IL227199A - Non-contact transfer apparatus - Google Patents
Non-contact transfer apparatusInfo
- Publication number
- IL227199A IL227199A IL227199A IL22719913A IL227199A IL 227199 A IL227199 A IL 227199A IL 227199 A IL227199 A IL 227199A IL 22719913 A IL22719913 A IL 22719913A IL 227199 A IL227199 A IL 227199A
- Authority
- IL
- Israel
- Prior art keywords
- face
- hole
- opening
- route
- wall face
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
Description
227199/2 NON-CONTACT TRANSFER APPARATUS TECHNICAL FIELD The present invention relates to a non-contact conveying device, and more particularly to a non-contact conveying device used for producing FPDs (flat panel displays) such as large-scale liquid crystal displays (LCDs) and plasma displays (PDPs), solar cell panels (solar panels) and so on.
BACKGROUND ART There has been used a method of improving production efficiency by making a single panel large to produce FPDs, solar cell panels and so on. For example, in case of liquid crystal panels, the dimension of the panel is 2850x3050x0.7mm in the tenth generation. Therefore, when conveying a liquid crystal glass on a plurality of rollers arranged side by side through rolling of the rollers, to the liquid crystal glass is locally applied strong forces due to deflections of shafts supporting the rollers and variations of heights of the rollers, which may damage the liquid crystal glass.
The rolling conveying device with the rollers cannot be adopted to a processing process for FPDs for instance, in which non-contact condition is required between the conveying device and panels, so that in recent years, air floatation conveying devices have been started to be adopted. As a non-contact conveying device exists a device for conveying FPDs through floatation using jetted airs by feeding airs with porous material (such as porous sintered metal) in a part of a plate-shaped conveyor rail, which is in communication with an air feeding route. However, using this non-contact conveying device causes the FPDs to be in a condition that the FPDs float while moving vertically, so that it is possible to use it for a conveying process, but it cannot be adopted at all to a processing process, in which accurate floatation height of 30pm to 50pm is required for instance.
In addition, when holes for vacuuming are arranged on a plate-shaped conveyor rail with the porous material for the purpose of accurately maintaining floatation amount, the construction of the device becomes complicated and the device itself becomes expensive. Besides, high feeding pressure for accurately maintaining flotation amount causes self-exited vibration relating to compressibility of high rigidity air to occur, which causes a problem that floatation height cannot be maintained accurately.
Further, although a device with orifices (holes with small diameter), which are drilled alternately with holes for vacuuming instead of porous material, exists also, strong jetted airs from the orifices may generate static electricity, which may disturb environment of a clean room and cause running cost to be skyrocketed due to large electric current consumption.
Then, in W02009/11 9377 is proposed, as a non-contact conveying device with small amount of fluid flow rate and low energy consumption and capable of accurately maintaining floatation height, a non-contact conveying device having more than one rotational flow forming body on an conveyer face of a conveyor rail, and the rotational flow forming body generates a rotational flow on a front side of a ring-like member, which is directed to a direction apart from the front side, by jetting a fluid from the fluid jetting port and generates a fluid flow that is directed to a back face adjacent to an opening portion on the front side of the ring-like member.
DISCLOSURE OF THE INVENTION Problems to be solved by the Invention The non-contact conveying device described in the above-mentioned W02009/1 19377 generates a rotational flow on a front side of a ring-like member, which is directed to a direction apart from the front side to float a conveyed object (such as a panel), however, negative pressure generates at a central portion of the rotational flow, which has an effect of preventing an excessive floatation of the conveyed object, on the contrary, the negative pressure has a defect that amplitudes of end portions of the conveyed object become large, in addition, when negative pressure by the rotational flow and negative pressure by vacuuming are overlapped in a processing process, floating function of the rotational flow eliminates, and it is found that the conveyed object locally contacts with the conveyor rail as a defect.
Further, it is found as a problem that the suction holes are connected with one continuous suction route, and one vacuum suction hole connected to the suction route is opened and closed, which causes vacuum pressure fluctuates, resulting in large fluctuation in floating amount of a conveyed object.
The present invention has been made in consideration of the above-mentioned points, and the object thereof is to provide a non-contact conveying device that is able to prevent generation of negative pressure, to make amplitudes of end portions of a conveyed object small, to make floatation amount of the conveyed object large and to make fluctuation of the floatation amount of the conveyed object as small as possible at opening/closing operations.
MEANS FOR SOLVING PROBLEMS To achieve the above object, the present invention relates to a non-contact conveying device, and the non-contact conveying device is characterized by comprising: a conveyor rail having: an upper plate including an accommodating hole portion having a cylindrical wall face portion with a round opening in a plan view on an upper face and an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion and a plurality of suction holes drilled adjacent to the accommodating hole portion and opening on upper and lower faces, the suction holes alternately disposed along a longitudinal direction and a cross direction; a middle plate including a continuous air feeding route opening on an upper face and communicating with each accommodating hole portion of the upper plate, a communication hole whose one end portion opens on the air feeding route and whose another end portion opens on a lower face, and a through hole disposed adjacent to the communication hole, one end portion of which is in communication with the suction hole of the upper plate and another end portion of which opens on a lower face; one air feeding hole connected to the communication hole of the middle plate; and a lower plate including an air suction route opening on an upper face and communicating with the through hole of the middle plate, and vacuum suction port connected to the air suction route: and an upward flow forming element mounted to the accommodating hole portion of the upper plate of the conveyor rail, wherein the air suction route formed on the lower plate is divided into at least more than one block in an longitudinal direction, and to the air suction route of each block is connected one vacuum suction port.
With the non-contact conveying device, since the air suction route for vacuum suction is divided into at least more than one block in an longitudinal direction (in a direction that a conveyed object is conveyed), and to the air suction route of each block is connected one vacuum suction port, opening/closing operations of the vacuum suction port do not cause the air suction route to be fully opened or fully closed, that is, the opening/closing operations of the vacuum suction port are carried out in each block in the direction that a conveyed object is conveyed, which allows the fluctuation of the floatation amount of the conveyed object as small as possible.
Further, a non-contact conveying device providing the above action and effect of the present invention may comprises: a conveyor rail having: an upper plate including an accommodating hole portion having a cylindrical wall face portion with a round opening in a plan view on an upper face and an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion and a plurality of suction holes drilled adjacent to the accommodating hole portion and opening on upper and lower faces, the suction holes alternately disposed along a longitudinal direction and a cross direction; a middle plate including a continuous air feeding route opening on an upper face and communicating with the accommodating hole portion of the upper plate, one communication hole whose one end portion opens on the air feeding route and whose another end portion opens on a lower face, and a communication hole whose one end portion opens on the suction hole of the upper plate and whose another end portion opens on an air suction route opening on a lower face; and a lower plate including an air feeding hole opening on the communication hole of the middle plate and a vacuum suction hole connected to the air suction route of the middle plate: and an upward flow forming element mounted to the accommodating hole portion of the upper plate, wherein the air suction route formed on the middle plate is divided into at least more than one block in an longitudinal direction, and to the air suction route of each block is connected one vacuum suction port.
In the non-contact conveying devices of the present invention, in addition that the conveyor rail is composed of three layers of an upper plate, a middle plate and a lower plate, providing an air feeding route on an upper face of the middle plate and an air suction route on an upper face of the lower plate, or providing the air feeding route and the air suction route on an upper face and a lower face of the middle plate allows the air feeding route and the air suction route to be manufactured with ease, resulting in reduced manufacturing cost. And, the non-contact conveying devices with the above construction are preferably used particularly for a processing process requiring accurate flatness in a conveying process.
An upward flow forming element mounted to the accommodating hole portion of the upper plate of the non-contact conveying device includes: a cylindrical base portion with a bottom having a cylindrical inner wall face on an inner face; an annular flange portion outwardly protruding from a circumferential edge of an opening portion of the cylindrical base portion in a radial direction of the flange portion; a plurality of engagement hanging-down portions arranged in a circumferential direction of an outer circumferential edge of the annular flange portion, the engagement hanging-down portions opposing with each other in a radial direction of the outer circumferential edge, the engagement hanging-down portions extending downward; an engagement projecting portion outwardly projecting from a lower end of the engagement hangingdown portion; and at least one fluid jetting hole extending from an outer circumferential face of the cylindrical base portion to the cylindrical inner wall face, a tip end portion of which is directed to a center of the cylindrical base portion, wherein the upward flow forming element is mounted to the accommodating hole portion of the upper plate of the conveyor rail such that an outer circumferential face of the annular flange portion is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and an engagement projecting portion of the engagement hanging-down portion is engaged with the circular shoulder portion.
A jet air generated by the upward flow forming element disperses in a form of a spray to form an upward flow, so that stress is not added to a conveyed object (panel and others), which allows an amplitude of the conveyed object to be small, further negative pressure is not generated, resulting in large floatation amount of the conveyed object.
The upward flow forming element is preferably formed by injection-molding a thermoplastic synthetic resin, and as a thermoplastic synthetic resin can be used polyphenylene sulfide resin (PPS).
EFFECT OF THE INVENTION As described above, with the present invention, it is possible to provide a non-contact conveying device that do not add stress to a conveyed object; can make amplitude of the conveyed object small; and can increase floatation amount of the conveyed object since no negative pressure is generated.
BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view showing an overall construction consisting of a conveying process and a processing process of a non-contact conveying device according to one embodiment of the present invention.
Figure 2 show the non-contact conveying device for processing process illustrated in Fig. 1 , in which (a) is a plan view, and (b) is a cross-sectional view taken along the line A- A of (a).
Figure 3 show the upper plate illustrated in Fig. 2(b), in which (a) is a cross-sectional view showing a condition without an upward flow forming element, and (b) is a crosssectional view showing a condition that an upward flow forming element is mounted.
Figure 4 shows the middle plate illustrated in Fig. 2(b), which is a cross-sectional view taken along the line B-B of Fig. 7.
Figure 5 shows the lower plate illustrated in Fig. 2(b), which is a cross-sectional view taken along the line C-C of Fig. 8.
Figure 6 shows the lower plate illustrated in Fig. 2(b), which is a cross-sectional view taken along the line D-D of Fig. 8.
Figure 7 is a top view of the middle plate illustrated in Fig. 2(b).
Figure 8 is a top view of the lower plate illustrated in Fig. 2(b).
Figure 9 shows an upward flow forming element used for the non-contact conveying device of the present invention, in which (a) is an elevational view, (b) is a plan view, (c) is a bottom view, and (d) is a cross-sectional view taken along the line E-E of (c).
Figure 10 explains a condition that an air disperses upward in a form of a spray though the upward flow forming element to form an upward flow, in which (a) is a plan view, and (b) is a cross-sectional view.
Figure 11 is a cross-sectional view showing a condition that a glass is conveyed while floating by the non-contact conveying device for the processing process.
Figure 12 shows an upward flow forming element used for a non-contact conveying device according to another embodiment of the present invention, in which (a) is a bottom view, and (b) is a cross-sectional view taken along the line F-F of (a).
Figure 13 explains a condition that an air disperses upward in a form of a spray through the upward flow forming element according to another embodiment to form an upward flow, in which (a) is a plan view, and (b) is a cross-sectional view.
Figure 14 shows another non-contact conveying device for processing process, in which (a) is a plan view, and (b) is a cross-sectional view taken along the line G-G of (a).
Figure 15 shows the upper plate illustrated in Fig. 14(b), in which (a) is a crosssectional view of the upper plate without the upward flow forming element, and (b) is a cross-sectional view of the upper plate to which the upward flow forming element is mounted.
Figure 16 is a cross-sectional views showing the middle plate shown in Fig. 14(b) in which (a) is a cross-sectional view taken along the line H-H of Fig. 17, and (b) is a cross-sectional view taken along the line l-l of Fig. 17.
Figure 17 is a top view of the middle plate shown in Fig. 14(b).
Figure 18 is a bottom view of the middle plate shown in Fig. 14(b) Figure 19 is a cross-sectional view showing a condition that a glass is conveyed while floating by the non-contact conveying device for the processing process according to another embodiment shown in Fig. 14.
DETAILED DESCRIPTION Next, embodiments of the present invention will be explained in detail with reference to drawings. In the below explanations, as an example, air is used as a fluid for conveyance, and a liquid crystal glass (hereinafter merely referred to as “glass”) is conveyed as a conveyed object.
A non-contact conveying device 1 is, as shown in Fig. 1 , used for conveying a glass G without contacting to the glass G, and is provided with non-contact conveying devices 2a, 3a for two conveying processes and a non-contact conveying device 4a for a processing process 4 between the two conveying processes 2, 3.
The non-contact conveying devices 2a, 3a for the conveying processes 2, 3 are constructed such that upward flow forming elements 6 described below are disposed on a conveyor rail 5 over two lines in a vertical direction in Fig. 1 , in the conveying processes 2, 3 shown in Fig. 1 , the non-contact conveying devices 2a, 3a are respectively arranged three in number parallel to each other.
The non-contact conveying device 4a for the processing process 4 of the non-contact conveying device 1 is, as shown in Figs. 2(a), 2(b), constructed in such a manner that the upward flow forming elements 6 for generating upward flows of air and suction holes 7 for sucking airs whose diameter is approximately 1 mm to 2mm are alternately arranged in a longitudinal direction and a cross direction of the conveyor rail 8.
The conveyor rail 8 is, as shown in Fig. 2(b), provided with three-layer structure consisting of an upper plate 9, a middle plate 10 and a lower plate 11 .
The upper plate 9 is, as shown in Fig. 3(a), provided with an accommodating hole portion 9g having a cylindrical inner wall face portion 9c with a round opening portion 9b in a plan view, which is drilled on an upper face 9a as a conveying face and opens on the upper face 9a, and an enlarged diameter cylindrical inner wall face portion 9f, which is enlarged through a circular shoulder portion 9d from the cylindrical inner wall face portion 9c and opens on the lower face 9e of the upper plate 9; and a plurality of suction holes 7, which are formed so as to penetrate from the upper face 9a to the lower face 9e adjacent to the accommodating hole portions 9g, are formed, as shown in Fig. 2, alternately along a longitudinal direction X and a cross direction Y of the upper plate 9.
Returning to Fig. 3, to the accommodating hole portion 9g of the upper plate 9 is mounted the upward flow forming element 6 made from a thermoplastic synthetic resin such as polyphenylene sulfide resin (PPS) for example. The upward flow forming element 6 is, as shown in Figs. 9(a) to 9(d), provided with a cylindrical base portion 6c with a bottom having a round opening portion 6a in a plan view that opens on the upper face, and a cylindrical inner wall face 6b in communication with the opening portion 6a; an annular flange portion 6d outwardly protruding from a circumferential edge of the opening portion 6a of the cylindrical base portion 6c in a radial direction; a plurality of (four in this embodiment) engagement hanging-down portions 6f arranged in a circumferential direction of the outer circumferential edge 6e so as to oppose with each other in a radial direction of the outer circumferential edge 6e and extend downward from an outer circumferential edge 6e of the annular flange portion 6d; an engagement projecting portion 6g outwardly projecting from a lower end of the engagement hangingdown portion 6f; and at least one (one in this embodiment) fluid jetting hole 6j extending from an outer circumferential face 6h of the cylindrical base portion 6c to the cylindrical inner wall face 6b and opening on the cylindrical inner wall face 6b, and an end portion of the fluid jetting hole 6j is directed to the center O of the cylindrical base portion 6c.
The upward flow forming element 6 is, as shown in Fig. 3(b), mounted to the accommodating hole portion 9g in such a manner that the outer circumferential face 6e of the annular flange portion 6d is press-fitted into the cylindrical inner wall face 9c of the accommodating hole portion 9g of the upper plate 9, and the engagement projecting portions 6g of the engagement hanging-down portions 6f are engaged with the circular shoulder portion 9d of the accommodating hole portion 9g, and the upper face 6k of the annular flange portion 6d is flush with the upper face 9a of the upper plate 9.
This upward flow forming element 6 allows, as shown in Figs. 10(a) and (b), an air jetted from the fluid jetting hole 6j to collide with the cylindrical inner wall face 6b of the cylindrical base portion 6c, and the air upwardly disperses in a form of a spray to form an upward flow (arrows in Figs. 10(a) and (b)), and the upward flow allows the glass G to be conveyed in a non-contact manner.
In the upward flow forming element 6, no negative pressure is generated, which makes it possible to increase flotation amount of the glass G as a conveyed object when conveyed, and the air jetted from the fluid jetting hole 6j collides with the cylindrical inner wall face 6b of the cylindrical base portion 6c, so that the jetting velocity of the air decreases, and it becomes an upward flow that disperses in a form of a spray, which applies stress to the glass G as little as possible.
The middle plate 10 includes, as shown in Figs. 4 and 7, an air feeding recessed groove 10b with semicircular cross section on an upper face 10a of the middle plate 10 as one continuous air feeding route, which communicates with each of the plurality of accommodating hole portions 9g formed on the upper plate 9; one communication hole 10d whose one end portion opens on the air feeding recessed groove 10b and whose another end portion opens on a lower face 10c of the middle plate 10; and a plurality of though holes 10e, one end portion of which is in communication with the suction hole 7 of the upper plate 9 and another end portion of which opens on a lower face 10c of the middle plate 10.
In the lower plate 11 , as shown in Figs. 5, 6 and 8, opening portions of a plurality of though holes 10e...10e drilled to the middle plate 10 on the lower face side 10c of the middle plate 10 are divided into those in four blocks 11b1 , 11b2, 11 b3 and 11 b4 in a longitudinal direction (refer to Figs. 7, 8), and the lower plate 11 includes continuous four air suction recessed grooves 11c1 , 11c2, 11 c3 and 11c4 with semicircular cross section as air suction routes, which are in communication with opening portions of though holes 10e1 , 10e2, 10e3 and 10e4 positioned in each divided block 11b1 , 11 b2, 11 b3 and 11 b4 respectively; vacuum suction holes 11d1 , 11 d2, 11 d3 and 11 d4 connected to the air suction recessed grooves 11c1 , 11c2, 11 c3 and 11c4 of each block 11b1 , 11b2, 11 b3 and 11 b4 respectively; and an air feeding hole 11 e connected to one communication hole 10d drilled to the middle plate 10.
Then, as shown in Fig. 2(b), the plurality of accommodating hole portions 9g formed in the upper plate 9 are caused to communicate with one continuous air feeding recessed groove 10b with a semicircular cross section opening on the upper face 10a of the middle plate 10, and the plurality of suction holes 7 are caused to communicate with the plurality of through holes 10e opening on the upper face 10a of the middle plate 10 to position the upper plate 9 on the upper face 10a of the middle plate 10, and to the communication hole 10d opening in the lower face 10c of the middle plate 10 is connected the air feeding hole 11 e provided on the lower plate 11 , and with the though holes 10e1 , 10e2, 10e3 and 10e4, which open on the lower face 10c of the middle plate 10 in each block 11 b1 , 11 b2, 11 b3 and 11 b4 are caused to communicate the air suction recessed grooves 11 d , 11 c2, 11 c3 and 11 c4 with semicircular cross section, and to the air suction recessed grooves 11c1 , 11c2, 11 c3 and 11c4 are connected the vacuum suction holes 11d1 , 11d2, 11 d3 and 11 d4 to position the middle plate 10 on the upper face 11a of the lower plate 11 , which constructs the conveyor rail 8. The conveyor rail 8 is formed by fastening and fixing the upper plate 9, the middle plate 10 and the lower plate 11 with fixing means such as bolts.
In Fig. 11 showing the non-contact conveying device 4a of the processing process 4 with the above construction, compressed air fed to the air feeding hole 11 e of the conveyor rail 8 is supplied to one continuous air feeding recessed groove 10b formed on the upper face 10a of the middle plate 10 of the conveyor rail 8 through the communication hole 10d in communication with the air feeding hole 11 e. The compressed air fed to the air feeding recessed groove 10b is supplied to the plurality of accommodating hole portions 9g formed on the upper plate 9 of the conveyor rail 8, and is jetted from each fluid jetting hole 6j of the upward flow forming element 6 mounted to the accommodating hole portion 9g to collide with the cylindrical inner wall face 6b of the cylindrical base portion 6c (refer to Fig. 3(b)), and the air becomes an upward flow dispersing in a form of a spray above the opening portion 6a of the cylindrical inner wall face 6b, and the upward flow allows the glass G to float and simultaneously sucks the glass G at the suction holes 7 opening on the upper face 9a of the upper plate 9 of the conveyor rail 8, as shown in Fig. 8, through the vacuum suction holes 11d1 , 11d2, 11 d3 and 11 d4 connected to the air suction recessed grooves 11c1 , 11c2, 11 c3 and 11c4 in each block 11b1 , 11b2, 11 b3 and 11b4, and balance of the floatation force by the upward flow and the suction force at the suction holes allows the glass G to be conveyed in a non-contact manner while forming accurate flatness.
As described above, in the above non-contact conveying device 4a, the air suction recessed groove 11 c as an air suction route is divided into four blocks 11 b1 , 11 b2, 11 b3 and 11 b4 in a longitudinal direction X, and one vacuum suction hole 11 d 1 , 11d2, 11 d3 and 11 d4 is connected to each air suction recessed groove 11c1 , 11c2, 11 c3 and 11c4 in each block 11b1 , 11 b2, 11 b3 and 11 b4, so that opening/closing operations of the vacuum suction holes 11d1 , 11d2, 11 d3 and 11 d4 are carried out for each air suction recessed groove 11c1 , 11c2, 11 c3 and 11c4, which prevents the vacuum suction force from decreasing, and opening/closing operations of the vacuum suction holes 11d1 , 11 d2, 11 d3 and 11 d4 are carried out in each block in the direction that the glass G is conveyed, which makes the fluctuation of the floatation amount of the glass G as small as possible.
Further, in the upward flow forming element 6 of the non-contact conveying device 4a, no negative pressure is generated, which makes it possible to increase flotation amount of the glass G at the conveyance, and the air jetted from the fluid jetting hole 6j collides with the cylindrical inner wall face 6b of the cylindrical base portion 6c, so that the jetting velocity of the air decreases, and it becomes an upward flow that disperses in a form of a spray, which applies stress to the glass G as little as possible.
Figures 12(a), (b) show another embodiment of the upward flow forming element 6, and the upward flow forming element 60 is provided with a cylindrical base portion 60c with a bottom having a round opening portion 60a in a plan view that opens on the upper face and a cylindrical inner wall face 60b in communication with the opening portion 60a; an annular flange portion 60d outwardly protruding from a circumferential edge of the opening portion 60a of the cylindrical base portion 60c in a radial direction; a plurality of (four in this embodiment) engagement hanging-down portions 60f arranged in a circumferential direction of the outer circumferential edge 60e so as to oppose with each other in a radial direction of the outer circumferential edge 60e and extend downward from an outer circumferential edge 60e of the annular flange portion 60d; an engagement projecting portion 60g outwardly projecting from a lower end of the engagement hanging-down portion 60f; and two fluid jetting holes 60j, 60j extending from an outer circumferential face 60h of the cylindrical base portion 60c to the cylindrical inner wall face 60b and opening on the cylindrical inner wall face 60b, and an tip end portion 60i of the fluid jetting hole 60j is directed to the center O of the cylindrical base portion 60c.
Although the upward flow forming element 60 is not illustrated in drawings, in the same manner as the upward flow forming element 6 is mounted to the accommodating hole portion 9g as shown in Fig. 2(b) or 3(b), the outer circumferential face 60e of the annular flange portion 60d is press-fitted into the cylindrical inner wall face portion 9c of the accommodating hole portion 9g to engage the engagement projecting portions 60g of the engagement hanging-down portions 60f with the circular shoulder portion 9d of the accommodating hole portion 9g, and the upper face 60k of the annular flange portion 60d is flush with the upper face 9a of the upper plate 9 to mount the upward flow forming element 60 to the accommodating hole portion 9g.
This upward flow forming element 60 is, as shown in Figs. 12 and 13(a), (b), airs that are jetted from the fluid jetting holes 60j, 60j, which extend from the outer circumferential face 60h of the cylindrical base portion 60c to the cylindrical inner wall face 60b and tip end portions 60i of which oppose with each other toward the center O of the cylindrical base portion 60c, collide with each other to generate an upward flow that disperses in a form of a spray above the opening portion 60a of the cylindrical inner wall face 60b, which conveys the glass G by the upward flow in a non-contact manner.
In this upward flow forming element 7 also, in the same manner as the upward flow forming element 6, no negative pressure is generated, so that floatation amount of the glass G at the conveyance can be large, and airs jetted from the fluid jetting holes 60j, 60j collide with each other to reduce jetting velocity of the airs and become an upward flow dispersing in a form of a spray, which applies stress to the glass G as little as possible.
Figures 14(a), (b) show another embodiment of the conveyor rail 8 in the non-contact conveying device 4a for processing process of the non-contact conveying device 1 shown in Fig. 1 , and this conveyor rail 80 includes, in the same manner as the conveyor rail 8, three-layer structure consisting of an upper plate 90, a middle plate 100 and a lower plate 110.
The upper plate 90 of the conveyor rail 80 is, as shown in Figs. 15(a), (b) , in the same manner as the upper plate 9 of the conveyor rail 8, provided with an accommodating hole portion 90g having a cylindrical inner wall face portion 90c with a round opening portion 90b in a plan view, which is drilled on an upper face 90a as a conveyer face and opens on the upper face 90a, and an enlarged diameter cylindrical inner wall face portion 90f, which is enlarged through a circular shoulder portion 90d from the cylindrical inner wall face portion 90c and opens on the lower face 90e of the upper plate 90; a plurality of suction holes 70, which are formed so as to penetrate from the upper face 90a to the lower face 90e adjacent to the accommodating hole portions 90g, are formed, as shown in Fig. 14, alternately along a longitudinal direction X and a cross direction Y of the upper plate 90.
To the accommodating hole portion 90g of the upper plate 90 is mounted the upward flow forming element 6 in such a manner that the outer circumferential face 6e of the annular flange portion 6d is press-fitted into the cylindrical inner wall face portion 90c of the accommodating hole portion 90g to engage the engagement projecting portions 6g of the engagement hanging-down portions 6f with the circular shoulder portion 90d of the accommodating hole portion 90g, and the upper face 6k of the annular flange portion 6d is flush with the upper face 90a of the upper plate 90.
The middle plate 100 is, as shown in Figs. 16(a), (b), includes air feeding recessed groove 100b formed on an upper face 100a of the middle plate 100 as an air feeding route, each of which has a semicircular cross section with an upward opening portion, and air suction recessed groove 100d formed on a lower face 100c of the middle plate 100 as an air suction route, each of which has a semicircular cross section with an downward opening portion.
The air feeding recessed groove 100b is, as shown in Fig. 17, formed to shape a diamond lattice in a plan view in accordance with the arrangement of the upward flow forming elements 6 (refer to Fig. 14(a)). On a bottom portion of the air feeding recessed groove 100b is, as shown in Fig. 16(b), formed a communication hole 100e so as to communicate with the air feeding recessed groove 100b and open on the lower face 100c of the middle plate 100, and the communication hole 100e is, as shown in Fig. 17, solely provided throughout the middle plate 100. The air feeding recessed groove 100b is, as shown in Fig. 14(b), in communication with each of the accommodating hole portions 90g of the upper plate 90 when the upper plate 90, the middle plate 100 and the lower plate 110 are laminated.
The air suction recessed grooves 100d1 , 100d2 are formed, as shown in Figs. 14(b), 16(a), (b), 17 and 18, in such a manner that the grooves 100d1 , 100d2 have the same diameter as that of the suction hole 70 formed on the upper plate 90; divide another end portion of a plurality of communication holes 10Of , of which one end portion opens on the upper face 100a of the middle plate 100, into two blocks 10Og, 100h in a longitudinal direction of the middle plate 100; and allow a plurality of communication holes 10Of 1 ... 10Of 1 ... 100f2 positioned in each divided block 10Og, 100h to be communicated with each other.
The lower plate 110 is, as shown in Fig. 14(b), provided with one air feeding hole 110c that opens on the upper face 110a of the lower plate 110, on the communication holes 100e in communication with the lower face 110b of the middle plate 100, and on the lower face 110b of the lower plate 110; and vacuuming holes 110d1 (not shown), 110d2, which open on the upper face 110a of the lower plate 110, communicate with the air suction recessed groove 110d1 , 110d2 in each block 10Og, 100h formed so as to open on the lower face 100c of the middle plate 100, and open on the lower face 110b of the lower plate 110.
Then, as shown in Fig. 14(b), each of the plurality of accommodating hole portions 90g, which are formed on the upper plate 90 in a longitudinal direction X and in a cross direction Y of the upper plate 90, is caused to be in communication with the continuous one air feeding recessed groove 100b opening on the upper face 100a of the middle plate 100, and the suction holes 70 are caused to be in communication with the plurality of communication holes 10Of opening on the upper face 100a of the middle plate 100 to position the upper plate 90 on the upper face 100a of the middle plate 100, and then to one communication hole 100e, which is in communication with the air feeding recessed groove 100b formed on the middle plate 100 and opens on the lower face 100c of the middle plate 100, is connected the air feeding hole 110c formed on the lower plate 110, and to the communication holes 10Of 1 , 100f2, which position in each block 10Og, 100h of the air suction recessed grooves 100d1 , 100d2 consisting of two blocks 10Og , 100h that are formed so as to be divided on the lower face 100c of the middle plate 100, is connected the vacuum suction hole 110d formed on the lower plate 110 to position the middle plate 100 on the upper face 110a of the lower plate 110 to construct the conveyor rail 80. The conveyor rail 80 is formed by fastening and fixing the upper plate 90, the middle plate 100 and the lower plate 110 through fixing means such as bolts.
In Fig. 19 showing the non-contact conveying device 4a of the processing process 4 with the above construction, compressed air fed to the air feeding hole 110c of the lower plate 110e of the conveyor rail 80 is supplied to one continuous air feeding recessed groove 100b with a semicircular cross section formed on the upper face 100a of the middle plate 100 of the conveyor rail 80 through the communication hole 100e in communication with the air feeding hole 110c. The compressed air fed to the air feeding recessed groove 100b is supplied to the plurality of accommodating hole portions 90g formed on the upper plate 90 of the conveyor rail 80, and is jetted from the fluid jetting hole 6j of the upward flow forming element 6 mounted to the accommodating hole portion 90g, as shown in Fig. 10, and collides with the cylindrical inner wall face 6b of the cylindrical base portion 6c, and the air generates an upward flow dispersing in a form of a spray above the opening portion 6a of the cylindrical inner wall face 6b, and the upward flow allows the glass G to float and simultaneously sucks the glass G at the suction holes 70 opening on the upper face 90a of the upper plate 90 of the conveyor rail 80, as shown in Fig. 18, through the vacuum suction holes 110d1 (not shown), 110d2, connected to the air suction recessed grooves 110d1 , 110d2, in each block 10Og, 11 Oh, and balance of the floatation force by the upward flow, which is generated at the upward flow forming element 6, and the suction force at the suction holes allows the glass G to be conveyed in a non-contact manner while forming accurate flatness.
In the above non-contact conveying device 4a, the air suction recessed groove 100d is divided into two blocks 10Og, 100h in a longitudinal direction X, and one vacuum suction hole 110d1 , 110d2 is connected to each air suction recessed groove 100d1 , 100d2 in each block 10Og, 10Oh, so that opening/closing operations of the vacuum suction holes 110d1 , 110d2 are carried out for each air suction recessed groove 100d1 , 100d2, which prevents the vacuum suction force from decreasing, and opening/closing operations of the vacuum suction holes 110d 1 , 110d2 in each block in a direction of conveyance, which makes the fluctuation of the floatation amount of the glass G as small as possible.
Further, in the upward flow forming element 6 of the non-contact conveying device 4a, no negative pressure is generated, which makes it possible to increase flotation amount of the glass G when conveyed, and the air jetted from the fluid jetting hole 6j collides with the cylindrical inner wall face 6b of the cylindrical base portion 6c, so that the jetting velocity of the air decreases, and it becomes an upward flow that disperses in a form of a spray, which applies stress to the glass G as little as possible. In this connection, when as the upward flow forming element 6 is used the upward flow forming element 60, the same action and effect can be obtained.
The glass G conveyed to the processing process 4 floats by the upward flow, which disperses in a form of a spray, generated at the upward flow forming element 6 or 60, and surrounding air is vacuumed by the suction holes 7 or 70 positioned between the upward flow forming elements 6 or 60, which accurately controls 30-50pm floatation height of the glass G. In this processing process 4 is carried out various inspections and processing to the glass G, and then conveyed to the next process in a floating state.
As described above, the non-contact conveying device of the present invention includes a plurality of upward flow forming elements and suction holes that are alternately disposed along a longitudinal direction and a cross direction of a conveyer rail on a conveying face of the conveyer rail; an air feeding recessed groove as one continuous air feeding route that is in communication with each of the upward flow forming elements, and an air feeding port connected to the air feeding recessed groove; an air feeding recessed groove as one continuous air feeding route that is in communication with each of suction holes positioned in each divided block, which is formed by dividing anther end portion of a suction hole that opens on the a conveying face at least more than one block in the longitudinal direction of the conveyor rail; and a vacuum suction port connected to the air suction recessed groove, compressed air fed from the air feeding port is supplied to the upward flow forming element through the air feeding recessed groove to generated in the upward flow forming element an upward flow that disperses in a form of a spray above an opening portion of the upward flow forming element, and this upward flow allows a conveyed object to float, and in the suction hole is performed a suction from the vacuum suction port through the air suction recessed groove, and balance of the floatation force generated at the upward flow forming element and the suction force at the suction holes allows the conveyed object to be conveyed in a non-contact manner while forming accurate flatness.
With the non-contact conveying device with the above construction of the present invention, the air suction recessed groove is divided into at least more than one block in an longitudinal direction, and to the air suction recessed groove of each block is connected one vacuum suction port, opening/closing operations of the vacuum suction port are carried out in each air suction recessed groove, which does not cause a vacuum suction force to be decreased and allows the fluctuation of the floatation amount of the conveyed object as small as possible.
In addition, in the above upward flow forming element of the non-contact conveying device is generated no negative pressure, so that floatation amount of a conveyed object at the conveyance can be large, and an air jetted from a fluid jetting hole is decreased in its velocity and becomes an upward flow dispersing in a form of a spray, which applies stress to the conveyed object as little as possible.
Claims (2)
1. A non-contact conveying device comprising : a conveyor rail having: an upper plate including an accommodating hole portion having a cylindrical wall face portion with a round opening in a plan view on an upper face and an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion and a plurality of suction holes drilled adjacent to the accommodating hole portion and opening on upper and lower faces, said suction holes alternately disposed along a longitudinal direction and a cross direction; a middle plate including a continuous air feeding route opening on an upper face and communicating with each accommodating hole portion of the upper plate, a communication hole whose one end portion opens on the air feeding route and whose another end portion opens on a lower face, and a through hole disposed adjacent to the communication hole, one end portion of which is in communication with the suction hole of the upper plate and another end portion of which opens on a lower face; one air feeding hole connected to the communication hole of the middle plate; and a lower plate including an air suction route opening on an upper face and communicating with the through hole of the middle plate, and vacuum suction port connected to the air suction route: and an upward flow forming element mounted to the accommodating hole portion of the upper plate of the conveyor rail and comprising: 227199/2 a cylindrical base portion with a bottom having a cylindrical inner wall face on an inner face; an annular flange portion outwardly protruding from a circumferential edge of an opening portion of the cylindrical base portion in a radial direction of the flange portion; a plurality of engagement hanging-down portions arranged in a circumferential direction of an outer circumferential edge of the annular flange portion, said engagement hanging-down portions opposing with each other in a radial direction of the outer circumferential edge, said engagement hanging-down portions extending downward; an engagement projecting portion outwardly projecting from a lower end of the engagement hanging-down portion; and at least one fluid jetting hole extending from an outer circumferential face of the cylindrical base portion to the cylindrical inner wall face, a tip end portion of which is directed to a center of the cylindrical base portion, wherein said upward flow forming element is mounted to the accommodating hole portion of the upper plate of the conveyor rail such that an outer circumferential face of the annular flange portion is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and an engagement projecting portion of the engagement hanging-down portion is engaged with the circular shoulder portion; and wherein the air suction route formed on the lower plate is divided into at least more than one block in an longitudinal direction, and to the air suction route of each block is connected one vacuum suction port. 227199/2
2. A non-contact conveying device comprising: a conveyor rail having: an upper plate including an accommodating hole portion having a cylindrical wall face portion with a round opening in a plan view on an upper face and an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion and a plurality of suction holes drilled adjacent to the accommodating hole portion and opening on upper and lower faces, said suction holes alternately disposed along a longitudinal direction and a cross direction; a middle plate including a continuous air feeding route opening on an upper face and communicating with the accommodating hole portion of the upper plate, one communication hole whose one end portion opens on the air feeding route and whose another end portion opens on a lower face, and a communication hole whose one end portion opens on the suction hole of the upper plate and whose another end portion opens on an air suction route opening on a lower face; and a lower plate including an air feeding hole opening on the communication hole of the middle plate and a vacuum suction hole connected to the air suction route of the middle plate: and an upward flow forming element mounted to the accommodating hole portion of the upper plate and comprising: a cylindrical base portion with a bottom having a cylindrical inner wall face on an inner face; 227199/2 an annular flange portion outwardly protruding from a circumferential edge of an opening portion of the cylindrical base portion in a radial direction of the flange portion; a plurality of engagement hanging-down portions arranged in a circumferential direction of an outer circumferential edge of the annular flange portion, said engagement hanging-down portions opposing with each other in a radial direction of the outer circumferential edge, said engagement hanging-down portions extending downward; an engagement projecting portion outwardly projecting from a lower end of the engagement hanging-down portion; and at least one fluid jetting hole extending from an outer circumferential face of the cylindrical base portion to the cylindrical inner wall face, a tip end portion of which is directed to a center of the cylindrical base portion, wherein said upward flow forming element is mounted to the accommodating hole portion of the upper plate of the conveyor rail such that an outer circumferential face of the annular flange portion is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and an engagement projecting portion of the engagement hanging-down portion is engaged with the circular shoulder portion; and wherein the air suction route formed on the middle plate is divided into at least more than one block in an longitudinal direction, and to the air suction route of each block is connected one vacuum suction port.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011005481 | 2011-01-14 | ||
| PCT/JP2011/071591 WO2012096033A1 (en) | 2011-01-14 | 2011-09-22 | Non-contact transfer apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL227199A true IL227199A (en) | 2016-10-31 |
Family
ID=46506950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL227199A IL227199A (en) | 2011-01-14 | 2013-06-26 | Non-contact transfer apparatus |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JP5819859B2 (en) |
| KR (1) | KR20140031180A (en) |
| CN (1) | CN103298717B (en) |
| HK (1) | HK1185051A1 (en) |
| IL (1) | IL227199A (en) |
| TW (1) | TWI541179B (en) |
| WO (1) | WO2012096033A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5998086B2 (en) * | 2012-04-03 | 2016-09-28 | オイレス工業株式会社 | Air plate for levitation |
| JP2014218342A (en) * | 2013-05-09 | 2014-11-20 | オイレス工業株式会社 | Supporting air plate and gas flow resistor thereof |
| JP2015034078A (en) * | 2013-08-09 | 2015-02-19 | オイレス工業株式会社 | Supporting air plate, and gas flow resistor of the same |
| JP6226419B2 (en) * | 2013-08-22 | 2017-11-08 | オイレス工業株式会社 | Levitation transfer device |
| CN104555348A (en) * | 2014-11-28 | 2015-04-29 | 祥鑫科技股份有限公司 | Air-blowing floatation conveying belt |
| TWI582896B (en) * | 2015-08-18 | 2017-05-11 | 由田新技股份有限公司 | Air floating table |
| TWI615914B (en) * | 2016-01-18 | 2018-02-21 | Structure of transistor handling inspection | |
| TWI577626B (en) * | 2016-06-04 | 2017-04-11 | 由田新技股份有限公司 | Air floating table |
| KR102300934B1 (en) * | 2016-06-21 | 2021-09-13 | 코아 플로우 리미티드 | Non-contact support platform with edge lifting |
| JP7437187B2 (en) | 2020-02-26 | 2024-02-22 | Ｊｓｗアクティナシステム株式会社 | Levitation conveyance device and laser processing device |
| JP7402081B2 (en) * | 2020-02-27 | 2023-12-20 | 本田技研工業株式会社 | laser processing equipment |
| CN114471347B (en) * | 2022-01-29 | 2023-07-18 | 浙江汉信科技有限公司 | Mixing equipment and blanking device thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004273574A (en) * | 2003-03-05 | 2004-09-30 | Wakomu Denso:Kk | Substrate levitation equipment and method therefor |
| JP4310540B2 (en) * | 2003-12-17 | 2009-08-12 | Ｓｍｃ株式会社 | Synthetic resin porous flow path plate and manufacturing method thereof |
| JP2006347719A (en) * | 2005-06-17 | 2006-12-28 | Shinko Electric Co Ltd | Gas floating unit and gas floating carrying device |
| JP4553376B2 (en) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | Floating substrate transfer processing apparatus and floating substrate transfer processing method |
| KR101530978B1 (en) * | 2008-03-24 | 2015-06-24 | 오일레스고교 가부시키가이샤 | Non-contact carrier device |
| JP2010232472A (en) * | 2009-03-27 | 2010-10-14 | Dainippon Screen Mfg Co Ltd | Substrate transfer device and substrate processing apparatus |
| TWI449653B (en) * | 2009-04-03 | 2014-08-21 | Oiles Industry Co Ltd | Non - contact delivery device |
| JP2010254463A (en) * | 2009-04-28 | 2010-11-11 | Nitta Moore Co | Non-contact workpiece supporting device |
-
2011
- 2011-09-22 KR KR1020137018034A patent/KR20140031180A/en active IP Right Grant
- 2011-09-22 JP JP2012552627A patent/JP5819859B2/en active Active
- 2011-09-22 CN CN201180065170.2A patent/CN103298717B/en not_active Expired - Fee Related
- 2011-09-22 WO PCT/JP2011/071591 patent/WO2012096033A1/en active Application Filing
- 2011-10-21 TW TW100138326A patent/TWI541179B/en not_active IP Right Cessation
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2013
- 2013-06-26 IL IL227199A patent/IL227199A/en not_active IP Right Cessation
- 2013-11-05 HK HK13112429.1A patent/HK1185051A1/en not_active IP Right Cessation
Also Published As
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|---|---|
| TW201231370A (en) | 2012-08-01 |
| HK1185051A1 (en) | 2014-02-07 |
| KR20140031180A (en) | 2014-03-12 |
| CN103298717B (en) | 2015-07-22 |
| JPWO2012096033A1 (en) | 2014-06-09 |
| JP5819859B2 (en) | 2015-11-24 |
| TWI541179B (en) | 2016-07-11 |
| CN103298717A (en) | 2013-09-11 |
| WO2012096033A1 (en) | 2012-07-19 |
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