WO2017104236A1 - キャピラリ搬送装置、キャピラリ取り付け装置、キャピラリ交換装置、キャピラリ搬送方法、キャピラリ取り付け方法及びキャピラリ交換方法 - Google Patents
キャピラリ搬送装置、キャピラリ取り付け装置、キャピラリ交換装置、キャピラリ搬送方法、キャピラリ取り付け方法及びキャピラリ交換方法 Download PDFInfo
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- H01L24/745—Apparatus for manufacturing wire connectors
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- H01L24/78—Apparatus for connecting with wire connectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
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- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
- H01L2224/78308—Removable capillary
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/78353—Ultrasonic horns
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
Definitions
- the present invention relates to a capillary transport device that transports capillaries, a capillary mounting device, a capillary exchange device, a capillary transport method, a capillary mounting method, and a capillary replacement method.
- the wire bonding apparatus is an apparatus that has a capillary through which a wire such as gold, aluminum, or copper is inserted, and that electrically connects the electrode to the electrode using the wire (see, for example, Patent Document 1). After the capillary is used for a certain number of bondings, it is necessary to replace the capillary.
- a conventional capillary replacement method will be described.
- the used capillary attached to the capillary attachment hole of the ultrasonic horn with a capillary fastening screw is removed.
- the operator grasps the capillary with tweezers, loosens the capillary tightening screw with a torque driver with a bit, and removes the used capillary from the capillary mounting hole of the ultrasonic horn.
- the operator may forcefully insert or remove the capillary, thereby deforming the capillary mounting hole or sagging near the inlet of the capillary mounting hole. There are things to do. As a result, the gripping state of the capillary changes and bonding may not be performed with high accuracy.
- the capillary is dropped inside the wire bonding apparatus, and it may take time to remove the capillary from the inside of the apparatus.
- One aspect of the present invention is any one of a capillary transport device, a capillary mounting device, a capillary replacement device, a capillary transport method, a capillary mounting method, and a capillary replacement method in which a capillary can be inserted into a mounting portion of an ultrasonic horn without using a human hand. It is an issue to provide this.
- a capillary conveying device comprising:
- the gas blowing mechanism includes a second tube that pushes the capillary into a second end of the first tube, and a second movement that moves the second tube.
- a capillary conveyance device having a mechanism.
- the capillary transport device according to [2], further comprising a block made of a material harder than the first tube and disposed at a first end portion of the first tube.
- a capillary attachment device comprising: the capillary transfer device according to any one of [1] to [3] above; and a mechanism for fixing the capillary to the attachment portion.
- a fourth tube for conveying the first capillary a first tube for conveying the second capillary, an ultrasonic horn having an attachment portion for attaching the first or second capillary, A sonic horn, a first moving mechanism for relatively moving the first end of the first tube and the first end of the fourth tube, and a second end of the first tube.
- a mechanism for blowing gas a mechanism for sucking gas from the second end of the fourth tube, a mechanism for removing the first capillary fixed to the mounting portion, and the second portion on the mounting portion.
- a mechanism for fixing the capillary a mechanism for fixing the capillary.
- a first path having a first path for transporting the first capillary, a second path for transporting the second capillary, and a third path for joining the first path and the second path.
- An ultrasonic horn having a tube, an attachment portion to which the first or second capillary is attached, and a first moving mechanism for relatively moving an end portion of the third path of the ultrasonic horn and the first tube.
- a method for conveying a capillary comprising: conveying from the end of the first through the first end to a mounting portion of the ultrasonic horn.
- a capillary mounting method wherein the capillary is transported to a mounting portion of the ultrasonic horn by the capillary transport method according to [8], and the capillary is fixed to the mounting portion.
- the first capillary By moving the ultrasonic horn having the first capillary fixed to the attachment portion and the first end of the first tube relative to each other, the first capillary is moved to the first tube of the first tube.
- the first capillary fixed to the attachment portion is removed from the ultrasonic horn, and gas is sucked from the second end portion of the first tube, so that the first capillary is removed.
- From the first end of the first tube to the second end discharge the first capillary from the first tube, and from the second end of the first tube
- a second capillary is inserted into the first tube and a gas is blown into the second end of the first tube, so that the second capillary is removed from the second end of the first tube.
- the first capillary is conveyed to the attachment portion of the ultrasonic horn through the first end, and the second capillary is attached to the attachment portion.
- Capillary exchange method characterized by fixing.
- a capillary transport device a capillary mounting device, a capillary replacement device, a capillary transport method, a capillary mounting method, and a capillary replacement method that can insert a capillary into a mounting portion of an ultrasonic horn without using a human hand. Either can be provided.
- FIGS. 7A to 7D are diagrams illustrating a method for attaching a replacement capillary to an ultrasonic horn according to one embodiment of the present invention.
- FIGS. 7A to 7C are diagrams illustrating a method of removing a used capillary from an ultrasonic horn according to one embodiment of the present invention.
- FIG. 1 is the perspective view which expanded the front end side of the ultrasonic horn shown in FIG. 1
- (B) is a modification of the ultrasonic horn shown in (A).
- 4A to 4D are cross-sectional views illustrating a capillary cartridge of a capillary replacement unit according to an aspect of the present invention.
- 4A to 4D are cross-sectional views illustrating a capillary cartridge of a capillary replacement unit according to an aspect of the present invention.
- 4A to 4D are cross-sectional views illustrating a capillary cartridge of a capillary replacement unit according to an aspect of the present invention.
- (A) and (B) are sectional views showing a path tube of a capillary exchange device according to one embodiment of the present invention.
- FIGS. It is sectional drawing which shows the path
- FIG. 1 is a schematic diagram illustrating a wire bonding apparatus according to one embodiment of the present invention.
- FIG. 7A is an enlarged perspective view of the tip side of the ultrasonic horn shown in FIG.
- the wire bonding apparatus has an ultrasonic horn 11, and a capillary 13 is attached to a capillary attachment hole (also referred to as an attachment portion) 12 of the ultrasonic horn 11 with a capillary fastening screw 14. It has been.
- a wire (not shown) is inserted into the capillary 13, and the capillary 13 is moved together with the ultrasonic horn 11 by a moving mechanism (also referred to as a first moving mechanism) (not shown). Can be electrically connected.
- a stopper 19 integrated with the ultrasonic horn 11 is provided on the upper surface of the ultrasonic horn 11.
- the wire bonding apparatus includes a carrier 15 and a carrier cover 16, and a mechanism (not shown) necessary for the wire bonding apparatus is disposed inside the carrier 15 and the carrier cover 16.
- the path tube 17 (also referred to as a first tube) is in a state in which the capillary 13 of the ultrasonic horn 11 is inserted into the first end 17a.
- the path tube 17 is a tube for transporting the capillary 13, and the inner diameter of the path tube 17 is sized to easily transport the capillary 13.
- the inner diameter of the path tube 17 is, for example, 2.0 mm, and the outer diameter of the capillary (the diameter of the thickest part) is, for example, 1.58 mm.
- the second end 17 b of the path tube 17 is connected to the capillary replacement unit 18.
- FIG. 2 is an enlarged schematic view of the capillary replacement unit 18 shown in FIG.
- the capillary replacement unit 18 includes a table 20 and a capillary cartridge 21 (also referred to as a container) that stores the replacement capillaries 13 disposed on the base 20 in a stacked manner.
- a second end 17 b of the path tube 17 is connected between the base 20 and the capillary cartridge 21.
- the capillary replacement unit 18 has a mechanism for blowing a gas (for example, air) into the second end portion 17b of the path tube 17.
- the blowing mechanism includes a capillary push-out pipe 22 (also referred to as a second pipe) for pushing the capillary 13 into the second end portion 17b of the path tube 17, and an air cylinder 23 as a second moving mechanism for moving the capillary push-out pipe 22.
- the mechanism for blowing gas has a gas injection / suction tube 24, and the tube 24 is connected to the first end 22 a of the capillary extrusion pipe 22. Therefore, the gas injected from the gas injection / suction tube 24 is blown into the second end portion 17 b of the path tube 17 through the capillary push-out pipe 22.
- the mechanism for sucking gas has a gas jet / suction tube 24, and the tube 24 is connected to the first end 22 a of the capillary push-out pipe 22. Therefore, the second end 22b of the capillary push-out pipe 22 is connected to the second end 17b of the path tube 17, and the second of the path tube 17 is sucked from the gas jet / suction tube 24. The gas in the tube 17 can be sucked from the end portion 17b.
- the outer diameter of the capillary extrusion pipe 22 is smaller than the inner diameter of the path tube 17. Therefore, the capillary 13 can be inserted into the path tube 17 by pushing the capillary push-out pipe 22 into the second end portion 17b of the path tube 17 together with the replacement capillary 13 located on the table 20 by the air cylinder 23. it can.
- the outer diameter of the capillary extrusion pipe 22 is 1.5 mm, for example. Therefore, the outer diameter of the capillary extrusion pipe 22 is smaller than the outer diameter of the capillary 13.
- FIG. 3 is a perspective view showing a capillary exchange device according to one embodiment of the present invention.
- the capillary exchange unit 18, the path tube 17, and the ultrasonic horn 11 of the capillary exchange apparatus shown in FIG. 3 are the same as those shown in FIGS.
- a horn pressing pipe 25 (also referred to as a block) is disposed at the first end 17 a of the path tube 17, and the pipe 25 may be made of a material harder than the path tube 17. Thereby, when the pipe 25 is pressed against the ultrasonic horn 11, it can be surely aligned, and the displacement of the pipe 25 can be suppressed.
- the tubular horn pressing pipe 25 is used.
- the tubular horn pressing pipe 25 is not limited to the tubular one, and may be a block as long as it is not tubular and can suppress displacement.
- the capillary exchange device has a movement mechanism (also referred to as a first movement mechanism) (not shown) that moves the first end portion 17a of the path tube 17.
- the used capillary 13 can be inserted into the horn pressing pipe 25 or the first end 17a of the path tube 17 by moving the first end 17a of the path tube 17 by this moving mechanism.
- the horn pressing pipe 25 made of a material harder than the path tube 17
- the first end 17 a of the path tube 17 is pressed against the ultrasonic horn 11 when the pipe 25 is pressed against the ultrasonic horn 11.
- the pipe 25 can be prevented from being deformed.
- the moving mechanism is an air cylinder, for example, and is controlled by a control unit (not shown).
- the ultrasonic horn 11 is moved by a moving mechanism, so that the used capillary 13 is pressed against the horn pressing pipe 25 or the first of the path tube 17. You may insert in the edge part 17a.
- the ultrasonic horn 11 is provided with a capillary attachment hole for attaching a capillary 13, and the capillary 13 is attached to the capillary attachment hole with a capillary fastening screw 14.
- the capillary exchange device has a screw tightening unit 27 for tightening by rotation of a torque driver or a motor as a mechanism for fixing the capillary 13 to the capillary mounting hole.
- the screw tightening unit 27 also functions as a mechanism for removing the capillary 13 fixed to the capillary mounting hole. Specifically, the capillary 13 is inserted into the capillary mounting hole of the ultrasonic horn, and the capillary tightening screw 14 is tightened with a specified torque by a screw tightening unit 27 with a bit 26, whereby the capillary 13 is tightened. 11 is installed in the capillary mounting hole.
- the capillary fastening screw 14 fixing the capillary 13 in the capillary mounting hole of the ultrasonic horn 11 is loosened by the screw fastening unit 27 with the bit 26, whereby the ultrasonic horn 11 is attached to the capillary.
- the capillary 13 is removed from the hole.
- the screw tightening unit 27 that is tightened by rotation of a torque driver or a motor is controlled by the control unit.
- 4A to 4D are diagrams illustrating a method for removing a used capillary from an ultrasonic horn according to one embodiment of the present invention.
- the ultrasonic horn 11 and the first end 17a of the path tube 17 are relatively moved, so that the capillary mounting hole of the ultrasonic horn 11 and the first end of the path tube 17 are moved. 17a is aligned.
- the ultrasonic horn 11 is moved to the position just above the horn pressing pipe 25 as indicated by the arrow by the moving mechanism while slowly rotating the bit 26, and the bit 26 is fitted in the hexagonal hole of the capillary fastening screw 14.
- the horn pressing pipe 25 is moved upward as indicated by an arrow together with the first end portion 17a of the path tube 17 using an air cylinder, and the capillary 13 is moved toward the horn pressing pipe 25 as shown in FIG. Alternatively, it is inserted into the first end 17a and completely wrapped.
- the ultrasonic horn 11 is fixed directly above the horn pressing pipe 25 and the horn pressing pipe 25 is moved upward.
- the horn pressing pipe 25 is fixed and the ultrasonic horn 11 is moved downward. It may be moved to.
- a flexible tube is used as the path tube 17, even if the horn pressing pipe 25 is moved up and down, the path tube 17 can be moved up and down with a small force only by slightly changing the bending angle of the path tube 17.
- the bit 26 and the screw tightening unit 27 may be fixed and installed at a position that does not interfere with the bonding operation, or may be installed so as to be moved left and right by a moving mechanism.
- the bit 26 is turned to loosen the capillary tightening screw 14.
- the capillary 13 also referred to as the first capillary
- the tube 17 sucks from the first end 17a through the second end 17b to the second end 22b of the capillary push-out pipe 22 (see FIG. 2). This is because the inner diameter of the capillary extrusion pipe 22 is smaller than the outer diameter of the capillary 13.
- the capillary push-out pipe 22 and the gas injection / suction tube 24 with the capillary 13 being sucked are moved by the air cylinder 23 as shown by the arrows, so that the capillary 13 and the capillary 13
- the extrusion pipe 22 is moved to the outside of the capillary cartridge 21.
- the capillary 13 in the capillary cartridge 21 falls down, the replacement capillary 13 is set on the table 20, and the used capillary 13 is discharged to the outside of the capillary cartridge 21.
- 5A to 5D are diagrams illustrating a method for attaching a replacement capillary to an ultrasonic horn according to one embodiment of the present invention.
- the capillary push-out pipe 22 and the gas injection / suction tube 24 are moved by the air cylinder 23 as shown by the arrows, so that the capillary push-out pipe 22 pushes the capillary 13 on the table 20, and the path The capillary 13 is inserted into the second end 17 b of the tube 17.
- the stopper 19 integrated with the ultrasonic horn 11 is provided on the upper surface of the ultrasonic horn 11, but as shown in FIG. 7 (B).
- the impact detection sensor 37 may be provided on the upper surface of the ultrasonic horn 11.
- the capillary 13 is rotated with a stable gripping force by turning the bit 26 as shown by the arrow in the screw tightening unit 27 and tightening the capillary tightening screw 14 with a specified torque.
- the ultrasonic horn 11 is fixedly attached to the capillary attachment hole.
- the horn pressing pipe 25 is moved downward as indicated by an arrow together with the first end portion 17a of the path tube 17 using an air cylinder, and the ultrasonic horn 11 is moved. To move away from the bit 26 as shown by the arrow. In this way, the operation of attaching the capillary 13 to the ultrasonic horn 11 is completed.
- the capillary 13 can be inserted into the capillary mounting hole of the ultrasonic horn 11 without using a human hand.
- the path tube 17 by using a flexible material for the path tube 17, the path can be changed freely to some extent, and the installation location is not troubled. Further, the capillary 13 can be stably and quickly completed without the capillary 13 falling.
- the capillary 13 is inserted into the capillary mounting hole of the ultrasonic horn 11 by blowing air from the gas jet / suction tube 24, the force applied to the ultrasonic horn 11 is small, and the ultrasonic horn 11 is deformed. Can be prevented.
- the capillary 13 reaches the ultrasonic horn 11 through the path tube 17, it is not necessary to sandwich the capillary 13 with tweezers as in the prior art, and the capillary 13 is not dropped.
- the screw tightening unit 27 rotates the capillary tightening screw 14 at a constant torque at the same angle as the bit angle and speed, the variation in the tightening force can be reduced. Since the capillary 13 can be automatically exchanged without using human hands, the amount of work for the operator is reduced, and the time for capillary exchange work can be shortened.
- the capillary 13 is inserted into the capillary mounting hole 12 of the ultrasonic horn 11, and the capillary 13 is fixed by the capillary tightening screw 14.
- the fixing method is not limited to this, and other fixing methods may be used.
- the capillary 13 may be sandwiched and fixed.
- FIG. 6A to 6C are diagrams illustrating a method of removing a used capillary from an ultrasonic horn according to one embodiment of the present invention. The same parts as those in FIG. Only the part will be described.
- the horn pressing pipe 25 is fixedly installed in the bonding apparatus.
- the capillary mounting hole of the ultrasonic horn 11 and the first end 17 a of the path tube 17 are aligned.
- the ultrasonic horn 11 is moved to a position just above the horn pressing pipe 25 by the moving mechanism.
- the tip of the ultrasonic horn 11 is moved downward as indicated by an arrow, and the capillary 13 is inserted into the horn pressing pipe 25 or the first end 17a.
- the screw tightening unit is moved as indicated by an arrow (in the X direction), the bit 26 is inserted into the hexagonal hole of the capillary tightening screw, and the bit 26 is turned to turn the capillary. Loosen the tightening screw. Thereby, the gripping of the capillary 13 in the capillary mounting hole of the ultrasonic horn 11 is released. The subsequent operation of removing the capillary 13 from the ultrasonic horn 11 is the same as in the first embodiment.
- the operation of attaching the replacement capillary to the ultrasonic horn 11 may be performed in the reverse of the operations shown in FIGS. 6A to 6C, and other operations are the same as those in the first embodiment. It is.
- FIG. 8A to 8D are cross-sectional views illustrating a capillary cartridge of a capillary replacement unit according to an aspect of the present invention.
- the same parts as those in FIG. 2 are denoted by the same reference numerals and only different parts will be described. .
- the capillary cartridge 121 has a space, one end of which is connected to the second end 17b of the path tube 17 shown in FIG. 2, and the other end of the space is a gas injection / suction tube shown in FIG. 24 is connected.
- the capillaries 13 are stacked one above the other, and a slide plate 39 holding the capillary filled in the bottom of the space is attached to the capillary cartridge 121.
- a slide plate 38 holding a capillary filled up one is attached to the capillary cartridge 121.
- the capillary 13 is filled on the slide plate 39 of the capillary cartridge 121 as shown in FIG.
- the slide plate 38 is moved as indicated by an arrow, and the capillary 13 on one of the capillaries 13 on the slide plate 39 is positioned on the slide plate 38.
- gas air
- the capillary 13 between the slide plate 39 and the slide 38 passes from the second end 17b of the path tube 17 through the first end 17a. It is conveyed to the capillary mounting hole of the ultrasonic horn 11.
- the subsequent operation is the same as that of the first embodiment.
- the capillary 13 When removing the used capillary from the ultrasonic horn, the same operation as in the first embodiment is performed, and when the gas (air) is sucked from the gas injection / suction tube 24, the capillary 13 is attached to the ultrasonic horn 11. It moves out of the hole and is located between the slide plate 39 and the slide 38 through the second end 17b from the first end 17a of the path tube 17 (see FIG. 8B). Next, as shown in FIG. 8C, the capillary 13 falls by moving the slide plate 39 as shown by the arrow. In this way, the used capillary 13 is discharged.
- the capillary 39 is filled on the slide 39 by moving the slide 39 and the slide 38 as shown by arrows.
- FIG. 9A to 9D are cross-sectional views illustrating the capillary cartridge of the capillary replacement unit according to one aspect of the present invention.
- the same parts as those in FIG. 2 are denoted by the same reference numerals, and only different parts will be described. .
- the capillary cartridge 122 has a space, and one end of the space is connected to the second end 17b of the path tube 17 shown in FIG. 2, and the other end of the space is a gas injection / suction tube shown in FIG. 24 is connected.
- the capillaries 13 are stacked one above the other in the space of the capillary cartridge 122, and a holding member 40 that holds the capillary filled in the bottom of the space is attached to the capillary cartridge 122.
- the capillary 13 is filled in the holding member 40 of the capillary cartridge 122 as shown in FIG.
- the holding member 40 is rotated as shown by an arrow to separate the capillary 13 held by the holding member 40 and the capillary 13 thereon.
- gas air
- the capillary 13 between the slide plate 39 and the slide 38 passes from the second end 17b of the path tube 17 through the first end 17a. It is conveyed to the capillary mounting hole of the ultrasonic horn 11.
- the subsequent operation is the same as that of the first embodiment.
- the capillary 13 When removing the used capillary from the ultrasonic horn, the same operation as in the first embodiment is performed, and when the gas (air) is sucked from the gas injection / suction tube 24, the capillary 13 is attached to the ultrasonic horn 11. It is removed from the hole and is held by the holding member 40 of the capillary cartridge 122 from the first end 17a of the path tube 17 through the second end 17b (see FIG. 9B). Next, as shown in FIG. 9C, the capillary 13 is dropped by rotating the holding member 40 as shown by the arrow. In this way, the used capillary 13 is discharged.
- the holding member 40 is rotated as shown by an arrow to fill the holding member 40 with the capillary 13.
- FIG. 10A to 10D are cross-sectional views illustrating a capillary cartridge of a capillary replacement unit according to an aspect of the present invention.
- the same reference numerals are given to the same parts as in FIG. 2, and only different parts will be described. .
- the capillary cartridge 123 has a space, and one end of the space is connected to the second end 17b of the path tube 17 shown in FIG. 2, and the other end of the space is a gas injection / suction tube shown in FIG. 24 is connected.
- the capillaries 13 are stacked one above the other, and a holding base 41 for holding the capillary filled in the bottom of the space is attached to the capillary cartridge 123.
- a slide plate 42 is attached to the capillary cartridge 123 on the holding table 41.
- a member 41a is attached to one end of the holding table 41 by a return mechanism 41c such as a spring hinge.
- the return mechanism 41c fixes the member 41a at the position shown in FIG. 10A when no force is applied to the member 41a, and the force in the direction of the arrow shown in FIG.
- the member 41a rotates 90 ° when applied by 42, and returns to the position shown in FIG. 10D when the force is not applied.
- the slide plate 42 When the replacement capillary is attached to the ultrasonic horn, as shown in FIG. 10 (A), the slide plate 42 is not placed below the space of the capillary cartridge 123 in which the capillaries 13 are stacked. The capillary 13 is filled on the table 41. Next, as shown in FIG. 10B, the slide plate 42 is moved as shown by the arrow, and the filled capillary 13 is arranged at a predetermined position. Next, when gas (air) is ejected from the gas ejection / suction tube 24, the capillary 13 between the slide plate 42 and the member 41a passes from the second end 17b of the path tube 17 through the first end 17a. It is conveyed to the capillary mounting hole of the ultrasonic horn 11. The subsequent operation is the same as that of the first embodiment.
- the capillary 13 When removing the used capillary from the ultrasonic horn, the same operation as in the first embodiment is performed, and when the gas (air) is sucked from the gas injection / suction tube 24, the capillary 13 is attached to the ultrasonic horn 11. It deviates from the hole, and is positioned between the slide plate 42 and the member 41a through the second end 17b from the first end 17a of the path tube 17 (see FIG. 10B). Next, as shown in FIG. 10C, the capillary 13 falls by moving the slide plate 42 as shown by the arrow. In this way, the used capillary 13 is discharged.
- the capillary plate 13 is filled into the holding table 41 by moving the slide plate 42 as shown by the arrow.
- the member 41a returns to the original position by the spring force of the return mechanism 41c.
- FIGS. 11A and 11B are cross-sectional views showing a path tube of a capillary exchange device according to one embodiment of the present invention. The same parts as those in FIGS. Only explained.
- the path tube 46 includes a discharge tube 46a having a first path for transporting the replacement capillary and an injection tube 46b having a second path for transporting the replacement capillary.
- the path tube 46 has a third path 45 where the first path and the second path merge.
- a horn pressing pipe (also referred to as a block) (not shown) is disposed at the end of the third path 45 of the path tube 46.
- the capillary exchange device also has a movement mechanism (also referred to as a first movement mechanism) (not shown) that moves the end of the third path 45 of the path tube 46.
- a movement mechanism also referred to as a first movement mechanism
- the used capillary can be inserted into the end of the horn pressing pipe or the third path 45 of the path tube 46.
- the end of the third path 45 of the path tube 46 is pressed against the ultrasonic horn 11 when the horn pressing pipe is pressed against the ultrasonic horn 11. In comparison, the horn pressing pipe can be prevented from being deformed.
- a gas is blown into the discharge tube 46a in the same manner as in the first embodiment.
- the capillary (also referred to as the first capillary) is attached to the ultrasonic horn 11 by loosening the capillary fastening screw.
- the capillary is discharged from the hole through the third path 45 of the path tube 46 and the discharge tube 46a.
- FIGS. 3 to 5 are schematic views showing a path tube and a screw tightening unit of the capillary exchange device according to one aspect of the present invention, and the same parts as those in FIGS. 3 to 5 are denoted by the same reference numerals. Only the different parts will be described.
- the path tube has a discharge tube 47 (also referred to as a fourth tube) for transporting the used capillary 13 and an injection tube 48 (also referred to as a first tube) for transporting the replacement capillary.
- a discharge tube 47 also referred to as a fourth tube
- an injection tube 48 also referred to as a first tube
- a horn pressing pipe 49 (also referred to as a block) is disposed at the first end of the discharge tube 47.
- a horn pressing pipe 50 (also referred to as a block) is disposed at the first end of the injection tube 48.
- the capillary exchange device has a movement mechanism (also referred to as a first movement mechanism) (not shown) that moves the first end portion of the discharge tube 47 and the first end portion of the ejection tube 48. . By moving the first end portion of the discharge tube 47 and the first end portion of the ejection tube 48 by this moving mechanism, the used capillary 13 is pressed against the horn pressing pipe 49 or the first tube of the discharge tube 47. Can be inserted at the end.
- the discharge tube 47 and the injection tube 48 are pressed when the horn pressing pipes 49 and 50 are pressed against the ultrasonic horn 11. It is possible to suppress the horn pressing pipes 49 and 50 from being deformed as compared with the case where each first end is pressed against the ultrasonic horn 11.
- the ultrasonic horn 11 is moved by a moving mechanism, whereby the used capillary 13 is discharged from the horn pressing pipe 49 or the discharge tube 47. You may insert in the 1st edge part of the tube 47 for work.
- the discharge tube 47 sucks gas from the second end in the same manner as in the first embodiment, and the injection tube 48 is in the second end in the same manner as in the first embodiment. Gas is blown into the part.
- the horn pressing pipe 49 When removing the used capillary 13 from the ultrasonic horn 11, as shown in FIG. 12 (A), the horn pressing pipe 49 is aligned with the capillary 13 and the capillary tightening screw is loosened. As shown in FIG. 12 (B), the ultrasonic horn 11 is removed from the capillary mounting hole and the gas (air) is sucked from the second end of the discharge tube 47 by the gas jet / suction tube. Thus, the capillary is discharged through the discharge tube 47.
- the capillary 13 is discharged by sucking the gas from the second end of the discharge tube 47.
- the capillary 13 may be freely dropped by gravity without being sucked.
- the ultrasonic horn 11 When the replacement capillary is attached to the ultrasonic horn 11, as shown in FIG. 11C, the ultrasonic horn 11 is placed on the first end of the injection tube 48 or the horn pressing pipe 50 by a moving mechanism. When moved as indicated by the arrow and gas (air) is injected from the gas injection / suction tube, air is blown into the second end of the injection tube 48, and as shown in FIG. As indicated by the arrow, the ink is conveyed to the capillary mounting hole of the ultrasonic horn 11 through the ejection tube 48.
- gas air
- FIG. 13 is a cross-sectional view showing a path tube of a capillary exchange device according to an aspect of the present invention. The same parts as those in FIGS.
- the path tube 53 includes a first tube 51 having a first path for transporting the replacement capillary and a second tube 52 having a second path connected to the first path.
- the first end of the first tube 51 is connected to the first end of the L-shaped third tube 54.
- the third tube 54 is L-shaped.
- the third tube 54 that can be connected to the path tube 53 may not be L-shaped.
- the 1st tube 51 and the 2nd tube 52 should just be connected so that a capillary can pass.
- a horn pressing pipe (not shown) is disposed at the second end of the first tube 51 of the path tube 53.
- the capillary exchange device has a movement mechanism (not shown) that moves the first end of the first tube 51 of the path tube 53. By moving the first end of the first tube 51 by this moving mechanism, it can be aligned with the capillary mounting hole of the ultrasonic horn 11.
- the first end of the first tube 51 of the path tube 53 is not moved, but the ultrasonic horn 11 is moved by the moving mechanism, so that the horn pressing pipe or the first tube 51 of the first tube 51 is moved.
- the end portion may be aligned with the capillary mounting hole of the ultrasonic horn 11.
- the gas (air) is blown into the second tube 52 in the same manner as in the first embodiment.
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Abstract
Description
まず、超音波ホーンのキャピラリ取付穴にキャピラリ締付用ネジによって取り付けられている使用済みのキャピラリを取り外す。詳細には、オペレータがキャピラリをピンセットで掴み、ビットの付いたトルクドライバでキャピラリ締付用ネジの締め付けを緩め、使用済みのキャピラリを超音波ホーンのキャピラリ取付穴から取り外す。
[1]キャピラリを搬送する第1の管と、前記キャピラリを取り付ける取付部を有する超音波ホーンと、前記超音波ホーンと前記第1の管の第1の端部を相対移動させる第1の移動機構と、前記第1の管の第2の端部に気体を吹き込む機構と、
を具備することを特徴とするキャピラリ搬送装置。
図1は、本発明の一態様に係るワイヤボンディング装置を示す模式図である。図7(A)は、図1に示す超音波ホーンの先端側を拡大した斜視図である。
図6(A)~(C)は、本発明の一態様に係る超音波ホーンから使用済のキャピラリを取り外す方法を説明する図であり、図4と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図8(A)~(D)は、本発明の一態様に係るキャピラリ入れ替えユニットのキャピラリカートリッジを示す断面図であり、図2と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図9(A)~(D)は、本発明の一態様に係るキャピラリ入れ替えユニットのキャピラリカートリッジを示す断面図であり、図2と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図10(A)~(D)は、本発明の一態様に係るキャピラリ入れ替えユニットのキャピラリカートリッジを示す断面図であり、図2と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図11(A),(B)は、本発明の一態様に係るキャピラリ交換装置の経路チューブを示す断面図であり、図3~図5と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図12(A)~(D)は、本発明の一態様に係るキャピラリ交換装置の経路チューブ及びネジ締付ユニットを示す模式図であり、図3~図5と同一部分には同一符号を付し、異なる部分についてのみ説明する。
図13は、本発明の一態様に係るキャピラリ交換装置の経路チューブを示す断面図であり、図3~図5と同一部分には同一符号を付し、異なる部分についてのみ説明する。
12…キャピラリ取付穴(取付部)
13…キャピラリ
14…キャピラリ締付用ネジ
15…キャリア
16…キャリアカバー
17…経路チューブ
17a…第1の端部
17b…第2の端部
18…キャピラリ入れ替えユニット
19…ストッパー
20…台
21…キャピラリカートリッジ
22…キャピラリ押し出しパイプ
22a…第1の端部
22b…第2の端部
23…エアシリンダ
24…気体噴射・吸引チューブ
25…ホーン押し付けパイプ(ブロック)
26…ビット
27…ネジ締付ユニット
37…衝撃感知センサー
38,39,42…スライド板
40…保持部材
41…保持台
43,44…矢印
45…第3の経路
46…経路チューブ
46a,47…排出用チューブ
46b,48…噴射用チューブ
49,50…ホーン押し付けパイプ(ブロック)
51…第1のチューブ
52…第2のチューブ
53…経路チューブ
54…第3のチューブ
121,122,123…キャピラリカートリッジ
Claims (10)
- キャピラリを搬送する第1の管と、
前記キャピラリを取り付ける取付部を有する超音波ホーンと、
前記超音波ホーンと前記第1の管の第1の端部を相対移動させる第1の移動機構と、
前記第1の管の第2の端部に気体を吹き込む機構と、
を具備することを特徴とするキャピラリ搬送装置。 - 請求項1において、
前記気体を吹き込む機構は、前記キャピラリを前記第1の管の第2の端部に押し込む第2の管と、前記第2の管を移動させる第2の移動機構を有することを特徴とするキャピラリ搬送装置。 - 請求項2において、
前記第1の管の第1の端部に配置され、前記第1の管より硬い材質からなるブロックを有することを特徴とするキャピラリ搬送装置。 - 請求項1乃至3のいずれか一項に記載のキャピラリ搬送装置と、
前記取付部に前記キャピラリを固定する機構と、
を具備することを特徴とするキャピラリ取り付け装置。 - 請求項4に記載のキャピラリ取り付け装置と、
前記取付部に固定された前記キャピラリを取り外す機構と、
前記第1の管の第2の端部から気体を吸引する機構と、
を具備することを特徴とするキャピラリ交換装置。 - 第1のキャピラリを搬送する第4の管と、
第2のキャピラリを搬送する第1の管と、
前記第1または第2のキャピラリを取り付ける取付部を有する超音波ホーンと、
前記超音波ホーンと、前記第1の管の第1の端部及び前記第4の管の第1の端部を相対移動させる第1の移動機構と、
前記第1の管の第2の端部に気体を吹き込む機構と、
前記第4の管の第2の端部から気体を吸引する機構と、
前記取付部に固定された前記第1のキャピラリを取り外す機構と、
前記取付部に前記第2のキャピラリを固定する機構と、
を具備することを特徴とするキャピラリ交換装置。 - 第1のキャピラリを搬送する第1の経路、第2のキャピラリを搬送する第2の経路及び前記第1の経路と前記第2の経路が合流する第3の経路を有する第1の管と、
前記第1または第2のキャピラリを取り付ける取付部を有する超音波ホーンと、
前記超音波ホーンと前記第1の管の前記第3の経路の端部を相対移動させる第1の移動機構と、
前記第1の管の第2の経路の端部に気体を吹き込む機構と、
前記取付部に固定された前記第1のキャピラリを取り外す機構と、
前記取付部に前記第2のキャピラリを固定する機構と、
を具備することを特徴とするキャピラリ交換装置。 - 超音波ホーンと第1の管の第1の端部を相対移動させることで、前記超音波ホーンの取付部と前記第1の管の第1の端部を位置合わせし、
前記第1の管の第2の端部からキャピラリを前記第1の管内に挿入し、
前記第1の管の第2の端部に気体を吹き込むことで、前記キャピラリを前記第1の管の第2の端部から前記第1の端部を通って前記超音波ホーンの取付部に搬送することを特徴とするキャピラリ搬送方法。 - 請求項8に記載のキャピラリ搬送方法によって前記キャピラリを前記超音波ホーンの取付部に搬送し、
前記取付部に前記キャピラリを固定することを特徴とするキャピラリ取り付け方法。 - 取付部に固定された第1のキャピラリを有する超音波ホーンと第1の管の第1の端部を相対移動させることで、前記第1のキャピラリを前記第1の管の第1の端部に挿入し、
前記取付部に固定された前記第1のキャピラリを前記超音波ホーンから取り外し、
前記第1の管の第2の端部から気体を吸引することで前記第1のキャピラリを前記第1の管の第1の端部から前記第2の端部に搬送し、前記第1の管から前記第1のキャピラリを排出し、
前記第1の管の第2の端部から第2のキャピラリを前記第1の管内に挿入し、
前記第1の管の第2の端部に気体を吹き込むことで、前記第2のキャピラリを前記第1の管の第2の端部から前記第1の端部を通って前記超音波ホーンの前記取付部に搬送し、
前記取付部に前記第2のキャピラリを固定することを特徴とするキャピラリ交換方法。
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KR1020177028615A KR102000953B1 (ko) | 2015-12-17 | 2016-10-06 | 모세관 반송 장치, 모세관 장착 장치, 모세관 교환 장치, 모세관 반송 방법, 모세관 장착 방법 및 모세관 교환 방법 |
US15/566,021 US10529684B2 (en) | 2015-12-17 | 2016-10-06 | Capillary transport device, capillary mounting device, capillary replacement device, capillary transport method, capillary mounting method, and capillary replacement method |
CN201680023498.0A CN107533989B (zh) | 2015-12-17 | 2016-10-06 | 毛细管输送装置、安装装置及更换装置 |
US16/693,966 US11127709B2 (en) | 2015-12-17 | 2019-11-25 | Capillary transport device, capillary mounting device, capillary replacement device, capillary transport method, capillary mounting method, and capillary replacement method |
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US16/693,966 Division US11127709B2 (en) | 2015-12-17 | 2019-11-25 | Capillary transport device, capillary mounting device, capillary replacement device, capillary transport method, capillary mounting method, and capillary replacement method |
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US11205634B2 (en) * | 2018-07-16 | 2021-12-21 | Asm Technology Singapore Pte Ltd | Bonding apparatus with replaceable bonding tool |
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US20200091107A1 (en) | 2020-03-19 |
TW201724426A (zh) | 2017-07-01 |
KR102000953B1 (ko) | 2019-07-17 |
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JP6093429B1 (ja) | 2017-03-08 |
KR20170133379A (ko) | 2017-12-05 |
JP2017112260A (ja) | 2017-06-22 |
US10529684B2 (en) | 2020-01-07 |
US11127709B2 (en) | 2021-09-21 |
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US20180315732A1 (en) | 2018-11-01 |
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