KR101209299B1 - Industrial robot - Google Patents

Abstract

Provided is an industrial robot having a simple moving mechanism.

A rotatable robot arm 3, a hand part 4 provided at the tip of the robot arm 3 and capable of holding a work, and a drive part 9 for driving the hand part 4 and the robot arm 3 And a support base 2 having an attachment portion 2A to which the drive unit 9 is attached, and a parallel link mechanism 5 for moving the support base 2.

Description

Industrial Robots {INDUSTRIAL ROBOT}

BRIEF DESCRIPTION OF THE DRAWINGS It is a side view which shows 1st embodiment of the industrial robot of this invention.

2 is a perspective view of a state where the manipulator of the same robot is raised.

3 is a perspective view of a state where the manipulator of the same robot is lowered.

4 is a bottom view of the pedestal of the same robot.

Fig. 5 is a partially cutaway view of the parallel link of the same robot, showing the state of being stretched.

6 is a cross-sectional view showing a mechanism for driving parallel links of the same robot.

It is a side view which shows 2nd Embodiment of the industrial robot of this invention.

Fig. 8 is a partially cut-away view of the parallel link of the same robot, showing the state of being stretched.

FIG. 9 is a view showing a second arm seen in the direction of arrow IX of FIG. 8. FIG.

Fig. 10 is a diagram showing the arrangement of three sets of parallel links and a link drive motor of the same robot.

11 is a cross-sectional view showing a mechanism for transmitting a driving force of a link drive motor of the same robot.

12 is a sectional view of a conventional vacuum robot.

[Description of Symbols]

1 vacuum environment

2 support base

2A attachment

3 robot arm

4 hand parts

5 parallel link mechanism

6-link drive motor (drive source for driving parallel link mechanism)

12 parallel links

12a first arm

12b 2nd arm

17 intermediate connecting shaft

18 connecting shaft

As the industrial robot, for example, there is a substrate transfer robot that can be used in a vacuum environment disclosed in Japanese Patent Laid-Open No. 2001-157974.

This substrate transfer robot is shown in FIG. The base 101 is separated into the atmospheric tank 102 and the vacuum tank 103, and is the standby tank 102 by the moving mechanism which has the drive motor 104 and the ball screw 120. FIG. By rotating the drive box 105 in the ()), the rotating base 106 in the vacuum tank 103 can be moved. In addition, by rotating the third shaft 108 by the third drive motor 107, the rotation base 106 can be rotated.

The rotation base 106 is provided with a first arm body 109 and a second arm body 110. The first arm body 109 can be rotated by rotating the first shaft 112 by the first drive motor 111. In addition, by rotating the second shaft 114 by the second drive motor 113, the second arm body 110 can be rotated.

The second shaft 114 is disposed in the third shaft 108, and the first shaft 112 is disposed in the second shaft 114. With respect to the space outside the third shaft 108, by mounting the vacuum bellows 117 so as to surround the third shaft 108 between the main body case upper wall 115 and the housing portion 116, The vacuum tank 103 and the standby tank 102 are separated. Although not particularly specified, the magnetic fluid is about the space between the third axis 108 and the second axis 114 and between the second axis 114 and the first axis 112. It is considered that the vacuum tank 103 and the standby tank 102 are separated by providing a seal.

[Patent Document 1] Japanese Patent Laid-Open No. 2001-157974

However, the substrate transfer robot shown in Patent Document 1 is moving the drive box 105 in the up and down direction through a moving mechanism having the drive motor 104 and the ball screw 120. Therefore, the movement distance (stroke ( If the stroke length) is increased, a member supporting the drive box 105 is required, and the structure for moving becomes more complicated. In addition, there is a problem that the size is increased.

In the above-described substrate transfer robot, when used in a vacuum environment, a magnetic fluid seal or a vacuum bellows 117 suitable for the movement distance for moving the rotation base 106 up and down is required, so that it is proportional to the movement distance up and down. It is necessary to enlarge the magnetic fluid seal and the vacuum bellows 117. For this reason, the whole robot becomes large and it becomes expensive.

In addition, the vacuum bellows 117 is a corrugated box structure produced by welding, which is difficult to clean due to the increase in size, and the generation of particles (oscillation) easily occurs.

In general, the durability of the repeated operation of the vacuum bellows 117 is worse than that of the robot body. For this reason, durability of the vacuum robot as a whole deteriorates and reliability deteriorates.

An object of this invention is to provide the industrial robot provided with the movement mechanism of simple structure. Moreover, when using in a vacuum environment, it aims at providing the industrial robot which does not require use of a vacuum robot as an industrial robot. In addition, an object of the present invention is to provide an industrial robot that enables the design of a magnetic fluid seal regardless of the vertical movement distance.

In order to achieve this object, the present invention provides a rotatable robot arm, a hand portion provided at the tip of the robot arm and capable of holding a work, the hand portion and the A support base provided with a drive unit for driving a robot arm, an installation unit for installing the drive unit, and a parallel link mechanism for moving the support base.

Therefore, the robot arm, the hand part, and the drive part can be moved by moving the support base by the parallel link mechanism of a simple structure. Moreover, by attaching a drive part to the attachment part of a support base, the center of gravity position of a robot arm, a hand part, and a drive part can be kept close to a support base. Thereby, the rigidity of the parallel link mechanism can be made high.

Moreover, it is preferable that this invention is provided so that the drive part of the said industrial robot may sink deeply in the said support base. In the present invention, the robot arm and the hand part are preferably attached to the opposite side via the support base of the industrial robot. As a result, the center of gravity of the robot arm or the hand portion can approach the support base for supporting the parallel link mechanism, thereby increasing the rigidity of the parallel link mechanism.

In the present invention, the parallel link mechanism may move the support base up and down, and the parallel link mechanism may move the support base in a planar manner. That is, by moving the support base up and down, the robot arm and the hand part is moved up and down, or by moving the support base in a plane direction, the robot arm and the hand part is moved by the plane, or the support base is moved up and down and planarly moved. The hand part can be moved up and down and planarly moved.

In addition, the present invention, the parallel link constituting the parallel link mechanism has one first arm and two second arms, the second arm is disposed on the support base side, with two connecting shafts It is preferable to comprise a parallelogram. This can increase the rigidity of the parallel link.

Moreover, it is preferable that the movement trace of the connection shaft which connects the said 1st arm and the 2nd arm among the said two connection shafts is outer side in the horizontal direction than the movement trace of the other connection shaft. Thereby, when a parallel link mechanism moves to an up-down direction, even if disturbance arises during operation of a parallel link mechanism, a support base can move to an up-down direction.

Moreover, it is preferable that the length of a said 1st arm is below the length of a said 2nd arm.

In addition, the industrial robot is preferably installed in a vacuum environment to perform the work.

Therefore, the parallel link mechanism can be installed in a vacuum environment. Since the parallel link mechanism is provided in a vacuum environment, the inside of the vacuum environment can be sealed without using a vacuum bellows. In addition, the magnetic fluid seal can be designed regardless of the vertical movement distance of the support base.

EMBODIMENT OF THE INVENTION Hereinafter, the structure of this invention is demonstrated in detail based on the best form shown by drawing.

1-6, the 1st Embodiment of the industrial robot of this invention is shown. The industrial robot is, for example, a work conveying robot in a vacuum environment for conveying a work not shown in the vacuum environment 1. The industrial robot is installed in the vacuum environment 1 to perform work, and is installed at the robot arm 3 rotatable and supported on the support base 2 and the tip of the robot arm 3 to store the work. The hand part 4 which can be hold | maintained, and the parallel link mechanism 5 which move the support base 2 are provided. The parallel link mechanism 5 is a moving mechanism which moves the support base 2 in the up-down direction in FIG. In addition, the drive source 6 which drives the parallel link mechanism 5 is arrange | positioned outside the vacuum environment 1.

In this embodiment, two 2nd robot arms 3B are connected to the both ends of one 1st robot arm 3A, and the hand part 4 is connected to the front-end | tip of each 2nd robot arm 3B. .

On the base 7 in which the industrial robot is installed, it is covered with the partition not shown, and the inside of the partition becomes the vacuum environment 1. That is, the support base 2, the robot arm 3, the hand part 4, and the manipulator 8 which consists of these drive mechanisms are the parallel link mechanism (in the vacuum environment 1). 5) is mechanically supported. The drive part 9 including the robot arm 3 and the plurality of motors (not shown) for driving the hand part 4 is disposed on the bottom surface of the support base 2 and covered with a housing 9. .

In the present embodiment, the rotation shaft 81 is formed so as to extend through the support base 2 from the inside of the housing 90, and through the rotation shaft 81, the rotation shaft 81 of the motor in the housing 90 is formed. The driving force is transmitted to the robot arm 3 and the hand part 4. Thus, a part of the drive part 9 which drives the robot arm 3 or the hand part 4 penetrates the hole as the attachment part 2A formed in the support base 2, and the drive part 9 is a support base. Since it is attached to the bottom surface of (2), the parallel link mechanism (by bringing the robot arm 3, the hand part 4, or the center of gravity of the drive part closer to the support base 2 supporting the parallel link mechanism 5) 5) The rigidity of (parallel link 12) can be improved.

In addition, the manipulator 8 mounted on the support base 2 lowers the center of gravity position, that is, the center of gravity position can approach the support base 2, for example, during operation. Even when a vibration occurs, the vibration can be suppressed.

In addition, although the manipulator 8 is arrange | positioned in a vacuum environment in this embodiment, the wiring of a motor passes through the inside of the flexible tube 10 provided in the bottom surface of the housing 90, and is not shown in figure. It is connected to the control unit. For this reason, the inside of the flexible tube 10 and the inside of the housing 90 become the atmospheric environment 11.

However, between the support base 2 and the housing 90, and between the housing 90 and the flexible tube 10 is vacuum-sealed by the O-ring not shown, for example. In addition, in order to transmit the driving force of the motor in the housing 90 to the robot arm 3 or the hand portion 4, the rotating shaft 81 extending through the support base 2 from the housing 90 and the opposing member thereof. A vacuum seal is performed between the and a magnetic fluid seal (not shown).

For this reason, it is reliably separated from the vacuum environment 1 in which the manipulator 8 is arrange | positioned, and the atmospheric environment 11 in which a motor is arrange | positioned. Further, since the rotating shaft 81 extending through the support base 2 does not move in the axial direction, the magnetic fluid seal as compared with the case of vacuum sealing the rotating shaft moving in the axial direction as in the related art. It can narrow the range of. 2 and 3, the description of the flexible tube 10 is omitted.

In this embodiment, the parallel link mechanism 5 is comprised from three sets of parallel links 12, for example, and these are driven by one link drive motor (drive source) 6. However, the number of parallel links 12 is not limited to three sets. The parallel link 12 connects the support 13 and the support base 2 on the pedestal 7 to restrain the manipulator 8 mechanically. Three sets of parallel links 12 are arranged at intervals of 120 degrees so as to surround the support base 2 and the housing 90 as viewed from above.

As shown in FIG. 5, the parallel link 12 has one first arm 12a on the pedestal 7 side and two second arms 12b on the support base 2 side. The two 2nd arms 12b comprise the parallelogram together with the intermediate | middle connection shaft 17 and the connection shaft 18 which used the two connection shafts, and are trying to raise the rigidity. In addition, in this embodiment, the length La of the 1st arm 12a is shorter than the length Lb of the 2nd arm 12b.

In addition, the movement trajectory of the intermediate connecting shaft 17 connecting the first arm 12a and the second arm 12b is, in the horizontal direction, rather than the movement trajectory of the connecting shaft 18, as shown in FIG. It is going to be outward.

As a result, in the operating range of the parallel link 12, the angle change of the angle α formed between the second arm 12b and the support base 2 is reduced, and the angle α is an acute angle. The angle range is maintained. Thus, by maintaining the acute angle, when the parallel link mechanism 5 moves in the vertical direction, even if disturbance occurs during the movement of the parallel link 12, the support base 2 can be stably moved in the vertical direction. It is supposed to be.

Moreover, the length Lb of the length La of the 1st arm 12a and the 2nd arm 12b may be the same.

The lower end of the 1st arm 12a is being fixed to the link drive shaft 16 in which rotation is supported by the support body 13 through the atmospheric bearing 14 and the vacuum bearing 15 freely.

In this embodiment, three link drive shafts 16 are arrange | positioned at 120 degree space | interval so that the support base 2 and the housing | casing 90 may be seen from the top.

In addition, in this embodiment, the link drive shaft 16 is arrange | positioned at the position higher than the pedestal 7. That is, as shown in FIG. 1, the first arm 12a and the second arm 12b are folded to overlap, the first arm 12a is inclined downward, and the intermediate connecting shaft 17 is The height which secured the position which contact | connected the base 7 to become the lowest position is ensured. In other words, the height of the link drive shaft 16 ensures the storage space of the housing 90.

The stroke (moving distance in the vertical direction) of the parallel link 12 is obtained by multiplying the link lengths La and Lb by the link operating angle θ, but takes a large moving range of the first arm 12a. As a result, the predetermined stroke can be ensured with short link lengths La and Lb. For this reason, (1) the rigidity of the parallel link (12) increases, (2) the torque of the drive motor (6) decreases, and the reducer can be miniaturized, and (3) the occupied space of the manipulator (8) can be reduced. It is supposed to be.

In addition, as shown in FIG. 5, the upper end of the 1st arm 12a is being fixed to the center of the intermediate | middle connection shaft 17. As shown in FIG. The lower end of the 2nd arm 12b is rotatably connected to the both ends of the intermediate | middle connection shaft 17 via the vacuum bearing 15. As shown in FIG. Moreover, the upper end of the 2nd arm 12b is rotatably connected to the both ends of the connecting shaft 18 which penetrates the convex part 2a of the support base 2 via the vacuum bearing 15. As shown in FIG. That is, the 1st arm 12a is comprised by 1 degree of freedom and the 2nd arm 12b also by 1 degree of freedom, The manipulator 8 is mechanically constrained by the 3 sets of parallel links 12 in the up-down direction. It is becoming.

In addition, in this embodiment, the 1st arm 12a, the 2nd arm 12b, the intermediate | middle connection shaft 17, and the connection shaft 18 form the pipe shape, for example, maintaining a constant rigidity, It is intended to reduce the weight.

As described above, the parallel link mechanism 5 operates as follows.

In the state where the link drive shaft 16 is not rotating (lowest position), as shown by the solid line in FIG. 1, the inclination of the first arm 12a is directed downward, so that the second arm 12b overlaps. The parallel link 12 is folded. From this state, when the link drive shaft 16 is rotated and the first arm 12a is lifted up, the bending angle of the second arm 12b is decreased, and the parallel link 12 is extended to lift the support base 2. Raise (two dashed line position in FIG. 2). And when the link drive shaft 16 reverses, the extended parallel link 12 will be folded and the support base 2 will be lowered (solid line position of FIG. 1).

The link drive motor 6 is arrange | positioned outside the vacuum environment 1, as shown in FIG. In this embodiment, the link drive motor 6 is provided in the cover 19 which covers the hole 7a of the pedestal 7 so that the link drive motor 6 is at the lower atmosphere 11 of the pedestal 7. ) (Outside of vacuum environment 1). The driving force of the link drive motor 6 is pulley 20 → timing belt 21 → timing pulley 22 → rotating shaft 23 → bevel gear 24 → bevel gear 25 → atmospheric bearing reducer 26. → is transmitted to the link drive shaft 16. The timing pulley 22, the rotating shaft 23, the bevel gears 24 and 25, and the atmospheric bearing reducer 26 are provided for each parallel link 12. The timing belt 21 is wound around the timing pulley 22 of the three sets of parallel links 12, and one link drive motor 6 can drive the three sets of parallel links 12 at the same time at the same time. have. The timing belt 21 is designed to prevent the occurrence of loosening that can be tensioned by two idler pulleys 27 (see FIG. 4).

In this embodiment, since the link drive motor 6 is arrange | positioned in the atmospheric environment 11, the transmission path of the drive force of the link drive motor 6 also becomes an atmospheric environment 11. A magnetic fluid seal 28 is provided between the support 13 on the side of the atmospheric environment 11 and the link drive shaft 16 to separate the vacuum environment 1 and the atmospheric environment 11. Thus, by providing the magnetic fluid seal 28 in the link drive shaft 16 of the parallel link 12, the vacuum of the movement mechanism which moves to an up-down direction without using the vacuum bellows required for the robot shown in FIG. We can seal.

By arranging the link drive motor 6 in the cover 19, it becomes possible to arrange the link drive motor 6 so as to protrude above the pedestal 7, thereby effectively utilizing the vacant space and thereby the link drive motor 6 Can be placed.

In this industrial robot, by operating the three sets of parallel links 12 simultaneously by the link drive motor 6, the manipulator 8 in the vacuum environment 1 while maintaining the posture of the support base 2 horizontally. ) Can be moved in the vertical direction. That is, the manipulator 8 can be moved up and down in the vacuum environment 1 without using the vacuum bellows required by the robot shown in FIG. 12. In addition, in order to move the manipulator 8 up and down by the parallel link mechanism 5, it is not necessary to move the rotating shaft in the axial direction with respect to the opposing member like the robot shown in FIG. ) And the magnetic fluid seal 28 separating the atmospheric environment 11 can be designed to be independent of the moving distance in the up-down direction of the manipulator 8. For this reason, the enlargement of the whole apparatus can be suppressed and price reduction can be achieved.

In the above-described industrial robot, the rotatable robot arm 3 and the hand part 4 provided at the distal end of the robot arm 3 and capable of holding a work, the hand part 4 and the robot arm 3 are provided. The support base 2 which has the drive part 9 to drive, the attachment part 2A which attaches a drive part, and the parallel link mechanism 5 which move the support base 2 are provided.

As a result, the industrial robot can be miniaturized and the manufacturing cost can be reduced. Moreover, if it is the same robot size, the stroke in the up-down direction of the support base 2 can be enlarged. Moreover, even if the stroke in the up-down direction of the support base 2 is increased, the robot size does not become very large. Therefore, it is suitable for the manufacture of a robot having a large stroke in the up-down direction of the support base 2.

Moreover, since the parallel link mechanism 5 is used for the movement of the support base 2, the stroke (moving distance) in the up-down direction of the support base 2 is large, and a cheap robot can be provided.

In addition, in the above-mentioned industrial robot, by not using a vacuum bellows, generation of particles due to the vacuum bellows can be prevented and the reliability of the entire apparatus can be improved.

In addition, the magnetic fluid seal 28 can be designed irrespective of the moving distance in the vertical direction of the support base 2, so that the robot can be further miniaturized and the manufacturing cost can be further reduced. have.

As the above-mentioned industrial robot, any of a vacuum scalar robot, a vacuum arm robot, etc. may be sufficient, for example, it can be miniaturized by moving the manipulator 8 up and down by the parallel link mechanism 5, In addition, it is possible to manufacture a low-cost vacuum robot having a large moving distance in the vertical direction.

In addition, although the form mentioned above is an example of the preferable form of this invention, it is not limited to this, A various deformation | transformation is possible in the range which does not deviate from the summary of this invention.

For example, in the above description, the first arm 12a and the second arm 12b of the parallel link 12 are each freely restrained, and the support base 2 is restrained to be movable only in the up and down direction. It is not necessarily limited to this configuration. For example, the parallel link mechanism 5 may allow the support base 2 to be moved in the plane (moving in the horizontal direction). That is, it may be movable in the direction which added the horizontal direction from the up-down direction, or may be movable only in the horizontal direction.

7 to 11 show examples of the industrial robot which made it possible to move the support base 2 in the vertical direction and in the horizontal direction. In addition, the support base 2 is moved not only in the vertical direction and in the horizontal direction (inclination direction), but also in the vertical direction only (moving distance in the horizontal direction is 0). The distance traveled may be 0).

In this embodiment, as shown in FIG. 10, the parallel link mechanism 5 is comprised from three sets of parallel links 12, and these drive according to three sets of link drive motors (drive source) 6, for example. It is becoming. That is, each parallel link 12 is driven independently by the dedicated link drive motor 6. However, the number of the parallel link 12 and the link drive motor 6 is not limited to three. The parallel link 12 connects the support 13 and the support base 2 on the pedestal 7 to restrain the manipulator 8 mechanically. The three parallel links 12 are arranged at 120 degree intervals so as to surround the support base 2 and the housing 90 as viewed from above.

In addition, the link drive motor 6 is arrange | positioned outside the vacuum environment 1 similarly to embodiment mentioned above. In this embodiment, the link driving motor 6 is provided in the cover 19 covering the hole 7a of the pedestal 7 so that the link driving motor 6 is placed in the atmospheric environment 11 below the pedestal 7. (Outside of the vacuum environment 1) is arrange | positioned. The driving force of the link drive motor 6 is pulley 20 → timing belt 21 → timing pulley 22 → rotating shaft 23 → bevel gear 24 → bevel gear 25 → atmospheric bearing reducer 26. → is transmitted to the link drive shaft 16. This transmission path is provided for each parallel link 12. Therefore, by independently controlling the three link drive motors 6, the link drive shafts 16 of the parallel links 12 can be controlled independently, and the respective parallel links 12 are moved up and down independently (expand / expand). can do.

Since the link drive motor 6 is arranged in the atmospheric environment 11, the transmission path of the driving force of the link drive motor 6 also becomes the atmospheric environment 11. A magnetic fluid seal 28 is provided between the support 13 on the side of the atmospheric environment 11 and the link drive shaft 16 to separate the vacuum environment 1 and the atmospheric environment 11. Thus, by providing the magnetic fluid seal 28 in the link drive shaft 16 of the parallel link 12, a vacuum seal can be performed, without using the vacuum bellows required for the robot shown in FIG.

By arranging the link drive motor 6 in the cover 19, it becomes possible to arrange the link drive motor 6 so as to protrude above the pedestal 7, so that the link drive motor 6 can be effectively utilized using the empty space. Can be placed.

In this embodiment, the parallel link 12 has one 1st arm 12a and two 2nd arms 12b, as shown in FIG. The lower end of the first arm 12a is fixed to the link drive shaft 16 whose rotation is freely supported by the support bearing 13 through the atmospheric bearing 14 and the vacuum bearing 15. The upper end of the first arm 12a is fixed to the center of the intermediate connecting shaft 17. The lower end of the 2nd arm 12b is rotatably connected to the both ends of the intermediate | middle connection shaft 17 via the two vacuum bearings 15 and 15 which the direction of a rotation center axis orthogonally crosses. The upper end of the second arm 12b has two vacuum bearings (orthogonal to each other) of the connecting shaft 18 penetrating through the convex portion 2a of the support base 2 so that the direction of the rotation center axis is orthogonal to each other. Rotation is freely connected via 15,15). That is, the 1st arm 12a is comprised with 1 degree of freedom, and the 2nd arm 12b is comprised with 2 degree of freedom, and the manipulator 8 is mechanically restrained by three sets of parallel links 12. As shown in FIG. By independently controlling the first arm 12a of the three sets of parallel links 12 with the corresponding link drive motors 6, the manipulator 8 is mechanically moved in the up-down direction, the horizontal direction, and the combination direction thereof. Can be moved to

As described above, the parallel link mechanism 5 operates as follows.

In the state where the link drive shaft 16 is not rotating, as shown by the solid line in FIG. 7, the 1st arm 12a is horizontally facing (lowest position), and the parallel link 12 is folded. From this state, when the three link drive motors 6 are operated simultaneously and the first arm 12a of the three sets of parallel links 12 is simultaneously lifted at the same angle, the bending angle of the second arm 12b is reduced. Then, the parallel link 12 is extended to lift the support base 2 while maintaining its horizontal posture (two-point lane in FIG. 7). Then, when the three link drive motors 6 reverse at the same time, the three parallel links 12 that have been extended are folded at the same time and the support base 2 is lowered while maintaining the horizontal posture thereof (solid line in FIG. 7). That is, the manipulator 8 moves up and down.

In the industrial robot shown in FIG. 7, the rotatable robot arm 3 and the hand part 4 which are provided at the front-end | tip of this robot arm 3, and can hold | maintain a workpiece, the hand part 4, and the robot arm 3 The support base 2 which has the drive part 9 which drives), the attachment part 2A which attaches the drive part 9, and the parallel link mechanism 5 which moves the support base 2 are provided. .

As a result, the industrial robot can be miniaturized and the manufacturing cost can be reduced. Moreover, if it is the same robot size, the stroke in the up-down direction of the support base 2 can be enlarged. Moreover, even if the stroke in the up-down direction of the support base 2 is increased, the robot size does not become very large. Therefore, it is suitable for the manufacture of a robot having a large stroke in the up-down direction of the support base 2.

Moreover, since the parallel link mechanism 5 is used for the movement of the support base 2, the stroke (moving distance) in the up-down direction of the support base 2 is large, and a cheap robot can be provided.

In addition, in this embodiment, by operating three link drive motors independently, the manipulator 8 can be moved horizontally or the inclination can be moved up and down so that the height does not change.

Even with the industrial robot of FIG. 7, similar to the industrial robot of FIG. 1, the vacuum bellows can be made unnecessary, and the magnetic fluid seal 28 can be designed to be independent of the moving distance of the manipulator 8. Can be. For this reason, the enlargement of the whole apparatus can be suppressed and price reduction can be achieved. In addition, since the vacuum bellows can be made unnecessary, generation of particles due to the vacuum bellows can be prevented, and the reliability of the entire apparatus can be improved and improved. In addition, by moving the manipulator 8 by the parallel link mechanism 5, it is possible to reduce the size of the manipulator 8 and to manufacture a vacuum robot with a large moving distance.

In addition, in the above description, although the driving force of the link drive motor 6 was transmitted using the timing belt 21, it is not necessarily limited to this structure. For example, the timing belt 21 may be replaced to transmit the driving force using a rotating shaft or the like.

In addition, in the above-mentioned description, although the vacuum seal was performed using the magnetic fluid seal 28, you may perform a vacuum seal by methods other than the magnetic fluid seal 28. As shown in FIG.

In addition, in this embodiment, although the industrial robot is a workpiece conveyance robot in the vacuum environment which conveys the workpiece | work which is not shown in a vacuum environment, it is not limited to this, For example, you may use in an atmospheric environment.

In addition, 2 A of attachment parts formed in the support base are not limited to the holeless bottom formation like this embodiment, It is good also as formation including a bottom. In addition, the support base 2 may be formed to serve as the function of the housing 90.

The present invention includes a rotatable robot arm, a hand portion provided at the tip of the robot arm and capable of holding a work, a driving portion for driving the hand portion and the robot arm, and an attachment portion for attaching the driving portion. A support base and the parallel link mechanism which move the said support base are provided. Thereby, a robot arm, a hand part, and a drive part can be moved by moving a support base by the parallel link mechanism of a simple structure. In addition, by attaching the driving portion to the attachment portion of the support base, the center of gravity of the robot arm, the hand portion and the driving portion can be kept close to the support base. This can increase the rigidity of the parallel link mechanism.

Claims (9)

A rotatable robot arm, a hand part installed at the tip of the robot arm and capable of holding a work, a drive part for driving the hand part and the robot arm, and the drive part A support base having a mounting portion to be installed, and a parallel link mechanism for moving the support base, wherein the driving portion is provided to sink deeply into the support base, The parallel link constituting the parallel link mechanism has one first arm and two second arms, and the second arm is disposed on the support base side and constitutes a parallelogram with two connecting shafts. under, The length of the first arm is shorter than the length of the second arm, the industrial robot. A rotatable robot arm, a hand part installed at the tip of the robot arm and capable of holding a work, a drive part for driving the hand part and the robot arm, and the drive part A support base having a mounting portion to be installed, and a parallel link mechanism for moving the support base, wherein the driving portion is attached to the opposite side to the robot arm and the hand portion through the support base, The parallel link constituting the parallel link mechanism has one first arm and two second arms, and the second arm is disposed on the support base side and constitutes a parallelogram with two connecting shafts. under, The length of the first arm is shorter than the length of the second arm, the industrial robot. The method according to claim 1 or 2, The parallel link mechanism moves the support base up and down. The method according to claim 1 or 2, The parallel link mechanism moves the support base in a planar manner. The method according to claim 1 or 2, The industrial robot of the two connection shafts, wherein the movement trajectory of the connection shaft connecting the first arm and the second arm is outside in the horizontal direction than the movement trajectory of the other connection shaft. The method according to claim 1 or 2, An industrial robot, which is installed in a vacuum environment and performs work. delete delete delete

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