WO2009134088A2 - 홀더 스테이지 - Google Patents
홀더 스테이지 Download PDFInfo
- Publication number
- WO2009134088A2 WO2009134088A2 PCT/KR2009/002282 KR2009002282W WO2009134088A2 WO 2009134088 A2 WO2009134088 A2 WO 2009134088A2 KR 2009002282 W KR2009002282 W KR 2009002282W WO 2009134088 A2 WO2009134088 A2 WO 2009134088A2
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- WO
- WIPO (PCT)
- Prior art keywords
- alignment
- holder
- glass
- glass substrate
- unit
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Definitions
- the present invention relates to a holder stage. More specifically, in the substrate processing system that is responsible for the deposition process or the annealing process in the flat panel display manufacturing process, the glass substrate and / or the holder are aligned so that the glass substrate can be loaded on the substrate boat while being aligned and seated on the holder. It relates to a holder stage.
- Substrate processing systems used in the manufacture of flat panel displays can be roughly divided into deposition apparatus and annealing apparatus.
- the deposition apparatus is a device that is responsible for forming a transparent conductive layer, an insulating layer, a metal layer, or a silicon layer, which form a core component of a flat panel display, such as low pressure chemical vapor deposition (LPCVD) or plasma enhanced chemical vapor deposition (PECVD).
- LPCVD low pressure chemical vapor deposition
- PECVD plasma enhanced chemical vapor deposition
- physical vapor deposition devices such as chemical vapor deposition devices and sputtering.
- the annealing device is a device that is responsible for the subsequent heat treatment step for crystallization, phase change, and the like after the deposition process.
- the glass substrate is loaded in a state in which the glass substrate is seated in the holder.
- a batch substrate processing system for processing a plurality of glass substrates at the same time to increase the productivity of substrate processing is increasing.
- a substrate boat is charged into a chamber while a plurality of glass substrates are mounted on each holder and loaded into the substrate boat, and the substrate processing is performed. Therefore, when performing substrate processing with a batch substrate processing system, the glass substrate seated on the holder must be transferred from the holder stage to the substrate boat.
- the glass substrate and the holder in order for the glass substrate and the holder to be loaded at the predetermined position of the substrate boat, the glass substrate and the holder must be loaded to be aligned at the predetermined position on the holder stage. If this is not the case, the glass substrate and holder may collide with the holder stage and / or the substrate boat during the transfer process, resulting in damage to the glass substrate and holder or accidental dropping of the glass substrate and holder from the transfer arm. It can cause problems that are not smooth.
- the present invention has been made to solve the above-described problems of the prior art, by accurately aligning the loaded glass substrate and / or holder in a predetermined position to smoothly transfer the glass substrate and holder to the substrate boat for substrate processing It is an object to provide a holder stage that allows.
- the process of transferring the glass substrate and the holder from the holder stage to the substrate boat is smooth, so that the productivity of the substrate processing can be improved and the cost of the substrate processing can be reduced.
- FIG. 1 is a side view showing the configuration of a holder stage according to a first embodiment of the present invention.
- Fig. 2 is a plan view showing the structure of a holder stage according to the first embodiment of the present invention.
- FIG 3 is a perspective view showing an installation state of the first alignment portion of the holder stage according to the first embodiment of the present invention.
- 4 and 5 are an exploded perspective view and an assembled state diagram showing the configuration of the first alignment portion of the holder stage according to the first embodiment of the present invention.
- 6 and 7 are exploded perspective views and assembly diagrams showing the configuration of the second alignment portion of the holder stage according to the first embodiment of the present invention.
- FIG. 8 is a plan view showing the structure of a holder stage according to a second embodiment of the present invention.
- FIG. 9 is a perspective view showing an installation state of a holder alignment portion and a glass alignment portion of the holder stage according to the second embodiment of the present invention.
- FIG. 10 is a detail view of portion A of FIG. 9;
- FIG. 11 is a detailed view of part B of FIG. 9;
- FIGS. 12 and 13 are exploded perspective and assembly views showing the configuration of the first holder alignment portion of the holder stage according to the second embodiment of the present invention.
- FIG. 14 and 15 are exploded perspective views and assembly diagrams showing the configuration of the second holder alignment portion of the holder stage according to the second embodiment of the present invention.
- 16 and 17 are exploded perspective and assembly views showing the configuration of the first glass alignment portion of the holder stage according to the second embodiment of the present invention.
- FIGS. 18 and 19 are exploded perspective views and assembly diagrams showing the configuration of the second glass alignment portion of the holder stage according to the second embodiment of the present invention.
- 326a 326b: holder alignment cap
- the holder stage according to the present invention, a holder stage is mounted and accommodated in the holder and the glass substrate corresponding to the holder, the alignment portion for aligning the holder and the glass substrate at the same time; And an alignment rotating unit for rotating the alignment unit.
- the alignment rotating unit includes an alignment rotating shaft in which the alignment unit is installed; And it may include an alignment actuator for rotating the alignment axis of rotation.
- the alignment portion holder alignment portion for aligning the holder; And a glass alignment unit for aligning the glass substrate.
- the alignment portion may be installed at four corners of the holder and the glass substrate.
- the alignment portion may be disposed to face the holder and two corners of the glass substrate in a diagonal direction.
- the holder alignment unit may include a first alignment bracket having one end fixed to the alignment rotation shaft; And a holder alignment cap installed on the first alignment bracket.
- the glass alignment unit may include a second alignment bracket fixed to the first alignment bracket; And a glass alignment cap installed on the second alignment bracket.
- a holder stage is mounted and accommodated in the holder and the glass substrate corresponding to the holder, an alignment portion for aligning the holder or the glass substrate; And it may include an alignment rotation unit for rotating the alignment unit.
- the alignment rotating unit includes an alignment rotating shaft in which the alignment unit is installed; And it may include an alignment actuator for rotating the alignment axis of rotation.
- the alignment unit may be any one of a holder alignment unit for aligning the holder or a glass alignment unit for aligning the glass substrate.
- the holder alignment portion may be installed to face the two corners of the holder and the glass substrate in a diagonal direction, and the glass alignment portion may be disposed to face the holder and the other two corners of the glass substrate in a diagonal direction.
- the holder alignment unit may include a first alignment bracket having one end fixed to the alignment rotation shaft; And a holder alignment cap installed on the first alignment bracket.
- a second alignment bracket having one end fixed to the alignment axis of rotation; And a glass alignment cap installed on the second alignment bracket.
- the material of the holder may be graphite.
- Silicon carbide may be coated on the surface of the holder.
- the substrate processing system used in the manufacture of a flat panel display, the substrate treatment process using the same, the deposition or annealing (heat treatment) process of the contents are well known in the art, so detailed description thereof will be omitted.
- the main configuration of the substrate processing system related to the present invention that is, a chamber for providing a substrate processing space, a substrate boat on which the substrate is mounted and accommodated, a holder stage on which the holder is accommodated, and transferring the glass substrate between the substrate boat and the holder stage Since the configuration of the transfer robot is known in the art, detailed description thereof will be omitted.
- FIG. 1 is a side view showing the configuration of a holder stage 100 according to a first embodiment of the present invention.
- FIG. 2 is a plan view showing the configuration of the holder stage 100 according to the first embodiment of the present invention.
- the holder stage 100 includes a base frame 50, a base plate 110, a rod 120, a support pin 130, a holder 140, an alignment shaft 150, and a rotary actuator ( 160 and the alignment unit 200 may be configured.
- the basic frame 50 serves to support the holder stage 100.
- the base frame 50 is installed on the ground to support the holder stage 100 from the bottom horizontal frame 52 and vertically installed in parallel with the alignment axis of rotation 150 to be described later of the holder stage 100 is aligned It may be configured to include a vertical frame 54 for supporting the rotation axis 150.
- the base plate 110 stably supports the alignment axis of rotation 150.
- the base plate 110 partitions a space in which the holders 140 are mounted and accommodated in the holder stage 100.
- the rod 120 serves to support the holder 140.
- the holder 140 is seated on the rod 120.
- the rod 120 is preferably installed to support both short sides of the holder 140.
- the support pin 130 serves to support the glass substrate 10.
- the support pin 130 is installed to penetrate the holder 140 positioned on the rod 120.
- the holder 140 has a hole (not shown) through which the support pin 130 can pass.
- a plurality of support pins 130 are installed, and a plurality of holes (not shown) of the holder 140 corresponding thereto are also formed.
- the support pin 130 also serves to separate the glass substrate 10 and the holder 140. After the substrate processing process is completed by the role of the support pin 130, only the glass substrate 10 of the glass substrate 10 and the holder 140 returned to the holder stage 100 using a transfer robot is used. , The substrate cassette in which the glass substrate is mounted and stored) may be prepared to prepare a process after the substrate treatment process.
- the holder 140 serves to prevent deformation of the glass substrate 10. That is, the glass substrate 10 is loaded on the holder 140 and loaded into the chamber to proceed with the substrate treatment.
- the glass substrate 10 may be heated by heat applied to the glass substrate 10 during the substrate treatment process. This is to suppress the occurrence of warpage.
- the area of glass substrates has also increased, and thus it is increasingly important to suppress such deformation of glass substrates. Therefore, it is preferable to proceed with the substrate treatment in a state in which the glass substrate 10 is supported by the holder 140, and in the state in which the entire surface of the glass substrate 10 is completely supported by the holder 140. More preferred.
- the material of the holder 140 is preferably quartz. However, since quartz has a low thermal conductivity (1.66 W / m.K), a phenomenon may occur in which the temperature rise or cooling rate of the substrate becomes uneven depending on the position of the substrate during substrate processing. In particular, since the cooling rate of the center portion of the substrate is lower than the cooling rate of the periphery of the substrate during the cooling of the substrate after the substrate treatment, the deformation of the center portion of the substrate is inflated. Therefore, it is more preferable that the material of the holder is graphite (thermal conductivity 26 W / mK), which has a higher thermal conductivity than quartz, and in this case, the cooling rate as described above is made to uniformly cool the entire substrate during substrate cooling. The deformation of the substrate can be suppressed. However, since graphite has low hardness, it is more preferable to manufacture a holder by coating silicon carbide (SiC), which is a high hardness material, on the surface of graphite.
- SiC silicon carbide
- the alignment axis of rotation 150 serves to rotate the alignment unit 200 to be described later to align the glass substrate 10 and the holder 140.
- the alignment axis of rotation 150 is provided at four corners of the glass substrate 10 and the holder 140, and two of the alignment shafts 150 are provided at each corner side.
- the first alignment part 200a which will be described later, is connected to the alignment rotating shaft 150 provided at the short side of the glass substrate 10 and the holder 140, and is provided at the long side of the glass substrate 10 and the holder 140.
- the second alignment part 200b described later is connected to the installed alignment rotating shaft 150.
- the alignment axis of rotation 150 may be connected to and supported by the vertical frame 54 to perform a stable rotation operation. Meanwhile, the alignment shaft 150 may be installed on the holder stage 100 so as not to interfere with the transfer of the glass substrate 10 when the glass substrate 10 is loaded / unloaded.
- the rotary actuator 160 drives the alignment axis of rotation 150 when the alignment axis of rotation 150 rotates for the alignment of the glass substrate 10 and the holder 140.
- the rotary actuator 160 is connected to the lower end side of the alignment axis of rotation 150 via a predetermined power transmission means, that is, a drive gear or a drive belt.
- a predetermined power transmission means that is, a drive gear or a drive belt.
- the present invention is not necessarily limited thereto, and in some cases, the rotary actuator 160 may be connected to the upper end side of the alignment rotary shaft 150, and may be simultaneously connected to the upper end side and the lower end side of the alignment rotary shaft 150. It may also be directly connected to the alignment axis of rotation 150 without mediating the power transmission means.
- the alignment rotating shaft 150 and the rotary actuator 160 rotate the alignment unit 200 when the glass substrate 10 is loaded / unloaded on the holder stage 100 so that the glass substrate 10 and the alignment unit ( It may also serve to prevent interference between the 200).
- the alignment unit 200 serves to simultaneously align the glass substrate 10 and the holder 140 on a predetermined position in the holder stage 100.
- the alignment unit 200 is connected to the alignment rotation shaft 150 and installed to correspond to the plurality of glass substrates 10 and the holder 140 mounted in the holder stage 100, respectively.
- the alignment unit 200 may be installed at four corners of the glass substrate 10 and the holder 140, but in some cases, only the two corners of the glass substrate 10 and the holder 140 that face each other. It may be installed.
- the alignment unit 200 is a first alignment unit 200a in contact with the short sides of the glass substrate 10 and the holder 140, and a second alignment unit in contact with the long sides of the glass substrate 10 and the holder 140. 200b.
- FIG 3 is a perspective view illustrating an installation state of the first alignment unit 200a of the holder stage 100 according to the first embodiment of the present invention.
- the first alignment unit 200a contacts the short sides of the glass substrate 10 and the holder 140 to align the glass substrate 10 and the holder 140 to a predetermined position.
- the first alignment unit 200a is connected to the alignment rotation shaft 150 by a first alignment bracket 222a which will be described later.
- 4 and 5 are an exploded perspective view and an assembled state diagram showing the configuration of the first alignment portion 200a of the holder stage 100 according to the first embodiment of the present invention.
- the first alignment unit 200a may include a holder alignment unit 220a and a glass alignment unit that align the holder 140 and the glass substrate 10 at predetermined positions in the holder stage 100. It may be configured to include a portion 260a.
- the holder alignment unit 220a may include a first alignment bracket 222a, a fixing piece 224a, and a holder alignment cap 226a.
- a snap ring 230a, a bearing 232a, and a coke 234a are connected to the rotating shaft connecting the holder alignment cap 226a to the fixing piece 224a.
- the first alignment bracket 222a fixes the components constituting the first alignment portion 200a.
- One end of the first alignment bracket 222a is bent in a 'b' shape, and the bending portion is connected to one side of the alignment rotation shaft 150.
- a bolt hole may be formed at the bent portion of the first alignment bracket 222a so that the first alignment bracket 222a may be easily connected to the alignment rotation shaft 150.
- the holder alignment cap 226a to be described later is connected to the fixed piece 224a.
- the fixing piece 224a is formed in a flat plate shape.
- the fixing piece 224a is formed at the other end of the first alignment bracket 222a, that is, at one side of the upper side and the lower side opposite to the portion connected to the alignment rotation shaft 150 in parallel with each other.
- the holder alignment cap 226a contacts the short side of the holder 140 and aligns the holder 140.
- the holder alignment cap 226a is connected by a rotation shaft between two fixing pieces 224a.
- the holder alignment cap 226a is formed in a cross-sectional structure of a trapezoidal shape whose upper length is longer than the lower length.
- the snap ring 230a, the bearing 232a, and the coke 234a are connected to the rotation shaft connecting the holder align cap 226a to the fixing piece 224a to facilitate rotation of the holder align cap 226a. Can be done.
- the rotating shaft is shown in the form of a bolt, and a separate reference numeral is omitted, and the display of the drawing about the rotating shaft described below is the same.
- the glass alignment unit 260a may include a second alignment bracket 262a and a glass alignment cap 264a.
- a bearing 270a, a snap ring 272a, and a cola 274a are connected to the rotation shaft connecting the glass alignment cap 264a to the second alignment bracket 262a.
- the second alignment bracket 262a fixes the glass alignment unit 260a to the first alignment bracket 222a.
- the second alignment bracket 262a is fixed to the upper surface of the upper side fixing piece 224a among the fixing pieces 224a formed on the first alignment bracket 222a by bolts.
- the second alignment bracket 262a is formed in a flat plate shape.
- the portion where the second alignment bracket 262a is positioned in the fixing piece 224a is preferably formed to be concave so that the bolted second alignment bracket 262a is not moved by external force.
- the glass alignment cap 264a contacts the short side of the glass substrate 10 and aligns the glass substrate 10.
- the glass alignment cap 264a is connected to the end of the second alignment bracket 262a by a rotation shaft.
- the glass alignment cap 264a is formed to have a trapezoidal cross-sectional structure of which the length of the upper portion is longer than the length of the lower portion.
- the bearing 270a, the snap ring 272a, and the coke 274a are connected to the rotation axis connecting the glass align cap 264 to the second align bracket 262a, so that the rotation of the glass align cap 264a is prevented. Make it easy.
- the upper end of the rotating shaft connected to the glass alignment cap 264a is preferably embedded in the glass alignment cap 264a so as not to hit an external object during the alignment operation.
- the side surfaces of the holder alignment caps 226a and 226b and the glass alignment caps 264a and 264b are preferably formed to be inclined. This minimizes the contact area between the holder 140 and the glass substrate 10, the holder alignment caps 226a and 226b, and the glass alignment caps 264a and 264b, and thus the holder 140 and the glass substrate 10 during the contact process. This is to prevent this damage.
- 6 and 7 are an exploded perspective view and an assembled state diagram showing the configuration of the second alignment portion 200b of the holder stage 100 according to the first embodiment of the present invention.
- the second alignment unit 200b has the same basic configuration as the first alignment unit 200a. However, since the second alignment unit 200b has a difference in size between the first alignment unit 200a and the alignment bracket, only the second alignment unit 200b will be described in detail below.
- the first alignment bracket 222b of the second alignment unit 200b may be smaller in size than the first alignment bracket 222a of the first alignment unit 200a. This is to avoid interference between the glass substrate 10 and the alignment unit 200 when the glass substrate 10 is loaded / unloaded on the holder stage 100.
- the sizes of the first alignment brackets 222a and 222b may include the transfer path of the glass substrate 10, the position of the alignment rotation axis 150, and the first and second alignment portions connected to the alignment rotation axis 150. The distance between 200a and 200b may be taken into consideration and set.
- a plurality of holders 140 are mounted and accommodated in the holder stage 100.
- the support pin 130 protrudes through a hole (not shown) formed in the holder 140.
- the alignment axis 150 is rotated by the rotary actuator 160 so that the first and second alignment portions 200a and 200b may perform the glass substrate 10. Do not place it in the transport path.
- the glass substrate 10 is loaded into the holder stage 100 using the substrate transfer robot, and the glass substrate 10 is mounted on the support pin 130 installed on the rod 120.
- the space formed between the glass substrate 10 and the holder 140 separated by the support pin 130 is used to transfer the glass substrate 10 to the substrate stage by using a substrate transfer robot (that is, a substrate cassette on which the glass substrate is mounted). It is used when transferring to
- the alignment axis of rotation 150 is rotated by the rotary actuator 160 to return the first and second alignment units 200a and 200b to their original positions.
- the holder alignment portions 220a and 220b contact the short side and the long side of the holder 140 at the same time, and the glass alignment portions 260a and 260b are on the glass substrate.
- the short side and long side of (10) are contacted simultaneously.
- the alignment process of the glass substrate 10 and the holder 140 by the operation of the first and second alignment units 200a and 200b is as follows.
- the side surfaces of the holder alignment cap 226a are in contact with both short sides of the holder 140, and the holder is aligned at both long sides of the holder 140.
- the side surface of the in cap 226b contacts.
- the side surfaces of the glass alignment cap 264a are in contact with both short sides of the glass substrate 10
- the side surfaces of the glass alignment cap 264b are in contact with both long sides of the glass substrate 10.
- the short side and long side of the holder 140 are in contact with the holder alignment caps 226a and 226b at the same pressure.
- the short side and long side of the glass substrate 10 are brought into contact with the glass alignment caps 264a and 264b at the same pressure, so that the positions of the holder 140 and the glass substrate 10 are unchanged.
- the holder alignment caps 226a and 226b and / or the glass alignment caps 264a and 264b are each holder at different pressures. 140 and / or glass substrate 10.
- the holder alignment caps 226a and 226b and / or the glass alignment caps 264a and 264b push the holder 140 and / or the glass substrate 10 toward the smaller contact pressure from the larger contact pressure.
- the glass substrate 10 and / or the holder 140 are positioned at the same contact pressures with the holder alignment caps 226a and 226b and / or the glass alignment caps 264a and 264b, that is, the holders.
- Alignment is performed while moving to a predetermined position of the holder 140 and the glass substrate 10 in the stage 100. This alignment process may be simultaneously performed on all of the holders 140 and the glass substrate 10 that are mounted and accommodated in the holder stage 100.
- the glass substrate 10 mounted on the holder 140 is loaded into the substrate boat by using a holder transfer robot to perform subsequent substrate processing. Proceed.
- the process of transferring the glass substrate and the holder from the holder stage to the substrate boat is facilitated by precisely aligning the glass substrate and / or the holder loaded on the holder stage at a predetermined position.
- the productivity is improved and the unit cost of substrate processing is low.
- FIG 8 is a plan view showing the configuration of the holder stage 100a according to the second embodiment of the present invention.
- the holder stage 100a includes a base frame 50, a base plate 110, a rod 120, a support pin 130, a holder 140, an alignment axis of rotation 150, a rotary actuator 160, and a holder. It may be configured to include an alignment unit 300 and the glass alignment unit 400.
- the configuration of the base frame 50, the base plate 110, the rod 120, the support pin 130, the rotary actuator 160 and the alignment axis of rotation 150 is the same as the first embodiment of the present invention described above Therefore, detailed description thereof will be omitted in the present embodiment.
- the holder alignment unit 300 serves to align the holder 140 on a predetermined position in the holder stage 100a.
- the holder alignment unit 300 is connected to the alignment rotation shaft 150 and installed to correspond to the plurality of holders 140 mounted in the holder stage 100a.
- the holder alignment unit 300 may be installed at two opposite corners of the four corners of the holder 140.
- the holder alignment unit 300 may include a first holder alignment unit 300a in contact with the short side of the holder 140 and a second holder alignment unit 300b in contact with the long side of the holder 140.
- the glass alignment unit 400 serves to align the glass substrate 10 on a predetermined position in the holder stage 100a.
- the glass alignment unit 400 is connected to the alignment rotation shaft 150 and installed to correspond to the plurality of glass substrates 10 mounted in the holder stage 100a.
- the glass alignment unit 400 may be installed at two opposite corners of the four corners of the glass substrate 140, but may be disposed to be offset from the two corners at which the holder alignment unit 300 is installed.
- the glass alignment unit 400 may include a first glass alignment unit 400a in contact with the short side of the glass substrate 10 and a second glass alignment unit 400b in contact with the long side of the glass substrate 10. have.
- the holder alignment unit 300 is installed at two opposite corners of the four corners of the holder 140 and the glass substrate 10, and the glass alignment unit 400 is disposed at the holder 140.
- the four corners of the glass substrate 10 may be installed at two opposite corners where the holder alignment portion 300 is not provided.
- the arrangement of the holder alignment unit 300 and the glass alignment unit 400 does not need to be the same for all holders 140 and the glass substrate 10 mounted and accommodated in the holder stage 100a. This will be described below with reference to FIGS. 9 to 11.
- FIG. 9 is a perspective view illustrating an installation state of the holder alignment unit 300a and the glass alignment unit 400a of the holder stage 100a according to the second embodiment of the present invention.
- FIG. 10 is a detailed view of portion A of FIG. 9, and FIG. 11 is a detailed view of portion B of FIG. 9.
- the arrangement of the holder alignment unit 300 and the glass alignment unit 400 is changed according to the positions of the holder 140 and the glass substrate 10 in the holder stage 100a.
- the holder 140 or the glass substrate 10 may be selected and aligned.
- the holder 140 and the glass substrate 10 may be aligned at the same time, and the holder 140 or the glass substrate (depending on the mounting position of the holder 140 and / or the glass substrate 10 in the holder stage 100a) may be used. 10) can be sorted and sorted. That is, according to the present embodiment, the holder 140 and / or the glass substrate 10 may be aligned to easily cope with various environmental changes in the substrate processing process.
- FIGS. 12 and 13 are exploded perspective views and assembly diagrams showing the configuration of the first holder alignment unit 300a of the holder stage 100a according to the second embodiment of the present invention.
- the first holder alignment unit 300a may include a first alignment bracket 322a, a fixing piece 324a, and a holder alignment cap 326a.
- a snap ring 330a, a bearing 332a, and a coke 334a are connected to a rotation shaft that connects the holder alignment cap 326a to the fixing piece 324a.
- the first alignment bracket 322a fixes the components constituting the first holder alignment portion 300a.
- the first alignment bracket 322a is connected to one side of the alignment rotation shaft 150.
- One end of the first alignment bracket 322a is bent in a 'b' shape, and the bending portion is connected to one side of the alignment rotation shaft 150.
- a bolt hole may be formed at the bent portion of the first alignment bracket 322a so that the first alignment bracket 322a may be easily connected to the alignment rotation shaft 150.
- the holder alignment cap 326a which will be described later is fixed to the fixing piece 324a.
- the fixing piece 324a is formed in a flat plate shape.
- the fixing piece 324a is formed in parallel with each other on one side of the first and second ends of the first alignment bracket 322a, that is, on the opposite side of the portion joined to the alignment rotation shaft 150.
- the holder alignment cap 326a contacts the short side of the holder 140 and aligns the holder 140.
- the holder alignment cap 326a is connected by the rotation shaft between two fixing pieces 324a.
- the holder alignment cap 326a is formed in a trapezoidal cross-sectional structure in which the length of the upper portion is longer than that of the lower portion.
- the snap ring 330a, the bearing 332a, and the coke 334a are connected to a rotation shaft connecting the holder align cap 326a to the fixing piece 324a, thereby easily rotating the holder align cap 326a. Can be.
- 14 and 15 are exploded perspective views and assembly diagrams showing the configuration of the second holder alignment portion 300b of the holder stage 100a according to the second embodiment of the present invention.
- the second holder alignment portion 300b may be the same as the first holder alignment portion 300a except that the holder alignment cap 326b contacts the long side of the holder 140.
- the configuration is the same.
- the second holder alignment unit 300b has a difference in size between the first holder alignment unit 300a and the alignment bracket, which will be described in detail below.
- the first alignment bracket 322b of the second holder alignment unit 300b may be smaller than the first alignment bracket 322a of the first holder alignment unit 300a. This is to avoid interference between the glass substrate 10 and the holder alignment portions 300a and 300b when the glass substrate 10 is loaded / unloaded into the holder stage 100a.
- the sizes of the first alignment brackets 322a and 322b may include the holder alignment portions 300a and 300b connected to the transfer path of the glass substrate 10, the position of the alignment rotation shaft 150, and the alignment rotation shaft 150. It can be set considering the distance between them.
- 16 and 17 are exploded perspective views and assembly diagrams showing the configuration of the first glass alignment unit 400a of the holder stage 100a according to the second embodiment of the present invention.
- the first glass alignment unit 400a may include a first alignment bracket 422a, a second alignment bracket 462a, and a glass alignment cap 464a.
- a bearing 470a, a snap ring 472a, and a cola 474a are connected to the rotation shaft connecting the glass alignment cap 464a to the second alignment bracket 462a.
- the first alignment bracket 422a connects the first glass alignment unit 400a to the alignment rotation shaft 150. Since the first alignment bracket 422a may be configured in the same manner as the first alignment bracket 322a of the first holder alignment unit 400a, a detailed description thereof will be omitted.
- the second alignment bracket 462a fixes the glass alignment cap 464a described later to the first alignment bracket 422a.
- the second alignment bracket 462a is fixed to the upper surface of the upper side fixing piece 424a among the fixing pieces 424a formed on the first alignment bracket 422a by bolts.
- the second alignment bracket 462a is formed in a flat plate shape.
- the portion where the second alignment bracket 462a is positioned in the fixing piece 424 is preferably formed to be concave so that the bolt-aligned second alignment bracket 462a does not move by external force.
- the glass alignment cap 464a contacts the short side of the glass substrate 10 and aligns the glass substrate 10.
- the glass alignment cap 464a is connected to the end of the second alignment bracket 462a by a rotation shaft.
- the glass alignment cap 464a is formed to have a trapezoidal cross-sectional structure of which the length of the upper portion is longer than the length of the lower portion.
- the bearing 470a, the snap ring 472a, and the coke 474a are connected to the rotating shaft connecting the glass align cap 464a to the second align bracket 462a, so that the rotation of the glass align cap 464a is prevented. Make it easy.
- the upper end of the rotating shaft connected to the glass alignment cap 464a is preferably embedded in the glass alignment cap 464a so as not to hit an external object during the alignment operation.
- FIGS. 18 and 19 are exploded perspective views and assembly diagrams showing an example of the configuration of the second glass alignment unit 400b of the holder stage 100a according to the second embodiment of the present invention.
- the second glass alignment unit 400b may be formed of the first glass alignment unit 400a except that the glass alignment cap 346b is in contact with the long side of the glass substrate 10.
- the basic configuration is the same.
- the second glass alignment unit 400b has a difference in size between the first glass alignment unit 400a and the first alignment brackets 422a and 422b.
- the difference between the sizes of the first alignment brackets 422a and 422b in the first and second glass alignment units 400a and 400b is that the first alignment brackets are arranged in the first and second holder alignment units 300a and 300b. Since the same reason as the difference in the size of the (322a, 322b) is a detailed description thereof will be omitted.
- the side surfaces of the holder alignment caps 326a and 326b and the glass alignment caps 464a and 464b are preferably formed to be inclined. This minimizes the contact area between the holder 140 and the glass substrate 10, the holder alignment caps 326a and 326b, and the glass alignment caps 464a and 464b, thereby minimizing the contact area between the holder 140 and the glass substrate 10 during the contact process. ) To prevent damage.
- the present embodiment differs in some arrangements of the holder alignment portion and the glass alignment portion in the holder stage, and accordingly, the difference between some components forming the holder alignment portion and the glass alignment portion.
- the basic alignment process of the holder and / or glass substrate is the same, a detailed description of the operation according to the configuration of the present embodiment will be omitted.
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Abstract
Description
Claims (15)
- 홀더 및 상기 홀더에 대응되는 글래스 기판이 탑재되어 수용되는 홀더 스테이지로서,상기 홀더와 상기 글래스 기판을 동시에 정렬시키는 얼라인부; 및상기 얼라인부를 회전시키는 얼라인 회전부를 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제1항에 있어서,상기 얼라인 회전부는 상기 얼라인부가 설치되는 얼라인 회전축; 및상기 얼라인 회전축을 회전시키는 얼라인 액츄에이터를 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제1항에 있어서,상기 얼라인부는 상기 홀더를 정렬시키는 홀더 얼라인부; 및상기 글래스 기판을 정렬시키는 글래스 얼라인부를 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제3항에 있어서,상기 얼라인부는 상기 홀더와 상기 글래스 기판의 4 코너측에 설치되는 것을 특징으로 하는 홀더 스테이지.
- 제3항에 있어서,상기 얼라인부는 상기 홀더와 상기 글래스 기판의 2 코너측에 대각선 방향으로 대향하여 설치되는 것을 특징으로 하는 홀더 스테이지.
- 제3항에 있어서,상기 홀더 얼라인부는 일단이 상기 얼라인 회전축에 고정되는 제1 얼라인 브라켓; 및상기 제1 얼라인 브라켓 상에 설치되는 홀더 얼라인 캡을 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제6항에 있어서,상기 글래스 얼라인부는 상기 제1 얼라인 브라켓에 고정되는 제2 얼라인 브라켓; 및상기 제2 얼라인 브라켓 상에 설치되는 글래스 얼라인 캡을 포함하는 것을 특징으로 하는 홀더 스테이지.
- 홀더 및 상기 홀더에 대응되는 글래스 기판이 탑재되어 수용되는 홀더 스테이지로서,상기 홀더 또는 상기 글래스 기판을 정렬시키는 얼라인부; 및상기 얼라인부를 회전시키는 얼라인 회전부를 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제8항에 있어서,상기 얼라인 회전부는 상기 얼라인부가 설치되는 얼라인 회전축; 및상기 얼라인 회전축을 회전시키는 얼라인 액츄에이터를 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제8항에 있어서,상기 얼라인부는 상기 홀더를 정렬시키는 홀더 얼라인부 또는 상기 글래스 기판을 정렬시키는 글래스 얼라인부 중 어느 하나인 것을 특징으로 하는 홀더 스테이지.
- 제10항에 있어서,상기 홀더 얼라인부는 상기 홀더와 상기 글래스 기판의 2 코너측에 대각선 방향으로 대향하여 설치되고, 상기 글래스 얼라인부는 상기 홀더와 상기 글래스 기판의 나머지 2 코너측에 대각선 방향으로 대향하여 설치되는 것을 특징으로 하는 홀더 스테이지.
- 제10항에 있어서,상기 홀더 얼라인부는 일단이 상기 얼라인 회전축에 고정되는 제1 얼라인 브라켓; 및상기 제1 얼라인 브라켓 상에 설치되는 홀더 얼라인 캡을 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제10항에 있어서,상기 글래스 얼라인부는 일단이 상기 얼라인 회전축에 고정되는 제2 얼라인 브라켓; 및상기 제2 얼라인 브라켓 상에 설치되는 글래스 얼라인 캡을 포함하는 것을 특징으로 하는 홀더 스테이지.
- 제1항 또는 제8항에 있어서,상기 홀더의 재질은 그라파이트인 것을 특징으로 하는 홀더 스테이지.
- 제14항에 있어서,상기 홀더의 표면에는 탄화규소(SiC)가 코팅되어 있는 것을 특징으로 하는 홀더 스테이지.
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JP2011507350A JP5364156B2 (ja) | 2008-04-30 | 2009-04-30 | ホルダステージ |
CN200980114297.1A CN102016697B (zh) | 2008-04-30 | 2009-04-30 | 支架载置台 |
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KR10-2008-0040921 | 2008-04-30 | ||
KR20080040921A KR100942066B1 (ko) | 2008-04-30 | 2008-04-30 | 홀더 스테이지 |
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KR (1) | KR100942066B1 (ko) |
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US8826693B2 (en) * | 2010-08-30 | 2014-09-09 | Corning Incorporated | Apparatus and method for heat treating a glass substrate |
KR101355213B1 (ko) * | 2011-10-18 | 2014-01-28 | 주식회사 테라세미콘 | 기판 정렬 장치 |
KR101445686B1 (ko) * | 2012-06-29 | 2014-10-02 | 주식회사 테라세미콘 | 기판 정렬장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040043204A (ko) * | 2002-11-16 | 2004-05-24 | 엘지.필립스 엘시디 주식회사 | 액정표시소자용 기판 합착 장치 |
KR20070060251A (ko) * | 2005-12-08 | 2007-06-13 | 주식회사 테라세미콘 | 반도체 제조공정 및 반도체 제조장치 |
KR20070060640A (ko) * | 2005-12-09 | 2007-06-13 | 주식회사 테라세미콘 | 평판표시장치 제조시스템 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07114233B2 (ja) * | 1992-04-01 | 1995-12-06 | 株式会社ニコン | 基板の位置決め装置 |
JP2001332600A (ja) * | 2000-05-19 | 2001-11-30 | Nikon Corp | 搬送方法、露光装置 |
JP2003209153A (ja) * | 2002-01-11 | 2003-07-25 | Hitachi Kokusai Electric Inc | 基板処理装置、及び半導体デバイスの製造方法 |
US7275577B2 (en) * | 2002-11-16 | 2007-10-02 | Lg.Philips Lcd Co., Ltd. | Substrate bonding machine for liquid crystal display device |
CN1333453C (zh) * | 2003-02-20 | 2007-08-22 | 应用材料有限公司 | 相对于支撑台定位基片的方法与设备 |
JP2005197542A (ja) * | 2004-01-09 | 2005-07-21 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP4410063B2 (ja) * | 2004-09-06 | 2010-02-03 | 東京エレクトロン株式会社 | 基板処理装置 |
TWI346989B (en) * | 2005-04-25 | 2011-08-11 | Terasemicon Co Ltd | Batch type of semiconductor manufacturing device,and loading/unloading method and apparatus of semiconductor substrate |
JP2008064666A (ja) * | 2006-09-08 | 2008-03-21 | Olympus Corp | 外観検査装置の基板保持機構 |
KR100807090B1 (ko) * | 2007-03-28 | 2008-02-26 | 에스엔유 프리시젼 주식회사 | 기판 지지장치와 이를 이용한 엘씨디 셀의 씰패턴 검사장치 |
CN201141958Y (zh) * | 2007-11-01 | 2008-10-29 | 中勤实业股份有限公司 | 卡匣结构 |
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- 2009-04-30 JP JP2011507350A patent/JP5364156B2/ja active Active
- 2009-04-30 WO PCT/KR2009/002282 patent/WO2009134088A2/ko active Application Filing
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040043204A (ko) * | 2002-11-16 | 2004-05-24 | 엘지.필립스 엘시디 주식회사 | 액정표시소자용 기판 합착 장치 |
KR20070060251A (ko) * | 2005-12-08 | 2007-06-13 | 주식회사 테라세미콘 | 반도체 제조공정 및 반도체 제조장치 |
KR20070060640A (ko) * | 2005-12-09 | 2007-06-13 | 주식회사 테라세미콘 | 평판표시장치 제조시스템 |
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JP5364156B2 (ja) | 2013-12-11 |
CN102016697A (zh) | 2011-04-13 |
JP2011519482A (ja) | 2011-07-07 |
CN102016697B (zh) | 2013-07-03 |
WO2009134088A3 (ko) | 2010-03-04 |
KR100942066B1 (ko) | 2010-02-11 |
KR20090115002A (ko) | 2009-11-04 |
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