WO2017159703A1 - 有機半導体組成物、有機薄膜トランジスタの製造方法、及び有機薄膜トランジスタ - Google Patents
有機半導体組成物、有機薄膜トランジスタの製造方法、及び有機薄膜トランジスタ Download PDFInfo
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- WO2017159703A1 WO2017159703A1 PCT/JP2017/010282 JP2017010282W WO2017159703A1 WO 2017159703 A1 WO2017159703 A1 WO 2017159703A1 JP 2017010282 W JP2017010282 W JP 2017010282W WO 2017159703 A1 WO2017159703 A1 WO 2017159703A1
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Definitions
- the present invention relates to an organic semiconductor composition, a method for producing an organic thin film transistor, and an organic thin film transistor.
- a small transistor is integrated as a switching element.
- An organic thin film transistor (field effect transistor) using an organic semiconductor compound for a semiconductor layer can be reduced in weight, and can be manufactured at a lower cost because a printing process can be applied to its production, and is excellent in flexibility. For this reason, it has attracted attention as a next-generation transistor that can replace a transistor having a silicon-based semiconductor layer, and is being developed.
- Patent Document 1 discloses that an organic thin film transistor having high carrier mobility can be obtained by using, as a semiconductor active layer, a polymer compound having at least two types of repeating units composed of an aromatic ring having a specific condensed polycyclic structure. It is described.
- the present inventors have found that when the organic semiconductor layer of an organic thin film transistor is formed of an organic semiconductor polymer having a specific structure, the molecular weight has a specific relationship with the molecular weight of the organic semiconductor polymer. It was found that the carrier mobility of the obtained organic thin film transistor can be effectively increased by coexisting the polymer in a specific ratio with respect to the amount of the organic semiconductor polymer, and the performance of the transistor can be improved. .
- the present invention has been further studied based on these findings and has been completed.
- An organic semiconductor composition containing the following (a) to (c): (A) an organic semiconductor polymer having a weight average molecular weight of 2000 or more, (B) an insulating polymer having a weight average molecular weight of 2000 or more, (C) solvent;
- the weight average molecular weight Mw1 of the organic semiconductor polymer and the weight average molecular weight Mw2 of the insulating polymer satisfy the following relational expression: 0.1 ⁇ Mw1 / Mw2 ⁇ 10
- the organic semiconductor polymer content C1% by mass and the insulating polymer content C2% by mass in the organic semiconductor composition satisfy the following relational expression: 0.1 ⁇ C1 / C2 ⁇ 10
- D is a group having a monocyclic or condensed polycyclic aromatic heterocycle having at least one atom selected from a nitrogen atom, an oxygen atom, a sulfur atom and a selenium atom as a ring constituent atom; Or the group which has a condensed polycyclic aromatic hydrocarbon ring is shown.
- A represents a group having a structure represented by any of the following formulas (A-1) to (A-12).
- X A represents an oxygen atom, a sulfur atom, a selenium atom or NR X.
- R N and R X represent an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain, or a group represented by the following formula (1-1). .
- Y A represents an oxygen atom or a sulfur atom.
- Z A represents CR A2 or a nitrogen atom.
- W A represents C (R A2 ) 2 , NR A1 , nitrogen atom, CR A2 , oxygen atom, sulfur atom or selenium atom.
- R A1 represents an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain, a group represented by the following formula (1-1), or a single bond.
- R A2 represents a hydrogen atom, a halogen atom, an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain or a single bond.
- R A3 represents a hydrogen atom or a substituent. * Indicates a binding site for incorporation into A of the above formula (1).
- L a represents an alkylene group having 1 to 20 carbon atoms which may contain at least one of —O—, —S— and —NR 1S — in the carbon chain.
- Ar represents an aromatic heterocyclic group or an aromatic hydrocarbon group having 6 to 18 carbon atoms.
- L b represents an alkyl group having 1 to 100 carbon atoms which may contain at least one of —O—, —S— and —NR 2S — in the carbon chain.
- R 1S and R 2S represent a hydrogen atom or a substituent.
- l is an integer of 1 to 5. * Indicates a binding site.
- X d represents an oxygen atom, a sulfur atom, a selenium atom or NR D1 .
- R D1 represents an organic group.
- Z d represents a nitrogen atom or CR D2 .
- R D2 represents a hydrogen atom or an organic group.
- M represents a single bond, or an aromatic heterocyclic group, an aromatic hydrocarbon group, an alkenylene group, an alkynylene group, or a divalent group formed by combining two or more of these groups.
- p and q each represents an integer of 0 to 4. * Indicates a binding site for incorporation into the structural unit represented by formula (1).
- [3] The organic semiconductor composition according to [1] or [2], wherein the structural unit represented by the formula (1) is a structural unit represented by any of the following formulas (2) to (5).
- R 1 to R 3 represent a hydrogen atom or a substituent.
- X 1 represents CR A4 or a nitrogen atom.
- R A4 represents a hydrogen atom or a substituent.
- R 11 to R 13 each represent a hydrogen atom or an alkyl group.
- R 21 ⁇ R 25 represents a hydrogen atom, a hydroxy group, an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, an aralkyl group or a fluorine atom.
- the absolute value of the difference between the solubility parameter of the structural unit represented by the formula (1) and the solubility parameter of the structural unit represented by the formula (I-1) is 5.0 MPa 1/2 or less, [4] Or the organic-semiconductor composition as described in [5].
- a bottom-gate organic thin film transistor The organic semiconductor layer of the organic thin film transistor contains the following (a) and (b): (A) an organic semiconductor polymer having a weight average molecular weight of 2000 or more, (B) an insulating polymer having a weight average molecular weight of 2000 or more; The weight average molecular weight Mw1 of the organic semiconductor polymer and the weight average molecular weight Mw2 of the insulating polymer satisfy the following relational expression: 0.1 ⁇ Mw1 / Mw2 ⁇ 10
- the organic semiconductor polymer content C3% by mass in the organic semiconductor layer and the insulating polymer content C4% by mass satisfy the following relational expression: 0.1 ⁇ C3 / C4 ⁇ 10
- D represents a group having an aromatic heterocyclic ring having a monocyclic structure or a condensed polycyclic structure having at least one atom selected from N, O, S and Se as a ring constituent atom, or a condensed poly group.
- a group having a ring aromatic hydrocarbon ring is shown.
- A represents a group having a structure represented by any of the following formulas (A-1) to (A-12).
- X A represents an oxygen atom, a sulfur atom, a selenium atom or NR X.
- R N and R X represent an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain, or a group represented by the following formula (1-1). .
- Y A represents an oxygen atom or a sulfur atom.
- Z A represents CR A2 or a nitrogen atom.
- W A represents C (R A2 ) 2 , NR A1 , nitrogen atom, CR A2 , oxygen atom, sulfur atom or selenium atom.
- R A1 represents an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain, a group represented by the following formula (1-1), or a single bond.
- R A2 represents a hydrogen atom, a halogen atom, an alkyl group which may contain at least one of —O—, —S— and —NR A3 — in the carbon chain or a single bond.
- R A3 represents a hydrogen atom or a substituent. * Indicates a binding site for incorporation into A of the above formula (1).
- L a represents an alkylene group having 1 to 20 carbon atoms which may contain at least one of —O—, —S— and —NR 1S — in the carbon chain.
- Ar represents an aromatic heterocyclic group or an aromatic hydrocarbon group having 6 to 18 carbon atoms.
- L b represents an alkyl group having 1 to 100 carbon atoms which may contain at least one of —O—, —S— and —NR 2S — in the carbon chain.
- l is an integer of 1 to 5. * Indicates a binding site.
- X d represents an oxygen atom, a sulfur atom, a selenium atom or NR D1 .
- R D1 represents an organic group.
- Z d represents a nitrogen atom or CR D2 .
- R D2 represents a hydrogen atom or an organic group.
- M represents a single bond, or an aromatic heterocyclic group, an aromatic hydrocarbon group, an alkenylene group, an alkynylene group, or a divalent group formed by combining two or more of these groups.
- p and q each represents an integer of 0 to 4. * Indicates a binding site for incorporation into the structural unit represented by formula (1).
- [14] The bottom-gate organic thin film transistor according to [12] or [13], wherein the structural unit represented by the formula (1) is a structural unit represented by any one of the following formulas (2) to (5).
- R 1 to R 3 represent a hydrogen atom or a substituent.
- X 1 represents CR A4 or a nitrogen atom.
- R A4 represents a hydrogen atom or a substituent.
- R 11 to R 13 each represent a hydrogen atom or an alkyl group.
- R 21 ⁇ R 25 represents a hydrogen atom, a hydroxy group, an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, an aralkyl group or a fluorine atom.
- the absolute value of the difference between the solubility parameter of the structural unit represented by the above formula (1) and the solubility parameter of the structural unit represented by the above general formula (I-1) is 5.0 MPa 1/2 or less, [ 15] or the bottom-gate organic thin film transistor according to [16].
- the content of the organic semiconductor polymer in the upper half of the organic semiconductor layer is UC1% by mass, the content of the insulating polymer is UC2% by mass,
- UC1, UC2, LC1 and LC2 are (UC1 / UC2) >
- the carrier mobility of the obtained organic thin film transistor can be effectively increased.
- the organic thin film transistor of the present invention is excellent in carrier mobility.
- the manufacturing method of the organic thin-film transistor of this invention the organic thin-film transistor whose carrier mobility was raised effectively can be obtained.
- FIG. 1 is a schematic cross-sectional view showing one embodiment of a bottom gate-bottom contact type organic thin film transistor element which is an example of a semiconductor element of the present invention.
- FIG. 2 is a schematic cross-sectional view showing an embodiment of a bottom gate-top contact type organic thin film transistor element which is an example of the semiconductor element of the present invention.
- FIG. 3 is a schematic cross-sectional view showing another embodiment of a bottom gate-top contact type organic thin film transistor element which is an example of the semiconductor element of the present invention.
- FIG. 4 is a schematic cross-sectional view showing another embodiment of a bottom gate-bottom contact type organic thin film transistor element which is an example of the semiconductor element of the present invention.
- a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
- the indication of the compound includes not only the compound itself but also its salt and its ion. Moreover, what changed the structure in part within the range which does not impair the target effect is included. Moreover, about the compound which does not specify substituted or unsubstituted, the thing which has arbitrary substituents is included in the range which does not impair the target effect. The same applies to substituents and linking groups (hereinafter referred to as substituents and the like).
- the respective substituents may be the same unless otherwise specified. May be different. The same applies to the definition of the number of substituents and the like. Further, when a plurality of substituents and the like are adjacent (particularly adjacent), they may be connected to each other to form a ring unless otherwise specified. In the present specification, when a plurality of structural units represented by the same indication are present in the polymer, the respective structural units present in the polymer may be the same or different.
- the number of carbon atoms of the group means the total number of carbon atoms including substituents unless otherwise specified.
- this group when a group can form a non-cyclic skeleton and a cyclic skeleton, this group includes a non-cyclic skeleton group and a cyclic skeleton group unless otherwise specified.
- the alkyl group includes a linear alkyl group, a branched alkyl group, and a cyclic (cyclo) alkyl group.
- the lower limit of the number of atoms of the group forming the cyclic skeleton is 3 or more, and preferably 5 or more, regardless of the lower limit of the number of atoms specifically described for the group.
- the organic semiconductor composition of the present invention (hereinafter simply referred to as “the composition of the present invention”) contains the following (a) to (c).
- the composition of the present invention may contain various additives in addition to the following (a) to (c).
- the organic semiconductor polymer of (a) and the insulating polymer of (b) have these molecular weights and The content in the composition has a specific relationship described later.
- the components (a) to (c) will be described in order.
- Organic semiconductor polymer having a weight average molecular weight of 2000 or more> has a structural unit represented by the following formula (1).
- D is a group having an aromatic heterocyclic ring of a monocyclic structure or a condensed polycyclic structure having at least one atom selected from N, O, S and Se as a ring constituent atom, or a condensed poly group.
- a group having a ring aromatic hydrocarbon ring is shown.
- D is preferably a donor structural unit (electron donor unit) in relation to A.
- A is preferably an acceptor structural unit (electron acceptor unit) in relation to D.
- an aromatic heterocycle having a monocyclic structure is also referred to as “monocyclic aromatic heterocycle”.
- An aromatic heterocycle having a condensed polycyclic structure is also referred to as a “condensed polycyclic aromatic heterocycle”.
- the aromatic heterocyclic ring preferably has at least one S as a ring constituent atom.
- D is a group formed by connecting a monocyclic aromatic heterocycle via a single bond or a divalent linking group, or a monocyclic aromatic heterocycle.
- the ring and the condensed polycyclic aromatic heterocycle are preferably a group formed by connecting a single bond or a divalent linking group.
- Such a divalent linking group is preferably a conjugated chain, more preferably an ethenylene group, an arylene group, a heteroarylene group, or a combination of two or more thereof.
- the divalent linking group is a combination of two or more selected from an ethenylene group, an arylene group, and a heteroarylene group
- a combination of an arylene group (preferably a phenylene group or a naphthylene group) and ethenylene is preferable.
- the number of aromatic heterocycles constituting D (the number of aromatic heterocycles in the condensed polycyclic aromatic heterocycle is 1) is preferably 2 or more, more preferably 2 to 6, and more preferably 2 to 4 Further preferred.
- the number of aromatic heterocycles constituting D is 1, such aromatic heterocycle is preferably a condensed polycyclic aromatic heterocycle.
- the aromatic heterocyclic ring constituting D is a monocyclic aromatic heterocyclic ring, it is preferably a 5-membered ring or a 6-membered ring, more preferably a 5-membered ring, still more preferably a thiophene ring or furan. A ring, particularly preferably a thiophene ring.
- the aromatic heterocycle constituting D is a condensed polycyclic aromatic heterocycle
- the monocyclic structure constituting the condensed polycyclic aromatic heterocycle is preferably a 5-membered ring or a 6-membered ring, More preferably, it is a 5-membered ring.
- the aromatic heterocyclic ring constituting D is a condensed polycyclic aromatic heterocyclic ring, it is preferably a bicyclic aromatic heterocyclic ring.
- Aromatic heterocyclic ring constituting the D may be in the form having a substituent, the substituent (hereinafter, "substituent D S1" hereinafter.) And to include an alkyl group, an alkenyl group, an alkynyl group, an aromatic hydrocarbon group An aromatic heterocyclic group, a halogen atom, and a group represented by the following formula (1-1).
- Alkyl group which may take as substituents D S1 may have a either linear or branched, may be cyclic.
- the alkyl group preferably has 1 to 30 carbon atoms, more preferably 1 to 20 carbon atoms.
- alkyl group a group selected from —O—, —S— and —NR D3 — may be incorporated in the carbon chain of the alkyl group, and —O—, — S- and -NR D3- may be incorporated.
- R D3 has the same meaning as R 1S described later, and the preferred form is also the same.
- Alkenyl which may take as substituents D S1 alkynyl group may have a either linear or branched.
- the alkenyl group preferably has 2 to 30 carbon atoms, more preferably 2 to 20 carbon atoms.
- the number of carbon atoms of the aromatic hydrocarbon group which may take as substituents D S1 is 6-30 are preferred.
- substituent aromatic heterocyclic group which may take as D S1 is a monocyclic aromatic heterocyclic group, more preferably a monocyclic aromatic heterocyclic group having 5 to 7-membered ring.
- This aromatic heterocyclic group preferably has a heteroatom selected from O, N, S and Se as a ring-constituting heteroatom.
- Halogen atoms which can be taken as substituents D S1 is F, Cl, Br or I, more preferably F or Cl, F are particularly preferred.
- a group represented by formula (1-1) which can be taken as substituents D S1 is a group of the following structure.
- L a represents an alkylene group.
- This alkylene group represents an alkylene group having 1 to 20 carbon atoms which may contain at least one of —O—, —S— and —NR 1S — in the carbon chain.
- the alkylene group includes —O— in the carbon chain is an embodiment in which —O— is introduced in the middle of the carbon-carbon bond of the alkylene group, and —O— is present at one or both ends of the alkylene group. It means an embodiment in which it is introduced, and an embodiment in which —O— is introduced in the middle of the carbon-carbon bond of the alkylene group and at one or both ends of the alkylene group.
- alkylene group contains —S— or —NR 1S —.
- the alkylene group contains —O—, —S—, and —NR 1S —, the total of these numbers is at least one, and the upper limit is not particularly limited, but is, for example, five.
- Alkylene group which may take as L a is straight-chain, may be either branched or cyclic, it is preferably a linear or branched alkylene group.
- the number of carbon atoms of the alkylene group is preferably 1 to 15 and more preferably 1 to 10 from the viewpoint of carrier mobility.
- Alkylene group which may take as L a is in the case of branched-chain, for the carbon number of the branch portion, is intended to include the carbon number of the alkylene group represented by L a.
- L a is -NR 1S - include, and if the R 1S contains a carbon atom, the carbon number of R 1S shall not be included in the carbon number of the alkylene group can take as L a.
- Ar represents an aromatic heterocyclic group or an aromatic hydrocarbon group having 6 to 18 carbon atoms.
- the aromatic heterocyclic group that can be used as Ar may be a monocyclic group or a condensed group of two or more rings, and is preferably a monocyclic group from the viewpoint of carrier mobility.
- the number of ring members is preferably 5 to 7 members.
- the ring-constituting hetero atom contained in the aromatic heterocyclic group is preferably a nitrogen atom, an oxygen atom, a sulfur atom or a selenium atom, and more preferably a sulfur atom.
- the aromatic hydrocarbon group having 6 to 18 carbon atoms that can be used as Ar is not particularly limited.
- the aromatic hydrocarbon group is a benzene ring group, a naphthalene ring group, or an aromatic hydrocarbon condensed with three or more rings (for example, fluorene). And a group obtained by removing two or more hydrogen atoms from the ring.
- a benzene ring group or a naphthalene ring group is preferable and a benzene ring group is preferable from the viewpoint that carrier mobility is further improved.
- L b represents an alkyl group.
- This alkyl group may contain at least one of —O—, —S— and —NR 2S — in the carbon chain.
- an alkyl group contains —O— in the carbon chain is an embodiment in which —O— is introduced in the middle of the carbon-carbon bond of the alkyl group, and —O— is attached to the terminal of the alkyl group on the binding site side. It means an embodiment in which — is introduced, and an embodiment in which —O— is introduced in the middle of the carbon-carbon bond of the alkyl group and at the terminal of the alkyl group on the binding site side.
- the alkyl group contains —S— or —NR 2S — is an embodiment in which —O— is introduced in the middle of the carbon-carbon bond of the alkyl group and at the terminal of the alkyl group on the binding site side.
- the alkyl group contains —O—, —S— and —NR 2S —, the number thereof is at least one, and the upper limit is not particularly limited, but for example, five.
- the alkyl group which can be taken as L b may be any of linear, branched and cyclic, but is preferably a linear or branched alkyl group from the viewpoint of carrier mobility, Groups are more preferred.
- the alkyl group may be a halogenated alkyl group having a halogen atom (preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom, more preferably a fluorine atom) as a substituent.
- Number of carbon atoms in the alkyl group can take as L b is from 1 to 100, it is preferably 9-100. Further, when the group represented by the formula (1-1) has a plurality of L b, it is preferable that at least one L b in terms of carrier mobility, is the above alkyl group having a carbon number of 9-100, More preferably, it is 20 to 100 alkyl groups, more preferably 20 to 40 alkyl groups. When the alkyl group that can be taken as L b is a branched chain, the carbon number of the branched portion is included in the carbon number of the alkyl group that can be taken as L b . However, when L b contains —NR 2S — and this R 2S contains a carbon atom, the carbon number of R 2S is not included in the carbon number of the alkyl group that can be taken as L b .
- R 1S and R 2S represent a hydrogen atom or a substituent.
- the substituent that can be adopted as R 1S and R 2S is not particularly limited, and examples thereof include an alkyl group (preferably a linear or branched alkyl group having 1 to 10 carbon atoms), a halogen atom (a fluorine atom, a chlorine atom). , A bromine atom or an iodine atom) or an aryl group (preferably an aryl group having 6 to 20 carbon atoms).
- R 1S and R 2S are preferably a hydrogen atom or an alkyl group, and more preferably an alkyl group.
- the position of Ar (ring member atom) to which L b is bonded is not particularly limited.
- L when L a is the 1-position of the ring members to bind
- L against a preferably 2 to 4-position, more preferably least one L b is bonded to the 4-position .
- l is an integer of 1 to 5, preferably 1 or 2.
- the plurality of L b may be the same as or different from each other.
- * represents a binding site.
- the condensed polycyclic aromatic hydrocarbon ring preferably has 10 to 20 carbon atoms.
- Preferred examples of such a condensed polycyclic aromatic hydrocarbon ring include a fluorene ring, a naphthalene ring, or a tricyclic or tetracyclic condensed polycyclic aromatic hydrocarbon ring.
- a fluorene ring, A naphthalene ring, anthracene ring, phenanthrene ring, chrysene ring or pyrene ring is preferred.
- D is a group having a condensed polycyclic aromatic hydrocarbon ring
- the number of condensed polycyclic aromatic hydrocarbon rings in D is preferably 1 to 6, more preferably 1 to 4, more preferably 1 or 2. 1 is particularly preferred.
- D is more preferably a group consisting of the above condensed polycyclic aromatic hydrocarbon ring (that is, a condensed polycyclic aromatic hydrocarbon group).
- the aromatic hydrocarbon group may further have a substituent, and examples of the substituent (hereinafter referred to as “substituent D S2 ”) include an alkyl group, a halogen atom, and the above formula (1-1). And the group represented.
- Alkyl group which can be taken as the substituent D S2 a preferred form of the group represented by halogen atom, and the formula (1-1) are each an alkyl group which can be taken as the substituent D S1, a halogen atom, and the formula This is the same as the preferred embodiment of the group represented by (1-1).
- D in the above formula (1) is more preferably a group represented by the following formula (D-1).
- * represents a binding site for incorporation into the structural unit of formula (1).
- X d represents O, S, Se, or indicates NR D1, O, preferably S or Se, and more preferably S.
- R D1 represents an organic group. This organic group is also preferably a group represented by the above formula (1-1).
- R D1 is more preferably an alkyl group (this alkyl group is —O—, —S—, and —NR D3 — in the carbon chain (R D3 has the same meaning as R 1S above, and its preferred form is also the same).
- the alkyl group preferably has 1 to 30 carbon atoms, more preferably 1 to 20 carbon atoms, an alkynyl group (preferably 1 to 30 carbon atoms), an alkenyl group (carbon atoms). 2 to 30 are preferred), an aromatic hydrocarbon group (preferably having 6 to 30 carbon atoms), an aromatic heterocyclic group (preferably a 5- to 7-membered ring. O, N, S or Se is preferred), a halogen atom (F, Cl, Br or I, F or Cl is more preferred, F is particularly preferred), or a group represented by the above formula (1-1) Yes, an alkyl group, a halogen atom, or And more preferably a group represented by the serial formula (1-1).
- Z d represents a nitrogen atom or CR D2, and is preferably CR D2 .
- R D2 represents a hydrogen atom or an organic group. This organic group is also preferably a group represented by the above formula (1-1).
- R D2 is more preferably a hydrogen atom, an alkyl group (this alkyl group is —O—, —S—, and —NR D3 — (R D3 has the same meaning as R 1S above, and the preferred form is also the same).
- the alkyl group preferably has 1 to 30 carbon atoms, more preferably 1 to 20 carbon atoms), an alkynyl group (preferably 2 to 30 carbon atoms), an alkenyl group.
- a group preferably having 2 to 30 carbon atoms
- an aromatic hydrocarbon group preferably having 6 to 30 carbon atoms
- an aromatic heterocyclic group preferably a 5- to 7-membered ring. , N, S, or Se
- a halogen atom F, Cl, Br, or I, F or Cl is more preferable, and F is particularly preferable
- M represents a single bond, or an aromatic heterocyclic group, an aromatic hydrocarbon group, an alkenylene group, an alkynylene group, or a divalent group formed by combining these. Note that in the above formula (D-1), the structural unit in parentheses and the above M are coupled so as to be rotatable on the coupling axis.
- the aromatic heterocyclic group which can be taken as M may be monocyclic or polycyclic.
- Examples of the aromatic heterocyclic ring constituting the aromatic heterocyclic group include a group consisting of a monocyclic aromatic heterocyclic ring or a condensed polycyclic aromatic heterocyclic ring that can constitute the above-mentioned D.
- the aromatic hydrocarbon group that can be taken as M is preferably an aromatic hydrocarbon group having 6 to 20 carbon atoms.
- aromatic hydrocarbon ring constituting the aromatic hydrocarbon group
- a benzene ring, a biphenylene ring, a fluorene ring, a naphthalene ring, an aromatic hydrocarbon ring condensed with other three rings or four rings is more preferable, and a fluorene ring , Naphthalene ring, anthracene ring, phenanthrene ring, chrysene ring, or pyrene ring is more preferable.
- the aromatic heterocyclic group or aromatic hydrocarbon group that can be taken as M may be in a form having a substituent, such as an alkyl group (this alkyl group is —O—, —S— in the carbon chain).
- R D3 has the same meaning as R 1S above and may have the same preferred form), and a halogen atom (F, Cl, Br or I). , F or Cl is more preferable, and F is particularly preferable.), And a group represented by the above formula (1-1).
- the alkenylene group that can be taken as M is preferably an alkenylene group having 2 to 10 carbon atoms, more preferably an alkenylene group having 2 to 4 carbon atoms, and further preferably an ethenylene group.
- the alkynylene group that can be taken as M is preferably an alkynylene group having 2 to 10 carbon atoms, more preferably an alkynylene group having 2 to 4 carbon atoms, and further preferably an ethynylene group.
- p and q are integers of 0 to 4, preferably an integer of 1 to 3, and more preferably an integer of 1 to 2. p and q are preferably the same value. Further, it is preferable that p + q is 2 to 4. However, when p + q is 0, M has a monocyclic or polycyclic aromatic heterocycle having at least one heteroatom selected from N, O, S and Se as a ring constituent atom, Or it is preferable to have a condensed polycyclic aromatic hydrocarbon ring.
- the hydrogen atom may contain an alkyl group (this alkyl group may contain at least one of —O—, —S—, and —NR D3 — in the carbon chain.
- R D3 represents the above R has the same meaning as 1S, preferred forms are also the same.
- the number of carbon atoms of the alkyl group is preferably 1 to 30, 1 to 20 is more preferable.
- A represents an aromatic heterocyclic group represented by any of the following formulas (A-1) to (A-12).
- * represents a binding site with another group forming the structural unit represented by the formula (1).
- a broken line within the 5-membered ring indicates that the 5-membered ring is an aromatic ring.
- X A represents an oxygen atom, a sulfur atom, a selenium atom or NR X , preferably a sulfur atom or NR X.
- R N and R X represent an alkyl group or a group represented by the above formula (1-1). The alkyl group that can be taken as R N and R X has the same meaning as the alkyl group that can be taken as R A1 described later, and the preferred range is also the same.
- Alkyl group which may take as R N and R X are, -O during Similarly the carbon chain and which will be described later R A1 -, - S- and -NR A3 - may comprise at least one of.
- Y A represents an oxygen atom or a sulfur atom, preferably an oxygen atom.
- Z A represents CR A2 or a nitrogen atom, and CR A2 is preferable.
- R A2 represents a hydrogen atom, a halogen atom, an alkyl group (this alkyl group may contain at least one of —O—, —S—, and —NR A3 — in the carbon chain), or , Indicates a single bond. That R A2 is a single bond means that R A2 is a binding site with another structure.
- R A2 is preferably a hydrogen atom or a single bond.
- R A2 is a halogen atom, it is a fluorine atom, a chlorine atom, a bromine atom or an iodine atom, and a fluorine atom is preferred.
- R A2 is the above alkyl group
- an alkyl group having 2 to 35 carbon atoms is preferable, and an alkyl group having 8 to 25 carbon atoms is more preferable.
- the alkyl group may be linear or branched.
- R A3 represents a hydrogen atom or a substituent.
- the substituent that can be adopted as R A3 is not particularly limited, and is the same as the substituent in R 1S and R 2S described above, and the preferred range is also the same.
- CR A2 when R A2 is a single bond, the C atom of CR A2 is a binding site in each of the above formulas (A-5), (A-10) and (A-11) (in each formula, * Show).
- the above formulas (A-5) and (A-10) in a ring structure containing Z A , one Z A is CR A2 and R A2 is a single bond.
- CR A2 (carbon atom) having a single bond is a bonding site indicated by * in each formula.
- two Z A out of eight are CR A2 and R A2 thereof is a single bond.
- CR A2 (carbon atom) having these single bonds serves as a bonding site indicated by * in formula (A-11).
- W A each independently represents C (R A2 ) 2 , NR A1 , nitrogen atom, CR A2 , oxygen atom, sulfur atom or selenium atom, preferably C (R A2 ) 2 , CR A2 or sulfur atom, CR A2 or a sulfur atom is more preferable.
- R A1 represents an alkyl group (this alkyl group may contain at least one of —O—, —S—, and —NR A3 — in the carbon chain), and the above formula (1-1) Or a single bond.
- R A1 is preferably an alkyl group or a group represented by the above formula (1-1).
- the alkyl group that can be taken as R A1 may be linear or branched.
- the alkyl group preferably has 2 to 35 carbon atoms, more preferably 8 to 25 carbon atoms.
- R A2 and R A3 in the W A respectively, have the same meaning as R A2 and R A3 in the Z A, it is preferable also the same.
- 1 single W A is, be one of the following embodiments embodiments 1 to 3, it is preferable that the aspect 1.
- Embodiments 1 W A is CR A2, and the R A2 is a single bond.
- Aspect 2 W A is NR A1 and R A1 is a single bond.
- Embodiment 3 W A is C (R A2) 2, and wherein one is a single bond of the R A2, the other is a hydrogen atom, a halogen atom or the alkyl group.
- CR A2 (carbon atom), NR A1 (nitrogen atom), or C (R A2 ) 2 (carbon atom) having the single bond is a bonding site in formula (A-6) (wherein * Show).
- A is the formula (A-1) to (A-6), the formula (A-8) to the formula (A-10) or the formula (A) among the above formulas (A-1) to (A-12).
- -12) is preferably an aromatic heterocyclic group represented by formula (A-1), formula (A-3), formula (A-4), formula (A-6) or formula (A-
- the aromatic heterocyclic group represented by 8) is more preferable, and the aromatic heterocyclic group represented by the formula (A-3) is further preferable.
- the structural unit represented by the above formula (1) is preferably a structural unit represented by any of the following formulas (2) to (5).
- R N, X A, Y A and Z A respectively, the same meanings as R N, X A, Y A and Z A described in the above formula (A-1) ⁇ (A -12).
- X d, Z d, M, p and q are each the same meaning as X d, Z d, M, p and q described in the above formula (D-1).
- M: n in the following exemplary compounds represents a molar ratio of repeating units.
- the organic semiconductor polymer of component (a) may contain one type of structural unit represented by formula (1), or may contain two or more types.
- the organic semiconductor polymer of component (a) has two or more repeating units represented by formula (1).
- the organic semiconductor polymer of component (a) may be a random copolymer or a block copolymer.
- the organic semiconductor polymer of component (a) may be an oligomer having a repeating unit number (degree of polymerization) n of 2 to 9, or may be a polymer compound having a repeating unit number n of 10 or more.
- a polymer compound is preferable from the viewpoint of carrier mobility and physical properties of the obtained organic semiconductor layer.
- the degree of polymerization n can be estimated from the weight average molecular weight described later and the mass of each repeating unit.
- the organic semiconductor polymer of component (a) may have a structural unit other than the structural unit represented by the above formula (1).
- the content of the structural unit represented by the above formula (1) is preferably 60% by mass or more, more preferably 80% by mass or more, and 90% by mass. It is still more preferable that it is above.
- the organic semiconductor polymer of component (a) is preferably a polymer comprising a structural unit represented by the above formula (1).
- the organic semiconductor polymer of component (a) has a weight average molecular weight of 2,000 or more, more preferably 10,000 or more, and still more preferably 20,000 or more. 30,000 or more is particularly preferable, and 45,000 or more is most preferable. From the viewpoint of solubility, the weight average molecular weight is preferably 1,000,000 or less, more preferably 300,000 or less, still more preferably 200,000 or less, and 150,000 or less. It is particularly preferred that Furthermore, the weight average molecular weight of the organic semiconductor polymer of component (a) has a specific relationship with the weight average molecular weight of the insulating polymer of component (b) as described later.
- the weight average molecular weight and the number average molecular weight are measured by a gel permeation chromatography (GPC) method, and are determined by conversion with standard polystyrene.
- GPC uses HLC-8121 GPC (trade name, manufactured by Tosoh Corporation), and TSKgel GMH HR -H (20) HT (trade name, manufactured by Tosoh Corporation, 7.8 mm ID ⁇ 30 cm) is used as a column.
- HLC-8121 GPC trade name, manufactured by Tosoh Corporation
- TSKgel GMH HR -H (20) HT trade name, manufactured by Tosoh Corporation, 7.8 mm ID ⁇ 30 cm
- 1,2,4-trichlorobenzene is used as an eluent.
- the sample concentration is 0.02 mass%
- the flow rate is 1.0 mL / min
- the sample injection amount is 300 ⁇ L
- the measurement temperature is 160 ° C.
- an IR (infrared) detector is used.
- the calibration curve is “Standard sample TSK standard, polystyrene” manufactured by Tosoh Corporation: “F-128”, “F-80”, “F-40”, “F-20”, “F-10”, “ Twelve samples of “F-4”, “F-2”, “F-1”, “A-5000”, “A-2500”, “A-1000”, “A-500” (product names) Use to make.
- the terminal structure of the organic semiconductor polymer of component (a) is not particularly limited, and is uniquely defined depending on the presence or absence of other repeating units, the type of substrate used during synthesis, or the type of quenching agent (reaction terminator) used during synthesis. Not determined.
- a terminal structure for example, a hydrogen atom, a hydroxy group, a halogen atom, an ethylenically unsaturated group, an alkyl group, an aromatic heterocyclic group (preferably a thienyl group) or an aromatic hydrocarbon group (a phenyl group is preferable).
- the method for synthesizing the organic semiconductor polymer of component (a) is not particularly limited, and can be synthesized by referring to ordinary methods. For example, it can be synthesized by synthesizing a precursor compound that leads each structural unit constituting the polymer, and subjecting each precursor to a cross-coupling reaction such as a Suzuki coupling reaction or a Stille coupling reaction.
- a cross-coupling reaction such as a Suzuki coupling reaction or a Stille coupling reaction.
- JP-T 2010-527327, JP-T 2007-516315, JP-A 2014-515043, JP-A 2014-507488, JP-T 2011- Reference can be made to documents such as JP-A-501451, JP-A 2010-18790, International Publication No. 2012/174561, JP-T 2011-514399, and JP-T 2011-514913.
- the content of the organic semiconductor polymer as the component (a) is preferably 0.001 to 10% by mass, more preferably 0.01 to 5% by mass, and 0.03 to 2% by mass. Is more preferable.
- the insulating polymer of component (b) can be used without particular limitation as long as it has a weight average molecular weight of 2000 or more and exhibits insulating properties.
- the “insulating polymer” means a polymer having a volume resistance value of 10 6 ⁇ cm or more and different from the organic semiconductor polymer of the component (a).
- the volume resistance value is measured by the following method. -Measurement method of volume resistance value- A polymer is applied to a clean glass substrate of 50 mm square to obtain a polymer film having a thickness of 1 ⁇ m. About the obtained film
- the insulating polymer of component (b) is preferably a polymer obtained by polymerizing a monomer having an ethylenically unsaturated bond, and more preferably has a structural unit represented by the following formula (I-1). preferable.
- R 1 to R 3 represent a hydrogen atom or a substituent.
- substituents include an alkyl group (preferably an alkyl group having 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, (Methyl or ethyl) is preferred.
- R 1 to R 3 are more preferably a hydrogen atom or methyl, and still more preferably R 1 and R 2 are hydrogen atoms and R 3 is a hydrogen atom or methyl.
- X 1 each independently represents CR A4 or a nitrogen atom.
- R A4 represents a hydrogen atom or a substituent.
- the substituent that can be taken as R A4 is an alkyl group (preferably an alkyl group having 1 to 12, more preferably 2 to 9, and more preferably 4 to 6 carbon atoms), a hydroxy group, or an alkenyl group (preferably a carbon group).
- An alkynyl group preferably 2 to 12 carbon atoms, more preferably 2 to 9 carbon atoms, still more preferably 2 to 12 carbon atoms, more preferably an alkenyl group having 2 to 9 carbon atoms, still more preferably 4 to 6 carbon atoms).
- alkynyl group having 4 to 6 carbon atoms a cycloalkyl group (preferably having 3 to 12 carbon atoms, more preferably 3 to 9 carbon atoms, and still more preferably a cycloalkyl group having 4 to 6 carbon atoms).
- a substituted form is preferred
- an aryl group preferably an aryl group having 6 to 12 carbon atoms, more preferably 6 to 9 carbon atoms, still more preferably 6 to 12 carbon atoms).
- the reel group is preferably an unsubstituted form.
- An aralkyl group preferably an aralkyl group having 7 to 12 carbon atoms, more preferably an aralkyl group having 7 to 9 carbon atoms
- a halogen atom preferably a fluorine atom
- R A4 is more preferably a hydrogen atom, a hydroxy group or an alkyl group.
- the number of such nitrogen atoms is preferably one. (That is, when the ring structure in formula (I-1) is a nitrogen-containing heterocycle, a pyridine ring is preferred.)
- the structural unit represented by the above formula (I-1) contained in the insulating polymer as the component (b) may be a part or all of the structural unit represented by the following formula (I-2). preferable.
- R 11 to R 13 each represent a hydrogen atom or an alkyl group.
- the alkyl group that can be adopted as R 11 to R 13 preferably has 1 to 10 carbon atoms, more preferably 1 to 6, more preferably 1 to 4, and still more preferably methyl or ethyl.
- R 11 and R 12 are hydrogen atoms
- R 13 is a hydrogen atom or methyl.
- R 21 ⁇ R 25 represents a hydrogen atom, a hydroxy group, an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, an aralkyl group or a fluorine atom.
- Preferred forms of the alkyl group, alkenyl group, alkynyl group, cycloalkyl group, aryl group and aralkyl group that can be adopted as R 21 to R 25 are the alkyl group, alkenyl group, alkynyl group, cycloalkyl group, which can be adopted as R A4 . It is the same as the preferable form of an aryl group and an aralkyl group.
- R 22 and R 23 may be connected to each other to form a ring.
- a benzene ring is preferable. (That is, the whole condensed ring structure is preferably a naphthalene ring.)
- the alkyl group, alkenyl group, alkynyl group, cycloalkyl group, aryl group or aralkyl group which can be adopted by R 21 to R 25 may further have a substituent.
- substituents include an alkoxy group (preferably an alkoxy group having 1 to 10 carbon atoms, more preferably an alkoxy group having 1 to 5 carbon atoms, more preferably an ethoxy group or a methoxy group), a hydroxyl group, a halogen atom (a fluorine atom, a chlorine atom).
- Atoms, etc. nitro groups, acyl groups (preferably having 2 to 10 carbon atoms, more preferably 2 to 5 carbon atoms, more preferably 2 or 3 carbon acyl groups), acyloxy groups (preferably having 2 to 10 carbon atoms). More preferably an acyloxy group having 2 to 5 carbon atoms, more preferably 2 or 3 carbon atoms), an acylamino group (preferably 2 to 10 carbon atoms, more preferably 2 to 5 carbon atoms, still more preferably 2 or 2 carbon atoms).
- acylamino group a sulfonylamino group, a dialkylamino group (preferably a C2-20, more preferably a C2-10 dial)
- a ruamino group more preferably a diethylamino group or a dimethylamino group
- an alkylthio group preferably an alkylthio group having 1 to 10 carbon atoms, more preferably an alkylthio group having 1 to 5 carbon atoms, still more preferably an ethylthio group or a methylthio group
- an arylthio group An arylthio group having 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, more preferably a phenylthio group or a naphthylthio group, and an aralkylthio group (preferably having 7 to 20 carbon atoms, more preferably 7 to 15 carbon atoms).
- Aralkylthio group thienylcarbonyloxy group
- the insulating polymer (b) may be a random copolymer or a block copolymer.
- the insulating polymer of component (b) preferably has a weight average molecular weight of 2,000 to 10,000,000, and 2,000 to 2,000,000 or less. Is more preferably 2,000 to 1,000,000 or less. Furthermore, the weight average molecular weight of the organic semiconductor polymer of component (b) has a specific relationship with the weight average molecular weight of the organic semiconductor polymer of component (a) as described later.
- the insulating polymer of component (b) When the insulating polymer of component (b) has a structural unit represented by the above formula (I-1), it may further have a structural unit other than the structural unit represented by the above formula (I-1). Good.
- the content of the structural unit represented by the formula (I-1) is preferably 60% by mass or more, more preferably 80% by mass or more, and 90% More preferably, it is at least mass%.
- the insulating polymer of component (b) is particularly preferably a polymer comprising a structural unit represented by formula (I-1).
- the insulating polymer of component (b) is also preferably composed of a structural unit represented by the above formula (I-1).
- the content C1% by mass of the organic semiconductor polymer as the component (a) and the content C2% by mass of the insulating polymer as the component (b) satisfy the following relational expression (1b).
- C1 and C2 preferably satisfy the following relational expression (2b), and more preferably satisfy the following relational expression (3b).
- C1 and C2 are in the above relationship, it is possible to satisfactorily suppress inhibition of carrier hopping by the insulating polymer while causing a desired interaction between the insulating polymer and the organic semiconductor polymer.
- the content of the component (b) is preferably 0.001 to 10% by mass, more preferably 0.01 to 5% by mass, and further preferably 0.03 to 2% by mass.
- the solubility parameter (SP value) of the structural unit represented by the above formula (1) possessed by the organic semiconductor polymer of component (a), and the above formula (I-1) preferably possessed by the organic semiconductor polymer of component (a) SP value of the structural unit represented in the absolute value of these differences is preferably 7.5 MPa 1/2 or less, more preferably 5.0 MPa 1/2 or less, more preferably 2.5 MPa 1/2 or less.
- SP value means “value of solubility parameter”.
- the SP value in the present invention is a Hansen solubility parameter according to the formula described in Hansen solubility parameter: A User's Handbook, Second Edition, CM Hansen (2007), Taylor and Francis Group, LLC (HSPiP manual).
- SP value is calculated by the following formula using “Practical Hansen Solubility Parameter HSPiP 3rd Edition” (software version 4.0.05).
- SP value 2 ( ⁇ Hd) 2 + ( ⁇ Hp) 2 + ( ⁇ Hh) 2 Hd: dispersion contribution
- Hp polarity contribution
- Hh hydrogen bond contribution
- the organic semiconductor polymer of the said component (a) and the insulating polymer of the said component (b) have a specific relationship also in these characteristic aspects. That is, when the surface free energy of the organic semiconductor polymer of the component (a) is ⁇ 1 and the surface free energy of the insulating polymer of the component (b) is ⁇ 2, it is preferable to satisfy ⁇ 1 ⁇ ⁇ 2, and satisfy ⁇ 1 ⁇ 2. It is more preferable.
- ⁇ 1 and ⁇ 2 in the above relationship while maintaining compatibility between the organic semiconductor polymer and the insulating polymer in the organic semiconductor layer, both polymers can be appropriately unevenly distributed. Regularity can be effectively increased and carrier mobility can be further improved.
- the surface free energy of the polymer can be measured by a usual method. That is, it can be obtained by measuring the contact angle of a film made of this polymer (thickness: 100 nm) with both water and diiodomethane and substituting it into the following Owens equation (the following is an organic solvent with diiodomethane (CH 2 I 2 ).
- the contact angle is measured by setting the droplet volume to 1 ⁇ L for both pure water and diiodomethane and reading the contact angle 10 seconds after dropping. At that time, the measurement atmosphere is set to a temperature of 23 ° C. and a relative humidity of 50%.
- the solvent of the component (c) is not particularly limited as long as the organic semiconductor polymer of the component (a) and the insulating polymer of the component (b) can be dissolved at a predetermined concentration.
- Examples of such solvents include the following solvents.
- Alcohol compounds Dibutyl ether, tetrahydrofuran, dioxane, dimethoxyethane, anisole, ethoxybenzene, propoxybenzene, isopropoxybenzene, butoxybenzene, 2-methylanisole, 3-methylanisole, 4-methylanisole, 4-ethylanisole, dimethylanisole (2, 3-, 2,4-, 2,5-, 2,6-, 3,4-, 3,5-, 3,6-)), ether compounds such as 1,4-benzodioxane, N, Amide or imide compounds such as N-dimethylformamide, N, N-dimethylacetamide, 1-methyl-2-pyrrolidone, 1-methyl-2-imidazolidinone, 1,3-dimethyl-2-imidazolidinone, dimethyl Sulfoxide compounds such as sulfoxide, phosphoric acid such as trimethyl phosphate Ester compounds, acetonitrile, nitrile compounds such as benzonitrile, can be used
- a solvent may be used independently and may be used in combination of multiple. It is preferable to select an appropriate solvent in accordance with the printing method.
- one or more selected from hydrocarbon compounds, halogenated hydrocarbon compounds, heterocyclic compounds, halogenated heterocyclic compounds or ether compounds are preferable, and toluene, xylene, mesitylene, amylbenzene, tetralin, acetophenone , Propiophenone, butyrophenone, chlorobenzene, dichlorobenzene, anisole, ethoxybenzene, propoxybenzene, isopropoxybenzene, butoxybenzene, 2-methylanisole, 3-methylanisole, 4-methylanisole, 1-fluoronaphthalene, 3-chloro
- One or more selected from thiophene and 2,5-dibromothiophene are more preferable.
- aniso Ethoxybenzene
- propoxybenzene propoxybenzene
- butoxybenzene 2-methylanisole, 3-methylanisole, 4-methylanisole, 1-fluoronaphthalene, 3-chlorothiophene, and 2,5-dibromothiophene
- the solvent of the component (c) preferably has an SP value of 15.0 to 30.0 MPa 1/2 and more preferably 15.0 to 23.0 MPa 1/2 .
- the content of the solvent of the component (c) is preferably 60% by mass or more, more preferably 80% by mass or more, and further preferably 90% by mass or more. In the composition of the present invention, the content of the solvent of the component (c) is less than 100% by mass, and part or all of the remainder excluding the solvent is composed of the components (a) and (b).
- component (b) has virtually no thickening action. That is, the insulating polymer of component (b) does not function as a binder added for the purpose of improving printability.
- the viscosity of the composition of the present invention is p1
- the viscosity of the composition obtained by removing the component (b) from this composition is p2
- fill and it is still more preferable to satisfy
- p1 / p2 is usually 1 or more.
- the above viscosity is a value measured according to JIS Z8803.
- the carrier mobility of the obtained organic thin film transistor can be effectively increased.
- this mechanism is not clear, as will be described later, it is considered that the interaction between the insulating polymer of the component (b) used in the present invention and the organic semiconductor polymer of the component (a) has an influence (component). The effect of improving the printability by the insulating polymer (b) is virtually not observed).
- the composition of the present invention may contain various additives in addition to the components (a) to (c).
- an additive those usually used for organic semiconductor compositions can be used without particular limitation.
- the content of the additive in the organic semiconductor composition is preferably 10% by mass or less, preferably 5% by mass or less, and more preferably 1% by mass or less. It is excellent in film forming property as it is the said range. For example, when an organic semiconductor film of an organic thin film transistor element is formed using an organic semiconductor composition having an additive content within the above range, the film forming property is excellent, and the carrier mobility and heat resistance of the organic thin film transistor element are further improved. To do.
- the method for preparing the organic semiconductor composition is not particularly limited, and a normal preparation method can be adopted.
- the organic semiconductor composition of the present invention can be prepared by adding a predetermined amount of each component to a solvent and appropriately stirring.
- the organic thin film transistor manufacturing method of the present invention includes an organic semiconductor polymer that defines the organic semiconductor layer in the component (a) in the organic thin film transistor manufacturing process, and the component described above. Forming with an insulating polymer specified in (b).
- Such a production method has two embodiments, the embodiment using the composition of the present invention described above and the embodiment not using the composition of the present invention. These embodiments are described below. The overall structure of the organic thin film transistor will be described later.
- One embodiment of the production method of the present invention includes forming an organic semiconductor layer using the composition of the present invention. More preferably, after the coating film formed by applying the composition of the present invention is dried if necessary, the glass transition temperature (Tg, ° C) of the insulating polymer of the component (b) contained in the composition of the present invention The organic semiconductor layer is formed by exposure to a higher temperature (preferably above Tg Tg + 200 ° C., more preferably Tg + 20 to Tg + 100 ° C.). By doing so, the organic semiconductor polymer and the insulating polymer can be more appropriately compatible.
- the time of exposure to a temperature higher than the glass transition temperature (Tg) of the insulating polymer of component (b) is preferably 5 minutes to 3 hours.
- Each of the above steps may be performed in an air atmosphere or an inert gas atmosphere, and in an inert gas atmosphere (in an environment substantially free of water and oxygen, for example, a nitrogen atmosphere). Preferably it is done.
- Tg is measured using a differential scanning calorimeter (DSC). More specifically, using a differential scanning calorimeter (X-DSC7000 (trade name, manufactured by IT Measurement Control Co., Ltd.)), 20 mg of an insulating polymer sample was placed in a measurement pan, and the sample was speeded in a nitrogen stream. The temperature is raised from 30 ° C.
- the temperature at which the baseline starts to change from the low temperature side is defined as the glass transition temperature Tg.
- the layer on which the organic semiconductor layer is provided (the layer that is in contact with the organic semiconductor layer and serves as the foundation of the organic semiconductor layer) is inevitably determined by the structure of the organic thin film transistor.
- an organic semiconductor layer is provided on the gate insulating layer.
- a normal coating method can be employ
- the coating method include a bar coating method, a spin coating method, a dip coating method, a knife coating method, a doctor blade method, an ink jet printing method, a flexographic printing method, a gravure printing method, and a screen printing method.
- a method for forming an organic semiconductor film described in JP2013-207085A (so-called gap casting method), a method for manufacturing an organic semiconductor thin film described in International Publication No. 2014/175351 (so-called edge casting method or continuous edge casting). Method) and the like can also be suitably used.
- the layer thickness of the organic semiconductor layer formed by this method is usually 10 to 500 nm, and more preferably 20 to 200 nm.
- an ink composition A obtained by dissolving the following (a) in a solvent, and an ink composition B obtained by dissolving the following (b) in a solvent It includes applying and filming separately to form an organic semiconductor layer.
- the layer on which the organic semiconductor layer is provided (the layer that is in contact with the organic semiconductor layer and serves as the foundation of the organic semiconductor layer) is inevitably determined by the structure of the organic thin film transistor.
- the ink composition A and the ink composition B are separately (sequentially) formed on the gate insulating layer.
- Application and film formation are performed to form an organic semiconductor layer.
- (A) Organic semiconductor polymer having a weight average molecular weight of 2000 or more (b) Insulating polymer having a weight average molecular weight of 2000 or more
- the weight average molecular weight Mw1 of the (a) organic semiconductor polymer and the weight average molecular weight of the (b) insulating polymer Mw2 satisfies the following relational expression (1a). 0.1 ⁇ Mw1 / Mw2 ⁇ 10
- both polymers are suitably compatible with each other at and near the site where both polymers are in contact, and the arrangement regularity of the organic semiconductor polymer in the organic semiconductor layer can be further improved.
- the coating amount CT1 of the organic semiconductor polymer applied by coating the ink composition A and the coating amount CT2 of the insulating polymer applied by coating the ink composition B Satisfies the following relational expression (1c) in terms of mass ratio. 0.1 ⁇ CT1 / CT2 ⁇ 10
- CT1 and CT2 are in the above relationship, it is possible to suppress inhibition of carrier hopping by the insulating polymer while causing a desired interaction between the insulating polymer and the organic semiconductor polymer.
- the Mw1 and Mw2 preferably satisfy the following relational expression (2a), and more preferably satisfy the following relational expression (3a).
- Relational expression (2a) 0.5 ⁇ Mw1 / Mw2 ⁇ 7
- Relational expression (3a) 1 ⁇ Mw1 / Mw2 ⁇ 5
- the CT1 and CT2 preferably satisfy the following relational expression (2c), and more preferably satisfy the following relational expression (3c).
- Relational expression (2c) 0.5 ⁇ CT1 / CT2 ⁇ 5
- Relational expression (3c) 1 ⁇ CT1 / CT2 ⁇ 3
- the structure of the organic semiconductor polymer (a) is the same as the structure of the organic semiconductor polymer of the component (a) in the composition of the present invention, and the preferred form is also the same.
- the structure of the insulating polymer (b) is the same as the structure of the insulating polymer of the component (b) in the composition of the present invention, and the preferred form is also the same.
- the preferred ranges of the weight average molecular weight of the organic semiconductor polymer (a) and the weight average molecular weight of the insulating polymer (b) are the component (a) contained in the composition of the present invention described above. ) And the preferred range of the weight average molecular weight of the organic semiconductor polymer and the insulating polymer of (b) above.
- the ink composition A it is preferable to apply the ink composition A after applying the ink composition B and then drying it if necessary. More specifically, it is preferable to apply the ink composition B to form a coating film, and if necessary, to dry, and then apply the ink composition A thereon to form the coating film.
- the solubility of the insulating polymer contained in the ink composition B with respect to the ink composition A is preferably 10 mg / 100 g or more, more preferably 20 mg / 100 g or more, and 30 mg / 100 g. More preferably, it is the above. By doing so, part or all of the insulating polymer applied and formed using the ink composition B is dissolved in the ink composition A.
- the solvent used for the ink composition A and the ink composition B is the same.
- “solubility” means solubility at 20 ° C.
- the application method of the ink composition A and the ink composition B there is no particular limitation on the application method of the ink composition A and the ink composition B, and a normal application method can be employed.
- the coating method include a bar coating method, a spin coating method, a dip coating method, a knife coating method, a doctor blade method, an ink jet printing method, a flexographic printing method, a gravure printing method, and a screen printing method.
- a method for forming an organic semiconductor film (so-called gap casting method) described in JP2013-207085A, a method for producing an organic semiconductor thin film described in WO2014 / 175351 (so-called edge casting method or continuous edge casting). Method) and the like can also be suitably used.
- the content of the organic semiconductor polymer (a) is preferably 0.001 to 10% by mass, more preferably 0.002 to 5% by mass, and further preferably 0.003 to 2% by mass.
- the content of the insulating polymer (b) is preferably 0.001 to 10% by mass, more preferably 0.002 to 5% by mass, and further preferably 0.003 to 2% by mass. .
- the glass transition temperature of the insulating polymer contained in the ink composition B is formed on the film.
- the organic semiconductor layer is formed by exposure to a temperature higher than (Tg, ° C.) (preferably above Tg Tg + 200 ° C., more preferably Tg + 20 to Tg + 100 ° C.). By doing so, the organic semiconductor polymer and the insulating polymer can be more appropriately compatible.
- the layer thickness of the organic semiconductor layer formed by this method is usually 10 to 500 nm, and more preferably 10 to 200 nm.
- the carrier mobility of the obtained organic thin film transistor can be effectively increased.
- the coexistence of the organic semiconductor polymer and the insulating polymer increases the arrangement regularity of the organic semiconductor polymer compared to the case of the organic semiconductor polymer alone. It is presumed that this improvement in arrangement regularity suppresses carrier diffusion caused by structural fluctuations in the main chain of the organic semiconductor polymer, and improves carrier hopping between the organic semiconductor polymer chains. . If the amount of the insulating polymer is too large, it is difficult to obtain a desired effect.
- the organic thin film transistor (also referred to as organic TFT) obtained by the production method of the present invention has the above-described organic semiconductor layer of the present invention, and can further include a source electrode, a drain electrode, and a gate electrode.
- the organic TFT obtained by the manufacturing method of the present invention is provided on a substrate in contact with a gate electrode, an organic semiconductor layer, a gate insulating layer provided between the gate electrode and the organic semiconductor layer, and the organic semiconductor layer. And a source electrode and a drain electrode connected through an organic semiconductor layer.
- an organic semiconductor layer and a gate insulating layer are provided adjacent to each other.
- the structure of the organic TFT obtained by the production method of the present invention is not particularly limited as long as the organic TFT includes the above layers.
- it has any structure such as bottom contact type (bottom gate-bottom contact type and top gate-bottom contact type) or top contact type (bottom gate-top contact type and top gate-top contact type). May be.
- the organic TFT obtained by the production method of the present invention is more preferably a bottom gate-bottom contact type or a bottom gate-top contact type (these are collectively referred to as a bottom gate type).
- a bottom gate-bottom contact type or a bottom gate-top contact type these are collectively referred to as a bottom gate type.
- FIG. 1 is a schematic cross-sectional view of a bottom gate-bottom contact type organic TFT 100 which is an example of the semiconductor element of the present invention.
- the organic TFT 100 includes a substrate (base material) 10, a gate electrode 20, a gate insulating film 30, a source electrode 40 and a drain electrode 42, an organic semiconductor film 50, and a sealing layer 60.
- the substrate (base material), the gate electrode, the gate insulating layer (film), the source electrode, the drain electrode, the organic semiconductor layer (film) and the sealing layer, and the respective production methods will be described in detail.
- the substrate plays a role of supporting a gate electrode, a source electrode, a drain electrode and the like which will be described later.
- substrate is not restrict
- substrate is not specifically limited, For example, it is preferable that it is 10 mm or less, it is still more preferable that it is 2 mm or less, and it is especially preferable that it is 1.5 mm or less. On the other hand, it is preferably 0.01 mm or more, and more preferably 0.05 mm or more.
- a normal electrode used as the gate electrode of the organic TFT element can be applied without particular limitation.
- the material (electrode material) for forming the gate electrode is not particularly limited. For example, gold, silver, aluminum, copper, chromium, nickel, cobalt, titanium, platinum, magnesium, calcium, barium, sodium, or a metal such as InO 2 , conductive oxide such as SnO 2 or indium tin oxide (ITO), conductive polymer such as polyaniline, polypyrrole, polythiophene, polyacetylene or polydiacetylene, semiconductor such as silicon, germanium or gallium arsenide, or fullerene And carbon materials such as carbon nanotubes or graphite.
- the said metal is preferable and silver or aluminum is more preferable.
- the thickness of the gate electrode is not particularly limited, but is preferably 20 to 200 nm.
- the gate electrode may function as the substrate like a silicon substrate. In this case, the substrate may not be provided.
- a method for forming the gate electrode is not particularly limited.
- coating or printing a thing is mentioned.
- examples of the patterning method include printing methods such as inkjet printing, screen printing, offset printing or relief printing (flexographic printing), photolithography methods, mask vapor deposition methods, and the like.
- the gate insulating layer is not particularly limited as long as it is an insulating layer provided between the gate electrode and the organic semiconductor layer, and may be a single layer or a multilayer.
- the gate insulating layer is preferably formed of an insulating material, and preferable examples of the insulating material include organic materials such as organic polymers and inorganic materials such as inorganic oxides. From the viewpoint of handleability and the like, it is preferable to use an organic material when a plastic substrate or a glass substrate is used as the substrate.
- the organic polymer and the inorganic oxide are not particularly limited as long as they have insulating properties, and those that can form a thin film, for example, a thin film having a thickness of 1 ⁇ m or less are preferable.
- the organic polymer and the inorganic oxide may be used alone or in combination of two or more.
- the gate insulating layer may be a hybrid layer in which an organic polymer and an inorganic oxide, which will be described later, are mixed.
- polyvinyl phenol polystyrene (PS), poly (meth) acrylate represented by polymethylmethacrylate, polyvinyl alcohol, polyvinyl chloride (PVC), polyfluorination Vinylidene (PVDF), polytetrafluoroethylene (PTFE), cyclic fluoroalkyl polymer represented by CYTOP, polycycloolefin, polyester, polyethersulfone, polyetherketone, polyimide, poly (meth) acrylic acid, polybenzoxazole, Examples thereof include epoxy resins, polyorganosiloxanes represented by polydimethylsiloxane (PDMS), polysilsesquioxane, and butadiene rubber.
- PDMS polydimethylsiloxane
- PDMS polysilsesquioxane
- butadiene rubber butadiene rubber
- thermosetting resins such as phenol resin, novolac resin, cinnamate resin, acrylic resin, and polyparaxylylene resin are also included.
- the organic polymer can be used in combination with a compound having a reactive substituent such as an alkoxysilyl group, a vinyl group, an acryloyloxy group, an epoxy group, or a methylol group.
- the gate insulating layer is formed of an organic polymer
- Crosslinking is preferably performed by generating an acid or radical using light, heat or both.
- radical generator that generates radicals by light or heat
- thermal polymerization initiators (H1) described in [0182] to [0186] of JP2013-214649A and photopolymerization initiation Agent (H2) photo radical generators described in JP-A-2011-186069, [0046] to [0051], photo-radical polymerization initiation described in JP-A 2010-285518, [0042] to [0056]
- An agent or the like can be suitably used, and the contents thereof are preferably incorporated in the present specification.
- “Number average molecular weight (Mn) is 140 to 5,000, described in JP2013-214649A [0167] to [0177], has a crosslinkable functional group, and does not have a fluorine atom. It is also preferred to use "compound (G)", the contents of which are preferably incorporated herein.
- a photoacid generator that generates an acid by light
- a photocationic polymerization initiator described in [0033] to [0034] of JP2010-285518A, JP2012-163946A
- the acid generators described in [0120] to [0136] of the publication, particularly sulfonium salts, iodonium salts, and the like can be preferably used, and the contents thereof are preferably incorporated herein.
- thermal acid generator that generates an acid by heat
- thermal cationic polymerization initiators described in JP-A 2010-285518, [0035] to [0038], particularly onium salts, and JP-A 2005
- the catalysts described in [0034] to [0035] of Japanese Patent No. 354012 can be preferably used, particularly sulfonic acids and sulfonic acid amine salts, and the contents thereof are preferably incorporated herein.
- crosslinking agents described in JP-A-2005-354012 [0032] to [0033] particularly bifunctional or higher epoxy compounds, oxetane compounds, JP-A 2006-303465, [0046] to [0062].
- Examples of a method for forming the gate insulating layer with an organic polymer include a method of coating and curing an organic polymer.
- the coating method is not particularly limited, and includes the above printing methods. Of these, a wet coating method such as a micro gravure coating method, a dip coating method, a screen coating printing, a die coating method or a spin coating method is preferable.
- the inorganic oxide is not particularly limited.
- silicon oxide in addition to silicon oxide (SiO X ), BPSG (Boron Phosphorus Silicon Glass), PSG (Phosphorus Silicon Glass), BSG (borosilicate glass), AsSG (arsenic silicate glass), PbSG (lead silicate) Glass), silicon oxynitride (SiON), SOG (spin-on-glass), low dielectric constant SiO 2 -based materials (for example, polyaryl ether, cycloperfluorocarbon polymer and benzocyclobutene, cyclic fluororesin, polytetrafluoroethylene, fluoride) Aryl ether, fluorinated polyimide, amorphous carbon, organic SOG).
- SiO 2 -based materials for example, polyaryl ether, cycloperfluorocarbon polymer and benzocyclobutene, cyclic fluororesin, polytetrafluoroethylene, fluoride
- a vacuum deposition method such as a vacuum deposition method, a sputtering method, an ion plating method, or a CVD (chemical vapor deposition) method can be used.
- assist may be performed by plasma, ion gun, radical gun or the like using any gas.
- precursors corresponding to the respective metal oxides specifically metal halides such as chlorides and bromides, metal alkoxides, metal hydroxides, and the like, such as acids such as hydrochloric acid, sulfuric acid and nitric acid in alcohol and water, You may form by making it react with bases, such as sodium hydroxide and potassium hydroxide, and hydrolyzing. When such a solution process is used, the above wet coating method can be used.
- the gate insulating layer can be provided by a method in which any one of the lift-off method, the sol-gel method, the electrodeposition method, and the shadow mask method is combined with the patterning method as necessary.
- the gate insulating layer may be subjected to surface treatment such as corona treatment, plasma treatment, UV (ultraviolet ray) / ozone treatment.
- Carrier mobility can be improved by adjusting the phase separation between the organic semiconductor polymer and the insulating polymer by surface treatment.
- As a method for adjusting the surface energy of the insulating film UV (ultraviolet light) / ozone treatment is effective, and the surface of the gate insulating film can be hydrophilized by appropriately selecting the treatment time.
- the surface free energy on the surface of the gate insulating layer (the surface on the side where the organic semiconductor layer is formed) is preferably 50 mN / m or more and 75 mN / m or less.
- the gate insulating film is preferably not rough.
- the arithmetic mean roughness of the surface of the gate insulating layer Ra or root mean square roughness R MS is 0.5nm or less. Even when the surface treatment is performed, a treatment that does not roughen the surface of the insulating film is preferable.
- the source electrode is an electrode into which charges flow from the outside through wiring.
- the drain electrode is an electrode that sends out charges to the outside through the wiring.
- the material for forming the source electrode and the drain electrode can be the same as the electrode material for forming the gate electrode described above. Among these, metals are preferable, and gold or silver is more preferable.
- a charge injection layer is provided between the metal and the organic semiconductor to promote charge injection from the source to the organic semiconductor and improve mobility.
- the thickness of a source electrode and a drain electrode is not specifically limited, 1 nm or more is preferable respectively and 10 nm or more is especially preferable.
- interval (gate length) between a source electrode and a drain electrode can be determined suitably, for example, 200 micrometers or less are preferable and 100 micrometers or less are especially preferable.
- the gate width can be determined as appropriate, but is preferably 5000 ⁇ m or less, and particularly preferably 1000 ⁇ m or less.
- a method for forming the source electrode and the drain electrode is not particularly limited. For example, a method for vacuum-depositing or sputtering an electrode material on a substrate on which a gate electrode and a gate insulating film are formed, and an electrode-forming composition are applied. Or the method of printing etc. are mentioned. In the case of patterning, the patterning method is the same as the gate electrode method described above.
- the organic semiconductor layer is formed by the method described above.
- the organic semiconductor layer contains the following (a) and (b), (A) an organic semiconductor polymer having a weight average molecular weight of 2000 or more, (B) an insulating polymer having a weight average molecular weight of 2000 or more;
- the weight average molecular weight Mw1 of the organic semiconductor polymer and the weight average molecular weight Mw2 of the insulating polymer satisfy the following relational expression: 0.1 ⁇ Mw1 / Mw2 ⁇ 10
- the organic semiconductor polymer content C3 mass% and the insulating polymer content C4 mass% in the organic semiconductor layer satisfy the following relational expression.
- the organic semiconductor polymer of (a), the insulating polymer of (b), and the preferred forms of Mw1 / Mw2 and C3 / C4 are the organic semiconductor polymer, insulating polymer, and Mw1 described in the composition of the present invention, respectively.
- / Mw2 and C1 / C2 are the same as the preferred forms.
- the content of the organic semiconductor polymer (a) in the upper half of the organic semiconductor layer is UC1 mass%
- the content of the insulating polymer (b) in the upper half of the organic semiconductor layer is UC2 mass%.
- the content of the (a) organic semiconductor polymer in the lower half of the organic semiconductor layer is LC1% by mass
- the content of the (b) insulating polymer in the upper half of the organic semiconductor layer is LC2% by mass UC1, UC2, LC1 and LC2 preferably satisfy (UC1 / UC2)> (LC1 / LC2).
- the organic semiconductor polymer and the insulating polymer are compatible with each other in the thickness direction of the organic semiconductor layer.
- the arrangement regularity of the organic semiconductor polymer is effectively improved by taking the form unevenly distributed unevenly.
- the upper half of the organic semiconductor layer means the entire portion located on the side far from the substrate when the organic semiconductor layer is equally divided into two layers at the center of the layer thickness.
- the “lower half of the layer” means the entire portion located on the substrate side when the organic semiconductor layer is equally divided into two layers at the center of the layer thickness. Further, “the upper half of the organic semiconductor layer” and “the lower half of the organic semiconductor layer” mean that both include a boundary that divides the upper and lower halves of the organic semiconductor layer.
- the UC1, UC2, LC1, and LC2 can be measured by time-of-flight secondary ion analysis (TOF-SIMS). That is, the concentration ratio between the organic semiconductor polymer and the insulating polymer in the organic semiconductor layer can be measured by element mapping by TOF-SIMS using an ion beam for etching together. In the analysis by TOF-SIMS, an area of 100 ⁇ m ⁇ 100 ⁇ m is measured along the thickness direction.
- the organic TFT of the present invention preferably includes a sealing layer as the outermost layer from the viewpoint of durability.
- a sealing agent composition for forming a sealing layer
- the thickness of the sealing layer is not particularly limited, but is preferably 0.1 to 10 ⁇ m.
- FIG. 2 is a schematic cross-sectional view showing a bottom gate-top contact type organic TFT 200 which is an example of the semiconductor element of the present invention.
- the organic TFT 200 includes a substrate 10, a gate electrode 20, a gate insulating layer (film) 30, an organic semiconductor layer (film) 50, a source electrode 40 and a drain electrode 42, sealing Layer 60 in this order.
- the organic TFT 200 is the same as the organic TFT 100 except that the layer configuration (lamination mode) is different. Accordingly, the substrate, gate electrode, gate insulating layer, source electrode, drain electrode, organic semiconductor layer, and sealing layer are the same as those in the above-described bottom gate-bottom contact type organic TFT, and thus description thereof is omitted. To do.
- the organic semiconductor polymers O-1 to O-9 used in this example are polymers composed of the structural units shown below.
- the reaction solution was cooled to room temperature, poured into a mixed solution of methanol (240 mL) / concentrated hydrochloric acid (10 mL), and stirred at room temperature for 2 hours.
- the precipitate was filtered and washed with methanol, and then extracted with Soxhlet in order with methanol, acetone and ethyl acetate to remove soluble impurities.
- Soxhlet extraction was performed with chloroform, and the resulting solution was concentrated under reduced pressure. Thereafter, methanol was added and the precipitated solid was filtered and washed with methanol. This was vacuum dried at 80 ° C. for 12 hours to obtain 201 mg of organic semiconductor polymer O-1 (yield 82%).
- the obtained organic semiconductor polymer O-1 had a number average molecular weight of 2.4 ⁇ 10 4 and a weight average molecular weight of 7.5 ⁇ 10 4 .
- organic semiconductor polymers O-1 having different molecular weights were obtained by controlling the monomer concentration, reaction temperature, and the like.
- Synthesis of Organic Semiconductor Polymers O-2 to O-9> The monomer used in Synthesis Example 1 was changed, and organic semiconductor polymers O-2 to O-9 were synthesized according to Synthesis Example 1.
- the insulating polymers In-1 to In-12 used in this example are polymers composed of the following structural units.
- the following In-9 is a random copolymer
- the following In-10 is a block copolymer composed of two types of blocks. In both In-9 and 10, the molar ratio of the two repeating units is 1: 1.
- the volume resistance values of the In-1 to In-12 insulating polymers were all 10 6 ⁇ cm or more.
- the glass transition temperatures of In-1 to In-12 were all 180 ° C. or lower.
- the above-mentioned P1 / P2 was 1 or more and 2 or less.
- P1 / P2 was 1 or more and 2 or less.
- Example 1 Comparative Example c1 Production of Organic Thin Film Transistor
- a bottom gate-top contact type organic thin film transistor 300 shown in FIG. 3 was manufactured.
- a 25 mm ⁇ 25 mm substrate in which a thermal oxide film of SiO 2 of 350 nm was formed on the surface of a conductive n-type silicon substrate (0.7 mm thick) was used as the substrate 212.
- the surface of the thermal oxide film of the substrate 212 was cleaned with UV (ultraviolet light) / ozone and then treated with ⁇ -phenethyltrimethoxysilane.
- the surface free energy of the substrate after the treatment was 36 mN / m.
- the organic semiconductor composition prepared above is spin-coated (2000 rpm for 90 seconds) on the surface of the substrate 212 treated with ⁇ -phenethyltrimethoxysilane, and then dried on a hot plate at 200 ° C. for 1 hour. A layer (film thickness of about 20 nm) was formed.
- Organic thin film transistors 1-1 to 1-24 of the present invention (Examples 1-1 to 1-24) and organic thin film transistors c1-1 to c1-5 for comparison (Comparative Examples c1-1 to c1-5) are respectively shown.
- the organic thin film transistors 1-1 to 1-24 are respectively those using the organic semiconductor compositions 1-1 to 1-24, and the organic thin film transistors c1-1 to c1-5 are respectively the organic semiconductor compositions. c1-1 to c1-5 are used.
- the carrier mobility ⁇ was evaluated according to the following evaluation criteria.
- the carrier mobility ⁇ is preferably as high as possible. In this test, it is preferably “D” or more, more preferably “C” or more, more preferably “B” or more, and “A”. More preferably.
- I d (w / 2L) ⁇ C i (V g ⁇ V th ) 2
- L is the gate length
- w is the gate width
- ⁇ is the carrier mobility
- C i is the capacitance per unit area of the gate insulating layer
- V g is the gate voltage
- V th is the threshold voltage.
- Carrier mobility ⁇ is “A”: More than 3 times the organic thin film transistor c1-1. “B”: More than 1.5 times and 3 times or less of the organic thin film transistor c1-1. “C”: More than 1.2 times and 1.5 times or less of the organic thin film transistor c1-1. “D”: More than 1.0 times and 1.2 times or less of the organic thin film transistor c1-1. “E”: Same as the organic thin film transistor c1-1. “F”: lower than the organic thin film transistor c1-1. The results are shown in Table 1 below.
- “difference in absolute value of SP value” means the SP value of the structural unit represented by formula (1) and the SP value of the structural unit represented by formula (I-1) (In-11 and In -12 is the difference from the SP value of the structural unit shown in each formula), and is an index of the compatibility between the organic semiconductor polymer and the insulating polymer.
- “ ⁇ 1” means the surface free energy of the organic semiconductor polymer
- “ ⁇ 2” means the surface free energy of the insulating polymer.
- those satisfying ⁇ 1 ⁇ 2 are indicated as “Y”, and those not satisfying as “N”.
- UC1 means the content of the organic semiconductor polymer in the upper half of the organic semiconductor layer
- UC2 means the content of the insulating polymer in the upper half of the organic semiconductor layer
- LC1 means the content of the organic semiconductor polymer in the lower half of the organic semiconductor layer
- LC2 means the content of the insulating polymer in the lower half of the organic semiconductor layer.
- Example 2 comparative example c2
- Example 1 and Comparative Example c1 In Example 1 and Comparative Example c1, except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-2, the same as Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 2-1 to 2-24 (Examples 2-1 to 2-24) and comparative organic thin film transistors c2-1 to c2-5 (Comparative Examples c1-1 to c1-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c2-1 was evaluated as “E”). The results are shown in Table 2 below.
- Example 3 comparative example c3
- Example 1 and Comparative Example c1 In Example 1 and Comparative Example c1, except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-3, the same as in Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 3-1 to 3-24 (Examples 3-1 to 3-24) and comparative organic thin film transistors c3-1 to c3-5 (Comparative Examples c3-1 to c3-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c3-1 was evaluated as “E”). The results are shown in Table 3 below.
- Example 4 comparative example c4
- Example 1 and Comparative Example c1 In Example 1 and Comparative Example c1, except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-4, the same as Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 4-1 to 4-24 (Examples 4-1 to 4-24) and comparative organic thin film transistors c4-1 to c4-5 (Comparative Examples c4-1 to c4-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c4-1 was evaluated as “E”). The results are shown in Table 4 below.
- Example 5 comparative example c5
- Example 1 and Comparative Example c1 Except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-5, the same as in Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 5-1 to 5-24 (Examples 5-1 to 5-24) and comparative organic thin film transistors c5-1 to c5-5 (Comparative Examples c5-1 to c5-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c5-1 was evaluated as “E”). The results are shown in Table 5 below.
- Example 6 comparative example c6
- Example 1 and Comparative Example c1 In Example 1 and Comparative Example c1, except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-6, the same as in Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 6-1 to 6-24 (Examples 6-1 to 6-24) and comparative organic thin film transistors c6-1 to c6-5 (Comparative Examples c6-1 to c6) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c6-1 was evaluated as “E”). The results are shown in Table 6 below.
- Example 7 comparative example c7
- Example 1 and Comparative Example c1 Except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-7, the same as in Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 7-1 to 7-24 (Examples 7-1 to 7-24) and comparative organic thin film transistors c7-1 to c7-5 (Comparative Examples c7-1 to c7-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c7-1 was evaluated as “E”). The results are shown in Table 7 below.
- Example 8 comparative example c8
- Example 1 and Comparative Example c1 except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-8, the same as in Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 8-1 to 8-24 (Examples 8-1 to 8-24) and comparative organic thin film transistors c8-1 to c8-5 (Comparative Examples c8-1 to c8-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c8-1 was evaluated as “E”). The results are shown in Table 8 below.
- Example 9 comparative example c9
- Example 1 and Comparative Example c1 Except that the organic semiconductor polymer O-1 contained in the organic semiconductor composition used was replaced with the organic semiconductor polymer O-9, the same as Example 1 and Comparative Example c1, Bottom gate-top contact type organic thin film transistors 9-1 to 9-24 (Examples 9-1 to 9-24) and comparative organic thin film transistors c9-1 to c9-5 (Comparative Examples c9-1 to c9-) 5) were produced respectively.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c9-1 was evaluated as “E”). The results are shown in Table 9 below.
- Example 10 comparative example c10
- the solvent: chlorobenzene used in the organic semiconductor composition was replaced with tetralin (SP value: 19.6 MPa 1/2 ), and the formation of the organic semiconductor layer was spin-coated.
- the bottom gate-top contact type organic thin film transistor 10-1 (Example 10-1) and the same as in Example 1-1 and Comparative Example c1-1, except that flexographic printing was used instead of An organic thin film transistor c10-1 for comparison (Comparative Example c10-1) was produced.
- a flexo aptitude tester F1 (trade name, manufactured by IG Testing Systems) was used for the flexographic printing, and AFD DSH 1.70% (trade name, manufactured by Asahi Kasei) / solid image was used as the flexographic resin plate.
- Printing was performed at a pressure of 60 N between the flexographic resin plate and the substrate on which the organic semiconductor layer was formed, and at a conveyance speed of 0.4 m / second. Drying after flexographic printing was performed at 200 ° C. for 1 hour.
- the carrier mobility was evaluated in the same manner as in Test Example 1 (the carrier mobility of the organic thin film transistor c10-1 was evaluated as “E”).
- the carrier mobility of the organic thin film transistor of Example 10-1 was evaluated as B as in the case of Example 1-1.
- Example 11 Comparative Example c11 Production of Organic Thin Film Transistor
- a bottom gate-bottom contact type organic thin film transistor 400 shown in FIG. Manufactured A 25 mm ⁇ 25 mm substrate in which a thermal oxide film of SiO 2 of 350 nm was formed on the surface of a conductive n-type silicon substrate (0.7 mm thick) was used as the substrate 212.
- the surface of the thermal oxide film of the substrate 212 was cleaned with UV (ultraviolet light) / ozone and then treated with ⁇ -phenethyltrimethoxysilane.
- a source electrode and a drain electrode were formed by depositing a gold electrode with a thickness of 30 nm on the surface of the substrate 212 treated with ⁇ -phenethyltrimethoxysilane.
- Each organic semiconductor composition prepared above is spin-coated (2000 rpm for 90 seconds) and then dried on a hot plate at 200 ° C. for 1 hour to form an organic semiconductor layer (film thickness of about 20 nm).
- Organic thin film transistors 11-1 to 11-24 (Examples 11-1 to 11-24) and comparative organic thin film transistors c11-1 to c11-5 (Comparative Examples c11-1 to c11-5) were manufactured, respectively. .
- Example 12 Comparative Example c12 Production of Organic Thin Film Transistor
- Al serving as a gate electrode was deposited on a glass substrate (Eagle XG: Corning) (thickness: 50 nm).
- a gate insulating film having a thickness of 400 nm was formed by coating and baking at 150 ° C. for 60 minutes.
- the surface energy of the insulating film was 45 mN / m.
- a silver ink (silver nanocolloid H-1 (trade name), manufactured by Mitsubishi Materials Corp.) is applied thereon, and an ink jet apparatus: DMP-2831 (trade name, manufactured by FUJIFILM Dimatics) is used as a source electrode.
- a drain electrode (thickness: about 100 nm, gate length: 60 ⁇ m, gate width: 200 ⁇ m).
- the substrate was baked at 180 ° C. for 30 minutes and sintered to form a source electrode and a drain electrode.
- a device precursor was obtained.
- the device precursor was subjected to UV (ultraviolet) / ozone treatment (manufactured by Jelight, UVO-CLEANER Model No. 42 (trade name)), and the surface energy of the insulating film was adjusted as shown in the table below.
- UV ultraviolet
- ozone treatment manufactured by Jelight, UVO-CLEANER Model No. 42 (trade name)
- the surface energy of the insulating film was adjusted as shown in the table below.
- an organic semiconductor layer is formed using the organic semiconductor compositions 1-1 to 1-24 and the comparative organic semiconductor compositions c1-1 to c1-5, and the bottom shown in FIG.
- a gate-bottom contact type organic thin film transistor 100 was manufactured.
- Example 13 Comparative Example c13 Production of Organic Thin Film Transistor
- Al serving as a gate electrode was deposited on a glass substrate (Eagle XG: Corning) (thickness: 50 nm).
- a gate insulating film having a thickness of 400 nm.
- the surface energy of the insulating film was 42 mN / m.
- a silver ink (silver nanocolloid H-1 (trade name), manufactured by Mitsubishi Materials Corp.) is applied thereon, and an ink jet apparatus: DMP-2831 (trade name, manufactured by FUJIFILM Dimatics) is used as a source electrode.
- a drain electrode thickness: about 100 nm, gate length: 60 ⁇ m, gate width: 200 ⁇ m).
- the substrate was baked at 180 ° C. for 30 minutes and sintered to form a source electrode and a drain electrode.
- a device precursor was obtained.
- the element precursor was subjected to UV (ultraviolet) / ozone treatment (manufactured by Jelight, UVO-CLEANER Model No. 42) to adjust the surface energy of the insulating film.
- an organic semiconductor layer is formed using the organic semiconductor compositions 1-1 to 1-24 and the comparative organic semiconductor compositions c1-1 to c1-5, and the bottom shown in FIG.
- a gate-bottom contact type organic thin film transistor 100 was manufactured.
- Preparation Example 2 Preparation of Ink Composition A and Ink Composition B
- the organic semiconductor polymer O-1 synthesized above was dissolved in chlorobenzene so as to have a concentration of 5 mg / mL to obtain an ink composition A-1.
- the insulating polymer I-1 synthesized above was dissolved in toluene so as to have a concentration of 5 mg / mL to obtain an ink composition B-1.
- the solubility (25 ° C.) of the insulating polymer I-1 in the ink composition A-1 is 1 mg / mL or more.
- Example 14 Comparative Example c14 Production of Organic Thin Film Transistor
- the method for forming the organic semiconductor layer was changed as follows, the bottom gate-top contact type organic thin film transistors 14-1 to 14-24 (Examples 14-1 to 14-24) were the same as in Example 1.
- Organic thin film transistors c14-1 to c14-5 (Comparative Examples c14-1 to c14-5) for comparison were manufactured.
- Example 15 comparative example c15
- Example 14-1 and Comparative Example c14-1 the same procedure as in Example 14-1 and Comparative Example c14-1 was performed except that the solvent used in the ink composition B-1: toluene was replaced with dichlorobenzene.
- a bottom gate-top contact type organic thin film transistor 15-1 (Example 15-1) and a comparative organic thin film transistor c15-1 (Comparative Example c15-1) were manufactured.
- Substrate 20 Gate electrode 30 Gate insulating layer (film) 40 Source electrode 42 Drain electrode 50 Organic semiconductor layer (film) 60 Sealing layer 100, 200 Organic thin film transistor 21 Silicon substrate (gate electrode) 31 Thermal oxide film (gate insulation layer) 41a Source electrode 41b Drain electrode 51 Organic semiconductor layer 61 Sealing layer 300, 400 Organic thin film transistor
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Abstract
Description
本発明は、有機薄膜トランジスタの有機半導体層(半導体活性層)の形成に用いることにより、得られる有機薄膜トランジスタのキャリア移動度を所望のレベルに高めることができる有機半導体組成物を提供することを課題とする。また本発明は、キャリア移動度に優れた有機薄膜トランジスタ及びその製造方法を提供することを課題とする。
〔1〕
下記(a)~(c)を含有する有機半導体組成物であって:
(a)重量平均分子量2000以上の有機半導体ポリマー、
(b)重量平均分子量2000以上の絶縁性ポリマー、
(c)溶媒;
上記有機半導体ポリマーの重量平均分子量Mw1と上記絶縁性ポリマーの重量平均分子量Mw2が下記関係式を満たし、
0.1≦Mw1/Mw2≦10
上記有機半導体組成物中における上記有機半導体ポリマーの含有量C1質量%と上記絶縁性ポリマーの含有量C2質量%が下記関係式を満たし、
0.1≦C1/C2≦10
上記有機半導体ポリマーが下記式(1)で表される構造単位を有する、有機半導体組成物。
Aは、下記式(A-1)~(A-12)のいずれかで表される構造を有する基を示す。
XAは酸素原子、硫黄原子、セレン原子又はNRXを示す。RN及びRXは炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は下記式(1-1)で表される基を示す。
YAは酸素原子又は硫黄原子を示す。
ZAはCRA2又は窒素原子を示す。
WAはC(RA2)2、NRA1、窒素原子、CRA2、酸素原子、硫黄原子又はセレン原子を示す。RA1は炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基、下記式(1-1)で表される基又は単結合を示す。RA2は水素原子、ハロゲン原子、炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は単結合を示す。RA3は水素原子又は置換基を示す。
*は上記式(1)のA中に組み込まれるための結合部位を示す。
Laは炭素鎖中に-O-、-S-及び-NR1S-のうち少なくとも1つを含んでいてもよい炭素数1~20のアルキレン基を示す。
Arは芳香族複素環基又は炭素数6~18の芳香族炭化水素基を示す。
Lbは炭素鎖中に-O-、-S-及び-NR2S-のうち少なくとも1つを含んでいてもよい炭素数1~100のアルキル基を示す。
R1S及びR2Sは水素原子又は置換基を示す。
lは1~5の整数である。
*は結合部位を示す。
〔2〕
上記式(1)中のDが下記式(D-1)で表される基である、〔1〕に記載の有機半導体組成物。
Xdは酸素原子、硫黄原子、セレン原子又はNRD1を示す。RD1は有機基を示す。
Zdは窒素原子又はCRD2を示す。RD2は水素原子又は有機基を示す。
Mは単結合であるか、又は、芳香族複素環基、芳香族炭化水素基、アルケニレン基、アルキニレン基もしくはこれらの基を2つ以上組み合わせてなる2価の基を示す。
p及びqは0~4の整数を示す。
*は式(1)で表される構造単位中に組み込まれるための結合部位を示す。
〔3〕
上記式(1)で表される構造単位が、下記式(2)~(5)のいずれかで表される構造単位である、〔1〕又は〔2〕に記載の有機半導体組成物。
RN、XA、YA及びZAは、それぞれ、上記式(A-1)~(A-12)において説明したRN、XA、YA及びZAと同義である。
Xd、Zd、M、p及びqは、それぞれ、上記式(D-1)において説明したXd、Zd、M、p及びqと同義である。
〔4〕
上記絶縁性ポリマーが下記式(I-1)で表される構造単位を有する、〔1〕~〔3〕のいずれか1項に記載の有機半導体組成物。
R1~R3は水素原子又は置換基を示す。
X1はCRA4又は窒素原子を示す。
RA4は水素原子又は置換基を示す。
〔5〕
上記絶縁性ポリマー中に含まれる上記式(I-1)で表される構造単位の一部又は全部が下記式(I-2)で表される構造単位である、〔4〕に記載の有機半導体組成物。
R11~R13は水素原子又はアルキル基を示す。
R21~R25は水素原子、ヒドロキシ基、アルキル基、アルケニル基、アルキニル基、シクロアルキル基、アリール基、アラルキル基又はフッ素原子を示す。
〔6〕
上記式(1)で表される構造単位の溶解度パラメータと上記式(I-1)で表される構造単位の溶解度パラメータの差の絶対値が5.0MPa1/2以下である、〔4〕又は〔5〕に記載の有機半導体組成物。
〔7〕
上記有機半導体組成物中の溶媒の溶解度パラメータが15.0~30.0MPa1/2である、〔1〕~〔6〕のいずれか1項に記載の有機半導体組成物。
〔8〕
上記有機半導体組成物の粘度をp1とし、当該有機半導体組成物から上記絶縁性ポリマーを除いた組成の組成物の粘度をp2とした場合、p1/p2<5を満たす、〔1〕~〔7〕のいずれか1項に記載の有機半導体組成物。
〔9〕
〔1〕~〔8〕のいずれか1項に記載の有機半導体組成物を用いて有機半導体層を形成することを含む、有機薄膜トランジスタの製造方法。
〔10〕
上記有機半導体層を、表面エネルギーが50mN/m以上75mN/m以下のゲート絶縁層上に形成する、〔9〕に記載の有機薄膜トランジスタの製造方法。
〔11〕
〔1〕~〔8〕のいずれか1項に記載の有機半導体組成物を用いて形成した膜を、該組成物中の上記絶縁性ポリマーのガラス転移温度よりも高い温度に曝して上記有機半導体層を形成することを含む、〔9〕又は〔10〕に記載の有機薄膜トランジスタの製造方法。
〔12〕
ボトムゲート型有機薄膜トランジスタであって:
該有機薄膜トランジスタの有機半導体層が下記(a)及び(b)を含有し、
(a)重量平均分子量2000以上の有機半導体ポリマー、
(b)重量平均分子量2000以上の絶縁性ポリマー;
上記有機半導体ポリマーの重量平均分子量Mw1と上記絶縁性ポリマーの重量平均分子量Mw2が下記関係式を満たし、
0.1≦Mw1/Mw2≦10
上記有機半導体層中における上記有機半導体ポリマーの含有量C3質量%と上記絶縁性ポリマーの含有量C4質量%が下記関係式を満たし、
0.1≦C3/C4≦10
上記有機半導体ポリマーが下記式(1)で表される構造単位を有する、ボトムゲート型有機薄膜トランジスタ。
Aは、下記式(A-1)~(A-12)のいずれかで表される構造を有する基を示す。
XAは酸素原子、硫黄原子、セレン原子又はNRXを示す。RN及びRXは炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は下記式(1-1)で表される基を示す。
YAは酸素原子又は硫黄原子を示す。
ZAはCRA2又は窒素原子を示す。
WAはC(RA2)2、NRA1、窒素原子、CRA2、酸素原子、硫黄原子又はセレン原子を示す。RA1は炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基、下記式(1-1)で表される基又は単結合を示す。RA2は水素原子、ハロゲン原子、炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は単結合を示す。RA3は水素原子又は置換基を示す。
*は、上記式(1)のA中に組み込まれるための結合部位を示す。
Laは炭素鎖中に-O-、-S-及び-NR1S-のうち少なくとも1つを含んでいてもよい炭素数1~20のアルキレン基を示す。
Arは、芳香族複素環基又は炭素数6~18の芳香族炭化水素基を示す。
Lbは炭素鎖中に-O-、-S-及び-NR2S-のうち少なくとも1つを含んでいてもよい炭素数1~100のアルキル基を示す。
lは1~5の整数である。
*は結合部位を示す。
〔13〕
上記式(1)中のDが下記式(D-1)で表される基である、〔12〕に記載のボトムゲート型有機薄膜トランジスタ。
Xdは酸素原子、硫黄原子、セレン原子又はNRD1を示す。RD1は有機基を示す。
Zdは窒素原子又はCRD2を示す。RD2は水素原子又は有機基を示す。
Mは単結合であるか、又は、芳香族複素環基、芳香族炭化水素基、アルケニレン基、アルキニレン基もしくはこれらの基を2つ以上組み合わせてなる2価の基を示す。
p及びqは0~4の整数を示す。
*は式(1)で表される構造単位中に組み込まれるための結合部位を示す。
〔14〕
上記式(1)で表される構造単位が、下記式(2)~(5)のいずれかで表される構造単位である、〔12〕又は〔13〕に記載のボトムゲート型有機薄膜トランジスタ。
RN、XA、YA及びZAは、それぞれ、上記式(A-1)~(A-12)において説明したRN、XA、YA及びZAと同義である。
Xd、Zd、M、p及びqは、それぞれ、上記式(D-1)において説明したXd、Zd、M、p及びqと同義である。
〔15〕
上記絶縁性ポリマーが下記式(I-1)で表される構造単位を有する、〔12〕~〔14〕のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
R1~R3は水素原子又は置換基を示す。
X1はCRA4又は窒素原子を示す。
RA4は水素原子又は置換基を示す。
〔16〕
上記絶縁性ポリマー中に含まれる上記式(I-1)で表される構造単位の一部又は全部が下記式(I-2)で表される構造単位である、〔15〕に記載のボトムゲート型有機薄膜トランジスタ。
R11~R13は水素原子又はアルキル基を示す。
R21~R25は水素原子、ヒドロキシ基、アルキル基、アルケニル基、アルキニル基、シクロアルキル基、アリール基、アラルキル基又はフッ素原子を示す。
〔17〕
上記式(1)で表される構造単位の溶解度パラメータと上記一般式(I-1)で表される構造単位の溶解度パラメータの差の絶対値が、5.0MPa1/2以下である、〔15〕又は〔16〕に記載のボトムゲート型有機薄膜トランジスタ。
〔18〕
上記有機半導体ポリマーの表面自由エネルギーをγ1とし、上記絶縁性ポリマーの表面自由エネルギーをγ2とした場合、γ1≦γ2を満たす、〔12〕~〔17〕のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
〔19〕
上記有機半導体層の上側半分における上記有機半導体ポリマーの含有量をUC1質量%、上記絶縁性ポリマーの含有量をUC2質量%とし、
上記有機半導体層の下側半分における上記有機半導体ポリマーの含有量をLC1質量%、上記絶縁性ポリマーの含有量をLC2質量%とした場合、UC1、UC2、LC1及びLC2が、(UC1/UC2)>(LC1/LC2)を満たす、〔12〕~〔18〕のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
〔20〕
上記ボトムゲート型有機薄膜トランジスタのゲート絶縁層の表面エネルギーが50mN/m以上75mN/m以下である、〔12〕~〔19〕のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
本発明の上記及び他の特徴及び利点は、適宜添付の図面を参照して、下記の記載からより明らかになるであろう。
また、置換又は無置換を明記していない化合物については、目的とする効果を損なわない範囲で、任意の置換基を有するものを含む。このことは、置換基及び連結基等(以下、置換基等という)についても同様である。
本明細書において、ポリマー中に同一の表示で表された複数の構造単位が存在する場合は、ポリマー中に存在する各構造単位は同一でも異なっていてもよい。
また、基の炭素原子数(炭素数ともいう。)が限定されている場合、この基の炭素原子数は、特段の断りがない限り、置換基を含めた全炭素原子数を意味する。
本発明において、基が非環状骨格及び環状骨格を形成しうる場合、特段の断りがない限り、この基は、非環状骨格の基と環状骨格の基を含む。例えば、アルキル基は、直鎖アルキル基、分岐アルキル基及び環状(シクロ)アルキル基を含む。基が環状骨格を形成しうる場合、環状骨格を形成する基の原子数の下限は、この基について具体的に記載した原子数の下限にかかわらず、3以上であり、5以上が好ましい。
本発明の有機半導体組成物(以下、単に「本発明の組成物」という。)は、下記(a)~(c)を含有する。本発明の組成物は下記(a)~(c)に加え、各種添加剤等を含有してもよい。
(b)重量平均分子量2000以上の絶縁性ポリマー
(c)溶媒
上記(a)の有機半導体ポリマーと(b)の絶縁性ポリマーは、これらの分子量及び組成物中の含有量が後述する特定の関係にある。
上記成分(a)~(c)について順に説明する。
成分(a)の有機半導体ポリマーは、下記式(1)で表される構造単位を有する。
以下、単環構造の芳香族複素環を「単環式芳香族複素環」とも称す。また、縮合多環構造の芳香族複素環を「縮合多環芳香族複素環」とも称す。
置換基DS1として採り得るアルキル基は、直鎖でも分岐を有してもよく、環状であってもよい。このアルキル基の炭素数は1~30が好ましく、1~20がより好ましい。このアルキル基は、アルキル基の炭素鎖中に-O-、-S-及び-NRD3-から選ばれる基が組み込まれていてもよく、アルキル基の結合部位側の末端に-O-、-S-及び-NRD3-が組み込まれていてもよい。RD3は後述するR1Sと同義であり、好ましい形態も同じである。
置換基DS1として採り得るアルケニル基又はアルキニル基は、直鎖でも分岐を有してもよい。このアルケニル基の炭素数は2~30が好ましく、2~20がより好ましい。
置換基DS1として採り得る芳香族炭化水素基の炭素数は6~30が好ましい。
置換基DS1として採り得る芳香族複素環基は単環式芳香族複素環基であることが好ましく、5~7員環の単環式芳香族複素環基であることがより好ましい。この芳香族複素環基は環構成ヘテロ原子としてO、N、S及びSeから選ばれるヘテロ原子を有することが好ましい。
置換基DS1として採り得るハロゲン原子はF、Cl、Br又はIであり、FまたはClがより好ましく、Fが特に好ましい。
置換基DS1として採り得る式(1-1)で表される基は下記構造の基である。
本発明において、アルキレン基が炭素鎖中に-O-を含むとは、アルキレン基の炭素-炭素結合の途中に-O-が導入されている態様、アルキレン基の一端又は両端に-O-が導入されている態様、並びに、アルキレン基の炭素-炭素結合の途中及びアルキレン基の一端又は両端に-O-が導入されている態様を意味する。アルキレン基に-S-又は-NR1S-を含む場合も同様の意味である。また、アルキレン基が-O-、-S-及び-NR1S-を含む場合、これらの数の合計は少なくとも1つであり、その上限は、特に限定されないが、例えば、5個である。
Laとして採りうるアルキレン基は、直鎖、分岐鎖及び環状のいずれであってもよいが、直鎖又は分岐鎖のアルキレン基であることが好ましい。このアルキレン基の炭素数は、キャリア移動度の観点から、1~15であることが好ましく、1~10であることが更に好ましい。
Laとして採りうるアルキレン基が分岐鎖である場合には、分岐部分の炭素数については、Laを示すアルキレン基の炭素数に含むものとする。ただし、Laが-NR1S-を含み、かつ、このR1Sが炭素原子を含む場合には、R1Sの炭素数は、Laとして採りうるアルキレン基の炭素数に含めないものとする。
Arとして採りうる芳香族複素環基は、単環の基であっても、2環以上の縮環の基であってもよく、キャリア移動度の観点から単環であることが好ましい。単環の基である場合、その環員数は5~7員が好ましい。また、芳香族複素環基に含まれる環構成ヘテロ原子としては、窒素原子、酸素原子、硫黄原子又はセレン原子であることが好ましく、硫黄原子であることがより好ましい。
Arとして採りうる炭素数6~18の芳香族炭化水素基としては、特に限定されないが、例えば、ベンゼン環基、ナフタレン環基、又は、3環以上の環が縮合した芳香族炭化水素(例えばフルオレン環)から2以上の水素原子を取り除いた基が挙げられる。これらの中でも、キャリア移動度がより優れたものになるという観点から、ベンゼン環基、又は、ナフタレン環基であることが好ましく、ベンゼン環基であることが好ましい。
本発明において、アルキル基が炭素鎖中に-O-を含むとは、アルキル基の炭素-炭素結合の途中に-O-が導入されている態様、アルキル基の結合部位側の末端に-O-が導入されている態様、並びに、アルキル基の炭素-炭素結合の途中及びアルキル基の結合部位側の末端に-O-が導入されている態様を意味する。アルキル基に-S-又は-NR2S-を含む場合も同様の意味である。また、アルキル基が-O-、-S-及び-NR2S-を含む場合、これらの数は少なくとも1つであり、その上限は、特に限定されないが、例えば、5個である。
Lbとして採りうるアルキル基は、直鎖、分岐鎖及び環状のいずれであってもよいが、キャリア移動度の観点から、直鎖又は分岐鎖のアルキル基であることが好ましく、分岐鎖のアルキル基がより好ましい。また、このアルキル基は、置換基としてハロゲン原子(好ましくは、フッ素原子、塩素原子、臭素原子又はヨウ素原子、より好ましくはフッ素原子)を有するハロゲン化アルキル基であってもよい。
Lbとして採りうるアルキル基の炭素数は、1~100であり、9~100であることが好ましい。
また、式(1-1)で表される基がLbを複数個有する場合、キャリア移動度の観点から少なくとも1つのLbが、炭素数9~100の上記アルキル基であることが好ましく、20~100の上記アルキル基であることがより好ましく、20~40の上記アルキル基であることが更に好ましい。
Lbとして採りうるアルキル基が分岐鎖である場合には、分岐部分の炭素数については、Lbとして採りうるアルキル基の炭素数に含むものとする。ただし、Lbが-NR2S-を含み、かつ、このR2Sが炭素原子を含む場合には、R2Sの炭素数は、Lbとして採りうるアルキル基の炭素数に含めないものとする。
式(1-1)において、*は結合部位を示す。
Dが縮合多環芳香族炭化水素環を有する基である場合、D中の縮合多環芳香族炭化水素環の数は1~6が好ましく、1~4がより好ましく、1又は2がさらに好ましく、1が特に好ましい。
Dは、さらに好ましくは上記縮合多環芳香族炭化水素環からなる基(すなわち縮合多環芳香族炭化水素基)である。
上記芳香族炭化水素基はさらに置換基を有した形態でもよく、かかる置換基(以下、「置換基DS2」という。)として例えば、アルキル基、ハロゲン原子、及び上記式(1-1)で表される基が挙げられる。置換基DS2として採り得るアルキル基、ハロゲン原子、及び上記式(1-1)で表される基の好ましい形態は、それぞれ、上記置換基DS1として採り得るアルキル基、ハロゲン原子、及び上記式(1-1)で表される基の好ましい態様と同じである。
RD1は有機基を示す。この有機基は上記式(1-1)で表される基であることも好ましい。RD1はより好ましくはアルキル基(このアルキル基は炭素鎖中に-O-、-S-、及び-NRD3-(RD3は上記R1Sと同義であり、好ましい形態も同じである)のうち少なくとも1つを含んでいてもよい。このアルキル基の炭素数は1~30が好ましく、1~20がより好ましい。)、アルキニル基(炭素数1~30が好ましい。)、アルケニル基(炭素数2~30が好ましい。)、芳香族炭化水素基(炭素数6~30が好ましい。)、芳香族複素環基(5~7員環が好ましい。環構成ヘテロ原子としては、O、N、S又はSeが好ましい。)、ハロゲン原子(F、Cl、Br又はIであり、F又はClがより好ましく、Fが特に好ましい。)、又は、上記式(1-1)で表される基であり、アルキル基、ハロゲン原子、または上記式(1-1)で表される基であることがより好ましい。
なお、上記式(D-1)において、括弧内の構造単位及び上記Mは、結合軸において回転可能に結合している。
Mとして採り得る芳香族炭化水素基としては、炭素数6~20の芳香族炭化水素基が好ましい。かかる芳香族炭化水素基を構成する芳香族炭化水素環としては、ベンゼン環、ビフェニレン環、フルオレン環、ナフタレン環、その他の3環若しくは4環が縮合した芳香族炭化水素環がより好ましく、フルオレン環、ナフタレン環、アントラセン環、フェナントレン環、クリセン環、若しくはピレン環が更に好ましい。
Mとして採り得る芳香族複素環基又は芳香族炭化水素基は、置換基を有した形態でもよく、かかる置換基としては、アルキル基(このアルキル基は炭素鎖中に-O-、-S-及び-NRD3-(RD3は上記R1Sと同義であり、好ましい形態も同じである)のうち少なくとも1つを含んでいてもよい。)、ハロゲン原子(F、Cl、Br又はIであり、FまたはClがさらに好ましく、Fが特に好ましい。)、上記式(1-1)で表される基が挙げられる。
Mとして採り得るアルケニレン基としては、炭素数2~10のアルケニレン基が好ましく、炭素数2~4のアルケニレン基がより好ましく、エテニレン基がさらに好ましい。
Mとして採り得るアルキニレン基としては、炭素数2~10のアルキニレン基が好ましく、炭素数2~4のアルキニレン基がより好ましく、エチニレン基がさらに好ましい。
ただし、p+qが0の場合には、Mは、環構成原子としてN、O、S及びSeから選ばれるヘテロ原子を少なくとも1つ有する単環式又は多環式の芳香族複素環を有するか、又は、縮合多環芳香族炭化水素環を有することが好ましい。
式(A-1)~(A-12)中、XAは酸素原子、硫黄原子、セレン原子又はNRXを示し、硫黄原子又はNRXが好ましい。
RN及びRXは、アルキル基又は上記式(1-1)で表される基を示す。RN及RXとして採りうる上記アルキル基は、後述するRA1として採りうるアルキル基と同義であり、好ましい範囲も同じである。RN及びRXとして採り得るアルキル基は、後述するRA1と同様に炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよい。
RA2は、水素原子、ハロゲン原子、アルキル基(このアルキル基は炭素鎖中に-O-、-S-、および、-NRA3-のうち少なくとも1つを含んでいてもよい。)、又は、単結合を示す。RA2が単結合であるとは、すなわちRA2が他の構造との結合部位となっていることを意味する。
RA2は、水素原子又は単結合が好ましい。
RA2がハロゲン原子である場合、フッ素原子、塩素原子、臭素原子又はヨウ素原子であり、フッ素原子が好ましい。RA2が上記アルキル基である場合、炭素数2~35のアルキル基が好ましく、炭素数8~25のアルキル基がより好ましい。また、上記アルキル基は直鎖でも分岐鎖でもよい。RA3は、水素原子又は置換基を示す。RA3として採りうる置換基としては、特に限定されず、上記R1S及びR2Sにおける置換基と同義であり、好ましい範囲も同じである。
具体的には、上記式(A-5)及び(A-10)においては、ZAを含む環構造において、1つのZAがCRA2であり、かつそのRA2が単結合となる。この単結合を有するCRA2(炭素原子)が各式において*で示す結合部位となる。また、式(A-11)においては、8個のうち2つのZAがCRA2であり、かつそれらのRA2が単結合となる。これらの単結合を有するCRA2(炭素原子)が式(A-11)において*で示す結合部位となる。
RA1は、アルキル基(このアルキル基は炭素鎖中に-O-、-S-、および、-NRA3-のうち少なくとも1つを含んでいてもよい。)、上記式(1-1)で表される基、又は、単結合を示す。RA1としては、アルキル基又は上記式(1-1)で表される基が好ましい。
RA1として採りうるアルキル基は直鎖でも分岐鎖でもよい。このアルキル基の炭素数は、2~35であることが好ましく、8~25であることがより好ましい。
WAにおけるRA2及びRA3は、それぞれ、ZAにおけるRA2及びRA3と同義であり、好ましいものも同じである。
態様1:WAがCRA2であり、かつそのRA2が単結合である。
態様2:WAがNRA1であり、かつそのRA1が単結合である。
態様3:WAがC(RA2)2であり、かつそのRA2のうち一方が単結合であり、他方が水素原子、ハロゲン原子又は上記アルキル基である。
上記各態様において、上記単結合を有するCRA2(炭素原子)、NRA1(窒素原子)又はC(RA2)2(炭素原子)が式(A-6)における結合部位(式中、*で示す)となる。
RN、XA、YA及びZAは、それぞれ、上記式(A-1)~(A-12)において説明したRN、XA、YA及びZAと同義である。
Xd、Zd、M、p及びqは、それぞれ、上記式(D-1)において説明したXd、Zd、M、p及びqと同義である。
重合度nは、後述する重量平均分子量と、各繰り返し単位の質量とから概算できる。
成分(a)の有機半導体ポリマー中、上記式(1)で表される構造単位の含有量は、60質量%以上であることが好ましく、80質量%以上であることがより好ましく、90質量%以上であることが更に好ましい。成分(a)の有機半導体ポリマーは上記式(1)で表される構造単位からなるポリマーであることが好ましい。
さらに成分(a)の有機半導体ポリマーは、その重量平均分子量が、後述するように成分(b)の絶縁性ポリマーの重量平均分子量と特定の関係にある。
本発明において、重量平均分子量及び数平均分子量は、ゲル浸透クロマトグラフィ法(GPC(Gel Permeation Chromatography))法にて測定され、標準ポリスチレンで換算して求められる。具体的には、例えば、GPCは、HLC-8121GPC(商品名、東ソー社製)を用い、カラムとして、TSKgel GMHHR-H(20) HT(商品名、東ソー社製、7.8mmID×30cm)を2本用い、溶離液として1,2,4-トリクロロベンゼンを用いる。また、条件としては、試料濃度を0.02質量%、流速を1.0mL/min、サンプル注入量を300μL、測定温度を160℃とし、IR(infrared)検出器を用いて行う。また、検量線は、東ソー社製の「標準試料TSK standard,polystyrene」:「F-128」、「F-80」、「F-40」、「F-20」、「F-10」、「F-4」、「F-2」、「F-1」、「A-5000」、「A-2500」、「A-1000」、「A-500」(いずれも商品名)の12サンプルを用いて、作製する。
成分(b)の絶縁性ポリマーは、重量平均分子量が2000以上で、絶縁性を示すものであれば特に制限なく用いることができる。本発明において「絶縁性ポリマー」とは、体積抵抗値が106Ωcm以上のポリマーであって、成分(a)の有機半導体ポリマーとは異なるポリマーを意味する。体積抵抗値は下記方法で測定される。
-体積抵抗値の測定方法-
清浄な50mm角のガラス基板に、ポリマーを塗布し、厚さ1μmのポリマー膜を得る。得られた膜について、ロレスタGP MCP-T610型(商品名、三菱マテリアル製)を用いて体積抵抗値を測定する。
式(I-1)中、5つのX1の中に窒素原子がある場合、かかる窒素原子の数は1つが好ましい。(すなわち、式(I-1)中の環構造が含窒素ヘテロ環の場合、ピリジン環が好ましい。)
R22とR23は互いに連結して環を形成してもよい。形成される環としては、ベンゼン環が好ましい。(すなわち、縮環構造全体としてはナフタレン環となることが好ましい。)
さらに成分(b)の有機半導体ポリマーは、その重量平均分子量が、後述するように成分(a)の有機半導体ポリマーの重量平均分子量と特定の関係にある。
成分(b)の絶縁性ポリマー中、上記式(I-1)で表される構造単位の含有量は、60質量%以上であることが好ましく、80質量%以上であることがより好ましく、90質量%以上であることが更に好ましい。成分(b)の絶縁性ポリマーは式(I-1)で表される構造単位からなるポリマーであることが特に好ましい。
成分(b)の絶縁性ポリマーは、上記式(I-1)で表される構造単位からなることも好ましい。
本発明の組成物中に含まれる成分(a)の有機半導体ポリマーの重量平均分子量Mw1と成分(b)の絶縁性ポリマーの重量平均分子量Mw2とが、下記関係式(1a)を満たす。Mw1とMw2は下記関係式(2a)満たすことが好ましく、下記関係式(3a)を満たすことがより好ましい。
関係式(1a) 0.1≦Mw1/Mw2≦10
関係式(2a) 0.5≦Mw1/Mw2≦7
関係式(3a) 1≦Mw1/Mw2≦5
Mw1とMw2が上記関係にあることにより、両ポリマーが適度に相溶し、本発明の組成物で形成した有機半導体層において、有機半導体ポリマーの配列規則性をより向上させることができる。
関係式(1b) 0.1≦C1/C2≦10
関係式(2b) 0.5≦C1/C2≦5
関係式(3b) 1≦C1/C2≦3
C1とC2が上記関係にあることにより、絶縁性ポリマーと有機半導体ポリマーとの間に目的の相互作用を生じさせながら、絶縁性ポリマーによるキャリアのホッピング阻害も良好に抑えることが可能になる。
本発明において、「SP値」とは、「溶解度パラメータの値」を意味する。本発明におけるSP値とは、ハンセン溶解度パラメータ:A User’s Handbook,Second Edition,C.M.Hansen (2007),Taylor and Francis Group,LLC (HSPiPマニュアル)に記載された式によるハンセン溶解度パラメータである。具体的には、「実践ハンセン溶解度パラメーターHSPiP第3版」(ソフトウエアーバージョン4.0.05)を用いて、下記式にてSP値を算出する。
(SP値)2=(δHd)2+(δHp)2+(δHh)2
Hd :分散寄与
Hp :極性寄与
Hh :水素結合寄与
ポリマーの表面自由エネルギーは通常の方法で測定することができる。すなわち、このポリマーからなる膜(厚さ100nm)の接触角を水及びジヨードメタンの双方で測定し、下記Owensの式に代入することで求めることができる(下記は有機溶媒にジヨードメタン(CH2I2)を用いる場合の式である)。
1+cosθH2O=2(γS d)1/2(γH2O d)1/2/γH2O,V+2(γS h)1/2(γH2O h)1/2/γH2O,V
1+cosθCH2I2=2(γS d)1/2(γCH2I2 d)1/2/γCH2I2,V+2(γS h)1/2(γCH2I2 h)1/2/γCH2I2,V
接触角は、液滴容量を純水、ジヨードメタンとも1μLとし、滴下後10秒後に接触角を読み取ることにより測定する。その際、測定雰囲気を温度23℃、相対湿度50%とする。
成分(c)の溶媒は、成分(a)の有機半導体ポリマーと成分(b)の絶縁性ポリマーとを所定の濃度で溶解することができれば特に制限されない。かかる溶媒の例としては下記溶媒を挙げることができる。
上記の粘度は、JIS Z8803に準拠して測定される値である。
本発明の組成物は、後述するように有機薄膜トランジスタの有機半導体層の形成に用いることにより、得られる有機薄膜トランジスタのキャリア移動度を効果的に高めることができる。このメカニズムは定かではないが、後述するように、本発明に用いる成分(b)の絶縁性ポリマーと成分(a)の有機半導体ポリマーとの相互作用性が影響しているものと考えられる(成分(b)の絶縁性ポリマーによる印刷性の向上作用は事実上認められない)。かかる絶縁性ポリマーの、有機半導体ポリマーとの相互作用に基づくキャリア移動度の向上についてはこれまで知られていなかった。
本発明の組成物は、上記成分(a)~(c)の他、各種の添加剤を含有していてもよい。かかる添加剤としては、有機半導体組成物に通常用いられるものを特に制限されることなく用いることができる。
有機半導体組成物中の、添加剤の含有率は、10質量%以下であることが好ましく、5質量%以下であることが好ましく、1質量%以下であることがより好ましい。上記範囲であると、膜形成性に優れる。例えば、添加剤の含有率が上記範囲内にある有機半導体組成物を用いて有機薄膜トランジスタ素子の有機半導体膜を形成すると、膜形成性に優れ、有機薄膜トランジスタ素子のキャリア移動度及び耐熱性がより向上する。
有機半導体組成物の調製方法としては、特に制限されず、通常の調製方法を採用できる。例えば、溶媒に所定量の各成分を添加して、適宜攪拌処理することにより、本発明の有機半導体組成物を調製することができる。
本発明の有機薄膜トランジスタの製造方法(以下、「本発明の製造方法」という。)は、有機薄膜トランジスタの製造工程において、有機半導体層を、上記成分(a)で規定する有機半導体ポリマーと、上記成分(b)で規定する絶縁性ポリマーとで形成することを含む。かかる製造方法には、上述した本発明の組成物を用いる態様と、本発明の組成物を用いない態様の2つの実施態様がある。これらの実施態様について以下に説明する。なお、有機薄膜トランジスタ全体の構造については後述する。
本発明の製造方法の一実施形態においては、本発明の組成物を用いて有機半導体層を形成することを含む。より好ましくは、本発明の組成物を塗布して形成した塗布膜を、必要により乾燥後、本発明の組成物に含有される成分(b)の絶縁性ポリマーが有するガラス転移温度(Tg、℃)よりも高い温度(好ましくはTg超Tg+200℃以下、より好ましくTg+20~Tg+100℃)に曝して有機半導体層を形成する。こうすることで、有機半導体ポリマーと絶縁性ポリマーをより適度に相溶させることができる。成分(b)の絶縁性ポリマーが有するガラス転移温度(Tg)よりも高い温度に曝す時間は、5分間~3時間とすることが好ましい。
上記各工程は大気雰囲気下で行っても不活性ガス雰囲気下で行ってよく、不活性ガス雰囲気下(実質的に水、酸素を含まない環境下であり、例えば窒素雰囲気下が挙げられる)で行うことが好ましい。
本発明においてTgは、示差走査熱量計(DSC)を用いて測定される。より詳細には、示差走査熱量測定装置(X-DSC7000(商品名、アイティー計測制御(株)製))を用いて、絶縁性ポリマー試料20mgを測定パンに入れ、これを窒素気流中で速度10℃/分で30℃から120℃まで昇温して15分間保持した後、30℃まで-20℃/分で冷却する。この後、再度30℃から250℃まで昇温して、ベースラインが低温側から変化し始める温度をガラス転移温度Tgとする。
かかる有機半導体層が設けられる層(有機半導体層に接する、有機半導体層の土台となる層)は、有機薄膜トランジスタの構造により必然的に定まるものである。本発明の好ましい実施形態であるボトムゲート型の場合、ゲート絶縁層(膜)を形成した後、かかるゲート絶縁層上に有機半導体層が設けられる。
本発明の組成物を用いて塗布膜を形成する方法に特に制限はなく、通常の塗布方法を採用することができる。かかる塗布方法の例として、バーコート法、スピンコート法、ディップコート法、ナイフコート法、ドクターブレード法、インクジェット印刷法、フレキソ印刷法、グラビア印刷法又はスクリーン印刷法が挙げられる。更に、特開2013-207085号公報に記載の有機半導体膜の形成方法(いわゆるギャップキャスト法)、国際公開第2014/175351号に記載の有機半導体薄膜の製造方法(いわゆるエッジキャスト法又は連続エッジキャスト法)等も好適に用いることができる。
本発明の製造方法の別の実施形態においては、下記(a)を溶媒中に溶解してなるインク組成物Aと、下記(b)を溶媒中に溶解してなるインク組成物Bとを、別々に塗布、成膜して有機半導体層を形成すること含む。かかる有機半導体層が設けられる層(有機半導体層に接する、有機半導体層の土台となる層)は、有機薄膜トランジスタの構造により必然的に定まるものである。本発明の好ましい実施形態であるボトムゲート型の場合、ゲート絶縁層(膜)を形成した後、かかるゲート絶縁層上にインク組成物Aと、インク組成物Bとを、別々に(順次に)塗布、成膜し、有機半導体層を形成する。
(b)重量平均分子量2000以上の絶縁性ポリマー
但し、上記(a)有機半導体ポリマーの重量平均分子量Mw1と上記(b)絶縁性ポリマーの重量平均分子量Mw2が下記関係式(1a)を満たす。
0.1≦Mw1/Mw2≦10
Mw1とMw2が上記関係にあることにより、両ポリマーが接する部位及びその近傍で両ポリマーが適度に相溶しやすくなり、有機半導体層における有機半導体ポリマーの配列規則性をより向上させることができる。
また、有機半導体層の形成において、上記インク組成物Aを塗布することにより適用される有機半導体ポリマーの塗布量CT1と上記インク組成物Bを塗布することにより適用される絶縁性ポリマーの塗布量CT2が、質量比で下記関係式(1c)を満たす。
0.1≦CT1/CT2≦10
CT1とCT2が上記関係にあることにより、絶縁性ポリマーと有機半導体ポリマーとの間に目的の相互作用を生じさせながら、絶縁性ポリマーによるキャリアのホッピング阻害も抑えることが可能になる。
関係式(2a) 0.5≦Mw1/Mw2≦7
関係式(3a) 1≦Mw1/Mw2≦5
関係式(2c) 0.5≦CT1/CT2≦5
関係式(3c) 1≦CT1/CT2≦3
この方法において、上記(a)の有機半導体ポリマーの重量平均分子量及び上記(b)の絶縁性ポリマーの重量平均分子量の好ましい範囲は、それぞれ、上述した本発明の組成物中に含まれる成分(a)の有機半導体ポリマーの重量平均分子量及び上記(b)の絶縁性ポリマーの重量平均分子量の好ましい範囲と同じである。
本発明において「溶解度」は、20℃における溶解度を意味する。
絶縁性ポリマーの量は多すぎると所望の効果が得られにくくなる。これは、有機半導体ポリマー鎖間のキャリアのホッピングが阻害されやすくなることが一因と考えられる。また、有機半導体ポリマーと絶縁性ポリマーの重量平均分子量の関係も重要である。両ポリマーの分子量が離れすぎていると、相分離が顕著となり、有機半導体ポリマーの配列規則性を所望のレベルまで高めることが難しくなる傾向がある。
続いて本発明の製造方法で得られる有機薄膜トランジスタの好ましい形態について説明する。
本発明の製造方法で得られる有機薄膜トランジスタ(有機TFTともいう)は、上述した本発明の有機半導体層を有し、更に、ソース電極と、ドレイン電極と、ゲート電極と、を有することができる。
本発明の製造方法で得られる有機TFTは、基板上に、ゲート電極と、有機半導体層と、ゲート電極及び有機半導体層の間に設けられたゲート絶縁層と、有機半導体層に接して設けられ、有機半導体層を介して連結されたソース電極及びドレイン電極とを有する。この有機TFT素子においては、有機半導体層とゲート絶縁層が隣接して設けられる。
本発明の製造方法で得られる有機TFTは、上記各層を備えていればその構造については特に限定されない。例えば、ボトムコンタクト型(ボトムゲート-ボトムコンタクト型及びトップゲート-ボトムコンタクト型)、又は、トップコンタクト型(ボトムゲート-トップコンタクト型及びトップゲート-トップコンタクト型)などのいずれの構造を有していてもよい。本発明の製造方法で得られる有機TFTは、より好ましくは、ボトムゲート-ボトムコンタクト型又はボトムゲート-トップコンタクト型(これらを総称してボトムゲート型という。)である。
以下、本発明の製造方法で得られる有機TFTの一例について、図面を参照して説明する。
図1は、本発明の半導体素子の一例であるボトムゲート-ボトムコンタクト型の有機TFT100の断面模式図である。
有機TFT100は、図1に示されるように、基板(基材)10と、ゲート電極20と、ゲート絶縁膜30と、ソース電極40及びドレイン電極42と、有機半導体膜50と、封止層60とを、この順で、有する。
以下、基板(基材)、ゲート電極、ゲート絶縁層(膜)、ソース電極、ドレイン電極、有機半導体層(膜)及び封止層、並びに、それぞれの作製方法について詳述する。
基板は、後述するゲート電極、ソース電極及びドレイン電極等を支持する役割を果たす。
基板の種類は、特に制限されず、例えば、プラスチック基板、シリコン基板、ガラス基板又はセラミック基板等が挙げられる。中でも、汎用性、各デバイスへの適用性及びコストの観点から、シリコン基板、ガラス基板又はプラスチック基板であることが好ましい。
基板の厚みは、特に限定されないが、例えば、10mm以下であるのが好ましく、2mm以下であるのが更に好ましく、1.5mm以下であるのが特に好ましい。一方、0.01mm以上であるのが好ましく、0.05mm以上であるのが更に好ましい。
ゲート電極は、有機TFT素子のゲート電極として用いられている通常の電極を特に制限されることなく適用できる。
ゲート電極を形成する材料(電極材料)としては、特に限定されず、例えば、金、銀、アルミニウム、銅、クロム、ニッケル、コバルト、チタン、白金、マグネシウム、カルシウム、バリウム若しくはナトリウム等の金属、InO2、SnO2若しくはインジウム錫酸化物(ITO)等の導電性の酸化物、ポリアニリン、ポリピロール、ポリチオフェン、ポリアセチレン若しくはポリジアセチレン等の導電性高分子、シリコン、ゲルマニウム若しくはガリウム砒素等の半導体、又は、フラーレン、カーボンナノチューブ若しくはグラファイト等の炭素材料等が挙げられる。中でも、上記金属が好ましく、銀又はアルミニウムがより好ましい。
ゲート電極の厚みは、特に限定されないが、20~200nmであることが好ましい。
ゲート電極は、シリコン基板のように上記基板として機能するものでもよく、この場合、上記基板はなくてもよい。
ゲート絶縁層は、ゲート電極と有機半導体層との間に設けられ、絶縁性を有する層であれば特に限定されず、単層であってもよいし、多層であってもよい。
ゲート絶縁層は、絶縁性の材料で形成されるのが好ましく、絶縁性の材料として、例えば、有機高分子などの有機材料、無機酸化物などの無機材料等が好ましく挙げられる。取り扱い性などの点から、基板にプラスチック基板やガラス基板を用いる場合には有機材料を用いることが好ましい。
有機高分子及び無機酸化物等は、絶縁性を有するものであれば特に限定されず、薄膜、例えば厚み1μm以下の薄膜を形成できるものが好ましい。
有機高分子及び無機酸化物は、ぞれぞれ、1種を用いても、2種以上を併用してもよい。また、ゲート絶縁層は、それぞれ後述する有機高分子と無機酸化物とを混合させたハイブリッド層としてもよい。
有機高分子は、アルコキシシリル基やビニル基、アクリロイルオキシ基、エポキシ基、メチロール基等の反応性置換基を有する化合物と併用することもできる。
また、特開2013-214649号公報の[0167]~[0177]に記載の「数平均分子量(Mn)が140~5,000であり、架橋性官能基を有し、フッ素原子を有さない化合物(G)」を用いるのも好ましく、これらの内容は好ましくは本願明細書に組み込まれる。
熱により酸を発生させる熱酸発生剤(触媒)として、例えば、特開2010-285518号公報の[0035]~[0038]に記載の熱カチオン重合開始剤、特にオニウム塩等や、特開2005-354012号公報の[0034]~[0035]に記載の触媒、特にスルホン酸類及びスルホン酸アミン塩等を好ましく使用することができ、好ましくはこれらの内容は本願明細書に組み込まれる。
また、特開2005-354012号公報の[0032]~[0033]に記載の架橋剤、特に二官能以上のエポキシ化合物、オキセタン化合物、特開2006-303465号公報の[0046]~[0062]に記載の架橋剤、特に2個以上の架橋基を有し、この架橋基の少なくとも一つがメチロール基もしくはNH基であることを特徴とする化合物、及び、特開2012-163946号公報の[0137]~[0145]に記載の、ヒドロキシメチル基又はアルコキシメチル基を分子内に2個以上有する化合物を用いるのも好ましく、これらの内容は好ましくは本願明細書に組み込まれる。
また、それぞれの金属酸化物に対応する前駆体、具体的には塩化物、臭化物等の金属ハロゲン化物や金属アルコキシド、金属水酸化物等を、アルコールや水中で塩酸、硫酸、硝酸等の酸や水酸化ナトリウム、水酸化カリウム等の塩基と反応させて加水分解することにより、形成してもよい。このような溶液系のプロセスを用いる場合、上記ウエットコーティング法を用いることができる。
ゲート絶縁層表面(有機半導体層が形成される側の表面)における表面自由エネルギーは、50mN/m以上75mN/m以下とすることが好ましい。
本発明の製造方法で得られる有機TFT素子において、ソース電極は、配線を通じて外部から電荷が流入する電極である。また、ドレイン電極は、配線を通じて外部に電荷を送り出す電極である。
ソース電極及びドレイン電極を形成する材料は、上述したゲート電極を形成する電極材料と同じものを用いることができる。中でも、金属が好ましく、金または銀がより好ましい。また、金属と有機半導体の間に電荷注入層を設けることにより、ソースから有機半導体への電荷注入を促進し、移動度を向上させることが好ましい。
ソース電極及びドレイン電極の厚みは、特に限定されないが、それぞれ、1nm以上が好ましく、10nm以上が特に好ましい。また、500nm以下が好ましく、300nm以下が特に好ましい。
ソース電極とドレイン電極との間の間隔(ゲート長)は、適宜に決定できるが、例えば、200μm以下が好ましく、100μm以下が特に好ましい。また、ゲート幅は、適宜に決定できるが、例えば、5000μm以下が好ましく、1000μm以下が特に好ましい。
ソース電極及びドレイン電極を形成する方法は、特に限定されないが、例えば、ゲート電極とゲート絶縁膜とが形成された基板上に、電極材料を真空蒸着又はスパッタする方法、電極形成用組成物を塗布又は印刷する方法等が挙げられる。パターニングする場合、パターニングする方法は上述したゲート電極の方法と同じである。
本発明の製造方法で得られる有機TFTにおいて、有機半導体層は上述した方法で形成される。
(a)重量平均分子量2000以上の有機半導体ポリマー、
(b)重量平均分子量2000以上の絶縁性ポリマー;
上記有機半導体ポリマーの重量平均分子量Mw1と上記絶縁性ポリマーの重量平均分子量Mw2が下記関係式を満たし、
0.1≦Mw1/Mw2≦10
上記有機半導体層中における上記有機半導体ポリマーの含有量C3質量%と上記絶縁性ポリマーの含有量C4質量%が下記関係式を満たす。
0.1≦C3/C4≦10
上記(a)の有機半導体ポリマー、上記(b)の絶縁性ポリマー、上記Mw1/Mw2、C3/C4の好ましい形態は、それぞれ、本発明の組成物において説明した有機半導体ポリマー、絶縁性ポリマー、Mw1/Mw2、C1/C2の好ましい形態と同じである。
(UC1/UC2)>(LC1/LC2)を満たすことによりキャリア移動度が向上する理由は定かではないが、有機半導体層の厚さ方向に対して、有機半導体ポリマーと絶縁性ポリマーとが相溶しながらも不均一に偏在する形態をとることにより、有機半導体ポリマーの配列規則性が効果的に高められることが一因と考えられる。
ここで、「有機半導体層の上側半分」とは、有機半導体層をその層厚の中央で2層に等分した場合において、上記基板から遠い側に位置する部分全体を意味し、「有機半導体層の下側半分」とは、有機半導体層をその層厚の中央で2層に等分した場合において、上記基板側に位置する部分全体を意味する。また、「有機半導体層の上側半分」と「有機半導体層の下側半分」は、いずれも有機半導体層の上下半分を分ける境界を含む意味である。
上記UC1、UC2、LC1及びLC2は、飛行時間型二次イオン分析(TOF-SIMS)により測定することができる。すなわち、有機半導体層中の有機半導体ポリマーと絶縁性ポリマーの濃度比は、エッチング用イオンビームを併用して、TOF-SIMSにより元素マッピングをすることにより測定することができる。TOF-SIMSによる分析においては、100μm×100μmの面積を厚み方向に沿って測定する。
本発明の有機TFTは、耐久性の観点から、最外層に封止層を備えるのが好ましい。封止層には、有機TFTに通常用いられる封止剤(封止層形成用組成物)を用いることができる。
封止層の膜厚は、特に限定されないが、0.1~10μmであることが好ましい。
図2は、本発明の半導体素子の一例であるボトムゲート-トップコンタクト型の有機TFT200を表す断面模式図である。
有機TFT200は、図2に示されるように、基板10と、ゲート電極20と、ゲート絶縁層(膜)30と、有機半導体層(膜)50と、ソース電極40及びドレイン電極42と、封止層60とを、この順で、有する。
有機TFT200は、層構成(積層態様)が異なること以外は、有機TFT100を同じである。したがって、基板、ゲート電極、ゲート絶縁層、ソース電極、ドレイン電極、有機半導体層及び封止層については、上述の、ボトムゲート-ボトムコンタクト型有機TFTにおけるものと同じであるので、その説明を省略する。
本実施例で用いた有機半導体ポリマーO-1~O-9は、下記に示す構造単位からなるポリマーである。
下記スキームに従い有機半導体ポリマーO-1を合成した。下記スキーム中、DMFはN,N-ジメチルホルムアミド、NBSはNブロモスクシンイミド、dbaはジベンジリデンアセトンである。
合成中間体X(244mg、200mmol)、5,5’-ビス(トリメチルスタンニル)-2,2’-ビチオフェン(98.4mg、200mmol)、トリ(o-トリル)ホスフィン(9.8mg、32mmol)、トリス(ジベンジリデンアセトン)ジパラジウム(3.7mg、4mmol)、脱水クロロベンゼン(17mL)を混合し、窒素雰囲気下、130℃で24時間撹拌した。反応液を室温まで冷却した後、メタノール(240mL)/濃塩酸(10mL)混合液に注ぎ、室温で2時間撹拌した。析出物をろ過し、メタノールで洗浄した後、メタノール、アセトン、酢酸エチルで順次ソックスレー抽出し、可溶性の不純物を取り除いた。続いて、クロロホルムでソックスレー抽出し、得られた溶液を減圧濃縮した。その後、メタノールを添加し、析出した固形分をろ過し、メタノールで洗浄した。これを80℃で12時間真空乾燥し、有機半導体ポリマーO-1を201mg得た(収率82%)。
得られた有機半導体ポリマーO-1は、数平均分子量は2.4×104であり、重量平均分子量は7.5×104であった。
また、上記有機半導体ポリマーO-1の合成において、モノマー濃度、反応温度等を制御することにより、分子量の異なる有機半導体ポリマーO-1を得た。
上記合成例1において使用するモノマーを変更し、上記合成例1に準じて、有機半導体ポリマーO-2~O-9を合成した。
<有機半導体組成物1-1~1~24、比較有機半導体組成物c1-1~c1-5の調製>
クロロベンゼン(SP値:19.4MPa1/2)に上記で合成した各有機半導体ポリマーO-1と各絶縁性ポリマーを、下記表1に示す濃度となるように溶解し、本発明の有機半導体組成物1-1~1-24及び比較のための有機半導体組成物c1-1~c1-5を調製した。
有機半導体組成物1-1~1-24は、いずれも上述したP1/P2が1以上2以下であった。なお、後述する実施例2以降で用いた、本発明の有機半導体組成物に包含される有機半導体組成物はいずれもP1/P2が1以上2以下であった。
図3に示すボトムゲート-トップコンタクト型の有機薄膜トランジスタ300を製造した。
導電性n型シリコン基板(0.7mm厚さ)の表面に、SiO2の熱酸化膜350nmを形成した25mm×25mm基板を基板212として使用した。基板212の熱酸化膜の表面は、UV(紫外線)/オゾン洗浄した後、β-フェニチルトリメトキシシランで処理した。処理後の基板の表面自由エネルギーは36mN/mであった。
基板212のβ-フェニチルトリメトキシシラン処理面の上に、上記で調製した有機半導体組成物をスピンコート(2000rpm90秒間)した後、ホットプレート上で、200℃で1時間乾燥して、有機半導体層(膜厚約20nm)を形成した。得られた有機半導体層にマスクをつけて7,7,8,8-テトラシアノキノジメタン(東京化成)1.5nmおよび金電極50nmを蒸着してソース電極およびドレイン電極を形成することにより、本発明の有機薄膜トランジスタ1-1~1-24(実施例1-1~1-24)及び比較のための有機薄膜トランジスタc1-1~c1-5(比較例c1-1~c1-5)をそれぞれ製造した。
有機薄膜トランジスタ1-1~1-24は、それぞれ、上記有機半導体組成物1-1~1-24を用いたものであり、有機薄膜トランジスタc1-1~c1-5は、それぞれ、上記有機半導体組成物c1-1~c1-5を用いたものである。
製造した各有機薄膜トランジスタについて、半導体特性評価装置:4155C(商品名、アジレントテクノロジーズ社製)を用いて、大気下で、以下の性能評価をした。その結果を表1に示す。
各有機薄膜トランジスタのソース電極-ドレイン電極間に-15Vの電圧を印加し、ゲート電圧を+40V~-40Vの範囲で変化させ、ドレイン電流Idを表す下記式を用いてキャリア移動度μ(cm2/Vs)を算出した。得られたキャリア移動度μを、下記評価基準により、評価した。キャリア移動度μは高いほど好ましく、本試験において、「D」以上であることが好ましく、「C」以上であることがより好ましく、「B」以上であることがより好ましく、「A」であることが更に好ましい。
式中、Lはゲート長、wはゲート幅、μはキャリア移動度、Ciはゲート絶縁層の単位面積当たりの容量、Vgはゲート電圧、Vthは閾値電圧を示す。
「A」 :有機薄膜トランジスタc1-1の3倍超である。
「B」 :有機薄膜トランジスタc1-1の1.5倍超3倍以下である。
「C」 :有機薄膜トランジスタc1-1の1.2倍超1.5倍以下である。
「D」 :有機薄膜トランジスタc1-1の1.0倍超1.2倍以下である。
「E」 :有機薄膜トランジスタc1-1と同じである。
「F」 :有機薄膜トランジスタc1-1よりも低い。
結果を下記表1に示す。
「γ1」は有機半導体ポリマーの表面自由エネルギーを意味し、「γ2」は絶縁性ポリマーの表面自由エネルギーを意味する。「γ1<γ2」のカラムは、γ1<γ2を満たすものを「Y」、満たさないものを「N」として示した。
「UC1」は有機半導体層の上側半分における有機半導体ポリマーの含有量を意味し、「UC2」は有機半導体層の上側半分における絶縁性ポリマーの含有量を意味する。また「LC1」は有機半導体層の下側半分における有機半導体ポリマーの含有量を意味し、「LC2」は有機半導体層の下側半分における絶縁性ポリマーの含有量を意味する。(UC1/UC2)>(LC1/LC2)を満たすものを「Y」、満たさないものを「N」として示した。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例1-1~1-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-2に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ2-1~2-24(実施例2-1~2-24)及び比較のための有機薄膜トランジスタc2-1~c2-5(比較例c1-1~c1-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc2-1のキャリア移動度を「E」評価とした)。結果を下記表2に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例2-1~2-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-3に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ3-1~3-24(実施例3-1~3-24)及び比較のための有機薄膜トランジスタc3-1~c3-5(比較例c3-1~c3-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc3-1のキャリア移動度を「E」評価とした)。結果を下記表3に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例3-1~3-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-4に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ4-1~4-24(実施例4-1~4-24)及び比較のための有機薄膜トランジスタc4-1~c4-5(比較例c4-1~c4-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc4-1のキャリア移動度を「E」評価とした)。結果を下記表4に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例4-1~4-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-5に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ5-1~5-24(実施例5-1~5-24)及び比較のための有機薄膜トランジスタc5-1~c5-5(比較例c5-1~c5-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc5-1のキャリア移動度を「E」評価とした)。結果を下記表5に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例5-1~5-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-6に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ6-1~6-24(実施例6-1~6-24)及び比較のための有機薄膜トランジスタc6-1~c6-5(比較例c6-1~c6-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc6-1のキャリア移動度を「E」評価とした)。結果を下記表6に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例6-1~6-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-7に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ7-1~7-24(実施例7-1~7-24)及び比較のための有機薄膜トランジスタc7-1~c7-5(比較例c7-1~c7-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc7-1のキャリア移動度を「E」評価とした)。結果を下記表7に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例7-1~7-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-8に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ8-1~8-24(実施例8-1~8-24)及び比較のための有機薄膜トランジスタc8-1~c8-5(比較例c8-1~c8-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc8-1のキャリア移動度を「E」評価とした)。結果を下記表8に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例8-1~8-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1及び比較例c1において、用いた有機半導体組成物に含有させた有機半導体ポリマーO-1を有機半導体ポリマーO-9に代えた以外は実施例1及び比較例c1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ9-1~9-24(実施例9-1~9-24)及び比較のための有機薄膜トランジスタc9-1~c9-5(比較例c9-1~c9-5)をそれぞれ製造した。得られた各有機薄膜トランジスタについて、上記試験例1と同様にしてキャリア移動度を評価した(有機薄膜トランジスタc9-1のキャリア移動度を「E」評価とした)。結果を下記表9に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度が高められる結果となった(実施例9-1~9-24)。
すなわち、有機半導体層を本発明の有機半導体組成物を用いて形成することにより、得られる有機薄膜トランジスタを高性能化できることがわかる。
上記実施例1-1及び比較例c1-1において、有機半導体組成物に使用した溶媒:クロロベンゼンをテトラリン(SP値:19.6MPa1/2)に代え、また、有機半導体層の形成をスピンコートにより行っていたのをフレキソ印刷に代えた以外は、実施例1-1及び比較例c1-1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ10-1(実施例10-1)及び比較のための有機薄膜トランジスタc10-1(比較例c10-1)をそれぞれ製造した。
上記フレキソ印刷にはフレキソ適性試験機F1(商品名、アイジーティ テスティングシステムズ社製)を用い、フレキソ樹脂版としてはAFD DSH1.70%(商品名、旭化成社製)/ベタ画像を用いた。フレキソ樹脂版と、有機半導体層を形成する基板との間の圧を60N、搬送速度を0.4m/秒として印刷した。
フレキソ印刷後の乾燥は200℃で1時間とした。
上記調製例1で調製した有機半導体組成物1-1~1~24、比較有機半導体組成物c1-1~c1-5を用いて、図4に示すボトムゲート-ボトムコンタクト型の有機薄膜トランジスタ400を製造した。
導電性n型シリコン基板(0.7mm厚さ)の表面に、SiO2の熱酸化膜350nmを形成した25mm×25mm基板を基板212として使用した。基板212の熱酸化膜の表面は、UV(紫外線)/オゾン洗浄した後、β-フェニチルトリメトキシシランで処理した。
基板212のβ-フェニチルトリメトキシシラン処理面の上に、マスクをつけて金電極30nmを蒸着してソース電極およびドレイン電極を形成した。上記で調製した各有機半導体組成物をスピンコート(2000rpm90秒間)した後、ホットプレート上で、200℃で1時間乾燥して、有機半導体層(膜厚約20nm)を形成することにより、本発明の有機薄膜トランジスタ11-1~11-24(実施例11-1~11-24)及び比較のための有機薄膜トランジスタc11-1~c11-5(比較例c11-1~c11-5)をそれぞれ製造した。
結果を下表に示す。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度に優れることがわかった(実施例11-1~11-24)。
図1に示す構造のボトムゲート-ボトムコンタクト型の有機薄膜トランジスタ100を製造した。
ガラス基板(イーグルXG:コーニング社製)上に、ゲート電極となるAlを蒸着した(厚み:50nm)。その上にゲート絶縁膜形成用組成物(ポリビニルフェノール/メラミン=1質量部/1質量部(w/w)のPGMEA(プロピレングリコールモノメチルエーテルアセテート)溶液(固形分濃度:2質量%))をスピンコートし、150℃で60分間ベークを行うことで膜厚400nmのゲート絶縁膜を形成した。絶縁膜の表面エネルギーは45mN/mであった。
次いで、その上に、銀インク(銀ナノコロイドH-1(商品名)、三菱マテリアル社製)を、インクジェット装置:DMP-2831(商品名、富士フイルムダイマティクス社製)を用いて、ソース電極及びドレイン電極状(厚み約100nm、ゲート長60μm及びゲート幅200μm)に、印刷(描画)した。その後、オーブンにて180℃で30分ベークし、焼結して、ソース電極及びドレイン電極を形成した。このようにして素子前駆体を得た。
素子前駆体に対してUV(紫外線)/オゾン処理(Jelight社製、UVO-CLEANER Model No.42(商品名))を行い、絶縁膜の表面エネルギーを下表に示す通りに調整した。電極表面をペンタフルオロチオフェノール処理した後、有機半導体組成物1-1~1~24、比較有機半導体組成物c1-1~c1-5を用いて有機半導体層を形成し、図1に示すボトムゲート-ボトムコンタクト型の有機薄膜トランジスタ100を製造した。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度に優れることがわかった(実施例12-1~12-28)。
図1に示す構造のボトムゲート-ボトムコンタクト型の有機薄膜トランジスタ100を製造した。
ガラス基板(イーグルXG:コーニング社製)上に、ゲート電極となるAlを蒸着した(厚み:50nm)。その上にゲート絶縁膜形成用組成物(ポリ(スチレン-co-メチルメタクリラート)/ペンタエリスリトールテトラアクリレート/1、2-オクタンジオン、1-[4-(フェニルチオ)-、2-(O-ベンゾイルオキシム)]=1質量部/1質量部/0.01質量部(w/w)のPGMEA(プロピレングリコールモノメチルエーテルアセテート)溶液(固形分濃度:2質量%))をスピンコートし、110℃で5分間プリベークを行った後、露光(365nm、100mJ/cm2)し、200℃で60分ポストベークすることで膜厚400nmのゲート絶縁膜を形成した。絶縁膜の表面エネルギーは42mN/mであった。
次いで、その上に、銀インク(銀ナノコロイドH-1(商品名)、三菱マテリアル社製)を、インクジェット装置:DMP-2831(商品名、富士フイルムダイマティクス社製)を用いて、ソース電極及びドレイン電極状(厚み約100nm、ゲート長60μm及びゲート幅200μm)に、印刷(描画)した。その後、オーブンにて180℃で30分ベークし、焼結して、ソース電極及びドレイン電極を形成した。このようにして素子前駆体を得た。
素子前駆体に対してUV(紫外線)/オゾン処理(Jelight社製、UVO-CLEANER Model No.42)を行い、絶縁膜の表面エネルギーを調整した。電極表面をペンタフルオロチオフェノール処理した後、有機半導体組成物1-1~1~24、比較有機半導体組成物c1-1~c1-5を用いて有機半導体層を形成し、図1に示すボトムゲート-ボトムコンタクト型の有機薄膜トランジスタ100を製造した。
これに対し、有機半導体層が絶縁性ポリマーを含有し、且つその分子量及び含有量が本発明で規定する範囲内にある場合には、キャリア移動度に優れることがわかった(実施例13-1~13-27)。
クロロベンゼンに上記で合成した有機半導体ポリマーO-1を5mg/mLの濃度となるように溶解し、インク組成物A-1を得た。
トルエンに上記で合成した絶縁性ポリマーI-1を5mg/mLの濃度となるように溶解し、インク組成物B-1を得た。
絶縁性ポリマーI-1の、上記インク組成物A-1中への溶解度(25℃)は1mg/mL以上である。
有機半導体層の形成方法を下記のように変更した以外は、実施例1と同様にしてボトムゲート-トップコンタクト型の有機薄膜トランジスタ14-1~14-24(実施例14-1~14-24)及び比較のための有機薄膜トランジスタc14-1~c14-5(比較例c14-1~c14-5)を製造した。
ゲート絶縁層上に、上記インク組成物Bを250μL滴下し、スピンコートにより塗布膜を形成し、200℃で1時間乾燥させた。
次いで、この絶縁性ポリマー層上にインク組成物Aを250μL滴下し、スピンコートにより塗布膜を形成し、200℃で1時間乾燥させた。
結果を下表に示す。
下表中、「CT1」はゲート絶縁層上(絶縁性ポリマー層上)への有機半導体ポリマーの塗布量を意味し、「CT2」はゲート絶縁層上への絶縁性ポリマーの塗布量を意味する。(すなわち、CT1/CT2は、事実上、有機半導体層中における有機半導体ポリマーと絶縁性ポリマーの質量比(つまり本発明で規定するC3/C4)と合致する。
上記実施例14-1及び比較例c14-1において、インク組成物B-1に用いた溶媒:トルエンをジクロロベンゼンに代えた以外は、実施例14-1及び比較例c14-1と同様にして、ボトムゲート-トップコンタクト型の有機薄膜トランジスタ15-1(実施例15-1)及び比較のための有機薄膜トランジスタc15-1(比較例c15-1)をそれぞれ製造した。
20 ゲート電極
30 ゲート絶縁層(膜)
40 ソース電極
42 ドレイン電極
50 有機半導体層(膜)
60 封止層
100、200 有機薄膜トランジスタ
21 シリコン基板(ゲート電極)
31 熱酸化膜(ゲート絶縁層)
41a ソース電極
41b ドレイン電極
51 有機半導体層
61 封止層
300、400 有機薄膜トランジスタ
Claims (20)
- 下記(a)~(c)を含有する有機半導体組成物であって:
(a)重量平均分子量2000以上の有機半導体ポリマー、
(b)重量平均分子量2000以上の絶縁性ポリマー、
(c)溶媒;
前記有機半導体ポリマーの重量平均分子量Mw1と前記絶縁性ポリマーの重量平均分子量Mw2が下記関係式を満たし、
0.1≦Mw1/Mw2≦10
前記有機半導体組成物中における上記有機半導体ポリマーの含有量C1質量%と上記絶縁性ポリマーの含有量C2質量%が下記関係式を満たし、
0.1≦C1/C2≦10
前記有機半導体ポリマーが下記式(1)で表される構造単位を有する、有機半導体組成物。
Aは、下記式(A-1)~(A-12)のいずれかで表される構造を有する基を示す。
XAは酸素原子、硫黄原子、セレン原子又はNRXを示す。RN及びRXは炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は下記式(1-1)で表される基を示す。
YAは酸素原子又は硫黄原子を示す。
ZAはCRA2又は窒素原子を示す。
WAはC(RA2)2、NRA1、窒素原子、CRA2、酸素原子、硫黄原子又はセレン原子を示す。RA1は炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基、下記式(1-1)で表される基又は単結合を示す。RA2は水素原子、ハロゲン原子、炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は単結合を示す。RA3は水素原子又は置換基を示す。
*は上記式(1)のA中に組み込まれるための結合部位を示す。
Laは炭素鎖中に-O-、-S-及び-NR1S-のうち少なくとも1つを含んでいてもよい炭素数1~20のアルキレン基を示す。
Arは芳香族複素環基又は炭素数6~18の芳香族炭化水素基を示す。
Lbは炭素鎖中に-O-、-S-及び-NR2S-のうち少なくとも1つを含んでいてもよい炭素数1~100のアルキル基を示す。
R1S及びR2Sは水素原子又は置換基を示す。
lは1~5の整数である。
*は結合部位を示す。 - 前記式(1)で表される構造単位の溶解度パラメータと前記式(I-1)で表される構造単位の溶解度パラメータの差の絶対値が5.0MPa1/2以下である、請求項4又は5に記載の有機半導体組成物。
- 前記有機半導体組成物中の溶媒の溶解度パラメータが15.0~30.0MPa1/2である、請求項1~6のいずれか1項に記載の有機半導体組成物。
- 前記有機半導体組成物の粘度をp1とし、当該有機半導体組成物から前記絶縁性ポリマーを除いた組成の組成物の粘度をp2とした場合、p1/p2<5を満たす、請求項1~7のいずれか1項に記載の有機半導体組成物。
- 請求項1~8のいずれか1項に記載の有機半導体組成物を用いて有機半導体層を形成することを含む、有機薄膜トランジスタの製造方法。
- 前記有機半導体層を、表面エネルギーが50mN/m以上75mN/m以下のゲート絶縁層上に形成する、請求項9に記載の有機薄膜トランジスタの製造方法。
- 請求項1~8のいずれか1項に記載の有機半導体組成物を用いて形成した膜を、該組成物中の前記絶縁性ポリマーのガラス転移温度よりも高い温度に曝して前記有機半導体層を形成することを含む、請求項9又は10に記載の有機薄膜トランジスタの製造方法。
- ボトムゲート型有機薄膜トランジスタであって:
該有機薄膜トランジスタの有機半導体層が下記(a)及び(b)を含有し、
(a)重量平均分子量2000以上の有機半導体ポリマー、
(b)重量平均分子量2000以上の絶縁性ポリマー;
前記有機半導体ポリマーの重量平均分子量Mw1と前記絶縁性ポリマーの重量平均分子量Mw2が下記関係式を満たし、
0.1≦Mw1/Mw2≦10
前記有機半導体層中における前記有機半導体ポリマーの含有量C3質量%と前記絶縁性ポリマーの含有量C4質量%が下記関係式を満たし、
0.1≦C3/C4≦10
前記有機半導体ポリマーが下記式(1)で表される構造単位を有する、ボトムゲート型有機薄膜トランジスタ。
Aは、下記式(A-1)~(A-12)のいずれかで表される構造を有する基を示す。
XAは酸素原子、硫黄原子、セレン原子又はNRXを示す。RN及びRXは炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は下記式(1-1)で表される基を示す。
YAは酸素原子又は硫黄原子を示す。
ZAはCRA2又は窒素原子を示す。
WAはC(RA2)2、NRA1、窒素原子、CRA2、酸素原子、硫黄原子又はセレン原子を示す。RA1は炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基、下記式(1-1)で表される基又は単結合を示す。RA2は水素原子、ハロゲン原子、炭素鎖中に-O-、-S-及び-NRA3-のうち少なくとも1つを含んでいてもよいアルキル基又は単結合を示す。RA3は水素原子又は置換基を示す。
*は、上記式(1)のA中に組み込まれるための結合部位を示す。
Laは炭素鎖中に-O-、-S-及び-NR1S-のうち少なくとも1つを含んでいてもよい炭素数1~20のアルキレン基を示す。
Arは、芳香族複素環基又は炭素数6~18の芳香族炭化水素基を示す。
Lbは炭素数1~100の炭素鎖中に-O-、-S-及び-NR2S-のうち少なくとも1つを含んでいてもよいアルキル基を示す。
R1S及びR2Sは水素原子又は置換基を示す。
lは1~5の整数である。
*は結合部位を示す。 - 前記式(1)で表される構造単位の溶解度パラメータと上記一般式(I-1)で表される構造単位の溶解度パラメータの差の絶対値が、5.0MPa1/2以下である、請求項15又は16に記載のボトムゲート型有機薄膜トランジスタ。
- 前記有機半導体ポリマーの表面自由エネルギーをγ1とし、前記絶縁性ポリマーの表面自由エネルギーをγ2とした場合、γ1≦γ2を満たす、請求項12~17のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
- 前記有機半導体層の上側半分における前記有機半導体ポリマーの含有量をUC1質量%、前記絶縁性ポリマーの含有量をUC2質量%とし、
前記有機半導体層の下側半分における前記有機半導体ポリマーの含有量をLC1質量%、前記絶縁性ポリマーの含有量をLC2質量%とした場合、UC1、UC2、LC1及びLC2が、(UC1/UC2)>(LC1/LC2)を満たす、請求項12~18のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。 - 前記ボトムゲート型有機薄膜トランジスタのゲート絶縁層の表面エネルギーが50mN/m以上75mN/m以下である、請求項12~19のいずれか1項に記載のボトムゲート型有機薄膜トランジスタ。
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US11183638B2 (en) * | 2018-05-29 | 2021-11-23 | Purdue Research Foundation | Semiconducting polymer blends for high temperature organic electronics |
JP7039414B2 (ja) * | 2018-07-26 | 2022-03-22 | 株式会社東芝 | 放射線検出素子の作製方法および放射線検出素子 |
CN110183452B (zh) * | 2019-05-16 | 2021-06-01 | 中山大学 | 一种全氟丁基取代化合物及其制备方法和应用 |
Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005354012A (ja) | 2004-06-14 | 2005-12-22 | Canon Inc | 電界効果型トランジスタおよびその製造方法 |
WO2006019133A1 (ja) * | 2004-08-20 | 2006-02-23 | Matsushita Electric Industrial Co., Ltd. | 有機積層膜を形成するための塗液、電界効果トランジスタの製造方法、および電界効果トランジスタ |
JP2006303465A (ja) | 2005-03-25 | 2006-11-02 | Canon Inc | 有機半導体素子、電界効果型トランジスタおよびそれらの製造方法 |
JP2007516315A (ja) | 2003-10-28 | 2007-06-21 | チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド | 新規ジケトピロロピロールポリマー |
JP2007335840A (ja) * | 2006-05-18 | 2007-12-27 | Konica Minolta Holdings Inc | 有機薄膜トランジスタの形成方法、及び有機薄膜トランジスタ |
JP2009177135A (ja) * | 2007-12-27 | 2009-08-06 | Sony Corp | 薄膜半導体装置、表示装置、および電子機器 |
JP2010018790A (ja) | 2008-06-13 | 2010-01-28 | Sumitomo Chemical Co Ltd | 共重合体及びそれを用いた高分子発光素子 |
JP2010527327A (ja) | 2007-04-13 | 2010-08-12 | エルジー・ケム・リミテッド | ジオキソピロール環を含む複素環化合物およびそれを用いた有機電子素子 |
JP2010285518A (ja) | 2009-06-10 | 2010-12-24 | Kaneka Corp | 光硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ |
JP2011501451A (ja) | 2007-10-25 | 2011-01-06 | ビーエーエスエフ ソシエタス・ヨーロピア | 有機半導体としてのケトピロール類 |
JP2011514399A (ja) | 2008-02-05 | 2011-05-06 | ビーエーエスエフ ソシエタス・ヨーロピア | ナフタレン−イミド半導体ポリマー |
JP2011186069A (ja) | 2010-03-05 | 2011-09-22 | Adeka Corp | 感光性樹脂組成物 |
JP2012163946A (ja) | 2011-01-18 | 2012-08-30 | Fujifilm Corp | 化学増幅型レジスト組成物、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク、並びに、高分子化合物 |
WO2012174561A2 (en) | 2011-06-17 | 2012-12-20 | The Regents Of The University Of California | REGIOREGULAR PYRIDAL[2,1,3]THIADIAZOLE π-CONJUGATED COPOLYMERS FOR ORGANIC SEMICONDUCTORS |
JP2013181071A (ja) | 2012-02-29 | 2013-09-12 | Sumitomo Chemical Co Ltd | 高分子化合物、これを含む組成物、インク組成物、薄膜及び素子 |
JP2013207085A (ja) | 2012-03-28 | 2013-10-07 | Teijin Ltd | 有機半導体組成物、有機半導体膜の形成方法、有機半導体積層体、及び半導体デバイス |
JP2013214649A (ja) | 2012-04-03 | 2013-10-17 | Asahi Glass Co Ltd | 半導体装置およびその製造方法 |
JP2014507488A (ja) | 2010-12-17 | 2014-03-27 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共役ポリマー |
JP2014515043A (ja) | 2011-03-11 | 2014-06-26 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共役ポリマー |
WO2014175351A1 (ja) | 2013-04-25 | 2014-10-30 | 国立大学法人大阪大学 | 有機半導体薄膜の製造方法 |
JP2015050231A (ja) * | 2013-08-30 | 2015-03-16 | 富士フイルム株式会社 | 有機半導体デバイス、これに用いる化合物、組成物及び塗布膜 |
WO2016148169A1 (ja) * | 2015-03-16 | 2016-09-22 | 富士フイルム株式会社 | 有機半導体素子及びその製造方法、化合物、有機半導体組成物、並びに、有機半導体膜及びその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0028867D0 (en) * | 2000-11-28 | 2001-01-10 | Avecia Ltd | Field effect translators,methods for the manufacture thereof and materials therefor |
JP2005085945A (ja) * | 2003-09-08 | 2005-03-31 | Canon Inc | 電界効果型有機トランジスタおよびその製造方法 |
US8049209B2 (en) * | 2008-04-11 | 2011-11-01 | Xerox Corporation | Thin-film transistors |
JP5544650B2 (ja) * | 2008-11-21 | 2014-07-09 | 国立大学法人広島大学 | 新規化合物の製造方法 |
EP2379617B1 (en) * | 2008-12-18 | 2013-07-31 | Basf Se | Semiconductor materials prepared from dithienylvinylene copolymers |
JP6309269B2 (ja) * | 2010-05-27 | 2018-04-11 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | 有機電子装置を調製するための配合物および方法 |
JP6406824B2 (ja) * | 2010-06-24 | 2018-10-17 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 改良された電流オン/オフ比及び制御可能な閾値変動を有する有機電界効果トランジスタ |
WO2013120581A1 (en) * | 2012-02-15 | 2013-08-22 | Merck Patent Gmbh | Planarization layer for organic electronic devices |
WO2014101981A1 (en) * | 2012-12-28 | 2014-07-03 | Merck Patent Gmbh | Composition comprising polymeric organic semiconducting compounds |
JP6061886B2 (ja) * | 2013-03-27 | 2017-01-18 | 富士フイルム株式会社 | 有機薄膜トランジスタ、有機半導体薄膜および有機半導体材料 |
WO2017086320A1 (ja) * | 2015-11-20 | 2017-05-26 | 富士フイルム株式会社 | 有機半導体組成物、有機半導体膜、有機薄膜トランジスタおよび有機薄膜トランジスタの製造方法 |
-
2017
- 2017-03-14 JP JP2018505965A patent/JP6651606B2/ja not_active Expired - Fee Related
- 2017-03-14 EP EP17766700.3A patent/EP3432375B1/en active Active
- 2017-03-14 WO PCT/JP2017/010282 patent/WO2017159703A1/ja active Application Filing
- 2017-03-14 CN CN201780017060.6A patent/CN108780844B/zh active Active
-
2018
- 2018-09-11 US US16/127,808 patent/US20190010276A1/en not_active Abandoned
Patent Citations (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007516315A (ja) | 2003-10-28 | 2007-06-21 | チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド | 新規ジケトピロロピロールポリマー |
JP2005354012A (ja) | 2004-06-14 | 2005-12-22 | Canon Inc | 電界効果型トランジスタおよびその製造方法 |
WO2006019133A1 (ja) * | 2004-08-20 | 2006-02-23 | Matsushita Electric Industrial Co., Ltd. | 有機積層膜を形成するための塗液、電界効果トランジスタの製造方法、および電界効果トランジスタ |
JP2006303465A (ja) | 2005-03-25 | 2006-11-02 | Canon Inc | 有機半導体素子、電界効果型トランジスタおよびそれらの製造方法 |
JP2007335840A (ja) * | 2006-05-18 | 2007-12-27 | Konica Minolta Holdings Inc | 有機薄膜トランジスタの形成方法、及び有機薄膜トランジスタ |
JP2010527327A (ja) | 2007-04-13 | 2010-08-12 | エルジー・ケム・リミテッド | ジオキソピロール環を含む複素環化合物およびそれを用いた有機電子素子 |
JP2011501451A (ja) | 2007-10-25 | 2011-01-06 | ビーエーエスエフ ソシエタス・ヨーロピア | 有機半導体としてのケトピロール類 |
JP2009177135A (ja) * | 2007-12-27 | 2009-08-06 | Sony Corp | 薄膜半導体装置、表示装置、および電子機器 |
JP2011514399A (ja) | 2008-02-05 | 2011-05-06 | ビーエーエスエフ ソシエタス・ヨーロピア | ナフタレン−イミド半導体ポリマー |
JP2011514913A (ja) | 2008-02-05 | 2011-05-12 | ビーエーエスエフ ソシエタス・ヨーロピア | リレン−(π−受容体)コポリマーから製造される半導体材料 |
JP2010018790A (ja) | 2008-06-13 | 2010-01-28 | Sumitomo Chemical Co Ltd | 共重合体及びそれを用いた高分子発光素子 |
JP2010285518A (ja) | 2009-06-10 | 2010-12-24 | Kaneka Corp | 光硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ |
JP2011186069A (ja) | 2010-03-05 | 2011-09-22 | Adeka Corp | 感光性樹脂組成物 |
JP2014507488A (ja) | 2010-12-17 | 2014-03-27 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共役ポリマー |
JP2012163946A (ja) | 2011-01-18 | 2012-08-30 | Fujifilm Corp | 化学増幅型レジスト組成物、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク、並びに、高分子化合物 |
JP2014515043A (ja) | 2011-03-11 | 2014-06-26 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共役ポリマー |
WO2012174561A2 (en) | 2011-06-17 | 2012-12-20 | The Regents Of The University Of California | REGIOREGULAR PYRIDAL[2,1,3]THIADIAZOLE π-CONJUGATED COPOLYMERS FOR ORGANIC SEMICONDUCTORS |
JP2013181071A (ja) | 2012-02-29 | 2013-09-12 | Sumitomo Chemical Co Ltd | 高分子化合物、これを含む組成物、インク組成物、薄膜及び素子 |
JP2013207085A (ja) | 2012-03-28 | 2013-10-07 | Teijin Ltd | 有機半導体組成物、有機半導体膜の形成方法、有機半導体積層体、及び半導体デバイス |
JP2013214649A (ja) | 2012-04-03 | 2013-10-17 | Asahi Glass Co Ltd | 半導体装置およびその製造方法 |
WO2014175351A1 (ja) | 2013-04-25 | 2014-10-30 | 国立大学法人大阪大学 | 有機半導体薄膜の製造方法 |
JP2015050231A (ja) * | 2013-08-30 | 2015-03-16 | 富士フイルム株式会社 | 有機半導体デバイス、これに用いる化合物、組成物及び塗布膜 |
WO2016148169A1 (ja) * | 2015-03-16 | 2016-09-22 | 富士フイルム株式会社 | 有機半導体素子及びその製造方法、化合物、有機半導体組成物、並びに、有機半導体膜及びその製造方法 |
Non-Patent Citations (4)
Title |
---|
C. M. HANSEN: "Hansen solubility parameter: A User's Handbook, 2nd ed.", 2007, TAYLOR AND FRANCIS GROUP, LLC |
ORGANIC ELECTRONICS, vol. 12, 2011, pages 993 |
See also references of EP3432375A4 |
TETRAHEDRON, vol. 66, 2010, pages 3173 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111542939A (zh) * | 2018-01-23 | 2020-08-14 | 富士胶片株式会社 | 有机半导体元件、有机半导体组合物、有机半导体膜、有机半导体膜的制造方法及用于这些的聚合物 |
Also Published As
Publication number | Publication date |
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CN108780844B (zh) | 2022-04-29 |
CN108780844A (zh) | 2018-11-09 |
EP3432375A1 (en) | 2019-01-23 |
EP3432375B1 (en) | 2021-12-29 |
JP6651606B2 (ja) | 2020-02-19 |
JPWO2017159703A1 (ja) | 2019-01-10 |
EP3432375A4 (en) | 2019-04-03 |
US20190010276A1 (en) | 2019-01-10 |
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