WO2013084986A1 - テクスチャー構造を有するシリコン基板の製法 - Google Patents
テクスチャー構造を有するシリコン基板の製法 Download PDFInfo
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- WO2013084986A1 WO2013084986A1 PCT/JP2012/081633 JP2012081633W WO2013084986A1 WO 2013084986 A1 WO2013084986 A1 WO 2013084986A1 JP 2012081633 W JP2012081633 W JP 2012081633W WO 2013084986 A1 WO2013084986 A1 WO 2013084986A1
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- meth
- silicon substrate
- carbon atoms
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- 239000000758 substrate Substances 0.000 title claims abstract description 220
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- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
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- BTURAGWYSMTVOW-UHFFFAOYSA-M sodium dodecanoate Chemical compound [Na+].CCCCCCCCCCCC([O-])=O BTURAGWYSMTVOW-UHFFFAOYSA-M 0.000 description 1
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- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
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- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- XZTJQQLJJCXOLP-UHFFFAOYSA-M sodium;decyl sulfate Chemical compound [Na+].CCCCCCCCCCOS([O-])(=O)=O XZTJQQLJJCXOLP-UHFFFAOYSA-M 0.000 description 1
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- 125000000542 sulfonic acid group Chemical group 0.000 description 1
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- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
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- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
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- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- ZLGWXNBXAXOQBG-UHFFFAOYSA-N triethoxy(3,3,3-trifluoropropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)F ZLGWXNBXAXOQBG-UHFFFAOYSA-N 0.000 description 1
- NYIKUOULKCEZDO-UHFFFAOYSA-N triethoxy(3,3,4,4,5,5,6,6,6-nonafluorohexyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)F NYIKUOULKCEZDO-UHFFFAOYSA-N 0.000 description 1
- AVYKQOAMZCAHRG-UHFFFAOYSA-N triethoxy(3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F AVYKQOAMZCAHRG-UHFFFAOYSA-N 0.000 description 1
- MLXDKRSDUJLNAB-UHFFFAOYSA-N triethoxy(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F MLXDKRSDUJLNAB-UHFFFAOYSA-N 0.000 description 1
- XQDKPCKQUIWESK-UHFFFAOYSA-N triethoxy-[5,5,6,6,7,7,8,8,9,9,10,10,10-tridecafluoro-2-(1,1,2,2,3,3,4,4,5,5,6,6,6-tridecafluorohexyl)decyl]silane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(C[Si](OCC)(OCC)OCC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F XQDKPCKQUIWESK-UHFFFAOYSA-N 0.000 description 1
- IJROHELDTBDTPH-UHFFFAOYSA-N trimethoxy(3,3,4,4,5,5,6,6,6-nonafluorohexyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)F IJROHELDTBDTPH-UHFFFAOYSA-N 0.000 description 1
- KGDRVNVVENRUAE-UHFFFAOYSA-N trimethoxy-[3-(1,2,2,3,3,4,4,5,5,6,6-undecafluorocyclohexyl)oxypropyl]silane Chemical compound CO[Si](OC)(OC)CCCOC1(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)F KGDRVNVVENRUAE-UHFFFAOYSA-N 0.000 description 1
- RDYMVWVBSWCBKT-UHFFFAOYSA-N trimethoxy-[5,5,6,6,7,7,8,8,9,9,10,10,10-tridecafluoro-2-(1,1,2,2,3,3,4,4,5,5,6,6,6-tridecafluorohexyl)decyl]silane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(C[Si](OC)(OC)OC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RDYMVWVBSWCBKT-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
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- 239000002888 zwitterionic surfactant Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3085—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by their behaviour during the process, e.g. soluble masks, redeposited masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present invention relates to a texture structure in which a concave structure is selectively formed under a pattern portion (in this specification, the term “texture structure” means “a structure having a fine uneven shape”).
- the present invention relates to a method for manufacturing a silicon substrate. Furthermore, this invention relates also to the composition containing resin used in the said manufacturing method, especially the composition containing a photocurable composition.
- a texture structure inverted pyramid shape
- a silicon wafer for solar cells or LED substrates a prism structure, and an arbitrary uneven structure derived from a pattern
- the silicon substrate in which the concave structure is selectively formed in the substrate portion corresponding to the pattern portion obtained by the above-described manufacturing method, is also used as a nanoimprint mold.
- Forming a texture structure on a silicon substrate is not only the formation of a circuit for a semiconductor, but also the formation of a texture structure on a silicon substrate for solar cells, the formation of a prism structure as an antireflection, the formation of a fine relief structure, the luminous efficiency as an LED substrate, It is used in various applications such as improvement of light extraction efficiency, formation of fine concavo-convex structure for GaN growth, and formation of barrier rib structure for cell culture.
- a texture structure on the surface of a silicon substrate generally forms a texture structure with a regular arrangement. Therefore, in general, fine processing techniques such as electron beam drawing, photolithography using a mask, dry etching, ion beam, etc.
- fine processing techniques such as electron beam drawing, photolithography using a mask, dry etching, ion beam, etc.
- As a resist mask various masks directly formed by screen printing, ink jet printing, imprint technology, etc. are used in addition to a transparent substrate such as quartz on which a mask pattern is drawn with a metal or the like. .
- a technique for forming a concavo-convex structure by directly etching the surface of a silicon substrate using an etching solution is also generally used.
- an etching process using an acid etching solution or an alkaline etching solution is used as a general method for forming a fine concavo-convex structure on a silicon substrate for a solar cell.
- forming a regular texture structure on the surface of the silicon substrate is an effective means for efficiently taking incident light from the surface into the substrate.
- the etching method using an acid etching solution or an alkali etching solution that is generally used is anisotropic etching by utilizing the fact that the etching rate of the 100, 110, and 111 planes differs in the crystal orientation plane of silicon.
- the texture structure to be formed is irregular in terms of the size of the irregularities and the arrangement, and is generally randomly arranged in a size of about 1 ⁇ m to 10 ⁇ m, and is not aligned. There were drawbacks.
- the texture structure to be formed cannot be made into a regular arrangement with a size of several ⁇ m or less and clean, so that the power generation efficiency is improved. There was a limit.
- Non-Patent Document 1 When a texture structure is formed on a silicon substrate for a solar cell, according to a group of Professor Martin Green of the University of New South Wales, Australia, a solar cell in which an inverted pyramid structure with a side of about several ⁇ m is regularly arranged In the cell, the conversion efficiency is 24.7%, and it has been reported that the maximum efficiency can be exhibited (Non-Patent Document 1).
- the inverted pyramid structure on the surface is processed by a photolithography technique used in a semiconductor integrated circuit element.
- the imprint technology can easily form a large area and patterning on the order of several nm to several hundred ⁇ m at low cost. Due to its nature, it has attracted particular attention.
- the imprint technique is a technique for transferring a desired pattern onto the surface of the substrate by embossing a mold having a concavo-convex pattern corresponding to the pattern to be formed on the coating film formed on the surface of the substrate.
- imprint techniques in particular, a technique for forming an ultrafine pattern of several nm to several ⁇ m is called a nanoimprint technique (hereinafter, including both imprint technique and nanoimprint technique, Simply “imprint technology”).
- Patent Document 1 discloses a large texture by transferring irregularities to a base layer on a translucent insulating substrate by a nanoimprint method. Techniques for forming the structure are disclosed.
- Non-Patent Document 2 discloses the production of an antireflection structure on the surface of a silicon substrate by a nanoimprint method using porous alumina.
- a silicon wafer having a texture structure formed on the surface of a silicon substrate by a known acid etching solution or alkaline etching solution processing method is used as a mold.
- the texture structure obtained by the method disclosed in Patent Document 1 corresponds to the texture structure of the mold used, the texture obtained by the technique of forming the texture structure on the silicon substrate surface by the conventional etching solution treatment Since it is substantially the same as the structure, there are variations in size and arrangement, and when a silicon substrate having the obtained texture structure is used as a solar cell substrate, incident light from the surface can be efficiently taken in. There was a limit.
- Non-Patent Document 2 The production of an antireflection structure on the surface of a silicon substrate by imprinting using porous alumina described in Non-Patent Document 2 is as follows: That is, using a silicon substrate with a surface oxide film (SiO 2 ), To secure adhesion to the photo-curing resin, PAK-01 (manufactured by Toyo Gosei Co., Ltd.) is applied on the silicon substrate, and a resist pattern in the form of a hole array is produced by irradiating ultraviolet rays through a transparent mold. Removing the resist residual film layer and the oxide film in the resist opening by argon ion milling; and performing chemical etching in a hydrazine solution to form an inverted pyramid array structure on the silicon substrate surface.
- PAK-01 manufactured by Toyo Gosei Co., Ltd.
- the surface portion of the silicon substrate corresponding to the resist opening is etched by chemical etching with a hydrazine solution to form a concave structure.
- the resist pattern residue and surface oxide film used as the mask need to be removed again by etching, which requires a multi-step process. There was room for improvement in that.
- An object of the present invention is to provide a method for producing a silicon substrate having a texture structure, which can reduce the number of manufacturing steps and easily form a regular texture structure on the surface of the silicon substrate as compared with the conventional method. Furthermore, the other object of this invention is to provide the composition containing resin used in the manufacturing method of the silicon substrate which has the said texture structure, especially the composition containing photocurable resin.
- the present inventors have conducted intensive studies to solve the above problems.
- the prior art is a method of using the formed resist pattern as a mask and excavating a concave structure on the surface of the silicon substrate corresponding to the opening of the resist pattern. It has been found that a concave structure is formed on the surface of the silicon substrate under the formed pattern portion, and that an excellent effect that a regular texture structure corresponding to the formed pattern can be easily formed is exhibited.
- the present invention has been completed.
- the present invention is a method of manufacturing a silicon substrate having a regular texture structure, (A) forming a pattern with a composition containing a resin on a silicon substrate; (B) a step of irradiating the silicon substrate surface other than the pattern portion with an etching gas, (C) a step of treating the silicon substrate irradiated with the etching gas with an alkaline etching solution to form a concave structure under the pattern portion;
- the present invention relates to a method of manufacturing a silicon substrate having a texture structure.
- the “pattern portion” means a convex portion formed by laminating a resin on a silicon substrate. Specifically, when the resin is printed on the silicon substrate in a line shape, the line is a pattern portion. Also, the resin is applied on the silicon substrate, and then a concavo-convex structure is formed by embossing with a mold. In the so-called imprint method, the convex portion of the resin concavo-convex structure on the silicon substrate is the pattern portion.
- the concave structure is formed under the pattern portion means that the concave structure is formed over substantially the entire area below the pattern portion.
- etching gas is used except for the pattern portion.
- the thin remaining portion of the coating film other than the pattern portion referred to as “residual film”.
- the silicon substrate irradiated with the etching gas is treated with an alkaline etching solution, The surface of the silicon substrate under the pattern portion of the lattice or reciprocal lattice is etched, and the concave structure is easily formed.
- the prism structure can be easily formed by performing the same.
- Non-Patent Document 2 it is not necessary to use a surface-oxidized silicon substrate usually used in semiconductor circuit formation or the like as a silicon substrate, and the step of forming a surface oxide film is performed. A silicon substrate that has not passed can be used as it is. Further, in the method of Non-Patent Document 2, a concave structure is formed in a portion (resist opening) other than the resist pattern (corresponding to the “pattern portion” in the present invention) of the silicon substrate, so that the pattern is formed. The resist layer remains in close contact with the silicon substrate via the surface oxide film (SiO 2 film).
- the resist layer forming the pattern portion is used as a residue as a silicon substrate. It exists on the silicon substrate in a form in which the adhesion is eliminated. For this reason, the residue can be easily removed by rinsing the alkaline solution without irradiating the etching gas again as in the prior art.
- the method for producing a silicon substrate having a texture structure of the present invention can use a silicon substrate that has not undergone the step of forming a surface oxide film as it is, and also forms a pattern residue after being treated with an alkaline etching solution.
- the silicon substrate having a clean and regular texture structure can be easily obtained by rinsing the alkaline solution while maintaining the texture structure thus obtained, and having a high productivity and a clean and regular texture structure.
- a silicon substrate having a texture structure corresponding to the pattern shape and pattern arrangement can be easily manufactured.
- the concave structure is formed under the pattern portion, the surface area of the convex portion of the pattern in the mold to be used is small compared to the method described in Non-Patent Document 2, and the mold to the coating film of the resin-containing composition In addition to being excellent in pattern transfer accuracy, it is easy to form the remaining film thinly.
- the silicon substrate produced by the method for producing a silicon substrate having a texture structure according to the present invention described above is used as a silicon substrate for solar cells and LEDs, or as a mold for nanoimprinting.
- FIG. 2 is an electron micrograph showing a surface fine structure of a silicon substrate before rinsing, which was produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 2 is an electron micrograph showing a surface fine structure of a silicon substrate before rinsing, which was produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 2 is an electron micrograph showing a cross-sectional microstructure of a silicon substrate before rinsing, which is produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 2 is an electron micrograph showing the surface microstructure of a silicon substrate after rinsing treatment produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 2 is an electron micrograph showing a cross-sectional microstructure of a silicon substrate after rinsing treatment produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 1 is an electron micrograph showing a cross-sectional microstructure of a silicon substrate before rinsing, which is produced by a method for producing a silicon substrate having a texture structure of the present invention shown in Example 1.
- FIG. 2 It is an electron micrograph which shows the surface fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 2.
- FIG. It is an electron micrograph which shows the cross-sectional fine structure of the silicon substrate before the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 3.
- FIG. It is an electron micrograph which shows the surface fine structure of the silicon substrate before the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 3.
- FIG. It is an electron micrograph which shows the surface fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 4.
- FIG. 6 is an electron micrograph showing the surface microstructure of the nanoimprint pattern shown in Example 8.
- FIG. 8 It is an electron micrograph which shows the cross-sectional fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 8.
- FIG. It is an electron micrograph which shows the surface fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 11.
- FIG. It is an electron micrograph which shows the cross-sectional fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in Example 11.
- FIG. It is an electron micrograph which shows the surface fine structure of the silicon substrate after the rinse process produced by the manufacturing method of the silicon substrate which has the texture structure of this invention shown in the comparative example 1.
- the method for producing a silicon substrate having a texture structure includes (A) a step of forming a pattern with a composition containing a resin on the silicon substrate, and (B) irradiating the silicon substrate surface other than the pattern portion with an etching gas. And (C) treating the silicon substrate irradiated with the etching gas with an alkaline etching solution to form a concave structure under the pattern portion.
- the silicon substrate 1 that has not undergone the step of forming the SiO 2 film that is an oxide film is used, and the pattern 2 made of the resin-containing composition is formed on the silicon substrate.
- a resin-containing composition (ink) is applied, a pattern is transferred onto the formed ink coating film using a grid mold (convex line), and ultraviolet irradiation is performed.
- the pattern 2 is formed by curing the ink according to various curing methods.
- the formed pattern 2 includes a pattern portion 3 and a remaining film 4 (see FIG. 1A).
- step (B) an etching gas is irradiated toward the pattern 2 composed of the pattern portion 3 and the remaining film 4 formed on the silicon substrate.
- the residual film 4 of the pattern is removed and the silicon substrate is exposed.
- the etching gas is irradiated to the silicon substrate surface other than the pattern portion 3.
- the pattern portion 3b is also slightly removed, and the thickness is reduced (see FIG. 1B).
- FIG. 1F is a perspective view showing an outline of a pattern form on the silicon substrate after irradiation with the etching gas.
- the present invention has an advantage that a substrate that has not undergone the step of forming an oxide film can be used as it is. This means that in the present invention, a substrate that has undergone a step of forming an oxide film is used. Is not to deny.
- FIG.1 (g) is a perspective view which shows the outline of the form of the texture structure formed in the silicon substrate.
- a known pattern forming method can be used without any limitation. Considering pattern formation, a method of forming a pattern by imprint technology is preferably used.
- the method is roughly classified into two types according to the characteristics of the coating material formed on the substrate surface.
- One of them is a method of transferring a pattern by heating and plastically deforming a coating material to which a pattern is transferred, and then pressing and cooling a mold to cure the coating material.
- the other one is one in which at least one of the mold or the substrate is light-transmitting, and a liquid photocurable composition is applied onto the substrate to form a coating film, and the mold is pressed to be applied.
- the pattern is transferred by bringing it into contact with a film and then curing the coating material by irradiating light through a mold or a substrate.
- the optical nanoimprint method for transferring a pattern by light irradiation is capable of forming a highly accurate pattern, and thus is widely used in imprint technology, and the method is preferably used in the present invention. Can do.
- Nanoimprint indicates that a pattern of 5 nm to 100 ⁇ m, and a fine pattern of 5 nm to 500 nm can be formed well. However, as a matter of course, it can be used to form a pattern exceeding 100 ⁇ m.
- a coating film is formed by applying the resin-containing composition on a substrate according to a known method.
- a coating method a known method such as a spin coating method, a dipping method, a spray coating method, a dispensing method, an ink jet method, a roll-to-roll method, a gravure method, a die coating method, a bar coating method, or a curtain coating method can be used.
- the thickness of the coating film is not particularly limited and may be appropriately determined depending on the intended use, but is usually 0.01 ⁇ m to 100 ⁇ m.
- the pattern forming surface of the mold on which a desired pattern is formed is brought into contact with the coating film.
- the mold is formed of a transparent material such as quartz, a resin film, polydimethylsiloxane, polyvinyl alcohol, or the like so that the applied composition can be cured through light irradiation. It is preferable.
- a mold formed of a resin film, polydimethylsiloxane, polyvinyl alcohol, or the like is preferably used because it is highly flexible and can follow even when a silicon substrate with poor surface roughness is used. be able to.
- a mold made of polydimethylsiloxane having good releasability is peeled off with low stress when the mold is peeled off from the cured coating film, and the adhesion between the silicon substrate and the cured coating film is impaired. Therefore, it can be used more preferably.
- the mold formed of polydimethylsiloxane may be imprinted with the organic solvent contained in the resin-containing composition, or may be dried after peeling.
- the pressure at this time is not particularly limited, but the pattern can be transferred at a pressure of 0.01 MPa to 1 MPa. As a matter of course, the pattern can be transferred even at a pressure higher than the upper limit of the pressure.
- the coating film is cured by irradiating light while keeping the pattern forming surface of the mold in contact with the coating film.
- the light to be irradiated has a wavelength of 600 nm or less, and the light irradiation time is selected from the range of 0.1 second to 300 seconds. Although it depends on the thickness of the coating film, etc., it is usually 1 second to 60 seconds.
- the atmosphere for photopolymerization can be polymerized even in the air, but in order to promote the photopolymerization reaction, photopolymerization in an atmosphere with little oxygen inhibition is preferred.
- a nitrogen gas atmosphere, an inert gas atmosphere, a fluorine-based gas atmosphere, a vacuum atmosphere, or the like is preferable.
- the mold After photocuring, the mold is separated from the cured coating film, whereby a pattern made of the cured coating film (cured film) is formed on the silicon substrate.
- the silicon substrate used in the present invention may be either single crystal silicon or polycrystalline silicon, but in general, single crystal silicon can be easily formed in consideration of formation of a texture structure by alkali etching described later. Therefore, it is preferably used.
- the silicon substrate and the resin-containing composition are in close contact with each other. If formation is possible, it will not restrict
- a thermoplastic resin, a thermosetting resin, a photocurable resin, etc. can be mentioned.
- the resin is preferably a photocurable resin, and is not particularly limited as long as it is a resin-containing composition that adheres, but is not limited to photocuring.
- a composition containing a functional resin is preferably used because it has good adhesion to a silicon substrate and can form a pattern by treatment with an alkaline etchant more easily and in a short time.
- the photocurable resin of the present invention will be described.
- the photocurable resin generally comprises a polymerizable monomer and a photopolymerization initiator.
- a known photocurable resin can be used without any limitation.
- the viscosity of the composition for forming the pattern is low. Since the lower one is advantageous, as a photocurable resin, what contains the polymerizable monomer which has a (meth) acryl group can be used more preferably.
- the polymerizable monomer having a (meth) acryl group ((meth) acryl group-containing polymerizable monomer) is particularly limited. It is not a thing and the well-known polymerizable monomer used for photopolymerization can be used. As a matter of course, this (meth) acryl group-containing polymerizable monomer does not contain (meth) acryl group-containing alkoxysilane. And as a preferable compound, the polymerizable monomer which has a (meth) acryl group and does not contain a silicon atom in a molecule
- numerator is mentioned.
- These polymerizable monomers may be monofunctional polymerizable monomers having one (meth) acryl group in one molecule, or have two or more (meth) acryl groups in one molecule.
- a polyfunctional polymerizable monomer may be used.
- these monofunctional polymerizable monomers and polyfunctional polymerizable monomers can also be used in combination.
- the (meth) acrylic group-containing polymerizable monomers those having a vinyl ether group are preferably used from the viewpoint of further enhancing the effects of the present invention because the polymerization reaction proceeds by heat treatment in addition to photopolymerization. it can.
- the (meth) acrylic group-containing polymerizable monomer include monofunctional polymerizable monomers containing one (meth) acrylic group in one molecule, for example, methyl (meth) acrylate. , Ethyl (meth) acrylate, propyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, tert-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isodecyl (meth) acrylate, isoamyl (Meth) acrylate, isomyristyl (meth) acrylate, n-lauryl (meth) acrylate, n-stearyl (meth) acrylate, isostearyl (meth) acrylate, long chain alkyl (meth) acrylate, n-butoxyethyl (meth) Acrylate, butoxydi
- examples of the bifunctional polymerizable monomer include monomers having an alkylene oxide bond in the molecule.
- R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom or a methyl group; a and b are each an integer of 0 or more, provided that the average value of a + b is 2 to 25).
- the polyolefin glycol di (meth) acrylate represented by the general formula (1) is usually obtained from a mixture of molecules having different molecular weights. Therefore, the value of a + b is an average value.
- the average value of a + b is preferably 2 to 15, and particularly preferably 2 to 10.
- bifunctional polymerizable monomers include ethoxylated polypropylene glycol di (meth) acrylate, 2-hydroxy-3-acryloyloxypropyl (meth) acrylate, 2-hydroxy-1,3-di (meth) ) Acryloyloxypropane, dioxane glycol di (meth) acrylate, tricyclodecane dimethanol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, glycerin di (meth) acrylate, 1,6-hexanediol Di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, 1,10-decanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 2-methyl-1,8-octanediol di (Meth) acrylate, 1,9-nonanediol di (
- the polyfunctional polymerizable monomer having three or more (meth) acrylate groups in one molecule includes ethoxylated glycerin tri (meth) acrylate, trimethylolpropane tri ( (Meth) acrylate, ethoxylated trimethylolpropane tri (meth) acrylate, propoxylated trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate (trifunctional polymerizable monomer); pentaerythritol tetra (meth) acrylate , Ditrimethylolpropane tetra (meth) acrylate, ethoxylated pentaerythritol tetra (meth) acrylate (tetrafunctional polymerizable monomer); dipentaerythritol polyacrylate (other polyfunctional polymerizable monomers).
- a polymerizable monomer containing a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxy Butyl (meth) acrylate, hydroxyethyl (meth) acrylamide, hydroxyphenoxyethyl (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, hydroxyphenoxyethylene glycol modified (meth) acrylate, hydroxyphenoxypropylene glycol modified ( (Meth) acrylate, 2-hydroxy-3-acryloyloxypropyl (meth) acrylate, 2-hydroxy-1,3-di (meth) acryloyloxypropane, pentaerythritol tri (meth) acrylate DOO like is particularly excellent in adhesion to a silicon substrate, either alone, or preferably used in combination with a polymerizable monomer
- a polymerizable monomer containing an acidic group such as a phosphoric acid group, a carboxylic acid group, or a sulfonic acid group in addition to the (meth) acrylic group
- an acidic group-containing polymerizable monomer having a (meth) acryl group it is preferable to use together the body (a ′) (hereinafter sometimes referred to as “an acidic group-containing polymerizable monomer having a (meth) acryl group”).
- the photocurable resin contains an acidic group-containing polymerizable monomer (a ′) having a (meth) acryl group in addition to the polymerizable monomer (a) having a (meth) acryl group.
- (A ′) Acidic group-containing polymerizable monomer having a (meth) acrylic group The acidic group-containing polymerizable monomer having a (meth) acrylic group is not particularly limited and is used for photopolymerization.
- a known polymerizable monomer having a phosphoric acid group, a carboxylic acid group, or a sulfo group can be used.
- these polymerizable monomers having a phosphoric acid group, a carboxylic acid group, or a sulfo group may be used in combination.
- polymerizable monomer having a phosphoric acid group examples include phosphoric acid mono (2- (meth) acryloyloxyethyl), phosphoric acid mono (3- (meth) acryloyloxypropyl), phosphoric acid mono ( 4- (meth) acryloyloxybutyl), monophosphate (5- (meth) acryloyloxypentyl), monophosphate (6- (meth) acryloyloxyhexyl), monophosphate (7- (meth) acryloyloxyheptyl) ), Mono (8- (meth) acryloyloxyoctyl) phosphate, mono (9- (meth) acryloyloxynonyl) phosphate, mono (10- (meth) acryloyloxydecyl) phosphate, bis [2- (Meth) acryloyloxyethyl], bis [4- (meth) acryloyloxybutyl] phosphate, bis [6
- polymerizable monomer having a carboxyl group examples include mono [2- (meth) acryloyloxyethyl] phthalate, mono [2- (meth) acryloyloxyethyl] isophthalate, and mono [2] terephthalate.
- polymerizable monomer having a sulfo group examples include 2- (meth) acryloyloxyethanesulfonic acid, 3- (meth) acryloyloxypropanesulfonic acid, 4- (meth) acryloyloxybutanesulfonic acid, 5- (meth) acryloyloxypentanesulfonic acid, 6- (meth) acryloyloxyhexanesulfonic acid, 7- (meth) acryloyloxyheptanesulfonic acid, 8- (meth) acryloyloxyoctanesulfonic acid, 9- (meth) Examples thereof include polymerizable monomers having a sulfo group such as acryloyloxynonanesulfonic acid, 10- (meth) acryloyloxydecanesulfonic acid, and 2- (meth) acryloyloxyethylbenzenesulfonic acid.
- these polymerizable monomers can be used in combination of a plurality of types according to the intended use and the shape of the pattern to be formed.
- the affinity for the alkaline etching solution is generally 95/5 to 20/80 by weight, preferably 90/10 to 40/60, and more preferably 80/20 to 60/40.
- the resin-containing composition is added to the above-described photo-curable resin containing the (meth) acrylic group-containing polymerizable monomer. It is preferable to contain a silicon compound, and it is more preferable to contain a silicon compound having a siloxane bond among silicon compounds. By adding a silicon compound having a siloxane bond, an appropriate familiarity (dissolution or swelling) of the resin-containing composition with respect to the alkaline etching solution used in the step (C) described later can be caused.
- the silicon compound having such a siloxane bond any known compound can be used, but alkoxysilanes or hydrolysates of alkoxysilanes can be used.
- the decomposition product for example, the following hydrolysis products of alkoxysilanes can be used.
- Hydrolyzate of alkoxysilanes is a product of hydrolysis of a part or all of alkoxy groups of alkoxysilanes, a polycondensate of alkoxysilanes, one of the alkoxy groups of the polycondensates. By partial or total hydrolysis products and various mixtures thereof are meant.
- the alkoxysilane is not particularly limited as long as it has one or more alkoxy groups with respect to the silicon atom and can be hydrolyzed.
- a group other than the alkoxy group includes a phenyl group and a naphthyl group.
- Functional groups such as alkoxysilanes having aromatic rings such as groups, biphenyl groups, (meth) acrylic groups (meaning methacrylic groups or acrylic groups), epoxy groups, thiol groups, hydroxyl groups, carboxyl groups, phosphonium groups, sulfonyl groups, etc. It may be an alkoxysilane having a halogen element such as fluorine silane, chlorine, or a mixture thereof.
- the hydrolysis of the alkoxysilane having a (meth) acrylic group is performed.
- a decomposition product is preferably included, and when the photocurable resin contains a polymerizable monomer having an epoxy group, an alkoxysilane-containing alkoxysilane hydrolyzate is preferably used as the alkoxysilane.
- the alkoxysilane containing an alkoxysilane is contained in the alkoxysilane in consideration of adhesion between the substrate and the pattern and releasability when the mold is peeled off from the pattern.
- alkoxysilanes that are alkoxysilanes, (meth) acryl group-containing alkoxysilanes, and alkoxysilanes having a halogen element will be described.
- general alkoxysilane alkoxysilanes include those represented by the general formula (2)
- An alkoxysilane represented by the formula (wherein R 5 is the same or different alkyl group having 1 to 4 carbon atoms, and n is an integer of 1 to 10) can be preferably used.
- the adhesion to the silicon substrate is good, and the texture structure can be formed more easily and in a short time by treatment with an alkaline etching solution.
- the resulting photocurable imprint composition is advantageous for pattern transfer at a relatively lower pressure.
- R 5 which is an alkyl group having 1 to 4 carbon atoms includes methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, isobutyl group, and ter-butyl group. Of these, a methyl group and an ethyl group are preferable.
- This alkoxy group consisting of —OR 5 generates an alcohol derived from R 5 upon hydrolysis, but the resin-containing composition may contain this alcohol.
- R 5 is a methyl group, ethyl It is preferably a group.
- the alkoxysilane may be a single compound or a plurality of alkoxysilanes having different values of n as long as n satisfies the integer of 1 to 10 in the general formula (2). It may be a mixture of In the case of using a single compound, the value of n is preferably 2 to 10 and more preferably 3 to 7 in consideration of pattern transfer at a relatively low pressure and transfer of a fine pattern of 100 nm or less. It is preferable. When a mixture is used, the average value of n is preferably 1.1 to 10.
- alkoxysilanes include tetramethoxysilane, tetraethoxysilane, tetrapropoxysilane, tetrabutoxysilane, and polycondensates thereof.
- tetramethoxysilane, tetraethoxysilane, and polycondensates thereof are preferred because they are alcohols that can be easily removed after the formation of the coating film, and because of reactivity, in particular, the value of n or n Preferred is tetramethoxysilane having a mean value of 3 to 7 or a polycondensate of tetraethoxysilane.
- the (meth) acrylic group-containing alkoxysilane has the general formula (3) (Wherein R 6 is a hydrogen atom or a methyl group; R 7 is an alkylene group having 1 to 10 carbon atoms, a cycloalkylene group having 3 to 10 carbon atoms, or a polymethylene group having 3 to 10 carbon atoms; R 8 is an alkyl group having 1 to 4 carbon atoms, a cycloalkyl group having 3 to 4 carbon atoms, or an aryl group having 6 to 12 carbon atoms; R 9 is an alkyl group having 1 to 4 carbon atoms or 3 carbon atoms A cycloalkyl group of ⁇ 4; l is an integer of 1 to 3, m is an integer of 0 to 2, k is an integer of 1 to 3, and l + m + k is 4; R 6 , R 7 , R 8 and R 9 are each present, the plurality of R 6 , R 7 , R 8 and R 9 are each present, the pluralit
- a composition with good dispersibility can be obtained, purification by filtration is easy, and productivity is good, which is preferable.
- the hydrolyzate of (meth) acrylic group-containing alkoxysilane is included, in the fine structure of the cured film obtained by photocuring, the inorganic component and the organic component are dispersed in a relatively homogeneous state. (It does not become a dispersed state in which inorganic components are extremely aggregated). As a result, a uniform transfer pattern and a uniform residual film can be formed, and it is estimated that the variation in etching resistance is reduced.
- R 6 is a hydrogen atom or a methyl group. Of these, hydrogen atoms are preferred because the photocuring speed when curing the resin-containing composition is high.
- R 7 is an alkylene group having 1 to 10 carbon atoms or a cycloalkylene group having 3 to 10 carbon atoms.
- the alkylene group having 1 to 10 carbon atoms includes methylene group, ethylene group, propylene group, isopropylene group, cyclopropylene group, butylene group, isobutylene group, sec-butylene group, tert-butylene group, cyclohexane Butylene group, cyclopropylmethylene group, 2,2-dimethylpropylene group, 2-methylbutylene group, 2-methyl-2-butylene group, 3-methylbutylene group, 3-methyl-2-butylene group, pentylene group, 2 -Pentylene group, 3-pentylene group, 2,3-dimethyl-2-butylene group, 3,3-dimethylbutylene group, 3,3-dimethyl-2-butylene group, 2-ethylbutylene group, hexylene group, 2- Hexylene group
- the alkylene group having 1 to 10 carbon atoms is preferably a methylene group, an ethylene group, a propylene group, an isopropylene group, a butylene group, a trimethylene group, or a tetramethylene group.
- the cycloalkylene group having 3 to 10 carbon atoms include a cyclopentylene group, a cyclohexylene group, and a cyclooctylene group.
- R 8 is an alkyl group having 1 to 4 carbon atoms, a cycloalkyl group having 3 to 4 carbon atoms, or an aryl group having 6 to 12 carbon atoms.
- the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, and a tert-butyl group;
- Examples of the cycloalkyl group include a cyclopropyl group, a cyclobutyl group, and a cyclopropylmethyl group;
- examples of the aryl group having 6 to 12 carbon atoms include benzene derivatives such as a phenyl group and a benzyl group, a 1-naphthyl group, a 2-naphthyl group, and o- Naphthalene derivatives such as
- R 9 is an alkyl group having 1 to 4 carbon atoms or a cycloalkyl group having 3 to 4 carbon atoms.
- the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, and a tert-butyl group;
- Examples of the cycloalkyl group include a cyclopropyl group, a cyclobutyl group, and a cyclopropylmethyl group.
- This alkoxy group consisting of —OR 5 generates an alcohol derived from R 5 upon hydrolysis, but the resin-containing composition used in the present invention may contain this alcohol. Therefore, considering that it becomes an alcohol that can be easily mixed with other components, and that it becomes an alcohol that can be easily removed after forming a coating film on a substrate, specifically, R 5 is a methyl group, ethyl Group, propyl group, isopropyl group and butyl group are preferred.
- L is an integer from 0 to 2
- m is an integer from 0 to 2
- k is an integer from 1 to 3
- l + m + k is 4.
- (meth) acrylic group-containing alkoxysilanes include trimethoxysilylmethylene (meth) acrylate, trimethoxysilyldimethylene (meth) acrylate, trimethoxysilyltrimethylene (meth) acrylate, triethoxy Silylmethylene (meth) acrylate, triethoxysilyldimethylene (meth) acrylate, triethoxysilyltrimethylene (meth) acrylate, tripropoxysilylmethylene (meth) acrylate, tripropoxysilylethylene (meth) acrylate, tripropoxysilyl trimethylene (Meth) acrylate, tributoxysilylmethylene (meth) acrylate, tributoxysilyldimethylene (meth) acrylate, tributoxysilyltrimethylene (meth) acryl , Triisopropoxysilylmethylene (meth) acrylate, triisopropoxysilyldimethylene
- the plurality of R 10 , R 11 and R 12 may be the same or different groups, respectively).
- R 10 and R 12 are an alkyl group having 1 to 10 carbon atoms or a cycloalkyl group having 3 to 10 carbon atoms, preferably a methyl group, an ethyl group, a propyl group, an isopropyl group. Butyl group, sec-butyl group, isobutyl group, and ter-butyl group.
- the alkoxy group composed of —OR 10 of the general formula (4) generates an alcohol derived from R 10 upon hydrolysis, but the photocurable nanoimprinting composition used in the present invention may contain this alcohol. Good.
- R 10 is a methyl group, an ethyl group, And more preferably a propyl group.
- R 11 is a fluorine-containing alkyl group, a fluorine-containing cycloalkyl group or a fluorine-containing alkoxy ether group.
- the fluorine-containing alkyl group means one obtained by substituting one or more hydrogen atoms of an alkyl group with a fluorine atom, and other fluorine-containing cycloalkyl groups or fluorine-containing alkoxy ether groups are also cycloalkyl groups.
- the fluorine-containing alkyl group and fluorine-containing alkoxy group preferably have 1 to 10 carbon atoms, and the fluorine-containing cycloalkyl group preferably has 3 to 10 carbon atoms.
- the fluorine-containing alkoxy ether group in the present invention has the general formula (5) In the alkoxy ether group represented by the formula (wherein x is an integer of 1 or more and y is an integer of 2 or more), one in which one or more hydrogen atoms are substituted with fluorine atoms is preferable.
- x is preferably 1 to 6
- y is preferably 5 to 50.
- fluorinated silane compounds include (heptadecafluoro-1,1,2,2-tetrahydrodecyl) -triethoxysilane, (heptadecafluoro-1,1,2,2-tetrahydrodecyl) -Trimethoxysilane, nonafluorohexyltriethoxysilane, nonafluorohexyltrimethoxysilane, (tridecafluoro-1,1,2,2-tetrahydrooctyl) -triethoxysilane, (tridecafluoro-1,1,2 , 2-tetrahydrooctyl) -trimethoxysilane, pentafluoro-1,1,2,2-tetrahydropentyltriethoxysilane, pentafluoro-1,1,2,2-tetrahydropentyltrimethoxysilane, (3,3, 3-trifluoropropyl) dimethylethoxysilane,
- a trade name includes, for example, Optool-DSX manufactured by Daikin Industries, Ltd.
- Optool-DSX manufactured by Daikin Industries, Ltd.
- the interaction between molecules is relatively weak and the molecular arrangement structure is disturbed, which is considered advantageous for surface releasability, and the ease of hydrolysis of the alkoxy group consisting of —OR 6 in the general formula (4).
- (Tridecafluoro-1,1,2,2-tetrahydrooctyl) -trimethoxysilane and (3,3,3-trifluoropropyl) trimethoxysilane are preferred.
- the hydrolyzate of alkoxysilanes is, for example, represented by the general formula (3) when the resin-containing composition contains a polymerizable monomer having a (meth) acryl group.
- the acrylic group-containing alkoxysilane is preferable, the general alkoxysilane represented by the general formula (2), the (meth) acrylic group-containing alkoxysilane represented by the general formula (3), and the general What hydrolyzed the fluorinated silane compound of the alkoxysilane which has a halogen element represented by Formula (5) is more preferable,
- the mixture containing the metal alkoxide mentioned later other than these alkoxysilanes Is preferred.
- the preferable compounding quantity of the hydrolyzate of said alkoxysilane has a (meth) acryl group, when a photocurable resin contains the polymerizable monomer which has a (meth) acryl group, for example. It is preferable that the blending amount is obtained by hydrolyzing 3 to 300 parts by mass of the (meth) acrylic group-containing alkoxysilane with respect to 100 parts by mass of the polymerizable monomer.
- an alkoxysilane 10 to 250 parts by mass of a general alkoxysilane, and in the case of containing the fluorinated silane compound, 0.001 to 4 parts by mass of a fluorinated silane compound, and a metal alkoxide to be described later
- the amount is 1 to 50 parts by weight of the metal alkoxide hydrolyzed.
- the photocurable resin contains a polymerizable monomer having a (meth) acryl group
- a hydrolyzate of alkoxysilanes It is preferable from the point of satisfying the following composition that the adhesiveness to a board
- the weight of a general alkoxysilane in terms of silicon oxide is 3 parts by weight to 100 parts by weight, and the weight of a (meth) acryl group-containing alkoxysilane in terms of silicon oxide is 1 part by weight to 80 parts by weight.
- a photocurable imprinting composition containing a hydrolyzate having a metal alkoxide equivalent to 1 to 15 parts by mass in terms of metal oxide is preferable.
- the said oxide conversion weight means the quantity calculated on the assumption that all the silicon molecules to contain are oxides, and is a value converted from a compounding quantity.
- the amount of water for hydrolyzing the alkoxysilanes is preferably an amount that is at least 0.1 mol and less than 1.0 mol relative to the number of moles of all alkoxide groups.
- the photocurable nanoimprinting composition contains a fluorinated silane compound of the above general formula (4) as the alkoxysilanes and a metal alkoxide described later, similarly, it is set to 0. It is preferable that the amount is not less than 1 mol and less than 1.0 mol.
- the amount of water is 0.1-fold mol or more, it is preferable because condensation occurs sufficiently and the wettability is good and repelling is difficult to occur when forming a coating film.
- the amount of water is preferably 0.2 to 0.9 times moles, more preferably 0.3 to moles relative to the number of moles of all alkoxide groups. 0.8 mole.
- the acid may be contained in the water.
- Acids used include inorganic acids such as hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, polyphosphoric acid, organic phosphoric acid, formic acid, acetic acid, acetic anhydride, chloroacetic acid, propionic acid, butyric acid, valeric acid, citric acid, gluconic acid, Examples thereof include organic acids such as succinic acid, tartaric acid, lactic acid, fumaric acid, malic acid, itaconic acid, oxalic acid, mucous acid, uric acid, barbituric acid, and p-toluenesulfonic acid, and acidic cation exchange resins.
- the resin-containing composition may contain the above-described water, acid, etc. used when hydrolyzing alkoxysilanes.
- the composition containing the photocurable resin contains the general alkoxysilane and the (meth) acrylic group.
- Alkoxysilanes, alkoxysilanes such as fluorinated silane compounds that are alkoxysilanes having a halogen element, and hydrolysates of the metal alkoxides can be included, but the alkoxysilanes and metal alkoxides used in the present invention are hydrolyzed.
- the product is hydrolyzed, that is, alkoxysilane, (meth) acrylic group-containing alkoxysilane when the photocurable resin contains a polymerizable monomer having a (meth) acrylic group, and in addition to these Depending on the fluorinated silane compound and metal alkoxide, It can be produced.
- the method of mixing water is not particularly limited. However, in order to produce a uniform resin-containing composition, firstly, what is to be hydrolyzed is mixed, and then water is added to perform hydrolysis. Is preferred.
- the mixing with water is not particularly limited, but may be performed at a temperature of 5 to 35 ° C. At this time, a diluting solvent may be used to facilitate the hydrolysis.
- the diluting solvent alcohol having 1 to 4 carbon atoms is preferable, and ethanol is particularly preferable.
- the resin-containing composition further contains a photopolymerization initiator.
- the photopolymerization initiator is not particularly limited, and any photopolymerization initiator can be used as long as it can photopolymerize the polymerizable monomer.
- photopolymerization initiator examples include 2,2-dimethoxy-1,2-diphenylethane-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropane-1- ON, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1- ⁇ 4- [4- (2-hydroxy- 2-methylpropionyl) -benzyl] -phenyl ⁇ -2-methyl-propan-1-one, phenylglyoxylic acid methyl ester, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropane- 1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-dimethylamino-2- (4-methylbenzi ) -1- (4-morpholin-4-yl-phenyl) butan-1-one and other
- the photoacid generator is usually a compound that does not absorb in the near ultraviolet to visible range, and a special light source is often required to excite the polymerization reaction. Therefore, it is preferable to add a compound having absorption in the near ultraviolet to visible range as a sensitizer in addition to the photoacid generator.
- sensitizers include acridine dyes, benzoflavin dyes, condensed polycyclic aromatic compounds such as anthracene and perylene, and phenothiazine.
- condensed polycyclic aromatic compound examples include 1-methylnaphthalene, 1-ethylnaphthalene, 1,4-dimethylnaphthalene, acenaphthene, 1,2,3,4-tetrahydrophenanthrene, 1,2,3, 4-tetrahydroanthracene, benzo [f] phthalane, benzo [g] chroman, benzo [g] isochroman, N-methylbenzo [f] indoline, N-methylbenzo [f] isoindoline, phenalene, 4,5-dimethylphenanthrene, 1 , 8-dimethylphenanthrene, acephenanthrene, 1-methylanthracene, 9-methylanthracene, 9-ethylanthracene, 9-cyclohexylanthracene, 9,10-dimethylanthracene, 9,10-diethylanthracene, 9,10-dicyclohexylanthracen
- photopolymerization initiators and sensitizers are used alone or in combination of two or more.
- ⁇ -diketone when used, it is preferably used in combination with a tertiary amine compound.
- Tertiary amine compounds that can be used in combination with ⁇ -diketone include N, N-dimethylaniline, N, N-diethylaniline, N, N-di-n-butylaniline, N, N-dibenzylaniline.
- the resin-containing composition used in the present invention can be blended with other components as long as the effects of the present invention are not impaired.
- the resin-containing composition used in the present invention is applied on a substrate and used.
- the resin-containing composition may be diluted with a solvent.
- a solvent can also be mix
- the solvent any solvent that can dissolve the resin-containing composition used in the present invention can be used without any limitation.
- water and alcohol can be newly added, or water used when a hydrolyzate of alkoxysilanes is produced, or by-produced alcohol.
- the solvent used as a dilution solvent when manufacturing the hydrolyzate of alkoxysilanes may be contained in the said solvent.
- a surfactant can be blended with the resin-containing composition used in the present invention.
- a surfactant can be added from the viewpoint of the uniformity of the coating film, and a polymerization inhibitor can be added to stabilize the film so that it does not polymerize during storage.
- an aliphatic surfactant a silicon-containing surfactant, or a fluorine-containing surfactant can be used.
- aliphatic surfactants include metal salts of higher alcohol sulfates such as sodium decyl sulfate and sodium lauryl sulfate, aliphatic carboxylic acid metal salts such as sodium laurate, sodium stearate and sodium oleate, and lauryl alcohol.
- Metal salts of higher alkyl ether sulfates such as sodium lauryl ether sulfate obtained by sulfated adducts of styrene and ethylene oxide, sulfosuccinic acid diesters such as sodium sulfosuccinate, phosphate esters of higher alcohol ethylene oxide adducts, etc.
- Anionic surfactants such as alkylamine salts such as dodecylammonium chloride and quaternary ammonium salts such as trimethyldodecylammonium bromide; dodecyldimethylamine oxy Zwitterionic surfactants such as alkyldimethylamine oxides such as dodo, alkylcarboxybetaines such as dodecylcarboxybetaine, alkylsulfobetaines such as dodecylsulfobetaine, and amide amino acid salts such as lauramidopropylamine oxide; polyoxyethylene Polyoxyethylene alkyl ethers such as lauryl ether, polyoxyalkylene alkyl ethers, polyoxyethylene distyrenated phenyl ethers, polyoxyethylene alkyl phenyl ethers such as polyoxyethylene lauryl phenyl ether, polyoxyethylene tribenzylphenyl Ethers, fatty acid polyoxy
- the silicone-based surfactant is not particularly limited, and examples thereof include polyether-modified silicone having an organosilicon group as a hydrophobic group, polyglycerin-modified silicone, and (meth) acryl-modified silicone.
- the fluorine-containing surfactant is not particularly limited, and examples thereof include those obtained by substituting some or all of the hydrogen atoms of the alkyl chain length of the aliphatic surfactant with fluorine atoms, and (meth) acrylic acid fluoroalcohol esters. And fluorine compounds imparted with polymerizability.
- Surfactants can be used not only independently but also in combination of a plurality of types as required.
- polymerization inhibitor examples include known ones.
- the most typical ones include hydroquinone monomethyl ether, hydroquinone, butylhydroxytoluene and the like.
- Examples of the reactive diluent include known ones such as N-vinylpyrrolidone.
- spherical fine particles such as a piper branch polymer can be added as another additive component.
- a spherical hyperbranched polymer having a diameter of 1 to 10 nm and a molecular weight of 10,000 to 100,000 is blended.
- the resin-containing composition further includes a general formula (6) which is a metal alkoxide excluding alkoxylanes. (Wherein M is zirconium or titanium; R 13 is the same or different alkyl group having 1 to 10 carbon atoms).
- the resin-containing composition used in the present invention has good adhesion to a silicon substrate, and can easily form a texture structure by treatment with an alkaline etching solution in a short time, but contains this metal alkoxide. By doing so, the texture structure can be formed more beautifully by the treatment with the alkaline etching solution without impairing the adhesion to the silicon substrate, the ease, and the effect of the short-time treatment.
- M is preferably zirconium in order to make the texture structure formed by the treatment with the alkaline etching solution more beautiful.
- R 13 is more preferably an alkyl group having 2 to 4 carbon atoms from the viewpoint of an appropriate hydrolysis rate.
- This alkoxy group composed of —OR 13 also produces an alcohol derived from R 13 upon hydrolysis as in the case of the above alkoxysilanes and the like.
- the resin-containing composition used in the present invention may contain this alcohol. Good. Therefore, considering that the alcohol can be easily mixed with other components, and that the alcohol can be easily removed after forming a coating film on the substrate, specifically, R 13 is an ethyl group, propyl. Group, isopropyl group, butyl group and isobutyl group are preferred.
- suitable metal alkoxides include tetramethyl titanium alkoxide, tetraethyl titanium alkoxide, tetraisopropyl titanium alkoxide, tetrapropyl titanium alkoxide, tetraisobutyl titanium alkoxide, tetrabutyl titanium alkoxide, tetrapentyl zirconium alkoxide, tetraheptyl titanium alkoxide, tetrahexyl.
- tetraethyl zirconium alkoxide tetraethyl zirconium alkoxide, tetraisopropyl zirconium alkoxide, tetrapropyl zirconium alkoxide, tetraisobutyl zirconium alkoxide, and tetrabutyl zirconium alkoxide are preferable.
- the amount of water for hydrolyzing the metal alkoxide is an amount of not less than 0.1 times and less than 1.0 times the number of moles of all alkoxide groups to which the alkoxy groups of the alkoxysilanes have been added.
- the amount of water is 0.1-fold mol or more, it is preferable because condensation occurs sufficiently and the wettability is good and repelling is difficult to occur when forming a coating film.
- the amount is less than 1.0 times mol, a pattern can be formed with a relatively low pressure, and it is difficult to cause breakage of the mold or the like.
- the amount of water is preferably 0.2 to 0.9 times moles, more preferably 0.3 to moles relative to the number of moles of all alkoxide groups. 0.8 mole.
- the resin-containing composition used in the present invention is a hydrolyzate of alkoxysilanes, a (meth) acryl group-containing polymerizable monomer, and optionally a (meth) acryl group. It is prepared by mixing an acidic group-containing polymerizable monomer having a photopolymerization initiator, a hydrolyzate of a metal alkoxide to be blended if necessary, and other additive components. The order of addition of these components is not particularly limited.
- the silicon substrate used in the present invention it is not necessary to use a silicon substrate subjected to surface oxidation treatment, and a silicon substrate without oxidation treatment can be preferably used from the viewpoint of reducing the manufacturing process.
- the surface of the silicon substrate other than the pattern portion is irradiated with the etching gas.
- the “silicon substrate surface other than the pattern portion” means a portion of the silicon substrate surface excluding the silicon substrate surface immediately below the pattern portion made of the resin-containing composition laminated on the silicon substrate in the step (A). Refer to it. That is, as long as the etching gas is not irradiated on the surface of the silicon substrate in the region immediately below the pattern portion, the pattern portion may be irradiated.
- the etching gas is not irradiated to the surface of the silicon substrate immediately below the pattern portion. 3 and a pattern 2 composed of the remaining film 4 is used.
- the mechanism that increases the etching resistance to the alkaline etching solution used in the step (C) has not been specified yet, but there is a possibility that two mechanisms are affected.
- the first mechanism is the formation of an extremely thin mask layer derived from the etching gas (for example, a water-repellent layer for a fluorine-based gas and a partial oxide layer for an oxygen gas).
- the degree of the effect is considered to depend on the type of etching gas to be used, and some chemical change occurs due to the irradiation of the etching gas, whereby the surface of the silicon substrate other than the pattern portion is subjected to step (C). It is estimated that the etching resistance with respect to the alkaline etching solution used in is increased.
- the etching gas a known gas used for dry etching can be used.
- an etching gas that can cause some chemical and / or physical change on the silicon substrate and can increase etching resistance to an alkaline etching solution. It can be used suitably.
- etching gas include fluorine-based gas and oxygen gas.
- fluorine-based gas is more preferable.
- Specific examples of the fluorine-based gas include sulfur hexafluoride, silicon tetrafluoride, fluoromethane, difluoromethane, trifluoromethane, and tetrafluoromethane.
- two or more kinds of mixed gas containing fluorine-based gas or oxygen gas may be used as the etching gas.
- a known dry etching method can be used as a method of irradiating the surface of the silicon substrate with an etching gas.
- a known dry etching method can be used. For example, sputtering, ion milling, focused ion beam processing, radical etching, reactive ion etching, neutral beam etching, plasma etching, inductively coupled plasma, atmospheric pressure plasma, and the like can be given.
- the second mechanism is that if the resin-containing composition used in the step (A) is familiar with the alkaline etching solution (solubility and swelling), the pattern portion and the substrate come into contact with each other when irradiated with the etching gas.
- the vicinity of the base of the pattern portion is a portion where it is difficult to form an extremely thin mask layer derived from the etching gas due to the shielding effect, and the alkali etching preferentially used in the step (C) from the boundary between the pattern portion and the substrate. It is presumed that the etching with the liquid is progressing. In that case, if the resin-containing composition forming the pattern has an appropriate familiarity (dissolution or swelling) with respect to the alkaline etching solution, it is considered that the etching progress with the alkaline etching solution is accelerated.
- the resin-containing composition forming the pattern is a hydrolyzate of a mixture containing a general alkoxysilane and a (meth) acrylic group-containing alkoxysilane
- a hydrolyzate of a mixture containing alkoxysilane, (meth) acrylic group-containing alkoxysilane and metal alkoxide is preferred, and a hydrolyzate of a mixture containing general alkoxysilane, (meth) acrylic group-containing alkoxysilane and metal alkoxide is more preferred.
- preferable is a hydrolyzate of a mixture containing a general alkoxysilane and a (meth) acrylic group-containing alkoxysilane and metal alkoxide.
- a combination in which one or both of the first mechanism and the second mechanism operate is preferable, and a combination in which both operate is more preferable.
- an argon gas is used as an etching gas
- a resin-containing composition comprising a hydrolyzate of a mixture containing a general alkoxysilane, a (meth) acrylic group-containing alkoxysilane, and a metal alkoxide is used as the resin-containing composition.
- the silicon substrate having the texture structure of the present invention can be manufactured even in the case of the combination used (the second mechanism works), in order to obtain a pattern in which the texture structure pattern is more regular and neatly arranged.
- etching gas a silicon substrate surface such as argon (Ar) is chemically broken only by the bombardment of ions. Even if the etching gas is not accompanied, the boundary of the concavo-convex structure is clearly blurred as compared with the sample from which the residual film is removed by CHF 3 gas and oxygen gas, as inferred from the SEM observation result of Example 9 described later.
- the concave structure was formed under the pattern part, the difference in etching resistance against the alkaline etching solution used in the step (C) between the pattern itself and the silicon substrate was also under the pattern part. It is presumed that a concave structure can be formed.
- Etching gas irradiation conditions are such that the gas flow rate, temperature, time, and pressure are appropriately adjusted so that the remaining film is removed by etching gas irradiation, leaving the pattern portion and exposing the silicon substrate surface other than the pattern portion.
- etching gas irradiation conditions are such that the gas flow rate, temperature, time, and pressure are appropriately adjusted so that the remaining film is removed by etching gas irradiation, leaving the pattern portion and exposing the silicon substrate surface other than the pattern portion.
- the etching gas irradiation time needs to be 3 minutes or more.
- the time required for the etching gas irradiation may be selected from the time when the residual film is removed by the etching gas irradiation and within the time when the pattern portion does not disappear. Since the effect of the mask by the deposition film can be expected, the irradiation may be performed longer than the time required for removing the remaining film.
- residual film is removed means that the residual film is not observed on the silicon substrate in the observation with the SEM.
- (C) A process of forming a concave structure under a pattern by treating a silicon substrate irradiated with an etching gas with an alkaline etchant.
- an alkaline etchant for forming a texture structure of a silicon substrate for solar cells.
- aqueous solutions of alkali metal hydroxides such as sodium hydroxide and potassium hydroxide, cesium hydroxide aqueous solution, hydrazine aqueous solution, carbonate aqueous solution, sodium silicate aqueous solution, water
- alkali metal hydroxides such as sodium hydroxide and potassium hydroxide
- cesium hydroxide aqueous solution such as sodium hydroxide and potassium hydroxide
- hydrazine aqueous solution such as sodium hydroxide and potassium hydroxide
- hydrazine aqueous solution carbonate aqueous solution
- sodium silicate aqueous solution water
- water examples include tetramethylammonium oxide aqueous solution, tetraethylammonium hydroxide aqueous solution, and tetrabutylammonium hydroxide aqueous solution.
- the fact that the etching rate of the 100, 110, and 111 planes differs depending on the crystal orientation of silicon.
- an aqueous solution of an alkali metal hydroxide such as potassium hydroxide are preferably used.
- surfactants, hydrochlorides, sulfates, carboxylates, isopropyl alcohol, butyl alcohol, polyvinyl alcohol, and the like may be included.
- the temperature and time for forming the concave structure under the pattern portion are appropriately selected.
- the temperature range is usually 20 to 90 ° C., preferably 40 to 80 ° C., more preferably, depending on the type and concentration of the alkaline etching solution used.
- the treatment time can be appropriately selected from the range of usually 5 to 120 minutes, preferably 5 to 60 minutes, and more preferably 5 to 30 minutes.
- Residue derived from the resin-containing composition adheres to the silicon substrate in which the concave structure is formed under the pattern portion by the treatment with the alkaline etching solution. Since it is separated from the substrate and attached on the silicon substrate having a concave structure, it can be easily removed by rinsing.
- the rinse agent to be used as conditions for a rinse process,
- organic solvents such as water, alcohol, acetone other than the chemical
- the rinsing method can be performed by a usual method such as immersion, washing with running water, or ultrasonic cleaning.
- the temperature range and treatment time are not particularly limited, and can be appropriately selected from a treatment time range of usually 1 to 10 minutes in a temperature range of 0 to 50 ° C.
- the silicon substrate obtained by the method for producing a silicon substrate having a texture structure of the present invention can also be used as a silicon substrate for solar cells or LED light emitting elements or a mold for nanoimprinting.
- An etching gas irradiation reactive ion etching apparatus was used to perform dry etching with oxygen gas, CHF 3 gas, and Ar gas under the following conditions.
- the dry etching rate (nm / min) was calculated in advance from the relationship between the etching time under these conditions and the amount of coating film decreased on various photocured films.
- the thickness of the residual film is measured by SEM observation of the cross section of the imprint pattern, and from the dry etching rate calculated by various photocured films, The minimum etching time required for removing the remaining film was obtained, and dry etching was performed for a time longer than the minimum etching time.
- FIG. 2 shows an SEM photograph before dry etching of CHF 3 gas
- FIG. 3 shows an SEM photograph after dry etching. It can be seen that the remaining film was removed by dry etching.
- Oxygen gas gas flow 50 sccm, RF power 100 W, control pressure 5.0 Pa CHF 3 gas: gas flow 50 sccm, RF power 100 W, control pressure 2.0 Pa Ar gas: gas flow 50 sccm, RF power 100 W, control pressure 2.0 Pa [Example 1]
- resin-containing composition 13.6 g of ethanol, 3.0 g of trimethoxysilylpropyl acrylate as alkoxysilane containing (meth) acrylic group, ethyl silicate 40 (manufactured by Corcor Co., Ltd., average of tetraethoxysilane) (Pentamer) 6.8 g, and 1.7 g of 1-butanol solution of 85% by mass zirconium butoxide (tetrabutylzirconium alkoxide) as a metal alkoxide was mixed, and ethanol 4.
- polymerizable monomer (a) having a (meth) acrylic group 2.5 g of polyethylene glycol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK Ester A-200), ethoxylated bisphenol A diacrylate (Shin-Nakamura) Chemical Industry Co., Ltd., NK Ester® A-BPE-10) 7.5 g, Phenoxypolyethylene glycol acrylate (Shin Nakamura Chemical Co., Ltd., NK Ester® AMP-10G) 5.0 g, Hydroxyethylated o-phenylphenol 5.0 g of acrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-LEN-10) and 5.0 g of tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-DCP) used.
- polyethylene glycol diacrylate manufactured by Shin
- polymerization inhibitor 0.0375 g of hydroquinone monomethyl ether and 0.005 g of butylhydroxytoluene were used.
- a polysynthetic monomer (a) having a (meth) acryl group, a photopolymerization initiator (b), and a polymerization inhibitor were uniformly mixed, and 4.0 g of the mixture was fractionated. 14.2 g of the obtained hydrolyzate (c) was added to 4.0 g of the mixture, and the mixture was stirred at room temperature for 15 minutes to obtain a resin-containing composition.
- Pattern transfer and photocuring (process (A))
- the resulting resin-containing composition was diluted with 1-methoxy-2-propanol to a 20 wt% solution.
- the diluted resin-containing composition is spin-coated on a silicon (100) wafer (P-type, one mirror surface, no oxide film) at 1000 rpm for 30 seconds, and dried at 110 ° C. for 2 minutes to apply the resin-containing composition.
- a silicon wafer coated with the film was obtained.
- a quartz mold provided with a lattice pattern having a line (convex) width of 300 nm, a pitch of 3 ⁇ m, and a height of 380 nm is applied to the silicon wafer, and a pressure of 1 MPa is applied in an optical nanoimprint apparatus to emit light from an LED 365 nm light source for 60 seconds Irradiation and optical nanoimprinting were performed.
- the nanoimprint pattern formed on the silicon wafer was observed with an SEM, and the SEM photograph is shown in FIG. 4 (surface).
- Alkali etching treatment / rinse treatment (process (C))
- the sample from which the remaining film has been removed by the above-described CHF 3 gas dry etching treatment is immersed in an alkaline etching solution consisting of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol, and the alkali etching treatment is performed at 55 ° C. for 20 minutes. went. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute.
- the SEM photograph before the rinse treatment is shown in FIG. 5 (surface) and FIG. 6 (cross section), and the SEM photograph after the rinse treatment is shown in FIG. 7 (surface) and FIG. 8 (cross section).
- Example 2 In the same manner as in Example 1, preparation of a resin-containing composition, pattern transfer, and photocuring were performed. The obtained nanoimprint pattern was dry-etched with oxygen gas for 8 minutes to remove the remaining film.
- Example 3 13.6 g of ethanol, 3.0 g of trimethoxysilylpropyl acrylate as a (meth) acryl group-containing alkoxysilane, and ethyl silicate 40 (manufactured by Corcor, an average pentamer of tetraethoxysilane) as a general alkoxysilane 6 2.8 g was mixed, and the resulting mixture was gradually added dropwise at room temperature with 4.25 g of ethanol / 0.85 g / 2N-HCl 0.16 g of 2N HCl / ethanol mixed aqueous solution while stirring and mixing.
- Example 2 In the same manner as in Example 1, the polymerizable monomer (a) having a (meth) acryl group, the photopolymerization initiator (b), and a polymerization inhibitor were uniformly mixed, and 4.0 g of the mixture was fractionated. .
- Example 1 Other than that, pattern transfer / photocuring, dry etching treatment, alkali etching treatment / rinsing treatment were performed in the same manner as Example 1. SEM photographs before rinsing are shown in FIG. 10 (cross section) and FIG. 11 (surface). As a silicon substrate having a texture structure, a silicon substrate having an inverted pyramid structure with a side of about 3 ⁇ m could be produced. However, compared to Example 1, the space between the openings of the inverted pyramid structure was slightly wider.
- Example 4 In the same manner as in Example 1, preparation of a resin-containing composition, pattern transfer / photocuring, and dry etching were performed.
- the sample from which the remaining film was removed by the CHF 3 gas dry etching treatment was immersed in an alkaline etching solution composed of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol, and subjected to alkaline etching treatment at 55 ° C. for 10 minutes. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute.
- the SEM photograph after the rinse treatment is shown in FIG. 12 (surface) and FIG. 13 (cross section).
- As a silicon substrate having a texture structure it was confirmed that a silicon substrate having a trapezoidal concave structure with an opening of about 3 ⁇ m was formed.
- Example 5 As the polymerizable monomer (a) having a (meth) acrylic group, 2.5 g of polyethylene glycol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-200), ethoxylated bisphenol A diacrylate (Shin-Nakamura) Chemical Industry Co., Ltd., NK Ester A-BPE-10) 7.5 g, Phenoxypolyethylene glycol acrylate (Shin Nakamura Chemical Co., Ltd., NK Ester AMP-10G) 5.0 g, Hydroxyethylated o-phenylphenol 5.0 g of acrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-LEN-10) and 5.0 g of tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-DCP) used.
- polyethylene glycol diacrylate
- polymerization inhibitor 0.0375 g of hydroquinone monomethyl ether and 0.005 g of butylhydroxytoluene were used.
- the resin-containing composition was obtained by uniformly mixing the polymerizable monomer (a) having the (meth) acryl group, the photopolymerization initiator (b), and the polymerization inhibitor.
- the obtained resin-containing composition was diluted with 1-methoxy-2-propanol to 30% by weight.
- the diluted resin-containing composition is spin-coated on a silicon (100) wafer (P-type, one mirror surface, no oxide film) at 2000 rpm for 30 seconds to obtain a silicon wafer coated with a coating film of the resin-containing composition. It was.
- a polydimethylsiloxane mold having a grid pattern with a line (convex) width of 300 nm, a pitch of 3 ⁇ m, and a height of 380 nm placed on the silicon wafer, light was irradiated from an LED 365 nm light source for 60 seconds at a pressure of 0 MPa.
- the resin-containing composition was photocured. After peeling off the polydimethylsiloxane mold, it was dried at 110 ° C. for 2 minutes.
- the nanoimprint pattern obtained as described above was dry-etched with CHF 3 gas for 5 minutes to remove the remaining film.
- the sample from which the residual film was removed by the above-mentioned CHF 3 gas dry etching treatment was immersed in an alkaline etching solution composed of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol and subjected to alkaline etching treatment at 55 ° C. for 60 minutes. went. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute.
- SEM observation it was confirmed that a silicon substrate having an inverted pyramid structure with a side of about 3 ⁇ m could be produced as a silicon substrate having a texture structure.
- the alkali etching treatment time required for producing a silicon substrate on which an inverted pyramid structure with a side of about 3 ⁇ m is formed is three times longer. Met.
- polymerizable monomer 2.5 g of polyethylene glycol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-200), tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester) A-DCP) 5.0 g, 2-hydroxy-3-acryloyloxypropyl methacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester 701A) 7.5 g (polymerizable monomer having (meth) acrylic group ( a) and a carboxylate-containing polymerizable monomer, mono [2-acryloyloxyethyl phthalate] (manufactured by Kyoeisha Chemical Co., Ltd., light acrylate HOA-MPL (N)) 10.0 g ((meta)) An acidic group-containing polymerizable monomer (a)
- polymerization inhibitor 0.0375 g of hydroquinone monomethyl ether and 0.005 g of butylhydroxytoluene were used.
- a resin-containing composition was obtained.
- the obtained resin-containing composition was diluted with 1-methoxy-2-propanol to 30% by weight.
- the diluted resin-containing composition is spin-coated on a silicon (100) wafer (P-type, one mirror surface, no oxide film) at 2000 rpm for 30 seconds to obtain a silicon wafer coated with a coating film of the resin-containing composition. It was.
- a polydimethylsiloxane mold having a lattice pattern having a line (convex) width of 300 nm, a pitch of 3 ⁇ m, and a height of 380 nm placed on the silicon wafer, light was irradiated from an LED 365 nm light source for 60 seconds at a pressure of 0 MPa.
- the resin-containing composition was photocured. After peeling off the polydimethylsiloxane mold, it was dried at 110 ° C. for 2 minutes.
- the nanoimprint pattern obtained as described above was dry-etched with CHF 3 gas for 5 minutes to remove the remaining film.
- the sample from which the residual film has been removed by the above-described CHF 3 gas dry etching treatment is immersed in an alkaline etching solution consisting of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol, and the alkali etching treatment is performed at 55 ° C. for 30 minutes. went. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute. An SEM photograph after the rinse treatment is shown in FIG. 14 (cross section).
- Example 7 4.4 g of ethanol and 3.0 g of trimethoxysilylpropyl acrylate as a (meth) acryl group-containing alkoxysilane were mixed to prepare an ethanol solution of the silicon compound (c).
- polymerizable monomer (a) having a (meth) acrylic group 2.5 g of polyethylene glycol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK Ester A-200), ethoxylated bisphenol A diacrylate (Shin-Nakamura) Chemical Industry Co., Ltd., NK Ester® A-BPE-10) 7.5 g, Phenoxypolyethylene glycol acrylate (Shin Nakamura Chemical Co., Ltd., NK Ester® AMP-10G) 5.0 g, Hydroxyethylated o-phenylphenol 5.0 g of acrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-LEN-10) and 5.0 g of tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., NK ester A-DCP) used.
- polyethylene glycol diacrylate manufactured by Shin
- polymerization inhibitor 0.0375 g of hydroquinone monomethyl ether and 0.005 g of butylhydroxytoluene were used.
- a polymerizable monomer (a) having a (meth) acryl group, a photopolymerization initiator (b), and a polymerization inhibitor were uniformly mixed, and 1.0 g of the mixture was fractionated.
- 4.1 g of the prepared silicon compound ethanol solution (c) was added to 1.0 g of the mixture, and the mixture was stirred at room temperature for 15 minutes to obtain a resin-containing composition.
- the sample from which the remaining film was removed by the CHF 3 gas dry etching treatment was immersed in an alkaline etching solution composed of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol, and subjected to alkaline etching treatment at 55 ° C. for 20 minutes. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute.
- An SEM photograph after the rinse treatment is shown in FIG. 15 (cross section). As a silicon substrate having a texture structure, it was confirmed that a silicon substrate having an inverted pyramid structure with an opening having a side of about 3 ⁇ m could be produced.
- Example 8 In the same manner as in Example 1, a resin-containing composition was prepared.
- the obtained resin-containing composition was diluted with 1-methoxy-2-propanol to 20% by weight.
- the diluted resin-containing composition is spin-coated on a silicon (100) wafer (P-type, one mirror surface, no oxide film) at 2000 rpm for 30 seconds, and dried at 110 ° C. for 2 minutes to apply the resin-containing composition.
- a silicon wafer coated with the film was obtained.
- a quartz mold with a reciprocal lattice pattern with a line (concave) width of 350 nm, a pitch of 3 ⁇ m, and a height of 500 nm is used for the silicon wafer.
- Photo-nanoimprinting was performed by irradiation for 60 seconds. The formed nanoimprint pattern was observed by SEM, and the SEM photograph was shown in FIG. 16 (surface).
- the nanoimprint pattern obtained as described above was dry-etched with CHF 3 gas for 8 minutes to remove the remaining film.
- the sample from which the residual film has been removed by the above-mentioned CHF 3 gas dry etching treatment is immersed in an alkaline etching solution made of 2.5% sodium hydroxide / 3% isopropyl alcohol, and is etched at 55 ° C. for 30 minutes. Processed. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute. An SEM photograph after the rinse treatment is shown in FIG. 17 (cross section).
- Example 9 In the same manner as in Example 1, a resin-containing composition was prepared.
- the obtained resin-containing composition was diluted with 1-methoxy-2-propanol to 20% by weight.
- the diluted resin-containing composition is spin-coated on a silicon (100) wafer (P-type, one mirror surface, no oxide film) at 2000 rpm for 30 seconds, and dried at 110 ° C. for 2 minutes to apply the resin-containing composition.
- a silicon wafer coated with the film was obtained.
- a quartz mold manufactured by NTT-AT Nanofabrication Co., Ltd., NIM-PH350: mixed line, dot, and hole
- Photo-nanoimprinting was performed by irradiation for 2 seconds.
- the nanoimprint pattern obtained as described above was dry-etched with CHF 3 gas for 14 minutes to remove the remaining film.
- the sample from which the residual film has been removed by the above-described CHF 3 gas dry etching treatment is immersed in an etching solution made of an aqueous solution of 5% sodium hydroxide / 3% isopropyl alcohol, and is subjected to an alkali etching treatment at 55 ° C. for 20 minutes. Went. Thereafter, as a rinsing treatment, the sample was sonicated in a 2.5% aqueous solution of sodium hydroxide for 2 minutes, and further sonicated in water for 1 minute.
- Example 10 0.28 g of a solution obtained by diluting (3,3,3-trifluoropropyl) trimethoxysilane as a fluorinated silane compound, which is an alkoxysilane having a halogen element, with ethanol to a solid content of 10%.
- ethyl silicate 40 manufactured by Colcoat Co., Ltd., average pentamer of tetraethoxysilane
- ethyl silicate 40 85 mass% zirconium butoxide (tetrabutyl) as a metal alkoxide.
- 1.70 g of 1-butanol solution of zirconium alkoxide) was mixed, and 2.62 g of ethanol / 0.66 g of water / 2N-HCl 0.10 g of 2N-HCl / ethanol mixed aqueous solution at room temperature was mixed with this mixture with stirring. The solution was gradually added dropwise.
- an ethanol aqueous solution of ethanol 1.00 g / water 0.37 g was gradually added dropwise and stirred at room temperature for 1 hour to further contain an alkoxysilane hydrolyzate and a metal alkoxide hydrolyzate (c).
- Example 2 In the same manner as in Example 1, a polymerizable monomer (a) having a (meth) acryl group, a photopolymerization initiator (b), and a polymerization inhibitor were uniformly mixed, and 4.0 g of the mixture was fractionated. did.
- Example 11 In the same manner as in Example 1, preparation of a resin-containing composition, pattern transfer and photocuring were performed.
- the obtained nanoimprint pattern was dry-etched with Ar gas for 4 minutes to remove the remaining film.
- Example 2 The nanoimprint pattern obtained in Example 1 was only subjected to dry etching with CHF 3 gas for 1 minute, and the remaining film was not removed (the SEM observation confirmed that the remaining film remained). Except for the above, the preparation of a resin-containing composition, pattern transfer / photocuring, and alkali etching / rinsing were performed in the same manner as in Example 1. From the SEM observation result of the sample after the rinsing process, it was confirmed that a silicon substrate having a texture structure and a concave structure formed under the pattern portion was not produced.
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Abstract
Description
(A)シリコン基板上に樹脂を含有する組成物でパターンを形成する工程、
(B)エッチングガスをパターン部分以外のシリコン基板表面に照射する工程、
(C)エッチングガスを照射したシリコン基板をアルカリエッチング液により処理し、パターン部分の下に凹構造を形成する工程、
を含むことを特徴とするテクスチャー構造を有するシリコン基板の製法に係る。
パターンの形成方法としては、公知のパターンの形成方法を、何ら制限されずに用いることができるが、数μmオーダー以下の微細なパターン形成を勘案すると、好ましくは、インプリント技術でパターンを形成する方法が使用される。
本発明において、(メタ)アクリル基を有する重合性単量体((メタ)アクリル基含有重合性単量体)は、特に制限されるものではなく、光重合に使用される公知の重合性単量体を使用することができる。この(メタ)アクリル基含有重合性単量体は、当然のことながら、(メタ)アクリル基含有アルコキシシランを含まない。そして、好ましい化合物としては、(メタ)アクリル基を有し、分子中にケイ素原子を含まない重合性単量体が挙げられる。これら重合性単量体は、1分子中に1つの(メタ)アクリル基を有する単官能重合性単量体であってもよいし、1分子中に2つ以上の(メタ)アクリル基を有する多官能重合性単量体であってもよい。さらには、これら単官能重合性単量体及び多官能重合性単量体を組み合わせて使用することもできる。(メタ)アクリル基含有重合性単量体において、ビニルエーテル基も有するものは、光重合の他に、熱処理によっても重合反応が進行することから、本発明の効果をより高める点で好ましく用いることができる。
(メタ)アクリル基を有する酸性基含有重合性単量体としては、特に制限されるものではなく、光重合に使用される公知のリン酸基、カルボン酸基、又はスルホ基を有する重合性単量体を使用することができる。さらには、これらリン酸基、カルボン酸基、又はスルホ基を有する重合性単量体は組み合わせても使用される。
アルコキシシラン類の加水分解物は、アルコキシシラン類のアルコキシ基の一部又は全部の加水分解による生成物、アルコキシシランの重縮合体、該重縮合体のアルコキシ基の一部又は全部の加水分解による生成物及びこれらの種々の混合物を意味する。
アルコキシシラン類の内、一般的なアルコキシシランとしては、一般式(2)
(メタ)アクリル基含有アルコキシシランとしては、一般式(3)
上記ハロゲン元素を有するアルコキシシランとしては、一般式(4)
上述の(A)工程において形成されたパターンを有するシリコン基板に対して、エッチングガスをパターン部分以外のシリコン基板表面に照射する。ここで「パターン部分以外のシリコン基板表面」とは、シリコン基板表面のうち、シリコン基板上に工程(A)で積層した樹脂含有組成物からなるパターン部分の直下のシリコン基板表面を除外した部分を指称する。すなわち、エッチングガスが、パターン部分の直下に存在する領域のシリコン基板表面に照射されない限りは、パターン部分に照射されても構わない。
アルカリエッチング液としては、太陽電池用シリコン基板のテクスチャー構造形成等で一般的に使用されているアルカリエッチング液を何ら制限なく用いることができ、例えば、水酸化ナトリウム、水酸化カリウム等のアルカリ金属水酸化物の水溶液、水酸化セシウム水溶液、ヒドラジン水溶液、炭酸塩水溶液、珪酸ナトリウム水溶液、水酸化テトラメチルアンモニウム水溶液、水酸化テトラエチルアンモニウム水溶液、水酸化テトラブチルアンモニウム水溶液等が挙げられ、なかでも、シリコンの結晶方位面で100面・110面・111面のエッチング速度が異なることを利用して、異方性エッチングを行うことから、シリコンの結晶格子に応じた溶解性において、溶解速度や均一溶解等の溶解挙動から水酸化ナトリウム、水酸化カリウム等のアルカリ金属水酸化物の水溶液が好ましく用いられる。添加剤として、界面活性剤、塩酸塩、硫酸塩、カルボン酸塩、イソプロピルアルコール、ブチルアルコール、ポリビニルアルコール等を含んでいても良い。
本発明のテクスチャー構造を有するシリコン基板の製法で得られたシリコン基板は、太陽電池用又はLED発光素子用のシリコン基板又はナノインプリント用モールドとして使用することもできる。
反応性イオンエッチング装置を用いて、以下の条件にて、酸素ガス、CHF3ガス、Arガスによるドライエッチングを行った。本条件でのエッチング時間と各種光硬化膜の塗膜減少量との関係から、予め、ドライエッチング速度(nm/min)を算出した。
酸素ガス:ガスフロー50sccm、RFパワー100W、制御圧力5.0Pa
CHF3ガス:ガスフロー50sccm、RFパワー100W、制御圧力2.0Pa
Arガス:ガスフロー50sccm、RFパワー100W、制御圧力2.0Pa
[実施例1]
エタノール13.6g、(メタ)アクリル基含有アルコキシシランとしてトリメトキシシリルプロピルアクリレート3.0g、一般的なアルコキシシランとしてエチルシリケート40(コルコール(株)製、テトラエトキシシランの平均5量体物)6.8g、金属アルコキシドとして、85質量%ジルコニウムブトキシド(テトラブチルジルコニウムアルコキシド)の1-ブタノール溶液1.7gを混合し、得られた混合物に、撹拌混合しながら、エタノール4.25g/水0.85g/2N-HCl 0.16gの2N-HCl/エタノール混合水溶液を、室温において徐々に滴下した。さらに、エタノール1g/水0.46gのエタノール水溶液を徐々に滴下し、室温において1時間撹拌し、一般的なアルコキシシラン、(メタ)アクリル基含有アルコキシシラン及び金属アルコキシドからなる加水分解物(c)を得た。
得られた樹脂含有組成物を、1-メトキシ-2-プロパノールにて20重量%溶液となるよう希釈した。希釈した樹脂含有組成物を、シリコン(100)ウエハー(P型、片鏡面、酸化膜なし)に、1000rpm、30秒間でスピンコートし、110℃で2分間乾燥して、樹脂含有組成物の塗膜がコーティングされたシリコンウエハーを得た。該シリコンウエハーに対して、ライン(凸)幅300nm、ピッチ3μm、高さ380nmの格子パターンを備えた石英製モールドを使用し、光ナノインプリント装置において、圧力1MPaをかけ、LED365nm光源から光を60秒間照射して、光ナノインプリントを行った。シリコンウエハー上に形成されたナノインプリントパターンをSEMにて観察し、そのSEM写真を図4(表面)に示した。
上記のようにして得られたナノインプリントパターンについて、CHF3ガスにてドライエッチングを5分間行い、残膜を除去した。
上記のCHF3ガスのドライエッチング処理にて残膜を除去したサンプルを、水酸化ナトリウム5%/イソプロピルアルコール3%の水溶液からなるアルカリエッチング液中に浸漬し、55℃で20分間アルカリエッチング処理を行った。その後、リンス処理として、該サンプルを水酸化ナトリウム2.5%水溶液中で2分間超音波処理し、さらに、水中にて1分間超音波処理した。リンス処理前のSEM写真を図5(表面)及び図6(断面)に、リンス処理後のSEM写真を図7(表面)及び図8(断面)に示した。
実施例1と同様にして、樹脂含有組成物の調製、パターンの転写・光硬化を行った。
得られたナノインプリントパターンについて、酸素ガスにてドライエッチングを8分間行い、残膜の除去を行った。
エタノール13.6g、(メタ)アクリル基含有アルコキシシランとしてトリメトキシシリルプロピルアクリレート3.0g、一般的なアルコキシシランとしてエチルシリケート40(コルコール(株)製、テトラエトキシシランの平均5量体物)6.8gを混合し、得られた混合物に、撹拌混合しながら、エタノール4.25g/水0.85g/2N-HCl 0.16gの2N-HCl/エタノール混合水溶液を、室温において徐々に滴下した。さらに、エタノール1g/水0.32gのエタノール水溶液を徐々に滴下し、室温において1時間撹拌し、一般的なアルコキシシラン及び(メタ)アクリル基含有アルコキシシランからなる加水分解物(c)を得た。
実施例1と同様にして、樹脂含有組成物の調製、パターンの転写・光硬化、ドライエッチング処理を行った。
(メタ)アクリル基を有する重合性単量体(a)として、ポリエチレングリコールジアクリレート(新中村化学工業(株)製、NKエステル A-200)2.5g、エトキシ化ビスフェノールAジアクリレート(新中村化学工業(株)製、NKエステル A-BPE-10)7.5g、フェノキシポリエチレングリコールアクリレート(新中村化学工業(株)製、NKエステル AMP-10G)5.0g、ヒドロキシエチル化o-フェニルフェノールアクリレート(新中村化学工業(株)製、NKエステル A-LEN-10)5.0g、トリシクロデカンジメタノールジアクリレート(新中村化学工業(株)製、NKエステルA-DCP)5.0gを使用した。
重合性単量体として、ポリエチレングリコールジアクリレート(新中村化学工業(株)製、NKエステル A-200)2.5g、トリシクロデカンジメタノールジアクリレート(新中村化学工業(株)製、NKエステル A-DCP)5.0g、2-ヒドロキ-3-アクリロイロキシプロピルメタクリレート(新中村化学工業(株)製、NKエステル 701A)7.5g((メタ)アクリル基を有する重合性単量体(a)として)及びカルボキシル基を有する重合性単量体であるフタル酸モノ[2-アクリロイルオキシエチル](共栄社化学(株)製、ライトアクリレート HOA―MPL(N))10.0g((メタ)アクリル基を有する酸性基含有重合性単量体(a’)として)を使用した。
エタノール4.4g、(メタ)アクリル基含有アルコキシシランとしてトリメトキシシリルプロピルアクリレート3.0gを混合し、ケイ素化合物(c)のエタノール溶液を調製した。
実施例1と同様にして、樹脂含有組成物を調製した。
実施例1と同様にして、樹脂含有組成物の調製を行った。
ハロゲン元素を有するアルコキシシラン類であるフッ素化シラン化合物として(3,3,3-トリフルオロプロピル)トリメトキシシランを、固形分10%となるようエタノールで希釈することによって得られた溶液0.28g、(メタ)アクリル基含有アルコキシシランとしてトリメトキシシリルトリメチレンアクリレート3.0g、エタノール13.6gに、撹拌混合しながら、エタノール1.63g/水0.31g/2N-HCl 0.06gの2N-HCl/エタノール混合水溶液を徐々に滴下し、室温において1時間撹拌し、フッ素化シラン化合物及び(メタ)アクリル基含有アルコキシシランの混合物からなる加水分解物を得た。得られた加水分解物に、一般的なアルコキシシランとして、エチルシリケート40(コルコート(株)製、テトラエトキシシランの平均5量体物)6.8g、金属アルコキシドとして85質量%ジルコニウムブトキシド(テトラブチルジルコニウムアルコキシド)の1-ブタノール溶液1.70gを混合し、この混合物に、撹拌混合しながら、エタノール2.62g/水0.66g/2N-HCl 0.10gの2N-HCl/エタノール混合水溶液を室温において徐々に滴下した。さらに、エタノール1.00g/水0.37gのエタノール水溶液を徐々に滴下し、室温において1時間撹拌し、アルコキシシランの加水分解物及び金属アルコキシドの加水分解物をさらに含んだ加水分解物(c)を得た。
実施例1と同様にして、樹脂を含有する組成物の調製、パターンの転写・光硬化を行った。
実施例1においてドライエッチング処理による残膜の除去を行わなかったこと以外は、実施例1と同様にして、樹脂を含有する組成物の調製、パターンの転写・光硬化、アルカリエッチング処理・リンス処理を行った。リンス処理後のサンプルのSEM観察結果(図20(表面)参照)より、パターン部分の下に凹構造が形成されたテクスチャー構造を有するシリコン基板が作製されていないことが確認された。
実施例1において得られたナノインプリントパターンについて、CHF3ガスによるドライエッチングを1分間しか行なわず、残膜を除去しなかったこと(SEM観察に結果、残膜が残留していることが確認された)以外は、実施例1と同様にして、樹脂を含有する組成物の調製、パターンの転写・光硬化、アルカリエッチング処理・リンス処理を行った。リンス処理後のサンプルのSEM観察結果より、パターン部分の下に凹構造が形成されテクスチャー構造を有するシリコン基板が作製されていないことが確認された。
Claims (20)
- テクスチャー構造を有するシリコン基板を製造する方法であって、
(A)シリコン基板上に樹脂を含有する組成物でパターンを形成する工程、
(B)エッチングガスをパターン部分以外のシリコン基板表面に照射する工程、
(C)エッチングガスを照射したシリコン基板をアルカリエッチング液により処理し、パターン部分の下に凹構造を形成する工程、
を含むことを特徴とするテクスチャー構造を有するシリコン基板の製法。 - 樹脂を含有する組成物が、光硬化性樹脂を含有する組成物である請求項1記載の製法。
- 光硬化性樹脂を含有する組成物が、(a)(メタ)アクリル基を有する重合性単量体及び(b)光重合開始剤を含むものである請求項2記載の製法。
- 光硬化性樹脂を含有する組成物が、さらに、(a’)(メタ)アクリル基を有する酸性基含有重合性単量体を含むものである請求項3記載の製法。
- 光硬化性樹脂を含有する組成物が、さらに(c)ケイ素化合物を含むものである請求項3又は4記載の製法。
- ケイ素化合物が、アルコキシシラン類又はアルコキシシラン類の加水分解物からなるものである請求項5記載の製法。
- アルコキシシラン類の加水分解物が、一般式(2)
- 工程(A)において、シリコン基板上に樹脂を含有する組成物を塗布して、塗膜を形成させた後、モールドにより塗膜にパターンを転写して基板上にパターンを形成する請求項1~7のいずれかに記載の製法。
- 工程(A)において、シリコン基板が、酸化膜を形成させる工程を経ていないシリコン基板である請求項1~8のいずれかに記載の製法。
- 得られるシリコン基板のテクスチャー構造が、太陽電池ウエハー用又はLED基板用に適するテクスチャー構造である請求項1~9のいずれかに記載の製法。
- 工程(B)において、エッチングガスが、少なくともフッ素系ガス又は酸素ガスを含むエッチングガスである請求項1~10のいずれかに記載の製法。
- 工程(C)において、アルカリエッチング液が、アルカリ金属水酸化物/イソプロピルアルコールの水溶液である請求項1~11のいずれかに記載の製法。
- さらに、工程(C)で得られたテクスチャー構造を有するシリコン基板をアルカリリンスして、パターンの残渣を除去する工程を含んでなる、請求項1~12のいずれかに記載の製法。
- 請求項1~13のいずれかに記載の製法により作製したテクスチャー構造を有するシリコン基板。
- テクスチャー構造を有するシリコン基板が、太陽電池用又はLED発光素子用のシリコン基板、又はナノインプリント用モールドを形成するものである、請求項14記載のシリコン基板。
- 請求項1記載の製法における樹脂を含有する組成物として使用される光硬化性樹脂を含有する組成物であって、前記光硬化性樹脂を含有する組成物が、
(a)(メタ)アクリル基を有する重合性単量体、
(b)光重合開始剤、並びに
を含むものである光硬化性樹脂を含有する組成物。 - さらに、(a’)(メタ)アクリル基を有する酸性基含有重合性単量体を含むものである請求項16記載の組成物。
- さらに、(c)ケイ素化合物を含むものである請求項16又は17記載の組成物。
- ケイ素化合物が、アルコキシシラン類又はアルコキシシラン類の加水分解物からなるものである請求項18記載の組成物。
- アルコキシシラン類の加水分解物が、一般式(2)
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US14/363,967 US9177819B2 (en) | 2011-12-09 | 2012-12-06 | Method for manufacturing silicon substrate having textured structure |
KR1020147015622A KR20140101765A (ko) | 2011-12-09 | 2012-12-06 | 텍스쳐 구조를 갖는 실리콘 기판의 제법 |
CN201280060391.5A CN103988313A (zh) | 2011-12-09 | 2012-12-06 | 具有纹理结构的硅基板的制法 |
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US11038080B2 (en) * | 2012-01-19 | 2021-06-15 | Utica Leaseco, Llc | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from etching |
JP5777798B2 (ja) * | 2012-03-12 | 2015-09-09 | 三菱電機株式会社 | 太陽電池セルの製造方法 |
DE112012006445B4 (de) * | 2012-05-31 | 2021-10-21 | Panasonic Intellectual Property Management Co., Ltd. | Fertigungsverfahren für Solarzelle |
JP2015088712A (ja) * | 2013-11-01 | 2015-05-07 | 日本酢ビ・ポバール株式会社 | テクスチャエッチング液、テクスチャエッチング液用添加剤液、テクスチャ形成基板及びテクスチャ形成基板の製造方法並びに太陽電池 |
JP2015173184A (ja) * | 2014-03-11 | 2015-10-01 | 東京応化工業株式会社 | アルカリエッチングマスク剤組成物、及びエッチング方法 |
KR20170100685A (ko) * | 2014-12-15 | 2017-09-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 챔버 컴포넌트를 텍스처링하기 위한 방법들 및 텍스처링된 표면을 갖는 챔버 컴포넌트들 |
JP6440860B2 (ja) | 2015-03-02 | 2018-12-19 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 関節作動する超音波プローブのための可変構成の曲げネック |
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JP6391170B2 (ja) * | 2015-09-03 | 2018-09-19 | 東芝メモリ株式会社 | 検査装置 |
US10254650B2 (en) | 2016-06-29 | 2019-04-09 | Honeywell International Inc. | Low temperature SC1 strippable oxysilane-containing coatings |
KR20180014287A (ko) * | 2016-07-28 | 2018-02-08 | 삼성디스플레이 주식회사 | 패터닝된 경화물의 제조 방법 및 패터닝된 경화물 |
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CN110271119B (zh) * | 2019-05-23 | 2021-07-20 | 深圳市伊声声学科技有限公司 | 一种利用模具制造防水透气膜的方法 |
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