WO2012096033A1 - 非接触搬送装置 - Google Patents
非接触搬送装置 Download PDFInfo
- Publication number
- WO2012096033A1 WO2012096033A1 PCT/JP2011/071591 JP2011071591W WO2012096033A1 WO 2012096033 A1 WO2012096033 A1 WO 2012096033A1 JP 2011071591 W JP2011071591 W JP 2011071591W WO 2012096033 A1 WO2012096033 A1 WO 2012096033A1
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- WIPO (PCT)
- Prior art keywords
- hole
- opens
- plate
- air
- upward flow
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Definitions
- the present invention relates to a non-contact conveyance device, and in particular, a non-contact conveyance device used for production of FPD (flat panel display) such as a large liquid crystal display (LCD) or plasma display (PDP), a solar cell panel (solar panel), and the like.
- FPD flat panel display
- LCD liquid crystal display
- PDP plasma display
- solar cell panel solar panel
- the size is 2850 ⁇ 3050 ⁇ 0.7 mm in the tenth generation. Therefore, when liquid crystal glass is placed on a plurality of rollers and rolled and conveyed as in the past, a strong force is locally applied to the liquid crystal glass due to deflection of the shaft supporting the rollers and variations in the roller height. There is a risk of damaging the liquid crystal glass.
- the above-described rolling conveyance device using rollers cannot be employed in, for example, an FPD process process in which the device and the panel are required to be in non-contact.
- an air levitation conveyance device has begun to be employed. Yes.
- a non-contact transfer device a porous material (porous sintered metal, etc.) is used for a part of the plate-shaped transfer rail, and air is supplied in communication with the air supply path. There is a device to let you.
- the FPD floats while moving in the vertical direction, so that it can be used in the transfer process.
- it has a highly accurate flying height of 30 to 50 ⁇ m. It cannot be used for the required process steps.
- Patent Document 1 as a non-contact conveyance device that has a small fluid flow rate and energy consumption and can maintain the flying height with high accuracy, the fluid is ejected from the fluid ejection port to the surface side of the ring-shaped member.
- Two swirl flow forming bodies that generate a swirling flow in a direction away from the front surface side and a fluid flow in the back surface direction in the vicinity of the opening on the front surface side of the ring-shaped member are provided on the transport surface of the transport rail.
- a non-contact conveyance device provided as described above has been proposed.
- the non-contact conveyance device described in Patent Document 1 causes a swirl flow toward the surface away from the surface side of the ring-shaped member to float a conveyed product (panel or the like). While negative pressure is generated at the center of the flow, and it has the effect of preventing overlifting of the conveyed product, the end of the conveyed product has the disadvantage that the amplitude is increased, and negative pressure and evacuation due to swirling flow in the process step. It was found that when the negative pressure overlaps, the floating function due to the swirling flow is lost and the conveyor rail is contacted locally.
- the vacuum pressure is changed by connecting the vacuum suction holes through one continuous suction path and opening and closing one vacuum suction port connected to the suction path, thereby increasing the floating amount of the conveyed object.
- the problem of increased fluctuations was also found.
- the present invention has been made in view of the above-described points, and the object of the present invention is to prevent the generation of negative pressure, to reduce the amplitude of the end of the conveyed object and to increase the flying height. Another object of the present invention is to provide a non-contact conveying apparatus that can minimize the variation in the flying height of the conveyed object even by opening and closing the vacuum suction port.
- the present invention is a non-contact conveyance device, and has a cylindrical wall surface portion having a circular opening in a plan view opened on an upper surface, and the diameter is increased through the cylindrical wall surface portion and an annular shoulder portion.
- a housing hole having an enlarged cylindrical wall surface opening on the lower surface and a plurality of suction holes which are formed adjacent to the housing hole and open on the upper and lower surfaces along the longitudinal direction and the width direction are provided alternately.
- One air supply port coupled to the air passage, an air suction path that opens to the upper surface and communicates with the through hole of the intermediate plate, and the air
- a conveyance rail composed of a lower plate provided with a vacuum suction port coupled to a suction path, and an ascending flow forming body mounted in a receiving hole portion of the upper plate of the conveyance rail, formed on the lower plate
- the air suction path is divided into at least two or more blocks along the longitudinal direction, and one vacuum suction port is coupled to the air suction path of each block.
- the air suction path for vacuuming is divided into at least two or more blocks along the longitudinal direction (conveyance direction of the object to be transported), and each block has an air suction path. Since each vacuum suction port is connected, the opening and closing operation of the vacuum suction port does not fully open or close the air suction path, and the vacuum suction port is opened or closed for each block along the transport direction. Therefore, the fluctuation of the flying height of the conveyed object can be minimized.
- the non-contact conveying apparatus of the present invention that exhibits the above-described effects is a cylindrical wall surface portion having a circular opening in a plan view that opens on the upper surface, and expands through the cylindrical wall surface portion and the annular shoulder portion, and opens on the lower surface.
- a housing hole portion having an enlarged cylindrical wall surface portion, and an upper plate provided with a plurality of suction holes which are formed adjacent to the housing hole portion and open on the upper and lower surfaces along the longitudinal direction and the width direction.
- a continuous air supply path that opens to the upper surface and communicates with the accommodation hole portion of the upper plate, and one communication hole that has one end opening to the air supply path and the other end opening to the lower surface;
- An intermediate plate having a communication hole that opens to an air suction path that has one end opened to the suction hole of the upper plate and the other end opened to the lower surface, and an air supply that opens to the communication hole of the middle plate
- Conveying rail comprising a mouth and a lower plate having a vacuum suction port coupled to the air suction path of the intermediate plate
- the air suction path formed in the middle plate is divided into at least two or more blocks along the longitudinal direction. A configuration in which one vacuum suction port is coupled to each of the air suction paths may be employed.
- the conveyance rail has a three-layer structure of an upper plate, an intermediate plate, and a lower plate, and an air supply path is provided on the upper surface of the intermediate plate and an air suction path is provided on the upper surface of the lower plate.
- the air supply path and the air suction path can be easily manufactured, and the manufacturing cost can be further reduced.
- the to-be-contacted conveying apparatus which consists of the said structure is used especially for the process process which requires the highly accurate flatness of a conveyance process, and is suitable.
- the ascending flow forming body mounted in the accommodation hole portion of the upper plate of the non-contact conveying device has a bottomed cylindrical base portion having a cylindrical inner wall surface on the inner surface, and a diameter at the periphery of the opening portion of the cylindrical base portion.
- An annular flange projecting outward in the direction, a plurality of engagement hanging parts extending in the circumferential direction of the outer peripheral edge of the annular collar part and facing each other in the radial direction, and the engagement hanging parts
- An engaging projection projecting outwardly at the lower end of the cylindrical base, and at least one fluid ejection hole opening from the outer peripheral surface of the cylindrical base to the inner wall of the cylinder and having a distal end directed toward the center of the cylindrical base.
- the outer peripheral surface of the annular flange is press-fitted into the cylindrical wall surface of the accommodation hole, and the engagement protrusion of the engagement hanging portion is annular It is worn by engaging with the shoulder.
- the fluid ejection hole opens from the outer peripheral surface of the cylindrical base portion to the cylindrical inner wall surface, even if the tip portion is a single fluid jet hole that faces the center of the cylindrical base portion.
- Two fluid ejection holes whose tip portions face each other toward the center of the cylindrical base portion may be used.
- the air ejected from the fluid ejection hole collides with the cylindrical inner wall surface of the cylindrical substrate, and is dispersed upward in a spray form to form an upward flow.
- the air ejected from the fluid ejection holes collides with each other and is dispersed upward in a spray form to form an upward flow.
- the jet air generated by the above-described upward flow forming body is dispersed in a spray form to form an upward flow, so that no stress is applied to the transported object (panel, etc.), and the amplitude of the transported object can be reduced. Since no negative pressure is generated, the flying height of the conveyed object can be increased.
- the upward flow forming body is preferably formed by injection molding a thermoplastic synthetic resin, and examples of the thermoplastic synthetic resin include polyphenylene sulfide resin (PPS).
- PPS polyphenylene sulfide resin
- FIGS. 2A and 2B are diagrams showing a non-contact transfer apparatus for the process step of FIG. 1, in which FIG. 1A is a plan view, and FIG. It is a figure which shows the upper board of FIG.2 (b), Comprising: (a) is sectional drawing which shows the state which does not mount
- FIG. 8 is a view showing a middle plate of FIG.
- FIG. 2B is a cross-sectional view taken along line BB of FIG. It is a figure which shows the lower board of FIG.2 (b), Comprising: It is the CC sectional view taken on the line of FIG. It is a figure which shows the lower board of FIG.2 (b), Comprising: It is the DD sectional view taken on the line of FIG. FIG. 3 is a top view of the middle plate in FIG. It is a top view of the lower board of FIG.2 (b). It is a figure which shows the upward flow formation body used for the non-contact conveying apparatus of this invention, Comprising: (a) is a front view, (b) is a top view, (c) is a bottom view, (d) is (c).
- FIG. 14B is a diagram showing the upper plate of FIG. 14B, in which FIG. 14A is a cross-sectional view of the upper plate without the upflow forming body, and FIG. It is sectional drawing of a board.
- FIG. 14B is a cross-sectional view of the middle plate in FIG. 14B, where FIG.
- FIG. 14A is a cross-sectional view taken along the line HH in FIG. 17, and FIG. FIG. 15 is a top view of the middle plate in FIG.
- FIG. 15 is a bottom view of the middle plate in FIG. It is sectional drawing which shows the float conveyance of the glass in the non-contact conveyance apparatus of the other form for the process steps of FIG.
- the non-contact conveyance device 1 is used to convey the glass G in a non-contact manner, and includes two non-contact conveyance devices 2 a and 3 a for the two conveyance steps 2 and 3, and these conveyance steps 2 and 3. And a non-contact transfer device 4a for the process step 4 sandwiched between the three.
- the non-contact conveyance devices 2a and 3a for the conveyance steps 2 and 3 are configured by arranging the upward flow forming bodies 6 described later on the conveyance rail 5 in two rows on the paper surface of FIG. In the transport steps 2 and 3 in FIG. 1, three non-contact transport devices 2a and 3a are arranged in parallel, respectively.
- the non-contact conveyance device 4a for the process step 4 of the non-contact conveyance device 1 includes an upward flow forming body 6 that generates an upward flow of air, and a vacuum that sucks air.
- a plurality of suction holes 7 having a diameter of about 1 to 2 mm for suction are formed by being alternately arranged along the longitudinal direction and the width direction of the transport rail 8.
- the transport rail 8 has a three-layer structure including an upper plate 9, an intermediate plate 10, and a lower plate 11, as shown in FIG.
- the upper plate 9 is formed in a cylindrical inner wall surface portion 9c having a circular opening portion 9b that is opened in the upper surface 9a serving as a conveying surface and opened in the upper surface 9a.
- a housing hole 9g having a diameter-enlarged cylindrical inner wall surface portion 9f that expands through the surface portion 9c and the annular shoulder portion 9d and opens to the lower surface 9e of the upper plate 9, and an upper plate 9 adjacent to the housing hole 9g.
- a plurality of suction holes 7 penetrating from the upper surface 9 a to the lower surface 9 e are alternately provided along the longitudinal direction X and the width direction Y of the upper plate 9.
- the upward flow forming body 6 made of a thermoplastic synthetic resin such as polyphenylene sulfide resin (PPS) is attached to the accommodation hole 9 g of the upper plate 9.
- PPS polyphenylene sulfide resin
- the upward flow forming body 6 has a circular opening 6a in a plan view that opens on the upper surface, and a cylindrical inner wall surface 6b that communicates with the opening 6a.
- a plurality (four in the present embodiment) of engaging droops 6f extending in the circumferential direction and facing downward in the radial direction, and projecting outward at the lower ends of the engaging droops 6f.
- At least one of the engaging protrusion 6g and the cylindrical base 6c opens from the outer peripheral surface 6h of the cylindrical base 6c to the cylindrical inner wall 6b, and the tip 6i faces the center O of the cylindrical base 6c (in this embodiment).
- 1) fluid ejection holes 6j 1) fluid ejection holes 6j.
- the upward flow forming body 6 is press-fitted into the cylindrical inner wall surface portion 9c of the housing hole portion 9g of the upper plate 9 by press fitting the outer peripheral surface 6e of the annular flange 6d.
- the engaging projection 6g of the portion 6f is engaged with the annular shoulder 9d of the accommodating hole 9g, and the upper surface 6k of the annular flange 6d is flush with the upper surface 9a of the upper plate 9, and the accommodating hole It is attached to 9g.
- the upward flow forming body 6 causes the air ejected from the fluid ejection hole 6j to collide with the cylindrical inner wall surface 6b of the cylindrical base portion 6c, and the air is injected into the cylinder.
- An upward flow (indicated by arrows in FIGS. 10A and 10B) is generated above the opening 6a of the wall surface 6b in a sprayed manner, and the glass G is conveyed in a non-contact manner by the upward flow.
- the middle plate 10 has one continuous cross-sectional semicircular shape communicating with a plurality of receiving holes 9 g formed on the upper plate 9 on the upper surface 10 a of the middle plate 10.
- An air supply groove 10b as an air supply path, one communication hole 10d having one end opened to the air supply groove 10b and the other end opened to the lower surface 10c of the intermediate plate 10, Is provided with a plurality of through-holes 10 e that open to the suction holes 7 formed in the upper plate 9 and the other end portions that open to the lower surface 10 c of the middle plate 10.
- the lower plate 11 has a plurality of through holes 10e, 10e formed on the upper surface 11a of the lower plate 11 on the lower surface 10c.
- the opening on the side is divided into four blocks 11b1, 11b2, 11b3 and 11b4 along the longitudinal direction (see FIGS. 7 and 8), and the through hole 10e1 located in each of the divided blocks 11b1, 11b2, 11b3 and 11b4 Air suction grooves 11c1, 11c2, 11c3 and 11c4 as continuous four-section semicircular air suction paths communicating with the openings of 10e2, 10e3 and 10e4, and blocks 11b1, 11b2, 11b3 and 11b4, respectively.
- Vacuum suction ports 11d1, 11d2, 11d3 coupled to the air suction grooves 11c1, 11c2, 11c3 and 11c4, respectively And 1d4, and a combined air supply port 11e to one communication hole 10d formed in the intermediate plate 10.
- one continuous cross-sectional semicircular air supply groove 10 b that opens a plurality of receiving holes 9 g formed in the upper plate 9 in the upper surface 10 a of the middle plate 10.
- the upper plate 9 is positioned on the upper surface 10a of the intermediate plate 10 by connecting the plurality of suction holes 7 to the plurality of through holes 10e opened on the upper surface 10a of the intermediate plate 10.
- the air supply port 11e provided in the lower plate 11 is coupled to the communication hole 10d opened in the lower surface 10c, and the through holes 10e1, 10e2 in the blocks 11b1, 11b2, 11b3 and 11b4 opened in the lower surface 10c of the intermediate plate 10 are connected.
- conveying rails 8 is formed by positioning the intermediate plate 10 on the upper surface 11a of the lower plate 11.
- the transport rail 8 is formed by fastening and fixing the upper plate 9, the middle plate 10 and the lower plate 11 by fixing means such as bolts.
- FIG. 11 showing the non-contact transfer device 4a for the process step 4 having the above-described configuration
- the compressed air supplied to the air supply port 11e of the transfer rail 8 passes through a communication hole 10d communicating with the air supply port 11e.
- the air is supplied to one continuous air supply groove 10b formed on the upper surface 10a of the intermediate plate 10 of the transport rail 8.
- the compressed air supplied to the air supply concave groove 10b is supplied to a plurality of accommodation holes 9g formed in the upper plate 9 of the transport rail 8, and the upward flow forming body 6 attached to the accommodation holes 9g.
- Ascending flow that is respectively ejected from the fluid ejection holes 6j, collides with the cylindrical inner wall surface 6b of the cylindrical base 6c (see FIG.
- the glass G is floated by the upward flow, at the suction hole 7 opened in the upper surface 9a of the upper plate 9 of the transport rail 8, the supply of the blocks 11b1, 11b2, 11b3 and 11b4 is performed as shown in FIG. Suction is performed from the vacuum suction ports 11d1, 11d2, 11d3, and 11d4 coupled to the air suction grooves 11c1, 11c2, 11c3, and 11c4, and a balun between the lifting force due to the upward flow and the suction force in the suction holes Accordingly, the glass G is conveyed in a non-contact manner to form a highly precise flatness.
- the air suction groove 11c as the air suction path is divided along the longitudinal direction X into four blocks 11b1, 11b2, 11b3, and 11b4. Since one vacuum suction port 11d1, 11d2, 11d3, and 11d4 is coupled to the air suction concave grooves 11c1, 11c2, 11c3, and 11c4 of 11b1, 11b2, 11b3, and 11b4, respectively, the vacuum suction ports 11d1, 11d2, 11d3, and 11d4 Is performed for each of the air suction grooves 11c1, 11c2, 11c3, and 11c4, so that the vacuum suction force is not reduced, and the vacuum suction ports 11d1, 11d2, 11d3, and 11d4 of each block are moved along the transport direction. Since the opening / closing operation is performed, the flying height of the glass G is changed. The can be as small as possible.
- the air ejected from the fluid ejection hole 6j is cylindrical.
- the air ejection speed is reduced and an upward flow dispersed in the form of spray is generated, so that it is possible to suppress stress on the glass G as much as possible.
- the upflow forming body 60 has a circular opening 60a in plan view that opens on the upper surface, and A cylindrical base 60c with a bottom having a cylindrical inner wall surface 60b communicating with the opening 60a, an annular flange 60d projecting radially outward from the opening 60a of the cylindrical base 60c, and the annular A plurality (four in the present embodiment) of engagement hanging portions 60f extending downward along the circumferential direction of the outer circumferential surface 60e and opposite to each other in the radial direction on the outer circumferential surface 60e of the flange portion 60d; An engagement protrusion 60g projecting outward from the lower end of the engagement hanging portion 60f, an opening from the outer peripheral surface 60h of the cylindrical base portion 60c to the cylindrical inner wall surface 60b, and a tip end portion 60i at the cylindrical base portion Two fluid ejection holes facing each other toward the center O of 60c It has a 0j and 60j.
- the upward flow forming body 60 is similar to the mounting of the upward flow forming body 6 shown in FIG. 2 (b) or FIG. Is press-fitted into the cylindrical inner wall surface portion 9c of the accommodation hole portion 9g, and the engagement protrusion 60g of the engagement hanging portion 60f is engaged with the annular shoulder portion 9d of the accommodation hole portion 9g, and the annular flange portion 60d.
- the upper surface 60k of the upper plate 9 is flush with the upper surface 9a of the upper plate 9, and is mounted in the receiving hole 9g.
- the upward flow forming body 60 is configured to cause the air ejected from the fluid ejection holes 60j and 60j from the outer peripheral surface 60h of the cylindrical base portion 60c to the cylindrical inner wall surface 60b.
- the front end portions 60i and 60i are ejected from the fluid ejection holes 60j and 60j facing each other toward the center O of the cylindrical base body portion 60c to collide with each other, and the air collides with the air.
- An upward flow dispersed in a spray form is generated above the opening 60a, and the glass G is conveyed in a non-contact manner by the upward flow.
- the upward flow formation body 60 does not generate a negative pressure, so that the floating amount of the glass G during conveyance can be increased, and the upward flow formation body 60 is ejected from the fluid ejection holes 60j and 60j. Since the air collides with each other, the air ejection speed is reduced and an upward flow that is dispersed in a spray form is generated, so that it is possible to suppress stress on the glass G as much as possible.
- FIGS. 14A and 14B show another embodiment of the transport rail 8 in the non-contact transport device 4a for the process step 4 of the non-contact transport device 1 shown in FIG.
- the transport rail 8 has a three-layer structure including an upper plate 90, an intermediate plate 100 and a lower plate 110.
- the upper plate 90 of the transport rail 80 is formed in the upper surface 90a as the transport surface, and is open to the upper surface 90a, like the upper plate 9 of the transport rail 8.
- a cylindrical inner wall surface portion 90c having an opening 90b having a circular shape in plan view, and an expanded cylindrical inner wall surface portion 90f that expands through the cylindrical inner wall surface portion 90c and the annular shoulder portion 90d and opens to the lower surface 90e of the upper plate 90.
- the housing hole 90g and the suction hole 70 formed so as to penetrate from the upper surface 90a of the upper plate 90 to the lower surface 90e adjacent to the housing hole 90g are formed. Are provided alternately along the longitudinal direction X and the width direction Y.
- the upward flow forming body 6 press-fits the outer peripheral surface 6e of the annular flange 6d into the cylindrical inner wall surface 90c of the housing hole 90g, and the engagement hanging portion 6f
- the engaging projection 6g is engaged with the annular shoulder 90d of the accommodation hole 90g, and the upper surface 6k of the annular flange 6d is flush with the upper surface 90a of the upper plate 90 and is mounted in the accommodation hole 90g. Is done.
- the intermediate plate 100 includes an air supply groove 100b serving as an air supply path having a semicircular cross section that is formed on the upper surface 100a of the intermediate plate 100 and opens upward.
- An air suction groove 100d as a semicircular cross-sectional air suction path formed in the lower surface 100c of the intermediate plate 100 is provided.
- the air supply concave grooves 100 b are formed in a rhombic lattice shape in plan view in accordance with the arrangement of the upward flow forming bodies 6 (FIG. 14A).
- a communication hole 100e that opens to the lower surface 100c of the intermediate plate 100 is provided at the bottom of the air supply groove 100b, and the communication hole 100e is formed as shown in FIG. In addition, only one is provided throughout the entire middle plate 100.
- the air supply groove 100 b communicates with each of the accommodation hole portions 90 g of the upper plate 90 when the upper plate 90, the middle plate 100 and the lower plate 110 are laminated. .
- the air suction grooves 100d1, 100d2 have the same diameter as the suction holes 70 formed in the upper plate 90, as shown in FIGS. 14 (b), 16 (a), (b), 17 and 18.
- An opening at the other end of the plurality of communication holes 100f formed with one end opening on the upper surface 100a of the intermediate plate 100 is formed into two blocks 100g and 100h along the longitudinal direction of the intermediate plate 100.
- the plurality of communication holes 100f1,... 100f1,... 100f2 that are divided and formed in the divided blocks 100g, 100h are formed to communicate with each other.
- the lower plate 110 opens to the upper surface 110 a of the lower plate 110 and opens to the communication hole 100 e communicating with the air supply groove 100 b of the middle plate 100, and the lower plate 110.
- One air supply port 110c that opens to the lower surface 110b of the lower plate 110, and an air suction groove of each block 100g, 100h that opens to the upper surface 110a of the lower plate 110 and that opens to the lower surface 100c of the middle plate 100.
- vacuum suction ports 110d1 (not shown) and 110d2 that open to the lower surface 110b of the lower plate 110 are provided.
- the upper plate 90 has a plurality of receiving hole portions 90g formed along the longitudinal direction X and the width direction Y of the upper plate 90.
- One continuous air supply groove 100b that is open is communicated, and the suction hole 70 is communicated with a plurality of communication holes 100f that are open on the upper surface 100a of the intermediate plate 100, so that the upper plate 90 is connected to the upper surface 100a of the intermediate plate 100.
- the air supply opening 110c formed in the lower plate 110 is coupled to the one communication hole 100e that opens and opens to the lower surface 100c of the middle plate 100.
- Transfer rail 80 is formed by positioning the upper surface 110a of the lower plate 110 of the intermediate plate 100 by coupling a vacuum suction port 110d formed in the lower plate 110 to the communication hole 100F1,100f2.
- the transport rail 80 is formed by fastening and fixing the upper plate 90, the middle plate 100, and the lower plate 110 by fixing means such as bolts.
- FIG. 19 which shows the non-contact conveyance apparatus 4a for process process 4 which consists of the said structure
- the compressed air supplied to the air supply port 110c provided in the lower board 110 of the conveyance rail 80 is made into the air supply port 110c.
- the air is supplied to an air supply groove 100b having a semicircular cross section as one continuous air supply path formed on the upper surface 100a of the intermediate plate 100 of the transport rail 80 through the communication hole 100e.
- the compressed air supplied to the air supply concave groove 100b is supplied to a plurality of accommodation holes 90g formed in the upper plate 90 of the conveyance rail 80, and the upward flow forming body 6 attached to the accommodation holes 90g.
- FIG. 19 which shows the non-contact conveyance apparatus 4a for process process 4 which consists of the said structure
- the air ejected from the fluid ejection hole 6j collides with the cylindrical inner wall surface 6b of the cylindrical base portion 6c and is above the opening 6a of the cylindrical inner wall surface 6b.
- an upward flow dispersed in a spray form is generated in the suction hole 70 opened on the upper surface 90 a of the upper plate 90 of the transport rail 80 at the same time as the glass G is floated by the upward flow.
- the vacuum suction ports 110d1 (not shown) and 110d2 coupled to the air suction grooves 100d1 and 100d2 of the blocks 100g and 100h formed on the lower surface 100c of the middle plate 100 of 80 are suctioned.
- the air suction groove 100d is divided into two blocks 100g and 100h along the longitudinal direction X, and 1 is placed in each of the air suction grooves 100d1 and 100d2 of the blocks 100g and 100h. Since the two vacuum suction ports 110d1 and 110d2 are coupled, the opening and closing operation of the vacuum suction ports 110d1 and 110d2 is performed for each of the air suction grooves 100d1 and 100d2, so that the vacuum suction force is not reduced and the transport direction is reduced. Accordingly, the vacuum suction ports 110d1 and 110d2 are opened and closed for each block, so that the variation in the flying height of the glass G can be minimized.
- the upward flow forming body 6 in the non-contact conveying device 4a since no negative pressure is generated, the floating amount during the conveyance of the glass G can be increased, and the air ejected from the fluid ejection hole 6j is cylindrical. By colliding with the cylindrical inner wall surface 6b of the cylindrical substrate portion 6c, the air ejection speed is reduced and an upward flow dispersed in the form of spray is generated, so that it is possible to suppress stress on the glass G as much as possible.
- the upward flow formation body 60 is used as the upward flow formation body 6, the same effect can be obtained.
- the glass G conveyed to the process step 4 described above floats by the upward flow generated by the upward flow forming bodies 6 or 60 and is dispersed in a spray form, and is positioned between the upward flow forming bodies 6 or 60.
- the flying height is controlled with high accuracy to 30 to 50 ⁇ m.
- various inspections and processing on the glass G are performed.
- the glass G that has been inspected and processed is transported to the transporting process 3 and then transported to the next process in the state of floating.
- the non-contact conveyance device of the present invention includes a plurality of upward flow forming bodies and suction holes provided alternately on the conveyance surface of the conveyance rail along the longitudinal direction and the width direction of the conveyance rail, An air supply groove as one continuous air supply path that communicates with each of the upward flow forming bodies, an air supply port coupled to the air supply groove, and the other end of the suction hole that opens to the conveying surface
- An air supply groove as one continuous air supply path that divides the opening into at least two blocks along the longitudinal direction of the transport rail and communicates with the openings of the suction holes located in each of the divided blocks;
- a vacuum suction port coupled to the air suction groove is provided, and the compressed air supplied from the air supply port is supplied to the upward flow forming body through the air supply groove, and the upward flow formation in the upward flow formation body Sprayed above the body opening
- the upward flow is generated, and the conveyed object is floated by the upward flow, and suction from the vacuum suction port is performed in the suction hole through the air su
- the air suction groove is divided into at least two blocks along the longitudinal direction, and one vacuum suction port is coupled to each of the air suction grooves of each block. Therefore, since the opening / closing operation of the vacuum suction port is performed for each air suction groove, the vacuum suction force is not reduced, and the variation in the floating amount of the conveyed object can be minimized.
- the floating amount during conveyance of the object to be conveyed can be increased, and the air ejected from the fluid ejection hole is a jet of air. Since the speed is reduced and the upward flow is dispersed in a spray state, it is possible to suppress stress on the conveyed object as much as possible.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
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Abstract
Description
2、3 搬送工程
4 プロセス工程
4a プロセス工程用の非接触搬送装置
6、60 上昇流形成体
7、70 吸引孔
8、80 搬送レール
9、90 上板
10、100 中板
11、110 下板
10b、100b 空気供給凹溝
10e 貫通孔
11c1、11c2、11c3、11c4 空気吸引凹溝
Claims (6)
- 上面に開口する平面視円形の開口部を有する円筒壁面部と該円筒壁面部と環状肩部を介して拡径すると共に下面に開口する拡径円筒壁面部を有する収容孔部と、該収容孔部に隣接して穿設され、上、下面に開口する吸引孔を長手方向及び幅方向に沿って交互に複数個備えた上板と、
上面に開口し、前記上板の各収容孔部に連通する連続した空気供給経路と、一方の端部が該空気供給経路に開口し、他方の端部が下面に開口する連通孔と、該連通孔に隣接し、一方の端部が前記上板の吸引孔に連通し、他方の端部が下面に開口する貫通孔を備えた中板と、
該中板の連通孔に結合された1つの空気供給口と、
上面に開口すると共に前記中板の貫通孔に連通する空気吸引経路と該空気吸引経路に結合された真空吸引口を備えた下板とからなる搬送レールと、
該搬送レールの上板の収容孔部に装着された上昇流形成体とからなり、
前記下板に形成された空気吸引経路は、長手方向に沿って少なくとも2つ以上のブロックに分割され、各ブロックの空気吸引経路にはそれぞれ1つの真空吸引口が結合されることを特徴とする非接触搬送装置。 - 上面に開口する平面視円形の開口部を有する円筒壁面部と該円筒壁面部と環状肩部を介して拡径すると共に下面に開口する拡径円筒壁面部を有する収容孔部と、該収容孔部に隣接して穿設され、上、下面に開口する吸引孔を長手方向及び幅方向に沿って交互に複数個備えた上板と、
上面に開口し前記上板の収容孔部に連通する連続した空気供給経路と、一方の端部が該空気供給経路に開口し、他方の端部が下面に開口する1つの連通孔と、一方の端部が前記上板の吸引孔に開口し、他方の端部が下面に開口する空気吸引経路に開口する連通孔を備えた中板と、
該中板の連通孔に開口する空気供給口と、前記中板の空気吸引経路に結合された真空吸引口を備えた下板とからなる搬送レールと、
前記上板の収容孔部に装着された上昇流形成体とからなり、
前記中板に形成された空気吸引経路は、長手方向に沿って少なくとも2つ以上のブロックに分割され、各ブロックの空気吸引経路にはそれぞれ1つの真空吸引口が結合されていることを特徴とする非接触搬送装置。 - 前記上昇流形成体は、
内面に円筒内壁面を有する有底の円筒状基体部と、
該円筒状基体部の開口部の周縁に径方向外方に張り出す環状鍔部と、
該環状鍔部の外周縁の円周方向に沿い、かつ径方向に相対向して下方に延びる複数個の係合垂下部と、
該係合垂下部の下端に外方に突出する係合突起部と、
前記円筒状基体部の外周面から円筒内壁面に開口すると共に、先端部が該円筒状基体部の中心に向かう少なくとも1つの流体噴出孔とを備え、
前記搬送レールの上板の収容孔部に、前記環状鍔部の外周面を該収容孔部の円筒壁面部に圧入嵌合させ、前記係合垂下部の係合突起部を前記環状肩部に係合させて装着されることを特徴とする請求項1又は2に記載の非接触搬送装置。 - 前記流体噴出孔を1つ備え、該流体噴出孔から噴出した流体は、該円筒状基体の円筒内周壁に衝突し、噴霧状に上方に分散して上昇流を形成することを特徴とする請求項3に記載の上昇流形成体。
- 前記流体噴出孔は、円筒状基体部の外周面から円筒内壁面に開口すると共に、先端部が該円筒状基体部の中心に向かって相対向するように2つ設けられ、該2つの流体噴出孔から噴出した流体は、該流体同士が衝突し、噴霧状に上方に分散して上昇流を形成することを特徴とする請求項3に記載の上昇流形成体。
- 前記上昇流形成体は、熱可塑性合成樹脂から形成されることを特徴とする請求項1乃至5のいずれかに記載の非接触搬送装置。
Priority Applications (5)
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JP2012552627A JP5819859B2 (ja) | 2011-01-14 | 2011-09-22 | 非接触搬送装置 |
CN201180065170.2A CN103298717B (zh) | 2011-01-14 | 2011-09-22 | 非接触运送装置 |
KR1020137018034A KR20140031180A (ko) | 2011-01-14 | 2011-09-22 | 비접촉 반송장치 |
IL227199A IL227199A (en) | 2011-01-14 | 2013-06-26 | Contactless transfer device |
HK13112429.1A HK1185051A1 (en) | 2011-01-14 | 2013-11-05 | Non-contact transfer apparatus |
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JP (1) | JP5819859B2 (ja) |
KR (1) | KR20140031180A (ja) |
CN (1) | CN103298717B (ja) |
HK (1) | HK1185051A1 (ja) |
IL (1) | IL227199A (ja) |
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WO (1) | WO2012096033A1 (ja) |
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WO2014181715A1 (ja) * | 2013-05-09 | 2014-11-13 | オイレス工業株式会社 | 支持用エアプレートおよびその気体流抵抗器 |
WO2015019864A1 (ja) * | 2013-08-09 | 2015-02-12 | オイレス工業株式会社 | 支持用エアプレートおよびその気体流抵抗器 |
WO2015025784A1 (ja) * | 2013-08-22 | 2015-02-26 | オイレス工業株式会社 | 浮上搬送装置 |
JP2019524590A (ja) * | 2016-06-21 | 2019-09-05 | コア フロー リミテッド | 端縁押し上げを伴う非接触支持プラットフォーム |
JP2021136286A (ja) * | 2020-02-26 | 2021-09-13 | 株式会社日本製鋼所 | 浮上搬送装置、及びレーザ処理装置 |
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JP5998086B2 (ja) * | 2012-04-03 | 2016-09-28 | オイレス工業株式会社 | 浮上用エアプレート |
CN104555348A (zh) * | 2014-11-28 | 2015-04-29 | 祥鑫科技股份有限公司 | 气吹浮起式输料带 |
TWI582896B (zh) * | 2015-08-18 | 2017-05-11 | 由田新技股份有限公司 | 氣浮載台 |
TWI615914B (zh) * | 2016-01-18 | 2018-02-21 | 晶體管搬運檢測之結構 | |
TWI577626B (zh) * | 2016-06-04 | 2017-04-11 | 由田新技股份有限公司 | 氣浮載台 |
JP7402081B2 (ja) * | 2020-02-27 | 2023-12-20 | 本田技研工業株式会社 | レーザ加工装置 |
CN114471347B (zh) * | 2022-01-29 | 2023-07-18 | 浙江汉信科技有限公司 | 混合设备及其落料装置 |
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- 2011-09-22 WO PCT/JP2011/071591 patent/WO2012096033A1/ja active Application Filing
- 2011-09-22 CN CN201180065170.2A patent/CN103298717B/zh not_active Expired - Fee Related
- 2011-10-21 TW TW100138326A patent/TWI541179B/zh not_active IP Right Cessation
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TW201231370A (en) | 2012-08-01 |
JPWO2012096033A1 (ja) | 2014-06-09 |
TWI541179B (zh) | 2016-07-11 |
KR20140031180A (ko) | 2014-03-12 |
CN103298717A (zh) | 2013-09-11 |
HK1185051A1 (en) | 2014-02-07 |
IL227199A (en) | 2016-10-31 |
CN103298717B (zh) | 2015-07-22 |
JP5819859B2 (ja) | 2015-11-24 |
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