WO2010119788A1 - リニアモータアクチュエータ - Google Patents
リニアモータアクチュエータ Download PDFInfo
- Publication number
- WO2010119788A1 WO2010119788A1 PCT/JP2010/056178 JP2010056178W WO2010119788A1 WO 2010119788 A1 WO2010119788 A1 WO 2010119788A1 JP 2010056178 W JP2010056178 W JP 2010056178W WO 2010119788 A1 WO2010119788 A1 WO 2010119788A1
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- WIPO (PCT)
- Prior art keywords
- mover
- coil
- coils
- stator
- permanent magnet
- Prior art date
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/16—Rectilinearly-movable armatures
- H01F7/1607—Armatures entering the winding
- H01F7/1615—Armatures or stationary parts of magnetic circuit having permanent magnet
Definitions
- the present invention relates to a linear actuator in which a mover moves relative to a stator in one axial direction, and in particular, moves relative to a stator in one axial direction and then reverses the moving direction.
- the present invention relates to a stroke type linear motor actuator that moves in the other axial direction.
- a voice coil motor including a permanent magnet and a coil is known (see, for example, Patent Document 1).
- the operating principle of the voice coil motor utilizes Fleming's left-hand rule, that is, the property that a thrust is generated when a current is passed through a coil in a magnetic field generated by a permanent magnet.
- Fleming's left-hand rule that is, the property that a thrust is generated when a current is passed through a coil in a magnetic field generated by a permanent magnet.
- the voice coil motor has a feature that it can move at high speed and is inexpensive, it is applied to various uses such as a speaker, a head drive of a magnetic disk, and a spool drive of a servo valve.
- the voice coil motor has an essential problem that the voice coil cannot be controlled when the voice coil jumps out of the range of the magnetic field created by the permanent magnet.
- the voice coil When the voice coil is moved at a high speed with respect to the permanent magnet or when the stroke of the voice coil is increased, the voice coil may jump out of the range of the magnetic field of the permanent magnet due to inertia. If the voice coil jumps out of the permanent magnet by more than half, it becomes difficult to control the voice coil even if a current that returns to the voice coil is passed.
- an elastic body such as a spring or cone paper is attached to the voice coil, and the voice coil returns to the range of the magnetic field of the permanent magnet using the restoring force of the elastic body. It was like that.
- the present invention has been made to solve the above-described problems of the conventional linear motor actuator, and can linearly move the mover without using the restoring force of a mechanical elastic body.
- the purpose is to provide.
- one of a mover and a stator having at least one permanent magnet magnetized with an N-pole and an S-pole in the axial direction, and surrounding the one of the mover and the stator.
- a linear motor actuator comprising the other of the mover and the stator, the first and second coils being arranged in the axial direction, the thrust generated in the first coil and the thrust generated in the second coil So that the phases of the first coil and the second coil are shifted from each other, the pitch between the coil centers that connects the centers in the axial direction of the first and second coils and the movable coil
- the pitch between the magnetic poles of one of the child and the stator is made different.
- one of a mover and a stator having at least one permanent magnet magnetized with an N-pole and an S-pole in the axial direction, and a first surrounding the mover and the stator.
- a linear motor actuator comprising the other of the mover and the stator, the first and second coils being arranged in the axial direction, the thrust generated in the first coil and the thrust generated in the second coil So that the phases of the first coil and the second coil are different from each other, and the coil center pitch connecting the centers in the axial direction of the first and second coils is connected to the first coil and the second coil.
- the pitch between the magnetic poles of one of the mover and the stator is made to coincide.
- a movable element and a stator in which first and second permanent magnets having N poles and S poles magnetized in the axial direction are arranged so as to face each other.
- the other of the mover and the stator having a coil surrounding one of the mover and the stator, and the outer N of the first and second permanent magnets.
- the phases of the thrusts generated in the first and second coils are shifted, for example, a sine wave thrust is output to the first coil, and the second For example, a thrust of a cosine wave can be output to the coil. Since the force that pushes and pulls the mover can be applied to the first and second coils at the same time, the mover that moves near the end of the stroke and enters the deceleration region can be braked early, The mover can be vibrated reliably. Further, since the amount of the first and second permanent magnets in the first and second coils changes during the movement of the mover, the thrust generated in the first and second coils is further increased. Various changes can be made. As a result, the mover can be vibrated with good followability from a low frequency to a high frequency.
- the phases of the thrusts generated in the first and second coils are out of phase, for example, a sine wave thrust is output to the first coil and the second coil is output, for example, cosine.
- Wave thrust can be output. Since the force that pushes and pulls the mover can be applied to the first and second coils at the same time, the mover that moves near the end of the stroke and enters the deceleration region can be braked early, The mover can be vibrated reliably.
- the outer N pole-N pole pitch or the outer S pole-S pole pitch of the first and second permanent magnets is longer than the axial length of the coil.
- the linear motor actuator includes a double coil type linear motor actuator in which first and second coils are arranged on a stator, and a single coil type linear motor actuator in which one coil is provided. First, a double coil type linear motor actuator will be described.
- two coils (a first coil 1 a and a second coil 1 b) are arranged on the stator 2 of the double coil type linear motor actuator in a state where the axes are aligned.
- the axial lengths of the first and second coils 1a and 1b are equal to each other.
- the pitch between the coil centers connecting the axial centers of the first and second coils 1a and 1b is LC1
- the outer method of the first and second coils 1a and 1b is LC3.
- the inner method of the coils 1a and 1b is LC2.
- a spacer 7 is provided between the first and second coils 1a and 1b for spacing the coils.
- a linear motion bearing 8 is provided as a guide means via a spacer 11 and a collar 10 on the outside of the coil unit composed of the first and second coils 1a and 1b.
- the linear bearing 8 is a bush or a spline and guides the mover 4 to move linearly.
- the first and second coils 1a and 1b, the spacers 7 and 11, and the collar 10 are accommodated in a cylindrical yoke of the stator.
- the shaft-like movable element 4 penetrates through the first and second coils 1a and 1b.
- the mover 4 is divided into three types 4a, 4b, and 4c according to the number of permanent magnets. That is, the type 4a in which the central permanent magnet 3c is arranged in the pipe-shaped rod, the type 4b in which the first and second permanent magnets 3a and 3b are arranged, the central permanent magnet 3c, the first and first This is a type 4c in which the second permanent magnets 3a and 3b are arranged.
- the ratio of the number of coils to the number of permanent magnets is 2: 1, 2: 2, 2: 3, respectively. In either case, the mover 4 can be vibrated.
- first and second permanent magnets 3 a and 3 b are arranged on the left and right sides of the rod 14 with an interval in the axial direction.
- the first and second permanent magnets 3a and 3b correspond to the first and second coils 1a and 1b on a one-to-one basis.
- Both end portions in the axial direction of the first and second permanent magnets 3a and 3b are magnetized to N and S poles.
- the first and second permanent magnets 3a and 3b are arranged on the rod 14 so that the N poles face each other so that the same poles face each other.
- the inner magnetic poles (N poles) of the first and second permanent magnets 3a and 3b are closer to the centers of the first and second coils 1a and 1b than the outer magnetic poles (S poles).
- the pitch LM1 between the magnetic poles (N poles) near the center of the first and second coils 1a, 1b is set to the pitch LC1 between the centers connecting the centers in the axial direction of the first and second coils 1a, 1b. It is different from.
- the difference between the center pitch LC1 and the magnetic pole pitch LM1 is set to 1/8 to 3/8 times the axial length of each of the first and second coils 1a and 1b.
- each permanent magnet 3a, 3b in the axial direction is shorter than the length of each coil 1a, 1b in the axial direction.
- the first and second What is necessary is just to make the pitch LM2 between the magnetic poles outside the permanent magnets 3a, 3b different from the pitch LC1 between the centers of the first and second coils 1a, 1b.
- the positional relationship between the first and second coils 1a, 1b and the first and second permanent magnets 3a, 3b is such that when the mover 4b moves to the right end in the axial direction, the first permanent magnet 3a When the movable element 4b moves into the coil 1a and moves to the left end in the axial direction, the second permanent magnet 3b enters the second coil 1b.
- the first and second coils 1a and 1b and the first and second permanent magnets 3a and 3b are arranged in such a positional relationship, and an alternating current whose phase is matched with the first and first coils 1a and 1b.
- thrusts that are about 90 degrees out of phase are generated in the first and second coils 1a and 1b. That is, a sinusoidal thrust is generated in the first coil 1a, and a cosine-wave thrust is generated in the second coil 1b.
- a force for pushing and pulling the mover 4b can be applied simultaneously to the first and second coils 1a and 1b, that is, the first and second coils 1a and 1b are applied to the first and second coils 1a and 1b.
- the mover 4b can be vibrated without using the restoring force of a mechanical elastic body. Since a mechanical elastic body having a resonance frequency is not used, the mover can be vibrated with good followability from a low frequency to a high frequency.
- One cylindrical permanent magnet 3c having a cylindrical shape is disposed at the central portion of the cylindrical rod 14.
- the central permanent magnet 3c is magnetized in the axial direction, that is, both end portions thereof are magnetized to the N pole and the S pole.
- the length LM3 in the axial direction of the central permanent magnet 3c only needs to be shorter than the outer method LC3 of the first and second coils 1a and 1b. In this example, the length LM3 is set shorter than the length of the inner method LC2.
- the 1st coil 1a and the 2nd coil 1b are outside the axial direction of the center part permanent magnet 3c. Be placed.
- the length of the central permanent magnet 3c in the axial direction is set to be shorter than the length of the coils 1a and 1b in the axial direction.
- the positional relationship between the first and second coils 1a and 1b and the central permanent magnet 3c is such that when the mover 4a moves to one end in the axial direction, one magnetic pole of the central permanent magnet 3c is When one of the coils 1a and 1b enters and the movable element 4a moves to the other end in the axial direction, the other magnetic pole of the central permanent magnet 3c enters the other of the first and second coils 1a and 1b.
- the mover 4a Vibrates.
- cylindrical first and second permanent magnets are provided on the left and right sides of the rod 14. Magnets 3 a and 3 b are arranged, and a cylindrical central permanent magnet 3 c is arranged at the center of the rod 14.
- the positions, lengths, and magnetic poles of the first and second permanent magnets 3a and 3b are the same as those of the mover 4b of the type in which the first and second permanent magnets 3a and 3b are arranged.
- the position, length, and magnetic pole of the central permanent magnet 3c are the same as those of the mover 4a of the type in which the single central permanent magnet 3 is disposed.
- alternating currents having the same phase are passed through the first and second coils 1a and 1b, and N and S are sequentially applied to both ends of the first and second coils 1a and 1b from the left side.
- N, S magnetic poles are formed.
- S, N, N, and S are formed in order from the left side of the first and second permanent magnets 3a and 3b so that the same poles face each other.
- Magnetic poles are formed in the order NS ⁇ ns ⁇ SN ⁇ sn ⁇ NS at both ends of the first coil 1a.
- Magnetic poles are formed on both ends of the second coil 1b in the order NS ⁇ ns ⁇ SN ⁇ sn ⁇ NS.
- the magnetic field of the uppercase magnetic pole is stronger than the magnetic field of the lowercase magnetic pole.
- the first permanent magnet 3a disposed on the left side of the first coil 1a repels the first coil 1a when alternating currents having the same phase are passed through the first and second coils 1a, 1b. .
- the second permanent magnet 3b disposed on the right side of the second coil 1b is attracted to the second coil 1b. For this reason, the needle
- the second permanent magnet 3b When the second permanent magnet 3b is in the second coil 1b (S2) and the current flowing through the second coil 1b is reversed, the second permanent magnet 3b is larger than the second coil 1b. A repulsive force acts and the mover 4b moves rightward in the figure (S3). When the mover 4b passes through the center of the stroke, a thrust in the right direction in the figure acts on the mover 4b.
- the first permanent magnet 3a has a large repulsion from the first coil 1a. A force acts, and the mover 4b moves to the left in the figure (S5). Then, the mover 4b returns to the center of the stroke.
- the first motor composed of the first permanent magnet 3a and the first coil 1a and the second motor composed of the second permanent magnet 3b and the second coil 1b face each other and are pressed against each other. Since it is operating, the first and second motors are each self-contained. For this reason, the N and S directions of the first permanent magnet 3a and the first coil 1a may be opposite, and the N and S directions of the second permanent magnet 3b and the second coil 1b are also opposite. It may be.
- Alternating currents having the same phase flow through the first and second coils 1a and 1b.
- Magnetic poles are formed at both ends of the first and second coils 1a and 1b so that the same poles face each other. That is, in the first and second coils 1a and 1b, the N pole and the S pole are formed symmetrically with respect to the center in the axial direction of the first and second coils 1a and 1b.
- Magnetic poles are formed in the order of SN ⁇ sn ⁇ NS ⁇ ns ⁇ SN at both ends of the first coil 1a.
- Magnetic poles are formed on both ends of the second coil 1b in the order NS ⁇ ns ⁇ SN ⁇ sn ⁇ NS.
- the magnetic field of the uppercase magnetic pole is stronger than the magnetic field of the lowercase magnetic pole.
- the central permanent magnet 3c is disposed in the magnetic field generated by the first coil 1a and the second coil 1b. With the central permanent magnet 3c of the mover 4a positioned at the center in the axial direction of the first and second coils 1a and 1b, alternating currents having the same phase are passed through the first and second coils 1a and 1b. Then, the central permanent magnet 3c is attracted to the first coil 1a and repels the second coil 1b, and moves to the left in the figure (S1). The central permanent magnet 3c that has moved leftward is further attracted to the first coil 1a and enters the first coil 1a (S2).
- FIG. 4 shows a first embodiment of the double coil type linear motor actuator of the present invention.
- the linear motor actuator includes a stator 2 having first and second coils 1a and 1b, and a mover 4 having first and second permanent magnets 3a and 3b.
- the ratio of the number of coils to the number of permanent magnets is 2: 2.
- the first and second coils 1a and 1b constitute a coil unit.
- Two linear bushes 8 are provided outside the coil unit in the axial direction as guide means for guiding the mover 4 to linearly move.
- Each linear bush 8 is fixed to the collar 10 by a retaining ring 9.
- the collar 10 is fixed to both ends of the case 5 in the axial direction.
- a pair of ring-shaped repulsive magnets 12a and 12b are provided as return permanent magnets.
- the repulsion magnets 12a and 12b repel each other with outer permanent magnets 13a and 13b of the mover 4 described later.
- the movable element 4 is balanced at the origin at the center of the stroke, that is, the movable element 4 is balanced at the center position in the axial direction of the first and second coils 1a and 1b. become. Further, by providing the repulsive magnets 12a and 12b, it is possible to prevent the mover 4 from falling off the stator 2 when the power is turned off. This is particularly effective when the mover 4 is used vertically. In order to stop the mover 4 at a predetermined position deviated from the origin, the magnitudes of the magnetic forces of the left and right repulsive magnets 12a and 12b may be varied.
- FIG. 5 shows an exploded view of the spacer 7, the coils 1 a and 1 b, the linear bush 8 and the collar 10 accommodated in the case 5.
- the pair of coils 1 a and 1 b and the pair of linear bushes 8 are arranged symmetrically about the spacer 7.
- the mover 4 includes a pipe-like rod 14 and two permanent magnets 3 a and 3 b accommodated in the rod 14.
- the rod 14 is made of a nonmagnetic material such as synthetic resin.
- the rod 14 is supported by the linear bush 8, and a slight annular magnetic clearance is provided between the rod 14 and the bobbin 6.
- the first and second permanent magnets 3 a and 3 b are arranged via the spacer 15.
- the magnetic poles (N pole and S pole) of the first and second permanent magnets 3 a and 3 b are arranged in a line in the axial direction of the rod 14.
- the first and second permanent magnets 3a and 3b are arranged so that the same poles (S poles in this embodiment) face each other.
- the lengths in the axial direction of the first and second permanent magnets 3a and 3b are substantially the same.
- the length of each coil 1a, 1b in the axial direction is longer than the length of each permanent magnet 3a, 3b in the axial direction.
- the pitch between the magnetic poles outside the first and second permanent magnets 3a and 3b is preferably 1/8 of the coil length than the pitch between the coil centers of the first and second coils. About 3/8 times longer.
- the amount of deviation between LC1 and LM2 is not limited to 1 ⁇ 4 of the coil length, and is preferably in the range of 1/8 to 3/8 of the coil length.
- a spacer 15 is interposed between the two repulsive permanent magnets 3a and 3b.
- the spacer 15 may be made of either a nonmagnetic material such as resin or a magnetic material such as iron. If a magnetic material is used for the spacer 15, the magnetic resistance is reduced, so that more magnetic lines of force can be formed.
- the third and fourth permanent magnets 13a and 13b are disposed outside the two permanent magnets 3a and 3b.
- the third and fourth permanent magnets 13a and 13b are arranged so that the same poles face the first and second permanent magnets 3a and 3b.
- the N poles of the third and fourth permanent magnets are opposed to the N poles of the first and second permanent magnets 3a and 3b.
- a spacer 16 is provided between the first and second permanent magnets 3a and 3b and the third and fourth permanent magnets 13a and 13b to facilitate the formation of repulsive magnetic force lines.
- the axial lengths of the third and fourth permanent magnets 13a and 13b are longer than the axial lengths of the first and second permanent magnets 3a and 3b.
- Both ends of the rod 14 of the mover 4 are closed by two lid members 17.
- the two lid members 17 are fixed to both ends of the rod 14 and sandwich the permanent magnets 3a and 3b and the outer permanent magnets 13a and 13b.
- FIG. 7 shows a state where the mover 4 is pulled out from the stator 2.
- the mover 4 and the stator 2 are not connected by an elastic body such as a leaf spring, and the linear motion in one axial direction of the mover 4 is only guided by the linear bush 8 of the stator 2.
- the mover 4 can be completely separated from the stator 2.
- FIG. 8 is a perspective view of the linear bush 8 that guides the movable element 4, and FIG. 9 is a cross-sectional view of the linear bush 8.
- the linear bush 8 includes a metal outer cylinder 21, a large number of balls 22 that roll on the inner peripheral surface of the outer cylinder 21, and a cage 23 that holds the large number of balls 22 at a predetermined interval.
- the cage 23 is formed in a cylindrical shape and has a large number of holes 23a penetrating from the inner periphery to the outer periphery thereof.
- a number of balls 22 are rotatably held in the number of holes 23a.
- the length of the cage 23 in the axial direction is shorter than the length of the outer cylinder 21 in the axial direction.
- the cage 23 makes a finite stroke in the outer cylinder 21 together with a large number of balls 22.
- linear bushing 8 By using the linear bushing 8, smooth linear movement in the uniaxial direction of the mover 4 with respect to the stator 2 is possible, and a highly rigid structure other than the uniaxial direction can be realized. Unlike the conventional voice coil motor, it is not necessary to connect the movable element 4 and the stator 2 with an elastic body such as a leaf spring. Therefore, the lineup can be facilitated and the maintenance can be facilitated.
- the ball 22 may be magnetic or non-magnetic.
- the balls 22 are attracted to each other by magnetic force, which may cause problems such as a decrease in life, a decrease in accuracy, and heat generation. If the balls 22 are made of a non-magnetic material such as resin or ceramics, the balls 22 can be prevented from being attracted to each other.
- the ball spline balls may be magnetic or non-magnetic.
- 10 to 12 show connection diagrams of the first and second coils 1a and 1b.
- 10 and 11 show an example in which the first and second coils 1a and 1b are connected in parallel
- FIG. 12 shows an example in which the coils are connected in series.
- FIG. 10 shows a repulsion system in which the opposite sides of the first and second coils 1a and 1b are connected to the same pole
- FIG. 11 shows the opposite sides of the first and second coils 1a and 1b are opposite.
- the suction system connected so that it may become the pole of this is shown.
- the movable element 4 can be vibrated regardless of whether it is a repulsive wiring or a suction wiring.
- a single-phase alternating current indicated by a solid line in the figure flows from the alternating current power supply 19 to the first and second coils 1 a and 1 b.
- the mover 4 moves in the axial direction.
- the magnetic lines generated by the first permanent magnet 3a cross the first coil 1a at a predetermined speed
- the magnetic lines generated by the second permanent magnet 3b cross the second coil 1b at a predetermined speed. .
- back electromotive force is generated in the first and second coils 1a and 1b.
- FIG. 13 shows the counter electromotive force generated in each of the coils 1a and 1b when the mover 4 is moved.
- the pitch between the centers of the first and second coils 1a and 1b and the pitch between the magnetic poles outside the first and second permanent magnets 3a and 3b are shifted by 1 ⁇ 4 of the coil length. Yes.
- sinusoidal counter electromotive force having a phase difference of 90 degrees is generated in the first and second coils 1a and 1b. Since the counter electromotive force generated in the entire first and second coils 1a and 1b is the sum of the counter electromotive forces generated in the coils 1a and 1b, each coil 1a is shifted by 90 degrees in phase. , 1b counteract each other.
- the total value of the back electromotive force is less than twice the back electromotive force generated in each coil ( ⁇ 2 times when the phase is shifted by 90 degrees). If the back electromotive force is increased, the current flowing through the first and second coils 1a and 1b is reduced, so that the mover cannot be vibrated at high speed. By reducing the back electromotive force as in the present embodiment, it is possible to vibrate the mover 4 at high speed.
- FIG. 14 shows a thrust vector acting on the moving element 4 during operation, that is, a thrust vector in consideration of the delay angle.
- the movable element When an alternating current having the same phase is applied to the first and second coils 1a and 1b, the movable element is caused by the interaction between the current flowing in the first coil 1a and the magnetic field of the magnetic pole outside the first permanent magnet 3a. 4 thrust in the axial direction works. Also, between the second coil 1b and the outer magnetic pole of the second permanent magnet 3b, due to the interaction between the current flowing in the second coil 1b and the magnetic field of the outer magnetic pole of the second permanent magnet 3b, A thrust in the axial direction of the mover 4 works. These thrusts are thrusts generated in the first and second coils 1a and 1b.
- the size of letters NS in the figure represents the magnitude of the magnetic field generated in the coil.
- the mover When an alternating current with a predetermined frequency is passed through the first and second coils 1a and 1b, the mover also vibrates at the same frequency. However, depending on the drive frequency, it has been confirmed by measurement that the phase of the mover is delayed by 30 to 60 degrees in phase angle compared to the phase in the stationary state (see FIG. 15).
- FIG. 14 shows a state where the position of the mover is divided into eight states (45 degrees each). The phase of the mover in the operating state shown in FIG. 14 is delayed by one step from the phase of the mover in the stationary state shown in FIG.
- a rightward thrust is applied to the mover 4 not only from the first and second coils 1a and 1b but also from the repulsive magnet 12a.
- the mover 4 reverses the moving direction and starts moving in the right direction (S3).
- the current flowing through the first and second coils 1a and 1b instantaneously becomes zero (S4).
- the currents flowing in the first and second coils 1a and 1b are reversed, and thrust in the right direction is applied from the first and second coils 1b to the first and second permanent magnets 3a and 3b (S5).
- the magnitude of the thrust applied to the mover 4 at S5 is the same as the thrust at S1. Thereafter, the mover 4 moves to the right.
- FIG. 15 shows a thrust vector diagram in a stationary state of the mover.
- the mover 4 stops at a point where the thrust generated in the first and second coils 1a, 1b balances. And if the electric current which flows into the 1st and 2nd coils 1a and 1b is changed, the needle
- the first and second coils 1a and 1b are movable by shifting the pitch of the magnetic poles of the first and second permanent magnets 3a and 3b with respect to the center-to-center pitch of the first and second coils 1a and 1b.
- the position of the child 4 can be controlled.
- the repelling magnets 12a and 12b also affect the position where the mover 4 is stationary.
- the first and second coils 31a and 31b are arranged on the stator 32 in a state where the axes coincide with each other. Between the first and second coils 31a and 31b, there is provided a ring-shaped repulsive magnet 38 that repels the permanent magnets 39a and 39b of the mover 34 and returns the mover 34 to the approximate center of the stroke. Both ends of the repulsive magnet 38 in the axial direction are magnetized to N and S poles.
- the repulsion magnet 38 also has a role of a spacer for providing a space between the coils 31a and 31b.
- a linear motion bearing 37 is provided outside the coil unit composed of the first and second coils 31 a and 31 b via a spacer 35 and a collar 36.
- the linear motion bearing 37 is a bush or a spline, and guides the mover 34 to linearly move.
- the number of repulsive magnets 38 can be reduced by providing one repulsive magnet 38 between the first and second coils 31a and 31b.
- the modularized first coil 31a, repulsive magnet 38, and second coil 31b may be arranged in order in the axial direction. become. Further, since the repelling magnet is not arranged outside the coil unit, there is no possibility that the repelling magnet is attracted to the external iron parts.
- first and second permanent magnets 39a and 39b are arranged at intervals in the axial direction.
- the first and second permanent magnets 39a and 39b are arranged so as to be, for example, the S pole, the N pole, the S pole, and the N pole from the left side so that the facing sides have different polarities.
- Both ends in the axial direction of the permanent magnet unit composed of the first and second permanent magnets 39a and 39b protrude from both ends in the axial direction of the coil unit composed of the first and second coils 31a and 31b. ing.
- a single central permanent magnet 41 may be disposed on the mover 34.
- the length of the central permanent magnet 41 in the axial direction is set to be longer than the inner distance of the first and second coils 31a and 31b and shorter than the outer distance.
- a magnetic material 42 such as conical iron may be disposed at both ends of the central permanent magnet 41. In this way, the lines of magnetic force at both ends of the central permanent magnet 41 are smoothly reduced, so that the stroke of the mover 34 can be lengthened and the movement of the mover 34 can be made smooth.
- FIG. 19 shows an example in which the outer sides of the first and second coils 31a and 31b are surrounded by a cylindrical yoke 43 made of a magnetic material such as iron.
- the yoke 43 is provided with end walls 43a that cover both ends of the coil unit in the axial direction.
- the yoke 43 forms the magnetic circuit 44 from both ends in the axial direction of the magnet unit through the yoke 43 toward the repulsive magnet 38, so that the attractive force is further increased and the mover 34 can be vibrated strongly. .
- FIG. 20 shows a linear motor actuator (triple coil type) according to a third embodiment of the present invention.
- the point that the stator 50 has the first and second coils 51a and 51b, and the point that the mover 56 has the first to fourth permanent magnets 53a, 53b, 54a, and 54b are the linear motors of the first embodiment. It is the same as the actuator.
- a pair of ring magnets 55a and 55b are arranged as repulsive magnets between the first and second coils 51a and 51b of the stator 50, and the first and second coils 51a and 51b of the stator 50 are arranged.
- positioned the 3rd coil 52 in between differs from the linear motor actuator of 1st embodiment.
- Each of the pair of ring magnets 55a and 55b surrounds the first permanent magnet 53a or the second permanent magnet 53b.
- the axial lengths of the pair of ring magnets 55a and 55b are shorter than the axial lengths of the first and second permanent magnets 53a and 53b.
- one ring magnet 55a is located within the axial length of the first permanent magnet 53a
- the other ring magnet 55b is the second permanent magnet 53b.
- the center of each of the pair of ring magnets 55a and 55b is shifted from the center of each of the first and second permanent magnets 53a and 53b by a predetermined shift amount (see FIG. 23).
- a spline nut 59 and a ball bush 60 are attached to the outside of the first and second coils 51a and 51b of the stator 50 via a spacer 57 and a collar 58.
- a spline shaft 62 in which a spline groove is formed is attached to one end of the rod 61 of the mover 56, and a bushing shaft 63 having a circular cross section is attached to the other end.
- the spline shaft 62 and the spline nut 59 have a function of preventing the mover 56 from rotating.
- a cage is incorporated in the spline nut 59 and the ball bush 60.
- FIG. 21 is a perspective view showing a positional relationship between the pair of ring magnets 55a and 55b and the first and second permanent magnets 53a and 53b.
- the disc-shaped ring magnets 55a and 55b are magnetized with S and N poles in the axial direction.
- the first and second permanent magnets 53a and 53b are also magnetized with S and N poles in the axial direction.
- the first and second permanent magnets 53a and 53b are moved in the axial direction.
- the center is located at the center in the axial direction of the ring magnets 55a and 55b.
- FIG. 24 shows the relationship between the position of the mover 56 and the restoring force (generated force) generated in the mover 56.
- the restoring force acting on the mover 56 is the sum of the restoring force acting on the first permanent magnet 53a and the restoring force acting on the second permanent magnet 53b.
- the third coil 52 interposed between the first and second coils 51a and 51b will be described. As shown in FIG. 20, the third coil 52 is disposed between the first and second coils 51a and 51b and between the pair of ring magnets 55a and 55b. The pair of ring magnets 55a and 55b are arranged on the stator 50 so that the same poles face each other.
- FIG. 25 shows changes in the magnetic poles formed at both ends of the third coil 52.
- an alternating current having the same phase as the first and second coils 51a and 51b flows through the third coil 52.
- the winding direction of the third coil 52 is opposite to the winding direction of the first and second coils 51a, 51b, and the first and second coils 51a, 51b, A magnetic pole opposite to 51b is formed. If the winding direction of the third coil 52 is made the same as the winding direction of the first and second coils 51a and 51b, a reverse magnetic pole can be formed in the third coil 52 even if current is applied from the reverse direction.
- FIG. 26 shows the outputs of the first to third coils.
- (a) shows the outputs of the first and second coils 51a and 51b.
- the phases of the outputs of the first and second coils 51a and 51b are shifted from each other by ⁇ / 4.
- the sum of the outputs of the first and second coils 51a and 51b is 1.8 times the output of the first coil 51a alone.
- (b) shows the output of the third coil 52.
- the combined output of the first to third coils can be brought close to a clean sine wave as shown in FIG. For this reason, the time-displacement curve of the mover 56 can be brought close to a clean sine wave.
- a stereo amplifier is used, a phase difference is provided in the output of the third coil 52 with respect to the outputs of the first and second coils 51a and 51b, and the output peaks are matched, the efficiency is improved. Output becomes possible.
- the difference between 1.54 and 1.8 occurs because the inductance of the first and second coils 51a and 51b is not considered in the calculation.
- the actual output of the first and second coils 51a and 51b is lower than 108.0 [AT].
- the mover 56 did not move at the above output ratio, so the output of the third coil 52 was the sum of the outputs of the first and second coils 51a, 51b. It was confirmed that they were almost equal.
- FIG. 27 shows a basic configuration of a single coil type linear motor actuator in which only one coil 63 is provided on the stator 61.
- the mover 4 passes through the space in the coil 63.
- the axis of one coil 63 coincides with the vibration of the mover 62.
- Linear motion bearings 66 are provided on both sides in the axial direction of the coil 63 via spacers 64 and collars 65.
- the linear motion bearing 66 is a bush or a spline, and guides the mover 62 to linearly move.
- the coil 63, the spacer 64, the collar 65, and the linear motion bearing 66 are accommodated in a cylindrical yoke of the stator 61.
- the mover 62 includes a pipe-shaped rod 68, and first and second permanent magnets 67a and 67b disposed in the rod 68 with a space therebetween.
- the ratio of the number of coils 63 to the number of permanent magnets 67a and 67b is 1: 2.
- Both end portions in the axial direction of the first and second permanent magnets 67a and 67b are magnetized to N and S poles, and are arranged so that the same poles (N poles or S poles) face each other.
- the distance L4 inside the first and second permanent magnets 67a and 67b is longer than the length L3 of the coil 63 in the axial direction.
- the 1st and 2nd permanent magnets 67a and 67b are arrange
- the insides of the first and second permanent magnets 67a and 67b may be in both ends of the coil 63 in the axial direction.
- the length of each permanent magnet 67a, 67b in the axial direction is shorter than the length of the coil 63 in the axial direction.
- the positional relationship between the coil 63 and the first and second permanent magnets 67a and 67b is such that when the mover 62 moves to one end in the axial direction, one of the first and second permanent magnets 67a and 67b is in the coil 63. When the mover 62 moves to the other end in the axial direction, the other one of the first and second permanent magnets 67a and 67b enters the coil 63.
- a pair of ring magnets that surround the first and second permanent magnets 67a and 67b and return the mover 62 to the center of the stroke when no current flows through the coil 63 are disposed at both ends of the coil 63 in the axial direction. May be.
- the arrangement of the pair of ring magnets and the direction of the magnetic poles may be the same as those of the pair of ring magnets 55a and 55b arranged at both ends of the third coil 52 in FIGS. If the pair of ring magnets 55a and 55b are arranged, not only can the mover 62 be returned to the origin, but the mover 62 can be vibrated strongly.
- the present invention is not limited to the above-described embodiment, and can be variously modified without changing the gist of the present invention.
- an alternating current is applied to the first and second coils of the stator, and the axes of the first and second coils You may make the pitch between the coil centers which connected the center of the direction correspond with the pitch between the magnetic poles of a needle
- the mover only needs to have one or more permanent magnets, and the first to fourth permanent magnets may be provided as in the first embodiment.
- an alternating current having a different phase is applied to the first and second coils of the stator, and the first and second coils
- the pitch between the coil centers connecting the centers in the axial direction may be different from the pitch between the magnetic poles of the mover.
- the mover only needs to have one or more permanent magnets, and the first to fourth permanent magnets may be provided as in the first embodiment.
- the mover is not limited to being arranged in the horizontal direction, but may be arranged in the vertical direction. If force can be applied to the first and second permanent magnets from the first and second coils, the mover can be stroked even if gravity acts on the mover.
- the mover When the inertia of the mover is small, the mover can be stroked even if the two outer permanent magnets and the repulsion magnet are omitted. When the inertia of the mover is large, an additional spring may be provided between the stator and the mover.
- the current that flows through the first and second coils may be an alternating current that flows alternately in a reverse direction at regular intervals.
- a voltage such as a sawtooth wave, a triangular wave, or a rectangular wave may be applied to the first and second coils.
- first and second coils may be provided on the mover, the first and second permanent magnets may be provided on the stator, and the coil side may make a stroke.
- the linear motor actuator of the present invention has high rigidity and can be driven to a high speed range, it can be used in various technical fields such as actuators for measuring devices, engineering devices, automobiles, medical devices, robots, industrial devices, and consumer devices.
- it can be suitably used to drive the check pin, die bonder, pump, hand tool, camera focus, etc. of the substrate tester. If the size is increased, it can also be used as a vibration damping device.
- the linear motor of the present invention can be suitably used as a vibration actuator having a large amplitude in the frequency range of 0 to 200 Hz. If the currents flowing through the first and second coils are controlled using an encoder, the position of the mover can also be controlled.
Abstract
Description
第三のコイル=1500[T]×111[mA]=166.5[AT]
第一のコイル=第二のコイル=2400[T]×45[mA]=108.0[AT]
出力比(=アンペアターン比)で考えると、166.5/108.0=1.54≒1.8
1.54と1.8の差は、計算上、第一及び第二のコイル51a,51bのインダクタンスを考慮していないために生じている。実際の第一及び第二のコイル51a,51bの出力は108.0[AT]より低い。第三のコイル52に逆の結線をしたところ、上記の出力比で可動子56が動かなかったので、第三のコイル52の出力が第一及び第二のコイル51a,51bの合算した出力とほぼ等しくなることが確認できた。
Claims (11)
- 軸線方向にN極及びS極が着磁される少なくとも一つの永久磁石を有する可動子及び固定子の一方と、 前記可動子及び前記固定子の一方を囲む第一及び第二のコイルが軸線方向に配列される前記可動子及び前記固定子の他方と、を備えるリニアモータアクチュエータにおいて、
前記第一のコイルに発生する推力と前記第二のコイルに発生する推力の位相がずれるように、前記第一及び前記第二のコイルに同一の位相の交流を流し、かつ前記第一及び前記第二のコイルの軸線方向の中心を結んだコイル中心間ピッチと前記可動子及び前記固定子の一方の磁極間ピッチとを異ならせることを特徴とするリニアモータアクチュエータ。 - 前記可動子及び前記固定子の一方は、前記少なくとも一つの永久磁石として、軸線方向に配列され、同極同士が対向する第一及び第二の永久磁石を有し、
前記第一及び前記第二の永久磁石の外側の磁極の磁極間ピッチ、又は前記第一及び前記第二の永久磁石の内側の磁極の磁極間ピッチを、前記第一及び前記第二のコイルの前記コイル中心間ピッチと異ならせることを特徴とする請求項1に記載のリニアモータアクチュエータ。 - 前記第一及び前記第二の永久磁石の外側の磁極の磁極間ピッチを前記第一及び前記第二のコイルの前記コイル中心間ピッチと異ならせ、
前記第一及び前記第二の永久磁石の外側には、前記第一及び前記第二の永久磁石の外側の磁極を強めるように、軸線方向にN極及びS極が着磁される第三及び第四の永久磁石が配列されることを特徴とする請求項2に記載のリニアモータアクチュエータ。 - 前記可動子及び前記固定子の他方には、前記第一及び前記第二のコイルに電流を流していない時に、前記可動子をストロークの中心に復帰させる復帰用永久磁石が設けられることを特徴とする請求項2又は3に記載のリニアモータアクチュエータ。
- 前記復帰用永久磁石は、前記第一及び前記第二のコイルの内側に配置され、前記第一及び前記第二の永久磁石を囲む一対のリング磁石を有し、
前記一対のリング磁石それぞれは、軸線方向にN極及びS極が着磁されることを特徴とする請求項4に記載のリニアモータアクチュエータ。 - 前記可動子及び前記固定子の他方には、前記一対のリング磁石が同極同士が向かい合うように配置され、
前記一対のリング磁石の間には、第三のコイルが配置されることを特徴とする請求項5に記載のリニアモータアクチュエータ。 - 前記可動子及び前記固定子の一方には、前記第一及び前記第二の永久磁石の間に中央部永久磁石が配置され、
前記中央部永久磁石の軸線方向の一方の磁極から他方の磁極までの磁極間ピッチが前記第一及び前記第二のコイルの内法よりも短く、
可動子が軸線方向の一端までストロークすると、中央部永久磁石の一方の磁極が第一及び第二のコイルの一方に入り、可動子が軸線方向の他端までストロークすると、中央部永久磁石の他方の磁極が第一及び第二のコイルの他方に入ることを特徴とする請求項2に記載のリニアモータアクチュエータ。 - 前記可動子及び前記固定子の一方は、前記第少なくとも一つの永久磁石として、軸線方向にN極及びS極が着磁されると共に、前記第一及び前記第二のコイルの間に配置される中央部永久磁石を有し、
前記中央部永久磁石の軸線方向の一方の磁極から他方の磁極までの磁極間ピッチが前記第一及び前記第二のコイルの内法よりも短いことを特徴とする請求項1に記載のリニアモータアクチュエータ。 - 軸線方向にN極及びS極が着磁される少なくとも一つの永久磁石を有する可動子及び固定子の一方と、
前記可動子及び前記固定子の一方を囲む第一及び第二のコイルが軸線方向に配列される前記可動子及び前記固定子の他方と、を備えるリニアモータアクチュエータにおいて、
前記第一のコイルに発生する推力と前記第二のコイルに発生する推力の位相がずれるように、前記第一及び前記第二のコイルに位相を異ならせた交流を流し、かつ前記第一及び前記第二のコイルの軸線方向の中心を結んだコイル中心間ピッチと前記可動子及び前記固定子の一方の磁極間ピッチとを一致させることを特徴とするリニアモータアクチュエータ。 - 軸線方向にN極及びS極が着磁される少なくとも一つの永久磁石を有する可動子及び固定子の一方と、
前記可動子及び前記固定子の一方を囲む第一及び第二のコイルが軸線方向に配列される前記可動子及び前記固定子の他方と、を備えるリニアモータアクチュエータにおいて、
前記第一のコイルに発生する推力と前記第二のコイルに発生する推力の位相がずれるように、前記第一及び前記第二のコイルに位相を異ならせた交流を流し、かつ前記第一及び前記第二のコイルの軸線方向の中心を結んだコイル中心間ピッチと前記可動子及び前記固定子の一方の磁極間ピッチとを異ならせることを特徴とするリニアモータアクチュエータ。 - 軸線方向にN極及びS極が着磁される第一及び第二の永久磁石が同極同士が向かい合うように間隔を空けて配列される可動子及び固定子の一方と、
前記可動子及び前記固定子の一方を囲むコイルを有する前記可動子及び前記固定子の他方と、
を備えるリニアモータアクチュエータにおいて、
前記第一及び前記第二の永久磁石の外側のN極-N極間ピッチ又は外側のS極-S極間ピッチを前記コイルの軸線方向の長さよりも長くし、
前記コイルに交流を流すことによって、前記可動子が前記固定子に対して移動し、
前記可動子がストロークの一方の端まで移動するとき、前記第一の永久磁石が前記コイルの中に入り、前記可動子がストロークの他方の端まで移動するとき、前記第二の永久磁石が前記コイルの中に入ることを特徴とするリニアモータアクチュエータ。
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- 2009-12-25 JP JP2009293915A patent/JP5604097B2/ja active Active
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2010
- 2010-04-05 WO PCT/JP2010/056178 patent/WO2010119788A1/ja active Application Filing
- 2010-04-05 CN CN201410219379.5A patent/CN104022614B/zh active Active
- 2010-04-05 US US13/262,983 patent/US8922069B2/en active Active
- 2010-04-05 CN CN201080016507.6A patent/CN102395432B/zh active Active
- 2010-04-05 DE DE112010001648T patent/DE112010001648T5/de active Pending
- 2010-04-15 TW TW099111775A patent/TWI562834B/zh active
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JPH06315255A (ja) * | 1993-04-26 | 1994-11-08 | Tdk Corp | 可動磁石式アクチュエータ |
JPH079081U (ja) * | 1993-06-07 | 1995-02-07 | ティーディーケイ株式会社 | 可動磁石式アクチュエータ |
JPH11168869A (ja) * | 1996-10-30 | 1999-06-22 | Omron Corp | 振動発生器 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102761226A (zh) * | 2012-06-25 | 2012-10-31 | 歌尔声学股份有限公司 | 一种线性振动电机 |
WO2018030264A1 (ja) * | 2016-08-09 | 2018-02-15 | 日本電産サンキョー株式会社 | リニアアクチュエータ |
WO2018030263A1 (ja) * | 2016-08-09 | 2018-02-15 | 日本電産サンキョー株式会社 | リニアアクチュエータ |
CN109562412A (zh) * | 2016-08-09 | 2019-04-02 | 日本电产三协株式会社 | 线性致动器 |
US10602279B2 (en) | 2016-08-09 | 2020-03-24 | Nidec Sankyo Corporation | Linear actuator |
Also Published As
Publication number | Publication date |
---|---|
TWI562834B (en) | 2016-12-21 |
CN104022614A (zh) | 2014-09-03 |
DE112010001648T5 (de) | 2012-08-02 |
CN102395432B (zh) | 2014-10-15 |
CN104022614B (zh) | 2017-01-11 |
JP2010268672A (ja) | 2010-11-25 |
JP5604097B2 (ja) | 2014-10-08 |
US20120025635A1 (en) | 2012-02-02 |
US8922069B2 (en) | 2014-12-30 |
TW201039930A (en) | 2010-11-16 |
CN102395432A (zh) | 2012-03-28 |
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