WO2017169738A1 - 熱硬化性化合物 - Google Patents
熱硬化性化合物 Download PDFInfo
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- WO2017169738A1 WO2017169738A1 PCT/JP2017/010175 JP2017010175W WO2017169738A1 WO 2017169738 A1 WO2017169738 A1 WO 2017169738A1 JP 2017010175 W JP2017010175 W JP 2017010175W WO 2017169738 A1 WO2017169738 A1 WO 2017169738A1
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- thermosetting
- thermosetting compound
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- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 description 1
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
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- 229920000647 polyepoxide Polymers 0.000 description 1
- 235000011056 potassium acetate Nutrition 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 125000006410 propenylene group Chemical group 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- HFRXJVQOXRXOPP-UHFFFAOYSA-N thionyl bromide Chemical compound BrS(Br)=O HFRXJVQOXRXOPP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F22/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides or nitriles thereof
- C08F22/36—Amides or imides
- C08F22/40—Imides, e.g. cyclic imides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D207/00—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D207/02—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D207/44—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having three double bonds between ring members or between ring members and non-ring members
- C07D207/444—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having three double bonds between ring members or between ring members and non-ring members having two doubly-bound oxygen atoms directly attached in positions 2 and 5
- C07D207/456—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having three double bonds between ring members or between ring members and non-ring members having two doubly-bound oxygen atoms directly attached in positions 2 and 5 with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to other ring carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L67/00—Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers
- C08L67/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
- C08L67/03—Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the carboxyl- and the hydroxy groups directly linked to aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/12—Unsaturated polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/12—Unsaturated polyimide precursors
- C08G73/124—Unsaturated polyimide precursors the unsaturated precursors containing oxygen in the form of ether bonds in the main chain
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/12—Unsaturated polyimide precursors
- C08G73/126—Unsaturated polyimide precursors the unsaturated precursors being wholly aromatic
- C08G73/127—Unsaturated polyimide precursors the unsaturated precursors being wholly aromatic containing oxygen in the form of ether bonds in the main chain
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/16—Polyester-imides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/20—Applications use in electrical or conductive gadgets
- C08L2203/206—Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts
Definitions
- the present invention relates to a thermosetting compound and a cured product thereof.
- This application claims the priority of Japanese Patent Application No. 2016-068665 for which it applied to Japan on March 30, 2016, and uses the content here.
- thermosetting compound that can form a cured product.
- Patent Documents 1 to 3 describe thermosetting compounds having a phenylethynyl group, a phenylmaleimido-N-yl group, or a nadiimido-N-yl group as a thermosetting group at the terminal of the liquid crystal oligomer. .
- thermosetting compound in order to cure the thermosetting compound, it is necessary to heat at a high temperature of 350 ° C. or higher for a long time, and there is a problem that the semiconductor and the circuit board are deteriorated by the high temperature heating at the time of curing. Further, since the 5% weight loss temperature (T d5 ) of the cured product is lower than 450 ° C., there is a problem that the cured product may be decomposed by high-temperature heating during curing.
- thermosetting polyester composition obtained in this way is thermoset at a temperature of 250 ° C. or lower to obtain a cured product having excellent heat resistance.
- thermosetting polyester composition had poor solvent solubility. Further, the curability is poor, and even if a crosslinking agent or a curing accelerator is added, a long time (for example, about 6 hours) is required for heat curing, so that the workability is poor. Furthermore, when it is heated at a high temperature of 300 ° C. or more for the purpose of curing in a short time, it is problematic that it is easily decomposed.
- an object of the present invention is to provide a thermosetting compound that has good solvent solubility and can be rapidly cured by heat treatment to form a cured product having super heat resistance. is there. Another object of the present invention is to provide a thermosetting composition that can be rapidly cured by heat treatment to form a cured product having super heat resistance. Another object of the present invention is to provide a method for producing a semiconductor device using the thermosetting composition. Another object of the present invention is to provide a semiconductor device obtained by the manufacturing method.
- the present inventors have found that the compound represented by the following formula (1) has good solvent solubility, is rapidly cured by heating, and has a super heat resistance, Specifically, it has been found that a cured product having a 5% weight loss temperature (T d5 ) of 450 ° C. or more and a storage elastic modulus (E ′) at 250 ° C. of 1 GPa or more can be obtained.
- T d5 5% weight loss temperature
- E ′ storage elastic modulus
- thermosetting compound represented by following formula (1) (In the formula, R 1 and R 2 represent thermosetting groups, D 1 and D 2 are the same or different and represent a single bond or a linking group. Ar 1 , Ar 2 and Ar 3 are the same or different. A divalent aromatic hydrocarbon group or two or more aromatic hydrocarbons bonded via a single bond, a divalent aliphatic hydrocarbon group, or a divalent alicyclic hydrocarbon group And E represents an ester bond [— (C ⁇ O) O— or —O (C ⁇ O) —])
- R 1 and R 2 in formula (1) are the same or different, and phenyl ethynyl group, styryl group, maleimide group, nadiimide group, biphenylene group, ethynyl group, isocyanate group, cyanate group, nitrile
- the thermosetting compound is a thermosetting group selected from the group consisting of a group, a phthalonitrile group, a cyclobenzobutene group, a benzoxazine group, an oxetane group, and a vinyl group.
- the present invention also provides the thermosetting compound having a thermotropic liquid crystal property.
- the present invention also provides a thermosetting composition containing the thermosetting compound.
- the present invention also provides a cured product of the thermosetting composition.
- the present invention also provides a method for manufacturing a semiconductor device, which includes a step of sealing a semiconductor element using the thermosetting composition.
- the present invention also provides a semiconductor device having a structure in which a semiconductor element is coated with the cured product.
- Formula (1) (wherein R 1 and R 2 represent a thermosetting group, and D 1 and D 2 are the same or different and represent a single bond or a linking group.
- Ar 1 , Ar 2 , Ar 3 is the same or different and is a divalent aromatic hydrocarbon group, or two or more aromatic hydrocarbons are a single bond, a divalent aliphatic hydrocarbon group, or a divalent alicyclic hydrocarbon group.
- R 1 and R 2 in Formula (1) are the same or different and are phenylethynyl group, styryl group, maleimide group, nadiimide group, biphenylene group, ethynyl group, isocyanate group, cyanate group, nitrile group, phthalo
- the thermosetting compound according to [1] which is a thermosetting group selected from the group consisting of a nitrile group, a cyclobenzobutene group, a benzoxazine group, an oxetane group, and a vinyl group.
- R 1 and R 2 in formula (1) are the same or different and are phenylethynyl group, styryl group, maleimide group, nadiimide group, biphenylene group, phthalonitrile group, cyclobenzobutene group, and benzoxazine group
- D 1 and D 2 are a single bond or a divalent hydrocarbon group (preferably a divalent aromatic hydrocarbon group, particularly preferably a divalent hydrocarbon having 6 to 14 carbon atoms).
- the thermosetting compound according to any one of [1] to [4], which is an aromatic hydrocarbon group, most preferably a group selected from the groups represented by formulas (a1) to (a4) .
- the R 1 -D 1 group and the R 2 -D 2 group in the formula (1) are the same or different and are a nadiimide group, a biphenylene group, an ethynyl group, an isocyanate group, a cyanate group, a nitrile group, or a phthalonitrile.
- thermosetting compound according to any one of [1] to [5], which is a group.
- the R 1 -D 1 group and the R 2 -D 2 group in the formula (1) are the same or different and are selected from the groups represented by the formulas (r-1) to (r-12)
- thermosetting compound Any one of [1] to [7] having a molecular weight of 748 or more (preferably 748 to 1300, more preferably 748 to 1200, particularly preferably 748 to 1000, most preferably 748 to 900).
- the thermosetting compound described in 1. [9] The thermosetting compound according to any one of [1] to [8], which exhibits solubility in the following solvent.
- Solvents acetone, methyl ethyl ketone, methyl isobutyl ketone, acetonyl acetone, cyclohexanone, isophorone, 2-heptanone, 3-heptanone, benzene, toluene, xylene, dichloromethane, chloroform, 1,2-dichloroethane, chlorobenzene, dichlorobenzene, benzotrifluoride , Acetonitrile, benzonitrile, ethyl acetate, tetrahydrofuran, N-methyl-2-pyrrolidone, N, N-dimethylformamide, dimethyl sulfoxide, and mixtures thereof [10] having thermotropic liquid crystallinity [1] to [9] The thermosetting compound as described in any one of these.
- the melting point is 300 ° C. or less (preferably 100 to 300 ° C., more preferably 120 to 290 ° C., particularly preferably 150 to 280 ° C.), according to any one of [1] to [10] Thermosetting compound.
- the 5% weight loss temperature measured at a heating rate of 10 ° C./min is 300 ° C. or higher (preferably 330 ° C. or higher, particularly preferably 350 ° C. or higher).
- the 5% weight loss temperature measured at a heating rate of 10 ° C./min is 300 to 400 ° C. (preferably 330 to 400 ° C., particularly preferably 350 to 400 ° C.).
- thermosetting compound according to any one of [11] to [11].
- thermosetting compound according to any one of [1] to [13] which has an exothermic peak temperature of 200 to 350 ° C. (preferably 250 to 330 ° C., particularly preferably 280 to 340 ° C.).
- a thermosetting composition comprising the thermosetting compound according to any one of [1] to [14].
- thermosetting compound when two or more are contained, the total amount
- the content of the thermosetting compound is 30% by weight or more (preferably 50% by weight or more, particularly preferably 70% by weight or more) of the total amount of the thermosetting composition
- the proportion of the thermosetting compound represented by the formula (1) in the total amount of the curable compound contained in the thermosetting composition is 70 wt% or more (preferably 80 wt% or more).
- the thermosetting composition according to [15] which is not less than wt%, particularly preferably not less than 90 wt%.
- the thermosetting according to [15] or [16] wherein the total content of the crosslinking agent and the curing accelerator is 3% by weight or less (preferably less than 1% by weight) of the total amount of the thermosetting composition.
- thermosetting composition according to any one of [15] to [17], which is a sealant, a coating agent, an adhesive, an ink, a sealant, a resist, or a lens forming material.
- the 5% weight loss temperature measured in nitrogen at a heating rate of 10 ° C./min is 400 to 500 ° C.
- the cured product according to any one of [19] to [21], wherein the glass transition temperature (Tg) is higher than 350 ° C. (preferably 380 ° C. or higher, particularly preferably 400 ° C. or higher).
- the storage elastic modulus (E ′) at 250 ° C. is 1 GPa or more (preferably 1.1 GPa or more, particularly preferably 1.15 GPa or more), according to any one of [19] to [22] Cured product.
- a method for producing a semiconductor device comprising a step of sealing a semiconductor element using the thermosetting composition according to any one of [15] to [18].
- a semiconductor device having a structure in which a semiconductor element is covered with the cured product according to any one of [19] to [24].
- thermosetting compound of the present invention having the above configuration has good solvent solubility. Further, it is rapidly cured by heat treatment and has super heat resistance (that is, 5% weight loss temperature (T d5 ) is 450 ° C. or more, and storage elastic modulus (E ′) at 250 ° C. is 1 GPa or more. A cured product can be formed. Therefore, the thermosetting compound of this invention can be used conveniently as a sealing agent etc. of a semiconductor device.
- thermosetting compound The thermosetting compound of the present invention is represented by the following formula (1).
- R ⁇ 1 >, R ⁇ 2 > shows a thermosetting group
- D ⁇ 1 >, D ⁇ 2 > is the same or different and shows a single bond or a coupling group.
- Ar 1 , Ar 2 , Ar 3 may be the same or different and each is a divalent aromatic hydrocarbon group, or two or more aromatic hydrocarbons are a single bond, a divalent aliphatic hydrocarbon group, or a divalent A divalent group bonded through an alicyclic hydrocarbon group
- E represents an ester bond [— (C ⁇ O) O— or —O (C ⁇ O) —].
- the divalent aromatic hydrocarbon group in Ar 1 , Ar 2 , Ar 3 is an aromatic hydrocarbon (for example, an aromatic hydrocarbon having 6 to 14 carbon atoms such as benzene, naphthalene, anthracene, phenanthrene). From which two hydrogen atoms are removed.
- aromatic hydrocarbon for example, an aromatic hydrocarbon having 6 to 14 carbon atoms such as benzene, naphthalene, anthracene, phenanthrene.
- Examples of the divalent aliphatic hydrocarbon group include a linear or branched alkylene group having 1 to 18 carbon atoms and a linear or branched alkenylene group having 2 to 18 carbon atoms. Can be mentioned.
- Examples of the linear or branched alkylene group having 1 to 18 carbon atoms include a methylene group, a methylmethylene group, a dimethylmethylene group, an ethylene group, a propylene group, and a trimethylene group.
- Examples of the linear or branched alkenylene group having 2 to 18 carbon atoms include vinylene group, 1-methylvinylene group, propenylene group, 1-butenylene group and 2-butenylene group.
- divalent alicyclic hydrocarbon group examples include 1,2-cyclopentylene group, 1,3-cyclopentylene group, cyclopentylidene group, 1,2-cyclohexylene group, 1,3-cyclopentylene group, Mention may be made of divalent alicyclic hydrocarbon groups having 3 to 18 carbon atoms, such as cycloalkylene groups (including cycloalkylidene groups) such as cyclohexylene group, 1,4-cyclohexylene group and cyclohexylidene group. it can.
- Ar 1 , Ar 2 and Ar 3 are preferably the same or different and selected from groups represented by the following formulas (a1) to (a4).
- the attachment position in the following formula is not particularly limited.
- thermosetting group in R 1 and R 2 examples include phenylethynyl group, styryl group, maleimide group, nadiimide group, biphenylene group, ethynyl group, isocyanate group, cyanate group, nitrile group, phthalonitrile group, and cyclobenzobutene.
- R 1 and R 2 may each represent the same group or different groups.
- thermosetting group in R 1 and R 2 a phenylethynyl group, a styryl group, a maleimide group, a nadiimide group are particularly preferable in that a cured product having thermotropic liquid crystal properties and particularly excellent heat resistance can be obtained.
- Examples of the linking group in D 1 and D 2 include a divalent hydrocarbon group, a divalent heterocyclic group, a carbonyl group, an ether bond, an ester bond, a carbonate bond, an amide bond, an imide bond, and the like. Examples include a group in which a plurality of groups are connected.
- divalent hydrocarbon group examples include a divalent aliphatic hydrocarbon group, a divalent alicyclic hydrocarbon group, and a divalent aromatic hydrocarbon group. Can be mentioned.
- the heterocyclic ring constituting the divalent heterocyclic group includes an aromatic heterocyclic ring and a non-aromatic heterocyclic ring.
- a heterocyclic ring a 3- to 10-membered ring (preferably a 4- to 6-membered ring) having a carbon atom and at least one hetero atom (for example, an oxygen atom, a sulfur atom, a nitrogen atom, etc.) as atoms constituting the ring. Ring) and condensed rings thereof.
- a heterocycle containing an oxygen atom as a heteroatom eg, a 3-membered ring such as an oxirane ring; a 4-membered ring such as an oxetane ring; a furan ring, a tetrahydrofuran ring, an oxazole ring, an isoxazole ring, a ⁇ -butyrolactone ring 5-membered rings such as 4-oxo-4H-pyran ring, tetrahydropyran ring, morpholine ring, etc .; benzofuran ring, isobenzofuran ring, 4-oxo-4H-chromene ring, chroman ring, isochroman ring, etc.
- a heterocycle containing an oxygen atom as a heteroatom eg, a 3-membered ring such as an oxirane ring; a 4-membered ring such as an oxetane ring;
- Examples of D 1 and D 2 include a single bond or a divalent hydrocarbon group (preferably a divalent aromatic hydrocarbon group, particularly preferably a divalent aromatic hydrocarbon group having 6 to 14 carbon atoms). Most preferably, a group selected from the groups represented by the above formulas (a1) to (a4) is preferable in that a cured product having particularly excellent heat resistance can be obtained.
- a divalent hydrocarbon group preferably a divalent aromatic hydrocarbon group, particularly preferably a divalent aromatic hydrocarbon group having 6 to 14 carbon atoms.
- a group selected from the groups represented by the above formulas (a1) to (a4) is preferable in that a cured product having particularly excellent heat resistance can be obtained.
- R 1 -D 1 group and R 2 -D 2 group in the formula (1) are the same or different and are nadiimide group, biphenylene group, ethynyl group, isocyanate group, cyanate group, nitrile group, phthalonitrile.
- the group selected from the groups represented by the following formulas (r-1) to (r-12) is particularly preferable.
- One or two or more substituents may be bonded to the aromatic hydrocarbon ring of the thermosetting compound represented by the formula (1).
- an alkyl group having 6 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, and a halogen atom may be bonded to the aromatic hydrocarbon ring of the thermosetting compound represented by the formula (1).
- an alkyl group having 6 to 10 carbon atoms an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, and a halogen atom.
- alkyl group having 1 to 6 carbon atoms examples include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, s-butyl, t-butyl, pentyl, and hexyl groups.
- a linear or branched alkyl group can be mentioned.
- Examples of the aryl group having 6 to 10 carbon atoms include a phenyl group and a naphthyl group.
- alkoxy group having 1 to 6 carbon atoms examples include linear or branched alkoxy groups such as a methoxy group, an ethoxy group, a butoxy group, and a t-butyloxy group.
- Examples of the aryloxy group having 6 to 10 carbon atoms include a phenyloxy group and a 2-naphthyloxy group.
- the molecular weight of the thermosetting compound represented by the above formula (1) is 748 or more. Therefore, the cured product obtained by thermal curing has super heat resistance (specifically, the 5% weight loss temperature (T d5 ) is 450 ° C. or higher, and the storage elastic modulus (E ′) at 250 ° C. is 1 GPa or higher. Is). On the other hand, when the molecular weight is below the above range, a cured product having super heat resistance tends to be difficult to obtain.
- the molecular weight of a thermosetting compound can be calculated
- the upper limit of the molecular weight of the thermosetting compound represented by the above formula (1) is, for example, 1300, preferably 1200, particularly preferably 1000, most preferably 900.
- a molecular weight of 1300 or less is preferred in that it melts at a relatively low temperature, exhibits particularly excellent solubility in a solvent, and has fast curability.
- the solvent examples include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, acetonyl acetone, cyclohexanone, isophorone, 2-heptanone and 3-heptanone; aromatic hydrocarbons such as benzene, toluene and xylene; Halogenated hydrocarbons such as dichloromethane, chloroform, 1,2-dichloroethane, chlorobenzene, dichlorobenzene and benzotrifluoride; Nitriles such as acetonitrile and benzonitrile; Esters such as ethyl acetate; Ethers such as tetrahydrofuran; N- Examples thereof include methyl-2-pyrrolidone, N, N-dimethylformamide, dimethyl sulfoxide, and mixtures thereof.
- ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone,
- thermosetting compounds represented by the above formula (1) compounds in which the R 1 -D 1 group and the R 2 -D 2 group are groups represented by the above formula (r-2) are, for example, It can be manufactured through the following steps [1] and [2].
- the R 1 -D 1 group and the R 2 -D 2 group are groups other than the group represented by the above formula (r-2).
- the compound can be produced by a method according to the following production method.
- Carboxylic acid ester having hydroxyl group and / or carboxyl group at both ends by reacting (esterification reaction) with another type (2 molecules) selected from the above to one type (1 molecule) selected from Step [2] for obtaining (trimer): N—having a functional group that reacts with a hydroxyl group and / or a carboxyl group on a carboxylic acid ester (trimer) having a hydroxyl group and / or a carboxyl group at both ends.
- phenylmaleimide esterification reaction
- a thermosetting compound represented by the formula (1) is obtained.
- thermosetting compounds represented by the above formula (1) the R 1 —D 1 group and the R 2 —D 2 group are groups represented by the above formula (r-2).
- R 1 —D 1 group and the R 2 —D 2 group are groups represented by the above formula (r-2).
- r-2 An example is shown below.
- Ar 1 and Ar 2 are the same as above. These may be the same or different.
- aromatic diol examples include hydroquinone, 4,4′-dihydroxybiphenyl, resorcinol, 2,6-naphthalenediol, 1,5-naphthalenediol, (1,1′-biphenyl) -4,4′-diol. 4,4′-dihydroxydiphenyl ether, bis (4-hydroxyphenyl) methanone, bisphenol A, bisphenol F, bisphenol S, (1,1′-biphenyl) -2,5-diol, and derivatives thereof.
- the derivative include a compound in which a substituent is bonded to the aromatic hydrocarbon group of the aromatic diol.
- substituent examples of the substituent include the same examples as the substituent that the aromatic hydrocarbon ring may have.
- aromatic dicarboxylic acid examples include phthalic acid, terephthalic acid, isophthalic acid, 2,6-naphthalenedicarboxylic acid, 1,5-naphthalenedicarboxylic acid, 4,4′-dibenzoic acid, and 4,4′-oxybis.
- aromatic dicarboxylic acid examples include benzoic acid, 4,4′-thiodibenzoic acid, 4- [2- (4-carboxyphenoxy) ethoxy] benzoic acid, and derivatives thereof.
- the derivative include a compound in which a substituent is bonded to the aromatic hydrocarbon group of the aromatic dicarboxylic acid.
- substituent examples include the same examples as the substituent that the aromatic hydrocarbon ring may have.
- Examples of the aromatic hydroxycarboxylic acid include 4-hydroxybenzoic acid, 3-hydroxybenzoic acid, 1-hydroxy-2-naphthoic acid, 3-hydroxy-2-naphthoic acid, 6-hydroxy-2-naphthoic acid, Examples thereof include 5-hydroxy-1-naphthoic acid, 4′-hydroxy (1,1′-biphenyl) -4-carboxylic acid, and derivatives thereof.
- Examples of the derivative include a compound in which a substituent is bonded to the aromatic hydrocarbon group of the aromatic hydroxycarboxylic acid.
- Examples of the substituent include the same examples as the substituent that the aromatic hydrocarbon ring may have.
- the functional group that reacts with the hydroxyl group is preferably a carboxyl group
- the functional group that reacts with the carboxyl group is preferably a hydroxyl group. Therefore, N- (4-carboxyphenyl) maleimide is preferred as the N-phenylmaleimide having a functional group that reacts with a hydroxyl group, and N- (maleimide) having a functional group that reacts with a carboxyl group is preferred. 4-Hydroxyphenyl) maleimide is preferred.
- the esterification reaction in the above steps [1] and [2] is performed by, for example, (i) a method performed in the presence of a catalyst, (ii) a method performed in the presence of a condensing agent, or (iii) halogenation of a carboxyl group. It can carry out by the method of attaching
- either a protonic acid or a Lewis acid can be used.
- protic acids super strong acids (SbF 5 , SbF 5 —HF, SbF 5 —FSO 3 H, SbF 5 —CF 3 SO 3 H, etc.), sulfuric acid, hydrochloric acid, phosphoric acid, boroboric acid, p-toluenesulfonic acid And organic acids and inorganic acids such as chloroacetic acid, picric acid, and heteropolyacid.
- the Lewis acid include B (OH) 3 , BF 3 , BF 3 O (C 2 H 5 ) 2 , AlCl 3 , FeCl 3 and the like. These can be used alone or in combination of two or more.
- the amount of catalyst used (the total amount when two or more are used) is, for example, 1.0 to 50.0 mol% with respect to the total amount (mol) of the reaction substrate.
- Examples of the condensing agent in (ii) include 1-ethyl-3- (3-dimethylaminopropyl) carbodiimide hydrochloride, 1- [3- (dimethylamino) propyl] -3-ethylcarbodiimide, N, N′-dicyclohexyl.
- Carbodiimide condensing agents such as carbodiimide, N, N′-diisopropylcarbodiimide, N-cyclohexyl-N ′-(2-morpholinoethyl) carbodiimide-p-toluenesulfonate; Imidazoles such as N, N′-carbonyldiimidazole Condensing agent; 4- (4,6-dimethoxy-1,3,5-triazin-2-yl) -4-methylmorpholinium chloride n-hydrate, trifluoromethanesulfonic acid (4,6-dimethoxy- 1,3,5-triazin-2-yl). (2-octoxy-2-oxoethyl) dimethyl It can be exemplified Le ammonium and the like. These can be used alone or in combination of two or more.
- the amount of the condensing agent used (the total amount when two or more are used) is, for example, 100 to 300 mol% with respect to the total amount (mol) of the reaction substrate.
- examples of the halogenating agent used when halogenating the carboxyl group include thionyl chloride, oxalyl chloride, phosphorus pentachloride, phosphorus trichloride, thionyl bromide, phosphorus tribromide and the like. These can be used alone or in combination of two or more.
- the amount of the halogenating agent used is, for example, 1.0 to 3.0 mol with respect to 1 mol of the carboxyl group.
- hydrogen halide is produced as the esterification reaction proceeds, so that the reaction in the presence of a base that traps the produced hydrogen halide has the effect of promoting the progress of the esterification reaction. It is preferable at the point obtained.
- the base include inorganic bases such as sodium hydroxide, potassium hydroxide, calcium hydroxide, sodium carbonate, potassium carbonate, and sodium hydrogen carbonate; and organic bases such as pyridine and triethylamine. These can be used alone or in combination of two or more.
- the amount of the base used is, for example, about 1.0 to 3.0 mol with respect to 1 mol of the acyl halide group in the carboxylic acid halide.
- the esterification reaction in the above steps [1] and [2] can be performed in the presence of a solvent.
- the solvent include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, acetonyl acetone, cyclohexanone, isophorone, 2-heptanone, and 3-heptanone; aromatic hydrocarbons such as benzene, toluene, and xylene; dichloromethane, Halogenated hydrocarbons such as chloroform, 1,2-dichloroethane, dichlorobenzene and benzotrifluoride; and nitriles such as acetonitrile and benzonitrile. These can be used individually by 1 type or in combination of 2 or more types.
- the amount of the solvent used is, for example, about 5 to 20 times by weight with respect to the total (weight) of the reaction substrate.
- the usage-amount of a solvent exceeds the said range, the density
- the reaction atmosphere of the esterification reaction is not particularly limited as long as the reaction is not inhibited, and may be any of an air atmosphere, a nitrogen atmosphere, an argon atmosphere, and the like.
- the reaction temperature of the esterification reaction in the above steps [1] and [2] is, for example, about 0.0 to 200.0 ° C.
- the reaction time is, for example, about 0.5 to 3 hours.
- the esterification reaction can be performed by any method such as a batch method, a semibatch method, and a continuous method.
- the obtained reaction product may be separated by means of separation means such as filtration, concentration, distillation, extraction, crystallization, adsorption, recrystallization, column chromatography, etc. , And can be separated and purified by separation means combining these.
- separation means such as filtration, concentration, distillation, extraction, crystallization, adsorption, recrystallization, column chromatography, etc.
- thermosetting compound of the present invention exhibits thermotropic liquid crystallinity.
- the thermosetting compound of the present invention can be thermoset in a highly oriented state to form a cured product having anisotropy. Therefore, the obtained cured product has super heat resistance.
- it can confirm by polarizing microscope observation that the thermosetting compound of this invention shows thermotropic liquid crystallinity, and a cured
- the melting point (Tm) of the thermosetting compound represented by the formula (1) is, for example, 300 ° C. or less (for example, 100 to 300 ° C., preferably 120 to 290 ° C., particularly preferably 150 to 280 ° C.). Therefore, it can be melted at a relatively low temperature and is excellent in workability.
- fusing point can be measured by thermal analysis and dynamic viscoelasticity measurements, such as DSC and TGA, for example.
- the 5% weight loss temperature (T d5 ) of the thermosetting compound represented by the formula (1) measured at a temperature rising rate of 10 ° C./min (in nitrogen) is, for example, 300 ° C. or more (for example, 300 to 400). ° C), more preferably 330 ° C or higher, particularly preferably 350 ° C or higher.
- the 5% weight loss temperature in this specification can be measured by, for example, TG / DTA (simultaneous measurement of differential heat and thermogravimetry).
- the exothermic peak temperature of the thermosetting compound represented by the formula (1) is, for example, 200 to 350 ° C. (preferably 250 to 330 ° C., particularly preferably 280 to 340 ° C.).
- the exothermic peak temperature can be measured by DSC thermal analysis, for example.
- thermosetting compound represented by the formula (1) is, for example, at a temperature of 200 to 350 ° C. (preferably 250 to 330 ° C., particularly preferably 280 to 340 ° C.), for example 10 to 120 minutes (preferably 10 By heating for up to 60 minutes, particularly preferably from 10 to 30 minutes, it is possible to rapidly cure and form a cured product having super heat resistance.
- the heating may be performed while keeping the temperature constant within the above temperature range, or may be performed in stages.
- the heating temperature is preferably adjusted as appropriate within the above range according to the heating time. For example, when it is desired to shorten the heating time, it is preferable to set the heating temperature higher.
- thermosetting compound of the present invention has the structure represented by the above formula (1), it forms a cured product (specifically, a cured product having super heat resistance) without being decomposed even when heated at a high temperature.
- the cured product can be efficiently formed with excellent workability by heating at a high temperature for a short time.
- the heating means is not particularly limited, and a known or conventional means can be used.
- thermosetting compound represented by Formula (1) can be performed under normal pressure, or can be performed under reduced pressure or under pressure.
- the 5% weight loss temperature (T d5 ) measured at a rate of temperature increase of 10 ° C./min (in nitrogen) of the cured product of the thermosetting compound represented by the formula (1) is, for example, 400 ° C. or more (for example, 400 to 500 ° C.), more preferably 430 ° C. or more, particularly preferably 450 ° C. or more.
- the cured product of the thermosetting compound represented by the formula (1) may or may not have a glass transition point, but even if it has a glass transition point.
- a glass transition point is not detected in a temperature range up to 350 ° C. (preferably 380 ° C., particularly preferably 400 ° C.). Therefore, when the cured product of the thermosetting compound represented by the formula (1) has a glass transition point, the glass transition temperature (Tg) is, for example, more than 350 ° C. (preferably 380 ° C. or more, particularly preferably 400 ° C. or more). It is.
- the cured product of the thermosetting compound represented by the formula (1) has high hardness even under a high temperature environment, and the storage elastic modulus (E ′) at 250 ° C. is, for example, 1 GPa or more (for example, 1 to 2 GPa), Preferably it is 1.1 GPa or more, Most preferably, it is 1.15 GPa or more.
- thermosetting compound of the present invention has good solvent solubility. Moreover, it hardens
- a semiconductor device such as a power semiconductor
- thermosetting composition The thermosetting composition of the present invention is characterized by containing one or more of the above thermosetting compounds.
- the content of the thermosetting compound in the total amount of the thermosetting composition of the present invention is, for example, 30% by weight or more, preferably 50% by weight or more, and particularly preferably 70% by weight. % Or more, most preferably 90% by weight or more.
- the upper limit is 100% by weight. That is, what consists only of a thermosetting compound is also contained in the thermosetting composition of this invention.
- thermosetting composition of the present invention may contain other components as required in addition to the thermosetting compound.
- known or commonly used additives can be used.
- thermosetting composition of this invention may contain curable compounds other than the thermosetting compound represented by the said Formula (1) as a sclerosing
- the proportion of the thermosetting compound represented by the above formula (1) in the curable compound is, for example, 70% by weight or more, preferably 80% by weight or more, and particularly preferably 90% by weight or more.
- the upper limit is 100% by weight.
- thermosetting composition of the present invention does not contain a crosslinking agent or a curing accelerator (for example, the total content of the crosslinking agent and the curing accelerator in the total amount of the thermosetting composition of the present invention is, for example, 3%. % Or less, preferably less than 1% by weight), a cured product can be formed quickly. Therefore, the obtained cured product has a high 5% weight loss temperature (T d5 ) and has super heat resistance. Moreover, since content of an unreacted hardening accelerator and the decomposition product of a hardening accelerator can be suppressed very low in hardened
- thermosetting composition of the present invention contains the above thermosetting compound, it can be quickly cured by heat treatment to form a cured product having super heat resistance.
- heat processing conditions can be suitably set in the same range as the thermosetting conditions of the above-mentioned thermosetting compound.
- thermosetting composition of the present invention includes, for example, a sealant, a coating agent, an adhesive, an ink, a sealant, a resist, a forming material [for example, a base material, an electrical insulating material (insulating film, etc.), a laminated plate, and a composite material (Fiber-reinforced plastics, etc.), optical elements (lenses, etc.), stereolithography, electronic paper, touch panels, solar cell substrates, optical waveguides, light guide plates, holographic memory, etc. It can be preferably used as a sealant for coating a semiconductor element in a semiconductor device (such as a power semiconductor) having high heat resistance and high withstand voltage, which has been difficult to cope with with a resin material.
- a sealant for coating a semiconductor element in a semiconductor device (such as a power semiconductor) having high heat resistance and high withstand voltage, which has been difficult to cope with with a resin material.
- the manufacturing method of the semiconductor device of this invention has the process of sealing a semiconductor element using the said thermosetting composition (for example, using the said thermosetting composition as a semiconductor sealing agent).
- the sealing of the semiconductor element can be performed by a known or conventional method, and is not particularly limited.
- the semiconductor element can be sealed by injecting the thermosetting composition of the present invention into a predetermined mold and performing a heat treatment.
- heat processing conditions can be suitably set in the same range as the thermosetting conditions of the above-mentioned thermosetting compound.
- the semiconductor device obtained by the semiconductor device manufacturing method of the present invention includes at least a semiconductor element and a sealing material that covers the semiconductor element, and the sealing material is a cured product of the thermosetting composition of the present invention. It is a certain semiconductor device.
- the semiconductor element is encapsulated using the thermosetting composition of the present invention, the semiconductor element and its surrounding structure are prevented from being deteriorated by heat during curing.
- the element can be sealed.
- NMR measurement was performed under the following conditions.
- An NMR (nuclear magnetic resonance) measuring apparatus (trade name “JNM-ECA500”, manufactured by JEOL RESONANCE Co., Ltd.) was used.
- the measurement solvent was a heavy solvent (described in each example), and the chemical shift was based on TMS.
- Example 1 [Production of carboxylic acid ester having hydroxyl groups at both ends]
- xylene 380.0 mL (3.1 mol)
- hydroquinone 20.0 g (181.6 mmol
- hydroxybenzoic acid 52.7 g (381) 0.4 mmol 0.74 g
- boric acid 0.74 g
- 1.9 g (19.0 mmol) of sulfuric acid were added, and the mixture was stirred for 1 hour under reflux in a nitrogen atmosphere to complete the esterification reaction.
- thermosetting compound [Production of thermosetting compound] To a 100 mL three-necked flask equipped with a stir bar and a condenser tube, 23.0 mL (2216.4 mmol) of toluene, 5.0 g (22.8 mmol) of 4-maleimidobenzoic acid, 2.2 mL (30.4 mmol) of thionyl chloride, N , N-dimethylformamide (0.36 mL, 4.6 mmol) was added, and the mixture was stirred at 80 ° C. for 1 hour under a nitrogen atmosphere to complete the chlorination reaction. Thereafter, volatile components were distilled off under reduced pressure to obtain 4-maleimidobenzoic acid chloride as yellowish white crystals.
- the obtained compound (2) was sandwiched between metal plates and compressed and heated at 340 ° C. for 15 minutes using a hot press to obtain a uniform cured product (1). It was confirmed that the obtained hardened
- Example 2 [Production of carboxylic acid ester having hydroxyl groups at both ends]
- 22.0 mL (178.2 mol) of xylene, 4.0 g (21.7 mmol) of 4,4′-biphenol, 3.0 g of hydroxybenzoic acid (21.7 mmol), 0.044 g (0.72 mmol) of boric acid and 0.95 g (9.7 mmol) of sulfuric acid were added, and the mixture was stirred for 1 hour under reflux in a nitrogen atmosphere to complete the esterification reaction.
- thermosetting compound In a 500 mL three-necked flask equipped with a stirrer and a condenser tube, 31.0 mL (291.7 mmol) of toluene, 6.7 g (31.0 mmol) of 4-maleimidobenzoic acid, 3.0 mL (41.2 mmol) of thionyl chloride, N , N-dimethylformamide (0.48 mL, 6.2 mmol) was added, and the mixture was stirred at 80 ° C. for 1 hour under a nitrogen atmosphere to complete the chlorination reaction. Thereafter, volatile components were distilled off under reduced pressure to obtain 4-maleimidobenzoic acid chloride as yellowish white crystals.
- the obtained compound (4) was sandwiched between metal plates and compressed and heated at 340 ° C. for 15 minutes using a hot press to obtain a uniform cured product (2). It was confirmed that the obtained hardened
- acetic acid and unreacted acetic anhydride were distilled off while heating up to 340 ° C. at a rate of 0.8 ° C./min.
- a liquid crystal polyester a having hydroxyl groups at both ends of a molecular chain consisting only of an aromatic unit (a structural unit derived from an aromatic compound) is obtained. Obtained.
- the obtained liquid crystal polyester a is a monomer 10-mer. Estimated.
- the resulting liquid crystal polyester a (3.27 g) and methylene bismaleimide (1.42 g) were melt mixed at 170 ° C. for 6 hours to obtain a reaction product.
- the reaction product was a composition containing a thermosetting liquid crystal polyester.
- the obtained reaction product was sandwiched between glass plates and heated to 240 ° C. with a hot plate, and the curing reaction was allowed to proceed for 6 hours to obtain a uniform cured product (3).
- thermosetting compound of the present invention has good solvent solubility. Moreover, it can cure rapidly by performing heat processing and can form the hardened
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Abstract
Description
本発明の他の目的は、加熱処理を施すことにより速やかに硬化して、超耐熱性を有する硬化物を形成することができる熱硬化性組成物を提供することにある。
本発明の他の目的は、前記熱硬化性組成物を使用する半導体デバイスの製造方法を提供することにある。
本発明の他の目的は、前記製造方法で得られる半導体デバイスを提供することにある。
[1] 式(1)(式中、R1、R2は熱硬化性基を示し、D1、D2は、同一又は異なって、単結合又は連結基を示す。Ar1、Ar2、Ar3は、同一又は異なって、2価の芳香族炭化水素基、又は2個以上の芳香族炭化水素が単結合、2価の脂肪族炭化水素基、若しくは2価の脂環式炭化水素基を介して結合した2価の基を示し、Eはエステル結合[-(C=O)O-又は-O(C=O)-]を示す)で表される熱硬化性化合物。
[2] 式(1)中のR1、R2が、同一又は異なって、フェニルエチニル基、スチリル基、マレイミド基、ナジイミド基、ビフェニレン基、エチニル基、イソシアネート基、シアネート基、ニトリル基、フタロニトリル基、シクロベンゾブテン基、ベンゾオキサジン基、オキセタン基、及びビニル基からなる群より選択される熱硬化性基である、[1]に記載の熱硬化性化合物。
[3] 式(1)中のR1、R2が、同一又は異なって、フェニルエチニル基、スチリル基、マレイミド基、ナジイミド基、ビフェニレン基、フタロニトリル基、シクロベンゾブテン基、及びベンゾオキサジン基からなる群より選択される熱硬化性基である、[1]に記載の熱硬化性化合物。
[4] 式(1)中のAr1、Ar2、Ar3が、同一又は異なって、式(a1)~(a4)で表される基から選択される基である、[1]~[3]の何れか1つに記載の熱硬化性化合物。
[5] 式(1)中のD1、D2が、単結合又は、2価の炭化水素基(好ましくは2価の芳香族炭化水素基、特に好ましくは炭素数6~14の2価の芳香族炭化水素基、最も好ましくは式(a1)~(a4)で表される基から選択される基)である、[1]~[4]の何れか1つに記載の熱硬化性化合物。
[6] 式(1)中のR1-D1基、及びR2-D2基が、同一又は異なって、ナジイミド基、ビフェニレン基、エチニル基、イソシアネート基、シアネート基、ニトリル基、フタロニトリル基、シクロベンゾブテン基、ベンゾオキサジン基、オキセタン基、ビニル基、メチルマレイミド基、シンナモイル基、プロパルギルエーテル基、及び式(r-1)~(r-12)で表される基から選択される基である、[1]~[5]の何れか1つに記載の熱硬化性化合物。
[7] 式(1)中のR1-D1基、及びR2-D2基が、同一又は異なって、式(r-1)~(r-12)で表される基から選択される基である、[1]~[5]の何れか1つに記載の熱硬化性化合物。
[8] 分子量が748以上(好ましくは748~1300、より好ましくは748~1200、特に好ましくは748~1000、最も好ましくは748~900)である、[1]~[7]の何れか1つに記載の熱硬化性化合物。
[9] 下記溶剤に溶解性を示す、[1]~[8]の何れか1つに記載の熱硬化性化合物。
溶剤:アセトン、メチルエチルケトン、メチルイソブチルケトン、アセトニルアセトン、シクロヘキサノン、イソホロン、2-ヘプタノン、3-ヘプタノン、ベンゼン、トルエン、キシレン、ジクロロメタン、クロロホルム、1,2-ジクロロエタン、クロロベンゼン、ジクロロベンゼン、ベンゾトリフルオライド、アセトニトリル、ベンゾニトリル、酢酸エチル、テトラヒドロフラン、N-メチル-2-ピロリドン、N,N-ジメチルホルムアミド、ジメチルスルホキシド、及びこれらの混合物
[10] サーモトロピック液晶性を有する、[1]~[9]の何れか1つに記載の熱硬化性化合物。
[11] 融点が300℃以下(好ましくは100~300℃、より好ましくは120~290℃、特に好ましくは150~280℃)である、[1]~[10]の何れか1つに記載の熱硬化性化合物。
[12] 窒素中において、昇温速度10℃/分で測定される5%重量減少温度が300℃以上(好ましくは330℃以上、特に好ましくは350℃以上)である、[1]~[11]の何れか1つに記載の熱硬化性化合物。
[13] 窒素中において、昇温速度10℃/分で測定される5%重量減少温度が300~400℃(好ましくは330~400℃、特に好ましくは350~400℃)である、[1]~[11]の何れか1つに記載の熱硬化性化合物。
[14] 発熱ピーク温度が200~350℃(好ましくは250~330℃、特に好ましくは280~340℃)である、[1]~[13]の何れか1つに記載の熱硬化性化合物。
[15] [1]~[14]の何れか1つに記載の熱硬化性化合物を含む熱硬化性組成物。
[16] 熱硬化性化合物の含有量(2種以上含有する場合は、その総量)が熱硬化性組成物全量の30重量%以上(好ましくは50重量%以上、特に好ましくは70重量%以上、最も好ましくは90重量%以上)であり、且つ、熱硬化性組成物に含まれる硬化性化合物全量における式(1)で表される熱硬化性化合物の占める割合が70重量%以上(好ましくは80重量%以上、特に好ましくは90重量%以上)である、[15]に記載の熱硬化性組成物。
[17] 架橋剤及び硬化促進剤の合計含有量が、熱硬化性組成物全量の3重量%以下(好ましくは1重量%未満)である、[15]又は[16]に記載の熱硬化性組成物。
[18] 封止剤、コーティング剤、接着剤、インク、シーラント、レジスト、又はレンズ形成材である、[15]~[17]の何れか1つに記載の熱硬化性組成物。
[19] [15]~[18]の何れか1つに記載の熱硬化性組成物の硬化物。
[20] 窒素中において昇温速度10℃/分で測定される5%重量減少温度が400℃以上(好ましくは430℃以上、特に好ましくは450℃以上)である、[19]に記載の硬化物。
[21] 窒素中において昇温速度10℃/分で測定される5%重量減少温度が400~500℃(好ましくは430~500℃、特に好ましくは450~500℃)である、[19]に記載の硬化物。
[22] ガラス転移温度(Tg)が350℃超(好ましくは380℃以上、特に好ましくは400℃以上)である、[19]~[21]の何れか1つに記載の硬化物。
[23] 250℃における貯蔵弾性率(E’)が1GPa以上(好ましくは1.1GPa以上、特に好ましくは1.15GPa以上)である、[19]~[22]の何れか1つに記載の硬化物。
[24] 250℃における貯蔵弾性率(E’)が1~2GPa(好ましくは1.1~2GPa、特に好ましくは1.15~2GPa)である、[19]~[22]の何れか1つに記載の硬化物。
[25] [15]~[18]の何れか1つに記載の熱硬化性組成物を用いて半導体素子を封止する工程を有する半導体デバイスの製造方法。
[26] [19]~[24]の何れか1つに記載の硬化物により半導体素子が被覆された構造を有する半導体デバイス。
工程[1]:反応基質として、芳香族ジオールと芳香族ジカルボン酸と芳香族ヒドロキシカルボン酸を1分子ずつ反応(エステル化反応)、若しくは、芳香族ジオールと芳香族ジカルボン酸と芳香族ヒドロキシカルボン酸から選択される1種(1分子)に前記から選択される他の1種(2分子)を反応(エステル化反応)させることにより、両末端にヒドロキシル基及び/又はカルボキシル基を有するカルボン酸エステル(3量体)を得る
工程[2]:両末端にヒドロキシル基及び/又はカルボキシル基を有するカルボン酸エステル(3量体)に、ヒドロキシル基及び/又はカルボキシル基と反応する官能基を有するN-フェニルマレインイミドを反応(エステル化反応)させることにより、式(1)で表される熱硬化性化合物を得る
本発明の熱硬化性組成物は、上記熱硬化性化合物を1種又は2種以上含むことを特徴とする。本発明の熱硬化性組成物全量における上記熱硬化性化合物の含有量(2種以上含有する場合は、その総量)は、例えば30重量%以上、好ましくは50重量%以上、特に好ましくは70重量%以上、最も好ましくは90重量%以上である。尚、上限は100重量%である。すなわち、本発明の熱硬化性組成物には、熱硬化性化合物のみからなるものも含まれる。
本発明の半導体デバイスの製造方法は、上記熱硬化性組成物を用いて(例えば、上記熱硬化性組成物を半導体用封止剤として使用して)半導体素子を封止する工程を有する。
NMR(核磁気共鳴)測定装置(商品名「JNM-ECA500」、(株)JEOL RESONANCE製)を用いた。測定溶媒は重溶媒(各実施例に記載)を使用し、化学シフトはTMSを規準とした。
[両末端にヒドロキシル基を有するカルボン酸エステルの製造]
撹拌子、冷却管、及びディーン・スターク装置を備えた1.0Lの三ツ口フラスコに、キシレン380.0mL(3.1mol)、ハイドロキノン20.0g(181.6mmol)、ヒドロキシ安息香酸52.7g(381.4mmol)、ホウ酸0.74g(12.0mmol)、硫酸1.9g(19.0mmol)を入れ、窒素雰囲気下、還流させながら1時間撹拌することでエステル化反応を完結させた。その後、反応液を室温まで降温してから析出物を分取し、メタノールで洗浄後、乾燥させて化合物(1)33.9g(96.7mmol)を白色結晶として得た。得られた化合物(1)を、NMR測定によって化学構造を同定したところ、下記式で表される化合物(1,4-フェニレンビス(4-ヒドロキシベンゾエイト、分子量:350.3)であることが確認された。
撹拌子および冷却管を備えた100mLの三ツ口フラスコに、トルエン23.0mL(2216.4mmol)、4-マレイミド安息香酸5.0g(22.8mmol)、塩化チオニル2.2mL(30.4mmol)、N,N-ジメチルホルムアミド0.36mL(4.6mmol)を入れ、窒素雰囲気下、80℃で1時間撹拌することで、クロル化反応を完結させた。その後、減圧して揮発成分を留去することで、4-マレイミド安息香酸クロライドを黄白色結晶として得た。次いで、得られた4-マレイミド安息香酸クロライド5.4g(22.8mmol)、o-ジクロロベンゼン40.0mL(353.7mmol)、化合物(1)2.0g(5.7mmol)、トリエチルアミン3.2mL(22.8mmol)を、窒素雰囲気下、80℃に加温しながら1時間撹拌することで、エステル化反応を完結させた。その後、反応液を室温まで降温してから析出物を分取し、メタノールで洗浄後、乾燥させて化合物(2)4.1g(5.5mmol)を黄白色結晶として得た。得られた化合物(2)を、NMR測定によって化学構造を同定したところ、下記式(1-1)で表される化合物(分子量:748.7)であることが確認された。また、化合物(2)は、偏光顕微鏡観察によりサーモトロピック液晶性を示すものであることが確認された。更に、化合物(2)は、DMSO、DMF、NMPに良好な溶解性を示すものであることが確認された。
[両末端にヒドロキシル基を有するカルボン酸エステルの製造]
撹拌子、冷却管およびディーン・スターク装置を備えた100mLの三ツ口フラスコに、キシレン22.0mL(178.2mol)、4,4’-ビフェノール4.0g(21.7mmol)、ヒドロキシ安息香酸3.0g(21.7mmol)、ホウ酸0.044g(0.72mmol)、硫酸0.95g(9.7mmol)を入れ、窒素雰囲気下、還流させながら1時間撹拌することでエステル化反応を完結させた。その後、反応液を室温まで降温してから析出物を分取し、メタノールで洗浄後、乾燥させて化合物(3)1.7g(4.0mmol)を白色結晶として得た。得られた化合物(3)を、NMR測定によって化学構造を同定したところ、下記式で表される化合物(1,1'-ビフェニル-4,4'-ジイルビス(4-ヒドロキシベンゾエイト)、分子量:426.42)であることが確認された。
δ:6.95(4H,d,J=9.5Hz),7.35(4H,d,J=9.5Hz),7.76(4H,d,J=9.5Hz),8.02(4H,d,J=9.5Hz),10.55(2H,s).
撹拌子および冷却管を備えた500mLの三ツ口フラスコに、トルエン31.0mL(291.7mmol)、4-マレイミド安息香酸6.7g(31.0mmol)、塩化チオニル3.0mL(41.2mmol)、N,N-ジメチルホルムアミド0.48mL(6.2mmol)を入れ、窒素雰囲気下、80℃で1時間撹拌することで、クロル化反応を完結させた。その後、減圧して揮発成分を留去することで、4-マレイミド安息香酸クロライドを黄白色結晶として得た。次いで、得られた4-マレイミド安息香酸クロライド7.3g(31.0mmol)、o-ジクロロベンゼン135.0mL(1.2mol)、化合物(3)6.0g(14.1mmol)、トリエチルアミン4.3mL(31.0mmol)を、窒素雰囲気下、80℃に加温しながら1時間撹拌することで、エステル化反応を完結させた。その後、反応液を室温まで降温してから析出物を分取し、メタノールで洗浄後、乾燥させて化合物(4)8.7g(10.6mmol)を黄白色結晶として得た。得られた化合物(4)を、NMR測定によって化学構造を同定したところ、下記式(1-2)で表される化合物(分子量:824.8)であることが確認された。また、化合物(4)は、偏光顕微鏡観察によりサーモトロピック液晶性を示すものであることが確認された。更に、化合物(4)は、DMSO、DMF、NMPに良好な溶解性を示すものであることが確認された。
δ:7.27(4H,s),7.45(4H,d,J=8.0Hz),7.60(4H,d,J=8.5Hz),7.66(4H,d,J=8.5Hz),7.83(4H,d,J=8.0Hz),8.30(8H,d,J=8.5Hz).
[熱硬化性化合物の製造]
コンデンサーと撹拌機を取り付けた500mLのフラスコに、4-ヒドロキシ安息香酸94.3g(0.682mol)、6-ヒドロキシ-2-ナフトエ酸102.7g(0.546mol)、4,4'-ジヒドロキシビフェニル25.4g(0.136mol)、無水酢酸156.3g(1.53mol)、及び酢酸カリウム10.0mg(0.10mol)を入れ、窒素雰囲気下で140℃まで徐々に温度を上げた後、温度を維持しながら3時間反応させてアセチル化反応を完結させた。次いで、0.8℃/分の速度で340℃まで昇温しながら酢酸及び未反応の無水酢酸を留去した。その後、フラスコ内を徐々に1Torrまで減圧して揮発成分を留去することで、芳香族ユニット(芳香族化合物に由来する構成単位)のみからなる分子鎖の両末端に水酸基を有する液晶ポリエステルaを得た。得られた液晶ポリエステルaは、液晶ポリエステルaの末端数の算出(特開平5-271394号公報に記載のアミン分解HPLC法による)、及びGPC測定の結果、単量体の10量体であると見積もられた。
得られた液晶ポリエステルa3.27gとメチレンビスマレイミド1.42gとを、170℃で6時間溶融混合して反応生成物を得た。反応生成物は熱硬化性液晶ポリエステルを含む組成物であった。
DSC(示差走査熱量測定)装置(商品名「DSC6200」、エスアイアイナノテクノロジー社製)を用い、窒素気流下(50mL/分)、昇温温度10℃/分にて、化合物(各5mg)を加熱して、融点(Tm)及び発熱ピーク温度を測定した。
TG/DTA(熱重量測定・示差熱分析)装置(商品名「EXSTAR6300」、エスアイアイナノテクノロジー社製)を用い、窒素気流下(300mL/分)、昇温温度10℃/分にて、化合物若しくは硬化物(約5mg)を加熱して、5%重量減少温度(Td5)を測定した。尚、基準物質には、アルミナを用いた。
硬化物(約200mg)について、DMA(動的粘弾性測定)装置(商品名「RSA-III」、ティー・エイ・インスツルメント社製)を用いて測定した。
Claims (7)
- 式(1)中のR1、R2が、同一又は異なって、フェニルエチニル基、スチリル基、マレイミド基、ナジイミド基、ビフェニレン基、エチニル基、イソシアネート基、シアネート基、ニトリル基、フタロニトリル基、シクロベンゾブテン基、ベンゾオキサジン基、オキセタン基、及びビニル基からなる群より選択される熱硬化性基である請求項1に記載の熱硬化性化合物。
- サーモトロピック液晶性を有する請求項1又は2に記載の熱硬化性化合物。
- 請求項1~3の何れか1項に記載の熱硬化性化合物を含む熱硬化性組成物。
- 請求項4に記載の熱硬化性組成物の硬化物。
- 請求項4に記載の熱硬化性組成物を用いて半導体素子を封止する工程を有する半導体デバイスの製造方法。
- 請求項5に記載の硬化物により半導体素子が被覆された構造を有する半導体デバイス。
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WO2019244693A1 (ja) * | 2018-06-20 | 2019-12-26 | 株式会社ダイセル | 硬化性組成物 |
WO2020045897A1 (ko) * | 2018-08-28 | 2020-03-05 | 주식회사 엘지화학 | 향상된 충격 강도를 갖는 프탈로니트릴계 수지 |
KR20200024718A (ko) * | 2018-08-28 | 2020-03-09 | 주식회사 엘지화학 | 향상된 충격 강도를 갖는 프탈로니트릴계 수지 |
US11021438B2 (en) | 2016-12-16 | 2021-06-01 | Daicel Corporation | Curable compound |
JPWO2022059648A1 (ja) * | 2020-09-16 | 2022-03-24 |
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JP2019137713A (ja) * | 2018-02-06 | 2019-08-22 | 株式会社ダイセル | 熱硬化性組成物 |
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