WO2013114858A1 - 多結晶シリコン棒搬出治具および多結晶シリコン棒の刈取方法 - Google Patents
多結晶シリコン棒搬出治具および多結晶シリコン棒の刈取方法 Download PDFInfo
- Publication number
- WO2013114858A1 WO2013114858A1 PCT/JP2013/000457 JP2013000457W WO2013114858A1 WO 2013114858 A1 WO2013114858 A1 WO 2013114858A1 JP 2013000457 W JP2013000457 W JP 2013000457W WO 2013114858 A1 WO2013114858 A1 WO 2013114858A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polycrystalline silicon
- silicon rod
- cylindrical member
- airbag
- jig
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C3/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith and intended primarily for transmitting lifting forces to loose materials; Grabs
- B66C3/02—Bucket grabs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F11/00—Lifting devices specially adapted for particular uses not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
Definitions
- the present invention relates to a jig used when carrying out a polycrystalline silicon rod manufactured by the Siemens method outside a reaction furnace, and a method for cutting a polycrystalline silicon rod using the jig.
- Polycrystalline silicon is a raw material for a single crystal silicon substrate for manufacturing semiconductor devices and a silicon substrate for manufacturing solar cells.
- polycrystalline silicon is produced by contacting Siemens with a source gas containing chlorosilane to a heated silicon core wire, and depositing polycrystalline silicon on the surface of the silicon core wire by a chemical vapor deposition method (CVD: Chemical Vapor Deposition). Done by law.
- CVD Chemical Vapor Deposition
- the internal space of a dome-shaped reaction vessel (Berja) provided in the reaction furnace is sealed with a base plate, and this sealed space becomes a vapor phase growth reaction space for polycrystalline silicon.
- the metal electrode for energizing the torii type silicon core wire passes through the base plate with an insulator sandwiched between them and is connected to a power source provided under the bell jar or to another torii type silicon core wire arranged in the bell jar Connected to the current-carrying metal electrode.
- Patent Document 1 Japanese Patent Laid-Open No. 2011-68553
- Patent Document 2 discloses a long diameter of 200 mm. A method for manufacturing a 3000 mm polycrystalline silicon rod is disclosed. The polycrystalline silicon rod of such a size exceeds 400 kg in the torii-type state, and the polycrystalline silicon rod after the reaction is often cracked and has a risk of collapse or the like. Therefore, it is difficult and dangerous to carry out the work (reap work) from the reaction furnace after the reaction is completed. *
- Patent Document 3 describes an apparatus (rod dismantling machine) for trimming a polycrystalline silicon rod by remote control from the viewpoint of ensuring the safety of an operator. The invention is disclosed.
- the present invention has been made in view of such problems.
- the object of the present invention is to provide a large-diameter / heavy-weight polycrystalline silicon rod obtained by precipitating polycrystalline silicon on a silicon core wire.
- Another object of the present invention is to provide a jig for safely carrying out the reactor and a method for cutting a polycrystalline silicon rod using the jig.
- a polycrystalline silicon rod carrying-out jig is used when a silicon rod obtained by growing polycrystalline silicon on a silicon core wire assembled in a torii type is taken out from a reactor.
- a jig for carrying out a crystalline silicon rod comprising: a cylindrical member for accommodating the polycrystalline silicon rod therein; and an airbag provided in the cylindrical member; In a state of being expanded by gas injection, the side surface of the polycrystalline silicon rod is pressed and held in the cylindrical member from a direction perpendicular to the plane including both the torii type pillars.
- the inner peripheral surface of the cylindrical member has at least one pair of two planes facing each other, and the airbag is provided on both of the two planes.
- the inner peripheral surface of the cylindrical member has at least one pair of two planes facing each other, and the airbag is provided on one of the two planes.
- the other of the two planes is provided with an elastic member that contacts the side surface of the polycrystalline silicon rod in a state where the polycrystalline silicon rod is held in the cylindrical member.
- the polycrystalline silicon rod carry-out jig according to the present invention may include a suspension jig for lifting and moving the cylindrical member in a state where the polycrystalline silicon rod is held inside.
- At least one outer peripheral surface of the two inner peripheral planes facing each other of the cylindrical member is a smooth surface.
- the outer peripheral surface may be separable from the cylindrical member main body.
- the polycrystalline silicon rod unloading jig is used, the polycrystalline silicon rod is accommodated inside the cylindrical member, and gas is injected into the airbag.
- the polycrystalline silicon rod is expanded and taken out of the reactor while being held in the cylindrical member.
- a large-diameter / heavy-weight polycrystalline silicon rod obtained by depositing polycrystalline silicon on a silicon core wire can be carried out of the reactor easily and safely.
- FIG. 1 It is a figure which illustrates the shape of the cross section of the longitudinal direction of the cylindrical member in the state which accommodated a pair of polycrystalline silicon rod inside. It is a figure for demonstrating a mode that a cylindrical member is laid down on a trolley with a roller, and only the polycrystalline silicon rod accommodated in the inside is taken out on the separately prepared trolley. It is a figure for demonstrating the structure of the cylindrical member used by the illustration of FIG. It is a figure for demonstrating the other structural example of the cylindrical member which has an outer peripheral surface separable from a main body.
- FIG. 1 is a schematic sectional view showing an example of the structure of a reaction furnace 100 when a polycrystalline silicon rod is manufactured according to the present invention.
- the reactor 100 is an apparatus for obtaining a polycrystalline silicon rod 11 by vapor-phase growing polycrystalline silicon on the surface of the silicon core wire 12 by the Siemens method, and is constituted by a base plate 5 and a bell jar 1.
- the base plate 5 is provided with a metal electrode 10 for supplying current to the silicon core wire 12, a gas nozzle 9 for supplying process gas such as nitrogen gas, hydrogen gas, and trichlorosilane gas, and a reaction exhaust gas outlet 8 for discharging exhaust gas. Yes.
- the bell jar 1 is provided with a refrigerant inlet 3 and a refrigerant outlet 4 for cooling the bell jar 1 and a viewing window 2 for visually confirming the inside.
- the base plate 5 is also provided with a refrigerant inlet 6 and a refrigerant outlet 7 for cooling it.
- FIG. 1 shows a state in which two pairs of torii-shaped silicon core wires 12 are arranged in the bell jar 1, but the number of pairs of the silicon core wires 12 is not limited to this, and three or more pairs of silicon core wires 12 are arranged.
- a plurality of silicon core wires 12 may be arranged.
- FIG. 1 also shows a carbon heater 13 that is supplied with electric power from a power supply 15 and radiates and heats the surface of the silicon core wire 12 for initial heating of the silicon core wire 12 that is performed prior to the start of the polycrystalline silicon precipitation reaction.
- the carbon heater 13 is provided for the purpose of reducing the voltage applied to the silicon core wire 12 during initial energization by reducing the resistance of the silicon core wire 12 by radiant heating.
- the energization is stopped, the inside of the bell jar 1 is replaced with an inert gas such as nitrogen, the bell jar 1 is pulled up with a crane or the like, and the polycrystalline silicon rod 11 is taken out.
- an inert gas such as nitrogen
- the core wire holder 12 is only fixed by being inserted into the metal electrode 10, it can be easily pulled out by pulling upward.
- FIG. 2 is a view for explaining a crack observed in the pair of polycrystalline silicon rods 11 after the completion of the precipitation reaction.
- the portions indicated by 11a and 11b are column portions, and the portion indicated by 11c is a beam. Part.
- the polycrystalline silicon rod after the reaction is often cracked and has a risk of collapsing, etc., making the operation of carrying out the reactor (reaping operation) difficult and dangerous.
- Such cracks correspond to the portions corresponding to the upper ends of the silicon core wire 11 assembled in the torii type, and both lower end portions (core wire) that support the total weight that allows current to flow from the metal electrode 10 and exceed 400 kg. It tends to occur in the vicinity of the holder 14).
- the polycrystalline silicon rod in order to easily and safely carry out a large-diameter / heavy-weight polycrystalline silicon rod obtained by depositing polycrystalline silicon on a silicon core wire, the polycrystalline silicon rod is placed inside.
- a jig provided with a cylindrical member to be housed in an air bag and an airbag provided in the cylindrical member is used.
- FIG. 3 is a schematic view for explaining a state when the polycrystalline silicon rod is taken out of the reaction furnace using the polycrystalline silicon rod carrying-out jig according to the present invention.
- the cylindrical member 210 of the unloading jig 200 is accommodated inside the (a pair of) polycrystalline silicon rod 11 from above, and gas is introduced into the airbag 220.
- the airbag 220 presses the side surface of the polycrystalline silicon rod 11 from a direction perpendicular to the plane including both torii-shaped pillars and holds it in the tubular member 210. In this hold state, the polycrystalline silicon rod 11 is taken out of the reactor. Even if the polycrystalline silicon rod 11 is cracked, an impact from the outside is absorbed by the airbag 220, so that collapse or the like is avoided.
- the unloading jig 200 is provided with a wire 230 and a hook 240 as a hanging jig for lifting and moving the polycrystalline silicon rod 11 while holding the polycrystalline silicon rod 11 on the upper part of the cylindrical member 210.
- a remote cutting operation is performed by an elevator or a robot arm.
- cylindrical member 210 does not necessarily have a rectangular cross section.
- FIG. 4A to 4C exemplify a cross-sectional shape perpendicular to the longitudinal direction of the cylindrical member 210 in a state in which a pair of polycrystalline silicon rods 11 are accommodated therein, and a cross-section of the cylindrical member 210 in FIG. 4A.
- the shape is an ellipse
- the cross-sectional shape of the cylindrical member 210 of FIG. 4B is a rectangle
- the cross-sectional shape of the cylindrical member 210 of FIG. 4C is a shape in which a corner
- the inner peripheral surface of the cylindrical member 210 has at least one pair of two planes facing each other. Preferably it is.
- the airbag 220 may be provided on both of the two planes facing each other, or may be provided on only one side. In the latter case, the rubber is provided on the plane side on which the airbag 220 is not provided. It is preferable to provide an elastic member. With this elastic member, the same effect as with the airbag 220 can be obtained.
- 5 to 7 exemplify the shape of the cross section in the longitudinal direction of the cylindrical member 210 in a state in which a pair of polycrystalline silicon rods 11 are accommodated therein.
- the airbags 220A and 220B are provided on both two opposing planes of the inner peripheral surface of the cylindrical member 210, and both the column portions are in a state where these two airbags are inflated.
- the side surface of the polycrystalline silicon rod 11 is pressed and held in the cylindrical member 210 from the direction perpendicular to the plane including
- the airbag 220 is provided on one of the two opposed planes of the inner peripheral surface of the cylindrical member 210, and a plate-like elasticity such as rubber is provided on the other plane.
- the member 250 is inserted to hold the polycrystalline silicon rod 11 in the cylindrical member 210.
- bottom plate 260 for preventing dropping of the polycrystalline silicon rod 11 from the bottom of the embodiment shown in FIG. 6 (FIG. 7A).
- the bottom plate 260 is provided with a cut for supporting the polycrystalline silicon rod 11 from the lower end portion of the column portion (FIG. 7B).
- the cylindrical member 210 needs to have sufficient strength when inflated by injecting gas into the airbag 220, examples of the material include stainless steel, resin-lined stainless steel, and iron plate. Can do. As long as sufficient strength can be ensured, wood may be used as long as it is partially.
- a metal such as stainless steel is used as the material of the cylindrical member 210, if the polycrystalline silicon rod 11 touches the inner wall, the metal is contaminated. To avoid this, a resin bag for preventing contamination is placed inside the cylindrical member 210. It is preferable to store in the cylindrical member 210 in a state where it is put on the polycrystalline silicon rod 11.
- the airbag 220 need not be provided on the front surface of the inner wall surface of the cylindrical member, and may be provided partially. However, the airbag 220 is at least a torii type that is a portion where cracks are likely to occur as shown in FIG. The portion corresponding to the upper ends of the assembled silicon core wire 11 and the region corresponding to the vicinity of both lower ends that support the entire weight should be provided. In order to ensure the hold stability of the polycrystalline silicon rod 11 and improve the working efficiency, it is preferable to provide it on the front surface of the inner wall surface of the cylindrical member.
- the material of the airbag 220 is required to have both sufficient strength and elasticity, and for example, natural rubber or synthetic rubber material can be used.
- natural rubber a coating made of a material such as Teflon or polyethylene, which is easy to clean, is formed on the surface side that touches the polycrystalline silicon rod 11 so as not to cause contamination by metal or sulfur. Is preferred.
- resin bag for preventing contamination is made of polyethylene or the like to be easily cleaned, contamination can be avoided.
- the gas injection pressure into the airbag 220 is generally 0.01 MPa to 0.05 MPa, preferably 0.01 MPa to 0.03 MPa, although it depends on the weight of the polycrystalline silicon rod 11 to be cut.
- the tube may be a permanent one or may be removable from the main body by a joint coupler or the like.
- FIG. 8 is a view for explaining, by way of example, a state in which the cylindrical member 210 is placed on the trolley 300 with a roller, and only the polycrystalline silicon rod 11 accommodated therein is taken out onto the trolley 300. It is.
- FIG. 9 is a diagram for explaining the structure of the cylindrical member 210 used in the illustration of FIG. 8, and one of the four side planes (outer peripheral surfaces) of the cylindrical member 210 can be separated (inserted / removed) from the main body.
- the plate-like member 270 is placed on the roller 310 provided on the top of the carriage 300.
- the clearance of the insertion portion 275 for inserting and removing the plate-like member 270 is designed to be a value that can be easily removed from the main body when the plate-like member 270 is pushed by the roller 310 from below.
- An elastic member such as rubber may be attached to the surface of the plate-like member 270 that supports the polycrystalline silicon rod 11.
- the cylindrical member 210 In a state where the polycrystalline silicon rod 11 is accommodated in the cylindrical member 210, the cylindrical member 210 is laid down on the upper portion of the carriage 300 and placed on the roller 310 with the plate-shaped member 270 side down (FIG. 8A). ). At this time, the air bag 220 is degassed (opened), the plate-like member 270 is lifted by the roller 310 by the above-mentioned clearance, and the other part of the cylindrical member 210 is directly mounted on the main body of the carriage 300. It becomes a state.
- the cylindrical member 210 having an outer peripheral surface separable from the main body has a configuration in which one of the four side planes (outer peripheral surfaces) of the cylindrical member 210 is removed by the buckle 290 as illustrated in FIG.
- the aspect used as the possible plate-shaped member 280 may be sufficient.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Structural Engineering (AREA)
- Silicon Compounds (AREA)
- Buffer Packaging (AREA)
Abstract
Description
2 のぞき窓
3 冷媒入口
4 冷媒出口
5 ベースプレート
6 冷媒入口
7 冷媒出口
8 反応排ガス出口
9 ガスノズル
10 金属電極
11 多結晶シリコン棒
11a、11b 柱部
11c 梁部
12 シリコン芯線
13 カーボンヒータ
14 芯線ホルダ
15 電源
16 電力供給回路
100 反応炉
200 搬出治具
210 筒状部材
220 エアバッグ
230 ワイヤ
240 フック
250 板状の弾性部材
260 底板
270 板状部材
275 板状部材の挿入部
280 板状部材
290 バックル
300、305 ローラ付き台車
310 ローラ
Claims (9)
- 鳥居型に組まれたシリコン芯線上に多結晶シリコンを成長させたシリコン棒を反応炉外に取り出す際に用いる多結晶シリコン棒搬出治具であって、
前記多結晶シリコン棒を内部に収容するための筒状部材と、
該筒状部材内に設けられたエアバッグと、を備え、
前記エアバッグは、内部へのガス注入により膨らんだ状態で、前記鳥居型の両柱部を含む平面に垂直な方向から前記多結晶シリコン棒の側面を押圧して前記筒状部材内にホールドする、多結晶シリコン棒搬出治具。 - 前記筒状部材の内周面は互いに対向する2平面を少なくとも1対有しており、該2平面の双方に前記エアバッグが設けられている、請求項1に記載の多結晶シリコン棒搬出治具。
- 前記筒状部材の内周面は互いに対向する2平面を少なくとも1対有しており、該2平面の一方に前記エアバッグが設けられている、請求項1に記載の多結晶シリコン棒搬出治具。
- 前記2平面の他方には、前記多結晶シリコン棒が前記筒状部材内にホールドされた状態で前記多結晶シリコン棒の側面に接する弾性部材が設けられている、請求項3に記載の多結晶シリコン棒搬出治具。
- さらに、内部に前記多結晶シリコン棒をホールドした状態の前記筒状部材を吊上げ移動するための懸垂用治具を備えている、請求項1乃至4の何れか1項に記載の多結晶シリコン棒搬出治具。
- 前記筒状部材の下部に着脱可能な底板が設けられている、請求項1乃至4の何れか1項に記載の多結晶シリコン棒搬出治具。
- 前記筒状部材の互いに対向する2つの内周平面のうちの少なくとも一方の外周面は平滑面である、請求項2乃至4の何れか1項に記載の多結晶シリコン棒搬出治具。
- 前記外周面は、前記筒状部材本体から分離可能である、請求項7に記載の多結晶シリコン棒搬出治具。
- 請求項1乃至4の何れか1項に記載の多結晶シリコン棒搬出治具を用い、
前記筒状部材の内部に多結晶シリコン棒を収容し、前記エアバッグの内部にガス注入して膨らませて前記多結晶シリコン棒を前記筒状部材内にホールドした状態で前記反応炉外に取り出す、多結晶シリコン棒の刈取方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201380006275.XA CN104066677A (zh) | 2012-02-02 | 2013-01-29 | 多晶硅棒搬出夹具及多晶硅棒的获取方法 |
US14/376,257 US20150003952A1 (en) | 2012-02-02 | 2013-01-29 | Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method |
KR1020147019665A KR20140122711A (ko) | 2012-02-02 | 2013-01-29 | 다결정 실리콘 봉 반출 지그 및 다결정 실리콘 봉의 예취 방법 |
EP13742858.7A EP2810919B1 (en) | 2012-02-02 | 2013-01-29 | Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012021015A JP5696063B2 (ja) | 2012-02-02 | 2012-02-02 | 多結晶シリコン棒搬出冶具および多結晶シリコン棒の刈取方法 |
JP2012-021015 | 2012-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013114858A1 true WO2013114858A1 (ja) | 2013-08-08 |
Family
ID=48904905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/000457 WO2013114858A1 (ja) | 2012-02-02 | 2013-01-29 | 多結晶シリコン棒搬出治具および多結晶シリコン棒の刈取方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20150003952A1 (ja) |
EP (1) | EP2810919B1 (ja) |
JP (1) | JP5696063B2 (ja) |
KR (1) | KR20140122711A (ja) |
CN (1) | CN104066677A (ja) |
MY (1) | MY171058A (ja) |
WO (1) | WO2013114858A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104003398A (zh) * | 2014-06-11 | 2014-08-27 | 陕西天宏硅材料有限责任公司 | 一种多晶硅硅棒气动取棒系统 |
WO2015039841A1 (de) * | 2013-09-23 | 2015-03-26 | Wacker Chemie Ag | Verfahren zur herstellung von polykristallinem silicium |
KR101829966B1 (ko) * | 2013-04-10 | 2018-02-19 | 와커 헤미 아게 | 반응기로부터 다결정 실리콘 로드를 회수하기 위한 장치 및 방법 |
CN110481830A (zh) * | 2014-06-03 | 2019-11-22 | 信越化学工业株式会社 | 多晶硅棒的制造方法、多晶硅棒及多晶硅块 |
JP6776486B1 (ja) * | 2019-05-21 | 2020-10-28 | 株式会社トクヤマ | 搬出治具、搬出方法及びシリコンロッドの製造方法 |
WO2020235264A1 (ja) * | 2019-05-21 | 2020-11-26 | 株式会社トクヤマ | 搬出治具、搬出方法及びシリコンロッドの製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5751748B2 (ja) * | 2009-09-16 | 2015-07-22 | 信越化学工業株式会社 | 多結晶シリコン塊群および多結晶シリコン塊群の製造方法 |
DE102014201096A1 (de) | 2014-01-22 | 2015-07-23 | Wacker Chemie Ag | Verfahren zur Herstellung von polykristallinem Silicium |
DE102014222883A1 (de) | 2014-11-10 | 2016-05-12 | Wacker Chemie Ag | Polykristallines Siliciumstabpaar und Verfahren zur Herstellung von polykristallinem Silicium |
JP6314097B2 (ja) | 2015-02-19 | 2018-04-18 | 信越化学工業株式会社 | 多結晶シリコン棒 |
JP6472732B2 (ja) | 2015-09-15 | 2019-02-20 | 信越化学工業株式会社 | 樹脂材料、ビニール製袋、多結晶シリコン棒、多結晶シリコン塊 |
CN106315588A (zh) * | 2016-08-31 | 2017-01-11 | 亚洲硅业(青海)有限公司 | 一种多晶硅还原炉取棒装置 |
WO2018164197A1 (ja) * | 2017-03-08 | 2018-09-13 | 株式会社トクヤマ | 多結晶シリコン加工品の製造方法 |
JP7097309B2 (ja) * | 2019-01-23 | 2022-07-07 | 信越化学工業株式会社 | 樹脂材料、ビニール製袋、多結晶シリコン棒、多結晶シリコン塊 |
EP3984954A4 (en) * | 2019-06-17 | 2024-01-24 | Tokuyama Corporation | ROD-SHAPED BODY, CLAMPING DEVICE, RELEASE METHOD AND METHOD FOR PRODUCING A SILICON ROD |
JP7023325B2 (ja) * | 2020-06-17 | 2022-02-21 | 信越化学工業株式会社 | 樹脂材料、ビニール製袋、多結晶シリコン棒、多結晶シリコン塊 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03218933A (ja) * | 1990-01-22 | 1991-09-26 | Toshiba Ceramics Co Ltd | シリコン単結晶の取り出し運搬装置 |
JP2002210355A (ja) | 2001-01-18 | 2002-07-30 | Sumitomo Titanium Corp | ロッド解体機 |
JP2010254539A (ja) * | 2009-04-28 | 2010-11-11 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
JP2011068553A (ja) | 2009-08-28 | 2011-04-07 | Mitsubishi Materials Corp | 多結晶シリコンの製造方法、製造装置及び多結晶シリコン |
JP2011195441A (ja) | 2010-03-19 | 2011-10-06 | Wacker Chemie Ag | 亀裂のない多結晶シリコンロッドの製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2213629A (en) * | 1937-05-12 | 1940-09-03 | Robert A Fontaine | Brick stack grab |
DE2600290A1 (de) * | 1976-01-07 | 1977-07-14 | Seifert & Co Rich | Verfahren und vorrichtung zum greifen eines gegenstandes |
FR2492911A1 (fr) * | 1980-10-24 | 1982-04-30 | Petroles Cie Francaise | Pince douce de retenue a element gonflable |
FR2649087B1 (fr) * | 1989-06-28 | 1991-10-11 | Aerospatiale | Dispositif pour la prehension d'une charge en bout en vue de sa manutention et installation de manutention pourvue d'un tel dispositif de prehension |
US4989909A (en) * | 1989-08-17 | 1991-02-05 | Franks Casing Crew And Rental Tools, Inc. | Friction grip for tubular goods |
US5372786A (en) * | 1993-07-02 | 1994-12-13 | Abbott Laboratories | Method of holding a sample container |
US6488323B1 (en) * | 1996-04-18 | 2002-12-03 | Frank's Casing Crew And Rental Tools, Inc. | Apparatus for gripping oilfield tubulars without causing damage to such tubulars |
US6382576B1 (en) * | 1999-06-08 | 2002-05-07 | Hill-Rom Services, Inc. | Clamping apparatus |
DE102004039661A1 (de) * | 2004-08-16 | 2006-02-23 | Siemens Ag | Lastaufnahmemittel zur Handhabung von Stückgut |
DE102005038965A1 (de) * | 2004-08-18 | 2006-02-23 | Cetex Chemnitzer Textilmaschinenentwicklung Ggmbh | Lastaufnahmemittel |
EA016412B9 (ru) * | 2005-10-24 | 2012-07-30 | Шелл Интернэшнл Рисерч Маатсхаппий Б.В. | Способы крекинга сырого продукта с целью получения дополнительных сырых продуктов и способ получения транспортного топлива |
US7816232B2 (en) * | 2007-11-27 | 2010-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor substrate and semiconductor substrate manufacturing apparatus |
US7947570B2 (en) * | 2008-01-16 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method and manufacturing apparatus of semiconductor substrate |
CN101624724B (zh) * | 2008-08-22 | 2012-07-25 | 江西赛维Ldk光伏硅科技有限公司 | 多根多晶硅棒的取棒方法及其取棒装置和取棒装置组合件 |
DE102009027830B3 (de) * | 2009-07-20 | 2011-01-13 | Wacker Chemie Ag | Verfahren zur Entnahme von Siliciumstäben aus einem Reaktor |
JP5415914B2 (ja) * | 2009-11-26 | 2014-02-12 | 信越化学工業株式会社 | 炭素電極および多結晶シリコン棒の製造装置 |
US8906453B2 (en) * | 2011-03-18 | 2014-12-09 | MEMC Electronics Materials, S.p.A. | Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor |
-
2012
- 2012-02-02 JP JP2012021015A patent/JP5696063B2/ja active Active
-
2013
- 2013-01-29 KR KR1020147019665A patent/KR20140122711A/ko not_active Application Discontinuation
- 2013-01-29 MY MYPI2014702090A patent/MY171058A/en unknown
- 2013-01-29 CN CN201380006275.XA patent/CN104066677A/zh active Pending
- 2013-01-29 US US14/376,257 patent/US20150003952A1/en not_active Abandoned
- 2013-01-29 WO PCT/JP2013/000457 patent/WO2013114858A1/ja active Application Filing
- 2013-01-29 EP EP13742858.7A patent/EP2810919B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03218933A (ja) * | 1990-01-22 | 1991-09-26 | Toshiba Ceramics Co Ltd | シリコン単結晶の取り出し運搬装置 |
JP2002210355A (ja) | 2001-01-18 | 2002-07-30 | Sumitomo Titanium Corp | ロッド解体機 |
JP2010254539A (ja) * | 2009-04-28 | 2010-11-11 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
JP2011068553A (ja) | 2009-08-28 | 2011-04-07 | Mitsubishi Materials Corp | 多結晶シリコンの製造方法、製造装置及び多結晶シリコン |
JP2011195441A (ja) | 2010-03-19 | 2011-10-06 | Wacker Chemie Ag | 亀裂のない多結晶シリコンロッドの製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2810919A4 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101829966B1 (ko) * | 2013-04-10 | 2018-02-19 | 와커 헤미 아게 | 반응기로부터 다결정 실리콘 로드를 회수하기 위한 장치 및 방법 |
WO2015039841A1 (de) * | 2013-09-23 | 2015-03-26 | Wacker Chemie Ag | Verfahren zur herstellung von polykristallinem silicium |
CN105579395A (zh) * | 2013-09-23 | 2016-05-11 | 瓦克化学股份公司 | 用于生产多晶硅的方法 |
US9738531B2 (en) | 2013-09-23 | 2017-08-22 | Wacker Chemie Ag | Process for producing polycrystalline silicon |
CN110481830A (zh) * | 2014-06-03 | 2019-11-22 | 信越化学工业株式会社 | 多晶硅棒的制造方法、多晶硅棒及多晶硅块 |
CN104003398A (zh) * | 2014-06-11 | 2014-08-27 | 陕西天宏硅材料有限责任公司 | 一种多晶硅硅棒气动取棒系统 |
CN104003398B (zh) * | 2014-06-11 | 2016-04-06 | 陕西天宏硅材料有限责任公司 | 一种多晶硅硅棒气动取棒系统 |
JP6776486B1 (ja) * | 2019-05-21 | 2020-10-28 | 株式会社トクヤマ | 搬出治具、搬出方法及びシリコンロッドの製造方法 |
WO2020235264A1 (ja) * | 2019-05-21 | 2020-11-26 | 株式会社トクヤマ | 搬出治具、搬出方法及びシリコンロッドの製造方法 |
US11958723B2 (en) | 2019-05-21 | 2024-04-16 | Tokuyama Corporation | Unloading jig, unloading method, and method for producing silicon rod |
Also Published As
Publication number | Publication date |
---|---|
MY171058A (en) | 2019-09-23 |
EP2810919B1 (en) | 2020-06-24 |
EP2810919A4 (en) | 2015-11-11 |
EP2810919A1 (en) | 2014-12-10 |
CN104066677A (zh) | 2014-09-24 |
KR20140122711A (ko) | 2014-10-20 |
US20150003952A1 (en) | 2015-01-01 |
JP2013159504A (ja) | 2013-08-19 |
JP5696063B2 (ja) | 2015-04-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5696063B2 (ja) | 多結晶シリコン棒搬出冶具および多結晶シリコン棒の刈取方法 | |
JP6165994B2 (ja) | シリコンロッドの受け取りおよび運搬のための装置、ならびに多結晶シリコンを作製するための方法 | |
KR101955079B1 (ko) | 다결정 실리콘의 제조 방법 | |
JP5415914B2 (ja) | 炭素電極および多結晶シリコン棒の製造装置 | |
JP2010047470A (ja) | 一種の多結晶シリコン棒の取出し方法及び当該方法に使用される取出し装置と取出し装置の組合せ | |
JP5927808B2 (ja) | 多結晶シリコンロッド解体機および解体装置 | |
KR20190019053A (ko) | 다결정 실리콘 로드 및 그 제조 방법 | |
US8551439B2 (en) | Method of refining carbon parts for production of polycrystalline silicon | |
JP5820896B2 (ja) | 多結晶シリコンの製造方法 | |
US20200239321A1 (en) | Method for producing polycrystalline silicon | |
JP5542031B2 (ja) | 多結晶シリコンの製造方法および多結晶シリコンの製造システム | |
KR20150140784A (ko) | 반응기로부터 다결정 실리콘 로드를 회수하기 위한 장치 및 방법 | |
JP2015030628A (ja) | 多結晶シリコンロッドの製造方法 | |
JP2013071856A (ja) | 多結晶シリコン製造装置および多結晶シリコンの製造方法 | |
CN107867693A (zh) | 用于分离多晶硅‑碳夹头的装置和方法 | |
WO2014054260A1 (ja) | 多結晶シリコン製造装置 | |
JP5642857B2 (ja) | 炭素電極および多結晶シリコン棒の製造装置 | |
JP2018065717A (ja) | 多結晶シリコン反応炉 | |
JP2018150236A (ja) | 多結晶シリコン、多結晶シリコン製造用反応炉及び多結晶シリコンの製造方法 | |
KR101172786B1 (ko) | 슬림 로드 원형 가공 장치 | |
JPH02102523A (ja) | ウェハーボート | |
JP2003277093A (ja) | ガラス母材の製造方法及び製造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13742858 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20147019665 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2013742858 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14376257 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |