JP2006224297A - Industrial robot - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an industrial robot equipped with a simply structured traveling mechanism. <P>SOLUTION: This industrial robot includes: a rotatable robot arm 3; a hand section 4 which is mounted on the front end of the robot 3 and is capable of holding a work; a drive section 9 for driving the hand section 4 and the robot arm 3; a support base 2 equipped with a mount section 2A for mounting the drive section 9; and a parallel link mechanism 5 for moving the support base 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an industrial robot.

    As an industrial robot, for example, there is a substrate transfer robot that can be used in a vacuum environment disclosed in Japanese Patent Application Laid-Open No. 2001-157974.

  This substrate transfer robot is shown in FIG. The machine base 101 is separated into an air tank 102 and a vacuum tank 103, and the drive box 105 in the air tank 102 is moved up and down by a moving mechanism having a drive motor 104 and a ball screw 120. The rotation base 106 can be moved up and down. Further, the rotation base 106 can be turned by rotating the third shaft 108 by the third drive motor 107.

  The rotation base 106 is provided with a first arm body 109 and a second arm body 110. By rotating the first shaft 112 by the first drive motor 111, the first arm body 109 can be rotated. Further, the second arm body 110 can be rotated by rotating the second shaft 114 by the second drive motor 113.

  A second shaft 114 is disposed in the third shaft 108, and a first shaft 112 is disposed in the second shaft 114. About the space outside the third shaft 108, the vacuum chamber 103 and the atmospheric chamber 102 are connected by mounting the vacuum bellows 117 so as to surround the third shaft 108 between the main body case upper wall 115 and the housing portion 116. Separated. Although not particularly specified, the space between the third shaft 108 and the second shaft 114 and the space between the second shaft 114 and the first shaft 112 can be separated from the vacuum chamber 103 by providing a magnetic fluid seal. It seems that the atmosphere tank 102 is separated.

JP 2001-157974 A

  However, the substrate transfer robot shown in Patent Document 1 moves the drive box 105 in the vertical direction via a moving mechanism having the drive motor 104 and the ball screw 120. For this reason, when the moving distance (stroke) is increased, a member for supporting the drive box 105 is required, and there is a problem that the structure for moving becomes more complicated. Furthermore, there is a problem that the size is increased.

  Furthermore, in the above-described substrate transfer robot, when used in a vacuum environment, a magnetic fluid seal and a vacuum bellows 117 suitable for the moving distance for moving the rotary base 106 up and down are necessary. The magnetic fluid seal and the vacuum bellows 117 need to be enlarged. For this reason, the entire robot becomes large and expensive.

  Further, the vacuum bellows 117 has a bellows structure manufactured by welding. As the size of the vacuum bellows increases, cleaning becomes difficult and particle generation (dust generation) is likely to occur.

  Furthermore, the durability of the repeated operation of the vacuum bellows 117 is generally worse than the durability of the robot body. For this reason, durability as a whole vacuum robot deteriorates and reliability deteriorates.

  An object of this invention is to provide the industrial robot provided with the moving mechanism of a simple structure. It is another object of the present invention to provide an industrial robot that does not require the use of a vacuum bellows even when used in a vacuum environment. It is another object of the present invention to provide an industrial robot capable of designing a magnetic fluid seal regardless of the vertical movement distance.

  In order to achieve such an object, the present invention provides a rotatable robot arm, a hand unit provided at the tip of the robot arm and capable of holding a workpiece, and a drive unit for driving the hand unit and the robot arm. And a support base having an attachment portion for attaching the drive unit, and a parallel link mechanism for moving the support base.

  Therefore, the robot arm, the hand unit, and the drive unit can be moved by moving the support base with a parallel link mechanism having a simple structure. Furthermore, since the drive unit is attached to the attachment part of the support base, the gravity center positions of the robot arm, the hand part, and the drive part can be held close to the support base. Thereby, the rigidity of a parallel link mechanism can be improved.

  In the present invention, it is preferable that a drive unit of the industrial robot is provided so as to sink into the support base. In the present invention, it is preferable that the drive unit of the industrial robot is attached to the opposite side of the robot arm and the hand unit via the support base. Accordingly, the center of gravity of the robot arm or the hand unit can be brought close to the support base that supports the parallel link mechanism, and the rigidity of the parallel link mechanism can be increased.

  In the present invention, the parallel link mechanism may move the support base up and down, and the parallel link mechanism may move the support base in a plane. That is, the robot arm and hand unit are moved up and down by moving the support base up and down, the robot arm and hand unit are moved up and down by moving the support base in a plane, and the support base is moved up and down and moved in plane. Thus, the robot arm and the hand unit can be moved up and down and moved in a plane.

  Furthermore, according to the present invention, the parallel link constituting the parallel link mechanism has one first arm and two second arms, and the second arm is disposed on the support base side, It is preferable to form a parallelogram together with the connecting shaft. Thereby, the rigidity of a parallel link can be improved.

  Moreover, it is preferable that the movement locus | trajectory of the connection axis | shaft which connects the said 1st arm and the 2nd arm among the said 2 connection shafts is an outer side in the horizontal direction rather than the movement locus | trajectory of another connection shaft. Thereby, when the parallel link mechanism moves in the vertical direction, the support base can move in the vertical direction even if a disturbance occurs during the operation of the parallel link mechanism.

  Furthermore, it is preferable that the length of the first arm is equal to or shorter than the length of the second arm.

  The industrial robot is preferably installed in a vacuum environment for work.

  Therefore, the parallel link mechanism can be installed in a vacuum environment. Since the parallel link mechanism is installed in a vacuum environment, the vacuum environment can be sealed without using a vacuum bellows. Also, the magnetic fluid seal can be designed regardless of the vertical movement distance of the support base.

  The present invention relates to a rotatable robot arm, a hand portion that is provided at the tip of the robot arm and can hold a workpiece, a drive portion that drives the hand portion and the robot arm, and an attachment that attaches the drive portion And a parallel link mechanism for moving the support base. Accordingly, the robot arm, the hand unit, and the drive unit can be moved by moving the support base with a parallel link mechanism having a simple structure. Furthermore, since the drive unit is attached to the attachment part of the support base, the gravity center positions of the robot arm, the hand part, and the drive part can be held close to the support base. Thereby, the rigidity of a parallel link mechanism can be improved.

  Hereinafter, the configuration of the present invention will be described in detail based on the best mode shown in the drawings.

  1 to 6 show a first embodiment of an industrial robot of the present invention. The industrial robot is, for example, a workpiece transfer robot in a vacuum environment that transfers a workpiece (not shown) in the vacuum environment 1. The industrial robot is installed in the vacuum environment 1 and performs work. The robot arm 3 is attached to the support base 2 and is rotatable, and the hand unit is provided at the tip of the robot arm 3 and can hold the workpiece. 4 and a parallel link mechanism 5 for moving the support base 2. The parallel link mechanism 5 is a moving mechanism that moves the support base 2 in the vertical direction in FIG. A drive source 6 that drives the parallel link mechanism 5 is disposed outside the vacuum environment 1.

  In the present embodiment, two second robot arms 3B are connected to both ends of one first robot arm 3A, and a hand portion 4 is connected to the tip of each second robot arm 3B.

  The base 7 on which the industrial robot is installed is covered with a partition wall (not shown), and the inside of the partition wall is a vacuum environment 1. That is, the support base 2, the robot arm 3, the hand unit 4, and the manipulator 8 including these drive mechanisms are mechanically supported by the parallel link mechanism 5 in the vacuum environment 1. A drive unit 9 including a plurality of motors (not shown) for driving the robot arm 3 and the hand unit 4 is disposed on the bottom surface (attachment unit 2A) of the support base 2 and covered with a housing 90.

Further, in the present embodiment, the rotation shaft 81 is formed so as to extend through the support base 2 from the inside of the housing 90, and the driving force of the motor in the housing 90 is transmitted via the rotation shaft 81. The information is transmitted to the robot arm 3 and the hand unit 4. In this way, a part of the drive unit 9 that drives the robot arm 3 and the hand unit 4 passes through the hole as the attachment unit 2 </ b> A formed in the support base 2, and the drive unit 9 is attached to the bottom surface of the support base 2. Therefore, the rigidity of the parallel link mechanism 5 (parallel link 12) can be increased by bringing the center of gravity of the robot arm 3, the hand unit 4, and the drive unit closer to the support base 2 that supports the parallel link mechanism 5. ing.
Further, the manipulator 8 mounted on the support base 2 can lower its center of gravity, that is, bring its center of gravity closer to the support base 2. For example, even if vibration occurs during operation, the vibration Can be suppressed.

In this embodiment, the manipulator 8 is disposed in a vacuum environment, but the motor wiring is connected to a control unit (not shown) through the flexible tube 10 attached to the bottom surface of the housing 90. For this reason, the inside of the flexible tube 10 and the housing 9 become the atmospheric environment 11.
However, the space between the support base 2 and the housing 90 and the space between the housing 90 and the flexible tube 10 are vacuum sealed by, for example, an O-ring (not shown). Further, a magnetic fluid (not shown) is provided between the rotating shaft 81 extending through the support base 2 from the housing 90 and its opposing member to transmit the driving force of the motor in the housing 90 to the robot arm 3 and the hand unit 4. It is vacuum sealed by a seal.
For these reasons, the vacuum environment 1 in which the manipulator 8 is disposed and the atmospheric environment 11 in which the motor is disposed are reliably separated. Further, since the rotary shaft 81 extending through the support base 2 does not move in the axial direction, the magnetic fluid seal is compared with the conventional case where the rotary shaft moving in the axial direction is vacuum sealed. Can be narrowed. 2 and 3, the description of the flexible tube 10 is omitted.

  In the present embodiment, the parallel link mechanism 5 includes, for example, three sets of parallel links 12, which are driven by one link drive motor (drive source) 6. However, the number of parallel links 12 is not limited to three. The parallel link 12 connects the support body 13 and the support base 2 on the base 7 and mechanically restrains the manipulator 8. The three sets of parallel links 12 are arranged at intervals of 120 degrees so as to surround the support base 2 and the housing 90 when viewed from above.

As shown in FIG. 5, the parallel link 12 has one first arm 12 a on the base 7 side and two second arms 12 b on the support base 2 side. The two second arms 12b, together with the intermediate connecting shaft 17 and the connecting shaft 18 as two connecting shafts, form a parallelogram so as to increase its rigidity. In the present embodiment, the length La of the first arm 12a is shorter than the length Lb of the second arm 12b.
Further, as shown in FIG. 1, the movement trajectory of the intermediate connecting shaft 17 that connects the first arm 12a and the second arm 12b is set to be more outward in the horizontal direction than the movement trajectory of the connecting shaft 18. .
Thereby, in the operation range of the parallel link 12, the angle change of the angle α formed between the second arm 12b and the support base 2 is reduced, and the angle α maintains an acute angle range smaller than 90 degrees. . Thus, by maintaining an acute angle, when the parallel link mechanism 5 moves in the vertical direction, the support base 2 moves stably in the vertical direction even if a disturbance occurs during the movement of the parallel link 12. Can be done.
The length La of the first arm 12a and the length Lb of the second arm 12b may be the same.

The lower end of the first arm 12 a is fixed to a link drive shaft 16 that is rotatably supported by the support 13 via an atmospheric bearing 14 and a vacuum bearing 15.
In the present embodiment, the three link drive shafts 16 are arranged at intervals of 120 degrees so as to surround the support base 2 and the housing 9 when viewed from above.

  Further, in the present embodiment, the link drive shaft 16 is disposed at a position higher than the base 7. That is, as shown in FIG. 1, the first arm 12a and the second arm 12b are folded so as to overlap each other, the first arm 12a is directed obliquely downward, and the intermediate connecting shaft 17 contacts the pedestal 7. The height is secured so that the position where it is lowered is the lowest position. In other words, the height of the link drive shaft 16 ensures a storage space for the housing 90.

  The stroke (moving distance in the vertical direction) of the parallel link 12 is obtained by the product of the link lengths La and Lb and the link operating angle θ, but since the moving range of the first arm 12a can be increased, a short link A predetermined stroke can be secured with the lengths La and Lb. Therefore, (1) the rigidity of the parallel link 12 is increased, (2) the torque of the drive motor 6 is reduced, the speed reducer can be reduced in size, and (3) the space occupied by the manipulator 8 can be reduced. .

Further, as shown in FIG. 5, the upper end of the first arm 12 a is fixed to the center of the intermediate connecting shaft 17. The lower end of the second arm 12 b is rotatably connected to both ends of the intermediate connecting shaft 17 via a vacuum bearing 15. Further, the upper end of the second arm 12 b is rotatably connected to both ends of a connecting shaft 18 passing through the convex portion 2 a of the support base 2 via a vacuum bearing 15. That is, the first arm 12a is configured with one degree of freedom and the second arm 12b is also configured with one degree of freedom, and the manipulator 8 is mechanically constrained by the three sets of parallel links 12 in the vertical direction.
Further, in the present embodiment, the first arm 12a, the second arm 12b, the intermediate connecting shaft 17, and the connecting shaft 18 are formed in a pipe shape, for example, so as to reduce the weight while maintaining a certain rigidity. I have to.

As described above, the parallel link mechanism 5 operates as follows.
In a state where the link drive shaft 16 is not rotating (lowermost position), as shown by a solid line in FIG. 1, the first arm 12a is directed obliquely downward and the second arm 12b is overlapped so that the parallel link 12 is overlapped. Is folded. From this state, when the link drive shaft 16 rotates and the first arm 12a is lifted, the bending angle of the second arm 12b decreases, and the parallel link 12 extends to lift the support base 2 (two-dot chain line in FIG. 2). position). When the link drive shaft 16 rotates in the reverse direction, the extended parallel link 12 is folded to lower the support base 2 (solid line position in FIG. 1).

  As shown in FIG. 6, the link drive motor 6 is disposed outside the vacuum environment 1. In the present embodiment, the link drive motor 6 is installed in the cover 19 that covers the hole 7a of the pedestal 7, so that the link drive motor 6 is disposed in the atmospheric environment 11 (outside the vacuum environment 1) below the pedestal 7. . The driving force of the link driving motor 6 is transmitted to the pulley 20 → the timing belt 21 → the timing pulley 22 → the rotating shaft 23 → the bevel gear 24 → the bevel gear 25 → the atmospheric bearing speed reducer 26 → the link driving shaft 16. The timing pulley 22, the rotating shaft 23, the bevel gears 24 and 25, and the atmospheric bearing speed reducer 26 are provided for each parallel link 12. The timing belt 21 is wound around the timing pulleys 22 of the three sets of parallel links 12, and the three sets of parallel links 12 can be simultaneously driven by the same angle by one link driving motor 6. The timing belt 21 is tensioned by two idler pulleys 27 (see FIG. 4) to prevent the occurrence of slack.

  In the present embodiment, since the link drive motor 6 is disposed in the atmospheric environment 11, the transmission path of the driving force of the link drive motor 6 is also the atmospheric environment 11. A magnetic fluid seal 28 is provided between the support 13 on the atmospheric environment 11 side and the link drive shaft 16 to separate the vacuum environment 1 and the atmospheric environment 11. Thus, by installing the magnetic fluid seal 28 on the link drive shaft 16 of the parallel link 12, a moving mechanism that moves in the vertical direction without using the vacuum bellows required for the robot shown in FIG. A vacuum seal can be performed.

  By disposing the link drive motor 6 in the cover 19, it becomes possible to dispose the link drive motor 6 so as to protrude on the base 7, and the link drive motor 6 is disposed by effectively utilizing the empty space. be able to.

  In this industrial robot, the three sets of parallel links 12 are simultaneously operated by the link drive motor 6 so that the manipulator 8 can be moved in the vertical direction in the vacuum environment 1 while maintaining the posture of the support base 2 horizontally. it can. That is, the manipulator 8 can be moved up and down in the vacuum environment 1 without using the vacuum bellows necessary for the robot shown in FIG. Further, since the manipulator 8 is moved up and down by the parallel link mechanism 5, it is not necessary to move the rotation axis in the axial direction with respect to the opposing member as in the robot shown in FIG. The magnetic fluid seal 28 to be separated can be designed regardless of the vertical movement distance of the manipulator 8. For these reasons, it is possible to suppress an increase in the size of the entire apparatus and to realize a reduction in price.

In the industrial robot described above, a rotatable robot arm 3, a hand unit 4 provided at the tip of the robot arm 3 and capable of holding a workpiece, and a drive unit 9 for driving the hand unit 4 and the robot arm 3; The support base 2 provided with the attaching part 2A for attaching the drive part 9 and the parallel link mechanism 5 for moving the support base 2 are provided.
For this reason, the industrial robot can be miniaturized and the manufacturing cost can be reduced. In addition, if the robot size is the same, the vertical stroke of the support base 2 can be increased. Further, even if the vertical stroke of the support base 2 is increased, the robot size does not increase so much, which is suitable for manufacturing a robot having a large vertical stroke of the support base 2.

  Moreover, since the parallel link mechanism 5 is used for the movement of the support base 2, it is possible to provide an inexpensive robot having a large stroke (movement distance) in the vertical direction of the support base 2.

Further, in the industrial robot described above, since no vacuum bellows is used, generation of particles due to the vacuum bellows can be prevented, and the reliability of the entire apparatus can be improved.
Furthermore, the magnetic fluid seal 28 can be designed regardless of the vertical movement distance of the support base 2, and the robot can be further miniaturized and the manufacturing cost can be further reduced.

  The industrial robot described above may be, for example, a vacuum SCARA robot, a vacuum arm robot, or the like, and can be downsized by moving the manipulator 8 up and down by the parallel link mechanism 5 and further has a large moving distance in the up and down direction. An inexpensive vacuum robot can be manufactured.

  The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention.

  For example, in the above description, the first arm 12a and the second arm 12b of the parallel link 12 are each set to one degree of freedom and the support base 2 is restrained so as to be movable only in the vertical direction. is not. For example, the support base 2 may be moved in a plane (moving in the horizontal direction) by the parallel link mechanism 5. In other words, it may be movable in the vertical direction plus the horizontal direction, or may be movable only in the horizontal direction.

  7 to 11 show an example of an industrial robot in which the support base 2 can be moved in the combined direction of the vertical direction and the horizontal direction. In addition, the support base 2 can be moved only in the horizontal direction (moving distance in the horizontal direction is 0) as well as moving in the combined direction (oblique direction) of the vertical direction and the horizontal direction. (The movement distance in the vertical direction is 0).

  In the present embodiment, as shown in FIG. 10, the parallel link mechanism 5 includes, for example, three sets of parallel links 12, which are driven by three link drive motors (drive sources) 6. That is, each parallel link 12 is independently driven by a dedicated link drive motor 6. However, the number of parallel links 12 and link drive motors 6 is not limited to three. The parallel link 12 connects the support body 13 and the support base 2 on the base 7 and mechanically restrains the manipulator 8. The three sets of parallel links 12 are arranged at intervals of 120 degrees so as to surround the support base 2 and the housing 90 when viewed from above.

  The link drive motor 6 is disposed outside the vacuum environment 1 as in the above-described embodiment. In the present embodiment, the link drive motor 6 is installed in the cover 19 that covers the hole 7a of the pedestal 7, so that the link drive motor 6 is disposed in the atmospheric environment 11 (outside the vacuum environment 1) below the pedestal 7. . The driving force of the link driving motor 6 is transmitted to the pulley 20 → the timing belt 21 → the timing pulley 22 → the rotating shaft 23 → the bevel gear 24 → the bevel gear 25 → the atmospheric bearing speed reducer 26 → the link driving shaft 16. The transmission path is provided for each parallel link 12. Therefore, by independently controlling the three link drive motors 6, the link drive shafts 16 of the parallel links 12 can be independently controlled, and the parallel links 12 are independently raised and lowered (stretched / shrinked). can do.

  Since the link drive motor 6 is disposed in the atmospheric environment 11, the transmission path of the driving force of the link drive motor 6 is also the atmospheric environment 11. A magnetic fluid seal 28 is provided between the support 13 on the atmospheric environment 11 side and the link drive shaft 16 to separate the vacuum environment 1 and the atmospheric environment 11. Thus, by installing the magnetic fluid seal 28 on the link drive shaft 16 of the parallel link 12, it is possible to perform vacuum sealing without using the vacuum bellows required for the robot shown in FIG.

  By disposing the link drive motor 6 in the cover 19, it becomes possible to dispose the link drive motor 6 so as to protrude on the base 7, and the link drive motor 6 is disposed by effectively utilizing the empty space. be able to.

  In the present embodiment, the parallel link 12 has one first arm 12a and two second arms 12b as shown in FIG. The lower end of the first arm 12 a is fixed to a link drive shaft 16 that is rotatably supported by the support 13 via an atmospheric bearing 14 and a vacuum bearing 15. Further, the upper end of the first arm 12 a is fixed to the center of the intermediate connecting shaft 17. The lower end of the second arm 12b is rotatably connected to both ends of the intermediate connecting shaft 17 via two vacuum bearings 15 and 15 in which the directions of the rotation center axes are orthogonal. Further, the upper end of the second arm 12b is freely rotatable at both ends of the connecting shaft 18 penetrating the convex portion 2B of the support base 2 via two vacuum bearings 15 and 15 whose directions of the rotation center axes are orthogonal to each other. It is connected to. That is, the first arm 12 a is configured with one degree of freedom and the second arm 12 b is configured with two degrees of freedom, and the manipulator 8 is mechanically constrained by the three sets of parallel links 12. By controlling the first arms 12a of the three sets of parallel links 12 independently by the corresponding link drive motors 6, the manipulator 8 can be mechanically moved in the vertical direction, the horizontal direction, and the combined direction thereof.

As described above, the parallel link mechanism 5 operates as follows.
In a state where the link drive shaft 16 is not rotating, as shown by a solid line in FIG. 7, the first arm 12a is oriented horizontally (the lowermost position), and the parallel link 12 is folded. From this state, when the three link driving motors 6 are simultaneously operated and the first arms 12a of the three parallel links 12 are simultaneously lifted at the same angle, the bending angle of the second arm 12b is reduced and the parallel links 12 are extended. Then, the support base 2 is lifted while maintaining its horizontal posture (two-dot chain line in FIG. 7). When the three link drive motors 6 are simultaneously reversed, the three sets of parallel links 12 that have been extended are simultaneously folded and the support base 2 is lowered while maintaining its horizontal posture (solid line in FIG. 7). That is, the manipulator 8 moves up and down.

In the industrial robot shown in FIG. 7, a rotatable robot arm 3, a hand unit 4 that is provided at the tip of the robot arm 3 and can hold a workpiece, and a drive unit that drives the hand unit 4 and the robot arm 3. 9, a support base 2 having a mounting portion 2 </ b> A for attaching the drive unit 9, and a parallel link mechanism 5 for moving the support base 2.
For this reason, the industrial robot can be miniaturized and the manufacturing cost can be reduced. In addition, if the robot size is the same, the vertical stroke of the support base 2 can be increased. Further, even if the vertical stroke of the support base 2 is increased, the robot size does not increase so much, which is suitable for manufacturing a robot having a large vertical stroke of the support base 2.

  Moreover, since the parallel link mechanism 5 is used for the movement of the support base 2, it is possible to provide an inexpensive robot having a large stroke (movement distance) in the vertical direction of the support base 2.

  Furthermore, in this embodiment, by operating the three link drive motors 6 independently, the manipulator 8 can be moved horizontally without changing its height, or can be moved obliquely up and down.

  In the industrial robot shown in FIG. 7 as well, the vacuum bellows can be dispensed with similarly to the industrial robot shown in FIG. 1, and the magnetic fluid seal 28 can be designed regardless of the moving distance of the manipulator 8. For these reasons, it is possible to suppress an increase in the size of the entire apparatus and to realize a reduction in price. Further, since the vacuum bellows can be eliminated, the generation of particles due to the vacuum bellows can be prevented, and the reliability of the entire apparatus can be improved. Further, by moving the manipulator 8 by the parallel link mechanism 5, it is possible to reduce the size and to manufacture a vacuum robot having a large moving distance and an inexpensive price.

  In the above description, the driving force of the link driving motor 6 is transmitted using the timing belt 21, but the present invention is not necessarily limited to this configuration. For example, instead of the timing belt 21, a driving force may be transmitted using a rotating shaft or the like.

Further, in the above description, the magnetic fluid seal 28 is used for vacuum sealing, but the vacuum sealing may be performed by a method other than the magnetic fluid seal 28.
In this embodiment, the industrial robot is a work robot in a vacuum environment that transports a workpiece (not shown) in a vacuum environment. However, the present invention is not limited to this. For example, the industrial robot is used in an atmospheric environment. Also good.
Furthermore, the attachment portion 2A formed on the support base 2 is not limited to a hole shape without a bottom as in the present embodiment, and may have a shape having a bottom. Further, the support base 2 may be formed so as to share the function of the housing 90.

It is a side view which shows 1st Embodiment of the industrial robot of this invention. It is a perspective view in the state where the manipulator of the robot was raised. It is a perspective view in the state where the manipulator of the robot was lowered. It is a bottom view of the base of the robot. It is the figure of the state which notched and showed the parallel link of the robot partially, and was extended. It is sectional drawing which shows the mechanism which drives the parallel link of the robot. It is a side view which shows 2nd Embodiment of the industrial robot of this invention. It is the figure of the state which notched and showed the parallel link of the robot partially, and was extended. It is a figure which shows the 2nd arm seen from the arrow IX direction of FIG. It is a figure which shows arrangement | positioning of 3 sets of parallel links and link drive motors of the robot. It is sectional drawing which shows the mechanism which transmits the driving force of the link drive motor of the robot. It is sectional drawing of the conventional vacuum robot.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum environment 2 Support base 2A Mounting part 3 Robot arm 4 Hand part 5 Parallel link mechanism 6 Link drive motor (drive source which drives a parallel link mechanism)
9 Drive unit 12 Parallel link 12a First arm 12b Second arm 17 Intermediate connecting shaft 18 Connecting shaft

Claims (9)

  A rotatable robot arm, a hand unit provided at the tip of the robot arm and capable of holding a workpiece, a drive unit for driving the hand unit and the robot arm, and an attachment unit for attaching the drive unit An industrial robot comprising a support base and a parallel link mechanism for moving the support base.   The industrial robot according to claim 1, wherein the drive unit of the industrial robot is provided so as to sink into the support base.   2. The industrial robot according to claim 1, wherein the drive unit of the industrial robot is attached to the opposite side of the robot arm and the hand unit via the support base.   The industrial robot according to claim 1, wherein the parallel link mechanism moves the support base up and down.   The industrial robot according to claim 1, wherein the parallel link mechanism moves the support base in a plane.   The parallel link that constitutes the parallel link mechanism has one first arm and two second arms, and the second arm is disposed on the support base side, and has parallel four sides along with two connecting shafts. The industrial robot according to claim 1, wherein the industrial robot has a shape.   The moving trajectory of the connecting shaft that connects the first arm and the second arm among the two connecting shafts is more outward in the horizontal direction than the moving trajectory of the other connecting shaft. Item 7. The industrial robot according to Item 6.   The industrial robot according to claim 1, wherein a length of the first arm is equal to or less than a length of the second arm. The industrial robot according to claim 1, wherein the industrial robot is installed in a vacuum environment to perform work.

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