WO2009116455A1 - 圧電ファン及び圧電ファンを用いた空冷装置 - Google Patents
圧電ファン及び圧電ファンを用いた空冷装置 Download PDFInfo
- Publication number
- WO2009116455A1 WO2009116455A1 PCT/JP2009/054831 JP2009054831W WO2009116455A1 WO 2009116455 A1 WO2009116455 A1 WO 2009116455A1 JP 2009054831 W JP2009054831 W JP 2009054831W WO 2009116455 A1 WO2009116455 A1 WO 2009116455A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- blades
- blade
- piezoelectric
- piezoelectric fan
- heat sink
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a piezoelectric fan that discharges warm air between heat radiation fins of a heat sink by bending and displacing a blade connected to the piezoelectric vibrator by bending vibration.
- Patent Document 1 a plurality of movable pieces are attached to a rotating shaft, and each movable piece is inserted between a plurality of heat dissipating fins arranged in parallel with a heat generating portion of a heating element, and the rotating shaft is continuous.
- a radiator is disclosed in which, by rotating or swinging within a predetermined angle range, cool air is sent between the radiation fins, and at the same time, warm air between the radiation fins is discharged.
- Patent Document 2 discloses a piezoelectric fan that has a wind-generating vibrator including a piezoelectric element and has an exhaust port and an intake port provided on the same surface.
- the piezoelectric fan is provided with a pair of partition walls extending inwardly from the opening of the case body so as to sandwich both sides of the wind vibrator, and the opening between each partition wall and both sides of the case body is provided.
- An opening that is formed as an intake port and is sandwiched between both partition walls is formed as an exhaust port.
- the distance between the two partition walls is made as close as possible to the width of the wind generating plate (blade), that is, the gap between the partition wall and the blade is made as small as possible. It is desirable.
- the gap between the blade and both side partition walls (radiating fins) is as small as possible. This is because the thermal boundary layer on the surface of the radiating fin is directly “scraped” to promote heat dissipation from the fin, and the air flowing into the back side of the blade through the gap between the fin and the blade is reduced. According to the effect of increasing the air flow forward. However, this is nothing more than blocking the place where it was easy to flow, and the air resistance acting on the blade is greatly increased.
- FIG. 10 shows a state of the blade 51 that moves between the radiation fins 50. As indicated by the solid line, it is ideal that the blade 51 is displaced in a direction parallel to the side surface of the radiating fin 50. However, if the gap between the blade 51 and the radiating fin 50 is small, the blade 51 reduces the air resistance as much as possible. In order to move, the blade 51 is twisted so as to widen the gap with the heat radiating fin 50 as indicated by a broken line. Although FIG. 10 shows the case where the left edge of the blade 51 is twisted upward and the right edge is twisted downward, the blade 51 may be twisted in the opposite direction due to the difference in air resistance between the left and right edges of the blade 51.
- the torsion recovers due to the spring stiffness, and this time, a complicated behavior such as torsional vibration may be exhibited.
- a complicated behavior such as torsional vibration may be exhibited.
- Unexpected vibration such as torsional vibration affects the durability and reliability of the piezoelectric fan, and contact with the heat radiating fin not only leads to noise generation but also may cause changes in characteristics due to damage and wear.
- An object of the present invention is to provide a piezoelectric fan having high durability and reliability by suppressing twisting of a blade when a plurality of blades are bent and displaced between a plurality of heat radiation fins of a heat sink.
- the present invention provides a piezoelectric vibrator that bends and vibrates when a voltage is applied in a piezoelectric fan that discharges warm air between the heat dissipating fins from a heat sink having a plurality of heat dissipating fins arranged in parallel at intervals. And a plurality of parallel blades connected to or integrated with the piezoelectric vibrator so as to be excited by the piezoelectric vibrator, and in the region from the middle in the longitudinal direction of the blade to the free end, Provided is a piezoelectric fan provided with a connecting portion for connecting blades to each other.
- the blade is resonantly oscillated by connecting the blade to the piezoelectric vibrator and applying an AC voltage to the piezoelectric vibrator.
- the air between the heat radiating fins can be replaced, and heat can be efficiently radiated.
- the piezo fan is also formed with multiple blades arranged and inserted between the fins. It is good to do.
- the blades are in contact with the radiating fins because the blades are prevented from being twisted by being connected to each other by a connecting portion provided in the region from the intermediate portion in the longitudinal direction of the adjacent blade to the free end.
- the gap dimension between the blade and the radiation fin can be made as small as possible, warm air in the vicinity of the fin can be scraped off, and efficient cooling can be achieved.
- the piezoelectric vibrator in the present invention is one that bends and vibrates when an AC voltage is applied, but various configurations can be employed.
- a unimorph type piezoelectric vibrator can be configured with the blade and the piezoelectric element by attaching a single-plate piezoelectric element to the main surface on one end side of the blade.
- a bimorph type piezoelectric vibrator can be configured by adhering two piezoelectric elements expanding and contracting in opposite directions to both surfaces of the blade.
- the piezoelectric vibrator may be configured by bonding a piezoelectric element and a metal plate.
- the amplitude itself accompanying the bending vibration of the piezoelectric vibrator is very small, the amplitude of the piezoelectric vibrator can be amplified many times by the resonance of the blade attached to the piezoelectric vibrator.
- the blade may be a metal plate or a resin plate. The thickness, length, Young's modulus, etc. of the blade may be set appropriately so that the blade can perform primary resonance by vibration of the piezoelectric vibrator.
- a plurality of blades may be connected in parallel to a single piezoelectric vibrator, or a plurality of piezoelectric fans in which one blade is connected to one piezoelectric vibrator are arranged in parallel. May be.
- a piezoelectric vibrator may be configured by providing a substrate portion integrally with a plurality of blades and attaching a piezoelectric element to the substrate portion.
- the connecting portion may be an integral structure with the blade or may be constituted by a separate member. For example, when the connecting portion is made more rigid than the blade, the torsional vibration can be more effectively suppressed.
- the connecting portion is made of a material having a specific gravity greater than that of the blade, the weight is formed at the tip portion of the blade, so that there is an effect that the moment of inertia due to the weight increases and the amount of displacement of the blade increases.
- the blade is inserted between each radiating fin so that it can be bent and displaced in the direction parallel to the side surface of the radiating fin, and the free end of the blade in the longitudinal direction is projected outside the heat sink, and the length of the blade protruding outside the heat sink
- the free ends in the vertical direction may be connected to each other by a connecting portion.
- the blade usually resonates in a first order vibration mode that provides the greatest amplitude. At that time, since the blade tip portion has the largest amplitude and the high speed, the largest air resistance acts on the blade tip portion. The air resistance and the distance from the fixed end overlap, and the torsion and torsional vibration are most likely to occur at the blade tip. Therefore, connecting the blade at the tip of the free end of the blade is most effective in suppressing torsion and torsional vibration.
- a groove portion may be formed in the middle portion in the length direction of the heat radiating fin of the heat sink, and the connecting portion of the blade may be inserted into the groove portion so as to be displaceable.
- the connecting portion since the connection is made at the position of the groove formed in the radiating fin, such as an intermediate portion of the blade, the connecting portion does not protrude to the outside of the radiating fin, and space is saved.
- a heat sink with a groove in the middle is required.
- a groove for inserting a clip is formed in advance.
- the connecting portion can be arranged.
- the connecting portion for connecting a plurality of blades to each other is provided in the region from the intermediate portion in the longitudinal direction of the blade to the free end portion, the blade vibrates between the radiating fins. Then, twisting of the blade can be prevented, and a situation where the blade comes into contact with the heat radiating fin can be avoided. Furthermore, since the gap dimension between the blade and the radiation fin can be made as small as possible, efficient cooling becomes possible.
- FIG. 1 is a perspective view of a first embodiment of an air cooling device using a piezoelectric fan according to the present invention. It is a perspective view of the piezoelectric fan shown in FIG. It is a disassembled perspective view of the piezoelectric fan shown in FIG. It is sectional drawing of the electronic device provided with the air cooling apparatus shown in FIG.
- FIG. 5 is a cross-sectional view taken along line VV in FIG. 4. It is a disassembled perspective view of 2nd Embodiment of the piezoelectric fan which concerns on this invention. It is a perspective view of 3rd Embodiment of the air-cooling apparatus using the piezoelectric fan which concerns on this invention.
- FIGS. 4 and 5 show an example in which the first embodiment of the piezoelectric fan according to the present invention is used as an air cooling device for a heat sink 1.
- the heat sink 1 has a plurality of (four in this case) heat radiation fins 2a to 2d arranged in parallel at intervals.
- the heat sink 1 is attached to the upper surface of a heating element (CPU or the like) 4 mounted on the circuit board 3 in a thermally coupled state. Therefore, the heat generated from the heat generating element 4 is conducted to the heat sink 1, and the air between the radiation fins 2a to 2d is heated.
- a heating element CPU or the like
- the piezoelectric fan 10 of this embodiment includes a metal plate 11 rich in spring elasticity such as a stainless steel plate.
- a substrate portion 11a continuous in the width direction is formed on one end side in the length direction of the metal plate 11, and a plurality of (here, three) bands of the same length and the same width extending in parallel to each other are formed on the substrate portion 11a.
- Plate-shaped blades 12a to 12c are integrally formed.
- Piezoelectric elements 13a and 13b are attached to the upper and lower surfaces of the substrate portion 11a of the metal plate 11, and the substrate portion 11a and the piezoelectric elements 13a and 13b constitute a bimorph type piezoelectric vibrator 16.
- One edge (the edge opposite to the extending direction of the blades 12a to 12c) of the substrate portion 11a and the piezoelectric elements 13a and 13b is fixedly held by the support body 14.
- a connecting member 15 for connecting them to each other is provided.
- the blades 12a to 12c are inserted between the radiation fins 2a to 2d so that the displacement direction of the blades is parallel to the side surfaces of the radiation fins 2a to 2d.
- the support 14 is fixed to a fixing member 5 such as a case located in the vicinity of the heat sink 1.
- the blades 12a to 12c penetrate the radiation fins 2a to 2d in the length direction, and the connecting member 15 is provided at the tip of the blades 12a to 12c protruding from the radiation fins 2a to 2d.
- the connecting member 15 synchronizes the displacement of each blade and suppresses twisting of the blade, and may be made of the same material as the metal plate 11 or may be formed of a different material such as resin. In order to effectively eliminate the twist generated in each blade, it is desirable that the connecting member 15 has higher rigidity than the blades 12a to 12c. Further, in order to cause the connecting member 15 to function as a weight, it may be formed of a material having a specific gravity greater than that of the blades 12a to 12c. In this case, the connecting member 15 reduces the resonance frequency of the blades 12a to 12c and increases the amplitude.
- the piezoelectric vibrator 16 By applying an AC voltage between the upper and lower electrodes of the piezoelectric elements 13a and 13b and the metal plate 11 as an intermediate electrode, the piezoelectric vibrator 16 has an amplitude V1 (see FIG. 4) in the length direction of the blades 12a to 12c. Bends and vibrates. The vibration causes the blades 12a to 12c to resonate, and the free ends of the blades 12a to 12c vibrate with an amplitude V2 (see FIG. 4) larger than that of the piezoelectric vibrator 16.
- the gap between the blades 12a to 12c and the radiation fins 2a to 2d it is desirable to set the gap between the blades 12a to 12c and the radiation fins 2a to 2d as narrow as possible.
- the blade tends to be twisted due to air resistance acting on the blade.
- the connecting member 15 since the free ends of the blades 12a to 12c are connected to each other by the connecting member 15, the twist of each blade is suppressed.
- FIG. it is ideal that the blades 12a to 12c translate in a posture perpendicular to the side surfaces of the radiating fins 2a to 2d.
- the gap between the blade and the radiating fin is small, the blade is as much as possible.
- FIG. 6 shows a second embodiment of a piezoelectric fan according to the present invention.
- portions common to the first embodiment are denoted by the same reference numerals, and redundant description is omitted.
- a connecting portion 15a is formed integrally with the blades 12a to 12c at the free ends in the length direction of the blades 12a to 12c.
- the substrate portion 11a is integrally formed with an extension portion 11b that extends in the opposite direction to the blade extending direction and to which the piezoelectric elements 13a and 13b are not attached.
- the extension 11b is held by a support (not shown).
- the substrate portion 11a, the blades 12a to 12c, and the connecting portion 15a are formed from a single metal plate, the number of components can be reduced and an inexpensive piezoelectric fan 10a can be configured. Further, since the ends of the piezoelectric elements 13a and 13b are not restrained by the support, the piezoelectric elements 13a and 13b can be displaced more freely.
- FIG. 7 shows a third embodiment in which the piezoelectric fan according to the present invention is used as an air cooling device for the heat sink 1a.
- portions common to the first embodiment are denoted by the same reference numerals, and redundant description is omitted.
- the intermediate portions in the length direction of the blades 12a to 12c are connected to each other by the connecting portion 17, and the intermediate portions in the length direction of the radiating fins 2b and 2c of the heat sink 1a corresponding to the connecting portion 17.
- Grooves 2e and 2f are formed in the part. Therefore, when the blades 12a to 12c are displaced in the thickness direction, the connecting portion 17 can freely move up and down in the groove portions 2e and 2f, and can prevent contact with the radiation fins 2b and 2c.
- the free ends of the blades 12a to 12c are not connected to each other and are located inside the heat sink 1a. Therefore, the blades 12a to 12c do not protrude long outside the heat sink 1a and can be miniaturized.
- the connecting portion 17 of the present embodiment is formed integrally with the blades 12a to 12c, but may be connected by a separate member. Of the radiating fins 2b and 2c divided by the grooves 2e and 2f, the edge on the piezoelectric vibrator 16 side is not touched with the connecting portion 17 when the blades 12a to 12c are displaced. 2h is formed.
- the groove portions 2e and 2f are formed only in the two heat radiation fins 2b and 2c at the center of the heat sink 1a.
- the groove portions are similarly formed in the heat radiation fins 2a and 2d on both sides, and the groove portions are continuous in the width direction. It is good.
- a known Z-type clip can be inserted into the groove to attach the heat sink 1a to a circuit board or the like.
- FIG. 8 shows a fourth embodiment in which the piezoelectric fan according to the present invention is used as an air cooling device for the heat sink 1a.
- portions common to the first embodiment are denoted by the same reference numerals, and redundant description is omitted.
- the piezoelectric fan 10c of the present embodiment the intermediate portions in the length direction of the blades 12a to 12c are connected by the connecting portion 17, and the free ends in the length direction are also connected by the connecting portion 18.
- the connecting portion 17 that connects the intermediate portions in the length direction is slidably inserted into the groove portions 2e and 2f formed in the intermediate portions of the heat radiation fins 2b and 2c of the heat sink 1a, so that the length direction can be freely set.
- the connecting portion 18 that connects the end portions protrudes outside the heat sink 1a. In this case, since the blades 12a to 12c are connected to each other at two locations in the length direction, the twist can be more effectively suppressed.
- FIG. 9 shows various embodiments of the piezoelectric fan according to the present invention.
- one end of one piezoelectric vibrator 21 is connected to the support 22, and a plurality of blades 23 a to 23 c are fixed in parallel to the other end of the piezoelectric vibrator 21.
- the free ends of the blades 23a to 23c are connected to each other by the connecting member 24.
- the blades 23a to 23c are inserted between the heat radiation fins of the heat sink.
- the piezoelectric vibrator 21 bends and vibrates in the direction of the arrow when an AC voltage is applied, and may be a bimorph vibrator or a unimorph vibrator.
- the piezoelectric fan 30 shown in FIG. 9B has one end in the length direction of a plurality of rectangular piezoelectric vibrators 31a to 31c connected in parallel to a support 32, and the length of each piezoelectric vibrator 31a to 31 is shown. Blades 33a to 33c are individually fixed to the other end in the direction, and the free ends of the blades 33a to 33c are connected to each other by a connecting member 34.
- the base end side of the blades 33a to 33c may be extended in the length direction, and a unimorph type or bimorph type vibrator may be configured by attaching a piezoelectric element to one or both sides of the extended portion.
- a piezoelectric fan 40 shown in FIG. 9C supports blades 45a to 45c via three U-shaped piezoelectric vibrators 41 to 43.
- Each of the piezoelectric vibrators 41 to 43 includes a first vibrator 41a to 43a and a second vibrator 41b to 43b, and the length of the first vibrator 41a to 43a and the second vibrator 41b to 43b.
- One end in the vertical direction is connected to each other via spacers 41c to 43c to form a U-shaped structure, and the blades 45a to 45c are connected to the other longitudinal ends of the first vibrators 41a to 43a to generate the second vibration.
- the other ends in the length direction of the children 41b to 43b are connected and supported in parallel to the support body 44.
- the free ends of the blades 45a to 45c are connected to each other by a connecting member 46.
- the first vibrators 41a to 43a and the second vibrators 41b to 43b are vibrators having the same vibration characteristics, and are bent and displaced in directions opposite to each other. For example, when the first vibrators 41a to 43a are bent and displaced upward and convex, the second vibrators 41b and 43b are bent and displaced downward and convex. Therefore, the blades 45a to 45c are vibrated with twice the amplitude of each vibrator, and the amplitudes of the blades 45a to 45c are increased accordingly, so that a significant increase in the air volume can be realized.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
図1~図5は本発明に係る圧電ファンの第1実施形態を、ヒートシンク1の空冷装置として用いた例を示す。ヒートシンク1は、間隔をあけて並設された複数枚(ここでは4枚)の放熱フィン2a~2dを有している。ヒートシンク1は、図4,図5に示すように回路基板3上に実装された発熱素子(CPU等)4の上面に熱的に結合された状態で取り付けられている。したがって、発熱素子4から生じる熱はヒートシンク1に伝導され、各放熱フィン2a~2d間の空気は熱せられる。
図6は本発明に係る圧電ファンの第2実施形態を示す。本実施形態において、第1実施形態と共通する部分には同一符号を付して重複説明を省略する。本実施形態の圧電ファン10aは、ブレード12a~12cの長さ方向自由端部に、ブレード12a~12cと一体に連結部15aを形成したものである。基板部11aにはブレード延在方向と逆側に延び、かつ圧電素子13a,13bが貼り付けられない延長部11bが一体に形成されている。この延長部11bが図示しない支持体によって保持されている。この場合には、基板部11a、ブレード12a~12c及び連結部15aが1枚の金属板から形成されるので、部品数が少なくて済み、安価な圧電ファン10aを構成できる。また、圧電素子13a,13bの端部が支持体によって拘束されないので、圧電素子13a,13bがより自由に変位できる。
図7は本発明に係る圧電ファンをヒートシンク1aの空冷装置として用いた第3実施形態を示す。本実施形態において、第1実施形態と共通する部分には同一符号を付して重複説明を省略する。本実施形態の圧電ファン10bでは、ブレード12a~12cの長さ方向中間部が連結部17によって相互に連結されており、連結部17と対応するヒートシンク1aの放熱フィン2b,2cの長さ方向中間部に、溝部2e,2fが形成されている。そのため、ブレード12a~12cが厚み方向に変位したとき、連結部17は溝部2e,2fの中を上下に自由に移動でき、放熱フィン2b,2cとの接触を防止できる。
図8は本発明に係る圧電ファンをヒートシンク1aの空冷装置として用いた第4実施形態を示す。本実施形態において、第1実施形態と共通する部分には同一符号を付して重複説明を省略する。本実施形態の圧電ファン10cでは、ブレード12a~12cの長さ方向中間部を連結部17によって連結するとともに、長さ方向自由端部も連結部18によって連結したものである。長さ方向中間部を連結する連結部17は、第2実施形態と同様にヒートシンク1aの放熱フィン2b,2cの中間部に形成された溝部2e,2fに変位自在に挿入され、長さ方向自由端部を連結する連結部18はヒートシンク1aの外部に突出している。この場合は、ブレード12a~12cを長さ方向2箇所で相互に連結しているので、捩れを一層効果的に抑制できる。
2a~2d 放熱フィン
2e,2f 溝部
10 圧電ファン
11 金属板
11a 基板部
12a~12c ブレード
13a,13b 圧電素子
14 支持体
15 連結部材
15a,17,18 連結部
16 圧電振動子
Claims (8)
- 間隔をあけて並設された複数の放熱フィンを有するヒートシンクから、前記放熱フィン間の暖気を排出する圧電ファンにおいて、
電圧印加により屈曲振動する圧電振動子と、当該圧電振動子により励振されるよう前記圧電振動子に連結又は一体化された複数の並列なブレードとを備え、
前記ブレードの長さ方向中間部から自由端部までの領域内に、前記ブレードを相互に連結する連結部を設けたことを特徴とする圧電ファン。 - 前記複数のブレードの長さ方向自由端部と逆側の端部には、これらブレードを幅方向に連結する基板部が一体に形成されており、
前記基板部の表裏面の少なくとも1面に圧電素子を貼り付けることにより、前記圧電振動子が構成されていることを特徴とする請求項1に記載の圧電ファン。 - 前記連結部は前記ブレードより剛性が高いことを特徴とする請求項1又は2に記載の圧電ファン。
- 前記連結部は前記ブレードより比重の大きな材料で構成されていることを特徴とする請求項1乃至3のいずれか1項に記載の圧電ファン。
- 前記連結部は、前記ブレードと一体に形成されていることを特徴とする請求項1又は2に記載の圧電ファン。
- 前記ブレードは、前記放熱フィンの側面と平行方向に屈曲変位できるように各放熱フィンの間に挿入されており、
前記ブレードの長さ方向自由端部は前記ヒートシンクの外部に突出しており、
前記連結部は、前記ヒートシンクの外部に突出したブレードの長さ方向自由端部を相互に連結していることを特徴とする請求項1乃至5のいずれか1項に記載の圧電ファン。 - 前記ヒートシンクの前記放熱フィンの長さ方向中間部に溝部が形成されており、
前記連結部は、前記溝部に変位自在に挿入されていることを特徴とする請求項1乃至6のいずれかに1項に記載の圧電ファン。 - 請求項1乃至7のいずれかに1項に記載の圧電ファンと、前記ヒートシンクとを組み合わせてなる空冷装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200980110105XA CN101978171A (zh) | 2008-03-21 | 2009-03-13 | 压电风扇及使用压电风扇的空冷装置 |
JP2010503851A JP5136641B2 (ja) | 2008-03-21 | 2009-03-13 | 圧電ファン及び圧電ファンを用いた空冷装置 |
TW098108732A TW200946783A (en) | 2008-03-21 | 2009-03-18 | Piezoelectric fan and cooling device employing said fan |
US12/885,629 US20110005733A1 (en) | 2008-03-21 | 2010-09-20 | Piezoelectric fan and cooling device using piezoelectric fan |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-072863 | 2008-03-21 | ||
JP2008072863 | 2008-03-21 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/885,629 Continuation US20110005733A1 (en) | 2008-03-21 | 2010-09-20 | Piezoelectric fan and cooling device using piezoelectric fan |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009116455A1 true WO2009116455A1 (ja) | 2009-09-24 |
Family
ID=41090858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/054831 WO2009116455A1 (ja) | 2008-03-21 | 2009-03-13 | 圧電ファン及び圧電ファンを用いた空冷装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110005733A1 (ja) |
JP (1) | JP5136641B2 (ja) |
CN (1) | CN101978171A (ja) |
TW (1) | TW200946783A (ja) |
WO (1) | WO2009116455A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110120679A1 (en) * | 2009-11-20 | 2011-05-26 | Murata Manufacturing Co., Ltd. | Piezoelectric fan and cooling device |
CN102192136A (zh) * | 2010-03-10 | 2011-09-21 | 株式会社村田制作所 | 压电风扇及冷却装置 |
WO2013121837A1 (ja) * | 2012-02-13 | 2013-08-22 | 株式会社村田製作所 | 圧電ファン |
WO2015096470A1 (zh) * | 2013-12-26 | 2015-07-02 | 华为技术有限公司 | 一种散热模块和系统、控制方法及相关设备 |
CN114667038A (zh) * | 2022-03-23 | 2022-06-24 | 中国北方车辆研究所 | 一种小型化压电风冷闭环控制散热架构 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5066231B2 (ja) * | 2010-07-28 | 2012-11-07 | 日東電工株式会社 | フリップチップ型半導体裏面用フィルム、短冊状半導体裏面用フィルムの製造方法、及び、フリップチップ型半導体装置 |
TWI524840B (zh) * | 2012-03-30 | 2016-03-01 | 台達電子工業股份有限公司 | 散熱模組 |
US9006956B2 (en) * | 2012-05-09 | 2015-04-14 | Qualcomm Incorporated | Piezoelectric active cooling device |
TWI504808B (zh) | 2012-05-15 | 2015-10-21 | Delta Electronics Inc | 振動風扇 |
GB201220471D0 (en) * | 2012-11-14 | 2012-12-26 | Technology Partnership The | Pump |
US20140318741A1 (en) * | 2013-04-29 | 2014-10-30 | Nicholas Jeffers | Cooling With Liquid Coolant And Bubble Heat Removal |
TWI573012B (zh) * | 2013-08-12 | 2017-03-01 | 奇鋐科技股份有限公司 | 散熱裝置 |
US9367103B2 (en) | 2013-08-22 | 2016-06-14 | Asia Vital Components Co., Ltd. | Heat dissipation device |
KR20150047775A (ko) * | 2013-10-25 | 2015-05-06 | 한국전자통신연구원 | 압전 방식 냉각 제어 장치 및 방법 |
JP5789814B1 (ja) * | 2014-07-30 | 2015-10-07 | 株式会社アールフロー | ピエゾファン |
US10018429B2 (en) * | 2014-08-13 | 2018-07-10 | Asia Vital Components Co., Ltd. | Apparatus body heat dissipation device |
US9947570B2 (en) * | 2015-12-30 | 2018-04-17 | International Business Machines Corporation | Handler bonding and debonding for semiconductor dies |
CN107241878B (zh) * | 2016-03-29 | 2021-03-26 | 奇鋐科技股份有限公司 | 用于行动装置之具有散热及保护的外壳 |
CN108024477A (zh) * | 2017-11-13 | 2018-05-11 | 中国航空工业集团公司西安航空计算技术研究所 | 一种自震荡的强化换热装置及方法 |
CN108337864A (zh) * | 2018-03-07 | 2018-07-27 | 浙江大学 | 一种高效的压电式受迫对流散热强化装置及方法 |
TWI667871B (zh) * | 2018-08-07 | 2019-08-01 | 國立交通大學 | 風扇裝置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01233796A (ja) * | 1988-03-14 | 1989-09-19 | Murata Mfg Co Ltd | 放熱器 |
JPH0340462A (ja) * | 1989-03-03 | 1991-02-21 | Microelectron & Computer Technol Corp | 流体熱交換器 |
JPH08330488A (ja) * | 1995-05-30 | 1996-12-13 | Sumitomo Metal Ind Ltd | 圧電ファン付きヒートシンク |
JP2005024229A (ja) * | 2002-09-20 | 2005-01-27 | Daikin Ind Ltd | 熱交換器モジュール、空気調和機用室外機および空気調和機用室内機 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60187799A (ja) * | 1984-03-06 | 1985-09-25 | Nippon Denso Co Ltd | 圧電フアン |
US5861703A (en) * | 1997-05-30 | 1999-01-19 | Motorola Inc. | Low-profile axial-flow single-blade piezoelectric fan |
JP2000334381A (ja) * | 1999-06-01 | 2000-12-05 | Sony Corp | ファン装置及びその使用方法 |
JP2005024299A (ja) * | 2003-06-30 | 2005-01-27 | Tanaka Scientific Ltd | X線分析機器用窓材 |
US7642698B2 (en) * | 2007-03-30 | 2010-01-05 | Intel Corporation | Dual direction rake piezo actuator |
-
2009
- 2009-03-13 CN CN200980110105XA patent/CN101978171A/zh active Pending
- 2009-03-13 WO PCT/JP2009/054831 patent/WO2009116455A1/ja active Application Filing
- 2009-03-13 JP JP2010503851A patent/JP5136641B2/ja not_active Expired - Fee Related
- 2009-03-18 TW TW098108732A patent/TW200946783A/zh not_active IP Right Cessation
-
2010
- 2010-09-20 US US12/885,629 patent/US20110005733A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01233796A (ja) * | 1988-03-14 | 1989-09-19 | Murata Mfg Co Ltd | 放熱器 |
JPH0340462A (ja) * | 1989-03-03 | 1991-02-21 | Microelectron & Computer Technol Corp | 流体熱交換器 |
JPH08330488A (ja) * | 1995-05-30 | 1996-12-13 | Sumitomo Metal Ind Ltd | 圧電ファン付きヒートシンク |
JP2005024229A (ja) * | 2002-09-20 | 2005-01-27 | Daikin Ind Ltd | 熱交換器モジュール、空気調和機用室外機および空気調和機用室内機 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110120679A1 (en) * | 2009-11-20 | 2011-05-26 | Murata Manufacturing Co., Ltd. | Piezoelectric fan and cooling device |
US8581471B2 (en) * | 2009-11-20 | 2013-11-12 | Murata Manufacturing Co., Ltd. | Piezoelectric fan and cooling device |
CN102192136A (zh) * | 2010-03-10 | 2011-09-21 | 株式会社村田制作所 | 压电风扇及冷却装置 |
WO2013121837A1 (ja) * | 2012-02-13 | 2013-08-22 | 株式会社村田製作所 | 圧電ファン |
JP5664821B2 (ja) * | 2012-02-13 | 2015-02-04 | 株式会社村田製作所 | 圧電ファン |
US9856868B2 (en) | 2012-02-13 | 2018-01-02 | Murata Manufacturing Co., Ltd. | Piezoelectric fan |
WO2015096470A1 (zh) * | 2013-12-26 | 2015-07-02 | 华为技术有限公司 | 一种散热模块和系统、控制方法及相关设备 |
CN114667038A (zh) * | 2022-03-23 | 2022-06-24 | 中国北方车辆研究所 | 一种小型化压电风冷闭环控制散热架构 |
CN114667038B (zh) * | 2022-03-23 | 2024-04-30 | 中国北方车辆研究所 | 一种小型化压电风冷闭环控制散热架构 |
Also Published As
Publication number | Publication date |
---|---|
CN101978171A (zh) | 2011-02-16 |
US20110005733A1 (en) | 2011-01-13 |
JP5136641B2 (ja) | 2013-02-06 |
TWI377295B (ja) | 2012-11-21 |
TW200946783A (en) | 2009-11-16 |
JPWO2009116455A1 (ja) | 2011-07-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5136641B2 (ja) | 圧電ファン及び圧電ファンを用いた空冷装置 | |
JP5170238B2 (ja) | 圧電ファン装置及びこの圧電ファン装置を用いた空冷装置 | |
JP5605174B2 (ja) | 冷却装置 | |
KR101472627B1 (ko) | 방열 모듈 | |
JP5304899B2 (ja) | 圧電ファン及びこの圧電ファンを用いた空冷装置 | |
JPWO2009034956A1 (ja) | 冷却装置 | |
JP5051255B2 (ja) | 圧電ファン及び冷却装置 | |
JP5789814B1 (ja) | ピエゾファン | |
JP2010029759A (ja) | 圧電ファン装置 | |
JP2013223818A (ja) | 圧電アクチュエータ、電子機器 | |
JP5089538B2 (ja) | 圧電ファン付きヒートシンク | |
JP6628980B2 (ja) | 拡張式熱表面に対する統合されたコンパクトな衝当 | |
JP5868015B2 (ja) | 分散型ジェット冷却を備えたシャーシ | |
JP2012077678A (ja) | 圧電ファン及びそれを用いた放熱装置 | |
JP5324134B2 (ja) | 放熱モジュール | |
JP2005322757A (ja) | 冷却装置および電子機器 | |
JP2009081270A (ja) | 圧電ファン付冷却装置 | |
JP2003188566A (ja) | 冷却モジュール | |
JP2010067909A (ja) | ピエゾファンおよび放熱モジュール | |
TW200917944A (en) | Electronic apparatus and method of fixing cooling fan | |
JP2009174420A (ja) | 圧電ファン装置 | |
JP5085228B2 (ja) | 圧電ファン装置 | |
JP2009231701A (ja) | 電子機器用冷却装置 | |
JP2013069822A (ja) | 圧電ファン及び冷却装置 | |
JP5113689B2 (ja) | ピエゾファン |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980110105.X Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09722960 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010503851 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09722960 Country of ref document: EP Kind code of ref document: A1 |