WO2011148450A1 - 基板収納容器 - Google Patents
基板収納容器 Download PDFInfo
- Publication number
- WO2011148450A1 WO2011148450A1 PCT/JP2010/058705 JP2010058705W WO2011148450A1 WO 2011148450 A1 WO2011148450 A1 WO 2011148450A1 JP 2010058705 W JP2010058705 W JP 2010058705W WO 2011148450 A1 WO2011148450 A1 WO 2011148450A1
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- WIPO (PCT)
- Prior art keywords
- substrate
- shaped
- disk
- lid
- disc
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Definitions
- the present invention relates to a substrate storage container for storing a thin disk-shaped substrate such as a plurality of semiconductor wafers or a circular quartz glass substrate when storing or transporting the same.
- the substrate storage container is generally provided with a container body for storing a plurality of disk-shaped substrates such as semiconductor wafers arranged in parallel.
- the container body has a substrate loading / unloading opening for loading and unloading the disk-shaped substrate.
- a lid for closing the substrate loading / unloading opening is provided to be detachably attached to the substrate loading / unloading opening from the outside.
- a back side holding part is arranged in the area on the back side when viewed from the substrate loading / unloading opening in the container body, and the lid side is placed on the inner wall part of the lid body.
- a retainer is provided.
- the lid retainer does not hold the disc-shaped substrate unless the lid is attached to the substrate loading / unloading opening of the container body. Accordingly, a temporary substrate placement piece is provided for placing the disk-shaped substrate in the vicinity of the substrate loading / unloading opening when the lid is not attached. When the disk-shaped substrate is held by the lid side retainer, it is brought into a floating state from the temporary substrate placement piece (for example, Patent Document 1).
- the disk-shaped substrate stored inside the substrate storage container is bent.
- the amount of bending of such a disk-shaped substrate becomes remarkably large as the diameter of the disk-shaped substrate is increased. This is because the thickness of the disk-shaped substrate cannot be increased corresponding to the diameter.
- the disk-shaped substrate held in a state floating from the temporary substrate placement piece in the substrate storage container comes into contact with (or collides with) the temporary substrate placement piece, There is a possibility of damage or fouling in the substrate storage container.
- An object of the present invention is to safely store even a disk-shaped substrate having a large diameter without causing a risk of coming into contact with the temporary placement piece of the substrate even if the stored disk-shaped substrate is bent by vibration or impact.
- An object of the present invention is to provide a substrate storage container that can be used.
- the substrate storage container of the present invention includes a container main body for storing a plurality of disk-shaped substrates arranged in parallel, and a container main body for loading and unloading the disk-shaped substrate into and from the container main body.
- the formed substrate loading / unloading opening, the lid that is detachably attached to the substrate loading / unloading opening to close the substrate loading / unloading opening, and the outer edge of each disk-shaped substrate in the back area as viewed from the substrate loading / unloading opening in the container body A rear side holding part that positions and holds the part, a lid side retainer that is provided on the inner wall part of the lid body and pushes each disk-shaped substrate into the rear side holding part side and holds the positioning, and the lid body is attached to the substrate insertion / removal opening.
- a substrate storage container provided with a temporary substrate placement plate for placing a disk-shaped substrate in a region near the substrate loading / unloading opening when the disk-shaped substrate is not in the state, the disk-shaped substrate is pushed by the lid side retainer.
- the substrate mounting portion for mounting the vicinity of the outer edge portion of the disk-shaped substrate in the region on the back side when viewed from the substrate loading / unloading opening in the container body when not being inserted, and the disc that has been pushed in by the lid side retainer
- Substrate return means is provided for returning the disc-shaped substrate to a position where the disc-shaped substrate is not positioned and held by the back side holding unit when the substrate is not pushed in by the lid retainer, and the lid is removed from the substrate loading / unloading opening.
- the substrate temporary placement piece overlaps the disk-shaped substrate when viewed in a direction perpendicular to the surface of the disk-shaped substrate, and the lid is attached to the substrate loading / unloading opening.
- the temporary substrate piece is not overlapped with the disk-shaped substrate when viewed in the direction perpendicular to the surface of the disk-shaped substrate.
- the substrate returning means may be a spring-like member that comes into contact with the outer peripheral surface of the disk-like substrate, and the substrate mounting portion is spring-like adjacent to the contact surface of the spring-like member that comes into contact with the disk-like substrate. It may be formed integrally with the member. And the spring-shaped member may be provided in the state extended from the edge part of the back side holding
- the back side holding part and the substrate mounting part may be provided integrally adjacent to each other, and in that case, a hole is formed between the back side holding part and the substrate mounting part, You may make it the front-end
- the substrate returning means may be a slope that guides the disk-shaped substrate obliquely downward by gravity.
- the back side holding part and the substrate mounting part may be formed continuously and integrally with the slope between them, and the slope is one of the two surfaces forming the V-groove in the back side holding part. It may be a surface.
- the lid when the lid is attached to the substrate insertion / removal opening and pushed into the position where the disc-like substrate is positioned and held by the back side holding portion, the lid is viewed in the direction perpendicular to the surface of the disc-like substrate. Even if the diameter of the disk-shaped substrate is increased by setting the position of the temporary substrate piece so that the temporary substrate piece does not overlap the disk-shaped substrate, the disk stored in the container body There is no possibility that the substrate is in contact with the temporary substrate placement plate due to vibration or impact, and a disk-like substrate such as a semiconductor wafer or a quartz glass substrate can be stored more safely.
- the substrate storage container concerning the 1st example of the present invention it is a simple substance perspective view of the member which supports a substrate.
- FIG. 8 is a cross-sectional view illustrating an IX-IX cross section in FIG. 7.
- FIG. 8 is a cross-sectional view illustrating an XX cross section in FIG. 7. It is a plane sectional view in the state where a lid body was removed in a substrate storage container concerning the 3rd example of the present invention.
- FIG. 12 is a cross-sectional view illustrating a XII-XII cross section in FIG. 11. It is a plane sectional view in the state where the lid was attached in the substrate storage container concerning the 3rd example of the present invention.
- FIG. 14 is a cross-sectional view illustrating a XIV-XIV cross section in FIG. 13.
- FIG. 1 is a perspective view of a substrate storage container according to a first embodiment of the present invention
- FIG. 2 is a plan sectional view thereof.
- Reference numeral 1 denotes a container body for storing a plurality of disk-shaped substrates W formed in a thin disk shape in a state of being arranged in parallel.
- the container main body 1 is arranged in a state in which each disk-shaped substrate W is stored in a horizontal direction when the disk-shaped substrate W is taken in and out.
- FIG. 1 shows a state in which only one disk-like substrate W is stored at the lowest position in the container body 1.
- the disk-shaped substrate W in this embodiment is a semiconductor wafer, but the present invention can be applied to a circular quartz glass substrate or the like.
- a substrate loading / unloading opening 2 for loading and unloading the disk-shaped substrate W is formed on one side surface among the four side surfaces of the container body 1.
- a lid 20 for closing the substrate loading / unloading opening 2 is provided so as to be detachably attached to the substrate loading / unloading opening 2 from the outside.
- the lid 20 is provided with an elastic seal member for sealing between the substrate loading / unloading opening 2 and the outer edge of the lid 20, a locking mechanism for locking the lid 20, and the like. However, a description thereof will be omitted.
- a back side holding portion 3 for positioning and holding the outer edge portion of each disk-like substrate W in the container main body 1 is disposed.
- the back side holding unit 3 is located between the right side and the left side of the center line X (the center line of the container body 1 perpendicular to the substrate loading / unloading opening 2) as viewed from the substrate loading / unloading opening 2. A pair is provided. The back side holding part 3 will be further described later.
- the rear retainer 3 ′ is a rear retainer arranged near the position of the innermost centerline X in the container main body 1.
- the rear retainer 3 ' has a function of elastically urging and holding the disk-shaped substrate W toward the substrate loading / unloading opening 2 side.
- the rear retainer 3 ' may or may not be disposed, and therefore the rear retainer 3' is not included in the following description.
- a known lid side retainer for elastically pressing and positioning and holding the outer edge portion of each disk-like substrate W from the substrate insertion / removal opening 2 side to the back side holding portion 3 side. 21 is provided.
- the lid-side retainer 21 has a spring-like V-groove-shaped portion that is in contact with the outer peripheral portion of each disk-shaped substrate W when the lid 20 is attached to the substrate loading / unloading opening 2 of the container body 1 and is easily elastically deformed.
- the structure supported by the support member 22 is provided in the vicinity of the center line X position.
- a lid 20 is attached to the substrate loading / unloading opening 2 at a position in the vicinity of the substrate loading / unloading opening 2 in the container main body 1 and away from the center line X (that is, a position near the left and right side walls of the container main body 1).
- a temporary substrate placement piece 4 for placing the outer edge of the disk-shaped substrate W when there is no such state.
- the back side holding part 3 and the substrate temporary placement piece 4 are integrally formed as a single plastic part with a connecting part 5 interposed therebetween.
- the back side holding part 3 is a V-shaped groove whose bottom is the side far from the center of the disc-like substrate W.
- each disk-shaped substrate W is pushed into the back side holding portion 3 side by the lid side retainer 21 from the substrate loading / unloading opening 2 side, and the outer peripheral ridge line portion is pressed against the V-shaped groove portion of the back side holding portion 3.
- the lid side retainer 21 By being in a state, it is in a state where it is positioned and held there (see FIG. 5).
- FIG. 3 shows a member for supporting only the left half of one disk-like substrate W (that is, the left half as viewed from the substrate loading / unloading opening 2 side) in the container body 1.
- a plurality of pairs of similar members are arranged in the container body 1 in a vertically stacked state and symmetrically.
- the temporary substrate placement piece 4 is a shelf-like member that protrudes inward from the side wall side of the container body 1, and the lid body 20 is not attached to the substrate loading / unloading opening 2 (that is, the disk-shaped substrate W is on the lid side).
- the retainer 21 is not pushed into the back side
- the outer edge of the disc-shaped substrate W is placed near the protruding end of the temporary substrate placement piece 4.
- No. 6 is for placing the vicinity of the outer edge of the disc-shaped substrate W in a region on the back side when viewed from the substrate loading / unloading opening 2 in the container body 1 when the disc-shaped substrate W is not pushed in by the lid side retainer 21. It is a board
- the substrate platform 6 is formed in an L shape with a small cross-sectional shape, and the disk-shaped substrate W is placed on the horizontal plane portion.
- Such a substrate mounting portion 6 is formed at the distal end portion of the spring-like member 7 extending from the end portion of the back side holding portion 3 in the circumferential direction of the disc-like substrate W.
- the spring-like member 7 is formed integrally with the back side holding portion 3, the substrate temporary placement piece 4, and the connecting portion 5 and has spring properties.
- a vertical surface rising vertically from the substrate mounting portion 6 at the tip of the spring-like member 7 is a contact surface 8 that contacts the outer peripheral surface of the disk-shaped substrate W.
- the disc-like substrate W placed on the temporary substrate placement piece 4 and the substrate placement portion 6 in a state where the lid 20 is not attached to the substrate loading / unloading opening 2 is attached to the substrate 20 by attaching the lid 20.
- the lid side retainer 21 is pushed in from the loading / unloading opening 2 side, the outer edge portion of the disc-shaped substrate W moves to the back side while elastically deforming the spring-like member 7 in a state of being placed on the substrate placement portion 6, It will be in the state where it fitted and fitted in the V-groove part of the back side holding
- the disc-like substrate W that has been pushed in from the substrate loading / unloading opening 2 side by the lid side retainer 21 is not pushed in by the lid side retainer 21 when the lid body 20 is removed, it returns to the shape before elastic deformation.
- the disk-shaped substrate W is pushed back toward the substrate loading / unloading opening 2 by the spring-shaped member 7, and the disk-shaped substrate W is returned to a position where the disk-shaped substrate W is not positioned and held by the back side holding unit 3.
- FIG. 4 is a schematic side sectional view showing a state in which the lid 20 is not attached to the substrate loading / unloading opening 2 of the container body 1.
- FIG. 4 shows a combination of appropriate cross-sectional shapes of a plurality of portions suitable for explanation as a single figure.
- the lid 20 When the lid 20 is removed from the substrate loading / unloading opening 2 and the outer edge portion of the disc-like substrate W is placed on the substrate platform 6 in this manner, as shown in FIG.
- the substrate temporary placement piece 4 and the disk-shaped substrate W overlap each other when viewed in a direction perpendicular to the surface of the substrate.
- each disk-like substrate W is placed on the substrate temporary placement piece 4 on the substrate loading / unloading opening 2 side, and on the back side, the V groove of the back side holding portion 3. It is in the state mounted in the board
- the disc-shaped substrate W When the lid 20 is attached to the substrate loading / unloading opening 2, the disc-shaped substrate W is fitted into the V-shaped grooves of the lid side retainer 21 and the back side holding portion 3 and is positioned and held as schematically shown in FIG. 5. As shown in FIG. 6, the temporary substrate piece 4 and the disc-shaped substrate W do not overlap each other when viewed in the direction perpendicular to the surface of the disc-shaped substrate W. The position of the temporary substrate placement piece 4 in the container body 1 is set as such.
- the disk-shaped substrate W is slightly returned to the substrate loading / unloading opening 2 by the spring-like member 7 and overlaps the temporary substrate placement piece 4 as shown in FIG. As shown, the substrate is placed on the temporary substrate placement piece 4 and the substrate placement portion 6.
- FIG. 7 is a plan sectional view of the substrate storage container according to the second embodiment of the present invention with the lid 20 attached.
- the back side holding part 3 and the substrate placing part 6 are adjacent to each other and are integrally provided together with the temporary substrate placing piece 4 by integral molding.
- FIG. 8 is a perspective view showing the member.
- the spring-like member 7 is formed as an independent part, and its base portion is fixed to the back surface portion of the connecting portion 5.
- a hole 9 is formed between the back side holding part 3 and the substrate mounting part 6 so that the tip of the spring-like member 7 passes through the hole 9 and comes into contact with the outer peripheral surface of the disk-like substrate W. It has become.
- a rear retainer is not provided (may be provided).
- the substrate mounting section 6 is used for mounting the disc-shaped substrate W.
- a back surface holding portion 3 is provided with a V-groove for positioning and fixing the disk-shaped substrate W.
- the flat surface coincides with the lower surface of the disk-shaped substrate W.
- the other configuration is the same as that of the first embodiment.
- the lid 20 is attached to the substrate loading / unloading opening 2 of the container main body 1, the disk-shaped substrate W is pushed inward.
- the substrate temporary placement piece 4 and the disk-shaped substrate W do not overlap each other when viewed in the direction perpendicular to the surface of the disk-shaped substrate W.
- the disk-shaped substrate W is slightly returned to the substrate loading / unloading opening 2 side by the spring-like member 7 and overlaps the temporary substrate placement piece 4 as shown in FIG. As in the case of the first embodiment shown, the substrate is placed on the temporary substrate placement piece 4 and the substrate placement portion 6.
- FIG. 11 and FIG. 13 are plan sectional views of the substrate storage container according to the third embodiment of the present invention in a state where the lid 20 is not attached and an attached state.
- a V-groove-shaped back side holding part 3 and a horizontal surface-like substrate mounting part 6 are integrally formed continuously.
- the back side holding portion 3 forms two V-grooves.
- the lower inclined surface 10 of the inclined surfaces serves as a substrate returning means for guiding the disk-shaped substrate W to the substrate mounting portion 6 obliquely below by gravity. Therefore, it can be said that the back side holding part 3 and the substrate mounting part 6 are integrally formed continuously with the inclined surface 10 as the substrate returning means in between.
- each disk-shaped substrate W is shown in FIGS. However, it is placed on the substrate temporary placement piece 4 on the substrate loading / unloading opening 2 side and placed on the substrate placement portion 6 on the back side without being fitted into the V groove of the back side holding portion 3. ing.
- the disk-shaped substrate W is inserted into the V-shaped groove of the back side holding portion 3 and is positioned and held.
- the temporary substrate piece 4 and the disk-shaped substrate W do not overlap each other when viewed in the direction perpendicular to the surface of the disk-shaped substrate W.
- the disk-shaped substrate W slides down the slope 10 due to gravity and returns to the state where it is placed on the substrate platform 6 as shown in FIG.
- the disc-shaped substrate W is in a state where it overlaps with the temporary substrate placement piece 4 and is placed on the temporary placement piece 4 and the substrate placement portion 6.
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Abstract
Description
図1は、本発明の第1の実施例に係る基板収納容器の斜視図、図2はその平面断面図である。1は、薄い円盤状に形成されている複数の円盤状基板Wを並列に並べた状態で収納するための容器本体である。容器本体1は、円盤状基板Wが出し入れされる際には、各円盤状基板Wが水平の向きに収納される状態に配置される。
2 基板出し入れ開口
3 奥側保持部
4 基板仮置片
6 基板載置部
7 バネ状部材(基板戻し手段)
8 当接面
9 孔
10 斜面(基板戻し手段)
20 蓋体
21 蓋側リテーナ
W 円盤状基板
Claims (9)
- 複数の円盤状基板を並列に並べた状態で収納するための容器本体と、上記容器本体に上記円盤状基板を出し入れするために上記容器本体に形成された基板出し入れ開口と、上記基板出し入れ開口を塞ぐために上記基板出し入れ開口に着脱自在に外側から取り付けられる蓋体と、上記容器本体内の上記基板出し入れ開口から見て奥側の領域において上記各円盤状基板の外縁部を位置決め保持する奥側保持部と、上記蓋体の内壁部に設けられて上記各円盤状基板を上記奥側保持部側に押し込んで位置決め保持する蓋側リテーナと、上記蓋体が上記基板出し入れ開口に取り付けられていない状態の時に上記基板出し入れ開口の近傍領域において上記円盤状基板を載置するための基板仮置片と、を備えた基板収納容器において、
上記円盤状基板が上記蓋側リテーナで押し込まれていない状態の時に上記容器本体内の上記基板出し入れ開口から見て奥側の領域において上記円盤状基板の外縁部付近を載置するための基板載置部と、
上記蓋側リテーナで押し込まれていた上記円盤状基板が上記蓋側リテーナで押し込まれない状態になった時に、上記円盤状基板を上記奥側保持部で位置決め保持されない位置に戻すための基板戻し手段とが設けられ、
上記蓋体が上記基板出し入れ開口から外されて上記円盤状基板が上記奥側保持部で位置決め保持されない状態の時は、上記円盤状基板の面に対し垂直方向に見て上記基板仮置片が上記円盤状基板と重なり合い、上記蓋体が上記基板出し入れ開口に取り付けられて上記円盤状基板が上記奥側保持部で位置決め保持される位置まで押し込まれた状態の時は、上記円盤状基板の面に対し垂直方向に見て上記基板仮置片が上記円盤状基板と重なり合わなくなるように、上記基板仮置片の位置が設定されていることを特徴とする基板収納容器。 - 請求項1の基板収納容器において、上記基板戻し手段が、上記円盤状基板の外周面に当接するバネ状部材である基板収納容器。
- 請求項2の基板収納容器において、上記基板載置部が、上記円盤状基板に当接する上記バネ状部材の当接面に隣接して上記バネ状部材に一体に形成されている基板収納容器。
- 請求項2の基板収納容器において、上記バネ状部材が上記奥側保持部の端部から延出する状態に設けられている基板収納容器。
- 請求項2の基板収納容器において、上記奥側保持部と上記基板載置部とが隣接して一体的に設けられている基板収納容器。
- 請求項5の基板収納容器において、上記奥側保持部と上記基板載置部との間に孔が形成されていて、上記バネ状部材の先端部分が上記孔を通って上記円盤状基板の外周面に当接する基板収納容器。
- 請求項1の基板収納容器において、上記基板戻し手段が、上記円盤状基板を重力で斜め下方に案内する斜面である基板収納容器。
- 請求項7の基板収納容器において、上記奥側保持部と上記基板載置部とが上記斜面を間にして連続的に一体に形成されている基板収納容器。
- 請求項7の基板収納容器において、上記斜面が、上記奥側保持部においてV溝を形成する二面のうちの一方の面である基板収納容器。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2012517005A JP5301731B2 (ja) | 2010-05-24 | 2010-05-24 | 基板収納容器 |
KR1020107020144A KR101129486B1 (ko) | 2010-05-24 | 2010-05-24 | 기판수납용기 |
CN201080066074.5A CN102858653B (zh) | 2010-05-24 | 2010-05-24 | 基板收纳容器 |
US13/579,898 US8910792B2 (en) | 2010-05-24 | 2010-05-24 | Substrate storage container |
PCT/JP2010/058705 WO2011148450A1 (ja) | 2010-05-24 | 2010-05-24 | 基板収納容器 |
DE112010005403.7T DE112010005403B4 (de) | 2010-05-24 | 2010-05-24 | Substratlagerbehälter mit außer Eingriff bringbaren Stützstrukturen |
TW100116395A TWI447055B (zh) | 2010-05-24 | 2011-05-10 | 基板收納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2010/058705 WO2011148450A1 (ja) | 2010-05-24 | 2010-05-24 | 基板収納容器 |
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WO2011148450A1 true WO2011148450A1 (ja) | 2011-12-01 |
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PCT/JP2010/058705 WO2011148450A1 (ja) | 2010-05-24 | 2010-05-24 | 基板収納容器 |
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US (1) | US8910792B2 (ja) |
JP (1) | JP5301731B2 (ja) |
KR (1) | KR101129486B1 (ja) |
CN (1) | CN102858653B (ja) |
DE (1) | DE112010005403B4 (ja) |
TW (1) | TWI447055B (ja) |
WO (1) | WO2011148450A1 (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2013183138A1 (ja) * | 2012-06-07 | 2013-12-12 | ミライアル株式会社 | 衝撃吸収機能を備えた基板収納容器 |
WO2014080454A1 (ja) * | 2012-11-20 | 2014-05-30 | ミライアル株式会社 | 基板収納容器 |
WO2014203359A1 (ja) * | 2013-06-19 | 2014-12-24 | ミライアル株式会社 | 基板収納容器 |
US20150279711A1 (en) * | 2012-10-12 | 2015-10-01 | Miraial Co., Ltd. | Substrate Storing Container |
JP2016058425A (ja) * | 2014-09-05 | 2016-04-21 | 株式会社Screenホールディングス | 基板収納容器、ロードポート装置および基板処理装置 |
JP2016058426A (ja) * | 2014-09-05 | 2016-04-21 | 株式会社Screenホールディングス | 基板収納容器、ロードポート装置および基板処理装置 |
JP2016072368A (ja) * | 2014-09-29 | 2016-05-09 | 株式会社Screenホールディングス | ロードポート装置と、基板処理装置と、基板収納容器のローディング方法 |
JP2017107956A (ja) * | 2015-12-09 | 2017-06-15 | 信越ポリマー株式会社 | 基板収納容器 |
WO2019030863A1 (ja) * | 2017-08-09 | 2019-02-14 | ミライアル株式会社 | 基板収納容器 |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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KR101165611B1 (ko) * | 2010-04-20 | 2012-07-16 | 미라이얼 가부시키가이샤 | 기판수납용기 |
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WO2018154779A1 (ja) * | 2017-02-27 | 2018-08-30 | ミライアル株式会社 | 基板収納容器 |
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CN114287055A (zh) * | 2019-07-19 | 2022-04-05 | 恩特格里斯公司 | 晶片缓冲器 |
US11756816B2 (en) * | 2019-07-26 | 2023-09-12 | Applied Materials, Inc. | Carrier FOUP and a method of placing a carrier |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003522078A (ja) * | 1998-07-10 | 2003-07-22 | フルオロウェア・インコーポレーテッド | クッション付きウェハー容器 |
JP2005191021A (ja) * | 2003-12-02 | 2005-07-14 | Miraial Kk | 薄板支持容器 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07302833A (ja) * | 1994-05-09 | 1995-11-14 | Hitachi Cable Ltd | ウェハ用キャリア |
FR2785270B1 (fr) * | 1998-10-30 | 2001-01-19 | St Microelectronics Sa | Cassette de transport de plaquettes de semiconducteur |
JP2003146390A (ja) * | 2001-11-14 | 2003-05-21 | Kyokuhei Glass Kako Kk | ロック錠を備えた搬送ボックス |
JP2003146388A (ja) * | 2001-11-14 | 2003-05-21 | Kyokuhei Glass Kako Kk | ガラス基板搬送用ボックス |
JP4218260B2 (ja) * | 2002-06-06 | 2009-02-04 | 東京エレクトロン株式会社 | 被処理体の収納容器体及びこれを用いた処理システム |
EP1548820B1 (en) * | 2002-09-11 | 2010-12-15 | Shin-Etsu Polymer Co., Ltd. | Substrate-storing container |
US7100772B2 (en) * | 2003-11-16 | 2006-09-05 | Entegris, Inc. | Wafer container with door actuated wafer restraint |
JP4573566B2 (ja) * | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
JP4667769B2 (ja) * | 2004-06-11 | 2011-04-13 | 信越ポリマー株式会社 | 基板収納容器 |
US20050274625A1 (en) * | 2004-06-14 | 2005-12-15 | Frederick Joslin | Apparatus and method for white layer and recast removal |
JP4584023B2 (ja) * | 2005-05-17 | 2010-11-17 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
JP2007123673A (ja) * | 2005-10-31 | 2007-05-17 | Asyst Shinko Inc | 物品収納用容器の防振機構 |
US7922000B2 (en) * | 2006-02-15 | 2011-04-12 | Miraial Co., Ltd. | Thin plate container with a stack of removable loading trays |
KR101395467B1 (ko) * | 2006-06-13 | 2014-05-14 | 엔테그리스, 아이엔씨. | 재사용이 가능한 웨이퍼 용기용 탄성 쿠션 |
US20070295638A1 (en) * | 2006-06-21 | 2007-12-27 | Vantec Co., Ltd. | Wafer transportable container |
JP4920387B2 (ja) * | 2006-12-01 | 2012-04-18 | 信越半導体株式会社 | 基板収納容器 |
KR101165611B1 (ko) * | 2010-04-20 | 2012-07-16 | 미라이얼 가부시키가이샤 | 기판수납용기 |
-
2010
- 2010-05-24 WO PCT/JP2010/058705 patent/WO2011148450A1/ja active Application Filing
- 2010-05-24 CN CN201080066074.5A patent/CN102858653B/zh active Active
- 2010-05-24 DE DE112010005403.7T patent/DE112010005403B4/de active Active
- 2010-05-24 US US13/579,898 patent/US8910792B2/en active Active
- 2010-05-24 KR KR1020107020144A patent/KR101129486B1/ko active IP Right Grant
- 2010-05-24 JP JP2012517005A patent/JP5301731B2/ja active Active
-
2011
- 2011-05-10 TW TW100116395A patent/TWI447055B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003522078A (ja) * | 1998-07-10 | 2003-07-22 | フルオロウェア・インコーポレーテッド | クッション付きウェハー容器 |
JP2005191021A (ja) * | 2003-12-02 | 2005-07-14 | Miraial Kk | 薄板支持容器 |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2013183138A1 (ja) * | 2012-06-07 | 2016-01-21 | ミライアル株式会社 | 衝撃吸収機能を備えた基板収納容器 |
WO2013183138A1 (ja) * | 2012-06-07 | 2013-12-12 | ミライアル株式会社 | 衝撃吸収機能を備えた基板収納容器 |
US9698033B2 (en) * | 2012-10-12 | 2017-07-04 | Miraial Co., Ltd. | Substrate storing container |
US20150279711A1 (en) * | 2012-10-12 | 2015-10-01 | Miraial Co., Ltd. | Substrate Storing Container |
JPWO2014057572A1 (ja) * | 2012-10-12 | 2016-08-25 | ミライアル株式会社 | 基板収納容器 |
WO2014080454A1 (ja) * | 2012-11-20 | 2014-05-30 | ミライアル株式会社 | 基板収納容器 |
US9768045B2 (en) | 2012-11-20 | 2017-09-19 | Miraial Co., Ltd. | Substrate storing container |
JPWO2014080454A1 (ja) * | 2012-11-20 | 2017-01-05 | ミライアル株式会社 | 基板収納容器 |
WO2014203359A1 (ja) * | 2013-06-19 | 2014-12-24 | ミライアル株式会社 | 基板収納容器 |
US9960064B2 (en) | 2013-06-19 | 2018-05-01 | Miraial Co., Ltd. | Substrate storing container |
JPWO2014203359A1 (ja) * | 2013-06-19 | 2017-02-23 | ミライアル株式会社 | 基板収納容器 |
JP2016058425A (ja) * | 2014-09-05 | 2016-04-21 | 株式会社Screenホールディングス | 基板収納容器、ロードポート装置および基板処理装置 |
JP2016058426A (ja) * | 2014-09-05 | 2016-04-21 | 株式会社Screenホールディングス | 基板収納容器、ロードポート装置および基板処理装置 |
JP2016072368A (ja) * | 2014-09-29 | 2016-05-09 | 株式会社Screenホールディングス | ロードポート装置と、基板処理装置と、基板収納容器のローディング方法 |
JP2017107956A (ja) * | 2015-12-09 | 2017-06-15 | 信越ポリマー株式会社 | 基板収納容器 |
WO2019030863A1 (ja) * | 2017-08-09 | 2019-02-14 | ミライアル株式会社 | 基板収納容器 |
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US11222800B2 (en) | 2017-08-09 | 2022-01-11 | Mtraial Co., Ltd. | Substrate storage container |
WO2019097862A1 (ja) * | 2017-11-16 | 2019-05-23 | 信越ポリマー株式会社 | 基板収納容器 |
JP2019091856A (ja) * | 2017-11-16 | 2019-06-13 | 信越ポリマー株式会社 | 基板収納容器 |
JP6992240B2 (ja) | 2017-11-16 | 2022-01-13 | 信越ポリマー株式会社 | 基板収納容器 |
US11735449B2 (en) | 2017-11-16 | 2023-08-22 | Shin-Etsu Polymer Co., Ltd. | Substrate storage container |
Also Published As
Publication number | Publication date |
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DE112010005403T5 (de) | 2013-01-10 |
TW201200435A (en) | 2012-01-01 |
US20130056388A1 (en) | 2013-03-07 |
JP5301731B2 (ja) | 2013-09-25 |
DE112010005403B4 (de) | 2016-06-02 |
TWI447055B (zh) | 2014-08-01 |
JPWO2011148450A1 (ja) | 2013-07-25 |
CN102858653A (zh) | 2013-01-02 |
KR101129486B1 (ko) | 2012-03-29 |
US8910792B2 (en) | 2014-12-16 |
CN102858653B (zh) | 2014-09-10 |
KR20120006428A (ko) | 2012-01-18 |
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