WO2016165221A1 - 一种干燥装置及其干燥方法 - Google Patents

一种干燥装置及其干燥方法 Download PDF

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Publication number
WO2016165221A1
WO2016165221A1 PCT/CN2015/084216 CN2015084216W WO2016165221A1 WO 2016165221 A1 WO2016165221 A1 WO 2016165221A1 CN 2015084216 W CN2015084216 W CN 2015084216W WO 2016165221 A1 WO2016165221 A1 WO 2016165221A1
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Prior art keywords
dried
drying
film layer
opening
solvent
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PCT/CN2015/084216
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English (en)
French (fr)
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代青
刘则
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京东方科技集团股份有限公司
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Priority to US15/022,009 priority Critical patent/US10549551B2/en
Publication of WO2016165221A1 publication Critical patent/WO2016165221A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • F26B25/14—Chambers, containers, receptacles of simple construction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour

Definitions

  • the present invention relates to the field of display technology, and in particular to a drying device and a drying method thereof.
  • an organic functional layer film is usually formed by a method such as inkjet printing, and when a liquid crystal (LCD) display device is prepared, a color film structure is usually formed by a method such as inkjet printing.
  • LCD liquid crystal
  • a common feature of various wet processes that include ink jet printing to form a film is that the excess solvent in the film layer needs to be removed by a subsequent drying process. This process of removing the solvent to form a dried film affects the uniformity of the formed film. For an optoelectronic display device, the uniformity of the film formed after drying has a large influence on the life and display effect of the display device.
  • Fig. 1 schematically shows a plan view of a display substrate including a dried film.
  • the solvent ink containing the organic functional material is printed on the display region 41 of the display substrate 4, the solvent needs to be naturally volatilized under normal pressure or the solvent is removed under normal pressure.
  • the solvent ink printed on the display area 41 is dispersed in the pixel area as a small ink droplet, and has a large surface area, so that the natural evaporation rate of the solvent ink is fast.
  • the portion of the solvent ink that is in the portion of the edge region 411 of the display region 41 and that is in the central region 412 of the display region 41 has a faster rate of natural evaporation.
  • FIG. 2 is a cross-sectional view of the display substrate 4 of FIG. 1 along a cutting line 5.
  • the pixel separation structure 42 and the dried organic film 43 are shown in FIG. It can be seen that at the pixel region of the edge region 411 of the display region, since the natural evaporation rate of the solvent is faster, the film formed after drying is uneven (coffee ring effect), and in the central region far from the edge region 411. At 412, the film formed after drying has good uniformity.
  • solvent characteristics composition ratio and vapor pressure, etc.
  • material of the pixel separation structure 42 equipment for performing a drying process, and the like.
  • a non-uniform film causes the display device to illuminate to form a concentric display defect extending from the center to the periphery as shown in FIG.
  • the solvent in the film formed by the wet process is usually removed in a vacuum furnace at a pressure lower than normal pressure.
  • the suction port of the vacuum equipment is usually placed at the corner of the furnace, so that during the vacuum pumping process, the distribution of the airflow is easily uneven, and the difference in the solvent evaporation rate in different regions of the membrane is relative to the natural volatile drying. In the case of a change, the unevenness of the film formed after drying also changes.
  • the present invention is directed to the above technical problems existing in the prior art, and provides a drying device and a method of performing a drying process.
  • the drying device can make the film to be dried have substantially the same volatilization rate in the solvent in different regions during the drying process, so that the film to be dried is dried to form a uniform film layer, thereby improving the layer containing the dried film. Display device life and display.
  • a drying apparatus comprising a drying section and a carrying portion.
  • the carrier portion is for carrying a substrate on which a film layer to be dried is formed.
  • the drying section is arranged to dry the film layer to be dried with the film layer to be dried.
  • the drying section may include a suction hood, a partition, and a suction mechanism.
  • the hood includes a first opening disposed toward the film layer to be dried and a second opening disposed away from the film layer to be dried.
  • the air hood is connected to the air suction mechanism through the second opening.
  • the partition is provided with a plurality of holes and covers the first opening of the air hood.
  • the pumping mechanism is used for pumping.
  • the air hood may have a hollow taper, the area of the second opening is smaller than the area of the first opening, and the orthographic projection of the second opening on the partition falls in a central region of the partition.
  • the separator may have a shape and a size corresponding to the film layer to be dried, and the separator may be disposed to be parallel to the film layer to be dried.
  • the partition may be divided into a plurality of regions and disposed at The plurality of holes in the partition may have the same size and shape.
  • the density of the pores in each of the plurality of regions is inversely proportional to the natural air drying rate of the corresponding region of the film layer to be dried.
  • the partition may be divided into a plurality of regions, and the plurality of holes provided on the partition may have the same shape and different sizes.
  • the size of the pores in each of the plurality of regions is inversely proportional to the natural air drying rate of the corresponding region of the film layer to be dried.
  • the plurality of holes provided on the separator may have the same size and shape and be evenly distributed on the separator.
  • the partition may also be provided with a plug corresponding to each of the plurality of holes, respectively, which is blocked when the plug is inserted into the hole.
  • the drying section may further include a solvent addition mechanism disposed at a periphery of the first opening for adding a solvent used to form a film layer to be dried to an edge region of the film layer to be dried, and the solvent It is in a volatile state.
  • the solvent addition mechanism may include a solvent tank and a volatile structure.
  • the solvent tank is used to hold the non-volatile solvent.
  • the volatilization structure is for volatilizing the solvent in the solvent tank to form a solvent in a volatilized state, and adding a solvent in a volatilized state to the edge region of the film layer to be dried.
  • the carrier portion may include a carrier and a fence disposed at an edge of the carrier.
  • the carrier is used to carry a substrate on which the film layer to be dried is formed, and the height of the fence is greater than the height of the upper surface of the film layer to be dried.
  • the distance from the top of the fence to the upper surface of the film layer to be dried may be greater than 10 cm.
  • the carrier may have the same shape as the first opening, and the area of the carrier is larger than the area of the first opening.
  • a drying treatment method using a drying apparatus comprising the steps of: placing a substrate on which a film layer to be dried is formed on a carrying portion of a drying device; and adjusting a drying portion of the drying device to The dried film layer is treated as it is; and the dried film layer is dried by the drying portion of the drying device.
  • the drying section may include a suction hood, a partition, and a suction mechanism.
  • the hood includes a first opening disposed toward the film layer to be dried and a second opening disposed away from the film layer to be dried.
  • the air hood is connected to the air suction mechanism through the second opening.
  • Set on the partition There are a plurality of holes and are overlaid on the first opening of the hood.
  • the pumping mechanism is used for pumping.
  • the carrier portion may include a carrier and a fence disposed at an edge of the carrier. The carrier is used to carry a substrate on which the film layer to be dried is formed, and the height of the fence is greater than the height of the upper surface of the film layer to be dried.
  • the step of adjusting the drying portion of the drying device to face the dried film layer may include: lowering the suction hood of the drying portion or lifting the carrier of the bearing portion such that the lower edge of the first opening of the air hood is lower than The top of the fence of the carrier portion is described, and the distance between the lower surface of the separator and the upper surface of the film layer to be dried is in the range of 1 mm to 10 cm.
  • the film to be dried has substantially the same volatilization rate in the solvent in different regions during the drying process, so that the film to be dried is dried to form a uniform film layer. Further, the life and display effect of the display device including the dried film layer are improved.
  • FIG. 1 is a plan view schematically showing a display substrate including a dried film in the prior art
  • Figure 2 is a cross-sectional view of the display substrate of Figure 1 along a cutting line 5;
  • FIG. 3 is a schematic structural view of a drying device according to an embodiment of the present invention.
  • Figure 4 is a schematic structural view of the partition plate of Figure 3;
  • Fig. 5 is a schematic cross-sectional view of the drying section of Fig. 3.
  • FIG. 3 is a schematic structural view of a drying apparatus according to an embodiment of the present invention.
  • the drying device includes a drying section 1 for carrying a substrate on which a film layer 3 to be dried is formed, and a carrying portion 2. Drying section 1 The dried film layer 3 is treated to be dried to dry the film layer 3 to be dried.
  • the drying section 1 includes a suction hood 11, a partition 12, and a suction mechanism (not shown).
  • the suction hood 11 includes a first opening 111 disposed facing the film layer 3 to be dried and a second opening 112 disposed away from the film layer 3 to be dried.
  • the suction hood 11 is connected to the suction mechanism through the second opening 112.
  • the partition 12 is provided with a plurality of holes 121 and covers the first opening 111 of the air suction hood 11.
  • the pumping mechanism is used for pumping. That is, the drying section 1 volatilizes the solvent in the film layer 3 to be dried by pumping air from the surface of the film layer 3 to be dried. This speeds up the evaporation rate of the solvent and increases efficiency.
  • the suction hood 11 may have a hollow cone shape, the area of the second opening 112 is smaller than the area of the first opening 111, and the orthographic projection of the second opening 112 on the partition 12 falls in the central area of the partition 12. That is, the second opening 112 is directly above the first opening 111.
  • This arrangement enables the airflow from the first opening 111 to the second opening 112 to be uniform throughout the evacuation hood 11 during pumping, thereby making the hood 11 uniform in different areas of the surface of the film layer 3 to be dried.
  • the air is evacuated to ensure that the solvents in different regions of the surface of the film layer 3 to be dried have substantially the same evaporation rate.
  • the separator 12 may have a shape and size corresponding to the film layer 3 to be dried, and the separator 12 may be disposed to be parallel to the film layer 3 to be dried.
  • the partition 12 may be divided into a plurality of regions, and the plurality of holes 121 provided on the partition 12 may have the same size and shape.
  • the density of the holes in each of the plurality of regions is inversely proportional to the natural air drying rate of the corresponding region of the film layer 3 to be dried.
  • FIG. 4 is a schematic view showing the structure of the separator 12 of FIG. As shown in FIG. 4, the plurality of holes 121 are the same size and shape, and the density of the holes 121 in different regions of the separator 12 is inversely proportional to the natural air drying rate of the corresponding region of the film layer 3 to be dried.
  • the natural air drying rate refers to the evaporation rate of the solvent of the film layer to be dried in a natural environment. Since the natural air drying rates of the film layers 3 to be dried in different regions may be different from each other, the drying portion 1 can be made according to the natural air drying rate of different regions of the film layer 3 to be dried by controlling the density of the holes in the corresponding regions of the separator 12. Different degrees of pumping operations. In areas where the natural air drying rate is faster, a correspondingly smaller amount of pumping is provided, and in a region where the natural air drying rate is slower, a correspondingly larger amount of pumping is provided to make different regions of the layer 3 to be dried.
  • the solvent evaporation rate is substantially the same.
  • the partition 12 may be divided into a plurality of regions, and the plurality of holes 121 provided on the partition 12 may have the same shape and different sizes.
  • the size of the holes in each of the plurality of regions is inversely proportional to the natural air drying rate of the corresponding region of the film layer 3 to be dried.
  • the solvent evaporation rates in different regions are essentially the same.
  • the plurality of holes 121 provided on the partition 12 may have the same size and shape and be evenly distributed on the partition 12.
  • the partition plate 12 may further be provided with a plug (not shown) corresponding to each of the plurality of holes 121, and when the plug is inserted into the hole 121, the hole 121 is blocked.
  • the amount of pumping of different regions on the partition 12 can be adjusted by using a plug.
  • the partition 12 is detachably mounted on the first opening 111.
  • the separators 12 having different pore arrangements can be replaced as needed.
  • Fig. 5 is a schematic cross-sectional view of the drying section 1 of Fig. 3.
  • the drying section 1 may further include a solvent addition mechanism 13 disposed at the periphery of the first opening 111.
  • the solvent addition mechanism 13 is for adding a solvent used to form the film layer 3 to be dried to the edge region of the film layer 3 to be dried, and the solvent is in a volatilized state.
  • the solvent evaporation rate of the edge region of the film layer 3 to be dried is still higher than that of the film The central area is fast.
  • the solvent evaporation rate of the edge region and the central region of the film layer 3 to be dried can be substantially the same, thereby further ensuring formation after drying. Surface uniformity of the film layer.
  • the solvent addition mechanism 13 may include a solvent tank 131 and a wave Hair structure 132.
  • the solvent tank 131 is for containing a non-volatile solvent.
  • the volatile structure 132 serves to volatilize the solvent in the solvent tank 131 to form a solvent in a volatilized state, and to add a solvent in a volatilized state to the edge region of the film layer 3 to be dried.
  • the volatilization structure 132 may employ a grid-like guard rail and a gauze or a nonwoven fabric is disposed in the gas permeable grid hole of the guard rail.
  • a guard rail may serve as the bottom of the solvent tank 131 to support the solvent in the solvent tank 131.
  • the gauze or non-woven fabric disposed in the venting grid hole of the guardrail can only pass through the volatile solvent after evaporation. Therefore, the solvent in the solvent tank 131 is naturally volatilized, and after passing through the gauze or the nonwoven fabric, it spreads to the edge region of the film layer 3 to be dried, and a solvent atmosphere in a volatilized state is formed above the peripheral edge region of the film layer 3 to be dried.
  • the volatile structure 132 may be any device that can turn a non-volatile solvent into a solvent in a volatile state, for example, a humidifier. Additionally, the volatile structure 132 may also include only gauze or nonwoven fabric.
  • the carrier portion 2 may include a carrier 21 and a fence 22 disposed at the edge of the carrier 21.
  • the carrier 21 is used to carry a substrate on which the film layer 3 to be dried is formed, and the height of the fence 22 is greater than the height of the upper surface of the film layer 3 to be dried.
  • the distance from the top of the fence 22 to the upper surface of the film layer 3 to be dried may be greater than 10 cm.
  • the carrier 21 may have the same shape as the first opening 111, and the area of the carrier 21 may be larger than the area of the first opening 111 such that the first opening 111 is embedded in the fence 22.
  • the distance between the partition 12 and the film layer 3 to be dried can be reduced, and the edge of the partition 12 also sinks into the fence 22 to reduce the edge area of the film layer 3 to be dried.
  • the solvent in the volatilization to the external space is advantageous for adjusting the solvent evaporation rate of the edge region of the film layer 3 to be dried to be substantially the same as the solvent evaporation rate of the central region.
  • the substrate on which the film layer to be dried is formed is first placed on the carrying portion of the drying device, and then the drying portion of the drying device is adjusted to face the dried film layer, and then passed through The dried portion of the drying device is subjected to a drying treatment of the dried film layer.
  • the suction hood of the drying portion or the carrier plate of the lifting portion may be lowered to make the first opening of the suction hood
  • the edge of the portion is lower than the top of the fence of the load-bearing portion (ie, such that the first opening is embedded in the fence), and the distance between the lower surface of the separator and the upper surface of the film layer to be dried ranges from 1 mm to 10 cm.
  • the distance between the lower surface of the separator and the upper surface of the film layer to be dried is set within the above range, it is advantageous to adjust the solvent evaporation rate of the edge region of the film layer to be dried to substantially the solvent evaporation rate with the central region thereof. The same, thereby further ensuring the surface uniformity of the film layer formed after drying.

Abstract

提供了一种干燥装置及其干燥方法，该干燥装置包括干燥部（1）和承载部（2），承载部用于承载形成有待干燥膜层（3）的基板，干燥部设置为面对待干燥膜层以对该待干燥膜层进行干燥。该干燥部包括抽气罩（11）、隔板（12）和抽气机构。待干燥膜层在干燥过程中在不同区域的溶剂具有基本相同的挥发速率，从而使待干燥膜层经干燥后形成表面均匀的膜层，进而可提高包含该干燥膜层的显示器件的寿命和显示效果。

Description

一种干燥装置及其干燥方法 技术领域
本发明涉及显示技术领域，具体地，涉及一种干燥装置及其干燥方法。
背景技术
在制备有机电致发光器件(OLED)时，通常会利用喷墨打印等方法形成有机功能层薄膜，并且在制备液晶(LCD)显示器件时，通常会利用喷墨打印等方法形成彩膜结构。包括了喷墨打印以形成膜的各种湿法工艺的一个共同特点在于：需要通过后续的干燥工艺去除膜层中多余的溶剂。这一去除溶剂以形成干燥薄膜的工艺会影响所形成的薄膜的均匀性。对于光电显示器件而言，在干燥后形成的薄膜的均匀性对显示器件的寿命和显示效果有较大影响。
图1示意地示出了包含有干燥后的薄膜的显示基板的俯视图。如图1所示，在将含有有机功能材料的溶剂墨水喷印到显示基板4的显示区41后，需要在常压下使溶剂自然挥发或在低于常压的情况下进行去除溶剂的过程。喷印到显示区41的溶剂墨水以很小的墨滴形式分散在像素区内，具有很大的表面积，因此溶剂墨水的自然挥发速率较快。溶剂墨水处于显示区41边缘区域411的部分并处于显示区41中心区域412的部分的自然挥发速率更快。
图2是图1中的显示基板4沿切割线5的剖面图。图2中示出了像素分隔结构42和干燥后的有机薄膜43。可以看到，在显示区边缘区域411的像素区处，由于溶剂的自然挥发速率较快，从而导致干燥后形成的薄膜不均匀(咖啡环效应)，而在距离边缘区域411较远的中心区域412处，干燥后形成的薄膜的均匀性较好。形成这种自然挥发干燥后的不均匀的薄膜的原因有多种，例如，溶剂特性(组成比例和蒸汽压等)、像素分隔结构42的材质、用于执行干燥工艺的设备等。在某些情况下，不均匀的薄膜会导致显示器件点亮后形成如图1所示的从中心向周边延展的同心圆状的显示不良。
在现有的生产工艺中，通常是在一个真空炉中在低于常压的情况下去除由湿法形成的膜层中的溶剂。目前的真空设备的抽气端口通常设置在炉子的角落部位，这样在减压抽气过程中，容易导致气流的分布不均匀，进而使膜层不同区域的溶剂挥发速率的差异相对于自然挥发干燥情况下发生变化，从而导致干燥后形成的薄膜的不均匀性也发生变化。
总之，不管是采用自然挥发干燥的方法去除膜层中的溶剂，还是采用常规真空干燥设备去除膜层中的溶剂，都难以避免干燥后薄膜表面不均匀。因此如何减轻或避免湿法形成的有机薄膜在干燥后出现的表面不均匀，成为亟待解决的一个难题。
发明内容
本发明针对现有技术中存在的上述技术问题，提供一种干燥装置以及进行干燥处理的方法。该干燥装置能使待干燥膜层在干燥过程中在不同区域的溶剂具有基本相同的挥发速率，从而使待干燥膜层经干燥后形成表面均匀的膜层，进而提高了包含该干燥膜层的显示器件的寿命和显示效果。
根据本发明的一个方面，提供一种干燥装置，其包括干燥部和承载部。所述承载部用于承载形成有待干燥膜层的基板。所述干燥部设置为面对待干燥膜层以对待干燥膜层进行干燥。
根据示例性实施例，所述干燥部可以包括抽气罩、隔板和抽气机构。抽气罩包括面向待干燥膜层设置的第一开口和背向待干燥膜层设置的第二开口。抽气罩通过第二开口连接至抽气机构。隔板上设置有多个孔，并且覆盖在抽气罩的第一开口上。述抽气机构用于抽气。
根据示例性实施例，抽气罩可以具有中空的锥形，第二开口的面积小于第一开口的面积，并且第二开口在隔板上的正投影落在隔板的中心区域。
根据示例性实施例，隔板可以具有对应于待干燥膜层的形状和大小，并且可以将隔板设置为平行于待干燥膜层。
根据示例性实施例，可以将隔板划分为多个区域，并且设置在 隔板上的多个孔可以具有相同大小和形状。所述多个区域中的每个区域内的孔的密度与待干燥膜层的对应区域的自然风干速率成反比。
根据示例性实施例，可以将隔板划分为多个区域，并且设置在隔板上的多个孔可以具有相同的形状和不同的大小。所述多个区域中的每个区域内的孔的大小与待干燥膜层的对应区域的自然风干速率成反比。
根据示例性实施例，设置在隔板上的多个孔可以具有相同的大小和形状并且均匀分布在隔板上。隔板上还可以设置有分别与所述多个孔中的每个孔对应的孔塞，当孔塞插入孔内时，使得孔堵塞。
根据示例性实施例，所述干燥部还可以包括设置在第一开口周边的溶剂添加机构，用于向待干燥膜层的边缘区域添加形成待干燥膜层时所采用的溶剂，并且所述溶剂呈挥发状态。
根据示例性实施例，溶剂添加机构可以包括溶剂槽和挥发结构。溶剂槽用于容纳未挥发的溶剂。挥发结构用于使溶剂槽中的溶剂挥发以形成呈挥发状态的溶剂，并将呈挥发状态的溶剂添加到待干燥膜层的边缘区域。
根据示例性实施例，所述承载部可以包括载板和设置在载板边缘的围栏。载板用于承载形成有待干燥膜层的基板，并且围栏的高度大于待干燥膜层的上表面的高度。
根据示例性实施例，围栏的顶部到待干燥膜层的上表面的距离可以大于10cm。
根据示例性实施例，载板可以具有与第一开口相同的形状，并且载板的面积大于第一开口的面积。
根据本发明的另一个方面，提供一种利用根据本发明的干燥装置进行干燥处理方法，包括步骤：将形成有待干燥膜层的基板置于干燥装置的承载部上；调整干燥装置的干燥部以面对待干燥膜层；以及通过干燥装置的干燥部对待干燥膜层进行干燥处理。
根据示例性实施例，所述干燥部可以包括抽气罩、隔板和抽气机构。抽气罩包括面向待干燥膜层设置的第一开口和背向待干燥膜层设置的第二开口。抽气罩通过第二开口连接至抽气机构。隔板上设置 有多个孔，并且覆盖在抽气罩的第一开口上。述抽气机构用于抽气。所述承载部可以包括载板和设置在载板边缘的围栏。载板用于承载形成有待干燥膜层的基板，并且围栏的高度大于待干燥膜层的上表面的高度。调整干燥装置的干燥部以面对待干燥膜层的步骤可以包括：降低所述干燥部的抽气罩或者抬升所述承载部的载板，使抽气罩的第一开口的下部边缘低于所述承载部的围栏的顶部，并且使隔板的下表面与待干燥膜层的上表面之间的距离在1mm～10cm的范围内。
根据本发明各实施例的干燥装置和干燥处理的方法，待干燥膜层在干燥过程中在不同区域的溶剂具有基本相同的挥发速率，从而使待干燥膜层经干燥后形成表面均匀的膜层，进而提高了包含该干燥膜层的显示器件的寿命和显示效果。
附图说明
附图用于提供对本发明的进一步理解，并且构成说明书的一部分，与下面的具体实施方式一起用于解释本发明，但并不构成对本发明的限制。在附图中：
图1示意地示出了现有技术中包含有干燥后的薄膜的显示基板的俯视图；
图2为图1中的显示基板沿切割线5的剖视图；
图3为根据本发明实施例的干燥装置的结构示意图；
图4为图3中的隔板的结构示意图；以及
图5为图3中的干燥部的示意剖视图。
具体实施方式
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图和具体实施方式对本发明所提供的一种干燥装置及其干燥方法作进一步详细描述。
图3为根据本发明实施例的干燥装置的结构示意图。
如图3所示，根据示例性实施例的干燥装置包括干燥部1和承载部2，承载部2用于承载形成有待干燥膜层3的基板。干燥部1设 置为面对待干燥膜层3以对待干燥膜层3进行干燥。
如图3所示，干燥部1包括抽气罩11、隔板12和抽气机构(图中未示出)。抽气罩11包括面向待干燥膜层3设置的第一开口111和背向待干燥膜层3设置的第二开口112。抽气罩11通过第二开口112连接至抽气机构。隔板12上设有多个孔121，并且覆盖在抽气罩11的第一开口111上。抽气机构用于抽气。也就是说，干燥部1通过从待干燥膜层3表面抽气使待干燥膜层3中的溶剂挥发。这样能够加快溶剂的挥发速率，从而提高效率。
抽气罩11可以具有中空的锥形，第二开口112的面积小于第一开口111的面积，并且第二开口112在隔板12上的正投影落在隔板12的中心区域。也就是说，第二开口112处于第一开口111的正上方。这种设置能使抽气罩11在抽气时，从第一开口111流向第二开口112的气流在各处是均匀的，从而使抽气罩11在待干燥膜层3表面的不同区域均匀地抽气，以确保待干燥膜层3表面的不同区域的溶剂具有基本相同的挥发速率。
根据示例性实施例，隔板12可以具有对应于待干燥膜层3的形状和大小，并且可以将隔板12设置为平行于待干燥膜层3。
根据示例性实施例，可以将隔板12划分为多个区域，并且设置在隔板12上的多个孔121可以具有相同大小和形状。所述多个区域中的每个区域内的孔的密度与待干燥膜层3的对应区域的自然风干速率成反比。
图4为图3中的隔板12的结构示意图。如图4所示，多个孔121的大小和形状相同，孔121在隔板12的不同区域内的密度与待干燥膜层3的对应区域的自然风干速率成反比。
自然风干速率是指在自然环境中待干燥膜层的溶剂的挥发速率。由于待干燥膜层3在不同区域的自然风干速率会彼此不同，所以可以通过控制隔板12对应区域的孔的密度，使干燥部1能根据待干燥膜层3的不同区域的自然风干速率进行不同程度的抽气操作。在自然风干速率较快的区域，提供相应较小的抽气量，而在自然风干速率较慢的区域，提供相应较大的抽气量，使待干燥膜层3的不同区域的 溶剂挥发速率基本上相同。
根据示例性实施例，可以将隔板12划分为多个区域，并且设置在隔板12上的多个孔121可以具有相同的形状和不同的大小。所述多个区域中的每个区域内的孔的大小与待干燥膜层3的对应区域的自然风干速率成反比。根据该示例性实施例，也可以在自然风干速率较快的区域，提供相应较小的抽气量，而在自然风干速率较慢的区域，提供相应较大的抽气量，使待干燥膜层3的不同区域的溶剂挥发速率基本上相同。
根据示例性实施例，设置在隔板12上的多个孔121可以具有相同的大小和形状并且均匀分布在隔板12上。隔板12上还可以设置有分别与所述多个孔121中的每个孔对应的孔塞(图中未示出)，当孔塞插入孔121内时，使得孔121堵塞。
根据本实施例，可以通过采用孔塞来调节隔板12上的不同区域的抽气量。
需要说明的是，隔板12可拆卸地安装在第一开口111上。因而，针对不同的待干燥膜层3，可以根据需要更换具有不同的孔设置(不同的孔密度、不同的孔大小或不同的孔塞设置)的隔板12。
图5为图3中的干燥部1的示意剖视图。
通常，待干燥膜层3的边缘区域的自然风干速率大于其中心区域的自然风干速率。如图5所示，干燥部1还可以包括设置在第一开口111周边的溶剂添加机构13。溶剂添加机构13用于向待干燥膜层3的边缘区域添加形成待干燥膜层3时所采用的溶剂，并且所述溶剂呈挥发状态。
在某些情况下，即使利用根据前述实施例中的包括具有特定的孔设置方式的隔板12的干燥部1进行抽气操作，待干燥膜层3的边缘区域的溶剂挥发速率仍旧要比其中心区域快。通过溶剂添加机构13向待干燥膜层3的边缘区域添加呈挥发状态的溶剂，可以能使待干燥膜层3的边缘区域和中心区域的溶剂挥发速率基本上相同，从而进一步确保干燥后形成的膜层的表面均匀性。
根据示例性实施例，溶剂添加机构13可以包括溶剂槽131和挥 发结构132。溶剂槽131用于容纳未挥发的溶剂。挥发结构132用于使溶剂槽131中的溶剂挥发以形成呈挥发状态的溶剂，并将呈挥发状态的溶剂添加到待干燥膜层3的边缘区域。
根据示例性实施例，挥发结构132可以采用栅格状的护栏，并且在护栏的透气栅格孔中设置纱布或无纺布。护栏可以作为溶剂槽131的底部，以对溶剂槽131中的溶剂起支撑作用。设置在护栏的透气栅格孔中的纱布或无纺布只能通过然挥发后的呈挥发状态的溶剂。因而，溶剂槽131中的溶剂自然挥发，并通过纱布或无纺布之后，向待干燥膜层3的边缘区域扩散，在待干燥膜层3的四周边缘区域上方形成呈挥发状态的溶剂气氛。
需要说明的是，挥发结构132可以采用能使未挥发的溶剂变成呈挥发状态的溶剂的任何设备，例如，加湿器。另外，挥发结构132也可以只包括纱布或无纺布。
回到图3，承载部2可以包括载板21和设置在载板21边缘的围栏22。载板21用于承载形成有待干燥膜层3的基板，并且围栏22的高度大于待干燥膜层3的上表面的高度。
根据示例性实施例，围栏22的顶部到待干燥膜层3的上表面的距离可以大于10cm。载板21可以具有与第一开口111相同的形状，并且载板21的面积可以大于第一开口111的面积，以使得第一开口111嵌入围栏22中。当第一开口111嵌入围栏22中时，可以缩小隔板12与待干燥膜层3之间的距离，并且隔板12的边缘也陷入到围栏22中，以减少待干燥膜层3的边缘区域中的溶剂向外部空间挥发，有利于将待干燥膜层3的边缘区域的溶剂挥发速率调节为与其中心区域的溶剂挥发速率基本上相同。
在利用根据本申请的实施例的干燥装置进行干燥处理时，首先将形成有待干燥膜层的基板置于干燥装置的承载部上，然后调整干燥装置的干燥部以面对待干燥膜层，随后通过干燥装置的干燥部对待干燥膜层进行干燥处理。
在调整干燥装置的干燥部以面对待干燥膜层的步骤中，可以降低干燥部的抽气罩或者抬升承载部的载板，使抽气罩的第一开口的下 部边缘低于承载部的围栏的顶部(即，使得第一开口嵌入围栏中)，并使隔板的下表面与待干燥膜层的上表面之间的距离范围在1mm～10cm的范围内。当隔板的下表面与待干燥膜层的上表面之间的距离设置在上述范围内时，有利于将待干燥膜层的边缘区域的溶剂挥发速率调节为与其中心区域的溶剂挥发速率基本上相同，从而进一步确保干燥后形成的膜层的表面均匀性。
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。

Claims (14)

  1. 一种干燥装置，包括干燥部和承载部，所述承载部用于承载形成有待干燥膜层的基板,所述干燥部设置为面对待干燥膜层以对待干燥膜层进行干燥。
  2. 根据权利要求1所述的干燥装置，其中，所述干燥部包括抽气罩、隔板和抽气机构，
    抽气罩包括面向待干燥膜层设置的第一开口和背向待干燥膜层设置的第二开口，抽气罩通过第二开口连接至抽气机构，
    隔板上设置有多个孔，并且覆盖在抽气罩的第一开口上，
    抽气机构用于抽气。
  3. 根据权利要求2所述的干燥装置，其中，抽气罩具有中空的锥形，第二开口的面积小于第一开口的面积，并且第二开口在隔板上的正投影落在隔板的中心区域。
  4. 根据权利要求3所述的干燥装置，其中，隔板具有对应于待干燥膜层的形状和大小，并且将隔板设置为平行于待干燥膜层。
  5. 根据权利要求2所述的干燥装置，其中，将隔板划分为多个区域，并且设置在隔板上的多个孔具有相同大小和形状,
    所述多个区域中的每个区域内的孔的密度与待干燥膜层的对应区域的自然风干速率成反比。
  6. 根据权利要求2所述的干燥装置，其中，将隔板划分为多个区域，并且设置在隔板上的多个孔具有相同的形状和不同的大小，
    所述多个区域中的每个区域内的孔的大小与待干燥膜层的对应区域的自然风干速率成反比。
  7. 根据权利要求2所述的干燥装置，其中，设置在隔板上的多个孔具有相同的大小和形状并且均匀分布在隔板上，
    隔板上还设置有分别与所述多个孔中的每个孔对应的孔塞，当孔塞插入孔内时，使得孔堵塞。
  8. 根据权利要求2所述的干燥装置，其中，所述干燥部还包括设置在第一开口周边的溶剂添加机构，用于向待干燥膜层的边缘区域添加形成待干燥膜层时所采用的溶剂，并且所述溶剂呈挥发状态。
  9. 根据权利要求8所述的干燥装置，其中，溶剂添加机构包括溶剂槽和挥发结构，
    溶剂槽用于容纳未挥发的溶剂，
    挥发结构用于使溶剂槽中的溶剂挥发以形成呈挥发状态的溶剂，并将呈挥发状态的溶剂添加到待干燥膜层的边缘区域。
  10. 根据权利要求2所述的干燥装置，其中，所述承载部包括载板和设置在载板边缘的围栏，
    载板用于承载形成有待干燥膜层的基板，并且
    围栏的高度大于待干燥膜层的上表面的高度。
  11. 根据权利要求10所述的干燥装置，其中，围栏的顶部到待干燥膜层的上表面的距离大于10cm。
  12. 根据权利要求11所述的干燥装置，其中，载板具有与第一开口相同的形状，并且载板的面积大于第一开口的面积。
  13. 一种利用权利要求1所述的干燥装置进行干燥处理的方法，包括步骤：
    将形成有待干燥膜层的基板置于干燥装置的承载部上；
    调整干燥装置的干燥部以面对待干燥膜层；以及
    通过干燥装置的干燥部对待干燥膜层进行干燥处理。
  14. 根据权利要求13所述的干燥处理的方法，其中，所述干燥部包括抽气罩、隔板和抽气机构，抽气罩包括面向待干燥膜层设置的第一开口和背向待干燥膜层设置的第二开口，抽气罩通过第二开口连接至抽气机构，隔板上设置有多个孔，并且覆盖在抽气罩的第一开口上，抽气机构用于抽气，
    其中，所述承载部包括载板和设置在载板边缘的围栏，载板用于承载形成有待干燥膜层的基板，并且围栏的高度大于待干燥膜层的上表面的高度，
    其中，调整干燥装置的干燥部以面对待干燥膜层的步骤包括：降低所述干燥部的抽气罩或者抬升所述承载部的载板，使抽气罩的第一开口的下部边缘低于所述承载部的围栏的顶部，并且使隔板的下表面与待干燥膜层的上表面之间的距离在1mm～10cm的范围内。
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CN112117208A (zh) * 2019-06-20 2020-12-22 纳晶科技股份有限公司 薄膜干燥方法、薄膜干燥装置以及包括薄膜的器件
CN110328975A (zh) * 2019-07-01 2019-10-15 深圳市华星光电半导体显示技术有限公司 真空干燥装置
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CN111516399B (zh) * 2020-04-29 2022-05-31 Tcl华星光电技术有限公司 掩膜版及其制造方法、复合型掩膜版、真空干燥装置
CN113580787B (zh) * 2020-07-28 2023-04-21 广东聚华印刷显示技术有限公司 真空干燥设备及方法
CN111933809B (zh) * 2020-09-21 2021-01-22 杭州纤纳光电科技有限公司 一种薄膜干燥方法及其应用
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