WO2011062182A1 - 芳香族スルホニウム塩化合物 - Google Patents
芳香族スルホニウム塩化合物 Download PDFInfo
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- WO2011062182A1 WO2011062182A1 PCT/JP2010/070469 JP2010070469W WO2011062182A1 WO 2011062182 A1 WO2011062182 A1 WO 2011062182A1 JP 2010070469 W JP2010070469 W JP 2010070469W WO 2011062182 A1 WO2011062182 A1 WO 2011062182A1
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- carbon atoms
- group
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- -1 Aromatic sulfonium salt compound Chemical class 0.000 title claims abstract description 672
- 150000001450 anions Chemical class 0.000 claims abstract description 58
- 239000000203 mixture Substances 0.000 claims abstract description 49
- 238000010538 cationic polymerization reaction Methods 0.000 claims abstract description 24
- 239000003505 polymerization initiator Substances 0.000 claims abstract description 22
- 125000004432 carbon atom Chemical group C* 0.000 claims description 203
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 70
- 125000000217 alkyl group Chemical group 0.000 claims description 54
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 51
- 125000003118 aryl group Chemical group 0.000 claims description 48
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 40
- 229910052799 carbon Inorganic materials 0.000 claims description 39
- 125000005843 halogen group Chemical group 0.000 claims description 29
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 26
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 24
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 23
- 125000003107 substituted aryl group Chemical group 0.000 claims description 21
- 125000001424 substituent group Chemical group 0.000 claims description 19
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 claims description 12
- 125000005309 thioalkoxy group Chemical group 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 abstract description 75
- 239000002253 acid Substances 0.000 abstract description 30
- 150000001768 cations Chemical class 0.000 abstract description 12
- 125000006702 (C1-C18) alkyl group Chemical group 0.000 abstract 3
- FNYWFRSQRHGKJT-UHFFFAOYSA-N 3-ethyl-3-[(3-ethyloxetan-3-yl)methoxymethyl]oxetane Chemical compound C1OCC1(CC)COCC1(CC)COC1 FNYWFRSQRHGKJT-UHFFFAOYSA-N 0.000 description 21
- 150000001721 carbon Chemical group 0.000 description 21
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 19
- 239000004593 Epoxy Substances 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 17
- 125000004185 ester group Chemical group 0.000 description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 15
- 125000001931 aliphatic group Chemical group 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 125000002091 cationic group Chemical group 0.000 description 12
- URSLCTBXQMKCFE-UHFFFAOYSA-N dihydrogenborate Chemical compound OB(O)[O-] URSLCTBXQMKCFE-UHFFFAOYSA-N 0.000 description 12
- 239000000126 substance Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- 239000002585 base Substances 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 10
- 125000004104 aryloxy group Chemical group 0.000 description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 9
- 229920002554 vinyl polymer Polymers 0.000 description 9
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 8
- XAKBSHICSHRJCL-UHFFFAOYSA-N [CH2]C(=O)C1=CC=CC=C1 Chemical group [CH2]C(=O)C1=CC=CC=C1 XAKBSHICSHRJCL-UHFFFAOYSA-N 0.000 description 8
- 239000000654 additive Substances 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 7
- 229910052787 antimony Inorganic materials 0.000 description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 238000004128 high performance liquid chromatography Methods 0.000 description 7
- 239000011630 iodine Substances 0.000 description 7
- 229910052740 iodine Inorganic materials 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 7
- 229910052717 sulfur Inorganic materials 0.000 description 7
- 125000006017 1-propenyl group Chemical group 0.000 description 6
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 6
- 125000004135 2-norbornyl group Chemical group [H]C1([H])C([H])([H])C2([H])C([H])([H])C1([H])C([H])([H])C2([H])* 0.000 description 6
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 6
- 125000004861 4-isopropyl phenyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 6
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 6
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 6
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 6
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 6
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 125000003670 adamantan-2-yl group Chemical group [H]C1([H])C(C2([H])[H])([H])C([H])([H])C3([H])C([*])([H])C1([H])C([H])([H])C2([H])C3([H])[H] 0.000 description 6
- 125000002723 alicyclic group Chemical group 0.000 description 6
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 6
- 229910052794 bromium Inorganic materials 0.000 description 6
- 125000005997 bromomethyl group Chemical group 0.000 description 6
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 6
- 125000000490 cinnamyl group Chemical group C(C=CC1=CC=CC=C1)* 0.000 description 6
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 6
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000004772 dichloromethyl group Chemical group [H]C(Cl)(Cl)* 0.000 description 6
- 125000006001 difluoroethyl group Chemical group 0.000 description 6
- 125000001028 difluoromethyl group Chemical group [H]C(F)(F)* 0.000 description 6
- 125000005982 diphenylmethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])(*)C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 6
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 125000006343 heptafluoro propyl group Chemical group 0.000 description 6
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 6
- 125000004491 isohexyl group Chemical group C(CCC(C)C)* 0.000 description 6
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000000555 isopropenyl group Chemical group [H]\C([H])=C(\*)C([H])([H])[H] 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000005246 nonafluorobutyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 6
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 6
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 description 6
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000006340 pentafluoro ethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 description 6
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000005504 styryl group Chemical group 0.000 description 6
- 125000005415 substituted alkoxy group Chemical group 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 125000006000 trichloroethyl group Chemical group 0.000 description 6
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 6
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 6
- 125000002221 trityl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C([*])(C1=C(C(=C(C(=C1[H])[H])[H])[H])[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 6
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 125000002947 alkylene group Chemical group 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 5
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 5
- XUVKSPPGPPFPQN-UHFFFAOYSA-N 10-Methyl-9(10H)-acridone Chemical compound C1=CC=C2N(C)C3=CC=CC=C3C(=O)C2=C1 XUVKSPPGPPFPQN-UHFFFAOYSA-N 0.000 description 4
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 239000007983 Tris buffer Substances 0.000 description 4
- 125000000129 anionic group Chemical group 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 238000010511 deprotection reaction Methods 0.000 description 4
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 150000005846 sugar alcohols Polymers 0.000 description 4
- LWNGJAHMBMVCJR-UHFFFAOYSA-N (2,3,4,5,6-pentafluorophenoxy)boronic acid Chemical compound OB(O)OC1=C(F)C(F)=C(F)C(F)=C1F LWNGJAHMBMVCJR-UHFFFAOYSA-N 0.000 description 3
- PHBVXHIVWULVNF-UHFFFAOYSA-N (4-fluorophenoxy)boronic acid Chemical compound OB(O)OC1=CC=C(F)C=C1 PHBVXHIVWULVNF-UHFFFAOYSA-N 0.000 description 3
- JCLQIFDHIICRHU-UHFFFAOYSA-N (methyldisulfanyl) hydrogen carbonate Chemical group CSSOC(O)=O JCLQIFDHIICRHU-UHFFFAOYSA-N 0.000 description 3
- GKNWQHIXXANPTN-UHFFFAOYSA-N 1,1,2,2,2-pentafluoroethanesulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)F GKNWQHIXXANPTN-UHFFFAOYSA-N 0.000 description 3
- WACNXHCZHTVBJM-UHFFFAOYSA-N 1,2,3,4,5-pentafluorobenzene Chemical class FC1=CC(F)=C(F)C(F)=C1F WACNXHCZHTVBJM-UHFFFAOYSA-N 0.000 description 3
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 3
- 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 3
- QYASBSHCEJENGL-UHFFFAOYSA-N 2,3,4-trifluorobenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=C(F)C(F)=C1F QYASBSHCEJENGL-UHFFFAOYSA-N 0.000 description 3
- VDCOTRGOYNBXRU-UHFFFAOYSA-N 2,3-difluorobenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC(F)=C1F VDCOTRGOYNBXRU-UHFFFAOYSA-N 0.000 description 3
- 125000001917 2,4-dinitrophenyl group Chemical group [H]C1=C([H])C(=C([H])C(=C1*)[N+]([O-])=O)[N+]([O-])=O 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- VYZCFAPUHSSYCC-UHFFFAOYSA-N 2-amino-5-chloro-4-methylbenzenesulfonic acid Chemical compound CC1=CC(N)=C(S(O)(=O)=O)C=C1Cl VYZCFAPUHSSYCC-UHFFFAOYSA-N 0.000 description 3
- LTASFWDWBYFZQQ-UHFFFAOYSA-N 2-amino-5-nitrobenzenesulfonic acid Chemical compound NC1=CC=C([N+]([O-])=O)C=C1S(O)(=O)=O LTASFWDWBYFZQQ-UHFFFAOYSA-N 0.000 description 3
- JIFAWAXKXDTUHW-UHFFFAOYSA-N 2-fluorobenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1F JIFAWAXKXDTUHW-UHFFFAOYSA-N 0.000 description 3
- 125000006290 2-hydroxybenzyl group Chemical group [H]OC1=C(C([H])=C([H])C([H])=C1[H])C([H])([H])* 0.000 description 3
- 125000001622 2-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C(*)C([H])=C([H])C2=C1[H] 0.000 description 3
- 125000006479 2-pyridyl methyl group Chemical group [H]C1=C([H])C([H])=C([H])C(=N1)C([H])([H])* 0.000 description 3
- 125000004189 3,4-dichlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(Cl)C([H])=C1* 0.000 description 3
- 125000006291 3-hydroxybenzyl group Chemical group [H]OC1=C([H])C([H])=C([H])C(=C1[H])C([H])([H])* 0.000 description 3
- QOXOZONBQWIKDA-UHFFFAOYSA-N 3-hydroxypropyl Chemical group [CH2]CCO QOXOZONBQWIKDA-UHFFFAOYSA-N 0.000 description 3
- 125000003143 4-hydroxybenzyl group Chemical group [H]C([*])([H])C1=C([H])C([H])=C(O[H])C([H])=C1[H] 0.000 description 3
- 125000004172 4-methoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C([H])C([H])=C1* 0.000 description 3
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- NQQWFVUVBGSGQN-UHFFFAOYSA-N phosphoric acid;piperazine Chemical compound OP(O)(O)=O.C1CNCCN1 NQQWFVUVBGSGQN-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229960001954 piperazine phosphate Drugs 0.000 description 1
- 229920000636 poly(norbornene) polymer Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- YLLIGHVCTUPGEH-UHFFFAOYSA-M potassium;ethanol;hydroxide Chemical compound [OH-].[K+].CCO YLLIGHVCTUPGEH-UHFFFAOYSA-M 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229960000380 propiolactone Drugs 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- MWWATHDPGQKSAR-UHFFFAOYSA-N propyne Chemical compound CC#C MWWATHDPGQKSAR-UHFFFAOYSA-N 0.000 description 1
- 229910052903 pyrophyllite Inorganic materials 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- APSBXTVYXVQYAB-UHFFFAOYSA-M sodium docusate Chemical group [Na+].CCCCC(CC)COC(=O)CC(S([O-])(=O)=O)C(=O)OCC(CC)CCCC APSBXTVYXVQYAB-UHFFFAOYSA-M 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 235000012424 soybean oil Nutrition 0.000 description 1
- 239000003549 soybean oil Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000005463 sulfonylimide group Chemical group 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 150000007984 tetrahydrofuranes Chemical class 0.000 description 1
- 125000004187 tetrahydropyran-2-yl group Chemical group [H]C1([H])OC([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003552 thietanes Chemical class 0.000 description 1
- VOVUARRWDCVURC-UHFFFAOYSA-N thiirane Chemical compound C1CS1 VOVUARRWDCVURC-UHFFFAOYSA-N 0.000 description 1
- 150000003553 thiiranes Chemical class 0.000 description 1
- 150000003572 thiolanes Chemical class 0.000 description 1
- 125000004665 trialkylsilyl group Chemical group 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D219/00—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems
- C07D219/04—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to carbon atoms of the ring system
- C07D219/06—Oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/68—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/68—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
- C08G59/681—Metal alcoholates, phenolates or carboxylates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0041—Photosensitive materials providing an etching agent upon exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
Definitions
- the present invention relates to a novel aromatic sulfonium salt compound, and more specifically, an aromatic sulfonium salt compound, a photoacid generator and a cationic polymerization initiator using the same, and a resist composition and a cationic polymerizable composition containing them.
- a novel aromatic sulfonium salt compound and more specifically, an aromatic sulfonium salt compound, a photoacid generator and a cationic polymerization initiator using the same, and a resist composition and a cationic polymerizable composition containing them.
- a sulfonium salt compound is a substance that generates an acid when irradiated with energy rays such as light.
- Patent Documents 1 to 3 disclose an aromatic sulfonium salt compound, a photoacid generator comprising the same, and a photopolymerizable composition containing the photoacid generator.
- these photoacid generators are not sufficiently developable, and when used as a negative resist, fine patterning is not easy.
- an object of the present invention is to provide a photoacid generator having high developability and a cationic polymerization initiator having high curability, and also provide a resist composition and a cationic polymerizable composition using them. There is.
- the present inventors have found that an aromatic sulfonium salt compound having a specific structure can solve the above problems, and have reached the present invention. That is, the present invention provides a novel aromatic sulfonium salt compound represented by the following general formula (I).
- R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 and R 10 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, A nitro group, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted carbon atom Represents an arylalkyl group of formula 7-20, R 11 , R 12 , R 13 , R 14 , R 15 , R 16 and R 17 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, or an unsubstituted or substituted carbon atom having 1 carbon atom.
- R 18 represents a hydrogen atom, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted group.
- R 1 ⁇ alkyl group having 1 to 18 carbon atoms represented by R 18 an aryl group having 6 to 20 carbon atoms represented by R 1 ⁇ R 10 and R 18 and R 1 ⁇ R 10 and R 18,
- the methylene chain in the arylalkyl group having 7 to 20 carbon atoms represented by may be interrupted by —O—, —S—, —CO—, —CO—O— or —O—CO—.
- X 1 - represents a monovalent anion.
- the present invention also provides a photoacid generator comprising the above aromatic sulfonium salt compound.
- the present invention also provides a resist composition comprising the photoacid generator.
- the present invention also provides a cationic polymerization initiator comprising the above aromatic sulfonium salt compound.
- the present invention provides a cationically polymerizable composition comprising the above cationic polymerization initiator.
- the aromatic sulfonium salt compound of the present invention a photoacid generator having high developability can be obtained. Since the photopolymerizable composition photoresist containing the photoacid generator has high sensitivity and high resolution, it is a semiconductor integrated circuit sensitive to radiation such as ultraviolet rays, electron beams, and X-rays, TFT circuit for LCD, and circuit creation It is useful as a negative resist for producing a mask for use. Furthermore, the aromatic sulfonium salt compound of the present invention is also useful as a cationic polymerization initiator, and by using this, a cationic polymerizable composition having excellent curability can be obtained.
- Examples of the halogen atom represented by R 1 to R 17 in the general formula (I) include fluorine, chlorine, bromine and iodine.
- Examples of the unsubstituted or substituted alkyl group having 1 to 18 carbon atoms represented by R 1 to R 18 in the general formula (I) include methyl, ethyl, propyl, isopropyl, butyl, and s-butyl.
- T-butyl isobutyl, amyl, isoamyl, t-amyl, hexyl, cyclohexyl, isohexyl, 2-ethylhexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, isotridecyl, tetradecyl, hexadecyl, heptadecyl, octadecyl, 1 -Adamantyl, 2-adamantyl, 2-methyl-1-adamantyl, 2-methyl-2-adamantyl, 2-ethyl-1-adamantyl, 2-ethyl-2-adamantyl, 2-norbornyl, 2-norbornylmethyl, Vinyl, allyl, isopropenyl, 1 Propenyl, fluoromethyl, difluoromethyl, trifluor
- the methylene chain in the alkyl group, aryl group and arylalkyl group may be interrupted by —O—, —S—, —CO—, —CO—O— or —O—CO—.
- an unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms an unsubstituted or substituted aryloxy group having 6 to 20 carbon atoms, an unsubstituted or substituted group
- Examples thereof include thioalkoxy groups having 1 to 18 carbon atoms, unsubstituted or substituted thiophenoxy groups having 6 to 20 carbon atoms, and ester groups having 1 to 12 carbon atoms that are unsubstituted or substituted. It is done.
- Examples of the unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms include methoxy, ethoxy, propyloxy, isopropyloxy, butyloxy, s-butyloxy, t-butyloxy, isobutyloxy, pentyloxy, isoamyloxy, t-amyloxy, hexyloxy, cyclohexyloxy, cyclohexylmethyloxy, tetrahydrofuranyloxy, tetrahydropyranyloxy, hydroxymethyloxy, 1-hydroxyethyloxy, 2-hydroxyethyloxy, 3-hydroxypropyloxy, 2-hydroxypropyloxy 2,3-dihydroxypropyloxy, 2-hydroxy-1-methylethyloxy, 2-hydroxybutyloxy, 4-hydroxybutyloxy, 2,3-dihydroxy Tiloxy, 3,4-dihydroxybutyloxy, 2,3,4-trihydroxybutyloxy, 2- (2-hydroxyethyloxy
- Examples of the unsubstituted or substituted thioalkoxy group having 1 to 18 carbon atoms include methylthio, ethylthio, propylthio, isopropylthio, butylthio, s-butylthio, t-butylthio, isobutylthio, amylthio, isoamylthio, t -Amylthio, hexylthio, cyclohexylthio, adamantylthio, 2-hydroxyethylthio, 3-hydroxypropylthio, 2,3-dihydroxypropylthio, 2-hydroxy-1-methylpropylthio and the like,
- Examples of the unsubstituted or substituted thiophenoxy group having 6 to 20 carbon atoms include phenylthio and hydroxyphenylthio.
- Examples of the unsubstituted or substituted ester group having 1 to 12 carbon atoms include methoxycarbonyl, ethoxycarbonyl, isopropyloxycarbonyl, phenoxycarbonyl, acetoxy, methoxyacetyloxy, propionyloxy, butyryloxy, t-butylcarbonyloxy Benzoyloxy, adamantylcarbonyloxy, 2-hydroxyethoxycarbonyl, 3-hydroxypropyloxycarbonyl, 4-hydroxyphenoxycarbonyl, 3-hydroxypropionyloxy, 4-hydroxybutyryloxy, 4-hydroxybenzoyloxy and the like.
- An arylalkyl group having 7 to 20 carbon atoms, an aryloxy group having 6 to 20 carbon atoms represented by R 1 to R 10 and R 18 in the general formula (I), and the general formula (I) thiophenoxy group having 6 to 20 carbon atoms represented by R 1 ⁇ R 10 and R 18 in It may have a substituent.
- substituents include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl, pentyl, isopentyl, t-pentyl, neopentyl, hexyl, isohexyl, heptyl, octyl, 2-ethylhexyl, nonyl , Decyl, undecyl, dodecyl, tridecyl, isotridecyl, myristyl, palmityl, stearyl, cyclopropyl, cyclohexyl, 1-adamantyl, 2-adamantyl, 2-methyl-1-adamantyl, 2-methyl-2-adamantyl, 2-ethyl- 1-adamantyl, 2-ethyl-2-adamantyl, 2-norbornyl, 2-norbornylmethyl, camphor-10-yl, vinyl,
- anion represented by X 1 ⁇ in the general formula (I) examples include halogen anions such as chlorine anion, bromine anion, iodine anion, and fluorine anion; perchlorate anion, chloric acid Inorganic anions such as anion, thiocyanate anion, hexafluorophosphate anion, antimony hexafluoride anion, arsenic hexafluoride anion, boron tetrafluoride anion; methanesulfonate ion, fluorosulfone Acid ion, benzenesulfonic acid anion, toluenesulfonic acid anion, 1-naphthylsulfonic acid anion, 2-naphthylsulfonic acid anion, trifluoromethanesulfonic acid anion, pentafluoroethanesulfonic acid anion, heptafluoropropanesulfone Acid
- alkylsulfonate ions and fluoro-substituted alkylsulfonate ions examples include alkylsulfonimides and fluoro-substituted alkylsulfonimides substituted with acryloyloxy groups and methacryloyloxy groups, and those substituted with aliphatic cyclic alkyl groups such as norbornyl groups and adamantyl groups.
- quencher anions that have the function of de-exciting (quenching) active molecules in the excited state
- ferrocenes that have an anionic group such as a carboxyl group, phosphonic acid group, or sulfonic acid group on the cyclopentadienyl ring.
- metallocene compound anions such as luteocene can be used as necessary.
- an organic sulfonate anion is preferable from the viewpoint of safety and reactivity (deprotection reaction and crosslinking reaction).
- a compound represented by the following general formula (II) is preferable because a photoacid generator having high solubility in a solvent and high developability can be obtained.
- R 21 , R 22 , R 23 , R 24 , R 25 , R 26 , R 27 , R 28 , R 29 and R 30 are each independently a hydrogen atom, halogen atom, hydroxyl group, A nitro group, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted carbon atom Represents an arylalkyl group of formula 7-20, R 31 , R 32 , R 33 , R 34 , R 35 , R 36 and R 37 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, or an unsubstituted or substituted carbon atom having 1 carbon atom.
- R 38 represents an unsubstituted alkyl group having 1 to 10 carbon atoms
- R 21 ⁇ alkyl group having 1 to 18 carbon atoms represented by R 38 R 21 ⁇ aryl group having 6 to 20 carbon atoms represented by R 30, and the carbon atoms represented by R 21 ⁇ R 30
- the arylalkyl group of the number 7-20 has R 21 ⁇ alkyl group having 1 to 18 carbon atoms represented by R 38, R 21 ⁇ aryl group having 6 to 20 carbon atoms represented by R 30, and the carbon atoms represented by R 21 ⁇ R 30
- the methylene chain in the arylalkyl group of the number 7 to 20 may be interrupted by —O—, —S—, —CO—, —CO—O— or —O—CO—
- X 2 ⁇ represents a monovalent anion.
- R 21 to R 30 is a hydroxyl group, a thioalkoxy group having 1 to 18 carbon atoms substituted with a hydroxyl group, or a thiophenoxy group substituted with a hydroxyl group.
- Examples of the halogen atom represented by R 21 to R 37 in the general formula (II) include fluorine, chlorine, bromine and iodine.
- an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms represented by R 21 to R 37 and an unsubstituted carbon atom having 1 to 10 carbon atoms represented by R 38
- Examples of the alkyl group include methyl, ethyl, propyl, isopropyl, butyl, s-butyl, t-butyl, isobutyl, amyl, isoamyl, t-amyl, hexyl, cyclohexyl, isohexyl, 2-ethylhexyl, heptyl, octyl, nonyl, Decyl, undecyl, dodecyl, tridecyl, isotridecyl, tetradecyl,
- Examples of the unsubstituted or substituted aryl group having 6 to 20 carbon atoms represented by R 21 to R 30 in the general formula (II) include phenyl, naphthyl, 2-methylphenyl, and 3-methylphenyl.
- the alkyl group, aryl group, and methylene chain in the arylalkyl group may be interrupted by —O—, —S—, —CO—, —CO—O— or —O—CO—.
- an unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms an unsubstituted or substituted aryloxy group having 6 to 20 carbon atoms, an unsubstituted or substituted group Examples thereof include thioalkoxy groups having 1 to 18 carbon atoms, unsubstituted or substituted thiophenoxy groups having 6 to 20 carbon atoms, and ester groups having 1 to 12 carbon atoms that are unsubstituted or substituted. It is done.
- Examples of the unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms include methoxy, ethoxy, propyloxy, isopropyloxy, butyloxy, s-butyloxy, t-butyloxy, isobutyloxy, pentyloxy, isoamyloxy, t-amyloxy, hexyloxy, cyclohexyloxy, cyclohexylmethyloxy, tetrahydrofuranyloxy, tetrahydropyranyloxy, hydroxymethyloxy, 1-hydroxyethyloxy, 2-hydroxyethyloxy, 3-hydroxypropyloxy, 2-hydroxypropyloxy 2,3-dihydroxypropyloxy, 2-hydroxy-1-methylethyloxy, 2-hydroxybutyloxy, 4-hydroxybutyloxy, 2,3-dihydroxy Tiloxy, 3,4-dihydroxybutyloxy, 2,3,4-trihydroxybutyloxy, 2- (2-hydroxyethyloxy
- Examples of the unsubstituted or substituted thioalkoxy group having 1 to 18 carbon atoms include methylthio, ethylthio, propylthio, isopropylthio, butylthio, s-butylthio, t-butylthio, isobutylthio, amylthio, isoamylthio, t -Amylthio, hexylthio, cyclohexylthio, adamantylthio, 2-hydroxyethylthio, 3-hydroxypropylthio, 2,3-dihydroxypropylthio, 2-hydroxy-1-methylpropylthio and the like,
- Examples of the unsubstituted or substituted thiophenoxy group having 6 to 20 carbon atoms include phenylthio and hydroxyphenylthio.
- Examples of the unsubstituted or substituted ester group having 1 to 12 carbon atoms include methoxycarbonyl, ethoxycarbonyl, isopropyloxycarbonyl, phenoxycarbonyl, acetoxy, methoxyacetyloxy, propionyloxy, butyryloxy, t-butylcarbonyloxy Benzoyloxy, adamantylcarbonyloxy, 2-hydroxyethoxycarbonyl, 3-hydroxypropyloxycarbonyl, 4-hydroxyphenoxycarbonyl, 3-hydroxypropionyloxy, 4-hydroxybutyryloxy, 4-hydroxybenzoyloxy and the like.
- the general formula (II) an alkyl group of R 21 ⁇ 1 carbon atoms represented by R 37 ⁇ 18 in the general formula (II) in the alkoxy R 21 ⁇ R 37 from 1 to 18 carbon atoms represented by A thioalkoxy group having 1 to 18 carbon atoms represented by R 21 to R 37 in the general formula (II), and 1 to carbon atoms represented by R 21 to R 37 in the general formula (II).
- substituents include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl, pentyl, isopentyl, t-pentyl, neopentyl, hexyl, isohexyl, heptyl, octyl, 2-ethylhexyl, nonyl , Decyl, undecyl, dodecyl, tridecyl, isotridecyl, myristyl, palmityl, stearyl, cyclopropyl, cyclohexyl, 1-adamantyl, 2-adamantyl, 2-methyl-1-adamantyl, 2-methyl-2-adamantyl, 2-ethyl- 1-adamantyl, 2-ethyl-2-adamantyl, 2-norbornyl, 2-norbornylmethyl, camphor-10-yl, vinyl,
- Examples of the anion represented by X 2 ⁇ in the general formula (II) include a halogen anion such as a chlorine anion, a bromine anion, an iodine anion, and a fluorine anion; a perchlorate anion, and a chloric acid Inorganic anions such as anion, thiocyanate anion, hexafluorophosphate anion, antimony hexafluoride anion, arsenic hexafluoride anion, boron tetrafluoride anion; methanesulfonate ion, fluorosulfone Acid ion, benzenesulfonic acid anion, toluenesulfonic acid anion, 1-naphthylsulfonic acid anion, 2-naphthylsulfonic acid anion, trifluoromethanesulfonic acid anion, pentafluoroethanesulfonic acid ani
- alkylsulfonate ions and fluoro-substituted alkylsulfonate ions examples include alkylsulfonimides and fluoro-substituted alkylsulfonimides substituted with acryloyloxy groups and methacryloyloxy groups, and those substituted with aliphatic cyclic alkyl groups such as norbornyl groups and adamantyl groups.
- quencher anions that have the function of de-exciting (quenching) active molecules in the excited state
- ferrocenes that have an anionic group such as a carboxyl group, phosphonic acid group, or sulfonic acid group on the cyclopentadienyl ring.
- metallocene compound anions such as luteocene can be used as necessary.
- an organic sulfonate anion is preferable from the viewpoint of safety and reactivity (deprotection reaction and crosslinking reaction).
- a compound represented by the following general formula (III) is preferable because a cationic polymerization initiator having high curability can be obtained.
- R 41 , R 42 , R 43 , R 44 , R 45 , R 46 , R 47 , R 48 , R 49 and R 50 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, A nitro group, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted carbon atom Represents an arylalkyl group of formula 7-20, R 51 , R 52 , R 53 , R 54 , R 55 , R 56 and R 57 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, or an unsubstituted or substituted carbon atom having 1 carbon atom.
- R 58 is a hydrogen atom, a substituted alkyl group having 1 to 10 carbon atoms, an unsubstituted or substituted alkyl group having 11 to 18 carbon atoms, an unsubstituted or substituted carbon atom number
- An alkyl group having 1 to 18 carbon atoms represented by R 41 to R 58 an aryl group having 6 to 20 carbon atoms represented by R 41 to R 50 and R 58 ,
- Examples of the halogen atom represented by R 41 to R 57 in the general formula (III) include fluorine, chlorine, bromine and iodine.
- An unsubstituted or substituted alkyl group having 1 to 18 carbon atoms represented by R 41 to R 57 in the general formula (III), and a substituted carbon atom having 1 substituent represented by R 58 As the alkyl group having ⁇ 10 and the unsubstituted or substituted alkyl group having 11 to 18 carbon atoms represented by R 58 , methyl, ethyl, propyl, isopropyl, butyl, s-butyl, t-butyl , Isobutyl, amyl, isoamyl, t-amyl, hexyl, cyclohexyl, isohexyl, 2-ethylhexyl, heptyl, octyl, nonyl, decyl, undecyl
- Examples of the unsubstituted or substituted arylalkyl group having 7 to 20 carbon atoms represented by R 41 to R 50 and R 58 in the general formula (III) include benzyl, phenethyl, phenacyl, 2-phenyl Propan-2-yl, diphenylmethyl, triphenylmethyl, styryl, cinnamyl, 2-hydroxybenzyl, 3-hydroxybenzyl, 4-hydroxybenzyl, 2-hydroxyphenethyl, 3-hydroxyphenethyl, 4-hydroxyphenethyl, 2-hydroxy Examples thereof include phenacyl, 3-hydroxyphenacyl, 4-hydroxyphenacyl, 2-phenoxyethyl, 2-phenylthioethyl and the like.
- the methylene chain in the alkyl group, aryl group and arylalkyl group may be interrupted by —O—, —S—, —CO—, —CO—O— or —O—CO—.
- an unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms an unsubstituted or substituted aryloxy group having 6 to 20 carbon atoms, an unsubstituted or substituted group
- Examples thereof include thioalkoxy groups having 1 to 18 carbon atoms, unsubstituted or substituted thiophenoxy groups having 6 to 20 carbon atoms, and ester groups having 1 to 12 carbon atoms that are unsubstituted or substituted. It is done.
- Examples of the unsubstituted or substituted alkoxy group having 1 to 18 carbon atoms include methoxy, ethoxy, propyloxy, isopropyloxy, butyloxy, s-butyloxy, t-butyloxy, isobutyloxy, pentyloxy, isoamyloxy, t-amyloxy, hexyloxy, cyclohexyloxy, cyclohexylmethyloxy, tetrahydrofuranyloxy, tetrahydropyranyloxy, hydroxymethyloxy, 1-hydroxyethyloxy, 2-hydroxyethyloxy, 3-hydroxypropyloxy, 2-hydroxypropyloxy 2,3-dihydroxypropyloxy, 2-hydroxy-1-methylethyloxy, 2-hydroxybutyloxy, 4-hydroxybutyloxy, 2,3-dihydroxy Tiloxy, 3,4-dihydroxybutyloxy, 2,3,4-trihydroxybutyloxy, 2- (2-hydroxyethyloxy
- Examples of the unsubstituted or substituted thioalkoxy group having 1 to 18 carbon atoms include methylthio, ethylthio, propylthio, isopropylthio, butylthio, s-butylthio, t-butylthio, isobutylthio, amylthio, isoamylthio, t -Amylthio, hexylthio, cyclohexylthio, adamantylthio, 2-hydroxyethylthio, 3-hydroxypropylthio, 2,3-dihydroxypropylthio, 2-hydroxy-1-methylpropylthio and the like,
- Examples of the unsubstituted or substituted thiophenoxy group having 6 to 20 carbon atoms include phenylthio and hydroxyphenylthio.
- Examples of the unsubstituted or substituted ester group having 1 to 12 carbon atoms include methoxycarbonyl, ethoxycarbonyl, isopropyloxycarbonyl, phenoxycarbonyl, acetoxy, methoxyacetyloxy, propionyloxy, butyryloxy, t-butylcarbonyloxy Benzoyloxy, adamantylcarbonyloxy, 2-hydroxyethoxycarbonyl, 3-hydroxypropyloxycarbonyl, 4-hydroxyphenoxycarbonyl, 3-hydroxypropionyloxy, 4-hydroxybutyryloxy, 4-hydroxybenzoyloxy and the like.
- the general formula (III) an alkyl group R 41 ⁇ R 1 carbon atoms represented between 58 and 18 in the general formula (III) in the alkoxy R 41 ⁇ R 1 carbon atoms represented by 58-18
- An arylalkyl group having 7 to 20 carbon atoms, an aryloxy group having 6 to 20 carbon atoms represented by R 41 to R 50 and R 58 in the above general formula (III), and the above general formula (III) thiopheno of R 41 ⁇ R 50 and having 6 to 20 carbon atoms represented by R 58 in Shi group may have a substituent.
- substituents include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl, pentyl, isopentyl, t-pentyl, neopentyl, hexyl, isohexyl, heptyl, octyl, 2-ethylhexyl, nonyl , Decyl, undecyl, dodecyl, tridecyl, isotridecyl, myristyl, palmityl, stearyl, cyclopropyl, cyclohexyl, 1-adamantyl, 2-adamantyl, 2-methyl-1-adamantyl, 2-methyl-2-adamantyl, 2-ethyl- 1-adamantyl, 2-ethyl-2-adamantyl, 2-norbornyl, 2-norbornylmethyl, camphor-10-yl, vinyl,
- Sulfonimide ion Tetrakis (pentafluorophenyl) borate anion, Tetrakis (4-fluorophenyl) borate ion, Tetraphenylborate ion, Borate anion described in Kaikai 2007-112854, Tetraarylborates such as a borate anion described in JP-A-6-184170, a borate anion described in JP-T-2002-526391, and a borate anion described in JP-A-2007-285538 Acid anion Examples of various aliphatic or aromatic carboxylate anions; organic sulfonylmethide ions such as tris (trifluoromethanesulfonyl) methide, tris (methanesulfonyl) methide, and the like.
- alkylsulfonate ions and fluoro-substituted alkylsulfonate ions examples include alkylsulfonimides and fluoro-substituted alkylsulfonimides substituted with acryloyloxy groups and methacryloyloxy groups, and those substituted with aliphatic cyclic alkyl groups such as norbornyl groups and adamantyl groups.
- quencher anions that have the function of de-exciting (quenching) active molecules in the excited state
- ferrocenes that have an anionic group such as a carboxyl group, phosphonic acid group, or sulfonic acid group on the cyclopentadienyl ring.
- metallocene compound anions such as luteocene can be used as necessary.
- an organic sulfonate anion is preferable from the viewpoint of safety and reactivity (deprotection reaction and crosslinking reaction).
- the compound represented by the following general formula (IV) is preferable because a photoacid generator having a high acid generating ability can be obtained.
- R 61 , R 62 , R 63 , R 64 , R 65 , R 66 , R 67 , R 68 , R 69 and R 70 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, A nitro group, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted carbon atom Represents an arylalkyl group of formula 7-20, R 71 , R 72 , R 73 , R 74 , R 75 , R 76 and R 77 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, or an unsubstituted or substituted carbon atom having 1 carbon atom.
- R 78 represents an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted aryl alkyl group having 7 to 20 carbon atoms;
- the methylene chain in the arylalkyl group having 7 to 20 carbon atoms represented by may be interrupted by —O—, —S—
- the compound represented by the following general formula (V) provides a photoacid generator having high solubility in a solvent and high developability. preferable.
- R 81 , R 82 , R 83 , R 84 , R 85 , R 86 , R 87 , R 88 , R 89 and R 90 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, A nitro group, an unsubstituted or substituted alkyl group having 1 to 18 carbon atoms, an unsubstituted or substituted aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted carbon atom Represents an arylalkyl group of formula 7-20, R 91 , R 92 , R 93 , R 94 , R 95 , R 96 and R 97 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, or an unsubstituted or substituted carbon atom having 1 carbon atom.
- R 98 is a hydrogen atom, a substituted alkyl group having 1 to 10 carbon atoms, an unsubstituted or substituted alkyl group having 11 to 18 carbon atoms, an unsubstituted or substituted carbon atom number
- An aryl group having 6 to 20 carbon atoms, or an unsubstituted or substituted arylalkyl group having 7 to 20 carbon atoms Aryl group R 81 ⁇ alkyl group having 1 to 18 carbon atoms represented by R 98, R 81 ⁇ R 90 and having 6 to 20 carbon atoms represented by R 98 and R 81 ⁇ R 90 and R 98,
- X 5 - represents a monovalent anion.
- at least one of R 81 to R 98 is a hydroxyl group, an alkyl group having 1 to 18 carbon atoms substituted with a hydroxyl group, an aryl group substituted with a hydroxyl group, or an arylalkyl group substituted with a hydroxyl group. . )
- any one of R 21 , R 22 , R 23 , R 24 , R 25 , R 26 , R 27 , R 28 , R 29 and R 30 Is preferably a hydroxyl group because of its high developability and acid generation ability.
- R 41 , R 42 , R 43 , R 44 , R 45 , R 46 , R 47 , R 48 , R 49 and R 50 Any one of which is a halogen atom or a hydroxyl group, and R 58 is an aryl group having 6 to 20 carbon atoms or an arylalkyl group having 7 to 20 carbon atoms substituted with a hydroxyl group, has developability and acid generating ability. It is preferable because it is high.
- the method for producing the aromatic sulfonium salt compound of the present invention is not particularly limited, and a method using a well-known organic synthesis reaction can be used. For example, by obtaining a sulfonium salt compound by sulfoniation reaction between a diaryl sulfoxide compound and an acridone compound, and performing a salt exchange reaction using a salt compound for introducing an anionic component as necessary, the fragrance of the present invention is obtained. Group sulfonium salt compounds can be obtained.
- the aromatic sulfonium salt compound of the present invention has activities such as EUV (Extreme Ultra-Violet), X-ray, F 2 , ArF, KrF, I-ray, H-ray, G-ray, etc. It has the property of releasing a Lewis acid when irradiated with energy rays, and can be decomposed or polymerized by acting on an acid-reactive organic substance. Therefore, the sulfonium salt compound of the present invention is useful as a photoacid generator for positive and negative photoresists or as a cationic polymerization initiator.
- the photoacid generator of the present invention comprises the above aromatic sulfonium salt compound.
- the photoacid generator of the present invention is used for polymerization of acid-reactive organic substances, cationically polymerizable compounds, cleavage of chemical bonds such as ester groups or ether groups in acrylic resins.
- the amount used is not particularly limited, but is preferably 0 with respect to 100 parts by mass of the acid-reactive organic substance. It is preferably used in a ratio of 0.05 to 100 parts by mass, more preferably 0.05 to 20 parts by mass. However, the blending amount can be increased or decreased from the above range depending on factors such as the nature of the acid-reactive organic substance, the light irradiation intensity, the time required for the reaction, the physical properties, and the cost.
- Examples of such an acid-reactive organic substance include “resin whose solubility in a developing solution is changed by the action of an acid” (hereinafter also referred to as “resist base resin”), and an optical modeling resin.
- the resist composition of the present invention is a resist composition containing the aromatic sulfonium salt compound of the present invention as an essential photoacid generator together with a resist base resin which is one of the acid-reactive organic substances.
- the resist base resin used in the resist composition of the present invention is not particularly limited, but preferably has a structure having a small absorption coefficient of the wavelength of active energy rays and high etching resistance.
- Such resist base resins include polyhydroxystyrene and derivatives thereof; polyacrylic acid and derivatives thereof; polymethacrylic acid and derivatives thereof; hydroxystyrene, acrylic acid, methacrylic acid and derivatives thereof.
- These polymers have alkali dissolution control ability Labile groups partially substituted polymeric polymer like a.
- acid labile groups introduced into the high molecular weight polymer include tertiary alicyclic groups such as tertiary alkyl groups, trialkylsilyl groups, oxoalkyl groups, aryl group-substituted alkyl groups, tetrahydropyran-2-yl groups, and the like.
- acid labile groups introduced into the high molecular weight polymer include tertiary alicyclic groups such as tertiary alkyl groups, trialkylsilyl groups, oxoalkyl groups, aryl group-substituted alkyl groups, tetrahydropyran-2-yl groups, and the like.
- examples include a tertiary alkylcarbonyl group, a tertiary alkylcarbonylalkyl group, and an alkyloxycarbonyl group.
- resist base resin examples include, for example, claims 8 to 11 of JP-A No. 2003-192665, claim 3 of JP-A No. 2004-323704, JP-A No. 10-10733, and the like.
- the polystyrene-reduced weight average molecular weight (Mw) of the resist base resin by gel permeation chromatography (GPC) is usually 1,500 to 300,000, preferably 2,000 to 200,000, and more preferably 3, 000 to 100,000.
- Mw weight average molecular weight
- the Mw of the base resin is less than 1,500, the heat resistance as a resist tends to be reduced.
- it exceeds 300,000 the developability and applicability as a resist tend to be lowered.
- the photoacid generator in the resist composition of the present invention contains the aromatic sulfonium salt compound of the present invention as an essential component
- other photoacid generators may be used as optional components.
- the use amount of the photoacid generator is usually 0.01 to 20 parts by mass, preferably 0.5 to 10 parts by mass with respect to 100 parts by mass of the resist base resin, from the viewpoint of ensuring sensitivity and developability as a resist. Part. In this case, if the amount of the photoacid generator used is less than 0.01 parts by mass, the sensitivity and developability may decrease. On the other hand, if it exceeds 20 parts by mass, the transparency to radiation decreases, and the rectangular It may be difficult to obtain a resist pattern.
- Examples of the photoacid generator other than the aromatic sulfonium salt compound of the present invention include iodonium salt compounds and sulfonylimide compounds.
- the amount used is preferably 50 parts by mass or less with respect to 100 parts by mass of the aromatic sulfonium salt compound of the present invention.
- the photoacid generator comprising the aromatic sulfonium salt compound of the present invention may be used in the resist composition of the present invention by blending various additives together with other photoacid generators.
- Various additives include colorants such as inorganic fillers, organic fillers, pigments, dyes, various resin additives such as antifoaming agents, thickeners, flame retardants, antioxidants, stabilizers, leveling agents, etc. Can be mentioned.
- the use amount of these various additives is preferably 50% by mass or less in the resist composition of the present invention.
- the resist composition of the present invention is usually dissolved in a solvent so that the total solid content is usually 5 to 50% by weight, preferably 10 to 25% by weight. Adjust by filtering through a degree filter.
- the resist composition of the present invention is prepared by a method such as mixing, dissolving or kneading a photoacid generator comprising the aromatic sulfonium salt compound of the present invention, other photoacid generator, resist base resin and other optional components. can do.
- the resist composition of the present invention is particularly useful as a chemically amplified resist.
- Chemically amplified resists include negative resists that cause a chemical chain reaction by the action of the acid generated from the photoacid generator upon exposure, and are insolubilized in the developer by the cross-linking reaction or polarity change of the base resin.
- positive resists that are solubilized in the developer by the polarity change induced by the side chain deprotection reaction.
- the light source used in the exposure of the resist composition of the present invention is appropriately selected from visible light, ultraviolet light, far ultraviolet light, X-rays, charged particle beams, etc., depending on the type of photoacid generator used.
- various radiations such as deep ultraviolet rays such as KrF excimer laser (wavelength 248 nm) or ArF excimer laser (wavelength 193 nm), X-rays such as synchrotron radiation, electron beam, charged particle beams such as EUV, etc. It can be suitably used in the resist composition to be used.
- the cationically polymerizable composition of the present invention comprises the aromatic sulfonium salt compound of the present invention.
- the cationic polymerizable composition of the present invention is a composition containing the cationic polymerization initiator of the present invention and a cationic polymerizable compound, and is used for the production of flat plates, letterpress printing plates, printed circuit boards, ICs, and LSIs. It is useful in a wide range of application fields such as photoresists, image formation such as relief images and image duplication, photocurable inks, paints, adhesives, and the like.
- the cationically polymerizable compound used in the cationically polymerizable composition of the present invention refers to a compound that undergoes a polymerization or a crosslinking reaction by a cationic polymerization initiator activated by light irradiation, and is a single type or a mixture of two or more types. Used.
- cationically polymerizable compound examples include epoxy compounds, oxetane compounds, cyclic lactone compounds, cyclic acetal compounds, cyclic thioether compounds, spiro orthoester compounds, vinyl compounds, and the like, and one or more of these are used. can do. Among them, epoxy compounds and oxetane compounds that are easy to obtain and convenient for handling are suitable.
- epoxy compounds are suitable as the epoxy compounds.
- alicyclic epoxy compound examples include cyclohexene oxide obtained by epoxidizing a polyglycidyl ether of polyhydric alcohol having at least one alicyclic ring or a cyclohexene or cyclopentene ring-containing compound with an oxidizing agent.
- a cyclopentene oxide containing compound is mentioned.
- Examples of commercially available products that can be suitably used as the alicyclic epoxy compound include UVR-6100, UVR-6105, UVR-6110, UVR-6128, UVR-6200 (manufactured by Union Carbide), Celoxide 2021, Celoxide 2021P, Celoxide 2081, Celoxide 2083, Celoxide 2085, Celoxide 2000, Celoxide 3000, Cyclomer A200, Cyclomer M100, Cyclomer M101, Epolide GT-301, Epolide GT-302, Epolide 401, Epolide 403, ETHB, Epolide HD300 (above, Daicel Chemical Industries, Ltd.), KRM-2110, KRM-2199 (above, manufactured by ADEKA Corporation), and the like.
- an epoxy resin having a cyclohexene oxide structure is preferable in terms of curability (curing speed).
- aromatic epoxy compound examples include polyhydric phenol having at least one aromatic ring, or polyglycidyl ether of an alkylene oxide adduct thereof, such as bisphenol A, bisphenol F, or further alkylene oxide. And glycidyl ethers of epoxy compounds and epoxy novolac resins.
- aliphatic epoxy compound examples include polyglycidyl ether of an aliphatic polyhydric alcohol or an alkylene oxide adduct thereof, polyglycidyl ester of an aliphatic long-chain polybasic acid, vinyl polymerization of glycidyl acrylate or glycidyl methacrylate. And a copolymer synthesized by vinyl polymerization of glycidyl acrylate or glycidyl methacrylate and other vinyl monomers.
- Typical compounds include 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, triglycidyl ether of glycerin, triglycidyl ether of trimethylolpropane, tetraglycidyl ether of sorbitol, dipentaerythritol
- glycidyl ethers of polyhydric alcohols such as hexaglycidyl ether, diglycidyl ether of polyethylene glycol, diglycidyl ether of polypropylene glycol, and aliphatic polyhydric alcohols such as propylene glycol, trimethylolpropane and glycerin
- Polyglycidyl ether of polyether polyol obtained by adding alkylene oxide, diglycidyl ester of aliphatic long-chain dibasic acid It is.
- monoglycidyl ethers of higher aliphatic alcohols phenols, cresols, butylphenols, polyether alcohol monoglycidyl ethers obtained by adding alkylene oxides to these, glycidyl esters of higher fatty acids, epoxidized soybean oil, epoxy Examples include octyl stearate, butyl epoxy stearate, and epoxidized polybutadiene.
- Examples of commercially available products that can be suitably used as the aromatic compound and the aliphatic epoxy compound include Epicoat 801, Epicoat 828 (above, manufactured by Yuka Shell Epoxy Co., Ltd.), PY-306, 0163, DY-022 (above, Ciba Specialty).
- oxetane compound examples include the following compounds. 3-ethyl-3-hydroxymethyloxetane, 3- (meth) allyloxymethyl-3-ethyloxetane, (3-ethyl-3-oxetanylmethoxy) methylbenzene, 4-fluoro- [1- (3-ethyl-3 -Oxetanylmethoxy) methyl] benzene, 4-methoxy- [1- (3-ethyl-3-oxetanylmethoxy) methyl] benzene, [1- (3-ethyl-3-oxetanylmethoxy) ethyl] phenyl ether, isobutoxymethyl (3-ethyl-3-oxetanylmethyl) ether, isobornyloxyethyl (3-ethyl-3-oxetanylmethyl) ether, isobornyl (3-ethyl-3-oxetanylmethyl) ether
- oxetane compounds are preferable because they are effective when used particularly when flexibility is required.
- the other compounds of the cationic polymerizable compound include cyclic lactone compounds such as ⁇ -propiolactone and ⁇ -caprolactone; cyclic compounds such as trioxane, 1,3-dioxolane, and 1,3,6-trioxane cyclooctane.
- the amount of the cationic polymerization initiator comprising the aromatic sulfonium salt compound of the present invention is preferably 0.01 to 10 parts by mass, more preferably 0.1 to 5 parts per 100 parts by mass of the above cationic polymerizable compound. Part by mass. If the amount used is less than 0.01 parts by mass, curing may be insufficient. On the other hand, if the amount exceeds 10 parts by mass, an increase in the effect of use is not obtained, and the physical properties of the cured product are adversely affected. May give.
- the cationic polymerization initiator composed of the aromatic sulfonium salt compound of the present invention may be used in a cationic polymerizable composition by blending various additives together with the cationic polymerizable compound.
- additives include: organic solvents; benzotriazole, triazine, and benzoate UV absorbers; phenolic, phosphorus, and sulfur antioxidants; cationic surfactants, anionic surfactants, and nonionic interfaces Antistatic agent comprising activator, amphoteric surfactant, etc .; halogen compound, phosphate ester compound, phosphate amide compound, melamine compound, fluororesin or metal oxide, (poly) melamine phosphate, (poly ) Flame retardants such as piperazine phosphate; hydrocarbons, fatty acids, aliphatic alcohols, aliphatic esters, aliphatic amides or metal soaps; colorants such as dyes, pigments, carbon black; fumed Silica, fine particle si
- Examples include a rubber elasticity imparting agent such as a crystallization agent, a silane coupling agent, and a flexible polymer; a sensitizer and the like.
- the amount of these various additives used is preferably 50% by mass or less in the cationic polymerizable composition of the present invention.
- the cationic polymerization initiator is previously dissolved in an appropriate solvent (for example, propylene carbonate, carbitol, carbitol acetate, butyrolactone, etc.). It can also be used.
- an appropriate solvent for example, propylene carbonate, carbitol, carbitol acetate, butyrolactone, etc.
- the cationically polymerizable composition of the present invention can be prepared by a method such as mixing, dissolving or kneading the cationic polymerization initiator comprising the aromatic sulfonium salt compound of the present invention, the cationically polymerizable compound and other optional components.
- the cationically polymerizable composition of the present invention can be cured into a dry-to-touch state or a solvent-insoluble state usually after 0.1 seconds to several minutes by irradiation with energy rays such as ultraviolet rays.
- energy rays such as ultraviolet rays.
- Any suitable energy ray may be used as long as it induces decomposition of the cationic polymerization initiator, but preferably an ultra-high, high, medium, low-pressure mercury lamp, xenon lamp, carbon arc lamp, metal halide lamp, fluorescent lamp, From 2000 angstroms obtained from tungsten lamp, excimer lamp, germicidal lamp, excimer laser, nitrogen laser, argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser, various semiconductor lasers, YAG laser, light emitting diode, CRT light source, etc.
- High energy rays such as electromagnetic energy having a wavelength of 7000 angstroms, electron
- the exposure time to energy rays depends on the strength of the energy rays, the coating thickness and the cationically polymerizable organic compound, but usually about 0.1 to 10 seconds is sufficient. However, it is preferable to take a longer irradiation time for a relatively thick coating. From 0.1 seconds to several minutes after irradiation with energy rays, most compositions are dry to the touch by cationic polymerization. However, in order to accelerate cationic polymerization, heat energy from heating or a thermal head may be used in combination. preferable.
- Examples 1-1 to 1-7 below are examples of the aromatic sulfonium salt compound No. 1 of the present invention.
- 1-No. 7 shows a production example.
- Examples 2-1 and 2-2 and Comparative Example 2-1 are compound No. 1, no. 5 and Comparative Compound No.
- blending 1 with an alkali developable negative resist is shown.
- Examples 3-1 and 3-2 and Comparative Example 3-1 are compound Nos. 1, no. 5 and comparative compound no. 1 shows an evaluation example of the acid generation rate by quantifying the amount of photoacid generated in 1.
- Example 4-1 and Comparative Example 4-1 are compound no. 5 and comparative compound no.
- Example 5 is compound No. 5 as a cationic polymerization initiator.
- 1 shows a production example of a cationically polymerizable composition using 1 and an evaluation example for confirming the curability of the composition.
- Example 1-1 Compound No. 1 Synthesis of 1 A 200 ml four-necked flask was charged with 65.44 g (0.6810 mol) of methanesulfonic acid and 6.44 g (0.0454 mol) of phosphorus pentoxide, purged with nitrogen, and heated to 100 ° C. to dissolve. . After cooling, 9.50 g (0.0454 mol) of N-methylacridone and 10.63 g (0.0454 mol) of bis (hydroxyphenyl) sulfoxide were added, and the reaction was carried out at 50 ° C. for 4 hours.
- Example 1-2 Compound No. 1 Synthesis of Compound 2 The compound was synthesized in the same manner as in Example 1-1 except that 18.76 g (0.0683 mol) of KSbF 6 was used in place of potassium nonafluorobutanesulfonate. 2 (cation: structure of No. 1 above / anion: antimony hexafluoride anion) was obtained (yield 5.83 g, yield 19.4%, HPLC purity 96.9%).
- Example 1-3 Compound No. 1 Synthesis of 3 A 200 ml four-necked flask was charged with 72.08 g (0.75 mol) of methanesulfonic acid and 7.10 g (0.05 mol) of phosphorus pentoxide, purged with nitrogen, and heated to 100 ° C. to dissolve. It was. After cooling, 9.76 g (0.05 mol) of acridone was charged, and 11.91 g (0.05 mol) of bis (fluorophenyl) sulfoxide dissolved in 11.91 g of chlorobenzene was added dropwise and reacted at 50 ° C. for 2 hours. Went.
- Example 1-4 Compound No. Synthesis of Compound No. 4 obtained in Example 1-3 was placed in a 200 ml four-necked flask. 3 (28.27 g, 0.05 mol) and methyl ethyl ketone (64.00 g) were added and stirred to dissolve. Further, 2.80 g (0.07 mol) of sodium hydroxide and 4.00 g (0.01 mol) of tetrabutylammonium hydrosulfate were added and stirred, and the atmosphere was replaced with nitrogen. After dropwise addition of 12.06 g (0.06 mol) of 3-methoxybenzyl bromide at an internal temperature of 30 ° C., the temperature was raised to 60 ° C. and stirred for 3 hours.
- Example 1-5 Compound No. 1 Synthesis of compound No. 5 obtained in Example 1-4 in a 50 ml four-necked flask. 4 (8.00 g, 0.0117 mol) and methylene chloride (24.00 g) were added and dissolved by stirring. After cooling in an isopropyl ether / dry ice bath, boron tribromide (7.89 g, 0.0315 mol) was added dropwise, and the mixture was stirred at room temperature for 24 hours. Next, 200 ml of methylene chloride and 200 ml of water were put into a 1 L beaker, the reaction solution was added, stirred for 1 hour, and left to stand.
- Step 2 Compound No. Synthesis of Intermediate No. 6 obtained in Step 1 was added to a 30 ml four-necked flask.
- No. 6 (1.332 g), dimethyl sulfoxide (DMSO) 8.00 g, potassium carbonate 0.608 g (0.0044 mol) and tetrabutylammonium hydrosulfate 0.034 g (0.0001 mol) were added and stirred, and the atmosphere was replaced with nitrogen.
- Step 2 Compound No. Synthesis of Intermediate No. 7 obtained in Step 1 was added to a 50 ml four-necked flask. 7. After adding 1.159 g of DM7 and 4.00 g of DMSO with stirring and dissolution, 0.216 g (0.0054 mol) of sodium hydroxide and 0.160 g (0.0004 mol) of tetrabutyl hydrosulfate were added and stirred, and the atmosphere was replaced with nitrogen. did. 1.26 g (0.01 mol) of 4-hydroxythiophenol dissolved in 1.26 g of DMSO was added dropwise, and the mixture was stirred at an internal temperature of 35 ° C. for 6 hours.
- the aromatic sulfonium salt compound of the present invention is a comparative compound No. It is clear that the solubility is much higher than 1, and the developability is excellent.
- Examples 3-1 and 3-2 and Comparative Example 3-1 Evaluation of decomposition by light irradiation and acid generation amount 1, 5 and comparative compound no.
- a 0.02 mmol / g acetonitrile solution was prepared.
- 5.00 g of the prepared acetonitrile solution was put in a petri dish having an inner diameter of 93 mm, and exposed to 365 nm light at 0.8 mW / cm 2 for 5 minutes under a TOSHIBA fluorescent lamp (FL10BL, 330 mm).
- the solution after exposure was titrated with 0.05N potassium hydroxide ethanol solution using BTB as an indicator.
- the resist composition using the aromatic sulfonium salt compound of the present invention has higher curability than that using the comparative compound, and is particularly advantageous as a negative resist composition. confirmed.
- Example 5 Production and Evaluation of Cationic Polymerizable Composition
- Compound No. was mixed with 80 g of 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexylcarboxylate and 20 g of 1,4-butanediol diglycidyl ether. . 4 mmol of 1 was added and stirred well to make it uniform.
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Abstract
Description
即ち、本発明は、下記一般式(I)で表される新規な芳香族スルホニウム塩化合物を提供するものである。
R11、R12、R13、R14、R15、R16及びR17は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R18は、水素原子、無置換の若しくは置換基を有する炭素原子数1~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R1~R18で表される炭素原子数1~18のアルキル基、R1~R10及びR18で表される炭素原子数6~20のアリール基、並びにR1~R10及びR18で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R1~R18で表される炭素原子数1~18のアルキル基、R1~R10及びR18で表される炭素原子数6~20のアリール基、並びにR1~R10及びR18で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X1 -は1価の陰イオンを表す。)
更に、本発明の芳香族スルホニウム塩化合物は、カチオン重合開始剤としても有用であり、これを用いることで、硬化性に優れたカチオン重合性組成物が得られる。
先ず、上記一般式(I)で表わされる本発明の芳香族スルホニウム塩化合物について説明する。
上記一般式(I)におけるR1~R18で表される、無置換の若しくは置換基を有する炭素原子数1~18のアルキル基としては、メチル、エチル、プロピル、イソプロピル、ブチル、s-ブチル、t-ブチル、イソブチル、アミル、イソアミル、t-アミル、ヘキシル、シクロヘキシル、イソヘキシル、2-エチルヘキシル、ヘプチル、オクチル、ノニル、デシル、ウンデシル、ドデシル、トリデシル、イソトリデシル、テトラデシル、ヘキサデシル、ヘプタデシル、オクタデシル、1-アダマンチル、2-アダマンチル、2-メチル-1-アダマンチル、2-メチル-2-アダマンチル、2-エチル-1-アダマンチル、2-エチル-2-アダマンチル、2-ノルボルニル、2-ノルボルニルメチル、ビニル、アリル、イソプロペニル、1-プロペニル、フルオロメチル、ジフルオロメチル、トリフルオロメチル、クロロメチル、ジクロロメチル、トリクロロメチル、ブロモメチル、ジブロモメチル、トリブロモメチル、ジフルオロエチル、トリクロロエチル、ジクロロジフルオロエチル、ペンタフルオロエチル、ヘプタフルオロプロピル、ノナフルオロブチル、デカフルオロペンチル、トリデカフルオロヘキシル、ペンタデカフルオロヘプチル、ヘプタデカフルオロオクチル、シアノメチル、ヒドロキシメチル、1-ヒドロキシエチル、2-ヒドロキシエチル、3-ヒドロキシプロピル、3-ヒドロキシブチル、4-ヒドロキシブチル、1,2-ジヒドロキシエチル等が挙げられ、
上記一般式(I)におけるR1~R10及びR18で表される、無置換の若しくは置換基を有する炭素原子数6~20のアリール基としては、フェニル、ナフチル、2-メチルフェニル、3-メチルフェニル、4-メチルフェニル、4-ビニルフェニル、3-イソプロピルフェニル、4-イソプロピルフェニル、4-ブチルフェニル、4-イソブチルフェニル、4-t-ブチルフェニル、4-ヘキシルフェニル、4-シクロヘキシルフェニル、4-オクチルフェニル、4-(2-エチルヘキシル)フェニル、4-ステアリルフェニル、2,3-ジメチルフェニル、2,4-ジメチルフェニル、2,5-ジメチルフェニル、2,6-ジメチルフェニル、3,4-ジメチルフェニル、3,5-ジメチルフェニル、2,4-ジ-t-ブチルフェニル、シクロヘキシルフェニル、ヒドロキシフェニル等が挙げられ、
上記一般式(I)におけるR1~R10及びR18で表される、無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基としては、ベンジル、フェネチル、フェナシル、2-フェニルプロパン-2-イル、ジフェニルメチル、トリフェニルメチル、スチリル、シンナミル、2-ヒドロキシベンジル、3-ヒドロキシベンジル、4-ヒドロキシベンジル、2-ヒドロキシフェネチル、3-ヒドロキシフェネチル、4-ヒドロキシフェネチル、2-ヒドロキシフェナシル、3-ヒドロキシフェナシル、4-ヒドロキシフェナシル、2-フェノキシエチル、2-フェニルチオエチル等が挙げられる。
上記無置換の若しくは置換基を有する炭素原子数6~20のアリールオキシ基としては、フェノキシ、ヒドロキシフェニルオキシ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~18のチオアルコキシ基としては、メチルチオ、エチルチオ、プロピルチオ、イソプロピルチオ、ブチルチオ、s-ブチルチオ、t-ブチルチオ、イソブチルチオ、アミルチオ、イソアミルチオ、t-アミルチオ、ヘキシルチオ、シクロヘキシルチオ、アダマンチルチオ、2-ヒドロキシエチルチオ、3-ヒドロキシプロピルチオ、2,3-ジヒドロキシプロピルチオ、2-ヒドロキシ-1-メチルプロピルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数6~20のチオフェノキシ基としては、フェニルチオ、ヒドロキシフェニルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~12のエステル基としては、メトキシカルボニル、エトキシカルボニル、イソプロピルオキシカルボニル、フェノキシカルボニル、アセトキシ、メトキシアセチルオキシ、プロピオニルオキシ、ブチリルオキシ、t-ブチルカルボニルオキシ、ベンゾイルオキシ、アダマンチルカルボニルオキシ、2-ヒドロキシエトキシカルボニル、3-ヒドロキシプロピルオキシカルボニル、4-ヒドロキシフェノキシカルボニル、3-ヒドロキシプロピオニルオキシ、4-ヒドロキシブチリルオキシ、4-ヒドロキシベンゾイルオキシ等が挙げられる。
R31、R32、R33、R34、R35、R36及びR37は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R38は無置換の炭素原子数1~10のアルキル基を表し、
R21~R38で表される炭素原子数1~18のアルキル基、R21~R30で表される炭素原子数6~20のアリール基、及びR21~R30で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R21~R38で表される炭素原子数1~18のアルキル基、R21~R30で表される炭素原子数6~20のアリール基、及びR21~R30で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X2 -は1価の陰イオンを表す。
但し、R21~R30のうち少なくとも1つは、水酸基、水酸基で置換された炭素原子数1~18のチオアルコキシ基、又は水酸基で置換されたチオフェノキシ基である。)
上記一般式(II)におけるR21~R37で表される無置換の若しくは置換基を有する炭素原子数1~18のアルキル基、及びR38で表される無置換の炭素原子数1~10のアルキル基としては、メチル、エチル、プロピル、イソプロピル、ブチル、s-ブチル、t-ブチル、イソブチル、アミル、イソアミル、t-アミル、ヘキシル、シクロヘキシル、イソヘキシル、2-エチルヘキシル、ヘプチル、オクチル、ノニル、デシル、ウンデシル、ドデシル、トリデシル、イソトリデシル、テトラデシル、ヘキサデシル、ヘプタデシル、オクタデシル、1-アダマンチル、2-アダマンチル、2-メチル-1-アダマンチル、2-メチル-2-アダマンチル、2-エチル-1-アダマンチル、2-エチル-2-アダマンチル、2-ノルボルニル、2-ノルボルニルメチル、ビニル、アリル、イソプロペニル、1-プロペニル、フルオロメチル、ジフルオロメチル、トリフルオロメチル、クロロメチル、ジクロロメチル、トリクロロメチル、ブロモメチル、ジブロモメチル、トリブロモメチル、ジフルオロエチル、トリクロロエチル、ジクロロジフルオロエチル、ペンタフルオロエチル、ヘプタフルオロプロピル、ノナフルオロブチル、デカフルオロペンチル、トリデカフルオロヘキシル、ペンタデカフルオロヘプチル、ヘプタデカフルオロオクチル、シアノメチル、ヒドロキシメチル、1-ヒドロキシエチル、2-ヒドロキシエチル、3-ヒドロキシプロピル、3-ヒドロキシブチル、4-ヒドロキシブチル、1,2-ジヒドロキシエチル等が挙げられ、
上記一般式(II)におけるR21~R30で表される、無置換の若しくは置換基を有する炭素原子数6~20のアリール基としては、フェニル、ナフチル、2-メチルフェニル、3-メチルフェニル、4-メチルフェニル、4-ビニルフェニル、3-イソプロピルフェニル、4-イソプロピルフェニル、4-ブチルフェニル、4-イソブチルフェニル、4-t-ブチルフェニル、4-ヘキシルフェニル、4-シクロヘキシルフェニル、4-オクチルフェニル、4-(2-エチルヘキシル)フェニル、4-ステアリルフェニル、2,3-ジメチルフェニル、2,4-ジメチルフェニル、2,5-ジメチルフェニル、2,6-ジメチルフェニル、3,4-ジメチルフェニル、3,5-ジメチルフェニル、2,4-ジ-t-ブチルフェニル、シクロヘキシルフェニル、ヒドロキシフェニル等が挙げられ、
上記一般式(II)におけるR21~R30で表される、無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基としては、ベンジル、フェネチル、フェナシル、2-フェニルプロパン-2-イル、ジフェニルメチル、トリフェニルメチル、スチリル、シンナミル、2-ヒドロキシベンジル、3-ヒドロキシベンジル、4-ヒドロキシベンジル、2-ヒドロキシフェネチル、3-ヒドロキシフェネチル、4-ヒドロキシフェネチル、2-ヒドロキシフェナシル、3-ヒドロキシフェナシル、4-ヒドロキシフェナシル、2-フェノキシエチル、2-フェニルチオエチル等が挙げられる。
上記無置換の若しくは置換基を有する炭素原子数6~20のアリールオキシ基としては、フェノキシ、ヒドロキシフェニルオキシ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~18のチオアルコキシ基としては、メチルチオ、エチルチオ、プロピルチオ、イソプロピルチオ、ブチルチオ、s-ブチルチオ、t-ブチルチオ、イソブチルチオ、アミルチオ、イソアミルチオ、t-アミルチオ、ヘキシルチオ、シクロヘキシルチオ、アダマンチルチオ、2-ヒドロキシエチルチオ、3-ヒドロキシプロピルチオ、2,3-ジヒドロキシプロピルチオ、2-ヒドロキシ-1-メチルプロピルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数6~20のチオフェノキシ基としては、フェニルチオ、ヒドロキシフェニルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~12のエステル基としては、メトキシカルボニル、エトキシカルボニル、イソプロピルオキシカルボニル、フェノキシカルボニル、アセトキシ、メトキシアセチルオキシ、プロピオニルオキシ、ブチリルオキシ、t-ブチルカルボニルオキシ、ベンゾイルオキシ、アダマンチルカルボニルオキシ、2-ヒドロキシエトキシカルボニル、3-ヒドロキシプロピルオキシカルボニル、4-ヒドロキシフェノキシカルボニル、3-ヒドロキシプロピオニルオキシ、4-ヒドロキシブチリルオキシ、4-ヒドロキシベンゾイルオキシ等が挙げられる。
R51、R52、R53、R54、R55、R56及びR57は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R58は、水素原子、置換基を有する炭素原子数1~10のアルキル基、無置換の若しくは置換基を有する炭素原子数11~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R41~R58で表される炭素原子数1~18のアルキル基、R41~R50及びR58で表される炭素原子数6~20のアリール基、並びにR41~R50及びR58で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R41~R58で表される炭素原子数1~18のアルキル基、R41~R50及びR58で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X3 -は1価の陰イオンを表す。)
上記一般式(III)におけるR41~R57で表される、無置換の若しくは置換基を有する炭素原子数1~18のアルキル基、R58で表される、置換基を有する炭素原子数1~10のアルキル基、及びR58で表される無置換の若しくは置換基を有する炭素原子数11~18のアルキル基としては、メチル、エチル、プロピル、イソプロピル、ブチル、s-ブチル、t-ブチル、イソブチル、アミル、イソアミル、t-アミル、ヘキシル、シクロヘキシル、イソヘキシル、2-エチルヘキシル、ヘプチル、オクチル、ノニル、デシル、ウンデシル、ドデシル、トリデシル、イソトリデシル、テトラデシル、ヘキサデシル、ヘプタデシル、オクタデシル、1-アダマンチル、2-アダマンチル、2-メチル-1-アダマンチル、2-メチル-2-アダマンチル、2-エチル-1-アダマンチル、2-エチル-2-アダマンチル、2-ノルボルニル、2-ノルボルニルメチル、ビニル、アリル、イソプロペニル、1-プロペニル、フルオロメチル、ジフルオロメチル、トリフルオロメチル、クロロメチル、ジクロロメチル、トリクロロメチル、ブロモメチル、ジブロモメチル、トリブロモメチル、ジフルオロエチル、トリクロロエチル、ジクロロジフルオロエチル、ペンタフルオロエチル、ヘプタフルオロプロピル、ノナフルオロブチル、デカフルオロペンチル、トリデカフルオロヘキシル、ペンタデカフルオロヘプチル、ヘプタデカフルオロオクチル、シアノメチル、ヒドロキシメチル、1-ヒドロキシエチル、2-ヒドロキシエチル、3-ヒドロキシプロピル、3-ヒドロキシブチル、4-ヒドロキシブチル、1,2-ジヒドロキシエチル等が挙げられ、
上記一般式(III)におけるR41~R50及びR58で表される、無置換の若しくは置換基を有する炭素原子数6~20のアリール基としては、フェニル、ナフチル、2-メチルフェニル、3-メチルフェニル、4-メチルフェニル、4-ビニルフェニル、3-イソプロピルフェニル、4-イソプロピルフェニル、4-ブチルフェニル、4-イソブチルフェニル、4-t-ブチルフェニル、4-ヘキシルフェニル、4-シクロヘキシルフェニル、4-オクチルフェニル、4-(2-エチルヘキシル)フェニル、4-ステアリルフェニル、2,3-ジメチルフェニル、2,4-ジメチルフェニル、2,5-ジメチルフェニル、2,6-ジメチルフェニル、3,4-ジメチルフェニル、3,5-ジメチルフェニル、2,4-ジ-t-ブチルフェニル、シクロヘキシルフェニル、ヒドロキシフェニル等が挙げられ、
上記一般式(III)におけるR41~R50及びR58で表される、無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基としては、ベンジル、フェネチル、フェナシル、2-フェニルプロパン-2-イル、ジフェニルメチル、トリフェニルメチル、スチリル、シンナミル、2-ヒドロキシベンジル、3-ヒドロキシベンジル、4-ヒドロキシベンジル、2-ヒドロキシフェネチル、3-ヒドロキシフェネチル、4-ヒドロキシフェネチル、2-ヒドロキシフェナシル、3-ヒドロキシフェナシル、4-ヒドロキシフェナシル、2-フェノキシエチル、2-フェニルチオエチル等が挙げられる。
上記無置換の若しくは置換基を有する炭素原子数6~20のアリールオキシ基としては、フェノキシ、ヒドロキシフェニルオキシ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~18のチオアルコキシ基としては、メチルチオ、エチルチオ、プロピルチオ、イソプロピルチオ、ブチルチオ、s-ブチルチオ、t-ブチルチオ、イソブチルチオ、アミルチオ、イソアミルチオ、t-アミルチオ、ヘキシルチオ、シクロヘキシルチオ、アダマンチルチオ、2-ヒドロキシエチルチオ、3-ヒドロキシプロピルチオ、2,3-ジヒドロキシプロピルチオ、2-ヒドロキシ-1-メチルプロピルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数6~20のチオフェノキシ基としては、フェニルチオ、ヒドロキシフェニルチオ等が挙げられ、
上記無置換の若しくは置換基を有する炭素原子数1~12のエステル基としては、メトキシカルボニル、エトキシカルボニル、イソプロピルオキシカルボニル、フェノキシカルボニル、アセトキシ、メトキシアセチルオキシ、プロピオニルオキシ、ブチリルオキシ、t-ブチルカルボニルオキシ、ベンゾイルオキシ、アダマンチルカルボニルオキシ、2-ヒドロキシエトキシカルボニル、3-ヒドロキシプロピルオキシカルボニル、4-ヒドロキシフェノキシカルボニル、3-ヒドロキシプロピオニルオキシ、4-ヒドロキシブチリルオキシ、4-ヒドロキシベンゾイルオキシ等が挙げられる。
R71、R72、R73、R74、R75、R76及びR77は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R78は、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R61~R77で表される炭素原子数1~18のアルキル基、R61~R70及びR78で表される炭素原子数6~20のアリール基、並びにR61~R70及びR78で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R61~R77で表される炭素原子数1~18のアルキル基、R61~R70及びR78で表される炭素原子数6~20のアリール基、並びにR61~R70及びR78で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X4 -は1価の陰イオンを表す。)
R91、R92、R93、R94、R95、R96及びR97は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R98は、水素原子、置換基を有する炭素原子数1~10のアルキル基、無置換の若しくは置換基を有する炭素原子数11~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R81~R98で表される炭素原子数1~18のアルキル基、R81~R90及びR98で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R81~R98で表される炭素原子数1~18のアルキル基、R81~R90及びR98で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X5 -は1価の陰イオンを表す。
但し、R81~R98のうち少なくとも1つは、水酸基、水酸基で置換された炭素原子数1~18のアルキル基、水酸基で置換されたアリール基、又は水酸基で置換されたアリールアルキル基である。)
また、上記一般式(III)で表される芳香族スルホニウム塩化合物の中でも、R41、R42、R43、R44、R45、R46、R47、R48、R49及びR50の何れかがハロゲン原子又は水酸基であり、R58が水酸基で置換された炭素原子数6~20のアリール基又は炭素原子数7~20のアリールアルキル基であるものが、現像性及び酸発生能が高いので好ましい。
200mlの四つ口フラスコに、メタンスルホン酸65.44g(0.6810モル)及び五酸化リン6.44g(0.0454モル)を仕込み窒素置換し、100℃に加熱し溶解させた。冷却した後、N-メチルアクリドン9.50g(0.0454モル)及びビス(ヒドロキシフェニル)スルホキシド10.63g(0.0454モル)を加え、50℃で4時間反応を行った。次いで、1Lのビーカーに、氷水180g、メタノール190g及びイソプロピルエーテル110gを混合しておき、ここに反応液を投入し、1時間撹拌後、静置した。上層を取り除き、下層に塩化メチレン370g及びノナフルオロブタンスルホン酸カリウム23.10g(0.0683モル)を加え1.5時間撹拌した。塩化メチレン層を水160gで3回洗浄後、減圧濃縮することにより、本発明の化合物No.1(カチオン:上記No.1の構造/アニオン:ノナフルオロブタンスルホン酸陰イオン)を得た(収量23.29g、収率70.6%、HPLC純度 94.6%)。
ノナフルオロブタンスルホン酸カリウムに替えてKSbF6 18.76g(0.0683モル)を用いた以外は実施例1-1と同様に合成し、本発明の化合物No.2(カチオン:上記No.1の構造/アニオン:六フッ化アンチモン陰イオン)を得た(収量5.83g、収率19.4%、HPLC純度96.9%)。
200mlの四つ口フラスコに、メタンスルホン酸72.08g(0.75モル)及び五酸化リン7.10g(0.05モル)を仕込み、窒素置換し、100℃に加熱し溶解させた。冷却した後、アクリドン9.76g(0.05モル)を仕込み、更にクロロベンゼン11.91gに溶解したビス(フルオロフェニル)スルホキシド11.91g(0.05モル)を滴下し、50℃で2時間反応を行った。次いで、1Lビーカーに、氷水200g、メタノール80g及びトルエン200gを混合しておき、ここに反応液を投入し、1時間撹拌後、静置した。上層を取り除き、下層に塩化メチレン200g及びトリフルオロメタンスルホン酸リチウム9.36g(0.06モル)を加え1時間撹拌した。塩化メチレン層を水300mlで3回洗浄後、減圧濃縮することにより、黄色固体として、本発明の化合物No.3(カチオン:上記No.19の構造/アニオン:ノナフルオロブタンスルホン酸陰イオン)を得た(収量28.27g、収率100%、HPLC純度 95.5%)。
200mlの四つ口フラスコに、実施例1-3で得られた化合物No.3の28.27g(0.05モル)及びメチルエチルケトン64.00gを入れ撹拌し、溶解させた。更に水酸化ナトリウム2.80g(0.07モル)及びテトラブチルアンモニウムハイドロサルフェート4.00g(0.01モル)を入れ撹拌し、窒素置換した。内温30℃で3-メトキシベンジルブロマイド12.06g(0.06モル)を滴下した後、60℃に昇温し、3時間撹拌した。反応液を塩化メチレン200mlに加え、水100mlで3回水洗し、塩化メチレン層を溶媒留去した。得られた粗生成物をシリカゲルクロマトグラム(塩化メチレン/アセトン=3/1)により精製し、本発明の化合物No.4(カチオン:上記No.30の構造/アニオン:ノナフルオロブタンスルホン酸陰イオン)を得た(収量14.29g、収率41.7%、HPLC純度99.0%)。
50mlの四つ口フラスコに、実施例1-4で得られた化合物No.4の8.00g(0.0117モル)及び塩化メチレン24.00gを入れ撹拌し溶解させた。イソプロピルエーテル/ドライアイス浴に漬け冷却し、三臭化ホウ素7.89g(0.0315モル)を滴下した後、室温で24時間撹拌した。次いで、1Lビーカーに、塩化メチレン200ml及び水200mlを入れ、反応液を投入し、1時間撹拌し静置した。水層を取り除き、塩化メチレン層を水200mlで3回水洗し溶媒留去、粗生成物をシリカゲルクロマトグラム(塩化メチレン/アセトン=3/1)により精製し、本発明の化合物No.5(カチオン:上記No.29の構造/アニオン:ノナフルオロブタンスルホン酸陰イオン)を得た(収量3.57g、収率45.5%、HPLC純度98.8%)。
50mlの四つ口フラスコに、メタンスルホン酸18.74g(0.195モル)及び五酸化リン1.845g(0.013モル)を仕込み、窒素置換し、100℃に加熱し溶解させた。冷却した後、N-メチルアクリドン2.72g(0.013モル)及びビス(フルオロフェニル)スルホキシド3.10g(0.013モル)を加え、50℃で4時間反応を行った。次いで、500mlビーカーに、氷水30ml、メタノール25ml及びイソプロピルエーテル25mlを混合しておき、ここに反応液を投入して、1時間撹拌後静置した。上層を取り除き、塩化メチレン140ml及びKSbF64.64g(0.0169モル)を加え1時間撹拌した。塩化メチレン層を水70gで3回洗浄後、溶媒を留去し黄色固体として中間体No.6を得た(収量8.27g)。
30mlの四つ口フラスコに、ステップ1で得られた中間体No.6の1.332g、ジメチルスルホキシド(DMSO)8.00g、炭酸カリウム0.608g(0.0044モル)及びテトラブチルアンモニウムハイドロサルフェート0.034g(0.0001モル)を入れ撹拌し、窒素置換した。メルカプトエタノール0.313g(0.004モル)を滴下し、1時間撹拌した後、塩化メチレン50mlに加え、水30mlで4回水洗し、塩化メチレン層から溶媒を留去することにより化合物No.6(カチオン:上記No.3の構造/アニオン:六フッ化アンチモン陰イオン)を得た(収量0.718g、収率46.0%、HPLC純度93.0%)。
KSbF6に替えてトリフルオロメタンスルホン酸リチウム2.64g(0.0169モル)を用いた以外は実施例1-6のステップ1と同様にして合成を行い、黄色固体として中間体No.7を得た(収量7.03g)。
50mlの四つ口フラスコに、ステップ1で得られた中間体No.7の1.159g及びDMSO4.00gを入れ撹拌し溶解させた後、水酸化ナトリウム0.216g(0.0054モル)及びテトラブチルハイドロサルフェート0.160g(0.0004モル)を加え撹拌し窒素置換した。DMSO1.26gに溶解した4-ヒドロキシチオフェノール1.26g(0.01モル)を滴下し、内温35℃で6時間撹拌した。塩化メチレン20mlを加え、水20mlで4回水洗し、塩化メチレン層を濃縮した。メタノール30mlを入れ撹拌すると沈殿が生じたのでこれをろ別、乾燥することにより、化合物No.7(カチオン:上記No.8の構造/アニオン:ノナフルオロブタンスルホン酸陰イオン)を得た(収量0.26g、収率16%、HPLC純度93.8%)。
スクリュー管にポリビニルフェノール(丸善石油化学製S-2P、Mw:5800)0.36g、及び3%TMAH水溶液10.00gを量りとり加熱、溶解させた。別のスクリュー管に、この溶液2.00gと上記化合物No.1、No.5及び比較化合物No.1(上記実施例1-7のステップ1で得られた中間体No.7)とをそれぞれ少量ずつ量りとり加熱し、溶解するか否かを目視で確認するという操作を繰り返し、飽和する濃度を確認した。一昼夜静置し、飽和溶液から固体が析出していないことを確認した。このときのポリビニルフェノールに対する各化合物の質量比を溶解度とし、算出した。結果を[表2]に示す。
上記化合物No.1、5及び比較化合物No.1について、それぞれ0.02mmol/gのアセトニトリル溶液を調製した。内径93mmのシャーレに調製したアセトニトリル溶液を5.00g入れ、TOSHIBA製蛍光ランプ(FL10BL、330mm)の下、365nmの光を0.8mW/cm2で5分間露光した。露光後の溶液について、BTBを指示薬とし、0.05Nの水酸化カリウムエタノール溶液で滴定を行った。得られた測定滴定値について、光照射前の溶液について同様に滴定をした値をブランクとして差し引く補正を行った滴定値から、下記式により、酸発生率を求めた。その結果を、下記の〔表3〕に示す。
酸発生率(%)=酸滴定値(mol)÷各化合物理論モル数(mol)×100
化合物No.5及び比較化合物No.1について六フッ化アンチモン塩を別途合成した。日本化薬製EPPN-201の100gをメチルエチルケトン(MEK)100gに溶解させ樹脂溶液を調製し、上記六フッ化アンチモン塩について、それぞれ0.05gをこの樹脂溶液8.00gに溶解させレジスト液を調製した。これをアルミ板上に#9のバーコーターで塗布し、80℃で10分乾燥した後、超高圧水銀ランプと照射分光器を用いて露光した。80℃で10分間ベークし、MEKに30秒間浸漬することにより現像し、キシレンで洗浄した。波長405nmの光を照射することにより形成されたパターンから硬化に必要な露光量を算出した。その結果を、下記の〔表4〕に示す。
3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキシルカルボキシレート80g及び1,4-ブタンジオールジグリシジルエーテル20gを混合したものに、化合物No.1を4mmol添加し、よく撹拌し均一にした。これをアルミコート紙上に#3のバーコーターで塗布した。これに、ベルトコンベア付き光照射装置を使用して80W/cmの高圧水銀灯の光を照射した。ランプからベルトコンベアまでの距離は10cm、ベルトコンベアのラインスピードは8m/分とした。硬化後24時間室温に放置後、メチルエチルケトンを付けた綿棒で塗膜を擦った結果200往復しても塗膜は侵されず、硬化が十分に進行していることが確認された。
Claims (9)
- 下記一般式(I)で表される芳香族スルホニウム塩化合物。
R11、R12、R13、R14、R15、R16及びR17は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R18は、水素原子、無置換の若しくは置換基を有する炭素原子数1~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R1~R18で表される炭素原子数1~18のアルキル基、R1~R10及びR18で表される炭素原子数6~20のアリール基、並びにR1~R10及びR18で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R1~R18で表される炭素原子数1~18のアルキル基、R1~R10及びR18で表される炭素原子数6~20のアリール基、並びにR1~R10及びR18で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X1 -は1価の陰イオンを表す。) - 下記一般式(II)で表されることを特徴とする請求項1記載の芳香族スルホニウム塩化合物。
R31、R32、R33、R34、R35、R36及びR37は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R38は無置換の炭素原子数1~10のアルキル基を表し、
R21~R38で表される炭素原子数1~18のアルキル基、R21~R30で表される炭素原子数6~20のアリール基、及びR21~R30で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R21~R38で表される炭素原子数1~18のアルキル基、R21~R30で表される炭素原子数6~20のアリール基、及びR21~R30で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X2 -は1価の陰イオンを表す。
但し、R21~R30のうち少なくとも1つは、水酸基、水酸基で置換された炭素原子数1~18のチオアルコキシ基、又は水酸基で置換されたチオフェノキシ基である。) - 下記一般式(III)で表されることを特徴とする請求項1記載の芳香族スルホニウム塩化合物。
R51、R52、R53、R54、R55、R56及びR57は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R58は、水素原子、置換基を有する炭素原子数1~10のアルキル基、無置換の若しくは置換基を有する炭素原子数11~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R41~R58で表される炭素原子数1~18のアルキル基、R41~R50及びR58で表される炭素原子数6~20のアリール基、並びにR41~R50及びR58で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R41~R58で表される炭素原子数1~18のアルキル基、R41~R50及びR58で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X3 -は1価の陰イオンを表す。) - 下記一般式(IV)で表されることを特徴とする請求項1又は3記載の芳香族スルホニウム塩化合物。
R71、R72、R73、R74、R75、R76及びR77は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R78は、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R61~R77で表される炭素原子数1~18のアルキル基、R61~R70及びR78で表される炭素原子数6~20のアリール基、並びにR61~R70及びR78で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R61~R77で表される炭素原子数1~18のアルキル基、R61~R70及びR78で表される炭素原子数6~20のアリール基、並びにR61~R70及びR78で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X4 -は1価の陰イオンを表す。) - 下記一般式(V)で表されることを特徴とする請求項1又は3記載の芳香族スルホニウム塩化合物。
R91、R92、R93、R94、R95、R96及びR97は、それぞれ独立に、水素原子、ハロゲン原子、水酸基、ニトロ基、又は無置換の若しくは置換基を有する炭素原子数1~18のアルキル基を表し、
R98は、水素原子、置換基を有する炭素原子数1~10のアルキル基、無置換の若しくは置換基を有する炭素原子数11~18のアルキル基、無置換の若しくは置換基を有する炭素原子数6~20のアリール基、又は無置換の若しくは置換基を有する炭素原子数7~20のアリールアルキル基を表し、
R81~R98で表される炭素原子数1~18のアルキル基、R81~R90及びR98で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基が有する置換基の数に制限はなく、
R81~R98で表される炭素原子数1~18のアルキル基、R81~R90及びR98で表される炭素原子数6~20のアリール基、並びにR81~R90及びR98で表される炭素原子数7~20のアリールアルキル基中のメチレン鎖は、-O-、-S-、-CO-、-CO-O-又は-O-CO-で中断されていてもよく、
X5 -は1価の陰イオンを表す。
但し、R81~R98のうち少なくとも1つは、水酸基、水酸基で置換された炭素原子数1~18のアルキル基、水酸基で置換されたアリール基、又は水酸基で置換されたアリールアルキル基である。) - 請求項1~5の何れか1項に記載の芳香族スルホニウム塩化合物からなることを特徴とする光酸発生剤。
- 請求項6記載の光酸発生剤を含有してなることを特徴とするレジスト組成物。
- 請求項1~5の何れか1項に記載の芳香族スルホニウム塩化合物からなることを特徴とするカチオン重合開始剤。
- 請求項7記載のカチオン重合開始剤を含有してなることを特徴とするカチオン重合性組成物。
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WO2015046502A1 (ja) * | 2013-09-30 | 2015-04-02 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機el表示装置および液晶表示装置 |
US9046767B2 (en) | 2013-10-25 | 2015-06-02 | Rohm And Haas Electronic Materials Llc | Photoacid generator, photoresist, coated substrate, and method of forming an electronic device |
JP2015168617A (ja) * | 2014-03-04 | 2015-09-28 | 株式会社Adeka | 芳香族スルホニウム塩化合物、光酸発生剤、レジスト組成物、カチオン重合開始剤、およびカチオン重合性組成物 |
EP3272744A4 (en) * | 2015-03-18 | 2018-07-25 | Adeka Corporation | Aromatic sulfonium salt compound, photoacid generator, resist composition, cationic polymerization initiator, and cationically polymerizable composition |
US10647823B2 (en) * | 2018-05-16 | 2020-05-12 | Solenis Technologies, L.P. | Adiabatic gel polymerization process for the production of water-soluble polyelectrolytes |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10745358B2 (en) | 2017-11-20 | 2020-08-18 | Silicon Swat, Inc. | Oxoacridinyl acetic acid derivatives and methods of use |
US11414387B2 (en) | 2017-11-20 | 2022-08-16 | Stingthera, Inc. | Oxoacridinyl acetic acid derivatives and methods of use |
Also Published As
Publication number | Publication date |
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KR101767208B1 (ko) | 2017-08-10 |
EP2502915A1 (en) | 2012-09-26 |
CN102510856A (zh) | 2012-06-20 |
US20120136155A1 (en) | 2012-05-31 |
TWI513689B (zh) | 2015-12-21 |
KR20120101326A (ko) | 2012-09-13 |
EP2502915A4 (en) | 2013-03-20 |
CN102510856B (zh) | 2015-08-05 |
JP2011105645A (ja) | 2011-06-02 |
TW201134814A (en) | 2011-10-16 |
JP5717959B2 (ja) | 2015-05-13 |
US9073854B2 (en) | 2015-07-07 |
EP2502915B1 (en) | 2015-03-18 |
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