TW200631743A - Industrial robot - Google Patents
Industrial robotInfo
- Publication number
- TW200631743A TW200631743A TW095102222A TW95102222A TW200631743A TW 200631743 A TW200631743 A TW 200631743A TW 095102222 A TW095102222 A TW 095102222A TW 95102222 A TW95102222 A TW 95102222A TW 200631743 A TW200631743 A TW 200631743A
- Authority
- TW
- Taiwan
- Prior art keywords
- industrial robot
- manipulator
- supporting base
- holding portion
- driving portion
- Prior art date
Links
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides an industrial robot with simple moving structure. It comprises a manipulator 3 of rotation, a holding portion 4 which is located in the front end of the manipulator 3, capable of maintaining the workpiece, a driving portion 9 which drives the holding portion 4 and the manipulator 3, a supporting base 2 which has the assemble portion 2A with the driving portion 9, and a parallel linkage 5 which makes the said supporting base 2 move.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005014331 | 2005-01-21 | ||
JP2006010451A JP4719010B2 (en) | 2005-01-21 | 2006-01-18 | Industrial robot |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200631743A true TW200631743A (en) | 2006-09-16 |
TWI398334B TWI398334B (en) | 2013-06-11 |
Family
ID=36986089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095102222A TWI398334B (en) | 2005-01-21 | 2006-01-20 | Industrial robots |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4719010B2 (en) |
KR (1) | KR101209299B1 (en) |
TW (1) | TWI398334B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8596950B2 (en) | 2007-09-13 | 2013-12-03 | Kabushiki Kaisha Yaskawa Denki | Transfer robot |
TWI461272B (en) * | 2011-09-30 | 2014-11-21 | Hon Hai Prec Ind Co Ltd | Robot |
TWI480142B (en) * | 2010-08-12 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | Robot arm mechanism |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008254138A (en) * | 2007-04-06 | 2008-10-23 | Yaskawa Electric Corp | Articulated robot |
JP4970128B2 (en) * | 2007-04-27 | 2012-07-04 | 日本電産サンキョー株式会社 | Industrial robot and collective processing device |
US8272830B2 (en) * | 2008-10-07 | 2012-09-25 | Applied Materials, Inc. | Scissor lift transfer robot |
US9691650B2 (en) | 2009-09-29 | 2017-06-27 | Applied Materials, Inc. | Substrate transfer robot with chamber and substrate monitoring capability |
JP5563271B2 (en) * | 2009-10-19 | 2014-07-30 | 川崎重工業株式会社 | Substrate transfer robot |
JP5471399B2 (en) * | 2009-12-17 | 2014-04-16 | 株式会社安川電機 | Transfer robot |
TWI691388B (en) | 2011-03-11 | 2020-04-21 | 美商布魯克斯自動機械公司 | Substrate processing tool |
JP5893072B2 (en) * | 2014-04-16 | 2016-03-23 | 川崎重工業株式会社 | Substrate transfer robot |
JP6518037B2 (en) * | 2014-04-28 | 2019-05-22 | 川崎重工業株式会社 | Industrial robot |
CN105480714A (en) * | 2015-12-29 | 2016-04-13 | 天津大学 | Large LCD glass substrate handling robot |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0446781A (en) * | 1990-06-11 | 1992-02-17 | Seiko Instr Inc | Magnetic levitation type carrying robot in vacuum |
JP3781071B2 (en) * | 1997-05-21 | 2006-05-31 | 株式会社安川電機 | Vacuum robot |
JPH11188669A (en) * | 1997-12-25 | 1999-07-13 | Mitsubishi Electric Corp | Conveying device |
JPH11238779A (en) * | 1998-02-23 | 1999-08-31 | Mecs Corp | Thin-type substrate carrying multiple joint robot |
JP3089230B2 (en) * | 1998-03-20 | 2000-09-18 | 川崎重工業株式会社 | Parallel link robot |
JP3806273B2 (en) * | 1999-09-17 | 2006-08-09 | 株式会社ジェイテクト | 4-DOF parallel robot |
JP2001157974A (en) * | 1999-11-30 | 2001-06-12 | Assist Japan Kk | Double arm type substrate carrying arm |
US6395648B1 (en) * | 2000-02-25 | 2002-05-28 | Wafermasters, Inc. | Wafer processing system |
JP4235931B2 (en) * | 2000-04-14 | 2009-03-11 | 株式会社安川電機 | Parallel link robot |
JP4558981B2 (en) * | 2000-11-14 | 2010-10-06 | 株式会社ダイヘン | Transfer robot |
-
2006
- 2006-01-18 JP JP2006010451A patent/JP4719010B2/en active Active
- 2006-01-20 KR KR1020060006454A patent/KR101209299B1/en active IP Right Grant
- 2006-01-20 TW TW095102222A patent/TWI398334B/en active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8596950B2 (en) | 2007-09-13 | 2013-12-03 | Kabushiki Kaisha Yaskawa Denki | Transfer robot |
TWI480142B (en) * | 2010-08-12 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | Robot arm mechanism |
TWI461272B (en) * | 2011-09-30 | 2014-11-21 | Hon Hai Prec Ind Co Ltd | Robot |
US8910539B2 (en) | 2011-09-30 | 2014-12-16 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Robot with reducer |
Also Published As
Publication number | Publication date |
---|---|
JP4719010B2 (en) | 2011-07-06 |
TWI398334B (en) | 2013-06-11 |
KR20060085211A (en) | 2006-07-26 |
KR101209299B1 (en) | 2012-12-06 |
JP2006224297A (en) | 2006-08-31 |
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