WO2012118094A1 - 鍛造加工方法 - Google Patents
鍛造加工方法 Download PDFInfo
- Publication number
- WO2012118094A1 WO2012118094A1 PCT/JP2012/054974 JP2012054974W WO2012118094A1 WO 2012118094 A1 WO2012118094 A1 WO 2012118094A1 JP 2012054974 W JP2012054974 W JP 2012054974W WO 2012118094 A1 WO2012118094 A1 WO 2012118094A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pin
- heat sink
- forging
- fin
- tip
- Prior art date
Links
- 238000005242 forging Methods 0.000 title claims abstract description 116
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000000463 material Substances 0.000 claims abstract description 53
- 239000007769 metal material Substances 0.000 claims abstract description 46
- 230000000452 restraining effect Effects 0.000 claims abstract description 23
- 238000012546 transfer Methods 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 238000012937 correction Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 238000003825 pressing Methods 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 description 97
- 239000002184 metal Substances 0.000 description 97
- 238000005219 brazing Methods 0.000 description 36
- 238000000465 moulding Methods 0.000 description 19
- 239000000853 adhesive Substances 0.000 description 18
- 230000001070 adhesive effect Effects 0.000 description 18
- 238000005304 joining Methods 0.000 description 14
- 238000003466 welding Methods 0.000 description 11
- 238000003756 stirring Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
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- 229910000838 Al alloy Inorganic materials 0.000 description 5
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- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/26—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass heat exchangers or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C23/00—Extruding metal; Impact extrusion
- B21C23/02—Making uncoated products
- B21C23/18—Making uncoated products by impact extrusion
- B21C23/186—Making uncoated products by impact extrusion by backward extrusion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
- B21K23/00—Making other articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
- B21K25/00—Uniting components to form integral members, e.g. turbine wheels and shafts, caulks with inserts, with or without shaping of the components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4878—Mechanical treatment, e.g. deforming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
Definitions
- the present invention relates to a forging method and related technology in which a pin fin type heat sink is formed by die forging.
- Heat sinks are widely used for the purpose of lowering the temperature of heating elements such as CPUs and chipsets of personal computers, power transistors of AV amplifiers and audio devices, and inverters of electric vehicles and hybrid vehicles (HV vehicles).
- heating elements such as CPUs and chipsets of personal computers, power transistors of AV amplifiers and audio devices, and inverters of electric vehicles and hybrid vehicles (HV vehicles).
- Patent Document 1 discloses a technique in which a heat sink including a base plate and a large number of pin-shaped fins (pin fins) provided on one surface thereof is manufactured by die forging.
- a large number of fin forming holes for forming a large number of pin fins are formed in the forging mold, and the forging material (metal material) is pressurized and plastically flowed in the mold.
- the pin fin is formed by flowing into the forming hole.
- a technique for manufacturing a pin fin type heat sink by forging using back pressure has been proposed.
- a back pressure applying pin is slidably inserted into each fin forming hole of the mold, and flows into the fin forming hole by the back pressure applying pin during plastic flow of the metal material.
- a pressure (back pressure) opposite to the inflow direction is applied to the metal material.
- the metal material can flow evenly in a well-balanced manner into each fin forming hole of the mold, the length of each pin fin can be matched, and high dimensional accuracy can be obtained. it can.
- the metal material is the inner peripheral surface of the fin forming hole and the outer peripheral surface of the back pressure applying pin.
- the burr is formed on the outer peripheral edge of the pin fin.
- the burrs are formed on the outer peripheral edges of the pin fins in this way, when a metal plate or the like is to be fixed to the tip of each pin fin, the burrs are in contact with the metal plate, so that the metal plate on the pin fins. May not be bonded in a good state.
- the metal plate can be bonded and fixed to the tip of the pin fin without any trouble.
- the cutting process is less efficient than the press process, the cutting process causes a decrease in production efficiency.
- burrs at the tip of the pin fin in the forged heat sink by pressing there is also a method of removing burrs at the tip of the pin fin in the forged heat sink by pressing.
- a punch is driven into the tip of the pin fin to crush the burr.
- burrs can be removed by highly efficient pressing, high production efficiency can be maintained.
- the burr at the outer peripheral edge of the pin fin is crushed by a punch, the burr is bent inward and overlapped with the front surface of the pin fin. For this reason, a stepped portion is formed on the front end surface of the pin fin by the crushed burrs. If stepped portions are thus formed on the tip surfaces of the pin fins, it becomes difficult to bond the metal plate to each pin fin in a good state.
- the present invention has been made in view of the above problems, and provides a forging method and related technology capable of efficiently producing a pin fin type heat sink capable of bonding and fixing a metal plate or the like to a pin fin tip without any trouble. For the purpose.
- the present invention provides the following means.
- a forging method in which a forging material is plastically deformed by die forging to form a heat sink in which a plurality of pin fins are integrally formed on at least one surface of a base plate, A metal material as a forging material that flows into the fin forming hole when a forging material is slidably provided in a fin forming hole for forming the pin fin in a forging die, and when the forging material is plastically deformed.
- a concave portion is formed on the tip restraining surface of the back pressure applying pin for restraining the metal material, and the joint convex portion is integrally formed at the tip of the pin fin by the metal material filled in the concave portion.
- the forging die includes a punch and a die. 5. The forging method according to any one of items 1 to 4, wherein the fin forming hole is provided in the punch.
- the forging die includes a punch and a die. 6. The forging method according to any one of items 1 to 5, wherein the fin forming hole is provided in the die.
- a forging apparatus in which a forging material is plastically deformed using a forging die, and a heat sink in which a plurality of pin fins are integrally formed on at least one surface of a base plate is formed,
- a back pressure applying pin for applying a back pressure to the metal material as the forging material flowing into the fin forming hole at the time of plastic deformation of the forging material.
- a concave portion is formed on the tip restraining surface of the back pressure applying pin for restraining the metal material, and the joint convex portion is integrally formed at the tip of the pin fin by the metal material filled in the concave portion.
- a heat sink in which a plurality of pin fins are integrally formed on at least one surface of a base plate and formed by die forging, A heat sink characterized in that a joint projection is integrally formed at the tip of the pin fin.
- a heat sink with a heat transfer plate characterized in that a heat transfer plate is bonded and fixed to the tips of a plurality of pin fins in the heat sink as described in 8 or 9 above.
- a step of obtaining a heat sink by the forging method according to any one of items 1 to 6, A method of manufacturing a heat sink with a heat transfer plate, including a step of bonding and fixing a heat transfer plate to the tips of the plurality of pin fins without removing the thin protrusions formed at the outer peripheral edges of the tips of the plurality of pin fins in the heat sink. .
- a step of obtaining a heat sink by the forging method according to any one of items 1 to 6, A correction step of pressing a correction punch having a flat pressing surface to the tips of the plurality of pin fins in the heat sink, and adjusting a protruding amount of the joint protrusions in the plurality of pin fins;
- a method of manufacturing a heat sink with a heat transfer plate comprising: a bonding step of bonding and fixing a heat transfer plate to tips of the plurality of pin fins after performing the straightening step.
- a correction method for a heat sink comprising: a correction step of pressing a correction punch having a flat pressing surface against tips of a plurality of pin fins in the heat sink to adjust a protruding amount of a joint convex portion in the plurality of pin fins.
- the joining projection is projected from the thin projection or burr on the outer periphery of the tip of the pin fin.
- the bonding convex portion can be reliably brought into contact with the heat transfer plate, and can be bonded and fixed in an even better state.
- the joint convex portion is formed on a flat surface, when the heat transfer plate is joined and fixed to the tip of the pin fin, the joint convex portion and the heat transfer plate are The joining area can be increased, and the joining and fixing can be performed more reliably and in a favorable state.
- the heat transfer plate can be bonded and fixed to the tip of the pin fin in a good state as described above.
- FIG. 1 is a schematic front sectional view showing a forging device according to an embodiment of the present invention in a punch raised state.
- FIG. 2 is a schematic front sectional view showing the forging device of the embodiment in a punch lowered state.
- FIG. 3 is a front cross-sectional view showing the periphery of the fin forming hole in the punch lowered state in the forging device of the embodiment.
- FIG. 4 is a cross-sectional view showing the tip of a back pressure application pin applied to the forging device of the embodiment.
- FIG. 5 is a perspective view showing a heat sink manufactured in the embodiment.
- FIG. 6A is a cross-sectional view showing a heat sink manufactured in the embodiment.
- FIG. 6B is a cross-sectional view showing the heat sink manufactured in the embodiment with the brazing sheet mounted.
- FIG. 6C is a cross-sectional view showing the heat sink manufactured in the embodiment with the metal plate attached.
- FIG. 6D is an enlarged cross-sectional view of the tip end portion of the pin fin in the heat sink of the embodiment.
- FIG. 7A is a cross-sectional view showing a state immediately before the heat sink of the embodiment is joined to the metal plate by friction stir welding.
- FIG. 7B is a cross-sectional view illustrating a state after the heat sink of the embodiment is bonded to the metal plate by friction stir welding.
- FIG. 8A is a cross-sectional view illustrating a state immediately before the heat sink of the embodiment is bonded to a metal plate with an adhesive.
- FIG. 8B is a cross-sectional view illustrating a state after the heat sink of the embodiment is bonded to the metal plate with an adhesive.
- FIG. 9A is a cross-sectional view showing a state immediately before the heat sink of the embodiment is corrected by press working.
- Drawing 9B is a sectional view showing the state after correcting the heat sink of an embodiment by press processing.
- FIG. 10A is a cross-sectional view showing a tip portion of a back pressure application pin which is a first modification of the present invention.
- FIG. 10B is an enlarged cross-sectional view of the periphery of a concave step portion for forming a thin protrusion in the back pressure application pin of the first modification.
- FIG. 10C is an enlarged cross-sectional view of the periphery of a concave step portion for forming a thin protrusion in a back pressure application pin that is a second modification of the present invention.
- FIG. 11 is a perspective view showing a heat sink according to a third modification of the present invention.
- FIG. 12A is a sectional view showing a pin fin of a heat sink according to a fourth modification of the present invention.
- FIG. 12B is a sectional view showing a pin fin of a heat sink according to a fifth modification of the present invention.
- FIG. 13 is a front sectional view showing the periphery of the fin forming hole in the forging apparatus as a reference example in a punch lowered state.
- FIG. 14A is a cross-sectional view showing a heat sink manufactured in a reference example.
- FIG. 14B is a cross-sectional view showing the heat sink manufactured in the reference example with the brazing sheet mounted.
- FIG. 14C is a cross-sectional view showing the heat sink manufactured in the reference example with the metal plate attached.
- FIG. 15 is a cross-sectional view showing a state immediately before joining the heat sink of the reference example to the metal plate by friction stir welding.
- FIG. 16A is a cross-sectional view showing a state immediately before the heat sink of the reference example is corrected by press working.
- FIG. 16B is a cross-sectional view showing a state after the heat sink of the reference example is corrected by press working.
- FIGS. 1 and 2 are front sectional views schematically showing an example of a forging device according to an embodiment of the present invention.
- the forging material shown in these drawings is used to perform die forging on the forging material W to form the heat sink 9 as a forged product.
- FIG. 5 is a perspective view showing an example of the heat sink 9 manufactured by the forging device according to the embodiment.
- the heat sink 9 includes a rectangular base plate 91 and a large number of pin fins 92 formed on the upper surface of the base plate 91.
- Each pin fin 92 is formed in a cylindrical shape having a circular horizontal cross section, and is formed integrally with the base plate 91.
- an aluminum alloy or a copper alloy is preferably used as the material of the heat sink 9.
- the direction of the heat sink 9 is determined by the posture of the heat sink 9 in the mold immediately after molding. Specifically, in the present embodiment, the surface of the heat sink 9 on which the pin fins 92 are formed is described as the upper surface.
- the forging device of this embodiment applies a back pressure to a die 1 as a lower die, a punch 5 as an upper die, a punch holder 61 that holds the punch 5, and And a back pressure applying mechanism 7 for the purpose as a basic component.
- a molding recess 11 for molding the base plate 91 of the heat sink 9.
- a knockout pin (not shown) is accommodated in the bottom wall portion of the molding recess 11 in the die 1 so as to protrude upward from the bottom surface of the molding recess 11.
- the heat sink 9 molded in the molding recess 11 of the die 1 is pushed up by the knockout pin, and the heat sink 9 is arranged so as to project a small amount upward from the molding recess 11.
- the punch 5 is formed in a bottomed cylindrical shape whose lower end is closed, and a punch body 51 corresponding to the molding recess 11 of the die 1 is formed on the bottom wall portion.
- the punch body 51 is formed with a large number of fin forming holes 52 for forming the pin fins 92 of the heat sink 9 as a forged product.
- Each fin forming hole 52 penetrates in the vertical direction, and an upper end is opened to the internal space of the punch 5 and a lower end is opened downward of the punch. Further, the horizontal cross-sectional shape of each fin forming hole 52 is formed in a circular shape corresponding to the horizontal cross-sectional shape of the pin fin 92.
- the punch plate 61 is disposed on the upper end surface of the punch 5 so as to close the upper end opening. In this state, the punch 5 and the punch plate 61 are held by the punch holder 62.
- the punch holder 62 is supported by a guide post or the like (not shown) so as to be movable up and down, and the punch 5 and the die 1 together with the punch holder 62 in a state where the axis of the punch 5 is aligned with the axis of the molding recess 11 of the die 1. Can be moved up and down.
- the punch holder 62 can be driven up and down by a lift drive means (not shown). Then, when the punch 5 is lowered together with the punch holder 62 by the lift drive means with the punch 5 disposed above the die 1 as shown in FIG. 1, the main body 51 of the punch 5 is moved to the die as shown in FIG. It is designed to be driven into one molding recess 11.
- the punch 5 is provided with a back pressure applying mechanism 7.
- the back pressure applying mechanism 7 includes a spring holder 71 accommodated in the internal space of the punch 5.
- the spring holder 71 is slidably supported along the vertical direction (axial center) in the internal space of the punch 5.
- the spring holder 71 is formed with a plurality of spring accommodating recesses 72 on the upper end surface side, and springs 73 as urging means made of compression coil springs or the like are accommodated in the respective spring accommodating recesses 72.
- Each spring 73 has a top end joined to the punch plate 61 in a compressed state and a bottom end joined to the bottom surface of the spring accommodating recess 72. Therefore, in a state where the punch 5 is raised (normal state), the spring holder 71 is pushed downward by its own weight and the urging force of the spring 73 and is brought into contact with the bottom wall portion (punch main body 51) of the punch 5. It is arranged.
- the back pressure applying mechanism 7 is provided with a back pressure applying pin 75 corresponding to each fin forming hole 52 of the punch 5.
- Each back pressure applying pin 75 has a horizontal cross-sectional shape that is circular corresponding to the horizontal cross-sectional shape of each fin forming hole 52.
- the back pressure application pin 75 is also referred to as an ejector pin.
- Each back pressure applying pin 75 is slidably accommodated along the axial direction (vertical direction) in the corresponding fin forming hole 52 with its upper end fixed to the lower side of the spring holder 71. Yes. Thus, each back pressure applying pin 75 slides up and down in each fin forming hole 52 as the spring holder 71 moves up and down.
- each back pressure application pin 75 is a fin forming hole in a state where the spring holder 71 is disposed at the lower end position (a state where the punch 5 is raised). 52 is arranged corresponding to the lower end opening of 52, that is, the molding surface of the punch body 5.
- a concave section 76 having a trapezoidal trapezoidal shape as a whole is formed in the center of the tip restraining surface of each back pressure applying pin 75.
- the “center” when the recess 76 is formed at the center of the tip restraining surface of the back pressure applying pin 75 refers to a position where the recess 76 does not contact the contour of the tip restraining surface.
- the shaft of the back pressure application pin 75 in the range within the outline of the back pressure application pin 75 with the back pressure application pin 75 viewed from the front end side (lower side) in the axial direction. It is preferable to form the recess 76 within a range of 90% or less centering on the center.
- the axial center of the recess 76 formed at the tip of the back pressure application pin coincides with the axis of the back pressure application pin 75.
- a lubricant is applied to required portions of the die 1 and the punch 5, and a plate-like forging material W is set in the molding recess 11 of the die 1.
- the forging material W, the die 1 and the punch 5 are preheated as necessary.
- the self-weight of the back pressure applying mechanism 7 and the urging force of the spring 73 function as a back pressure (resistance force) acting in a direction opposite to the inflow direction with respect to the metal material flowing into each fin forming hole 52. Accordingly, the metal material can be uniformly and uniformly flowed into the fin forming holes 52.
- the base plate 91 is formed of a metal material filled in a molding space surrounded by the inner peripheral surface of the molding recess 11 of the die 1 and the molding surface (lower end surface) of the punch body 51, and the back pressure application pin 75.
- the pin fins 92 are formed of a metal material filled in a forming space surrounded by the front end restraining surface of the fin and the inner peripheral surface of the fin forming hole 52.
- the recess 76 is formed at the center of the tip restraining surface of the back pressure application pin 75, so that the recess 76 is also filled with a metal material.
- the frustoconical joining convex portion 93 is integrally formed by the metal material filled in the concave portion 76 at the center of the tip of the pin fin 92 in the heat sink 9 as the forged product.
- the “center” in the case where the joint convex portion 93 is formed at the center of the tip of the pin fin 92 means a position where the joint convex portion 93 does not contact the contour of the pin fin tip.
- the pin fin 92 is in a range within 90% of the pin fin 92 centered on the axis of the pin fin 92 with the pin fin 92 viewed from the front end side (upper side) in the axial direction. It is preferable to form the joint protrusion 93.
- a clearance is formed between the inner peripheral surface of the fin forming hole 52 in the punch main body 51 and the outer peripheral surface of the back pressure applying pin 75.
- a metal material also enters the gap, so that a crown-shaped burr 95 is formed on the outer periphery of the tip end of the pin fin 92 in the heat sink 9.
- the thin protrusion is constituted by the burr 95.
- the thin protruding portion may be constituted by an excessive portion such as a burr 95, but may be constituted by a molded portion that is intentionally molded as described later.
- the punch 5 rises.
- the knockout pin (not shown) described above protrudes upward from the bottom of the molding recess 11 in the die 1, and the heat sink 9 in the molding recess 11 is pushed up by the knockout pin and is projected upward. Is done.
- the pushed up heat sink 9 is discharged to a predetermined location, and a new forging material W is set in the molding recess 11 of the die 1.
- the new forging material W is forged in the same manner as described above, and the heat sink 9 is formed. Such an operation is repeatedly performed to sequentially manufacture the heat sink 9 as a forged product.
- a plate to be sealed so as to cover the entire region on the pin fin 92 side or a desired range, for example, a heat transfer plate such as a metal plate is attached.
- a brazing sheet 8 is prepared which is a composite plate in which a brazing material 82 made of aluminum alloy or the like is laminated on the lower surface of a metal plate 81 made of aluminum alloy or the like. To do. Then, the brazing sheet 8 is placed so that the brazing material 82 side is in contact with the tip of each pin fin 92 in the heat sink 9. In this state, the brazing sheet 8 is heated while being pressed toward the heat sink 9 to melt the brazing material 82.
- the molten brazing material 82 is filled in the gap between the tip end portion of the pin fin 92 and the lower surface of the metal plate 81. Further, a fillet 83 made of the brazing material 82 that has flowed is formed between the outer periphery of the tip end of the pin fin 92 and the lower surface of the metal plate 81.
- the heat sink with a metal plate (heat sink with heat transfer plate) 9 has a heating element such as a power transistor attached to the upper surface of the metal plate 81, for example.
- the heat generated from the heating element is transmitted to the heat medium between the metal plate 81 and the base plate 91 via the metal plate 81 and the pin fins 92, thereby lowering the temperature of the heating element.
- the heat medium includes air in addition to the refrigerant.
- a forging apparatus in which a back pressure application pin 75 having a recess 76 formed at the center of the tip restraining surface is accommodated in the fin forming hole 52 of the punch body 51. Therefore, the metal plate 81 can be bonded and fixed to the tip of each pin fin 92 in the manufactured heat sink 9 in a good state.
- the brazing sheet 8 is placed in contact with the tips of the pin fins 92 and pressurized and heated with the burrs 95 protruding upward from the tips of the pin fins 92 as described above. If the brazing material 82 is melted, the burr 95 is interposed between the tip surface of the pin fin 92 and the metal plate 81, and the molten brazing material 82 is not sufficiently filled therebetween. For this reason, as shown in FIG. 14C, a large void portion (unjoined portion) that is not filled with the brazing filler metal 8 is formed between the tip of the pin fin 92 and the metal plate 81, and the pin fin 92 is removed from the metal plate 81 due to poor joining. As a result, the heat transfer performance decreases, and the heat dissipation performance decreases.
- the burr 95 formed on the outer peripheral edge of the pin fin 92 is removed by machining or shot blasting after the heat sink 9a is manufactured and before the metal plate 81 is attached, the metal plate is attached to the tip of the pin fin 92. It is possible to bond and fix 81 in a good state. However, in that case, in order to remove the burrs 95, it is necessary to perform machining or the like with low efficiency, and accordingly, the production efficiency is reduced accordingly.
- the back pressure applying pin 75 in which the concave portion 76 is formed in the center of the tip restraining surface is employed, and thus the manufactured heat sink. 9 is formed at the center of the front end of the pin fin 92 at 9. Therefore, as shown in FIGS. 6B and 6C, when the brazing material 82 of the brazing sheet 8 is melted, the brazing material 82 is joined while the tip surface of the joining projection 93 and the metal plate 81 are in direct contact with each other.
- the fillet 93 is sufficiently filled between the outer peripheral portion of the convex portion 93 and the metal plate 81 and flows to the outer peripheral portion of the tip end of the pin fin 92 to form the fillet 93.
- the tip end portions of the pin fins 92 and the lower surface of the metal plate 81 are joined and fixed directly or via the brazing material 82 without any gap. Therefore, heat transfer from the metal plate 81 to the pin fins 92 is performed smoothly, and excellent heat dissipation performance can be obtained.
- the height H1 of the joint convex portion 93 is set.
- the height H2 of the burr 95 is preferably the same as or higher than the height H2 of the burr 95. That is, in this case, the brazing material 82 is sufficiently filled between the peripheral portion of the joint projection 93 in the pin fin 92 and the metal plate 81, and the tip of each pin fin 92 and the metal plate 81 are directly or brazed. The entire region can be joined and fixed via 82.
- it is preferable that the height H ⁇ b> 1 of the joint protrusion 93 is higher than the height H ⁇ b> 2 of the burr 95 rather than the height H ⁇ b> 2 of the burr 95.
- the forging is performed so that the height H1 of the joint protrusion 93 from the upper surface of the base plate is the same as the height H2 of the burr 95 from the upper surface of the base plate or higher than the height H2 of the burr 95. It is preferable to determine the shape and size (size) of the recess 76 of the tip restraining surface of the back pressure application pin 75 in the processing apparatus.
- the height H1 of the joint projection 93 need not necessarily be higher than the height H2 of the burr 95. In other words, even if the height H1 of the joint projection 93 is lower than the height H2 of the burr 95, if the joint projection 93 is formed at the tip of the pin fin 92, the gap between the joint projection 93 and the metal plate 81 is reduced. The brazing filler metal 82 is easily filled. For this reason, the tip end of the pin fin 92 and the metal plate 81 can be joined and fixed through the brazing material 82 with almost no gap, and a predetermined heat dissipation performance can be ensured.
- FIG. 6D is an enlarged sectional view showing the tip end portion of the pin fin 92 in the heat sink 9 of the present embodiment.
- the height of the protrusion 93 is “H3” and the outer diameter (diameter) of the pin fin 92 is “B”, 0.001 ⁇ H3 / B ⁇ 4 is set. It is preferable to do this. That is, satisfactory bonding is possible by satisfying this relational expression.
- the joint protrusion 93 is formed at the center of the tip of the pin fin 92, the center of each pin fin 92 can be reliably brought into contact with the metal plate 81, and the pin fin 92 and the metal plate 81 can be contacted. Can be bonded and fixed in a better state.
- the contact area of the junction convex part 93 and the metal plate 81 can be ensured large, and both 81 and 93 are in a still more favorable state Can be fixed to the joint.
- the metal plate 81 can be bonded and fixed to the heat sink 9 after forging without removing the burr 95. For this reason, the process of removing the burr 95 becomes unnecessary, and the number of work processes can be reduced correspondingly, and the production efficiency can be improved.
- the method of joining the heat sink 9 and the metal plate 81 is not limited to brazing. In the present invention, even when a joining method other than brazing is used, a good joined state can be obtained as described above.
- the metal material is filled between the pin fins 92 and the metal plate 81 without a gap, and the members 92 and 81 are joined and integrated.
- the portion where the metal material is stirred during friction stir welding is indicated by hatching.
- the space between the pin fins 92 of the heat sink 9 and the metal plate 81 can be filled with a metal material without any gap, so that the heat sink 9 and the metal plate 81 can be joined in a good state.
- the heat sink 9 and the metal plate 81 can be joined also by an adhesive.
- an adhesive layer 85 is provided on the joint surface of the metal plate 81 with the heat sink 9.
- the adhesive layer 85 is formed by laminating an adhesive having a good thermal conductivity or attaching an adhesive sheet containing an adhesive having a good thermal conductivity.
- the pin fins 92 of the heat sink 9 are brought into pressure contact with the adhesive layer 85 of the metal plate 81, and the pin fins 92 and the metal plate 81 are bonded via an adhesive.
- the adhesive includes an adhesive.
- the heat sink 9 and the metal plate 81 can be bonded in a good state. That is, as shown in FIG. 8A, in the heat sink 9 of the present invention, since the joint protrusion 93 is formed at the tip of the pin fin 92, the pin fin 92 and the metal plate 81 at the abutting portion of the pin fin 92 to the metal plate 81. There is almost no gap formed between them. For this reason, as shown in FIG. 8B, the adhesive is filled between the pin fins 92 and the metal plate 81 without any gap, so that both the members 92 and 81 can be joined in a good state.
- the adhesive has a lower thermal conductivity than a metal such as a brazing material, it is preferable to form the adhesive layer 85 thinly.
- the heat sink 9 and the metal plate 81 can be joined in a good state by any joining method such as joining by brazing, friction stir welding, or joining by an adhesive. Can do.
- the height of the pin fins 92 is made by performing a correction process using a press.
- the height H1 of the joint projection 93 in the pin fin 92 is formed higher than the height H2 of the burr 95.
- correction processing by pressing is performed with a portion higher than the burr 95 at the tip portion of the joint projection 93 as a correction allowance (indentation allowance) within the range of the tip protrusion 931.
- a portion corresponding to the tip protruding portion 931 is hatched for easy understanding of the invention.
- the metal plate 81 is joined to the heat sink 9 that has been subjected to the correction process by this press by the brazing material 82 in the same manner as described above.
- the bonding protrusion 93 is not formed at the tip of the pin fin 92a, and only the burr 95 is formed. It is difficult to reliably bond the two.
- the burr 95 is bent inward by the punch 5a as shown in FIG. 16B. It arrange
- the stepped portion is formed on the tip surface of the pin fin 92a in this way, it becomes difficult to join the metal plate 8 to each pin fin 92a in a good state as in the case where the height of the pin fin 92 varies. Defects will occur.
- the tip protrusions 931 that are higher than the burrs 95 in the joint projections 93 of the pin fins 92 are pressed to align the heights of the pin fins 92. .
- the burrs 95 are not crushed, and the burrs 95 are prevented from overlapping the tip surfaces of the pin fins 92a, so that the stepped portions due to the burrs 95 can be prevented from being formed on the tip surfaces of the pin fins 92a. Therefore, similarly to the heat sink 9 shown in FIG. 6C, the brazing material 82 is sufficiently filled between the peripheral portion of the joint projection 93 in the pin fin 92 and the metal plate 81. As a result, the tip end of each pin fin 92 and the metal plate 81 can be fixed by joining almost the entire region directly or via the brazing material 82.
- the tip protrusion 931 is provided. It is necessary to set the correction allowance (indentation amount) to be equal to or less than the height dimension ⁇ H of the tip protrusion 931. Specifically, it is preferable to set the correction allowance of the tip protrusion 931 to 0.2 mm or less. That is, when the correction allowance is too large, the pin fins 92 may buckle and deform, and good dimensional accuracy may not be obtained.
- the heat sink 9 and the metal plate 81 are joined in a good state by brazing as described above. can do. Furthermore, in the present embodiment, the heat sink 9 and the metal plate 81 can be bonded in a good state as described above also by a bonding method other than brazing, for example, friction stir welding or bonding using an adhesive.
- the heat sink 9 and the metal plate 81 can be joined by effectively utilizing the thin protrusion 951 constituted by the burr 95 that is the surplus part.
- the brazing material 82 is interposed between the pin fins 92 and the metal plate 81 even around the thin protrusion 951. Is fully filled without gaps.
- the fillet 83 made of the brazing material 82 is also formed around the joint convex portion 93, and the pin fins 92 and the metal plate 81 are joined directly or via the brazing material 82 with no gap.
- the tip fin 92 and the metal plate 81 can be joined almost without any gap, and the heat sink 9 and the metal plate 81 are joined in a good state. be able to.
- an annular groove (dent) is formed between the joint projection 93 and the thin projection 951 at the tip of the pin fin 92.
- the pin fin 92 and the metal plate 81 can be joined in a state where the flux is stored in the annular groove. Therefore, a sufficient amount of flux can be secured, and occurrence of poor bonding due to insufficient flux can be reliably prevented. Thereby, the heat sink 9 and the metal plate 81 can be joined in an even better state.
- the shape of the thin protrusion 951 is not limited to the above.
- the height H2 of the thin protrusion 951 does not necessarily have to be lower than the height H1 of the joint protrusion 93, and the height H2 of the thin protrusion 951 is not equal to the joint protrusion 93.
- the height H1 may be the same as or higher than the height H1.
- the height H2 of the thin protrusion 951 is formed to be the same as the height H1 of the joint protrusion 93 or higher than the height H1 of the joint protrusion 93. Is preferred.
- the thin protrusion 951 it is not necessary for the thin protrusion 951 to have the same height H2 over the entire circumferential direction, and the height H2 may be different depending on the position in the circumferential direction.
- the thin protrusion 951 does not need to be continuously formed in the circumferential direction on the tip surface of the pin fin 92, and may be provided at intervals in the circumferential direction. In short, the thin protrusion 951 may be formed at least at a part in the circumferential direction.
- the thin protrusion 951 is formed by the burr 95 that is the surplus part.
- the present invention is not limited to this, and in the present invention, the thin protrusion 951 is intentionally formed by forging. May be.
- a concave step portion 77 for forming a thin protrusion that opens to the tip side (downward) is formed on the tip outer peripheral surface of the back pressure application pin 75 used for heat sink forging.
- the heat sink 9 may be formed by forging using the back pressure applying pin 75 in the same manner as described above.
- the crown-shaped thin protrusion part 931 can be integrally formed in the front-end
- the radius that is the dimension from the axial center to the contour line is “A”
- the depth of the recessed step portion 77 is “D”
- the recessed stepped portion depth D is preferably set to 10% or less of the recessed stepped portion length L. It is preferable to set D ⁇ / A ⁇ 1/10. That is, by satisfying this relational expression, the metal material can be reliably filled into the recessed step portion 77 during forging, and the desired thin protrusion 951 can be reliably formed.
- the heat sink 9 when filling the concave step 77 with a metal material during forging, it is preferable to set L ⁇ H3, preferably L ⁇ H3. That is, by satisfying this relational expression, it is possible to manufacture the heat sink 9 in which the joint protrusion 93 of the pin fin 92 is the same height as the thin protrusion 95 or higher than the thin protrusion 95.
- the depth D of the recessed step portion 77 may be set to 200% or less with respect to the radius A of the pin 75.
- the concave step portion 77 may be formed in a tapered shape so that the bottom surface thereof gradually approaches the axial center of the back pressure application pin 75 toward the tip. According to this configuration, the concave step 77 can be filled with the metal material smoothly, and the mold release operation of the thin protrusion 951 can be performed smoothly.
- a forging method in which a forging material is plastically deformed by die forging to form a heat sink in which a plurality of pin fins are integrally formed on at least one surface of a base plate, A metal material as a forging material that flows into the fin forming hole when a forging material is slidably provided in a fin forming hole for forming the pin fin in a forging die, and when the forging material is plastically deformed.
- a concave portion is formed on the tip restraining surface of the back pressure applying pin that restrains the metal material, and a joint convex portion is integrally formed at the tip of the pin fin by the metal material filled in the concave portion,
- a thin protrusion is formed on at least a part of the outer peripheral edge of the tip end of the pin fin by a metal material filled in a gap between the outer peripheral surface of the tip end of the back pressure applying pin and the inner peripheral surface of the fin forming hole.
- the shape of the pin fins is not particularly limited in the present invention.
- the heat sink 9 having a pin fin 92 having a square cross section may be manufactured.
- the cross section is polygonal, oval, oval, You may make it manufacture the heat sink which has a pin fin of a cross-section star shape or an irregular cross section.
- a heat sink in which plural types of pin fins having different shapes are mixed may be manufactured.
- the number of pin fins formed on the heat sink is not limited.
- the concave portion 76 of the tip restraining surface of the back pressure applying pin 75 is formed in a truncated cone shape, and the truncated cone-shaped joint convex portion 93 is formed at the tip of the pin fin in the heat sink 9.
- these shapes are not particularly limited.
- the shape of the concave portion 76 of the back pressure applying pin 75 and the joint convex portion 93 at the tip of the pin fin is formed in a dome shape, or is formed in a small dome shape as shown in FIG. Also good.
- the horizontal cross-sectional shape of the concave portion 76 of the back pressure applying pin 75 and the joint convex portion 93 at the tip of the pin fin is not particularly limited.
- a polygonal cross section, an elliptical cross section, an oval cross section, a star cross section, or an irregular cross section may be used.
- a plurality of types of back pressure applying pins having different shapes of the bonding recesses may be mixed.
- the metal plate 81 is fixed to the heat sink 9 by the brazing material 82.
- the fixing means for the heat sink 9 and the metal plate 81 is limited to the above. It is not a thing.
- the heat sink and the metal plate may be fixed by an adhesive (including an adhesive) having good thermal conductivity, or may be fixed by friction stir welding.
- the tip of the joint projection 93 at the tip of the pin fin in the heat sink is formed on a flat surface as in the above embodiment. preferable.
- a metal plate made of an aluminum alloy is attached as a heat transfer plate to be bonded and fixed to the heat sink.
- the present invention is not limited to this, and in the present invention, a heat transfer plate other than an aluminum alloy is used.
- a metal plate, a resin plate, etc. can also be used.
- the spring is used as the biasing means of the back pressure applying mechanism, but it is not limited to that.
- a gas cushion may be used as the biasing means.
- the forging method of the present invention can be used when manufacturing a pin fin heat sink.
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Abstract
Description
鍛造加工用金型における前記ピンフィンを成形するためのフィン成形孔内に背圧付与ピンをスライド自在に設けておき、鍛造素材の塑性変形時に、前記フィン成形孔に流入する鍛造素材としての金属材料に対し、前記背圧付与ピンによって背圧を付与する一方、
金属材料を拘束する前記背圧付与ピンの先端拘束面に凹部を形成しておき、その凹部内に充填される金属材料によって、前記ピンフィンの先端に接合凸部を一体に形成するようにしたことを特徴とする鍛造加工方法。
前記パンチに前記フィン成形孔が設けられる前項1~4のいずれか1項に記載の鍛造加工方法。
前記ダイに前記フィン成形孔が設けられる前項1~5のいずれか1項に記載の鍛造加工方法。
前記金型における前記ピンフィンを成形するためのフィン成形孔内に、鍛造素材の塑性変形時に、前記フィン成形孔に流入する鍛造素材としての金属材料に対し、背圧を付与する背圧付与ピンがスライド自在に設けられ、
金属材料を拘束する前記背圧付与ピンの先端拘束面に凹部が形成されて、その凹部内に充填される金属材料によって、前記ピンフィンの先端に接合凸部が一体に形成されるようにしたことを特徴とする鍛造加工装置。
前記ピンフィンの先端に接合凸部が一体に形成されたことを特徴とするヒートシンク。
前記ヒートシンクにおける複数のピンフィンの先端外周縁に形成される前記薄肉突出部を除去せずに、複数のピンフィンの先端に、伝熱板を接合固定する工程とを含む伝熱板付きヒートシンクの製造方法。
前記ヒートシンクにおける複数のピンフィンの先端に、押圧面が平坦な矯正パンチを押し付けて、前記複数のピンフィンにおける接合凸部の突出量を調整する矯正工程と、
前記矯正工程を行った後、伝熱板を前記複数のピンフィンの先端に接合固定する接合工程とを含むことを特徴とする伝熱板付きヒートシンクの製造方法。
前記ヒートシンクにおける複数のピンフィンの先端に、押圧面が平坦な矯正パンチを押し付けて、前記複数のピンフィンにおける接合凸部の突出量を調整する矯正工程とを含むヒートシンクの矯正方法。
鍛造加工用金型における前記ピンフィンを成形するためのフィン成形孔内に背圧付与ピンをスライド自在に設けておき、鍛造素材の塑性変形時に、前記フィン成形孔に流入する鍛造素材としての金属材料に対し、前記背圧付与ピンによって背圧を付与する一方、
金属材料を拘束する前記背圧付与ピンの先端拘束面に凹部を形成しておき、その凹部内に充填される金属材料によって、前記ピンフィンの先端に接合凸部を一体に形成するものとし、
前記背圧付与ピンの先端外周面と前記フィン成形孔内周面との隙間に充填される金属材料によって、前記ピンフィンの先端外周縁における少なくとも一部に薄肉突出部を形成するようにしたことを特徴とする鍛造加工方法。
5:パンチ
5a:矯正用パンチ
52:フィン成形孔
75:背圧付与ピン
76:凹部
81:金属板(伝熱板)
9:ヒートシンク
91:ベース板
92:ピンフィン
93:接合凸部
95:バリ
951:薄肉突出部
W:鍛造素材
Claims (13)
- 鍛造素材を型鍛造加工によって塑性変形させて、ベース板の少なくとも一面に複数のピンフィンが一体に形成されるヒートシンクを成形するようにした鍛造加工方法であって、
鍛造加工用金型における前記ピンフィンを成形するためのフィン成形孔内に背圧付与ピンをスライド自在に設けておき、鍛造素材の塑性変形時に、前記フィン成形孔に流入する鍛造素材としての金属材料に対し、前記背圧付与ピンによって背圧を付与する一方、
金属材料を拘束する前記背圧付与ピンの先端拘束面に凹部を形成しておき、その凹部内に充填される金属材料によって、前記ピンフィンの先端に接合凸部を一体に形成するようにしたことを特徴とする鍛造加工方法。 - 前記ピンフィンの接合凸部を、前記ピンフィンの先端外周縁に形成される薄肉突出部よりも突出させるようにした請求項1に記載の鍛造加工方法。
- 前記薄肉突出部をバリによって形成するようにした請求項2に記載の鍛造加工方法。
- 前記ピンフィンの接合凸部の先端を、平坦面に形成するようにした請求項1~3のいずれか1項に記載の鍛造加工方法。
- 前記鍛造加工用金型は、パンチおよびダイを備え、
前記パンチに前記フィン成形孔が設けられる請求項1~4のいずれか1項に記載の鍛造加工方法。 - 前記鍛造加工用金型は、パンチおよびダイを備え、
前記ダイに前記フィン成形孔が設けられる請求項1~5のいずれか1項に記載の鍛造加工方法。 - 鍛造素材を鍛造加工用金型を用いて塑性変形させて、ベース板の少なくとも一面に複数のピンフィンが一体に形成されるヒートシンクを成形するようにした鍛造加工装置であって、
前記金型における前記ピンフィンを成形するためのフィン成形孔内に、鍛造素材の塑性変形時に、前記フィン成形孔に流入する鍛造素材としての金属材料に対し、背圧を付与する背圧付与ピンがスライド自在に設けられ、
金属材料を拘束する前記背圧付与ピンの先端拘束面に凹部が形成されて、その凹部内に充填される金属材料によって、前記ピンフィンの先端に接合凸部が一体に形成されるようにしたことを特徴とする鍛造加工装置。 - 請求項1~6のいずれか1項に記載の鍛造加工方法によって形成されたことを特徴とするヒートシンク。
- ベース板の少なくとも一面に複数のピンフィンが一体に形成され、かつ型鍛造加工によって形成されるヒートシンクであって、
前記ピンフィンの先端に接合凸部が一体に形成されたことを特徴とするヒートシンク。 - 請求項8または9に記載のヒートシンクにおける複数のピンフィンの先端に、伝熱板が接合固定されることを特徴とする伝熱板付きヒートシンク。
- 請求項1~6のいずれか1項に記載の鍛造加工方法によってヒートシンクを得る工程と、
前記ヒートシンクにおける複数のピンフィンの先端外周縁に形成される前記薄肉突出部を除去せずに、複数のピンフィンの先端に、伝熱板を接合固定する工程とを含む伝熱板付きヒートシンクの製造方法。 - 請求項1~6のいずれか1項に記載の鍛造加工方法によってヒートシンクを得る工程と、
前記ヒートシンクにおける複数のピンフィンの先端に、押圧面が平坦な矯正パンチを押し付けて、前記複数のピンフィンにおける接合凸部の突出量を調整する矯正工程と、
前記矯正工程を行った後、伝熱板を前記複数のピンフィンの先端に接合固定する接合工程とを含むことを特徴とする伝熱板付きヒートシンクの製造方法。 - 請求項1~6のいずれか1項に記載の鍛造加工方法によってヒートシンクを得る工程と、
前記ヒートシンクにおける複数のピンフィンの先端に、押圧面が平坦な矯正パンチを押し付けて、前記複数のピンフィンにおける接合凸部の突出量を調整する矯正工程とを含むヒートシンクの矯正方法。
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Also Published As
Publication number | Publication date |
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CN103402669A (zh) | 2013-11-20 |
JPWO2012118094A1 (ja) | 2014-07-07 |
JP6055126B2 (ja) | 2016-12-27 |
JP2016120526A (ja) | 2016-07-07 |
US20140054023A1 (en) | 2014-02-27 |
CN103402669B (zh) | 2015-07-01 |
US9555505B2 (en) | 2017-01-31 |
JP5941037B2 (ja) | 2016-06-29 |
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