WO2011162488A2 - 적층형 반도체 패키지 - Google Patents
적층형 반도체 패키지 Download PDFInfo
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- WO2011162488A2 WO2011162488A2 PCT/KR2011/003990 KR2011003990W WO2011162488A2 WO 2011162488 A2 WO2011162488 A2 WO 2011162488A2 KR 2011003990 W KR2011003990 W KR 2011003990W WO 2011162488 A2 WO2011162488 A2 WO 2011162488A2
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- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
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Definitions
- the present invention relates to a stacked semiconductor package, and more particularly, to minimize cracks and flow of the semiconductor chip due to external force while securing a space to prevent contact between the semiconductor chip protruding to one side and the conductive wire as much as possible during wire bonding.
- the present invention relates to a laminated semiconductor package capable of securing a supporting force so that the support force can be secured.
- the thickness of the semiconductor chip is gradually thinner.
- the semiconductor chip has a thickness of only 50 ⁇ m to 100 ⁇ m.
- FIG. 4 is a block diagram illustrating a stacked semiconductor package according to the related art.
- a plurality of semiconductor chips 21 are stacked on the substrate 10 in a stepped manner to be inclined in a plurality of steps to bond pads.
- the first cascade chip stack 20 is externally exposed on one side of the upper chip, and the plurality of semiconductor chips 31 are disposed on the first cascade chip stack 20 in the opposite direction.
- a second cascade chip stack 30 in which the bonding pads 32 are externally exposed on the other side of the chip top by stacking the casing in multiple stages in an inclined manner.
- Bonding pads 22 and 32 of the semiconductor chips 21 and 31 of the first and second cascade chip stacks 20 and 30 are connected to the upper surface of the substrate 10. Wire bonding is performed via the pads 12 and 13 and the plurality of conductive wires 23 and 33.
- reference numeral 14 denotes a solder ball provided on a lower surface of the substrate
- 50 denotes a molding part formed of a resin material on the substrate.
- the semiconductor chip 21 of the first cascade chip stacked body 20 stacked in an inclined multilayer on the substrate 10 is connected to the substrate.
- the bonding pads 32 of the semiconductor chip 31 stacked on the upper surface of the first cascade chip stack 29 in a multi-stepped inclination form are connected to the other connection pads 13 of the substrate 10.
- the bonding pads 32 exposed on one side of the upper end of the chip in the process of bonding the conductive wires 33 through the conductive wire 33 the first cascade chip laminate having a lower overhang shape protruding to the left in the drawing. Since there is no structure supporting the lower portion of 20, it causes a bouncing during the bonding operation, which makes it difficult to perform a precise wire bonding operation, causing bonding defects and causing cracks of the semiconductor chips stacked in multiple layers.
- the contact between the conductive wire 23 of the first cascade chip stack 20 and the semiconductor chip 31 of the second cascade chip stack 30 and the first cascade chip stack Defects in which the semiconductor chip 21 of the sieve 20 is damaged by external forces increase and become more frequent as the thickness of the semiconductor chip becomes thinner.
- the present invention is to solve the above problems, the object is to crack the semiconductor chip by the external force while ensuring a space to prevent the contact between the semiconductor chip and the conductive wire protruding to one side as possible during wire bonding And to provide a stacked semiconductor package that can secure a supporting force to minimize the flow.
- a substrate having a first connection pad and a second connection pad on the upper surface;
- a first cascade chip stack mounted on the substrate and having a plurality of first semiconductor chips stacked in a step shape such that a first bonding pad is exposed to the outside;
- At least one spacer stacked on an upper surface of the uppermost semiconductor chip to externally expose a bonding pad of the uppermost semiconductor chip stacked on the first cascade chip stack;
- a second cascade chip stacked body mounted on an upper surface of the spacer and having a plurality of second semiconductor chips stacked in a step shape such that a second bonding pad is exposed to the outside;
- a first conductive wire that serves to electrically connect the first bonding pad of the first semiconductor chip and the first connection pad of the substrate;
- a second conductive wire connected to the second bonding pad of the second semiconductor chip and an electrical connection between the second connection pad of the substrate.
- the spacers are arranged stepwise between the uppermost semiconductor chip stacked on the first cascade chip stack and the lowermost semiconductor chip stacked on the second cascade chip stack.
- the spacer is overlapped with the uppermost semiconductor chip stacked on the first cascade chip stack so as to expose the lower surface of the one end.
- the upper surface of the substrate is in contact with the one end and the upper end of the spacer or the one end and the upper end of the semiconductor chip of the second cascade chip stack contact the constant support for supporting the second cascade chip stack It has a support member of height.
- the substrate includes a molding to protect the first cascade chip stack and the second cascade chip stack from an external environment.
- the present invention by providing a spacer having a constant thickness between the first cascade chip stack and the second cascade chip stack, the upper overhang region and the first cascade of the second cascade chip stack A semiconductor chip stacked on a second cascade protruding to one side during wire bonding of the first conductive wire because a space having a wide upper and lower interval between the first bonding pads of the uppermost semiconductor chip stacked on the chip stack can be formed.
- the electrical short accident can be prevented by preventing contact between the uppermost loop of the first conductive wire and the first conductive wire.
- the second cascade chip stack or the spacer is provided with a support member having a predetermined height in contact with the upper end, the second conductive wire can be supported by being inclined and stacked in multiple stages on the upper surface of the spacer. The effect of improving the reliability and quality of the product by minimizing and preventing cracks and flow of the semiconductor chips stacked on the first cascade by the external force of the lower part transmitted to one side end of the second cascade during wire bonding of Is obtained.
- FIG. 1 is a cross-sectional view illustrating a stacked semiconductor package according to a first embodiment of the present invention.
- FIG. 2 is a cross-sectional view illustrating a stacked semiconductor package according to a second exemplary embodiment of the present invention.
- FIG 3 is a cross-sectional view illustrating a stacked semiconductor package according to a third exemplary embodiment of the present invention.
- FIG. 4 is a cross-sectional view illustrating a stacked semiconductor package according to the related art.
- the stacked semiconductor package 100 may include a substrate 110, a first cascade chip stack 120, a spacer 140, and a second cascade.
- the chip chip stack 130, the first and second conductive wires 123, and the second conductive wire 133 are included.
- the substrate 110 is wire-bonded with an end portion of the first conductive wire 123 on an upper surface on which the first cascade chip stack 120 and the second cascade 130 are sequentially stacked and disposed.
- a second connection pad 113 is wire-bonded with an end of the second conductive wire 113 together with the first connection pad 112.
- the substrate 110 is provided with a printed circuit board that can be mounted on the main substrate through each of the solder ball 114 is applied on the ball land for electrical connection with the main substrate not shown on the lower surface Can be.
- the first cascade chip stack 120 includes a plurality of first semiconductor chips 121 mounted on at least two or more stages on an upper surface of the substrate 110, and the plurality of first semiconductor chips 121 forms a first bonding pad 122 wire-bonded with the first conductive wire 123 on one side end upper surface, and is inclined to the left in the drawing to expose the first bonding pad 122 to the outside. Multi-stage stacking stepped.
- the spacer 140 is an intervening material having a predetermined thickness interposed between the first cascade chip stack 120 and the second cascade chip stack 130, and the spacer 140 is formed in the first casing.
- the first bonding pad 122 of the uppermost semiconductor chip 121 stacked on the tide chip stack 120 is stacked on the upper surface of the uppermost semiconductor chip.
- the mounting position of the second cascade chip stack 130 is raised by the thickness of the spacer 140 so that the first semiconductor chip 121 of the uppermost semiconductor chip 121 of the first cascade chip stack 120 is raised.
- the space between the bonding pad 122 and the upper overhang region of the first cascade chip stack 130 facing the same may be increased.
- the spacer 140 may be made of a material such as silicon or may be made of a thermally conductive material having high thermal conductivity so that heat generated from a semiconductor chip can be easily released to the outside.
- the second cascade chip stack 130 includes a plurality of second semiconductor chips 131 mounted on at least two or more stages on an upper surface of the spacer 140, and the plurality of second semiconductor chips 131 is stacked in a stepped manner so that the second bonding pad 132 formed on one side of the upper surface is exposed to the outside.
- the second cascade chip stacks are disposed such that the second bonding pads 132 of the second semiconductor chip 131 and the first bonding pads 122 of the first semiconductor chip 121 are disposed in opposite directions.
- the semiconductor chips 131 of the sieve 130 are turned and stacked in multiple stages.
- the first and second semiconductor chips 121 and 131 may be provided as any one of a memory chip such as an SRAM and a DRAM, a digital integrated circuit chip, an RF integrated circuit chip, and a baseband chip according to a set device to which a package is applied. Can be.
- the spacer 140 may include the uppermost semiconductor chip 121 stacked on the first cascade chip stack 120 so as to expose the lower surface of one side end thereof downward.
- the second cascade chip stack 130 may be disposed in a stepped manner with the lowermost semiconductor chip 131 stacked on the semiconductor chip 131.
- the spacer 140 may include the uppermost semiconductor chip 121 stacked on the first cascade chip stack 120 so as to expose a lower surface of one side end thereof. Can be nested.
- the first conductive wire 123 may electrically connect the plurality of first semiconductor chips 121 constituting the first cascade chip stack 120 with the substrate 110 to be electrically connected to the first semiconductor chip 121. It consists of a wire member of a predetermined length bonded between the first bonding pad 122 formed on the upper surface of one side end of the first side and the first connection pad 112 formed on the upper surface of the substrate 110.
- the first bonding pad 122 of the semiconductor chip 121 and the first connection pad 112 of the substrate 110 are wire-bonded as a wire bonder through the first conductive wire 123.
- the uppermost loop of the first conductive wire 123 having one end wire bonded to the bonding pad 122 may prevent an electrical short accident in contact with the second semiconductor chip 131.
- an electrical short accident may be prevented by preventing contact between the first conductive wire 123 and the second semiconductor chip 131 swept by the resin material injected during molding of the molding part for forming the molding part 150 on the substrate. It can be prevented.
- the second conductive wire 133 may electrically connect the plurality of second semiconductor chips 131 constituting the second cascade chip stacked body 130 with the substrate 110 to be electrically connected to the second semiconductor chip 131.
- one side end and the upper end of the spacer 140 may be in contact with the upper surface of the substrate 110 corresponding to the lower surface of one side end of the spacer 140 to contact the second cascade chip stack 130. It may be provided with a support member 145 of a predetermined height.
- the support member 145 may be disposed on an upper surface of the substrate such that one end and an upper end of the spacer 140 overlapping the lowermost semiconductor chip 131 stacked on the second cascade chip stack 130 are in contact with each other. Although illustrated and described as being provided, the present invention is not limited thereto and may be provided on an upper surface of the substrate 110 such that one end and an upper end of the semiconductor chip 131 protruding outward from the spacer 140 are in contact with each other.
- the second cascade chip stacked body 130 can be reinforced while being supported by the support member 145 having an upper end contacting the spacer 140 or the semiconductor chip 131, the spacer ( It is possible to prevent the crack phenomenon in which the second cascade chip stack 130 stacked on the upper surface of the 140 is inclined in a flow or the semiconductor chip 121 of the first cascade chip stack 120 is damaged. It is.
- the support 145 is made of an elastic material such as resin or heat generated from the chip when the semiconductor chip is driven to elastically support the load of the entire semiconductor chip of the second cascade chip stack 130. It may be made of a material having excellent thermal conductivity, such as copper and aluminum to guide the emission to the substrate 110.
- the substrate 110 has an upper physical surface of the first and second conductive wires 123 and 133 together with the first cascade chip stack 120 and the second cascade chip stack 130.
- it comprises a mold portion 150 wrapped using a resin encapsulation material such as epoxy molding compound (Epoxy Molding Compound) to form a package form.
Abstract
Description
Claims (5)
- 제1접속패드와 제2접속패드를 상부면에 구비하는 기판 ;상기 기판상에 탑재되고 제1본딩패드가 외부노출되도록 복수개의 제1반도체칩이 계단형으로 적층되는 제1캐스캐이드 칩적층체 ;상기 제1캐스캐이드 칩적층체에 적층된 최상층 반도체칩의 본딩패드를 외부노출하도록 상기 최상층 반도체칩의 상부면에 적층되는 적어도 하나의 스페이서 ;상기 스페이서의 상부면에 탑재되고, 제2본딩패드가 외부노출되도록 복수개의 제2반도체칩이 계단형으로 적층되는 제2캐스캐이드 칩적층체 ;상기 제1반도체칩의 제1본딩패드와 상기 기판의 제1접속패드의 전기적 연결을 매개하는 역활의 제1도전성 와이어; 및상기 제2반도체칩의 제2본딩패드와 상기 기판의 제2접속패드의 전기적 연결을 매개하는 연결의 제2도전성 와이어를 포함하는 적층형 반도체 패키지.
- 제1항에 있어서,상기 스페이서는 상기 제1캐스캐이드 칩적층체에 적층된 최상층 반도체 칩과 상기 제2캐스캐이드 칩적층체에 적층된 최하층 반도체칩과의 사이에 계단형으로 배치됨을 특징으로 하는 적층형 반도체 패키지.
- 제1항에 있어서,상기 스페이서는 일측단의 하부면을 하부로 노출시킬 수 있도록 상기 제1캐스캐이드 칩적층체에 적층된 최상층 반도체 칩과 중첩배치됨을 특징으로 하는 적층형 반도체 패키지.
- 제1항에 있어서,상기 기판의 상부면에는 상기 스페이서의 일측단과 상부단이 접하거나 상기 제2캐스캐이드 칩적층체의 반도체칩의 일측단과 상부단이 접하여 제2캐스캐이드 칩적층체를 지지하는 일정높이의 지지부재를 구비함을 특징으로 하는 적층형 반도체 패키지.
- 제1항에 있어서,상기 기판은 상기 제1캐스캐이드 칩적층체와 제2캐스캐이드 칩적층체를 외부환경으로부터 보호하는 몰딩부를 포함함을 특징으로 하는 적층형 반도체 패키지.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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BR112012032580A BR112012032580A2 (pt) | 2010-06-22 | 2011-06-01 | pacote semicondutor em camadas |
US13/805,950 US20130093103A1 (en) | 2010-06-22 | 2011-06-01 | Layered Semiconductor Package |
Applications Claiming Priority (2)
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KR1020100058879A KR20110138789A (ko) | 2010-06-22 | 2010-06-22 | 적층형 반도체 패키지 |
KR10-2010-0058879 | 2010-06-22 |
Publications (2)
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WO2011162488A2 true WO2011162488A2 (ko) | 2011-12-29 |
WO2011162488A3 WO2011162488A3 (ko) | 2012-04-12 |
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PCT/KR2011/003990 WO2011162488A2 (ko) | 2010-06-22 | 2011-06-01 | 적층형 반도체 패키지 |
Country Status (4)
Country | Link |
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US (1) | US20130093103A1 (ko) |
KR (1) | KR20110138789A (ko) |
BR (1) | BR112012032580A2 (ko) |
WO (1) | WO2011162488A2 (ko) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2014138035A (ja) * | 2013-01-15 | 2014-07-28 | Toshiba Corp | 半導体装置 |
KR102065648B1 (ko) * | 2013-08-14 | 2020-01-13 | 삼성전자주식회사 | 반도체 패키지 |
CN103474421B (zh) * | 2013-08-30 | 2016-10-12 | 晟碟信息科技(上海)有限公司 | 高产量半导体装置 |
JP2015176910A (ja) * | 2014-03-13 | 2015-10-05 | 株式会社東芝 | 半導体メモリ |
KR20150114233A (ko) | 2014-04-01 | 2015-10-12 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조방법 |
KR102320046B1 (ko) | 2014-09-19 | 2021-11-01 | 삼성전자주식회사 | 캐스케이드 칩 스택을 갖는 반도체 패키지 |
US9412722B1 (en) * | 2015-02-12 | 2016-08-09 | Dawning Leading Technology Inc. | Multichip stacking package structure and method for manufacturing the same |
WO2017166325A1 (en) * | 2016-04-02 | 2017-10-05 | Intel Corporation | Semiconductor package with supported stacked die |
WO2018091459A1 (en) * | 2016-11-15 | 2018-05-24 | X-Celeprint Limited | Micro-transfer-printable flip-chip structures and methods |
US10600671B2 (en) * | 2016-11-15 | 2020-03-24 | X-Celeprint Limited | Micro-transfer-printable flip-chip structures and methods |
US11024608B2 (en) | 2017-03-28 | 2021-06-01 | X Display Company Technology Limited | Structures and methods for electrical connection of micro-devices and substrates |
KR102424875B1 (ko) * | 2017-07-03 | 2022-07-26 | 삼성전자주식회사 | 반도체 소자 |
JP7034706B2 (ja) * | 2017-12-27 | 2022-03-14 | キオクシア株式会社 | 半導体装置 |
KR102556518B1 (ko) * | 2018-10-18 | 2023-07-18 | 에스케이하이닉스 주식회사 | 상부 칩 스택을 지지하는 서포팅 블록을 포함하는 반도체 패키지 |
JP2022135735A (ja) | 2021-03-05 | 2022-09-15 | キオクシア株式会社 | 半導体装置およびその製造方法 |
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US20080150158A1 (en) * | 2006-12-20 | 2008-06-26 | Chee Keong Chin | Integrated circuit package system with offset stacked die |
JP2009049118A (ja) * | 2007-08-17 | 2009-03-05 | Toshiba Corp | 半導体素子とそれを用いた半導体パッケージ |
US20100044861A1 (en) * | 2008-08-20 | 2010-02-25 | Chin-Tien Chiu | Semiconductor die support in an offset die stack |
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JP5529371B2 (ja) * | 2007-10-16 | 2014-06-25 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置及びその製造方法 |
KR101026488B1 (ko) * | 2009-08-10 | 2011-04-01 | 주식회사 하이닉스반도체 | 반도체 패키지 |
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2010
- 2010-06-22 KR KR1020100058879A patent/KR20110138789A/ko not_active Application Discontinuation
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2011
- 2011-06-01 US US13/805,950 patent/US20130093103A1/en not_active Abandoned
- 2011-06-01 BR BR112012032580A patent/BR112012032580A2/pt not_active IP Right Cessation
- 2011-06-01 WO PCT/KR2011/003990 patent/WO2011162488A2/ko active Application Filing
Patent Citations (3)
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US20080150158A1 (en) * | 2006-12-20 | 2008-06-26 | Chee Keong Chin | Integrated circuit package system with offset stacked die |
JP2009049118A (ja) * | 2007-08-17 | 2009-03-05 | Toshiba Corp | 半導体素子とそれを用いた半導体パッケージ |
US20100044861A1 (en) * | 2008-08-20 | 2010-02-25 | Chin-Tien Chiu | Semiconductor die support in an offset die stack |
Also Published As
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US20130093103A1 (en) | 2013-04-18 |
BR112012032580A2 (pt) | 2016-11-22 |
WO2011162488A3 (ko) | 2012-04-12 |
KR20110138789A (ko) | 2011-12-28 |
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