WO2017033633A1 - 樹脂組成物、感光性樹脂組成物、樹脂膜および電子装置 - Google Patents
樹脂組成物、感光性樹脂組成物、樹脂膜および電子装置 Download PDFInfo
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- WO2017033633A1 WO2017033633A1 PCT/JP2016/071401 JP2016071401W WO2017033633A1 WO 2017033633 A1 WO2017033633 A1 WO 2017033633A1 JP 2016071401 W JP2016071401 W JP 2016071401W WO 2017033633 A1 WO2017033633 A1 WO 2017033633A1
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- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000012991 xanthate Substances 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G81/00—Macromolecular compounds obtained by interreacting polymers in the absence of monomers, e.g. block polymers
- C08G81/02—Macromolecular compounds obtained by interreacting polymers in the absence of monomers, e.g. block polymers at least one of the polymers being obtained by reactions involving only carbon-to-carbon unsaturated bonds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
- C08L25/02—Homopolymers or copolymers of hydrocarbons
- C08L25/04—Homopolymers or copolymers of styrene
- C08L25/08—Copolymers of styrene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L35/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least one other carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L45/00—Compositions of homopolymers or copolymers of compounds having no unsaturated aliphatic radicals in side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic or in a heterocyclic ring system; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
- C08L61/14—Modified phenol-aldehyde condensates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Definitions
- Mw weight average molecular weight
- Mn number average molecular weight
- Mw / Mn molecular weight distribution
- a polystyrene conversion value obtained from a standard polystyrene (PS) calibration curve obtained by GPC measurement is used.
- the measurement conditions are, for example, as follows.
- Tosoh gel permeation chromatography device HLC-8320GPC Column: Tosoh TSK-GEL Supermultipore HZ-M Detector: RI detector for liquid chromatogram Measurement temperature: 40 ° C
- Solvent THF Sample concentration: 2.0 mg / milliliter
- the amount of low molecular weight components in the polymer is based on the data on the molecular weight obtained by GPC measurement, for example. It is calculated from the ratio.
- hydroxy compounds such as sodium hydroxide and potassium hydroxide, alkylamines such as pyridine and triethylamine, amine compounds such as dimethylaniline, urotropine and dimethylaminopyridine, metal salts such as sodium acetate, ammonia and the like are used. be able to. These may be used alone or in combination of two or more kinds of base catalysts in order to further increase the reactivity.
- acid catalyst mineral acids such as sulfuric acid and hydrochloric acid, organic acids such as p-toluenesulfonic acid, Lewis acids such as boron fluoride etherate, and the like can be used.
- an unsaturated carboxylic acid anhydride having a cyclic structure in another molecule may be used.
- the resin composition of this embodiment comprises an ester compound in which the acid anhydride portion of the polymer containing the repeating unit represented by the above formula (1) and the phenolic hydroxyl group provided in the phenol resin constitute an ester bond. It may be included.
- all of the acid anhydride (eg, maleic anhydride) of the polymer may be ring-opened and / or the phenolic hydroxyl group provided in the phenol resin. All may have an ester bond. Thereby, heat resistance can be improved further.
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Phenolic Resins Or Amino Resins (AREA)
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CN201680048062.7A CN107922708A (zh) | 2015-08-21 | 2016-07-21 | 树脂组合物、感光性树脂组合物、树脂膜和电子装置 |
KR1020187007447A KR101927037B1 (ko) | 2015-08-21 | 2016-07-21 | 수지 조성물, 감광성 수지 조성물, 수지막 및 전자 장치 |
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JP (3) | JP6354802B2 (enrdf_load_stackoverflow) |
KR (1) | KR101927037B1 (enrdf_load_stackoverflow) |
CN (1) | CN107922708A (enrdf_load_stackoverflow) |
TW (1) | TWI694098B (enrdf_load_stackoverflow) |
WO (1) | WO2017033633A1 (enrdf_load_stackoverflow) |
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WO2018061584A1 (ja) * | 2016-09-28 | 2018-04-05 | 住友ベークライト株式会社 | 摩擦材用フェノール樹脂組成物および摩擦材 |
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JP7088640B2 (ja) * | 2017-08-01 | 2022-06-21 | 旭化成株式会社 | 半導体装置、及びその製造方法 |
JP7043756B2 (ja) * | 2017-08-31 | 2022-03-30 | 住友ベークライト株式会社 | 感光性樹脂組成物、パターン形成方法、電子デバイスの製造方法、ポリマーおよびポリマーの製造方法 |
JP7020018B2 (ja) * | 2017-09-15 | 2022-02-16 | 住友ベークライト株式会社 | ゴム組成物 |
JP6764885B2 (ja) * | 2018-01-11 | 2020-10-07 | Jfeケミカル株式会社 | 熱硬化性樹脂組成物およびその硬化物 |
JP6950573B2 (ja) * | 2018-02-26 | 2021-10-13 | Jnc株式会社 | 熱硬化性組成物 |
CN113811556B (zh) * | 2019-05-08 | 2024-05-28 | 住友电木株式会社 | 感光性树脂组合物、树脂膜和电子装置 |
CN110511532B (zh) * | 2019-09-25 | 2022-03-25 | 河南工业大学 | 一种马来酸酐-丙烯酸酯共聚物改性酚醛树脂 |
JP7559421B2 (ja) * | 2020-03-02 | 2024-10-02 | 住友ベークライト株式会社 | カラーフィルタまたはブラックマトリクス形成用ポリマー溶液 |
JP7173380B2 (ja) * | 2020-09-23 | 2022-11-16 | 住友ベークライト株式会社 | ポリマー、ポリマーの製造方法、ポリマー溶液および感光性樹脂組成物 |
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- 2016-07-21 JP JP2016143408A patent/JP6354802B2/ja active Active
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TW201718719A (zh) | 2017-06-01 |
CN107922708A (zh) | 2018-04-17 |
KR101927037B1 (ko) | 2018-12-07 |
JP6414352B2 (ja) | 2018-10-31 |
JP6354802B2 (ja) | 2018-07-11 |
KR20180031804A (ko) | 2018-03-28 |
TWI694098B (zh) | 2020-05-21 |
JP2017039909A (ja) | 2017-02-23 |
JP6468393B2 (ja) | 2019-02-13 |
JP2018172700A (ja) | 2018-11-08 |
JP2018109196A (ja) | 2018-07-12 |
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