JP2010254463A - Non-contact workpiece supporting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To float a workpiece without blowing up the workpiece itself or powder dust. <P>SOLUTION: This non-contact workpiece supporting device 10 includes a housing 11 with its opening 12E directed upward. Pressure gas is delivered inside the housing 11 via a supply flow path 19. Inside the housing 11, the pressure gas passes through a spiral flow path of a spiral flow path forming part 12B, a reduced-diameter part 12C, and a cylindrical spiral flow forming part 12D, and spouts from the opening 12E as a turning air flow. The spiral air flow acts on the lower surface of the workpiece W, thereby floating the workpiece W. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a non-contact work support device that supports a work using an air layer formed by a swirling airflow, and more particularly to a non-contact work support device that supports a work by levitating.

  In recent years, in order to prevent static electricity, dust, and the like from adhering to a workpiece in a semiconductor manufacturing process or the like, a conveyance mechanism is known that floats a workpiece placed on a stage and conveys the floated workpiece. . In such a transport mechanism, for example, it is common to provide a plurality of throttle holes in the stage and to float the workpiece with air jetted upward from the throttle holes (see, for example, Non-Patent Document 1). .

Published by Atsuko Hirayama, “Non-contact transfer technology using hydrostatic gas bearings”, Hydraulic / Pneumatic Technology October 2008, October 1, 2008

  However, for example, when the work is a lightweight object or a thin object such as glass or paper, the work may be blown up by the air ejected from the throttle hole, and the work may not be stably floated. Moreover, dust etc. may be blown up by the air which ejected from the aperture hole, and the surrounding environment may be polluted. In particular, in a semiconductor manufacturing process or the like, the yield may be greatly reduced by the dust that has been blown up adheres to the workpiece.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a non-contact work support device that supports a work without blowing up and hardly blows up dust or the like.

  The non-contact work support device according to the present invention is configured to inject gas into the housing at a flow rate having a component in the axial direction of the housing along the circumferential direction of the inner peripheral surface of the housing provided with an opening, And a flow path for generating a swirling airflow flowing toward the opening, and the swirling airflow ejected from the opening acts on the lower surface or side surface of the work to support the work.

  It is preferable to cause the swirling airflow ejected from the opening to act on the lower surface of the work so that the work floats upward.

  It is better that the inner peripheral surface of the housing has a reduced diameter portion that is reduced in diameter toward the opening on the opening side of the flow path. A block member may be fitted inside the housing. In this case, the flow path is preferably formed in a spiral shape between the block member and the inner peripheral surface.

  For example, spiral ridges are provided on the outer peripheral surface of the block member, and the spiral flow path is formed by the ridges coming into contact with the inner peripheral surface. Further, when the block member includes a protruding portion that decreases in diameter toward the opening, the protruding portion is disposed inside the reduced diameter portion. A plurality of spiral flow paths may be provided.

In addition, the non-contact work supporting device according to the present invention may be used such that the swirling airflow acts on the side surface of the work moved by the conveyor.

  The non-contact workpiece support device unit according to the present invention includes a plurality of the above-mentioned non-contact workpiece support devices.

  In the above unit, the plurality of openings are arranged in a matrix, and in each row, the openings for ejecting the left-handed swirling airflow and the openings for ejecting the right-handed swirling airflow are alternately arranged, and the left-handed in each row It is preferable that the openings for ejecting the swirl airflow and the openings for ejecting the right-handed swirl airflow are alternately arranged.

  In addition, a plurality of pairs of openings in which a left-handed swirling airflow and an opening for right-handing swirling airflow are juxtaposed are arranged in a predetermined direction, and the work is predetermined by the swirling airflow ejected from these openings. It may be conveyed in the direction.

  In the present invention, since the work is supported using the swirl airflow, the work can be supported without blowing up the work itself or dust around the work.

It is sectional drawing which shows the non-contact workpiece support apparatus which concerns on the 1st Embodiment of this invention. It is a top view which shows the modification of a block member. It is typical sectional drawing which shows the non-contact workpiece support apparatus unit which concerns on 2nd Embodiment. It is a typical top view which shows the non-contact workpiece support apparatus unit which concerns on 2nd Embodiment. It is a typical top view which shows the non-contact workpiece support apparatus unit which concerns on 3rd Embodiment. It is typical sectional drawing which shows the non-contact workpiece support apparatus unit which concerns on 4th Embodiment. It is sectional drawing which shows the non-contact workpiece support apparatus which concerns on 5th Embodiment. It is sectional drawing which shows the modification of a non-contact workpiece support apparatus.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a configuration of a non-contact workpiece support device according to a first embodiment of the present invention.

  The non-contact work supporting device 10 includes a housing 11 having a substantially cylindrical shape, and the housing 11 is provided with a rotationally symmetric cavity 12 communicating along the cylindrical axis X. That is, the housing 11 has a rotationally symmetric inner peripheral surface. In this embodiment, the device 10 is used with the bottom surface 11A of the housing 11 facing upward and the top surface 11B facing downward, as will be described later.

  The housing 11 includes a connecting portion 12A, a spiral flow passage forming portion 12B, a reduced diameter portion 12C, a spiral flow forming portion 12D, and an opening portion 12E in this order from the top surface 11B side. The inner peripheral surface of the connecting portion 12A has a cylindrical shape with an inner diameter D1, and the inner peripheral surface of the spiral flow path forming portion 12B has a cylindrical shape with an inner diameter D2 that is slightly smaller than the inner diameter D1. The diameter-reduced portion 12C has an axis X into a portion having a cylindrical shape having an inner diameter D3 whose inner peripheral surface is slightly smaller than the inner diameter D2, and a swirl flow path forming portion 12D having a cylindrical shape having an inner diameter D4 smaller than the inner diameter D3. And a portion that gradually decreases in diameter (in this embodiment, linearly decreases in diameter). Further, the opening 12E is once slightly reduced in diameter from the swirl flow forming portion 12D (that is, the inner diameter D4), then continues to the cylindrical portion, and further expands toward the bottom surface 11A of the housing 11, so that the bottom surface 11A The diameter of the circular opening 12E substantially matches the inner diameter D4. The housing 11 is hermetically closed on the top surface 11B side (that is, the connecting portion 12A) by a fixing member 15 and a connecting member 17 described later.

  A block member 13 is disposed inside the housing 11. The block member 13 includes a cylindrical portion 13A fitted into the spiral flow forming portion 12B, and a truncated conical protruding portion 13B that protrudes from the cylindrical portion 13A and decreases in diameter toward the opening 12E. The cylindrical portion 13A and the protruding portion 13B are rotationally symmetric about the axis X. A spiral ridge 14 is integrally provided on the outer peripheral surface of the cylindrical portion 13B. The outer diameter D5 of the cylindrical portion 13A is smaller than the inner diameter D2 of the spiral flow forming portion 12B, and its height is substantially equal to the spiral flow path forming portion 12B. Further, the outer diameter of the spiral ridge 14 is substantially equal to the inner diameter D2 of the spiral flow path forming portion 12B. When the cylindrical portion 13A is fitted into the spiral flow path forming portion 12B, one end of the ridge 14 is engaged with a step portion between the spiral flow path forming portion 12B and the reduced diameter portion 13C, thereby blocking the block. The movement of the member 13 toward the opening 12E is restricted. At this time, the space sandwiched between the outer peripheral surface of the cylindrical portion 13A and the inner peripheral surface of the spiral flow path forming portion 12B is a spiral shape partitioned by the ridges 14 contacting the inner peripheral surface of the spiral flow path forming portion 12B. The flow path is formed.

  In a state in which the cylindrical portion 13A is fitted into the spiral flow path forming portion 12B, the protruding portion 13B protrudes into the reduced diameter portion 12C, and the tip thereof reaches almost the entrance height of the swirl flow forming portion 12D. At this time, a gap is formed between the outer peripheral surface (conical surface) of the protruding portion 13B and the inner peripheral surface of the reduced diameter portion 12C.

  The fixing member 15 is airtightly fitted into the connecting portion 12 </ b> A, and the other end of the protrusion 14 of the block member 13 is engaged with the end of the fixing member 15 on the bottom surface 11 </ b> A side. Further, in this state, the axial movement of the end portion on the top surface 11B side of the fixing member 15 is restricted by the C ring 16 fitted in an annular groove formed on the inner peripheral surface of the connecting portion 12A. Thereby, the block member 13 and the fixing member 15 are fixed to the housing 11 in the axial direction.

  A screw hole communicating along the axis X is provided in the center of the fixing member 15, and a connecting member 17 having a male screw is screwed into the screw hole in an airtight manner. A passage 17A is formed in the connecting member 17 along the axis X, and a tube 18 is connected to the side opposite to the male screw. The inside of the tube 18 constitutes a supply channel 19 for supplying gas to the spiral channel in the spiral channel forming part 12B together with the passage 17A. A space 21 that covers the top surface of the block member 13 is formed between the block member 13 and the connecting member 17, and the space 21 constitutes a part of the supply flow path 19. The tube 18 is connected to a gas supply device (not shown) such as a pump, and high-pressure gas, for example, is supplied from the gas supply device through the supply channel 19 to the spiral channel of the spiral channel forming unit 12B. .

  Next, the operation of the contact workpiece support device 10 according to the present embodiment will be described with reference to FIG. The non-contact workpiece support device 10 is arranged so that the axis X is substantially vertical, and the bottom surface 11A is directed upward and the top surface 11B is directed downward. The support device 10 is used with the opening 12E facing the lower surface of the thin plate-like workpiece W arranged substantially horizontally.

  In the present embodiment, the high-pressure gas supplied from the pump is ejected to the reduced diameter portion 12C through the spiral flow path formed in the spiral flow path forming portion 12B. At this time, since the gas is ejected along the spiral flow path, it is ejected at a flow velocity having a component in the axis X direction corresponding to the spiral pitch along the circumferential direction of the inner peripheral surface of the reduced diameter portion 12C. The ejected gas flows while drawing a spiral through the gap between the inner peripheral surface of the reduced diameter portion 12C and the outer peripheral surface of the protruding portion 13B of the block member 13, and swirls into the spiral flow forming portion 12D. Released as. Since the diameter of the reduced diameter portion 12C decreases toward the opening portion 12E, the rotation speed of the gas increases toward the opening portion 12E in the reduced diameter portion 12C, and the swirl that is stable in the spiral flow forming portion 12D. An air flow is formed.

  The whirling airflow spirally flows along the circumferential direction of the inner peripheral surface of the spiral flow forming portion 12D toward the opening 12E and is ejected upward from the opening 12E. The swirling airflow that is ejected acts on the lower surface of the workpiece W, and thereby the workpiece W is lifted upward. At this time, the swirling airflow spirally flows out radially outward through the gap between the bottom surface 11A and the workpiece W. Therefore, in the present embodiment, the gas that floats the workpiece W upward forms a layer between the workpiece W and the bottom surface 11A.

  More specifically regarding the swirling airflow, the rotational speed distribution of the gas in the cylinder in the swirling flow forming portion 12D becomes substantially constant, and a negative pressure is generated in the central portion. At this time, the pressure distribution in the radial direction of the gap between the lower surface of the workpiece W and the bottom surface 11A is such that the negative pressure is maximum on the axis X and the pressure increases toward the outside, and the bottom surface 11A of the housing 11 In the gap between the lower surface of the workpiece W, the workpiece W swings to the positive pressure side, and the workpiece W is lifted by the positive pressure. In the present embodiment, the pressure converges to the outside air pressure outside the housing 11.

  Further, the levitation force of the workpiece W due to the swirling airflow is a function of the distance between the workpiece W and the housing 11, and when the distance is a predetermined value, the weight of the workpiece W and the levitation force are balanced. In addition, this position is a stable balance point, and when the distance approaches further, the non-contact work support mechanism 10 pushes up the work W by the swirling airflow, and when it moves away, the work W is pushed down by its own weight.

  In the present embodiment, the work W is levitated by the swirling airflow ejected in layers from the opening 12E. Therefore, even when the work W is light and thin such as glass or paper, the work W is levitated. The work W is not blown up. Moreover, since the swirling airflow ejected in layers does not blow up dust or the like, it is possible to prevent dust from adhering to the workpiece W or the like.

  Further, since the gas is ejected into the housing using the spiral flow path, the swirl flow is efficiently formed. Furthermore, in this embodiment, since the swirl flow is formed by reducing the diameter, a stable and high-speed swirl flow can be formed more efficiently.

  In this embodiment, a spiral flow path can be formed only by inserting a block part, and assembly efficiency is high. Further, the swirling flow can be generated more efficiently by arranging the protruding portion whose outer diameter is reduced in accordance with the reduced diameter of the inner peripheral surface of the housing in the reduced diameter portion.

  In the support device 10 shown in FIG. 1, an example in which the number of the ridges 14 provided on the outer periphery of the block member 13 is one is illustrated, but the number of the ridges 14 may be two or more. Further, the outer peripheral surface of the block member 13 may be a cylindrical surface, and a convex line may be provided on the inner peripheral surface of the spiral flow path forming portion 12C. In addition, in FIG. 2, the top view of the block member 13 in the case of providing two convex strips 14A and 14B in an outer peripheral surface as the block member 13 as a modification is shown. In addition, the turning direction of the spiral (that is, the swirling airflow) may be right-handed or left-handed.

  Next, FIGS. 3 and 4 show a non-contact work support device unit according to a second embodiment of the present invention. In the unit according to the present embodiment, a plurality of the non-contact work supporting devices 10 are used.

  In this unit, a stage 27 in which a plurality of holes are formed is provided, and each support device 10 is attached inside the hole. The bottom surface 11 </ b> A (that is, the end surface of the opening 12 </ b> E) of each support device 10 is disposed on the same plane as the top surface of the stage 27. In this unit, a main flow path 30 for supplying gas to all the support devices 11 is provided. The main flow path 30 is branched and becomes a supply flow path 19 (see FIG. 1) for supplying gas to each support device 10.

  As shown in FIG. 4, the openings 12 </ b> E for ejecting the swirling airflow are arranged in rows and columns on the stage 27 with even columns (4 columns in the example of FIG. 3) and even rows (4 rows in the example of FIG. 3). Are lined up. In each row, the opening 12E that is a left-handed swirling air flow and the opening 12E that is a right-handed winding are alternately arranged in each row, and similarly, in each row, the opening 12E and the right-handed swirling airflow are left-handed. The openings 12E are alternately arranged.

  In the present embodiment, the number of openings 12E that eject a left-handed swirling air flow is the same as the number of openings 12E that eject a right-handed swirling air current. Therefore, the work W levitated by the swirling airflow ejected from the openings 12E arranged in a matrix can reduce the influence of torque on the work W due to the swirling flow, and is less likely to rotate. In addition, the swirling airflow ejected from the two openings 12E adjacent in the column direction X (or the row direction Y) travels in the same direction between the openings 12E, and thus is combined into a large airflow. A part of such airflow flows out of the stage 27. Therefore, the gas ejected from the opening 12E is prevented from staying on the stage 27 for a long time.

  Further, in the present embodiment, the pressure can be maintained at a positive pressure without converging to the atmospheric pressure even outside the housing 11 of each support device 10 (that is, the gap between the stage 27 and the workpiece W). Furthermore, since gas is supplied from the same flow path (main flow path 30) to all the devices 10, it becomes easy to supply gas of the same pressure to each support device 10. However, two or more main flow paths 30 that supply gas to the plurality of apparatuses 10 may be provided, and for example, gas may be supplied from different main flow paths 30 for each row.

  In the present embodiment, the workpiece W may be configured to move in a floating state. In that case, it is preferable that the number of openings 12E (that is, the support device 10) in the column direction Y is further increased, and rails for holding the workpiece W are provided at both ends of the stage 27 in the row direction X. . According to such an aspect, the workpiece W can be slid in the column direction Y by a driving device (not shown) in a state where both ends of the workpiece W are held by the rail. Further, in each row, since the number of openings 12E for ejecting a left-handed swirling air flow is the same as the number of openings 12E for ejecting a right-handed swirling air current, even when the workpiece W is conveyed in the row direction Y, The influence of torque on the workpiece W can be reduced.

  FIG. 5 shows a non-contact work support device unit according to a third embodiment of the present invention. Hereinafter, a difference between the third embodiment and the second embodiment will be described.

  In the third embodiment, as is apparent from FIG. 5, on the stage 27, one opening 12 </ b> E that ejects a left-handed swirling air flow and one opening 12 </ b> E that ejects a right-handed swirling air current are performed. A plurality of aperture pairs 24 arranged in parallel in the direction X are arranged in the column direction Y. That is, the openings 12E in the same row eject a swirling airflow having the same swirling direction.

  In the present embodiment, in each opening pair 24, the left-handed swirling airflow ejected from one opening 12E and the right-handed swirling airflow ejected from the other opening 12E are synthesized between these openings 12E. The air flow F flows in one direction along the column direction Y. In the present embodiment, since the work W is moved along the row direction Y by the airflow F, the work W can be transported without using a separate drive device.

  The width of the workpiece W (that is, the length in the row direction X) is preferably slightly longer than the distance between the two openings 12E and 12E constituting the opening pair 24. If the width of the workpiece W is too long, the moving speed of the workpiece W becomes slow due to the influence of the airflow flowing in the direction opposite to the airflow F.

  In the present embodiment, when conveying a wide workpiece W, a plurality of aperture groups each configured by arranging a plurality of aperture pairs 24 in the column direction Y are arranged in a row direction X at a predetermined distance. Also good.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. In each of the above embodiments, the swirling airflow is applied to the lower surface of the work W. However, in this embodiment, the swirl airflow is different from the above embodiments in that it is applied to the side surface of the work W.

  In the present embodiment, as the workpiece W, a workpiece having a relatively large thickness is used, and the workpiece W is conveyed by the conveyor belt 32 of the conveyor 31 or the like. The non-contact workpiece support device 10 is provided on both sides of the conveyor 31 and is disposed so as to sandwich the workpiece W conveyed by the conveyor 31 from both sides. Each support device 10 is disposed such that the axis X is substantially horizontal and the bottom surface 11A (that is, the opening 12E) faces the side surface of the workpiece W. In FIG. 6, only one support device 10 is provided on each side of the conveyor 31, but usually a plurality of support devices 10 are provided along the running direction of the conveyor (the direction orthogonal to the paper surface in FIG. 6).

  The swirling airflow ejected from the opening 12E of the support device 10 is applied to both side surfaces of the workpiece W. The work W transported by the conveyor is prevented from shifting in the transport direction to the side by the swirling airflow acting on the side surface of the work W. That is, in the present embodiment, the support device 10 functions as a guide member for the workpiece W conveyed by the conveyor 31.

  Note that the support device 10 moves the workpiece W away by positive pressure when the workpiece W approaches, and draws the workpiece W closer by suctioning by the negative pressure when the workpiece W moves away. Therefore, in this embodiment, the swirling airflow is used to guide the workpiece W, so that the workpiece W can be easily placed at a predetermined position on the conveyor belt 32.

  Next, a fifth embodiment according to the present invention will be described with reference to FIG. This embodiment is different from the above embodiments in that a control flow path 41 along the axis X is provided inside the supply flow path 19. Hereinafter, differences between the present embodiments will be described.

  The control flow path 41 is, for example, output to the outside of the supply flow path 19 at a predetermined position of the supply flow path 19, and a control valve 42 is provided at the end thereof. The opening and closing of the control valve 42 is controlled by a control device (not shown), for example. In the present embodiment, a hole 13 </ b> D that penetrates the block member 13 along the axis X is formed at the center of the block member 13. The control channel 41 passes through the passage 17A and the space 21 of the connecting member 17 and is hermetically fitted into the hole 13D. That is, when the control valve 42 is opened, the center of the swirl flow forming portion 12D is communicated with the outside of the housing via the control flow path 41.

  In the present embodiment, when the control valve 42 is opened, the swirling flow forming portion 12D communicates with the outside through the control flow path 41. Therefore, the pressure at the center of the swirling flow forming portion 12D rises due to the external pressure, and the workpiece Increases the buoyancy. Therefore, it is possible to control the support state of the workpiece W by controlling the opening and closing of the control valve 20.

  FIG. 8 shows a modification of the non-contact workpiece support device 10. Hereinafter, although this modification is demonstrated, in this modification, about the member which has the same function as the member shown in FIG. 1, the same code | symbol is attached | subjected and the description is abbreviate | omitted. In addition, the non-contact workpiece support apparatus 10 of this modification shows the example when applied to the non-contact workpiece support apparatus unit in which the some support apparatus 10 is used like 2nd Embodiment. is there.

  In the non-contact work supporting apparatus 10 illustrated in FIG. 1, the pipe 18, the fixing member 15, and the connecting member 17 are provided as separate members. However, in the present embodiment, these are integrally formed as the connection pipe 50. The connecting pipe 50 has a passage 50 </ b> A constituting the supply channel 19 formed along the axis X therein. The connecting pipe 50 has a male screw on one end side, is screwed into a female screw formed on the inner peripheral surface of the connecting portion 12 </ b> A, and is connected to the housing 11. The connecting pipe 50 is integrally provided with a nut portion 50B for screwing work. Further, an airtight seal member (rubber packing or the like) 51 is interposed between the connecting pipe 50 and the inner peripheral surface of the connecting portion 12A.

  The other end of the connection pipe 50 is connected to a branch pipe 52 of a T-shaped joint 51 for branching the main flow path 30, whereby the supply flow path 19 is connected to the main flow path 30. Here, the connection pipe 50 and the branch pipe 52 are connected by, for example, press-fitting the connection pipe 50 into the branch pipe 52 and connecting the annular claw 53 provided on the outer peripheral surface of the connection pipe 50 to the inner circumference of the branch pipe 52. This is done by hooking into an annular groove formed on the surface. In this modification, the connection pipe 50 and the T-shaped joint 51 are connected by two sets of grooves and claws, and the connection pipe 50 is integrated with the T-shaped joint 51 so as to be rotatable around the axis X. An airtight seal member 55 is interposed between the outer peripheral surface of the connection pipe 50 and the inner peripheral surface of the branch pipe 52. Furthermore, in this modification, the inner peripheral surface of the reduced diameter portion 12C is configured by only a portion that gradually decreases in diameter along the cylindrical axis X, omitting a cylindrical portion.

  In this modification, since the connection pipe 50 is used, the number of parts of the non-contact work supporting device 10 can be reduced, and the supply flow path 19 can be connected to the main flow path 30 with a simple configuration. Further, since the connecting pipe connected to the housing is rotatably engaged with the T-shaped joint, the housing can be easily connected, and the T-shaped joint can freely rotate with respect to the housing even after the connection. .

DESCRIPTION OF SYMBOLS 10 Non-contact workpiece support apparatus 11 Housing 12 Cavity 12B Spiral flow path formation part 12C Reduction diameter part 12D Spiral flow formation part 12E Opening part 13 Block member 24 Opening pair 31 Conveyor W Workpiece

Claims (9)

  A swirling airflow that flows toward the opening by injecting gas into the housing at a flow velocity having a component in the axial direction of the housing along the circumferential direction of the inner peripheral surface of the housing provided with the opening A non-contact work supporting device that supports the work by causing the swirling airflow ejected from the opening to act on a lower surface or a side surface of the work.   The non-contact workpiece support device according to claim 1, wherein the inner peripheral surface has a reduced diameter portion that is reduced in diameter toward the opening on the opening side of the flow path.   The non-contact work according to claim 1, wherein a block member is inserted into the housing, and the flow path is formed in a spiral shape between the block member and the inner peripheral surface. Support device.   The spiral flow path is formed by providing spiral ridges on the outer circumferential surface of the block member, and the ridges contacting the inner circumferential surface. Non-contact workpiece support device.   The inner peripheral surface has a reduced diameter portion that is reduced in diameter toward the opening on the opening side of the flow path, and the block member includes a protruding portion that is reduced in diameter toward the opening. The non-contact work supporting apparatus according to claim 3, wherein the portion is disposed inside the reduced diameter portion.   6. The non-contact work supporting apparatus according to claim 3, wherein a plurality of the spiral flow paths are provided.   The non-contact work supporting apparatus according to any one of claims 1 to 6, wherein the swirling airflow is applied to a side surface of the work moved by a conveyor.   A non-contact work support device unit comprising a plurality of non-contact work support devices according to any one of claims 1 to 7, wherein the openings are arranged in a matrix, and a left-handed swirling airflow in each row The openings for ejecting the right-handed swirling airflow are alternately arranged, and the openings for ejecting the left-handed swirling airflow in each row and the openings for ejecting the right-handed swirling airflow are Non-contact work supporting device unit, which is arranged alternately.   A non-contact work support device unit comprising a plurality of non-contact work support devices according to any one of claims 1 to 7, wherein the opening for jetting a left-handed swirling air flow and a right-hand swirling air flow are ejected A non-contact workpiece support device unit, wherein a plurality of aperture pairs in which the apertures are arranged in parallel are arranged in a predetermined direction, and the workpiece is conveyed in the predetermined direction by a swirling airflow ejected from the openings.

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