IL227199A - Non-contact transfer apparatus - Google Patents

Non-contact transfer apparatus

Info

Publication number
IL227199A
IL227199A IL227199A IL22719913A IL227199A IL 227199 A IL227199 A IL 227199A IL 227199 A IL227199 A IL 227199A IL 22719913 A IL22719913 A IL 22719913A IL 227199 A IL227199 A IL 227199A
Authority
IL
Israel
Prior art keywords
face
hole
opening
route
wall face
Prior art date
Application number
IL227199A
Other languages
English (en)
Hebrew (he)
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of IL227199A publication Critical patent/IL227199A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IL227199A 2011-01-14 2013-06-26 Non-contact transfer apparatus IL227199A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011005481 2011-01-14
PCT/JP2011/071591 WO2012096033A1 (ja) 2011-01-14 2011-09-22 非接触搬送装置

Publications (1)

Publication Number Publication Date
IL227199A true IL227199A (en) 2016-10-31

Family

ID=46506950

Family Applications (1)

Application Number Title Priority Date Filing Date
IL227199A IL227199A (en) 2011-01-14 2013-06-26 Non-contact transfer apparatus

Country Status (6)

Country Link
JP (1) JP5819859B2 (ja)
KR (1) KR20140031180A (ja)
CN (1) CN103298717B (ja)
IL (1) IL227199A (ja)
TW (1) TWI541179B (ja)
WO (1) WO2012096033A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5998086B2 (ja) * 2012-04-03 2016-09-28 オイレス工業株式会社 浮上用エアプレート
JP2014218342A (ja) * 2013-05-09 2014-11-20 オイレス工業株式会社 支持用エアプレートおよびその気体流抵抗器
JP2015034078A (ja) * 2013-08-09 2015-02-19 オイレス工業株式会社 支持用エアプレートおよびその気体流抵抗器
JP6226419B2 (ja) * 2013-08-22 2017-11-08 オイレス工業株式会社 浮上搬送装置
CN104555348A (zh) * 2014-11-28 2015-04-29 祥鑫科技股份有限公司 气吹浮起式输料带
TWI582896B (zh) * 2015-08-18 2017-05-11 由田新技股份有限公司 氣浮載台
TWI615914B (zh) * 2016-01-18 2018-02-21 天正國際精密機械股份有限公司 晶體管搬運檢測之結構
EP3472077A4 (en) * 2016-06-21 2020-03-04 Coreflow Ltd CONTACTLESS CARRIER PLATFORM WITH CAT LIFT
JP7437187B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
JP7402081B2 (ja) * 2020-02-27 2023-12-20 本田技研工業株式会社 レーザ加工装置
CN114471347B (zh) * 2022-01-29 2023-07-18 浙江汉信科技有限公司 混合设备及其落料装置
KR102894220B1 (ko) * 2024-05-21 2025-12-03 (주)트리엔 기판 부상 시스템

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004273574A (ja) * 2003-03-05 2004-09-30 Wakomu Denso:Kk 基板浮上装置および同方法
JP4310540B2 (ja) * 2003-12-17 2009-08-12 Ｓｍｃ株式会社 合成樹脂製多孔流路板及びその製造方法
JP2006347719A (ja) * 2005-06-17 2006-12-28 Shinko Electric Co Ltd 気体浮上ユニット及び気体浮上搬送装置
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
KR101530978B1 (ko) * 2008-03-24 2015-06-24 오일레스고교 가부시키가이샤 비접촉 반송 장치
JP2010232472A (ja) * 2009-03-27 2010-10-14 Dainippon Screen Mfg Co Ltd 基板搬送装置および基板処理装置
TWI449653B (zh) * 2009-04-03 2014-08-21 Oiles Industry Co Ltd Non - contact delivery device
JP2010254463A (ja) * 2009-04-28 2010-11-11 Nitta Moore Co 非接触ワーク支持装置

Also Published As

Publication number Publication date
HK1185051A1 (en) 2014-02-07
KR20140031180A (ko) 2014-03-12
CN103298717A (zh) 2013-09-11
WO2012096033A1 (ja) 2012-07-19
JP5819859B2 (ja) 2015-11-24
TWI541179B (zh) 2016-07-11
CN103298717B (zh) 2015-07-22
TW201231370A (en) 2012-08-01
JPWO2012096033A1 (ja) 2014-06-09

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees