WO2019171797A1 - 検査ユニットおよび検査装置 - Google Patents

検査ユニットおよび検査装置 Download PDF

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Publication number
WO2019171797A1
WO2019171797A1 PCT/JP2019/001829 JP2019001829W WO2019171797A1 WO 2019171797 A1 WO2019171797 A1 WO 2019171797A1 JP 2019001829 W JP2019001829 W JP 2019001829W WO 2019171797 A1 WO2019171797 A1 WO 2019171797A1
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WO
WIPO (PCT)
Prior art keywords
inspection
contact
inspection jig
jig
unit
Prior art date
Application number
PCT/JP2019/001829
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
直哉 笹野
宏真 寺西
貴浩 酒井
チェ・シホン
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to CN201980012891.3A priority Critical patent/CN111712714B/zh
Priority to KR1020207023707A priority patent/KR102445148B1/ko
Publication of WO2019171797A1 publication Critical patent/WO2019171797A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors

Definitions

  • the present disclosure relates to an inspection unit and an inspection apparatus including the inspection unit.
  • a continuity test and an operation characteristic test are generally performed in the manufacturing process.
  • These inspections use probe pins to connect the inspection device with an FPC contact electrode or a board-to-board connector mounted FPC contact electrode for connection to the main body board installed in the electronic component module. Done.
  • This socket for electronic parts includes an electrode part having a pair of contacts that can contact the electrode terminal of the electronic part and the electrode terminal of the connected electronic part, and a socket body that accommodates the electrode inside. .
  • the electrodes extend and contract along the arrangement direction connecting the pair of contacts, so that each contact reciprocates along the arrangement direction, and the electrode terminals of the electronic components and the connected electronic components are connected. It is comprised so that it may contact with the electrode terminal in the arrangement direction.
  • the display module may be inspected in a state where the electrode portion is arranged on the display panel.
  • the electronic component socket is used for such inspection, one contact contacts the electrode part on the display panel in the approaching direction, and the other contact contacts the inspection device.
  • the probe pin is made of a material having a low strength, an excessive force acts on the display when the probe pin contacts in the approaching direction, and the display panel may be broken.
  • This disclosure is intended to provide an inspection unit capable of bringing a contact portion of a contact into contact with a direction different from an approaching direction to an inspection object, and an inspection apparatus including the inspection unit.
  • An example inspection unit of the present disclosure is: A contact provided with a first contact portion that can contact the inspection object and a second contact portion that can contact the inspection device, at both ends; and A first inspection jig and a second inspection jig, which are each arranged side by side along a first direction, each having a housing for accommodating the contact in the state where the first contact portion is exposed to the outside.
  • At least one of the first inspection jig and the second inspection jig is arranged to be movable along the first direction; At least one of the first inspection jig and the second inspection jig is placed in a state in which the inspection object is relatively approached to each of the first contact portions from the second direction intersecting the first direction. By moving along the first direction, each of the first contact portions comes into contact with the inspection object in the first direction.
  • an inspection apparatus includes: At least one inspection unit is provided.
  • the inspection unit at least one of the first inspection jig and the second inspection jig is arranged to be movable along the first direction, and the inspection object is placed on each of the first contact portions from the second direction.
  • each of the first contact portions comes into contact with the inspection object in the first direction.
  • an inspection apparatus that can cope with diversification of the inspection apparatus and the inspection object can be realized by the inspection unit.
  • FIG. 6 is a fourth schematic diagram for explaining an operation when a board-to-board connector is brought into contact with the inspection unit of FIG. 1. Sectional drawing which shows the 1st modification of the test
  • An inspection unit 1 includes a first inspection jig 2 and a second inspection jig 3 as illustrated in FIG. 1, and a gap along the first direction X as illustrated in FIG. 2. 4 are arranged side by side.
  • each of the first inspection jig 2 and the second inspection jig 3 includes a conductive contact 10 and an insulating housing 20 that houses the contact 10 therein. ing.
  • each of the first inspection jig 2 and the second inspection jig 3 is a rod-shaped contact that extends in a second direction Y orthogonal to the first direction X. 10 is provided.
  • the contacts 10 of the inspection jigs 2 and 3 are arranged in a line at equal intervals along a third direction Z orthogonal to the first direction X and the second direction Y.
  • each contact 10 has a first contact portion 11 and a second contact portion 12 provided at both ends in the extending direction.
  • the 1st contact part 11 is comprised so that a test target object (for example, electrode part 111 of the board
  • the terminal 101 provided on the surface is configured to be contactable.
  • the board 100 and the board-to-board connector 110 of the inspection apparatus are arranged such that the terminals 101 of the board 100 face the electrode portions 111 of the board-to-board connector 110 in the Y direction.
  • the display panel is disposed on the opposite side of the substrate 100 of the inspection apparatus in the second direction Y with respect to the board-to-board connector 110. That is, the board-to-board connector 110 is located between the display panel and the board 100 of the inspection apparatus.
  • each housing 20 has a plurality of accommodating portions 21 that can accommodate the contacts 10 therein. Openings 22 and 23 are provided at both ends in the second direction Y of each accommodating portion 21, respectively.
  • Each contact 10 is accommodated in each accommodating portion 21 with both end portions protruding from the openings 22 and 23 to the outside of the housing 20 and the contact portions 11 and 12 exposed to the outside of the housing 20. . That is, in the inspection unit 1, in addition to the first contact portion 11, the second contact portion 12 is also exposed to the outside of the housing 20.
  • the inspection unit 1 is disposed in the gap 4 between the first inspection jig 2 and the second inspection jig 3, and the housing 20 of the first inspection jig 2 and the second inspection jig.
  • a movable part 30 connected to the housing 20 of the tool 3 is provided.
  • the movable portion 30 has an elastic member (for example, a coil spring) that expands and contracts in the first direction X, and each of the first inspection jig 2 and the second inspection jig 3 advances and retreats independently in the first direction X. It is configured so that it can be moved.
  • each of the substrates 100 having the terminals 101 with which the second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are in contact with the movement of the inspection jigs 2 and 3 is also first. Move forward and backward independently in direction X.
  • the inspection unit 1 includes a first movement restriction unit 41 and a second movement restriction that are arranged side by side with the first inspection jig 2 and the second inspection jig 3 in the first direction X.
  • a portion 42 is provided.
  • Each of the 1st movement control part 41 and the 2nd movement control part 42 is comprised by the insulating rigid body as an example.
  • the first movement restricting portion 41 is arranged with a gap 5 on the opposite side of the second inspection jig 3 with respect to the first inspection jig 2 in the first direction X, and the second movement restricting portion 42
  • a gap 6 is arranged on the opposite side of the first inspection jig 2 with respect to the jig 3. That is, the first inspection jig 2 is disposed between the first movement restricting portion 41 and the second inspection jig 3, and the second inspection treatment is disposed between the second movement restricting portion 42 and the first inspection jig 2.
  • a tool 3 is arranged.
  • the first movement restricting portion 41 restricts movement of the first inspection jig 2 in the first direction X and away from the second inspection jig 3 (that is, leftward in FIG. 2). To do.
  • the second movement restricting portion 42 restricts the movement of the second inspection jig 3 in the first direction X and in the direction away from the first inspection jig 2 (that is, rightward in FIG. 2).
  • the first movement restriction unit 41 and the second movement restriction unit 42 are fixed to the substrate 100 of the inspection apparatus as an example.
  • the board-to-board connector 110 has two recesses 112 that open in the second direction Y, and electrode portions 111 are provided on the outer surfaces of the recesses 112 in the first direction X, respectively.
  • an external force is applied to the first inspection jig 2 and the second inspection jig 3 in the first direction X and in the direction in which the inspection jigs 2 and 3 approach each other.
  • the first contact portion 11 of the contact 10 of each of the inspection jigs 2 and 3 is opposed to the two concave portions 112 of the board-to-board connector 110 by moving in the direction of arrow A against the elastic force of the movable portion 30. .
  • the board-to-board connector 110 is moved in the second direction Y and in the direction approaching the inspection unit 1 (that is, in the direction of arrow B in FIG. 4), and as shown in FIG.
  • the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are positioned at the insertion positions inside the recess 112 of the board-to-board connector 110 and not in contact with the bottom surface 113 of the recess 112.
  • the board-to-board connector 110 is moved to the inspection unit 1 so that the first contact portion 11 moves to the insertion position in the recess 112 while contacting one of the pair of side surfaces facing the first direction X of the recess 112.
  • the first contact portion 11 may be moved closer to the insertion position in the recess 112 without contacting one of the pair of side surfaces facing the first direction X of the recess 112.
  • the board connector 110 may be relatively close to the inspection unit 1.
  • each inspection jig 2 and 3 moves to the insertion position, the external force applied to each inspection jig 2 and 3 is released, and each inspection jig 2 and 3 can be moved.
  • the elastic member of the portion 30 is moved in the first direction X and away from each other (that is, in the direction of arrow C in FIG. 5) by the restoring force of the elastic member.
  • the first contact portion 11 of the contact 10 of each inspection jig 2, 3 moves to the contact position where it contacts the electrode portion 111 of the board-to-board connector 110. 1 and the board-to-board connector 110 are electrically connected.
  • the first inspection jig 2 and the second inspection jig 3 are arranged side by side so as to be movable along the first direction X, and the substrate is placed on each of the first contact portions 11 from the second direction Y.
  • the first inspection jig 2 and the second inspection jig 3 are moved along the first direction X with the board-to-board connector 110 approaching, each of the first contact portions 11 is moved in the first direction X.
  • the board-to-board connector 110 Accordingly, the first contact portion 11 of the contact 10 can be brought into contact with the board-to-board connector 110 in the first direction X different from the second direction Y (that is, the approaching direction).
  • the inspection unit 1 capable of preventing the display panel from being damaged without applying an excessive force in the approaching direction to the display panel.
  • the inspection unit 1 further includes a movable portion 30 that moves the first inspection jig 2 and the second inspection jig 3 in the first direction X.
  • a movable portion 30 that moves the first inspection jig 2 and the second inspection jig 3 in the first direction X.
  • the movable portion 30 has an elastic member that is connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3 and expands and contracts in the first direction X.
  • tool 2, 3 can be pressed to the electrode part 111 of the board
  • the inspection unit 1 further includes a first movement restricting portion 41 arranged side by side with the first inspection jig 2 and the second inspection jig 3 in the first direction X.
  • the first inspection jig 2 is disposed between the second inspection jig 3 and the first movement restricting portion 41 moves in the first direction X of the first inspection jig 2 and away from the second inspection jig 3. Movement is restricted. For example, when the first inspection jig 2 moves in the first direction X and away from the second inspection jig 3, excessive force is applied to the first contact portion 11 of the contact 10 of the first inspection jig 2.
  • the first movement restricting portion 41 can prevent the contact 10 of the first inspection jig 2 from being damaged by being added.
  • the inspection unit 1 further includes a second movement restricting portion 42 arranged in the first direction X along with the first movement restricting portion 41, the first inspection jig 2, and the second inspection jig 3.
  • the second inspection jig 3 is disposed between the second movement restriction portion 42 and the first inspection jig 2, and the first inspection X in the first direction X of the second inspection jig 3 is performed by the second movement restriction portion 42. Movement in a direction away from the jig 2 is restricted. For example, when the second inspection jig 3 moves in the first direction X and away from the first inspection jig 2, excessive force is applied to the first contact portion 11 of the contact 10 of the second inspection jig 3.
  • the second movement restricting portion 42 can prevent the contact 10 of the second inspection jig 3 from being damaged due to being added.
  • the clearances 5 and 6 between the movement restricting portions 41 and 42 and the housings 20 of the inspection jigs 2 and 3 are the first contact portion 11 of each contact 10 and the electrode portion of the board-to-board connector 110.
  • the contact 10 of the first inspection jig 2 is damaged by applying excessive force to the first contact portion 11 of the contact 10 of the first inspection jig 2 while securing the contact pressure with the first inspection jig 2. It is comprised so that it can prevent.
  • the dimension of each gap 5, 6 in the first direction X is such that the first contact portion in the first direction X when the first contact portion 11 is inserted in contact with the side surface of the recess 112 of the board-to-board connector 110.
  • 11 and the side surface of the recess 112 can be configured to be within the range of the shortest distance or more and not more than the dimension of the recess 112 of the board-to-board connector 110 in the first direction X.
  • the inspection unit 1 can realize an inspection apparatus that can cope with diversification of inspection apparatuses and inspection objects.
  • the first inspection jig 2 and the second inspection jig 3 is arranged so as to be movable along the first direction X.
  • the first inspection jig 2 may be fixed to the substrate 100 of the inspection apparatus, and the movable unit 30 may be provided between the second inspection jig 3 and the second movement restriction unit 41.
  • the movable portion 30 is configured to move at least one of the first inspection jig 2 and the second inspection jig 3 (in FIG. 7, the second inspection jig 3) along the first direction X.
  • the first movement restriction unit 41 is omitted.
  • Each contact 10 of the first inspection jig 2 and the second inspection jig 3 is provided with a first contact portion 11 that can contact an inspection object and a second contact portion 12 that can contact an inspection device at both ends.
  • the contactor 10 having an arbitrary configuration can be used depending on the design of the inspection unit 1 or the like. For example, as shown in FIG. 8 and FIG. 9, a contact 10 having a meandering shape in which a straight strip 13 extending in the first direction X and a curved strip 14 connected to the straight strip 13 are alternately arranged. It can also be used. Further, for example, each of the first contact portion 11 and the second contact portion 12 can be appropriately changed in shape, position, and the like according to various aspects of the inspection device or the inspection object.
  • the movable part 30, the first movement restriction part 41, and the second movement restriction part 42 can be omitted.
  • the user manually moves each of the first inspection jig 2 and the second inspection jig 3 so that each first contact portion 11 is moved to the substrate pair in the first direction X. It can be brought into contact with the electrode part 111 of the board connector 110.
  • the movable portion 30 is not limited to an elastic member that expands and contracts in the first direction X, and adopts an arbitrary configuration that can move at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X. it can. Moreover, it is not restricted to the case where it connects with the housing 20 of the 1st inspection jig 2, and the housing 20 of the 2nd inspection jig 3, For example, the 2nd contact part 12 of the 1st inspection jig 2 is connected. It may be connected to the substrate 100 of the inspection apparatus and the substrate 100 of the inspection apparatus to which the second contact portion 12 of the second inspection jig 3 is connected.
  • the inspection unit 1 can be appropriately changed in configuration according to various aspects of the inspection apparatus. For example, as shown in FIGS. 10 and 11, the terminals 101 of the pair of substrates 100 of the inspection apparatus arranged to face each other and the direction in which the pair of substrates 100 cross each other (for example, orthogonal)
  • the inspection unit 1 can also be configured so as to be able to come into contact with the electrode part 111 of the board-to-board connector 110 arranged.
  • the inspection jigs 2 and 3 are arranged so that the end portions on the first contact portion 11 side of the contact 10 extending along the first direction X are mutually in the first direction X. It arrange
  • the end of the contact 10 on the first contact portion 11 side of each inspection jig 2 and 3 is bent from the first direction X to the second direction Y, and the first contact portion 11 is provided at the tip. ing.
  • Each first contact portion 11 is arranged to be able to contact the electrode portion 111 of the board-to-board connector 110 in the second direction Y.
  • the second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are disposed so as to be able to contact the terminals 101 of the pair of substrates 100 facing the first direction X in the first direction X, respectively. .
  • the inspection unit 1 shown in FIGS. 10 and 11 has a movable part (not shown) that can move the inspection jigs 2 and 3 in the first direction X together with the pair of substrates 100 of the inspection apparatus.
  • each of the first contact parts 11 is configured to be able to contact the electrode part 111 of the board-to-board connector 110 in the first direction X.
  • each inspection jig 2 and 3 of the inspection unit 1 shown in FIG. 10 and FIG. 11 has alternating straight strips 13 extending in the first direction X and curved strips 14 connected to the straight strips 13.
  • a contact 10 having a continuous meandering shape is provided.
  • the inspection unit 1 includes: A first contact portion 11 capable of contacting an object to be inspected and a second contact portion 12 capable of contacting an inspection device provided at both ends, respectively;
  • the first inspection jig 2 and the second inspection jig 2 that are arranged side by side along the first direction, each having a housing 20 that accommodates the contact 10 therein with the first contact portion 11 exposed to the outside.
  • At least one of the first inspection jig 2 and the second inspection jig 3 is disposed so as to be movable along the first direction X, At least one of the first inspection jig 2 and the second inspection jig 3 in a state in which the inspection object is made to approach each of the first contact portions 11 from a second direction Y intersecting the first direction X. By moving one of them along the first direction X, each of the first contact portions 11 comes into contact with the inspection object in the first direction X.
  • the inspection unit 1 capable of contacting the first contact portion 11 of the contact 10 in the first direction X different from the second direction Y (that is, the approach direction) with respect to the inspection object is realized. it can.
  • the inspection unit 1 includes: It further includes a movable part 30 that moves at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X.
  • the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X by the movable portion 30.
  • the inspection unit 1 includes:
  • the movable part 30 includes an elastic member that expands and contracts in the first direction X.
  • the inspection unit 1 of the third aspect in the first direction X, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 can be pressed against the inspection object, so the first contact portion The contact reliability between 11 and the inspection object can be enhanced.
  • the inspection unit 1 includes: In the first direction X, it further comprises a movement restricting portion 41 arranged side by side with the first inspection jig 2 and the second inspection jig 3.
  • the first inspection jig 2 is disposed between the movement restricting portion 41 and the second inspection jig 3, and the movement restricting portion 41 moves the first inspection jig 2 in the first direction X and the Movement in a direction away from the second inspection jig 3 is restricted.
  • the inspection unit 1 of the fourth aspect when the movement restricting unit 41 moves the first inspection jig 2 in the first direction X and away from the second inspection jig 3, for example, It is possible to prevent the contact 10 of the first inspection jig 2 from being damaged by applying excessive force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the inspection jig 2.
  • the inspection unit 1 includes:
  • the movement restricting portion is a first movement restricting portion 41; In the first direction X, it further comprises a second movement restriction part 42 arranged side by side with the first movement restriction part 41, the first inspection jig 2 and the second inspection jig 3,
  • the second inspection jig 3 is disposed between the second movement restriction portion 42 and the first inspection jig 2, and the second direction of the second inspection jig 3 is determined by the second movement restriction portion 42. X and movement in the direction away from the first inspection jig 2 are restricted.
  • the inspection unit 1 of the fifth aspect for example, when the second inspection jig 3 is moved in the first direction X and away from the first inspection jig 2 by the second movement restricting portion 42, It is possible to prevent the contact 10 of the second inspection jig 3 from being damaged by applying excessive force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the second inspection jig 3.
  • the inspection device includes: At least one inspection unit 1 according to the above aspect is provided.
  • the inspection unit 1 can realize an inspection apparatus that can cope with the diversification of inspection apparatuses and inspection objects.
  • the inspection unit of the present disclosure can be applied to a liquid crystal panel inspection apparatus, for example.
  • the inspection apparatus of the present disclosure can be used for, for example, inspection of a liquid crystal panel.
PCT/JP2019/001829 2018-03-07 2019-01-22 検査ユニットおよび検査装置 WO2019171797A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201980012891.3A CN111712714B (zh) 2018-03-07 2019-01-22 检查单元以及检查装置
KR1020207023707A KR102445148B1 (ko) 2018-03-07 2019-01-22 검사 유닛 및 검사 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018041068A JP6881354B2 (ja) 2018-03-07 2018-03-07 検査ユニットおよび検査装置
JP2018-041068 2018-03-07

Publications (1)

Publication Number Publication Date
WO2019171797A1 true WO2019171797A1 (ja) 2019-09-12

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JP (1) JP6881354B2 (zh)
KR (1) KR102445148B1 (zh)
CN (1) CN111712714B (zh)
TW (1) TWI697677B (zh)
WO (1) WO2019171797A1 (zh)

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