibrates in the vertical direction, pressure from the blade 301 to the workpiece 900 becomes intermittent.

<<<Effects of Embodiment 3>>>
According to this embodiment, the vibration device 100 can be used in the shearing device 300.
According to this embodiment, the pressure applied from the blade 301 to the workpiece 900 is intermittent, so that the durability time of the blade 301 is extended.

Embodiment 4.
In the fourth embodiment, points different from the first embodiment will be explained.
FIG. 23 is a perspective view of a drilling device 400 according to the fourth embodiment.
The drilling device 400 includes the vibration device 100 described in the first embodiment.
The drilling device 400 is a device that forms a hole in a workpiece 900.
The drilling device 400 has a drill 401 that forms a hole in a workpiece 900.
Plate 20 of vibration device 100 is a table on which workpiece 900 is placed.

During operation, the processor 84 of the drilling device 400 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the workpiece 900, causing the workpiece 900 to vibrate.
As the workpiece 900 vibrates in the vertical direction, pressure from the drill 401 to the workpiece 900 becomes intermittent.

<<<Effects of Embodiment 4>>>
According to this embodiment, the vibration device 100 can be used in the drilling device 400.
According to this embodiment, the pressure applied from the drill 401 to the workpiece 900 is intermittent, so the durability time of the drill 401 is extended.

Embodiment 5.
In Embodiment 5, points different from Embodiment 1 will be explained.

<<<Configuration of vibration transfer device 500>>>
FIG. 24 is a perspective view of a vibration transfer device 500 according to the fifth embodiment.
The vibration transfer device 500 is a device that inserts a plurality of parts into a plurality of recesses by vibration.
Plate 20 is a square flat plate.
A plurality of depressions 29 are arranged in the plate 20.
A plurality of parts 901 are randomly placed on the plate 20 .
Although not shown, there is a frame around the outer periphery of the plate 20 to prevent the component 901 from falling off the plate 20.

The vibration transfer device 500 includes a flat base 10, a plate 20, and a vibration unit 40.
Plate 20 is fixed to base 10 via four vibrators.
The side 23 of the plate 20 is not fixed and is a free end.
The vibration unit 40 has a plurality of vibrators fixed to the outside of the four corners of the plate 20.
The vibration unit 40 in FIG. 24 has four vibrators and four distributors 47.
The four vibrators are fixed to a flat base 10 at an angle of 45 degrees with respect to the front-rear direction and the left-right direction.
The four vibrators are each fixed to the outside of the four corners 27 of the plate 20.
The vibrator is arranged in a diagonal extension of the plate 20.
The vibrator 41 and the vibrator 44 are fixed to face each other at two corners at one diagonal end of the plate 20.
The vibrator 43 and the vibrator 42 are fixed to face each other at two corners at the other diagonal ends of the plate 20.

Distributor 47 is a rectangular plate.
The distributor 47 has the corner 27 of the plate 20 fixed on its upper surface.
The distributor 47 has the upper surface of the vibrator fixed to its lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted into the screw holes 24.
The four corners 27 of the plate 20 serve as four fixing locations for the plate 20.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, the four vibrators do not overlap the plate 20 in plan view.

The four vibrators used in the vibration transfer device 500 are preferably electromagnetic vibration sources such as electromagnetic vibrators. Electromagnetic vibration sources allow for finer control of frequency than air vibrators.

<<<Operation of vibration transfer device 500>>>
The controller 80 causes two vibrators fixed to two corners at diagonal ends of the plate 20 to vibrate at the same frequency.
The four vibrators are connected to a processor 84, and the vibrations of the four vibrators are controlled by the processor 84.
The traveling waves from the four vibrators travel from the four corners of the plate 20 toward the center of the plate 20.
The vibrator 41 and the vibrator 44 simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency in one diagonal direction, and the traveling waves are superimposed.
The vibrator 43 and the vibrator 42 simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency in different diagonal directions, and the four orthogonal traveling waves overlap and the standing waves are superimposed on the plate. Vibrate up and down.

The processor 84 can change the vibration generated in the plate 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves.
In particular, the processor 84 generates, on the plate, a standing wave in which four traveling waves with the same amplitude, the same wavelength, and the same frequency are superimposed, with only the phase changed, and the vertical vibration of the standing wave causes the plate to The part 901 can be rotated on 20, moved left and right, front and back, and made to jump.
The processor 84 can generate the four traveling waves with the phases shifted by 90 degrees, 180 degrees, 270 degrees, or any arbitrary angle.

Hereinafter, the vertical vibration of the vibration transfer device 500 will be explained using FIG. 25.
FIG. 25 shows the vertical vibration state of the plate 20 when traveling waves with the same phase, amplitude, wavelength, and frequency are superimposed and a standing wave is superimposed.
FIG. 25A is a schematic diagram of vertical vibration in the front-rear direction of the center of the plate 20 in the left-right direction.
FIG. 25(b) is a schematic diagram of vertical vibration of one diagonal line connecting the corners 27 of the plate 20.
Since the side 23 is a free end, the plate 20 vibrates while the side 23 moves up and down, as shown in FIG. 25(a).
On the other hand, since the corner 27 is fixed and serves as the fulcrum 26, the plate 20 vibrates without the corner 27 moving up and down, as shown in FIG. 25(b).

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the component 901, causing the component 901 to vibrate.
By vibrating up and down, the component 901 moves on the surface of the plate 20 and fits into the recess 29.

Change example 1.
A vibration transfer device 500 shown in FIG. 26 has a corner 27 of a plate 20 cut and a vibrator fixed to the cut surface.
The vibration transfer device 500 of FIG. 26 eliminates the need for the distributor 47.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, the four vibrators do not overlap the plate 20 in plan view.

Change example 2.
The vibration device 100 of the embodiment described above may be used in the vibration transfer device 500.
It is desirable to use a vibration device for the vibration transfer device 500 that can generate a standing wave by making four traveling waves orthogonal or by crossing a plurality of traveling waves. Further, when the vibration device causes the traveling waves to intersect, it is desirable to make the angles at which the traveling waves intersect all the same, so that the traveling waves are superimposed and a stable standing wave is generated.

Change example 3.
A vibration transfer device 500 shown in FIG. 27 has a support 51 provided at a corner 27 of a plate 20, and the plate 20 is fixed to a base 10 by the four supports 51.
The support column 51 fixes the plate 20 with screws inserted into the screw holes 24.
The vibrator is fixed only to the cut surface of the corner 27 of the plate 20, and the vibrator is attached to the plate 20 in a suspended state.
In the case of FIG. 27, the plate 20 vibrates using the fixed location in the screw hole 24 as a fulcrum due to the flapping phenomenon described above.
In the case of FIG. 27, the plate 20 is fixed by four pillars 51, but since the pillars 51 are thin pillars, the plate 20 can vibrate not only up and down but also back and forth and left and right.

Change example 4.
The shape of the plate 20 may be polygonal in plan view.
As shown in FIG. 28, the plate 20 may be a triangular or hexagonal plate 20.
(a) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are each fixed to an individual corner 27.
(b) shows a hexagonal plate 20.
The vibrators are each fixed in a separate corner 27.
Although not shown, the shape of the plate 20 may be circular, oval, or other shapes in plan view.

Change example 5.
As shown in FIG. 29, the vibrators do not have to be at all corners.
(a) shows a case where a vibrator is arranged on one diagonal of a rectangular plate 20.
The vibrators 41 and 42 are fixed to every other corner 27.
(b) shows a case where vibrators are arranged on two diagonal lines of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, oval, or other shapes in plan view.

Change example 6.
As shown in FIG. 30, there may be multiple vibrators at the corners.
(a) shows a case where two vibrators are arranged at each of four corners of a rectangular plate 20.
(b) shows a case in which two vibrators are placed at each of the four corners of the rectangular plate 20, and furthermore, vibrators are placed outside the center of the opposing sides.
Although not shown, the shape of the plate 20 may be octagonal, decagonal, or other polygonal in plan view.

The vibration unit 40 may include one or more air vibrators fixed to the outside of one or more corners of the plate 20.
Specifically, the vibration unit 40 may have air vibrators arranged as follows.
One air vibrator on the outside of only one corner of the plate 20 One air vibrator on the outside of each corner of some of the corners of the plate 20 ((a) and (b) in FIG. 29)
One air vibrator is placed outside each corner of all the corners of the plate 20 ((a) and (b) in FIG. 28).
Two air vibrators are placed outside each corner of all the corners of the plate 20 ((a) and (b) in FIG. 30).
Controller 80 causes all air vibrators to vibrate at the same frequency.
Instead of an air vibrator, other types of vibrators may be used.

Embodiment 6.
In the sixth embodiment, points different from the first embodiment will be described.

<<<Configuration of distributor 47>>>
FIG. 31 is a diagram showing the distributor 47.
The distributor 47 in FIG. 31 is fixed to the plate 20 with the front surface 21 and back surface 22 of the plate 20 interposed therebetween.
(a) shows a case where a vibrator is arranged outside the center of one side of a rectangular plate 20.
The distributor 47 has a U-shaped groove 52 on the side when viewed from the front-rear direction, and the central outer edge of the plate 20 is fitted into the groove 52.
The plate 20 has three screw holes 24 on two sides to which the vibrator is fixed, which serve as fixing locations.
The plate 20 fixes the distributor 47 with a screw in a central screw hole.
The plate 20 does not have screw holes 24 on the side where the vibrator is not fixed.
As shown in (a), it is not necessary to provide fixing locations on all sides, but may be provided only on two opposing sides.

(b) shows a case where vibrators are arranged at four corners of a rectangular plate 20.
The distributor 47 has a V-shaped groove 53 on the side when viewed from the top and bottom, and the corners of the plate 20 are fitted into the groove 53.
The orthogonal bottom of the V-shaped groove 53 is in surface contact with two orthogonal ends of the two sides.
The triangular side surfaces of the V-shaped groove 53 are in surface contact with the front and back surfaces of the corner 27.
The plate 20 has screw holes 24 at the outer edges of the corners.
The plate 20 fixes the distributor 47 with screws in the screw holes.

<<<Effects of distributor 47>>>
Since the distributor 47 is fixed to the plate 20 with the plate 20 in between, the vibration of the vibrator can be transmitted from the side of the plate 20 even if the plate 20 is thin and the vertical height of the side is small.

Modification example 1.
The shape of the distributor 47 may be any shape as long as it can transmit the vibration of the vibrator to the side of the plate 20.
Although the distributor 47 may be fixed only to the side or only the corner of the plate 20, the distributor 47 may be fixed to the following locations.
Side and surface of plate 20 Side and back surface of plate 20 Side, front and back surface of plate 20 Side surface of plate 20 only Side back surface of plate 20 only Side surface and back surface of plate 20 Corner and surface of plate 20 Plate 20 Corner and back surface of plate 20 Corner, front and back surface of plate 20 Corner surface of plate 20 only Corner back surface of plate 20 only Corner surface and back surface of plate 20 In any of the above cases, the distributor 47 is connected only to the side or corner of plate 20 The same effect can be obtained as when the plate is fixed only to the plate, and in any of the above cases, it can be said that the side of the plate is vibrated.

Embodiment 7.
In Embodiment 7, points different from Embodiment 1 will be explained.

<<<Configuration of plate 20 and vibration unit 40>>>
FIG. 32 is a diagram showing the plate 20 and the vibration unit 40.
FIG. 32 shows a vibration unit 40 that vibrates multiple locations on the outer periphery of the plate 20 from the outside of the plate 20.
The outer periphery of the plate 20 refers to the outline when the plate 20 is viewed from above.
The outside of the plate 20 refers to the outside of the outline of the plate 20.
The vibration unit 40 simultaneously generates traveling waves at the same wavelength from the outer periphery of the plate 20 toward the center of the plate.
(a) shows a case where a vibrator 41 is placed at a corner 27 of a triangular plate 20, and a vibrator 42 is placed outside the center of the side 23 facing the corner 27.
(b) shows a case in which a vibrator 41 is placed at a corner 27 of a pentagonal plate 20, and a vibrator 42 is placed outside the center of the side 23 facing the corner 27.

The vibration unit 40 vibrates multiple locations on the plate 20.
The plurality of locations may be a plurality of locations consisting only of the plurality of sides 23 of the plate 20, as described in the first embodiment.
The plurality of locations may be a plurality of locations consisting only of a plurality of corners 27 of the plate 20, as described in the fifth embodiment.
The plurality of locations may be a plurality of locations including the side 23 and corner 27 of the plate 20, as explained in FIGS. 32(a) and 32(b).
In the case of multiple locations consisting of the side 23 and corner 27, any of the following may be used.
One side 23 and one corner Multiple sides 23 and one corner One side 23 and multiple corners Multiple sides 23 and multiple corners Typical examples of multiple sides 23 and multiple corners are: Side 23 and all corners.
It is desirable that the plurality of locations be arranged in pairs on a straight line passing through the center or center of gravity of the plate 20, such as the diagonal line or diameter of the plate 20.

Side 23 does not need to be flat.
(c) shows a case where a vibrator 41 and a vibrator 42 are arranged in the diametrical direction of the circular plate 20, and a vibrator 43 and a vibrator 44 are arranged in the orthogonal diametrical direction.
In the case of (c), the side 23 is a curved outer peripheral surface of a cylinder.
The side 23 may be any other curved surface or a combination of a curved surface and a flat surface.
In (c), the vibrator 43 and the vibrator 44 may be omitted.
In (c), the number of vibrators may be increased.

<<<Planar shape of plate 20>>>
FIG. 33 is a diagram showing the planar shape of the plate 20.
The planar shape of the plate 20 is not limited to a regular polygon or a circle.
(a) shows a case where the planar shape of the plate 20 is a cross.
(b) shows a case where the planar shape of the plate 20 is star-shaped.
(c) shows a case where the planar shape of the plate 20 is a long rectangle with rounded corners.
(d) shows a case where the planar shape of the plate 20 is an ellipse.
Although not shown, the planar shape of the plate 20 may be a trapezoid, a cloud shape, a chevron shape, an irregular shape, or other shapes.

<<<Cross-sectional shape of plate 20>>>
FIG. 34 is a diagram showing a cross-sectional shape of the plate 20 taken along the line AA in FIG.
The cross-sectional shape of the plate 20 is not limited to a rectangle.
(a), (c), and (e) show the case where the central lower part of the plate 20 is recessed upward.
(a) shows the case where it is depressed in a concave shape.
(b) shows the case of a V-shaped depression.
(c) shows the case where it is depressed in an arc shape.
(b), (d), and (f) show the case where the central upper part of the plate 20 swells downward.
(b) shows the case where it swells into a convex shape.
(d) shows the case where it swells into a V shape.
(f) shows the case where it bulges in an arc shape.

(g) shows a case in which the central portion of the plate 20 has a concave shape recessed upward and downward.
(h) shows a case in which the central portion of the plate 20 has a convex shape bulging upward and downward.
Although not shown, the cross-sectional shape of the plate 20 may be uneven, wavy, or other shapes.
(i) shows a case where the side 23 is inclined.
If the side 23 is inclined, the distributor 47 may be provided with an inclined surface, and the vibrator 41 and the vibrator 42 may be attached thereto.
The distributor 47 has a triangular cross section.
The slope of the distributor 47 and the side 23 have the same inclination angle.
The vibrator 41 and the vibrator 42 can vibrate the outer periphery of the plate 20 up and down via the distributor 47.

Embodiment 8.
The vibration device 100 can be used for devices that dislike horizontal vibration.
The vibration device 100 can be used in a workpiece processing device.
The vibration device 100 can be used in a processing device, a conveyance device, a sorting device, an assembly device, a manufacturing device, a vibration transfer device, or other material handling device.
Materials refer to substances, materials, raw materials, fabrics, raw materials, tools, instruments, tools, etc.
The shape, material, properties, and number of materials do not matter.
The material may be a lump, a plate, or a grain or powder.
The material may be solid, liquid, or elastic.

Embodiment 9.
In Embodiment 9, points different from the above-described embodiments will be explained.

<<<Description of configuration of printing section 600>>>
FIG. 35 is a three-sided view of the printing section 600 of the screen printing apparatus 200 according to the ninth embodiment.
The printing unit 600 is moved in the printing direction P by a drive mechanism (not shown) of the screen printing device 200.
The printing unit 600 has a fixing mechanism 620, and the fixing mechanism 620 fixes the printing tool 260 of the vibration device 100.
The printing section 600 has a lifting mechanism 610.
The elevating mechanism 610 raises and lowers the printing tool 260 of the vibration device 100 and generates downward printing pressure during printing.
As shown in FIG. 35, the printing tool 260 is tilted and fixed to the printing unit 600, and moves in the printing direction P while being tilted during printing.

<<<Description of configuration of vibration device 100>>>
FIG. 36 is a perspective view of the vibration device 100 according to the ninth embodiment.
FIG. 37 is a front view of printing tool 260 according to the ninth embodiment.
FIG. 38 is a side view of printing tool 260 according to the ninth embodiment.
FIG. 39 is a plan view of printing tool 260 according to the ninth embodiment.
In FIG. 36, X indicates the front-rear direction.
The printing direction P coincides with the front direction of the front-back direction X.
In FIGS. 36 and 37, Y indicates the horizontal direction, and Z indicates the vertical direction.
As shown in FIG. 35, the printing tool 260 is used tilted during printing, but for convenience of explanation, the Z direction shown in FIGS. 36 and 37 will hereinafter be referred to as the vertical direction Z.

The vibration device 100 includes a printing tool 260, a vibration unit 40, and a controller 80.
The printing tool 260 is used for printing with a screen printing device.
The printing tool 260 prints on a workpiece using printing pressure.
The vibration unit 40 vibrates a plurality of opposing sides on the outside of the printing tool 260 .
Controller 80 controls vibration of vibration unit 40.

<<Description of printing tool 260>>
The printing tool 260 includes a holder 210 and a squeegee 203 attached to the holder 210.
As shown in FIG. 39, the printing tool 260 (holder 210) has a long side W in a direction perpendicular to the printing direction P, and a short side V in the same direction as the printing direction P.

<<Description of holder 210>>
The holder 210 is made of metal such as aluminum.
As shown in FIG. 35, the holder 210 has a base 211 and a push plate 212.
The holder 210 is fixed to the lifting mechanism 610 of the printing section 600 by a fixing mechanism 620 of the printing section 600.
The squeegee 203 is fixed between the base 211 and the push plate 212 by a tightening screw 213.
The base portion 211 has screw holes at both upper ends to which the vibrators 41 and 42 are fixed.
The upper central portion of the base 211 has a fixing portion 214 .
The fixing part 214 is arranged inside a screw hole in the base part 211 that fixes the vibrator 41 and the vibrator 42.
The fixing portion 214 is fixed by a fixing mechanism 620.

<<Description of squeegee 203>>
The squeegee 203 has a support portion 220 and a squeegee portion 230.
The squeegee portion 230 is made of urethane rubber or an elastic body.
The support portion 220 is made of glass epoxy resin containing glass fibers.
The support portion 220 has rough cut portions on both sides, and urethane rubber is welded and fixed to the rough cut portions on both sides of the glass epoxy resin.

<<<Description of vibration unit 40>>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the holder 210 at the same frequency.
The vibration unit 40 vertically vibrates the side surfaces in the left-right direction of the holder 210 on the opposing sides 23 of the holder 210.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vertically vibrates the outside of the fixed location (fulcrum 26) where the screw hole 24 of the holder 210 is located.
The vibrator 41 and the vibrator 42 have the same specifications.
The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of distributor 47>>
The vibration unit 40 has a distributor 47.
Distributor 47 transmits the vibrations of vibrator 41 and vibrator 42 to side 23 of holder 210 or its vicinity.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the holder 210.
The distributor 47 has screw holes 24 at its ends, and is fixed to both ends of the holder 210 with screws.
Distributor 47 is a rectangular metal plate.
The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the side surface of the side 23 of the holder 210.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side surface forming the short side V of the holder 210 or the vicinity of the side surface.
The distributor 47 increases the flapping of the vibrators 41 and 42.
The longer the length of the distributor 47 in the left-right direction Y is made to move the vibrator 41 and the vibrator 42 farther from the side surface of the holder 210, the more the distributor 47 curves due to the elastic force of the distributor 47 and the flapping becomes larger.
As the thickness of the distributor 47 in the vertical direction Z becomes thinner, the elastic force of the distributor 47 causes the distributor 47 to curve, and the flapping becomes larger.

<<Description of vibrator 41 and vibrator 42>>
The vibrator 41 and the vibrator 42 are attached like wings to the outside of the side 23 of the holder 210.
Vibrator 41 and vibrator 42 are attached parallel to holder 210.
The vibrator 41 and the vibrator 42 are attached so that the air supply port is on the inside.
The rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the front-back direction X.
A rotating surface K of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

<<<Description of operation of vibration unit 40>>>

The controller 80 causes the vibrator 41 and the vibrator 42 to vibrate at a frequency of 10 Hz or more and 800 Hz or less.
The vibration unit 40 flaps on both sides of the fulcrum 26 to vibrate the printing tool 260.
The vibration unit 40 vibrates two locations on both sides of the long side W of the printing tool 260.
The vibration unit 40 vibrates the plurality of opposing outer sides 23 of the printing tool 260 with the same amplitude, the same wavelength, and the same frequency, thereby vibrating the printing tool 260 with a standing wave.
The vibration unit 40 simultaneously generates traveling waves at the end of the printing tool 260 with the same amplitude, the same wavelength, and the same frequency.
The vibration unit 40 vibrates the end of the printing tool 260 vertically using a traveling wave from outside the printing tool 260, and vibrates the printing tool 260 using a standing wave.
The vibration unit 40 causes the holder 210 to vibrate in the vertical direction by the flapping phenomenon described in the above-described embodiment.

<<<Vibration measurement results>>>
The vibration measurement results are shown below.
During vibration measurement, the controller 80 supplies air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa to the vibrator 41 and the vibrator 42, with the same amplitude and the same wavelength. vibrated at the same frequency.

<<Measurement results 1>>
Vibration of the printing tool 260 shown in FIG. 40 was measured using an aluminum holder 210.
The printing tool 260 shown in FIG. 40 has the same configuration as the printing tool 260 shown in FIG. 37 except that the adjustment jig 240 is placed on the support part 220 and the squeegee 203 is fixed to the holder 210.
The adjustment jig 240 is a rectangular metal plate made of stainless steel, which is harder than the holder 210.
The adjustment jig 240 is sandwiched between the support portion 220 and the base portion 211.
The printing tool 260 shown in FIG. 40 was placed horizontally on an air mat, the periphery of the printing tool 260 was left free, the holder 210 was vibrated, and the amplitude of the vibration was measured.
The vibrator 41 and the vibrator 42 have the same specifications as in the first embodiment.
The direction of rotation of the vibrator 41 and the vibrator 42 was from inside to outside as shown by the arrow in FIG. That is, as shown in FIG. 37, the rotation direction of the vibrator 41 is clockwise, and the rotation direction of the vibrator 42 is counterclockwise.
The length of the squeegee 203 in the left-right direction Y is 185 mm.
As shown in FIG. 37, the measurement points are measurement points 1 to 17 on the bottom surface of the squeegee portion 230, the left side surface, and the right side surface.
Measurement points 1 to 17 are spaced at 10 mm intervals.

FIG. 41 is a diagram showing the measurement results of vibrations of the bottom surface of the squeegee portion 230 of the holder 210 in the vertical direction Z and the side surface in the horizontal direction Y.
FIG. 42 is a diagram showing the measurement results of the vibration of the bottom surface of the squeegee portion 230 of the holder 210 in the front-rear direction X. As shown in FIG.
The vertical axis shows the vibration distance. "PP" means "Peak to Peak" and means vibration distance.
As shown in FIG. 37, the horizontal axis indicates measurement points 1 to 17 on the left side surface and bottom surface of the squeegee portion 230, and the right side surface.
As shown in FIG. 41, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are almost equal. It has become.
As shown in FIG. 41, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the left-right direction Y between the left and right sides of the squeegee portion 230 becomes almost zero. It has become. In particular, when the air pressure is 0.4 MPa and 0.5 MPa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 42, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the longitudinal direction It has become.
Therefore, the printing tool 260 as a whole vibrates up and down and back and forth, but does not vibrate left and right.

<<Measurement results 2>>
Furthermore, the vibration of the printing tool 260 shown in FIG. 43 was measured.
A printing tool 260 shown in FIG. 43 has the same configuration as the printing tool 260 shown in FIG. 40, except that the support section 220 has a thin plate part 221 and a thick plate part 222. The thickness of the thick plate part 222 is the thickness of the support part 220, and the thin plate part 221 is a part made thin by cutting the surface of the support part 220.

As shown in FIG. 44, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are almost equal. It has become.
As shown in FIG. 44, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the left-right direction Y between the left side surface and the right side surface of the squeegee portion 230 becomes almost zero. It has become. In particular, when the air pressure is 0.4 MPa and 0.5 MPa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 45, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the longitudinal direction It has become.
Therefore, the printing tool 260 as a whole vibrates up and down and back and forth, but does not vibrate left and right.

<Comparison of measurement results 1 and 2>
When the support portion 220 had the thin plate portion 221 and the thick plate portion 222, the vibration distance in the front-rear direction X was larger and uneven. The reason why the vibration distance in the longitudinal direction X becomes large is considered to be because the thin plate portion 221 exists.
In screen printing, when it is desired to utilize vibration in the front-rear direction X, it is preferable to use the support section 220 with the thin plate section 221.

<<Measurement results 3>>
The vibration of the printing tool 260 shown in FIG. 37 was measured using the aluminum holder 210 without using the adjustment jig 240.
Although not shown, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the vertical direction Z of measurement points 1 to 17 on the bottom surface of the squeegee portion 230 become almost equal, The vibration distance in the left-right direction Y between the left side surface and the right side surface became almost zero.
At each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the longitudinal direction The vibration distance was larger than that of the previous section.
In the case of screen printing, the vertically movable distance increases as the center of the screen of the screen plate increases, so it can be used even if the center part of the bottom surface of the squeegee part 230 has a larger vibration distance than the end parts.

<<Measurement results 4>>
In the configuration of FIG. 37, if the vibrator 41 and the vibrator 42 are installed so that the air supply ports are on the outside, and the rotation direction of the vibrator 41 and the vibrator 42 is reversed to the arrow in FIG. Although some vibration occurred, the vibration distance in the vertical direction Z was approximately equal.

<<Measurement results 5>>
In the configuration of FIG. 37, when the vibrator 41 and the vibrator 42 are rotated in the same direction, the vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X are not equal. The vibration in the horizontal direction Y was generated to the same extent as the vibration distance in the vertical direction Z.
This is effective when it is desired to utilize vibration in the left-right direction Y in screen printing.

<<Measurement results 6>>
In the configuration of FIG. 37, when the thickness of the distributor 47 in the vertical direction The vibration distance in the vertical direction Z was almost the same or decreased somewhat as the thickness of the distributor 47 was thicker.
Furthermore, when the thickness of the distributor 47 was thicker, the vibration distance in the longitudinal direction X became approximately half at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa.

<<Measurement result 7>>
Furthermore, the vibration of the printing tool 260 shown in FIG. 46 was measured.
A printing tool 260 shown in FIG. 46 has the same configuration as the printing tool 260 shown in FIG. 37, except that vibrators 43 and 44 are added.
As shown in FIG. 46, the vibrators 43 and 44 are arranged on the front side in the printing direction P.
The rotation axes J of the vibrators 43 and 44 are the same axis.
The rotation axes J of the vibrators 43 and 44 are parallel to the left-right direction Y.
As a result of the measurement, vibration in the left-right direction Y was generated due to the presence of the vibrators 43 and 44.
The printing tool 260 shown in FIG. 46 is effective when it is desired to utilize vibration in the left-right direction Y in screen printing.

<<Comparative example>>
In the configuration of FIG. 37, when only the vibrator 41 or only the vibrator 42 was used, the vibration distance in the vertical direction Z and the vibration distance in the longitudinal direction X were not equal.
In the configuration of FIG. 37, when the rotation axis J of only the vibrator 42 was made parallel to the left-right direction Y, the vibration distance in the vertical direction Z was not uniform. Further, vibrations in the left-right direction Y occurred.
In the configuration of FIG. 37, when the rotation axes J of the vibrator 41 and the vibrator 42 are both parallel to the left-right direction Y, and the vibrator 41 and the vibrator 42 are both arranged on the front side of the printing direction P or on the side of the printing direction P, The vibration distance in the vertical direction Z and the vibration distance in the longitudinal direction X were not equal.

<<Considerations based on vibration measurements>>
Since the holder 210 is a metal block that is thick in the vertical direction do not have. Therefore, when a standing wave is generated inside the holder 210, it can be considered that the entire holder 210 vibrates uniformly and stably without any difference between the left and right sides. Therefore, the bottom surface of the squeegee 203 should also vibrate uniformly and stably without any difference between the left and right sides.
Furthermore, if there is no vibration in the left-right direction Y, it can be considered that the vibration is caused by a standing wave.

As shown in FIG. 37, when the two vibrators are installed with their rotating surfaces K parallel to the squeegee and the air supply ports facing inside, standing waves are generated inside the holder 210. The vibration of the bottom surface of the squeegee 203 was the most stable, and the vibration in the left-right direction Y was also suppressed.

When vibrating with only one vibrator, a traveling wave is generated and reflected on the other side to generate a reflected wave. The generated reflected wave overlaps the traveling wave and becomes a standing wave.
With one vibrator, the vibration at the bottom of the squeegee was unstable, and vibrations in the left-right direction Y were also generated. It was confirmed that nodes occur in standing waves that overlap with traveling waves and reflected waves.
A standing wave from a reflected wave with a node formed by a single vibrator is not practical.

The printing tool 260 is used under an environment different from the measurement state in which the printing tool 260 is placed on an air mat and vibrated with its surroundings free.
Specifically, the printing tool 260 is fixed to the elevating mechanism 610 by a fixing mechanism 620, and is used while being pressed against a workpiece during printing.
When measuring vibrations, the vibrations appear to be flapping on the left and right sides between the fulcrums 26 shown in FIG. It is possible to vibrate as if it were flapping its wings from side to side.
In this way, standing waves are generated in the printing tool 260 even when the usage environment is different.

<<<Effects of the embodiment>>>
According to this embodiment, the entire printing tool 260 vibrates uniformly in the vertical direction Z and does not vibrate left and right, which is effective for fill-in-the-hole printing.
According to this embodiment, the printing tool 260 as a whole vibrates uniformly in the front-rear direction X, which is more effective for fill-in-the-hole printing. In particular, since the printing tool 260 is used tilted during printing, vibrating in both the vertical direction Z and the front-back direction X is suitable for fill-in-the-hole printing.
According to this embodiment, the printing tool 260 can also be vibrated in the left-right direction Y by changing the rotation direction or adding a vibration source, which is effective for screen printing using vibration in the left-right direction Y. .

<<<Example of change>>>
Change example 1.
The vibration frequency of the vibrator can be changed by air pressure, and vibration frequencies in the audible frequency range of 10 Hz or more and 800 Hz or less are effective.
Wavelength λ [m] = sound speed V [m/s] / vibration frequency f [Hz], and when f = 800 Hz,
Wavelength λ [m] = 6320 [m/s] / 800 [Hz] = 7.9 m
Half wavelength λ/2 [m] = 7.9m/2 = 3.95m
Therefore, it can be considered that a frequency of 800 Hz or less is a reasonable and practical value.

Change example 2.
The material of the squeegee portion 230 may not be urethane, but may be an elastic body containing rubber or silicone.
The material of the squeegee portion 230 may be metal or any solid object.
The squeegee 203 may not include the support portion 220 or may be configured only with the squeegee portion 230.
Further, the squeegee 203 may be a metal squeegee.

Change example 3.
The adjustment jig 240 may be sandwiched between the support portion 220 and the push plate 212 instead of between the support portion 220 and the base portion 211.
Two adjustment jigs 240 may be prepared and sandwiched between the support section 220 and the base 211 and between the support section 220 and the push plate 212.
The support portion 220 may be made of metal. At this time, the support portion 220 is made of a metal that is harder than the holder 210.

Change example 4.
The vibration unit 40 may be an air vibrator driven by air pressure, a vibrator driven by a voice coil motor, or the vibrator described in the above embodiment.

Embodiment 10.
In Embodiment 10, points different from the above-described embodiments will be described.
In Embodiment 10, a printing tool 260 in which the squeegee 203 is replaced by a roller 250 will be described.

FIG. 47 is a five-sided view of the printing tool 260 of the vibration device 100 of the tenth embodiment.
In FIG. 47, the squeegee 203 in FIG. 36 is replaced with a roller 250.
Roller 250 is attached to holder 210.
The roller 250 is made of metal and rotates around a roller shaft 251 in the left-right direction Y.
The vibration unit 40 vibrates two locations on both sides 231 of the short side V of the printing tool 260.
In the printing tool 260 of FIG. 47, the vibrator 41 and the vibrator 42 are attached so that their rotating surfaces K are parallel to the roller 250 and the air supply ports are on the inside.

The printing tool 260 in FIG. 48 is attached to the center of the holder 210 in the left-right direction Y, with the rotation axis J of the vibrator 41 and the vibrator 42 parallel to the left-right direction Y.
The printing tool 260 has the vibrator 42 attached to the front side in the printing direction P, and the vibrator 41 attached to the rear side in the printing direction P.
The rotation direction of the vibrator 41 is from the rear side to the front side in the printing direction P, as shown by the arrow in FIG.
The rotation direction of the vibrator 42 is from the front side to the rear side in the printing direction P, as shown by the arrow in FIG.

In the printing tool 260 of FIG. 49, the rotation direction of the vibrator 42 of the printing tool 260 of FIG. 47 is from the rear side to the front side.

<<<Considerations based on vibration measurements>>>
Vibration measurements were performed in the same manner as in Embodiment 9.
Similarly to Embodiment 9, during vibration measurement, the controller 80 supplies air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa to the vibrator, with the same amplitude and the same wavelength. and vibrated at the same frequency.

When the rotating surface K of the vibrator is installed parallel to the roller 250 and the air supply port is on the inside, as in the printing tool 260 in FIG. 47, the vibration of the bottom of the squeegee is stable. Vibrations in the left and right directions were also suppressed.
The printing tool 260 shown in FIG. 47 has a standing wave pressing effect in which the vibrations pressed against the workpiece are constant, and vibrations in the left-right direction Y are suppressed, making it suitable for printing.

As shown in FIG. 48, when the vibrator 41 and the vibrator 42 are mounted at the center of the holder 210 in the left-right direction Y with their rotational axes J parallel to the left-right direction Y, two vibration sources are connected to the front side 231 of the holder 210. Since a traveling wave is input from the rear side 231, a standing wave is generated, resulting in standing wave vibration.
The printing tool 260 shown in FIG. 48 has a standing wave pressing effect in which the vibrations pressed against the workpiece are constant, and vibrations in the left-right direction Y are suppressed, making it suitable for printing.

As shown in FIG. 49, even when the vibrator 41 and the vibrator 42 rotate in the same direction, there are two vibration sources, resulting in standing wave vibration.
In the case of FIG. 49, the vibrator 41 and the vibrator 42 are rotary vibration type air vibrators, and the rotation direction is the same, so the vibration in the rotation direction of the vibrator 41 and the vibrator 42 is added, which becomes circular vibration, and the vibration in the front-rear direction At this time, vibration in the same direction as the printing direction P is applied to assist the pressing of the roller 250.

<<Comparative example>>
In FIG. 48, when vibrating with only one vibrator, a traveling wave is generated, arrives at the side, and is reflected, generating a reflected wave. The generated reflected wave overlaps the traveling wave and becomes a standing wave.
With one vibrator, the vibration at the bottom of the squeegee was unstable, and vibrations in the left-right direction Y were also generated. It was confirmed that nodes occur in standing waves that overlap with traveling waves and reflected waves.
A standing wave from a reflected wave with a node formed by a single vibrator is not practical.

<<<Effects of the embodiment>>>
According to this embodiment, even when the printing tool 260 has the roller 250, the same effect as in the ninth embodiment can be obtained, and with respect to the roller 250, in the vertical direction Z and the front-back direction Vibration can be added.
According to this embodiment, it is possible to apply vibration in the same direction as the printing direction P, which assists the pressing of the roller 250.

<<<Example of change>>>
Change example 1.
Printing tool 260 can be used as a printing tool in a screen printing device.
The printing tool 260 using the roller 250 can also be used as a pressing tool, and can be used in a rolling device for stretching a product.
When the lifting mechanism 610 attaches the printing tool 260 at an angle to the product, the roller 250 moves to rub against the product.

Change example 2.
The material of the roller 250 may not be metal, but may be an elastic body containing rubber, urethane, or silicone.
The material of the roller 250 may be resin or any solid material.

Change example 3.
A printing tool 260 shown in FIG. 50 has vibrators 43 and 44 added to the printing tool 260 shown in FIG. 47.
The rotation axes J of the vibrators 43 and 44 are parallel to the left-right direction Y, and the vibrators 43 and 44 are arranged on the rear side in the printing direction P.
The printing tool 260 shown in FIG. 50 is effective when it is desired to utilize vibration in the left-right direction Y.

<<<Other configurations>>>.
FIG. 51 is a diagram showing a modification of the printing tool 260 of the ninth and tenth embodiments.
FIG. 51 shows a change in the mounting method or mounting position of the vibrator 41 and the vibrator 42.

In (a), the vibrator 41 and the vibrator 42 are mounted at the center of the holder 210 in the vertical direction Z. The holder 210 has a slit in the vertical center of the side 23, and the distributor 47 is inserted and fixed into the slit in the vertical center of the side 23 of the holder 210.

In (b), the distributor 47 is L-shaped and is fixed to the entire side 23 of the holder 210 in the vertical direction Z.

(c) shows a case where the vibrator 41 and the vibrator 42 are attached to the side 23 of the support portion 220 of the squeegee 203 instead of the holder 210.
The vibrations of the vibrators 41 and 42 are easily transmitted to the squeegee 203.

(d) shows a case where the vibrator 41 and the vibrator 42 are attached to the side 23 of the squeegee portion 230 of the squeegee 203 instead of the holder 210.
The squeegee 203 does not have a support section 220 and is composed only of a squeegee section 230.
(e) shows a case where the vibrator 41 and the vibrator 42 are attached to the side 23 of the roller shaft 251.
The distributor 47 has a cylindrical shape and is fixed to the roller shaft 251.
Distributor 47 transmits the vibrations of vibrator 41 and vibrator 42 to roller shaft 251.

(f) shows a case where the vibrator 41 and the vibrator 42 are directly fixed to the sides 23 at both ends of the holder 210 without the distributor 47.
Although not shown, the vibrator 41 and the vibrator 42 may be attached so as to partially overlap both ends of the holder 210. For example, half of the lower surfaces of the vibrators 41 and 42 may be fixed to the upper surfaces of both ends of the holder 210 without the distributor 47.

Embodiment 11.
In Embodiment 11, points different from the above-described embodiments will be described.
In Embodiment 11, a case will be described in which the screen plate 201 of the screen printing apparatus 200 is vibrated.

<<<Description of configuration of vibration device 100>>>
FIG. 52 is a diagram showing a screen printing apparatus 200 according to the eleventh embodiment.
FIG. 53 is a perspective view of the vibration device 100 according to the eleventh embodiment.
In FIGS. 52 and 53, X indicates the front-rear direction.
The printing direction P coincides with the front direction of the front-back direction X.
In FIGS. 52 and 53, Y indicates the horizontal direction, and Z indicates the vertical direction.

The vibration device 100 includes a screen plate 201, a vibration unit 40, and a controller 80.
The screen plate 201 is used for printing by the screen printing apparatus 200.
The screen plate 201 prints on the workpiece 900 using the printing pressure of the squeegee 203.
The vibration unit 40 vibrates a plurality of opposing sides on the outside of the screen plate 201.
Controller 80 controls vibration of vibration unit 40.

<<Description of screen version 201>>
The screen plate 201 has a screen 202 and a screen frame 208 to which the screen 202 is attached.
As shown in FIG. 53, the screen plate 201 has a rectangular screen frame 208.

<<Description of screen 202>>
Screen 202 is a thin film with a printed pattern formed in the center.
The screen 202 is stretched around a screen frame 208 with tension.
The screen 202 is a metal mask screen, a mesh screen, or the like.

<<Screen frame 208>>
The screen frame 208 is a rectangular frame made up of four straight frames.
The screen frame 208 is made of metal such as aluminum, stainless steel, iron, or alloy, and has rigidity that will not cause deformation.
A screen frame 208 has the screen 202 attached to the frame.
The screen frame 208 has two parallel front and rear frames 2081 in a direction perpendicular to the printing direction P, and two parallel side frames 2082 in the same direction as the printing direction P.
The two front and back frames 2081 are opposing frames of the screen version 201.
The two side frames 2082 are opposing frames of the screen version 201.
The screen frame 208 has a plurality of screw holes 209 around its periphery.
The screw holes 209 are located at the corners of the screen frame 208.
A total of eight screw holes 209 are provided at both ends of the two front and rear frames 2081 and the two side frames 2082.
The screen frame 208 is firmly fixed to the plate frame fixing part 270 of the screen printing apparatus 200 by screws inserted into the screw holes 209.
The screen printing apparatus 200 has a plate frame fixing section 270 fixed to the housing.
Hereinafter, the position of the screw hole 209 will be referred to as a fixed location.
The screen frame 208 is fixed to the plate frame fixing section 270 at fixing points provided around the screen frame 208.
The method of fixing the fixing location for fixing the screen frame 208 does not have to be a screw fixing method using the screw holes 209 and screws, but may be a clamp method or the like.

<<<Description of vibration unit 40>>>
The vibration unit 40 has a plurality of vibrators and vibrates opposing frames of the screen frame 208 at the same frequency.
The vibration unit 40 causes opposing frames of the screen frame 208 to vibrate up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibrator 41 and the vibrator 42 are located outside the fixed location and outside the frame.
The vibration unit 40 vertically vibrates only the front and rear frames 2081 of the screen frame 208.
The vibrator 41 and the vibrator 42 have the same specifications.
The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of distributor 47>>
The vibration unit 40 has a distributor 47.
Distributor 47 transmits the vibrations of vibrator 41 and vibrator 42 to front and rear frames 2081 of screen frame 208.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the upper surface of the front and rear frames 2081 of the screen frame 208.
The distributor 47 has screw holes at its ends, and is fixed to the front and rear frames 2081 of the screen frame 208 with screws.
Distributor 47 is a rectangular metal plate.
The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the screen frame 208.
The distributor 47 increases the flapping of the vibrators 41 and 42.
The longer the length of the distributor 47 in the front-rear direction X is made to move the vibrator 41 and the vibrator 42 farther from the screen frame 208, the more the distributor 47 curves due to the elastic force of the distributor 47 and the flapping becomes larger.
As the thickness of the distributor 47 in the vertical direction Z becomes thinner, the elastic force of the distributor 47 causes the distributor 47 to curve, and the flapping becomes larger.

<<Description of vibrator 41 and vibrator 42>>
The vibrator 41 and the vibrator 42 are attached like wings outside the side 23 of the screen frame 208.
The vibrator 41 and the vibrator 42 are attached perpendicularly to the frame.
The vibrator 41 and the vibrator 42 are attached to the center of the frame.
The vibrators 41 and 42 are located on an extension of a straight line connecting the centers of the front and rear frames 2081, and are attached to symmetrical locations on the outer periphery of the screen frame 208.
The vibrator 41 and the vibrator 42 are attached so that the air supply port is on the inside.
The rotation axes of the vibrator 41 and the vibrator 42 are parallel to the left-right direction Y.
The rotating surfaces of the vibrator 41 and the vibrator 42 are parallel to the front-rear direction X.

<<<Description of operation of vibration unit 40>>>
The controller 80 causes the vibrator 41 and the vibrator 42 to vibrate at a frequency of 10 Hz or more and 800 Hz or less.
The vibration unit 40 flaps on both sides of the front and rear frames 2081 to vibrate the screen plate 201 during printing.
The vibration unit 40 vibrates the front and rear frames 2081 of the screen plate 201.
The vibration unit 40 vibrates a plurality of opposing frames of the screen plate 201 with the same amplitude, the same wavelength, and the same frequency, thereby vibrating the screen 202 with a standing wave.
The vibration unit 40 simultaneously generates traveling waves at the same amplitude, the same wavelength, and the same frequency at the end of the screen 202 through the frame.
The vibration unit 40 vibrates the edge of the screen 202 vertically using a traveling wave from outside the screen plate 201, and vibrates the screen 202 using a standing wave.
The vibration unit 40 vibrates the screen 202 only in the vertical direction by the flapping phenomenon described in the above embodiment.
The fixing position of the vibrator 41 and the vibrator 42 is at the center of the two screw holes 209, but since the screen frame 208 has rigidity and the screen plate 201 is securely fixed to the plate frame fixing part 270, , a flapping phenomenon occurs.

<<<Characteristics of the embodiment>>>
The vibration unit 40 of the vibration device 100 of this embodiment simultaneously generates traveling waves with the same amplitude, the same wavelength, and the same frequency from symmetrical locations on the outer periphery of the screen frame 208.
The traveling waves from symmetrical points on the outer circumference of the screen frame 208 change to standing waves, and as the screen frame 208 vibrates only up and down, the screen 202 inside the screen frame also vibrates only up and down.

<<<Effects of the embodiment>>>
According to the present embodiment, the screen 202 as a whole vibrates uniformly in the vertical direction Z and does not vibrate in the front, back, left, or right directions, which is effective for fill-in-the-hole printing.
According to this embodiment, the traveling wave can be made to travel in the same direction as the printing direction P of the squeegee 203.

<<<Example of change>>>
Change example 1.
As shown in FIG. 54, two vibration units 40 may be attached to both ends of each frame of the front and rear frames 2081.
The vibration unit 40 is fixed next to or in the vicinity of the two screw holes 209 in the front and rear frames 2081.
In order to facilitate the flapping phenomenon, it is desirable that the fixing positions of the vibrators 41 and 42 and the positions (fixing locations) of the two screw holes 209 are on a straight line. That is, it is desirable that the plurality of vibrators exist on an extension line of a line connecting opposing fixing points on opposing sides of the plate 20, respectively.
In the case of FIG. 54, since the screw holes 209 are used by the plate frame fixing part 270, two vibration units 40 are attached inside the two screw holes 209 so as not to collide with the plate frame fixing part 270. There is.

Change example 2.
As shown in FIG. 55, one or more vibration units 40 may be attached to all four frames.
In FIG. 55, the vibrator 43 and the vibrator 44 are mounted perpendicularly to the side frame 2082 and at the center of the side frame 2082.
Although not shown, if the screen frame 208 is a pentagon, hexagon, octagon, or other polygon, a vibrator may be provided in each frame.
Although not shown, if the screen frame 208 is circular or oval, a vibrator may be provided at a position facing the frame.
Although not shown, the vibrator may be attached only to the side frame 2082 without attaching the vibrator to the front and rear frames 2081.

Change example 3.
As shown in FIG. 56, the distributor 47 may be T-shaped.
The distributor 47 exists on the upper surface of the front and rear frames 2081 up to this side of the screw hole 209.
In FIG. 56, the vibrations of the vibrators 41 and 42 are transmitted over almost the entire length of the front and rear frames 2081.
Although not shown, the shape of the distributor 47 does not have to be T-shaped, but may be triangular, trapezoidal, chevron, or semicircular, as long as the distributor 47 has a configuration that transmits vibration to the frame with a width larger than the width of the vibrator. Other shapes such as molds may also be used.

Change example 4.
As shown in FIG. 57, the vibrator may be fixed to the frame on the lower surface of the frame as shown in (a), or on the outer surface of the frame as shown in (b).
In either case, the vibrator is located outside the fixed location and outside the frame, and vibrates the opposing frames of the screen frame 208 with the same amplitude, the same wavelength, and the same frequency. Then, the edges of the screen 202 are vibrated up and down by a traveling wave from outside the screen 202, and the screen 202 is vibrated by a standing wave.
Although not shown, the vibrator may be fixed to the frame on the inner surface of the frame.

***Supplementary explanation of the embodiment***
The embodiments described above are examples of desirable embodiments, and are not intended to limit the technical scope of the present invention.
The embodiments may be implemented partially or in combination with other embodiments.
Furthermore, the embodiments described above may be combined.
For example, FIG. 58 shows a case where vibrators are attached to the plate 20, the squeegee 203, and the screen plate 201, respectively.
Although not shown, a vibrator may be attached to any two of the plate 20, the squeegee 203, and the screen plate 201.

100 vibration device, 10 base, 11 top surface, 12 bottom surface, 13 wall, 14 space, 20 plate, 21 front surface, 22 back surface, 23 side, 24 screw hole, 25 screw, 26 fulcrum, 27 corner, 29 depression, 40 vibration unit , 41, 42, 43, 44, 45 vibrator, 46 frame, 47 distributor, 48 horizontal section, 49 vertical section, 50 spacer, 51 column, 52 groove, 53 groove, 60 traveling wave, 70 standing wave, 80 controller, 81 air Compressor, 82 Air pipe, 83 Regulator, 84 Processor, 200 Screen printing device, 201 Screen plate, 202 Screen, 203 Squeegee, 204 Paste, 205 Through hole, 206 Suction pipe, 207 Vacuum pump, 208 Screen frame, 2081 Front and rear frames, 2082 side frame, 209 screw hole, 210 holder, 211 base, 212 push plate, 213 tightening screw, 214 fixing part, 220 support part, 221 thin plate part, 222 thick plate part, 230 squeegee part, 231 side, 240 adjustment jig, 250 roller, 251 roller shaft, 260 printing tool, 270 frame fixing unit, 300 shearing device, 301 blade, 400 drilling device, 401 drill, 500 vibration transfer device, 600 printing unit, 610 lifting mechanism, 620 fixing mechanism, 900 work , 901 parts.

Claims (16)

a plate having a flat plate and a frame provided around the outer periphery of the flat plate;
a vibration unit having a plurality of vibrators that vibrate multiple locations on the outer periphery of the plate from positions outside the plate;
a controller that controls vibration of the vibration unit ;
a plurality of distributors fixed at a plurality of locations on the outer periphery of the plate, and each of the plurality of vibrators fixed at a position away from the outer periphery of the plate;
Equipped with
A vibration device in which the plurality of vibrators vibrate a plurality of locations on the outer periphery of the plate from outside the plate through transmission of vibrations by the plurality of distributors, thereby causing a plurality of granular parts to jump on the plate. The vibration device according to claim 1, wherein the vibration unit vibrates the outer periphery of the plate up and down at the same frequency using a traveling wave from outside the plate. The vibration device according to claim 1 or 2, wherein the vibration unit generates traveling waves at the same wavelength at the same time on the outer periphery of the plate. The vibration device according to claim 3, wherein the vibration unit generates the traveling waves with the same amplitude and vibrates the plate with a standing wave. The plurality of locations where the vibration unit vibrates the plate are:
multiple locations consisting only of multiple sides of the plate;
a plurality of locations consisting only of a plurality of corners of the plate, and
The vibration device according to any one of claims 1 to 4, wherein the vibration device is located at one of a plurality of locations including a side and a corner of the plate. The vibration device according to any one of claims 1 to 5, wherein the controller causes the vibrator to vibrate at a frequency of 10 Hz or more and 800 Hz or less. The vibration device according to any one of claims 1 to 5, wherein the vibration unit includes an air vibrator driven by air pressure or a vibrator driven by a voice coil motor. a plate having a flat plate and a frame provided around the outer periphery of the flat plate;
a vibration unit having multiple vibrators;
a plurality of distributors fixed at a plurality of locations on the outer periphery of the plate, and each of the plurality of vibrators fixed at a position away from the outer periphery of the plate;
Equipped with
The plurality of vibrators vibrate a plurality of locations on the outer periphery of the plate from outside the plate through transmission of vibrations by the plurality of distributors , and cause a plurality of granular parts to jump on the plate . a base fixed around the plate;
The vibration device according to any one of claims 1 to 8, wherein the vibration unit vibrates a plurality of locations on the outer periphery of the plate from outside the plate while the periphery of the plate is fixed to the base. The vibration device according to claim 9, wherein the vibration unit vibrates the plate using a fixed location between the plate and the base as a fulcrum. The vibration unit vibrates the plate only in the vertical direction with a standing wave,
The vibration device according to any one of claims 1 to 10, wherein the component jumps in the vertical direction due to vibration of the plate only in the vertical direction. A vibration transfer device comprising the vibration device according to any one of claims 1 to 11. A vibration unit having a plurality of vibrators vibrates a flat plate, a frame provided around the outer periphery of the flat plate, and multiple points on the outer periphery of the plate up and down at the same frequency from a position outside the plate, and vibrates the plate with a standing wave. A vibration method in which a plurality of granular parts are caused to jump on the plate by vibrating,
The plurality of vibrators are fixed at a plurality of locations on the outer periphery of the plate, and the plurality of vibrators are fixed at a plurality of locations on the outer periphery of the plate through the transmission of vibrations by a plurality of distributors each having a plurality of vibrators fixed at a position away from the outer periphery of the plate. A vibration method that vibrates. A vibration unit having a plurality of vibrators vibrates a flat plate, a frame provided around the outer periphery of the flat plate, and multiple points on the outer periphery of the plate up and down at the same frequency from a position outside the plate, and vibrates the plate with a standing wave. It is a vibration method that vibrates,
The plurality of vibrators are fixed at a plurality of locations on the outer periphery of the plate , and the plurality of vibrators are fixed at a plurality of locations on the outer periphery of the plate through the transmission of vibrations by a plurality of distributors each having a plurality of vibrators fixed at a position away from the outer periphery of the plate. A vibration method that vibrates certain parts. 15. The vibration method according to claim 13, wherein the vibration unit vibrates a plurality of locations on the outer periphery of the plate from outside the plate while the periphery of the plate is fixed to a base. 16. The vibration method according to claim 15, wherein the vibration unit vibrates the plate using a fixed location between the plate and the base as a fulcrum.

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