TW200631743A - Industrial robot - Google Patents

Industrial robot

Info

Publication number
TW200631743A
TW200631743A TW095102222A TW95102222A TW200631743A TW 200631743 A TW200631743 A TW 200631743A TW 095102222 A TW095102222 A TW 095102222A TW 95102222 A TW95102222 A TW 95102222A TW 200631743 A TW200631743 A TW 200631743A
Authority
TW
Taiwan
Prior art keywords
industrial robot
manipulator
supporting base
holding portion
driving portion
Prior art date
Application number
TW095102222A
Other languages
Chinese (zh)
Other versions
TWI398334B (en
Inventor
Yasunori Takeuchi
Takayuki Yazawa
Hiroto Nakajima
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW200631743A publication Critical patent/TW200631743A/en
Application granted granted Critical
Publication of TWI398334B publication Critical patent/TWI398334B/en

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides an industrial robot with simple moving structure. It comprises a manipulator 3 of rotation, a holding portion 4 which is located in the front end of the manipulator 3, capable of maintaining the workpiece, a driving portion 9 which drives the holding portion 4 and the manipulator 3, a supporting base 2 which has the assemble portion 2A with the driving portion 9, and a parallel linkage 5 which makes the said supporting base 2 move.
TW095102222A 2005-01-21 2006-01-20 Industrial robots TWI398334B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005014331 2005-01-21
JP2006010451A JP4719010B2 (en) 2005-01-21 2006-01-18 Industrial robot

Publications (2)

Publication Number Publication Date
TW200631743A true TW200631743A (en) 2006-09-16
TWI398334B TWI398334B (en) 2013-06-11

Family

ID=36986089

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095102222A TWI398334B (en) 2005-01-21 2006-01-20 Industrial robots

Country Status (3)

Country Link
JP (1) JP4719010B2 (en)
KR (1) KR101209299B1 (en)
TW (1) TWI398334B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8596950B2 (en) 2007-09-13 2013-12-03 Kabushiki Kaisha Yaskawa Denki Transfer robot
TWI461272B (en) * 2011-09-30 2014-11-21 Hon Hai Prec Ind Co Ltd Robot
TWI480142B (en) * 2010-08-12 2015-04-11 Hon Hai Prec Ind Co Ltd Robot arm mechanism

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254138A (en) * 2007-04-06 2008-10-23 Yaskawa Electric Corp Articulated robot
JP4970128B2 (en) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 Industrial robot and collective processing device
US8272830B2 (en) * 2008-10-07 2012-09-25 Applied Materials, Inc. Scissor lift transfer robot
US9691650B2 (en) 2009-09-29 2017-06-27 Applied Materials, Inc. Substrate transfer robot with chamber and substrate monitoring capability
JP5563271B2 (en) * 2009-10-19 2014-07-30 川崎重工業株式会社 Substrate transfer robot
JP5471399B2 (en) * 2009-12-17 2014-04-16 株式会社安川電機 Transfer robot
TWI691388B (en) 2011-03-11 2020-04-21 美商布魯克斯自動機械公司 Substrate processing tool
JP5893072B2 (en) * 2014-04-16 2016-03-23 川崎重工業株式会社 Substrate transfer robot
JP6518037B2 (en) * 2014-04-28 2019-05-22 川崎重工業株式会社 Industrial robot
CN105480714A (en) * 2015-12-29 2016-04-13 天津大学 Large LCD glass substrate handling robot

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446781A (en) * 1990-06-11 1992-02-17 Seiko Instr Inc Magnetic levitation type carrying robot in vacuum
JP3781071B2 (en) * 1997-05-21 2006-05-31 株式会社安川電機 Vacuum robot
JPH11188669A (en) * 1997-12-25 1999-07-13 Mitsubishi Electric Corp Conveying device
JPH11238779A (en) * 1998-02-23 1999-08-31 Mecs Corp Thin-type substrate carrying multiple joint robot
JP3089230B2 (en) * 1998-03-20 2000-09-18 川崎重工業株式会社 Parallel link robot
JP3806273B2 (en) * 1999-09-17 2006-08-09 株式会社ジェイテクト 4-DOF parallel robot
JP2001157974A (en) * 1999-11-30 2001-06-12 Assist Japan Kk Double arm type substrate carrying arm
US6395648B1 (en) * 2000-02-25 2002-05-28 Wafermasters, Inc. Wafer processing system
JP4235931B2 (en) * 2000-04-14 2009-03-11 株式会社安川電機 Parallel link robot
JP4558981B2 (en) * 2000-11-14 2010-10-06 株式会社ダイヘン Transfer robot

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8596950B2 (en) 2007-09-13 2013-12-03 Kabushiki Kaisha Yaskawa Denki Transfer robot
TWI480142B (en) * 2010-08-12 2015-04-11 Hon Hai Prec Ind Co Ltd Robot arm mechanism
TWI461272B (en) * 2011-09-30 2014-11-21 Hon Hai Prec Ind Co Ltd Robot
US8910539B2 (en) 2011-09-30 2014-12-16 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Robot with reducer

Also Published As

Publication number Publication date
JP4719010B2 (en) 2011-07-06
TWI398334B (en) 2013-06-11
KR20060085211A (en) 2006-07-26
KR101209299B1 (en) 2012-12-06
JP2006224297A (en) 2006-08-31

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