WO2018021270A1 - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
WO2018021270A1
WO2018021270A1 PCT/JP2017/026777 JP2017026777W WO2018021270A1 WO 2018021270 A1 WO2018021270 A1 WO 2018021270A1 JP 2017026777 W JP2017026777 W JP 2017026777W WO 2018021270 A1 WO2018021270 A1 WO 2018021270A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
end side
fixed
pulley
shaft
Prior art date
Application number
PCT/JP2017/026777
Other languages
French (fr)
Japanese (ja)
Inventor
矢澤　隆之
陽介 高瀬
文人 中城
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to KR1020197001345A priority Critical patent/KR102173394B1/en
Priority to CN201780043754.7A priority patent/CN109476017B/en
Publication of WO2018021270A1 publication Critical patent/WO2018021270A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H7/00—Gearings for conveying rotary motion by endless flexible members
    • F16H7/02—Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Definitions

  • the present invention relates to an industrial robot that transports an object to be transported in a vacuum.
  • Patent Document 1 an industrial robot that transports a glass substrate for an organic EL display in a vacuum is known (for example, see Patent Document 1).
  • the industrial robot described in Patent Document 1 includes a main body portion, a first arm whose base end side is rotatably connected to the main body portion, and a base end side rotatably connected to the distal end side of the first arm.
  • a second arm and a hand rotatably connected to the distal end side of the second arm are provided.
  • the first arm and the second arm are formed in a hollow shape.
  • the hand, the first arm, and the second arm are disposed in a chamber whose inside is vacuum, and the inside of the second arm formed in a hollow shape is vacuum.
  • the inside of the first arm formed in a hollow shape is at atmospheric pressure.
  • the industrial robot described in Patent Document 1 includes a first motor for rotating the second arm with respect to the first arm, and a second motor for rotating the hand with respect to the second arm.
  • the first speed reducer and the second speed reducer are hollow speed reducers in which a through hole is formed at the center in the radial direction, and overlap in the vertical direction at a joint portion that is a connecting portion between the first arm and the second arm.
  • the output shaft of the first reduction gear formed in a hollow shape is fixed to the base end side of the second arm.
  • a hollow rotating shaft disposed on the inner peripheral side of the output shaft of the first speed reducer is fixed to the output shaft of the second speed reducer, and the hollow rotating shaft is disposed inside the base end side of the second arm.
  • the arranged proximal pulley is fixed.
  • a distal pulley on which the hand is fixed is disposed inside the distal end of the second arm, and a belt is bridged between the proximal pulley and the distal pulley.
  • a magnetic fluid that prevents inflow of air into the vacuum region inside the second arm on the outer peripheral side of the hollow rotation shaft (specifically, between the hollow rotation shaft and the output shaft of the first reduction gear)
  • the first arm and the second arm are disposed on the outer peripheral side of the output shaft of the first reducer (specifically, between the output shaft of the first reducer and the case body of the first reducer).
  • a magnetic fluid seal is arranged to prevent the inflow of air into the vacuum area outside the.
  • an object of the present invention is to provide an industrial robot including a first arm and a second arm that are rotatably connected, and the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside is at atmospheric pressure and the inside of the second arm is vacuum, it is possible to simplify the configuration of the joint part that is the connecting part between the first arm and the second arm. Is to provide a simple industrial robot.
  • an industrial robot of the present invention includes a first arm, a second arm that is formed in a hollow shape, and a base end side of which is pivotally connected to a distal end side of the first arm, and a second arm.
  • the first pulley disposed on the base end side of the second arm is fixed to the fixing member, and the fixing member is fixed to the outer surface on the distal end side of the first arm. Therefore, in the present invention, it is not necessary to arrange a member such as a shaft that rotates relative to the rotation shaft together with the first pulley on the inner peripheral side of the rotation shaft. There is no need to place a magnetic fluid seal on the side. Therefore, in the present invention, the first arm and the second arm are arranged in a vacuum, the inside of the first arm is at atmospheric pressure, and the inside of the second arm is in a vacuum. Even if it exists, it becomes possible to simplify the structure of the joint part which is a connection part of a 1st arm and a 2nd arm.
  • the support shaft is preferably fixed to the rotating shaft. If comprised in this way, since it becomes easy to make the shaft center of a support shaft and the shaft center of a rotation shaft correspond, the shaft center of the 1st pulley supported by the support shaft so that rotation is possible, and the shaft center of a rotation shaft, Makes it easier to match. Therefore, even if the first pulley is fixed to the front end side of the first arm via the fixing member fixed to the outer surface on the front end side of the first arm, the first pulley can be appropriately rotated. Become.
  • the industrial robot preferably includes a screw for fixing the rotation shaft to the proximal end side of the second arm and fixing the support shaft to the rotation shaft. If comprised in this way, since a rotating shaft is fixed to the base end side of a 2nd arm and a support shaft is fixed to a rotating shaft with a common screw, the connection part of a 1st arm and a 2nd arm It is possible to further simplify the configuration of the joint portion.
  • the belt is preferably a steel belt made of steel plate. If comprised in this way, it will become possible to suppress dust generation from a belt compared with the case where a belt is a rubber belt.
  • the belt is less elastically deformed than when the belt is a rubber belt. If there is a misalignment, the first pulley will be difficult to rotate properly, but if the support shaft is fixed to the rotating shaft, the axis of the first pulley will coincide with the axis of the rotating shaft. Therefore, even if the belt is a steel belt, the first pulley can be appropriately rotated.
  • the second arm is arranged above the first arm, the rotation shaft is fixed to the lower surface portion on the proximal end side of the second arm, and the upper surface portion on the proximal end side of the second arm is An opening in which the upper end portion of the first pulley is disposed is formed, the upper end of the first pulley is disposed above the upper surface on the proximal end side of the second arm, and the fixing member is on the distal end side of the first arm And a top surface portion connected to the upper end of the side surface portion, the upper surface portion is disposed above the upper surface on the base end side of the second arm, and the upper end of the first pulley is the upper surface It is preferable to be fixed to the part.
  • the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside of the arm is at atmospheric pressure and the inside of the second arm is in a vacuum, the configuration of the joint portion that is the connecting portion between the first arm and the second arm can be simplified. It becomes possible.
  • FIG. 1 It is a top view of the industrial robot concerning an embodiment of the invention. It is a side view of the industrial robot shown in FIG. It is sectional drawing for demonstrating schematic structure of the E section of FIG. It is sectional drawing for demonstrating schematic structure of the F section of FIG. It is an enlarged view of the G section of FIG. It is an enlarged view of the H section of FIG.
  • FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a side view of the industrial robot 1 shown in FIG.
  • FIG. 3 is a cross-sectional view for explaining a schematic configuration of a portion E in FIG.
  • FIG. 4 is a cross-sectional view for explaining a schematic configuration of the F part in FIG. 2.
  • the industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there.
  • the robot 1 is a large robot particularly suitable for transporting a large substrate 2. Further, the robot 1 conveys the substrate 2 in a vacuum.
  • the robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, two arms 6 and 7 each having two hands 4 and 5 rotatably connected to the distal end side, and two pieces.
  • the arm 6 is provided with a common arm 8 to which the base end sides of the arms 6 and 7 are rotatably connected, and a main body 9 to which the common arm 8 is rotatably connected.
  • the common arm 8 of this embodiment is a first arm, and the arms 6 and 7 are second arms.
  • the hand 4 is rotatably connected to the distal end side of the arm 6.
  • the hand 5 is rotatably connected to the distal end side of the arm 7.
  • the hand 4 is disposed below the hand 5.
  • the arm 6 is disposed below the hand 4.
  • the arm 7 is disposed above the hand 5.
  • the common arm 8 is disposed below the arm 6. That is, the arms 6 and 7 are arranged above the common arm 8. Further, the common arm 8 is disposed above the main body portion 9.
  • the main body 9 includes a rotation shaft (not shown) that rotates the common arm 8 with the vertical direction as the axis direction of rotation, a rotation mechanism (not shown) that rotates the rotation shaft, and the rotation An elevating mechanism (not shown) that elevates and lowers the common arm 8 together with the mechanism, and a case body that accommodates the rotating mechanism and elevating mechanism are provided.
  • the case body includes a case main body 11 formed in a bottomed cylindrical shape and a lid body 12 that covers an opening at the upper end of the case main body 11. A through-hole in which a rotation shaft for rotating the common arm 8 is disposed is formed at the center of the lid body 12. Further, the lid body 12 is formed with a flange portion 12 a that extends outward in the radial direction of the case body 11.
  • the robot 1 is a robot for transporting the substrate 2 in a vacuum.
  • the portion of the robot 1 above the lower surface of the flange 12 a is disposed in the vacuum chamber 13. That is, the part of the robot 1 above the lower surface of the flange 12a is disposed in the vacuum region VR (in a vacuum).
  • a portion of the robot 1 below the lower surface of the flange 12a is disposed in the atmospheric region AR (in the atmosphere).
  • the hands 4 and 5 include a plurality of fork portions 15 on which the substrate 2 is mounted.
  • the arms 6 and 7 are formed in a block shape having an elongated oval shape when viewed in the vertical direction and a thin thickness in the vertical direction.
  • the length of the arm 6 and the length of the arm 7 are equal.
  • the arms 6 and 7 are formed in a hollow shape.
  • the insides of the arms 6 and 7 formed in a hollow shape are evacuated.
  • the common arm 8 is formed in a substantially V shape. A central portion of the common arm 8 formed in a substantially V shape is rotatably connected to the main body portion 9.
  • proximal end side of the arm 6 is rotatably connected to one distal end side of the common arm 8 formed in a substantially V shape, and the proximal end side of the arm 7 is rotatable to the other distal end side of the common arm 8. It is connected.
  • the connecting portion between the arm 6 and the common arm 8 is a joint portion 16.
  • a joint portion between the arm 7 and the common arm 8 is a joint portion 17.
  • the robot 1 rotates the hand 4 with respect to the arm 6 and rotates the hand 5 with respect to the arm 7 and a drive mechanism 18 (see FIG. 3) that rotates the arm 6 with respect to the common arm 8.
  • a drive mechanism 19 (see FIG. 4) for rotating the arm 7 with respect to the common arm 8.
  • FIG. 5 is an enlarged view of a portion G in FIG.
  • FIG. 6 is an enlarged view of a portion H in FIG.
  • the common arm 8 includes a base end portion 22 connected to the main body 9, two tip end portions 23 and 24 to which the base end sides of the arms 6 and 7 are respectively connected, and two tip end portions 23 and 24. Are provided with two connecting portions 25 and 26 that connect the base end portion 22 to each other.
  • the common arm 8 is configured by the base end portion 22, the two distal end portions 23 and 24, and the two connecting portions 25 and 26.
  • the proximal end side of the arm 6 is connected to the distal end portion 23, and the proximal end side of the arm 7 is connected to the distal end portion 24.
  • the connecting portion 25 connects the proximal end portion 22 and the distal end portion 23, and the connecting portion 26 connects the proximal end portion 22 and the distal end portion 24.
  • the proximal end portion 22 and the two distal end portions 23 and 24 and the two connecting portions 25 and 26 are formed separately, and the proximal end portion 22 and the two distal end portions 23 and 24 are connected to the two connecting portions.
  • the common arm 8 is configured by fixing and integrating the portions 25 and 26.
  • the base end portion 22, the tip end portions 23 and 24, and the connecting portions 25 and 26 are formed of an aluminum alloy or stainless steel.
  • tip parts 23 and 24, and the connection parts 25 and 26 are formed in the hollow shape. That is, the common arm 8 is formed in a hollow shape.
  • the inside of the common arm 8 is at atmospheric pressure.
  • the base end portion 22 is formed in a block shape having a substantially pentagonal shape when viewed from the vertical direction. At the center of the lower surface of the base end portion 22, the upper end of the rotation shaft of the main body portion 9 is fixed.
  • the tip portions 23 and 24 are formed in a block shape having a substantially rectangular shape when viewed from the vertical direction.
  • the connection parts 25 and 26 are pipes formed in a cylindrical shape, and are formed in an elongated cylindrical shape. The length of the connection parts 25 and 26 is 4 (m), for example.
  • One end of the connecting portion 25 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 25 is fixed to the distal end portion 23 with a screw (not shown).
  • One end of the connecting portion 26 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 26 is fixed to the distal end portion 24 with a screw (not shown). Note that flanges extending outward in the radial direction are formed at both ends of the connecting portions 25 and 26.
  • the drive mechanism 18 includes a motor 30 that rotates the hand 4 relative to the arm 6 and rotates the arm 6 relative to the common arm 8, and a speed reducer 31 that is coupled to the motor 30.
  • the speed reducer 31 includes a rotating shaft 32 serving as an output shaft of the speed reducer 31, a bearing 33 that rotatably supports the rotating shaft 32, and a magnetic fluid seal 34 disposed on the outer peripheral side of the rotating shaft 32. It has.
  • the drive mechanism 18 includes a pulley 36 fixed to the input shaft 35 of the speed reducer 31, a pulley 37 as a first pulley disposed inside the base end side of the arm 6, and an inside of the tip end side of the arm 6. And a pulley 38 as a second pulley disposed at the same position.
  • the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 38 is set to 1: 2 so that the hand 4 moves linearly in a state in which the hand 4 faces a certain direction.
  • the reduction gear 31 is a hollow wave gear device, and is disposed at the joint 16.
  • the speed reducer 31 is a wave attached to the outer peripheral side of the rigid internal gear 41, the flexible external gear 42, and the input shaft 35 in addition to the rotating shaft 32, the bearing 33 and the magnetic fluid seal 34. And a bearing 43.
  • the speed reducer 31 includes a case body 44 that holds the bearing 33 and the magnetic fluid seal 34.
  • the case body 44 is formed in a substantially cylindrical shape as a whole.
  • the upper end portion of the case body 44 is fixed to the upper surface portion of the tip portion 23, and the case body 44 is held by the tip portion 23. That is, the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 23 (that is, one distal end side of the common arm 8) via the case body 44. Further, the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 23.
  • the bearing 33 is a cross roller bearing.
  • the outer ring of the bearing 33 is fixed to the upper end portion of the case body 44.
  • An inner ring of the bearing 33 is fixed to the rotation shaft 32.
  • the rotating shaft 32 is made of a magnetic material. Moreover, the rotating shaft 32 is formed in a hollow shape.
  • a lid 45 that closes the inner peripheral side of the rotation shaft 32 is fixed to the upper end side of the rotation shaft 32.
  • the lid 45 is formed in a disk shape and is fixed to the inner peripheral surface on the upper end side of the rotating shaft 32.
  • a seal member (not shown) such as an O-ring is disposed between the outer peripheral surface of the lid 45 and the inner peripheral surface of the rotation shaft 32.
  • the rotation shaft 32 is fixed to the proximal end side of the arm 6. Specifically, the upper end of the rotation shaft 32 is fixed to the lower surface portion on the proximal end side of the arm 6. The upper end surface of the rotation shaft 32 is in contact with the lower surface on the proximal end side of
  • the magnetic fluid seal 34 includes a plurality of magnets, an annular pole piece disposed so as to sandwich each of the plurality of magnets in the vertical direction, and an inner peripheral surface of the pole piece and an outer peripheral surface of the rotating shaft 32. And a magnetic fluid held in the container.
  • the magnet and pole piece of the magnetic fluid seal 34 are fixed to the inner peripheral surface of the upper end side portion of the case body 44.
  • the magnetic fluid seal 34 is disposed on the upper side of the bearing 33. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 6.
  • the input shaft 35 is formed in a hollow shape.
  • the input shaft 35 is rotatably supported by a lower end side portion of the case body 44 through a bearing.
  • the input shaft 35 is formed with an elliptical portion whose outer peripheral surface is elliptical when viewed from above and below.
  • the rigid internal gear 41 is fixed to the lower end portion of the case body 44. Internal teeth are formed on the inner peripheral surface of the rigid internal gear 41.
  • the upper end portion of the flexible external gear 42 is fixed to the lower end of the rotating shaft 32. External teeth that mesh with the internal teeth of the rigid internal gear 41 are formed on the outer peripheral surface of the lower end portion of the flexible external gear 42.
  • the flexible external gear 42 is rotatable relative to the input shaft 35.
  • the wave bearing 43 is a ball bearing having a flexible inner ring and an outer ring.
  • the wave bearing 43 is disposed along the outer peripheral surface of the elliptical portion of the input shaft 35 and is bent in an elliptical shape.
  • the lower end portion of the flexible external gear 42 where the external teeth are formed is disposed on the outer peripheral side of the wave bearing 43 so as to surround the wave bearing 43, and this portion is bent in an elliptical shape.
  • the external teeth of the flexible external gear 42 mesh with the internal teeth of the rigid internal gear 41 at two locations in the major axis direction of the lower end portion of the flexible external gear 42 that bends in an elliptical shape. .
  • the motor 30 is fixed to the tip 23. Further, the motor 30 is disposed inside the distal end portion 23 and is disposed closer to the connecting portion 25 than the speed reducer 31.
  • a pulley 46 is fixed to the output shaft of the motor 30.
  • the pulley 36 is fixed to the lower end of the input shaft 35.
  • a belt 47 is stretched between the pulley 36 and the pulley 46.
  • the belt 47 is a rubber belt. The pulleys 36 and 46 and the belt 47 are disposed inside the tip portion 23.
  • a support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 6.
  • the support shaft 50 is formed in a cylindrical shape with a flange having a flange portion 50a at the lower end. Further, the support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 6 and is disposed so as to rise from the lower surface portion of the arm 6.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion on the proximal end side of the arm 6 are fixed to each other by a screw 51 disposed inside the proximal end side of the arm 6.
  • an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion and the flange portion 50 a of the base end side of the arm 6, and the screw 51 is engaged with the upper end surface of the rotating shaft 32. Screw holes are formed. That is, the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 6 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 32. It is fixed to.
  • the screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 6 and fixes the support shaft 50 to the rotation shaft 32.
  • the support shaft 50 is fixed to the rotation shaft 32 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other.
  • the pulley 37 is rotatably supported on the support shaft 50 via a bearing.
  • the pulley 37 is fixed to the distal end portion 23 via a fixing member 53. That is, the pulley 37 is fixed to one tip side of the common arm 8 via the fixing member 53.
  • the fixing member 53 is disposed outside the arm 6 and the common arm 8. Further, the fixing member 53 is disposed outside the joint portion 16.
  • the fixing member 53 includes a side surface portion 53a that is fixed to the outer surface on one tip side of the common arm 8, and an upper surface portion 53b that is connected to the upper end of the side surface portion 53a.
  • the side surface portion 53a and the upper surface portion 53b are formed in a flat plate shape.
  • the lower end side of the side surface portion 53a is fixed to one end surface of the common arm 8. That is, the fixing member 53 is fixed to the outer surface on the one end side of the common arm 8. Further, the side surface portion 53 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 16.
  • the upper surface portion 53b is fixed to the upper end of the side surface portion 53a.
  • the upper surface portion 53b is disposed so that the thickness direction of the upper surface portion 53b matches the vertical direction.
  • the upper surface portion 53 b is disposed above the upper surface on the base end side of the arm 6. Specifically, the upper surface portion 53 b is disposed slightly above the upper surface on the proximal end side of the arm 6.
  • the side surface portion 53a and the upper surface portion 53b formed separately are fixed to each other, but the side surface portion 53a and the upper surface portion 53b may be integrally formed.
  • an opening 6 a in which the upper end side portion of the pulley 37 is disposed is formed on the upper surface portion of the base end side of the arm 6.
  • the upper end of the pulley 37 is arranged above the upper surface of the arm 6 on the base end side. Specifically, the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 6.
  • the upper end of the pulley 37 is fixed to the upper surface portion 53b. That is, the pulley 37 is fixed to the fixing member 53.
  • the upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 53b.
  • a support shaft 58 that rotatably supports the pulley 38 is fixed inside the arm 6.
  • the support shaft 58 rises from the lower surface portion on the distal end side of the arm 6.
  • the pulley 38 is rotatably supported on the support shaft 58 via a bearing. Further, the base end side of the hand 4 is fixed to the upper end of the pulley 38.
  • a belt 60 is stretched between the pulley 37 and the pulley 38. In this embodiment, two belts 60 arranged so as to overlap in the vertical direction are stretched over the pulley 37 and the pulley 38.
  • the belt 60 is a steel belt made of steel plate. The belt 60 is fixed to the pulleys 37 and 38 by screws not shown.
  • the drive mechanism 19 is configured in substantially the same manner as the drive mechanism 18. Therefore, in the following description of the drive mechanism 19, differences between the drive mechanism 18 and the drive mechanism 19 will be mainly described.
  • the drive mechanism 19 includes a motor 30 that rotates the hand 5 with respect to the arm 7 and rotates the arm 7 with respect to the common arm 8, and a speed reducer 31 that is coupled to the motor 30.
  • the drive mechanism 19 includes a pulley 36 that is fixed to the input shaft 35 of the speed reducer 31, a pulley 37 that serves as a first pulley disposed inside the base end of the arm 7, and an internal portion on the distal end side of the arm 7. And a pulley 78 as a second pulley disposed at the same position.
  • the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 78 is set to 1: 2 so that the hand 5 moves linearly in a state in which the hand 5 faces in a certain direction.
  • the speed reducer 31 of the drive mechanism 19 is disposed at the joint portion 17.
  • the upper end portion of the case body 44 of the speed reducer 31 is fixed to the upper surface portion of the distal end portion 24, and the case body 44 is held by the distal end portion 24.
  • the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 24 (that is, the other distal end side of the common arm 8) via the case body 44.
  • the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 24. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 7.
  • the lower end of the rotating shaft 79 formed in a hollow shape is fixed to the upper end of the rotating shaft 32.
  • the rotation shaft 79 is fixed to the rotation shaft 32 so that the axis of the rotation shaft 32 coincides with the axis of the rotation shaft 79.
  • the rotation shaft 79 is fixed to the proximal end side of the arm 7.
  • the upper end of the rotation shaft 79 is fixed to the lower surface portion on the proximal end side of the arm 7. That is, the rotation shaft 32 is fixed to the proximal end side of the arm 7 via the rotation shaft 79.
  • the upper end surface of the rotation shaft 79 is in contact with the lower surface on the proximal end side of the arm 7.
  • the rotation shaft 32 and the rotation shaft 79 may be integrally formed.
  • the motor 30 is fixed to the distal end portion 24.
  • the motor 30 is disposed inside the distal end portion 24 and is disposed closer to the connecting portion 26 than the speed reducer 31.
  • the pulleys 36 and 46 and the belt 47 are disposed inside the distal end portion 24.
  • a support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 7.
  • the support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 7 and is disposed so as to rise from the lower surface portion of the arm 7.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the screw 51 disposed inside the base end side of the arm 7.
  • an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion of the base end side of the arm 7 and the flange portion 50 a, and the screw 51 engages with the upper end surface of the rotating shaft 79. Screw holes are formed.
  • the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 7 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 79. And is fixed to the rotation shaft 32 via the rotation shaft 79.
  • the screw 51 fixes the rotation shaft 79 to the proximal end side of the arm 7 and fixes the support shaft 50 to the rotation shaft 79. That is, the screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 7 via the rotation shaft 79 and also fixes the support shaft 50 to the rotation shaft 32 via the rotation shaft 79.
  • the support shaft 50 is fixed to the rotation shaft 79 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide with each other.
  • the pulley 37 disposed inside the proximal end of the arm 7 is fixed to the distal end portion 24 via a fixing member 83. That is, the pulley 37 is fixed to the other tip side of the common arm 8 via the fixing member 83.
  • the fixing member 83 is disposed outside the arm 7 and the common arm 8.
  • the fixing member 83 is disposed outside the joint portion 17.
  • the fixing member 83 includes a side surface portion 83a fixed to the outer surface on the other tip side of the common arm 8, and an upper surface portion 83b connected to the upper end of the side surface portion 83a.
  • the side surface portion 83a and the upper surface portion 83b are formed in a flat plate shape.
  • the lower end side of the side part 83a is fixed to the other end face of the common arm 8. That is, the fixing member 83 is fixed to the outer surface of the other distal end side of the common arm 8. Further, the side surface portion 83 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 17.
  • the upper surface portion 83b is fixed to the upper end of the side surface portion 83a.
  • the upper surface portion 83b is disposed so that the thickness direction of the upper surface portion 83b and the vertical direction coincide with each other. Further, the upper surface portion 83 b is disposed above the upper surface on the proximal end side of the arm 7.
  • the upper surface portion 83 b is disposed slightly above the upper surface on the proximal end side of the arm 7.
  • the side surface portion 83a and the upper surface portion 83b formed separately are fixed to each other, but the side surface portion 83a and the upper surface portion 83b may be integrally formed.
  • an opening 7 a in which the upper end portion of the pulley 37 is disposed is formed in the upper surface portion of the base end side of the arm 7.
  • the upper end of the pulley 37 is disposed above the upper surface on the proximal end side of the arm 7.
  • the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 7.
  • the upper end of the pulley 37 is fixed to the upper surface portion 83b. That is, the pulley 37 is fixed to the fixing member 83.
  • the upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 83b.
  • a support shaft portion 7 b that rotatably supports the pulley 78 is formed inside the arm 7 on the tip side.
  • the support shaft portion 7 b is formed in a cylindrical shape and rises from the lower surface portion on the distal end side of the arm 7.
  • the pulley 78 is rotatably supported by the support shaft portion 7b via a bearing. Further, the base end side of the hand 5 is fixed to the lower end of the pulley 78.
  • Two belts 60 are arranged between the pulley 37 and the pulley 78 so as to overlap in the vertical direction. The belt 60 is fixed to the pulleys 37 and 78 by screws not shown.
  • the pulley 37 disposed on the proximal end side of the arm 6 is fixed to one distal end side of the common arm 8 via the fixing member 53, and the fixing member 53 is a joint Arranged outside the portion 16.
  • the pulley 37 disposed on the proximal end side of the arm 7 is fixed to the other distal end side of the common arm 8 via the fixing member 83, and the fixing member 83 is outside the joint portion 17. Is arranged. That is, in this embodiment, a member such as a shaft that rotates relative to the rotation shaft 32 together with the pulley 37 is not disposed on the inner peripheral side of the rotation shaft 32.
  • the support shaft 50 on which the pulley 37 is rotatably supported is fixed to the rotation shaft 32. Therefore, in this embodiment, the axis of the support shaft 50 and the axis of the rotary shaft 32 can be easily matched, and as a result, the axis of the pulley 37 and the axis of the rotary shaft 32 can be easily matched. Therefore, in this embodiment, even if the pulley 37 is fixed to the distal end side of the common arm 8 via the fixing members 53 and 83, the pulley 37 can be appropriately rotated.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by a common screw 51. Therefore, in this embodiment, the joint is compared with the case where the screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and the screw for fixing the support shaft 50 to the rotation shaft 32 are provided individually.
  • the configuration of the unit 16 can be simplified.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51, the rotation shaft 79 is fixed to the base end of the arm 7.
  • the configuration of the joint portion 17 can be simplified as compared with the case where the screw for fixing the support shaft 50 to the side and the screw for fixing the support shaft 50 to the rotation shaft 79 are provided separately.
  • the belt 60 is a steel belt. Therefore, in this embodiment, it is possible to suppress dust generation from the belt 60 as compared with the case where the belt 60 is a rubber belt.
  • the belt 60 is less likely to be elastically deformed than when the belt 60 is a rubber belt. If there is a misalignment, the pulley 37 is difficult to rotate properly, but in this embodiment, the axis of the pulley 37 and the axis of the rotating shaft 32 are easily aligned, so the belt 60 is a steel belt. Even so, the pulley 37 can be appropriately rotated.
  • the fixing member 53 is fixed to the upper end of the side surface portion 53 a and the flat side surface portion 53 a fixed to one distal end surface of the common arm 8, and above the upper surface on the proximal end side of the arm 6. It is comprised by the flat upper surface part 53b arrange
  • the fixing member 83 is fixed to the upper end of the side surface portion 83a and the flat side surface portion 83a fixed to the other distal end surface of the common arm 8, and the upper surface on the proximal end side of the arm 7 Since the flat upper surface portion 83 b is arranged on the upper side, it is easy to prevent interference between the base end side of the arm 7 and the fixing member 83.
  • the upper end of the rotation shaft 32 rotatably held on one distal end side of the common arm 8 via the bearing 33 is fixed to the lower surface portion on the proximal end side of the arm 6, and
  • An upper end of a pulley 37 that is rotatably supported by a support shaft 50 disposed inside the base end side is fixed to an upper surface portion 53 b of a fixing member 53 that is fixed to one distal end side of the common arm 8. . That is, in this embodiment, the proximal end side of the arm 6 is supported from both sides in the vertical direction by the rotating shaft 32 and the upper surface portion 53b. Therefore, in this embodiment, the operation of the arm 6 can be stabilized.
  • the upper ends of the rotation shafts 32 and 79 that are rotatably held on the other distal end side of the common arm 8 via the bearing 33 are fixed to the lower surface portion on the proximal end side of the arm 7.
  • the upper end of the pulley 37 rotatably supported by the support shaft 50 disposed inside the base end side of the arm 7 is attached to the upper surface portion 83b of the fixing member 83 fixed to the other distal end side of the common arm 8. It is fixed. That is, in this embodiment, the base end side of the arm 7 is supported from both sides in the vertical direction by the rotation shafts 32 and 79 and the upper surface portion 83b. Therefore, in this embodiment, the operation of the arm 7 can be stabilized.
  • the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by the common screw 51, but the rotation shaft 32 is attached to the base end side of the arm 6.
  • a screw for fixing and a screw for fixing the support shaft 50 to the rotating shaft 32 may be provided individually.
  • the support shaft 50 may be fixed to the rotation shaft 32 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 32 are in contact with each other.
  • the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51.
  • a screw for fixing the shaft 79 and a screw for fixing the support shaft 50 to the rotation shaft 79 may be provided separately.
  • the support shaft 50 may be fixed to the rotation shaft 79 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 79 are in contact with each other.
  • the support shaft 50 is fixed to the rotating shaft 32, but the support shaft 50 may be fixed to the lower surface portion of the base end side of the arm 6.
  • a screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and a screw for fixing the support shaft 50 to the proximal end side of the arm 6 are individually provided.
  • the support shaft 50 is fixed to the base end side of the arm 6 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other.
  • a support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 6.
  • a support shaft is formed inside the base end side of the arm 6 so that the axis of the support shaft and the axis of the rotation shaft 32 coincide with each other.
  • the support shaft 50 may be fixed to the lower surface portion on the proximal end side of the arm 7.
  • a screw for fixing the rotation shaft 79 to the base end side of the arm 7 and a screw for fixing the support shaft 50 to the base end side of the arm 7 are individually provided.
  • the support shaft 50 is fixed to the base end side of the arm 7 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide.
  • a support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 7.
  • the support shaft is formed inside the base end side of the arm 7 so that the axis of the support shaft, the axis of the rotation shaft 79 and the axis of the rotation shaft 32 coincide with each other.
  • the side surface portion 53a of the fixing member 53 is fixed to one of the front end surfaces of the common arm 8, but the side surface portion 53a may be fixed to the upper surface of the front end portion 23.
  • the side surface portion 83 a of the fixing member 83 is fixed to the other tip surface of the common arm 8, but the side surface portion 83 a may be fixed to the upper surface of the tip portion 24.
  • the belt 60 is a steel belt, but the belt 60 may be a rubber belt.
  • one arm 6 is disposed between the hand 4 and the common arm 8
  • one arm 7 is disposed between the hand 5 and the common arm 8.
  • Two or more arms may be disposed between the common arm 8 and the common arm 8.
  • the common arm 8 is formed in the substantially V shape
  • the common arm 8 may be formed in linear form.
  • the robot 1 includes the common arm 8 to which the two arms 6 and 7 are rotatably connected.
  • the robot 1 is replaced with the single arm 8 instead of the common arm 8. 6 or the arm 7 may be provided so as to be pivotally connected to the distal end side, and the base end side may be pivotally connected to the main body 9.
  • the object to be transported by the robot 1 is a glass substrate for a liquid crystal display, but the object to be transported by the robot 1 is a glass substrate for an organic EL (organic electroluminescence) display. It may be a semiconductor wafer or the like.

Abstract

An industrial robot that comprises: a second arm 6 that is rotatably coupled to a first arm; a rotary shaft 32 that is fixed to a base end side of the second arm 6; a bearing 33 that rotatably supports the rotary shaft 32 and that is held at a tip end side of the first arm; a magnetic fluid seal 34 that is arranged at an outer circumferential side of the rotary shaft 32 and that is held at the tip end side of the first arm; a support shaft 50 that is arranged inside the base end side of the second arm 6 and that is fixed to the rotary shaft 32; a pulley 37 that is arranged at the base end side of the second arm 6 and that is rotatably supported by the support shaft 50; and a fixing member 53 that has the pulley 37 fixed thereto and that is fixed to an outside surface of the tip end side of the first arm. The industrial robot thereby makes it possible to simplify the configuration of a joint part that couples the first arm and the second arm.

Description

産業用ロボットIndustrial robot
　本発明は、真空中で搬送対象物を搬送する産業用ロボットに関する。 The present invention relates to an industrial robot that transports an object to be transported in a vacuum.
　従来、真空中で、有機ＥＬディスプレイ用のガラス基板を搬送する産業用ロボットが知られている（たとえば、特許文献１参照）。特許文献１に記載の産業用ロボットは、本体部と、本体部に基端側が回動可能に連結される第１アームと、第１アームの先端側に基端側が回動可能に連結される第２アームと、第２アームの先端側に回動可能に連結されるハンドとを備えている。第１アームおよび第２アームは、中空状に形成されている。ハンド、第１アームおよび第２アームは、内部が真空となっているチャンバーの中に配置されており、中空状に形成される第２アームの内部は真空となっている。一方、中空状に形成される第１アームの内部は、大気圧となっている。 Conventionally, an industrial robot that transports a glass substrate for an organic EL display in a vacuum is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a main body portion, a first arm whose base end side is rotatably connected to the main body portion, and a base end side rotatably connected to the distal end side of the first arm. A second arm and a hand rotatably connected to the distal end side of the second arm are provided. The first arm and the second arm are formed in a hollow shape. The hand, the first arm, and the second arm are disposed in a chamber whose inside is vacuum, and the inside of the second arm formed in a hollow shape is vacuum. On the other hand, the inside of the first arm formed in a hollow shape is at atmospheric pressure.
　また、特許文献１に記載の産業用ロボットは、第１アームに対して第２アームを回動させるための第１モータと、第２アームに対してハンドを回動させるための第２モータと、第１モータの動力を減速して第２アームに伝達する第１減速機と、第２モータの動力を減速してハンドに伝達する第２減速機とを備えている。第１減速機と第２減速機とは、径方向の中心に貫通孔が形成された中空減速機であり、第１アームと第２アームとの連結部である関節部において、上下方向で重なるように配置されている。 The industrial robot described in Patent Document 1 includes a first motor for rotating the second arm with respect to the first arm, and a second motor for rotating the hand with respect to the second arm. , A first speed reducer that decelerates the power of the first motor and transmits it to the second arm, and a second speed reducer that decelerates the power of the second motor and transmits it to the hand. The first speed reducer and the second speed reducer are hollow speed reducers in which a through hole is formed at the center in the radial direction, and overlap in the vertical direction at a joint portion that is a connecting portion between the first arm and the second arm. Are arranged as follows.
　特許文献１に記載の産業用ロボットでは、中空状に形成される第１減速機の出力軸が第２アームの基端側に固定されている。第２減速機の出力軸には、第１減速機の出力軸の内周側に配置される中空回動軸が固定され、中空回動軸には、第２アームの基端側の内部に配置される基端側プーリが固定されている。また、第２アームの先端側の内部には、ハンドが固定される先端側プーリが配置されており、基端側プーリと先端側プーリとにはベルトが架け渡されている。中空回動軸の外周側（具体的には、中空回動軸と第１減速機の出力軸との間）には、第２アームの内部の真空領域への空気の流入を防止する磁性流体シールが配置され、第１減速機の出力軸の外周側（具体的には、第１減速機の出力軸と第１減速機のケース体との間）には、第１アームおよび第２アームの外部の真空領域への空気の流入を防止する磁性流体シールが配置されている。 In the industrial robot described in Patent Document 1, the output shaft of the first reduction gear formed in a hollow shape is fixed to the base end side of the second arm. A hollow rotating shaft disposed on the inner peripheral side of the output shaft of the first speed reducer is fixed to the output shaft of the second speed reducer, and the hollow rotating shaft is disposed inside the base end side of the second arm. The arranged proximal pulley is fixed. A distal pulley on which the hand is fixed is disposed inside the distal end of the second arm, and a belt is bridged between the proximal pulley and the distal pulley. A magnetic fluid that prevents inflow of air into the vacuum region inside the second arm on the outer peripheral side of the hollow rotation shaft (specifically, between the hollow rotation shaft and the output shaft of the first reduction gear) The first arm and the second arm are disposed on the outer peripheral side of the output shaft of the first reducer (specifically, between the output shaft of the first reducer and the case body of the first reducer). A magnetic fluid seal is arranged to prevent the inflow of air into the vacuum area outside the.
特開２０１４－３４１０６号公報JP 2014-34106 A
　特許文献１に記載の産業用ロボットにおいて、第２アームとハンドとを個別に回動させる必要がなく第２アームおよびハンドを第１モータで一緒に回動させれば良い場合には、第２モータおよび第２減速機を取り外して、中空回動軸を第１アームの基端側の内部に固定すれば良い。しかしながら、この場合には、第１減速機の出力軸に対して相対回動する中空回動軸が第１減速機の出力軸の内周側に配置されるため、第１減速機の出力軸の外周側に磁性流体シールを配置するのに加えて、第１減速機の出力軸の内周側にも磁性流体シールを配置しなければならない。したがって、この場合には、第１アームと第２アームとの連結部である関節部の構造が複雑になる。 In the industrial robot described in Patent Document 1, it is not necessary to individually rotate the second arm and the hand, and the second arm and the hand may be rotated together by the first motor. What is necessary is just to remove a motor and a 2nd reduction gear, and to fix a hollow rotating shaft inside the base end side of a 1st arm. However, in this case, since the hollow rotation shaft that rotates relative to the output shaft of the first speed reducer is disposed on the inner peripheral side of the output shaft of the first speed reducer, the output shaft of the first speed reducer In addition to disposing a magnetic fluid seal on the outer peripheral side of the first magnetic reducer, a magnetic fluid seal must also be disposed on the inner peripheral side of the output shaft of the first reduction gear. Therefore, in this case, the structure of the joint part that is the connecting part between the first arm and the second arm is complicated.
　そこで、本発明の課題は、回動可能に連結される第１アームと第２アームとを備える産業用ロボットにおいて、第１アームおよび第２アームが真空中に配置されるとともに、第１アームの内部が大気圧となっており、第２アームの内部が真空となっている場合であっても、第１アームと第２アームとの連結部である関節部の構成を簡素化することが可能な産業用ロボットを提供することにある。 Accordingly, an object of the present invention is to provide an industrial robot including a first arm and a second arm that are rotatably connected, and the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside is at atmospheric pressure and the inside of the second arm is vacuum, it is possible to simplify the configuration of the joint part that is the connecting part between the first arm and the second arm. Is to provide a simple industrial robot.
　上記の課題を解決するため、本発明の産業用ロボットは、第１アームと、中空状に形成され第１アームの先端側に基端側が回動可能に連結される第２アームと、第２アームの基端側に固定される回動軸と、回動軸を回動可能に支持するとともに第１アームの先端側に保持される軸受と、回動軸の外周側に配置されるとともに第１アームの先端側に保持される磁性流体シールと、第２アームの基端側の内部に配置され第２アームの基端側に固定または形成されるかあるいは回動軸に固定される支持軸と、第２アームの基端側に配置され支持軸に回動可能に支持される第１プーリと、第２アームの先端側に配置される第２プーリと、第１プーリと第２プーリとに架け渡されるベルトと、第１プーリが固定されるとともに第１アームの先端側の外側面に固定される固定部材とを備えることを特徴とする。 In order to solve the above-described problems, an industrial robot of the present invention includes a first arm, a second arm that is formed in a hollow shape, and a base end side of which is pivotally connected to a distal end side of the first arm, and a second arm. A pivot shaft fixed to the base end side of the arm, a bearing that rotatably supports the pivot shaft, and held on the distal end side of the first arm; A magnetic fluid seal held on the distal end side of one arm, and a support shaft disposed inside the proximal end side of the second arm and fixed or formed on the proximal end side of the second arm, or fixed to the rotating shaft A first pulley disposed on the base end side of the second arm and rotatably supported by the support shaft; a second pulley disposed on the distal end side of the second arm; a first pulley and a second pulley; A belt spanning the belt, a first pulley is fixed, and an outer end of the first arm Characterized in that it comprises a fixing member fixed to the surface.
　本発明の産業用ロボットでは、第２アームの基端側に配置される第１プーリが固定部材に固定されており、固定部材は第１アームの先端側の外側面に固定されている。そのため、本発明では、第１プーリと一緒に回動軸に対して相対回動する軸等の部材を回動軸の内周側に配置する必要がなく、その結果、回動軸の内周側に磁性流体シールを配置する必要がない。したがって、本発明では、第１アームおよび第２アームが真空中に配置されるとともに、第１アームの内部が大気圧となっており、かつ、第２アームの内部が真空となっている場合であっても、第１アームと第２アームとの連結部である関節部の構成を簡素化することが可能になる。 In the industrial robot of the present invention, the first pulley disposed on the base end side of the second arm is fixed to the fixing member, and the fixing member is fixed to the outer surface on the distal end side of the first arm. Therefore, in the present invention, it is not necessary to arrange a member such as a shaft that rotates relative to the rotation shaft together with the first pulley on the inner peripheral side of the rotation shaft. There is no need to place a magnetic fluid seal on the side. Therefore, in the present invention, the first arm and the second arm are arranged in a vacuum, the inside of the first arm is at atmospheric pressure, and the inside of the second arm is in a vacuum. Even if it exists, it becomes possible to simplify the structure of the joint part which is a connection part of a 1st arm and a 2nd arm.
　本発明において、支持軸は、回動軸に固定されていることが好ましい。このように構成すると、支持軸の軸心と回動軸の軸心とを一致させやすくなるため、支持軸に回動可能に支持される第１プーリの軸心と回動軸の軸心とを一致させやすくなる。したがって、第１アームの先端側の外側面に固定される固定部材を介して第１プーリが第１アームの先端側に固定されていても、第１プーリを適切に回動させることが可能になる。 In the present invention, the support shaft is preferably fixed to the rotating shaft. If comprised in this way, since it becomes easy to make the shaft center of a support shaft and the shaft center of a rotation shaft correspond, the shaft center of the 1st pulley supported by the support shaft so that rotation is possible, and the shaft center of a rotation shaft, Makes it easier to match. Therefore, even if the first pulley is fixed to the front end side of the first arm via the fixing member fixed to the outer surface on the front end side of the first arm, the first pulley can be appropriately rotated. Become.
　本発明において、産業用ロボットは、回動軸を第２アームの基端側に固定するとともに、支持軸を回動軸に固定するネジを備えることが好ましい。このように構成すると、共通のネジによって、第２アームの基端側に回動軸が固定されるとともに回動軸に支持軸が固定されるため、第１アームと第２アームとの連結部である関節部の構成をより簡素化することが可能になる。 In the present invention, the industrial robot preferably includes a screw for fixing the rotation shaft to the proximal end side of the second arm and fixing the support shaft to the rotation shaft. If comprised in this way, since a rotating shaft is fixed to the base end side of a 2nd arm and a support shaft is fixed to a rotating shaft with a common screw, the connection part of a 1st arm and a 2nd arm It is possible to further simplify the configuration of the joint portion.
　本発明において、ベルトは、鋼板製のスチールベルトであることが好ましい。このように構成すると、ベルトがゴム製のベルトである場合と比較して、ベルトからの発塵を抑制することが可能になる。一方で、ベルトがスチールベルトである場合には、ベルトがゴム製のベルトである場合と比較して、ベルトが弾性変形しにくいため、第１プーリの軸心と回動軸の軸心とにずれがあると、第１プーリが適切に回動しにくくなりやすいが、支持軸が回動軸に固定されている場合には、第１プーリの軸心と回動軸の軸心とを一致させやすくなるため、ベルトがスチールベルトであっても、第１プーリを適切に回動させることが可能になる。 In the present invention, the belt is preferably a steel belt made of steel plate. If comprised in this way, it will become possible to suppress dust generation from a belt compared with the case where a belt is a rubber belt. On the other hand, when the belt is a steel belt, the belt is less elastically deformed than when the belt is a rubber belt. If there is a misalignment, the first pulley will be difficult to rotate properly, but if the support shaft is fixed to the rotating shaft, the axis of the first pulley will coincide with the axis of the rotating shaft. Therefore, even if the belt is a steel belt, the first pulley can be appropriately rotated.
　本発明において、第２アームは、第１アームよりも上側に配置され、第２アームの基端側の下面部に回動軸が固定され、第２アームの基端側の上面部分には、第１プーリの上端側部分が配置される開口部が形成され、第１プーリの上端は、第２アームの基端側の上面よりも上側に配置され、固定部材は、第１アームの先端側の外側に固定される側面部と、側面部の上端に繋がる上面部とを備え、上面部は、第２アームの基端側の上面よりも上側に配置され、第１プーリの上端は、上面部に固定されていることが好ましい。このように構成すると、第２アームの基端側と固定部材との干渉を防止しやすくなる。また、このように構成すると、回動軸と上面部とによって上下方向の両側から第２アームの基端側が支持されるため、第２アームの動作を安定させることが可能になる。 In the present invention, the second arm is arranged above the first arm, the rotation shaft is fixed to the lower surface portion on the proximal end side of the second arm, and the upper surface portion on the proximal end side of the second arm is An opening in which the upper end portion of the first pulley is disposed is formed, the upper end of the first pulley is disposed above the upper surface on the proximal end side of the second arm, and the fixing member is on the distal end side of the first arm And a top surface portion connected to the upper end of the side surface portion, the upper surface portion is disposed above the upper surface on the base end side of the second arm, and the upper end of the first pulley is the upper surface It is preferable to be fixed to the part. If comprised in this way, it will become easy to prevent interference with the base end side of a 2nd arm, and a fixing member. Also, with this configuration, since the base end side of the second arm is supported from both sides in the vertical direction by the rotation shaft and the upper surface portion, the operation of the second arm can be stabilized.
　以上のように、本発明では、回動可能に連結される第１アームと第２アームとを備える産業用ロボットにおいて、第１アームおよび第２アームが真空中に配置されるとともに、第１アームの内部が大気圧となっており、第２アームの内部が真空となっている場合であっても、第１アームと第２アームとの連結部である関節部の構成を簡素化することが可能になる。 As described above, according to the present invention, in the industrial robot including the first arm and the second arm that are rotatably connected, the first arm and the second arm are disposed in a vacuum, and the first arm Even when the inside of the arm is at atmospheric pressure and the inside of the second arm is in a vacuum, the configuration of the joint portion that is the connecting portion between the first arm and the second arm can be simplified. It becomes possible.
本発明の実施の形態にかかる産業用ロボットの平面図である。It is a top view of the industrial robot concerning an embodiment of the invention. 図１に示す産業用ロボットの側面図である。It is a side view of the industrial robot shown in FIG. 図２のＥ部の概略構成を説明するための断面図である。It is sectional drawing for demonstrating schematic structure of the E section of FIG. 図２のＦ部の概略構成を説明するための断面図である。It is sectional drawing for demonstrating schematic structure of the F section of FIG. 図３のＧ部の拡大図である。It is an enlarged view of the G section of FIG. 図４のＨ部の拡大図である。It is an enlarged view of the H section of FIG.
　以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（産業用ロボットの全体構成）
　図１は、本発明の実施の形態にかかる産業用ロボット１の平面図である。図２は、図１に示す産業用ロボット１の側面図である。図３は、図２のＥ部の概略構成を説明するための断面図である。図４は、図２のＦ部の概略構成を説明するための断面図である。 (Overall configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view of the industrial robot 1 shown in FIG. FIG. 3 is a cross-sectional view for explaining a schematic configuration of a portion E in FIG. FIG. 4 is a cross-sectional view for explaining a schematic configuration of the F part in FIG. 2.
　本形態の産業用ロボット１（以下、「ロボット１」とする。）は、搬送対象物である液晶ディスプレイ用のガラス基板２（以下、「基板２」とする。）を搬送するためのロボットである。このロボット１は、特に大型の基板２の搬送に適した大型のロボットである。また、ロボット１は、真空中で基板２を搬送する。ロボット１は、基板２が搭載される２個のハンド４、５と、２個のハンド４、５のそれぞれが先端側に回動可能に連結される２個のアーム６、７と、２個のアーム６、７の基端側が回動可能に連結される共通アーム８と、共通アーム８が回動可能に連結される本体部９とを備えている。本形態の共通アーム８は、第１アームであり、アーム６、７は、第２アームである。 The industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there. The robot 1 is a large robot particularly suitable for transporting a large substrate 2. Further, the robot 1 conveys the substrate 2 in a vacuum. The robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, two arms 6 and 7 each having two hands 4 and 5 rotatably connected to the distal end side, and two pieces. The arm 6 is provided with a common arm 8 to which the base end sides of the arms 6 and 7 are rotatably connected, and a main body 9 to which the common arm 8 is rotatably connected. The common arm 8 of this embodiment is a first arm, and the arms 6 and 7 are second arms.
　図２に示すように、ハンド４は、アーム６の先端側に回動可能に連結されている。ハンド５は、アーム７の先端側に回動可能に連結されている。ハンド４は、ハンド５よりも下側に配置されている。アーム６は、ハンド４よりも下側に配置されている。アーム７は、ハンド５よりも上側に配置されている。共通アーム８は、アーム６よりも下側に配置されている。すなわち、アーム６、７は、共通アーム８よりも上側に配置されている。また、共通アーム８は、本体部９よりも上側に配置されている。 As shown in FIG. 2, the hand 4 is rotatably connected to the distal end side of the arm 6. The hand 5 is rotatably connected to the distal end side of the arm 7. The hand 4 is disposed below the hand 5. The arm 6 is disposed below the hand 4. The arm 7 is disposed above the hand 5. The common arm 8 is disposed below the arm 6. That is, the arms 6 and 7 are arranged above the common arm 8. Further, the common arm 8 is disposed above the main body portion 9.
　本体部９は、上下方向を回動の軸方向として共通アーム８を回動させる回動軸（図示省略）と、この回動軸を回動させる回動機構（図示省略）と、この回動機構と一緒に共通アーム８を昇降させる昇降機構（図示省略）と、回動機構や昇降機構が収容されるケース体とを備えている。このケース体は、有底円筒状に形成されるケース本体１１と、ケース本体１１の上端の開口を覆う蓋体１２とから構成されている。蓋体１２の中心には、共通アーム８を回動させる回動軸が配置される貫通孔が形成されている。また、蓋体１２には、ケース本体１１の径方向の外側に広がる鍔部１２ａが形成されている。 The main body 9 includes a rotation shaft (not shown) that rotates the common arm 8 with the vertical direction as the axis direction of rotation, a rotation mechanism (not shown) that rotates the rotation shaft, and the rotation An elevating mechanism (not shown) that elevates and lowers the common arm 8 together with the mechanism, and a case body that accommodates the rotating mechanism and elevating mechanism are provided. The case body includes a case main body 11 formed in a bottomed cylindrical shape and a lid body 12 that covers an opening at the upper end of the case main body 11. A through-hole in which a rotation shaft for rotating the common arm 8 is disposed is formed at the center of the lid body 12. Further, the lid body 12 is formed with a flange portion 12 a that extends outward in the radial direction of the case body 11.
　上述のように、ロボット１は、真空中で基板２を搬送するためのロボットである。図２に示すように、ロボット１の、鍔部１２ａの下面よりも上側の部分は、真空チャンバー１３の中に配置されている。すなわち、ロボット１の、鍔部１２ａの下面よりも上側の部分は、真空領域ＶＲの中（真空中）に配置されている。一方、ロボット１の、鍔部１２ａの下面よりも下側の部分は、大気領域ＡＲの中（大気中）に配置されている。 As described above, the robot 1 is a robot for transporting the substrate 2 in a vacuum. As shown in FIG. 2, the portion of the robot 1 above the lower surface of the flange 12 a is disposed in the vacuum chamber 13. That is, the part of the robot 1 above the lower surface of the flange 12a is disposed in the vacuum region VR (in a vacuum). On the other hand, a portion of the robot 1 below the lower surface of the flange 12a is disposed in the atmospheric region AR (in the atmosphere).
　ハンド４、５は、基板２が搭載される複数のフォーク部１５を備えている。アーム６、７は、上下方向から見たときの形状が細長い長円形状となるとともに上下方向の厚さが薄いブロック状に形成されている。アーム６の長さとアーム７の長さとは等しくなっている。また、アーム６、７は、中空状に形成されている。中空状に形成されるアーム６、７の内部は真空となっている。共通アーム８は、略Ｖ形状に形成されている。略Ｖ形状に形成される共通アーム８の中心部分は、本体部９に回動可能に連結されている。また、略Ｖ形状に形成される共通アーム８の一方の先端側にアーム６の基端側が回動可能に連結され、共通アーム８の他方の先端側にアーム７の基端側が回動可能に連結されている。 The hands 4 and 5 include a plurality of fork portions 15 on which the substrate 2 is mounted. The arms 6 and 7 are formed in a block shape having an elongated oval shape when viewed in the vertical direction and a thin thickness in the vertical direction. The length of the arm 6 and the length of the arm 7 are equal. The arms 6 and 7 are formed in a hollow shape. The insides of the arms 6 and 7 formed in a hollow shape are evacuated. The common arm 8 is formed in a substantially V shape. A central portion of the common arm 8 formed in a substantially V shape is rotatably connected to the main body portion 9. Further, the proximal end side of the arm 6 is rotatably connected to one distal end side of the common arm 8 formed in a substantially V shape, and the proximal end side of the arm 7 is rotatable to the other distal end side of the common arm 8. It is connected.
　アーム６と共通アーム８との連結部は、関節部１６となっている。アーム７と共通アーム８との連結部は、関節部１７となっている。また、ロボット１は、アーム６に対してハンド４を回動させるとともに共通アーム８に対してアーム６を回動させる駆動機構１８（図３参照）と、アーム７に対してハンド５を回動させるとともに共通アーム８に対してアーム７を回動させる駆動機構１９（図４参照）とを備えている。以下、共通アーム８の具体的な構成および駆動機構１８、１９の構成について説明する。 The connecting portion between the arm 6 and the common arm 8 is a joint portion 16. A joint portion between the arm 7 and the common arm 8 is a joint portion 17. The robot 1 rotates the hand 4 with respect to the arm 6 and rotates the hand 5 with respect to the arm 7 and a drive mechanism 18 (see FIG. 3) that rotates the arm 6 with respect to the common arm 8. And a drive mechanism 19 (see FIG. 4) for rotating the arm 7 with respect to the common arm 8. Hereinafter, a specific configuration of the common arm 8 and a configuration of the drive mechanisms 18 and 19 will be described.
　（共通アームおよび駆動機構の構成）
　図５は、図３のＧ部の拡大図である。図６は、図４のＨ部の拡大図である。 (Configuration of common arm and drive mechanism)
FIG. 5 is an enlarged view of a portion G in FIG. FIG. 6 is an enlarged view of a portion H in FIG.
　共通アーム８は、本体部９に連結される基端部２２と、アーム６、７の基端側のそれぞれが連結される２個の先端部２３、２４と、２個の先端部２３、２４のそれぞれと基端部２２とを繋ぐ２個の連結部２５、２６とを備えている。本形態では、基端部２２と２個の先端部２３、２４と２個の連結部２５、２６とによって共通アーム８が構成されている。先端部２３には、アーム６の基端側が連結され、先端部２４には、アーム７の基端側が連結されている。連結部２５は、基端部２２と先端部２３とを繋ぎ、連結部２６は、基端部２２と先端部２４とを繋いでいる。 The common arm 8 includes a base end portion 22 connected to the main body 9, two tip end portions 23 and 24 to which the base end sides of the arms 6 and 7 are respectively connected, and two tip end portions 23 and 24. Are provided with two connecting portions 25 and 26 that connect the base end portion 22 to each other. In this embodiment, the common arm 8 is configured by the base end portion 22, the two distal end portions 23 and 24, and the two connecting portions 25 and 26. The proximal end side of the arm 6 is connected to the distal end portion 23, and the proximal end side of the arm 7 is connected to the distal end portion 24. The connecting portion 25 connects the proximal end portion 22 and the distal end portion 23, and the connecting portion 26 connects the proximal end portion 22 and the distal end portion 24.
　基端部２２と２個の先端部２３、２４と２個の連結部２５、２６とは別体で形成されており、基端部２２と２個の先端部２３、２４と２個の連結部２５、２６とが固定されて一体化されることで共通アーム８が構成されている。基端部２２と先端部２３、２４と連結部２５、２６とは、アルミニウム合金またはステンレス鋼で形成されている。また、基端部２２と先端部２３、２４と連結部２５、２６とは、中空状に形成されている。すなわち、共通アーム８は、中空状に形成されている。共通アーム８の内部は、大気圧となっている。 The proximal end portion 22 and the two distal end portions 23 and 24 and the two connecting portions 25 and 26 are formed separately, and the proximal end portion 22 and the two distal end portions 23 and 24 are connected to the two connecting portions. The common arm 8 is configured by fixing and integrating the portions 25 and 26. The base end portion 22, the tip end portions 23 and 24, and the connecting portions 25 and 26 are formed of an aluminum alloy or stainless steel. Moreover, the base end part 22, the front-end | tip parts 23 and 24, and the connection parts 25 and 26 are formed in the hollow shape. That is, the common arm 8 is formed in a hollow shape. The inside of the common arm 8 is at atmospheric pressure.
　基端部２２は、上下方向から見たときの形状が略五角形状となるブロック状に形成されている。基端部２２の下面の中心には、本体部９の回動軸の上端が固定されている。先端部２３、２４は、上下方向から見たときの形状が略長方形状となるブロック状に形成されている。連結部２５、２６は、筒状に形成されるパイプであり、細長い円筒状に形成されている。連結部２５、２６の長さは、たとえば、４（ｍ）となっている。 The base end portion 22 is formed in a block shape having a substantially pentagonal shape when viewed from the vertical direction. At the center of the lower surface of the base end portion 22, the upper end of the rotation shaft of the main body portion 9 is fixed. The tip portions 23 and 24 are formed in a block shape having a substantially rectangular shape when viewed from the vertical direction. The connection parts 25 and 26 are pipes formed in a cylindrical shape, and are formed in an elongated cylindrical shape. The length of the connection parts 25 and 26 is 4 (m), for example.
　連結部２５の一端は、基端部２２にネジ（図示省略）によって固定され、連結部２５の他端は、先端部２３にネジ（図示省略）によって固定されている。連結部２６の一端は、基端部２２にネジ（図示省略）によって固定され、連結部２６の他端は、先端部２４にネジ（図示省略）によって固定されている。なお、連結部２５、２６の両端には、径方向の外側に広がる鍔部が形成されている。 One end of the connecting portion 25 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 25 is fixed to the distal end portion 23 with a screw (not shown). One end of the connecting portion 26 is fixed to the base end portion 22 with a screw (not shown), and the other end of the connecting portion 26 is fixed to the distal end portion 24 with a screw (not shown). Note that flanges extending outward in the radial direction are formed at both ends of the connecting portions 25 and 26.
　駆動機構１８は、アーム６に対してハンド４を回動させるとともに共通アーム８に対してアーム６を回動させるモータ３０と、モータ３０に連結される減速機３１とを備えている。減速機３１は、減速機３１の出力軸となる回動軸３２と、回動軸３２を回動可能に支持する軸受３３と、回動軸３２の外周側に配置される磁性流体シール３４とを備えている。また、駆動機構１８は、減速機３１の入力軸３５に固定されるプーリ３６と、アーム６の基端側の内部に配置される第１プーリとしてのプーリ３７と、アーム６の先端側の内部に配置される第２プーリとしてのプーリ３８とを備えている。本形態では、ハンド４が一定方向を向いた状態で直線的に移動するように、プーリ３７のピッチ円径とプーリ３８のピッチ円径との比が１：２に設定されている。 The drive mechanism 18 includes a motor 30 that rotates the hand 4 relative to the arm 6 and rotates the arm 6 relative to the common arm 8, and a speed reducer 31 that is coupled to the motor 30. The speed reducer 31 includes a rotating shaft 32 serving as an output shaft of the speed reducer 31, a bearing 33 that rotatably supports the rotating shaft 32, and a magnetic fluid seal 34 disposed on the outer peripheral side of the rotating shaft 32. It has. The drive mechanism 18 includes a pulley 36 fixed to the input shaft 35 of the speed reducer 31, a pulley 37 as a first pulley disposed inside the base end side of the arm 6, and an inside of the tip end side of the arm 6. And a pulley 38 as a second pulley disposed at the same position. In this embodiment, the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 38 is set to 1: 2 so that the hand 4 moves linearly in a state in which the hand 4 faces a certain direction.
　減速機３１は、中空波動歯車装置であり、関節部１６に配置されている。この減速機３１は、上述の回動軸３２、軸受３３および磁性流体シール３４に加えて、剛性内歯歯車４１と、可撓性外歯歯車４２と、入力軸３５の外周側に取り付けられるウエーブベアリング４３とを備えている。また、減速機３１は、軸受３３および磁性流体シール３４を保持するケース体４４を備えている。 The reduction gear 31 is a hollow wave gear device, and is disposed at the joint 16. The speed reducer 31 is a wave attached to the outer peripheral side of the rigid internal gear 41, the flexible external gear 42, and the input shaft 35 in addition to the rotating shaft 32, the bearing 33 and the magnetic fluid seal 34. And a bearing 43. The speed reducer 31 includes a case body 44 that holds the bearing 33 and the magnetic fluid seal 34.
　ケース体４４は、全体として略円筒状に形成されている。ケース体４４の上端側部分は、先端部２３の上面部分に固定されており、ケース体４４は、先端部２３に保持されている。すなわち、軸受３３および磁性流体シール３４は、ケース体４４を介して先端部２３（すなわち、共通アーム８の一方の先端側）に保持されている。また、減速機３１の、ケース体４４の上端側部分と回動軸３２の上端側部分とを除いた部分は、先端部２３の内部に配置されている。 The case body 44 is formed in a substantially cylindrical shape as a whole. The upper end portion of the case body 44 is fixed to the upper surface portion of the tip portion 23, and the case body 44 is held by the tip portion 23. That is, the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 23 (that is, one distal end side of the common arm 8) via the case body 44. Further, the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 23.
　軸受３３は、クロスローラベアリングである。軸受３３の外輪は、ケース体４４の上端側部分に固定されている。軸受３３の内輪は、回動軸３２に固定されている。回動軸３２は、磁性材料で形成されている。また、回動軸３２は、中空状に形成されている。回動軸３２の上端側には、回動軸３２の内周側を塞ぐ蓋４５が固定されている。蓋４５は、円板状に形成されており、回動軸３２の上端側の内周面に固定されている。蓋４５の外周面と回動軸３２の内周面との間には、Ｏリング等のシール部材（図示省略）が配置されている。回動軸３２は、アーム６の基端側に固定されている。具体的には、回動軸３２の上端がアーム６の基端側の下面部に固定されている。回動軸３２の上端面は、アーム６の基端側の下面に接触している。 The bearing 33 is a cross roller bearing. The outer ring of the bearing 33 is fixed to the upper end portion of the case body 44. An inner ring of the bearing 33 is fixed to the rotation shaft 32. The rotating shaft 32 is made of a magnetic material. Moreover, the rotating shaft 32 is formed in a hollow shape. A lid 45 that closes the inner peripheral side of the rotation shaft 32 is fixed to the upper end side of the rotation shaft 32. The lid 45 is formed in a disk shape and is fixed to the inner peripheral surface on the upper end side of the rotating shaft 32. A seal member (not shown) such as an O-ring is disposed between the outer peripheral surface of the lid 45 and the inner peripheral surface of the rotation shaft 32. The rotation shaft 32 is fixed to the proximal end side of the arm 6. Specifically, the upper end of the rotation shaft 32 is fixed to the lower surface portion on the proximal end side of the arm 6. The upper end surface of the rotation shaft 32 is in contact with the lower surface on the proximal end side of the arm 6.
　磁性流体シール３４は、複数の磁石と、複数の磁石のそれぞれを上下方向で挟むように配置される円環状のポールピースと、ポールピースの内周面と回動軸３２の外周面との間に保持される磁性流体とを備えている。磁性流体シール３４の磁石およびポールピースは、ケース体４４の上端側部分の内周面に固定されている。磁性流体シール３４は、軸受３３の上側に配置されている。また、磁性流体シール３４は、アーム６の上面よりも上側に配置されている。 The magnetic fluid seal 34 includes a plurality of magnets, an annular pole piece disposed so as to sandwich each of the plurality of magnets in the vertical direction, and an inner peripheral surface of the pole piece and an outer peripheral surface of the rotating shaft 32. And a magnetic fluid held in the container. The magnet and pole piece of the magnetic fluid seal 34 are fixed to the inner peripheral surface of the upper end side portion of the case body 44. The magnetic fluid seal 34 is disposed on the upper side of the bearing 33. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 6.
　入力軸３５は、中空状に形成されている。入力軸３５は、軸受を介してケース体４４の下端側部分に回転可能に支持されている。入力軸３５には、上下方向から見たときの外周面の形状が楕円形状となる楕円部が形成されている。剛性内歯歯車４１は、ケース体４４の下端側部分に固定されている。剛性内歯歯車４１の内周面には、内歯が形成されている。可撓性外歯歯車４２の上端側部分は、回動軸３２の下端に固定されている。可撓性外歯歯車４２の下端側部分の外周面には、剛性内歯歯車４１の内歯と噛み合う外歯が形成されている。可撓性外歯歯車４２は、入力軸３５に対して相対回転可能となっている、 The input shaft 35 is formed in a hollow shape. The input shaft 35 is rotatably supported by a lower end side portion of the case body 44 through a bearing. The input shaft 35 is formed with an elliptical portion whose outer peripheral surface is elliptical when viewed from above and below. The rigid internal gear 41 is fixed to the lower end portion of the case body 44. Internal teeth are formed on the inner peripheral surface of the rigid internal gear 41. The upper end portion of the flexible external gear 42 is fixed to the lower end of the rotating shaft 32. External teeth that mesh with the internal teeth of the rigid internal gear 41 are formed on the outer peripheral surface of the lower end portion of the flexible external gear 42. The flexible external gear 42 is rotatable relative to the input shaft 35.
　ウエーブベアリング４３は、可撓性の内輪および外輪を備えたボールベアリングである。このウエーブベアリング４３は、入力軸３５の楕円部の外周面に沿って配置されており、楕円状に撓んでいる。可撓性外歯歯車４２の、外歯が形成される下端側部分は、ウエーブベアリング４３を囲むようにウエーブベアリング４３の外周側に配置されており、この部分は、楕円状に撓んでいる。可撓性外歯歯車４２の外歯は、楕円状に撓む可撓性外歯歯車４２の下端側部分の長軸方向の２か所で、剛性内歯歯車４１の内歯と噛み合っている。 The wave bearing 43 is a ball bearing having a flexible inner ring and an outer ring. The wave bearing 43 is disposed along the outer peripheral surface of the elliptical portion of the input shaft 35 and is bent in an elliptical shape. The lower end portion of the flexible external gear 42 where the external teeth are formed is disposed on the outer peripheral side of the wave bearing 43 so as to surround the wave bearing 43, and this portion is bent in an elliptical shape. The external teeth of the flexible external gear 42 mesh with the internal teeth of the rigid internal gear 41 at two locations in the major axis direction of the lower end portion of the flexible external gear 42 that bends in an elliptical shape. .
　モータ３０は、先端部２３に固定されている。また、モータ３０は、先端部２３の内部に配置されるとともに、減速機３１よりも連結部２５側に配置されている。モータ３０の出力軸には、プーリ４６が固定されている。プーリ３６は、入力軸３５の下端に固定されている。プーリ３６とプーリ４６とにベルト４７が架け渡されている。ベルト４７は、ゴム製のベルトである。プーリ３６、４６およびベルト４７は、先端部２３の内部に配置されている。 The motor 30 is fixed to the tip 23. Further, the motor 30 is disposed inside the distal end portion 23 and is disposed closer to the connecting portion 25 than the speed reducer 31. A pulley 46 is fixed to the output shaft of the motor 30. The pulley 36 is fixed to the lower end of the input shaft 35. A belt 47 is stretched between the pulley 36 and the pulley 46. The belt 47 is a rubber belt. The pulleys 36 and 46 and the belt 47 are disposed inside the tip portion 23.
　アーム６の基端側の内部には、プーリ３７を回動可能に支持する支持軸５０が配置されている。支持軸５０は、下端に鍔部５０ａを有する鍔付きの円筒状に形成されている。また、支持軸５０は、アーム６の基端側の下面部の上側に配置されており、アーム６の下面部から立ち上がるように配置されている。本形態では、アーム６の基端側の内部に配置されるネジ５１によって、回動軸３２と支持軸５０とアーム６の基端側の下面部とが互いに固定されている。 A support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 6. The support shaft 50 is formed in a cylindrical shape with a flange having a flange portion 50a at the lower end. Further, the support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 6 and is disposed so as to rise from the lower surface portion of the arm 6. In this embodiment, the rotation shaft 32, the support shaft 50, and the lower surface portion on the proximal end side of the arm 6 are fixed to each other by a screw 51 disposed inside the proximal end side of the arm 6.
　具体的には、アーム６の基端側の下面部および鍔部５０ａに、ネジ５１の軸部が挿通される挿通穴が形成され、回動軸３２の上端面に、ネジ５１が係合するネジ穴が形成されている。すなわち、支持軸５０は（具体的には、鍔部５０ａは）、鍔部５０ａと回動軸３２の上端との間にアーム６の基端側の下面部を挟んだ状態で回動軸３２に固定されている。また、ネジ５１は、回動軸３２をアーム６の基端側に固定するとともに、支持軸５０を回動軸３２に固定している。また、支持軸５０は、支持軸５０の軸心と回動軸３２の軸心とが一致するように回動軸３２に固定されている。 Specifically, an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion and the flange portion 50 a of the base end side of the arm 6, and the screw 51 is engaged with the upper end surface of the rotating shaft 32. Screw holes are formed. That is, the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 6 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 32. It is fixed to. The screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 6 and fixes the support shaft 50 to the rotation shaft 32. The support shaft 50 is fixed to the rotation shaft 32 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other.
　プーリ３７は、軸受を介して支持軸５０に回動可能に支持されている。また、プーリ３７は、固定部材５３を介して先端部２３に固定されている。すなわち、プーリ３７は、固定部材５３を介して共通アーム８の一方の先端側に固定されている。固定部材５３は、アーム６および共通アーム８の外部に配置されている。また、固定部材５３は、関節部１６の外部に配置されている。固定部材５３は、共通アーム８の一方の先端側の外側面に固定される側面部５３ａと、側面部５３ａの上端に繋がる上面部５３ｂとから構成されている。側面部５３ａおよび上面部５３ｂは、平板状に形成されている。 The pulley 37 is rotatably supported on the support shaft 50 via a bearing. The pulley 37 is fixed to the distal end portion 23 via a fixing member 53. That is, the pulley 37 is fixed to one tip side of the common arm 8 via the fixing member 53. The fixing member 53 is disposed outside the arm 6 and the common arm 8. Further, the fixing member 53 is disposed outside the joint portion 16. The fixing member 53 includes a side surface portion 53a that is fixed to the outer surface on one tip side of the common arm 8, and an upper surface portion 53b that is connected to the upper end of the side surface portion 53a. The side surface portion 53a and the upper surface portion 53b are formed in a flat plate shape.
　側面部５３ａの下端側は、共通アーム８の一方の先端面に固定されている。すなわち、固定部材５３は、共通アーム８の一方の先端側の外側面に固定されている。また、側面部５３ａは、関節部１６よりも共通アーム８の先端側に配置されている。上面部５３ｂは、側面部５３ａの上端に固定されている。上面部５３ｂは、上面部５３ｂの厚さ方向と上下方向とが一致するように配置されている。また、上面部５３ｂは、アーム６の基端側の上面よりも上側に配置されている。具体的には、上面部５３ｂは、アーム６の基端側の上面よりもわずかに上側に配置されている。なお、本形態では、別体で形成された側面部５３ａと上面部５３ｂとが互いに固定されているが、側面部５３ａと上面部５３ｂとが一体で形成されていても良い。 The lower end side of the side surface portion 53a is fixed to one end surface of the common arm 8. That is, the fixing member 53 is fixed to the outer surface on the one end side of the common arm 8. Further, the side surface portion 53 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 16. The upper surface portion 53b is fixed to the upper end of the side surface portion 53a. The upper surface portion 53b is disposed so that the thickness direction of the upper surface portion 53b matches the vertical direction. Further, the upper surface portion 53 b is disposed above the upper surface on the base end side of the arm 6. Specifically, the upper surface portion 53 b is disposed slightly above the upper surface on the proximal end side of the arm 6. In this embodiment, the side surface portion 53a and the upper surface portion 53b formed separately are fixed to each other, but the side surface portion 53a and the upper surface portion 53b may be integrally formed.
　アーム６の基端側の上面部分には、図５に示すように、プーリ３７の上端側部分が配置される開口部６ａが形成されている。プーリ３７の上端は、アーム６の基端側の上面よりも上側に配置されている。具体的には、プーリ３７の上端は、アーム６の基端側の上面よりもわずかに上側に配置されている。また、プーリ３７の上端は、上面部５３ｂに固定されている。すなわち、プーリ３７は、固定部材５３に固定されている。プーリ３７の上端面は、上面部５３ｂの下面に接触している。 As shown in FIG. 5, an opening 6 a in which the upper end side portion of the pulley 37 is disposed is formed on the upper surface portion of the base end side of the arm 6. The upper end of the pulley 37 is arranged above the upper surface of the arm 6 on the base end side. Specifically, the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 6. The upper end of the pulley 37 is fixed to the upper surface portion 53b. That is, the pulley 37 is fixed to the fixing member 53. The upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 53b.
　アーム６の先端側の内部には、プーリ３８を回動可能に支持する支持軸５８が固定されている。支持軸５８は、アーム６の先端側の下面部から立ち上がっている。プーリ３８は、軸受を介して支持軸５８に回動可能に支持されている。また、プーリ３８の上端には、ハンド４の基端側が固定されている。プーリ３７とプーリ３８とには、ベルト６０が架け渡されている。本形態では、上下方向で重なるように配置される２本のベルト６０がプーリ３７とプーリ３８とに架け渡されている。ベルト６０は、鋼板製のスチールベルトである。ベルト６０は、図示を省略するネジによって、プーリ３７、３８に固定されている。 A support shaft 58 that rotatably supports the pulley 38 is fixed inside the arm 6. The support shaft 58 rises from the lower surface portion on the distal end side of the arm 6. The pulley 38 is rotatably supported on the support shaft 58 via a bearing. Further, the base end side of the hand 4 is fixed to the upper end of the pulley 38. A belt 60 is stretched between the pulley 37 and the pulley 38. In this embodiment, two belts 60 arranged so as to overlap in the vertical direction are stretched over the pulley 37 and the pulley 38. The belt 60 is a steel belt made of steel plate. The belt 60 is fixed to the pulleys 37 and 38 by screws not shown.
　駆動機構１９は、駆動機構１８とほぼ同様に構成されている。したがって、以下の駆動機構１９の説明では、主として、駆動機構１８と駆動機構１９との相違点を説明する。駆動機構１９は、アーム７に対してハンド５を回動させるとともに共通アーム８に対してアーム７を回動させるモータ３０と、モータ３０に連結される減速機３１とを備えている。また、駆動機構１９は、減速機３１の入力軸３５に固定されるプーリ３６と、アーム７の基端側の内部に配置される第１プーリとしてのプーリ３７と、アーム７の先端側の内部に配置される第２プーリとしてのプーリ７８とを備えている。本形態では、ハンド５が一定方向を向いた状態で直線的に移動するように、プーリ３７のピッチ円径とプーリ７８のピッチ円径との比が１：２に設定されている。 The drive mechanism 19 is configured in substantially the same manner as the drive mechanism 18. Therefore, in the following description of the drive mechanism 19, differences between the drive mechanism 18 and the drive mechanism 19 will be mainly described. The drive mechanism 19 includes a motor 30 that rotates the hand 5 with respect to the arm 7 and rotates the arm 7 with respect to the common arm 8, and a speed reducer 31 that is coupled to the motor 30. The drive mechanism 19 includes a pulley 36 that is fixed to the input shaft 35 of the speed reducer 31, a pulley 37 that serves as a first pulley disposed inside the base end of the arm 7, and an internal portion on the distal end side of the arm 7. And a pulley 78 as a second pulley disposed at the same position. In this embodiment, the ratio between the pitch circle diameter of the pulley 37 and the pitch circle diameter of the pulley 78 is set to 1: 2 so that the hand 5 moves linearly in a state in which the hand 5 faces in a certain direction.
　駆動機構１９の減速機３１は、関節部１７に配置されている。駆動機構１９では、減速機３１のケース体４４の上端側部分は、先端部２４の上面部分に固定されており、ケース体４４は、先端部２４に保持されている。すなわち、軸受３３および磁性流体シール３４は、ケース体４４を介して先端部２４（すなわち、共通アーム８の他方の先端側）に保持されている。また、駆動機構１９では、減速機３１の、ケース体４４の上端側部分と回動軸３２の上端側部分とを除いた部分は、先端部２４の内部に配置されている。また、磁性流体シール３４は、アーム７の上面よりも上側に配置されている。 The speed reducer 31 of the drive mechanism 19 is disposed at the joint portion 17. In the drive mechanism 19, the upper end portion of the case body 44 of the speed reducer 31 is fixed to the upper surface portion of the distal end portion 24, and the case body 44 is held by the distal end portion 24. In other words, the bearing 33 and the magnetic fluid seal 34 are held on the distal end portion 24 (that is, the other distal end side of the common arm 8) via the case body 44. In the drive mechanism 19, the portion of the speed reducer 31 excluding the upper end side portion of the case body 44 and the upper end side portion of the rotating shaft 32 is disposed inside the distal end portion 24. Further, the magnetic fluid seal 34 is disposed above the upper surface of the arm 7.
　駆動機構１９では、回動軸３２の上端に、中空状に形成される回動軸７９の下端が固定されている。回動軸７９は、回動軸３２の軸心と回動軸７９の軸心とが一致するように回動軸３２に固定されている。回動軸７９は、アーム７の基端側に固定されている。具体的には、回動軸７９の上端がアーム７の基端側の下面部に固定されている。すなわち、回動軸３２は、回動軸７９を介して、アーム７の基端側に固定されている。回動軸７９の上端面は、アーム７の基端側の下面に接触している。なお、回動軸３２と回動軸７９とは一体で形成されていても良い。 In the drive mechanism 19, the lower end of the rotating shaft 79 formed in a hollow shape is fixed to the upper end of the rotating shaft 32. The rotation shaft 79 is fixed to the rotation shaft 32 so that the axis of the rotation shaft 32 coincides with the axis of the rotation shaft 79. The rotation shaft 79 is fixed to the proximal end side of the arm 7. Specifically, the upper end of the rotation shaft 79 is fixed to the lower surface portion on the proximal end side of the arm 7. That is, the rotation shaft 32 is fixed to the proximal end side of the arm 7 via the rotation shaft 79. The upper end surface of the rotation shaft 79 is in contact with the lower surface on the proximal end side of the arm 7. The rotation shaft 32 and the rotation shaft 79 may be integrally formed.
　また、駆動機構１９では、モータ３０は、先端部２４に固定されている。モータ３０は、先端部２４の内部に配置されるとともに、減速機３１よりも連結部２６側に配置されている。また、駆動機構１９では、プーリ３６、４６およびベルト４７は、先端部２４の内部に配置されている。 In the drive mechanism 19, the motor 30 is fixed to the distal end portion 24. The motor 30 is disposed inside the distal end portion 24 and is disposed closer to the connecting portion 26 than the speed reducer 31. In the drive mechanism 19, the pulleys 36 and 46 and the belt 47 are disposed inside the distal end portion 24.
　アーム７の基端側の内部には、プーリ３７を回動可能に支持する支持軸５０が配置されている。支持軸５０は、アーム７の基端側の下面部の上側に配置されており、アーム７の下面部から立ち上がるように配置されている。本形態では、アーム７の基端側の内部に配置されるネジ５１によって、回動軸７９と支持軸５０とアーム７の基端側の下面部とが互いに固定されている。具体的には、アーム７の基端側の下面部および鍔部５０ａに、ネジ５１の軸部が挿通される挿通穴が形成され、回動軸７９の上端面に、ネジ５１が係合するネジ穴が形成されている。 A support shaft 50 that rotatably supports the pulley 37 is disposed inside the base end side of the arm 7. The support shaft 50 is disposed above the lower surface portion on the proximal end side of the arm 7 and is disposed so as to rise from the lower surface portion of the arm 7. In this embodiment, the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the screw 51 disposed inside the base end side of the arm 7. Specifically, an insertion hole through which the shaft portion of the screw 51 is inserted is formed in the lower surface portion of the base end side of the arm 7 and the flange portion 50 a, and the screw 51 engages with the upper end surface of the rotating shaft 79. Screw holes are formed.
　すなわち、支持軸５０は（具体的には、鍔部５０ａは）、鍔部５０ａと回動軸７９の上端との間にアーム７の基端側の下面部を挟んだ状態で回動軸７９に固定されており、回動軸７９を介して回動軸３２に固定されている。また、ネジ５１は、回動軸７９をアーム７の基端側に固定するとともに、支持軸５０を回動軸７９に固定している。すなわち、ネジ５１は、回動軸７９を介して回動軸３２をアーム７の基端側に固定するとともに、回動軸７９を介して支持軸５０を回動軸３２に固定している。また、支持軸５０は、支持軸５０の軸心と回動軸７９の軸心と回動軸３２の軸心とが一致するように回動軸７９に固定されている。 That is, the support shaft 50 (specifically, the flange portion 50 a) is configured so that the lower shaft portion on the proximal end side of the arm 7 is sandwiched between the flange portion 50 a and the upper end of the rotation shaft 79. And is fixed to the rotation shaft 32 via the rotation shaft 79. The screw 51 fixes the rotation shaft 79 to the proximal end side of the arm 7 and fixes the support shaft 50 to the rotation shaft 79. That is, the screw 51 fixes the rotation shaft 32 to the proximal end side of the arm 7 via the rotation shaft 79 and also fixes the support shaft 50 to the rotation shaft 32 via the rotation shaft 79. The support shaft 50 is fixed to the rotation shaft 79 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide with each other.
　アーム７の基端側の内部に配置されるプーリ３７は、固定部材８３を介して先端部２４に固定されている。すなわち、このプーリ３７は、固定部材８３を介して共通アーム８の他方の先端側に固定されている。固定部材８３は、アーム７および共通アーム８の外部に配置されている。また、固定部材８３は、関節部１７の外部に配置されている。固定部材８３は、共通アーム８の他方の先端側の外側面に固定される側面部８３ａと、側面部８３ａの上端に繋がる上面部８３ｂとから構成されている。側面部８３ａおよび上面部８３ｂは、平板状に形成されている。 The pulley 37 disposed inside the proximal end of the arm 7 is fixed to the distal end portion 24 via a fixing member 83. That is, the pulley 37 is fixed to the other tip side of the common arm 8 via the fixing member 83. The fixing member 83 is disposed outside the arm 7 and the common arm 8. The fixing member 83 is disposed outside the joint portion 17. The fixing member 83 includes a side surface portion 83a fixed to the outer surface on the other tip side of the common arm 8, and an upper surface portion 83b connected to the upper end of the side surface portion 83a. The side surface portion 83a and the upper surface portion 83b are formed in a flat plate shape.
　側面部８３ａの下端側は、共通アーム８の他方の先端面に固定されている。すなわち、固定部材８３は、共通アーム８の他方の先端側の外側面に固定されている。また、側面部８３ａは、関節部１７よりも共通アーム８の先端側に配置されている。上面部８３ｂは、側面部８３ａの上端に固定されている。上面部８３ｂは、上面部８３ｂの厚さ方向と上下方向とが一致するように配置されている。また、上面部８３ｂは、アーム７の基端側の上面よりも上側に配置されている。具体的には、上面部８３ｂは、アーム７の基端側の上面よりもわずかに上側に配置されている。なお、本形態では、別体で形成された側面部８３ａと上面部８３ｂとが互いに固定されているが、側面部８３ａと上面部８３ｂとが一体で形成されていても良い。 The lower end side of the side part 83a is fixed to the other end face of the common arm 8. That is, the fixing member 83 is fixed to the outer surface of the other distal end side of the common arm 8. Further, the side surface portion 83 a is disposed on the distal end side of the common arm 8 with respect to the joint portion 17. The upper surface portion 83b is fixed to the upper end of the side surface portion 83a. The upper surface portion 83b is disposed so that the thickness direction of the upper surface portion 83b and the vertical direction coincide with each other. Further, the upper surface portion 83 b is disposed above the upper surface on the proximal end side of the arm 7. Specifically, the upper surface portion 83 b is disposed slightly above the upper surface on the proximal end side of the arm 7. In this embodiment, the side surface portion 83a and the upper surface portion 83b formed separately are fixed to each other, but the side surface portion 83a and the upper surface portion 83b may be integrally formed.
　アーム７の基端側の上面部分には、図６に示すように、プーリ３７の上端側部分が配置される開口部７ａが形成されている。プーリ３７の上端は、アーム７の基端側の上面よりも上側に配置されている。具体的には、プーリ３７の上端は、アーム７の基端側の上面よりもわずかに上側に配置されている。また、プーリ３７の上端は、上面部８３ｂに固定されている。すなわち、プーリ３７は、固定部材８３に固定されている。プーリ３７の上端面は、上面部８３ｂの下面に接触している。 As shown in FIG. 6, an opening 7 a in which the upper end portion of the pulley 37 is disposed is formed in the upper surface portion of the base end side of the arm 7. The upper end of the pulley 37 is disposed above the upper surface on the proximal end side of the arm 7. Specifically, the upper end of the pulley 37 is disposed slightly above the upper surface on the base end side of the arm 7. The upper end of the pulley 37 is fixed to the upper surface portion 83b. That is, the pulley 37 is fixed to the fixing member 83. The upper end surface of the pulley 37 is in contact with the lower surface of the upper surface portion 83b.
　アーム７の先端側の内部には、プーリ７８を回動可能に支持する支持軸部７ｂが形成されている。支持軸部７ｂは、円筒状に形成されており、アーム７の先端側の下面部から立ち上がっている。プーリ７８は、軸受を介して支持軸部７ｂに回動可能に支持されている。また、プーリ７８の下端には、ハンド５の基端側が固定されている。プーリ３７とプーリ７８とには、上下方向で重なるように配置される２本のベルト６０が架け渡されている。ベルト６０は、図示を省略するネジによって、プーリ３７、７８に固定されている。 A support shaft portion 7 b that rotatably supports the pulley 78 is formed inside the arm 7 on the tip side. The support shaft portion 7 b is formed in a cylindrical shape and rises from the lower surface portion on the distal end side of the arm 7. The pulley 78 is rotatably supported by the support shaft portion 7b via a bearing. Further, the base end side of the hand 5 is fixed to the lower end of the pulley 78. Two belts 60 are arranged between the pulley 37 and the pulley 78 so as to overlap in the vertical direction. The belt 60 is fixed to the pulleys 37 and 78 by screws not shown.
　（本形態の主な効果）
　以上説明したように、本形態では、アーム６の基端側に配置されるプーリ３７は、固定部材５３を介して共通アーム８の一方の先端側に固定されており、固定部材５３は、関節部１６の外部に配置されている。また、本形態では、アーム７の基端側に配置されるプーリ３７は、固定部材８３を介して共通アーム８の他方の先端側に固定されており、固定部材８３は、関節部１７の外部に配置されている。すなわち、本形態では、プーリ３７と一緒に回動軸３２に対して相対回動する軸等の部材が回動軸３２の内周側に配置されていない。そのため、本形態では、回動軸３２の内周側に磁性流体シールを配置する必要がない。したがって、本形態では、アーム６、７および共通アーム８が真空中に配置されるとともに、共通アーム８の内部が大気圧となっており、かつ、アーム６、７の内部が真空となっている場合であっても、関節部１６、１７の構成を簡素化することが可能になる。 (Main effects of this form)
As described above, in this embodiment, the pulley 37 disposed on the proximal end side of the arm 6 is fixed to one distal end side of the common arm 8 via the fixing member 53, and the fixing member 53 is a joint Arranged outside the portion 16. In this embodiment, the pulley 37 disposed on the proximal end side of the arm 7 is fixed to the other distal end side of the common arm 8 via the fixing member 83, and the fixing member 83 is outside the joint portion 17. Is arranged. That is, in this embodiment, a member such as a shaft that rotates relative to the rotation shaft 32 together with the pulley 37 is not disposed on the inner peripheral side of the rotation shaft 32. Therefore, in this embodiment, it is not necessary to arrange a magnetic fluid seal on the inner peripheral side of the rotation shaft 32. Therefore, in this embodiment, the arms 6 and 7 and the common arm 8 are arranged in a vacuum, the inside of the common arm 8 is at atmospheric pressure, and the inside of the arms 6 and 7 is in a vacuum. Even if it is a case, it becomes possible to simplify the structure of the joint parts 16 and 17. FIG.
　本形態では、プーリ３７が回動可能に支持される支持軸５０は、回動軸３２に固定されている。そのため、本形態では、支持軸５０の軸心と回動軸３２の軸心とを一致させやすくなり、その結果、プーリ３７の軸心と回動軸３２の軸心とを一致させやすくなる。したがって、本形態では、固定部材５３、８３を介してプーリ３７が共通アーム８の先端側に固定されていても、プーリ３７を適切に回動させることが可能になる。 In this embodiment, the support shaft 50 on which the pulley 37 is rotatably supported is fixed to the rotation shaft 32. Therefore, in this embodiment, the axis of the support shaft 50 and the axis of the rotary shaft 32 can be easily matched, and as a result, the axis of the pulley 37 and the axis of the rotary shaft 32 can be easily matched. Therefore, in this embodiment, even if the pulley 37 is fixed to the distal end side of the common arm 8 via the fixing members 53 and 83, the pulley 37 can be appropriately rotated.
　本形態では、共通のネジ５１によって、回動軸３２と支持軸５０とアーム６の基端側の下面部とが互いに固定されている。そのため、本形態では、回動軸３２をアーム６の基端側に固定するネジと、支持軸５０を回動軸３２に固定するネジとが個別に設けられている場合と比較して、関節部１６の構成を簡素化することが可能になる。同様に、本形態では、共通のネジ５１によって、回動軸７９と支持軸５０とアーム７の基端側の下面部とが互いに固定されているため、回動軸７９をアーム７の基端側に固定するネジと、支持軸５０を回動軸７９に固定するネジとが個別に設けられている場合と比較して、関節部１７の構成を簡素化することが可能になる。 In this embodiment, the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by a common screw 51. Therefore, in this embodiment, the joint is compared with the case where the screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and the screw for fixing the support shaft 50 to the rotation shaft 32 are provided individually. The configuration of the unit 16 can be simplified. Similarly, in this embodiment, since the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51, the rotation shaft 79 is fixed to the base end of the arm 7. The configuration of the joint portion 17 can be simplified as compared with the case where the screw for fixing the support shaft 50 to the side and the screw for fixing the support shaft 50 to the rotation shaft 79 are provided separately.
　本形態では、ベルト６０は、スチールベルトである。そのため、本形態では、ベルト６０がゴム製のベルトである場合と比較して、ベルト６０からの発塵を抑制することが可能になる。なお、ベルト６０がスチールベルトである場合には、ベルト６０がゴム製のベルトである場合と比較して、ベルト６０が弾性変形しにくいため、プーリ３７の軸心と回動軸３２の軸心とにずれがあると、プーリ３７が適切に回動しにくくなりやすいが、本形態では、プーリ３７の軸心と回動軸３２の軸心とを一致させやすくなるため、ベルト６０がスチールベルトであっても、プーリ３７を適切に回動させることが可能になる。 In this embodiment, the belt 60 is a steel belt. Therefore, in this embodiment, it is possible to suppress dust generation from the belt 60 as compared with the case where the belt 60 is a rubber belt. When the belt 60 is a steel belt, the belt 60 is less likely to be elastically deformed than when the belt 60 is a rubber belt. If there is a misalignment, the pulley 37 is difficult to rotate properly, but in this embodiment, the axis of the pulley 37 and the axis of the rotating shaft 32 are easily aligned, so the belt 60 is a steel belt. Even so, the pulley 37 can be appropriately rotated.
　本形態では、固定部材５３は、共通アーム８の一方の先端面に固定される平板状の側面部５３ａと、側面部５３ａの上端に固定されるとともにアーム６の基端側の上面よりも上側に配置される平板状の上面部５３ｂとによって構成されている。そのため、本形態では、アーム６の基端側と固定部材５３との干渉を防止しやすくなる。同様に、本形態では、固定部材８３が、共通アーム８の他方の先端面に固定される平板状の側面部８３ａと、側面部８３ａの上端に固定されるとともにアーム７の基端側の上面よりも上側に配置される平板状の上面部８３ｂとによって構成されているため、アーム７の基端側と固定部材８３との干渉を防止しやすくなる。 In the present embodiment, the fixing member 53 is fixed to the upper end of the side surface portion 53 a and the flat side surface portion 53 a fixed to one distal end surface of the common arm 8, and above the upper surface on the proximal end side of the arm 6. It is comprised by the flat upper surface part 53b arrange | positioned. Therefore, in this embodiment, it becomes easy to prevent interference between the base end side of the arm 6 and the fixing member 53. Similarly, in this embodiment, the fixing member 83 is fixed to the upper end of the side surface portion 83a and the flat side surface portion 83a fixed to the other distal end surface of the common arm 8, and the upper surface on the proximal end side of the arm 7 Since the flat upper surface portion 83 b is arranged on the upper side, it is easy to prevent interference between the base end side of the arm 7 and the fixing member 83.
　本形態では、軸受３３を介して共通アーム８の一方の先端側に回動可能に保持される回動軸３２の上端がアーム６の基端側の下面部に固定されるとともに、アーム６の基端側の内部に配置される支持軸５０に回動可能に支持されるプーリ３７の上端が、共通アーム８の一方の先端側に固定される固定部材５３の上面部５３ｂに固定されている。すなわち、本形態では、回動軸３２と上面部５３ｂとによって上下方向の両側からアーム６の基端側が支持されている。そのため、本形態では、アーム６の動作を安定させることが可能になる。 In this embodiment, the upper end of the rotation shaft 32 rotatably held on one distal end side of the common arm 8 via the bearing 33 is fixed to the lower surface portion on the proximal end side of the arm 6, and An upper end of a pulley 37 that is rotatably supported by a support shaft 50 disposed inside the base end side is fixed to an upper surface portion 53 b of a fixing member 53 that is fixed to one distal end side of the common arm 8. . That is, in this embodiment, the proximal end side of the arm 6 is supported from both sides in the vertical direction by the rotating shaft 32 and the upper surface portion 53b. Therefore, in this embodiment, the operation of the arm 6 can be stabilized.
　また、本形態では、軸受３３を介して共通アーム８の他方の先端側に回動可能に保持される回動軸３２、７９の上端がアーム７の基端側の下面部に固定されるとともに、アーム７の基端側の内部に配置される支持軸５０に回動可能に支持されるプーリ３７の上端が、共通アーム８の他方の先端側に固定される固定部材８３の上面部８３ｂに固定されている。すなわち、本形態では、回動軸３２、７９と上面部８３ｂとによって上下方向の両側からアーム７の基端側が支持されている。そのため、本形態では、アーム７の動作を安定させることが可能になる。 In this embodiment, the upper ends of the rotation shafts 32 and 79 that are rotatably held on the other distal end side of the common arm 8 via the bearing 33 are fixed to the lower surface portion on the proximal end side of the arm 7. The upper end of the pulley 37 rotatably supported by the support shaft 50 disposed inside the base end side of the arm 7 is attached to the upper surface portion 83b of the fixing member 83 fixed to the other distal end side of the common arm 8. It is fixed. That is, in this embodiment, the base end side of the arm 7 is supported from both sides in the vertical direction by the rotation shafts 32 and 79 and the upper surface portion 83b. Therefore, in this embodiment, the operation of the arm 7 can be stabilized.
　（他の実施の形態）
　上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
　上述した形態では、共通のネジ５１によって、回動軸３２と支持軸５０とアーム６の基端側の下面部とが互いに固定されているが、アーム６の基端側に回動軸３２を固定するネジと、回動軸３２に支持軸５０を固定するネジとが個別に設けられていても良い。この場合には、支持軸５０は、鍔部５０ａの下面と回動軸３２の上端とが接触するように回動軸３２に固定されても良い。 In the embodiment described above, the rotation shaft 32, the support shaft 50, and the lower surface portion of the base end side of the arm 6 are fixed to each other by the common screw 51, but the rotation shaft 32 is attached to the base end side of the arm 6. A screw for fixing and a screw for fixing the support shaft 50 to the rotating shaft 32 may be provided individually. In this case, the support shaft 50 may be fixed to the rotation shaft 32 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 32 are in contact with each other.
　同様に、上述した形態では、共通のネジ５１によって、回動軸７９と支持軸５０とアーム７の基端側の下面部とが互いに固定されているが、アーム７の基端側に回動軸７９を固定するネジと、回動軸７９に支持軸５０を固定するネジとが個別に設けられていても良い。この場合には、支持軸５０は、鍔部５０ａの下面と回動軸７９の上端とが接触するように回動軸７９に固定されても良い。 Similarly, in the above-described embodiment, the rotation shaft 79, the support shaft 50, and the lower surface portion of the base end side of the arm 7 are fixed to each other by the common screw 51. A screw for fixing the shaft 79 and a screw for fixing the support shaft 50 to the rotation shaft 79 may be provided separately. In this case, the support shaft 50 may be fixed to the rotation shaft 79 so that the lower surface of the flange portion 50a and the upper end of the rotation shaft 79 are in contact with each other.
　上述した形態では、駆動機構１８において、支持軸５０は、回動軸３２に固定されているが、支持軸５０は、アーム６の基端側の下面部に固定されていても良い。この場合には、アーム６の基端側に回動軸３２を固定するネジと、アーム６の基端側に支持軸５０を固定するネジとが個別に設けられている。この場合であっても、支持軸５０は、支持軸５０の軸心と回動軸３２の軸心とが一致するようにアーム６の基端側に固定される。また、支持軸５０に相当する支持軸がアーム６の基端側の内部に形成されても良い。この場合には、この支持軸の軸心と回動軸３２の軸心とが一致するようにアーム６の基端側の内部に支持軸が形成される。 In the above-described form, in the drive mechanism 18, the support shaft 50 is fixed to the rotating shaft 32, but the support shaft 50 may be fixed to the lower surface portion of the base end side of the arm 6. In this case, a screw for fixing the rotation shaft 32 to the proximal end side of the arm 6 and a screw for fixing the support shaft 50 to the proximal end side of the arm 6 are individually provided. Even in this case, the support shaft 50 is fixed to the base end side of the arm 6 so that the axis of the support shaft 50 and the axis of the rotation shaft 32 coincide with each other. A support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 6. In this case, a support shaft is formed inside the base end side of the arm 6 so that the axis of the support shaft and the axis of the rotation shaft 32 coincide with each other.
　同様に、駆動機構１９において、支持軸５０は、アーム７の基端側の下面部に固定されていても良い。この場合には、アーム７の基端側に回動軸７９を固定するネジと、アーム７の基端側に支持軸５０を固定するネジとが個別に設けられている。この場合であっても、支持軸５０は、支持軸５０の軸心と回動軸７９の軸心と回動軸３２の軸心とが一致するようにアーム７の基端側に固定される。また、支持軸５０に相当する支持軸がアーム７の基端側の内部に形成されても良い。この場合には、支持軸の軸心と回動軸７９の軸心と回動軸３２の軸心とが一致するようにアーム７の基端側の内部に支持軸が形成される。 Similarly, in the drive mechanism 19, the support shaft 50 may be fixed to the lower surface portion on the proximal end side of the arm 7. In this case, a screw for fixing the rotation shaft 79 to the base end side of the arm 7 and a screw for fixing the support shaft 50 to the base end side of the arm 7 are individually provided. Even in this case, the support shaft 50 is fixed to the base end side of the arm 7 so that the axis of the support shaft 50, the axis of the rotation shaft 79, and the axis of the rotation shaft 32 coincide. . A support shaft corresponding to the support shaft 50 may be formed inside the base end side of the arm 7. In this case, the support shaft is formed inside the base end side of the arm 7 so that the axis of the support shaft, the axis of the rotation shaft 79 and the axis of the rotation shaft 32 coincide with each other.
　上述した形態では、固定部材５３の側面部５３ａは、共通アーム８の一方の先端面に固定されているが、側面部５３ａは、先端部２３の上面に固定されていても良い。同様に、上述した形態では、固定部材８３の側面部８３ａは、共通アーム８の他方の先端面に固定されているが、側面部８３ａは、先端部２４の上面に固定されていても良い。また、上述した形態では、ベルト６０は、スチールベルトであるが、ベルト６０は、ゴム製のベルトであっても良い。 In the embodiment described above, the side surface portion 53a of the fixing member 53 is fixed to one of the front end surfaces of the common arm 8, but the side surface portion 53a may be fixed to the upper surface of the front end portion 23. Similarly, in the embodiment described above, the side surface portion 83 a of the fixing member 83 is fixed to the other tip surface of the common arm 8, but the side surface portion 83 a may be fixed to the upper surface of the tip portion 24. In the above-described embodiment, the belt 60 is a steel belt, but the belt 60 may be a rubber belt.
　上述した形態では、ハンド４と共通アーム８との間に１個のアーム６が配置され、ハンド５と共通アーム８との間に１個のアーム７が配置されているが、ハンド４、５と共通アーム８との間に２個以上のアームが配置されても良い。また、上述した形態では、共通アーム８は、略Ｖ形状に形成されているが、共通アーム８は、直線状に形成されていても良い。さらに、上述した形態では、ロボット１は、２個のアーム６、７が回動可能に連結される共通アーム８を備えているが、ロボット１は、共通アーム８に代えて、１個のアーム６またはアーム７が先端側に回動可能に連結されるとともに基端側が本体部９に回動可能に連結されるアームを備えていても良い。 In the embodiment described above, one arm 6 is disposed between the hand 4 and the common arm 8, and one arm 7 is disposed between the hand 5 and the common arm 8. Two or more arms may be disposed between the common arm 8 and the common arm 8. Moreover, in the form mentioned above, although the common arm 8 is formed in the substantially V shape, the common arm 8 may be formed in linear form. Furthermore, in the above-described form, the robot 1 includes the common arm 8 to which the two arms 6 and 7 are rotatably connected. However, the robot 1 is replaced with the single arm 8 instead of the common arm 8. 6 or the arm 7 may be provided so as to be pivotally connected to the distal end side, and the base end side may be pivotally connected to the main body 9.
　上述した形態では、ロボット１によって搬送される搬送対象物は、液晶ディスプレイ用のガラス基板であるが、ロボット１によって搬送される搬送対象物は、有機ＥＬ（有機エレクトロルミネッセンス）ディスプレイ用のガラス基板であっても良いし、半導体ウエハ等であっても良い。 In the above-described embodiment, the object to be transported by the robot 1 is a glass substrate for a liquid crystal display, but the object to be transported by the robot 1 is a glass substrate for an organic EL (organic electroluminescence) display. It may be a semiconductor wafer or the like.
　１　ロボット（産業用ロボット）
　６、７　アーム（第２アーム）
　６ａ、７ａ　開口部
　８　共通アーム（第１アーム）
　３２　回動軸
　３３　軸受
　３４　磁性流体シール
　３７　プーリ（第１プーリ）
　３８、７８　プーリ（第２プーリ）
　５０　支持軸
　５１　ネジ
　５３、８３　固定部材
　５３ａ、８３ａ　側面部
　５３ｂ、８３ｂ　上面部
　６０　ベルト 1 Robot (industrial robot)
6, 7 Arm (2nd arm)
6a, 7a Opening 8 Common arm (first arm)
32 Rotating shaft 33 Bearing 34 Magnetic fluid seal 37 Pulley (first pulley)
38, 78 pulley (second pulley)
50 Support shaft 51 Screw 53, 83 Fixing member 53a, 83a Side surface 53b, 83b Upper surface 60 Belt

Claims (5)

  1. 　第１アームと、中空状に形成され前記第１アームの先端側に基端側が回動可能に連結される第２アームと、前記第２アームの基端側に固定される回動軸と、前記回動軸を回動可能に支持するとともに前記第１アームの先端側に保持される軸受と、前記回動軸の外周側に配置されるとともに前記第１アームの先端側に保持される磁性流体シールと、前記第２アームの基端側の内部に配置され前記第２アームの基端側に固定または形成されるかあるいは前記回動軸に固定される支持軸と、前記第２アームの基端側に配置され前記支持軸に回動可能に支持される第１プーリと、前記第２アームの先端側に配置される第２プーリと、前記第１プーリと前記第２プーリとに架け渡されるベルトと、前記第１プーリが固定されるとともに前記第１アームの先端側の外側面に固定される固定部材とを備えることを特徴とする産業用ロボット。 A first arm, a second arm that is formed in a hollow shape and is pivotally connected to the distal end side of the first arm, and a pivot shaft that is fixed to the proximal end side of the second arm; A bearing that rotatably supports the rotation shaft and is held on the distal end side of the first arm, and a magnet that is disposed on the outer peripheral side of the rotation shaft and is held on the distal end side of the first arm. A fluid seal, a support shaft disposed inside the base end side of the second arm and fixed or formed on the base end side of the second arm, or fixed to the pivot shaft; and A first pulley disposed on the base end side and rotatably supported by the support shaft, a second pulley disposed on a distal end side of the second arm, and the first pulley and the second pulley. The belt passed and the first pulley are fixed and the first arm Industrial robot, comprising a fixed member fixed to the outer surface of the distal end side.
  2. 　前記支持軸は、前記回動軸に固定されていることを特徴とする請求項１記載の産業用ロボット。 The industrial robot according to claim 1, wherein the support shaft is fixed to the rotation shaft.
  3. 　前記回動軸を前記第２アームの基端側に固定するとともに、前記支持軸を前記回動軸に固定するネジを備えることを特徴とする請求項２記載の産業用ロボット。 3. The industrial robot according to claim 2, further comprising a screw for fixing the rotation shaft to the proximal end side of the second arm and fixing the support shaft to the rotation shaft.
  4. 　前記ベルトは、鋼板製のスチールベルトであることを特徴とする請求項２または３記載の産業用ロボット。 4. The industrial robot according to claim 2, wherein the belt is a steel belt made of steel plate.
  5. 　前記第２アームは、前記第１アームよりも上側に配置され、
    　前記第２アームの基端側の下面部に前記回動軸が固定され、
    　前記第２アームの基端側の上面部分には、前記第１プーリの上端側部分が配置される開口部が形成され、
    　前記第１プーリの上端は、前記第２アームの基端側の上面よりも上側に配置され、
    　前記固定部材は、前記第１アームの先端側の外側面に固定される側面部と、前記側面部の上端に繋がる上面部とを備え、
    　前記上面部は、前記第２アームの基端側の上面よりも上側に配置され、
    　前記第１プーリの上端は、前記上面部に固定されていることを特徴とする請求項１から４のいずれかに記載の産業用ロボット。     The second arm is disposed above the first arm,
    The pivot shaft is fixed to the lower surface portion of the base end side of the second arm,
    In the upper surface portion on the proximal end side of the second arm, an opening in which the upper end side portion of the first pulley is disposed is formed,
    The upper end of the first pulley is disposed above the upper surface of the base end side of the second arm,
    The fixing member includes a side surface portion fixed to the outer surface on the distal end side of the first arm, and an upper surface portion connected to the upper end of the side surface portion,
    The upper surface portion is disposed above the upper surface of the base end side of the second arm,
    The industrial robot according to claim 1, wherein an upper end of the first pulley is fixed to the upper surface portion.
PCT/JP2017/026777 2016-07-28 2017-07-25 Industrial robot WO2018021270A1 (en)

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