WO2009088061A1 - 多軸リニアモータ及び部品移載装置 - Google Patents

多軸リニアモータ及び部品移載装置 Download PDF

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Publication number
WO2009088061A1
WO2009088061A1 PCT/JP2009/050180 JP2009050180W WO2009088061A1 WO 2009088061 A1 WO2009088061 A1 WO 2009088061A1 JP 2009050180 W JP2009050180 W JP 2009050180W WO 2009088061 A1 WO2009088061 A1 WO 2009088061A1
Authority
WO
WIPO (PCT)
Prior art keywords
axis linear
linear motor
layer side
base
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/050180
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Naoki Hanamura
Kiyotaka Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Motor Co Ltd
Original Assignee
Yamaha Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Motor Co Ltd filed Critical Yamaha Motor Co Ltd
Priority to KR1020107013313A priority Critical patent/KR101484016B1/ko
Priority to EP09700973.2A priority patent/EP2242169B1/en
Priority to US12/812,383 priority patent/US8878399B2/en
Priority to CN200980101938.XA priority patent/CN101911453B/zh
Publication of WO2009088061A1 publication Critical patent/WO2009088061A1/ja
Anticipated expiration legal-status Critical
Priority to US14/190,012 priority patent/US9634546B2/en
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/01—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for shielding from electromagnetic fields, i.e. structural association with shields
    • H02K11/014—Shields associated with stationary parts, e.g. stator cores
    • H02K11/0141—Shields associated with casings, enclosures or brackets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/041—Incorporating a pick-up tool having multiple pick-up tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/18—Means for mounting or fastening magnetic stationary parts on to, or to, the stator structures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/28—Means for mounting or fastening rotating magnetic parts on to, or to, the rotor structures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/12—Machines characterised by the modularity of some components
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof

Definitions

  • a drive mechanism that drives a suction nozzle for sucking and holding the components in the vertical direction
  • the linear motor is employed as a component of the drive mechanism.
  • the demand for such linear motors is increasing year by year, and in particular, the need for high-performance linear motors is increasing.
  • a linear motor suitable for a component transfer device has been proposed (see, for example, Patent Document 1).
  • Another object of the present invention is to provide a component transfer apparatus using the linear motor.
  • a single-axis linear motor in which a stator and a mover configured by one and the other of a magnetic body and an armature are provided in a base unit can be handled as a unit unit that can be individually separated. There is no need to disassemble the stator and mover during motor assembly and maintenance. Therefore, it is possible to guarantee the relative positional accuracy of each movable part of the multi-axis linear motor by the assembly accuracy of each single-axis linear motor.
  • Another aspect of the present invention is a component transfer apparatus including the multi-axis linear motor described above as a vertical drive mechanism of a head unit.
  • an electric machine which is an example of the “stator” of the present invention is provided on one end side in the width direction Y of the mover 10 composed of the yoke 5 and the permanent magnet 6 as described above.
  • a child 3 is arranged and fixed to the base surface 1 a of the base plate 1.
  • the armature 3 includes a core 3a, a plurality of hollow bobbins 3b, and a coil 3c formed by winding an electric wire around the outer periphery of each bobbin 3b.
  • the core 3a is formed by laminating a plurality of comb-shaped silicon steel plates (unit plates) in the front-rear direction X whose longitudinal direction extends along the moving direction Z on the YZ plane.
  • a detection unit 7 is provided as detection means having a sensor 7 a and a linear scale 7 b on the side of the movable base 4 opposite to the armature (that is, + Y side). .
  • the sensor cover 7d (see FIG. 2) is attached to the standing wall 1b of the base plate 1 so as to cover the sensor control unit 7c after the structure is attached. It is attached.
  • the multi-axis linear motor MLM is composed of the linear motors LM1 and LM2 having the same configuration as the single-axis linear motor LM of FIG. 1, the pitch PT can be narrowed. That is, in the single-axis linear motor LM (LM1, LM2) in FIG. 1, the coil 3c of the armature 3 that constitutes the stator and the mover 10 are arranged side by side in the width direction Y. The thickness of the linear motor LM can be reduced compared with the case where the armature, the permanent magnet, the yoke, and the movable base are arranged in the direction (front-rear direction X), and as a result, the pitch PT can be narrowed.
  • the linear motor to be maintained is selectively extracted from the multi-axis linear motor MLM. Since inspection and repair can be performed, this embodiment is excellent in terms of maintainability.
  • each single-axis linear motor LM as shown in FIG. 5, the standing walls 1b and 1c extend from both ends of the base plate 1 in the width direction Y to the front of the base surface 1a, and the standing walls 1b and 1c and the base surface 1a An enclosed recess 1e is formed as a storage space so as to open in front of the base surface 1a.
  • the multi-axis linear motor according to the present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the gist thereof.
  • all the single-axis linear motors constituting the multi-axis linear motor MLM have the same configuration, but different single-axis linear motors can be combined.
  • the pitch PT in the stacking direction of the movable base 4 is uniquely determined by the front-rear direction X size of the single-axis linear motors LM1 and LM2, but FIGS.
  • the single-axis linear motors LM1 and LM2 may be provided with a pitch adjusting plate SC at a boundary position adjacent to the stacking direction (front-rear direction X).
  • the pitch PT between the single-axis linear motors LM1 and LM2 increases by the thickness of the pitch adjustment plate SC due to the interposition of the pitch adjustment plate SC.
  • the movable base 4 is made of a ferromagnetic material, and the permanent magnet 6 is directly attached to the side surface of the end of the movable base 4 in the width direction Y in the Z direction.
  • An extension and a magnetic circuit can be used.
  • the yoke 5 may be attached to the side surfaces of the sliders 2b1 and 2b2 in the width direction Y, and the permanent magnet 6 may be attached to the yoke 5.
  • the sliders 2b1 and 2b2 correspond to the “movable part” of the present invention.
  • FIG. 15 is a plan view showing a schematic configuration of a surface mounter as an embodiment of the component transfer apparatus according to the present invention.
  • 16 and 17 are a front view and a side view of the head unit.
  • FIG. 18 is a block diagram showing an electrical configuration of the surface mounter shown in FIG.
  • a three-dimensional XYZ axis coordinate system having the vertical direction as the Z axis is adopted.
  • the directions X, Y, and Z when the surface mounter is equipped with the multi-axis linear motor MLM coincide with the X, Y, and Z axes, respectively.
  • the substrate 103 thus transported is fixed and held by a holding device (not shown).
  • An electronic component (not shown) supplied from the component storage unit 105 is transferred to the substrate 103 by a suction nozzle 161 mounted on the head unit 106.
  • the substrate transport mechanism 102 carries out the substrate 103 in accordance with a drive command from the drive control unit 141.
  • An air passage extending upward (+ Z side) is formed in the axial center portion of the nozzle shaft 163.
  • the lower end portion of the nozzle shaft 163 communicates with the air passage via the suction nozzle 161 connected to the lower end portion.
  • the upper end is open and connected to a vacuum suction source and a positive pressure source via a connecting unit 164, a connecting member 165, an air pipe 166, and a vacuum switching valve mechanism 167.
  • the multi-axis linear motor MLM is attached to the base frame 160 of the head unit 106 as shown in FIGS.
  • the multi-axis linear motor MLM is used as the vertical drive mechanism 168, and the moving direction Z of each movable base 4 is parallel to the vertical direction. Therefore, each movable base 4 is always urged to the forward movement side ( ⁇ Z side) by gravity. Therefore, in each of the single-axis linear motors LM1 to LM10, the upper end portion of the return spring 15 is engaged with the spring engaging portion 1h of the base plate 1, and the lower end portion thereof is a spring engagement provided in the horizontal portion of the block member 164a. The movable base 4 is urged toward the return side (+ Z side), that is, upward, by the return spring 15 engaged with the joint portion 164c.
  • the pitch PT1 between the linear motors LM1 to LM5 can be made different from the pitch PT2 between the linear motors LM5 to LM10.
  • the pitch in the stacking direction can be adjusted flexibly and with high accuracy without changing the configuration of the single-axis linear motors LM1 to LM10.
  • the multi-axis linear motor MLM formed by stacking the single-axis linear motors LM shown in FIG. 1 is used as the vertical drive mechanism 168.
  • other single-axis linear motors for example, shown in FIG.
  • a multi-axis linear motor formed by stacking single-axis linear motors LM, a multi-axis linear motor formed by stacking a plurality of types of single-axis linear motors LM having different configurations, and the like can be used.
  • the single-axis linear motor is attached to the base plate so as to be relatively reciprocally movable along the moving direction, and in the width direction orthogonal to the moving direction and the stacking direction, Each has a movable part that carries the movable element so that the movable element faces the stator.
  • the movable element and the fixed portion are arranged in the width direction of the base plate, and the thickness of the single-axis linear motor can be suppressed in the stacking direction in which the single-axis linear motors are stacked, that is, in the direction orthogonal to the base surface. .
  • the component transfer apparatus configured as described above uses the multi-axis linear motor according to the present invention as the vertical drive mechanism, a plurality of movable parts can be arranged with excellent relative positional accuracy in the stacking direction.
  • the nozzle shaft connected to the movable part can also be arranged with excellent relative positional accuracy.
  • the nozzle shaft and the suction nozzle can be accurately positioned in the vertical direction by driving each single-axis linear motor independently.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Linear Motors (AREA)
  • Supply And Installment Of Electrical Components (AREA)
PCT/JP2009/050180 2008-01-11 2009-01-09 多軸リニアモータ及び部品移載装置 Ceased WO2009088061A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020107013313A KR101484016B1 (ko) 2008-01-11 2009-01-09 다축 리니어 모터 및 부품 이송 장치
EP09700973.2A EP2242169B1 (en) 2008-01-11 2009-01-09 Multi shaft linear motor, and component transfer apparatus
US12/812,383 US8878399B2 (en) 2008-01-11 2009-01-09 Multi-shaft linear motor and component transfer apparatus
CN200980101938.XA CN101911453B (zh) 2008-01-11 2009-01-09 多轴线性电动机及元件移载装置
US14/190,012 US9634546B2 (en) 2008-01-11 2014-02-25 Multi-shaft linear motor and component transfer apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008004082A JP4705118B2 (ja) 2008-01-11 2008-01-11 多軸リニアモータ及び部品移載装置
JP2008-004082 2008-01-11

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/812,383 A-371-Of-International US8878399B2 (en) 2008-01-11 2009-01-09 Multi-shaft linear motor and component transfer apparatus
US14/190,012 Division US9634546B2 (en) 2008-01-11 2014-02-25 Multi-shaft linear motor and component transfer apparatus

Publications (1)

Publication Number Publication Date
WO2009088061A1 true WO2009088061A1 (ja) 2009-07-16

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Family Applications (1)

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PCT/JP2009/050180 Ceased WO2009088061A1 (ja) 2008-01-11 2009-01-09 多軸リニアモータ及び部品移載装置

Country Status (6)

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US (2) US8878399B2 (https=)
EP (1) EP2242169B1 (https=)
JP (1) JP4705118B2 (https=)
KR (1) KR101484016B1 (https=)
CN (1) CN101911453B (https=)
WO (1) WO2009088061A1 (https=)

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* Cited by examiner, † Cited by third party
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DE102011085636A1 (de) * 2011-11-02 2013-05-02 Hamilton Bonaduz Ag Linearmotor mit mehreren Sensoreinheiten und modularem Statoraufbau
JP5859856B2 (ja) * 2012-01-11 2016-02-16 ヤマハ発動機株式会社 リニアモータ及び部品実装装置
JP5872297B2 (ja) * 2012-01-11 2016-03-01 ヤマハ発動機株式会社 リニアモータ、部品実装装置、並びに部品検査装置
JP5873338B2 (ja) 2012-01-11 2016-03-01 ヤマハ発動機株式会社 部品実装装置
JP5872908B2 (ja) * 2012-01-12 2016-03-01 ヤマハ発動機株式会社 リニアモータユニット、ヘッドユニットおよび部品実装機
JP5875376B2 (ja) * 2012-01-12 2016-03-02 ヤマハ発動機株式会社 吸着ノズル昇降用リニアモータおよび電子部品実装装置
TWI514725B (zh) * 2013-12-19 2015-12-21 Delta Electronics Inc 線性馬達及其適用之馬達組
CN105537975B (zh) * 2014-10-28 2017-08-25 富鼎电子科技(嘉善)有限公司 滑动机构及使用该滑动机构的加工装置
DE102014119113B3 (de) * 2014-12-18 2016-04-14 Weiss Gmbh Verbundlinearführung mit Fixierungsmittel
DE102017208948A1 (de) * 2017-05-29 2018-11-29 Krones Ag Statormodul für einen Linearantrieb einer Behälterbehandlungsmaschine
JP7437027B2 (ja) * 2020-04-24 2024-02-22 日本パルスモーター株式会社 多軸リニアモータアクチュエータ
CN111641324B (zh) * 2020-06-30 2024-09-10 九牧厨卫股份有限公司 一种连接结构、定子总成及移门用直线电机
JP7662788B2 (ja) * 2022-11-29 2025-04-15 エーエーシー テクノロジーズ （ナンジン） カンパニーリミテッド マルチ可動子ダイレクトドライブトランスミッションシステム

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JPS6254583U (https=) * 1985-09-06 1987-04-04
JPS6485562A (en) * 1987-09-28 1989-03-30 Amada Co Ltd Manufacture of primary core of linear pulse motor
JPH07107728A (ja) * 1993-10-06 1995-04-21 Mikuni Corp リニア直流モータ及びｘｙテーブル装置
JPH1143852A (ja) * 1997-05-29 1999-02-16 Y Ii Drive:Kk 自動編み機のモータ組立体
JP2001275336A (ja) * 2000-03-29 2001-10-05 Sodick Co Ltd モジュール化したコイル側リニアモータ
JP2006180645A (ja) 2004-12-24 2006-07-06 Matsushita Electric Ind Co Ltd 多軸リニアモータ、及び該多軸リニアモータを利用する実装ヘッド、部品実装装置、並びに磁力遮蔽材及び磁力遮蔽方法

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JP4399124B2 (ja) 2001-04-13 2010-01-13 Ｊｕｋｉ株式会社 電子部品実装機の装着ヘッド
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JP5253824B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 リニアモータ、部品実装装置及び部品検査装置
JP5250268B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 部品移載装置
JP5250267B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 リニアモータ及び部品移載装置
JP4669021B2 (ja) * 2008-03-28 2011-04-13 ヤマハ発動機株式会社 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置

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Publication number Priority date Publication date Assignee Title
JPS6254583U (https=) * 1985-09-06 1987-04-04
JPS6485562A (en) * 1987-09-28 1989-03-30 Amada Co Ltd Manufacture of primary core of linear pulse motor
JPH07107728A (ja) * 1993-10-06 1995-04-21 Mikuni Corp リニア直流モータ及びｘｙテーブル装置
JPH1143852A (ja) * 1997-05-29 1999-02-16 Y Ii Drive:Kk 自動編み機のモータ組立体
JP2001275336A (ja) * 2000-03-29 2001-10-05 Sodick Co Ltd モジュール化したコイル側リニアモータ
JP2006180645A (ja) 2004-12-24 2006-07-06 Matsushita Electric Ind Co Ltd 多軸リニアモータ、及び該多軸リニアモータを利用する実装ヘッド、部品実装装置、並びに磁力遮蔽材及び磁力遮蔽方法

Also Published As

Publication number Publication date
CN101911453B (zh) 2016-05-11
EP2242169A1 (en) 2010-10-20
JP4705118B2 (ja) 2011-06-22
US9634546B2 (en) 2017-04-25
EP2242169B1 (en) 2018-11-28
CN101911453A (zh) 2010-12-08
EP2242169A4 (en) 2012-01-25
JP2009171662A (ja) 2009-07-30
KR101484016B1 (ko) 2015-01-19
US20110052348A1 (en) 2011-03-03
US20140175910A1 (en) 2014-06-26
KR20100098638A (ko) 2010-09-08
US8878399B2 (en) 2014-11-04

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