WO2018021270A1 - Robot industriel - Google Patents

Robot industriel Download PDF

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Publication number
WO2018021270A1
WO2018021270A1 PCT/JP2017/026777 JP2017026777W WO2018021270A1 WO 2018021270 A1 WO2018021270 A1 WO 2018021270A1 JP 2017026777 W JP2017026777 W JP 2017026777W WO 2018021270 A1 WO2018021270 A1 WO 2018021270A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
end side
fixed
pulley
shaft
Prior art date
Application number
PCT/JP2017/026777
Other languages
English (en)
Japanese (ja)
Inventor
矢澤　隆之
陽介 高瀬
文人 中城
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201780043754.7A priority Critical patent/CN109476017B/zh
Priority to KR1020197001345A priority patent/KR102173394B1/ko
Publication of WO2018021270A1 publication Critical patent/WO2018021270A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H7/00—Gearings for conveying rotary motion by endless flexible members
    • F16H7/02—Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Definitions

  • the present invention relates to an industrial robot that transports an object to be transported in a vacuum.
  • Patent Document 1 an industrial robot that transports a glass substrate for an organic EL display in a vacuum is known (for example, see Patent Document 1).
  • the industrial robot described in Patent Document 1 includes a main body portion, a first arm whose base end side is rotatably connected to the main body portion, and a base end side rotatably connected to the distal end side of the first arm.
  • a second arm and a hand rotatably connected to the distal end side of the second arm are provided.
  • the first arm and the second arm are formed in a hollow shape.
  • the hand, the first arm, and the second arm are disposed in a chamber whose inside is vacuum, and the inside of the second arm formed in a hollow shape is vacuum.
  • the inside of the first arm formed in a hollow shape is at atmospheric pressure.
  • the industrial robot described in Patent Document 1 includes a first motor for rotating the second arm with respect to the first arm, and a second motor for rotating the hand with respect to the second arm.
  • the first speed reducer and the second speed reducer are hollow speed reducers in which a through hole is formed at the center in the radial direction, and overlap in the vertical direction at a joint portion that is a connecting portion between the first arm and the second arm.
  • the output shaft of the first reduction gear formed in a hollow shape is fixed to the base end side of the second arm.
  • a hollow rotating shaft disposed on the inner peripheral side of the output shaft of the first speed reducer is fixed to the output shaft of the second speed reducer, and the hollow rotating shaft is disposed inside the base end side of the second arm.
  • the arranged proximal pulley is fixed.
  • a distal pulley on which the hand is fixed is disposed inside the distal end of the second arm, and a belt is bridged between the proximal pulley and the distal pulley.
  • a magnetic fluid that prevents inflow of air into the vacuum region inside the second arm on the outer peripheral side of the hollow rotation shaft (specifically, between the hollow rotation shaft and the output shaft of the first reduction gear)
  • the first arm and the second arm are disposed on the outer peripheral side of the output shaft of the first reducer (specifically, between the output shaft of the first reducer and the case body of the first reducer).
  • a magnetic fluid seal is arranged to prevent the inflow of air into the vacuum area outside the.
  • an object of the present invention is to provide an industrial robot including a first arm and a second arm that are rotatably connected, and the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside is at atmospheric pressure and the inside of the second arm is vacuum, it is possible to simplify the configuration of the joint part that is the connecting part between the first arm and the second arm. Is to provide a simple industrial robot.
  • an industrial robot of the present invention includes a first arm, a second arm that is formed in a hollow shape, and a base end side of which is pivotally connected to a distal end side of the first arm, and a second arm.
  • the first pulley disposed on the base end side of the second arm is fixed to the fixing member, and the fixing member is fixed to the outer surface on the distal end side of the first arm. Therefore, in the present invention, it is not necessary to arrange a member such as a shaft that rotates relative to the rotation shaft together with the first pulley on the inner peripheral side of the rotation shaft. There is no need to place a magnetic fluid seal on the side. Therefore, in the present invention, the first arm and the second arm are arranged in a vacuum, the inside of the first arm is at atmospheric pressure, and the inside of the second arm is in a vacuum. Even if it exists, it becomes possible to simplify the structure of the joint part which is a connection part of a 1st arm and a 2nd arm.
  • the support shaft is preferably fixed to the rotating shaft. If comprised in this way, since it becomes easy to make the shaft center of a support shaft and the shaft center of a rotation shaft correspond, the shaft center of the 1st pulley supported by the support shaft so that rotation is possible, and the shaft center of a rotation shaft, Makes it easier to match. Therefore, even if the first pulley is fixed to the front end side of the first arm via the fixing member fixed to the outer surface on the front end side of the first arm, the first pulley can be appropriately rotated. Become.
  • the industrial robot preferably includes a screw for fixing the rotation shaft to the proximal end side of the second arm and fixing the support shaft to the rotation shaft. If comprised in this way, since a rotating shaft is fixed to the base end side of a 2nd arm and a support shaft is fixed to a rotating shaft with a common screw, the connection part of a 1st arm and a 2nd arm It is possible to further simplify the configuration of the joint portion.
  • the belt is preferably a steel belt made of steel plate. If comprised in this way, it will become possible to suppress dust generation from a belt compared with the case where a belt is a rubber belt.
  • the belt is less elastically deformed than when the belt is a rubber belt. If there is a misalignment, the first pulley will be difficult to rotate properly, but if the support shaft is fixed to the rotating shaft, the axis of the first pulley will coincide with the axis of the rotating shaft. Therefore, even if the belt is a steel belt, the first pulley can be appropriately rotated.
  • the second arm is arranged above the first arm, the rotation shaft is fixed to the lower surface portion on the proximal end side of the second arm, and the upper surface portion on the proximal end side of the second arm is An opening in which the upper end portion of the first pulley is disposed is formed, the upper end of the first pulley is disposed above the upper surface on the proximal end side of the second arm, and the fixing member is on the distal end side of the first arm And a top surface portion connected to the upper end of the side surface portion, the upper surface portion is disposed above the upper surface on the base end side of the second arm, and the upper end of the first pulley is the upper surface It is preferable to be fixed to the part.
  • the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside of the arm is at atmospheric pressure and the inside of the second arm is in a vacuum, the configuration of the joint portion that is the connecting portion between the first arm and the second arm can be simplified. It becomes possible.
  • FIG. 1 It is a top view of the industrial robot concerning an embodiment of the invention. It is a side view of the industrial robot shown in FIG. It is sectional drawing for demonstrating schematic structure of the E section of FIG. It is sectional drawing for demonstrating schematic structure of the F section of FIG. It is an enlarged view of the G section of FIG. It is an enlarged view of the H section of FIG.
  • FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a side view of the industrial robot 1 shown in FIG.
  • FIG. 3 is a cross-sectional view for explaining a schematic configuration of a portion E in FIG.
  • FIG. 4 is a cross-sectional view for explaining a schematic configuration of the F part in FIG. 2.
  • the industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there.
  • the robot 1 is a large robot particularly suitable for transporting a large substrate 2. Further, the robot 1 conveys the substrate 2 in a vacuum.
  • the robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, two arms 6 and 7 each having two hands 4 and 5 rotatably connected to the distal end side, and two pieces.
  • the arm 6 is provided with a common arm 8 to which the base end sides of the arms 6 and 7 are rotatably connected, and a main body 9 to which the common arm 8 is rotatably connected.
  • the common arm 8 of this embodiment is a first arm, and the arms 6 and 7 are second arms.
  • the hand 4 is rotatably connected to the distal end side of the arm 6.
  • the hand 5 is rotatably connected to the distal end side of the arm 7.
  • the hand 4 is disposed below the hand 5.
  • the arm 6 is disposed below the hand 4.
  • the arm 7 is disposed above the hand 5.
  • the common arm 8 is disposed below the arm 6. That is, the arms 6 and 7 are arranged above the common arm 8. Further, the common arm 8 is disposed above the main body portion 9.
  • the main body 9 includes a rotation shaft (not shown) that rotates the common arm 8 with the vertical direction as the axis direction of rotation, a rotation mechanism (not shown) that rotates the rotation shaft, and the rotation An elevating mechanism (not shown) that elevates and lowers the common arm 8 together with the mechanism, and a case body that accommodates the rotating mechanism and elevating mechanism are provided.
  • the case body includes a case main body 11 formed in a bottomed cylindrical shape and a lid body 12 that covers an opening at the upper end of the case main body 11. A through-hole in which a rotation shaft for rotating the common arm 8 is disposed is formed at the center of the lid body 12. Further, the lid body 12 is formed with a flange portion 12 a that extends outward in the radial direction of the case body 11.
  • the robot 1 is a robot for transporting the substrate 2 in a vacuum.
  • the portion of the robot 1 above the lower surface of the flange 12 a is disposed in the vacuum chamber 13. That is, the part of the robot 1 above the lower surface of the flange 12a is disposed in the vacuum region VR (in a vacuum).
  • a portion of the robot 1 below the lower surface of the flange 12a is disposed in the atmospheric region AR (in the atmosphere).
  • the hands 4 and 5 include a plurality of fork portions 15 on which the substrate 2 is mounted.
  • the arms 6 and 7 are formed in a block shape having an elongated oval shape when viewed in the vertical direction and a thin thickness in the vertical direction.
  • the length of the arm 6 and the length of the arm 7 are equal.
  • the arms 6 and 7 are formed in a hollow shape.
  • the insides of the arms 6 and 7 formed in a hollow shape are evacuated.
  • the common arm 8 is formed in a substantially V shape. A central portion of the common arm 8 formed in a substantially V shape is rotatably connected to the main body portion 9.
  • proximal end side of the arm 6 is rotatably connected to one distal end side of the common arm 8 formed in a substantially V shape, and the proximal end side of the arm 7 is rotatable to the other distal end side of the common arm 8. It is connected.
  • the connecting portion between the arm 6 and the common arm 8 is a joint portion 16.
  • a joint portion between the arm 7 and the common arm 8 is a joint portion 17.
  • the robot 1 rotates the hand 4 with respect to the arm 6 and rotates the hand 5 with respect to the arm 7 and a drive mechanism 18 (see FIG. 3) that rotates the arm 6 with respect to the common arm 8.
  • a drive mechanism 19 (see FIG. 4) for rotating the arm 7 with respect to the common arm 8.
  • FIG. 5 is an enlarged view of a portion G in FIG.
  • FIG. 6 is an enlarged view of a portion H in FIG.
  • the common arm 8 includes a base end portion 22 connected to the main body 9, two tip end portions 23 and 24 to which the base end sides of the arms 6 and 7 are respectively connected, and two tip end portions 23 and 24. Are provided with two connecting portions 25 and 26 that connect the base end portion 22 to each other.
  • the common arm 8 is configured by the base end portion 22, the two distal end portions 23 and 24, and the two connecting portions 25 and 26.
  • the proximal end side of the arm 6 is connected to the distal end portion 23, and the proximal end side of the arm 7 is connected to the distal end portion 24.
  • the connecting portion 25 connects the proximal end portion 22 and the distal end portion 23, and the connecting portion 26 connects the proximal end portion 22 and the distal end portion 24.
  • the proximal end portion 22 and the two distal end portions 23 and 24 and the two connecting portions 25 and 26 are formed separately, and the proximal end portion 22 and the two distal end portions 23 and 24 are connected to the two connecting portions.
  • the common arm 8 is configured by fixing and integrating the portions 25 and 26.
  • the base end portion 22, the tip end portions 23 and 24, and the connecting portions 25 and 26 are formed of an aluminum alloy or stainless steel.
  • tip parts 23 and 24, and the connection parts 25 and 26 are formed in the hollow shape. That is, the common arm 8 is formed in a hollow shape.
  • the inside of the common arm 8 is at atmospheric pressure.
  • the base end portion 22 is formed in a block shape having a substantially pentagonal shape when viewed from the vertical direction. At the center of the lower surface of the base end portion 22, the upper end of the rotation shaft of the main body portion 9 is fixed.
  • the tip portions 23 and 24 are formed in a block shape having a substantially rectangular shape when viewed from the vertical direction.
  • the connection parts 25 and 26 are pipes formed in a cylindrical shape, and are formed in an elongated cylindrical shape. The length of the connection parts 25 and 26 is 4 (m), for example.
  • One end of the connecting portion 25 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 25 is fixed to the distal end portion 23 with a screw (not shown).
  • One end of the connecting portion 26 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 26 is fixed to the distal end portion 24 with a screw (not shown). Note that flanges extending outward in the radial direction are formed at both ends of the connecting portions 25 and 26.
  • the drive mechanism 18 includes a motor 30 that rotates the hand 4 relative to the arm 6 and rotates the arm 6 relative to the common arm 8, and a speed reducer 31 that is coupled to the motor 30.
  • the speed reducer 31 includes a rotating shaft 32 serving as an output shaft of the speed reducer 31, a bearing 33 that rotatably supports the rotating shaft 32, and a magnetic fluid seal 34 disposed on the outer peripheral side of the rotating shaft 32. It has.
  • the drive mechanism 18 includes a pulley 36 fixed to the input shaft 35 of the speed reducer 31, a pulley 37 as a first pulley disposed inside the base end side of the arm 6, and an inside of the tip end side of the arm 6. And a pulley 38 as a second pulley disposed at the same position.
  • the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 38 is set to 1: 2 so that the hand 4 moves linearly in a state in which the hand 4 faces a certain direction.
  • the reduction gear 31 is a hollow wave gear device, and is disposed at the joint 16.
  • the speed reducer 31 is a wave attached to the outer peripheral side of the rigid internal gear 41, the flexible external gear 42, and the input shaft 35 in addition to the rotating shaft 32, the bearing 33 and the magnetic fluid seal 34. And a bearing 43.
  • the speed reducer 31 includes a case body 44 that holds the bearing 33 and the magnetic fluid seal 34.
  • the case body 44 is formed in a substantially cylindrical shape as a whole.
  • the upper end portion of the case body 44 is fixed to the upper surface portion of the tip portion 23, and the case body 44 is held by the tip portion 23. That is, the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 23 (that is, one distal end side of the common arm 8) via the case body 44. Further, the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 23.
  • the bearing 33 is a cross roller bearing.
  • the outer ring of the bearing 33 is fixed to the upper end portion of the case body 44.
  • An inner ring of the bearing 33 is fixed to the rotation shaft 32.
  • the rotating shaft 32 is made of a magnetic material. Moreover, the rotating shaft 32 is formed in a hollow shape.
  • a lid 45 that closes the inner peripheral side of the rotation shaft 32 is fixed to the upper end side of the rotation shaft 32.
  • the lid 45 is formed in a disk shape and is fixed to the inner peripheral surface on the upper end side of the rotating shaft 32.
  • a seal member (not shown) such as an O-ring is disposed between the outer peripheral surface of the lid 45 and the inner peripheral surface of the rotation shaft 32.
  • the rotation shaft 32 is fixed to the proximal end side of the arm 6. Specifically, the upper end of the rotation shaft 32 is fixed to the lower surface portion on the proximal end side of the arm 6. The upper end surface of the rotation shaft 32 is in contact with the lower surface on the proximal end side of
  • the magnetic fluid seal 34 includes a plurality of magnets, an annular pole piece disposed so as to sandwich each of the plurality of magnets in the vertical direction, and an inner peripheral surface of the pole piece and an outer peripheral surface of the rotating shaft 32. And a magnetic fluid held in the container.
  • the magnet and pole piece of the magnetic fluid seal 34 are fixed to the inner peripheral surface of the upper end side portion of the case body 44.
  • the magnetic fluid seal 34 is disposed on the upper side of the bearing 33. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 6.
  • the input shaft 35 is formed in a hollow shape.
  • the input shaft 35 is rotatably supported by a lower end side portion of the case body 44 through a bearing.
  • the input shaft 35 is formed with an elliptical portion whose outer peripheral surface is elliptical when viewed from above and below.
  • the rigid internal gear 41 is fixed to the lower end portion of the case body 44. Internal teeth are formed on the inner peripheral surface of the rigid internal gear 41.
  • the upper end portion of the flexible external gear 42 is fixed to the lower end of the rotating shaft 32. External teeth that mesh with the internal teeth of the rigid internal gear 41 are formed on the outer peripheral surface of the lower end portion of the flexible external gear 42.
  • the flexible external gear 42 is rotatable relative to the input shaft 35.
  • the wave bearing 43 is a ball bearing having a flexible inner ring and an outer ring.
  • the wave bearing 43 is disposed along the outer peripheral surface of the elliptical portion of the input shaft 35 and is bent in an elliptical shape.
  • the lower end portion of the flexible external gear 42 where the external teeth are formed is disposed on the outer peripheral side of the wave bearing 43 so as to surround the wave bearing 43, and this portion is bent in an elliptical shape.
  • the external teeth of the flexible external gear 42 mesh with the internal teeth of the rigid internal gear 41 at two locations in the major axis direction of the lower end portion of the flexible external gear 42 that bends in an elliptical shape. .
  • the motor 30 is fixed to the tip 23. Further, the motor 30 is disposed inside the distal end portion 23 and is disposed closer to the connecting portion 25 than the speed reducer 31.
  • a pulley 46 is fixed to the output shaft of the motor 30.
  • the pulley 36 is fixed to the lower end of the input shaft 35.
  • a belt 47 is stretched between the pulley 36 and the pulley 46.
  • the belt 47 is a rubber belt. The pulleys 36 and 46 and the belt 47 are disposed inside the tip portion 23.
  • a support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 6.
  • the support shaft 50 is formed in a cylindrical shape with a flange having a flange portion 50a at the lower end. Further, the support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 6 and is disposed so as to rise from the lower surface portion of the arm 6.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion on the proximal end side of the arm 6 are fixed to each other by a screw 51 disposed inside the proximal end side of the arm 6.
  • an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion and the flange portion 50 a of the base end side of the arm 6, and the screw 51 is engaged with the upper end surface of the rotating shaft 32. Screw holes are formed. That is, the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 6 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 32. It is fixed to.
  • the screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 6 and fixes the support shaft 50 to the rotation shaft 32.
  • the support shaft 50 is fixed to the rotation shaft 32 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other.
  • the pulley 37 is rotatably supported on the support shaft 50 via a bearing.
  • the pulley 37 is fixed to the distal end portion 23 via a fixing member 53. That is, the pulley 37 is fixed to one tip side of the common arm 8 via the fixing member 53.
  • the fixing member 53 is disposed outside the arm 6 and the common arm 8. Further, the fixing member 53 is disposed outside the joint portion 16.
  • the fixing member 53 includes a side surface portion 53a that is fixed to the outer surface on one tip side of the common arm 8, and an upper surface portion 53b that is connected to the upper end of the side surface portion 53a.
  • the side surface portion 53a and the upper surface portion 53b are formed in a flat plate shape.
  • the lower end side of the side surface portion 53a is fixed to one end surface of the common arm 8. That is, the fixing member 53 is fixed to the outer surface on the one end side of the common arm 8. Further, the side surface portion 53 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 16.
  • the upper surface portion 53b is fixed to the upper end of the side surface portion 53a.
  • the upper surface portion 53b is disposed so that the thickness direction of the upper surface portion 53b matches the vertical direction.
  • the upper surface portion 53 b is disposed above the upper surface on the base end side of the arm 6. Specifically, the upper surface portion 53 b is disposed slightly above the upper surface on the proximal end side of the arm 6.
  • the side surface portion 53a and the upper surface portion 53b formed separately are fixed to each other, but the side surface portion 53a and the upper surface portion 53b may be integrally formed.
  • an opening 6 a in which the upper end side portion of the pulley 37 is disposed is formed on the upper surface portion of the base end side of the arm 6.
  • the upper end of the pulley 37 is arranged above the upper surface of the arm 6 on the base end side. Specifically, the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 6.
  • the upper end of the pulley 37 is fixed to the upper surface portion 53b. That is, the pulley 37 is fixed to the fixing member 53.
  • the upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 53b.
  • a support shaft 58 that rotatably supports the pulley 38 is fixed inside the arm 6.
  • the support shaft 58 rises from the lower surface portion on the distal end side of the arm 6.
  • the pulley 38 is rotatably supported on the support shaft 58 via a bearing. Further, the base end side of the hand 4 is fixed to the upper end of the pulley 38.
  • a belt 60 is stretched between the pulley 37 and the pulley 38. In this embodiment, two belts 60 arranged so as to overlap in the vertical direction are stretched over the pulley 37 and the pulley 38.
  • the belt 60 is a steel belt made of steel plate. The belt 60 is fixed to the pulleys 37 and 38 by screws not shown.
  • the drive mechanism 19 is configured in substantially the same manner as the drive mechanism 18. Therefore, in the following description of the drive mechanism 19, differences between the drive mechanism 18 and the drive mechanism 19 will be mainly described.
  • the drive mechanism 19 includes a motor 30 that rotates the hand 5 with respect to the arm 7 and rotates the arm 7 with respect to the common arm 8, and a speed reducer 31 that is coupled to the motor 30.
  • the drive mechanism 19 includes a pulley 36 that is fixed to the input shaft 35 of the speed reducer 31, a pulley 37 that serves as a first pulley disposed inside the base end of the arm 7, and an internal portion on the distal end side of the arm 7. And a pulley 78 as a second pulley disposed at the same position.
  • the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 78 is set to 1: 2 so that the hand 5 moves linearly in a state in which the hand 5 faces in a certain direction.
  • the speed reducer 31 of the drive mechanism 19 is disposed at the joint portion 17.
  • the upper end portion of the case body 44 of the speed reducer 31 is fixed to the upper surface portion of the distal end portion 24, and the case body 44 is held by the distal end portion 24.
  • the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 24 (that is, the other distal end side of the common arm 8) via the case body 44.
  • the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 24. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 7.
  • the lower end of the rotating shaft 79 formed in a hollow shape is fixed to the upper end of the rotating shaft 32.
  • the rotation shaft 79 is fixed to the rotation shaft 32 so that the axis of the rotation shaft 32 coincides with the axis of the rotation shaft 79.
  • the rotation shaft 79 is fixed to the proximal end side of the arm 7.
  • the upper end of the rotation shaft 79 is fixed to the lower surface portion on the proximal end side of the arm 7. That is, the rotation shaft 32 is fixed to the proximal end side of the arm 7 via the rotation shaft 79.
  • the upper end surface of the rotation shaft 79 is in contact with the lower surface on the proximal end side of the arm 7.
  • the rotation shaft 32 and the rotation shaft 79 may be integrally formed.
  • the motor 30 is fixed to the distal end portion 24.
  • the motor 30 is disposed inside the distal end portion 24 and is disposed closer to the connecting portion 26 than the speed reducer 31.
  • the pulleys 36 and 46 and the belt 47 are disposed inside the distal end portion 24.
  • a support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 7.
  • the support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 7 and is disposed so as to rise from the lower surface portion of the arm 7.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the screw 51 disposed inside the base end side of the arm 7.
  • an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion of the base end side of the arm 7 and the flange portion 50 a, and the screw 51 engages with the upper end surface of the rotating shaft 79. Screw holes are formed.
  • the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 7 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 79. And is fixed to the rotation shaft 32 via the rotation shaft 79.
  • the screw 51 fixes the rotation shaft 79 to the proximal end side of the arm 7 and fixes the support shaft 50 to the rotation shaft 79. That is, the screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 7 via the rotation shaft 79 and also fixes the support shaft 50 to the rotation shaft 32 via the rotation shaft 79.
  • the support shaft 50 is fixed to the rotation shaft 79 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide with each other.
  • the pulley 37 disposed inside the proximal end of the arm 7 is fixed to the distal end portion 24 via a fixing member 83. That is, the pulley 37 is fixed to the other tip side of the common arm 8 via the fixing member 83.
  • the fixing member 83 is disposed outside the arm 7 and the common arm 8.
  • the fixing member 83 is disposed outside the joint portion 17.
  • the fixing member 83 includes a side surface portion 83a fixed to the outer surface on the other tip side of the common arm 8, and an upper surface portion 83b connected to the upper end of the side surface portion 83a.
  • the side surface portion 83a and the upper surface portion 83b are formed in a flat plate shape.
  • the lower end side of the side part 83a is fixed to the other end face of the common arm 8. That is, the fixing member 83 is fixed to the outer surface of the other distal end side of the common arm 8. Further, the side surface portion 83 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 17.
  • the upper surface portion 83b is fixed to the upper end of the side surface portion 83a.
  • the upper surface portion 83b is disposed so that the thickness direction of the upper surface portion 83b and the vertical direction coincide with each other. Further, the upper surface portion 83 b is disposed above the upper surface on the proximal end side of the arm 7.
  • the upper surface portion 83 b is disposed slightly above the upper surface on the proximal end side of the arm 7.
  • the side surface portion 83a and the upper surface portion 83b formed separately are fixed to each other, but the side surface portion 83a and the upper surface portion 83b may be integrally formed.
  • an opening 7 a in which the upper end portion of the pulley 37 is disposed is formed in the upper surface portion of the base end side of the arm 7.
  • the upper end of the pulley 37 is disposed above the upper surface on the proximal end side of the arm 7.
  • the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 7.
  • the upper end of the pulley 37 is fixed to the upper surface portion 83b. That is, the pulley 37 is fixed to the fixing member 83.
  • the upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 83b.
  • a support shaft portion 7 b that rotatably supports the pulley 78 is formed inside the arm 7 on the tip side.
  • the support shaft portion 7 b is formed in a cylindrical shape and rises from the lower surface portion on the distal end side of the arm 7.
  • the pulley 78 is rotatably supported by the support shaft portion 7b via a bearing. Further, the base end side of the hand 5 is fixed to the lower end of the pulley 78.
  • Two belts 60 are arranged between the pulley 37 and the pulley 78 so as to overlap in the vertical direction. The belt 60 is fixed to the pulleys 37 and 78 by screws not shown.
  • the pulley 37 disposed on the proximal end side of the arm 6 is fixed to one distal end side of the common arm 8 via the fixing member 53, and the fixing member 53 is a joint Arranged outside the portion 16.
  • the pulley 37 disposed on the proximal end side of the arm 7 is fixed to the other distal end side of the common arm 8 via the fixing member 83, and the fixing member 83 is outside the joint portion 17. Is arranged. That is, in this embodiment, a member such as a shaft that rotates relative to the rotation shaft 32 together with the pulley 37 is not disposed on the inner peripheral side of the rotation shaft 32.
  • the support shaft 50 on which the pulley 37 is rotatably supported is fixed to the rotation shaft 32. Therefore, in this embodiment, the axis of the support shaft 50 and the axis of the rotary shaft 32 can be easily matched, and as a result, the axis of the pulley 37 and the axis of the rotary shaft 32 can be easily matched. Therefore, in this embodiment, even if the pulley 37 is fixed to the distal end side of the common arm 8 via the fixing members 53 and 83, the pulley 37 can be appropriately rotated.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by a common screw 51. Therefore, in this embodiment, the joint is compared with the case where the screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and the screw for fixing the support shaft 50 to the rotation shaft 32 are provided individually.
  • the configuration of the unit 16 can be simplified.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51, the rotation shaft 79 is fixed to the base end of the arm 7.
  • the configuration of the joint portion 17 can be simplified as compared with the case where the screw for fixing the support shaft 50 to the side and the screw for fixing the support shaft 50 to the rotation shaft 79 are provided separately.
  • the belt 60 is a steel belt. Therefore, in this embodiment, it is possible to suppress dust generation from the belt 60 as compared with the case where the belt 60 is a rubber belt.
  • the belt 60 is less likely to be elastically deformed than when the belt 60 is a rubber belt. If there is a misalignment, the pulley 37 is difficult to rotate properly, but in this embodiment, the axis of the pulley 37 and the axis of the rotating shaft 32 are easily aligned, so the belt 60 is a steel belt. Even so, the pulley 37 can be appropriately rotated.
  • the fixing member 53 is fixed to the upper end of the side surface portion 53 a and the flat side surface portion 53 a fixed to one distal end surface of the common arm 8, and above the upper surface on the proximal end side of the arm 6. It is comprised by the flat upper surface part 53b arrange
  • the fixing member 83 is fixed to the upper end of the side surface portion 83a and the flat side surface portion 83a fixed to the other distal end surface of the common arm 8, and the upper surface on the proximal end side of the arm 7 Since the flat upper surface portion 83 b is arranged on the upper side, it is easy to prevent interference between the base end side of the arm 7 and the fixing member 83.
  • the upper end of the rotation shaft 32 rotatably held on one distal end side of the common arm 8 via the bearing 33 is fixed to the lower surface portion on the proximal end side of the arm 6, and
  • An upper end of a pulley 37 that is rotatably supported by a support shaft 50 disposed inside the base end side is fixed to an upper surface portion 53 b of a fixing member 53 that is fixed to one distal end side of the common arm 8. . That is, in this embodiment, the proximal end side of the arm 6 is supported from both sides in the vertical direction by the rotating shaft 32 and the upper surface portion 53b. Therefore, in this embodiment, the operation of the arm 6 can be stabilized.
  • the upper ends of the rotation shafts 32 and 79 that are rotatably held on the other distal end side of the common arm 8 via the bearing 33 are fixed to the lower surface portion on the proximal end side of the arm 7.
  • the upper end of the pulley 37 rotatably supported by the support shaft 50 disposed inside the base end side of the arm 7 is attached to the upper surface portion 83b of the fixing member 83 fixed to the other distal end side of the common arm 8. It is fixed. That is, in this embodiment, the base end side of the arm 7 is supported from both sides in the vertical direction by the rotation shafts 32 and 79 and the upper surface portion 83b. Therefore, in this embodiment, the operation of the arm 7 can be stabilized.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by the common screw 51, but the rotation shaft 32 is attached to the base end side of the arm 6.
  • a screw for fixing and a screw for fixing the support shaft 50 to the rotating shaft 32 may be provided individually.
  • the support shaft 50 may be fixed to the rotation shaft 32 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 32 are in contact with each other.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51.
  • a screw for fixing the shaft 79 and a screw for fixing the support shaft 50 to the rotation shaft 79 may be provided separately.
  • the support shaft 50 may be fixed to the rotation shaft 79 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 79 are in contact with each other.
  • the support shaft 50 is fixed to the rotating shaft 32, but the support shaft 50 may be fixed to the lower surface portion of the base end side of the arm 6.
  • a screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and a screw for fixing the support shaft 50 to the proximal end side of the arm 6 are individually provided.
  • the support shaft 50 is fixed to the base end side of the arm 6 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other.
  • a support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 6.
  • a support shaft is formed inside the base end side of the arm 6 so that the axis of the support shaft and the axis of the rotation shaft 32 coincide with each other.
  • the support shaft 50 may be fixed to the lower surface portion on the proximal end side of the arm 7.
  • a screw for fixing the rotation shaft 79 to the base end side of the arm 7 and a screw for fixing the support shaft 50 to the base end side of the arm 7 are individually provided.
  • the support shaft 50 is fixed to the base end side of the arm 7 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide.
  • a support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 7.
  • the support shaft is formed inside the base end side of the arm 7 so that the axis of the support shaft, the axis of the rotation shaft 79 and the axis of the rotation shaft 32 coincide with each other.
  • the side surface portion 53a of the fixing member 53 is fixed to one of the front end surfaces of the common arm 8, but the side surface portion 53a may be fixed to the upper surface of the front end portion 23.
  • the side surface portion 83 a of the fixing member 83 is fixed to the other tip surface of the common arm 8, but the side surface portion 83 a may be fixed to the upper surface of the tip portion 24.
  • the belt 60 is a steel belt, but the belt 60 may be a rubber belt.
  • one arm 6 is disposed between the hand 4 and the common arm 8
  • one arm 7 is disposed between the hand 5 and the common arm 8.
  • Two or more arms may be disposed between the common arm 8 and the common arm 8.
  • the common arm 8 is formed in the substantially V shape
  • the common arm 8 may be formed in linear form.
  • the robot 1 includes the common arm 8 to which the two arms 6 and 7 are rotatably connected.
  • the robot 1 is replaced with the single arm 8 instead of the common arm 8. 6 or the arm 7 may be provided so as to be pivotally connected to the distal end side, and the base end side may be pivotally connected to the main body 9.
  • the object to be transported by the robot 1 is a glass substrate for a liquid crystal display, but the object to be transported by the robot 1 is a glass substrate for an organic EL (organic electroluminescence) display. It may be a semiconductor wafer or the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manipulator (AREA)

Abstract

Un robot industriel comprenant : un second bras 6 qui est accouplé rotatif à un premier bras; un arbre rotatif 32 qui est fixé à un côté d'extrémité de base du second bras 6; un palier 33 qui supporte de manière rotative l'arbre rotatif 32 et qui est maintenu au niveau d'un côté d'extrémité de pointe du premier bras; un joint à fluide magnétique 34 qui est disposé sur le côté périphérique externe de l'arbre rotatif 32 et qui est maintenu au niveau du côté d'extrémité de pointe du premier bras; un arbre de support 50 qui est disposé à l'intérieur du côté d'extrémité de base du deuxième bras 6 et qui est fixé à l'arbre rotatif 32; une poulie 37 qui est disposée sur le côté d'extrémité de base du second bras 6 et qui est supportée de manière rotative par l'arbre de support 50; et un élément de fixation 53 qui a la poulie 37 fixée à celle-ci et qui est fixé à une surface extérieure du côté d'extrémité de pointe du premier bras. Le robot industriel permet ainsi de simplifier la configuration d'une partie de joint qui couple le premier bras et le second bras.
PCT/JP2017/026777 2016-07-28 2017-07-25 Robot industriel WO2018021270A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780043754.7A CN109476017B (zh) 2016-07-28 2017-07-25 工业用机器人
KR1020197001345A KR102173394B1 (ko) 2016-07-28 2017-07-25 산업용 로봇

Applications Claiming Priority (2)

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JP2016148110A JP6709124B2 (ja) 2016-07-28 2016-07-28 産業用ロボット
JP2016-148110 2016-07-28

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WO2018021270A1 true WO2018021270A1 (fr) 2018-02-01

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KR (1) KR102173394B1 (fr)
CN (1) CN109476017B (fr)
WO (1) WO2018021270A1 (fr)

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CN108750665B (zh) * 2018-08-10 2023-12-26 苏州邦勒尔自动化科技有限公司 一种抓取装置
JP7335103B2 (ja) 2019-07-09 2023-08-29 ニデックインスツルメンツ株式会社 産業用ロボットおよび産業用ロボットの制御方法
JP2021102261A (ja) 2019-12-25 2021-07-15 日本電産サンキョー株式会社 ロボットの監視システム
JP2022076059A (ja) * 2020-11-09 2022-05-19 日本電産サンキョー株式会社 産業用ロボット
JP2022083199A (ja) 2020-11-24 2022-06-03 日本電産サンキョー株式会社 産業用ロボット
JP2023054398A (ja) 2021-10-04 2023-04-14 日本電産サンキョー株式会社 産業用ロボットおよび製造システム
KR20230048595A (ko) 2021-10-04 2023-04-11 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇

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Publication number Priority date Publication date Assignee Title
JP2001269890A (ja) * 2000-03-27 2001-10-02 Shin Meiwa Ind Co Ltd 搬送ロボット
JP2014022598A (ja) * 2012-07-19 2014-02-03 Kawasaki Heavy Ind Ltd 基板搬送装置
JP2014034106A (ja) * 2012-08-09 2014-02-24 Nidec Sankyo Corp 産業用ロボット

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Publication number Priority date Publication date Assignee Title
JP5818346B2 (ja) * 2011-04-27 2015-11-18 日本電産サンキョー株式会社 回転体の回転範囲規制機構および産業用ロボット
JP5979077B2 (ja) * 2013-05-16 2016-08-24 株式会社豊田自動織機 回転電機
JP6295037B2 (ja) * 2013-08-08 2018-03-14 日本電産サンキョー株式会社 産業用ロボット
JP6273114B2 (ja) * 2013-09-13 2018-01-31 日本電産サンキョー株式会社 産業用ロボット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001269890A (ja) * 2000-03-27 2001-10-02 Shin Meiwa Ind Co Ltd 搬送ロボット
JP2014022598A (ja) * 2012-07-19 2014-02-03 Kawasaki Heavy Ind Ltd 基板搬送装置
JP2014034106A (ja) * 2012-08-09 2014-02-24 Nidec Sankyo Corp 産業用ロボット

Also Published As

Publication number Publication date
KR102173394B1 (ko) 2020-11-03
JP2018015839A (ja) 2018-02-01
JP6709124B2 (ja) 2020-06-10
CN109476017B (zh) 2022-03-22
KR20190018508A (ko) 2019-02-22
CN109476017A (zh) 2019-03-15

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