WO2016117691A1 - 測定装置および測定方法 - Google Patents
測定装置および測定方法 Download PDFInfo
- Publication number
- WO2016117691A1 WO2016117691A1 PCT/JP2016/051882 JP2016051882W WO2016117691A1 WO 2016117691 A1 WO2016117691 A1 WO 2016117691A1 JP 2016051882 W JP2016051882 W JP 2016051882W WO 2016117691 A1 WO2016117691 A1 WO 2016117691A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical sensor
- light
- support plate
- emitting element
- light emitting
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9508—Capsules; Tablets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
Definitions
- the present invention relates to a measuring apparatus and a measuring method.
- a measurement surface of a measurement object is obtained by irradiating light from the light emitting element to the measurement object and receiving reflected light from the measurement object by the light receiving element.
- An apparatus for detecting the surface roughness of the surface is known.
- the measuring device of the present disclosure includes a support plate and an optical sensor.
- the support plate has an object placed on the center of the upper surface, and can rotate around a rotation axis extending in the vertical direction from the center.
- the optical sensor includes a light emitting element that is disposed above the support plate and that irradiates the object with light, and a light receiving element that receives the reflected light reflected by the object.
- the measurement method of the present disclosure includes a step of placing an object on the measurement device, a step of fixing the optical sensor of the measurement device at a position where light is irradiated to one point of the object, and the optical sensor. And receiving the reflected light from the object by the light receiving element of the optical sensor while rotating the support plate in a state where is fixed.
- FIG. 1 shows an outline of the measuring apparatus.
- FIG. 2 shows the positional relationship between the support plate and the optical sensor in the measurement apparatus.
- FIG. 3 is a diagram for explaining the measurement region of the object measured by the measurement apparatus. The arrows in FIG. 3 indicate the direction of rotation of the object.
- FIG. 4 shows the positional relationship between the support plate and the optical sensor in the measuring apparatus.
- FIG. 5A schematically shows an outline of the optical sensor
- FIG. 5B schematically shows a light emitting element.
- the measuring apparatus 1 can measure the surface condition such as the surface roughness of the object 2 or the sparse density of the surface of the object 2.
- the measurement surface of the object 2 may be a curved surface such as a convex curved surface or a concave curved surface.
- the target object 2 has a cross section when the target object 2 is cut in the vertical direction (Z-axis direction) through the center of the planar shape of the target object 2 with respect to a virtual line extending in the vertical direction from the center of the target object 2. You may have the shape which is line symmetrical.
- the object 2 may be, for example, a medicine tablet. Note that the object 2 is not limited to an object whose measurement surface is a curved surface, and may be an object whose measurement surface is a flat surface.
- the measuring apparatus 1 includes an optical sensor 3 and a support plate 4 as shown in FIG.
- the optical sensor 3 includes a light emitting element 31 and a light receiving element 32, and can receive reflected light reflected by the object 2 by irradiating the object 2 with light.
- the object 2 is placed on the support plate 4.
- the support plate 4 can support the object 2.
- the optical sensor 3 is positioned above the support plate 4, and can irradiate light onto the object 2 on the support plate 4.
- the measuring device 1 can measure the surface state of the object 2.
- the light emitting element 31 of the optical sensor 3 may be, for example, a light emitting diode (LED) or a laser diode (LD).
- the light receiving element 32 of the optical sensor 3 may be, for example, a photodiode (PD) or a phototransistor (PT).
- the light emitting element 31 and the light receiving element 32 may be mounted on the wiring board as individual components.
- the light emitting element 31 and the light receiving element 32 may be formed on one wafer.
- the optical sensor 3 is obtained by integrally forming a light emitting element 31 and a light receiving element 32 on one substrate 33 (wafer).
- the light-emitting element 31 can be formed by stacking a plurality of semiconductor layers on the top surface of the substrate 33 including a semiconductor material exhibiting one conductivity type.
- the light receiving element 32 can be formed by doping a region adjacent to the light emitting element 31 on the upper surface of the substrate 33 with an impurity of a reverse conductivity type.
- the light emitting element 31 and the light receiving element 32 can be arranged close to each other.
- the optical sensor 3 can be reduced in size, and a plurality of optical sensors 3 can be mounted on the measuring device 1. Therefore, even when measuring a small object such as a tablet, for example, it is possible to measure using a plurality of optical sensors 3 simultaneously.
- the optical sensor 3 includes at least one light emitting element 31 and at least one light receiving element 32, but may include a plurality of light emitting elements 31 and a plurality of light receiving elements 32.
- the optical sensor 3 according to the present embodiment has one light emitting element 31 and two light receiving elements 32 as shown in FIG.
- the optical sensor 3 according to the present embodiment can improve the measurement accuracy by receiving regular reflection light by one light receiving element 32 and receiving diffuse reflection light by the other light receiving element 32.
- the optical sensor 3 has an electrode pattern 34 disposed on the substrate 33 and electrically connected to the light emitting element 31 and the light receiving element 32.
- the electrode pattern 34 supplies a current for driving the light emitting element 31 and extracts a current generated by receiving light with the light receiving element 32.
- the substrate 33 can be formed, for example, by doping a silicon (Si) wafer with an n-type impurity or a p-type impurity.
- the substrate 33 according to this embodiment is made of an n-type semiconductor material. Specifically, the substrate 33 is formed by doping an n-type impurity into a silicon (Si) wafer.
- the n-type impurity for example, phosphorus (P), nitrogen (N), arsenic (As), antimony (Sb), bismuth (Bi), or the like may be used.
- the light emitting element 31 includes a buffer layer 31a, an n-type contact layer 31b, an n-type cladding layer 31c, an active layer 31d, a p-type cladding layer 31e, and a p-type contact layer on a substrate 33.
- 31f can be sequentially stacked.
- the wavelength of the light emitted from the light emitting element 31 can be set to, for example, 0.7 ⁇ m or more and 2.5 ⁇ m or less.
- the buffer layer 31a can alleviate the difference in lattice constant between the substrate 33 and the n-type contact layer 31b.
- the buffer layer 31a can be formed of, for example, gallium arsenide (GaAs).
- the n-type contact layer 31b can make the light emitting element 3 and the electrode pattern 34 conductive.
- the n-type contact layer 31b can be formed, for example, by doping gallium arsenide (GaAs) with silicon (Si) or selenium (Se) that is an n-type impurity.
- the n-type cladding layer 31c can confine holes in the active layer 31d.
- the n-type cladding layer 31c can be formed, for example, by doping aluminum gallium arsenide (AlGaAs) with silicon (Si) or selenium (Se) that is an n-type impurity.
- the active layer 31d can emit light when electrons and holes concentrate and recombine.
- the active layer 30d can be formed of, for example, aluminum gallium arsenide (AlGaAs).
- the p-type cladding layer 31e can confine electrons in the active layer 31d.
- the p-type cladding layer 31e can be formed, for example, by doping aluminum gallium arsenide (AlGaAs) with p-type impurities such as zinc (Zn), magnesium (Mg), or carbon (C).
- the p-type contact layer 31f can make the light emitting element 31 and the electrode pattern 34 conductive.
- the p-type contact layer 31f can be formed, for example, by doping aluminum gallium arsenide (AlGaAs) with p-type impurities such as zinc (Zn), magnesium (Mg), or carbon (C).
- the support plate 4 can support the object 2.
- the support plate 4 can rotate around a rotation axis extending in the vertical direction from the center of the upper surface. In other words, the support plate 4 can rotate.
- the object 2 is placed at the center of the upper surface of the support plate 4.
- the surface condition of the region along the rotation direction can be measured. That is, the change in the distance between the optical sensor 3 and the object 2 can be reduced as compared with the case where the object 2 is linearly moved, and the angle formed by the optical axis of the irradiation light and the normal line at the measurement point is reduced. Change can be reduced. Therefore, it becomes easy to receive reflected light by the light receiving element 32, and the measuring device 1 can measure the object 2.
- the light emitting element 31 may be positioned so that the optical axis of the light applied to the object 2 does not intersect the rotation axis of the support plate 4 on the upper surface of the object 2. As a result, a large measurement area of the object 2 can be secured.
- the irradiation area of the light emitting element 31 may include a rotation axis on the upper surface of the object 2. As a result, the surface state of the vertex of the object 2 can also be measured.
- region of the light emitting element 31 contains a rotating shaft, the measurement area
- region of the target object 2 can be cyclic
- region of the light emitting element 31 can set a spot diameter to 100 micrometers or more and 1000 micrometers or less, for example.
- the measuring device 1 may include a plurality of optical sensors 3.
- the measurement apparatus 1 includes a first optical sensor 3a and a second optical sensor 3b. And as shown in FIG. 3, 1st irradiation area
- the first irradiation region R1 and the second irradiation region R2 may be separated from each other. As a result, each light of the first optical sensor 3a and the second optical sensor 3b can be prevented from entering the other.
- the first irradiation region R1 and the second irradiation region R2 may be positioned to face each other with the rotation axis interposed therebetween. As a result, a large distance between the first irradiation region R1 and the second irradiation region R2 can be secured, and the light of each of the first optical sensor 3a and the second optical sensor 3b is stray light by the other optical sensor 3. It can reduce receiving light.
- the first measurement region Ra of the first optical sensor 3a may be arranged away from the second measurement region Rb of the second optical sensor 3b as shown in FIG. As a result, it is possible to measure over a wide range compared to the case where a part of the measurement areas overlaps.
- the outer edge of the first measurement region Ra of the first optical sensor 3a may overlap with the inner edge of the second measurement region Rb of the second optical sensor 3b.
- the surface state of the object 2 can be measured without gaps, and can be measured in more detail.
- the support plate 4 may be movable in the plane direction (XY plane direction). As a result, when the object 2 is placed on the support plate 4, the object 2 can be placed after the support plate 4 is pulled out, and the work efficiency can be improved.
- the support plate 4 may be black. As a result, reflection of light incident on the support plate 4 can be reduced, so that extra light incident on the light receiving element 32 of the optical sensor 3 can be reduced. Further, from the viewpoint of reducing the reflection of light incident on the support plate 4, the upper surface of the support plate 4 may be textured.
- the support plate 4 can be formed of a metal material such as aluminum.
- the support plate 4 may have a convex portion arranged on the edge of the placement area of the object 2. As a result, since the positioning of the object 2 is facilitated, work efficiency can be improved. Further, when the support plate 4 has a convex portion, the height of the convex portion may be smaller than the thickness of the object 2. As a result, the convex portion can be prevented from obstructing the optical path of the optical sensor 3.
- the height of the convex portion is set to, for example, 1 ⁇ 2 times or less the thickness of the object 2.
- the measuring apparatus 1 further includes a control circuit 5 that controls the optical sensor 3.
- the control circuit 5 is electrically connected to the electrode pattern 34 of the optical sensor 3, and communicates with, for example, a drive circuit for driving the light emitting element 31, an arithmetic circuit for processing current from the light receiving element 32, or an external device. Including a communication circuit.
- the measuring device 1 further includes a support member 6 that extends in the vertical direction and functions as a support of the measuring device 1, and a fixing member 7 that extends from the support member 6 in the plane direction and fixes the optical sensor 3.
- the support member 6 is formed in a columnar shape or a plate shape, for example.
- the support member 6 is made of a metal material such as aluminum. Further, the support member 6 may be formed in black from the viewpoint of reducing reflection of light incident on the support member 6, and the surface may be subjected to a textured process.
- the support member 6 may be extendable in the vertical direction. As a result, it is possible to easily adjust the focal length of the optical sensor 3 with respect to the object 2.
- the support member 6 is configured to adjust the focal length of the optical sensor 3 by expanding and contracting, but the focal length of the optical sensor 3 is set by movably installing the support plate 4 in the vertical direction. You may adjust.
- the fixing member 7 has one end fixed to the support member 6 and the other end positioned in the region above the support plate 4.
- the optical sensor 3 can be attached to the other end of the fixing member 7 via an adhesive made of a resin material.
- the optical sensor 3 is attached to the fixing member 7 so as to face the support plate 4 with the fixing member 7 interposed therebetween.
- the fixing member 7 has an opening at the other end, and the optical sensor 3 can irradiate the object 2 through the opening of the fixing member 7 or receive reflected light. .
- the fixing member 7 can be formed in a rod shape or a plate shape, for example.
- the fixing member 7 can be formed of a metal material such as aluminum.
- the fixing member 7 may be formed in black from the viewpoint of reducing reflection of light incident on the fixing member 7, and the surface may be subjected to graining.
- the fixing member 7 may be rotatable around an axis along the longitudinal direction. As a result, the angle between the optical axis of the irradiation light with respect to the object 2 and the normal line of the measurement point can be easily adjusted. That is, it is possible to easily adjust the light irradiation position of the light emitting element 31 with respect to the object 2.
- the fixing member 7 may be movable in a planar direction along the upper surface of the support plate 4. As a result, the light irradiation position of the light emitting element 31 with respect to the object 2 can be easily adjusted.
- the fixing member 7 may be plate-shaped. As a result, since the upper surface of the fixing member 7 can be used as a reference surface for mounting the optical sensor 3, work efficiency can be improved.
- the optical sensor 3 may be arranged such that the main surface of the substrate 33 is along the main surface of the fixing member 7.
- the optical path of the optical sensor 3 depends on the orientation of the main surface of the substrate 33. Will be determined. Therefore, by adjusting the orientation of the main surface (lower surface) of the fixing member 7 with the above configuration, the orientation of the optical sensor 3 can be adjusted, and the working efficiency can be improved.
- the measuring device 1 further includes a pedestal 8 that supports the support plate 4.
- the base 8 is formed in a plate shape, for example, and the base 8 is formed of a metal material such as aluminum. Further, the pedestal 8 may be formed in black from the viewpoint of reducing reflection of light incident on the pedestal 8, and the surface may be textured.
- a measuring device 1 and an object 2 whose surface state is measured by the measuring device 1 are prepared. Then, the object 2 is placed on the support plate 4 of the measuring device 1.
- the target object 2 may be placed so that the vertex of the curved surface of the target object 2 coincides with the rotation axis of the support plate 4.
- a medicine tablet can be considered.
- the light emitting element 31 of the optical sensor 3 of the measuring apparatus 1 is fixed.
- the light emitting element 31 is fixed at a position where light is applied to one point of the object 2.
- the position where the light of the light emitting element 31 is irradiated is a place where the surface state of the object 2 is to be measured.
- the individual optical sensors 3 are fixed so as to irradiate different portions of the object 2.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
本開示の測定装置の一実施形態について、図1~5を参照しつつ説明する。なお、本発明は本実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。
次に、本開示の測定装置1を使用した、対象物2の表面の測定方法について説明する。なお、本発明は本実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。
2 対象物
3 光学センサ
31 発光素子
32 受光素子
33 基板
34 電極パターン
3a 第1光学センサ
3b 第2光学センサ
4 支持板
5 制御用回路
6 支持部材
7 固定部材
8 台座
R1 第1照射領域
R2 第2照射領域
Ra 第1測定領域
Rb 第2測定領域
Claims (5)
- 上面の中央部に対象物が載置され、前記中央部から上下方向に伸びた回転軸の周りを回転可能な支持板と、
前記支持板の上方に配され、前記対象物に光を照射する発光素子および前記対象物で反射する反射光を受光する受光素子を有する光学センサと、を備える、測定装置。 - 前記発光素子は、前記対象物に照射する光の光軸が、前記対象物の上面において前記回転軸と交わらないように位置している、請求項1に記載の測定装置。
- 前記光学センサは、第1光学センサおよび第2光学センサを有し、
前記第1光学センサの発光素子からの第1照射領域は、前記第2光学センサの発光素子からの第2照射領域よりも内側に位置している、請求項1または2に記載の測定装置。 - 前記対象物が錠剤である、請求項1~3のいずれかに記載の測定装置。
- 請求項1~4のいずれかに記載の測定装置の前記支持板に対象物を載置する工程と、
前記測定装置の前記光学センサを前記対象物の一点に光が照射される位置で固定する工程と、
前記光学センサを固定した状態のまま前記支持板を回転させつつ、前記光学センサの前記受光素子で前記対象物からの反射光を受光する工程と、を備える、測定方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/545,478 US10240917B2 (en) | 2015-01-23 | 2016-01-22 | Measuring apparatus and measuring method |
JP2016570728A JP6426202B2 (ja) | 2015-01-23 | 2016-01-22 | 測定装置および測定方法 |
EP16740298.1A EP3249351B1 (en) | 2015-01-23 | 2016-01-22 | Measuring apparatus and measuring method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015011238 | 2015-01-23 | ||
JP2015-011238 | 2015-01-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016117691A1 true WO2016117691A1 (ja) | 2016-07-28 |
Family
ID=56417221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/051882 WO2016117691A1 (ja) | 2015-01-23 | 2016-01-22 | 測定装置および測定方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10240917B2 (ja) |
EP (1) | EP3249351B1 (ja) |
JP (1) | JP6426202B2 (ja) |
WO (1) | WO2016117691A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111330859B (zh) * | 2020-03-31 | 2020-11-13 | 东莞市雅创自动化科技有限公司 | 一种产品自动检测筛选装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0921755A (ja) * | 1995-07-05 | 1997-01-21 | Suinku:Kk | 検査用搬送装置および検査装置 |
JPH09304294A (ja) * | 1996-05-17 | 1997-11-28 | Mutual Corp | 被検査物の表面検査方法及びその装置 |
JP2002350283A (ja) * | 2001-05-30 | 2002-12-04 | Tb Optical Co Ltd | 検査装置 |
US20050112115A1 (en) * | 2001-05-29 | 2005-05-26 | Khan Mansoor A. | Surface roughness quantification of pharmaceuticals, herbal, nutritional dosage forms and cosmetic preparations |
JP2011197012A (ja) * | 2011-06-27 | 2011-10-06 | Hitachi High-Technologies Corp | 光学装置 |
JP2013253030A (ja) * | 2012-06-06 | 2013-12-19 | Japan Vam & Poval Co Ltd | フィルムコーティング組成物並びに経口固形製剤及びその製造方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3587927T2 (de) * | 1984-07-23 | 1995-03-02 | Mutual Corp | Verfahren und Vorrichtung zur automatischen Untersuchung von Tabletten. |
FR2605106B1 (fr) * | 1986-10-10 | 1988-12-09 | Labo Electronique Physique | Porte-echantillon pour un ellipsometre spectroscopique a haute resolution laterale |
US5436026A (en) * | 1990-11-05 | 1995-07-25 | Mcneil-Ppc, Inc. | Discharge and transfer system for apparatus for gelatin coating tablets |
US5317149A (en) * | 1992-11-12 | 1994-05-31 | Hewlett-Packard Company | Optical encoder with encapsulated electrooptics |
JPH07294228A (ja) * | 1994-04-28 | 1995-11-10 | Towa Kk | 樹脂タブレットの検査選別方法及びその装置 |
SE513163C2 (sv) * | 1995-12-20 | 2000-07-17 | Astrazeneca Ab | Anordning och metod för spektrometri |
JPH10269682A (ja) * | 1997-03-21 | 1998-10-09 | Fuji Electric Co Ltd | ハードディスク表面検査装置 |
JP4785044B2 (ja) | 2006-01-13 | 2011-10-05 | スタンレー電気株式会社 | 反射型光学センサ及び測定面の表面粗さ検出方法 |
US8184295B2 (en) | 2007-03-30 | 2012-05-22 | Halliburton Energy Services, Inc. | Tablet analysis and measurement system |
KR101765972B1 (ko) * | 2010-04-02 | 2017-08-07 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 분석물 센서 광학 판독기를 위한 정렬 정합 특징부 |
JPWO2012164641A1 (ja) * | 2011-05-27 | 2014-07-31 | 株式会社日立製作所 | 近接場光欠陥検査装置 |
WO2013016729A1 (en) * | 2011-07-28 | 2013-01-31 | Massachusetts Institute Of Technology | Optical tactile sensor |
WO2013015379A1 (ja) * | 2011-07-28 | 2013-01-31 | 京セラ株式会社 | 受発光素子およびそれを備えたセンサ装置 |
JPWO2013065731A1 (ja) * | 2011-10-31 | 2015-04-02 | 京セラ株式会社 | センサ装置 |
JP2013210241A (ja) * | 2012-03-30 | 2013-10-10 | Hitachi High-Technologies Corp | ディスク表面検査方法及びその装置 |
CN107369728B (zh) * | 2012-08-30 | 2019-07-26 | 京瓷株式会社 | 受光发光元件以及使用该受光发光元件的传感器装置 |
JP2014199692A (ja) * | 2013-03-29 | 2014-10-23 | 株式会社日立ハイテクノロジーズ | ディスク表面検査装置およびディスク表面検査方法 |
GB2513581A (en) * | 2013-04-30 | 2014-11-05 | Res Ct Pharmaceutical Engineering Gmbh | A device and a method for monitoring a property of a coating of a solid dosage form during a coating process forming the coating of the solid dosage form |
JP2015008256A (ja) * | 2013-06-26 | 2015-01-15 | 京セラ株式会社 | 受発光素子およびこれを用いたセンサ装置 |
-
2016
- 2016-01-22 EP EP16740298.1A patent/EP3249351B1/en active Active
- 2016-01-22 WO PCT/JP2016/051882 patent/WO2016117691A1/ja active Application Filing
- 2016-01-22 US US15/545,478 patent/US10240917B2/en active Active
- 2016-01-22 JP JP2016570728A patent/JP6426202B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0921755A (ja) * | 1995-07-05 | 1997-01-21 | Suinku:Kk | 検査用搬送装置および検査装置 |
JPH09304294A (ja) * | 1996-05-17 | 1997-11-28 | Mutual Corp | 被検査物の表面検査方法及びその装置 |
US20050112115A1 (en) * | 2001-05-29 | 2005-05-26 | Khan Mansoor A. | Surface roughness quantification of pharmaceuticals, herbal, nutritional dosage forms and cosmetic preparations |
JP2002350283A (ja) * | 2001-05-30 | 2002-12-04 | Tb Optical Co Ltd | 検査装置 |
JP2011197012A (ja) * | 2011-06-27 | 2011-10-06 | Hitachi High-Technologies Corp | 光学装置 |
JP2013253030A (ja) * | 2012-06-06 | 2013-12-19 | Japan Vam & Poval Co Ltd | フィルムコーティング組成物並びに経口固形製剤及びその製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3249351A4 * |
Also Published As
Publication number | Publication date |
---|---|
US10240917B2 (en) | 2019-03-26 |
EP3249351A1 (en) | 2017-11-29 |
JP6426202B2 (ja) | 2018-11-21 |
JPWO2016117691A1 (ja) | 2017-09-07 |
EP3249351B1 (en) | 2020-07-15 |
EP3249351A4 (en) | 2018-08-15 |
US20180010908A1 (en) | 2018-01-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5107559B2 (ja) | 集積化ハイブリッドマイクロレンズアレイを有するフォトニックデバイス | |
JP6495988B2 (ja) | 受発光素子およびこれを用いたセンサ装置 | |
US20150009499A1 (en) | Systems and methods for fabricating and orienting semiconductor wafers | |
CN107532995B (zh) | 光学分析装置及其制造方法 | |
JP2010066272A (ja) | アブソリュートエンコーダ | |
WO2016117691A1 (ja) | 測定装置および測定方法 | |
TWI710784B (zh) | 光學模組及其製造方法 | |
CN116324529A (zh) | 发光装置及发光装置制造方法 | |
JP6405368B2 (ja) | 光学式センサ | |
JP2017173284A (ja) | 評価方法 | |
JP5102605B2 (ja) | 発光装置およびその製造方法 | |
JP6578368B2 (ja) | 発光素子、受発光素子モジュールおよび光学式センサ | |
TW201518690A (zh) | 包括遠心成像系統之光學編碼器模組 | |
JP2009177101A (ja) | 発光装置 | |
JP2016225623A (ja) | 受発光素子モジュールおよび測定装置 | |
JP4813113B2 (ja) | 発光素子試験装置 | |
JP2008288336A (ja) | 検査用治具およびコプラナリティ検査装置検査方法 | |
JP6412392B2 (ja) | 光線指向特性測定装置および光線指向特性測定方法 | |
JP2020068341A (ja) | 受発光センサおよびこれを用いたセンサ装置 | |
JP2016184607A (ja) | 半導体発光素子の評価装置および評価方法 | |
JP2023114378A (ja) | 検査装置及び検査方法 | |
JP5102640B2 (ja) | 発光装置 | |
KR20090109670A (ko) | 일체형 광모듈 패키지 및 그 제조방법 | |
KR20190003895A (ko) | 발광소자 검사장치 및 이의 방법 | |
JP2016181650A (ja) | 受発光素子モジュールおよびセンサ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16740298 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016570728 Country of ref document: JP Kind code of ref document: A |
|
REEP | Request for entry into the european phase |
Ref document number: 2016740298 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15545478 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |