JP2007216372A - Ultrasonic excitation unit/ultrasonic excitation table unit/ultrasonic excitation basin unit/ultrasonic excitation horn unit - Google Patents

Ultrasonic excitation unit/ultrasonic excitation table unit/ultrasonic excitation basin unit/ultrasonic excitation horn unit Download PDF

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JP2007216372A
JP2007216372A JP2006071751A JP2006071751A JP2007216372A JP 2007216372 A JP2007216372 A JP 2007216372A JP 2006071751 A JP2006071751 A JP 2006071751A JP 2006071751 A JP2006071751 A JP 2006071751A JP 2007216372 A JP2007216372 A JP 2007216372A
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unit
vibration
ultrasonic excitation
ultrasonic vibration
ultrasonic
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Kenichi Kumakura
賢一 熊倉
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KUMAKURA KK
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<P>PROBLEM TO BE SOLVED: To provide a similar effect to that on a tool side by exciting a working table to transfer mechanical vibration to a work in order to enhance working efficiency and working quality by providing the vibration without being restricted by the shape of a tool. <P>SOLUTION: In order to set the optimum amplitude and output the uniform amplitude over the entire surface of a table, a structure of an oscillating plate is devised, in which a plurality of oscillators are mounted in parallel on a back side of the oscillating plate, and the oscillating plate is subjected to the resonance to form parts of zero amplitude, in other words, in a so-called node distribution to realize the uniform amplitude. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、一般的に言うところの刃物や砥粒を用いた穴や溝等の除去加工や研磨や磨き等の表面加工、エネルギーを用いた放電等の電気加工、又ショットブラスト加工、プレス等の塑性加工、溶接や半田付けなどの接合加工そして小部品やネジ等の挿入する際の効率や品質向上を図る分野の技術である。The present invention generally refers to removal processing such as holes and grooves using blades and abrasive grains, surface processing such as polishing and polishing, electric processing such as electric discharge using energy, shot blast processing, press, etc. It is a technology in the field of improving the efficiency and quality of plastic processing, joining processing such as welding and soldering, and insertion of small parts and screws.

半導体、光、電子、医療などの、先端的技術と言われる分野の部材の製作を支えている要素技術の一つとして、微細加工技術の進歩は目覚しいものがある。この分野で使用される材料も、高性能化、高機能化が要求され、新素材の開発が盛んに行われている。熱伝導性や耐熱性、耐磨耗性などに優れた素材の加工が極端に増えている。各種セラミックスを始め、ガラス・シリコン等の硬脆性材料や難削材の加工において、従来の加工方法を効率的する為に工具の開発を始めいろいろと研究が行われて来た。超音波を付与する加工法が加工抵抗を低減する事は、既に実証されており、応用した加工技術開発は、工具側に振動系を配する工具側の振動を用いている。工具に最適な振動を得るために振動子と工具の間には必要なホーン介して振幅のノードを調整していた。しかし工具の形状に対応するホーンの交換と被加工物に対しての物理的な意味で剛性を無視した工具長や形状を制約して使用する必要性があり、結果として効率や品質への問題を解決出来ないまま実用化しており結局は余り普及していない。As one of the elemental technologies that support the production of members in fields called advanced technologies such as semiconductors, optics, electronics, and medicine, there has been remarkable progress in microfabrication technology. The materials used in this field are also required to have high performance and high functionality, and new materials are being actively developed. Processing of materials with excellent thermal conductivity, heat resistance, and wear resistance has been extremely increasing. In various ceramics, hard brittle materials such as glass and silicon, and difficult-to-cut materials, various researches have been conducted, including the development of tools in order to improve the efficiency of conventional processing methods. It has already been demonstrated that the processing method of applying ultrasonic waves reduces the processing resistance, and the applied processing technology development uses vibration on the tool side in which a vibration system is arranged on the tool side. In order to obtain the optimum vibration for the tool, the amplitude node is adjusted between the vibrator and the tool through a necessary horn. However, it is necessary to replace the horn corresponding to the shape of the tool and use the tool length and shape with negligible rigidity in the physical sense for the workpiece, resulting in problems with efficiency and quality. It has been put to practical use without being able to solve the problem, and eventually it is not so popular.

発明が解決しようとする課題Problems to be solved by the invention

小径の穴や溝の除去加工に於いて特に微細加工に於いては、第一には工具の磨耗、欠損、破損をいかに遅らすか、言い換えれば寿命を伸ばすかである。その為には工具に掛かる加工抵抗を低減させる事、次に工具の破損を回避する為に、いかに切り屑の排泄を良くさせるかである、また加工時に工具とワークが摩擦で発生する摩擦熱が工具の磨耗に影響を及ぼす事から、熱を下げる為に冷却水が工具に充分にかかる様に超音波振動の表面張力を低下させる特徴を利用することである。
これらを有効に機能をする振動振幅を作る為の本発明は以下に述べる。
In the removal of small-diameter holes and grooves, especially in micromachining, the first is how to delay tool wear, chipping and breakage, in other words, extending the life. To that end, it is necessary to reduce machining resistance applied to the tool, and then to improve chip excretion in order to avoid breakage of the tool, and frictional heat generated by friction between the tool and the workpiece during machining. Since this affects the wear of the tool, the feature of reducing the surface tension of the ultrasonic vibration is used so that the cooling water is sufficiently applied to the tool in order to reduce the heat.
The present invention for creating vibration amplitudes that function effectively will be described below.

課題を解決するための手段Means for solving the problem

全ての加工機械は、加工テーブル(ステージ)をワークを載せる為の台としていて被加工物の固定が主な目的である。工具の形状に制約されずに、振動付与による加工効率と加工品質の向上を達成させる為に、加工テーブルを加振して、機械的振動をワークに伝達させ工具側と同様の効果を得る事を考案した。
これらを実現させる為のノウハウは、一つには、振動を伝達したいワークを想定したときに、最適な振幅の幅を設定できて更にテーブル全面を均一な振幅を出力すること、その為には振動板の背面に複数個の振動子を並列に取り付け、振幅のゼロに成る部分いわゆるノード分布に共振させて均一な振幅をつくる振動板の構造を工夫した。二つには加工時に掛かる負荷による振幅の変化を一定に追尾すること、その為には
発信器内に自動追尾の回路を設置した。三つ目は加振テーブルの振動が加工機械装置に機械的振動伝達するのを遮断すること、その為に振動板と加振動テーブル本体の間に振動吸収用の特殊なゴムを挟み込んだ。その他にも、縦振動のみを有効に引き出すホーンの設計、テーブル面の平行度や平坦度などの加振テーブル本体を高精度に製作すること、ワークの固定を真空吸着方式の構造に設計した、また冷却水や研削液を使用する事や液中での使用を可能にする為に防水構造にしたこと、連続長時間使用に絶えられる様に振動子を空気冷却すること、用途によってはテーブル上面の温度を管理するための温調構造にすること等々である。
All processing machines use a processing table (stage) as a platform for placing workpieces, and the main purpose is to fix the workpiece. In order to achieve the improvement of machining efficiency and machining quality by applying vibration without being restricted by the shape of the tool, the machining table is vibrated and the mechanical vibration is transmitted to the workpiece to obtain the same effect as the tool side. Devised.
The know-how to realize these is, for example, that when a workpiece to be transmitted vibration is assumed, an optimum amplitude width can be set and a uniform amplitude is output over the entire table surface. A plurality of vibrators are mounted in parallel on the back of the diaphragm, and the structure of the diaphragm is devised to create a uniform amplitude by resonating with the so-called node distribution where the amplitude is zero. The second is to keep track of the change in amplitude due to the load applied during machining, and for that purpose an automatic tracking circuit is installed in the transmitter. The third is to block the vibration of the vibration table from transmitting mechanical vibration to the processing machine. For this purpose, a special rubber for absorbing vibration is sandwiched between the vibration plate and the vibration table body. In addition, the design of the horn that draws out only the vertical vibrations effectively, the vibration table body such as the parallelism and flatness of the table surface is manufactured with high precision, and the work is fixed to the vacuum suction structure. In addition, use of cooling water and grinding fluid, and a waterproof structure to enable use in the liquid, air cooling of the vibrator so that it can be used continuously for a long time, and depending on the application, the top surface of the table For example, a temperature control structure for controlling the temperature of the heat generator is used.

発明の効果The invention's effect

各種の加工機械に本テーブルを搭載することで、超音波加工機として使用することが出来る。又各種加工機や装置搭載して、振動というメカニズムを取り入れることで、従来にない複合的な効果が期待できる。By mounting this table on various processing machines, it can be used as an ultrasonic processing machine. In addition, by incorporating various processing machines and devices and incorporating a mechanism called vibration, it is possible to expect an unprecedented combined effect.

ドリル、エンドミル、軸付き砥石等を用いて、穴や溝加工のボール盤、フライス盤、マシニングセンター、固定砥石を用いた平面研削盤、遊離砥石を用いたラッピング盤、ポリッシングマシン、各種カッターやブレード砥石を用いた切断加工のダイシングマシンなどの切断機、放電加工機、プレス装置、ブラストマシン、更に溶接、半田接合、ロウ付け作業など工具寿命延長と高品位加工に適用する。Using drills, end mills, grinding wheels with shafts, drilling machines for holes and grooves, milling machines, machining centers, surface grinding machines using fixed grinding wheels, lapping machines using loose grinding wheels, polishing machines, various cutters and blade grinding wheels It can be applied to cutting tool such as dicing machine, cutting machine such as dicing machine, electric discharge machine, press machine, blast machine, extension of tool life such as welding, soldering and brazing and high quality machining.

「実施例1」ドリル、軸付き砥石等を用いて、穴加工を高速回転仕様でXYZ同時3軸の加工機で、金属、樹脂、硬脆性材を超音波振動テーブルユニット上でワーク側の加振付与で、加工効率の向上と工具寿命を30%以上延長する事が出来、面粗度や真円度、バリなど高品位な加工に適用する。[Example 1] Using a drill, a grindstone with a shaft, etc., drilling holes with high-speed rotation specifications and an XYZ simultaneous 3-axis machine, metal, resin and hard brittle materials are added on the workpiece side on the ultrasonic vibration table unit. By applying vibration, machining efficiency can be improved and the tool life can be extended by 30% or more, and it can be applied to high quality machining such as surface roughness, roundness, and burr.

「実施例2」エンドミルを用いて、高速回転仕様でXYZ同時3軸の加工機で金型部品の深い溝加工を、超音波加振水槽ユニットの中で加振付与で、深溝加工の効率の向上と工具寿命を30%以上延長する事が出来、面粗度や真円度、バリなど高品位な加工に適用する。“Example 2” Using an end mill, deep groove processing of mold parts is performed with an XYZ simultaneous 3-axis processing machine with high-speed rotation specifications, and vibration is imparted in an ultrasonic vibration water tank unit, thereby improving the efficiency of deep groove processing. It can improve and extend tool life by 30% or more, and can be applied to high quality machining such as surface roughness, roundness, and burr.

「実施例3」プレス加工中でもマイクロプレスにおいて、小径の穴・溝の打ち抜きに超音波振動テーブルユニットのワーク側の加振付与で、加工効率の向上と工具寿命の延長更に高品位加工に適用する。"Example 3" Even in press work, in micro presses, applying vibration on the workpiece side of the ultrasonic vibration table unit for punching small-diameter holes and grooves improves machining efficiency, extends tool life, and applies to high-grade machining .

「実施例4」ダイシングマシンなどのブレード砥石による切断において超音波振動テーブルユニットのワーク側の加振付与で、加工効率の向上と砥石寿命の延長更に高品位加工に適用する。[Embodiment 4] By applying vibration on the workpiece side of an ultrasonic vibration table unit in cutting with a blade grindstone such as a dicing machine, the processing efficiency is improved, the life of the grindstone is extended, and further applied to high-quality machining.

「実施例5」ショットブラスト加工において特にマイクロブラストの分野で、マイクロタスに使われる極細い溝加工を、超音波振動テーブルユニットのワーク側の加振付与で、加工効率の向上と砥石寿命の延長更に高品位加工に適用する。[Example 5] In shot blasting, especially in the field of microblasting, ultra-thin groove processing used for microtuses is applied to the workpiece side of the ultrasonic vibration table unit to improve machining efficiency and extend the life of the grinding wheel. Furthermore, it applies to high quality processing.

「実施例6」冶具研磨やインターナル研磨で内面の研削をする場合にワークに直接超音波振動ホーンを接触させて加工する事で加工効率の向上と高品位加工に適用する。[Example 6] When the inner surface is ground by jig polishing or internal polishing, the workpiece is processed by bringing an ultrasonic vibration horn into contact with the workpiece directly to improve the processing efficiency and apply to high-quality processing.

「実施例7」ジェットミルなどの粉体化処理装置のチャンバー外部に直接超音波振動ホーンを接触させる事でチャンバー内の超微粒子粉体の付着を妨げる事加に適用する。[Example 7] The present invention is applied to the fact that the ultrasonic vibration horn is directly brought into contact with the outside of a chamber of a pulverization processing apparatus such as a jet mill to prevent the adhesion of ultrafine powder in the chamber.

「実施例8」ガラスとガラスなど部材の半田付け作業において、振動テーブル上に半田等を充填する時、表面張力が減少する特徴を利用して、半田が浸透性が良くなる為、部材と部材の接合や部材上への半田の定着を容易にする、又大きなワークには超音波振動ホーンユニットを直接接触させる事で同様の効果を得る事に適用する。[Example 8] In soldering work of glass and other members such as glass, when the vibration table is filled with solder or the like, the feature is that the surface tension is reduced, so that the solder becomes more permeable. It can be applied to easily bond the solder and fix the solder onto the member, or to obtain the same effect by directly contacting the ultrasonic vibration horn unit with a large workpiece.

「実施例9」ポリッシング加工による、各種部材の磨き作業において、ワーク側に超音波振動ホーンユニットを直接接触させる事で、加工効率の向上と高品位加工に適用する。[Embodiment 9] In polishing work of various members by polishing, the ultrasonic vibration horn unit is brought into direct contact with the workpiece, thereby applying to improvement of machining efficiency and high quality machining.

「実施例10」放電加工において、電極側の上下動作とワーク(テーブル)側の超音波振動テーブルユニットの併用による切り屑排泄の向上と高品位加工に適用する。Embodiment 10” In electric discharge machining, the present invention is applied to the improvement of chip excretion and high-grade machining by the combined use of the vertical movement on the electrode side and the ultrasonic vibration table unit on the workpiece (table) side.

マイクロ、MEMS、ナノテクノロジーの産業拡大に欠かせない基盤的な技術開発に必要な支援ツールとして利用される可能性が大きい。It is highly likely to be used as a support tool necessary for basic technological development that is indispensable for the industrial expansion of micro, MEMS, and nanotechnology.

超音波テーブル本体の図。The figure of an ultrasonic table body. 加振水槽ユニットの図Excitation water tank unit diagram 超音波加振ホーンユニットの図。The figure of an ultrasonic vibration horn unit.

符号の説明Explanation of symbols

1. 振動板
2. 振動子(複数個)
3. 本体
4. 吸着ホース
5. 発信器接続コード
6. 水槽
7. 振動板
8. パッキン
9. 溶液
10. ホーン
11. 振動子(単体)
1. Diaphragm 2. Vibrator (multiple)
3. Body 4. 4. Adsorption hose Transmitter connection cord 6. Aquarium 7. Diaphragm 8. Packing 9. Solution 10. Horn 11. Resonator (single unit)

Claims (6)

振動板の背面にボルト締めランジュバン型振動子(BLT)を複数個配置し振動板上面を均一な振動振幅を創生可能な構造と、平行・平滑面を備えた高精度な超音波加振テーブルユニット。A high-accuracy ultrasonic vibration table with a parallel and smooth surface and a structure that can create a uniform vibration amplitude on the upper surface of the diaphragm by arranging multiple bolted Langevin transducers (BLT) on the back of the diaphragm unit. 超音波加振テーブル上面への負荷変動にかかわらず機械的振動振幅を一定にする振動系の、共振周波数を自動追尾できる発信器。A transmitter that can automatically track the resonance frequency of a vibration system that keeps the mechanical vibration amplitude constant regardless of load fluctuations on the upper surface of the ultrasonic vibration table. 機械的振動伝達を振動板とそれ以外の本体部と伝達を遮断するための構造。A structure for blocking transmission of mechanical vibrations from the diaphragm and other body parts. 真空吸着式構造の超音波加振テーブル。Ultrasonic vibration table with vacuum suction structure. 超音波加振テーブル単独の加振とテーブル上面に水槽を設置して溶液を溜めてテーブルを加振と超音波加振水槽ユニット内の加振の併用構造。A combined structure of vibration of the ultrasonic vibration table alone and vibration of the table inside the ultrasonic vibration water tank unit by installing a water tank on the upper surface of the table and storing the solution. ワーク又はワークを載せたテーブルにホーンを直接接触させて、ワーク又はテーブル全体に機械的振動を伝達する超音波加振ホーンユニット。An ultrasonic vibration horn unit that transmits mechanical vibration to a work or the entire table by bringing the horn directly into contact with the work or the table on which the work is placed.
JP2006071751A 2006-02-17 2006-02-17 Ultrasonic excitation unit/ultrasonic excitation table unit/ultrasonic excitation basin unit/ultrasonic excitation horn unit Pending JP2007216372A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009101987A1 (en) * 2008-02-12 2009-08-20 Uwave Co., Ltd. Cutting or grinding apparatus
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
CN105710735A (en) * 2016-03-18 2016-06-29 曾凡之 Ultrasonic passivating device and method for carbide blade
CN110561202A (en) * 2019-10-14 2019-12-13 吉林大学 multidimensional ultrasonic-assisted magnetorheological precise grinding and polishing machine tool and machining method
KR20200072527A (en) 2018-10-31 2020-06-22 마이크로·텍 가부시끼가이샤 Vibration device, vibration method, screen printing device, vibration input device and material handling device
WO2021208283A1 (en) * 2020-04-15 2021-10-21 南京航空航天大学 Ultrasonic vibration platform for processing large part, and operating process therefor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009101987A1 (en) * 2008-02-12 2009-08-20 Uwave Co., Ltd. Cutting or grinding apparatus
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
CN105710735A (en) * 2016-03-18 2016-06-29 曾凡之 Ultrasonic passivating device and method for carbide blade
KR20200072527A (en) 2018-10-31 2020-06-22 마이크로·텍 가부시끼가이샤 Vibration device, vibration method, screen printing device, vibration input device and material handling device
KR20210134084A (en) 2018-10-31 2021-11-08 마이크로·텍 가부시끼가이샤 Vibration device, vibration method, and vibration transfer device
CN110561202A (en) * 2019-10-14 2019-12-13 吉林大学 multidimensional ultrasonic-assisted magnetorheological precise grinding and polishing machine tool and machining method
WO2021208283A1 (en) * 2020-04-15 2021-10-21 南京航空航天大学 Ultrasonic vibration platform for processing large part, and operating process therefor

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