WO2019188153A1 - Module d'alimentation et son procédé de fabrication - Google Patents

Module d'alimentation et son procédé de fabrication Download PDF

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Publication number
WO2019188153A1
WO2019188153A1 PCT/JP2019/009551 JP2019009551W WO2019188153A1 WO 2019188153 A1 WO2019188153 A1 WO 2019188153A1 JP 2019009551 W JP2019009551 W JP 2019009551W WO 2019188153 A1 WO2019188153 A1 WO 2019188153A1
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WO
WIPO (PCT)
Prior art keywords
power
substrates
packed
conductive material
layer
Prior art date
Application number
PCT/JP2019/009551
Other languages
English (en)
Inventor
Julien Morand
Remi Perrin
Roberto MRAD
Jeffrey Ewanchuk
Stefan MOLLOV
Original Assignee
Mitsubishi Electric Corporation
Mitsubishi Electric R&D Centre Europe B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corporation, Mitsubishi Electric R&D Centre Europe B.V. filed Critical Mitsubishi Electric Corporation
Priority to CN201980022355.1A priority Critical patent/CN111919296B/zh
Priority to JP2020559684A priority patent/JP6935976B2/ja
Priority to US16/977,172 priority patent/US11217571B2/en
Publication of WO2019188153A1 publication Critical patent/WO2019188153A1/fr

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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/1026—Compound semiconductors
    • H01L2924/1027—IV
    • H01L2924/10272—Silicon Carbide [SiC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/1026—Compound semiconductors
    • H01L2924/1032—III-V
    • H01L2924/1033—Gallium nitride [GaN]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13062—Junction field-effect transistor [JFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13064—High Electron Mobility Transistor [HEMT, HFET [heterostructure FET], MODFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]

Definitions

  • the invention relates to a power module comprising two substrates and a plurality of pre-packed power cells positioned between the substrates, each pre packed power cell comprising at least one power die.
  • the invention also relates to a manufacturing method of such a power module.
  • Power dies such as diodes or various types of power transistors (MOSFET, JFET, IGBT, HEMT) are elementary components of power modules which are used for the control and conversion of electric power, for instance in many different fields such as in the automotive, aeronautic, railway industries. Power dies are vertically constructed as opposed to signal conditioning die that are usually built in a transversal manner. As a result the die has electrical connections on each side of it.
  • MOSFET metal-oxide
  • JFET JFET
  • IGBT IGBT
  • HEMT power transistors
  • DBC Direct Bonded Copper
  • the main advantage of these power modules is their good capability of dissipating heat by double sided cooling.
  • the die thickness is usually different between various types of power dies, for instance between diodes and power switches. Due to this thickness difference, the second substrate cannot be directly bonded to the upper side of the dies. In order to accommodate these thickness variations, some solutions have been proposed in which the substrates are not planar and exhibit raised regions or posts, such as in document US201 1/0254177. Because of the dimensions tolerances or each part, such a module is however complex to design and manufacture.
  • the invention aims at providing a power module with efficient cooling and high reliability.
  • Another aim of the invention is to provide a power module having double sided cooling with an easier die attach while ensuring the required electrical insulation between opposite substrates.
  • Another aim of the invention is to provide a power module which is easier to manufacture than in the prior art.
  • a power module comprising:
  • each substrate comprising a layer of thermally conductive material and a patterned layer of electrically conductive material
  • each pre-packed power cell comprising : o an electrically insulating core,
  • each power die embedded in the electrically insulating core, each power die having opposite electrical contacts, and o two external layers of electrically conductive material on opposite sides of the electrically insulating core, said external layers being respectively connected to each patterned layers of electrically conductive material of the planar substrates, wherein each external layer of electrically conductive material of a pre-packed power cell comprises a contact pad connected to a respective electrical contact of the power die through connections arranged in the electrically insulating core of the pre-packed power cell, said contact pad having a surface area greater than the surface area of the power die electrical contact to which it is connected.
  • each pre-packed power cell further comprises two internal layers of electrically conductive material embedded in the electrically insulating core, each internal layer being positioned between the power die and a respective external layer, the thickness of the external layers being greater than the thickness of the internal layers,
  • connections between said contact pad of an external layer and a respective electrical contact of the power die comprise first connections between said contact pad of the external layer and a contact pad of a respective internal layer, and second connections between said contact pad of the respective internal layer and the respective electrical contact of the power die.
  • the surface area of the contact pad of the internal layer of electrically conductive material may then be greater than the surface area of the power die electrical contact to which it is connected.
  • connections between an external layer and an internal layer of a pre packed power cell, and the connections between an internal layer and an electrical contact of a power die may be vias arranged in the electrically insulating core.
  • the power module further comprises a layer of electrically and thermally conductive bonding material between each external layer of a pre-packed power cell and the patterned layers of the substrates, said bonding material being chosen among the group consisting of : solder, sinter, of conductive paste.
  • the power module may further comprise dielectric material filling the spaces located between the substrates and between the pre-packed power cells.
  • At least two power dies incorporated in different pre-packed power cells have different thicknesses, measured as the maximum distance between electrical contacts on opposite sides of the power dies, and the corresponding pre-packed power cells have equal thicknesses measured between their respective two external layers of electrically conductive material.
  • the planar substrates may be Direct Bonded Copper Substrates, Insulated Metal Substrates or Active Metal Brazed Substrates.
  • the power module further comprises at least one passive component mounted on the patterned layer of electrically conductive material of one of the substrates.
  • the substrates may further comprise power terminals, an output terminal and control terminals of the power dies, said terminals being electrically connected to the patterned layers of electrically conductive material.
  • a method for manufacturing a power module according to the above description comprising:
  • each substrate comprising a layer of thermally conductive material and a patterned layer of electrically conductive material having contact pads
  • each pre-packed cell comprises a power die embedded in an electrically insulating core and connected to external layers of electrically conductive material having contact pads, such that the contact pads of the external layers of each pre-packed power cell match contact pads of the patterned layers of the substrates,
  • bonding material is present on the external layers of electrically conductive materials of the power cells or on the patterned layers of electrically conductive material
  • the method may comprise another step of filling the remaining spaces between the substrates and between the pre-packed power cells by dielectric material.
  • the method may also further comprise, prior to the bonding step, a step of mounting at least one passive component on one of the patterned layers of electrically conductive material of the substrates.
  • the bonding material may be applied by screen printing or nozzle deposition.
  • the method may further comprise a preliminary step of manufacturing the pre-packed power cells, such that all the pre-packed power cells have the same thickness.
  • the power module according to the invention provides a good thermal dissipation thanks to the two substrates that are attached on opposite sides of pre-packed power cells.
  • the incorporation of pre-packed power cells between the substrates allows ensuring the required electrical insulation because the power cells act as spacers between the substrates, and also because they comprise a core of electrically insulating material.
  • pre-packed power cells makes possible the connections to the small electrical pads of the power dies, as the contact pads of the substrates can be connected to enlarged contact pads of the power cells playing the role of a fanout package
  • the space of the power module between the substrates and between the pre packed power cells may also be filled by electrically insulating and thermally conductive material.
  • Figure 1 is a schematic representation of a power module according to an embodiment of the invention.
  • Figure 2a is a schematic representation of a power module according another embodiment of the invention.
  • Figure 2b is an enlarged view of a part of the power module of figure 2a.
  • FIG. 3a is an enlarged view of a part of the power module of figure 2a.
  • Figure 3 a is a schematic view of a power module according to another embodiment of the invention.
  • Figure 3 b is a schematic view of a power module according to another embodiment of the invention.
  • Figure 4 schematically represents the main steps of a manufacturing method according to an embodiment of the invention.
  • the power module 1 comprises two substrates 10, each comprising at least a layer of thermally conductive material 1 1 , which is also an electrically insulating material, on which is disposed a patterned layer 12 of electrically conductive material.
  • the substrates 10 may for instance be Direct Bonded Copper (DBC) substrates, in which a patterned layer 12 of copper is arranged on a ceramic plate 11 (for example made of alumina) forming the thermally conductive and electrically insulating layer.
  • the substrates 10 may be Insulated Metal substrates (IMS), or Active Metal Brazed (AMB) substrates.
  • the power module 1 further comprises a plurality of pre-packed power cells 20, positioned between the two substrates 10, wherein the two patterned layers 12 of electrically conductive material are positioned towards one another.
  • Each pre-packed power cell 20 comprises at least an electrically insulating core 21, in which is embedded at least one power die 22.
  • the power die may be a diode or a transistor such as a MOSFET, JFET or IGBT, HEMT.
  • the power die 22 is made from a wide bandgap semiconductor, i.e. a semiconductor having a bandgap in the range of 2-4 eV.
  • the power die may be made in Silicon Carbide SiC or in Gallium Nitride GaN.
  • the power die has electrical contacts 220 on opposite sides thereof (fig. 2b).
  • the power die 22 is a diode and has two opposite electrical contacts 220.
  • the power die 22 is a transistor and has three electrical contacts 220 comprising a gate, a source and a drain or a gate, an emitter and a collector, according to the type of transistor.
  • the power die 22 could also have a number of electrical contacts greater than three.
  • the electrically insulating core 21 of the pre-packed power cell 20 has preferably a low thermal resistance to provide better heat dissipation.
  • the electrically insulating core 21 may be made of FR-4 glass epoxy, polyimide, or in ceramic such as HTCC (High-Temperature Co-Fired Ceramic) or LTCC (Low Temperature Co-fired Ceramic).
  • the pre-packed power cell 1 further comprises two external layers 23 of electrically conductive material (e.g. copper), on opposite main surfaces of the electrically insulating core 21. Therefore the two external layers 23 of a pre-packed power cell 1 are in contact with a respective electrically conductive layer 12 of the substrates 10 when the cell 1 is positioned between the substrates.
  • electrically conductive material e.g. copper
  • Each external layer 23 is patterned to match the pattern of the electrically conductive layers 12 of the substrates 10, either by etching or milling.
  • each external layer comprises at least one contact pad 230 which is configured to match a contact pad (not shown) of one of the electrically conductive layers when the pre-packed power cell is inserted between the substrates 10.
  • the contact pad 230 of the external layer 23, or another contact pad of the same layer, connected to the first and at the same potential, is also connected to a respective electrical contact 220 of the power die 22.
  • the power module thus can comprise a plurality of power dies 22 integrated in respective power cells (each power cell can comprise one or more power dies), and connecting the power cells according to the needed topologyof the power module.
  • the power module can be an inverter or a DC/DC converter.
  • the contact pads 230 of the external layers of a pre-packed power cell 1 are connected to the respective electrical contacts of the power dies by vias 24 arranged in the electrically insulating core 21.
  • the pre packed power cell 1 further comprises at least two internal layers 25 of electrically conductive material (e.g. copper), each layer being embedded in the electrically insulating core 21 and being positioned between the power die and a respective external layer 23.
  • each internal layer 25 comprises at least one contact pad 250 connected to a respective electrical contact of a power die by vias 240 arranged in the electrically insulating core 21, and a contact pad 230 of an extemallayer 23 is connected to a contact pad of a respective internal layer 25 by other vias 241 arranged in the electrically insulating core 21.
  • the contact pad 230 of an external layer 23 is therefore connected to an electrical contact of the power die by means of the internal layer 25 positioned in between.
  • the surface area of the contact pad 230 of an external layer is greater than a surface area of the power die electrical contact 220 to which it is connected. Therefore, the use of a pre-packed power cell allows enlarging the contact surface area of the power die thanks to the enlarged contact pads 230 of the external layers.
  • a pre-packed power cell 20 further comprises internal layers of electrically conductive material 25 having respective contact pads 250
  • the surface area of a contact pad 250 of an internal layer 25 is greater than the surface area of the electrical contact of the power die to which it is connected, and can be smaller or have the same surface area than the surface area of a contact pad 230 of the external layer to which it is also connected.
  • the external layers may have a thickness greater than the thickness of the internal layers 25, for instance at least five or ten times greater, in order to increase power transmission to the power die.
  • the internal layers 25 may have a thickness of about 30-35 pm
  • the external layers 23 may have a thickness of about 400 pm.
  • the density of vias 240 connecting a power die electrical contact with an internal layer contact pad may be at least 20 vias/mm 2 , for instance 30 vias/mm 2 , for instance with a ratio vias hole depth to drill diameter of 1 :2.5.
  • the density of vias 241 connecting a contact pad 250 of an internal layer with a contact pad of an extemallayer may be equal or below 30 vias/mm 2 , due to the more important surface area of the contact pad of the external layer; for example, with a ratio vias hole depth to drill diameter of 1 : 1.
  • each pre-packed power cell is attached to the substrates 10 of the module 1 either by sintering, soldering or liquid diffusion bonding technics, as will be described in more details below. Therefore the module 1 further comprises between each external layer 23 of a pre-packed power cell 1 and the electrically conductive layer 12 of a substrate, a layer of bonding material 30 such as solder paste, sintering paste (for instance Ag sintering paste), or conductive paste.
  • the thickness of various power dies can be variable, the thickness being the distance between the opposite electrical contacts of a power die, all the pre-packed power cells of a same power module 1 and incorporating power dies of varying thicknesses preferably have the same thickness, measured as the distance between the external layers 23 of the power cell.
  • the power cells may have a constant thickness of the electrically insulating core, which is determined so as to be sufficient to embed any of the power dies and so as to ensure a sufficient electrical isolation between both substrates 10.
  • the thickness of the electrically insulating core 21 is thus determined as the minimum thickness to embed the power die of maximum thickness and to provide electrical isolation between the substrates. Therefore, the thickness variations of the power dies are compensated by the power cells and hence the design and manufacturing of the power modules are easier.
  • the thickness of a power cell exceed that of a power die, also allows creating a sufficient space between the substrates 10 to provide the required electrical insulation between them.
  • the power module 1 may also comprise additional, passive components 40 such as decoupling capacitors or gate resistors, which can be bounded to one electrically conductive layer 12 of one of the substrates.
  • additional, passive components 40 such as decoupling capacitors or gate resistors, which can be bounded to one electrically conductive layer 12 of one of the substrates.
  • the power module 1 also comprises terminals which can be part of one or more lead frame(s) soldered on the electrically conductive layers 12. Said terminals comprise power terminals 50, an output terminal 51 and control terminals 52 of the dies. Drivers may be soldered on one of the electrically conductive layers and connected to the control terminals, or may be incorporated in a power cell along with the power dies they are meant to control in order to reduce the distance between a driver and the power die.
  • the power module 1 preferably further comprises dielectric material 60 filling the gaps between the substrates 10 and between the power cells and other components contained in the module.
  • dielectric material 60 can be FR-4 glass epoxy, parylene or silicone.
  • the dielectric material has a thermal conductivity greater than at least 1 W/(m.K), in order to enhance thermal dissipation while also increasing electrical insulation between the substrates 10.
  • the method comprises a first step 100 of providing two substrates 10 having a layer 1 1 of electrically insulating, thermally conductive material, and a paterned layer 12 of electrically conductive material.
  • the patern is done by milling or etching.
  • at least one passive component such as a capacitor may be atached to one of the substrates, for example by soldering.
  • the mounting of a passive component can also be done after step 200 is performed.
  • a plurality of pre-packed power cells 20 are positioned between the substrates such that each patterned layer 12 of a substrate 10 is facing an external layer 23 of a power cell, and such that the contact pads of the paterned layers match the contact pads of the external layers 23.
  • This step if easier to perform than positioning power dies directly on a substrate, as the external contact pads (formed by the contact pads of the external layers) of a pre-packed power cell are larger than the electrical contacts of a power die.
  • bonding material 30 is applied on the contact pads of at least one of the external layers 23 and of the patterned layers 12 of the substrates.
  • the bonding material is applied on both contact pads of the external layers and of the paterned layers 12.
  • the bonding material may be solder paste or sintering paste or conductive paste. It may be applied by screen printing or nozzle deposition.
  • the method comprises a step 300 of bonding the substrates with the pre-packed power cells 20.
  • the two substrates may be pressed together with heat. Since the distance between the two substrates is ensured by the pre-packaged cells, there is no risk of tilting or unbalanced pressure over the surface.
  • a lead frame supporting at least one terminal may also be attached to at least one of the substrates by soldering or sintering for providing at least some of the modules terminals.
  • the bonding of this lead frame may also be performed prior to the bonding of the pre-packed power cells with the substrates.
  • the remaining gaps between the substrates and between the components may be filled by inserting the dielectric filling material in order to enhance thermal dissipation and electrical insulation between the substrates.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

L'invention concerne un module d'alimentation (1) comprenant : des premier et second substrats (10) dotés chacun d'une couche à motifs de matériau électroconducteur (12) ; une pluralité de cellules d'alimentation pré-encapsulées (20), placées entre les substrats, dotées chacune d'un noyau électriquement isolant (21) incorporant au moins une puce d'alimentation (21) et de deux couches externes (23) de matériau électroconducteur sur des côtés opposés du noyau électriquement isolant (21), lesdites couches externes étant respectivement connectées à chaque couche à motif des substrats, chaque couche externe d'une cellule d'alimentation pré-encapsulée comprenant un plot de contact (230) connecté à un contact respectif (220) de la puce d'alimentation par l'intermédiaire de connexions disposées dans le noyau électriquement isolant (21), et l'aire dudit plot de contact étant plus grande que celle du contact électrique de puce d'alimentation auquel il est connecté.
PCT/JP2019/009551 2018-03-30 2019-03-05 Module d'alimentation et son procédé de fabrication WO2019188153A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201980022355.1A CN111919296B (zh) 2018-03-30 2019-03-05 功率模块以及制造功率模块的方法
JP2020559684A JP6935976B2 (ja) 2018-03-30 2019-03-05 パワーモジュール及びパワーモジュールを製造する方法
US16/977,172 US11217571B2 (en) 2018-03-30 2019-03-05 Power module and method for manufacturing power module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18305374.3A EP3547367A1 (fr) 2018-03-30 2018-03-30 Module de puissance comprenant des cellules de puissance pré-emballées
EP18305374.3 2018-03-30

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JP6935976B2 (ja) 2021-09-15
JP2021510937A (ja) 2021-04-30
CN111919296A (zh) 2020-11-10
EP3547367A1 (fr) 2019-10-02
US20210043613A1 (en) 2021-02-11
CN111919296B (zh) 2024-06-14

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