WO2010134492A1 - Cassette - Google Patents

Cassette Download PDF

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Publication number
WO2010134492A1
WO2010134492A1 PCT/JP2010/058294 JP2010058294W WO2010134492A1 WO 2010134492 A1 WO2010134492 A1 WO 2010134492A1 JP 2010058294 W JP2010058294 W JP 2010058294W WO 2010134492 A1 WO2010134492 A1 WO 2010134492A1
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WO
WIPO (PCT)
Prior art keywords
cassette
opening
shutter structure
substrate
protrusion
Prior art date
Application number
PCT/JP2010/058294
Other languages
English (en)
Japanese (ja)
Inventor
章男 松山
資 有光
浩幸 島田
貴行 湊
Original Assignee
シャープ株式会社
淀川ヒューテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社, 淀川ヒューテック株式会社 filed Critical シャープ株式会社
Priority to CN2010800215910A priority Critical patent/CN102484088A/zh
Priority to JP2011514404A priority patent/JPWO2010134492A1/ja
Publication of WO2010134492A1 publication Critical patent/WO2010134492A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Definitions

  • the present invention relates to a cassette for storing a substrate, and more particularly to a cassette for storing a glass substrate used in a method for manufacturing a liquid crystal panel.
  • a liquid crystal panel which is a component of a liquid crystal display device, has a structure in which a pair of glass substrates are opposed to each other with a predetermined gap secured.
  • glass substrates for liquid crystal panels are becoming larger year by year.
  • Such a next-generation large-sized liquid crystal glass substrate transport system uses a storage cassette for storing liquid crystal glass substrates in multiple stages (for example, Patent Documents 1 to 3). *
  • the storage cassette storing the glass substrate is used for transporting and storing the glass substrate from the mounting portion of the liquid crystal panel manufacturing apparatus to the mounting portion of another manufacturing apparatus in the manufacturing process in the clean room.
  • the storage cassette is also used for transporting and storing a glass substrate between a placement unit of a liquid crystal panel manufacturing apparatus and a storage unit of a cassette storage.
  • the atmosphere in the clean room has sufficient air cleanliness, but foreign substances such as dust scattered from the operator and floor surface when transporting and storing the storage cassette adhere to the substrate surface, and organics during substrate processing A mist such as gas may float in the clean room and adhere to the substrate surface. If the substrate is processed with foreign matter or mist attached, the quality of the liquid crystal panel may be deteriorated.
  • the storage cover made up of the upper plate and the four side plates is put on the storage cassette, and transport and storage are performed so that foreign matter or the like does not adhere.
  • the storage cassette and the storage cover are separate, it is necessary to cover the storage cover.
  • Patent Document 1 a box-shaped storage cassette having an opening through which a substrate can be taken in and out is provided with a door that can be opened and closed in order to open and close the opening, and an opening and closing mechanism that opens and closes the door.
  • a box-shaped storage cassette having an opening through which a substrate can be taken in and out is provided with a door that can be opened and closed in order to open and close the opening, and an opening and closing mechanism that opens and closes the door.
  • Patent Document 2 it is possible to reduce adhesion of foreign matter and mist to the surface of the stored substrate during transportation and storage, and it is possible to automate opening and closing of the door.
  • This storage cassette is provided with an opening / closing mechanism that opens and closes the door.
  • the door is opened / closed by this opening / closing mechanism, the door is largely rotated around the opening / closing mechanism. It is necessary to ensure. That is, in the case of this storage cassette, the occupied area at the time of opening and closing is large, and it is difficult to use it generally in the manufacturing process of the liquid crystal panel in the clean room.
  • glass substrates for liquid crystal panels are becoming larger year by year, and adopting a door opening / closing structure for storage cassettes that store such glass substrates requires a large amount of occupied area around the storage cassette, making it practical. The sex is further reduced. *
  • the present invention has been made in view of such a point, and a main object of the present invention is to reduce the amount of foreign matter and mist from adhering to the surface of the stored substrate, and to provide an open / close structure having a small occupation area. To provide a cassette.
  • the cassette according to the present invention is a cassette for storing a substrate, a cassette main body portion in which the substrate is disposed, a cassette opening formed in a part of the cassette main body portion into which the substrate is taken in and out,
  • a shutter structure including a closing plate that closes the cassette opening, and a portion of the cassette main body that is located at a peripheral edge of the cassette opening and a surface facing the shutter structure are respectively disposed on the closing plate.
  • a protrusion is formed along the opening / closing direction of the first and second protrusions, and the protrusion located on the cassette main body side and the protrusion located on the shutter structure side are separated from each other.
  • each of the protrusions located on the cassette main body side and the protrusions located on the shutter structure side is a rib-like protrusion extending in the open / close direction of the closing plate. is there.
  • the opening / closing direction of the closing plate is a height direction of the cassette body.
  • a protrusion extending along the horizontal direction is further formed in the shutter structure.
  • any one of the protrusions located on the cassette body portion side and the protrusions located on the shutter structure side is a plurality of protrusions, and the protrusions are disposed between the plurality of protrusions.
  • the protrusion located on the cassette body portion side and the protrusion located on the shutter structure side each have an L-shaped cross section perpendicular to the opening / closing direction of the opening / closing plate.
  • the cassette body portion is provided with a locking portion for locking the shutter structure, and the shutter structure houses the locking portion provided in the cassette body portion.
  • a guide portion is formed.
  • Another cassette of the present invention is a cassette for storing a substrate, a cassette main body portion in which the substrate is disposed, a cassette opening portion formed in a part of the cassette main body portion, in which the substrate is taken in and out,
  • a shutter structure including a closing plate for closing the cassette opening, and the cassette main body portion is provided with a locking portion for locking the shutter structure, and the shutter structure is provided on the cassette main body portion.
  • a guide portion for accommodating the provided locking portion is formed, the locking portion is a roller bearing, and a groove in which the roller bearing can be disposed is formed in the guide portion, The groove extends obliquely with respect to the height direction of the cassette body.
  • the roller bearing is provided on the top of the cassette body.
  • the roller bearing is provided at a position below the uppermost portion in addition to the uppermost portion.
  • at least one of the roller bearings is provided at a central portion in the height direction of the cassette body.
  • a plurality of combinations of the guide part and the roller bearing are provided along the height direction of the cassette body part, and a horizontal position of the guide part positioned above in the height direction is provided. The length in the direction is longer than the length in the horizontal direction of the guide portion positioned below it.
  • Still another cassette according to the present invention is a cassette for storing a substrate, a cassette main body portion in which the substrate is disposed, and a cassette opening portion formed in a part of the cassette main body portion into which the substrate is taken in and out.
  • a shutter structure including a closing plate for closing the cassette opening, and the shutter structure is provided with a locking portion for locking the shutter structure to the cassette main body.
  • a guide portion for accommodating the locking portion provided in the shutter structure is formed, the locking portion is a roller bearing, and a groove in which the roller bearing can be disposed is formed in the guide portion. The groove extends obliquely with respect to the height direction of the cassette body.
  • Still another cassette according to the present invention is a cassette for storing a substrate, a cassette main body portion in which the substrate is disposed, and a cassette opening portion formed in a part of the cassette main body portion into which the substrate is taken in and out.
  • a shutter structure including a closing plate for closing the cassette opening, and the cassette main body is provided with a portion having a tapered shape, and the shutter structure corresponds to the portion having the tapered shape.
  • a portion having a tapered shape is provided.
  • a plurality of wires are arranged inside the cassette body, the substrate is a glass substrate, and the glass substrate is supported by the wires.
  • the cassette body has a box shape, and the cassette opening is formed on at least one of a front surface and a rear surface of the box shape. On the bottom surface of the shape, an opening is formed into which a transfer device for transferring the substrate is inserted.
  • a cassette opening is formed in a part of the cassette main body in which the substrate is arranged, and a shutter structure including a closing plate for closing the cassette opening is provided. Projections are formed along the height direction of the cassette body on the surfaces of the cassette body that are located at the periphery of the cassette opening and on the opposite surfaces of the shutter structure. Therefore, it is possible to provide a storage cassette having an opening / closing structure with a small occupation area, while reducing the adhesion of foreign matter and mist to the surface of the stored substrate.
  • FIG. It is a perspective view of cassette 100 concerning an embodiment of the present invention.
  • (A) And (b) is a side view of the cassette 100.
  • FIG. It is a side view of cassette 100 concerning an embodiment of the present invention.
  • (A) is a partially enlarged view of the shutter structure 30 and the cassette body 10
  • (b) is a cross-sectional view taken along line VB-VB in (a).
  • FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. It is a perspective view of cassette 100 concerning an embodiment of the present invention.
  • FIG. 15 is a cross-sectional view taken along line XX in FIG. It is a side view of cassette 100 concerning an embodiment of the present invention. It is sectional drawing which shows the structure of the cassette 100 of a wire cassette type.
  • FIG. 1 is a perspective view schematically showing the overall configuration of the cassette 100 of the present embodiment.
  • the cassette 100 of this embodiment can store the substrate 40.
  • the substrate 40 is, for example, a glass substrate for a liquid crystal panel.
  • the glass substrate 40 may be a mother glass before being cut out to the dimensions of the liquid crystal panel, or may be a glass having the size of the liquid crystal panel after being cut out. Further, the glass substrate 40 may be an array substrate on which a thin film transistor (TFT) is manufactured (or a product in the middle of manufacturing), or a CF substrate on which a color filter (CF) is formed (or a device in the middle of manufacturing thereof). ).
  • TFT thin film transistor
  • CF color filter
  • the substrate 40 may be another thin plate such as a wafer in addition to a glass substrate. *
  • liquid crystal panel substrate 40 a thin substrate for manufacturing a PDP, an organic EL panel, and other flat panel displays (not limited to glass, but in a sheet form that can be stored in a wire cassette ).
  • the cassette 100 includes a cassette body 10, a cassette opening 20 formed in a part of the cassette body 10, and a shutter structure 30 including a closing plate 32 that closes the cassette opening 20. Yes.
  • a substrate 40 can be disposed inside the cassette body 10. Further, the substrate 40 can be taken in and out from the cassette opening 20. *
  • Each of the cassette body 10 and the shutter structure 30 has projections (14, 34) formed on surfaces facing each other. Specifically, a protrusion 14 is formed on a portion 12 of the cassette body 10 that is located at the periphery of the cassette opening 20, while a protrusion 34 is formed on the surface of the shutter structure 30 that faces the peripheral portion 12. Is formed.
  • the protrusions (14, 34) of the present embodiment extend along the opening / closing direction of the closing plate 32. In the configuration of the present embodiment, the opening / closing direction of the shutter structure 30 is the height direction 50 of the cassette body 10, that is, the gravity direction (vertical direction). *
  • the protrusions 14 are provided at the left and right locations of the peripheral portion 12 of the cassette body 10.
  • the protrusions 34 are provided on the left and right edges of the closing plate 32 of the shutter structure 30.
  • the protrusions (14, 34) of the present embodiment are rib-shaped protrusions that are elongated along the height direction 50.
  • the cassette opening 20 can be closed by the closing plate 32 of the shutter structure 30.
  • the protrusion 14 positioned on the cassette body 10 side and the protrusion 34 positioned on the shutter structure 30 side are separated from each other.
  • the closing plate 32 closes the cassette opening 20
  • the protrusion 14 and the protrusion 34 are separated from each other, thereby eliminating the mutual sliding of the protrusion 14 and the protrusion 34, or Sliding can be reduced.
  • the cassette body 10 of the present embodiment has a box shape.
  • the side part of the cassette body 10 can be made with a frame structure, and the surface part of the cassette body 10 can be made with a panel structure.
  • the frame structure portion may be made of metal (for example, aluminum, iron, stainless steel, etc.)
  • the panel structure portion may be made of a resin plate, a metal plate (for example, aluminum plate), or the like.
  • the skeleton of the cassette body 10 has a frame structure, and the side surfaces (left and right surfaces) 11A and the upper surface 11B of the cassette body 10 are panel structures (for example, metal plates). Covered by.
  • the cassette opening 20 is formed on the front surface of the cassette body 10, but may be formed on the rear surface in addition to the front surface.
  • the substrate 40 can be taken in and out from both the front and rear.
  • the bottom face of the cassette body 10 has a form covered with a panel structure and a form not covered.
  • the loading and unloading of the substrate 40 is performed by introducing, for example, a robot arm into the cassette opening 20 and the robot arm.
  • a roller conveyor provided in the lifting device is introduced into the opening of the bottom, and the cassette is opened by the roller conveyor.
  • the substrate 40 can be taken in and out from the section 20.
  • the cassette body 10 is provided with a locking portion 16 that locks the shutter structure 30.
  • the shutter structure 30 is formed with a guide portion 36 that houses the locking portion 16 provided in the cassette body 10.
  • the locking part 16 of this embodiment is a roller bearing.
  • a groove is formed in the guide portion 36, and the roller bearing 16 is accommodated in the groove, whereby the shutter structure 30 is fixed to the cassette body portion 10.
  • a support member 15 that supports the lower surface of the shutter structure 30 is provided at the lower portion of the cassette body 10.
  • the support member 15 is formed in a portion (lower portion) located on the periphery of the cassette opening 20 in the cassette body 10.
  • the support member 15 is an elongated protrusion extending in the horizontal direction (a direction perpendicular to the height direction 50), and supports the lower surface of the closing plate 32 of the shutter structure 30.
  • the support member 15 may have another form, for example, a protrusion having a short length (such as a rectangular protrusion or a circular protrusion). *
  • FIG. 2A and 2B schematically show a side configuration of the cassette 100 of the present embodiment.
  • the combination of the locking portion 16 and the guide portion 36 (16 ⁇ / b> A and 36 ⁇ / b> A, 16 ⁇ / b> B and 36 ⁇ / b> B) is along the height direction 50 as compared with that shown in FIG. 1.
  • the main difference is that a plurality of points are provided.
  • one combination of the locking portion 16 and the guide portion 36 may be provided along the height direction 50. Is possible. *
  • the locking portions 16 (16A, 16B) are roller bearings.
  • a groove 37 is formed in the guide portion 36 (36A, 36B), and the roller bearing 16 can be disposed in the groove 37. Further, the groove 37 extends obliquely with respect to the height direction 50 of the cassette body 10. *
  • the shutter structure 30 is connected to, for example, another vertical movement mechanism (robot arm, elevator, etc.), and is movable in a vertical direction 52 that is parallel (or substantially parallel) to the height direction 50.
  • another vertical movement mechanism robot arm, elevator, etc.
  • the roller bearing 16 only slightly rotates in the groove 37, and the closing plate 32 of the shutter structure 30 moves as indicated by an arrow 55 to close the cassette opening 20.
  • the shutter structure 30 is fixed to the cassette body 10, so that it can be separated from the vertical movement mechanism connected to the shutter structure 30. Thereby, the cassette 100 in which the shutter structure 30 and the cassette body 10 are integrated can be moved.
  • the shutter structure 30 is fixed by the roller bearings 16 (16 ⁇ / b> A, 16 ⁇ / b> B) of the cassette body 10 and the support member 15. *
  • the length of the upper guide portion 36A is set so that the shutter structure 30 can be easily detached from the cassette body 10 when the shutter structure 30 is continuously raised. It is longer than the length.
  • the combination of the roller bearing 16 and the guide portion 36 is not limited to two in the configuration shown in FIG. 2, and may be three or four or more. Even in such a case, it is preferable that the length of the upper guide portion is longer than the length of the lower guide portion.
  • the roller bearing 16 is the uppermost part of the cassette body part 10 (for example, the region of the dimension L in FIG. 2B). Can be provided.
  • the shutter structure 30 is supported in the gravity (vertical) direction by the support member 15, but is not fixed in the horizontal direction. Then, the shutter structure 30 is likely to swing with the guide portion 36 as a fulcrum. Therefore, as shown in FIG. 4, a combination of the roller bearing 16 and the guide portion 36 can be provided in the central portion of the cassette body 10. In this way, the shake width of the shutter structure 30 can be reduced as compared with the structure shown in FIG. However, in the structure shown in FIG. 4, it is required to secure the strength of the portion located above the guide portion 16 in the shutter structure 30. *
  • FIG. 5A is an enlarged view of the periphery of the support member 15 when moving from FIG. 2A to FIG.
  • a projection 34 is formed extending from the closing plate 32 of the shutter structure 30 toward the cassette body 10.
  • a projection 14 is formed extending from the peripheral portion 12 of the cassette body 10 toward the closing plate 32 of the shutter structure 30.
  • the shutter structure 30 is movable along the vertical direction 52, and when the shutter structure 30 moves downward and approaches the support member 15, the closing plate 32 blocks the cassette opening 20. . *
  • FIG. 5B is a schematic sectional view taken along line VB-VB in FIG. 5A (or FIG. 2B).
  • two protrusions 34 (34A, 34B) and one protrusion 14 are provided, and the protrusion 14 is disposed between the protrusion 34A and the protrusion 34B. Since the protrusion 14 and the protrusion 34 (34A, 34B) are separated from each other, even if the shutter structure 30 moves along the vertical direction 52, the protrusion 14 and the protrusion 34 do not slide with each other ( (Or substantially does not slide). *
  • the combination of the protrusion 14 and the protrusion 34 is arranged such that a part of each protrusion overlaps when viewed from the side surface direction (horizontal direction) of the protrusion. ing.
  • this arrangement even if outside air around the cassette 100 tries to enter the inside of the cassette 100 as indicated by an arrow 51 (see FIG. 5B), it is difficult to enter. That is, since the path of the gap between the protrusion 14 and the protrusion 34 is bent and becomes a resistance, it is difficult for outside air to enter the inside of the cassette 100. Thereby, even if the protrusion 14 and the protrusion 34 are separated from each other, it is possible to improve the airtightness inside the cassette 100 against the outside air around the cassette 100. *
  • the combination of the protrusion 14 and the protrusion 34 is not limited to the example shown in FIG.
  • two protrusions 14 and one protrusion 34 may be formed and meshed with each other.
  • a plurality of protrusions 14 may be provided and a plurality of protrusions 34 may be provided to engage with each other.
  • the path of the gap between the protrusion 14 and the protrusion 34 is bent to increase the resistance, and it becomes difficult for outside air to enter the cassette 100 (that is, High sealing performance against outside air).
  • the protrusions 14 and the protrusions 34 of the present embodiment are made of resin, for example. Further, the protrusion 14 and the protrusion 34 may be made of another material (for example, metal). Assuming that the size of the glass substrate 40 for the liquid crystal panel is about 3 m ⁇ 3 m, the gap G between the protrusion 14 and the protrusion 34 in the configuration shown in FIG. 5B is, for example, 10 to 20 mm. It should be noted that suitable materials, dimensions, arrangement, and the like for the protrusions 14 and 34 can be adopted as appropriate. *
  • FIG. 6 is a schematic sectional view taken along line VI-VI in FIG.
  • a guide portion 36 extends from the closing plate 32 of the shutter structure 30, and a locking portion (roller bearing) 16 is accommodated in a groove 37 formed in the guide portion 36.
  • the roller bearing 16 is connected to the cassette body 10 through a support portion 17.
  • a roller bearing is used as the locking portion 16, but another structure may be used. *
  • the cassette opening 20 is formed in a part of the cassette body 10, and the shutter structure 30 including the closing plate 32 that closes the cassette opening 20 is provided. Further, protrusions (14, 34) along the height direction 50 of the cassette main body 10 are formed on the surfaces of the cassette main body 10 that are located at the periphery of the cassette opening 20 and the surfaces of the shutter structure 30 facing each other. ) And the protrusions (14, 34) are spaced apart from each other.
  • the closing plate 32 of the shutter structure 30 is moved along the opening / closing direction (or the height direction 50) and the cassette opening 20 of the cassette body 10 is opened / closed, the projections (14, 34) are not formed.
  • the closing plate 32 can be opened and closed without sliding. As a result, since it is possible to suppress the generation of dust accompanying the opening / closing operation of the closing plate 32, it is possible to reduce the dust from adhering to the surface of the substrate 40 housed inside the cassette body 10. it can. *
  • the shutter structure 30 is a method of moving up and down rather than a method of rotating the door largely around the opening / closing mechanism. Therefore, a very large occupied area is required around the storage cassette in the case of the door system, but the configuration of the present embodiment does not require this, and the storage cassette 100 having an opening / closing structure with a small occupied area is realized. Can do. *
  • the closing plate 32 of the shutter structure 30 is moved downward (in FIG. 2A).
  • the closing plate 32 can be slid in a direction to close the cassette opening 20 (see arrow 55 in FIG. 2B). Therefore, the cassette opening 20 can be closed by a simple mechanism (mechanical structure) without employing a complicated control mechanism.
  • the roller bearing 16 is only slightly rotated when being accommodated in the groove 37, the closing of the cassette opening 20 by the closing plate 32 is completed, so that the amount of dust generated from the roller bearing 16 is also suppressed to a very small amount. be able to. Therefore, also from the point of the structure of the locking portion (roller bearing) 16, it is possible to reduce the generation of dust accompanying the opening / closing operation of the closing plate 32.
  • the roller bearing 16 is designed to have a small dimension L (dimension L in FIG. 2B) in the upper region of the cassette main body 10 to be arranged (for example, vibration when transporting the cassette, etc.)
  • L dimension L in FIG. 2B
  • the angle at which the roller bearing 16 rotates during the shutter opening / closing operation is very small. be able to.
  • FIG. 1 the configuration of the combination of the protrusion 14 and the protrusion 34 extending in the height direction 50 is shown.
  • An extending protrusion 13 ⁇ / b> A can be formed on the upper portion of the shutter structure 30.
  • a protrusion 13 ⁇ / b> A extending in the horizontal direction is provided on the upper portion of the closing plate 32 of the shutter structure 30.
  • a protrusion 13B extending in the horizontal direction is also formed on the upper portion of the cassette body 10 corresponding to the protrusion 13A.
  • the protrusion 13 extending in the horizontal direction may be formed only on the shutter structure 30 side without being formed on the cassette body 10 side. *
  • FIG. 8A shows a partially enlarged cross-sectional view of the periphery of the protrusion 13A provided on the top of the closing plate 32 of the shutter structure 30.
  • a protrusion 13C extending in the horizontal direction is connected to a protrusion 13A extending in the horizontal direction.
  • a projection 13D extending in the horizontal direction is provided on the upper surface 11B of the cassette body 10.
  • the protrusion 13D extends upward, and the protrusion 13C is formed so as to surround the protrusion 13D.
  • FIG. 8B is a partially enlarged cross-sectional view of the periphery of the protrusions 13E and 13F provided at the lower part of the closing plate 32 of the shutter structure 30.
  • FIG. The protrusion 13E and the protrusion 13F extend in the horizontal direction.
  • the protrusion 13F is provided on a part of the cassette body 10 (here, the bottom plate) and extends upward.
  • a protrusion 13E is formed so as to surround the protrusion 13F.
  • the protrusion 13E is attached to the shutter structure 30.
  • FIGS. 8A and 8B may be adopted for both (ie, the upper part and the lower part), or may be either one (ie, the upper part or the lower part). It should be noted that the configuration shown in FIGS. 8A and 8B can be modified as appropriate as appropriate.
  • the protrusion 13A and the protrusion 13C may be made of an integral member, or the protrusion 13C may be made of a plurality of members.
  • the protrusion 13 extending in the horizontal direction can be formed continuously with the guide portion 36.
  • FIG. 9 shows a configuration example in which the protrusion 13 is integrated with the guide portion 36. *
  • the opening / closing direction of the closing plate 32 of the shutter structure 30 is the height direction 50 (that is, the vertical direction) of the cassette body 10
  • the opening / closing direction of the closing plate 32 is horizontal.
  • the direction may be used.
  • each of the protrusion 14 and the protrusion 34 extends in the horizontal direction.
  • FIG. 10 shows a slide-type cassette 1000 having a sliding part 140.
  • a slide structure (sliding portion) 140 is formed around the cassette opening 120 provided in the cassette body 110.
  • the cover 130 that closes the cassette opening 120 moves up and down (arrow 152) while sliding on the slide structure 140.
  • the slide structure 140 becomes a dust generation source in the vicinity of the cassette opening 120 for taking in and out the substrate 40, this is not suitable for use in a clean room.
  • FIGS. 11A and 11B show a removable cassette 1100 provided with a hook structure 150.
  • FIGS. 11A and 11B are a perspective view and a side view of the cassette 1100, respectively.
  • a cassette 1100 shown in FIG. 11 has a structure in which a removable cover 130 is hooked from above.
  • the generation of dust can be suppressed by avoiding sliding between the cover 130 and the cassette body 110, but the airtightness between the cover 130 and the cassette body 110 (arrow 155) is ensured. Is difficult.
  • a packing or the like is provided between the cover 130 and the cassette body 110, but then sliding occurs in the packing or the like, and as a result, dust is generated.
  • there is a disadvantage that looseness is likely to occur if the matching between the cover 130 and the cassette body 110 (arrow 155) is poor. *
  • FIGS. 12 (a) and 12 (b) show a removable cassette 1200 with a fitting structure (161, 162). 12 (a) and 12 (b) respectively show 2 is a perspective view and a side view of the cassette 1200.
  • FIG. A cassette 1200 shown in FIG. 12 has a structure in which a removable cover 130 is fitted from the side. In the case of this structure, airtightness between the cover 130 and the cassette body 110 is relatively easy to ensure. However, every time the substrate 40 is taken in and out of the cassette body 110, it is necessary to remove the cover 130 from the cassette body 110 or fit it into the cassette body 110, and the opening / closing operation by the cover 130 (for example, arrow 154, arrow 156) needs to have a large space.
  • the cassette 1200 cannot be a storage cassette having an opening / closing structure with a small occupation area.
  • FIG. 13 shows a cassette 1300 whose panel 135 is a door-type opening / closing.
  • the door-type cassette 1300 shown in FIG. 13 cannot be a storage cassette having an opening / closing structure with a small occupation area. That is, as shown in FIG. 13, even in the double-open cassette 1300, it is necessary to secure a rotation space (158) for opening and closing the panel 135, and therefore a cassette that requires a large occupation area. End up. *
  • the cassette 100 of this embodiment can avoid such a fault.
  • the protrusion 14 located on the cassette body 10 side and the protrusion 34 located on the shutter structure 30 side are separated from each other, and both the protrusions 14, 34 are located.
  • the state in which the protrusion 14 and the protrusion 34 are separated from each other is not required as long as the protrusion 14 and the protrusion 34 are in close contact with each other so that dust is generated by sliding.
  • the protrusion 14 and the protrusion 34 are designed and configured so as to be separated from each other, even if a portion where the protrusion 14 and the protrusion 34 come into contact with each other as a result, dust is generated from the protrusions (14, 34). No or no dust is generated, so such a state may be used. Therefore, even when such a contact state occurs as a result, the state can be included in the state where the protrusion 14 and the protrusion 34 are separated from each other.
  • FIG. 14 shows a cassette 100 according to a modification of the present embodiment.
  • the method of fixing the shutter structure 30 to the cassette main body 10 is not limited to the method shown in FIG. 2 and the like, and as the shutter structure 30 moves downward due to gravity, it moves toward the cassette opening 20 of the cassette main body 10. Any approach can be suitably employed. *
  • a tapered portion 18 is formed on the upper portion of the cassette body 10.
  • a tapered portion 38 is also formed in the shutter structure 30.
  • the tapered portion 38 of the shutter structure 30 is connected to the closing plate 32 via a support member 39.
  • the structure in which outside air (air) does not easily enter the inside of the cassette body 10 has a rectangular (or substantially rectangular) cross section in the horizontal direction (direction perpendicular to the height direction 50) as shown in FIG. Not limited to protrusions.
  • the protrusion 14 located on the cassette body 10 side and the protrusion 34 located on the shutter structure 30 side each have an L-shaped cross-sectional shape. It has a shape. Even in such a configuration, the path of the gap between the protrusion 14 and the protrusion 34 is bent and becomes a resistance, so that it is difficult for outside air to enter the cassette 100.
  • the protrusion structures (14, 34) shown in FIG. 15 are not only applied to the configuration shown in FIG. 14, but of course may be adopted in the configuration shown in FIG. *
  • the protrusion 14 is formed at the peripheral portion 12 of the cassette opening 12 of the cassette body 10.
  • the peripheral portion 12 where the protrusion 14 is formed Is not limited to the front surface of the cassette body 10 and may be a portion of the side surface 11A. In that case, the surface facing the protrusion 14 formed at that location is provided in the shutter structure 30 and the protrusion 34 is provided on that surface.
  • FIG. 16 shows a cassette 100 as a further modification of the present embodiment.
  • the shape of the groove 37 of the guide portion 36 (36A, 36B) is different from that shown in FIG.
  • the guide portion 36 shown in FIG. 16 has a structure in which the roller bearing 16 (16A, 16B) is guided, and the groove 37 has a shape in which the top is narrow and the bottom is wide.
  • the shutter structure 30 is lowered, the roller bearing 16 that has entered the bottom of the groove 37 is subsequently drawn into the groove 37 and is fixed when the roller bearing 16 is caught by the inner wall of the groove 37.
  • FIG. 17 is a schematic diagram showing an example in which the cassette 100 of the present embodiment has a wire cassette type configuration.
  • Wires 60 that support the substrate 40 are arranged inside the cassette body 10. Specifically, one substrate 40 is supported by a plurality of wires 60, and the plurality of wires 60 are arranged in multiple stages. By arranging the wires 60 in multiple stages, the glass substrates 40 can be accommodated in multiple stages inside the cassette body 10. *
  • the shutter structure 30 is connected to, for example, a part of the elevator 65 and is movable in the vertical direction 52. Further, an opening (lower surface opening) 22 is formed on the lower surface of the cassette body 10, and a roller conveyor 61 connected to the lifting frame 62 is inserted into the opening 22. The roller conveyor 61 comes into contact with the substrate 40 from between the wires 60 and pays out the substrate 40 from the cassette opening 20. The substrate 40 paid out from the cassette opening 20 moves to the transport device 64, and is then used for a necessary process or stored in a necessary place. *
  • the closing plate 32 When closing the cassette opening 20 with the closing plate 32 of the shutter structure 30, the closing plate 32 is moved downward using the elevator 65 (see arrow 52), for example, as shown in FIGS. 2 (a) and 2 (b). As shown, the cassette opening 20 may be closed with the closing plate 32. Even in the case of the wire cassette method, since the projection 34 is formed on the shutter structure 30 and the projection 14 is formed on the cassette body 10, the inside of the cassette 100 can be well sealed against the outside air. . *
  • the roller conveyor 61 is raised and lowered.
  • the roller conveyor 61 may be fixed and the cassette body 10 may be lowered (or raised and lowered). In that case, the roller conveyor 61 is inserted into the bottom opening 22 of the cassette body 10 by lowering the cassette body 10.
  • the present invention can be applied to a storage cassette (for example, a storage cassette in a shelf-hanging form).
  • a substrate transfer device for paying out the substrate 40 from the cassette body 10 for example, an air floating conveyor having a structure capable of floating and moving the substrate 40 with air is used in addition to the roller conveyor. You can also.
  • the storage cassette which has an opening / closing structure with a small occupied area can be provided.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

La présente invention a trait à une cassette de confinement qui peut minimiser l'adhérence de corps étrangers sur la surface d'un substrat contenu à l'intérieur de la cassette et qui est pourvue d'une structure d'ouverture/de fermeture qui occupe un espace réduit. La cassette (100) destinée à contenir un substrat (40) selon la présente invention comprend un corps de cassette (10) dans lequel le substrat (40) est disposé, une ouverture de cassette (20) qui est formée dans une partie du corps de cassette (10), et une structure de volet (30) qui inclut une plaque de fermeture (32) permettant de fermer l'ouverture de cassette (20). Des protubérances (14, 34) s'étendant dans la direction d'ouverture et de fermeture (50) de la plaque de fermeture (32) sont formées sur le corps de cassette (10) et sur la structure de volet (30) de manière à être respectivement situées sur les surfaces de parties (12) du corps de cassette (10), lesdites parties (12) étant situées sur les bores périphériques de l'ouverture de cassette (20), et sur les surfaces de la structure de volet (30), lesdites surfaces des parties (12) du corps de cassette (10) et lesdites surfaces de la structure de volet (30) se faisant face. Les protubérances (14) du côté du corps de cassette (10) et les protubérances (34) du côté de la structure de volet (30) sont séparées les unes des autres.
PCT/JP2010/058294 2009-05-20 2010-05-17 Cassette WO2010134492A1 (fr)

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JP2009-121559 2009-05-20

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CN103350886A (zh) * 2013-07-19 2013-10-16 深圳市华星光电技术有限公司 物件位置校正装置
KR20170049352A (ko) 2015-10-28 2017-05-10 가부시키가이샤 다이후쿠 수납 용기
KR20200100200A (ko) 2018-01-12 2020-08-25 신에츠 폴리머 가부시키가이샤 패널 수납 용기

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CN106597814B (zh) * 2017-01-11 2018-02-23 深圳市大川光电设备有限公司 多功能曝光平台
CN112644841B (zh) * 2020-12-03 2022-09-09 Tcl华星光电技术有限公司 一种卡匣及自动化洁净仓储

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