WO2012105243A1 - テープ状酸化物超電導線材の製造方法及び熱処理装置 - Google Patents

テープ状酸化物超電導線材の製造方法及び熱処理装置 Download PDF

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WO2012105243A1
WO2012105243A1 PCT/JP2012/000651 JP2012000651W WO2012105243A1 WO 2012105243 A1 WO2012105243 A1 WO 2012105243A1 JP 2012000651 W JP2012000651 W JP 2012000651W WO 2012105243 A1 WO2012105243 A1 WO 2012105243A1
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Prior art keywords
tape
heat treatment
gas
wire
rotating body
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PCT/JP2012/000651
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English (en)
French (fr)
Japanese (ja)
Inventor
勉 小泉
茂樹 佐野
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公益財団法人国際超電導産業技術研究センター
昭和電線ケーブルシステム株式会社
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Priority to CN201280007562.8A priority Critical patent/CN103460306B/zh
Publication of WO2012105243A1 publication Critical patent/WO2012105243A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G47/00—Compounds of rhenium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324—Processes for depositing or forming copper oxide superconductor layers from a solution

Definitions

  • the present invention relates to a method for producing a tape-shaped oxide superconducting wire and a heat treatment apparatus, and more particularly to a technique for forming a superconducting layer on a metal substrate on which an intermediate layer is formed by using a MOD (Metal-organic Deposition) method.
  • a MOD Metal-organic Deposition
  • a tape-like base material on which an oxide intermediate layer is formed is octyl such as trifluoroacetate (TFA salt) containing each metal element constituting a superconductor in a predetermined molar ratio. It is immersed in a superconducting raw material solution which is a mixed solution of metal organic acid salts such as acid salts and naphthenates. Next, the mixed solution is applied to the surface of the substrate by pulling up the substrate from the superconducting raw material solution (so-called dip coating method). Next, an oxide superconducting layer is formed by performing preliminary firing and main firing.
  • TFA salt trifluoroacetate
  • the MOD method can continuously form an oxide superconducting layer on a long substrate even in non-vacuum, the process is more efficient than gas phase methods such as PLD (Pulse Laser Deposition) and CVD (Chemical Vapor Deposition). It is attracting attention because it is simple and can be reduced in cost.
  • gas phase methods such as PLD (Pulse Laser Deposition) and CVD (Chemical Vapor Deposition). It is attracting attention because it is simple and can be reduced in cost.
  • Patent Documents 1 and 2 disclose a batch-type heat treatment apparatus for heat-treating a base material having a superconducting raw material solution attached to its surface.
  • the batch-type heat treatment apparatus has an advantage that a stable superconducting layer can be formed because the atmosphere in the furnace is easily controlled.
  • the batch-type heat treatment apparatus has an advantage that the firing can be completed in a short time with a small-sized apparatus, compared with the reel-to-reel type heat treatment apparatus.
  • the heat treatment equipment of the reel-to-reel method performs firing by installing a wire feeding mechanism and a winding mechanism at both ends of a tunnel-shaped furnace core tube, and moving the wire at a constant speed in the furnace. is there.
  • This heat treatment apparatus winds a base material having a superconducting raw material attached to a surface of a cylindrical rotating body.
  • the cylindrical rotating body around which the substrate is wound is rotated by a rotation driving mechanism.
  • a large number of through holes are formed in the rotating body.
  • the base material is heated by a heater provided in the surface direction of the base material while being wound around the rotating body.
  • an atmospheric gas composed of an inert gas, oxygen gas, water vapor, and the like is ejected from the surface direction of the base material toward the base material, and this atmospheric gas is discharged through a through-hole formed in the cylindrical body.
  • a precursor containing fluorine (F) In the method (TFA-MOD method) for forming a YBCO film by subjecting this to a film on the intermediate layer and then subjecting it to main firing, as the atmospheric gas (reactive gas) supplied to the precursor film during the main firing Use water vapor.
  • the YBCO production reaction formula at this time is 1 / 2Y 2 Cu 2 O 5 + 2BaF 2 + 2CuO + 2H 2 O ⁇ YBCO + 4HF It becomes.
  • the fluorine removal rate when decomposing the fluorine compound (BaF 2 ) is the reaction rate-limiting factor for YBCO formation. Therefore, there is a problem that the superconducting property of the YBCO film to be fired is deteriorated due to the influence of HF gas generated after the reaction.
  • the superconducting layer is formed to a thickness of 1.5 ⁇ m or more. It is necessary to form a film. With the above film thickness, it becomes more difficult to completely remove fluorine gas, and the above characteristics cannot be obtained.
  • An object of the present invention is to provide a tape-shaped oxide superconducting wire manufacturing method and a heat treatment apparatus in which superconducting characteristics are improved in the TFA-MOD method.
  • the method for producing a tape-shaped oxide superconducting wire according to the present invention includes a furnace core tube having a cylindrical heat treatment space, a rotatable arrangement with respect to the furnace core shaft inside the heat treatment space, and a large number of through holes.
  • the separation distance between the surface of the rotating body and the gas ejection hole of the gas supply pipe is 10 mm to 150 mm. I made it.
  • the separation distance is 50 mm to 100 mm.
  • One aspect of the heat treatment apparatus of the present invention is a furnace core tube having a cylindrical heat treatment space, and is disposed so as to be rotatable with respect to the furnace core shaft inside the heat treatment space, and a plurality of through holes are formed.
  • the gas ejection hole is configured such that the distance from the surface of the rotating body is 10 to 150 mm.
  • the separation distance is 50 mm to 100 mm.
  • a tape-shaped oxide superconducting wire with improved superconducting properties can be produced by the TFA-MOD method.
  • FIG. 5 shows an outline of a method for producing a tape-shaped oxide superconducting wire (YBCO superconducting wire) having a YBCO superconducting layer by the MOD method.
  • Y: TFA salt (trifluoroacetate salt), Ba-TFA salt and Cu-naphthenate salt in an organic solvent were applied in the coating process (see FIG. 5A).
  • Y: Ba: Cu 1: 1.5:
  • a mixed solution (superconducting raw material solution) 8 dissolved at a ratio of 3 is applied by dip coating. After the mixed solution 8 is applied, temporary baking is performed in a temporary baking step (see FIG. 5B).
  • the coating process see FIG.
  • the heat treatment apparatus is used for the crystallization heat treatment in the step (see FIG. 5C), and heat-treats the precursor of the superconductor formed in the tape-shaped wire to produce the YBCO superconductor. Generate. Note that the heat treatment apparatus may also be applied to the formation of the intermediate layer.
  • the Ni alloy substrate may be one having biaxial orientation or one having an intermediate layer having biaxial orientation formed on a metal substrate having no orientation. Further, the intermediate layer is formed of one layer or a plurality of layers.
  • an application method it is possible to use an inkjet method, a spray method, etc. in addition to the dip coating method described above, but basically, this example is applicable as long as it is a process capable of continuously applying a mixed solution onto a composite substrate. Not constrained by.
  • the film thickness to be applied at one time is 0.01 ⁇ m to 2.0 ⁇ m, preferably 0.1 ⁇ m to 1.0 ⁇ m.
  • the superconducting raw material solution used here is a mixed solution in which a metal organic acid salt or an organic metal compound containing Y, Ba, and Cu in a predetermined molar ratio is dissolved in an organic solvent.
  • a raw material solution having a Ba molar ratio in the range of ⁇ 2 is used.
  • the Ba molar ratio in the raw material solution is preferably in the range of 1.0 ⁇ a ⁇ 1.8, and more preferably the Ba molar ratio in the raw material solution. Is in the range of 1.3 ⁇ a ⁇ 1.7.
  • the segregation of Ba can be suppressed, and as a result, the precipitation of Ba-based impurities at the grain boundaries is suppressed. Therefore, generation of cracks is suppressed and electrical connectivity between crystal grains is improved.
  • the metal organic acid salt include octyl acid salt, naphthenic acid salt, neodecanoic acid salt, and trifluoroacetic acid salt of each element, but one or more kinds of the salts are uniformly dissolved in an organic solvent, Any material that can be applied on the composite substrate can be used.
  • a heat treatment apparatus 10 shown in FIG. 1 performs a baking of a raw material solution (superconducting raw material solution) applied as a film body of a superconducting precursor in a tape-shaped wire 50 in a batch type.
  • the heat treatment apparatus 10 includes a furnace core tube 11 having a cylindrical heat treatment space 11 a, a cylindrical rotating body 12, a gas supply pipe 13, and a gas discharge pipe 14.
  • the superconducting precursor film body comprises an intermediate layer on the substrate, and after applying a mixed solution in which a metal organic acid salt or organic metal compound containing a metal element is dissolved in an organic solvent on the intermediate layer, It is the film body formed by temporary baking.
  • the heat treatment space 11a of the furnace core tube 11 is configured so that a reduced-pressure atmosphere or vacuum in the furnace can be maintained.
  • the furnace core tube 11 is provided with a heater 15 around it, and the inside of the heat treatment space 11 a is heated by the heater 15.
  • a rotating body 12 is rotatably arranged around a furnace core axis C that is an axis of the furnace core tube 11.
  • the rotating body 12 has a cylindrical body 12b around which a tape-shaped wire 50 on which a precursor is formed is wound on the surface 12a.
  • the tape-shaped wire 50 is obtained by applying a mixed solution and calcining as described above to form a YBCO superconducting product precursor on a base material.
  • the tape-shaped wire 50 is spirally wound around the surface 12a of the cylindrical body 12b (the surface of the rotating body 12) with the film surface of the precursor exposed.
  • a large number of through holes 17 are formed in the cylindrical body 12 b of the rotating body 12.
  • the diameter of the through hole 17 is preferably equal to the tape width of the tape-shaped wire 50.
  • the hole area ratio is 50 to 95%, and a hole area ratio in the range of 89 to 91% is particularly preferable.
  • the rotating body 12 is rotated at a constant speed during the heat treatment by a rotating mechanism (not shown).
  • the rotating body 12 is made of a material that is resistant to high temperatures and hardly oxidizes, such as ceramics such as quartz glass and alumina, or metals such as Hastelloy and Inconel.
  • the one end side of the cylindrical body 12b is closed by a lid 12c.
  • the other end side of the cylindrical body 12b is closed by a lid body 12d.
  • a gas discharge pipe 14 for discharging the atmospheric gas inside the cylindrical body 12b to the outside of the furnace core pipe 11 is inserted into the lid body 12d.
  • a plurality of gas supply pipes 13 are disposed in the furnace core tube 11 so as to be separated from the surface 12a of the cylindrical body 12b.
  • the plurality of gas supply pipes 13 are arranged in parallel to the furnace core axis C and are arranged symmetrically in a cross section perpendicular to the furnace core axis C.
  • four gas supply pipes 13 are arranged in the furnace core tube 11 symmetrically with respect to the furnace core axis C and parallel to each other. That is, in the furnace core tube 11, the plurality of gas intake pipes 13 are arranged at a pitch of 90 ° in the circumferential direction around the furnace core axis C.
  • Each gas supply pipe 13 includes a large number of gas ejection holes 20 that eject atmospheric gas to the rotating body 12.
  • the gas ejection holes 20 in the gas supply pipe 13 are uniformly formed in the main body portion of the gas supply pipe 13 at regular intervals along the longitudinal direction.
  • Each gas ejection hole 20 is a circular hole and ejects atmospheric gas uniformly.
  • the flow rate when supplying the atmospheric gas specifically the film surface of the film body wound around the rotating body (tape-like wire rod) It is preferable that the flow velocity at which the contact is in the range of 200 m / s to 500 m / s.
  • each gas supply pipe 13 has gas ejection holes 20 on the surface of the cylindrical body 12b so as to supply atmospheric gas from the vertical direction to the surface 12a of the cylindrical body 12b. It arrange
  • the gas supply pipe 13 is provided in the furnace core pipe 11 such that the separation distance S between the gas ejection hole 20 and the surface 12a of the rotating body 12 is 10 mm to 150 mm.
  • a preferable range of the separation distance is 50 mm to 100 mm.
  • the atmospheric gas can be uniformly ejected to the superconducting precursor, so that the fluorine gas can be further removed. If it is less than the above range, the atmosphere gas ejected only to a part of the film surface of the film body of the tape-shaped wire 50 wound around the rotating body 12 does not come into contact with the superconducting wire in the longitudinal direction. Superconducting properties cannot be obtained.
  • the above range is exceeded, not only the gas flow rate increases and the production cost improves, but also the crystallization reaction proceeds rapidly, making it difficult to control the epitaxial growth rate. Therefore, desired superconducting characteristics cannot be obtained.
  • the superconducting wire includes an intermediate layer formed on a substrate, an intermediate layer on the formed REBa y Cu 3 O z superconducting layer, and a stabilizing layer formed on the superconducting layer.
  • RE is composed of one or more elements selected from Y, Nd, Sm, Eu, Gd, and Ho.
  • the gas supply pipe 13 ejects atmospheric gas from the gas ejection hole 20 in the direction indicated by the arrow D in each figure.
  • the gas supply pipe 13 supplies the atmospheric gas vertically from a position spaced upward to the film surface of the precursor in the tape-shaped wire 50 wound around the surface 12a of the cylindrical body 12b.
  • the diameter of the gas ejection hole 20 needs to be designed so that the gas pressure and the gas flow rate are uniform.
  • the atmospheric gas is supplied from an atmospheric gas supply device (not shown) disposed outside the furnace core tube 11 via a connection pipe (not shown) connected to the gas supply pipe 13.
  • the gas supply device generates an atmospheric gas composed of an inert gas, oxygen gas, water vapor, or the like, and the atmospheric gas is ejected from the gas supply pipe 13.
  • the length of the gas supply pipe 13 is preferably longer than the length of the rotating body 12. That is, the length between the gas ejection holes 20 located at both ends of the gas supply pipe 13 is longer than the length of the rotating body 12. This makes it possible to cause a uniform reaction over the entire length of the tape-shaped wire 50 wound around the cylindrical rotating body 12.
  • the gas discharge pipe 14 is connected to the inner space of the cylindrical body 12b and connected to the other end side of the cylindrical body 12b. Specifically, the lid body 12 d is inserted from the inside of the cylindrical body 12 b and led out to the outside of the furnace core tube 11.
  • the gas exhaust pipe 14 exhausts the atmospheric gas inside the cylindrical body to the outside of the furnace core pipe.
  • the gas discharge pipe 14 is formed on the rotating shaft (corresponding to the furnace core axis C) of the cylindrical body 12b.
  • the gas supply pipe 13 and the gas discharge pipe 14 are made of a material that can withstand high temperatures and hardly oxidizes, such as ceramics such as quartz glass and alumina, or metals such as Hastelloy and Inconel.
  • the cylindrical rotating body 12 around which the tape-shaped wire 50 is wound is rotated at a constant speed.
  • the atmosphere gas supplied from a gas supply device enters the heat treatment space 11 a held in the heating atmosphere by the heater 15 through the numerous gas ejection holes 20 of the gas supply pipe 13 to the tape. It is sprayed evenly against the film surface of the wire rod 50.
  • the blown atmospheric gas reacts with the film surface and then enters the inside of the cylindrical body 12b through the numerous through holes 17 of the cylindrical body 12b in the rotating body 12.
  • the gas after reaction inside the cylindrical body 12b is discharged out of the furnace via the gas discharge pipe 14 connected on the other end side of the cylindrical body 12b.
  • the heat treatment apparatus 100 includes the furnace core tube 11 including the cylindrical heat treatment space 11a. Further, the heat treatment apparatus 100 is disposed so as to be rotatable with respect to the furnace core axis C inside the heat treatment space 11a, and a film body of a superconducting precursor is formed on the surface 12a on which a large number of through holes 17 are formed. A cylindrical rotating body 12 around which the tape-like wire 50 is wound is provided. Furthermore, the heat treatment apparatus 100 includes a gas supply pipe 13 for supplying an atmospheric gas to the tape-shaped wire 50 and a gas discharge pipe 14 for discharging the atmospheric gas from the inside of the rotating body 12 to the outside of the furnace core pipe 11. .
  • this heat treatment apparatus 100 atmospheric gas is supplied from a position spaced upward from the film surface of the film body of the tape-shaped wire 50 wound around the rotating body 12. At this time, the distance between the surface 12a of the rotating body 12 and the gas ejection hole 20 of the gas supply pipe 13 is 10 mm to 150 mm.
  • the gas supply pipes 13 are formed with a length of 2 m and an inner diameter of 20 mm ⁇ , and the gas injection holes 20 are formed in the gas supply pipes 13 at a pitch of 30 mm in the longitudinal direction of the gas supply pipes 13. (Nozzle diameter) was formed at 1.0 mm ⁇ .
  • the pressure in the furnace core tube 11, that is, the pressure in the heat treatment space 11a was set to 50 to 200 torr, and the gas flow rate was set to 250 to 1000 L / min (converted value at normal temperature and normal pressure).
  • the flow rate of the atmospheric gas ejected from the gas ejection holes 20 in the heat treatment apparatus 10 and supplied to the surface 12a of the rotator 12 (the flow rate in contact with the film surface of the film body wound around the rotator) is:
  • the separation distance S between the gas ejection hole 20 and the surface 12a of the rotating body 12 disposed in the heat treatment apparatus 10 was set to 80 m / s.
  • the film body of the tape-shaped wire 50 wound around the rotating body 12 is formed by forming a Gd 2 Zr 2 O 7 intermediate layer as a template on the tape-shaped Ni alloy substrate (base material) by the IBAD method, Further, a Y-TFA salt (trifluoroacetate salt), a Ba-TFA salt, and a Cu-naphthenate salt are added in an organic solvent on a composite substrate on which a CeO 2 intermediate layer is formed by sputtering.
  • a film body obtained by applying a mixed solution (superconducting raw material solution) dissolved at a ratio of Y: Ba: Cu 1: 1.5: 3 by a dip coating method and then pre-baking in a pre-baking step.
  • the film body was heat-treated by a main baking step at a furnace temperature of 750 ° C. to obtain a 1.5 ⁇ m superconducting layer.
  • Example 1 the thing which set the separation distance S to 80 mm is made into Example 1, and the example which changed only the separation distance S in the structure of the heat processing apparatus 10 of Example 1 from Example 2 to Example 7 is shown in the following table
  • the separation distance S 120 mm
  • the separation distance S 10 mm
  • the separation distance S 150 mm.
  • the characteristics of the superconducting wires made by the heat treatment apparatuses of Examples 1 to 7 were as follows.
  • the characteristics of the superconducting wire produced by the heat treatment apparatus 10 of Example 1 were Jc2.5 and Ic370A, and the characteristics of the superconducting wire produced by the heat treatment apparatus of Example 2 were Jc2.2 and Ic330A.
  • the characteristics of the superconducting wire made by the heat treatment apparatus of Example 3 were Jc2.1 and Ic315A, and the characteristics of the superconducting wire made by the heat treatment apparatus of Example 4 were Jc2.0 and Ic300A.
  • the characteristics of the superconducting wire made by the heat treatment apparatus of Example 5 were Jc2.0 and Ic300A, and the characteristics of the superconducting wire made by the heat treatment apparatus of Example 6 were Jc2.0 and Ic300A.
  • the characteristics of the superconducting wire completed by the heat treatment apparatus of Example 7 were Jc2.0 and Ic300A.
  • the superconducting wire completed by the heat treatment apparatus of Comparative Example 1 in which the separation distance S between the gas ejection hole 20 and the surface 12a of the rotating body 12 disposed in the heat treatment apparatus 10 is 200 mm.
  • the characteristics were Jc1.1 and Ic165A.
  • the superconducting wire produced by the heat treatment apparatus of Comparative Example 2 in which the separation distance S between the gas ejection hole 20 and the surface 12a of the rotating body 12 disposed in the heat treatment apparatus 10 is 5 mm.
  • the characteristics were Jc1.2 and Ic180A.
  • Example 1 to Example 7 when the separation distance S between the surface 12a of the rotating body 12 and the gas ejection hole 20 of the gas supply pipe 13 is 10 mm to 150 mm, “ ⁇ ” in the “Evaluation” column, As indicated by “ ⁇ ”, a superconducting wire excellent in superconducting properties was produced. In particular, when the separation distance S was 50 mm to 100 mm, a superconducting wire having particularly excellent superconducting characteristics was obtained as indicated by “ ⁇ ” in the “Evaluation” column.
  • the method for producing a tape-shaped oxide superconducting wire using the heat treatment apparatus of the example increases the fluorine reaction rate more than the method for producing a tape-shaped oxide superconducting wire using the heat treatment apparatus of the comparative example.
  • the superconducting properties of the tape-shaped oxide superconducting wire to be manufactured can be improved.
  • the rotating body wound with the tape-shaped base material is accommodated in the heat treatment space of the furnace core tube, and the heat treatment space is heated while being in a tape shape.
  • the wire is supplied from a position that is 10 mm to 150 mm apart from the film surface of the superconducting precursor.
  • the atmosphere in the furnace can be controlled more easily than in the case of firing in a reel-to-reel mode, so a stable superconducting layer can be formed, and the oxide can be formed in a short time.
  • Superconducting wire can be manufactured.
  • the manufacturing method and heat treatment apparatus for a tape-shaped oxide superconducting wire according to the present invention can be widely applied when forming a tape-shaped oxide superconducting wire using the MOD method.

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  • Engineering & Computer Science (AREA)
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PCT/JP2012/000651 2011-02-03 2012-02-01 テープ状酸化物超電導線材の製造方法及び熱処理装置 WO2012105243A1 (ja)

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JPH02208209A (ja) * 1989-02-08 1990-08-17 Furukawa Electric Co Ltd:The 酸化物超電導体前駆物質の製造方法
JPH0380926U (zh) * 1989-12-11 1991-08-19
JP2003121076A (ja) * 2001-10-12 2003-04-23 Internatl Superconductivity Technology Center 雰囲気制御型熱処理炉
JP2006269347A (ja) * 2005-03-25 2006-10-05 Internatl Superconductivity Technology Center テープ状酸化物超電導線の製造方法及びその製造装置
JP2007188755A (ja) * 2006-01-13 2007-07-26 Internatl Superconductivity Technology Center 酸化物超電導線材の熱処理装置。
JP2009048817A (ja) * 2007-08-16 2009-03-05 Internatl Superconductivity Technology Center 酸化物超電導線材の熱処理装置

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CN100372140C (zh) * 2005-03-29 2008-02-27 清华大学 一种大面积均匀薄膜或长超导导线的制备方法及其装置
CN100575540C (zh) * 2006-08-28 2009-12-30 北京有色金属研究总院 批量化制备双面高温超导薄膜装置
CN101471161B (zh) * 2007-12-28 2010-12-08 北京有色金属研究总院 一种三氟酸盐-金属有机沉积制备高温超导薄膜的方法

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Publication number Priority date Publication date Assignee Title
JPH02208209A (ja) * 1989-02-08 1990-08-17 Furukawa Electric Co Ltd:The 酸化物超電導体前駆物質の製造方法
JPH0380926U (zh) * 1989-12-11 1991-08-19
JP2003121076A (ja) * 2001-10-12 2003-04-23 Internatl Superconductivity Technology Center 雰囲気制御型熱処理炉
JP2006269347A (ja) * 2005-03-25 2006-10-05 Internatl Superconductivity Technology Center テープ状酸化物超電導線の製造方法及びその製造装置
JP2007188755A (ja) * 2006-01-13 2007-07-26 Internatl Superconductivity Technology Center 酸化物超電導線材の熱処理装置。
JP2009048817A (ja) * 2007-08-16 2009-03-05 Internatl Superconductivity Technology Center 酸化物超電導線材の熱処理装置

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CN103460306A (zh) 2013-12-18
TWI517184B (zh) 2016-01-11

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